Component mounting device, component mounting system, method for inspecting pneumatic circuit in component mounting device, and method for diagnosing pneumatic circuit in component mounting device

Abstract

This component mounting device comprises: a component holding head that has a suction nozzle; a driving unit that raises and lowers the component holding head; a pneumatic circuit that includes a first air flow path leading to the suction nozzle, a flow path switching unit, and a flow rate measuring instrument for measuring the flow rate of air in the first air flow path; an air flow rate limiting means that limits the first air flow path such that the flow rate of air becomes a minimum flow rate; and a pneumatic circuit inspection unit that operates the flow path switching unit in a state where the outflow or inflow of air from a suction nozzle holder is limited by the air flow rate limiting means, connects the first air flow path to a positive pressure source or a negative pressure source, and acquires the flow rate of the air measured by the flow rate measuring instrument.

Description

Component mounting device, component mounting system, method for inspecting pneumatic circuit in component mounting device, and method for diagnosing pneumatic circuit in component mounting device

[0001] The present invention relates to a component mounting device equipped with an air pressure circuit that supplies positive or negative pressure to a suction nozzle that sucks and holds a component, a component mounting system, a method for inspecting an air pressure circuit in a component mounting device, and a method for diagnosing an air pressure circuit in a component mounting device.

[0002] Among component mounting devices that use suction nozzles to suck and hold components and mount them on a circuit board, there are known devices that automatically detect clogged suction nozzles and air leaks. Patent Document 1 discloses a suction transfer device (component mounting device) that includes a flow sensor (flow meter) that measures the air flow rate in a mounting / detaching flow path (pneumatic circuit) that supplies positive or negative pressure to the suction nozzle, and that determines that the suction nozzle is clogged if the air flow rate measured by the flow sensor is lower than a reference flow rate.

[0003] International Publication No. 2009 / 005058

[0004] However, in conventional technologies including Patent Document 1, abnormalities are determined from the flow rate of air flowing in or out through the opening in the component holding surface of the suction nozzle, which means that there is an issue in that it is not possible to detect minute abnormalities caused by gaps smaller than the suction nozzle opening, and there is room for further improvement.

[0005] Therefore, an object of the present invention is to provide a component mounting device, a component mounting system, a method for inspecting a pneumatic circuit in a component mounting device, and a method for diagnosing a pneumatic circuit in a component mounting device that are capable of detecting minor abnormalities in a pneumatic circuit that supplies positive or negative pressure to a suction nozzle.

[0006] a component mounting device for mounting components on a circuit board, the component mounting device comprising: a component holding head having a suction nozzle at its tip for suction-holding a component; a mounting head main body having a drive unit for raising and lowering the component holding head; an air flow path leading to the suction nozzle; a flow path switching unit for switching the air flow path to connect to at least a positive pressure source or a negative pressure source; a pneumatic circuit including a flow meter for measuring the flow rate of air in the air flow path between the suction nozzle and the flow path switching unit; an air flow rate restricting means for restricting the air flow path so that the flow rate of the air when the air flow path is connected to the positive pressure source or the negative pressure source is a minute flow rate; and a pneumatic circuit inspection unit for operating the flow path switching unit while the air flow rate restricting means restricts the outflow or inflow of air from the tip of the component holding head, to connect the air flow path to the positive pressure source or the negative pressure source, and acquiring the air flow rate measured by the flow meter.

[0007] A component mounting system according to the present invention includes a component mounting device that mounts components on a board and an information processing device that can communicate with the component mounting device. The component mounting device includes a component holding head having a suction nozzle at its tip for suction-holding a component, a mounting head main body having a drive unit for raising and lowering the component holding head, an air flow path leading to the suction nozzle, a flow path switching unit that switches the air flow path to connect to at least a positive pressure source or a negative pressure source, a pneumatic circuit including a flow meter that measures the air flow rate in the air flow path between the suction nozzle and the flow path switching unit, an air flow rate limiting unit that limits the air flow path so that the air flow rate when the air flow path is connected to the positive pressure source or the negative pressure source is a very small flow rate, and a pneumatic circuit inspection unit that operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source while restricting the outflow or inflow of air from the tip of the component holding head using the air flow rate limiting unit, and acquires the air flow rate measured by the flow meter. The information processing device includes an air pressure circuit state diagnosis unit that diagnoses the state of the air pressure circuit based on the flow rate acquired by the air pressure circuit inspection unit.

[0008] The method for inspecting a pneumatic circuit in a component mounting device of the present invention is a method for inspecting a pneumatic circuit in a component mounting device equipped with a component holding head having a suction nozzle at its tip for suction-holding a component, a mounting head main body having a drive unit for raising and lowering the component holding head, and a pneumatic circuit including an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to connect to at least a positive pressure source or a negative pressure source, and a flow meter for measuring the flow rate of air in the air flow path between the suction nozzle and the flow path switching unit, and includes a first step of restricting the air flow path so that the flow rate of the air when connected to the positive pressure source or the negative pressure source is a very small flow rate, a second step of operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and a third step of obtaining the flow rate of the air measured by the flow meter.

[0009] The method for diagnosing an air pressure circuit in a component mounting device of the present invention diagnoses the state of the air pressure circuit based on the flow rate acquired by the above-described inspection method.

[0010] According to the present invention, it is possible to detect minor abnormalities in the air pressure circuit that supplies positive or negative pressure to the suction nozzle.

