Sealing door, semiconductor process apparatus and semiconductor machining apparatus

Abstract

Provided in the present application are a sealing door, a semiconductor process apparatus and a semiconductor machining apparatus. The sealing door comprises a driver, and successively arranged in a first direction, a middle plate and a sealing plate. The driver can drive the middle plate to perform reciprocating translation in a second direction, and a linkage structure is provided between the middle plate and the sealing plate. The linkage structure is configured as: when switching between a first position and a middle position, the middle plate can drive the sealing plate to move in the same direction in the second direction; when switching between a second position and the middle position, the middle plate can drive the sealing plate to move in the first direction, such that the sealing plate gets away from the middle plate to be close to a storage chamber of the semiconductor process apparatus, or the sealing plate gets close to the middle plate to be away from the storage chamber. When the middle plate is in the second position, the sealing plate is attached to the storage chamber to seal the storage chamber. The sealing door of the present application allows an operator to accurately determine, according to the position of the middle plate, whether the sealing plate has completely sealed the storage chamber.

Description

Sealed door, semiconductor process equipment and semiconductor processing equipment Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular, to a sealing door, semiconductor process equipment and semiconductor processing equipment. Background Art

[0002] During the semiconductor manufacturing process, wafers need to be transferred from an atmospheric environment to a process chamber for processing. FIG1 illustrates a semiconductor processing apparatus in the related art. As shown in FIG1 , the semiconductor processing apparatus 1000 includes multiple vacuum cassette elevators (VCEs) 100, a transfer chamber 300, and a process chamber 400. The storage chamber 120 of the cassette elevator 100 contains a cassette 200, which is used to carry multiple wafers. The transfer device 310 in the transfer chamber 300 removes wafers from the cassette 200 in the storage chamber 120 and moves them into the process chamber 400 for processing. After the process is completed, the wafers are removed from the process chamber 400 and placed into the cassette 200. In order to prevent impurities from contaminating the wafers, the cassette elevator 100 is provided with a sealing door 110 . The sealing door 110 can move to open and close the storage chamber 120 . When the sealing door 110 closes the storage chamber 120 , the storage chamber 120 can be in a vacuum state.

[0003] Figure 2 illustrates the structure of a sealing door in related art. The closing process of sealing door 110a shown in Figure 2 is generally as follows: one actuator drives sealing door 110a to a position opposite the opening of storage chamber 120a, while another actuator inflates airbag 90a. The inflation of airbag 90a pushes sealing plate 10a relative to outer plate 30a toward storage chamber 120a until the opening is closed, thereby sealing storage chamber 120a. The opening process of sealing door 110a is the reverse of the closing process.

[0004] However, with this approach, it is difficult to accurately determine whether the sealing door completely closes the storage chamber.

[0005] Summary of the Invention

[0006] The present application aims to solve at least one of the technical problems existing in the prior art, and proposes a sealed door, semiconductor process equipment and semiconductor processing equipment, which can solve the problem in the related art that it is difficult to accurately determine whether the sealed door completely closes the storage chamber.

[0007] In a first aspect, the present application provides a sealing door for semiconductor process equipment, comprising: a driver, and a middle plate and a sealing plate sequentially arranged along a first direction;

[0008] The driver is capable of driving the middle plate to reciprocate and translate along a second direction, wherein the middle plate has a first position, a second position, and an intermediate position between the first position and the second position; wherein the first direction is parallel to the thickness direction of the middle plate and perpendicular to the second direction;

[0009] A linkage structure is provided between the middle plate and the sealing plate, and the linkage structure is configured such that: when the middle plate switches between the first position and the intermediate position, it can drive the sealing plate to move in the same direction along the second direction; when the middle plate switches between the second position and the intermediate position, it can drive the sealing plate to move along the first direction, so that the sealing plate moves away from the middle plate to approach the storage chamber of the semiconductor process equipment, or so that the sealing plate moves toward the middle plate to move away from the storage chamber;

[0010] When the middle plate is at the second position, the sealing plate is in contact with the storage chamber to seal the storage chamber.

[0011] In some embodiments, the linkage structure includes an inclined surface provided on one of the middle plate and the sealing plate, and a resist provided on the other; the inclined surface is inclined in the second direction, and has a first end and a second end along the inclined direction of the inclined surface;

[0012] When the middle plate switches between the first position and the intermediate position, the abutting member remains in a position abutting the first end of the inclined surface, and the sealing plate is located close to the middle plate; when the middle plate switches between the second position and the intermediate position, the abutting member slides relative to the inclined surface to drive the sealing plate to move along the first direction; when the middle plate is in the second position, the abutting member abuts the second end of the inclined surface, and the sealing plate is located away from the middle plate and in contact with the storage chamber.

[0013] In some embodiments, a wedge-shaped block is provided on one of the middle plate and the sealing plate, and the wedge-shaped block is formed with the inclined surface.

[0014] In some embodiments, the abutting member is configured to make line contact or point contact with the inclined surface.

[0015] In some embodiments, the linkage structure further comprises an outer plate, the outer plate being located on a side of the middle plate away from the sealing plate, and the outer plate being connected to the sealing plate via a first connecting portion;

[0016] When the middle plate switches between the first position and the intermediate position, the outer plate moves in the same direction as the sealing plate along the second direction via the first connecting portion;

[0017] When the middle plate is located at the middle position, the outer plate is used to abut against the limiting member on the storage chamber, so that the outer plate cannot continue to move along the second direction;

[0018] When the middle plate switches between the second position and the intermediate position, the outer plate blocks the sealing plate from continuing to move along the second direction through the first connecting portion, so that relative movement along the second direction occurs between the middle plate and the sealing plate.

[0019] In some embodiments, the first connecting portion is an elastic member, which is used to apply elastic force to the sealing plate to restore the sealing plate to a position close to the middle plate.

[0020] In some embodiments, the sealing plate is connected to the middle plate via a second connecting portion; when the middle plate switches between the first position and the intermediate position, the second connecting portion is used to drive the sealing plate to move in the same direction along the second direction;

[0021] The second connecting portion is an elastic member, which is used to apply elastic force to the sealing plate to restore the sealing plate to a position close to the middle plate.

[0022] In some embodiments, the first connecting part is a spring, and the second connecting part is a spring; when the middle plate switches between the first position and the intermediate position, the spring and the spring are both in their original states, wherein the two ends of the spring are respectively connected to the outer plate and the sealing plate, and the two ends of the spring are at different heights in the second direction; the two ends of the spring are respectively connected to the middle plate and the sealing plate, and the two ends of the spring are at different heights in the second direction.

[0023] In some embodiments, the sealing door is configured to have a first avoidance space, and when the middle plate switches between the first position and the intermediate position, the second connecting portion is located in the first avoidance space, so that the sealing plate fits the middle plate.

[0024] In some embodiments, a surface of the sealing plate facing the middle plate is recessed to form a groove, and the first avoidance space includes the groove.

[0025] In some embodiments, the sealing door is configured to have a second avoidance space, and when the middle plate switches between the first position and the intermediate position, the abutting member is located in the second avoidance space, so that the sealing plate fits the middle plate.

[0026] In some embodiments, the middle plate is a frame, a first through hole is formed in the middle of the middle plate, and the first avoidance space includes a portion of the first through hole; or

[0027] The second avoidance space includes a portion of the first through hole.

[0028] In some embodiments, the middle plate is a frame, and a first through hole is formed in the middle of the middle plate. When the middle plate switches between the first position and the middle position, the first connecting portion is accommodated in the first through hole, so that the outer plate fits the middle plate.

[0029] In some embodiments, the middle plate is a frame, a first through hole is formed in the middle of the middle plate, and the sealing plate includes a main plate and a boss, wherein the boss is protrudingly provided on a side of the main plate facing the middle plate;

[0030] When the middle plate switches between the first position and the intermediate position, the main plate fits against the middle plate, and the boss extends into the first through hole and fits against the outer plate.

[0031] In some embodiments, the invention further comprises a first mounting plate, wherein the first mounting plate is connected to the middle plate, and one end of the second connecting portion is connected to the first mounting plate and the other end is connected to the sealing plate;

[0032] The middle plate and the outer plate are both frames, a first through hole is formed in the middle of the middle plate, and a second through hole is formed in the middle of the outer plate; the first mounting plate is accommodated in the second through hole and is opposite to the first through hole.

[0033] In some embodiments, one of the outer plate and the middle plate is provided with a guide rail, and the other is provided with a sliding portion, and the sliding portion is slidably engaged with the guide rail along the second direction;

[0034] When the middle plate switches between the second position and the intermediate position, relative sliding occurs between the sliding portion and the guide rail.

[0035] In a second aspect, the present application provides a semiconductor process equipment, comprising:

[0036] a storage chamber capable of accommodating a cassette;

[0037] The first aspect of the present application provides a sealing door, wherein when the middle plate of the sealing door switches between the second position and the intermediate position, the sealing plate can move along a first direction relative to the storage chamber to open and close the storage chamber.

[0038] In some embodiments, the linkage structure further comprises an outer plate, the outer plate being located on a side of the middle plate away from the sealing plate, and the outer plate being connected to the sealing plate via a first connecting portion;

[0039] A limiting member is protrudingly provided on the outer surface of the storage chamber;

[0040] When the middle plate is located at the middle position, the outer plate abuts against the limiting member on the storage chamber, so that the outer plate cannot continue to move along the second direction;

[0041] When the middle plate switches between the second position and the intermediate position, the outer plate blocks the sealing plate from continuing to move along the second direction through the first connecting portion, so that relative movement along the second direction occurs between the middle plate and the sealing plate.

