Microspectroscopy device

Abstract

A microspectroscopy device (1) comprises: a microscope (2) that exposes a sample to visible light to perform magnified observation; a spectroscopic unit (3) that exposes the sample (10) to infrared light to perform spectral measurement; and a mirror (241) that either transmits the visible light and reflects the infrared light and scattered light generated in the sample (10) as a result of the exposure to the infrared light, or reflects the visible light and transmits the infrared light and the scattered light, and that is positioned in a common optical path of an optical system for performing the magnified observation and an optical system for performing the spectral measurement, and branches the optical system for performing the magnification observation and the optical system for performing the spectrum measurement.

Description

Microspectroscopic equipment

[0001] The present invention relates to a microspectroscopic device.

[0002] Raman microspectroscopy is widely used as a method for investigating the distribution of material composition on a sample. A Raman microspectroscopy instrument consists of a Raman spectrometer to obtain composition information and a microscope to obtain the distribution. These components are made up of many parts, such as a light source, filters, spectrometers, sensors, lenses, and mirrors, making them difficult to integrate, so these two systems are often installed side by side.

[0003] For example, Patent Document 1 discloses an observation optical system including an objective lens that collects light from a sample placed on a mounting table and a camera that images the sample through the light received by the objective lens; an analytical optical system including a reflective objective lens that collects electromagnetic waves emitted from an electromagnetic wave emitting unit and irradiates the sample, and also collects light reflected from the sample, and a detector that generates an intensity distribution spectrum based on the collected electromagnetic waves; and a horizontal drive mechanism that moves the relative positions of the observation optical system and the analytical optical system with respect to the mounting table in the horizontal direction.

[0004] Furthermore, when a Raman spectrometer and a microscope are connected, a half mirror is generally used in the common optical path between the Raman spectrometer and the microscope.

[0005] For example, Patent Document 2 discloses a configuration in which the path along which white light reflected from a sample enters a microscope and the path along which Raman scattered light provided by the sample enters a detection unit partially overlap, and a half mirror is provided in the overlapping common path to guide the Raman scattered light to the detection unit.

[0006] JP 2022-64854 A JP 2023-129315 A

[0007] However, installing two systems side by side, as in Patent Document 1, inevitably increases the overall system size. Furthermore, using a half mirror in the common optical path between the Raman spectrometer and the microscope, as in Patent Document 2, significantly reduces the amount of light from the white light source used for microscopic observation, making it impossible to maintain the microscope's functionality. Furthermore, Raman microscopes have a large footprint and the distance from the Raman spectrometer detector to the sample is long, which easily leads to misalignment, making it difficult to maintain the Raman spectroscopic function for an extended period of time. Therefore, it is necessary to separate the optical paths for the microscope and the Raman spectrometer, shortening the common optical path as much as possible, and maintaining both functions for an extended period of time. This fundamentally hinders the miniaturization of Raman microscope systems.

[0008] The present invention has been made in view of the above circumstances, and has as its object to add a spectroscopic function for performing spectrum measurement without affecting the overall footprint or functionality of a microscope.

[0009] The microspectroscopic device according to the present invention comprises: a microscope that irradiates a sample with visible light to perform magnified observation; a spectroscopic unit that irradiates the sample with infrared light to perform spectrum measurement; and a mirror that transmits the visible light and reflects the infrared light and scattered light generated in the sample by the irradiation of the infrared light, or that reflects the visible light and transmits the infrared light and scattered light, and is located in a common optical path between the optical system that performs the magnified observation and the optical system that performs spectrum measurement, and that branches into the optical system that performs the magnified observation and the optical system that performs spectrum measurement.

[0010] According to the present invention, by placing a mirror that transmits visible light and reflects infrared light and scattered light generated in the sample, or that reflects visible light and transmits infrared light and scattered light, in the common optical path of the optical system for magnified observation and the optical system for spectral measurement, and branching into the optical system for magnified observation and the optical system for spectral measurement, it is possible to add a spectroscopic function for performing spectral measurement without affecting the overall footprint or function of the microscope.

