Manufacturing system

Abstract

A manufacturing system (100, 200) is provided with: a self-propelled robot (1, 201) that includes a robot arm (11); an imaging unit (2, 202) that is moved by the robot arm; and a remote operation unit (6) that remotely operates the self-propelled robot and causes the self-propelled robot to perform work on a manufacturing device (3, 203).

Description

Manufacturing Systems

[0001] This disclosure relates to manufacturing systems.

[0002] 2. Description of the Related Art Conventionally, substrate manufacturing apparatuses have been known.

[0003] Japanese Patent No. 6377918 discloses a substrate manufacturing apparatus that includes two load lock chambers, four processing chambers, one transfer chamber, and one substrate transfer robot. This substrate manufacturing apparatus uses the four processing chambers to perform a predetermined manufacturing process on a substrate.

[0004] Patent No. 6377918

[0005] In the case of a substrate manufacturing apparatus such as that described in the above-mentioned Japanese Patent No. 6377918, if an abnormality occurs in the substrate manufacturing apparatus, an operator may have to go to the location of the substrate manufacturing apparatus and perform work on the substrate manufacturing apparatus. This places a burden on the operator. Furthermore, in similar cases with manufacturing apparatuses other than the substrate manufacturing apparatus, a burden is also placed on the operator. For this reason, it is desirable to reduce the burden on operators who wish to perform work on the manufacturing apparatus.

[0006] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a manufacturing system that can reduce the burden on workers who want to work on manufacturing equipment.

[0007] A manufacturing system according to one aspect of this disclosure includes a self-propelled robot including a robot arm, an imaging unit moved by the robot arm, and a remote control unit that remotely controls the self-propelled robot and causes the self-propelled robot to perform work on a manufacturing device.

[0008] As described above, a manufacturing system according to one aspect of the present disclosure includes an imaging unit moved by a robot arm and a remote control unit for remotely controlling the self-propelled robot and having the self-propelled robot perform work on manufacturing equipment. This allows a worker to remotely control the self-propelled robot using the remote control unit to perform work on manufacturing equipment while visually checking images captured by the imaging unit. As a result, the worker does not need to personally go to the location of the manufacturing equipment. This reduces the burden on the worker who wants to work on the manufacturing equipment.

[0009] According to the present disclosure, the burden on workers who wish to work on manufacturing equipment can be reduced.

[0010] FIG. 1 is a perspective view showing a self-propelled robot and a substrate manufacturing apparatus of a substrate manufacturing system according to a first embodiment. FIG. 2 is a block diagram of a substrate manufacturing system according to a first embodiment. FIG. 3 is a plan view showing a self-propelled robot and a substrate manufacturing apparatus in a clean room of the substrate manufacturing system according to a first embodiment. FIG. 4 is a diagram showing a block configuration of a self-propelled robot arranged in a clean room of the substrate manufacturing system according to a first embodiment, and a terminal arranged in a monitoring room. FIG. 5 is a perspective view showing a status display unit of a substrate manufacturing apparatus of a substrate manufacturing system according to a first embodiment. FIG. 6 is a diagram for explaining an operation of imaging the inside of a substrate manufacturing apparatus by a self-propelled robot of the substrate manufacturing system according to a first embodiment. FIG. 7 is a diagram for explaining an operation of operating an operation device of a substrate manufacturing apparatus by a self-propelled robot of the substrate manufacturing system according to a first embodiment.

[0011] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0012] First Embodiment A substrate manufacturing system 100 according to a first embodiment will be described with reference to Figures 1 to 7. The substrate manufacturing system 100 is an example of a manufacturing system.

[0013] 1, the substrate manufacturing system 100 includes a self-propelled robot 1 and an imaging unit 2. The substrate manufacturing system 100 also includes a substrate manufacturing apparatus 3 for manufacturing a substrate C. The substrate manufacturing apparatus 3 is an example of a manufacturing apparatus.

[0014] In the drawings, the front-to-back direction relative to the substrate manufacturing apparatus 3 is indicated by the X direction, the front is indicated by the X1 direction, and the rear is indicated by the X2 direction. The left-to-right direction relative to the substrate manufacturing apparatus 3 is indicated by the Y direction, the left is indicated by the Y1 direction, and the right is indicated by the Y2 direction. The up-down direction is indicated by the Z direction, the top is indicated by the Z1 direction, and the bottom is indicated by the Z2 direction.

[0015] Both the substrate manufacturing apparatus 3 and the self-propelled robot 1 are located within the clean room CR. The substrate manufacturing apparatus 3 and the self-propelled robot 1 can be operated remotely by an operator in a monitoring room MR or the like outside the clean room CR, or can be operated directly by an operator who enters the clean room CR wearing dustproof clothing.

[0016] The self-propelled robot 1 includes a robot arm 11 and transports a substrate housing container F that houses a plurality of substrates C. The substrate housing container F is, for example, a so-called FOUP (Front-Opening Unified Pod), which is a dedicated container for transporting and storing wafers, which are substrates C.

[0017] The imaging unit 2 is disposed on the robot arm 11. The imaging unit 2 captures an image of the substrate housing container F when the self-propelled robot 1 transports the substrate housing container F.

[0018] In the substrate manufacturing apparatus 3, a substrate storage container F is transported by a self-propelled robot 1. The substrate manufacturing apparatus 3 is a substrate transport apparatus that transports substrates C without processing the substrates C. The substrate manufacturing apparatus 3 is, for example, a so-called EFEM (Equipment Front End Module). The substrate manufacturing apparatus 3 includes a substrate transport chamber 33 and a substrate transport robot 34 disposed inside the substrate transport chamber 33. The substrate transport robot 34 transports substrates C between the substrate storage container F and the substrate processing apparatus 8 via the substrate transport chamber 33. The substrate transport robot 34 is an apparatus that transfers substrates C between the substrate storage container F and the substrate processing apparatus 8. The substrate processing apparatus 8 is disposed adjacent to the rear side (X2 direction side) of the substrate manufacturing apparatus 3.

[0019] As shown in FIGS. 2 and 4, the substrate manufacturing system 100 also includes a terminal 5 having a display unit 5 a and a remote control unit 6 that receives operation instructions for driving the self-propelled robot 1 .

