Valve and fluid control device

Abstract

A valve (1) is provided with a housing (10) and a valve membrane (30). The housing (10) is provided with a first housing member (11) and a second housing member (12). The first housing member (11) is provided with: a first end member (111) comprising a first surface (F1111) and a second surface (F1112); and a ring-shaped first side wall member (112) that directly or indirectly connects to the first end member (111) and comprises a third surface (F1122) on the side opposite to the side connected to a portion of the second surface (F1112). The second housing member (12) is provided with: a second end member (121) comprising a fourth surface (F2111) and a fifth surface (F2112) that faces a portion of the second surface (F1112); and a ring-shaped second side wall member (122) that directly or indirectly connects to the second end member (121) and comprises a sixth surface (F2121), which faces or joins to a portion of the fifth surface (F2112), and a seventh surface (F2122), which faces or joins to a portion of the third surface (F1122) of the first side wall member (112). The first end member (111) is provided with: a plurality of first ventilation holes (21) that cause the first surface (F1111) and the second surface (F1112) to communicate; and a first valve seat (19) that connects to the second surface (F1112) and is disposed inside the ring of the first side wall member (112) in a plan view of the second surface (F1112). The first valve seat (19) is provided with a first top surface (F19). The first top surface (F19) is positioned closer to the fifth surface (F2112) side than the second surface (F1112) in the thickness direction of the first housing member (11). The second end member (121) is provided with a second ventilation hole (22) that causes the fourth surface (F2111) and the fifth surface (F2112) to communicate. The second side wall member (122) is provided with: a third ventilation hole (23) that communicates with the seventh surface (F2122); and a second valve seat (29) that is disposed between the third ventilation hole (23) and an inner surface (F220) of the ring of the second side wall member (122) in a front view of the fourth surface (F2111), and is provided with a second top surface (F29) on the seventh surface (F2122) side. The valve membrane (30) is fixed to the housing (10) in a state in which at least a portion thereof is deformable inside the ring of the first side wall member (112) or inside the ring of the second side wall member (122), and is provided with a first portion (31) overlapping the first valve seat (19) and a second portion (32) overlapping the second valve seat (29) when viewed in the height direction in which the first housing member (11) and the second housing member (12) are aligned. The valve membrane (30) and the first valve seat (19) constitute a check valve, and the valve membrane (30) and the second valve seat (29) constitute an exhaust valve. When viewed in the height direction, the exhaust valve is disposed at a position surrounding the check valve.

Description

Valves and Fluid Control Devices

[0001] The present invention relates to a valve for rectifying a fluid such as a gas, and to a fluid control device that combines this valve with a pump.

[0002] Patent Document 1 describes a fluid control valve. The fluid control valve in Patent Document 1 includes an upper housing, a lower housing, and a valve membrane. The valve membrane is sandwiched between the upper and lower housings and divides the space surrounded by the upper and lower housings into an upper housing side and a lower housing side.

[0003] The space on the lower housing side is in communication with the pump, and the space on the upper housing side is in communication with the cuff through the cuff hole and with the outside of the upper housing through the exhaust hole.

[0004] Japanese Patent Application Laid-Open No. 2020-153404

[0005] However, in a conventional fluid control valve (valve) such as that shown in Patent Document 1, when the pump stops and the space on the lower housing side drops to atmospheric pressure, a pressure difference occurs between the space on the lower housing side and the space on the upper housing side.

[0006] This pressure difference is applied to the valve leaflets, which can be damaged by the pressure difference.

[0007] Therefore, an object of the present invention is to suppress the pressure difference that occurs when the operating state of the valve is switched, thereby suppressing damage to the valve membrane.

[0008] A valve according to one embodiment of the present invention includes a housing and a valve membrane. The housing includes a first housing member and a second housing member. The first housing member includes a first end member having a first surface and a second surface, and a ring-shaped first sidewall member connected directly or indirectly to the first end member and having a third surface opposite the side connected to a portion of the second surface. The second housing member includes a second end member having a fourth surface and a fifth surface facing a portion of the second surface, and a ring-shaped second sidewall member connected directly or indirectly to the second end member and having a sixth surface facing or joining a portion of the fifth surface and a seventh surface facing or joining a portion of the third surface of the first sidewall member.

[0009] The first end member includes a plurality of first air vent holes communicating between the first surface and the second surface, and a first valve seat connected to the second surface and disposed within the ring of the first sidewall member in a plan view of the second surface. The first valve seat includes a first top surface. The first top surface is located closer to the fifth surface than the second surface in the thickness direction of the first housing member. The second end member includes a second air vent hole communicating between the fourth surface and the fifth surface. The second sidewall member includes an exhaust hole communicating with the seventh surface, and a second valve seat disposed between the exhaust holes and an inner surface of the ring of the second sidewall member in a front view of the fourth surface, and having a second top surface on the seventh surface side.

[0010] The valve membrane is fixed to the housing in a state in which at least a portion thereof is deformable within the annulus of the first side wall member or the annulus of the second side wall member, and has a first portion overlapping the first valve seat and a second portion overlapping the second valve seat when viewed in the height direction in which the first housing member and the second housing member are aligned. The valve membrane and the first valve seat form a check valve, and the valve membrane and the second valve seat form an exhaust valve. When viewed in the height direction, the exhaust valve is disposed in a position surrounding the check valve.

[0011] In this configuration, when viewed in the height direction of the valve, the exhaust valve, which includes an exhaust hole that communicates with the outside of the housing, overlaps near the outer circumferential edge of the valve membrane. Because the exhaust hole communicates with the outside of the housing, the pressure at the exhaust hole is approximately atmospheric, and when the pressure on the first vent hole side drops to atmospheric pressure, the pressure difference between the two sides of the valve membrane (the first vent hole side and the exhaust hole side) becomes small.

[0012] According to this invention, it is possible to suppress the pressure difference that occurs when the operating state of the valve is switched, and to suppress damage to the valve membrane.

