Automatic conveyance device and automatic conveyance system

The automatic transfer device and system address the complexity of managing multiple transfer carts in a substrate processing line by using identification codes and code acquisition units, resulting in improved operational efficiency and labor savings.

WO2025115165A1PCT designated stage expired Publication Date: 2025-06-05FUJI CORP
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Patent Information

Application Number
PCT/JP2023/042887
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-11-30
Publication Date
2025-06-05

AI Technical Summary

Technical Problem

The management and operation of multiple transfer carts in an automatic transfer device for a substrate processing line become complex and cumbersome due to the variety of tools and members to be transferred and the changing transport destinations.

Method used

An automatic transfer device and system that includes a loading platform, a transfer cart with an identification code for individual cart information, and an automatic guided vehicle with a code acquisition unit to identify and manage the transfer carts based on their individual information.

Benefits of technology

The solution enables proper identification and management of transfer carts, simplifying their operation and management, which leads to labor savings and efficient operation of the substrate processing line.

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Abstract

This automatic conveyance device, for automatically delivering an object to be conveyed to a board assembly work machine making up a board assembly work line, includes a conveying cart that has a loading deck on which the object to be conveyed is loaded and an identification code indicating individual information of the cart, and an automatic traveling vehicle that is capable of detachably linking the conveying cart and traveling, and that has a code acquisition unit that acquires the identification code when linking the conveying cart.
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Description

Automatic conveying device and automatic conveying system

[0001] The present specification relates to an automatic transfer device and an automatic transfer system that are applied to a substrate-related work line.

[0002] A technique for mass-producing substrate products by performing substrate-related operations on substrates on which circuit patterns are formed has become widespread. It is also common to arrange multiple types of substrate-related operations machines side by side to form a substrate-related operation line. Some substrate-related operations machines require replacement of tools and replenishment of consumed parts. Transporting tools to be replaced and parts to be replenished has traditionally been performed by workers. In recent years, in response to demands for labor saving, the application of automatic transport devices that automatically transport tools and parts has progressed. One example of an automatic transport device is a configuration that includes a transport cart on which the object to be transported is loaded, and an automatic vehicle that tows the transport cart. Examples of technologies related to this type of automatic transport device are disclosed in Patent Documents 1 and 2.

[0003] Patent Document 1 discloses a technology for a transport system including a carriage (transport cart) carrying cargo and an automated guided vehicle (automatic vehicle) that supports the carriage and moves. When the carriage is accurately positioned and supported relative to the automated guided vehicle, the R / W head of the automated guided vehicle reads information recorded on the carriage's ID tag to confirm the support state. Patent Document 2 discloses a technology in which a marker reader installed on a self-propelled robot recognizes the code of a marker installed on a cart being towed, and obtains the cart's identification number information, destination information, and priority information. It also discloses that the marker can be selected from two-dimensional codes, barcodes, color codes, etc.

[0004] Japanese Patent Application Laid-Open No. 9-311720 Japanese Patent Application Laid-Open No. 2020-40459

[0005] However, when the automatic transfer devices disclosed in Patent Documents 1 and 2 are applied to a substrate-related operation line, there are multiple types of tools and components to be transferred, and the substrate-related operation machines to which the objects are transferred also change, which makes the management and operation of the multiple transfer carts complicated and cumbersome.

[0006] Therefore, the problem to be solved in this specification is to provide an automatic transport device and an automatic transport system that can properly manage and operate transport carts that transport objects to a substrate-related work line.

[0007] This specification discloses an automatic transport device that automatically transfers objects to be transported to a substrate-related work machine that constitutes a substrate-related work line, and that includes a loading platform on which the objects to be transported are loaded, a transport cart having an identification code that indicates cart individual information, and an automatic driving vehicle that can travel with the transport cart detachably connected to it, and that has a code acquisition unit that acquires the identification code when the transport cart is connected to it.

[0008] This specification also discloses an automatic transport system comprising: a loading platform on which transport objects are loaded and which are automatically handed over to a substrate-related work machine that constitutes a substrate-related work line; a transport cart having an identification code indicating cart individual information; an automatic driving vehicle that can travel with the transport cart detachably connected and has a code acquisition unit that acquires the identification code when the transport cart is connected; and a management unit that performs management based on the cart individual information indicated by the identification code acquired by the code acquisition unit.

[0009] This specification discloses the technical idea of ​​changing "the automatic conveying system according to claim 9" to "the automatic conveying system according to claim 9 or 10" in claim 11 as originally filed, the technical idea of ​​changing "the automatic conveying system according to claim 9" to "the automatic conveying system according to any one of claims 9 to 11" in claim 12 as originally filed, and the technical idea of ​​changing "the automatic conveying system according to claim 6" to "the automatic conveying system according to any one of claims 6 to 13" in claim 14 as originally filed.

[0010] According to the disclosed configuration, when an autonomous vehicle is coupled to a transport cart that transports an object to be transported to a substrate-related work line, a code acquisition unit on the autonomous vehicle acquires the identification code provided on the transport cart, thereby enabling individual transport carts to be identified and managed and operated appropriately.

[0011] 7 is a perspective view of an automatic conveying device according to an embodiment, the automatic conveying device including a first-type transport cart and an automatic guided vehicle, showing a state in which an object to be conveyed is loaded on the transport cart. FIG. 8 is a perspective view of an automatic conveying device according to another embodiment, the automatic conveying device including a second-type transport cart and an automatic guided vehicle, showing a state in which an object to be conveyed is loaded on the transport cart. FIG. 9 is a perspective view of the first-type transport cart viewed from diagonally below the rear. FIG. 10 is a perspective view of the automatic guided vehicle viewed from diagonally above the front. FIG. 11 is a partial perspective view showing a situation in which a code acquisition unit on the automatic guided vehicle reads an identification code provided on a second-type transport cart. FIG. 12 is a diagram schematically illustrating an automatic conveying system according to an embodiment. FIG. 13 is a diagram of the first half of an operation flow illustrating the operation of the automatic conveying system when transport request information for an object to be conveyed is received from a line management device. FIG. 14 is a diagram of the second half of the operation flow following FIG.