[0020] In principle, the terminal 5 and the remote control unit 6 are located outside the clean room CR. The terminal 5 is located, for example, in a monitoring room MR for monitoring the status of the clean room CR. The terminal 5 is a desktop personal computer having a display as the display unit 5a. The terminal may also be a laptop computer, an information terminal with a touch panel, a tablet terminal, a smartphone, etc. The display unit 5a displays moving images captured by the imaging unit 2. The terminal 5 has a communication unit for communicating with the communication unit 15 (described later) of the self-propelled robot 1 and the communication unit 36 ​​(described later) of the substrate manufacturing apparatus 3.

[0021] Remote control unit 6 includes, for example, a stick operation unit 6a such as a joystick. Remote control unit 6 is connected to terminal 5 and transmits operation instructions to self-propelled robot 1 via terminal 5. Note that the remote control unit may transmit operation instructions directly to the self-propelled robot without using a terminal.

[0022] The substrate manufacturing system 100 also includes an operation touch panel 7 that accepts input operations related to the substrate manufacturing apparatus 3. The operation touch panel 7 is disposed near the substrate manufacturing apparatus 3. The operation touch panel 7 is, for example, installed on a stand 70 beside the substrate manufacturing apparatus 3, and disposed near a second side wall 31b described below. The operation touch panel 7 is an example of an operation device.

[0023] (Detailed configuration of self-propelled robot) As shown in Figures 1 to 3, the self-propelled robot 1 includes a box-shaped housing 10, a robot arm 11 installed on the top of the housing 10, a moving unit 12 installed on the bottom of the housing 10, a bracket 2a, a hand attachment unit 13, a hand 14, a communication unit 15, and a control unit 16.

[0024] The housing 10 has a rectangular top surface 10a. The top surface 10a is used as a support surface on which a substrate container F and the like are placed. The housing 10 has a slide base 110 that can be pulled out horizontally to expand the area of ​​the top surface 10a. The robot arm 11 of the self-propelled robot 1 is a vertically articulated arm. The robot arm 11 can be driven to freely change the positions of the imaging unit 2 and the hand 14. The moving unit 12 has multiple wheels 12a that rotate while supporting the housing 10 from below, and a servo motor that drives the multiple wheels 12a. In principle, the moving unit 12 moves the self-propelled robot 1 linearly along the longitudinal direction of the housing 10. Furthermore, the moving unit 12 rotates while maintaining its position when changing its direction of movement. The moving unit 12 is a so-called AGV (Automatic Guided Vehicle), which is a traveling device that moves autonomously along a predetermined route while detecting obstacles in the vicinity to avoid colliding with them.

[0025] The bracket 2a is attached to the tip of the robot arm 11. The hand attachment unit 13 is attached to the bracket 2a. The hand attachment unit 13 is a so-called tool changer for interchangeably attaching various hands 14. The hand attachment unit 13 is attached to the tip of the robot arm 11 via the bracket 2a.

[0026] The hand 14 is replaceably attached to the hand attachment portion 13. The hand 14 is attached to the tip of the robot arm 11 via the bracket 2a and the hand attachment portion 13. The hand 14 includes a holding hand 14a that holds a substrate container F that houses a substrate C. Specifically, the holding hand 14a has a pair of rod-shaped members for holding the substrate container F. The self-propelled robot 1 holds and transports the substrate container F using the holding hand 14a. The holding hand 14a holds the substrate container F by sandwiching a protrusion F1 located at the upper end of the substrate container F by bringing the pair of rod-shaped members close to each other. Other types of hands 14 include an operating hand 14b (see FIG. 7 ) that has a touch operation portion 141 for operating a touch panel and a suction hand that has a suction portion for suctioning the substrate C. The self-propelled robot 1 moves to a hand storage cabinet that stores various types of hands 14 and automatically replaces the hand 14, even when no operator is present. In other words, the self-propelled robot 1 performs what is known as an auto-tool change.

[0027] The communication unit 15 is a wireless communication unit. The communication unit 15 transmits and receives various information to and from the terminal 5. Specifically, the communication unit 15 transmits image information D1 captured by the imaging unit 2 to the terminal 5. The communication unit 15 also receives operation instructions from the remote control unit 6.

[0028] The control unit 16 is a robot controller that controls the operation of each part of the self-propelled robot 1. The control unit 16 includes, for example, a calculation device such as a central processing unit (CPU). The control unit 16 also includes memory such as a random access memory (RAM) and a read-only memory (ROM), and a storage device such as a hard disk. The control unit 16 executes control processing using the calculation device based on programs and parameters stored in the storage device. In detail, the control unit 16 controls the operation of the robot arm 11, the hand 14, and the moving unit 12. The control unit 16 also controls the operation of the imaging unit 2. The control unit 16 acquires image information D1 captured by the imaging unit 2 and transmits it to the terminal 5 via the communication unit 15. The control unit of the self-propelled robot may be configured as an integrated robot controller that controls the robot arm, hand, moving unit, imaging unit, etc., or may be configured as separate controllers for each of the components: robot arm, hand, moving unit, imaging unit, etc. The self-propelled robot may also be equipped with an integrated robot controller that controls the robot arm, hand, and moving unit, and the imaging unit may be equipped with a dedicated controller that is separate from the robot controller of the self-propelled robot.

[0029] (Detailed Configuration of Imaging Unit) As shown in FIGS. 1 to 3, the imaging unit 2 is moved by the robot arm 11. The imaging unit 2 is a camera having an image sensor that captures moving images and still images. The imaging unit 2 is attached to a bracket 2a. The imaging unit 2 is attached to the tip of the robot arm 11 via the bracket 2a. Therefore, when replacing the hand 14, there is no need to remove the imaging unit 2, and the attached state to the robot arm 11 is maintained.

[0030] When the substrate housing container F is held by the holding hand 14a at the tip of the robot arm 11, the imaging unit 2 images the substrate housing container F in order to correct the position of the holding hand 14a with respect to the substrate housing container F. The imaging unit 2 also images the interior of the substrate manufacturing apparatus 3 in order to check for abnormalities in the substrates C inside the substrate manufacturing apparatus 3. The imaging unit 2 is communicatively connected to the control unit 16 wirelessly or via a cable, and transmits image information D1 to the terminal 5 via the control unit 16.