[0013] FIG. 1 is a side cross-sectional view showing the configuration of a valve according to a first embodiment. FIG. 2 is an exploded perspective view of the valve according to the first embodiment. FIG. 3 is an exploded perspective view of the valve according to the first embodiment. FIG. 4(A) is a view showing a state before the valve membrane is sandwiched between the first housing member and the second housing member, and FIG. 4(B) is a view showing a state in which the valve membrane is sandwiched between the first housing member and the second housing member. FIGS. 5(A) and 5(B) are side cross-sectional views showing the configuration of the valve in an operating state. FIG. 6 is a side cross-sectional view showing the configuration of a valve according to a second embodiment. FIG. 7 is an exploded perspective view of the valve according to the second embodiment. FIG. 8(A) is a side cross-sectional view showing the configuration of a valve according to a third embodiment, and FIG. 8(B) is a side cross-sectional view showing another configuration of the valve according to the third embodiment. FIG. 9 is an exploded perspective view of the valve according to the third embodiment. FIG. 10 is an exploded perspective view of the valve according to the third embodiment. FIG. 11 is an exploded perspective view of the valve according to the fourth embodiment. FIG. 12 is an exploded perspective view of the valve according to the fourth embodiment. FIG. 13 is a side cross-sectional view showing the configuration of a valve according to a fifth embodiment. FIG. 14 is an exploded perspective view of the valve according to the fifth embodiment. FIG. 15 is an exploded perspective view of the configuration of a valve according to a sixth embodiment. FIG. 16 is an exploded perspective view of the configuration of a valve according to the sixth embodiment. FIG. 17 is an exploded perspective view of the configuration of a valve according to a seventh embodiment. FIG. 18 is an exploded perspective view of the configuration of a valve according to the seventh embodiment. FIG. 19(A) is a plan view of a second housing member, and FIG. 19(B) is a cross-sectional view showing the A-A cross section of FIG. 19(A). FIG. 20(A) is a plan view of the second housing member, and FIG. 20(B) is a cross-sectional view showing the B-B cross section of FIG. 20(A). FIG. 21(A) is a plan view of the second housing member, and FIG. 21(B) is a cross-sectional view showing the C-C cross section of FIG. 21(A). FIGS. 22(A) and 22(B) are cross-sectional views of a valve according to an eighth embodiment. Fig. 23 is an exploded perspective view of the configuration of a valve according to a ninth embodiment. Fig. 24 is an exploded perspective view of the configuration of a valve according to the ninth embodiment. Fig. 25 is a side cross-sectional view showing the configuration of a valve according to the ninth embodiment. Fig. 26 is a side cross-sectional view showing the configuration of a fluid control device according to a tenth embodiment.Fig. 27 is a side cross-sectional view showing the configuration of a fluid control device with a cuff according to a tenth embodiment. Fig. 28 is an exploded perspective view of the fluid control device according to the tenth embodiment. Fig. 29 is an exploded perspective view of the fluid control device according to an eleventh embodiment. Figs. 30(A) and 30(B) are side cross-sectional views showing derivative examples of the shape of the cuff.

[0014] [First embodiment] A valve according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a side cross-sectional view showing the configuration of a valve according to the first embodiment. Figs. 2 and 3 are exploded perspective views of the valve according to the first embodiment. Fig. 2 is an exploded perspective view seen from the second housing member side, and Fig. 3 is an exploded perspective view seen from the first housing member side.

[0015] 1, 2, and 3, the valve 1 comprises a housing 10 and a valve membrane 30. The housing 10 comprises a first housing member 11 and a second housing member 12. The first housing member 11 and the second housing member 12 are arranged side by side in the height direction of the valve 1 and the housing 10. The first housing member 11 and the second housing member 12 have the configuration described below, so that the housing 10 has an internal space surrounded by the first housing member 11 and the second housing member 12. The valve membrane 30 is arranged in the internal space.

[0016] The first housing member 11 has a circular three-dimensional shape when viewed in the height direction. The first housing member 11 includes a first space 210, a plurality of first air vents 21, a first valve seat 19, and a recess 1110. The recess 1110 corresponds to the "first member recess" of the present invention.

[0017] More specifically, the first housing member 11 includes a first end member 111 and a first side wall member 112. The first end member 111 and the first side wall member 112 are integrally formed.

[0018] The first end member 111 has a circular plate shape when viewed in the height direction. The first end member 111 has a first surface F1111 and a second surface F1112. The first side wall member 112 has a circular annular shape when viewed in the height direction. The first side wall member 112 is connected to the second surface F1112 and has a third surface F1122 on the opposite side to this connected surface. The first housing member 11, in which the first end member 111 and the first side wall member 112 are integrally formed, has an outer surface F1113.

[0019] With this configuration, the space within the ring of the first side wall member 112 becomes the first space 210 of the first housing member 11 .

[0020] The first space 210 is circular when viewed in the height direction and is formed by a recess recessed from the third surface F1122, with the second surface F1112 serving as the bottom surface. The first space 210 is open to the third surface F1122. When the first housing member 11 is viewed in the height direction, the center of the first space 210 is the same as or approximately the same as the center of the first housing member 11.

[0021] The first end member 111 has a plurality of first air vents 21. The plurality of first air vents 21 penetrate between the first surface F1111 and the second surface F1112. The plurality of first air vents 21 communicate with the first space 210. The plurality of first air vents 21 have an oval shape when viewed in the height direction.

[0022] The plurality of first air vents 21 are arranged radially from the center of the first housing member 11 when viewed in the height direction of the first housing member 11 .

[0023] The recess 1110 has a shape recessed from the third surface F1122. The recess 1110 is annular when viewed in the height direction and communicates with the outer peripheral edge of the first space 210. The depth of the recess 1110 is less than the thickness of the valve membrane 30. Note that when the valve membrane 30 is fixed to the bottom surface of the recess 1110 with an adhesive or the like, the depth of the recess 1110 can be set taking into account the thickness of the adhesive.

[0024] The first valve seat 19 is cylindrical. The first valve seat 19 has a shape that protrudes from the second surface F1112 toward the third surface F1122. The first valve seat 19 is disposed within the first space 210. The first valve seat 19 has a circular first top surface F19 at the tip that protrudes from the second surface F1112 (the bottom surface that forms the first space 210). The first top surface F19 is located at approximately the same position as the third surface F1122 in the height direction of the housing 10.

[0025] The second housing member 12 has a circular three-dimensional shape when viewed in the height direction. The second housing member 12 includes a second space 220, a second air vent 22, a third air vent 23, and a second valve seat 29. The third air vent 23 corresponds to the "exhaust hole" of the present invention.

[0026] More specifically, the second housing member 12 includes a second end member 121 and a second side wall member 122. The second end member 121 and the second side wall member 122 are formed as separate bodies.

[0027] The second end member 121 has a circular plate shape when viewed in the height direction. The second end member 121 has a fourth surface F2111 and a fifth surface F2112. The second side wall member 122 has a circular ring shape when viewed in the height direction. The second side wall member 212 has a sixth surface F2121 and a seventh surface F2122. The sixth surface F2121 is connected to the fifth surface F2112. The sixth surface F2121 and the fifth surface F2112 may be connected (joined) by direct abutment, or may be indirectly connected (joined) via another member. The second housing member 12 has an outer surface F2123 and an inner surface F220 facing the space within the ring.

[0028] With this configuration, the space within the ring of the second side wall member 122 becomes the second space 220 of the second housing member 12 .

[0029] The second space 220 has a circular shape when viewed in the height direction and is open to the seventh face F2122. When the second housing member 12 is viewed in the height direction, the center of the second space 220 is the same as or approximately the same as the center of the second housing member 12.

