Ultrasound-driven triboelectric generator having multielectrode structure

Abstract

Provided according to the present disclosure is an ultrasound-driven triboelectric generator comprising: a fixed part including a first electrode layer and a dielectric layer disposed on the first electrode layer; a first vibration film including a second electrode layer disposed on the dielectric layer, a first membrane disposed on the second electrode layer, and a third electrode layer disposed on the first membrane; and a second vibration film including a second membrane disposed on the third electrode layer and a fourth electrode layer disposed on the second membrane.

Description

Triboelectric generator based on ultrasonic drive with multi-electrode structure

[0001] Embodiments of the present disclosure relate to an ultrasonic driven triboelectric generator, and more particularly, to an ultrasonic driven triboelectric generator with increased output through impedance control.

[0002] As technology advances, demand for miniaturization of implantable medical devices to reduce the burden on the body is increasing. Ultrasonic-driven triboelectric generators can be used in implantable medical devices for wireless power transmission within the body. These ultrasonic-driven triboelectric generators can utilize a variety of materials, and because they offer high efficiency and require no resonant design, they are attracting attention as a next-generation wireless power transmission technology.

[0003] Ultrasonic-driven triboelectric generators generate power based on variable capacitance, and since capacitance is proportional to the size of the active area, miniaturization increases impedance and can reduce transmission efficiency. Therefore, the development of ultrasonic-driven triboelectric generators with low impedance in a small area is required.

[0004] Embodiments of the present disclosure are intended to address these needs and provide an ultrasonic driven triboelectric generator with increased output through impedance control.

[0005] However, these tasks are exemplary and do not limit the scope of the present disclosure.

[0006] According to one aspect of the present disclosure, there is provided an ultrasonic-driven triboelectric generator, comprising: a first vibrating film including a fixed portion comprising a first electrode layer and a dielectric layer disposed on the first electrode layer; a second electrode layer disposed on the dielectric layer; a first membrane disposed on the second electrode layer; and a third electrode layer disposed on the first membrane; and a second vibrating film including a second membrane disposed on the third electrode layer and a fourth electrode layer disposed on the second membrane.

[0007] According to the present embodiment, the second vibration film may further include a third membrane disposed on the fourth electrode layer.

[0008] According to the present embodiment, the first vibration film and the second vibration film are each provided in multiple numbers, and the multiple first vibration films and the multiple second vibration films can be arranged alternately with each other.

[0009] According to the present embodiment, when ultrasonic waves are applied, the first vibrating film and the second vibrating film can vibrate relative to the fixed portion.

[0010] According to the present embodiment, when the ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the first electrode layer and the second electrode layer may have opposite potentials.

[0011] According to the present embodiment, when the ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the third electrode layer and the fourth electrode layer may have opposite potentials.

[0012] According to the present embodiment, when the ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the second electrode layer and the third electrode layer can have the same potential.

[0013] According to the present embodiment, the dielectric layer may include particles including BaTiO3 (BTO) coated with Polydopamine (PDA) and a matrix including P(VDF-TrFE).

[0014] According to the present embodiment, the particles can be embedded in the matrix.

[0015] According to the present embodiment, the first membrane includes a first base portion and a plurality of first pattern portions arranged on the first base portion, and the plurality of first pattern portions of the first membrane may have a dome shape.

[0016] Other aspects, features and advantages other than those described above will become apparent from the following detailed description, claims and drawings for carrying out the invention.

[0017] According to the exemplary embodiments of the present disclosure, as described above, an ultrasonic-driven triboelectric generator with increased output can be implemented through impedance control. Of course, the scope of the present disclosure is not limited by these effects.

[0018] FIG. 1 is a cross-sectional view showing an ultrasonic driven triboelectric generator according to one embodiment of the present disclosure.

[0019] Figure 2 is a drawing showing a case where the dielectric layer includes BaTiO3 (BTO) coated with Polydopamine (PDA).

[0020] Figure 3 is a graph comparing the dielectric properties of a dielectric layer according to the content of BTO and PDA-treated BTO.

[0021] Figure 4 is a graph comparing the voltage and current of an ultrasonic-driven triboelectric generator according to the content of BTO and PDA-treated BTO.

[0022] Figure 5 is a graph comparing the impedance of an ultrasonic-driven triboelectric generator according to the content of BTO and PDA-treated BTO.

[0023] Figure 6 is a graph comparing the output of an ultrasonic-driven triboelectric generator having a dielectric layer including PFA and an ultrasonic-driven triboelectric generator having a dielectric layer including PDA-treated BTO.

[0024] Fig. 7 is a cross-sectional view showing an ultrasonic driven triboelectric generator according to another embodiment of the present disclosure.

[0025] Fig. 8 is a cross-sectional view showing the vibration of an ultrasonic-driven triboelectric generator, which is another embodiment of the present disclosure.

[0026] Fig. 9 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device of a first comparative example for comparison with the embodiment of the present disclosure.

[0027] Fig. 10 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device of a second comparative example for comparison with the embodiment of the present disclosure.

[0028] Fig. 11 is a cross-sectional view showing the vibration of the ultrasonic driving friction electric generator of the second comparative example.

[0029] FIG. 12 is a graph showing the voltage and current of the ultrasonic-driven triboelectric generator of the first comparative example, the second comparative example, and other embodiments of the present disclosure.

[0030] Fig. 13 is a cross-sectional view showing a frictional electric power generation device according to the third comparative example.

[0031] Fig. 14 is a cross-sectional view showing an ultrasonic driven triboelectric generator according to another embodiment of the present disclosure.

[0032] Fig. 15 is a cross-sectional view showing an ultrasonic driven triboelectric generator according to another embodiment of the present disclosure.

