Two-dimensional arc-arrayed six-degree-of-freedom magnetic levitation micro-motion stage and device transfer device

Abstract

The present application relates to the technical field of magnetic levitation, and discloses a two-dimensional arc-arrayed six-degree-of-freedom magnetic levitation micro-motion stage and a device transfer device. The two-dimensional arc-arrayed six-degree-of-freedom magnetic levitation micro-motion stage comprises: a stator, the stator being a planar structure; a rotor, the rotor being a planar structure, and the rotor and the stator being arranged in parallel; a magnet array, the magnet array comprising a plurality of radially and circularly arranged fan-shaped magnets, and the fan-shaped magnets being arranged on the rotor; at least three first windings, the three first windings being arranged on the stator; and at least three second windings, the three second windings being arranged on the stator. According to the described solution provided by the present application, since the rotor and the stator are both planar structures, the rotor and the stator are arranged in parallel, the magnet array is arranged on the rotor, and the first windings and the second windings are both arranged on the stator, the whole micro-motion stage has a lower gravity center and is suitable for high-speed motion, and the space utilization rate of the whole micro-motion table is high, thereby effectively ensuring the thrust density.

Description

Two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage and device transfer device Technical Field

[0001] This application relates to the field of magnetic levitation technology, and more particularly to a two-dimensional arc-shaped array six-degree-of-freedom magnetic levitation micro-motion stage and device transfer device. This application claims priority to Chinese patent application number 202311544432.4, filed with the State Intellectual Property Office of China on November 20, 2023, entitled "Two-dimensional arc-shaped array six-degree-of-freedom magnetic levitation micro-motion stage and device transfer device," the entire contents of which are incorporated herein by reference. Background Art

[0002] Multi-degree-of-freedom micro-motion systems are widely used in high-precision equipment. Their travel range typically ranges from micrometers to millimeters, with precision reaching up to nanometers. Common multi-degree-of-freedom magnetic levitation micro-motion systems typically consist of multiple voice coil motors (also known as Lorentz motors), each responsible for controlling a single degree of freedom.

[0003] At present, similar multi-degree-of-freedom magnetic levitation micro-movements are usually a combination structure of linear voice coil motors.

[0004] However, this structure requires a large air gap design to avoid collision between the stator and the mover during multi-degree-of-freedom movement; and a large air gap design will inevitably reduce the thrust of the linear voice coil motor, making it unable to meet the requirements of high load and high movement speed. Summary of the Invention

[0005] The present application provides a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage, which can not only realize six-degree-of-freedom control, but also meet the requirements of high load and high movement speed.

[0006] In a first aspect, the present application provides a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage, comprising:

[0007] A stator having a planar structure;

[0008] A mover, the mover having a planar structure and arranged parallel to the stator;

[0009] A magnet array, the magnet array comprising a plurality of sector magnets arranged in a radial annular shape, the sector magnets being disposed on the mover;

[0010] At least three first windings, the three first windings being arranged on the stator and used for driving the fine motion stage to move in the Z, Rx and Ry directions;

[0011] At least three second windings are provided on the stator for driving the fine motion stage to move in the X, Y and Rz directions.

[0012] In one embodiment, the sector magnet includes a first radial array, a first circumferential array, a second radial array, and a second circumferential array sequentially arranged along the circumferential direction;

[0013] The magnetization directions of the first radial array and the second radial array are both radial, and the magnetization directions of the first radial array and the second radial array are opposite;

[0014] The magnetization directions of the first circumferential array and the second circumferential array are both circumferential, and the magnetization directions of the first circumferential array and the second circumferential array are opposite.

[0015] In one embodiment, the first radial array, the first circumferential array, the second radial array, and the second circumferential array have the same angle along the circumferential direction.

[0016] In one embodiment, the first radial array includes a first permanent magnet, a second permanent magnet, a third permanent magnet, a fourth permanent magnet, a fifth permanent magnet, and a sixth permanent magnet arranged in sequence;

[0017] The magnetization directions of the first permanent magnet, the third permanent magnet, and the fifth permanent magnet are all axial, and the magnetization directions of the first permanent magnet, the third permanent magnet, and the fifth permanent magnet are opposite in sequence;

[0018] The magnetization directions of the second permanent magnet, the fourth permanent magnet, and the sixth permanent magnet are all radial, and the magnetization directions of the second permanent magnet, the fourth permanent magnet, and the sixth permanent magnet are opposite to each other.