[0012] 1. Automated Guided Transport Device (1A, 1B) of the Embodiment First, the overall configuration of the automated guided transport device (1A, 1B) of the embodiment will be described with reference to FIGS. 1 and 2. As indicated by the arrows in the upper right corners of FIGS. 1 and 2, the front, rear, left, and right directions are defined as common directions for the automated guided transport devices (1A, 1B), the transport carts (2, 5), and the automated guided vehicle 3. In this embodiment, the automated guided transport devices (1A, 1B) have two types of configurations. That is, the automated guided transport device 1A shown in FIG. 1 includes a first-cart type transport cart 2 and an automated guided vehicle 3. The automated guided transport device 1B shown in FIG. 2 includes a second-cart type transport cart 5 and an automated guided vehicle 3. In this manner, the automated guided vehicle 3 is shared by the two types of transport carts (2, 5) and is reused. The transport carts (2, 5) and the automated guided vehicle 3 are configured to be largely symmetrical with respect to a center line extending in the front-to-rear direction.

[0013] The autonomous vehicle 3 enters the underside of the transport cart (2, 5) from the rear and performs a coupling operation. Completion of the coupling operation forms the autonomous transport device (1A, 1B). In the coupling operation, as described below, the vehicle-side coupling section 45 of the autonomous vehicle 3 couples to the coupling section 40 of the transport cart (2, 5). This enables the autonomous vehicle 3 to travel while towing the coupled transport cart (2, 5). After moving the transport cart (2, 5) to the specified destination, the autonomous vehicle 3 retreats behind the transport cart (2, 5) and performs a detachment operation.

[0014] The automatic transfer devices (1A, 1B) are used to support a substrate-related work line 9 (see FIG. 6 ) that performs predetermined substrate-related work on substrates on which circuit patterns are formed to produce substrate products. A mask unit 29 (an example of an object to be transferred) is loaded on a first-cart type transport cart 2 shown in FIG. 1 . The mask unit 29 is a transport unit for transporting a mask and a substrate support member, and is set up in an external setup area Aout and loaded onto the loading platform 21 of the transport cart 2. The transport cart 2 is coupled to an automated vehicle 3 to form the automatic transfer device 1A. The automatic transfer device 1A travels to a solder printer 92 that constitutes the substrate-related work line 9 and delivers the mask and the substrate support member to the solder printer 92.

[0015] 2 has a feeder magazine 59 (an example of an object to be transported) loaded on it. The feeder magazine 59 is loaded on the loading platform 51 of the transport cart 5 after a plurality of tape feeders 58 have been accommodated in the external setup area Aout. This transport cart 5 is connected to an automated guided vehicle 3 to form an automated transport device 1B. The automated transport device 1B travels to component mounting machines (94, 95) that make up the substrate-related work line 9 and automatically delivers the feeder magazine 59 or a plurality of tape feeders 58 to the component mounting machines (94, 95). In other words, the entire feeder magazine 59 may be delivered, or only the tape feeders 58 may be delivered and the feeder magazine 59 may be left on the loading platform 51.

[0016] Furthermore, the transport cart 5 may have a board magazine (not shown) loaded on the loading platform 51. The board magazine is about the same size as the feeder magazine 59 and can accommodate a plurality of boards. The transport cart 5 loaded with the board magazine is connected to the automatic guided vehicle 3 to form the automatic transport device 1B. The automatic transport device 1B travels to a board insertion machine 91 that constitutes the substrate-related work line 9 and automatically delivers the board magazine or a plurality of boards to the board insertion machine 91. In other words, the entire board magazine may be delivered, or only a plurality of boards may be delivered and the board magazine left on the loading platform 51.

[0017] As described above, the transport of the mask unit 29 (mask, substrate support member), feeder magazine 59 (tape feeder 58), and substrate magazine (substrate) is automated. The transport of the tape feeder 58 meets two types of requirements: tool replacement and component replenishment. Therefore, the transport of replaceable tools used on the substrate-related work line 9, as well as the transport of substrates and components consumed on the substrate-related work line 9, is automated. This achieves labor savings on the substrate-related work line 9. The destination to which the automatic transport devices (1A, 1B) transport the objects is not limited to a substrate-related work machine, but may be, for example, a transfer station provided near the substrate-related work line 9. The automatic transport devices (1A, 1B) can also transport the objects to another destination, such as an equipment warehouse.

[0018] 2. First Cart Type Transport Cart 2 As shown in FIG. 3 , the first cart type transport cart 2 includes a body 20, a power receiving connector 27, a connecting portion 40, and a cart-side guide 41. The body 20 includes a platform 21, a pair of left and right side portions 23, a pair of left and right legs 25, and three pairs of left and right wheels 26. The platform 21 is roughly rectangular in plan view and is positioned horizontally and spaced apart from the floor. The top surface of the platform 21 is provided with four holding portions 22 that detachably hold mask units 29. The mask unit 29 houses a mask on which a solder paste printing pattern is formed and a board support member that tightly contacts the mask when the board is raised. The holding portions 22 can hold any of the multiple types of mask units 29 that are interchangeably used in the solder printing machine.

[0019] Each of the pair of left and right side portions 23 is formed in a vertically long rectangular shape and is provided to extend downward from the left and right edges of the loading platform 21. A roughly triangular reinforcing side plate 24 is attached to the upper front portion of the side portion 23. The space between the left and right side portions 23 on the underside of the loading platform 21 forms an entry area into which the autonomous vehicle 3 enters.

[0020] A pair of left and right legs 25 extending in the front-to-rear direction is provided on the underside of each side portion 23. The pair of left and right legs 25 are bent midway to narrow the distance between them at the front, allowing for easier transfer of the mask unit 29 to the solder printing machine. Wheels 26 for running are provided on the underside of each of the pair of left and right legs 25, near the front, near the center, and near the rear. A total of six wheels 26 are swivel wheels whose running direction can be changed. At least one pair of left and right wheels 26 is provided with a foot-operated wheel lock mechanism (not shown). The wheel lock mechanism is locked when the autonomous vehicle 3 is not coupled, restricting the rotation of the wheels 26 and restricting the movement of the vehicle body 20 to stabilize the stopped state.

[0021] The connecting portion 40 is provided on the underside of the loading platform 21, near the rear of the center in the left-right direction. In this embodiment, the connecting portion 40 is formed using a connecting recess that opens downward and forward. A cart-side guide 41 is provided in front of the connecting portion 40. The cart-side guide 41 is formed in a V-shape that opens toward the rear. The power receiving connector 27 is provided on the underside of the loading platform 21, inside the right reinforcing side plate 24. The power receiving connector 27 receives power supplied from the autonomous vehicle 3. Therefore, power is supplied to electrical components provided on the transport cart 2. One of the electrical components is an electromagnetic solenoid (not shown) that stabilizes the connection with the autonomous vehicle 3. By providing the power receiving connector 27, the transport cart 2 does not require a power source such as a battery, thereby achieving weight reduction and cost reduction.