[0033] FIG. 16 is a plan view of a first membrane according to another embodiment of the present disclosure.

[0034] Fig. 17 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device, which is an embodiment of the present disclosure, vibrating.

[0035] FIG. 18 is a graph showing the voltage and current of an ultrasonic-driven triboelectric generator according to another embodiment of the present disclosure and an ultrasonic-driven triboelectric generator according to another embodiment of the present disclosure.

[0036] The present disclosure is capable of various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present disclosure, as well as methods for achieving them, will become clearer with reference to the embodiments described in detail below, along with the drawings. However, the present disclosure is not limited to the embodiments disclosed below and may be implemented in various forms.

[0037] In the examples below, the terms first, second, etc. are not used in a limiting sense, but are used for the purpose of distinguishing one component from another.

[0038] In the examples below, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0039] In the following examples, terms such as “include” or “have” mean that a feature or component described in the specification is present, and do not preclude the possibility that one or more other features or components may be added.

[0040] In the following examples, when a part such as a layer, region, component, etc. is said to be on or above another part, it includes not only the case where it is directly above the other part, but also the case where another region, component, etc. is interposed in between.

[0041] For convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily indicated for convenience of explanation, and thus the present disclosure is not necessarily limited to the figures shown.

[0042] In some embodiments, where implementations are otherwise feasible, specific sequences of operations may be performed in a different order than described. For example, two steps described in succession may be performed substantially simultaneously, or in a reverse order from the described order.

[0043] In the following examples, when it is said that layers, regions, components, etc. are connected, it includes cases where the layers, regions, components, etc. are directly connected, and / or cases where other layers, regions, components, etc. are interposed between the layers, regions, and components and are indirectly connected. For example, when it is said in this specification that layers, regions, components, etc. are electrically connected, it refers to cases where the layers, regions, components, etc. are directly electrically connected, and / or cases where other layers, regions, components, etc. are interposed between them and are indirectly electrically connected.

[0044] The word "exemplary" is used herein to mean "serving as an example or illustration." Any embodiment described herein as "exemplary" should not necessarily be construed as preferred or advantageous over other embodiments.

[0045] Unless otherwise defined, all terms (including technical and scientific terms) used in this disclosure may be used with the meaning commonly understood by those skilled in the art to which this disclosure pertains. Furthermore, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0046] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals and redundant descriptions thereof will be omitted.

[0047] FIG. 1 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device (100) according to one embodiment of the present disclosure.

[0048] Referring to FIG. 1, an ultrasonic-driven triboelectric generator (100) may include a first electrode layer (110), a dielectric layer (120), a second electrode layer (130), and a membrane (140). In one embodiment, the first electrode layer (110) and the dielectric layer (120) may be fixed parts. The second electrode layer (130) and the membrane (140) may be vibrating films.

[0049] The first electrode layer (110) may include a stable electrode material such as gold (Au) or copper (Cu). The first electrode layer (110) may be a lower electrode. In some embodiments, a substrate may be placed under the first electrode layer (110).

[0050] A dielectric layer (120) may be disposed on the first electrode layer (110). The dielectric layer (120) may include a material having high surface charge characteristics. In one embodiment, the dielectric layer (120) may include Perfluoroalkoxy alkane (PFA), Fluorinated ethylene propylene (FEP), Polytetrafluoroethylene (PTFE), Nylon, or Butylated Melamine Formaldehyde (BMF).

[0051] In one embodiment, the dielectric layer (120) may include particles and a matrix. For example, the particles may include BaTiO3 (BTO) coated with Polydopamine (PDA). The matrix may include P(VDF-TrFE). That is, BaTiO3 (BTO) may be treated with Polydopamine (PDA). In this embodiment, when PDA is treated on BTO, a high-output, low-impedance ultrasonic-driven triboelectric generator may be provided.

[0052] The second electrode layer (130) may be disposed on the dielectric layer (120). The second electrode layer (130) may be an upper electrode. In one embodiment, there may be a gap between the second electrode layer (130) and the dielectric layer (120). In one embodiment, the second electrode layer (130) may include a metal such as gold (Au), platinum (Pt), or silver (Ag) that can be stably coated on the membrane (140). In one embodiment, the second electrode layer (130) may include a conductive polymer such as poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), polyaniline, or the like. In one embodiment, the second electrode layer (130) may include the metal and the conductive polymer.

[0053] The membrane (140) may be disposed on the second electrode layer (130). The membrane (140) may be most polymer films capable of micro-vibration. In one embodiment, the membrane (140) may include an elastic polymer such as polydimethylsiloxane (PDMS), styrene ethylene butylene styrene (SEBS), etc., taking vibration stability and application into consideration. In one embodiment, the membrane (140) may include perfluoroalkoxy alkane (PFA) or polytetrafluoroethylene (PTFE).

[0054] In the ultrasonic-driven triboelectric generator (100), ultrasonic waves can be applied from above the membrane (140). When ultrasonic waves are applied, the second electrode layer (130) and the membrane (140) can vibrate with respect to the first electrode layer (110) and the dielectric layer (120), and friction can be generated between the second electrode layer (130) and the dielectric layer (120). Such vibration and friction can induce a change in electric potential. That is, friction electricity can be generated. Therefore, the ultrasonic-driven triboelectric generator (100) can be driven using ultrasonic waves, and can generate electricity using the generated friction electricity.

[0055] Figure 2 is a drawing showing a case where the dielectric layer includes BaTiO3 (BTO) coated with Polydopamine (PDA).