[0030] The diameter of the second space 220 as viewed in the height direction (the diameter of the circle formed by the inner surface F220 of the second side wall member 122) is smaller than the diameter of the first space 210 as viewed in the height direction (the diameter of the circle formed by the inner surface of the first side wall member 112). The diameter of the second space 220 as viewed in the height direction is larger than the diameter of the first valve seat 19 (first top surface F19).

[0031] The second end member 121 has a second air vent 22. The second air vent 22 penetrates between the fourth surface F2111 and the fifth surface F2112. The second air vent 22 communicates with the second space 220. The second air vent 22 has a circular cylindrical shape when viewed in the height direction.

[0032] The diameter of the second air vent 22 when viewed in the height direction is smaller than the diameter of the second space 220 when viewed in the height direction. The second air vent 22 is disposed at a position overlapping with the center of the second space 220 when viewed in the height direction of the second housing member 12.

[0033] The third air vents 23 are arranged outside the inner surface F220 when viewed in the height direction of the second housing member 12. Each of the third air vents 23 includes a vertical hole 231 and a horizontal hole 232.

[0034] The vertical hole 231 is a hole extending in the height direction of the housing 10. The vertical hole 231 is formed a predetermined distance outward from the inner surface F220 that forms the second space 220. One end of the vertical hole 231 opens to the seventh surface F2122. The horizontal hole 232 is a hole extending in a direction perpendicular to the height direction of the housing 10. The horizontal hole 232 is formed by a groove recessed from the sixth surface F2121 of the second side wall member 122 and the fifth surface F2112 of the second end member 121 that covers the groove. One end of the horizontal hole 232 communicates with the other end of the vertical hole 231. The horizontal hole 232 opens to the outer surface F2123. With this configuration, the multiple third air vents 23 communicate between the seventh surface F2122 and the outer surface F2123 of the second housing member 12.

[0035] The second valve seat 29 has an annular shape when viewed in the height direction. When the second housing member 12 is viewed in the height direction, the second valve seat 29 is a three-dimensional portion between the inner surface F220 that forms the second space 220 and a circle circumscribing the multiple third air vent holes 23. With this structure, the second valve seat 29 has a second top surface F29 at approximately the same position as the seventh surface F2122 of the housing 10 in the height direction.

[0036] The first housing member 11 and the second housing member 12 are connected such that the third surface F1122 and the seventh surface F2122 face each other. The third surface F1122 and the seventh surface F2122 may be directly connected or indirectly connected via another member. This forms the housing 10. In this case, when viewing the housing 10 in the height direction, the opening of the third air vent 23 on the seventh surface F2122 side and the first air vent 21 overlap.

[0037] The first space 210 and the second space 220 communicate with each other and form the internal space of the valve 1. The first space 210 also communicates with the plurality of third vent holes 23. In this case, the openings of the vertical holes 231 of the plurality of third vent holes 23 on the seventh face F2122 side communicate with the first space 210 at a position closer to the outer circumferential edge (the inner surface of the first side wall member 112) than to the center.

[0038] The valve membrane 30 is circular in plan view. The valve membrane 30 has a through-hole 300 at its center when viewed in the height direction. The valve membrane 30 is made of a metal membrane, a soft polymer membrane, or the like that is deformable by airflow. The valve membrane 30 has a first portion 31, a second portion 32, and an outer end portion 330.

[0039] The outer end 330 of the valve membrane 30 has an annular shape and is housed in the recess 1110. The outer end 330 of the valve membrane 30 is sandwiched between the bottom surface of the recess 1110 and the seventh surface F2122 of the second side wall member 122 of the second housing member 12. As a result, the valve membrane 30 is fixed to the housing 10 in a state in which the center side relative to the outer end 330 is deformable. In this case, the valve membrane 30 is positioned so as to divide the internal space of the housing 10 into the first air vent 21 side and the second air vent 22 side.

[0040] The first portion 31 is a circular portion that includes the center when viewed in the height direction and includes the formation area of ​​the through-hole 300. The second portion 32 is an annular portion that is located closer to the outer end portion 330 than the first portion 31. When the valve membrane 30 is viewed in the height direction, the second portion 32 is spaced apart from the first portion 31 and has a shape that surrounds the first portion 31.

[0041] When viewed in the height direction of the housing 10, the first portion 31 overlaps the first valve seat 19. When viewed in the height direction of the housing 10, the second portion 32 overlaps the second valve seat 29.

[0042] The valve membrane 30 has a shape in which the first portion 31 protrudes more toward the second air vent 22 than the second portion 32 in the height direction of the housing 10. The valve membrane 30 has a shape in which the second portion 32 is recessed more toward the first air vent 21 than the outer end portion (the portion accommodated in the recess 1110) in the height direction of the housing 10. In other words, the valve membrane 30 has a curved shape when viewed from the side orthogonal to the height direction of the housing 10, so that the second portion 32 is closer to the first surface F1111 than the first portion 31.

[0043] Such a shape of the valve membrane 30 can be realized, for example, during assembly of the valve 1. Fig. 4(A) is a diagram showing the state before the valve membrane is sandwiched between the first and second housing members, and Fig. 4(B) is a diagram showing the state after the valve membrane has been sandwiched between the first and second housing members.

[0044] As shown in FIG. 4A , the depth D1110 of the recess 1110 is narrower than the thickness D30 of the valve membrane 30 (at least the thickness of the outer end 330). In this relationship, when the valve membrane 30 is accommodated in the recess 1110 and sandwiched between the first housing member 11 and the second housing member 12, the outer end 330 is crushed by the first housing member 11 and the second housing member 12. As a result, as shown in FIG. 4B , the thickness of the outer end 330 of the valve membrane 30 decreases. As a result, the valve membrane 30 is pushed toward the center by an amount equivalent to the reduced volume of the outer end 330. This pushing loosens the portion of the valve membrane 30 that is more inward than the outer end 330.

[0045] On the central side of the recess 1110, the first housing member 11 side is open to the first space 210, and the seventh face F2122 continues on the second housing member 12 side. Therefore, the loosened portion of the valve membrane 30 extends toward the first space 210. Furthermore, because the first portion 31 of the valve membrane 30 is in contact with the valve membrane 30 from the first housing member 11 side, the valve membrane 30 curves such that the second portion 32 bulges toward the first space 210.

[0046] With this configuration, when no gas is flowing in through the first vent hole 21 (stopped state (included in the second state)), the first portion 31 of the valve membrane 30 contacts the first valve seat 19, and the second portion 32 is separated from the second valve seat 29. This allows the valve 1 to more reliably achieve communication between the second vent hole 22 and the third vent hole 23 when no gas is flowing in through the first vent hole 21. In other words, when the valve 1 is in a stopped state, the valve 1 can more reliably achieve communication between the second vent hole 22 and the third vent hole 23.