[0022] 3. Second Cart Type Transport Cart 5 The second cart type transport cart 5 includes a vehicle body 50 as shown in FIGS. 2 and 5. The vehicle body 50 includes a platform 51, a pair of left and right side sections 53, a pair of left and right legs 55, a pair of left and right front wheels 56, and a pair of left and right rear wheels 57. The platform 51 is generally rectangular in plan view and is positioned horizontally and spaced apart from the floor. A roller conveyor 52 is provided on the top surface of the platform 51 for automatically loading and unloading transported objects. The roller conveyor 52 can hold any of multiple types of feeder magazines 59 and multiple types of board magazines, enabling automatic loading and unloading. The feeder magazine 59 houses multiple tape feeders 58 arranged laterally, which supply components using carrier tape. The board magazine houses multiple boards consumed by the board insertion machine 91, either upright or horizontally.

[0023] Each of the pair of left and right side portions 53 is formed in a vertically long rectangular shape and is provided to extend downward from the left and right edges of the loading platform 51. A roughly triangular reinforcing side plate 54 is attached to the upper front portion of the side portion 53. The space between the left and right side portions 53 on the underside of the loading platform 51 forms an entry area into which the autonomous vehicle 3 enters.

[0024] A pair of left and right legs 55 extending in the front-to-rear direction are provided on the underside of each of the side portions 53. A pair of left and right front wheels 56 for traveling are provided on the underside of each of the pair of left and right legs 55, closer to the front. A pair of left and right rear wheels 57 for traveling are provided on the underside of each of the legs 55, closer to the rear. The front wheels 56 and rear wheels 57 are free-wheeling wheels whose traveling direction is variable. A foot-operated wheel lock mechanism is provided on the pair of left and right rear wheels 57. The wheel lock mechanism is locked when the autonomous vehicle 3 is not coupled, restricting the rotation of the rear wheels 57 and restricting the movement of the vehicle body 50, thereby stabilizing the stopped state.

[0025] The configuration of the underside of the loading platform 51 is the same as that of the underside of the first cart type transport cart 2. That is, the coupling portion 40, the cart side guide 41, and the power receiving connector 27 are provided on the underside of the loading platform 51.

[0026] 4. Autonomous Vehicle 3 As shown in Figure 4, the autonomous vehicle 3 is composed of a vehicle-side body 31, multiple drive wheels 32, a pair of left and right front wheels 34, a pair of left and right rear wheels 35, an operation panel 36, a connecting guide 37, a power supply connector 38, a tape detection unit 39, an opposite communication unit 3A, and a vehicle-side connecting unit 45. The autonomous vehicle 3 further includes multiple travel motors and a travel control unit (not shown). The vehicle-side body 31 is generally rectangular parallelepiped-shaped and elongated in the front-to-rear direction, with rounded corners in a plan view. The vehicle-side body 31 is positioned horizontally and slightly spaced from the floor.

[0027] The multiple drive wheels 32 are arranged side by side in the left-right direction at a central position in the fore-and-aft direction under the traveling vehicle-side body 31. In the first embodiment, two drive wheels 32 are provided, but three or more may be provided. Each drive wheel 32 is driven by a respective traveling motor. The multiple drive wheels 32 are capable of rotating at different rotational speeds and in different rotational directions. This allows the autonomous traveling vehicle 3 to move forward, backward, and change direction freely. The start, stop, and rotational direction of the traveling motors are controlled, and the traveling driving force output by the traveling motors is adjusted, by a traveling control unit. Naturally, the rotational speed of the drive wheels 32 and the traveling speed of the autonomous traveling vehicle 3 change as the traveling driving force increases or decreases.

[0028] The pair of left and right front wheels 34 are arranged spaced apart on the left and right sides, near the front of the underside of the traveling vehicle-side body 31. The pair of left and right rear wheels 35 are arranged spaced apart on the left and right sides, near the rear of the underside of the traveling vehicle-side body 31. The total of four front wheels 34 and rear wheels 35 are fixed wheels with their axles fixed in axial direction, or they may be free-wheeling wheels with their axles rotatable in a horizontal plane. The front wheels 34 and rear wheels 35 rotate following the rotation of the two drive wheels 32.

[0029] The tape detection units 39 are provided in a pair, front and rear, at positions near the front and rear on the center line of the underside of the traveling vehicle-side body 31. The tape detection units 39 detect a route display tape 3R (see FIG. 6) provided on the floor surface and output the detection results to the traveling control unit. The route display tape 3R displays the traveling route of the autonomous traveling vehicle 3. The traveling control unit controls the autonomous traveling vehicle 3 so that it travels along the route display tape 3R. A magnetic display tape or an optical display tape can be used as the route display tape 3R. The tape detection units 39 use a detection method that corresponds to the display method of the route display tape 3R.

[0030] Furthermore, the tape detection unit 39 can detect branching points on the driving route indicated by the route display tape 3R. The driving route after the autonomous vehicle 3 passes the branching point is selected by the driving control unit. The driving control unit calculates and estimates the current position, attitude (orientation), and driving speed of the autonomous vehicle 3 using the detection results of the route display tape 3R by the tape detection unit 39 and the control amount of the drive wheels 32, and controls the subsequent driving of the autonomous vehicle 3 based on these. In this way, the driving of the autonomous vehicle 3 is performed automatically mainly under control of the driving control unit.

[0031] An operation panel 36, a connection guide 37, a power supply connector 38, an opposite communication unit 3A, and a driving vehicle-side connection unit 45 are provided on the top of the driving vehicle-side body 31. The operation panel 36 is disposed at the rear of the top surface of the driving vehicle-side body 31, and is used for some manual operations related to the autonomous driving vehicle 3. For example, the operation panel 36 is used to clear an error when the autonomous driving vehicle 3 stops due to an error, or to perform an emergency stop operation for the autonomous driving vehicle 3.

[0032] The connecting guides 37 are arranged symmetrically on the left and right sides of the top surface of the traveling vehicle-side body 31, near the front of the center in the left-right direction. The connecting guides 37 are formed by two rod-shaped members 371 that are close together at the front and far apart at the rear, with guide rollers 372 attached to the front and rear ends, respectively. The connecting guides 37 slide against cart-side guides 41 provided on the underside of the loading platform (21, 51) of the transport cart (2, 5). This guides the relative positional relationship when the autonomous vehicle 3 enters under the transport cart (2, 5), and ultimately fixes the relative position.

[0033] The power supply connector 38 is provided near the front right side of the upper surface of the traveling vehicle-side body 31. The power supply connector 38 is driven forward in accordance with the coupling operation in which the autonomous traveling vehicle 3 couples the transport cart (2, 5), and is engaged with the power receiving connector 27 of the transport cart (2, 5). This is not limiting, and the power supply connector 38 may be driven forward in the coupled state after the coupling operation is completed, and engaged with the power receiving connector 27. The power supply connector 38 is connected to a power source such as a battery, and supplies power to the electrical components of the transport cart (2, 5) via the power receiving connector 27.