[0031] (Detailed configuration of the substrate manufacturing apparatus) As shown in Figures 1 to 3, the substrate manufacturing apparatus 3 includes a mounting table 30 for a substrate storage container F, a box-shaped housing 31, a window section 32, a substrate transport chamber 33 which is the internal space of the housing 31, a substrate transport robot 34, an abnormality detection section 35, a communication section 36, a control section 37, and a status display section 38.

[0032] Two mounting tables 30 are disposed outside the housing 31, in front of the housing 31. The two mounting tables 30 are spaced apart in the left-right direction (Y direction). A substrate container F is placed on the mounting tables 30 by the self-propelled robot 1. The substrate container F on the mounting tables 30 is moved by the self-propelled robot 1 after processing by the substrate manufacturing apparatus 3. The interior of the housing 31 (substrate transfer chamber 33) is filled with nitrogen and sealed. The housing 31 has a wide shape that is longer in the left-right direction (Y direction) than in the front-back direction (X direction). The housing 31 has a first sidewall 31a and a second sidewall 31b that is different from the first sidewall 31a. The first sidewall 31a is a sidewall on the front (X1 direction) of the housing 31 and is disposed along the mounting tables 30. The second sidewall 31b is a sidewall on the left (Y1 direction) of the housing 31. The housing 31 also has openable and closable shutters 31c that form part of the first side wall 31a. The shutters 31c are arranged one behind each mounting table 30. The housing 31 also has doors 31d that form part of the second side wall 31b. The doors 31d are opened and closed by the operator and the hand 14 of the self-propelled robot 1, or by the operator.

[0033] The substrate transport robot 34 is a horizontal articulated robot. The substrate transport robot 34 has a hand 34a at its tip for placing the substrate C. The substrate transport robot 34 is capable of freely changing the position of the hand 34a by driving it. The abnormality detection unit 35 is a sensor that detects abnormalities in the substrate C. In detail, the abnormality detection unit 35 detects the tilt and positional deviation of the substrate C placed on the hand 34a of the substrate transport robot 34, the presence or absence of the substrate C on the hand 34a, etc. The abnormality detection unit 35 is, for example, a mapping sensor. The abnormality detection unit 35 is disposed, for example, in the substrate transport robot 34. The abnormality detection unit may also be disposed on the inner surface of the housing. When the abnormality detection unit 35 detects an abnormality in the substrate C, the substrate manufacturing apparatus 3 switches from a normal state mode in which the substrate manufacturing apparatus 3 operates to an abnormal state mode in which the operation of the substrate manufacturing apparatus 3 is stopped. If an abnormality occurs in the substrate C and the substrate manufacturing apparatus 3 continues to operate, there is a risk of damaging the substrate C, so the substrate manufacturing apparatus 3 switches to the abnormal state mode and stops the operation of the substrate manufacturing apparatus 3. In short, the substrate manufacturing apparatus 3 cannot be operated in the abnormal state mode.

[0034] The communication unit 36 ​​is a wireless communication unit. The communication unit 36 ​​transmits and receives various information to and from the terminal 5. In particular, the communication unit 36 ​​transmits to the terminal 5 status information indicating whether the terminal 5 is in an abnormal status mode or a normal status mode.

[0035] The control unit 37 is a controller that controls the operation of each unit of the substrate manufacturing apparatus 3. The control unit 37 includes, for example, a computing device such as a CPU (Central Processing Unit). The control unit 37 also includes memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), and a storage device such as a hard disk. The control unit 37 executes control processing using the computing device based on programs and parameters stored in the storage device. In detail, the control unit 37 controls the operation of the substrate transport robot 34, the hand 34a, and the shutter 31c. The control unit of the substrate manufacturing apparatus may be configured as an integrated controller that controls the anomaly detection unit, communication unit, substrate transport robot, hand, shutter, etc., or may be configured as separate controllers for each of the components such as the anomaly detection unit, communication unit, substrate transport robot, hand, and shutter. In addition, the substrate manufacturing apparatus may be provided with an integrated controller that controls the abnormality detection unit, communication unit, and shutter, and the substrate transport robot may be provided with a dedicated controller that is separate from the controller of the substrate manufacturing apparatus.

[0036] The status display unit 38 displays the status of the substrate manufacturing apparatus 3. The status display unit 38 is disposed near the mounting table 30. Specifically, the status display unit 38 is disposed above the substrate housing container F when the substrate housing container F is disposed on the mounting table 30. The status display unit 38 also displays the status by lighting up. The status display unit 38 has a light source that can be turned on and off. The light source is, for example, an LED (Light Emitting Diode).

[0037] 5 , the status display unit 38 displays whether the substrate storage container F on the mounting table 30 is in an untransportable state or whether the substrate storage container F on the mounting table 30 is in a transportable state. The status display unit 38 also displays whether the substrate manufacturing apparatus 3 is in an error state, whether the substrate manufacturing apparatus 3 is in a communication abnormal state, or whether the substrate storage container F is placed on the mounting table 30. The status display unit 38 includes a status display unit 38 a indicating that the substrate storage container F on the mounting table 30 is in an untransportable state, and a status display unit 38 b indicating that the substrate storage container F on the mounting table 30 is in a transportable state. The status display unit 38 also includes a status display unit 38 c indicating that the substrate manufacturing apparatus 3 is in an error state, a status display unit 38 d indicating that the substrate manufacturing apparatus 3 is in a communication abnormal state, and a status display unit 38 e indicating that the substrate storage container F is placed on the mounting table 30. The status display units 38a, 38b, 38c, 38d, and 38e are arranged separately from one another, and are also arranged in a line.

[0038] The status display unit 38a is lit when the substrate housing container F on the mounting table 30 cannot be transported. In particular, when the substrate housing container F is locked on the mounting table 30, the control unit 37 turns on the status display unit 38a because the substrate housing container F on the mounting table 30 is in use. The status display unit 38b is lit when the substrate housing container F on the mounting table 30 can be transported. In particular, when the substrate housing container F is unlocked on the mounting table 30, the control unit 37 turns on the status display unit 38b because the substrate housing container F on the mounting table 30 is not in use.