[0047] The valve 1 configured as described above operates as follows. Figures 5(A) and 5(B) are side cross-sectional views showing the configuration of the valve when it is operating. Figure 5(A) shows the state of the valve membrane in a first state in which gas is flowing in through the first vent, and Figure 5(B) shows the state of the valve membrane in another type of second state in which gas is flowing in through the second vent.

[0048] (First State) When gas flows in through the first air vent 21 by a pump or the like (described later), the gas (airflow) passes through the first space 210 and hits the valve membrane 30. The valve membrane 30 is pushed toward the second space 220 by this gas (airflow).

[0049] This causes the valve membrane 30 to move away from the first valve seat 19. Therefore, the first space 210 and the second space 220 are connected to each other. As a result, the first air vent 21 is connected to the second air vent 22 through the first space 210 and the second space 220. In other words, the valve 1 can discharge gas that has flowed into the first air vent 21 from outside the first surface F1111 to outside the fourth surface F2111.

[0050] At this time, the valve membrane 30 is pushed toward the second housing member 12 by the gas that has flowed into the first space 210. As a result, the second portion 32 of the valve membrane 30 abuts against the second top surface F29 of the second valve seat 29.

[0051] Therefore, the second space 220 and the third air vent 23 are not in communication with each other. As a result, the valve 1 can prevent the gas that has flowed from the first space 210 into the second space 220 from leaking into the third air vent 23. Therefore, the valve 1 can prevent a decrease in the efficiency of transporting the gas from the outside of the first surface F1111 to the outside of the fourth surface F2111.

[0052] (Exhaust state included in the second state) When gas flows in through the second air vent 22 due to exhaust from the cuff, which will be described later, the gas (airflow) hits the valve membrane 30 through the second space 220. The valve membrane 30 is pushed toward the first space 210 by this gas (airflow).

[0053] As a result, the second portion 32 of the valve membrane 30 moves away from the second valve seat 29 and into the first space 210. Therefore, the second space 220 and the third air vent 23 are connected to each other. As a result, the second air vent 22 is connected to the third air vent 23 through the second space 220 (including part of the first space 210). In other words, the valve 1 can discharge gas that has flowed into the second air vent 22 from outside the fourth surface F2111 to outside the outer surface F2123.

[0054] At this time, the valve membrane 30 is pushed toward the first housing member 11 by the gas that has flowed into the second space 220. As a result, the first portion 31 of the valve membrane 30 abuts against the first top surface F19 of the first valve seat 19.

[0055] Therefore, the second space 220 and the first space 210 are not in communication with each other. As a result, the valve 1 can prevent the gas that has flowed into the second space 220 from the second air vent 22 from leaking into the first air vent 21. Therefore, the valve 1 can prevent a decrease in the efficiency of transporting gas from the outside of the fourth surface F2111 to the outside of the outer surface F2123.

[0056] In this way, the valve membrane 30 and the first valve seat 19 form a check valve, and the valve membrane 30 and the second valve seat 29 form an exhaust valve.

[0057] As described above, the valve 1 can more reliably communicate the second vent hole 22 and the third vent hole 23 (exhaust hole) during steady state operation when no gas is being supplied from the first vent hole 21.

[0058] Furthermore, the valve 1 can more reliably switch between a first state in which the first air vent 21 and the second air vent 22 are connected to each other, and a second state in which the second air vent 22 and the third air vent 23 (exhaust hole) are connected to each other.

[0059] Furthermore, when viewing the housing 10 in the height direction, the first air vent 21 and the third air vent 23 overlap. This allows the valve membrane 30 to be displaced more toward the first surface F1111 during exhaust. This increases the distance between the valve membrane 30 and the second valve seat 29 during exhaust. As a result, the valve 1 widens the gas flow path during exhaust, allowing for faster exhaust.

[0060] Furthermore, the area near the outer circumferential edge of the valve membrane 30 is in communication with the outside (atmosphere) of the housing 10 via the third vent 23. Therefore, the third vent 23 is at approximately atmospheric pressure. As a result, when the inflow of gas from the first vent 21 stops and the pressure in the first vent 21 and first space 210 drops to the outside pressure (atmospheric pressure), the pressure difference on both sides of the valve membrane 30 is small, and the area near the outer circumferential edge is not pressurized. Therefore, the valve 1 can suppress the pressure difference across the valve membrane 30 caused by the change between these two states, and suppress damage to the valve membrane 30.

[0061] Furthermore, when viewed in the height direction of the valve 1, the second valve seat 29 surrounds the first valve seat 19. In other words, when viewed in the height direction of the valve 1, the exhaust valve is disposed in a position surrounding the check valve. When viewed in the height direction of the valve 1, the central axis of the valve membrane 30 substantially coincides with the center of the first valve seat 19.

[0062] As a result, in the exhaust state, gas flowing from the second vent hole 22 to the third vent hole 23 flows evenly along the central axis of the valve membrane 30. Therefore, the valve 1 suppresses leakage from the second vent hole 22 to the first vent hole 21, improving the non-return performance and ensuring reliable exhaust.

[0063] Furthermore, in the valve 1, the openings of the multiple third air vents 23 on the fourth surface F212 side (portions communicating with the first space 210) are arranged on concentric circles centered on the central axis of the valve membrane 30 when viewed in the height direction of the valve 1. Furthermore, the central axis of the valve membrane 30 passes through the midpoint connecting the openings of the multiple third air vents 23 on the fourth surface F212 side (portions communicating with the first space 210). In other words, when viewed in the height direction, the openings of the multiple third air vents 23 on the fourth surface F212 side (portions communicating with the first space 210) are arranged in symmetrical positions with respect to the check valve.

[0064] As a result, the stress applied to the valve membrane 30 by the gas flowing through the multiple third air vents 23 is substantially uniform with respect to the central axis. Therefore, the stress on the valve membrane 30 is less likely to be unevenly distributed, and the valve 1 can achieve stable exhaust and prevent localized damage to the valve membrane 30.

[0065] In the above-described configuration, the number of third air vents 23 is two, but the number is not limited to two. When the number of third air vents 23 is three or more, it is more preferable that the multiple third air vents 23 are arranged at equal angular intervals on concentric circles centered on the central axis of the valve membrane 30.

[0066] The construction of such a valve 1 can be detected, for example, by the fact that the thickness D30N (see FIG. 4B ) of the outer end 330 sandwiched between the first housing member 11 and the second housing member 12 is thinner than the thickness of the valve membrane 30 near the through-hole 300 (first portion 31). Alternatively, the depth D1110 of the recess 1110 may be used instead of the thickness D30N of the outer end 330. The height of the recess 1110 can be measured, for example, by X-ray transmission observation or by observing the cross section after cutting.

[0067] [Second embodiment] A valve according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 6 is a side cross-sectional view showing the configuration of a valve according to the second embodiment. Fig. 7 is an exploded perspective view of the valve according to the second embodiment. Fig. 7 is an exploded perspective view seen from the second housing member side.