[0056] Referring to Fig. 2, when the dielectric layer includes BaTiO3 (BTO) coated with Polydopamine (PDA), dispersibility can be increased and dielectric loss can be reduced through hydrogen bonding with the PVDF matrix. Unlike the present embodiment, when utilizing a composite in which high-k ceramic particles, such as BTO, are embedded in a high-k polymer, such as P(VDF-TrFE), without Polydopamine (PDA) treatment, the dielectric constant of the dielectric layer can be increased, but the dielectric loss can increase rapidly, which can reduce the output of the triboelectric generator.

[0057] Figure 3 is a graph comparing the dielectric properties of a dielectric layer according to the content of BTO and PDA-treated BTO.

[0058] Referring to (a) of Fig. 3, the dielectric constant of both the dielectric layer including BTO and the dielectric layer including PDA-treated BTO increases as the particle content (wt%) increases. The dielectric constant of the dielectric layer including PDA-treated BTO is higher than that of the dielectric layer including BTO.

[0059] Referring to (b) of Fig. 3, as the particle content increases, the parallel resistance value of the dielectric layer including PDA-treated BTO decreases less than the parallel resistance value of the dielectric layer including BTO, so the increase in dielectric loss due to the increase in particle content may be smaller for the dielectric layer including PDA-treated BTO than for the dielectric layer including BTO.

[0060] Figure 4 is a graph comparing the voltage and current of an ultrasonic-driven triboelectric generator according to the content of BTO and PDA-treated BTO.

[0061] Referring to Fig. 4, when the content of BTO and PDA-treated BTO is up to 10 wt%, the surface charge increase effect of the ultrasonic triboelectric generator is greater than the leakage current value due to the dielectric loss, so that the output of the ultrasonic triboelectric generator (the product of the voltage in Fig. 4 (a) and the current in Fig. 4 (b)) is similar to or increases. When the content of BTO and PDA-treated BTO is greater than 20 wt%, the output of the ultrasonic triboelectric generator is reduced. This may be because the influence of the dielectric loss is increased. The output decrease of the ultrasonic triboelectric generator due to the dielectric loss of the dielectric layer including the PDA-treated BTO may be less than the output decrease of the ultrasonic triboelectric generator due to the dielectric loss of the dielectric layer including the BTO.

[0062] In one embodiment, the content of the PDA-treated BTO may be 7 wt% to 13 wt%. Preferably, the content of the PDA-treated BTO may be 9 wt% to 11 wt%. When the content of the PDA-treated BTO is 7 wt% to 13 wt%, preferably 9 wt% to 11 wt%, the output of the ultrasonic-driven triboelectric generator may be high.

[0063] Figure 5 is a graph comparing the impedance of an ultrasonic-driven triboelectric generator according to the content of BTO and PDA-treated BTO.

[0064] Referring to Fig. 5, as the content of BTO and PDA-treated BTO increases, the impedance value of the ultrasonic-driven triboelectric generator may decrease. Impedance is the ratio of voltage to current. As the content of BTO and PDA-treated BTO increases, the impedance of the ultrasonic-driven triboelectric generator gradually decreases due to the effect of increasing the permittivity. The impedance of the ultrasonic-driven triboelectric generator having a dielectric layer including PDA-treated BTO is smaller than the impedance of the ultrasonic-driven triboelectric generator having a dielectric layer including BTO.

[0065] Figure 6 is a graph comparing the output of an ultrasonic-driven triboelectric generator having a dielectric layer including PFA and an ultrasonic-driven triboelectric generator having a dielectric layer including PDA-treated BTO.

[0066] Referring to Fig. 6(a), when the content of PDA-treated BTO is 10 wt%, the current value of the ultrasonic-driven triboelectric generator having a dielectric layer containing the content of PDA-treated BTO is higher than the current value of the ultrasonic-driven triboelectric generator having a dielectric layer containing PFA. When the content of PDA-treated BTO is 10 wt%, the ultrasonic-driven triboelectric generator having a dielectric layer containing PDA-treated BTO has the highest power and lowest impedance. Here, power is the product of current and voltage.

[0067] Figure 6 (b) shows the results measured in a neuromimetic conduit. That is, the voltage was measured in an environment that mimics nerve connection. Compared to an ultrasonic-driven triboelectric generator with a dielectric layer including PFA with a low permittivity, an ultrasonic-driven triboelectric generator with a dielectric layer including PDA-treated BTO has a higher power transfer efficiency, and sufficient power can be transferred without requiring a separate circuit.

[0068] FIG. 7 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device (700) according to another embodiment of the present disclosure.

[0069] Referring to FIG. 7, an ultrasonic-driven triboelectric generator (700) may include a fixed portion (710), a first vibrating film (730), and a second vibrating film (750). In one embodiment, there may be a gap between the fixed portion (710) and the first vibrating film (730). In one embodiment, there may be a gap between the first vibrating film (730) and the second vibrating film (750). The fixed portion (710) may include a substrate (711), a first electrode layer (713), and a dielectric layer (715). The first vibrating film (730) may include a second electrode layer (731), a first membrane (733), and a third electrode layer (735). The second vibration film (750) may include a second membrane (751), a fourth electrode layer (753), and a third membrane (755). The substrate (711) may be a PCB substrate.

[0070] The first electrode layer (713) may be placed on the substrate (711). The first electrode layer (713) may be a lower electrode in an ultrasonic-driven triboelectric generator (700). The first electrode layer (713) may include a stable electrode material such as gold (Au) or copper (Cu).