[0039] The status display unit 38c is lit when the substrate manufacturing apparatus 3 is in an error state. Specifically, the control unit 37 turns on the status display unit 38c when it is determined that the substrate manufacturing apparatus 3 is in an error state. The status display unit 38d is lit when the substrate manufacturing apparatus 3 is in a communication abnormal state. Specifically, the control unit 37 turns on the status display unit 38d when it is determined that the substrate manufacturing apparatus 3 is in a communication abnormal state. The status display unit 38e is lit when a substrate housing container F is placed on the mounting table 30. Specifically, the control unit 37 turns on the status display unit 38e when it is determined that a substrate housing container F is placed on the mounting table 30 based on the detection result of an occupancy sensor that detects that the substrate housing container F is placed on the mounting table 30.

[0040] The status display unit 38 is imaged by the imaging unit 2. Specifically, the status display unit 38 is imaged by the imaging unit 2 when the self-propelled robot 1 is stopped at a robot stop position P1 (see FIG. 3 ) in front of the mounting table 30 for holding a substrate housing container F. When communication with the substrate manufacturing apparatus 3 is not possible, the control unit 16 of the self-propelled robot 1 adopts the status of the substrate manufacturing apparatus 3 acquired based on the image of the status display unit 38 taken by the imaging unit 2. When communication with the substrate manufacturing apparatus 3 is possible, the control unit 16 adopts the status of the substrate manufacturing apparatus 3 acquired from the substrate manufacturing apparatus 3 via communication.

[0041] When the control unit 16 determines that the substrate storage container F on the mounting table 30 is in a state where it cannot be transported based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 performs control not to recover the substrate storage container F from the mounting table 30. That is, when the status display unit 38a is lit, the control unit 16 performs control not to recover the substrate storage container F from the mounting table 30. Furthermore, when the control unit 16 determines that the substrate storage container F on the mounting table 30 is in a state where it can be transported based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 performs control to recover the substrate storage container F from the mounting table 30 and transport it. That is, when the status display unit 38b is lit, the control unit 16 performs control to recover the substrate storage container F from the mounting table 30 and transport it.

[0042] When it is determined that the substrate manufacturing apparatus 3 is in an error state or in a communication abnormality state based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 may transmit information indicating that the substrate manufacturing apparatus 3 is in an error state or in a communication abnormality state to the terminal 5. Furthermore, the control unit 16 determines whether or not the substrate housing container F is placed on the mounting table 30 based on the image of the status display unit 38 captured by the imaging unit 2.

[0043] 6 and 7 , the remote control unit 6 remotely controls the self-propelled robot 1, causing the self-propelled robot 1 to perform an operation on the substrate manufacturing apparatus 3 for manufacturing the substrate C. In detail, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform at least one of the following operations: capturing images of the interior of the substrate manufacturing apparatus 3; and operating the operation touch panel 7 of the substrate manufacturing apparatus 3.

[0044] 6, when an abnormality is detected in the substrate manufacturing apparatus 3, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to have the imaging unit 2 capture an image of the interior of the substrate manufacturing apparatus 3. In particular, when the self-propelled robot 1 is remotely controlled by the remote control unit 6, it moves to a predetermined position P2 (see FIG. 3) near the substrate manufacturing apparatus 3. When the self-propelled robot 1 moves to the predetermined position P2, the remote control unit 6 receives an operation command to move the robot arm 11.

[0045] More specifically, when the substrate manufacturing apparatus 3 switches from the normal state mode to the abnormal state mode, the self-propelled robot 1 moves by the movement unit 12 to a predetermined position P2 where the imaging unit 2 captures an image of the interior of the substrate manufacturing apparatus 3. The predetermined position P2 is a position where the self-propelled robot 1 faces the second side wall 31b of the substrate manufacturing apparatus 3, which has the window 32, in a plan view. The self-propelled robot 1 includes a position detection unit for detecting that the self-propelled robot 1 has reached the predetermined position P2. The position detection unit is a proximity sensor or a magnetic sensor. For example, the self-propelled robot 1 detects its proximity to the substrate manufacturing apparatus 3 using a proximity sensor to detect that it has reached the predetermined position P2. Furthermore, for example, the self-propelled robot 1 detects that it has reached the predetermined position P2 by detecting the magnetic tape used for movement of the self-propelled robot 1 using a magnetic sensor to detect that it has reached the predetermined position P2. When self-propelled robot 1 reaches predetermined position P2, it stops moving by moving unit 12 and positions robot arm 11 so that imaging unit 2 peers into the interior of substrate manufacturing apparatus 3 through window 32 of substrate manufacturing apparatus 3. Self-propelled robot 1 then switches to a remote operation mode in which it accepts remote operation by remote operation unit 6. Self-propelled robot 1 also transmits image information D1 captured by imaging unit 2 to terminal 5 via communication unit 15. That is, self-propelled robot 1 transmits image information D1, which is a moving image showing the interior of substrate manufacturing apparatus 3 captured by imaging unit 2, to terminal 5 in real time. This allows a worker in monitoring room MR to visually confirm the moving image showing the interior of substrate manufacturing apparatus 3 displayed on display unit 5a of terminal 5 in real time.

[0046] The worker in the monitoring room MR operates the remote control unit 6 while viewing the moving image displayed on the display unit 5a of the terminal 5. When the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15 in the remote operation mode, the self-propelled robot 1 moves the robot arm 11 so as to move the imaging unit 2 in accordance with the received operation instruction. For example, the imaging unit 2 is moved in the forward / backward, left / right, and up / down directions relative to the self-propelled robot 1 in accordance with the operation direction of the stick operation unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so as to move the imaging unit 2 without changing the attitude of the imaging unit 2. In this way, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform the task of capturing images of the interior of the substrate manufacturing apparatus 3.

[0047] 7, self-propelled robot 1 is remotely controlled by remote control unit 6, and performs the task of operating operation touch panel 7 with operating hand 14b. In particular, when self-propelled robot 1 is remotely controlled by remote control unit 6, it moves to a predetermined position P3 (see FIG. 3) near substrate manufacturing apparatus 3. When self-propelled robot 1 moves to predetermined position P3, remote control unit 6 accepts an operation instruction to move robot arm 11.