[0034] The opposing communication units 3A are provided in a pair on the left and right sides at the front left and right ends of the upper portion of the traveling vehicle-side body 31. The opposing communication units 3A communicate with another opposing communication unit provided at the destination of the transport cart (2, 5). This allows confirmation of the correctness of the destination and confirmation of the relative positional relationship between the destination and the automatic transport device (1A, 1B). The opposing communication units 3A can improve the detection accuracy of the relative positional relationship by, for example, but not limited to, communicating using direct light, which has excellent linearity.

[0035] The traveling vehicle-side coupling portion 45 is provided on the rear side of the coupling guide 37 on the upper surface of the traveling vehicle-side body 31. The traveling vehicle-side coupling portion 45 is formed using a coupling hook that can protrude upward from the upper surface of the traveling vehicle-side body 31. In the uncoupled state, the coupling hook is stored below the upper surface of the traveling vehicle-side body 31 (see FIG. 3). After the autonomous traveling vehicle 3 enters the underside of the transport cart (2, 5), the coupling hook protrudes upward and fits into the coupling recess of the coupling portion 40 of the transport cart (2, 5). This enables the autonomous traveling vehicle 3 to be coupled to the transport cart (2, 5) and towed, thereby forming the automatic transport device (1A, 1B). Furthermore, by storing the coupling hook downward, the autonomous traveling vehicle 3 can be detached.

[0036] 5. Identification Code 61 and Code Acquisition Unit 63 Next, the identification code 61 and the code acquisition unit 63 will be described with reference to Figures 3 to 5. As shown in Figure 3, the identification code 61 is displayed on the right side of the rear surface of the platform 21 of the transport cart 2. Also, as shown in perspective in Figure 5, the identification code 61 is displayed on the right side of the rear surface of the platform 51 of the transport cart 5. Meanwhile, as shown in Figure 4, the code acquisition unit 63 is provided on the right side of the inclined front surface of the operation panel 36 of the autonomous vehicle 3.

[0037] The identification code 61 may be, for example, a barcode, a numeric string code, or a two-dimensional code. The identification code 61 may be created, for example, using a sticker with an adhesive backing and attached to display. The identification code 61 preferably indicates at least cart individual information and also indicates cart type information. Furthermore, the identification code 61 is associated with changeable related information relating to the transport object (mask unit 29, tape feeder 58, feeder magazine 59, substrate magazine) or the transport cart (2, 5). The related information will be described in detail later in the description of the automatic transport system 7.

[0038] A code reader, such as a barcode reader or an optical camera, is used for the code acquisition unit 63. As shown in Fig. 5 , the code acquisition unit 63 is disposed close to and facing the identification code 61 when the transport cart (2, 5) is coupled to the autonomous vehicle 3, and can read the identification code 61. In this embodiment, the code acquisition unit 63 automatically reads the identification code 61, but an operator may also use a handheld code reader to read the identification code 61 during the coupling operation.

[0039] The identification code 61 and the code acquisition unit 63 can be modified in various ways. For example, the identification code 61 can be replaced with a remotely readable electronic tag, and the code acquisition unit 63 can be replaced with an electronic reader that remotely reads the electronic tag. Specifically, an RFID tag that uses radio waves and an RFID reader can be used in combination. In this modification, the electronic tag (RFID tag) can be read when the autonomous vehicle 3 approaches the transport cart (2, 5) to couple the transport cart (2, 5), in other words, before the coupling operation begins. Alternatively, a storage device that stores the identification code 61 may be provided on the transport cart (2, 5), and a communication unit provided in the autonomous vehicle 3 may access the storage device to acquire the identification code 61.

[0040] According to the automatic transport device (1A, 1B) of the embodiment, when the automatic vehicle 3 is coupled to the transport cart (2, 5) that transports the objects to be transported (mask unit 29, tape feeder 58, feeder magazine 59, substrate, substrate magazine) to the substrate work line 9, the code acquisition unit 63 on the automatic vehicle 3 side acquires the identification code 61 provided on the transport cart (2, 5). Therefore, the individual transport carts (2, 5) can be identified and managed and operated appropriately.

[0041] 6. Configuration of the Automatic Transfer System 7 of the Embodiment Next, the configuration of the automatic transfer system 7 of the embodiment will be described with reference to FIG. 6. FIG. 6 is a schematic explanatory diagram and does not show the exact shape or size of each part. The automatic transfer system 7 is composed of the above-mentioned transfer carts (2, 5), automatic traveling vehicle 3, and management device 8. The automatic transfer system 7 manages and operates the transfer carts (2, 5) and automatic traveling vehicle 3 using the management device 8, thereby supporting the substrate-related work line 9 and contributing to labor savings.

[0042] The minimum configuration of the automated transport system 7 is one transport cart 2, one transport cart 5, and one automated vehicle 3, with the automated vehicle 3 being interchangeably connected to two transport carts (2, 5). However, it is preferable that the automated transport system 7 be configured to include a plurality of transport carts 2, a plurality of transport carts 5, and a number of automated vehicles 3 fewer than the total number of carts, with each automated vehicle 3 being interchangeably connected to one of the transport carts (2, 5). With this configuration, one or more substrate-related work lines 9 can be efficiently supported by reusing a limited number of automated vehicles 3.

[0043] The substrate-related work line 9 to be supported is configured with an array of multiple types of substrate-related work machines. For example, the substrate-related work line 9 shown in FIG. 6 is configured with an array of a substrate insertion machine 91, a solder printer 92, a print inspection machine 93, two component placement machines (94, 95), a substrate visual inspection machine 96, and a reflow machine 97. The substrate insertion machine 91 at the most upstream of the line inserts a substrate into the solder printer 92. After a predetermined substrate-related work has been completed by each substrate-related work machine, the substrate is transported in sequence to the downstream substrate-related work machine. Therefore, as the substrate-related work progresses, it becomes necessary to replenish the boards consumed by the substrate insertion machine 91.

[0044] The solder printer 92 prints solder paste on the board by using a mask and board support member corresponding to the type of board being produced, which are loaded from the mask unit 29 into the machine. The print inspection machine 93 captures and inspects the solder print condition on the board. The component placement machines (94, 95) pick up components from the detachably mounted tape feeder 58 and place them on the solder printed on the board. Therefore, as the placement work progresses, it becomes necessary to replenish consumed components. In this embodiment, components are replenished not by replacing the tape reel containing the components, but by replacing the tape feeder 58 with a new tape reel.