[0011] FIG. 1 is a diagram illustrating a configuration of a microspectroscopic device according to an embodiment of the present invention. FIG. 2 is an external view of the top surface of an adapter according to an embodiment of the present invention. FIG. 3 is an external view of a side surface of an adapter according to an embodiment of the present invention. FIG. 4 is a diagram illustrating a state before a spectroscopic unit according to an embodiment of the present invention is connected to an adapter. FIG. 5 is a diagram illustrating a state after a spectroscopic unit according to an embodiment of the present invention is connected to an adapter. FIG. 6 is a side view illustrating a connection portion of a spectroscopic unit according to an embodiment of the present invention. FIG. 7 is a diagram illustrating another configuration of a spectroscopic unit according to an embodiment of the present invention.

[0012] 1 is a diagram showing the configuration of a microspectroscopic device 1 according to an embodiment of the present invention. The microspectroscopic device 1 is composed of a microscope 2 for performing magnified observation of a sample 10, which is an object of observation, and a spectroscopic unit 3 for performing spectrum measurement to obtain composition information of the sample 10. Here, the spectroscopic unit 3 is detachably provided with respect to the microscope 2.

[0013] The microscope 2 includes a lens barrel 21, a lens unit 22, and a mounting base 23. The microscope 2 also includes an adapter 24, which is a connection part for connecting the spectroscopic unit 3, between the lens barrel 21 and the lens unit 22, and a hot mirror 241 is provided within the adapter 24.

[0014] The microscope tube 21 constitutes the main body of the microscope 2 and includes an illumination light source 211, a half mirror 212, a projection lens 213, and an imaging lens 214. The illumination light source 211 is a light source that emits illumination light for observing the sample 10. Examples of such light sources include LEDs (Light Emitting Diodes) that emit visible white light, incandescent bulbs, and halogen lamps. The half mirror 212 reflects the illumination light emitted from the illumination light source 211 and irradiates it onto the projection lens 213, the hot mirror 241, and the sample 10 placed on the mounting table 23. The projection lens 213 converts the light reflected from the sample 10 by the illumination light irradiated onto the sample 10 into a parallel beam. The imaging lens 214 converts the light reflected from the sample 10 by the illumination light incident via the projection lens 213 into a convergent beam. This allows visual observation of the sample 10. Furthermore, a camera is provided at a position where the convergent light beam that has passed through the imaging lens 214 forms an image, thereby capturing an image of the sample 10 .

[0015] The lens unit 22 includes an objective lens 221. The objective lens 221 collects the illumination light irradiated onto the sample 10 and reflected from the sample 10. The lens unit 22 includes a mounting mechanism, such as a screw mechanism, for mounting the lens unit 22 to the adapter 24.

[0016] A sample 10 to be observed is placed on the mounting table 23, and observation by the microscope 2 and spectrum measurement by the spectroscopic unit 3 are performed.

[0017] The spectroscopic unit 3 includes a laser light source, a spectroscopic device, and optical elements, and performs spectral measurement to acquire composition information about the observed portion by scanning the laser light over the observed portion of the sample 10. In detail, the spectroscopic unit 3 includes an irradiation optical system that includes a collimator lens 32, a bandpass filter 33, a reflecting mirror 34, a dichroic mirror 35, reflecting mirrors 36 and 39, and galvanometer mirrors 37 and 38 and guides the laser light in a direction to irradiate the sample 10, an imaging optical system that includes the reflecting mirrors 36 and 39, the galvanometer mirrors 37 and 38, the dichroic mirror 35, an edge filter 40, and a condenser lens 41 and guides Raman scattered light generated from the sample 10, and a spectroscopic device 42 that performs spectral measurement of the Raman scattered light. Here, the optical path between the dichroic mirror 35, the reflecting mirrors 36 and 39, and the galvanometer mirrors 37 and 38 in the irradiation optical system and the imaging optical system is common, and the reflecting mirrors 36 and 39 and the galvanometer mirrors 37 and 38 constitute a scan unit that scans the irradiated laser light on the sample 10. An opening is formed in the housing that forms the spectroscopic unit 3, allowing the light reflected by the reflecting mirror 39 and the light incident on the reflecting mirror 39 to pass through.

[0018] The laser light source unit 31 is a light source that emits excitation light and irradiates the sample 10 with the excitation light. Because Raman scattering light generated in the sample 10 by irradiation with excitation light tends to be weak, the laser light source unit 31 is preferably a light source that emits high-intensity excitation light. Furthermore, because composition information of the sample 10 is acquired based on the wavelength of the excitation light, the laser light source unit 31 is preferably a light source that emits excitation light of a single wavelength. Examples of such light sources include semiconductor lasers and solid-state lasers. Alternatively, an LED (light-emitting diode) may be used instead of a laser. The excitation light is infrared light having a wavelength that is reflected by a hot mirror 241 provided in the adapter 24.