[0019] In one embodiment, the first permanent magnet, the second permanent magnet, the third permanent magnet, the fourth permanent magnet, the fifth permanent magnet, and the sixth permanent magnet have the same angle along the circumferential direction.

[0020] In one embodiment, the second circumferential array includes a thirteenth permanent magnet, a fourteenth permanent magnet, and a fifteenth permanent magnet;

[0021] The thirteenth permanent magnet and the first permanent magnet are located on the same circumference, the fourteenth permanent magnet and the third permanent magnet are located on the same circumference, and the fifteenth permanent magnet and the fifth permanent magnet are located on the same circumference;

[0022] The magnetization directions of the thirteenth permanent magnet, the fourteenth permanent magnet, and the fifteenth permanent magnet are all circumferential, and the magnetization directions of the thirteenth permanent magnet, the fourteenth permanent magnet, and the fifteenth permanent magnet are opposite in sequence.

[0023] In one embodiment, the thirteenth permanent magnet, the fourteenth permanent magnet, and the fifteenth permanent magnet have the same angle along the circumferential direction.

[0024] In one embodiment, the angle of the sector magnet along the circumferential direction is adjustable.

[0025] In one embodiment, the invention further comprises a torque winding, wherein the torque winding is provided on the stator.

[0026] In a second aspect, the present application provides a device transfer apparatus, comprising a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage as described in any one of the embodiments of the present application, and the first winding and the second winding are both circular arc-shaped planar structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] FIG1 is a schematic structural diagram of a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage provided by an embodiment of the present application;

[0028] FIG2 is a schematic structural diagram of a two-dimensional arc array six-DOF magnetic levitation micro-motion stage provided in one embodiment of the present application;

[0029] FIG3 is a schematic diagram of the magnet array in FIG1 ;

[0030] FIG4 is a force diagram of FIG3 ;

[0031] FIG5 is another force diagram of FIG3;

[0032] FIG6 is a schematic cross-sectional view of point A in FIG5 ;

[0033] FIG7 is a schematic cross-sectional view of point B in FIG5 ;

[0034] FIG8 is a schematic cross-sectional view of point C in FIG5 ;

[0035] FIG9 is a schematic structural diagram of another two-dimensional arc array six-DOF magnetic levitation micro-motion stage provided by one embodiment of the present application;

[0036] FIG10 is a schematic diagram of the magnet array in FIG9 ;

[0037] FIG11 is a force diagram of FIG10 ;

[0038] FIG12 is a schematic cross-sectional view of point A in FIG11 ;

[0039] FIG13 is a schematic cross-sectional view at point B in FIG11 ;

[0040] FIG14 is a schematic cross-sectional view of point C in FIG11 .

[0041] Legend

[0042] 10. First winding; 20. Second winding; 30. Magnet array; 301. First radial array; 3011. First permanent magnet; 3012. Second permanent magnet; 3013. Third permanent magnet; 3014. Fourth permanent magnet; 3015. Fifth permanent magnet; 3016. Sixth permanent magnet; 302. First circumferential array; 303. Second radial array; 3031. Seventh permanent magnet; 3032. Eighth permanent magnet; 3033. Ninth permanent magnet; 3034. Tenth permanent magnet; 3035. Eleventh permanent magnet; 3036. Twelfth permanent magnet; 304. Second circumferential array; 3041. Thirteenth permanent magnet; 3042. Fourteenth permanent magnet; 3043. Fifteenth permanent magnet; 40. Torque winding; 11. Stator; 12. Mover. Modes for Carrying Out the Invention

[0043] The following describes in detail embodiments of the present application, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0044] In the description of this application, it should be understood that the terms "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0045] To facilitate a clear description of the technical solutions of the embodiments of the present application, in the embodiments of the present application, the words "first" and "second" are used to distinguish between identical or similar items with substantially the same functions and effects. For example, the first limiting portion and the second limiting portion are merely used to distinguish between different limiting portions and do not limit their order. Those skilled in the art will understand that the words "first" and "second" do not limit the quantity or execution order, and the words "first" and "second" do not necessarily mean that they are different.