[0071] A dielectric layer (715) may be disposed on the first electrode layer (713). The dielectric layer (715) may include Perfluoroalkoxy alkane (PFA), Fluorinated ethylene propylene (FEP), Polytetrafluoroethylene (PTFE), Nylon, or Butylated Melamine Formaldehyde (BMF). In one embodiment, the dielectric layer (715) may include particles and a matrix. For example, the particles may include BaTiO3 (BTO) coated with Polydopamine (PDA). The matrix may include P(VDF-TrFE). That is, BaTiO3 (BTO) may be treated with Polydopamine (PDA). Therefore, the ultrasonic-driven triboelectric generator (700) may have high output and low impedance.

[0072] The second electrode layer (731) may be disposed on the dielectric layer (715). The second electrode layer (731) may be an upper electrode in an ultrasonic-driven triboelectric generator (700). The second electrode layer (731) may include a metal such as gold (Au), platinum (Pt), or silver (Ag) that can be stably coated on a membrane. In one embodiment, the second electrode layer (731) may include a conductive polymer such as poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), polyaniline, or the like. In one embodiment, the second electrode layer (731) may include the metal and the conductive polymer.

[0073] The first membrane (733) may be disposed on the second electrode layer (731). The first membrane (733) may be most polymer films capable of micro-vibration. In one embodiment, the first membrane (733) may include an elastomer such as Polydimethylsiloxane (PDMS), Styrene Ethylene Butylene Styrene (SEBS), etc., considering vibration stability and application. In one embodiment, the first membrane (733) may include Perfluoroalkoxy alkane (PFA) or Polytetrafluoroethylene (PTFE). In some embodiments, the first membrane (733) may include the same or similar material as the dielectric layer (715). For example, the first membrane (733) may include particles and a matrix. For example, the particles may include BaTiO3 (BTO) coated with Polydopamine (PDA). The matrix may include P(VDF-TrFE), i.e., Polydopamine (PDA) may be treated on BaTiO3 (BTO).

[0074] The third electrode layer (735) may be disposed on the first membrane (733). The third electrode layer (735) may be an upper electrode in the ultrasonic-driven triboelectric generator (700). The third electrode layer (735) may include a material identical or similar to that of the second electrode layer (731). The third electrode layer (735) may include a metal such as gold (Au), platinum (Pt), or silver (Ag) that can be stably coated on the membrane. In one embodiment, the third electrode layer (735) may include a conductive polymer such as poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), polyaniline, or the like. In one embodiment, the third electrode layer (735) may include the metal and the conductive polymer.

[0075] The second membrane (751) may be disposed on the third electrode layer (735). The second membrane (751) may include the same or similar material as the first membrane (733). The second membrane (751) may be most polymer films capable of micro-vibration. In one embodiment, the second membrane (751) may include an elastomer such as Polydimethylsiloxane (PDMS), Styrene Ethylene Butylene Styrene (SEBS), etc., taking vibration stability and application into consideration. In one embodiment, the second membrane (751) may include Perfluoroalkoxy alkane (PFA) or Polytetrafluoroethylene (PTFE). In some embodiments, the second membrane (751) may include the same or similar material as the dielectric layer (715). For example, the second membrane (751) may include particles and a matrix. For example, the particles may comprise BaTiO3 (BTO) coated with Polydopamine (PDA). The matrix may comprise P(VDF-TrFE). That is, BaTiO3 (BTO) may be treated with Polydopamine (PDA).

[0076] The fourth electrode layer (753) may be disposed on the second membrane (751). The fourth electrode layer (753) may be an upper electrode in the ultrasonic-driven triboelectric generator (700). The fourth electrode layer (753) may include a material identical or similar to that of the third electrode layer (735). The fourth electrode layer (753) may include a metal such as gold (Au), platinum (Pt), or silver (Ag) that can be stably coated on the membrane. In one embodiment, the fourth electrode layer (753) may include a conductive polymer such as poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), polyaniline, or the like. In one embodiment, the fourth electrode layer (753) may include the metal and the conductive polymer.

[0077] The third membrane (755) may be disposed on the fourth electrode layer (753). The third membrane (755) may include the same or similar material as the first membrane (733). The third membrane (755) may be most polymer films capable of micro-vibration. In one embodiment, the third membrane (755) may include an elastomer such as Polydimethylsiloxane (PDMS), Styrene Ethylene Butylene Styrene (SEBS), etc., taking vibration stability and application into consideration. In one embodiment, the third membrane (755) may include Perfluoroalkoxy alkane (PFA) or Polytetrafluoroethylene (PTFE). In some embodiments, the third membrane (755) may include the same or similar material as the dielectric layer (715). For example, the third membrane (755) may include particles and a matrix. For example, the particles may comprise BaTiO3 (BTO) coated with Polydopamine (PDA). The matrix may comprise P(VDF-TrFE). That is, BaTiO3 (BTO) may be treated with Polydopamine (PDA).

[0078] In the ultrasonic driven triboelectric generator (700), ultrasonic waves can be applied from above to the third membrane (755). When ultrasonic waves are applied, the first vibrating film (730) and the second vibrating film (750) can vibrate relative to the fixed portion (710).

[0079] FIG. 7 illustrates a fixed portion (710), one first vibration film (730), and one second vibration film (750), but the embodiment of the present disclosure is not limited thereto. The first vibration film and the second vibration film may be provided in multiple numbers, and the multiple first vibration films and the multiple second vibration films may be arranged alternately. For example, the first vibration film and the second vibration film may be further arranged on the second vibration film (750).

[0080] Fig. 8 is a cross-sectional view showing the vibration of an ultrasonic-driven frictional electric generator (700), which is another embodiment of the present disclosure.