[0019] The collimating lens 32 converts the excitation light emitted from the laser light source unit 31 into a parallel beam. The bandpass filter 33 attenuates wavelength components excluding the peak wavelength among the wavelength components contained in the excitation light that has passed through the collimating lens 32. The reflecting mirror 34 reflects the excitation light that has passed through the bandpass filter 33 and guides it to the dichroic mirror 35. The dichroic mirror 35 reflects the excitation light and guides it to the reflecting mirror 36 that constitutes the scan unit, while transmitting Raman scattered light having a wavelength different from that of the excitation light.

[0020] The reflecting mirror 36 reflects the excitation light and guides it to a galvanometer mirror 37 that constitutes a scanning unit, and guides the Raman scattered light reflected by the galvanometer mirror 37 to the dichroic mirror 35. The galvanometer mirrors 37 and 38 are reflective elements whose angles can be changed, and by changing their orientation, they scan the excitation light two-dimensionally in the x and y directions. The galvanometer mirror 37 is an x-axis changing galvanometer mirror that scans the excitation light in the x-axis direction, and the galvanometer mirror 38 is a y-axis changing galvanometer mirror that scans the excitation light in the y-axis direction. The reflecting mirror 39 reflects the excitation light that has passed through the galvanometer mirror 38 and guides it to a hot mirror 241 in the adapter 24, and also reflects the Raman scattered light reflected by the hot mirror 241 and guides it to the galvanometer mirror 38.

[0021] The edge filter 40 reflects or transmits light depending on the wavelength, reflecting light depending on the wavelength of the excitation light emitted from the laser light source unit 31 and transmitting light with a wavelength longer or shorter than that of the excitation light. Therefore, the edge filter 40 transmits Raman scattered light having a wavelength shifted from the wavelength of the excitation light generated in the sample 10 by irradiation with the excitation light, and guides the light toward the spectrometer 42. The condenser lens 41 converts the Raman scattered light that has passed through the edge filter 40 into a convergent beam of light and guides it to the spectrometer 42.

[0022] The spectroscopic device 42 includes a spectroscope and a photodetector. The spectroscope is, for example, a Fourier transform spectroscope that utilizes the coherence of light. The Fourier transform spectroscope includes an interferometer and measures the interference waveform of light using the interferometer. The interferometer forms interference light from the Raman scattered light generated in the sample 10. The formed interference light is received by a photodetector and output as an electrical signal. The interference waveform output from the photodetector is Fourier transformed to measure the light intensity distribution (spectrum) for each wavelength.

[0023] The photodetector has a plurality of light-receiving elements on a light-receiving surface. Raman scattered light is incident on the light-receiving surface of the photodetector. When the photodetector receives the Raman scattered light from the spectroscopic element, the light-receiving elements convert the light of each wavelength into an electrical signal. For example, a photodiode, a CCD (Charge Coupled Device), or a CMOS (Complementary Metal Oxide Semiconductor) is used as the photodetector. The signal output from the photodetector is Fourier transformed to generate a spectrum showing the intensity distribution for each wavelength.

[0024] The spectrometer 42 is connected to an analytical device (not shown), and the spectrum generated by the spectrometer 42 is input to the analytical device. The analytical device is a computer such as a personal computer, and includes a processor that processes data according to a control program, a main memory that functions as a work area for the processor, and an auxiliary memory for storing data for a long period of time. The analytical device determines composition information of the sample 10 based on the spectrum input from the spectrometer 42.

[0025] The spectroscopic unit 3 is connected to the microscope 2 via an adapter 24. FIG. 2 shows an external view of the adapter 24, with FIG. 2A being a top view and FIG. 2B being a side view. The adapter 24 is provided on the optical path between the projection lens 213 of the lens barrel 21 and the objective lens 221 of the lens unit 22, and an opening 242 is provided at the upper end of the adapter 24 opposite the opening provided at the lower end of the lens barrel 21. Similarly to FIG. 2A , an opening is also provided at the lower end of the adapter 24 opposite the objective lens 221 of the lens unit 22. The adapter 24 has an attachment mechanism, such as a screw mechanism, for attaching the lens unit 22, making the lens unit 22 detachable. Furthermore, attachment mechanisms, such as a screw mechanism, for attaching the adapter 24 to the lens barrel 21 are provided at the upper end of the adapter 24 and the lower end of the lens barrel 21, making the adapter 24 detachable from the lens barrel 21.