[0011] FIG. 1 is a plan view showing a schematic structure of a component mounting device according to an embodiment of the present invention; FIG. 2 is a perspective view showing a schematic configuration of a mounting head provided in the component mounting device according to an embodiment of the present invention; FIG. 3 is an explanatory diagram of a schematic configuration of a mounting head provided in the component mounting device according to an embodiment of the present invention; FIG. 4 is an explanatory diagram of an air pressure circuit provided in the component mounting device according to an embodiment of the present invention; FIG. 5 is a block diagram showing the configuration of the component mounting device according to an embodiment of the present invention;

[0012] An embodiment of the present invention will be described in detail below with reference to the drawings. The configurations, shapes, etc. described below are examples for explanatory purposes and can be modified as appropriate depending on the specifications of the component mounting device, mounting head, and component mounting system. Corresponding elements in all drawings will be denoted by the same reference numerals, and duplicated descriptions will be omitted. In FIG. 1 and in some sections described below, two axes perpendicular to each other in a horizontal plane are shown: an X-axis in the substrate transport direction (the left-right direction in FIG. 1 ), and a Y-axis perpendicular to the substrate transport direction (the up-down direction in FIG. 1 ). In FIG. 1 and in some sections described below, a Z-axis (the direction perpendicular to the plane of the paper in FIG. 1 ) is shown as a height direction perpendicular to the horizontal plane.

[0013] First, the configuration of the component mounting device 1 will be described with reference to Figure 1. In Figure 1, two board transport mechanisms 3 are arranged side by side, one at the front and one at the rear in the Y-axis direction, on the upper surface of a base 2. Each board transport mechanism 3 transports, positions, and holds a board 4 along the X-axis. A component supply unit 5 is installed in front of the front board transport mechanism 3 and behind the rear board transport mechanism 3.

[0014] Each component supply unit 5 is equipped with a carriage 7 on which multiple tape feeders 6 are mounted in parallel along the X axis. The tape feeders 6 feed a carrier tape, on which pockets for storing components are formed, at a pitch rate in a direction (tape feed direction) from the outside of the component supply unit 5 toward the board transport mechanism 3, thereby supplying components to a component removal position where the mounting head picks up the components.

[0015] In Fig. 1, Y-axis tables 8 equipped with linear drive mechanisms are arranged along the Y-axis direction on both ends of the upper surface of base 2 in the X-axis direction. Two beams 9 equipped with linear drive mechanisms are connected to Y-axis table 8 so that they can move back and forth along the Y-axis direction. Each beam 9 is connected to a mounting head 20 that moves left and right along the X-axis direction. Each mounting head 20 is equipped with multiple component holding heads 22 that have suction nozzles 21 at their tips (suction nozzle holders) that suction-hold components (see Fig. 2). Furthermore, each mounting head 20 has a drive unit 24 on a mounting head main body 23 that raises and lowers the component holding heads 22 (see Fig. 3).

[0016] The Y-axis table 8, beam 9, and mounting head 20 perform a component mounting operation in which components are taken from the tape feeder 6 of the component supply unit 5 and mounted at the mounting positions on the board 4. During the component mounting operation, the mounting head 20 moves above the component supply unit 5 and picks up predetermined components with each suction nozzle 21. The mounting head 20 then moves above the board 4 and rotates the components held by each suction nozzle 21 in a predetermined direction, repeating a series of mounting turns to mount the components at their respective mounting positions.

[0017] 1, each beam 9 is equipped with a head camera 10 that is positioned on the underside of the beam 9 and moves integrally with the mounting head 20. As the mounting head 20 moves, the head camera 10 moves above the board 4 held by the board transport mechanism 3 and captures an image of a board mark (not shown) provided on the board 4. The position of the board 4 can be recognized from the image capture result.

[0018] A component camera 11, a nozzle changer 12, a reference post 13, and a height reference member 14 are respectively arranged on the base 2 between the front board transport mechanism 3 and the front component supply unit 5, and between the rear board transport mechanism 3 and the rear component supply unit 5. When the mounting head 20 that has picked up a component from the tape feeder 6 of the component supply unit 5 is positioned upward, the component camera 11 images the component held by the suction nozzle 21 from below. The holding posture of the component is recognized from the image results. During component mounting work, the mounting position is corrected taking into account the image results of the board 4 taken by the head camera 10 and the image results of the component taken by the component camera 11.

[0019] 1, nozzle changer 12 has a plurality of nozzle holding holes on the top, in which replacement suction nozzles 21 and inspection jigs 15 (described later) are stored. Component holding head 22 of mounting head 20, to which suction nozzle 21 or inspection jig 15 is attached, accesses an empty nozzle holding hole and performs a predetermined removal operation, thereby transferring suction nozzle 21 or inspection jig 15 attached to component holding head 22 to nozzle changer 12.

[0020] Furthermore, an empty component holding head 22 accesses the suction nozzle 21 or inspection jig 15 held by the nozzle changer 12 and performs a predetermined attachment operation, thereby attaching the suction nozzle 21 or inspection jig 15 to the component holding head 22. In this way, the component holding head 22 can replace the attached suction nozzle 21 with another suction nozzle 21 or inspection jig 15.

[0021] 1 , the reference post 13 and the height reference member 14 are arranged on either side of the component camera 11 and the nozzle changer 12 in the X-axis direction. The reference post 13 and the height reference member 14 are made of a hard material such as metal, and each has a calibration mark 16 on its upper surface. The head camera 10 captures an image of the calibration mark 16 and recognizes the position of the calibration mark 16 in a horizontal plane, thereby correcting (calibrating) the position of the mounting head 20 in the horizontal plane. In addition, the height position of the mounting head 20 is corrected by lowering the component holding head 22 and bringing the suction nozzle 21 into contact with an area of ​​the upper surface of the height reference member 14 other than the calibration mark 16 (see FIG. 3 ).

[0022] 2 to 4, the configuration of the mounting head 20 will be described in detail. Here, the mounting head 20 will be described as an example, which is a 16-nozzle head having eight component holding heads 22 arranged in the X-axis direction and two rows in the Y-axis direction.