[0081] Referring to Fig. 8, when ultrasonic waves are applied to the first vibrating film (730) and the second vibrating film (750), the first vibrating film (730) and the second vibrating film (750) can vibrate with respect to the fixed portion (710). The fixed portion (710) and the first vibrating film (730) can come into contact with or separate from each other as the first vibrating film (730) vibrates. The first vibrating film (730) and the second vibrating film (750) can come into contact with or separate from each other as the first vibrating film (730) and the second vibrating film (750) vibrate.

[0082] When ultrasonic waves are applied and the fixed portion (710) and the first vibrating film (730) come into contact with each other, friction may occur between the dielectric layer (715) and the second electrode layer (731). The vibration of the first vibrating film (730) and the friction between the dielectric layer (715) and the second electrode layer (731) may induce a change in electrical potential. That is, triboelectricity may be generated. For example, the second electrode layer (731) may change to a positive (+) potential. The dielectric layer (715) may change to a negative (-) potential.

[0083] When ultrasonic waves are applied and the first vibrating film (730) and the second vibrating film (750) come into contact with each other, friction may occur between the third electrode layer (735) and the second membrane (751). The vibration of the first vibrating film (730) and the second vibrating film (750) and the friction between the third electrode layer (735) and the second membrane (751) may induce a change in electrical potential. That is, triboelectricity may be generated. For example, the third electrode layer (735) may change to a positive (+) potential. The second membrane (751) may change to a negative (-) potential.

[0084] When ultrasonic waves are applied and the fixed portion (710), the first vibrating film (730), and the second vibrating film (750) are spaced apart from each other, the first electrode layer (713) and the second electrode layer (731) may have opposite potentials. For example, when the first electrode layer (713) has a positive (+) potential, the second electrode layer (731) may have a negative (-) potential.

[0085] When ultrasonic waves are applied and the fixed portion (710), the first vibrating film (730), and the second vibrating film (750) are spaced apart from each other, the third electrode layer (735) and the fourth electrode layer (753) may have opposite potentials. For example, when the third electrode layer (735) has a negative (-) potential, the fourth electrode layer (753) may have a positive (+) potential.

[0086] When ultrasonic waves are applied and the fixed portion (710), the first vibrating film (730), and the second vibrating film (750) are spaced apart from each other, the second electrode layer (731) and the third electrode layer (735) can have the same potential. For example, the second electrode layer (731) and the third electrode layer (735) can both have a negative (-) potential.

[0087] In an embodiment of the present disclosure, the first vibration film (730) may have a symmetrical structure in which a second electrode layer (731) is arranged at the bottom and a third electrode layer (735) is arranged at the top, centered on the first membrane (733). In this case, when the first vibration film (730) has a symmetrical layer structure, the second electrode layer (731) and the third electrode layer (735) may have potentials opposite to those of the first electrode layer (713) and the fourth electrode layer (753). For example, the second electrode layer (731) and the third electrode layer (735) may have a negative (-) potential, and the first electrode layer (713) and the fourth electrode layer (753) may have a positive (+) potential. Therefore, the ultrasonic-driven triboelectric generator (700) may secure twice the contact area and have low impedance without increasing the width of the device.

[0088] In the embodiment of the present disclosure, a second membrane (751) may be arranged at the bottom and a third membrane (755) may be arranged at the top of a second vibration film (750) centered on a fourth electrode layer (753). Since the second vibration film (750) has a symmetrical layer structure, the first vibration film and the second vibration film may be further laminated alternately. For example, after the first vibration film (730) and the second vibration film (750) are laminated on the fixed portion (710), the first vibration film and the second vibration film may be further laminated.

[0089] An ultrasonic-driven triboelectric generator (700), which is one embodiment of the present disclosure, can have low impedance. This will be described in detail through comparison with the comparative examples below.

[0090] FIG. 9 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device (900) of a first comparative example for comparison with the embodiment of the present disclosure.

[0091] Referring to FIG. 9, the ultrasonic driving triboelectric generator (900) of the first comparative example may include a fixed portion (910) and a vibrating film (930). The fixed portion (910) may include a first electrode layer (911) and a dielectric layer (913). The vibrating film (930) may include a second electrode layer (931) and a membrane (933).

[0092] The first electrode layer (911) may include a stable electrode material such as gold (Au) or copper (Cu). A dielectric layer (913) may be disposed on the first electrode layer (911). The dielectric layer (913) may include Perfluoroalkoxy alkane (PFA), Fluorinated ethylene propylene (FEP), Polytetrafluoroethylene (PTFE), Nylon, or Butylated Melamine Formaldehyde (BMF).

[0093] The second electrode layer (931) may be disposed on the dielectric layer (913). The second electrode layer (931) may include a metal such as gold (Au), platinum (Pt), or silver (Ag). In one embodiment, the second electrode layer (931) may include a conductive polymer such as poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), polyaniline, or the like. In one embodiment, the second electrode layer (931) may include the metal and the conductive polymer.

[0094] The membrane (933) may be placed on the second electrode layer (931). The membrane (933) may be most polymer films capable of micro-vibration.

[0095] In the ultrasonic-driven triboelectric generator (900), ultrasonic waves can be applied from above to the membrane (933). When ultrasonic waves are applied, the vibrating film (930) can vibrate with respect to the fixed portion (910), and friction can be generated between the second electrode layer (931) and the dielectric layer (913). Such vibration and friction can induce a change in electrical potential. That is, friction electricity can be generated. Therefore, the ultrasonic-driven triboelectric generator (900) can be driven using ultrasonic waves, and can generate power using the generated friction electricity.

[0096] Fig. 10 is a cross-sectional view showing a second comparative example ultrasonic driven frictional electric power generation device (1000) for comparison with the embodiment of the present disclosure.