[0026] A hot mirror 241 is provided inside the adapter 24. The hot mirror 241 has high reflectance in the infrared spectrum and high transmittance in the visible spectrum. Therefore, the excitation light emitted from the laser light source unit 31, which is infrared light, and the scattered light generated by the sample 10 are reflected by the hot mirror 241, while the illumination light emitted from the illumination light source unit 211, which is visible light, is transmitted through the hot mirror 241.

[0027] An opening 243 is provided on the side of the adapter 24 to form an optical path between the reflective mirror 39 and the hot mirror 241 of the spectroscopic unit 3. The spectroscopic unit 3 is connected to the adapter 24 by being inserted into the opening 243 provided in the adapter 24. A wall-like guide portion 244 extending from the outer periphery of the adapter 24 toward the inside is formed around the opening 243. When the spectroscopic unit 3 is connected to the adapter 24, the spectroscopic unit 3 is inserted along the guide portion 244.

[0028] FIG. 3 shows the state in which the spectroscopic unit 3 is connected to the adapter 24, with FIG. 3A showing the state before connection and FIG. 3B showing the state after connection is completed. The spectroscopic unit 3 is formed by a laser light source 31, a spectroscopic device 42, and multiple optical elements, and is provided with a sleeve portion 43 as a connection portion with the adapter 24. FIG. 4 is a side view showing the connection portion of the spectroscopic unit 3. The spectroscopic unit 3 is provided with an opening 44 for forming an optical path through which the excitation light reflected by the reflecting mirror 39 and irradiated onto the sample 10 and the Raman scattered light generated by the sample 10 and incident on the reflecting mirror 39 pass. The surrounding sidewall forming the opening 44 extends in a direction along the optical path and forms the sleeve portion 43. When connecting the spectroscopic unit 3 to the adapter 24 in the state shown in FIG. 3A , the opening 44 of the spectroscopic unit 3 is oriented to face the opening 243 of the adapter 24, and the sleeve portion 43 is inserted into the opening 243. The sleeve portion 43 has a size and shape such that, when inserted into the opening 243, its side surface comes into contact with the guide portion 244, which is the side wall that forms the opening 243, and has a length substantially the same as the length of the guide portion 244. As shown in Fig. 3B , the sleeve portion 43 is inserted into the opening 243 while being guided and slid by the guide portion 244, and thereby the spectroscopic unit 3 is connected to the adapter 24.

[0029] Next, a case where the sample 10 is observed under a microscope and a case where the spectrum is measured using the microspectroscopic device 1 in which the spectroscopic unit 3 is connected to the adapter 24 will be described.

[0030] (Microscopic Observation) When performing microscopic observation, the illumination light source unit 211 is selected as the light source. White light emitted from the illumination light source unit 211 is reflected by the half mirror 212 in a direction that irradiates the sample 10. The reflected white light is converted into a parallel beam by the projection lens 213 and then incident on the hot mirror 241 in the adapter 24 through an opening 242 in the adapter 24 attached at a position opposite the opening provided at the bottom end of the lens barrel unit 21. The hot mirror 241 reflects infrared light with high reflectivity and transmits visible light with high transmittance. Therefore, the white light incident on the hot mirror 241 is transmitted through the hot mirror 241 with little loss. The white light transmitted through the hot mirror 241 is focused by the objective lens 221 in the lens unit 22 attached to the bottom end of the adapter 24 through the opening provided at the bottom end of the adapter 24 and is then irradiated onto the sample 10.

[0031] The white light irradiated onto the sample 10 is reflected by the sample 10, and the reflected light travels the opposite route to the previous route and enters the hot mirror 241 via the objective lens 221. As described above, the hot mirror 241 transmits visible light with high transmittance, so the reflected light from the sample 10 passes through the hot mirror 241 with little loss and is converted into a parallel beam by the projection lens 213. The parallel beam of reflected light travels toward the imaging lens 214 via the half mirror 212. The imaging lens 214 converts the reflected light into a convergent beam of light and forms an optical image of the sample 10 at the upper end of the microscope tube 21. A camera, for example, is installed at the upper end, and the reflected light converted into a convergent beam of light is received by an imaging element, and an observation image of the sample 10 is captured.