[0023] 3, the component holding head 22 is configured to include a suction nozzle holder 26, which is the tip to which the suction nozzle 21 is attached from below, a rotary joint 27, and an elevation shaft 28. A guide frame 25 is provided to hang down from the lower part of the mounting head main body 23 of the mounting head 20. The component holding head 22 moves up and down along the guide frame 25 (arrow a).

[0024] The drive unit 24 of the mounting head main body 23 raises and lowers the lift shaft 28, and the rotary joint 27 and component holding head 22 rise and lower together with the lift shaft 28 along the guide frame 25. The rotary joint 27 is rotatably attached to the lift shaft 28, which rotates about the Z axis. The drive unit 24 rotates the lift shaft 28 about the Z axis, and the suction nozzle holder 26 rotates about the Z axis in conjunction with the rotation of the lift shaft 28. As a result, the suction nozzle 21 attached to the suction nozzle holder 26 (tip) rises and lowers and rotates about the Z axis. The drive unit 24 is controlled by a control unit 40 provided in the component mounting device 1 (FIG. 5).

[0025] 2 to 4, the mounting head main body 23 is provided with a first valve 29, a second valve 30, a flow rate measuring device 31, and a filter 32 for each component holding head 22. The first valve 29 and the second valve 30 are two-input, one-output air valves, and are controlled by the control unit 40. The first valve 29 is provided with an output port T1, a first input port T2, and a second input port T3. The second valve 30 is provided with an output port T4, a first input port T5, and a second input port T6.

[0026] 3 and 4, the first input port T2 of the first valve 29 is connected to a negative pressure source 33, and the second input port T3 is connected to an output port T4 of the second valve 30. The first input port T5 of the second valve 30 is connected to a positive pressure source 34, and the second input port T6 is connected to an atmosphere opening 35.

[0027] The output port T1 of the first valve 29 is connected to a head main body-side tube connection 36 provided on the mounting head main body 23 via a flow rate measuring device 31 and a filter 32. A rotary joint-side tube connection 37 is provided on the rotary joint 27 of the component holding head 22. The rotary joint-side tube connection 37 is connected to an opening on the component holding surface 21 a of the suction nozzle 21 via the rotary joint 27 and the suction nozzle holder 26. The head main body-side tube connection 36 and the rotary joint-side tube connection 37 are connected by a flexible tube 38. A damper 39 is provided on the mounting head main body 23 to protect the tube 38 from collisions.

[0028] In this way, the air flow path leading from the output port T1 of the first valve 29 to the flow rate measuring device 31, filter 32, head main body-side tube connection portion 36, tube 38, rotary joint-side tube connection portion 37, rotary joint 27, and suction nozzle holder 26 constitutes a first air flow path P1 leading from the output port T1 of the first valve 29 to the suction nozzle 21. The air flow path leading from the flow rate measuring device 31 to the positive pressure source 34 or negative pressure source 33 via the first valve 29 and second valve 30 (flow path switching portion S) constitutes a second air flow path P2. The section of the first air flow path P1 from the head main body-side tube connection portion 36 of the mounting head main body 23 to the rotary joint-side tube connection portion 37 of the component holding head 22 is formed by a flexible tube 38.

[0029] 3 and 4, when the control unit 40 turns the first valve 29 OFF, the output port T1 is connected to the first input port T2, the output port T1 is connected to the negative pressure source 33, and the opening of the suction nozzle 21 is vacuum-suctioned through the first air flow path P1. When the control unit 40 turns the first valve 29 ON, the output port T1 is connected to the second input port T3, and is connected to the output port T4 of the second valve 30.

[0030] When the control unit 40 turns the second valve 30 on while the first valve 29 is in the ON state, the output port T4 is connected to the first input port T5, the output port T1 of the first valve 29 is connected to the positive pressure source 34, and air is sprayed (air blown) from the opening of the suction nozzle 21 through the first air flow path P1. Also, when the control unit 40 turns the second valve 30 off while the first valve 29 is in the ON state, the output port T4 is connected to the second input port T6, the output port T1 of the first valve 29 is connected to the atmospheric opening 35, and the opening of the suction nozzle 21 is opened to the atmosphere through the first air flow path P1.

[0031] In this way, the first valve 29 and the second valve 30 constitute a flow path switching unit S that switches the first air flow path P1 so that it is connected to at least the positive pressure source 34 or the negative pressure source 33. The flow rate meter 31 measures the flow rate of air in the first air flow path P1 between the suction nozzle 21 and the flow path switching unit S. The first air flow path P1, the second air flow path P2 and the flow path switching unit S constitute an air pressure circuit R.

[0032] Next, the configuration of the control system of the component mounting device 1 will be described with reference to Figure 5. Here, the description will focus on the function of acquiring the air flow rate of the pneumatic circuit R and diagnosing the state of the pneumatic circuit R. The control unit 40 provided in the component mounting device 1 includes an air leakage measurement setting unit 41, a pneumatic circuit inspection unit 42, a measurement data storage unit 43, and a pneumatic circuit state diagnosis unit 44. A display / input unit 45 is connected to the control unit 40. The display / input unit 45 is a display / input means such as a touch panel, and displays an operation screen and various information required for operating the component mounting device 1. It also displays an inspection mode input screen used when setting the inspection mode of the pneumatic circuit.

[0033] The air leakage measurement setting unit 41 displays an inspection mode input screen on the display / input unit 45 to set an inspection mode for inspecting (acquiring the air flow rate) the pneumatic circuit R. The inspection modes include a positive pressure inspection mode in which positive pressure is supplied from the positive pressure source 34, a negative pressure inspection mode in which negative pressure is supplied from the negative pressure source 33, and a positive / negative inspection mode in which both the positive pressure inspection mode and the negative pressure inspection mode are executed. The air leakage measurement setting unit 41 also stores the inspection mode set using the display / input unit 45.