[0046] It should be noted that, in this application, words such as "in one embodiment" or "for example" are used to indicate examples, illustrations, or explanations. Any embodiment or design described in this application as "in one embodiment" or "for example" should not be interpreted as being preferred or advantageous over other embodiments or designs. Rather, the use of words such as "in one embodiment" or "for example" is intended to present the relevant concepts in a concrete manner.

[0047] In this application, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed or detachable connections, integration, or contact connections; they can refer to mechanical or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0048] In order to make the purpose, technical solutions and advantages of this application more clear, this application is further described in detail below with reference to the accompanying drawings and embodiments.

[0049] The present application proposes a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage.

[0050] Referring to Figures 1 to 5, Figure 1 is a structural schematic diagram of a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage provided by the present application; Figure 2 is a structural schematic diagram of a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage provided by an embodiment of the present application; Figure 3 is a schematic diagram of the magnetic steel array in Figure 1; Figure 4 is a force schematic diagram of Figure 3; Figure 5 is another force schematic diagram of Figure 3; Figure 6 is a cross-sectional schematic diagram at A in Figure 5; Figure 7 is a cross-sectional schematic diagram at B in Figure 5; and Figure 8 is a cross-sectional schematic diagram at C in Figure 5.

[0051] In an embodiment of the present application, as shown in Figure 1 and in combination with Figure 2, the two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage includes: a stator 11, a mover 12, a magnet array 30, at least three first windings 10 and at least three second windings 20, wherein the stator 11 and the mover 12 are both planar structures, and the mover 12 is arranged parallel to the stator 11, the magnet array 30 includes a plurality of radially annularly arranged sector magnets, the sector magnets are arranged on the mover 12, the three first windings 10 are arranged on the stator 11, and are used to drive the micro-motion stage to move in the Z, Rx and Ry directions, and the three second windings 20 are arranged on the stator 11 to drive the micro-motion stage to move in the X, Y and Rz directions.

[0052] In the present application, the number of first windings 10 can be three, four, or six, and the number of second windings 20 can be three, five, or six, and so on. The present application does not impose any restrictions on the number of first windings 10 and second windings 20, and the number can be designed based on actual needs. The following description takes three first windings 10 and three second windings 20 as an example.

[0053] Exemplarily, as shown in FIG1 , the three first windings 10 and the three second windings 20 in the present application are designed to be spaced in sequence along the circumferential direction. Among them, the three first windings 10 are connected end to end to form a triangular structure. After the three first windings 10 are energized, they will generate a Lorentz force in the Z-axis direction. Referring to FIG1 , the forces generated by the three first windings 10 in the clockwise direction are set to be FZ1, FZ2 and FZ3 respectively. According to the principle of six-degree-of-freedom magnetic levitation, when the output directions of FZ1, FZ2 and FZ3 are the same (here, the output directions of FZ1, FZ2 and FZ3 are the same means that the output directions of FZ1, FZ2 and FZ3 are all vertically upward or vertically downward, otherwise, the output directions of FZ1, FZ2 and FZ3 are different), a thrust in the Z-axis direction will be generated, thereby realizing the motion of the micro-motion stage in the Z direction. When FZ1 and FZ3 have different output directions and FZ2 does not have any output, a torque around the X-axis is generated, thereby rotating the fine-motion stage around the X-axis, that is, achieving movement in the Rx direction. When FZ2 has different output directions from FZ1 and FZ3, a torque around the Y-axis is generated, thereby rotating the fine-motion stage around the Y-axis, that is, achieving movement in the Ry direction.

[0054] At the same time, the three second windings 20, when connected end to end, also form a triangular structure. When energized, the three second windings 20 will generate a radial force Fr. Referring to FIG1 , the forces generated by the three second windings 20 in the clockwise direction are set as Fr1, Fr2, and Fr3, respectively. When one of the second windings 20 is positioned on the torque winding 40 shown in FIG4 , as shown in FIG4 and FIG5 , under the action of magnetic force, a rotational force can be generated, thereby enabling the micro-motion stage to rotate about the Z axis, i.e., achieving movement of the micro-motion stage in the Rz direction. When the output directions of Fr1 and Fr3 are different, and Fr2 does not exert force, a thrust in the X-axis direction is generated, thereby achieving movement of the micro-motion stage in the X direction. When the output directions of Fr2 and Fr3 are different, and Fr1 does not exert force, a thrust in the Y-axis direction is generated, thereby achieving movement of the micro-motion stage in the Y direction.