[0042] In a third aspect, the present application provides a semiconductor processing device, comprising:

[0043] process chamber;

[0044] The second aspect of the present application provides a semiconductor process equipment;

[0045] a wafer cassette, housed in a storage chamber of the semiconductor process equipment, the wafer cassette being used to carry a plurality of wafers; and

[0046] A transfer device is used to transfer the wafer between the storage chamber and the process chamber.

[0047] This application has the following beneficial effects:

[0048] The sealed door, semiconductor process equipment, and semiconductor processing equipment provided by the present application, wherein the sealed door is designed with a linkage structure between a sealing plate and a middle plate, and the linkage structure is configured such that when the middle plate switches between a first position and an intermediate position, it can drive the sealing plate to move in the same direction along a second direction; when the middle plate switches between a second position and an intermediate position, it can drive the sealing plate to move in the first direction, so that the sealing plate moves away from the middle plate to approach a storage chamber of the semiconductor process equipment, or so that the sealing plate moves closer to the middle plate to move away from the storage chamber. In this way, by realizing linkage between the middle plate and the sealing plate between the intermediate position and the second position through the linkage structure, the movement of the middle plate and the opening and closing of the storage chamber by the sealing plate can be performed simultaneously.

[0049] Thus, the operator can accurately determine the state of the sealing plate based on the position of the middle plate, and thus accurately determine whether the sealing plate has completely sealed the storage chamber. Moreover, only one driver needs to be controlled, which helps to simplify the control operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] FIG1 is a schematic diagram of a semiconductor processing equipment in the related art;

[0051] FIG2 is a schematic structural diagram of a sealing door in the related art;

[0052] FIG3 is a schematic structural diagram of a storage chamber of a semiconductor process equipment according to an embodiment of the present application;

[0053] FIG4 is a schematic cross-sectional view of the storage chamber shown in FIG3 ;

[0054] FIG5 is a schematic structural diagram of a sealing door according to an embodiment of the present application;

[0055] FIG6 is a schematic structural diagram of a middle plate of a sealing door according to an embodiment of the present application when the middle plate is in the first position;

[0056] FIG7 is a schematic structural diagram of a middle plate of a sealed door according to an embodiment of the present application when the middle plate is in a middle position;

[0057] FIG8 is a schematic structural diagram of a middle plate of a sealing door according to an embodiment of the present application in a second position;

[0058] FIG9 is a schematic structural diagram of a sealing door according to an embodiment of the present application without the first connecting portion and the second connecting portion;

[0059] FIG10 is a schematic structural diagram of the middle plate of the sealing door shown in FIG9 ;

[0060] FIG11 is a schematic structural diagram of a sealing plate of the sealing door shown in FIG9 ;

[0061] FIG12 is a perspective schematic diagram of the state change of the abutting member and the wedge block in the sealing door shown in FIG9 when the middle plate rises from the middle position to the second position;

[0062] FIG13 is a simplified diagram showing the state change of the abutting member and the wedge-shaped block in the sealing door shown in FIG9 when the middle plate rises from the middle position to the second position;

[0063] FIG14 is a simplified diagram showing the state change of the abutting member and the wedge block in another sealing door provided by an embodiment of the present application when the middle plate descends from the middle position to the second position;

[0064] FIG15 is a schematic structural diagram of a sealing door according to an embodiment of the present application without the abutting member and the wedge block;

[0065] FIG16 is a front view of a sealed door provided by an embodiment of the present application without the outer panel;

[0066] FIG17 is a schematic cross-sectional view of the sealing door shown in FIG16 along the AA direction;

[0067] FIG18 is a partial enlarged view of point B in FIG17;

[0068] FIG19 is a partial enlarged view of point C in FIG17 .

[0069] Description of reference numerals:

[0070] 1000-Semiconductor processing equipment;

[0071] 100 - Cassette elevator; 110 - Sealing door; 10 - Sealing plate; 11 - Groove; 12 - Main plate; 13 - Boss; 20 - Middle plate; 21 - Protrusion; 22 - Guide rail; 23 - First mounting plate; 24 - Second mounting plate; 30 - Outer plate; 31 - Second through hole; 40 - First connecting portion; 50 - Second connecting portion; 60 - Abutment; 61 - Abutment block; 62 - Connecting column; 63 - Stop flange; 70 - Wedge block; 71 - Inclined surface; 80 - Driver; 120 - Storage chamber; 121 - Opening; 122 - Limiting member; 1221 - First limiting plate; 1222 - Second limiting plate;

[0072] 200-piece box;

[0073] 300-transmission chamber; 310-transmission device;

[0074] 400-Process chamber. DETAILED DESCRIPTION

[0075] As shown in Figure 2, the sealing door 110a is equipped with two actuators. One actuator drives the entire sealing door 110a vertically, while the other actuator controls the inflation or deflation of the airbag 90a, thereby driving the sealing plate 10a to move along the central axis of the opening of the storage chamber 120a to open and close the opening of the storage chamber 120a. Thus, the raising and lowering of the sealing plate 10a and the opening and closing of the storage chamber 120a are independently achieved by two actuators. This requires two actuators, which increases the number of actuators and the cost.

[0076] In addition, the following problems exist: First, the two actuators must be controlled separately, which complicates the control operation. Second, the lifting and lowering of the sealing plate 10a and the opening and closing of the storage chamber 120a are performed separately and sequentially. After the sealing door 110a reaches a position opposite the opening of the storage chamber 120a, the airbag 90a is inflated to push the sealing plate 10a to move and close the opening of the storage chamber 120a. Because the airbag 90a is located between the outer plate 30a of the sealing door 110a and the sealing plate 10a, it is difficult for the operator to accurately determine the inflation status of the airbag 90a, and thus it is difficult to accurately determine whether the sealing plate 10a is in place, that is, whether the storage chamber 120a is completely sealed. Third, if the air pressure inside the storage chamber 120a fluctuates while the sealing door 110a is sealing the storage chamber 120a, and the air pressure inside the storage chamber 120a exceeds the air pressure outside the storage chamber 120a, the air inside the storage chamber 120a flows outward from the opening. The wind force generated by the gas flow acts on the sealing plate 10a, and the sealing plate 10a needs to resist the wind force during its movement toward the storage chamber 120a. This wind force is transmitted to the airbag 90a, which can easily cause the airbag 90a to deform, reducing the movement speed of the sealing plate 10a and increasing the time it takes for the sealing door 110a to seal the storage chamber 120a. In other words, the time it takes for the sealing door 110a to seal the storage chamber 120a is affected by the air pressure inside the storage chamber 120a.

[0077] In view of this, embodiments of the present application provide a sealed door, semiconductor process equipment, and semiconductor processing equipment, wherein the sealing plate of the sealed door closes the storage chamber simultaneously with the rise of the midplate. To facilitate a better understanding of the technical solution of this application by those skilled in the art, the sealed door, semiconductor process equipment, and semiconductor processing equipment provided by this application are described in detail below with reference to the accompanying drawings.

[0078] The semiconductor processing equipment provided in the embodiments of the present application includes a wafer box, semiconductor process equipment, a transmission device and a process chamber.

[0079] The semiconductor processing equipment may be, for example, a wafer cassette elevator or a wafer temporary storage chamber. In various embodiments of the present application, a wafer cassette elevator is used as an example for detailed description. FIG3 illustrates the structure of a storage chamber 120 of a semiconductor processing equipment according to an embodiment of the present application, and FIG4 is a schematic cross-sectional view of the storage chamber 120 shown in FIG3 . The semiconductor processing equipment includes a storage chamber 120. As shown in FIG3 and FIG4 , a sidewall of the storage chamber 120 is provided with an opening 121. The opening 121 allows a wafer cassette to pass through, allowing the wafer cassette to be accommodated within the storage chamber 120 through the opening 121. The wafer cassette is used to hold multiple wafers, which are arranged vertically spaced apart within the cassette. The semiconductor processing equipment also includes a sealed door 110 (as shown in FIG5 ), which is capable of opening and closing the opening 121 of the storage chamber 120. The storage chamber 120 may be, for example, a rectangular parallelepiped as shown in FIG3 , or may be a cylindrical or other shape. In the embodiments of the present application, a rectangular parallelepiped storage chamber 120 is used as an example.

[0080] The transfer device (e.g., a robot) is used to transfer the wafers between the storage chamber 120 and the process chamber. Specifically, after the wafer box is placed in the storage chamber 120, the sealed door 110 closes the opening 121 of the storage chamber 120, so that the storage environment of the wafer can be in a vacuum state to avoid contamination of the wafer. Taking the sealed door 110 on the wafer box elevator as an example, in the semiconductor preparation process, the wafer box elevator drives the wafer box to rise to the wafer retrieval station, and the sealed door 110 opens the opening 121 of the storage chamber 120. The transfer device can extend into the storage chamber 120 through the opening 121, remove the wafer from the wafer box and move it into the process chamber to process the wafer. After the process is completed, the wafer is removed from the process chamber and placed in the wafer box.

[0081] The sealing door 110 provided in the present application will be described in detail below with reference to the accompanying drawings. FIG5 shows the structure of a sealing door 110 of an embodiment of the present application. Referring to FIG5 , the sealing door 110 of the present application can automatically open and close the opening 121 of the storage chamber 120. The sealing door 110 includes a driver 80, a middle plate 20 and a sealing plate 10. The middle plate 20 and the sealing plate 10 are arranged in sequence along a first direction. Wherein, the first direction is parallel to the thickness direction of the middle plate 20, the thickness direction of the sealing plate 10 and the extension direction of the central axis of the opening 121, and the middle plate 20 and the sealing plate 10 are parallel to each other. The shapes of the middle plate 20 and the sealing plate 10 are non-restrictive. For example, both can be regular shapes such as rectangles.

[0082] It should be noted that in the various drawings of the embodiments of the present application, the X-axis, Y-axis, and Z-axis are perpendicular to each other, and the directions of the X-axis and Z-axis represent the extension direction and the vertical direction of the central axis of the opening 121, respectively.