[0034] 5 , the pneumatic circuit inspection unit 42 operates the flow path switching unit S (first valve 29, second valve 30) to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33 while restricting the outflow or inflow of air from the tip (suction nozzle holder 26) of the component holding head 22 in accordance with the selected inspection mode, and acquires the air flow rate Q measured by the flow rate measuring device 31. That is, in the positive pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34. In the negative pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the negative pressure source 33. Then, the pneumatic circuit inspection unit 42 acquires the flow rate Q1 when the first air flow path P1 is connected to the positive pressure source 34 and the flow rate Q2 when the first air flow path P1 is connected to the negative pressure source 33.

[0035] The pneumatic circuit inspection unit 42 acquires the air flow rate Q from the flow rate meter 31 after a predetermined waiting time has elapsed since the flow path switching unit S was activated to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33. This allows even a minute air flow rate Q to be accurately measured. The pneumatic circuit inspection unit 42 associates the air flow rate Q measured by the flow rate meter 31 with information identifying the component holding head 22 being inspected, and stores the result in the measurement data storage unit 43.

[0036] 5, the pneumatic circuit inspection unit 42 includes a first flow rate restriction setting unit 42a and a second flow rate restriction setting unit 42b, which are sub-processors that restrict the inflow or outflow of air from the tip of the component holding head 22. The first flow rate restriction setting unit 42a restricts the inflow or outflow of air when a designated suction nozzle 21 (hereinafter referred to as the "designated nozzle") is attached to the suction nozzle holder 26 (tip) of the component holding head 22 being inspected.

[0037] First, the first flow rate limit setting unit 42a controls the linear drive mechanism of the Y-axis table 8 and the beam 9, and the drive unit 24 of the component holding head 22 to be inspected, to attach the designated nozzle in the nozzle changer 12 to the suction nozzle holder 26 of the component holding head 22 to be inspected. Next, the first flow rate limit setting unit 42a moves the component holding head 22 with the attached designated nozzle above the height reference member 14, and lowers the component holding head 22 to the reference height H0 (FIG. 3) where the component holding surface 21a of the designated nozzle abuts the upper surface of the height reference member 14.

[0038] As a result, the opening of the component holding surface 21a of the designated nozzle (suction nozzle 21) comes into contact with the upper surface of the height reference member 14 and is blocked, restricting the inflow or outflow of air. Note that because the height reference member 14, which is made of a hard material, comes into contact with the designated nozzle (suction nozzle 21), the opening of the designated nozzle is not completely blocked. This leaves a tiny gap between the opening of the designated nozzle and the upper surface of the height reference member 14, through which air can flow in or out.

[0039] In this way, the height reference member 14 is a contact member that contacts the component holding surface 21 a of the designated nozzle (suction nozzle 21). The contact member (height reference member 14) also serves as an air flow rate limiting means that limits the first air flow path P1 so that the air flow rate Q becomes a minute flow rate Q0 when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33.

[0040] 5, the second flow rate restriction setting unit 42b restricts the outflow or inflow of air by attaching the inspection jig 15 to the suction nozzle holder 26 (tip) of the component holding head 22 to be inspected. Specifically, the second flow rate restriction setting unit 42b controls the linear drive mechanisms of the Y-axis table 8 and beam 9 and the drive unit 24 of the component holding head 22 to be inspected, and attaches the inspection jig 15 held by the nozzle changer 12 to the suction nozzle holder 26 of the component holding head 22 to be inspected.

[0041] The inspection jig 15 is formed with an opening or ventilation path smaller than the opening of the suction nozzle 21 so that the air flow rate Q becomes a predetermined minute flow rate Q0 when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33. That is, the inspection jig 15 is attached to the component holding head 22 in place of the suction nozzle 21 and serves as an air flow rate limiting means for limiting the air flow rate Q flowing out of or into the first air flow path P1 to the minute flow rate Q0. Note that the inspection jig 15 may be formed with an opening that limits the air flow rate Q to the minute flow rate Q0, or may be configured to limit the air flow rate Q to the minute flow rate Q0 using a breathable material such as a porous material or nonwoven fabric.

[0042] 5, the air pressure circuit condition diagnosis unit 44 diagnoses the condition of the air pressure circuit R based on the flow rate Q acquired by the air pressure circuit inspection unit 42 and stored in the measurement data storage unit 43. For example, if the acquired air flow rate Q is greater than a predetermined threshold, the air pressure circuit condition diagnosis unit 44 diagnoses that an air leak has occurred in the first air flow path P1 leading from the flow rate measuring device 31 to the suction nozzle 21. Note that the minute flow rate Q0 set in the positive pressure test mode and the negative pressure test mode may differ, and different thresholds may be used in the condition diagnosis.

[0043] Next, a method for inspecting the pneumatic circuit R in the component mounting device 1 will be described with reference to the flowcharts of Figures 6 to 8. In Figure 6, first, the air leakage measurement setting unit 41 displays an inspection mode input screen on the display / input unit 45, prompting the user to select an inspection mode for the pneumatic circuit R (ST1). If none of the inspection modes is selected (No in ST1), that is, if it is selected not to inspect the pneumatic circuit R, the inspection of the pneumatic circuit R ends. If any of the inspection modes is selected (Yes in ST1), the pneumatic circuit inspection unit 42 executes an inspection preparation step (ST2) described below.