[0055] With this technical solution, since both the mover 12 and the stator 11 are planar structures and arranged parallel to each other, the magnet array 30 is located on the mover 12, and the first winding 10 and the second winding 20 are both located on the stator 11, the center of gravity of the entire micro-motion stage is lowered, making it suitable for high-speed motion. Furthermore, the overall micro-motion stage has high space utilization, effectively ensuring thrust density. Furthermore, this micro-motion stage can achieve control of not only the Z, Rx, and Ry degrees of freedom, but also the X, Y, and Rz degrees of freedom, bringing convenience to the use of high-precision large-scale equipment.

[0056] In some embodiments, as shown in Figure 3 in combination with Figure 4, the sector magnet in the present application includes a first radial array 301, a first circumferential array 302, a second radial array 303 and a second circumferential array 304 arranged in sequence along the circumferential direction; wherein, the magnetizing directions of the first radial array 301 and the second radial array 303 are both radial, and the magnetizing directions of the first radial array 301 and the second radial array 303 are opposite; the magnetizing directions of the first circumferential array 302 and the second circumferential array 304 are both circumferential, and the magnetizing directions of the first circumferential array 302 and the second circumferential array 304 are opposite.

[0057] Exemplarily, the present application includes six sector magnets, each of which has an angle of 60° along the circumferential direction, and the magnet array 30 as a whole is formed by six sector magnets surrounded in sequence. Each magnet array 30 includes a first radial array 301, a first circumferential array 302, a second radial array 303 and a second circumferential array 304 arranged in sequence along the circumferential direction. As shown in Figure 4, the first radial array 301 and the second radial array 303 have the same structure, and the first circumferential array 302 and the second circumferential array 304 have the same structure. It should be noted that the present application does not limit the number and angle of the sector magnets, and can be designed according to actual needs.

[0058] During use, when the first winding 10 is positioned as shown in FIG4 , i.e., the first winding 10 is positioned at designated locations in the second circumferential array 304, the first radial array 301, and the first circumferential array 302, there is no magnetic field at the four corners of the first winding 10, and the current in the remaining parts of the first winding 10 is perpendicular to the magnetic field corresponding to the XY plane. In this case, the first winding 10 will be subjected to a force in the Z-axis direction. When the second winding 20 is positioned as shown in FIG4 , i.e., the second winding 20 is positioned at designated locations in the first circumferential array 302, the second radial array 303, and the second circumferential array 304 on another sector magnet, according to the left-hand rule, the second winding 20 will be subjected to a force in the Fr direction. When the torque winding 40 is set according to the position shown in Figure 4, as shown in Figure 7, under the action of the ninth permanent magnet 3033, the fourteenth permanent magnet 3042 and the third permanent magnet 3013, according to the left-hand rule, under the action of the fourteenth permanent magnet 3042, the torque winding 40 will be subjected to a force in the rotation direction.

[0059] In some embodiments, in the present application, the first radial array 301 , the first circumferential array 302 , the second radial array 303 , and the second circumferential array 304 all have the same angle along the circumferential direction.

[0060] For example, in the present application, the circumferential angles of the first radial array 301, the first circumferential array 302, the second radial array 303, and the second circumferential array 304 are all 15°. Since the circumferential angles of the first radial array 301, the first circumferential array 302, the second radial array 303, and the second circumferential array 304 are all the same, this facilitates the arrangement of the first radial array 301, the first circumferential array 302, the second radial array 303, and the second circumferential array 304.

[0061] In some embodiments, as shown in FIG5 and in conjunction with FIG6 , where represents the current flowing outward perpendicular to the paper, and represents the current flowing inward perpendicular to the paper, the first radial array 301 in the present application includes a first permanent magnet 3011, a second permanent magnet 3012, a third permanent magnet 3013, a fourth permanent magnet 3014, a fifth permanent magnet 3015, and a sixth permanent magnet 3016 arranged in sequence; wherein the magnetization directions of the first permanent magnet 3011, the third permanent magnet 3013, and the fifth permanent magnet 3015 are all axial, and the magnetization directions of the first permanent magnet 3011, the third permanent magnet 3013, and the fifth permanent magnet 3015 are successively opposite; and the magnetization directions of the second permanent magnet 3012, the fourth permanent magnet 3014, and the sixth permanent magnet 3016 are all radial, and the magnetization directions of the second permanent magnet 3012, the fourth permanent magnet 3014, and the sixth permanent magnet 3016 are successively opposite.