[0068] 6 and 7, the valve 1A according to the second embodiment differs from the valve 1 according to the first embodiment in the structure for fixing the valve membrane 30. The other configuration of the valve 1A according to the second embodiment is the same as that of the valve 1 according to the first embodiment, and a description of similar parts will be omitted. Furthermore, description of the same effects and operational advantages obtained by the valve 1A according to the second embodiment as those obtained by the valve 1 according to the first embodiment will be omitted.

[0069] The first housing member 11A has a plurality of protrusions 119. The protrusions 119 are hemispherical in shape. The protrusions 119 are shaped to protrude in the height direction from the second surface F1112 (the bottom surface forming the first space 210) toward the third surface F1122. The protrusions 119 correspond to the "second protrusions" of the present invention.

[0070] The multiple protrusions 119 are arranged near the inner surface of the first housing member 11A that forms the first space 210. Furthermore, when viewing the valve 1A in the height direction, the multiple protrusions 119 are arranged outside the openings of the multiple third air vent holes 23 in the seventh surface F2122. The multiple protrusions 119 are arranged at equal angular intervals on concentric circles centered on the center of the first valve seat 19 (the central axis of the valve membrane 30). In other words, when viewed in the height direction, the multiple protrusions 119 are arranged in an annular shape and are arranged at equal intervals along the extension direction of the annular circle.

[0071] The distance in the height direction between the multiple protrusions 119 and the seventh surface F2122 is narrower than the thickness of the valve membrane 30. Therefore, when the valve membrane 30 is fixed to the housing 10A, the multiple protrusions 119 bite into the valve membrane 30. This makes it difficult for the valve membrane 30 to come off the housing 10A during operation.

[0072] Furthermore, the multiple protrusions 119 are arranged in an annular shape and are spaced at equal intervals along the direction in which the annulus extends, thereby evenly fixing the valve membranes 30 along the outer circumferential edge thereof. This allows the valve 1A to fix the valve membranes 30 more stably.

[0073] [Third Embodiment] A valve according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 8(A) and Fig. 8(B) are side cross-sectional views showing the configuration of a valve according to the third embodiment. Fig. 9 and Fig. 10 are exploded perspective views of the valve according to the third embodiment. Fig. 9 is an exploded perspective view seen from the second housing member side, and Fig. 10 is an exploded perspective view seen from the first housing member side.

[0074] As shown in Figures 8(A), 9, and 10, the valve 1B according to the third embodiment differs from the valve 1 according to the first embodiment in the structure for fixing the valve membrane 30. The other configuration of the valve 1B according to the third embodiment is similar to that of the valve 1 according to the first embodiment, and a description of similar parts will be omitted. Furthermore, description of the same effects and operational advantages obtained by the valve 1B according to the third embodiment as those obtained by the valve 1 according to the first embodiment will be omitted.

[0075] The first housing member 11B includes a protrusion 18. The protrusion 18 is annular when viewed in the height direction of the housing 10B. When viewed in the height direction of the housing 10B, the protrusion 18 is positioned outward from the openings of the multiple third air vents 23 on the seventh face F2122 side. In the height direction of the housing 10B, the protrusion 18 protrudes beyond the third face F1122. The protrusion 18 corresponds to the "first protrusion" of the present invention. A groove 113 having an annular shape when viewed in a plan view is formed on the outside of the protrusion 18.

[0076] The second housing member 12B has a recess 123. The recess 123 is annular when the housing 10B is viewed in the height direction. The recess 123 is recessed from the seventh surface F2122. When the housing 10B is viewed in the height direction, the recess 123 is positioned outside the positions of the openings of the multiple third air vents 23 on the seventh surface F2122 side. The recess 123 corresponds to the "second member-side recess" of the present invention.

[0077] When the housing 10B is viewed in the height direction, the recess 123 and the protrusion 18 overlap, and the recess 123 and the groove 113 at least partially overlap. The distance in the height direction between the bottom surface of the recess 123 (the upper surface of the recess in FIG. 7 ) and the tip of the protrusion 18 is narrower than the thickness of the valve membrane 30.

[0078] The outer peripheral edge of the valve membrane 30 is accommodated in the groove 113. The portion of the valve membrane 30 between the outer peripheral edge and the second portion 32 is sandwiched between the bottom surface of the recess 123 and the protrusion 18. At this time, the protrusion 18 bites into the portion of the valve membrane between the outer peripheral edge and the second portion 32. This makes it difficult for the valve membrane 30 to come off the housing 10B during operation.

[0079] Furthermore, in this configuration, the valve membrane 30 extends obliquely downward from the fixed portion formed by the bottom surface of the recess 123 and the protrusion 18 toward the first space 210. This makes it easier for the valve 1B to maintain a shape in which the second portion 32 of the valve membrane 30 is closer to the first surface F1111 than the first portion 31.

[0080] It is possible to omit the groove 113 from the valve 1B. However, by providing the groove 113, the outer peripheral edge of the valve membrane 30 can be fixed more reliably.

[0081] 8B differs from the valve 1B in that the recess 123 of the second side wall member 122B is omitted and in the height of the protrusion 18X. The other configuration of the valve 1BX is the same as that of the valve 1B, and a description of the same parts will be omitted.

[0082] The housing 10BX of the valve 1BX includes a first housing member 11BX. The first housing member 11BX includes a protrusion 18X. When viewed in the height direction of the valve 1BX, the protrusion 18X is located closer to the outer periphery than the opening of the third air vent 23 of the second housing member 12 on the seventh surface F2122 side, and is positioned so as to overlap the seventh surface F2122. The protrusion 18X has a top surface located closer to the second surface F1112 than the third surface F1122 in the height direction. When viewed in the height direction, the protrusion 18X is annular or partially annular. The distance between the top surface of the protrusion 18X and the seventh surface F2122 is narrower than the thickness of the valve membrane 30.

[0083] The groove 113 is disposed closer to the outer surface F1113 than the protrusion 18X is when viewed in the height direction. The groove 113 has an annular or partially annular shape recessed from the third surface F1122 when viewed in the height direction.

[0084] The outer peripheral edge of the valve membrane 30 is housed in the groove 113. A part of the valve membrane 30 is sandwiched between the seventh surface F2122 and the protrusion 18X.

[0085] [Fourth embodiment] A valve according to a fourth embodiment of the present invention will be described with reference to the drawings. Figures 11 and 12 are exploded perspective views of the valve according to the fourth embodiment. Figure 11 is an exploded perspective view seen from the second housing member side, and Figure 12 is an exploded perspective view seen from the first housing member side.

[0086] 11 and 12 , the valve 1C according to the fourth embodiment differs from the valve 1 according to the first embodiment in the number of auxiliary holes 124. The other configuration of the valve 1C according to the fourth embodiment is similar to that of the valve 1 according to the first embodiment, and a description of similar parts will be omitted. Furthermore, description of the same functions and effects obtained by the valve 1C according to the fourth embodiment as those obtained by the valve 1 according to the first embodiment will be omitted.