[0048] More specifically, the self-propelled robot 1 moves to a predetermined position P3 using the movement unit 12 to operate the operation touch panel 7 with the operating hand 14b, for example, when performing setting operations to start operating the substrate manufacturing apparatus 3 or an abnormality reset operation to return the substrate manufacturing apparatus 3 from an abnormal state mode. The predetermined position P3 is a position where the self-propelled robot 1 faces the operation touch panel 7 in a planar view. The self-propelled robot 1 includes a position detection unit for detecting that the self-propelled robot 1 has reached the predetermined position P3. The position detection unit is, for example, a proximity sensor or a magnetic sensor. For example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting its proximity to the operation touch panel 7 using a proximity sensor. Furthermore, for example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting a magnetic tape used for moving the self-propelled robot 1 using a magnetic sensor. When self-propelled robot 1 reaches predetermined position P3, it stops moving using movement unit 12 and assumes a position for robot arm 11 that allows imaging unit 2 to capture an image of the screen of operation touch panel 7 and allows operating hand 14b to operate operation touch panel 7. Self-propelled robot 1 then switches to remote operation mode, in which it accepts remote operation from remote operation unit 6. Self-propelled robot 1 also transmits image information D1 captured by imaging unit 2 to terminal 5 via communication unit 15. That is, self-propelled robot 1 transmits image information D1, which is a moving image showing the screen of operation touch panel 7 captured by imaging unit 2, to terminal 5 in real time. This allows a worker in monitoring room MR to visually confirm the moving image showing the screen of operation touch panel 7 displayed on display unit 5a of terminal 5 in real time.

[0049] The worker in the monitoring room MR operates the remote control unit 6 while viewing the moving image displayed on the display unit 5a of the terminal 5. When the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15 in remote operation mode, the self-propelled robot 1 moves the robot arm 11 so as to move the image capturing unit 2 and the operating hand 14b in accordance with the received operation instruction. For example, the image capturing unit 2 and the operating hand 14b are moved in the forward / backward, left / right, and up / down directions relative to the self-propelled robot 1 in accordance with the operation direction of the stick operating unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so as to move the image capturing unit 2 and the operating hand 14b without changing the orientation of the image capturing unit 2 and the operating hand 14b. Then, the operating hand 14b operates a desired button displayed on the operation touch panel 7. The desired button may be a button for performing a setting operation when starting operation of the substrate manufacturing apparatus 3 or a button for performing an abnormality reset operation when returning the substrate manufacturing apparatus 3 from an abnormal state mode. In this way, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform tasks such as operating the operation touch panel 7 .

[0050] Effect of First Embodiment As described above, the first embodiment is provided with the imaging unit 2 disposed on the robot arm 11 and the remote control unit 6 for remotely controlling the self-propelled robot 1 and causing the self-propelled robot 1 to perform work on the substrate manufacturing apparatus 3 for manufacturing the substrate C. This allows the worker to remotely control the self-propelled robot 1 using the remote control unit 6 to perform work on the substrate manufacturing apparatus 3 while visually checking the images captured by the imaging unit 2. As a result, the worker does not need to go to the location of the substrate manufacturing apparatus 3 in person. This reduces the burden on the worker who wants to perform work on the substrate manufacturing apparatus 3.

[0051] In the first embodiment, as described above, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform at least one of the following tasks: capturing images of the interior of the substrate manufacturing apparatus 3 and operating the operation touch panel 7 of the substrate manufacturing apparatus 3. As a result, when the self-propelled robot 1 is used to capture images of the interior of the substrate manufacturing apparatus 3, the worker can check for abnormalities in the substrate manufacturing apparatus 3 without having to personally go to the location of the substrate manufacturing apparatus 3. Furthermore, when the self-propelled robot 1 is used to operate the operation touch panel 7 of the substrate manufacturing apparatus 3, the worker can use the remote control unit to perform setting operations when starting operation of the substrate manufacturing apparatus 3 and abnormality reset operations when recovering from an abnormality in the substrate manufacturing apparatus 3, without having to personally go to the location of the substrate manufacturing apparatus 3.

[0052] In the first embodiment, as described above, when an abnormality is detected in the substrate manufacturing apparatus 3, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to cause the imaging unit 2 to capture an image of the inside of the substrate manufacturing apparatus 3. As a result, when an abnormality is detected in the substrate manufacturing apparatus 3, the worker can confirm the abnormality in the substrate manufacturing apparatus 3 from the image captured by the imaging unit 2 without having to go to the location of the substrate manufacturing apparatus 3 in person.

[0053] In the first embodiment, as described above, the operating device of the substrate manufacturing apparatus 3 includes the operation touch panel 7, and the self-propelled robot 1 includes an operating hand 14b attached to the tip of the robot arm 11 and having a touch operation unit 141 for operating the operation touch panel 7, and is remotely controlled by the remote control unit 6, so that the operating hand 14b performs the task of operating the operation touch panel 7. This allows the self-propelled robot 1 to perform the task of operating the operation touch panel 7, which is often provided in the substrate manufacturing apparatus 3, thereby effectively reducing the burden on the worker.

[0054] In the first embodiment, as described above, when self-propelled robot 1 is operated by remote control unit 6, it moves to predetermined positions P2 and P3 near substrate manufacturing equipment 3, and remote control unit 6 accepts an operation instruction to move robot arm 11 when self-propelled robot 1 moves to predetermined positions P2 and P3. This allows self-propelled robot 1 to automatically move to predetermined positions P2 and P3 near substrate manufacturing equipment 3, and then remote control unit 6 can move robot arm 11. As a result, an operator does not need to operate remote control unit 6 to move self-propelled robot 1 to predetermined positions P2 and P3. This eliminates the need for the operator to operate remote control unit 6 to become complicated, thereby also reducing the burden on the operator.

[0055] In the first embodiment, as described above, the self-propelled robot 1 includes a bracket 2a attached to the tip of the robot arm 11, a hand attachment unit 13 attached to the bracket 2a, and a hand 14 replaceably attached to the hand attachment unit 13, and the imaging unit 2 is attached to the bracket 2a. This allows the hand 14 to be replaced with a different hand 14 depending on the task, allowing the self-propelled robot 1 to appropriately perform tasks on the substrate manufacturing device 3. Furthermore, because there is no need to remove the imaging unit 2 when replacing the hand 14, replacement of the hand 14 can be easily performed.