[0044] Next, if the positive pressure inspection mode or the positive / negative inspection mode has been selected (Yes in ST3), the pneumatic circuit inspection unit 42 executes a positive pressure inspection step (ST4) described below. Next, if the negative pressure inspection mode or the positive / negative inspection mode has been selected (Yes in ST5), the pneumatic circuit inspection unit 42 executes a negative pressure inspection step (ST6) described below. Next, the pneumatic circuit inspection unit 42 stores (outputs) all of the acquired flow rates Q (flow rate data) in the measurement data storage unit 43 (ST7). Note that the pneumatic circuit inspection unit 42 may store (output) flow rate data in the measurement data storage unit 43 each time it acquires flow rate data.

[0045] 6, if only the positive pressure test mode is selected (Yes in ST3, No in ST5), only the positive pressure test step (ST4) is executed. If only the negative pressure test mode is selected (No in ST3, Yes in ST5), only the negative pressure test step (ST6) is executed. If the positive / negative test mode (both the positive and negative pressure test modes) is selected (Yes in ST3, Yes in ST5), both the positive pressure test step (ST4) and the negative pressure test step (ST6) are executed.

[0046] Next, the inspection preparation step (ST2) will be described in detail with reference to the flow chart in FIG. 7. In the inspection preparation step (ST2), the pneumatic circuit inspection unit 42 first resets (N=1) a counter that identifies the component holding head 22 (ST11). Next, the first flow rate limit setting unit 42a attaches designated nozzles held by the nozzle changer 12 to all component holding heads 22 (ST12). Next, the first flow rate limit setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14 (ST13).

[0047] Next, the first flow rate limiting unit 42a lowers the component holding head 22(N) to a cleaning height H1 (FIG. 3) that is higher than the reference height H0 and where the component holding surface 21a of the designated nozzle does not contact the upper surface of the height reference member 14 (contact member) (ST14). The pneumatic circuit inspection unit 42 then activates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34, thereby blowing air through the opening of the designated nozzle (ST15: cleaning blow process). This causes the air ejected from the opening of the designated nozzle to bounce off the surface of the height reference member 14 and strike the component holding surface 21a of the designated nozzle, blowing away dust and other particles adhering to the surface of the height reference member 14 and the component holding surface 21a of the designated nozzle.

[0048] 7, the pneumatic circuit inspection unit 42 then activates the flow path switching unit S to connect the first air flow path P1 to the atmosphere opening 35, thereby opening the opening of the designated nozzle to the atmosphere (ST16: atmosphere opening step). The first flow rate limiting unit 42a then raises the component holding head 22(N) to the standby height H2 (FIG. 3) (ST17). If the process has not been completed for all component holding heads 22 (No in ST18), the pneumatic circuit inspection unit 42 then increments the counter (N=N+1) (ST19) and repeats steps ST13 to ST17 for the next component holding head 22(N+1). If the process has been completed for all component holding heads 22 (Yes in ST18), the pneumatic circuit inspection unit 42 ends the inspection preparation step (ST2).

[0049] Next, the positive pressure inspection step (ST4) will be described in detail with reference to the flow chart in FIG. 8 . In the positive pressure inspection step (ST4), the pneumatic circuit inspection unit 42 first resets (N=1) a counter identifying the component holding head 22 (ST21). The first flow rate limit setting unit 42a then moves the component holding head 22 (N) to be inspected above the height reference member 14, lowers it to the reference height H0, and abuts the component holding surface 21a of the designated nozzle (suction nozzle 21) against the height reference member 14 (abutment member) (ST22: air flow path limiting step). This limits the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 to a minute flow rate Q0.

[0050] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34, thereby blowing air from the opening of the designated nozzle (ST23: blow ON step). Next, after a predetermined waiting time (ST24: timer waiting step), the pneumatic circuit inspection unit 42 acquires the air flow rate Q1(N) measured by the flow meter 31 (ST25: blow flow rate acquisition step). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the atmosphere opening 35, thereby opening the opening of the designated nozzle to the atmosphere (ST26: blow OFF step).

[0051] 8, if processing has not been completed for all component holding heads 22 (No in ST27), the pneumatic circuit inspection unit 42 increments the counter (N=N+1) (ST28) and repeats the air flow path restriction step (ST22) through the blow-off step (ST26) for the next component holding head 22 (N+1). If processing has been completed for all component holding heads 22 (Yes in ST27), the pneumatic circuit inspection unit 42 ends the positive pressure inspection step (ST4).

[0052] Next, the negative pressure inspection step (ST6) will be described in detail with reference to the flow chart in FIG. In the negative pressure inspection step (ST6), the pneumatic circuit inspection unit 42 first resets (N=1) a counter that identifies the component holding head 22 (ST31). The first flow rate limit setting unit 42a then moves the component holding head 22 (N) to be inspected above the height reference member 14, lowers it to the reference height H0, and abuts the component holding surface 21a of the designated nozzle (suction nozzle 21) against the height reference member 14 (abutment member) (ST32: air flow path limiting step). This limits the air flow rate Q when the first air flow path P1 is connected to the negative pressure source 33 to a minute flow rate Q0.

[0053] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the negative pressure source 33, thereby drawing a vacuum from the opening of the designated nozzle (ST33: suction ON step). Next, after a predetermined waiting time (ST34: timer waiting step), the pneumatic circuit inspection unit 42 acquires the air flow rate Q2(N) measured by the flow meter 31 (ST35: suction flow rate acquisition step). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the atmosphere opening 35, thereby opening the opening of the designated nozzle to the atmosphere (ST36: suction OFF step).

[0054] 9, if processing has not been completed for all component holding heads 22 (No in ST37), the pneumatic circuit inspection unit 42 increments the counter (N=N+1) (ST38) and causes the next component holding head 22 (N+1) to repeatedly execute the air flow path restricting step (ST32) through the suction OFF step (ST36). If processing has been completed for all component holding heads 22 (Yes in ST37), the pneumatic circuit inspection unit 42 terminates the negative pressure inspection step (ST6).

