Pulse shaping device and pulse shaping method using same

Abstract

The present invention relates to a pulse shaping device and a pulse shaping method using same and, more specifically, to a pulse shaping device capable of shaping various types of pulses and a pulse shaping method using same. Disclosed is a pulse shaping device (10) comprising: at least one first power module (100) connected to one terminal (L1) of a load stage (L); and at least one second power module (200) connected to the other terminal (L2) of the load stage (L) and connected to the first power module (100). The first power module (100) includes a plurality of first voltage sources (110) and a plurality of switches (S1-S4) which are independently turned on and off. The second power module (200) includes a plurality of second voltage sources (210) and a plurality of switches (S5-S8) which are independently turned on and off. The difference between a first output voltage (V1) from the first power module (200) and a second output voltage (V2) from the second power module (200) is applied to both terminals of the load stage (L) as an output voltage (Vo).

Description

Pulse shaping device and pulse shaping method using the same

[0001] The present invention relates to a pulse shaping device and a pulse shaping method using the same, and more specifically, to a pulse shaping device capable of shaping pulses of various shapes and a pulse shaping method using the same.

[0002] In general, a high-voltage pulse generation circuit is a circuit required to supply pulse power to load devices that require high voltage, such as various test equipment or plasma generation devices (PSII, etc.).

[0003] One of the conventional pulse generation circuits can be configured to apply a pulse having a certain level of voltage to a load using a switch element and a charging capacitor.

[0004] However, conventional pulse generation circuits can only apply a pulse waveform of positive voltage to a load, and cannot apply a pulse waveform of negative voltage to a load. They also have the problem of not being able to adjust the voltage level of the applied pulse in various ways or form pulse waveforms of various shapes.

[0005] The purpose of the present invention is to provide a pulse shaping device capable of shaping a pulse waveform of negative voltage or pulse waveforms of various shapes at various voltage levels, and a pulse shaping method using the same, according to the above-mentioned problems.

[0006] The present invention was created to achieve the above-described purpose of the present invention, and discloses a pulse shaping device (10) including at least one first power module (100) connected to one end (L1) of a load end (L), and at least one second power module (200) connected to the other end (L2) of the load end (L) and connected to the first power module (100).

[0007] The above first power module (100) may include a plurality of first voltage sources (110) and a plurality of switches (S1 to S4) that are turned on and off independently of each other.

[0008] The second power module (200) may include a plurality of second voltage sources (210) and a plurality of switches (S5 to S8) that are turned on and off independently of each other.

[0009] The difference between the first output voltage (V1) by the first power module (100) and the second output voltage (V2) by the second power module (200) can be applied as the output voltage (Vo) to both ends of the load terminal (L).

[0010] The above first power module (100) may be provided in multiple numbers.

[0011] The above plurality of first power modules (100) can be connected in series.

[0012] The above second power module (200) may be provided in multiple numbers.

[0013] The above plurality of second power modules (200) can be connected in series.

[0014] The above first power module (100) may include two first voltage sources (110) and four first to fourth switches (S1 to S4) arranged in each leg (LG1 to LG4) of the H-bridge circuit.

[0015] The second power module (200) may include two first voltage sources (210) and four fifth to eighth switches (S5 to S8) arranged in each leg (LG1 to LG4) of the H-bridge circuit.

[0016] The above switches (S1 to S8) may include MOSFET elements.

[0017] The first voltage source (110) and the second voltage source (210) may be direct current voltage sources.

[0018] The first voltage source (110) and the second voltage source (210) can be connected to the load terminal (L) with opposite poles.

[0019] It may further include a control unit that controls the on / off of the above switches (S1 to S8).

[0020] The voltage magnitudes of each of the plurality of first voltage sources (110) and the plurality of second voltage sources (210) may be the same.

[0021] The pulse shaping device according to the present invention and the pulse shaping method using the same have the advantage of being able to shape a pulse waveform of negative voltage or pulse waveforms of various shapes at various voltage levels.