[0045] The board visual inspection machine 96 takes images of the components mounted on the board and inspects their mounting state. The reflow machine 97 heats and cools the solder paste to ensure the soldered state of the components. When changing the type of board product produced on the board-related work line 9, it is necessary to replenish the boards into the board insertion machine 91, replace the mask and board support member in the solder printer 92, and replenish the components (replace the tape feeder 58) into the component placement machines (94, 95). The line management device 99 is configured using a computer and manages the operating status of the seven board-related work machines. The line configuration of the board-related work line 9 is variable, and the number of lines may be multiple.

[0046] An external setup area Aout is defined at a location separated from the substrate-related work line 9. The external setup area Aout is an area where workers perform setup work. Three setup locations are provided within the external setup area Aout. At the first setup location D1, setup work for the mask unit 29 is performed. At the second setup location D2, setup work for the feeder magazine 59 is performed. At the third setup location D3, setup work for the substrate magazine is performed.

[0047] Two further loading locations are provided within the external setup area Aout. At the first loading location T1, the setup mask unit 29 is loaded onto the automatic transfer device 1A (or a single transport cart 2). At the second loading location T2, the setup feeder magazine 59 and substrate magazine are loaded onto the automatic transfer device 1B (or a single transport cart 5). The loading operation may be performed automatically by a loading robot or the like, or may be performed in part or entirely by a worker.

[0048] The travel routes traveled by the automatic guided vehicles (1A, 1B) and the uncoupled automatic guided vehicle 3 are indicated by the route display tape 3R as described above. The travel routes are, for example, configured from a double-track main route 7M and multiple branch routes (7N, 7P, 7Q) branching off from the main route 7M. The main route 7M connects the vicinity of the substrate-related work line 9 with the first loading location T1 and the second loading location T2 in the off-site setup area Aout.

[0049] The multiple branch paths 7N connect the board insertion machine 91, the solder printing machine 92, and the two component placement machines (94, 95) to the main path 7M. The multiple branch paths 7P branch off from the main path 7M and enter a waiting area AW. The waiting area AW is a location where a single transport cart (2, 5) and the autonomous vehicle 3 temporarily wait after a detachment operation. The waiting area AW also allows an autonomous transport device (1A, 1B) that is not performing a detachment operation to wait. The multiple branch paths 7Q branch off from the main path 7M and enter a maintenance area AM. The maintenance area AM is a location where maintenance is performed on the transport cart (2, 5) and the autonomous vehicle 3. Note that the configuration of the travel paths is not limited to the above and can be freely modified.

[0050] The management device 8 is installed in the off-site setup area Aout, but may also be installed in another location. The management device 8 is configured using a computer device. The management device 8 has an input unit 81 such as a keyboard or touch panel that accepts instructions and selection operations from the worker. The management device 8 also has a display unit 82 such as a liquid crystal display that displays various information to the worker. Furthermore, the management device 8 has a memory 83 that stores various information.

[0051] Management device 8 is communicatively connected to line management device 99. When it is predicted that there will be a need to replenish boards or components on an operating substrate-related work line 9, line management device 99 transmits transport request information CI to management device 8, requesting the transport of the boards or components. Furthermore, when the type of substrate product (substrate type) produced on substrate-related work line 9 is changed, line management device 99 transmits transport request information CI to management device 8 for mask units 29 (masks), tape feeders 58, and substrates to be applied to the next type.

[0052] The transport request information CI includes the following (A) to (C): (A) Information associating the type of mask unit 29 (mask) with the solder printer 92; (B) Information associating the type of component or tape feeder 58 with the component mounting machine (94, 95); (C) Information associating the type of board with the board insertion machine 91. In other words, the transport request information CI represents the required tool or component in association with the board-related operation machine to which it is to be transported.

[0053] Furthermore, the management device 8 uses wireless communication CM to send and receive commands and responses, as well as various information, to each of the multiple autonomous vehicles 3. For example, the management device 8 transmits a driving route to the driving control unit of the autonomous vehicle 3 to cause the autonomous vehicle 3 to drive, and receives the current position of the autonomous vehicle 3. The management device 8 also receives information on the identification code 61 acquired by the code acquisition unit 63 of the autonomous vehicle 3. When the management device 8 receives transport request information CI, it controls the driving of the autonomous vehicle 3 to couple the transport cart (2, 5) and transport tools or components corresponding to the transport object.

[0054] More specifically, the management device 8 has two functional units configured by software: a cart selection unit 85 and a management unit 86. The cart selection unit 85 selects a transport cart (2, 5) of a suitable cart type in accordance with the transport request information CI. The cart selection unit 85 preferentially selects a transport cart (2, 5) of a suitable cart type that is waiting in the waiting area AW. The cart selection unit 85 may also select an automated transport device (1A, 1B) of a suitable cart type that is waiting or in transport operation.

[0055] Furthermore, the cart selection unit 85 edits changeable related information to be associated with the identification code 61 of the selected transport cart (2, 5) based on the transport request information CI. The related information edited by the cart selection unit 85 includes the following (a) to (d): (a) identification information for identifying the transport object (tool and component); (b) a setup location where the transport object is to be setup (identifying one of the first setup location D1 to the third setup location D3); (c) a loading location where the transport object is to be loaded onto the transport cart (2, 5) (identifying either the first loading location T1 or the second loading location T2); and (d) a substrate-related operating machine as the destination of the transport cart (2, 5) (identifying one of the substrate insertion machine 91, the solder printing machine 92, and the two component placement machines (94, 95)). The cart selection unit 85 associates the edited related information with the identification code 61 and stores the association information in the memory 83.

[0056] Meanwhile, the management unit 86 appropriately edits the following related information (e) and (f): (e) Waiting location AW of the transport cart (2, 5) (waiting position that does not interfere with other transport carts); (f) Operation history and maintenance history of the transport cart (2, 5). The management unit 86 adds the edited related information (e) and (f) to the related information already edited by the cart selection unit 85.

[0057] The management unit 86 couples the autonomous vehicle 3 to the transport cart (2, 5) selected by the cart selection unit 85 so that the transport cart (2, 5) performs the transport. At this time, the management unit 86 performs management based on the cart individual information indicated by the identification code 61 acquired by the code acquisition unit 63. That is, the management unit 86 determines whether the transport cart (2, 5) coupled to the autonomous vehicle 3 is correct or incorrect based on the cart individual information.