[0056] In the first embodiment, as described above, self-propelled robot 1 includes communication unit 15 that transmits image information D1 captured by imaging unit 2 to operator terminal 5 having display unit 5a when self-propelled robot 1 is remotely controlled by remote control unit 6. This allows the operator to easily view the image captured by imaging unit 2 on display unit 5a when remotely controlling self-propelled robot 1 using remote control unit 6.

[0057] In the first embodiment, as described above, the self-propelled robot 1 is attached to the tip of the robot arm 11 and includes a holding hand 14a that holds a substrate housing container F that houses substrates C, and the holding hand 14a holds and transports the substrate housing container F. This allows the self-propelled robot 1 that transports the substrate housing container F to be used to perform work on the substrate manufacturing apparatus 3, eliminating the need for a dedicated self-propelled robot 1. As a result, the system configuration can be prevented from becoming complicated.

[0058] In the first embodiment, as described above, the imaging unit 2 also serves as an imaging unit that images the substrate housing container F when the holding hand 14a holds the substrate housing container F. This allows the imaging unit 2 that images the substrate housing container F to be used to capture images when performing work on the substrate manufacturing device 3, eliminating the need to provide a dedicated imaging unit 2. As a result, the configuration of the self-propelled robot 1 can be prevented from becoming complicated.

[0059] As described above, the first embodiment is provided with a substrate transport device serving as the substrate manufacturing apparatus 3, which includes the substrate transport robot 34 that transports the substrate C. This allows an operator to remotely control the self-propelled robot 1 using the remote control unit 6 to cause the substrate transport device serving as the substrate manufacturing apparatus 3, which includes the substrate transport robot 34, to perform work.

[0060] In the first embodiment, as described above, the self-propelled robot 1 and the substrate manufacturing apparatus 3 are located inside the clean room CR, and the remote control unit 6 is located outside the clean room CR. This allows a worker to remotely control the self-propelled robot 1 using the remote control unit 6 to perform work on the substrate manufacturing apparatus 3 without having to enter the clean room CR, which requires the worker to wear dustproof clothing or the like. As a result, the burden on the worker can be effectively reduced.

[0061] Second Embodiment The configuration of a manufacturing system 200 according to a second embodiment of the present disclosure will be described. Note that in the drawings, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0062] The manufacturing system 200 shown in FIG. 8 includes a self-propelled robot 201, an imaging unit 202, a manufacturing device 203, the terminal 5 shown in FIG. 2, the remote control unit 6 shown in FIG. 2, and the operation touch panel 7.

[0063] The self-propelled robot 201 includes a housing 10 , a robot arm 11 , a moving unit 12 , a hand attachment unit 13 , a hand 214 , a communication unit 15 , and a control unit 16 .

[0064] Self-propelled robot 201 removes workpiece W from manufacturing apparatus 203 after it has been processed by manufacturing apparatus 203, and stores the removed workpiece W in storage section 300. Self-propelled robot 201 also removes workpiece W from storage section 300 before it is processed by manufacturing apparatus 203, and places the removed workpiece W in manufacturing apparatus 203. Workpiece W is, for example, a plate-shaped workpiece such as a printed circuit board or a metal plate. When workpiece W is a printed circuit board, the printed circuit board may include multiple stacked board portions.

[0065] The hand 214 is replaceably attached to the hand attachment portion 13. The hand 214 is attached to the tip of the robot arm 11 via the hand attachment portion 13. The hand 214 includes a gripping hand 214a that grips the workpiece W. Specifically, the gripping hand 214a has a first pair of claws and a second pair of claws for gripping the workpiece W. The self-propelled robot 201 grips and transports the workpiece W with the gripping hand 214a. The gripping hand 214a clamps and grips the workpiece W by bringing the first pair of claws closer together in a first direction along the tip to base end of the gripping hand 214a and bringing the second pair of claws closer together in a second direction orthogonal to the first direction in a horizontal plane. Note that another type of hand 214 is an operating hand 14b (see FIG. 7) that has a touch operation unit 141 for operating a touch panel. Even when no operator is present, the self-propelled robot 201 moves to a hand storage cabinet that stores various types of hands 214 and automatically changes the hand 214. In other words, the self-propelled robot 201 performs what is called an auto-tool change.

[0066] The imaging unit 202 is disposed on the robot arm 11. The imaging unit 202 images the workpiece W when the self-propelled robot 201 transports the workpiece W. The imaging unit 202 is a camera having an image sensor that captures moving images and still images. The imaging unit 202 is attached to the tip of the robot arm 11 via a hand 214. The imaging unit 202 images the interior of the manufacturing apparatus 203 to check for abnormalities inside the manufacturing apparatus 203. The imaging unit 202 is communicably connected to the control unit 16 wirelessly or via a wire, and transmits image information D1 to the terminal 5 via the control unit 16.

[0067] The manufacturing device 203 is an automatic machine, a processing machine, or the like. For example, the manufacturing device 203 is a processing machine that processes the workpiece W. For example, if the workpiece W is a printed circuit board, the manufacturing device 203 is a processing machine that drills holes in the printed circuit board. Furthermore, for example, if the workpiece W is a metal plate such as a copper plate, the manufacturing device 203 is a processing machine that drills holes in the metal plate.

[0068] The manufacturing apparatus 203 includes a housing 231 , a window 232 , a workpiece placement chamber 233 , an abnormality detection unit 235 , a communication unit 236 , and a control unit 237 .

[0069] The housing 231 has a housing main body 231a and an opening / closing door 231b that is attached to the housing main body 231a in an openable / closable manner. The opening / closing door 231b opens and closes an opening that connects a workpiece placement chamber 233, which is the internal space of the housing 231, with the external space of the housing 231. The opening / closing door 231b opens and closes, for example, by rotating relative to the housing main body 231a. With the opening / closing door 231b open, the self-propelled robot 201 removes the workpiece W from the manufacturing apparatus 203 or places the workpiece W in the manufacturing apparatus 203. A window 232 that allows viewing into the interior of the manufacturing apparatus 203 is provided in the opening / closing door 231b.