[0062] Illustratively, the first permanent magnet 3011 , the second permanent magnet 3012 , the third permanent magnet 3013 , the fourth permanent magnet 3014 , the fifth permanent magnet 3015 and the sixth permanent magnet 3016 are arranged in sequence from the outside to the inside along the radial direction.

[0063] As shown in Figure 4 in combination with Figures 5 and 8, the second radial array 303 in the present application includes a seventh permanent magnet 3031, an eighth permanent magnet 3032, a ninth permanent magnet 3033, a tenth permanent magnet 3034, an eleventh permanent magnet 3035 and a twelfth permanent magnet 3036 arranged radially from the outside to the inside.

[0064] The seventh permanent magnet 3031, the ninth permanent magnet 3033, and the eleventh permanent magnet 3035 are all magnetized in the axial direction, and the magnetization directions of the seventh permanent magnet 3031, the ninth permanent magnet 3033, and the eleventh permanent magnet 3035 are opposite to each other. The eighth permanent magnet 3032, the tenth permanent magnet 3034, and the twelfth permanent magnet 3036 are all magnetized in the radial direction, and the magnetization directions of the eighth permanent magnet 3032, the tenth permanent magnet 3034, and the twelfth permanent magnet 3036 are opposite to each other.

[0065] At the same time, the magnetization directions of the first permanent magnet 3011 and the seventh permanent magnet 3031 in the present application are opposite, the magnetization directions of the second permanent magnet 3012 and the eighth permanent magnet 3032 are opposite, the magnetization directions of the third permanent magnet 3013 and the ninth permanent magnet 3033 are opposite, the magnetization directions of the fourth permanent magnet 3014 and the tenth permanent magnet 3034 are opposite, the magnetization directions of the fifth permanent magnet 3015 and the eleventh permanent magnet 3035 are opposite, and the magnetization directions of the sixth permanent magnet 3016 and the twelfth permanent magnet 3036 are opposite.

[0066] In some embodiments, in the present application, the first permanent magnet 3011 , the second permanent magnet 3012 , the third permanent magnet 3013 , the fourth permanent magnet 3014 , the fifth permanent magnet 3015 and the sixth permanent magnet 3016 are all at the same angle along the circumferential direction.

[0067] Since the first permanent magnet 3011, the second permanent magnet 3012, the third permanent magnet 3013, the fourth permanent magnet 3014, the fifth permanent magnet 3015 and the sixth permanent magnet 3016 have the same angle in the circumferential direction, this not only ensures that the permanent magnets are flush on opposite sides along the circumferential direction when arranged together, but also ensures that the permanent magnets are tightly fitted in the radial direction when arranged together.

[0068] In some embodiments, as shown in Figure 4 and in combination with Figure 5, the second circumferential array 304 in the present application includes a thirteenth permanent magnet 3041, a fourteenth permanent magnet 3042 and a fifteenth permanent magnet 3043, wherein the thirteenth permanent magnet 3041 and the first permanent magnet 3011 are located on the same circumference, the fourteenth permanent magnet 3042 and the third permanent magnet 3013 are located on the same circumference, and the fifteenth permanent magnet 3043 and the fifth permanent magnet 3015 are located on the same circumference; and the magnetization directions of the thirteenth permanent magnet 3041, the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043 are all circumferential, and the magnetization directions of the thirteenth permanent magnet 3041, the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043 are opposite in sequence.

[0069] The thirteenth permanent magnet 3041 and the fourteenth permanent magnet 3042 are hollow, and the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043 are hollow. The structure of the first circumferential array 302 is the same as that of the second circumferential array 304, and will not be repeated here.

[0070] As shown in FIG5 , the first winding 10 is placed radially center on the second permanent magnet 3012 and the fourth permanent magnet 3014. At this time, the right side of the first winding 10 is located on the permanent magnet in the middle position of the first circumferential array 302, and the left side of the first winding 10 is located on the fourteenth permanent magnet 3042 in the second circumferential array 304 on another sector magnet. At this time, referring to FIG6 , according to the Lorentz force law, the first winding 10 will be subjected to a force in the FZ direction when power is applied.

