Main shaft structure and adjustment method therefor

Abstract

The present application belongs to the field of printed circuit board (PCB) drilling machines, and relates to a main shaft structure and an adjustment method therefor. The main shaft structure comprises a bottom plate, a linear electric motor, a hanging rod, a press cover, a main shaft, a locking member, a shaft sleeve and a fine adjustment assembly, wherein a mover of the linear electric motor is fixed on the bottom plate, and a stator of the linear electric motor can slide relative to the mover and the bottom plate in a Z-axis direction; the fine adjustment assembly is configured to drive the shaft sleeve to move relative to the bottom plate in a horizontal direction, so as to adjust the relative position between the shaft sleeve and the bottom plate; a lower end of the main shaft passes through a guide hole of the shaft sleeve, and a radial air gap is formed between the main shaft and the shaft sleeve; the locking member is connected to an upper end of the main shaft and the press cover; a lower end of the hanging rod is arranged in a Z-direction limiting space between the press cover and the main shaft, and an upper end of the hanging rod is connected to the stator; in a locked state of the locking member, the lower end of the hanging rod is pressed and limited between the press cover and the main shaft; and in a loosened state of the locking member, the press cover can move relative to the hanging rod in the horizontal direction. The main shaft structure can reduce energy consumption and realize the position adjustment of the main shaft in the horizontal direction.

Description

Spindle structure and its adjustment method

[0001] This application claims priority to the Chinese patent application filed with the State Intellectual Property Office on December 5, 2023, with application number 202311665167.5 and application name “Spindle structure and adjustment method thereof”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application belongs to the field of printed circuit board (PCB) drilling machines, and in particular relates to a spindle structure and an adjustment method thereof. Background Art

[0003] The existing drilling mechanism generally includes a mounting frame, a Z-axis drive assembly, a spindle, and a sleeve. The sleeve and the Z-axis drive assembly are respectively installed on the mounting frame. The upper end of the spindle is connected to the Z-axis drive assembly, and the lower end of the spindle is inserted into the guide hole of the sleeve. A radial air gap is formed between the spindle and the sleeve. The Z-axis drive assembly can drive the spindle to move along the Z-axis direction to drive the drill bit installed at the bottom of the spindle to drill.

[0004] However, in the prior art, the spindle cannot be adjusted left and right, front and back, and when there is an error in the parallelism between the actual motion trajectory of the spindle and the preset motion trajectory, the spindle is prone to friction or collision with the sleeve, causing the spindle to become stuck or scratched.

[0005] Summary of the Invention

[0006] The technical problem to be solved by the present application is: to provide a spindle structure and an adjustment method thereof in view of the technical problem that the existing spindle cannot adjust its position in the horizontal direction.

[0007] To solve the above technical problems, on the one hand, embodiments of the present application provide a spindle structure, including a base plate, a linear motor, a suspension rod, a gland, a spindle, a locking member, a sleeve, and a fine-tuning assembly, wherein the linear motor includes a mover and a stator, the mover being fixed to the base plate, and the stator being able to slide relative to the mover and the base plate along the Z-axis direction;

[0008] The fine-tuning assembly is arranged on a side of the base plate close to the main shaft, and is used to drive the sleeve to move horizontally relative to the base plate. The sleeve is provided with a guide hole, and the lower end of the main shaft passes through the guide hole, and a radial air gap is formed between the main shaft and the sleeve.

[0009] The locking member is connected between the upper end of the main shaft and the gland, and a Z-direction limiting space is formed between the gland and the main shaft; the lower end of the suspension rod is arranged in the Z-direction limiting space, and the upper end of the suspension rod is connected to the stator;

[0010] The locking member has a locked state and a relaxed state; in the locked state, the lower end of the boom is clamped and limited along the Z-axis direction between the pressure cover and the main shaft; in the relaxed state, the clamping limit of the lower end of the boom is released, and the pressure cover can move relative to the boom in the horizontal direction.