[0055] As described above, the method for inspecting the pneumatic circuit R in the component mounting device 1 of this embodiment includes the following steps: a first step (air flow path restriction steps (ST22), (ST32)) of abutting the component holding surface 21a of the suction nozzle 21 against the abutment member (height reference member 14); a second step (blow ON step (ST23), suction ON step (ST33)) of operating the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33; and a third step (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)) of acquiring the air flow rates Q1(N), Q2(N) measured by the flow rate measuring instrument 31.

[0056] Furthermore, the third step is executed after a predetermined waiting time has elapsed since the second step (timer waiting steps (ST24), (ST34)). Furthermore, after the first step, the pneumatic circuit inspection unit 42 executes the second step and the third step at least when the first air flow path P1 is connected to the positive pressure source 34 (positive pressure inspection step (ST2)) or when it is connected to the negative pressure source 33 (negative pressure inspection step (ST4)) (Yes in ST1).

[0057] Furthermore, the third step is performed with the component holding head 22(N) being inspected lowered to the reference height H0. That is, the air flow rates Q1(N) and Q2(N) are acquired with the tube 38 connecting the section of the first air flow path P1 from the mounting head main body 23 to the component holding head 22 extended. Extending the tube 38 makes it easier to detect cracks in the tube 38 and air leaks from connections such as the head main body-side tube connection 36 and the rotary joint-side tube connection 37.

[0058] In this way, in the first step, the pneumatic circuit inspection unit 42 lowers the component holding head 22 to deform the tube 38 into a shape suitable for detecting air leaks from the tube 38 or its connection (the head body-side tube connection 36, the rotary joint-side tube connection 37), thereby acquiring the air flow rates Q1(N) and Q2(N), which allows for the detection of minute cracks and the like.

[0059] Once the inspection of the pneumatic circuit R is complete, a diagnosis is then made of the state of the pneumatic circuit R. In the method for diagnosing the pneumatic circuit R in the component mounting device 1, the pneumatic circuit state diagnosis unit 44 diagnoses the state of the pneumatic circuit R based on the air flow rates Q1(N) and Q2(N) acquired by the pneumatic circuit inspection unit 42 and stored in the measurement data storage unit 43.

[0060] Next, another embodiment of the method for inspecting the pneumatic circuit R in the component mounting device 1 will be described with reference to the flows in Figures 10 to 12. Hereinafter, the same steps as in the method for inspecting the pneumatic circuit R shown in Figures 6 to 9 will be given the same reference numerals, and detailed description will be omitted. This other embodiment of the method for inspecting the pneumatic circuit R differs from the method for inspecting the pneumatic circuit R shown in Figures 6 to 9 in that an inspection jig 15 is used as the air flow rate restricting means. That is, some of the inspection preparation step (ST2), positive pressure inspection step (ST4), and negative pressure inspection step (ST6) are different, and the following description will focus on the different parts.

[0061] 10 , in the inspection preparation step (ST2), after the counter identifying the component holding head 22 is reset (N=1) (ST11), the second flow rate limiting setting unit 42a mounts the inspection jigs 15 held by the nozzle changer 12 to all of the component holding heads 22 (ST41: inspection jig mounting step). Next, the cleaning blow step (ST15) and the atmosphere opening step (ST16) are executed for all of the component holding heads 22 in turn. This blows away dust and other particles adhering to minute openings formed in the inspection jigs 15.

[0062] 11 , in the positive pressure inspection process (ST4), after a counter identifying a component holding head 22 is reset (N=1) (ST21), a blow-on process (ST23), a timer waiting process (ST24), a blow flow rate acquisition process (ST25), and a blow-off process (ST26) are executed in order for all component holding heads 22. As a result, the air flow rate Q1(N) is acquired for all component holding heads 22.

[0063] 12, in the negative pressure inspection process (ST6), after a counter identifying a component holding head 22 is reset (N=1) (ST31), the suction ON process (ST33), timer waiting process (ST34), suction flow rate acquisition process (ST35), and suction OFF process (ST36) are executed in order for all component holding heads 22. As a result, the air flow rate Q2(N) is acquired for all component holding heads 22.

[0064] As described above, another example of the method for inspecting the pneumatic circuit R in the component mounting device 1 of this embodiment includes a first step (inspection jig mounting step (ST41)) of restricting the first air flow path P1 so that the air flow rate Q becomes a minute flow rate Q0 when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33, a second step (blow ON step (ST23), suction ON step (ST33)) of operating the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33, and a third step (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)) of acquiring the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring device 31.

[0065] In the first step, an inspection jig 15 is attached to the component holding head 22 in place of the suction nozzle 21. The inspection jig 15 limits the flow rate Q of air flowing out of or into the first air flow path P1 to a minute flow rate Q0. Using the inspection jig 15 allows the minute flow rate Q0 to be accurately set. In the third step, the component holding head 22 may be lowered to the cleaning height H1 with the tube 38 extended, and the air flow rates Q1(N) and Q2(N) may be obtained. This makes it possible to detect air leaks from minute cracks or the like that cannot be detected when the component holding head 22 is at the standby height H2.

[0066] If there is a limit to the number of inspection jigs 15 that can be held by the nozzle changer 12, the first step, the second step, and the third step may be performed for each component holding head 22.

[0067] Once the inspection of the pneumatic circuit R is completed and the air flow rates Q1(N) and Q2(N) are acquired, the pneumatic circuit state diagnosis unit 44 diagnoses the state of the pneumatic circuit R. Here, with reference to Fig. 13, an example of a method for diagnosing the pneumatic circuit R in the component mounting device 1 by the pneumatic circuit state diagnosis unit 44 will be described.