[0032] (Spectral Measurement) When performing spectral measurement using the microspectrometer 1, the laser light source unit 31 is selected as the light source. The excitation light emitted from the laser light source unit 31 is converted into a parallel beam by the collimating lens 32, and after unnecessary wavelength components are removed by the bandpass filter 33, is reflected by the reflecting mirror 34 and enters the dichroic mirror 35. The excitation light is reflected by the dichroic mirror 35 and enters the scanning unit. In the scanning unit, the excitation light is reflected by the reflecting mirror 36 and then controlled by the galvanometer mirrors 37 and 38 to scan the sample 10 in the x-axis and y-axis directions, and is reflected by the reflecting mirror 39. The excitation light that has passed through the scanning unit enters the hot mirror 241 through the opening 44 of the spectroscopic unit 3 and the opening 243 of the adapter 24. Since the excitation light that enters the hot mirror 241 is infrared light, it is reflected with a high reflectance. The excitation light reflected by the hot mirror 241 passes through an opening provided at the lower end of the adapter 24, is focused by the objective lens 221 in the lens unit 22 attached to the lower end of the adapter 24, and is irradiated onto the sample 10.

[0033] When excitation light is incident on the sample 10, components contained in the sample 10 generate Raman scattered light having a wavelength different from that of the excitation light, and also generate Rayleigh scattered light having the same wavelength as that of the excitation light. The Raman scattered light and Rayleigh scattered light generated in the sample 10 are incident on the hot mirror 241 via the objective lens 221. Since the Raman scattered light and Rayleigh scattered light incident on the hot mirror 241 are infrared light, they are reflected with high reflectivity and then incident on the spectroscopic unit 3. The Raman scattered light and Rayleigh scattered light incident on the spectroscopic unit 3 pass through the reflecting mirror 39, galvanometer mirrors 38 and 37, and reflecting mirror 36 that constitute the scan unit, and are incident on the dichroic mirror 35. The dichroic mirror 35 reflects Rayleigh scattered light having the same wavelength as the excitation light and transmits Raman scattered light having a wavelength different from that of the excitation light. Furthermore, the scattered light that has transmitted through the dichroic mirror 35 is incident on the edge filter 40, where the Rayleigh scattered light is removed. The Raman scattered light that has passed through the edge filter 40 is collected by a collecting lens 41 and input to a spectrometer 42. The spectrometer 42 measures the spectrum of the input Raman scattered light.

[0034] As described above, the microspectroscopic device 1 is provided with a hot mirror 241, which branches into an optical system for microscopic observation and an optical system for spectral measurement. Therefore, a microscope for magnified observation and a spectroscopic device for spectral measurement can be integrated into a single system, preventing the overall system size from increasing. Furthermore, since the hot mirror 241 is provided at the branch, the amount of light from the white light source for microscopic observation is not significantly reduced, and the microscope's functionality can be maintained. Furthermore, since spectral measurement can be performed simply by connecting the spectroscopic unit 3 to the adapter 24, the system can be easily miniaturized, and the system footprint, i.e., the installation area, can be reduced.

[0035] Furthermore, in the above embodiment, the spectroscopic unit 3 is detachably connected to the adapter 24, so multiple types of spectroscopic units with different functions may be prepared and replaced as needed. For example, the spectroscopic unit 3 in the above embodiment is a scanning type spectroscopic unit in which a beam spot scans the sample 10, but a non-scanning type spectroscopic unit may also be prepared and replaced as needed.

[0036] Figure 5 shows an example of a non-scanning type spectroscopic unit 5. It differs from the spectroscopic unit 3 of Figure 1 in that it does not include an optical system constituting a scan unit. The spectroscopic unit 5 includes: an irradiation optical system, which is composed of a collimating lens 52, a band-pass filter 53, a reflecting mirror 54, and a dichroic mirror 55, and guides the laser light in a direction to irradiate the sample 10; an imaging optical system, which is composed of the dichroic mirror 55, an edge filter 56, and a condenser lens 57, and guides the Raman scattered light generated from the sample 10; and a spectroscopic device 58 that performs spectrum measurement of the Raman scattered light. The irradiation optical system and the imaging optical system share a common optical path due to the dichroic mirror 55.