[0097] Referring to FIG. 10, the ultrasonic-driven triboelectric generator (1000) of the second comparative example may include a fixed portion (1010), a first vibrating film (1030), and a second vibrating film (1050). The fixed portion (1010) may include a substrate (1011), a first electrode layer (1013), and a dielectric layer (1015). The first vibrating film (1030) may include a second electrode layer (1031) and a first membrane (1033). The second vibrating film (1050) may include an upper electrode layer (1053) and an upper membrane (1055).

[0098] The substrate (1011), the first electrode layer (1013), and the dielectric layer (1015) of the second comparative example of FIG. 10 are identical to the substrate (711), the first electrode layer (713), and the dielectric layer (715) of the embodiment of FIG. 7.

[0099] The second electrode layer (1031) may be disposed on the dielectric layer (1015). The first membrane (1033) may be disposed on the second electrode layer (1031). The second electrode layer (1031) and the first membrane (1033) of the second comparative example of FIG. 10 are identical to the second electrode layer (731) and the first membrane (733) of the embodiment of FIG. 7, respectively. The first vibrating film (1030) of the second comparative example of FIG. 10 differs from the first vibrating film (730) of FIG. 7 in that it does not have a third electrode layer.

[0100] The upper electrode layer (1053) may be disposed on the first membrane (1033). The upper membrane (1055) may be disposed on the upper electrode layer (1053). The upper electrode layer (1053) of the second comparative example of FIG. 10 is identical to the fourth electrode layer (753) of the embodiment of FIG. 7. The upper membrane (1055) of the second comparative example of FIG. 10 is identical to the third membrane (755) of the embodiment of FIG. 7.

[0101] Fig. 11 is a cross-sectional view showing the vibration of the ultrasonic driving frictional electric generator (1000) of the second comparative example.

[0102] Referring to FIG. 11, when ultrasonic waves are applied to the first vibrating film (1030) and the second vibrating film (1050), they can vibrate with respect to the fixed portion (1010). The fixed portion (1010) and the first vibrating film (1030) can come into contact with or separate from each other as the first vibrating film (1030) vibrates. The first vibrating film (1030) and the second vibrating film (1050) can come into contact with or separate from each other as the first vibrating film (1030) and the second vibrating film (1050) vibrate.

[0103] When ultrasonic waves are applied to the ultrasonic-driven triboelectric generator (1000) of the second comparative example and the fixed portion (1010), the first vibrating film (1030), and the second vibrating film (1050) come into contact with each other, the first electrode layer (1013), the dielectric layer (1015), the second electrode layer (1031), and the first membrane (1033) can function as a first ultrasonic-driven triboelectric generator (TENG1), and the second electrode layer (1031), the first membrane (1033), the upper electrode layer (1053), and the upper membrane (1055) can function as a second ultrasonic-driven triboelectric generator (TENG2). In this case, the second electrode layer (1031) can function as an upper electrode in the ultrasonic-driven triboelectric generator (TENG1), and can function as a lower electrode in the second ultrasonic-driven triboelectric generator (TENG2). Accordingly, since the direction of the current entering the second electrode layer (1031) through the external conductor is opposite in the first ultrasonic-driven triboelectric generator (TENG1) and the second ultrasonic-driven triboelectric generator (TENG2), the charges can be canceled out. Therefore, in a structure such as the ultrasonic-driven triboelectric generator (1000) of the second comparative example, it is impossible to secure twice the contact area as in the ultrasonic-driven triboelectric generator (700) according to the embodiment of FIG. 7 without increasing the width of the device. Unlike the second comparative example, in the ultrasonic-driven triboelectric generator (700) according to the embodiment of FIG. 7, the first electrode layer (713) and the fourth electrode layer (753) and the second electrode layer (731) and the third electrode layer (735) have opposite potentials, so that the contact area can be increased.

[0104] FIG. 12 is a graph showing the voltage and current of the ultrasonic-driven triboelectric generator of the first comparative example, the second comparative example, and other embodiments of the present disclosure.

[0105] Referring to (a) of FIG. 12, in a structure such as the ultrasonic-driven triboelectric generator (1000) of the second comparative example, it is impossible to secure twice the contact area as in the ultrasonic-driven triboelectric generator (700) according to the embodiment of FIG. 7 without increasing the width of the device, and therefore, it exhibits substantially the same current and voltage as in the structure such as the ultrasonic-driven triboelectric generator (1000) of the first comparative example.

[0106] Referring to (b) of FIG. 12, in a structure such as the ultrasonic-driven triboelectric generator (1000) of the second comparative example, it is impossible to secure twice the contact area without increasing the width of the device, but in a structure such as the ultrasonic-driven triboelectric generator (700) according to the embodiment of FIG. 7, the first electrode layer (713) and the fourth electrode layer (753), and the second electrode layer (731) and the third electrode layer (735) have opposite potentials, so that the contact area can be increased. Therefore, the ultrasonic-driven triboelectric generator (700) according to the embodiment of FIG. 7 can have higher current and voltage than the ultrasonic-driven triboelectric generator (1000) of the second comparative example, and can implement low impedance.

[0107] Fig. 13 is a cross-sectional view showing a frictional electric power generation device (1300) according to the third comparative example.

[0108] Referring to FIG. 13, a frictional electric power generation device (1300) may include a first frictional electric power generation device (1310), a second frictional electric power generation device (1320), and a third frictional electric power generation device (1330). The second frictional electric power generation device (1320) may be placed on the first frictional electric power generation device (1310). The third frictional electric power generation device (1330) may be placed on the second frictional electric power generation device (1320).