[0068] 13, the air pressure circuit condition diagnosis unit 44 determines the state of the air pressure circuit R by comparing the air flow rates Q1(N) and Q2(N) with a first threshold Qt1 that is smaller than the minute flow rate Q0 and a second threshold Qt2 that is larger than the minute flow rate Q0. Specifically, if the air flow rates Q1(N) and Q2(N) are between the first threshold Qt1 and the second threshold Qt2, the air pressure circuit condition diagnosis unit 44 diagnoses the state of the air pressure circuit R as good or normal. If the air flow rates Q1(N) and Q2(N) are larger than the second threshold Qt2, the air pressure circuit condition diagnosis unit 44 diagnoses that an abnormality has occurred, that is, an air leak, in the first air flow path P1 that runs from the flow rate measuring device 31 to the component holding head 22.

[0069] Furthermore, if the air flow rates Q1(N) and Q2(N) are zero, the pneumatic circuit condition diagnosis unit 44 diagnoses that there is a problem in the second air flow path P2 from the flow rate meter 31 to the positive pressure source 34 or negative pressure source 33. For example, it diagnoses that there is a problem such as a malfunction of the flow rate meter 31, the positive pressure source 34, or the negative pressure source 33, or a disconnection of the piping up to the flow path switching unit S. Furthermore, if the air flow rates Q1(N) and Q2(N) are greater than zero and less than the first threshold value Qt1, the pneumatic circuit condition diagnosis unit 44 diagnoses that an abnormality may have occurred in the first air flow path P1, the second air flow path P2, etc., and therefore an investigation is required.

[0070] Next, a component mounting system 50 will be described with reference to Fig. 14. The component mounting system 50 includes a component mounting device 1A and an information processing device 51. The component mounting device 1A includes a communication unit 46 and is capable of communicating with the information processing device 51 via a communication network 52. Hereinafter, the same parts as those in the component mounting device 1 shown in Fig. 5 are designated by the same reference numerals, and detailed description thereof will be omitted.

[0071] The control unit 40A of the component mounting device 1A includes an air leakage measurement and setting unit 41 and an air pressure circuit inspection unit 42. The information processing device 51 includes a measurement data storage unit 43 and an air pressure circuit status diagnosis unit 44. The communication unit 46 of the component mounting device 1A transmits the air flow rates Q1(N) and Q2(N) acquired by the air pressure circuit inspection unit 42 to the information processing device 51 via the communication network 52. The information processing device 51 stores the received air flow rates Q1(N) and Q2(N) in the measurement data storage unit 43. The air pressure circuit status diagnosis unit 44 of the information processing device 51 then diagnoses the status of the air pressure circuit R of the component mounting device 1A based on the air flow rates Q1(N) and Q2(N). This makes it possible to detect minor abnormalities in the air pressure circuit R that supplies positive or negative pressure to the suction nozzle 21.

[0072] As described above, the component mounting device 1 of this embodiment includes: a component holding head 22 having a suction nozzle 21 at its tip (nozzle holder 26); a mounting head main body 23 having a drive unit 24 for raising and lowering the component holding head 22; a first air flow path P1 leading to the suction nozzle 21; a flow path switching unit S (first valve 29, second valve 30) for switching the first air flow path P1 so that it is connected to at least a positive pressure source 34 or a negative pressure source 33; and an air pressure circuit R including a flow rate measuring device 31 for measuring the air flow rates Q1(N), Q2(N) in the first air flow path P1 between the suction nozzle 21 and the flow path switching unit S.

[0073] Furthermore, there is provided an air flow rate restricting means (height reference member 14, inspection jig 15) that restricts the first air flow path P1 so that the air flow rate Q becomes a minute flow rate Q0 when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33, and an air pressure circuit inspection unit 42 that operates the flow path switching unit S with the air flow rate restricting means restricting the outflow or inflow of air from the tip end, to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33, and acquires the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring device 31. This makes it possible to detect minor abnormalities in the air pressure circuit R that supplies positive pressure or negative pressure to the suction nozzle 21.

[0074] The component mounting device, component mounting system, method for inspecting an air pressure circuit in a component mounting device, and method for diagnosing an air pressure circuit in a component mounting device of the present invention have the effect of being able to detect minor abnormalities in the air pressure circuit that supplies positive or negative pressure to a suction nozzle, and are useful in the field of mounting components to substrates.

[0075] REFERENCE SIGNS LIST 1, 1A Component mounting device 4 Board 14 Height reference member (contact member, air flow rate limiting means) 15 Inspection jig (air flow rate limiting means) 21 Suction nozzle 22 Component holding head 23 Mounting head main body 26 Suction nozzle holder (tip) 31 Flow rate measuring device 33 Negative pressure source 34 Positive pressure source 44 Air pressure circuit status diagnosis unit 46 Communication unit 50 Component mounting system P1 First air flow path P2 Second air flow path Q, Q1(N), Q2(N) Flow rate Q0 Minute flow rate Qt1 First threshold Qt2 Second threshold R Air pressure circuit S Flow path switching unit

Claims

1. A component mounting device for mounting components on a board, comprising: a component holding head having a suction nozzle at its tip for suctioning and holding components; a mounting head main body having a drive unit for raising and lowering the component holding head; an air flow path leading to the suction nozzle; a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source; a pneumatic circuit including a flow meter for measuring the flow rate of air in the air flow path between the suction nozzle and the flow path switching unit; air flow restriction means for restricting the air flow path so that the flow rate of air when the air flow path is connected to the positive pressure source or the negative pressure source is a very small flow rate; and a pneumatic circuit inspection unit for restricting the outflow or inflow of air from the tip of the component holding head with the air flow restriction means, and operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and obtaining the air flow rate measured by the flow meter.

2. A component mounting device as claimed in claim 1, wherein said air flow rate restricting means is a contact member which contacts the component holding surface of said suction nozzle.