[0011] Optionally, a through hole is provided on the gland, and the upper end of the suspension rod passes through the through hole and is connected to the stator.

[0012] Optionally, the locking member includes a locking screw, which passes through the pressure cover along the Z-axis direction and is threadedly connected to the main shaft.

[0013] Optionally, the spindle structure further includes a Z-axis motor fixing plate, the Z-axis motor fixing plate is slidably connected to the base plate along the Z-axis direction, and the stator is connected to the Z-axis motor fixing plate; when the stator is energized, the stator and the Z-axis motor fixing plate move synchronously along the Z-axis direction;

[0014] The upper end of the suspension rod is connected to the Z-axis motor fixing plate.

[0015] Optionally, the spindle structure further includes a Z-axis balancing elastic member, and the Z-axis balancing elastic member is connected between the base plate and the Z-axis motor fixing plate along the Z-axis direction.

[0016] Optionally, two Z-axis balancing elastic members are provided, the horizontal direction includes the X-axis direction, and the two Z-axis balancing elastic members are respectively located on opposite sides of the central axis of the main shaft along the X-axis direction.

[0017] Optionally, the spindle structure further includes a slider, which is mounted on the base plate and is slidably connected to a slide rail along the X-axis direction.

[0018] Optionally, the Z-axis balancing elastic member is a tension spring.

[0019] Optionally, the shaft sleeve is an air-floating sleeve.

[0020] Optionally, the spindle structure further comprises a sleeve clamp, the shaft clamp is fixedly connected to the base plate, and the shaft sleeve is mounted on the sleeve clamp and can move relative to the sleeve clamp in a horizontal direction;

[0021] The fine-tuning assembly is connected between the shaft sleeve and the sleeve clamp, and is used to drive the shaft sleeve to move relative to the sleeve clamp in a horizontal direction.

[0022] According to the spindle structure of the embodiment of the present application, on the one hand, since the mass of the stator is lighter than that of the mover, by fixing the mover of the linear motor on the base plate and allowing the stator to slide relative to the mover and the base plate along the Z-axis direction, the stator drives the suspension rod and the spindle to move up and down, which can reduce the motion load and reduce energy consumption; on the other hand, the pressure cover at the upper end of the spindle and the suspension rod are connected by the locking piece. When adjusting the spindle position, the state of the locking piece can be adjusted first so that the spindle can move in the horizontal direction, and then the position of the shaft sleeve can be adjusted to adjust the spindle position accuracy. After that, the spindle can be manually moved up and down so that the spindle can move without contact with the shaft sleeve, and finally the horizontal position of the spindle can be adjusted to avoid the spindle from getting stuck or scratched.

[0023] On the other hand, an embodiment of the present application provides a method for adjusting a spindle structure, which is used for the above-mentioned spindle structure, and includes:

[0024] The locking member is placed in a relaxed state so that the suspension rod and the gland can move freely relative to each other in the horizontal direction;

[0025] The shaft sleeve is driven to move horizontally relative to the base plate by the fine adjustment component, so as to adjust the position of the shaft sleeve relative to the base plate horizontally;

[0026] Moving the main shaft up and down along the Z-axis direction, and driving the gland to move horizontally relative to the boom through the main shaft, so that there is no contact between the main shaft and the sleeve;

[0027] Switch the locking member to a locking state so that the lower end of the suspension rod is pressed and limited between the pressure cover and the main shaft along the Z-axis direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] FIG1 is a schematic diagram of a spindle structure provided by an embodiment of the present application;

[0029] FIG2 is a schematic diagram of the assembly of the boom, gland and main shaft in FIG1 ;

[0030] FIG3 is a schematic diagram of the assembly of the shaft sleeve and the sleeve clamp in FIG1 ;

[0031] FIG4 is a schematic diagram of the assembly of the bottom plate, the linear motor and the Z-axis motor fixing plate in FIG1 ;

[0032] FIG5 is a flow chart of a method for adjusting a spindle structure provided in an embodiment of the present application.