[0087] The second housing member 12C has a plurality of auxiliary holes 124. The plurality of auxiliary holes 124 are formed in a region of the second side wall member 122 that corresponds to the second valve seat 29, and have a shape that penetrates the second side wall member 122 in the height direction. In other words, the second valve seat 29 has a plurality of auxiliary holes 124.

[0088] One end of each of the plurality of auxiliary holes 124 communicates with the second space 220 through the hole 1250, and the other end opens to the second top surface F29.

[0089] When viewing the valve 1C in the vertical direction, the multiple auxiliary holes 124 are arranged at intermediate positions in the circumferential direction of a circle whose center point is the center of the second side wall member 122, between the formation positions of the openings of the multiple third air vent holes 23 to the seventh surface F2122.

[0090] For example, when at rest, the valve membrane 30 may be in close contact with the second top surface F29 of the inner wall surface (the side surface of the second valve seat 29) that forms the second space 220. However, by providing the configuration of the valve 1C, a position in the second space 220 close to the second vent hole 22 communicates with the first space 210 side of the second top surface F29 and the third vent hole 23 through the multiple holes 1250 and the multiple auxiliary holes 124.

[0091] This allows the valve 1C to more reliably communicate between the second vent hole 22 and the third vent hole 23 (exhaust hole) during steady state operation when no gas is being supplied from the first vent hole 21.

[0092] The other ends of the multiple auxiliary holes 124 open to the second top surface F29. In this case, when gas flows in through the first air vent 21, the valve membrane 30 abuts against the second top surface F29 of the second valve seat 29. As a result, the multiple auxiliary holes 124 are blocked by the valve membrane 30. Therefore, by providing the multiple auxiliary holes 124, the valve 1C can suppress gas leakage from the first air vent 21 to the third air hole 23.

[0093] [Fifth embodiment] A valve according to a fifth embodiment of the present invention will be described with reference to the drawings. Fig. 13 is a side cross-sectional view showing the configuration of a valve according to the fifth embodiment. Fig. 14 is an exploded perspective view of the valve according to the fifth embodiment. Fig. 14 is an exploded perspective view seen from the first housing member side.

[0094] 13 and 14 , the valve 1D according to the fifth embodiment differs from the valve 1 according to the first embodiment in that it includes a second housing member 12D. The other configuration of the valve 1D according to the fifth embodiment is similar to that of the valve 1 according to the first embodiment, and a description of similar parts will be omitted. Furthermore, description of the same effects and operational advantages obtained by the valve 1D according to the fifth embodiment as those obtained by the valve 1 according to the first embodiment will be omitted.

[0095] The housing 10D of the bulb 1D includes a second housing member 12D. The second housing member 12D is configured by integrally forming the second end member 121 and the second side wall member 122 of the second housing member 12 shown in the first embodiment.

[0096] The second housing member 12D has a protrusion 125 in the second space 220. The protrusion 125 protrudes from the fifth surface F2112 (the bottom surface forming the second space 220) toward the seventh surface F2122. The protrusion 125 is a feature that corresponds to the "third protrusion" of the present invention.

[0097] The protrusion 125 is, for example, a cylinder, and is, for example, formed integrally with another portion of the second housing member 12D.

[0098] By providing such a protrusion 125, when abnormal vibration of the valve membrane 30 is about to occur, the valve membrane 30 comes into contact with the protrusion 125 before coming into contact with the bottom surface (fifth surface F2112) of the second space 220. This allows the valve 1D to suppress abnormal vibration of the valve membrane 30 and reduce noise caused by the abnormal vibration.

[0099] Even when the second end member 121 and the second side wall member 122 are formed separately, the protrusion 125 can be formed on the second end member 121 so that it can be disposed within the second space 220 .

[0100] [Sixth embodiment] A valve according to a sixth embodiment of the present invention will be described with reference to the drawings. Figures 15 and 16 are exploded perspective views of the configuration of the valve according to the sixth embodiment. Figure 15 is an exploded perspective view seen from the second housing member side. Figure 16 is an exploded perspective view seen from the first housing member side.

[0101] 15 and 16 , the valve 1E according to the sixth embodiment differs from the valve 1C according to the fourth embodiment in the number of first vent holes 21 in a first housing member 11E, the number of third vent holes 23 in a second housing member 12E, and the number of pairs of auxiliary holes 124 and holes 1250. The other configuration of the valve 1E is the same as that of the valve 1C, and a description of similar parts will be omitted.

[0102] The first housing member 11E is formed with eight first ventilation holes 21. The eight first ventilation holes 21 are arranged point-symmetrically with respect to the center of the first housing member 11E as viewed in the height direction.

[0103] The second housing member 12E is formed with four third air vents 23 and four sets of auxiliary holes 24 and holes 1250. The four third air vents 23 are arranged symmetrically with respect to a reference point, which is the center of the second housing member 12E when viewed in the height direction. The four sets of auxiliary holes 24 and holes 1250 are arranged symmetrically with respect to a reference point, which is the center of the second housing member 12E when viewed in the height direction. The four third air vents 23 and the four sets of auxiliary holes 24 and holes 1250 are arranged alternately at equal intervals along the circumferential direction of a circle centered on the reference point.

[0104] With this configuration, the valve 1E can achieve the same effects as the valve 1C.

[0105] [Seventh Embodiment] A valve according to a seventh embodiment of the present invention will be described with reference to the drawings. Figs. 17 and 18 are exploded perspective views of the configuration of a valve according to the seventh embodiment. Fig. 17 is an exploded perspective view as viewed from the second housing member side. Fig. 18 is an exploded perspective view as viewed from the first housing member side. Fig. 19(A) is a plan view of the second housing member, and Fig. 19(B) is a cross-sectional view showing the A-A cross section of Fig. 19(A). Fig. 20(A) is a plan view of the second housing member, and Fig. 20(B) is a cross-sectional view showing the B-B cross section of Fig. 20(A). Fig. 21(A) is a plan view of the second housing member, and Fig. 21(B) is a cross-sectional view showing the C-C cross section of Fig. 21(A).

[0106] As shown in Figures 17, 18, 19(A), 19(B), 20(A), 20(B), 21(A), and 21(B), the valve 1F according to the seventh embodiment differs from the valve 1C according to the fourth embodiment in that it includes a second housing member 12F of the housing 10F. Other configurations of the valve 1F are similar to those of the valve 1C, and a description of similar parts will be omitted.

[0107] In the valve 1F, the second housing member 12F includes a second side wall member 122F. The second side wall member 122F includes a plurality of protrusions 126 on an inner surface F220. In the circumferential direction along the inner surface F220 of the second side wall member 122F, the positions of the plurality of protrusions 126 differ from the positions of the plurality of third air vents 23. The plurality of protrusions 126 are, for example, arranged at equal intervals in the circumferential direction of the inner surface F220, and are arranged at intermediate positions between adjacent third air vents 23 in the circumferential direction.