[0058] For example, in rare cases, due to a mix-up of the branch route 7P at the waiting area AW, the wrong transport cart (2, 5) may be coupled to the autonomous vehicle 3. In this case, the management unit 86 detects the error, thereby preventing subsequent erroneous transport operations. Furthermore, the management unit 86 may determine whether the cart type of the transport cart (2, 5) coupled to the autonomous vehicle 3 is correct or incorrect, based on the cart type information indicated by the identification code 61.

[0059] Furthermore, the management unit 86 uses the display unit 82 or another notification means to notify the worker of the related information (a) to (c) stored in the memory 83. Another notification means is, for example, a transmission unit that transmits the related information to a mobile terminal carried by the worker. The guidance makes clear the object to be transported, the setup location, and the loading location, allowing the worker to perform the setup work efficiently without making any mistakes.

[0060] Furthermore, the management unit 86 controls the travel of the autonomous vehicle 3 before and after the coupling of the transport cart (2, 5) based on the related information (c) to (e) stored in the memory 83. In other words, the related information specifies the travel start and end positions of the autonomous vehicle 3 and the autonomous transport device (1A, 1B), so the management unit 86 can instruct an appropriate travel route.

[0061] Furthermore, the management unit 86 guides the maintenance of the transport cart (2, 5) using the display unit 82 or another notification means based on the related information (f) stored in the memory 83. Additionally, the management unit 86 can compile the operation history of each of the multiple transport carts (2, 5) based on the operation history of the autonomous vehicle 3, which travels in accordance with commands and performs coupling and detachment operations. The operation history of the transport cart (2, 5) includes the number of times it has been coupled to the autonomous vehicle 3 and the total distance traveled. Furthermore, each time maintenance is performed on the transport cart (2, 5), the worker uses the input unit 81 to input the details of the maintenance, the date of the maintenance, etc., in association with the identification code 61. Therefore, the management unit 86 can compile the maintenance history of the transport cart (2, 5).

[0062] Here, the electromagnetic solenoid is a consumable part that is recommended to be replaced with a new one when it reaches a predetermined number of recommended replacement operations. This electromagnetic solenoid operates once each time the autonomous vehicle 3 is coupled. Therefore, when the number of coupling operations of the transport cart (2, 5) with the autonomous vehicle 3 reaches the recommended number of replacement operations, the management unit 86 uses the display unit 82 or the like to guide the user to perform maintenance to replace the electromagnetic solenoid. This allows the replacement timing of the electromagnetic solenoid to be managed appropriately.

[0063] Furthermore, as the total travel distance increases, the bearings and contact surfaces of the wheels 26 of the transport cart 2 and the front wheels 56 and rear wheels 57 of the transport cart 5 may wear out and even become damaged. Therefore, the management unit 86 recommends inspection of the wheels 26, front wheels 56, and rear wheels 57 when the total travel distance reaches a predetermined distance. In this way, if the inspection reveals significant wear or damage, the worker can replace the wheels 26, front wheels 56, and rear wheels 57 to restore the travel performance of the transport cart (2, 5). Note that the management unit 86 may use another method of recommending replacement of the wheels 26, front wheels 56, and rear wheels 57 when the total travel distance reaches a predetermined distance.

[0064] 7. Operation of the Automated Conveyor System 7 of the Embodiment Next, the operation of the automated conveyor system 7 of the embodiment will be described according to the operation flows shown in Figures 7 and 8. This operation flow mainly describes the transport operation when transport request information CI is received. This operation flow is controlled by the management device 8 and involves the transport operations of the transport carts (2, 5) and the autonomous vehicle 3, with some operations being performed by operators. Below, as an example of (B) above, a specific example of transport request information CI that associates component types X1 and X2 with component mounting machines 94 will be described.

[0065] In step S1 of FIG. 7 , the management device 8 starts controlling the operation flow when it receives transport request information CI from the line management device 99. In the next step S2, the cart selection unit 85 of the management device 8 selects a transport cart (2, 5) that is compatible with the cart type and is waiting at the waiting area AW in accordance with the transport request information CI. In a specific example, the cart selection unit 85 selects a transport cart 5 of the second cart type. Furthermore, if there is a waiting automated transport device 1B of the compatible cart type, the cart selection unit 85 preferentially selects that automated transport device 1B. On the other hand, if there is no waiting transport cart 5 of the compatible cart type, the cart selection unit 85 selects an automated transport device 1B that is currently performing a transport operation. If an automatic transport device 1B that is currently waiting or performing a transport operation is selected, the operation flow proceeds directly from step S4 to step S11, and steps S6 to S10 are omitted.

[0066] In the next step S3, the cart selection unit 85 edits the related information corresponding to (a) to (d) above. Furthermore, the cart selection unit 85 associates the edited related information (a) to (d) with the identification code 61 of the selected transport cart 5 and stores the associated information in the memory 83. In the specific example, the related information includes information on the component types X1 and X2, the second setup location D2, the second loading location T2, and the component mounting machine 94.

[0067] In the next step S4, the management unit 86 provides the worker with the related information (a) to (c) stored in the memory 83. In a specific example, the management unit 86 provides the worker with information about part types X1 and X2, the second setup location D2, and the second loading location T2. ​​After confirming the information, the worker performs setup work for the transport object in accordance with the information in step S5. That is, the worker brings two tape reels corresponding to each of types X1 and X2 and two tape feeders 58 to the second setup location D2 and loads the tape reels into the tape feeders 58. Furthermore, the worker performs setup work to store the two tape feeders 58 in the feeder magazine 59.

[0068] Furthermore, in step S6, the management unit 86 first selects an autonomous vehicle 3 waiting at the waiting area AW, and if there is no autonomous vehicle 3 waiting, selects the autonomous vehicle 3 that is predicted to complete the transport operation earliest. The management unit 86 then drives the selected autonomous vehicle 3 toward the transport cart 5 selected in step S2. Note that the operations of steps S6 to S11 can be performed simultaneously with step S5, which is performed by an operator. In the next step S7, the autonomous vehicle 3 performs a coupling operation with the transport cart 5. This constitutes the automatic transport device 1B.

[0069] In the next step S8, the code acquisition unit 63 of the autonomous vehicle 3 acquires the identification code 61 displayed on the transport cart 5. Information on the acquired identification code 61 is sent to the management device 8. In the next step S9, the management unit 86 determines whether the transport cart 5 is correct, and may also determine whether the cart type is correct. If the transport cart 5 is incorrect, a predetermined error process is performed in step S10.

[0070] In the error processing, for example, the transport operation corresponding to the transport request information CI is temporarily suspended and a notification is sent to the worker, while the transport operations corresponding to other transport request information CI are continued. Furthermore, in the error processing, the autonomous vehicle 3 may perform a return trial operation to detach from the erroneous transport cart 5 and connect to another transport cart 5 waiting on another branch route 7P in the waiting area AW. The step executed after step S10 varies depending on the processing content of the error processing, and is therefore not shown in FIG. 7 .