[0071] The second winding 20 is placed along the radial center on the ninth permanent magnet 3033 and the eleventh permanent magnet 3035 on the second sector magnet in the clockwise direction. The right side of the second winding 20 is located on the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043 on the second circumferential array 304. The left side of the second winding 20 is located on the corresponding permanent magnet on the first circumferential array 302. At this time, referring to Figure 8, according to the Lorentz force law, the second winding 20 will be subjected to a force in the direction of Fr when power is applied.

[0072] When the torque winding 40 is set according to the position shown in Figure 4, as shown in Figure 7, under the action of the ninth permanent magnet 3033, the fourteenth permanent magnet 3042 and the third permanent magnet 3013, according to the left-hand rule, under the action of the fourteenth permanent magnet 3042, the torque winding 40 will be subjected to a force in the rotation direction.

[0073] In some embodiments, the thirteenth permanent magnet 3041 , the fourteenth permanent magnet 3042 , and the fifteenth permanent magnet 3043 in the present application have the same angle along the circumferential direction.

[0074] Since the thirteenth permanent magnet 3041, the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043 have the same angle along the circumferential direction, it is convenient to arrange the thirteenth permanent magnet 3041, the fourteenth permanent magnet 3042 and the fifteenth permanent magnet 3043, and the second circumferential array 304 after arrangement is flush on opposite sides along the circumferential direction.

[0075] In some embodiments, the angle of the sector magnets in the present application along the circumferential direction is adjustable. The angle of each sector magnet in the present application along the circumferential direction can be 60° or as shown in Figures 9-11, the angle of each sector magnet along the circumferential direction is 40°. Among them, Figure 12 is a schematic cross-sectional view at point A in Figure 11, Figure 13 is a schematic cross-sectional view at point B in Figure 11, and Figure 14 is a schematic cross-sectional view at point C in Figure 11. The structural principles of Figures 9-14 in the present application are the same as those of Figures 1 to 8 above, and will not be repeated here.

[0076] In the present application, since the angle of the sector magnets along the circumferential direction is adjustable, the sector magnet array can be divided into smaller parts, and more windings are corresponding to the sector magnets, thereby enabling more flexible configuration of different thrust combinations.

[0077] In some embodiments, the present application further includes a torque winding 40 , which is disposed on the stator 11 .

[0078] For example, the torque winding 40 in the present application can be set according to the position as shown in Figure 4. Referring to the force directions of the permanent magnets corresponding to the torque winding 40 in Figure 5, and the cross-sectional schematic diagram of the torque winding 40 at B in Figure 7, the torque winding 40 is under the action of the ninth permanent magnet 3033, the fourteenth permanent magnet 3042 and the third permanent magnet 3013. According to the left-hand rule, under the action of the fourteenth permanent magnet 3042, the torque winding 40 will be subjected to a force in the rotation direction, that is, the torque winding 40 will produce circular motion when energized.

[0079] The torque winding 40 in the present application can also replace the first winding 10 or the second winding 20, so as to avoid the normal operation of the entire micro-motion stage when a failure occurs in the first winding 10 or the second winding 20.

[0080] This application also provides a device transfer apparatus, comprising a two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage as described in any of the embodiments of this application, wherein both the first winding 10 and the second winding 20 are circular arc-shaped planar structures. Because this device transfer apparatus utilizes all of the technical solutions of all of the aforementioned embodiments, it possesses at least all of the beneficial effects provided by the technical solutions of the aforementioned embodiments, and therefore will not be further elaborated upon here.

[0081] In the embodiments of the present application, "and / or" describes the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent the existence of A alone, the existence of A and B at the same time, and the existence of B alone. A and B can be singular or plural. The character " / " generally indicates that the previous and next associated objects are in an "or" relationship. "At least one of the following" and similar expressions refer to any combination of these items, including any combination of single or plural items. For example, at least one of a, b and c can represent: a, b, c, a - ,b ,a - , c , b - , c , or a - , b - , c, where a, b, c can be single or multiple.