[0033] The accompanying drawings in the specification are as follows: 1. Base plate; 2. Linear motor; 21. Mover; 22. Stator; 3. Suspension rod; 31. Main body; 4. Pressure cover; 5. Main shaft; 6. Locking piece; 7. Bushing; 71. Guide hole; 8. Clamp; 9. Extension rod; 10. Z-axis motor fixing plate; 11. Z-axis balance spring; 12. Fine-tuning assembly; 121. X-axis fine-tuning module; 122. Y-axis fine-tuning module; 13. Slider. DETAILED DESCRIPTION

[0034] In order to make the technical problems, technical solutions and beneficial effects solved by this application more clearly understood, this application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0035] As shown in Figures 1 to 4, the spindle structure provided in the embodiment of the present application includes a base plate 1, a linear motor 2, a suspension rod 3, a pressure cover 4, a spindle 5, a locking piece 6, a sleeve 7 and a fine-tuning assembly 12. The linear motor 2 includes a mover 21 and a stator 22. The mover 21 is fixed on the base plate 1. When the stator 22 is energized, the stator 22 can slide relative to the mover 21 and the base plate 1 along the Z-axis direction.

[0036] The fine-tuning component 12 is arranged on the side of the base plate 1 close to the main shaft 5. The fine-tuning component 12 is used to drive the sleeve 7 to move horizontally relative to the base plate 1 to adjust the relative position between the sleeve 7 and the base plate 1 horizontally. A guide hole 71 is provided on the sleeve 7. The lower end of the main shaft 5 passes through the guide hole 71, and a radial air gap is formed between the main shaft 5 and the sleeve 7.

[0037] The locking member 6 is connected between the upper end of the main shaft 5 and the gland 4, and a Z-direction limiting space is formed between the gland 4 and the main shaft 5. The lower end of the suspension rod 3 is set in the Z-direction limiting space, and the upper end of the suspension rod 3 is connected to the stator 22.

[0038] The locking member 6 has a locked state and a relaxed state. In the locked state, the lower end of the boom 3 is clamped and restrained along the Z-axis between the gland 4 and the main shaft 5. In the relaxed state, the clamping limit on the lower end of the boom 3 is released, and the gland 4 can move horizontally relative to the boom 3.

[0039] The spindle structure provided in the embodiment of the present application, on the one hand, because the mass of the stator 22 is relatively light relative to the mover 21, by fixing the mover 21 of the linear motor 2 on the base plate 1 and allowing the stator 22 to slide relative to the mover 21 and the base plate 1 along the Z-axis, thereby allowing the stator 22 to drive the suspension rod 3 and the spindle 5 to move up and down, the motion load can be reduced and energy consumption can be reduced. On the other hand, the pressure cover 4 at the upper end of the spindle 5 is connected to the suspension rod 3 by a locking member 6. When adjusting the position of the spindle 5, the state of the locking member 6 can be adjusted first so that the spindle 5 can move in the horizontal direction, and then the position of the shaft sleeve 7 can be adjusted to adjust the position accuracy of the spindle 5. After that, the spindle 5 can be manually moved up and down so that the spindle 5 can move without contact with the shaft sleeve 7, and finally the horizontal position of the spindle 5 can be adjusted to avoid the spindle 5 from getting stuck or scratched.

[0040] In one embodiment, the mover 21 includes a magnet, and the stator 22 includes a coil.

[0041] In one embodiment, the suspension rod 3 can slightly deform along with the movement of the main shaft 5. Slight deformation means that the suspension rod 3 bends radially relative to the original axis, that is, the axis of the suspension rod 3 deviates from the original axis after bending.

[0042] Since the boom 3 can be slightly deformed with the movement of the main shaft 5, it adapts to the non-absolute parallelism between the Z-direction drive and the actual movement trajectory of the main shaft 5, ensures the parallelism between the actual movement trajectory of the main shaft 5 and the preset movement trajectory, avoids errors in the parallelism, prevents friction or collision between the main shaft 5 and the sleeve 7, and effectively avoids the main shaft 5 from being stuck or scratched due to non-parallelism.