[0022] FIG. 1 is a drawing showing a pulse shaping device according to one embodiment of the present invention.

[0023] Fig. 2 is a graph showing one embodiment of a control method of switches provided in the pulse shaping device of Fig. 1 and the waveform of the output voltage applied to the load terminal accordingly.

[0024] Fig. 3 is a graph showing another embodiment of a control method of switches provided in the pulse shaping device of Fig. 1 and the waveform of the output voltage applied to the load terminal accordingly.

[0025] Fig. 4 is a drawing showing a modified example of the pulse shaping device of Fig. 1.

[0026] Figures 5a to 5d are graphs showing examples of waveforms of output voltage formed in the pulse forming device of the present invention.

[0027] Hereinafter, a pulse shaping device according to the present invention will be described with reference to the attached drawings.

[0028] A pulse shaping device (10) according to the present invention is a device that shapes a pulse waveform of an output voltage (Vo) applied to a load terminal (L), and includes at least one first power module (100) connected to one end (L1) of the load terminal (L), and at least one second power module (200) connected to the other end (L2) of the load terminal (L) and connected to the first power module (100).

[0029] The output voltage (Vo) applied to both ends (L1, L2) of the load end (L) of the pulse forming device (10) can be formed by the first power module (100) and the second power module (200).

[0030] The above first power module (100) is connected to one end (L1) of a load terminal (L) and is a power supply unit for applying a first output voltage (V1) to both ends (L1, L2) of the load terminal (L), and can be configured in various ways.

[0031] For example, the first power module (100) may include a plurality of first voltage sources (110) and a plurality of switches (S1 to S4) that are turned on and off independently of each other, as illustrated in FIG. 1.

[0032] The above plurality of first voltage sources (110) are direct current voltage sources, and the maximum voltage output by the plurality of first voltage sources (110) may be Va.

[0033] If the maximum voltage output by the plurality of first voltage sources (110) is Va, the output voltage of each first voltage source (110) is the same, and the number of first voltage sources (110) is K, the output voltage of each first voltage source (110) can be Va / K.

[0034] For example, as shown in FIG. 1, if the first power module (100) includes two first voltage sources (110), the output voltage of each first voltage source (110) may be Va / 2.

[0035] However, the scope of the present invention is not limited thereto, and it is possible for at least one of the plurality of first voltage sources (110) to have an output voltage configured differently from that of other first voltage sources (110).

[0036] The above multiple switches (S1 to S4) are switching elements that are turned on and off independently of each other and can be configured in various ways.

[0037] For example, the switches (S1 to S4) above are power semiconductor devices, and may be various semiconductor devices such as SCR (Thyristor), TRIAC (Triode AC Switch), GTO (Gate turn-off thyristor), IGBT (Insulated Gate Bidirectional Transistor), MOSFET (Metal Oxide Semiconductor Field Effect Transistor), etc., and are not limited to a specific device.

[0038] For example, the switches (S1 to S4) are illustrated as MOSFETs in FIG. 1 as semiconductor switch elements, but are not limited thereto. If the switches (S1 to S4) are configured as MOSFET switches, they may have an advantage in that pulse rise and fall times can be reduced compared to IGBTs.

[0039] When the above switches (S1 to S4) are MOSFET elements, three terminals of a gate (G), a drain (D), and a source (S) are formed in the switches (S1 to S4), and can be turned on and off by a switch driving signal (Vg) applied to the gate (G).

[0040] As another example, when the switches (S1 to S4) are IGBT elements, three terminals of a gate (G), a collector (C), and an emitter (E) are formed in the switches (S1 to S4), and can be turned on and off by a switch driving signal (Vg) applied to the gate (G).

[0041] The above-described plurality of switches (S1 to S4) can be configured to be independently turned on and off.

[0042] Meanwhile, the first power module (100) may be configured as an H-bridge circuit structure. That is, the plurality of switches (S1 to S4) may be arranged in each leg (LG1 to LG4) of the H-bridge circuit.