[0083] Figure 6 illustrates the structure of the middle plate 20 of a sealed door 110 according to an embodiment of the present application in a first position, Figure 7 illustrates the structure of the middle plate 20 of a sealed door 110 according to an embodiment of the present application in an intermediate position, and Figure 8 illustrates the structure of the middle plate 20 of a sealed door 110 according to an embodiment of the present application in a second position. Referring to Figures 5 to 8 , a driver 80 is in transmission connection with the middle plate 20, and the driver 80 is capable of providing linear power to drive the middle plate 20 to reciprocate in a second direction.

[0084] For example, the driver 80 may be an electric push rod, a hydraulic push rod, or a pneumatic push rod. Alternatively, in other embodiments, the driver 80 may include a motor and a transmission device, wherein the motor is in driving connection with the transmission device, which is in driving connection with the middle plate 20. The motor is configured to provide rotational power, and the transmission device is configured to convert the rotational power of the motor into linear power and transmit it to the middle plate 20, thereby driving the middle plate 20 to reciprocate in the second direction. Here, the transmission device is not limited to a gear rack mechanism, a belt drive mechanism, a chain drive mechanism, a screw and nut mechanism, or other transmission mechanisms.

[0085] The second direction is perpendicular to the first direction. It is understood that in some embodiments, such as Figures 5 to 8 , the second direction may specifically refer to the vertical direction (i.e., the Z-axis direction), in which case the middle plate 20 can be raised and lowered along the Z-axis direction. In other embodiments, the second direction may specifically refer to the Y-axis direction, in which case the middle plate 20 can be translated along the Y-axis direction.

[0086] Regardless of whether the second direction refers to the Y-axis direction or the Z-axis direction, under the driving action of the driver 80, the middle plate 20 has a first position, a second position, and an intermediate position, the intermediate position being between the first position and the second position, and the sealing plate 10 has an initial state and a sealed state. The first position refers to a position where the middle plate 20 is not opposite to the opening 121 of the storage chamber 120 and the middle plate 20 is close to the sealing plate 10, the intermediate position refers to a position where the middle plate 20 is opposite to the opening 121 of the storage chamber 120 and the middle plate 20 is close to the sealing plate 10 (at this time, the sealing plate 10 is away from the opening 121 of the storage chamber 120), and the second position refers to a position where the middle plate 20 is opposite to the opening 121 of the storage chamber 120 and the middle plate 20 and the sealing plate 10 are away from each other (at this time, the sealing plate 10 closes the opening 121 of the storage chamber 120). The initial state refers to a state in which a gap exists between the sealing plate 10 and the side wall of the storage chamber 120 and the opening 121 of the storage chamber 120 is open. The sealed state refers to a state in which the sealing plate 10 closes the opening 121 of the storage chamber 120 .

[0087] During the process of switching between the second position and the intermediate position of the middle plate 20, in order to switch the sealing plate 10 between the initial state and the sealed state, a linkage structure is provided between the middle plate 20 and the sealing plate 10. The linkage structure is configured such that: when the middle plate 20 switches between the first position and the intermediate position, it can drive the sealing plate 10 to move in the same direction along the second direction; when the middle plate 20 switches between the second position and the intermediate position, it can drive the sealing plate 10 to move in the first direction, so that the sealing plate 10 moves away from the middle plate 20 to approach the storage chamber 120, or so that the sealing plate 10 moves toward the middle plate 20 to move away from the storage chamber 120. When the middle plate 20 is in the second position, the sealing plate 10 is in contact with the storage chamber 120 to seal the storage chamber 120.

[0088] Specifically, as shown in Figures 6 and 7 , before the middle plate 20 reaches the intermediate position, the sealing plate 10 is in its initial state. At this point, there is a gap W between the sealing plate 10 and the sidewall of the storage chamber 120. When the driver 80 drives the middle plate 20 to switch between the first position and the intermediate position, the sealing plate 10 connected to the middle plate 20 can move in the same direction as the middle plate 20. As shown in Figure 7 , when the middle plate 20 is in the intermediate position, the sealing plate 10 is opposite the opening 121 of the storage chamber 120, and the orthographic projection of the sealing plate 10 on the sidewall of the storage chamber 120 completely covers the opening 121.

[0089] As shown in Figures 7 and 8, when the middle plate 20 switches between the middle position and the second position, the middle plate 20 can move independently along the second direction relative to the sealing plate 10, and at the same time can drive the sealing plate 10 to move along the first direction (i.e., the X-axis direction). Specifically, during the process of switching from the middle position to the second position, the middle plate 20 can drive the sealing plate 10 to move along the -X-axis direction, so that the sealing plate 10 gradually moves away from the middle plate 20 to approach the side wall of the storage chamber 120. When the middle plate 20 is in the second position, the sealing plate 10 is in a sealed state. At this time, the sealing plate 10 is in contact with the side wall of the storage chamber 120, and the sealing plate 10 closes the opening 121 to achieve sealing of the storage chamber 120. During the process of switching from the second position to the middle position, the middle plate 20 can drive the sealing plate 10 to move along the +X-axis direction, so that the sealing plate 10 gradually moves closer to the middle plate 20 to move away from the side wall of the storage chamber 120, thereby releasing the seal of the storage chamber 120.

[0090] When the second direction is the vertical direction (i.e., the Z-axis direction), as shown in Figures 6 and 7 , the first position can be located below the middle position and the second position, in which case the middle plate 20 moves upward to drive the sealing plate 10 to seal the storage chamber 120. Alternatively, the first position can be located above the middle position and the second position, in which case the middle plate 20 moves downward to drive the sealing plate 10 to seal the storage chamber 120. When the second direction is the Y-axis direction, the first position can be located on either side of the middle position along the Y-axis direction.

[0091] It should be understood that according to the specific examples shown in Figures 6 to 8, taking the second direction as the vertical direction (i.e., the Z-axis direction) and the first position being below the second position as an example, in the semiconductor preparation process, the specific process of the sealing door 110 of this embodiment moving to seal the storage chamber 120 may include the following steps.

[0092] The driver 80 drives the middle plate 20, which is located in the first position, to rise in the +Z direction. The middle plate 20 also drives the sealing plate 10 to rise in the +Z direction until the middle plate 20 moves to the middle position, with the sealing plate 10 facing the opening 121 of the storage chamber 120. During this period, the sealing plate 10 is in the initial state, that is, there is a gap W between the sealing plate 10 and the side wall of the storage chamber 120.

[0093] The driver 80 continues to drive the middle plate 20 to rise along the +Z axis direction. At this time, under the action of the linkage structure, the sealing plate 10 no longer moves along the Z axis direction, but moves along the -X axis direction as the middle plate 20 moves upward. The sealing plate 10 gradually moves away from the middle plate 20 to approach the side wall of the storage chamber 120 until the middle plate 20 moves up to the second position. The sealing plate 10 is tightly attached to the side wall of the storage chamber 120, and the opening 121 is closed by the sealing plate 10, thereby achieving sealing of the storage chamber 120.

[0094] On the contrary, the process of moving the sealing door 110 to release the seal of the storage chamber 120 generally includes the following steps. The driver 80 drives the middle plate 20 located in the second position to descend along the -Z axis direction. At this time, under the action of the linkage structure, the sealing plate 10 moves along the +X axis direction as the middle plate 20 descends. The sealing plate 10 gradually approaches the middle plate 20 to move away from the side wall of the storage chamber 120, so that the opening 121 is opened. When the middle plate 20 descends to the middle position, the sealing plate 10 returns to its initial state. The driver 80 continues to drive the middle plate 20 located in the middle position to descend along the -Z axis direction, driving the sealing plate 10 to descend along the -Z axis direction until the middle plate 20 moves down to the first position.

[0095] As can be seen from the above, the sealing door 110 of this embodiment is designed with a linkage structure between the sealing plate 10 and the middle plate 20. The linkage structure is configured such that when the middle plate 20 switches between the first position and the middle position, it can drive the sealing plate 10 to move in the same direction along the second direction. When the middle plate 20 switches between the middle position and the second position, the middle plate 20 can drive the sealing plate 10 to move along the first direction, so that the sealing plate 10 moves away from the middle plate 20 to approach the storage chamber 120, or so that the sealing plate 10 moves closer to the middle plate 20 to move away from the storage chamber 120. Thus, the linkage structure can realize the simultaneous movement of the middle plate 20 and the opening and closing of the storage chamber 120 by the sealing plate 10. In this way, the operator can accurately judge the state of the sealing plate 10 based on the position of the middle plate 20. Specifically, when the middle plate 20 moves to the second position, the operator can accurately judge that the sealing plate 10 has reached a sealed state, and can then accurately judge that the storage chamber 120 has been completely sealed.

[0096] Furthermore, the sealed door 110 of this embodiment utilizes a single driver 80. When the middle plate 20 switches between the intermediate position and the second position, the driver 80 simultaneously drives the middle plate 20 in the second direction while simultaneously driving the sealing plate 10 in the first direction, enabling the sealing plate 10 to open and close the opening 121 of the storage chamber 120. In other words, in the sealed door 110 of this embodiment, both the raising and lowering of the sealing plate 10 and the opening and closing of the storage chamber 120 can be accomplished by a single driver 80. This reduces the number of drivers 80 required and the cost of each driver 80. Furthermore, the control of only one driver 80 simplifies control operations.

[0097] The second direction is set to be the vertical direction (i.e., the Z-axis direction), and the middle plate 20 reciprocates along the vertical direction Z. In the embodiment where the first position is below the intermediate position and the second position, the specific implementation structure of the linkage structure that enables the upward movement of the middle plate 20 to drive the sealing plate 10 to move closer to the side wall of the storage chamber 120 includes, but is not limited to, the following possible methods.