3. A component mounting device as described in claim 1, wherein the component holding head is capable of replacing the suction nozzle, and the air flow rate limiting means is an inspection tool that is attached to the component holding head in place of the suction nozzle and limits the air flowing out of or into the air flow path to the minute flow rate.

4. The component mounting device according to claim 1, further comprising an air pressure circuit state diagnosis unit that diagnoses the state of said air pressure circuit based on the flow rate acquired by said air pressure circuit inspection unit.

5. A component mounting device as described in claim 4, wherein the air pressure circuit condition diagnosis unit determines the condition of the air pressure circuit by comparing the flow rate with a first threshold value smaller than the minute flow rate and a second threshold value larger than the minute flow rate.

6. The component mounting device according to claim 5, wherein said air pressure circuit state diagnosis unit diagnoses the state of said air pressure circuit as good or normal if said flow rate is between said first threshold value and said second threshold value.

7. A component mounting device as described in claim 5, wherein the air pressure circuit condition diagnosis unit diagnoses that there is a problem in the air flow path from the flow meter to the positive pressure source, or in the air flow path from the flow meter to the negative pressure source, if the flow rate is zero.

8. A component mounting device as described in any one of claims 1 to 3, further comprising a communication unit that communicates with an information processing device having an air pressure circuit condition diagnosis unit that diagnoses the condition of the air pressure circuit based on the flow rate acquired by the air pressure circuit inspection unit, wherein the communication unit transmits the flow rate to the information processing device.

9. A component mounting system including a component mounting device which mounts components on a board and an information processing device capable of communicating with the component mounting device, wherein the component mounting device comprises: a component holding head having a suction nozzle at its tip for suction-holding a component; a mounting head main body having a drive unit for raising and lowering the component holding head; an air flow path leading to the suction nozzle; a flow path switching unit which switches the air flow path to be connected to at least a positive pressure source or a negative pressure source; an air pressure circuit including a flow meter which measures the flow rate of air in the air flow path between the suction nozzle and the flow path switching unit; air flow rate restricting means which restricts the air flow path so that the flow rate of air when the air flow path is connected to the positive pressure source or the negative pressure source becomes a minute flow rate; and an air pressure circuit inspection unit which operates the flow path switching unit while the air flow rate restricting means restricts the outflow or inflow of air from the tip of the component holding head to connect the air flow path to the positive pressure source or the negative pressure source, and obtains the air flow rate measured by the flow meter; a pneumatic circuit state diagnosis unit that diagnoses a state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit; 10. A component mounting system as set forth in claim 9, wherein said air flow rate restricting means is a contact member that contacts the component holding surface of said suction nozzle.

11. A component mounting system as described in claim 9, wherein the component holding head is capable of replacing the suction nozzle, and the air flow rate limiting means is an inspection tool that is attached to the component holding head in place of the suction nozzle and limits the air flowing out of or into the air flow path to the minute flow rate.

12. A component mounting system as described in claim 9, wherein the pneumatic circuit condition diagnosis unit diagnoses the condition of the pneumatic circuit by comparing the flow rate with a first threshold value smaller than the minute flow rate and a second threshold value larger than the minute flow rate.

13. The component mounting system according to claim 12, wherein said air pressure circuit state diagnosis unit diagnoses the state of said air pressure circuit as good or normal if said flow rate is between said first threshold value and said second threshold value.

14. A component mounting system as described in claim 12, wherein the air pressure circuit condition diagnosis unit diagnoses that there is a problem in the air flow path from the flow meter to the positive pressure source, or in the air flow path from the flow meter to the negative pressure source, if the flow rate is zero.

15. A method for inspecting a pneumatic circuit in a component mounting device comprising a component holding head having a suction nozzle at its tip for suctioning and holding a component, a mounting head main body having a drive unit for raising and lowering the component holding head, and a pneumatic circuit including an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to connect to at least a positive pressure source or a negative pressure source, and a flow meter for measuring the flow rate of air in the air flow path between the suction nozzle and the flow path switching unit, comprising: a first step of restricting the air flow path so that the flow rate of the air when the air flow path is connected to the positive pressure source or the negative pressure source is a very small flow rate; a second step of operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source; and a third step of obtaining the flow rate of the air measured by the flow meter.

16. A method for inspecting a pneumatic circuit in a component mounting device as set forth in claim 15, wherein said first step comprises restricting said air flow path by bringing an abutting member into contact with the component holding surface of said suction nozzle.

17. A method for inspecting a pneumatic circuit in a component mounting device as described in claim 15, wherein the component holding head is capable of replacing the suction nozzle, and the first step comprises mounting an inspection jig on the component holding head in place of the suction nozzle, the inspection jig limiting the air flowing out of or into the air flow path to the minute flow rate.

18. A method for diagnosing an air pressure circuit in a component mounting device, comprising diagnosing the state of the air pressure circuit based on the flow rate obtained by the inspection method according to any one of claims 15 to 17.

19. A method for diagnosing a pneumatic circuit in a component mounting device as described in claim 18, further comprising the step of diagnosing the condition of the pneumatic circuit by comparing the flow rate acquired in the third step with a first threshold value smaller than the minute flow rate and a second threshold value larger than the minute flow rate.

20. A method for diagnosing an air pressure circuit in a component mounting device as described in claim 19, wherein the diagnosis diagnoses the condition of the air pressure circuit as good or normal if the flow rate obtained in the third step is between the first threshold value and the second threshold value.

21. A method for diagnosing a pneumatic circuit in a component mounting device as described in claim 19, wherein, if the flow rate is zero, the diagnosis diagnoses that there is a problem in the air flow path from the flow rate meter to the positive pressure source, or in the air flow path from the flow rate meter to the negative pressure source.

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