[0043] Specifically, the first power module (100) may include four switches (S1 to S4), i.e., first to fourth switches (S1 to S4), and the first to fourth switches (S1 to S4) may be respectively arranged in four legs (LG1 to LG4) of the H-bridge circuit.

[0044] As illustrated in FIG. 1, a first switch (S1) may be placed in a first leg (LG1) of an H-bridge circuit, a second switch (S2) may be placed in a second leg (LG2) of the H-bridge circuit, a third switch (S3) may be placed in a third leg (LG3) of the H-bridge circuit, and a fourth switch (S4) may be placed in a fourth leg (LG4) of the H-bridge circuit.

[0045] That is, the first to fourth switches (S1 to S4) can be placed in each leg (LG1 to LG4) centered on the common node (C) of the H bridge circuit.

[0046] At this time, the first switch (S1) and the third switch (S3) can be electrically connected between one end (L1) of the load end (L) and the common node (C) of the H-bridge circuit, and between one end (L1) of the load end (L) and the common node (C).

[0047] Similarly, the second switch (S2) and the fourth switch (S4) can be electrically connected between the common node (C) of the H-bridge circuit and the second power module (200) described below or another first power module (100) connected in series, and between the common node (C) and the second power module (200) described below or another first power module (100) connected in series.

[0048] In addition, the drain (D) of the first switch (S1) is connected to one end (L1) of the load terminal (L), and the third switch (S3) can be connected to one end (L1) of the load terminal (L) at the source (S) terminal, unlike the first switch (S1).

[0049] Similarly, the drain (D) of the second switch (S2) is electrically connected to the common node (C) side, and the fourth switch (S4) can be connected to the common node (C) side at the source (S) terminal, unlike the second switch (S2).

[0050] Meanwhile, when the first power module (100) includes two first voltage sources (110), as shown in FIG. 1, one of the two first voltage sources (110) may be placed between the first switch (S1) and the common node (C), and the other first voltage source (110) may be placed between the second switch (S2) and the common node (C).

[0051] Accordingly, the first switch (S1) and the second switch (S2) are switches connected in series with the first voltage source (110), and when the first switch (S1) and the second switch (S2) are turned on, the first output voltage (V1) can be applied to the load terminal (L).

[0052] The above second power module (200) is connected to the other end (L2) of the load end (L) and is a power module connected to the first power module (100), and various configurations are possible.

[0053] The above second power module (200) is connected to the other end (L2) of the load end (L) and is a power supply unit for applying a second output voltage (V2) to both ends (L1, L2) of the load end (L), and can be configured in various ways.

[0054] For example, the second power module (200) may include a plurality of second voltage sources (110) and a plurality of switches (S5 to S8) that are turned on and off independently of each other, as illustrated in FIG. 1.

[0055] The above plurality of second voltage sources (210) are direct current voltage sources, and the maximum voltage output by the plurality of second voltage sources (210) may be Vb.

[0056] If the maximum voltage output by the plurality of second voltage sources (210) is Vb, the output voltage of each second voltage source (210) is the same, and the number of second voltage sources (210) is K, the output voltage of each second voltage source (210) can be Vb / K.

[0057] For example, as illustrated in FIG. 1, when the second power module (200) includes two second voltage sources (210), the output voltage of each second voltage source (210) may be Vb / 2.

[0058] However, the scope of the present invention is not limited thereto, and it is possible for at least one of the plurality of second voltage sources (210) to have an output voltage configured differently from that of the other second voltage sources (210).

[0059] The maximum voltage Vb of the second power module (200) may be the same as the maximum voltage Va of the first power module (100), but is not limited thereto, and the maximum voltage Vb of the second power module (200) may be different from the maximum voltage Va of the first power module (100).

[0060] The above multiple switches (S5 to S8) are switching elements that are turned on and off independently of each other and can be configured in various ways.