[0108] The plurality of protrusions 126 are disposed flush with the sixth face F2121. The plurality of protrusions 126 are thinner than the second sidewall member 122F.

[0109] The multiple protrusions 126 overlap and contact the fifth surface F2112 of the second end member 121 in a planar manner.

[0110] In this configuration, the portion of the valve 1F where the multiple protrusions 126 and the second end member 121 overlap is thicker than the second end member 121. As a result, the valve 1F has a thick portion around the second air vent 22, and this portion has high rigidity. As a result, the valve 1F can suppress an increase in pressure loss.

[0111] More specifically, this is based on the following principle: When the fourth surface F2111 of the second end member 121 of the valve 1F faces a closed space (for example, the cuff 3 described below), if gas (fluid) continues to flow from the first air vent 21 to the second air vent 22, the pressure in the closed space increases. When the pressure in the closed space increases, pressure is applied to the second end member 121 from the fourth surface F2111 side, causing it to deform. This deformation of the second end member 121 narrows the second space 220.

[0112] If the second space 220 becomes narrower, it will hinder the amount of displacement that the valve membrane 30 can move, which will narrow the flow path formed between the first valve seat 19 and the valve membrane 30, increasing pressure loss.

[0113] However, by providing the configuration of the valve 1F, it is possible to increase the rigidity of the second end member 121. This makes it possible to suppress deformation of the second end member 121 even when pressure is applied from the outside of the valve 1F. Therefore, the valve 1F does not inhibit the amount of displacement of the valve membrane 30, and can suppress an increase in pressure loss.

[0114] By providing the plurality of protrusions 126, the second sidewall member 122F has a plurality of recesses 217F1 and a plurality of recesses 217F2 in an area where the plurality of protrusions 126 are not provided. The plurality of recesses 217F2 have notches CO12.

[0115] As shown in FIGS. 20A and 20B, the recesses 217F1 are arranged at the same positions as the third air holes 23 in the circumferential direction of the inner surface F220.

[0116] By providing multiple recesses 217F1, the multiple protrusions 216 are not present near the multiple first vent holes 21 and the multiple third vent holes 23. As a result, displacement of the valve membrane 30 is not hindered near the multiple first vent holes 21 and the multiple third vent holes 23, and the valve 1F can suppress an increase in pressure loss. In particular, because the valve membrane 30 is a highly flexible member, it can be sufficiently displaced as long as the multiple protrusions 216 are not on the same line as the multiple first vent holes 21 or the multiple third vent holes 23 in a plan view. As a result, the valve 1F can suppress pressure loss.

[0117] 21(A) and 21(B), the recesses 217F2 are arranged at positions in the circumferential direction of the inner surface F220 that are different from the positions of the third air vents 23. By providing the recesses 217F2, the valve 1F can also suppress inhibition of displacement of the valve membrane 30 and suppress pressure loss.

[0118] Additionally, when at rest, the valve membrane 30 may be in close contact with the second top surface F29 on the inner wall surface (the side surface of the second valve seat 29) that forms the second space 220. However, by providing the configuration of the valve 1F, a position in the second space 220 near the second vent hole 22 communicates with the first space 210 side of the second top surface F29 and the third vent hole 23 through the multiple cutouts CO12.

[0119] This allows the valve 1F to more reliably communicate between the second vent hole 22 and the third vent hole 23 (exhaust hole) during steady state operation when no gas is being supplied from the first vent hole 21.

[0120] The other ends of the plurality of cutouts CO12 open to the second top surface F29. In this case, when gas flows in through the first air vent 21, the valve membrane 30 abuts against the second top surface F29 of the second valve seat 29. As a result, the plurality of cutouts CO12 are blocked by the valve membrane 30. Therefore, the valve 1F, which is provided with the plurality of cutouts, can suppress leakage of gas from the first air vent 21 to the third air vent 23.

[0121] Eighth Embodiment A valve according to an eighth embodiment of the present invention will be described with reference to the drawings. Figures 22(A) and 22(B) are cross-sectional views of the valve according to the eighth embodiment.

[0122] 22A differs from the valve 1 according to the first embodiment in that it includes a second housing member 12G1 of the housing 10G1. Other configurations of the valve 1G1 are the same as those of the valve 1, and a description of similar parts will be omitted.

[0123] The second housing member 12G1 includes a second end member 121G. The second end member 121G differs from the second end member 121 according to the first embodiment in that the second end member 121G includes a thick portion 217.

[0124] The thick portion 217 has a shape that protrudes from the fifth surface F2112. The thick portion 217 has a shape that fits into the second space 220 when the second end member 121G is combined with the second side wall member 122, in other words, when the second housing member 12G1 is configured.

[0125] Providing such a thick portion 217 increases the rigidity of the portion of the second end member 121G that contacts the second space 220. This allows the valve 1G1 to suppress deformation of the second end member 121G and suppress an increase in pressure loss due to a change in the shape of the second space 220.

[0126] 22B differs from the valve 1 according to the first embodiment in that it includes a second housing member 12G2 of the housing 10G2. Other configurations of the valve 1G2 are the same as those of the valve 1, and a description of similar parts will be omitted.

[0127] The second housing member 12G2 includes a second side wall member 122G. The second side wall member 122G differs from the second side wall member 122 according to the first embodiment in that the second side wall member 122G includes a thick portion 218.

[0128] The thick portion 218 is configured to have a shape that protrudes from the inner surface F220 toward the second space 220. The thick portion 218 is preferably flush with the sixth surface F2121, but this is not limited as long as it is located close to the sixth surface F2121.

[0129] The rigidity of the second side wall member 122G can be increased by providing such a thick portion 218. As a result, the valve 1G2 can suppress deformation of the second side wall member 122G and suppress an increase in pressure loss due to a change in the shape of the second space 220.

[0130] [Ninth embodiment] A valve according to a ninth embodiment of the present invention will be described with reference to the drawings. Figures 23 and 24 are exploded perspective views of the configuration of a valve according to the ninth embodiment. Figure 23 is an exploded perspective view seen from the second housing member side. Figure 24 is an exploded perspective view seen from the first housing member side. Figure 25 is a side cross-sectional view showing the configuration of a valve according to the ninth embodiment.

[0131] 23, 24, and 25, a valve 1H according to the ninth embodiment differs from the valve 1 according to the first embodiment in that it includes an adhesive tape 40. The other configuration of the valve 1H is the same as that of the valve 1, and a description of similar parts will be omitted.

[0132] The valve 1H includes an adhesive tape 40. The adhesive tape 40 is ring-shaped. The adhesive tape 40 is disposed between the valve membrane 30 and the second housing member 12. The adhesive tape 40 bonds the outer end portion 330 of the valve membrane 30 to the seventh surface F2122 of the second housing member 12.