[0071] If the transport cart 5 is correct in step S9, the operation flow proceeds to step S11. In step S11, the management unit 86 refers to the related information (c) and causes the automatic transport device 1B to travel to the second loading location T2. ​​In the next step S12, loading is performed at the second loading location T2. ​​That is, the feeder magazine 59 set up by the operator in step S5 is loaded onto the automatic transport device 1B. Alternatively, in loading operations when the feeder magazine 59 has already been placed on the loading platform 51, the two set tape feeders are stored in the feeder magazine 59 on the loading platform 51. Note that if it is known in advance that the loading operation will be significantly delayed, the automatic transport vehicle 3 may detach from the transport cart 5 to complete another transport operation first, and then reattach the transport cart 5. The operation flow thereafter is shown in FIG. 8.

[0072] 8, the management unit 86 refers to the related information (d) and causes the automatic transport device 1B loaded with the feeder magazine 59 to travel to the component mounting device 94. In the next step S14, the automatic transport device 1B delivers the feeder magazine 59 or the two tape feeders 58 to the component mounting device 94. In the next step S15, the management unit 86 determines whether maintenance is required for the transport cart 5 constituting the automatic transport device 1B.

[0073] Additionally, the management unit 86 updates and edits the operation history of the transport cart 5 taking into account the current transport operation from the second loading location T2 to the component mounting machine 94, and stores the updated related information in the memory 83 as the related information (f). As a result, the number of times the transport cart 5 has been connected to the autonomous vehicle 3 increases by one in the operation history of the transport cart 5, and the total travel distance increases. The management unit 86 determines whether maintenance is required based on the updated operation history.

[0074] If it is determined that maintenance is required, in step S16, the management unit 86 uses the display unit 82 or the like to provide guidance on maintenance of the transport cart 5. Based on this guidance, the worker performs maintenance on the transport cart 5 at the maintenance location AM. In the next step S17, the management unit 86 causes the empty automatic transport device 1B to travel to the maintenance location AM. After this, the operation flow merges with step S20.

[0075] If it is determined that maintenance is not required, in step S18, it is determined whether other related information is associated with the identification code 61 of the transport cart 5. In other words, if the management device 8 receives multiple pieces of transport request information CI at short time intervals, multiple sets of related information may be associated with the identification code 61 of one transport cart 5. In other words, multiple transport operations may be ordered and assigned to one transport cart 5. In this case, the operation flow returns to step S11, and the empty automated transport device 1B immediately proceeds to the next transport operation.

[0076] Furthermore, in step S19 when no other related information is associated, the management unit 86 refers to the related information (e) and causes the empty automated transport device 1B to travel to an available branch route 7P in the waiting area AW. In step S20 following step S19, the automated transport device 1B performs a detachment operation at the waiting area AW. This places the single transport cart 5 in a standby state. Also, in step S20 following step S17, the automated transport device 1B performs a detachment operation at the maintenance area AM. This places the single transport cart 5 in a state where maintenance is possible.

[0077] In the next step S21, the management unit 86 causes the single autonomous vehicle 3 to travel to an empty branch route 7P in the waiting area AW. This puts the autonomous vehicle 3 into a waiting state. Also, steps S20 and S21 following step S19 may be omitted. In this case, the automated guided vehicle 1B does not perform a detachment operation, but waits in the waiting area AW in the same form. This completes one transport operation, and the automated guided vehicle 3 enters a state of waiting for the next transport request information CI.

[0078] Next, a supplementary explanation will be given assuming a case where the transport request information CI differs. Assume that the transport request information CI is an example of (C) above, which is information associating board type Y with board insertion machine 91. In this case, in step S2, the cart selection unit 85 selects a transport cart 5 of the second cart type. In step S4, the management unit 86 informs the worker of board type Y, third setup location D3, and second loading location T2. ​​In step S5, the worker brings the board of type Y to the third setup location D3 and performs setup work to store it in the board magazine.

[0079] Furthermore, in step S6, the management unit 86 selects an automatic guided vehicle 3 and causes it to travel toward the transport cart 5 selected in step S2. In step S7, the automatic guided vehicle 3 performs a coupling operation with the transport cart 5, thereby forming the automatic transport device 1B. In the next step S8, the identification code 61 displayed on the transport cart 5 is acquired and sent to the management device 8. In the next step S9, the management unit 86 determines whether the transport cart 5 is correct. In step S11, the management unit 86 causes the automatic transport device 1B to travel to the second loading location T2. ​​In the next step S12, the board magazine is loaded onto the automatic transport device 1B at the second loading location T2.

[0080] In step S13, the management unit 86 causes the automatic transfer device 1B loaded with the substrate magazine to travel to the substrate insertion machine 91. In the next step S14, the automatic transfer device 1B delivers the substrate magazine to the substrate insertion machine 91. The subsequent operations from step S15 onwards are the same as in the case of the example transfer request information CI in (B) above.

[0081] Also, assume that the transport request information CI is an example of (A) above, and is information associating the type Z of the mask unit 29 with the solder printing machine 92. In this case, in step S2, the cart selection unit 85 selects a transport cart 2 of the first cart type. In step S4, the management unit 86 informs the worker of the type Z of the mask unit 29, the first setup location D1, and the first loading location T1. In step S5, the worker brings various components, such as a mask and a substrate support member, corresponding to the type Z mask unit 29 to the first setup location D1 and performs setup work to accommodate them in the mask unit 29.

[0082] Furthermore, in step S6, the management unit 86 selects an automated guided vehicle 3 and causes it to travel toward the transport cart 2 selected in step S2. In step S7, the automated guided vehicle 3 performs a coupling operation with the transport cart 2, thereby forming the automated transport device 1A. In the next step S8, the identification code 61 displayed on the transport cart 5 is acquired and sent to the management device 8. In the next step S9, the management unit 86 determines whether the transport cart 2 is correct. In step S11, the management unit 86 causes the automated transport device 1A to travel to the first loading location T1. In the next step S12, the mask unit 29 is loaded onto the automated transport device 1A at the first loading location T1.

[0083] In step S13, the management unit 86 causes the automatic transfer device 1A loaded with the mask unit 29 to travel to the solder printer 92. In the next step S14, the automatic transfer device 1A delivers the mask and board support member housed in the mask unit 29 to the solder printer 92. This delivery operation is performed by the solder printer 92, but can also be configured to be performed by the transport cart 2. The subsequent operations from step S15 onwards are the same as those in the case of the example transport request information CI in (B) and (C) above.