[0061] For example, the above switches (S5 to S8) are power semiconductor devices, and may be various semiconductor devices such as SCR (Thyristor), TRIAC (Triode AC Switch), GTO (Gate turn-off thyristor), IGBT (Insulated Gate Bidirectional Transistor), MOSFET (Metal Oxide Semiconductor Field Effect Transistor), etc., and are not limited to a specific device.

[0062] For example, the switches (S5 to S8) are illustrated as MOSFETs in FIG. 1 as semiconductor switch elements, but are not limited thereto. If the switches (S1 to S4) are configured as MOSFET switches, they may have an advantage in that pulse rise and fall times can be reduced compared to IGBTs.

[0063] When the above switches (S5 to S8) are MOSFET elements, three terminals of a gate (G), a drain (D), and a source (S) are formed in the switches (S5 to S8), and can be turned on and off by a switch driving signal (Vg) applied to the gate (G).

[0064] As another example, when the switches (S5 to S8) are IGBT elements, three terminals of a gate (G), a collector (C), and an emitter (E) are formed in the switches (S5 to S8), and can be turned on and off by a switch driving signal (Vg) applied to the gate (G).

[0065] The above-described plurality of switches (S5 to S8) can be configured to be turned on and off independently of each other.

[0066] Meanwhile, the second power module (200) may be configured as an H-bridge circuit structure. That is, the plurality of switches (S5 to S8) may be arranged in each leg (LG1 to LG4) of the H-bridge circuit.

[0067] Specifically, the second power module (200) may include four switches (S5 to S8), i.e., fifth to eighth switches (S5 to S8), and the fifth to eighth switches (S5 to S8) may be respectively arranged in four legs (LG1 to LG4) of the H-bridge circuit.

[0068] As illustrated in FIG. 1, the fifth switch (S5) may be placed in the first leg (LG1) of the H-bridge circuit, the sixth switch (S6) may be placed in the second leg (LG2) of the H-bridge circuit, the seventh switch (S7) may be placed in the third leg (LG3) of the H-bridge circuit, and the eighth switch (S8) may be placed in the fourth leg (LG4) of the H-bridge circuit.

[0069] That is, the fifth to eighth switches (S1 to S4) can be placed in each leg (LG1 to LG4) centered on the common node (C) of the H bridge circuit.

[0070] At this time, the fifth switch (S5) and the seventh switch (S7) can be electrically connected between the other end (L2) of the load end (L) and the common node (C) of the H-bridge circuit, and between the other end (L2) of the load end (L) and the common node (C).

[0071] Similarly, the sixth switch (S6) and the eighth switch (S8) can be electrically connected between the common node (C) of the H-bridge circuit and the first power module (200) or another second power module (100) connected in series, and between the common node (C) and the second power module (200) or another second power module (200) connected in series.

[0072] In addition, the drain (D) of the fifth switch (S5) is connected to the other end (L2) of the load terminal (L), and unlike the fifth switch (S5), the seventh switch (S7) can be connected to the other end (L2) of the load terminal (L) at the source (S) end.

[0073] Similarly, the drain (D) of the sixth switch (S6) is electrically connected to the common node (C) side, and the eighth switch (S8) can be connected to the common node (C) side at the source (S) terminal, unlike the sixth switch (S6).

[0074] Meanwhile, when the second power module (200) includes two second voltage sources (210), as shown in FIG. 1, one of the two second voltage sources (210) may be placed between the fifth switch (S5) and the common node (C), and the other second voltage source (210) may be placed between the sixth switch (S6) and the common node (C).

[0075] Accordingly, the fifth switch (S5) and the sixth switch (S6) are switches connected in series with the second voltage source (210), and when the fifth switch (S5) and the sixth switch (S6) are turned on, the second output voltage (V2) can be applied to the load terminal (L).

[0076] Meanwhile, the first power module (100) described above may be provided in multiple numbers, and the multiple first power modules (100) may be connected in series, as illustrated in FIG. 4.

[0077] Likewise, the second power module (200) described above may also be provided in multiple numbers, and the multiple second power modules (200) may be connected in series as shown in FIG. 4.