[0098] Figure 9 shows the structure of a sealing door 110 of an embodiment of the present application without the first connecting part 40 and the second connecting part 50. Figure 10 is a structural schematic diagram of the middle plate 20 of the sealing door 110 shown in Figure 9. Figure 11 is a structural schematic diagram of the sealing plate 10 of the sealing door 110 shown in Figure 9.

[0099] In a first possible embodiment, as shown in Figures 9 to 11 , the linkage structure includes a stopper 60 disposed on the middle plate 20 and an inclined surface 71 disposed on the sealing plate 10. Of course, in actual applications, the stopper 60 can also be disposed on the sealing plate 10, and the inclined surface 71 can also be disposed on the middle plate 20. Furthermore, in some embodiments, a wedge 70 is disposed on one of the middle plate 20 and the sealing plate 10, and the wedge 70 is formed with the inclined surface 71.

[0100] Specifically, the inclined surface 71 is inclined in the second direction (i.e., the Z-axis direction). For example, when the wedge block 70 is positioned on the sealing plate 10, the cross-sectional area of ​​the wedge block 70 gradually increases from the bottom end to the top end of the wedge block 70. Thus, along the inclination direction of the inclined surface 71, the inclined surface 71 has a first end (the end with the smaller cross-sectional area of ​​the wedge block 70) and a second end (the end with the larger cross-sectional area of ​​the wedge block 70). The inclined surface 71 extends obliquely upward from the first end to the second end, gradually approaching the middle plate 20. The cross-sectional shape of the wedge block 70 can be, for example, a right trapezoid as shown in FIG. 11, or a right triangle.

[0101] Figure 12 is a three-dimensional schematic diagram of the state change of the push piece 60 and the wedge block 70 in the sealing door 110 shown in Figure 9 when the middle plate 20 rises from the middle position to the second position. Figure 13 is a simplified diagram of the state change of the push piece 60 and the wedge block 70 in the sealing door 110 shown in Figure 9 when the middle plate 20 rises from the middle position to the second position.

[0102] In this example, as shown in FIG12(a) and FIG13(a), when the middle plate 20 is in the middle position, the abutting member 60 abuts against the first end of the inclined surface 71. Since the sealing plate 10 can move in the same direction as the middle plate 20 when the middle plate 20 switches between the first position and the middle position, the abutting member 60 remains in a position abutting against the first end of the inclined surface 71 when the middle plate 20 is in the first position and any position between the first position and the middle position, and the sealing plate 10 is located near the middle plate 20. When the middle plate 20 switches between the middle position and the second position, under the action of the linkage structure, the sealing plate 10 does not move in the same direction as the middle plate 20. At this time, the abutting member 60 slides relative to the inclined surface 71 to drive the sealing plate 10 to move along the first direction. 12( b ) and 13( b ), when the middle plate 20 is in the second position, the abutting member 60 abuts against the second end of the inclined surface 71 , and the sealing plate 10 is located away from the middle plate 20 and in contact with the storage chamber 120 .

[0103] Thus, during the switching process of the middle plate 20 from the middle position to the second position, as the middle plate 20 moves upward, since the sealing plate 10 does not move in the same direction as the middle plate 20, the abutting member 60 slides along the inclined surface 71. At the same time, the abutting member 60 can push the wedge block 70 to move along the -X axis direction, thereby driving the sealing plate 10 away from the middle plate 20 and closer to the side wall of the storage chamber 120, until the middle plate 20 moves to the second position, and the storage chamber 120 is sealed. Conversely, during the switching process of the middle plate 20 from the second position to the middle position, as the middle plate 20 moves downward, the abutting member 60 slides along the inclined surface 71, and the middle plate 20 drives the sealing plate 10 to move along the +X axis direction, closer to the middle plate 20 and away from the side wall of the storage chamber 120, thereby releasing the seal of the storage chamber 120.

[0104] In this embodiment, the linkage structure utilizes a mechanical structure consisting of a stopper 60 and an inclined surface 71 (e.g., formed by a wedge block 70). When the driver 80 drives the middle plate 20 to translate in the second direction, the stopper 60 and the wedge block 70 slide in conjunction, allowing the middle plate 20 and the sealing plate 10 to move synchronously, while the sealing plate 10 can open and close the storage chamber 120. Thus, one driver 80 can be omitted, thereby saving the cost of one driver 80.

[0105] Moreover, compared to the sealing door 110a in FIG2 , which is driven by the airbag 90a to move the sealing plate 10a, this embodiment utilizes a stopper 60 and an inclined surface 71 (e.g., formed by a wedge-shaped block 70). Both the stopper 60 and the inclined surface 71 (e.g., formed by a wedge-shaped block 70) are mechanical structures. The stopper 60 and the inclined surface 71 (e.g., formed by a wedge-shaped block 70) are structurally reliable, thereby reducing the impact of the air pressure inside the storage chamber 120 on the sealing door 110. Specifically, when the air pressure inside the storage chamber 120 fluctuates, even if there is wind force acting on the sealing plate 10, the stopper 61 and the inclined surface 71 (e.g., formed by a wedge-shaped block 70) are not easily deformed. Therefore, this helps to prevent the moving speed of the sealing plate 10 from being affected, thereby preventing the time required for the sealing door 110 to seal the storage chamber 120 from being increased, thereby ensuring the efficiency of the sealing door 110 in sealing the storage chamber 120.

[0106] It should be noted that, in practical applications, in addition to providing a wedge-shaped block 70 having a bevel 71 on one of the sealing plate 10 and the middle plate 20, other methods may be used to form the bevel 71. For example, in other examples, the thickness of the bottom portion of the sealing plate 10 gradually increases from bottom to top, so that the bottom portion of the sealing plate 10 is formed with the bevel 71. For another example, in still other examples, a wedge-shaped groove is cut into a surface of one of the sealing plate 10 and the middle plate 20 facing the other, and the depth of the wedge-shaped groove along the first direction gradually decreases to zero from bottom to top. In this way, the groove wall of the wedge-shaped groove has the bevel 71.

[0107] Compared with the implementation scheme in which a wedge-shaped groove is provided on one of the sealing plate 10 and the middle plate 20, and the wedge-shaped groove has a slope 71, the sealing plate 10 is provided with a wedge block 70 without changing the thickness of the sealing plate 10. In the method of forming the slope 71 by using the wedge block 70, the structural strength of the sealing plate 10 is higher.

[0108] In the specific example shown in FIG12 , the abutting member 60 includes a fixed portion and a abutting block 61. One end of the fixed portion is fixedly disposed on the middle plate 20 (or the sealing plate 10), and the other end is fixedly connected to the abutting block 61. The abutting block 61 contacts the inclined surface 71, and the abutting block 61 is part of a sphere. That is, the surface of the abutting block 61 is an arc-shaped surface. In this way, the abutting member 60 is in line contact with the inclined surface 71, so that the contact area between the abutting member 60 and the inclined surface 71 is small, and the friction between the abutting member 60 and the inclined surface 71 is small, so as to ensure that the abutting member 60 can slide smoothly along the inclined surface 71 during the switching process between the middle plate 20 and the second position, thereby ensuring that the middle plate 20 can drive the sealing plate 10 to move smoothly along the first direction.

[0109] As an alternative embodiment, the abutting block 61 can be replaced with another shape such as a sphere or a hemisphere, with the abutting block 61 having an arcuate surface, and the abutting block 61 and the inclined surface 71 form a line contact pair. In other embodiments, the abutting block 61 can also be replaced with a prismatic shape, with one edge of the prismatic abutting block 61 abutting the inclined surface 71, and the contact between the abutting block 61 and the inclined surface 71 is also line contact.

[0110] In some embodiments, the abutting block 61 may also be replaced with a conical or pyramidal shape. In this way, the abutting member 60 and the inclined surface 71 are in point contact, which can further reduce the contact area between the abutting member 60 and the inclined surface 71, thereby further reducing the friction between the abutting member 60 and the inclined surface 71, thereby ensuring that the middle plate 20 can smoothly drive the sealing plate 10 to move along the first direction.

[0111] In other embodiments, the abutting block 61 may be replaced by a roller, which is in rolling contact with the inclined surface 71 to further ensure that the middle plate 20 can smoothly drive the sealing plate 10 to move along the first direction.

[0112] The above-mentioned fixing portion can be a columnar structure, a block structure, etc., and this embodiment does not limit this. In the example shown in Figure 12, the fixing portion specifically includes a connecting column 62 and a stop flange 63. The connecting column 62 is engaged with the slot of the middle plate 20 (or sealing plate 10), and the stop flange 63 is connected to the abutment block 61. Along the central axis of the slot, the cross-sectional area of ​​the stop flange 63 is larger than the cross-sectional area of ​​the slot, so that the stop flange 63 cannot enter the slot. The stop flange 63 is located outside the slot and abuts against the side of the middle plate 20 (or sealing plate 10) facing the sealing plate 10 (or middle plate 20). The cross-section of the connecting column 62 is not limited to the elliptical shape shown in Figure 12, and can also be other shapes such as a circle. In this way, when the fixing part is installed to the middle plate 20 (or the sealing plate 10), the abutment relationship between the stop flange 63 and the side of the middle plate 20 (or the sealing plate 10) facing the sealing plate 10 (or the middle plate 20) can play a positioning role, so as to facilitate determining whether the connecting column 62 is installed in place, thereby helping to improve the installation efficiency.

[0113] The second possible embodiment is similar to the first possible embodiment, differing in the positions of the abutment 60 and the inclined surface 71. In the second possible embodiment, the abutment 60 is disposed on the sealing plate 10, and the wedge block 70 is formed on the middle plate 20. The end of the wedge block 70 with a smaller cross-sectional area is located above the end of the wedge block 70 with a larger cross-sectional area. The inclined surface 71 extends obliquely downward from the first end to the second end and gradually approaches the sealing plate 10. In this embodiment, when the middle plate 20 switches from the intermediate position to the second position, the wedge block 70 pushes the abutment 60 to slide along the inclined surface 71, thereby driving the sealing plate 10 to move in the first direction.