[0109] The first triboelectric generator (1310), the second triboelectric generator (1320), and the third triboelectric generator (1330) may each include a first substrate (1301), a lower electrode (1302), a dielectric (1303), a spacer (1304), an upper electrode (1305), and a second substrate (1306) that are sequentially stacked. Here, the spacer (1304) may have elasticity like a spring.

[0110] The frictional electric power generation device (1300) according to the third comparative example can be driven at a low frequency rather than ultrasonic waves. When the frictional electric power generation device (1300) according to the third comparative example is driven by ultrasonic waves, the reduction in efficiency due to reflection of ultrasonic waves may be significant due to its thickness.

[0111] The frictional electric power generation device (1300) of this type has a first frictional electric power generation device (1310), a second frictional electric power generation device (1320), and a third frictional electric power generation device (1330) laminated therein. Since this structure includes a thick first substrate (1301), a spacer (1303), and a second substrate (1306), the thickness may be increased, unlike the ultrasonic-driven frictional electric power generation device (700) of the embodiment of FIG. 7. In addition, the frictional electric power generation device (1300) according to the third comparative example has a vibration displacement of several mm or more when vibrated. Therefore, it is different from the ultrasonic-driven frictional electric power generation device (700) of the embodiment of FIG. 7, which is manufactured using a thin spacer or without a spacer and vibrates by several micrometers or more. Unlike the ultrasonic-driven triboelectric generator (700) of the embodiment of Fig. 7, the triboelectric generator (1300) according to the third comparative example may be difficult to apply to applications requiring small devices such as wearable and implantable devices. Since the ultrasonic-driven triboelectric generator (700) of the embodiment of Fig. 7 operates by a vibrating membrane, a triboelectric generator can be manufactured by stacking multiple membranes.

[0112] Fig. 14 is a cross-sectional view showing an ultrasonic-driven triboelectric generator (1400) according to another embodiment of the present disclosure. In Fig. 14, the same reference numerals as in Fig. 7 denote the same components, and thus, a duplicate description will be omitted.

[0113] Referring to FIG. 14, an ultrasonic driven triboelectric generator (1400) may include a fixed portion (710), a first vibrating film (730), and a second vibrating film (750). A plurality of first vibrating films (730) may be provided. A plurality of second vibrating films (750) may be provided. A plurality of first vibrating films (730) and a plurality of second vibrating films (750) may be arranged alternately. For example, the fixed portion (710), the first vibrating film (730), the second vibrating film (750), the first vibrating film (730), and the second vibrating film (750) may be sequentially stacked.

[0114] Fig. 15 is a cross-sectional view showing an ultrasonic-driven triboelectric generator (700-1) according to another embodiment of the present disclosure. Fig. 16 is a plan view of a first membrane (733-1) according to another embodiment of the present disclosure. In Figs. 15 and 16, the same reference numerals as in Fig. 7 denote the same components, and thus, a duplicate description thereof will be omitted.

[0115] Referring to FIGS. 15 and 16, an ultrasonic-driven triboelectric generator (700-1) may include a fixed portion (710), a first vibrating film (730-1), and a second vibrating film (750-1). The first vibrating film (730-1) may be in contact with the fixed portion (710). The second vibrating film (750-1) may be in contact with the first vibrating film (730-1). The fixed portion (710) may include a substrate (711), a first electrode layer (713), and a dielectric layer (715). The first vibrating film (730) may include a second electrode layer (731), a first membrane (733-1), and a third electrode layer (735). The second vibration film (750) may include a second membrane (751-1), a fourth electrode layer (753), and a third membrane (755). The ultrasonic-driven triboelectric generator (700-1) of Fig. 15 is different from the ultrasonic-driven triboelectric generator (700) of Fig. 7 in the shapes of the first membrane (733-1) and the second membrane (751-1).

[0116] The first membrane (733-1) may include a first base portion (733B) and a plurality of first pattern portions (733P). The first base portion (733B) may have a flat shape. The plurality of first pattern portions (733P) may protrude from the first base portion (733B) toward the fixed portion (710). The plurality of first pattern portions (733P) may be arranged side by side in the left, right, top, and bottom directions when viewed in a plan view. However, the present invention is not limited thereto, and various arrangements may be possible.

[0117] The plurality of first pattern portions (733P) may have a dome shape. For example, the plurality of first pattern portions (733P) may have a curved outer surface (733PS) when viewed in cross section (e.g., FIG. 15). The plurality of first pattern portions (733P) may have a curved outer surface (733PS) when viewed in plan view (e.g., FIG. 16). For example, the outer surfaces (733PS) of the plurality of first pattern portions (733P) may have a circular shape when viewed in plan view.

[0118] If the plurality of first pattern portions (733P) are pyramid-shaped rather than dome-shaped, when ultrasonic waves are applied to the frictional electric generator, vibration may occur, but since the volume of the air gap between the fixed portion and the first vibration film or the first vibration film and the second vibration film is larger than the volume of the air gap (G) when formed with the plurality of dome-shaped first pattern portions (733P), it may not be an efficient pattern in terms of increasing the efficiency of ultrasonic wave transmission to the lower layer. In the case of the embodiment of the present disclosure, since the plurality of first pattern portions (733P) are dome-shaped, the volume of the air gap (G) can be reduced, and ultrasonic waves can be transmitted to the lower layer.

[0119] The second membrane (751-1) may also include a second base portion (751B) and a plurality of second pattern portions (751P), similar to the first membrane (733-1). The plurality of second pattern portions (751P) may have a dome shape.