[0078] In the case where the first power module (100) and the second power module (200) are provided in multiple numbers, the number of first power modules (100) may be provided in the same number as the number of second power modules (200).

[0079] Meanwhile, the first to eighth switches (S1 to S8) may each include a capacitor (C) connected in parallel as an energy storage device. In addition, the first to eighth switches (S1 to S8) may each include a diode connected in parallel, thereby ensuring the reliability of the on / off operation.

[0080] At this time, the pulse forming device (10) may further include a control unit for controlling the on / off of the first to eighth switches (S1 to S8), respectively.

[0081] Referring again to FIG. 1, the first voltage source (110) and the second voltage source (210) can be connected to the load terminal (L) with opposite poles.

[0082] Accordingly, the difference between the first output voltage (V1) by the first power module (100) and the second output voltage (V2) by the second power module (200) can be applied as the output voltage (Vo) to both ends of the load section (L).

[0083] According to the on / off operation of the first to eighth switches (S1 to S8), the first output voltage (V1) and the second output voltage (V2) can be formed into various voltage levels, and since the difference between the first output voltage (V1) and the second output voltage (V2) is applied to both ends (L1, L2) of the load terminal (L), a waveform of a negative output voltage (Vo) or a waveform of various voltage levels can be applied to the load terminal (L).

[0084] FIG. 2 is a graph showing the first output voltage (V1), the second output voltage (V2) output from the pulse shaping device (100) of FIG. 1, and the output voltage (Vo) applied to the load terminal (L) over time, and shows the pulse shape of the output voltage (Vo) applied to the load terminal (L).

[0085] In FIG. 2, Sg1 illustrates a gate signal applied to the first power module (100). An example is illustrated in which a driving signal is applied to the first switch (S1) and the second switch (S2) of the first power module (100) in the first section (A1) from t0 to t1, a driving signal is applied to the third switch (S3) and the fourth switch (S4) of the first power module (100) in the second section (A2) from t1 to t2, and again a driving signal is applied to the first switch (S1) and the second switch (S2) of the first power module (100) in the third section (A3) from t2 to t3.

[0086] Accordingly, in the first section (A1), the first switch (S1) and the second switch (S2) can be turned on simultaneously, and in the second section (A2), the third switch (S3) and the fourth switch (S4) can be turned on simultaneously. In addition, the first section (A1) and the second section (A2) can be repeated (i.e., the gate signal (Sg1) of the first section (A1) and the gate signal (Sg1) of the third section (A3) are the same), and at this time, the repetition period can be Ts.

[0087] According to the gate signal (Sg1) applied to the first power module (100), the first to fourth switches (S1 to S4) can be turned on and off to output the first output voltage (V1). Referring to Fig. 2, since both the first switch (S1) and the second switch (S2) are turned on in the first section (A1), the first output voltage (V1) can be the maximum voltage Va.

[0088] On the other hand, in the second section (A2), the third switch (S3) and the fourth switch (S4) are turned on, so the first output voltage (V1) can be 0.

[0089] The third section (A3) is a repeating section identical to the first section (A1), and since both the first switch (S1) and the second switch (S2) are turned on in the third section (A3), the first output voltage (V1) can be the maximum voltage Va.

[0090] Similarly, in FIG. 2, Sg2 illustrates a gate signal applied to the second power module (200), and illustrates an example in which a driving signal is applied to the fifth switch (S5) and the sixth switch (S6) of the second power module (200) in the first section (A1) from t0 to t1, a driving signal is applied to the seventh switch (S7) and the eighth switch (S8) of the second power module (200) in the second section (A2) from t1 to t2, and again, a driving signal is applied to the fifth switch (S5) and the sixth switch (S6) of the second power module (200) in the third section (A3) from t2 to t3.