[0082] Those skilled in the art will appreciate that the various units and algorithm steps described in the embodiments disclosed herein can be implemented using a combination of electronic hardware, computer software, and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0083] Those skilled in the art will clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0084] The above description is merely a specific embodiment of the present application. Any person skilled in the art may easily conceive of variations or substitutions within the technical scope disclosed in this application, and such variations or substitutions shall be within the scope of protection of this application. The scope of protection of this application shall be subject to the scope of protection of the claims.

Claims

1. A two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage, characterized in that: include: A stator (11), wherein the stator (11) is a planar structure; A mover (12), the mover (12) being a planar structure, and the mover (12) and the stator (11) being arranged in parallel; A magnet array (30), the magnet array (30) comprising a plurality of sector-shaped magnets arranged in a radial annular shape, the sector-shaped magnets being arranged on the mover (12); At least three first windings (10), the three first windings (10) being arranged on the stator (11) and used to drive the micro-motion stage to move in the Z, Rx and Ry directions; At least three second windings (20), the three second windings (20) being arranged on the stator (11) and used for driving the micro-motion stage to move in the X, Y and Rz directions.

2. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 1, characterized in that: The sector magnet comprises a first radial array (301), a first circumferential array (302), a second radial array (303) and a second circumferential array (304) which are sequentially arranged along a circumferential direction; The magnetization directions of the first radial array (301) and the second radial array (303) are both radial, and the magnetization directions of the first radial array (301) and the second radial array (303) are opposite; The magnetization directions of the first circumferential array (302) and the second circumferential array (304) are both circumferential, and the magnetization directions of the first circumferential array (302) and the second circumferential array (304) are opposite.

3. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 2, characterized in that: The first radial array (301), the first circumferential array (302), the second radial array (303), and the second circumferential array (304) are all arranged at the same angle along the circumferential direction.

4. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 3, characterized in that: The first radial array (301) comprises a first permanent magnet (3011), a second permanent magnet (3012), a third permanent magnet (3013), a fourth permanent magnet (3014), a fifth permanent magnet (3015), and a sixth permanent magnet (3016) which are arranged in sequence; The magnetization directions of the first permanent magnet (3011), the third permanent magnet (3013) and the fifth permanent magnet (3015) are all axial, and the magnetization directions of the first permanent magnet (3011), the third permanent magnet (3013) and the fifth permanent magnet (3015) are opposite in sequence; The magnetization directions of the second permanent magnet (3012), the fourth permanent magnet (3014) and the sixth permanent magnet (3016) are all radial, and the magnetization directions of the second permanent magnet (3012), the fourth permanent magnet (3014) and the sixth permanent magnet (3016) are opposite to each other.

5. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 4, characterized in that: The first permanent magnet (3011), the second permanent magnet (3012), the third permanent magnet (3013), the fourth permanent magnet (3014), the fifth permanent magnet (3015) and the sixth permanent magnet (3016) are all at the same angle along the circumferential direction.

6. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 4, characterized in that: The second circumferential array (304) comprises a thirteenth permanent magnet (3041), a fourteenth permanent magnet (3042) and a fifteenth permanent magnet (3043); The thirteenth permanent magnet (3041) and the first permanent magnet (3011) are located on the same circumference, the fourteenth permanent magnet (3042) and the third permanent magnet (3013) are located on the same circumference, and the fifteenth permanent magnet (3043) and the fifth permanent magnet (3015) are located on the same circumference; The magnetization directions of the thirteenth permanent magnet (3041), the fourteenth permanent magnet (3042) and the fifteenth permanent magnet (3043) are all circumferential, and the magnetization directions of the thirteenth permanent magnet (3041), the fourteenth permanent magnet (3042) and the fifteenth permanent magnet (3043) are opposite to each other.

7. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 6, characterized in that: The thirteenth permanent magnet (3041), the fourteenth permanent magnet (3042) and the fifteenth permanent magnet (3043) are all at the same angle along the circumferential direction.

8. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to any one of claims 2 to 7, characterized in that: The angle of the sector magnet along the circumferential direction is adjustable.

9. The two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage according to claim 1, characterized in that: It also includes a torque winding (40), wherein the torque winding (40) is arranged on the stator (11).

10. A device transfer apparatus, characterized in that: It comprises the two-dimensional arc array six-degree-of-freedom magnetic levitation micro-motion stage as claimed in any one of claims 1 to 9, and the first winding (10) and the second winding (20) are both circular arc planar structures.

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