[0043] It should be noted that the preset motion trajectory of the main shaft 53 is a trajectory parallel to the axis of the sleeve 7 and is also a trajectory extending along the Z direction.

[0044] In one embodiment, as shown in Figure 2, the suspension rod 3 includes a limiting portion and a main body 31. The limiting portion is accommodated in the Z-direction limiting space, and the main body 31 is connected between the stator 22 and the limiting portion. The main body 31 can adaptively deform slightly with the movement of the main shaft 5.

[0045] When the locking member 6 is in the locked state, the limiting portion is pressed and limited along the Z-axis direction between the pressure cover 4 and the main shaft 5. When the locking member 6 is in the relaxed state, the pressing and limiting of the limiting portion is released.

[0046] In one embodiment, as shown in FIG. 2 , a guide hole 71 may be provided on the gland 4 , and the main body 31 passes through the guide hole 71 and is connected between the limiting portion and the stator 22 , thereby achieving connection between the suspension rod 3 and the stator 22 .

[0047] In one embodiment, a receiving groove is further provided on the side of the gland 4 facing the spindle 5. The receiving groove is connected to the guide hole 71 and provides Z-direction limiting space for the limiting portion, which is accommodated within the receiving groove. In this case, the limiting portion is fully or at least partially accommodated within the receiving groove, and the limiting portion is pressed between the gland 4 and the spindle 5 along the axial direction of the spindle 5 to prevent the gland 4 from rotating relative to the receiving groove, thereby preventing the spindle 5 from rotating.

[0048] In one embodiment, the central axis of the main body 31 when not deformed is collinear with the central axis of the limiting portion to ensure the stability of the connection between the suspension rod 3 and the gland 4. Correspondingly, the central axis of the receiving groove can be collinear with the central axis of the guide hole 71.

[0049] In one embodiment, along the radial direction of the limiting portion, a first gap is formed between the groove wall of the accommodating groove and the limiting portion, and a second gap is formed between the hole wall of the guide hole 71 and the suspension rod 3 .

[0050] During assembly, the position of the limiting portion relative to the receiving groove and the position of the main body 31 relative to the guide hole 71 can be adjusted along the radial direction of the limiting portion, thereby adjusting the position of the main shaft 5 along the horizontal direction (at least including the X and Y directions).

[0051] In one embodiment, along a direction perpendicular to the central axis of the boom 3, the cross-section of the main body 31 and the cross-section of the limiting portion are both circular, and the cross-sectional radius of the main body 31 is smaller than the cross-sectional radius of the limiting portion to ensure that the limiting portion will not fall out of the pressure cover 4 through the guide hole 71.

[0052] Furthermore, along the direction perpendicular to the central axis of the boom 3, the cross-section of the accommodating groove and the cross-section of the guide hole 71 can be made circular, and the cross-sectional radius of the accommodating groove can be made larger than the cross-sectional radius of the limiting portion, the cross-sectional radius of the guide hole 71 and the cross-sectional radius of the main body 31, so that a first gap is formed between the groove wall of the accommodating groove and the limiting portion, and a second gap is formed between the hole wall of the guide hole 71 and the main body 31, so as to facilitate the adjustment of the position of the main shaft 5 along the horizontal direction (such as the X direction and the Y direction).

[0053] In one embodiment, as shown in FIG2 , the main body portion 31 is roughly thin in the middle and thick at both ends. This shape design can not only ensure a stable connection between the boom 3 and adjacent structures (such as the limit portion, the stator 22 or the extension rod 9 described below), but also allow the middle portion of the main body portion 31 to undergo adaptive slight deformation, thereby ensuring the parallelism between the actual motion trajectory of the main shaft 5 and the preset motion trajectory.

[0054] In one embodiment, as shown in FIG2 , when the sum of the driving distance of the linear motor 2 and the overall length (length along the Z direction) of the boom 3 and the spindle 5 is not sufficient for drilling, the spindle structure may further include an extension rod 9, which is connected between the upper end of the boom 3 and the stator 22 to ensure that drilling is carried out.