[0091] Accordingly, the fifth switch (S5) and the sixth switch (S6) can be turned on simultaneously in the first section (A1), and the seventh switch (S7) and the eighth switch (S8) can be turned on simultaneously in the second section (A2). In addition, the first section (A1) and the second section (A2) can be repeated (i.e., the gate signal (Sg2) of the first section (A1) and the gate signal (Sg2) of the third section (A3) are the same), and at this time, the repetition period can be Ts.

[0092] Depending on the gate signal (Sg2) applied to the second power module (200), the fifth to eighth switches (S5 to S8) may be turned on and off to output the second output voltage (V2). Referring to Fig. 2, since both the fifth switch (S5) and the sixth switch (S6) are turned on in the first section (A1), the second output voltage (V2) may be the maximum voltage, Vb.

[0093] On the other hand, in the second section (A2), the seventh switch (S7) and the eighth switch (S8) are turned on, so the second output voltage (V2) can be 0.

[0094] The third section (A3) is a repeating section identical to the first section (A1), and since both the fifth switch (S5) and the sixth switch (S6) are turned on in the third section (A3), the second output voltage (V2) can be the maximum voltage Vb. Here, the maximum voltage Vb of the second output voltage (V2) can be the same as the maximum voltage Va of the first output voltage (V1).

[0095] Referring to FIG. 1, since the first output voltage (V1) is equal to the sum of the second output voltage (V2) and the output voltage (Vo) applied to the load terminal (L), the output voltage (Vo) applied to both ends (L1, L2) of the load terminal (L) may be the first output voltage (V1) minus the second output voltage (V2). That is, the difference between the first output voltage (V1) by the first power module (100) and the second output voltage (V2) by the second power module (200) may be applied as the output voltage (Vo) to both ends of the load terminal (L).

[0096] Referring again to FIG. 2, the final output voltage (Vo) is the first output voltage (V1) minus the second output voltage (V2), and can be Va in the first section (A1), -Vb in the second section (A2), and Va again in the third section (A3). The pulse shaping device (10) according to the present invention can combine the first power module (100) and the second power module (200) to enable the negative output voltage (Vo) to be applied to the load terminal (L).

[0097] Next, FIG. 3 is a graph showing the first output voltage (V1), the second output voltage (V2) output from the pulse shaping device (100) of FIG. 1, and the output voltage (Vo) applied to the load terminal (L) over time, and shows another example of the pulse shape of the output voltage (Vo) applied to the load terminal (L).

[0098] In FIG. 3, Sg1 illustrates a gate signal applied to the first power module (100). In the first section (A1) of t0 to t1, a driving signal is applied to the first switch (S1) of the first power module (100), in the second section (A2) of t1 to t2, a driving signal is applied to the first switch (S1) and the second switch (S2) of the first power module (100), in the third and fourth sections (A3, A4) of t2 to t4, a driving signal is applied to the third switch (S3) and the fourth switch (S4) of the first power module (100), and again in the fifth section (A5) of t4 to t5, a driving signal is applied to the first switch (S1) of the first power module (100), and in the sixth section (A6) of t5 to t6, An example is shown in which a driving signal is applied to the first switch (S1) and the second switch (S2).

[0099] Accordingly, in the first section (A1), the first switch (S1) may be turned on, in the second section (A2), the first switch (S1) and the second switch (S2) may be turned on simultaneously, in the third and fourth sections (A3, 4), the third switch (S3) and the fourth switch (S4) may be turned on simultaneously, in the fifth section (A5), the first switch (S1) may be turned on, and in the sixth section (A6), the first switch (S1) and the second switch (S2) may be turned on simultaneously. In addition, the first section (A1) to the fourth section (A4) may be repeated (i.e., the gate signal (Sg1) of the first section (A1) and the second section (A2) and the gate signal (Sg1) of the fifth section (A5) and the sixth section (A6) are the same), and at this time, the repetition period may be Ts.