[0120] FIG. 15 illustrates a fixed portion (710), one first vibration film (730-1), and one second vibration film (750-1), but the embodiment of the present disclosure is not limited thereto. The first vibration film and the second vibration film may each be provided in multiple units, and the multiple first vibration films and the multiple second vibration films may be arranged alternately. For example, the first vibration film and the second vibration film may be further arranged on the second vibration film (750-1).

[0121] Fig. 17 is a cross-sectional view showing an ultrasonic driven frictional electric power generation device (700-1), which is one embodiment of the present disclosure, vibrating.

[0122] Referring to Fig. 17, when ultrasonic waves are applied to the first vibrating film (730-1) and the second vibrating film (750-1), they can vibrate with respect to the fixed portion (710). When the first vibrating film (730-1) vibrates, since the first membrane of the first vibrating film (730-1) includes a plurality of first pattern portions (733P) in a dome shape, the plurality of first pattern portions (733P) of the first membrane can be pressed and operated. In addition, since the second membrane of the second vibrating film (750-1) includes a plurality of second pattern portions (751P) in a dome shape, the plurality of second pattern portions (751P) of the second membrane can be pressed and operated. Accordingly, the fixed portion (710) and the first vibrating film (730-1) are not spaced apart, and the first vibrating film (730-1) and the second vibrating film (750-1) are not spaced apart, so that the decrease in ultrasonic transmission efficiency can be small.

[0123] FIG. 18 is a graph showing the voltage and current of an ultrasonic-driven triboelectric generator according to another embodiment of the present disclosure and an ultrasonic-driven triboelectric generator according to another embodiment of the present disclosure.

[0124] Referring to FIG. 18, the ultrasonic-driven triboelectric generator of A is the embodiment of FIG. 7. B is an embodiment in which a first vibrating film (730) and a second vibrating film (750) are additionally laminated in the ultrasonic-driven triboelectric generator of the embodiment of FIG. 7. That is, the ultrasonic-driven triboelectric generator of B has the structure of the embodiment of FIG. 14 in which a fixed portion, a first vibrating film, a second vibrating film, a first vibrating film, and a second vibrating film are laminated in that order. C is the ultrasonic-driven triboelectric generator of FIG. 15, which is another embodiment of the present disclosure. The ultrasonic-driven triboelectric generator of C (700-1) has a structure in which a fixed portion (710), a first vibrating film (730-1), a second vibrating film (750-1), a first vibrating film (730-1), and a second vibrating film (750-1) are laminated in that order.

[0125] In the case of A and B, as the number of the first vibrating film and the second vibrating film increases, the ultrasonic transmission efficiency may decrease. Accordingly, the current and voltage values ​​of the ultrasonic-driven triboelectric generator may decrease. In the case of C, since the decrease in ultrasonic transmission efficiency due to the air gap between adjacent films is small, the voltage and current values ​​of the ultrasonic-driven triboelectric generator may be higher compared to A and B. Accordingly, the impedance may also be improved without decreasing the output.

[0126] While this disclosure has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will appreciate that various modifications and equivalent alternative embodiments are possible. Therefore, the true scope of technical protection of this disclosure should be determined by the technical spirit of the appended claims.

[0127] National Research Foundation of Korea (NRF) (1711200883): This work was supported by the National Research Foundation of Korea (NRF) through the Electronic Pharmaceutical Technology Development Project, funded by the Ministry of Science and ICT (MSIT). (Project No. 2022M3E5E9016662)

[0128] This research was supported by the Korea Institute of Industrial Technology Planning and Evaluation (KIET) with funding from the Ministry of Trade, Industry and Energy (MOTIE) in 2023 (1415187321 / 20025736, Development of a Communication SoC and Platform for Implantable Electronic Drugs in 2023).

Claims

1. A fixed portion including a first electrode layer and a dielectric layer disposed on the first electrode layer; A first vibration film including a second electrode layer disposed on the dielectric layer, a first membrane disposed on the second electrode layer, and a third electrode layer disposed on the first membrane; and An ultrasonic-driven triboelectric generator, comprising: a second vibrating film including a second membrane disposed on the third electrode layer and a fourth electrode layer disposed on the second membrane; 2. In paragraph 1, An ultrasonic-driven triboelectric generator, wherein the second vibrating film further includes a third membrane disposed on the fourth electrode layer.

3. In paragraph 2, The above first vibration film and the above second vibration film are each provided in multiple units, An ultrasonic driven triboelectric generator, wherein a plurality of first vibrating films and a plurality of second vibrating films are arranged alternately with each other.

4. In paragraph 1, An ultrasonic driven triboelectric generator, wherein when ultrasonic waves are applied, the first vibrating film and the second vibrating film vibrate relative to the fixed portion.

5. In paragraph 4, An ultrasonic-driven triboelectric generator, wherein when the above ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the first electrode layer and the second electrode layer have opposite potentials.

6. In paragraph 5, An ultrasonic-driven triboelectric generator, wherein when the above ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the third electrode layer and the fourth electrode layer have opposite potentials.

7. In paragraph 4, An ultrasonic-driven triboelectric generator, wherein when the above ultrasonic waves are applied and the fixed portion, the first vibrating film, and the second vibrating film are spaced apart from each other, the second electrode layer and the third electrode layer have the same potential.

8. In paragraph 1, The above genetic layer, Polydopamine (PDA) coated BaTiO 3 Particles containing (BTO) and An ultrasonic-driven triboelectric generator comprising a matrix including P(VDF-TrFE).

9. In paragraph 8, An ultrasonic driven triboelectric generator, wherein the particles are embedded in the matrix.

10. In paragraph 1, The first membrane includes a first base portion and a plurality of first pattern portions arranged on the first base portion, An ultrasonic driven triboelectric generator, wherein the plurality of first pattern sections of the first membrane are dome shaped.

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