[0114] In the embodiment where the first position is located between the middle position and above the second position, the specific implementation structure of the downward movement of the middle plate 20 to drive the sealing plate 10 to move toward the side wall of the storage chamber 120 includes but is not limited to the following possible methods.

[0115] As shown in FIG14 , the first example in which the first position is above the intermediate position and the second position is similar to the first possible embodiment, except that, while the wedge block 70 is disposed on the sealing plate 10 and the inclined surface 71 is formed on the middle plate 20, the inclined surface 71 in this example extends obliquely downward from the first end (the end with the smaller cross-sectional area of ​​the wedge block 70) to the second end (the end with the larger cross-sectional area of ​​the wedge block 70) and gradually away from the storage chamber 120. FIG14 is a simplified diagram illustrating the state change of the abutting member 60 and the wedge block 70 in another embodiment of the sealing door 110 provided herein as the middle plate 20 descends from the intermediate position to the second position.

[0116] The second example in which the first position is located above the middle position and the second position is similar to the second possible embodiment, except that, when the push-up member 60 is provided on the sealing plate 10 and the inclined surface 71 is formed on the middle plate 20, the inclined surface 71 in this example extends obliquely upward from the first end to the second end and gradually approaches the storage chamber 120, and the first end of the inclined surface 71 is located below the second end of the inclined surface 71.

[0117] In general, one of the middle plate 20 and the sealing plate 10 is provided with a slope 71, and the other is provided with a push piece 60. The slope 71 is inclined to the middle plate 20. When the middle plate 20 switches from the middle position to the second position, the push piece 60 slides from the first end of the slope 71 to the second end of the slope 71, so that the sealing plate 10 gradually approaches the storage chamber 120 along the first direction.

[0118] During the process of switching the middle plate 20 between the above-mentioned second position and the intermediate position, on the basis of the mechanical structure composed of the abutment 60 and the inclined surface 71 (for example, formed by the wedge block 70) of the linkage structure, in order to prevent the sealing plate 10 from continuing to move along the second direction, so that the middle plate 20 and the sealing plate 10 produce relative movement along the second direction, the linkage structure also includes an outer plate 30, which is located on the side of the middle plate 20 away from the sealing plate 10, and the outer plate 30 is connected to the sealing plate 10 through the first connecting part 40; the thickness direction of the outer plate 30 is parallel to the first direction, that is, the outer plate 30 is parallel to the middle plate 20. When the middle plate 20 switches between the first position and the intermediate position, the outer plate 30 moves in the same direction as the sealing plate 10 along the second direction via the first connecting portion 40. That is, while the sealing plate 10 moves in the same direction as the middle plate 20, it can drive the outer plate 30 connected thereto to move in the same direction. When the middle plate 20 is in the intermediate position, the outer plate 30 is used to abut against the limiting member 122 on the storage chamber 120, so that the outer plate 30 cannot continue to move in the second direction. When the middle plate 20 switches between the second position and the intermediate position, the outer plate 30 blocks the sealing plate 10 from continuing to move in the second direction via the first connecting portion 40, so that relative movement occurs between the middle plate 20 and the sealing plate 10 along the second direction. In this process, the mechanical structure formed by the abutting member 60 and the inclined surface 71 (e.g., formed by the wedge block 70) can be used to achieve the switching of the sealing plate 10 between the initial state and the sealing state.

[0119] Specifically, as shown in Figures 6 and 7, the driver 80 drives the middle plate 20, which is in the first position, to rise in the +Z direction. The middle plate 20 drives the sealing plate 10 to rise in the +Z direction. Simultaneously, the sealing plate 10 drives the outer plate 30 to rise in the +Z direction until the middle plate 20 moves up to the middle position, with the sealing plate 10 facing the opening 121 of the storage chamber 120. During this period, the sealing plate 10 is in the initial state, i.e., there is a gap W between the sealing plate 10 and the sidewall of the storage chamber 120. The driver 80 continues to drive the middle plate 20 to rise in the +Z axis direction. At this time, the outer plate 30 is blocked by the upper limit member 122 of the storage chamber 120, and the outer plate 30 no longer moves in the Z axis direction. At the same time, the outer plate 30 blocks the sealing plate 10 from continuing to move in the second direction through the first connecting part 40, that is, the sealing plate 10 no longer moves in the Z axis direction, but under the action of the mechanical structure composed of the support member 60 and the inclined surface 71 (for example, formed by the wedge block 70), as the middle plate 20 moves upward, it moves in the -X axis direction, and the sealing plate 10 gradually moves away from the middle plate 20 to approach the side wall of the storage chamber 120 until the middle plate 20 moves up to the second position, the sealing plate 10 is tightly attached to the side wall of the storage chamber 120, and the opening 121 is closed by the sealing plate 10, thereby achieving the sealing of the storage chamber 120.

[0120] On the contrary, the process of the sealing door 110 moving to release the seal of the storage chamber 120 generally includes the following steps. The driver 80 drives the middle plate 20 located in the second position to descend along the -Z axis direction. At this time, relative sliding occurs between the middle plate 20 and the outer plate 30, and the outer plate 30 remains stationary. At the same time, the sealing plate 10 moves along the +X axis direction as the middle plate 20 descends. The sealing plate 10 gradually approaches the middle plate 20 to move away from the side wall of the storage chamber 120, so that the opening 121 is opened. Until the middle plate 20 descends to the middle position, the sealing plate 10 returns to its initial state. The driver 80 continues to drive the middle plate 20 located in the middle position to descend along the -Z axis direction, driving the sealing plate 10 and the outer plate 30 to descend along the -Z axis direction until the middle plate 20 moves down to the first position.

[0121] Figure 15 illustrates a sealing door 110 according to an embodiment of the present application, omitting the abutment 60 and wedge 70. In one example of the present application, as shown in Figures 5 and 15 , the first connecting portion 40 can be an elastic member. The first connecting portion 40 is used to apply elastic force to the sealing plate 10, causing it to return to a position closer to the middle plate 20.

[0122] Continuing to refer to Figures 6 and 7, when the middle plate 20 is located at any position between the first position and the intermediate position, the first connecting portion 40 can be in a free state, and the sealing plate 10 is in an initial state. The free state refers to a state in which the first connecting portion 40 is not subjected to external forces. For example, if the first connecting portion 40 is a spring, in the free state, the spring does not undergo elastic deformation.

[0123] Referring to Figures 7 and 8 , when the driver 80 drives the middle plate 20 to switch from the intermediate position to the second position along the second direction, the sealing plate 10 moves in the first direction, gradually moving away from the middle plate 20. During this process, the distance between the sealing plate 10, the outer plate 30, and the middle plate 20 in the first direction increases, and the first connecting portion 40 elastically deforms accordingly. When the middle plate 20 reaches the second position, the sealing plate 10 switches to a sealed state. When the driver 80 drives the middle plate 20 to switch from the second position to the intermediate position along the second direction, the elastically deformed first connecting portion 40 generates an elastic force to restore its original shape, which causes the sealing plate 10 to move in the first direction toward the middle plate 20.

[0124] According to this design, firstly, the first connecting portion 40 can undergo elastic deformation to ensure that the sealing plate 10 can move along the first direction relative to the middle plate 20 and the outer plate 30; secondly, when the middle plate 20 switches from the second position to the middle position, the first connecting portion 40 generates elastic force, prompting the sealing plate 10 to return to its initial state as quickly as possible, so that the sealing plate 10 can quickly open the opening 121 to quickly release the seal on the storage chamber 120.

[0125] In some examples, the first connecting portion 40 can be implemented using a spring, such as shown in FIG15 , with one end of the spring connected to the outer plate 30 and the other end connected to the sealing plate 10 . The spring has a bend. In other examples, the first connecting portion 40 can be implemented using a spring. The spring and spring can be made of elastic materials such as spring steel and plastic.

[0126] In some embodiments, the sealing plate 10 is connected to the middle plate 20 via a second connecting portion 50; when the middle plate 20 switches between the first position and the middle position, the second connecting portion 50 is used to drive the sealing plate 10 to move in the same direction along the second direction; the second connecting portion 50 is an elastic member, used to apply an elastic force to the sealing plate 10 to reset the sealing plate 10 to a position close to the middle plate 20. As shown in Figures 5 and 15, the second connecting portion 50 can be an elastic member. Please continue to refer to Figures 6 and 7. When the middle plate 20 is at any position between the first position and the middle position, the second connecting portion 50 can be in a free state, and at the same time, the sealing plate 10 is in an initial state. The free state refers to a state in which the second connecting portion 50 is not subjected to an external force. Taking the second connecting portion 50 as a spring as an example, in the free state, the length of the spring is the original length. Referring to Figures 7 and 8 , when the driver 80 drives the middle plate 20 to switch from the intermediate position to the second position along the second direction, the sealing plate 10 moves in the first direction, gradually moving away from the middle plate 20. During this process, the distance between the sealing plate 10, the outer plate 30, and the middle plate 20 in the first direction increases, and the second connecting portion 50 elastically deforms accordingly. When the middle plate 20 reaches the second position, the sealing plate 10 switches to a sealed state. When the driver 80 drives the middle plate 20 to switch from the second position to the intermediate position along the second direction, the elastically deformed second connecting portion 50 generates an elastic force to restore its original shape, which causes the sealing plate 10 to move in the first direction toward the middle plate 20.

[0127] The second connecting portion 50 can be, for example, a spring, or a spring as shown in Figure 15. The spring and the spring can be made of elastic materials such as spring steel and plastic.