[0100] According to the gate signal (Sg1) applied to the first power module (100), the first to fourth switches (S1 to S4) may be turned on and off to output the first output voltage (V1). Referring to FIG. 3, in the first section (A1), the first switch (S1) is turned on, so the first output voltage (V1) may be Va2 (wherein, Va2 is the output voltage of the first voltage source (110) connected in series with the first switch (S1), and in the second section (A2), both the first switch (S1) and the second switch (S2) are turned on, so the first output voltage (V1) may be Va1 (wherein, Va1 is the sum of the output voltages of the first voltage sources (110) connected in series with the first and second switches (S1, S2), and Va1 may be the maximum voltage of the first output voltage (V1).

[0101] On the other hand, in the third and fourth sections (A3, A4), the third switch (S3) and the fourth switch (S4) are turned on, so the first output voltage (V1) can be 0.

[0102] The fifth and sixth sections (A5, A6) are the same repetition sections as the first and second sections (A1, A2). In the fifth section (A5), since the first switch (S1) is turned on, the first output voltage (V1) can be Va2, and in the sixth section (A6), since both the first switch (S1) and the second switch (S2) are turned on, the first output voltage (V1) can be the maximum voltage, Va1.

[0103] Similarly, in FIG. 3, Sg2 illustrates a gate signal applied to the second power module (200), and an example is shown in which a driving signal is applied to the seventh switch (S7) and the eighth switch (S8) of the second power module (200) in the first and second sections (A1, A2) from t0 to t2, a driving signal is applied to the fifth switch (S5) of the second power module (200) in the third section (A3) from t2 to t3, a driving signal is applied to the fifth switch (S5) and the sixth switch (S6) in the fourth section (A4) from t3 to t4, and again a driving signal is applied to the seventh switch (S7) and the eighth switch (S8) in the fifth and sixth sections (A6) from t4 to t6.

[0104] Accordingly, the seventh switch (S7) and the eighth switch (S8) can be turned on simultaneously in the first and second sections (A1, A2), the fifth switch (S7) can be turned on simultaneously in the third section (A3), and the fifth switch (S5) and the sixth switch (S6) can be turned on simultaneously in the fourth section (A4). In addition, the first section (A1) to the fourth section (A4) can be repeated (i.e., the gate signal (Sg2) of the first and second sections (A1, A2) and the gate signal (Sg2) of the fifth and sixth sections (A5, A6) are the same), and at this time, the repetition period can be Ts.

[0105] Depending on the gate signal (Sg2) applied to the second power module (200), the fifth to eighth switches (S5 to S8) may be turned on and off to output the second output voltage (V2). Referring to Fig. 3, since both the seventh switch (S7) and the eighth switch (S8) are turned on in the first and second sections (A1, A2), the second output voltage (V2) may be 0.

[0106] On the other hand, in the third section (A3), since the fifth switch (S5) is turned on, the second output voltage (V2) may be the voltage Vb2 of the second voltage source (210) connected in series with the fifth switch (S5). In the fourth section (A4), since the fifth switch (S5) and the sixth switch (S6) are turned on simultaneously, the second output voltage (V2) may be the sum Vb1 of the voltages of the second voltage sources (210) connected in series with the fifth switch (S5) and the sixth switch (S6). Here, Vb1 may be the maximum voltage of the second output voltage (V2).

[0107] The fifth and sixth sections (A5, A6) are the same repetition sections as the first and second sections (A1, A2), and since both the seventh switch (S7) and the eighth switch (S8) are turned on in the fifth and sixth sections (A5, A6), the second output voltage (V2) can be 0.

[0108] Referring back to FIG. 3, the final output voltage (Vo) is the first output voltage (V1) minus the second output voltage (V2), and may be Va2 in the first section (A1), Va1 (maximum value of positive voltage) in the second section (A2), -Vb2 in the third section (A3), and -Vb1 (maximum value of negative voltage) in the fourth section (V4). The pulse shaping device (10) according to the present invention can combine the first power module (100) and the second power module (200) to enable the negative output voltage (Vo) to be applied to the load terminal (L), and can individually control the on / off of each switch (S1 to S8) to form an output voltage (Vo) waveform of various voltage levels.