[0037] In the above embodiment, the microspectroscopic device 1 is provided with a hot mirror 241, through which observation light is guided to an optical system for performing microscopic observation, and Raman scattered light is reflected by the hot mirror 241 and guided to an optical system for performing spectral measurement. Alternatively, a cold mirror may be provided instead of the hot mirror. That is, the light is split via the cold mirror into an optical system for performing microscopic observation and an optical system for performing spectral measurement. The cold mirror has high reflectance in the visible spectrum and high transmittance in the infrared spectrum. Therefore, the illumination light emitted from the illumination light source unit 211, which is visible light, is reflected by the cold mirror, while the excitation light emitted from the laser light source unit 31 and the scattered light generated by the sample 10, which are infrared light, are transmitted through the cold mirror. Therefore, the optical system for performing microscopic observation is located on the optical path reflected by the cold mirror, and the optical system for performing spectral measurement is located on the optical path transmitted through the cold mirror.

[0038] In the above embodiment, the spectroscopic unit 3 is inserted into the opening 243 while being guided and slid by the guide portion 244 formed inside the adapter 24. Alternatively, the sleeve portion 43 of the spectroscopic unit 3 may be formed to extend inside the spectroscopic unit 3, and the guide portion 244 of the adapter 24 may be provided to protrude from the adapter 24.

[0039] It should be noted that the present invention is susceptible to various embodiments and modifications without departing from the broad spirit and scope of the present invention. Furthermore, the above-described embodiment is intended to illustrate one example of the present invention and does not limit the scope of the present invention. The above-described embodiments and modifications can be combined in any manner. Furthermore, even if some of the constituent elements of the embodiment are omitted as necessary, they will still fall within the scope of the technical idea of ​​the present invention.

[0040] The present invention can be widely applied to a microspectroscopic device that combines a microscope for magnification observation and a spectroscopic device for spectrum measurement into a single system.

[0041] REFERENCE SIGNS LIST 1 Microspectroscopic device, 2 Microscope, 3, 5 Spectroscopic unit, 10 Sample, 21 Lens barrel, 22 Lens unit, 23 Mounting table, 24 Adapter, 31, 51 Laser light source unit, 32, 52 Collimating lens, 33, 53 Bandpass filter, 34, 36, 39, 54 Reflecting mirror, 35, 55 Dichroic mirror, 37, 38 Galvanometer mirror, 40, 56 Edge filter, 41, 57 Condenser lens, 42, 58 Spectroscopic device, 43 Sleeve portion, 44, 242, 243 Aperture, 211 Illumination light source unit, 212 Half mirror, 213 Projection lens, 214 Imaging lens, 221 Objective lens, 241 Hot mirror, 244 Guide portion.

Claims

1. A microscopic spectroscopic apparatus comprising: a microscope that irradiates a sample with visible light for magnified observation; a spectroscopic unit that irradiates the sample with infrared light for spectrum measurement; and a mirror that transmits the visible light and reflects scattered light generated in the sample by irradiation with the infrared light and the infrared light, or reflects the visible light and transmits the infrared light and the scattered light, and is positioned in a common optical path of an optical system for the magnified observation and an optical system for the spectrum measurement and branches into the optical system for the magnified observation and the optical system for the spectrum measurement.

2. The microscopic spectroscopic apparatus according to claim 1, wherein the mirror is a hot mirror or a cold mirror.

3. The microscopic spectroscopic apparatus according to claim 1, wherein the spectroscopic unit includes an optical system for the spectrum measurement branched by the mirror and is detachable from the microscope.

4. The microscopic spectroscopic apparatus according to claim 3, wherein the microscope includes an adapter having the mirror built therein, and the adapter and the spectroscopic unit are each provided with an opening through which the infrared light and the scattered light pass between the optical system for the spectrum measurement and the mirror, and the spectroscopic unit is connected to the adapter through the opening.

5. The microscopic spectroscopic apparatus according to claim 4, wherein the spectroscopic unit includes a sleeve portion that fits into the opening of the adapter.

6. The microscopic spectroscopic apparatus according to claim 5, wherein the adapter includes a guide portion that guides the sleeve portion of the spectroscopic unit to fit into the opening of the adapter.

7. The microscopic spectroscopic apparatus according to claim 4, wherein the adapter includes a mounting mechanism for detachably mounting a lens unit including an objective lens that condenses the visible light and the infrared light from the mirror onto the sample.

8. The microscopic spectroscopic apparatus according to claim 4, wherein the adapter is detachably mounted to the microscope.

9. The microscopic spectroscopic apparatus according to claim 3, wherein the spectroscopic unit includes an exchangeable scan type spectroscopic unit and a non-scan type spectroscopic unit.

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