[0055] The extension rod 9 can have various specifications, and the extension rod 9 of different specifications can be replaced according to actual needs.

[0056] In one embodiment, as shown in FIG. 2 , the locking member 6 includes a locking screw that passes through the gland 4 along the Z-axis and is threadedly connected to the spindle 5 .

[0057] A locking screw is used as the locking member 6, and the locking member 6 can be switched between a locked state and a relaxed state by adjusting the tightness of the locking screw. It should be noted that when the locking member 6 is switched to the relaxed state, the locking member 6 does not need to be completely loosened, that is, the locking member 6 can always be connected between the main shaft 5 and the gland 4.

[0058] In one embodiment, as shown in Figures 1 and 4, the spindle structure further includes a Z-axis motor fixing plate 10, which is slidably connected to the base plate 1 along the Z-axis direction, and a stator 22 is connected to the Z-axis motor fixing plate 10. The stator 22 and the Z-axis motor fixing plate 10 can move synchronously along the Z-axis direction.

[0059] The upper end of the suspension rod 3 is connected to the Z-axis motor fixing plate 10 .

[0060] When the stator 22 is energized, the stator 22 will slide relative to the mover 21 and the base plate 1 along the Z-axis direction, thereby driving the Z-axis motor fixing plate 10 to move synchronously with the stator 22, and finally realizing the Z-direction drive of the main shaft 5.

[0061] In one embodiment, as shown in Figure 1 , the spindle structure further includes a Z-axis balancing elastic member connected along the Z-axis between the base plate 1 and the Z-axis motor mounting plate 10. This Z-axis balancing elastic member partially offsets the weight of the spindle 5, thereby reducing the load on the linear motor 2, lowering energy consumption, and reducing heat generation. In the illustrated embodiment, the Z-axis balancing elastic member is a Z-axis balancing spring 11.

[0062] In a specific embodiment, as shown in FIG1 , two Z-axis balance springs 11 are provided, and the two Z-axis balance springs 11 are located on opposite sides of the central axis of the main shaft 5 along the X-axis direction.

[0063] By providing two Z-axis balancing springs 11 and arranging the two Z-axis balancing springs 11 axially symmetrically, the load on the linear motor 2 can be better reduced, energy consumption can be lowered, and heat generation can be reduced.

[0064] In one embodiment, as shown in FIG3 , the main shaft structure further includes a sleeve clamp 8 , which is fixedly connected to the base plate 1 , and the shaft sleeve 7 is mounted on the sleeve clamp 8 and can move relative to the sleeve clamp 8 in a horizontal direction.

[0065] The fine-tuning assembly 12 is connected between the shaft sleeve 7 and the sleeve clamp 8. The fine-tuning assembly 12 is used to drive the shaft sleeve 7 to move horizontally relative to the sleeve clamp 8 to adjust the relative position of the center of the shaft sleeve 7 and the center of the sleeve clamp 8, that is, to adjust the relative position between the shaft sleeve 7 and the base plate 1 horizontally.

[0066] In one embodiment, as shown in FIG3 , the fine-tuning assembly 12 includes an X-direction fine-tuning module 121 and a Y-direction fine-tuning module 122. The X-direction fine-tuning module 121 is connected between the sleeve 7 and the collet 8 along the X-axis direction and is used to adjust the position of the sleeve 7 relative to the collet 8 along the X-axis direction. The Y-direction fine-tuning module 122 is connected between the sleeve 7 and the collet 8 along the Y-axis direction and is used to adjust the position of the sleeve 7 relative to the collet 8 along the Y-axis direction.

[0067] By coordinating and adjusting the X-direction fine-tuning module 121 and the Y-direction fine-tuning module 122 , the horizontal position of the shaft sleeve 7 is finally adjusted.