[0128] It should be noted that the present application may include at least one of the first connecting portion 40 and the second connecting portion 50 to enable the sealing plate 10 to automatically return to its initial position when the middle plate 20 switches from the intermediate position to the second position along the second direction. Alternatively, the present application may not include the first connecting portion 40 and the second connecting portion 50. In this case, the sealing plate 10, the middle plate 20, and the outer plate 30 may be connected in any other manner as long as the aforementioned functions are met.

[0129] Continuing with FIG15 , in an embodiment in which a first connecting portion 40 and a second connecting portion 50 are provided, the first connecting portion 40 is a spring and the second connecting portion 50 is a spring. When the middle plate 20 switches between the first position and the intermediate position, the sealing plate 10 is in its initial state, and both the first connecting portion 40 and the second connecting portion 50 are in a free state, i.e., both the spring and the spring are in their original states. The ends of the spring are connected to the outer plate 30 and the sealing plate 10, respectively, and the ends of the spring are at different heights in the second direction, thereby ensuring that the spring can elastically deform when the middle plate 20 switches between the intermediate position and the second position. The ends of the spring are connected to the middle plate 20 and the sealing plate 10, respectively, and the ends of the spring are at different heights in the second direction, thereby ensuring that the spring can elastically deform when the middle plate 20 switches between the intermediate position and the second position. By making the ends of the spring and the spring different in height in the second direction, for example, the first connecting portion 40 and the second connecting portion 50 in the free state both extend in the second direction. In this way, the extension direction of the first connection part 40 and the second connection part 50 is the same as the movement direction of the middle plate 20, so as to ensure that the first connection part 40 and the second connection part 50 can produce elastic deformation when the middle plate 20 switches between the intermediate position and the second position. It is easy to understand that although the spring piece is bent, its main extension direction is the same as the movement direction of the middle plate 20. In addition, the embodiment of the present application is not limited to the first connection part 40 being a spring and the second connection part 50 being a spring. The first connection part 40 and the second connection part 50 can also adopt elastic parts of other structures, as long as it can ensure that the first connection part 40 and the second connection part 50 can produce elastic deformation when the middle plate 20 switches between the intermediate position and the second position, so that the sealing plate 10 can automatically return to the position of the initial state when the middle plate 20 switches from the intermediate position to the second position along the second direction.

[0130] Figure 16 is a front view of a sealed door 110 provided in an embodiment of the present application, omitting the outer panel 30. In one embodiment of the present application, as shown in Figure 16 , the middle panel 20 is provided with a guide rail 22 extending along a second direction, and the outer panel 30 is provided with a sliding portion (not shown) that slides with the guide rail 22 along the second direction. Of course, in actual applications, the guide rail 22 can also be provided on the outer panel 30, while the sliding portion is provided on the middle panel 20. When the middle panel 20 switches between the second position and the intermediate position, the sliding portion and the guide rail 22 slide relative to each other.

[0131] At the same time, a stopper 122 is protruding from the outer surface of the side wall of the storage chamber 120, and the stopper 122 is located on one side of the opening 121 along the second direction. In this embodiment, when the middle plate 20 switches from the first position to the intermediate position along the second direction, it drives the outer plate 30 to move in the same direction. When the middle plate 20 reaches the intermediate position, the stopper 122 abuts the outer plate 30. During the switching process of the middle plate 20 from the intermediate position to the second position along the second direction, the outer plate 30 is blocked by the stopper 122 and cannot move. Relative sliding occurs between the sliding portion and the guide rail 22, allowing the middle plate 20 to move relative to the outer plate 30 in the second direction.

[0132] For example, when the second direction is the vertical direction (i.e., the Z-axis direction) and the first position is below the middle position, the limit member 122 is specifically arranged above the opening 121. When the middle plate 20 is between the first position and the middle position, the sliding portion can be specifically located at the top end of the guide rail 22. When the middle plate 20 continues to move upward from the middle position, the guide rail 22 moves upward accordingly. The limit member 122 can limit the displacement of the outer plate 30 along the +Z-axis direction, and the outer plate 30 cannot rise until the middle plate 20 reaches the second position. The sliding portion can be specifically located at the bottom end of the guide rail 22.

[0133] When the second direction is the vertical direction (i.e., the Z-axis direction) and the first position is above the middle position, the limit member 122 is specifically arranged below the opening 121. When the middle plate 20 is between the first position and the middle position, the sliding portion can be specifically located at the bottom end of the guide rail 22. When the middle plate 20 continues to move downward from the middle position, the limit member 122 can limit the displacement of the outer plate 30 along the -Z-axis direction, and the outer plate 30 cannot descend until the middle plate 20 reaches the second position. The sliding portion can be specifically located at the top end of the guide rail 22.

[0134] Of course, in the embodiment where the second direction is the Y-axis direction, the limiting member 122 can be specifically disposed on the left or right side of the opening 121 .

[0135] In Figure 16 , two guide rails 22 are provided, one on each side of the middle plate 20. Accordingly, two sliding portions are also provided, and the two sliding portions slide in symmetric engagement with the two guide rails 22. Of course, the number of sliding portions and guide rails 22 is not limited to the above number and can be designed based on specific operating conditions. As shown in Figure 16 , the guide rails 22 can be, for example, ribs protruding from the middle plate 20 or grooves recessed into the middle plate 20, though this embodiment does not impose any specific limitations on this aspect.

[0136] As in the sealed door 110 disclosed herein, the sliding portion may be, for example, a roller, or other structures such as a slider, which is not specifically limited in this embodiment.

[0137] Another embodiment of the present application is similar to the embodiment shown in Figure 16, except for the installation positions of the guide rail 22 and the sliding portion. In this embodiment, the guide rail 22 is provided on the outer plate 30 and extends along the second direction, and the sliding portion is provided on the middle plate 20. In this way, when the middle plate 20 switches between the middle position and the second position, the sliding portion slides along the second direction. Taking the second direction as the Z-axis direction and the first position being below the middle position as an example, when the middle plate 20 switches between the first position and the middle position, the sliding portion is located at the bottom end of the guide rail 22. In this way, when the middle plate 20 moves from the middle position to the second position, the sliding portion can move upward relative to the guide rail 22, and when the middle plate 20 moves from the middle position to the first position, the sliding portion can push against the guide rail 22, so that the outer plate 30 can move downward synchronously.

[0138] In general, one of the outer plate 30 and the middle plate 20 is provided with a guide rail 22, and the other is provided with a sliding portion, which slidably engages with the guide rail 22. This not only helps ensure that the middle plate 20 can slide relative to the outer plate 30 in the second direction between the intermediate position and the second position, but the engagement between the sliding portion and the guide rail 22 also serves as a guide to guide the movement of the middle plate 20 in the second direction.

[0139] Please continue to refer to Figures 3, 4, 5 to 8. The limiting member 122 may specifically include a first limiting plate 1221 and a second limiting plate 1222 connected in a turning direction. The first limiting plate 1221 is connected to the side wall of the storage chamber 120 through the second limiting plate 1222, and the end of the first limiting plate 1221 away from the second limiting plate 1222 is a free end. Among them, the middle plate 20 and the sealing plate 10 are located on the side of the first limiting plate 1221 facing the storage chamber 120, that is, the middle plate 20 and the sealing plate 10 are staggered with the first limiting plate 1221 in the second direction, and are closer to the storage chamber 120 than the first limiting plate 1221, and the outer plate 30 is opposite to the second limiting plate 1222 in the second direction. Exemplarily, the above-mentioned first limiting plate 1221 and the second limiting plate 1222 can be specifically connected vertically.

[0140] In this embodiment, when the middle plate 20 reaches the intermediate position, the outer plate 30 abuts the free end of the first limiting plate 1221. As the middle plate 20 switches from the intermediate position to the second position, the outer plate 30 is blocked by the first limiting plate 1221, preventing it from moving. A portion of the middle plate 20 can extend between the first limiting plate 1221 and the sidewall of the storage chamber 120. This allows the first limiting plate 1221 of the limiting member 122 to limit the outer plate 30. Furthermore, the first limiting plate 1221 and the second limiting plate 1222 do not interfere with the movement of the middle plate 20, ensuring that the middle plate 20 can continue to move in the second direction.

[0141] FIG17 is a schematic cross-sectional view of the sealing door 110 shown in FIG16 along the AA direction. In the above embodiment, referring to FIG5 to FIG8 and FIG17 , the size of the middle plate 20 is larger than the size of the sealing plate 10 and the outer plate 30. As shown in FIG5 to FIG8 , the size of the sealing plate 10 and the outer plate 30 can be equal. In this example, the sealing plate 10 can be aligned with the outer plate 30. Alternatively, as shown in FIG17 , the size of the sealing plate 10 can be smaller than the size of the outer plate 30. For example, the above-mentioned size can be the height in the second direction.

[0142] In some embodiments, the sealing door 110 is configured to have a first escape space. When the middle plate 20 switches between the first position and the intermediate position, the second connecting portion 50 is located within the first escape space, allowing the sealing plate 10 to fit closely with the middle plate 20. This design eliminates any gap between the sealing plate 10 and the middle plate 20 in their initial state, minimizing the thickness of the sealing door 110 when the middle plate 20 switches between the first position and the intermediate position.

[0143] Furthermore, in some embodiments, please continue to refer to Figures 15 to 18, the sealing plate 10 is recessed on one side facing the middle plate 20 to form a groove 11, and the above-mentioned first avoidance space includes the groove 11. In this case, when the middle plate 20 switches between the first position and the middle position, the second connecting portion 50 is accommodated in the groove 11, so that the sealing plate 10 in the initial state fits with the middle plate 20. In this example, the middle plate 20 and the groove wall of the groove 11 together form the above-mentioned first avoidance space for accommodating the second connecting portion 50. In a specific embodiment, the middle plate 20 protrudes toward the sealing plate 10 to form a protrusion 21, and the protrusion 21 extends into the groove 11. The second connecting portion 50 is a spring, which is located in the groove 11 and between the protrusion 21 and the groove wall of the groove 11, and one end of the spring is connected to the protrusion 21 and the other end is connected to the groove wall of the groove 11.