[0084] According to the automated transport system 7 of the embodiment, the management unit 86 can appropriately manage and operate the automated transport vehicles 3 and the transport carts (2, 5) by using the associated information associated with the identification code 61 of the transport cart (2, 5) acquired by the code acquisition unit 63 of the automated transport vehicle 3. This can contribute to labor savings while supporting the substrate-related work line 9. Furthermore, since a smaller number of automated transport vehicles 3 than the total number of transport carts (2, 5) are used to interchangeably connect multiple transport carts (2, 5), the automated transport vehicles 3 can be efficiently reused. In addition, since the number of expensive automated transport vehicles 3 can be reduced compared to the number of relatively inexpensive transport carts (2, 5), the total cost of the system can be reduced.

[0085] 8. Modifications and Applications of the Embodiments The embodiments can be applied to a configuration in which a transport cart (2, 5) is coupled to the rear or front of the autonomous vehicle 3. Furthermore, the autonomous vehicle 3 may adopt a method other than traveling along a route display tape 3R on the floor, for example, a method in which the current position is determined by detecting the surrounding conditions or predetermined signs, etc., and the travel route is determined. Furthermore, the system configuration may include only one type of transport cart (2, 5). Conversely, a system configuration may include three or more types of transport carts (2, 5), in which the autonomous vehicle 3 is commonly used. The embodiments can be modified and applied in various other ways.

[0086] 1A, 1B: Automatic transport device 2: Transport cart 21: Loading platform 29: Mask unit 3: Automatic vehicle 40: Connection part 45: Connection part on vehicle side 5: Transport cart 51: Loading platform 58: Tape feeder 59: Feeder magazine 61: Identification code 61: Code acquisition part 7: Automatic transport system 8: Management device 85: Cart selection part 86: Management part 9: Board-related work line 91: Board insertion machine 92: Solder printing machine 94, 95: Component placement machine 99: Line management device CI: Transport request information Aout: External setup area D1: First setup location D2: Second setup location D3: Third setup location T1: First loading location T2: Second loading location AW: Waiting location AM: Maintenance location

Claims

1. An automatic transfer device that automatically transfers a transfer object to a substrate processing machine constituting a substrate processing line, the automatic transfer device comprising: a loading platform on which the transfer object is loaded; and a transfer cart having an identification code indicating cart individual information; and an automatic guided vehicle that can be detachably connected to and travel with the transfer cart, and has a code acquisition unit that acquires the identification code when connecting the transfer cart.

2. The automatic transfer device according to claim 1, wherein the identification code is displayed on the transfer cart, and the code acquisition unit is a code reader that reads the displayed identification code in a state where the automatic guided vehicle is connected to the transfer cart.

3. The automatic transfer device according to claim 1, wherein the identification code is an electronic tag that can be remotely read, and the code acquisition unit is an electronic reader that remotely reads the electronic tag in a state where the automatic guided vehicle approaches to connect to the transfer cart.

4. The automatic transfer device according to any one of claims 1 to 3, wherein there are a plurality of cart types in which the shapes of the loading platforms are different from each other corresponding to a plurality of types of the transfer objects, and the identification code indicates cart type information.

5. The plurality of cart types of the transfer cart include: a first cart type that loads a mask unit that can be replaceably installed in a solder printer; and a second cart type that can load a tape feeder that can be replaceably installed in a component mounter and a substrate consumed by a substrate inserter. The automatic transfer device according to claim 4.

6. An automatic transfer system comprising: a loading platform on which a transfer object that is automatically transferred to a substrate processing machine constituting a substrate processing line is loaded; and a transfer cart having an identification code indicating cart individual information; an automatic guided vehicle that can be detachably connected to and travel with the transfer cart, and has a code acquisition unit that acquires the identification code when connecting the transfer cart; and a management unit that performs management based on the cart individual information indicated by the identification code acquired by the code acquisition unit.

7. The automatic transfer system according to claim 6, wherein the management unit determines the correctness of the transfer cart connected to the automatic guided vehicle based on the cart individual information.

8. The transport cart has the identification code associated with changeable associated information related to the object to be transported or the transport cart, and the management unit performs management based on the associated information associated with the identification code acquired by the code acquisition unit. The automatic transport system according to claim 6 or 7.

9. The associated information includes at least one of specific information for identifying the object to be transported, a setup location for setting up the object to be transported, a loading location for loading the object to be transported onto the transport cart, the substrate processing machine as the transport destination to which the transport cart is headed, a predetermined standby location of the transport cart, and the operation history and maintenance history of the transport cart. The automatic transport system according to claim 8.

10. The associated information includes at least one of the specific information for identifying the object to be transported, the setup location for setting up the object to be transported, and the loading location for loading the object to be transported onto the transport cart, and the management unit guides the operator with the associated information. The automatic transport system according to claim 9.

11. The associated information includes at least one of the loading location for loading the object to be transported onto the transport cart, the substrate processing machine as the transport destination to which the transport cart is headed, and the predetermined standby location of the transport cart, and the management unit controls the travel of the automated guided vehicle to which the transport cart is connected based on the associated information. The automatic transport system according to claim 9.

12. The associated information includes the operation history and maintenance history of the transport cart, and the management unit guides the maintenance of the transport cart based on the associated information. The automatic transport system according to claim 9.

13. The management unit guides the maintenance for replacing the consumable parts of the transport cart based on at least one of the number of connections with the automated guided vehicle included in the operation history of the transport cart and the total travel distance. The transport system according to claim 12.

14. The transport cart has a plurality of cart types with different shapes of the loading platform corresponding to a plurality of types of the objects to be transported. The identification code indicates cart type information. The management unit determines the correctness of the cart type of the transport cart connected to the autonomous mobile vehicle based on the cart type information indicated by the identification code acquired by the code acquisition unit. The automatic transport system according to claim 6.

15. The automatic transport system according to claim 14, further comprising a cart selection unit that selects a transport cart whose cart type is suitable according to the transport request information of the object to be transported received from a line management device that manages the substrate processing line.

16. The transport cart has the identification code associated with changeable related information related to the object to be transported or the transport cart. The cart selection unit edits the related information associated with the identification code of the selected transport cart. The automatic transport system according to claim 15.

17. The plurality of cart types of the transport cart include a first cart type for loading a mask unit that can be interchangeably installed in a solder printer, and a second cart type for loading a tape feeder that can be interchangeably installed in a component mounter and a substrate consumed by a substrate inserter. The automatic transport system according to any one of claims 14 to 16.

Citation Information

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