[0068] In one embodiment, as shown in FIG1 , in order to achieve sliding of the spindle structure along the X-axis direction, a slider 13 may be installed on the base plate 1 , and the slider 13 is connected to a slide rail so as to slide along the X-axis direction, thereby achieving left and right movement of the spindle structure along the X-axis direction.

[0069] The method for adjusting the spindle structure provided in the embodiment of the present application is used for the spindle structure provided in the above embodiment, comprising the steps of:

[0070] (1) The locking member 6 is placed in a relaxed state so that the boom 3 and the gland 4 can move freely relative to each other in the horizontal direction.

[0071] (2) The shaft sleeve 7 is driven to move horizontally relative to the base plate 1 by the fine-tuning assembly 12 to adjust the position of the shaft sleeve 7 relative to the base plate 1 horizontally.

[0072] (3) Move the main shaft 5 up and down along the Z axis, and drive the pressure cover 4 to move horizontally relative to the suspension rod 3 through the main shaft 5, so that there is no contact between the main shaft 5 and the sleeve 7.

[0073] (4) Switch the locking member 6 to the locking state so that the lower end of the suspension rod 3 is pressed and limited between the pressure cover 4 and the main shaft 5 along the Z-axis direction.

[0074] The adjustment method of the main shaft structure provided in the embodiment of the present application first puts the locking member 6 in a relaxed state, and then adjusts the position of the sleeve 7 relative to the base plate 1, which can avoid friction or collision between the main shaft 5 and the sleeve 7, and prevent the main shaft 5 from being scratched. Afterwards, the main shaft 5 can be manually moved up and down, and the position of the main shaft 5 in the horizontal direction can be adjusted to adjust the movement between the main shaft 5 and the sleeve 7 to be contactless. In the process of adjusting the position of the sleeve 7 and moving the main shaft 5 up and down, since the boom 3 and the pressure cover 4 can move relatively freely in the horizontal direction, the main shaft 5 can drive the pressure cover 4 to move in the horizontal direction relative to the boom 3, further avoiding friction or collision between the main shaft 5 and the sleeve 7, and preventing the main shaft 5 from being scratched.

[0075] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A spindle structure, characterized in that: It includes a base plate, a linear motor, a suspension rod, a gland, a spindle, a locking member, a sleeve and a fine-tuning assembly, wherein the linear motor includes a mover and a stator, wherein the mover is fixed to the base plate, and the stator can slide relative to the mover and the base plate along the Z-axis direction; The fine adjustment component is arranged on a side of the base plate close to the main shaft, and is used to drive the sleeve to move relative to the base plate in a horizontal direction. The sleeve is provided with a guide hole, and the lower end of the main shaft passes through the guide hole, and a radial air gap is formed between the main shaft and the sleeve; The locking member is connected between the upper end of the main shaft and the gland, and a Z-direction limiting space is formed between the gland and the main shaft; the lower end of the suspension rod is arranged in the Z-direction limiting space, and the upper end of the suspension rod is connected to the stator; The locking piece has a locking state and a relaxed state; in the locking state, the lower end of the suspension rod is clamped and limited along the Z-axis direction between the pressure cover and the main shaft; in the relaxed state, the clamping limit of the lower end of the suspension rod is released, and the pressure cover can move relative to the suspension rod along the horizontal direction.

2. The spindle structure according to claim 1, characterized in that: The gland is provided with a through hole, and the upper end of the suspension rod passes through the through hole and is connected to the stator.

3. The spindle structure according to claim 1, characterized in that: The locking member comprises a locking screw, and the locking screw passes through the gland along the Z-axis direction and is threadedly connected to the spindle.

4. The spindle structure according to claim 1, characterized in that: The spindle structure also includes a Z-axis motor fixing plate, which is slidably connected to the bottom plate along the Z-axis direction, and the stator is connected to the Z-axis motor fixing plate; when the stator is powered on, the stator and the Z-axis motor fixing plate move synchronously along the Z-axis direction; The upper end of the suspension rod is connected to the Z-axis motor fixing plate.