[0144] Figure 18 is a partial enlarged view of point B in Figure 17. In the specific examples shown in Figures 16 to 18, the middle plate 20 and the outer plate 30 are both frames, a first through hole (not shown in the figure) is formed in the middle of the middle plate 20, and a second through hole 31 is formed in the middle of the outer plate 30. In addition, the sealing plate 10 is recessed on one side facing the outer plate 30 to form a groove 11. The above-mentioned first through hole and second through hole 31 are opposite, and the first through hole, second through hole 31 and groove 11 are connected. When the middle plate 20 switches between the first position and the middle position, the second connecting portion 50 simultaneously occupies part of the space of the first through hole, the second through hole 31 and the groove 11, so that the sealing plate 10 in the initial state fits with the middle plate 20. In this example, the part of the space of the first through hole, the second through hole 31 and the groove 11 together constitute the first avoidance space.

[0145] In this way, there is no gap between the sealing plate 10 in the initial state and the middle plate 20, so that when the middle plate 20 is between the first position and the middle position, the thickness of the sealing door 110 is smaller.

[0146] In addition, compared with the embodiment in FIG. 5 where only the space of the sealing plate 10 in the thickness direction is used to accommodate the second connecting portion 50, in this embodiment, the space of the sealing plate 10, the middle plate 20 and the outer plate 30 in the thickness direction is used to accommodate the second connecting portion 50. Thus, when the parameters of the second connecting portion 50 and the thickness of the sealing plate 10 are the same, the depth of the groove 11 in this embodiment is relatively small, and the structural strength of the sealing plate 10 is higher, which is beneficial to ensuring that the sealing door 110 can seal the storage chamber 120.

[0147] In the embodiment of the present application, a "frame body" refers to a frame formed by connecting the heads and tails of four or more sides, and all the sides jointly enclose a cavity in the middle. When the "frame body" is a rectangular frame, it is specifically in the shape of a "hui" character.

[0148] In the example shown in FIGS. 16 to 18, in order to stably install the second connecting portion 50, the sealing door 110 further has a first mounting plate 23. The first mounting plate 23 is arranged on the side of the middle plate 20 facing the outer plate 30, and both ends of the first mounting plate 23 are connected to both sides of the middle plate 20. In this example, the first mounting plate 23 is opposite to the first through hole, and one end of the second connecting portion 50 is connected to the first mounting plate 23 and the other end is connected to the sealing plate 10.

[0149] Furthermore, the first mounting plate 23 is also accommodated in the second through hole 31 of the outer plate 30 and is opposite to the first through hole. The first mounting plate 23 does not extend beyond the side of the outer plate 30 facing away from the middle plate 20. In this way, on the basis of the embodiment where the first mounting plate 23 is arranged on the side of the middle plate 20 facing the outer plate 30, the second through hole 31 provides a accommodation space for the first mounting plate 23, and the space of the outer plate 30 in the thickness direction is used to accommodate the first mounting plate 23. Compared with the case where the first mounting plate 23 is located between the middle plate 20 and the outer plate 30, in this embodiment, the middle plate 20 and the outer plate 30 can be fitted together. In this way, on the premise of ensuring that the thickness of the sealing door 110 is sufficient to completely seal the storage chamber 120, the thickness of the sealing door 110 can be smaller.

[0150] Certainly, in other embodiments of the present application, the first mounting plate 23 can also be installed in the first through hole, and both ends of the first mounting plate 23 are respectively connected to both sides of the middle plate 20. In this embodiment, the space of the middle plate 20 in the thickness direction is used to accommodate the first mounting plate 23, so that the middle plate 20 and the outer plate 30 can also be fitted together.

[0151] In addition, in a feasible technical solution, one end of the second connecting portion 50 can also be connected to the top surface or the bottom surface of the first through hole.

[0152] It is understood that the sealing door 110 has other variations. In one variation, the first escape space only includes a portion of the first through-hole. In this case, when the sealing plate 10 is in the initial state, the second connecting portion 50 is located within the first through-hole. In another variation, the first escape space only includes a portion of the first through-hole and a portion of the second through-hole 31. In this case, when the sealing plate 10 is in the initial state, the second connecting portion 50 occupies a portion of the space between the first through-hole and the second through-hole 31.

[0153] In combination with the above, it can be seen that the first escape space can be only a portion of the groove 11 or only a portion of the first through hole. Alternatively, the first escape space can include a portion of the groove 11 and a portion of the first through hole, a portion of the first through hole and a portion of the second through hole 31, or a portion of the groove 11, a portion of the first through hole, and a portion of the second through hole 31.

[0154] As shown in Figure 16, two second connecting portions 50 are provided. Increasing the number of second connecting portions 50 helps improve the connection reliability between the sealing plate 10 and the outer plate 30. The number of second connecting portions 50 is not limited to the above number and can be designed according to actual working conditions and needs.

[0155] According to Figures 17 and 18, the sealing plate 10 includes a main plate 12 and a boss 13, and the boss 13 is protruding from the side of the main plate 12 facing the middle plate 20. When the middle plate 20 switches between the first position and the intermediate position, the main plate 12 fits with the middle plate 20, and the boss 13 extends into the first through hole. In this embodiment, the boss 13 can fit with the outer plate 30. With this design, the space in the thickness direction of the middle plate 20 is utilized to accommodate the boss 13. In this way, while ensuring that the overall thickness of the sealing door 110 is small, the thickness of the local position of the sealing plate 10 is increased, and the structural strength of the sealing plate 10 is improved, so that the sealing plate 10 can completely seal the storage chamber 120.

[0156] Figure 19 is a partial enlarged view of point C in Figure 17 . According to the specific embodiments shown in Figures 16 , 17 , and 19 , when the sealing plate 10 is provided with a boss 13, the wedge block 70 can be specifically disposed on the surface of the main plate 12 facing the boss 13. Both the wedge block 70 and the boss 13 extend into the first through-hole, allowing the wedge block 70 to engage with the abutment 60 while also allowing the main plate 12 to conform to the middle plate 20, thereby minimizing the thickness of the sealing door 110. Furthermore, when the middle plate 20 is between the first position and the intermediate position, the abutment 60 and wedge block 70 can simultaneously occupy portions of the first through-hole and portions of the second through-hole 31. In this example, part of the first through hole and part of the second through hole 31 together constitute a second avoidance space. When the middle plate 20 is between the first position and the middle position, the second avoidance space can accommodate the push piece 60 and the wedge block 70, so that the sealing plate 10 in the initial state can fit with the middle plate 20, so as to ensure that the thickness of the sealing door 110 is as small as possible.

[0157] In the embodiment where the push-up member 60 is provided on the middle plate 20, a second mounting plate 24 may also be installed on the middle plate 20, and the push-up member 60 may be fixedly mounted on the second mounting plate 24, and the second mounting plate 24 provides a reliable installation for the push-up member 60. Here, the installation position of the second mounting plate 24 may refer to the installation position of the first mounting plate 23, that is, as shown in Figures 16 and 19, the second mounting plate 24 may be installed on the side of the middle plate 20 facing the outer plate 30, with both ends of the second mounting plate 24 connected to both sides of the middle plate 20, and the second mounting plate 24 is completely accommodated in the second through hole 31 to ensure that the middle plate 20 and the outer plate 30 can fit together, thereby facilitating the thickness of the sealing plate 10 to be as small as possible. Alternatively, the second mounting plate 24 may also be installed in the first through hole, with both ends of the second mounting plate 24 connected to both sides of the middle plate 20.

[0158] As shown in Figures 16 and 19, abutments 60 are fixedly mounted on both the top and bottom of the middle plate 20. Accordingly, two second mounting plates 24 are provided, one located near the top and one located near the bottom of the first through-hole of the middle plate 20. This increases the number of matching relationships between the abutments 60 and the inclined surfaces 71, ensuring that the sealing plate 10 can be moved when the middle plate 20 switches between the intermediate and second positions. The number of abutments 60 is not limited to the number described above and can be designed based on actual operating conditions and requirements.

[0159] In addition to including a portion of the first through hole and a portion of the second through hole 31, the implementation method of the second escape space can also refer to the first escape space. For example, in this solution, when the sealing plate 10 is in the initial state, the abutment 60 and the inclined surface 71 are both located on the outer periphery of the boss 13. For another example, the second escape space may only include a portion of the first through hole. In this solution, when the sealing plate 10 is in the initial state, the abutment 60 and the inclined surface 71 are both located on the first through hole. For another example, the second escape space can be enclosed by the outer peripheral surface of the boss 13, the side of the main board 12 facing the boss 13, and the hole wall of the first through hole.

[0160] In addition, referring to Figures 16 and 17 , in an embodiment where the middle plate 20 is a frame and has a first through hole in the middle portion of the middle plate 20, when the middle plate 20 switches between the first position and the intermediate position, the first connecting portion 40 can be located within the first through hole, with one end of the first connecting portion 40 connected to the outer plate 30 and the other end connected to the sealing plate 10, so that the middle plate 20 can be aligned with the outer plate 30. This not only prevents interference between the first connecting portion 40 connecting the outer plate 30 and the sealing plate 10 and the middle plate 20, but also utilizes the space in the thickness direction of the middle plate 20 to accommodate the first connecting portion 40, thereby improving the utilization rate of the first through hole and facilitating the minimization of the thickness of the sealing door 110.