[0070] The abnormality detection unit 235 is a sensor that detects an abnormality in the manufacturing apparatus 203. When the abnormality detection unit 235 detects an abnormality in the manufacturing apparatus 203, the manufacturing apparatus 203 switches from a normal state mode in which the manufacturing apparatus 203 operates to an abnormal state mode in which the operation of the manufacturing apparatus 203 is stopped. In short, in the abnormal state mode, the substrate manufacturing apparatus 3 cannot be operated. The communication unit 236 is a wireless communication unit. The communication unit 236 transmits and receives various information to the terminal 5. In detail, the communication unit 236 transmits status information to the terminal 5 indicating whether the status is the abnormal state mode or the normal state mode.

[0071] The control unit 237 is a controller that controls the operation of each unit of the manufacturing apparatus 203. The control unit 237 includes, for example, an arithmetic unit such as a CPU. The control unit 237 also includes memories such as RAM and ROM, and a storage device such as a hard disk. The control unit 237 executes control processing by the arithmetic unit based on programs, parameters, and the like stored in the storage device.

[0072] In the second embodiment, similarly to the first embodiment, the remote control unit 6 remotely controls the self-propelled robot 201, causing the self-propelled robot 201 to perform a task on the manufacturing apparatus 203. In particular, the self-propelled robot 201 is remotely controlled by the remote control unit 6 to perform at least one of the tasks of capturing images of the interior of the manufacturing apparatus 203 and operating the operation touch panel 7 of the manufacturing apparatus 203. The other configurations of the manufacturing system 200 are the same as those of the substrate manufacturing system 100 of the first embodiment.

[0073] Effect of Second Embodiment As described above, the second embodiment is provided with the imaging unit 202 disposed on the robot arm 11 and the remote control unit 6 for remotely controlling the self-propelled robot 201 and causing the self-propelled robot 201 to perform work on the manufacturing apparatus 203. This allows the worker to remotely control the self-propelled robot 201 using the remote control unit 6 to perform work on the manufacturing apparatus 203 while visually checking the image captured by the imaging unit 202. As a result, the worker does not need to go to the location of the manufacturing apparatus 203 in person. This reduces the burden on the worker who wants to perform work on the manufacturing apparatus 203.

[0074] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and includes all modifications (modifications) within the meaning and scope of the claims.

[0075] For example, in the first embodiment described above, an example was shown in which the substrate manufacturing apparatus is a substrate transport apparatus that transports substrates between a substrate storage container and a substrate processing apparatus, but the present disclosure is not limited to this. In the present disclosure, the substrate manufacturing apparatus may be a substrate transport apparatus serving as a so-called sorter that transports substrates between substrate storage containers, or a substrate transport apparatus serving as a so-called stocker that transports substrates between a substrate storage container and a substrate storage unit. Furthermore, the substrate manufacturing apparatus may be a substrate processing apparatus that processes substrates. Furthermore, the substrate manufacturing apparatus may be equipped with an aligner that positions the substrate within the apparatus and detects eccentricity of the substrate.

[0076] In the first and second embodiments, the remote control unit includes a stick operation unit such as a joystick, but the present disclosure is not limited to this. In the present disclosure, the remote control unit may include a button operation unit such as a cross key.

[0077] In the first embodiment, an example was shown in which a self-propelled robot is remotely controlled by a remote control unit to perform at least one of the following tasks: taking images of the interior of a substrate manufacturing apparatus serving as a manufacturing apparatus and operating an operation device of the substrate manufacturing apparatus serving as a manufacturing apparatus; and in the second embodiment, an example was shown in which a self-propelled robot is remotely controlled by a remote control unit to perform at least one of the following tasks: taking images of the interior of a manufacturing apparatus and operating an operation device of the manufacturing apparatus; however, the present disclosure is not limited to this. In the present disclosure, a self-propelled robot may be remotely controlled by a remote control unit to perform tasks other than taking images of the interior of the manufacturing apparatus and operating an operation device of the manufacturing apparatus.

[0078] In the first embodiment, an example is shown in which the operation device of the substrate manufacturing apparatus serving as the manufacturing apparatus is an operation touch panel, and in the second embodiment, an example is shown in which the operation device of the manufacturing apparatus is an operation touch panel, but the present disclosure is not limited to this. In the present disclosure, the operation device of the manufacturing apparatus may be an operation button.

[0079] In the first embodiment, an example was shown in which the operation device of the substrate manufacturing apparatus as a manufacturing apparatus is separate from the substrate manufacturing apparatus as a manufacturing apparatus, and in the second embodiment, an example was shown in which the operation device of the manufacturing apparatus is separate from the manufacturing apparatus, but the present disclosure is not limited to this. In the present disclosure, the operation device of the manufacturing apparatus may be integrated with the manufacturing apparatus. For example, the operation device of the manufacturing apparatus may be disposed on either side of the housing of the manufacturing apparatus.

[0080] In the first and second embodiments described above, examples have been shown in which the self-propelled robot includes a hand attachment unit, but the present disclosure is not limited to this. In the present disclosure, the self-propelled robot does not necessarily have to include a hand attachment unit.

[0081] In the first embodiment, an example was shown in which the self-propelled robot is a robot that transports substrate containers, and in the second embodiment, an example was shown in which the self-propelled robot is a robot that transports workpieces, but the present disclosure is not limited to this. In the present disclosure, the self-propelled robot may be a robot other than a robot that transports substrate containers and a robot that transports workpieces. Furthermore, the self-propelled robot may be a dedicated robot that is remotely controlled by a remote control unit, or a robot that is remotely controlled by a remote control unit and performs both remote operations and operations other than remote operations.

[0082] In the first embodiment, an example was shown in which the substrate manufacturing apparatus and the self-propelled robot as the manufacturing apparatus were arranged inside a clean room, but the present disclosure is not limited to this. In the present disclosure, the manufacturing apparatus and the self-propelled robot may be arranged outside the clean room.