5. The spindle structure according to claim 4, characterized in that: The spindle structure further includes a Z-axis balancing elastic member, and the Z-axis balancing elastic member is connected between the bottom plate and the Z-axis motor fixing plate along the Z-axis direction.

6. The spindle structure according to claim 5, characterized in that: Two Z-axis balancing elastic members are provided, the horizontal direction includes the X-axis direction, and the two Z-axis balancing elastic members are respectively located on opposite sides of the central axis of the main shaft along the X-axis direction.

7. The spindle structure according to claim 6, characterized in that: The spindle structure also includes a sliding block, which is mounted on the bottom plate and can be slidably connected to a sliding rail along the X-axis direction.

8. The spindle structure according to claim 5, characterized in that: The Z-axis balancing elastic member is a Z-axis balancing spring.

9. The spindle structure according to claim 1, characterized in that: The shaft sleeve is an air-floating sleeve.

10. The spindle structure according to claim 1, characterized in that: The spindle structure further comprises a sleeve clamp, the sleeve clamp is fixedly connected to the bottom plate, the shaft sleeve is mounted on the sleeve clamp and can move relative to the sleeve clamp along the horizontal direction; The fine-tuning assembly is connected between the shaft sleeve and the sleeve clamp, and is used to drive the shaft sleeve to move relative to the sleeve clamp along the horizontal direction.

11. The spindle structure according to claim 10, characterized in that: The fine-tuning assembly includes an X-direction fine-tuning module and a Y-direction fine-tuning module. The X-direction fine-tuning module is connected between the shaft sleeve and the sleeve clamp along the X-axis direction, and the Y-direction fine-tuning module is connected between the shaft sleeve and the sleeve clamp along the Y-axis direction.

12. The spindle structure according to claim 1, characterized in that: The mover includes a magnet, and the stator includes a coil.

13. The spindle structure according to claim 1, characterized in that: The suspension rod comprises a limiting portion and a main body, the limiting portion is accommodated in the Z-direction limiting space, and the main body is connected between the stator and the limiting portion.

14. The spindle structure according to claim 13, characterized in that: The pressure cover is provided with a guide hole, and the main body passes through the guide hole and is connected between the limiting part and the stator.

15. The spindle structure according to claim 14, characterized in that: A receiving groove is also provided on the side of the gland facing the main shaft, the receiving groove is communicated with the guide hole, the limiting portion is fully or at least partially accommodated in the receiving groove, and the limiting portion is pressed between the gland and the main shaft along the axial direction of the main shaft.

16. The spindle structure according to claim 15, characterized in that: The central axis of the accommodating groove is collinear with the central axis of the guiding hole.

17. The spindle structure according to claim 15, characterized in that: Along the radial direction of the limiting portion, a first gap is formed between the groove wall of the accommodating groove and the limiting portion, and a second gap is formed between the hole wall of the guide hole and the suspension rod.

18. The spindle structure according to claim 13, characterized in that: Along a direction perpendicular to the central axis of the suspension rod, the cross-section of the main body and the cross-section of the limiting portion are both circular, and the cross-section radius of the main body is smaller than the cross-section radius of the limiting portion.

19. The spindle structure according to claim 1, characterized in that: The main shaft structure also includes an extension rod, which is connected between the upper end of the suspension rod and the stator.

20. A method for adjusting a main shaft structure, used for the main shaft structure according to any one of claims 1 to 19, characterized in that: include: The locking member is placed in a relaxed state so that the suspension rod and the gland can move freely relative to each other in the horizontal direction; The shaft sleeve is driven to move relative to the bottom plate along the horizontal direction by the fine adjustment component, so as to adjust the position of the shaft sleeve relative to the bottom plate along the horizontal direction; Move the spindle up and down along the Z-axis direction, and drive the gland to move relative to the suspension rod along the horizontal direction through the spindle, so that there is no contact movement between the spindle and the sleeve; The locking member is switched to a locking state so that the lower end of the suspension rod is pressed and limited between the pressure cover and the main shaft along the Z-axis direction.

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