[0109] It is obvious that the on / off control sequence of the switches (S1 to S8) in FIGS. 2 and 3 is exemplary and can be varied to obtain a desired waveform as needed. In addition, the on / off control method of the switches (S1 to S8) to obtain the same waveform can also be varied. That is, the output waveform of FIG. 2 or 3 can be implemented in the same manner through on / off control of the switches (S1 to S8) in other ways.

[0110] Next, Fig. 4 is an example in which a first power module (100) and a second power module (200) are each provided in multiple numbers, and an output voltage (Vo) of various voltage levels at a higher voltage than that of Fig. 1 can be applied to the load terminal (L).

[0111] For example, waveforms of various forms of output voltage (Vo) that can be formed in the pulse forming device (10) illustrated in FIG. 4 are illustrated in FIGS. 5A to 5D. The pulse forming device (10) according to the present invention can enable various forms of output voltage (Vo) to be applied to the load terminal (L), such as a form in which the output voltage (Vo) increases or decreases (referring to FIG. 5A, the output voltage (Vo) can be stepwise increased or decreased according to the switch on / off operation), a square pulse shape, or a DC offset.

[0112] In addition, the present invention discloses a pulse forming method using the pulse forming device described above, and the pulse forming method may include a switching control step of controlling on / off operations of a plurality of switches (S1 to S4) included in a first power module (100) of the pulse forming device and a plurality of switches (S5 to S8) included in a second power module (200), and an output step of outputting a difference between a first output voltage (V1) by the first power module (100) and a second output voltage (V2) by the second power module (200) as an output voltage (Vo) to be applied to a load terminal (L).

[0113]

[0114] The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the technical ideas of the present invention described above and the technical ideas underlying them are all included in the scope of the present invention.

Claims

1. It includes one or more first power modules (100) connected to one end (L1) of the load (L), and one or more second power modules (200) connected to the other end (L2) of the load (L) and connected to the first power module (100). The above first power module (100) includes a plurality of first voltage sources (110) and a plurality of switches (S1 to S4) that are turned on and off independently of each other. The above second power module (200) includes a plurality of second voltage sources (210) and a plurality of switches (S5 to S8) that are turned on and off independently of each other. A pulse shaping device (10) characterized in that the difference between the first output voltage (V1) by the first power module (100) and the second output voltage (V2) by the second power module (200) is applied as an output voltage (Vo) to both ends of the load terminal (L).

2. In claim 1, The above first power module (100) is provided in multiples, A pulse shaping device (10) characterized in that the plurality of first power modules (100) are connected in series.

3. In claim 1, The above second power module (200) is provided in multiples. A pulse shaping device (10) characterized in that the above plurality of second power modules (200) are connected in series.

4. In claim 1, A pulse shaping device (10), characterized in that the first power module (100) includes two first voltage sources (110) and four first to fourth switches (S1 to S4) arranged in each leg (LG1 to LG4) of an H-bridge circuit.

5. In claim 1, A pulse shaping device (10), characterized in that the second power module (200) includes two first voltage sources (210) and four fifth to eighth switches (S5 to S8) arranged in each leg (LG1 to LG4) of the H-bridge circuit.

6. In claim 1, A pulse shaping device (10) characterized in that the above switches (S1 to S8) include MOSFET elements.

7. In claim 1, The above first voltage source (110) and the above second voltage source (210) are direct current voltage sources, A pulse shaping device (10), characterized in that the first voltage source (110) and the second voltage source (210) are connected to the load terminal (L) with opposite poles.

8. In claim 1, A pulse forming device (10) characterized by further including a control unit that controls the on / off of the above switches (S1 to S8).

9. In claim 1, A pulse shaping device (10) in which the voltage magnitudes of each of the plurality of first voltage sources (110) and the plurality of second voltage sources (210) are the same.

10. A pulse shaping method using a pulse shaping device (10) according to any one of claims 1 to 10.

Images