[0083] In the first embodiment, an example was shown in which the imaging unit was attached to the robot arm of the self-propelled robot via a bracket, and in the second embodiment, an example was shown in which the imaging unit was attached to the robot arm of the self-propelled robot via a hand, but the present disclosure is not limited to this. In the present disclosure, the imaging unit may be held by the hand of the robot arm of the self-propelled robot. The imaging unit may be configured to be moved by the robot arm.

[0084] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0085] [Aspects] The above-described embodiments are specific examples of the following aspects.

[0086] (Aspect 1) A manufacturing system comprising: a self-propelled robot including a robot arm; an imaging unit moved by the robot arm; and a remote control unit that remotely controls the self-propelled robot and causes the self-propelled robot to perform work on a manufacturing device.

[0087] (Aspect 2) In the manufacturing system according to aspect 1, the self-propelled robot is remotely controlled by the remote control unit to perform at least one of the following tasks: taking images of the inside of the manufacturing device; and operating an operation device of the manufacturing device.

[0088] (Aspect 3) In the manufacturing system according to Aspect 2, when an abnormality is detected in the manufacturing device, the self-propelled robot is remotely controlled by the remote control unit to perform an operation of capturing an image of the inside of the manufacturing device using the imaging unit.

[0089] (Aspect 4) A manufacturing system according to Aspect 2 or 3, wherein the operation device of the manufacturing apparatus includes an operation touch panel, and the self-propelled robot includes an operation hand attached to the tip of the robot arm and having a touch operation unit for operating the operation touch panel, and is remotely controlled by the remote control unit to perform the task of operating the operation touch panel using the operation hand.

[0090] (Aspect 5) A manufacturing system according to any one of Aspects 1 to 4, wherein the self-propelled robot, when operated by the remote control unit, moves to a predetermined position near the manufacturing device, and the remote control unit receives an operation instruction to move the robot arm when the self-propelled robot moves to the predetermined position.

[0091] (Aspect 6) The manufacturing system according to any one of Aspects 1 to 5, wherein the self-propelled robot includes a bracket attached to the tip of the robot arm, a hand attachment portion attached to the bracket, and a hand replaceably attached to the hand attachment portion, and the imaging portion is attached to the bracket.

[0092] (Aspect 7) The manufacturing system according to any one of Aspects 1 to 6, wherein the self-propelled robot includes a communication unit that transmits image information captured by the imaging unit to a terminal of an operator having a display unit when the self-propelled robot is remotely controlled by the remote control unit.

[0093] (Aspect 8) The manufacturing system according to any one of Aspects 1 to 7, wherein the self-propelled robot includes a holding hand attached to a tip of the robot arm and holding a substrate container that contains substrates, and the holding hand holds and transports the substrate container.

[0094] (Aspect 9) The manufacturing system according to aspect 8, wherein the imaging unit also serves as an imaging unit that images the substrate housing container when the substrate housing container is held by the holding hand.

[0095] (Aspect 10) The manufacturing system according to any one of Aspects 1 to 9, further comprising a substrate transfer device as the manufacturing device, the substrate transfer device including a substrate transfer robot that transfers a substrate.

[0096] (Aspect 11) The manufacturing system according to any one of Aspects 1 to 10, wherein the self-propelled robot and the manufacturing device are disposed in a clean room, and the remote control unit is disposed outside the clean room.

[0097] REFERENCE SIGNS LIST 1, 201 Self-propelled robot 2, 202 Imaging unit 2a Bracket 3 Substrate manufacturing apparatus (manufacturing apparatus, substrate transport apparatus) 5 Terminal 5a Display unit 6 Remote control unit 7 Operation touch panel (operation device) 11 Robot arm 13 Hand attachment unit 14 Hand 14a Holding hand 14b Operation hand 15 Communication unit 34 Substrate transport robot 100 Substrate manufacturing system (manufacturing system) 200 Manufacturing system 203 Manufacturing apparatus 141 Touch operation unit C Substrate CR Clean room F Substrate storage container P2, P3 Predetermined position

Claims

1. A manufacturing system comprising: a self-propelled robot including a robot arm; an imaging unit moved by the robot arm; and a remote control unit for remotely controlling the self-propelled robot and causing the self-propelled robot to perform work on manufacturing equipment.

2. The manufacturing system described in claim 1, wherein the self-propelled robot is remotely controlled by the remote control unit to perform at least one of the following tasks: taking images of the inside of the manufacturing equipment and operating an operating device of the manufacturing equipment.

3. A manufacturing system as described in claim 2, wherein when an abnormality is detected in the manufacturing equipment, the self-propelled robot is remotely controlled by the remote control unit to perform the task of capturing images of the inside of the manufacturing equipment using the imaging unit.

4. A manufacturing system as described in claim 2, wherein the operation device of the manufacturing equipment includes an operation touch panel, and the self-propelled robot includes an operation hand attached to the tip of the robot arm and having a touch operation unit for operating the operation touch panel, and is remotely controlled by the remote control unit to perform the task of operating the operation touch panel using the operation hand.

5. The manufacturing system of claim 1, wherein the self-propelled robot, when operated by the remote control unit, moves to a predetermined position near the manufacturing equipment, and the remote control unit accepts an operation instruction to move the robot arm when the self-propelled robot moves to the predetermined position.

6. The manufacturing system described in claim 1, wherein the self-propelled robot includes a bracket attached to the tip of the robot arm, a hand attachment portion attached to the bracket, and a hand replaceably attached to the hand attachment portion, and the imaging portion is attached to the bracket.

7. A manufacturing system as described in claim 1, wherein the self-propelled robot includes a communication unit that transmits image information captured by the imaging unit to a worker's terminal having a display unit when remotely controlled by the remote control unit.

8. The manufacturing system of claim 1, wherein the self-propelled robot includes a holding hand attached to the tip of the robot arm for holding a substrate container that contains substrates, and the substrate container is held and transported by the holding hand.

9. The manufacturing system according to claim 8, wherein the imaging section also serves as an imaging section that images the substrate housing container when the substrate housing container is held by the holding hand.

10. The manufacturing system according to claim 1, further comprising a substrate transport device as the manufacturing device, the substrate transport device including a substrate transport robot for transporting a substrate.

11. The manufacturing system according to claim 1, wherein the self-propelled robot and the manufacturing device are arranged in a clean room, and the remote control unit is arranged outside the clean room.

Images