[0161] Among them, when the first connecting part 40 is specifically a spring clip, as shown in Figure 16, four first connecting parts 40 can be provided. When the middle plate 20 is between the first position and the middle position, the four spring clips are all located in the first through hole, two of which are close to one side of the middle plate 20 along the Y-axis direction, and the other two spring clips are close to the other side of the middle plate 20 along the Y-axis direction.

[0162] As another technical solution, an embodiment of the present application also provides a semiconductor process equipment, which includes: a storage chamber 120 and the above-mentioned sealing door 110 provided in an embodiment of the present application, wherein the storage chamber 120 can accommodate a wafer box; when the middle plate 20 of the sealing door 110 switches between the second position and the middle position, the sealing plate 10 can move in a first direction relative to the storage chamber 120 to open and close the storage chamber 120.

[0163] In some embodiments, a stopper 122 is protruding from the outer surface of the sidewall of the storage chamber 120, and the stopper 122 is located on one side of the opening 121 along the second direction. In this embodiment, when the middle plate 20 switches from the first position to the intermediate position along the second direction, it drives the outer plate 30 to move in the same direction; when the middle plate 20 reaches the intermediate position, the stopper 122 abuts the outer plate 30. During the switching process of the middle plate 20 from the intermediate position to the second position along the second direction, the outer plate 30 is blocked by the stopper 122 and cannot move. Relative sliding occurs between the sliding portion and the guide rail 22, allowing the middle plate 20 to move relative to the outer plate 30 in the second direction.

[0164] For example, when the second direction is the vertical direction (i.e., the Z-axis direction) and the first position is below the middle position, the limit member 122 is specifically arranged above the opening 121. When the middle plate 20 is between the first position and the middle position, the sliding portion can be specifically located at the top end of the guide rail 22. When the middle plate 20 continues to move upward from the middle position, the guide rail 22 moves upward accordingly. The limit member 122 can limit the displacement of the outer plate 30 along the +Z-axis direction, and the outer plate 30 cannot rise until the middle plate 20 reaches the second position. The sliding portion can be specifically located at the bottom end of the guide rail 22.

[0165] When the second direction is the vertical direction (i.e., the Z-axis direction) and the first position is above the middle position, the limit member 122 is specifically arranged below the opening 121. When the middle plate 20 is between the first position and the middle position, the sliding portion can be specifically located at the bottom end of the guide rail 22. When the middle plate 20 continues to move downward from the middle position, the limit member 122 can limit the displacement of the outer plate 30 along the -Z-axis direction, and the outer plate 30 cannot descend until the middle plate 20 reaches the second position. The sliding portion can be specifically located at the top end of the guide rail 22.

[0166] Of course, in the embodiment where the second direction is the Y-axis direction, the limiting member 122 can be specifically disposed on the left or right side of the opening 121 .

[0167] The specific structure of the limiting member 122 has been described in detail in the above embodiment and will not be repeated here.

[0168] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A sealed door for semiconductor process equipment, characterized in that: include: A driver, and a middle plate and a sealing plate arranged in sequence along a first direction; The driver is capable of driving the middle plate to reciprocate and translate along a second direction, and the middle plate has a first position, a second position, and an intermediate position between the first position and the second position; wherein the first direction is parallel to the thickness direction of the middle plate and perpendicular to the second direction; A linkage structure is provided between the middle plate and the sealing plate, and the linkage structure is configured such that: when the middle plate switches between the first position and the intermediate position, it can drive the sealing plate to move in the same direction along the second direction; when the middle plate switches between the second position and the intermediate position, it can drive the sealing plate to move along the first direction, so that the sealing plate moves away from the middle plate to approach the storage chamber of the semiconductor process equipment, or the sealing plate moves closer to the middle plate to move away from the storage chamber; When the middle plate is at the second position, the sealing plate is in contact with the storage chamber to seal the storage chamber.

2. The sealing door according to claim 1, characterized in that: The linkage structure includes an inclined surface provided on one of the middle plate and the sealing plate, and a resisting member provided on the other; the inclined surface is inclined in the second direction, and has a first end and a second end along the inclined direction of the inclined surface; When the middle plate switches between the first position and the intermediate position, the abutting member remains in a position abutting against the first end of the inclined surface, and the sealing plate is located close to the middle plate; when the middle plate switches between the second position and the intermediate position, the abutting member slides relative to the inclined surface to drive the sealing plate to move along the first direction; when the middle plate is in the second position, the abutting member abuts against the second end of the inclined surface, and the sealing plate is located away from the middle plate and in contact with the storage chamber.

3. The sealing door according to claim 2, characterized in that: A wedge block is provided on one of the middle plate and the sealing plate, and the wedge block is formed with the inclined surface.

4. The sealing door according to claim 2, characterized in that: The abutting member is configured to be in line contact or point contact with the inclined surface.

5. The sealing door according to any one of claims 1 to 4, characterized in that: The linkage structure further includes an outer plate, which is located on a side of the middle plate away from the sealing plate, and is connected to the sealing plate via a first connecting portion; When the middle plate switches between the first position and the intermediate position, the outer plate moves in the same direction as the sealing plate along the second direction through the first connecting portion; When the middle plate is located at the middle position, the outer plate is used to abut against the limiting member on the storage chamber so that the outer plate cannot continue to move along the second direction; When the middle plate switches between the second position and the intermediate position, the outer plate blocks the sealing plate from continuing to move along the second direction through the first connecting portion, so that relative movement along the second direction occurs between the middle plate and the sealing plate.

6. The sealing door according to claim 5, characterized in that: The first connecting portion is an elastic member, which is used to apply elastic force to the sealing plate to restore the sealing plate to a position close to the middle plate.

7. The sealing door according to any one of claims 1 to 4, characterized in that: The sealing plate is connected to the middle plate via a second connecting portion; when the middle plate switches between the first position and the intermediate position, the second connecting portion is used to drive the sealing plate to move in the same direction along the second direction; The second connecting portion is an elastic member, which is used to apply elastic force to the sealing plate to restore the sealing plate to a position close to the middle plate.

8. The sealing door according to claim 5, characterized in that: The first connecting part is a spring, and the second connecting part is a spring; when the middle plate switches between the first position and the intermediate position, the spring and the spring are both in an original state, wherein the two ends of the spring are respectively connected to the outer plate and the sealing plate, and the two ends of the spring are at different heights in the second direction; the two ends of the spring are respectively connected to the middle plate and the sealing plate, and the two ends of the spring are at different heights in the second direction.

9. The sealing door according to claim 7, characterized in that: The sealing door is configured to have a first avoidance space, and when the middle plate switches between the first position and the intermediate position, the second connecting portion is located in the first avoidance space, so that the sealing plate fits the middle plate.

10. The sealing door according to claim 9, characterized in that: A side of the sealing plate facing the middle plate is recessed to form a groove, and the first avoidance space includes the groove.

11. The sealing door according to claim 2, characterized in that: The sealing door is configured to have a second avoidance space. When the middle plate switches between the first position and the intermediate position, the abutting member is located in the second avoidance space, so that the sealing plate fits the middle plate.

12. The sealing door according to claim 9 or 11, characterized in that: The middle plate is a frame, a first through hole is formed in the middle of the middle plate, and the first avoidance space includes a part of the first through hole; or The second avoidance space includes a portion of the first through hole.

13. The sealing door according to claim 5, characterized in that: The middle plate is a frame, and a first through hole is formed in the middle of the middle plate. When the middle plate switches between the first position and the middle position, the first connecting portion is accommodated in the first through hole, so that the outer plate fits the middle plate.

14. The sealing door according to claim 5, characterized in that: The middle plate is a frame, a first through hole is formed in the middle of the middle plate, the sealing plate comprises a main plate and a boss, and the boss is protrudingly arranged on a side of the main plate facing the middle plate; When the middle plate switches between the first position and the intermediate position, the main plate fits with the middle plate, and the boss extends into the first through hole and fits with the outer plate.

15. The sealing door according to claim 5, characterized in that: It also includes a first mounting plate, wherein the first mounting plate is connected to the middle plate, and one end of the second connecting portion is connected to the first mounting plate and the other end is connected to the sealing plate; The middle plate and the outer plate are both frames, a first through hole is formed in the middle of the middle plate, and a second through hole is formed in the middle of the outer plate; the first mounting plate is accommodated in the second through hole and is opposite to the first through hole.

16. The sealing door according to claim 5, characterized in that: A guide rail is provided on one of the outer plate and the middle plate, and a sliding portion is provided on the other plate, and the sliding portion and the guide rail are slidably matched along the second direction; When the middle plate switches between the second position and the intermediate position, relative sliding occurs between the sliding portion and the guide rail.

17. A semiconductor process equipment, characterized in that: include: a storage chamber capable of accommodating a cassette; The sealing door according to any one of claims 1 to 16, when the middle plate of the sealing door is switched between the second position and the intermediate position, the sealing plate can move along a first direction relative to the storage chamber to open and close the storage chamber.

18. The semiconductor process equipment according to claim 17, characterized in that: The linkage structure further includes an outer plate, which is located on a side of the middle plate away from the sealing plate, and is connected to the sealing plate via a first connecting portion; A limiting member is protrudingly provided on the outer surface of the storage chamber; When the middle plate is located at the middle position, the outer plate abuts against the limiting member on the storage chamber, so that the outer plate cannot continue to move along the second direction; When the middle plate switches between the second position and the intermediate position, the outer plate blocks the sealing plate from continuing to move along the second direction through the first connecting portion, so that relative movement along the second direction occurs between the middle plate and the sealing plate.

19. A semiconductor processing equipment, characterized in that: include: Process chamber; The semiconductor process equipment according to claim 17 or 18; A wafer box is accommodated in a storage chamber of the semiconductor process equipment, and the wafer box is used to carry a plurality of wafers; as well as A transfer device is used to transfer the wafer between the storage chamber and the process chamber.

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