[0133] With this configuration, the valve 1H can achieve the same effects as the valve 1. Furthermore, even if the height of the recess 1110 becomes larger than the thickness of the valve membrane 30 due to manufacturing errors or the like, the valve membrane 30 can be more stably fixed. Furthermore, the protrusion 119 of the valve 1A of the second embodiment does not need to be provided.

[0134] [Tenth Embodiment] A fluid control device according to a tenth embodiment of the present invention will be described with reference to the drawings. Fig. 26 is a side cross-sectional view showing the configuration of a fluid control device according to the tenth embodiment. Fig. 27 is a side cross-sectional view showing the configuration of a fluid control device with a cuff according to the tenth embodiment. Fig. 28 is an exploded perspective view of the fluid control device according to the tenth embodiment. Fig. 28 is an exploded perspective view seen from the second housing member side.

[0135] A fluid control device 2I according to the tenth embodiment includes a valve 1I and a pump 80.

[0136] The valve 1I has the same configuration as the valve 1 according to the first embodiment, except that its external shape is rectangular when viewed from above and the first housing member 11 forms part of the pump 80, and therefore further description will be omitted.

[0137] The cuff 3 is attached to the fourth surface F2111 of the valve 1I. The cuff 3 has a cylindrical neck portion 301. The internal space of the cuff 3 communicates with the second air hole 22 of the valve 1I through the hollow portion of the neck portion 301.

[0138] The pump 80 includes a main plate 811, a frame 812, a plurality of connecting members 813, a piezoelectric element 82, a pump housing sidewall member 83, a flow path forming member 84, a substrate 85, wiring electrodes 86, and a flexible member 87. The first housing member 11 of the valve 1I is also configured as a part of the pump 80.

[0139] The main plate 811 is circular when viewed in the height direction. The frame body 812 is arranged to surround the main plate 811 when viewed in the height direction. The multiple connecting members 813 are beam-shaped and arranged between the main plate 811 and the frame body 812. The multiple connecting members 813 support the main plate 811 relative to the frame body 812 so that the main plate 811 can vibrate. The main plate 811, frame body 812, and multiple connecting members 813 are integrally formed from metal or the like.

[0140] The piezoelectric element 82 has a circular shape in a plan view. The piezoelectric element 82 includes a piezoelectric body and a driving conductor. The piezoelectric element 82 is disposed on one main surface of the main plate 811. In this case, the center of the piezoelectric element 82 and the center of the main plate 811 are substantially aligned when viewed in the height direction.

[0141] The pump housing sidewall member 83 is annular and has a hollow 830. The pump housing sidewall member 83 is disposed between the frame 812 and the first housing member 11 of the valve 1I.

[0142] The wiring electrode 86 includes an annular portion and a routing portion. The routing portion is shaped to extend inward and be surrounded by the annular portion. The wiring electrode 86 is disposed between the pump housing sidewall member 831 and the first housing member 11. The routing portion of the wiring electrode 86 is connected to a driving element on one main surface of the piezoelectric element 82.

[0143] In the height direction, on the opposite side of the flat plate consisting of the main flat plate 811, the frame body 812, and the multiple connecting members 813 from the mounting surface of the piezoelectric element 82, a flexible member 87, a flow path forming member 84, and a substrate 85 are arranged.

[0144] The flexible member 87 has a through hole 870. The flow path forming member 84 has a through hole 840. The substrate 85 has a plurality of through holes 88. The through holes 88, 840, and 870 communicate with each other and with a plurality of through holes 814 formed between the plurality of connecting members 813.

[0145] The piezoelectric element 82 is distorted by applying a driving voltage through the member made up of the main plate 811, the frame 812, the plurality of connecting members 813, and the wiring electrodes 86. This causes the main plate 811 to vibrate.

[0146] This vibration causes the pump 80 to draw in gas through the through-hole 88 and discharge it to the first vent hole 21 of the valve 1I. In this case, the valve membrane 30 moves away from the first valve seat 19 and abuts against the second valve seat 29. This realizes the first state of the valve 1I. In this state, the valve 1I supplies the gas that has flowed in from the first vent hole 21 to the cuff 3 through the second vent hole 22.

[0147] On the other hand, when the driving of the pump 80 stops, the flow of gas from the pump 80 into the first vent hole 21 of the valve 1I stops.

[0148] In this case, gas flows into the valve 1I from the cuff 3 through the second vent hole 22. The valve membrane 30 moves away from the second valve seat 29 and abuts against the first valve seat 19. This achieves the exhaust state in the second state of the valve 1I.

[0149] In this way, the fluid control device 2I can achieve the same effects as the valve 1I by including the valve 1I.

[0150] [Eleventh embodiment] A fluid control device according to an eleventh embodiment of the present invention will be described with reference to the drawings. Fig. 29 is an exploded perspective view of the fluid control device according to the eleventh embodiment. Fig. 29 is an exploded perspective view seen from the second housing member side.

[0151] 29, the fluid control device 2J according to the 11th embodiment differs from the fluid control device 2I according to the 10th embodiment in the configuration of the pump 80J. Other configurations of the fluid control device 2J according to the 11th embodiment are similar to those of the fluid control device 2I according to the 10th embodiment, and a description of similar parts will be omitted.

[0152] The fluid control device 2J is configured by combining the valve 1J and a pump 80J. The valve 1J has the same configuration as the valve 1J.

[0153] The pump 80J includes a main plate 811J, a frame 812J, a connecting member 813J, a piezoelectric element 82J, a pump housing sidewall member 83J, a substrate 85J, wiring electrodes 86J, and a flexible member 87J. The first housing member 11 of the valve 1J is also configured as a part of the pump 80.

[0154] The main plate 811J and the frame body 812J are rectangular when viewed in the height direction. The multiple connecting members 813J are disposed between the main plate 811J and the frame body 812J. The multiple connecting members 813J support the main plate 811J relative to the frame body 812J so that the main plate 811J can vibrate.

[0155] The flexible member 87J includes a through-hole 870J.

[0156] The substrate 85J includes a groove 850J and a plurality of through holes 88. The groove 850J is in communication with the plurality of through holes 88. The substrate 85J is a member that realizes the functions of the substrate 85 and the flow path forming member 84 in the pump 80 according to the tenth embodiment.

[0157] With this configuration, the pump 80J can achieve the same function as the pump 80. Therefore, by including the pump 80J and the valve 1J, the fluid control device 2J can achieve the same effects as the valve 1, as with the fluid control device 2.

[0158] In the above-described embodiment, the valve membrane 30 may be displaced in the height direction of the internal space by the gas flowing through the internal space while maintaining the shape of the first part 31 and the shape of the second part 32, or may be displaced while deforming.

[0159] In the above-described embodiment, the shape of the valve membrane 30 when viewed in the height direction is circular, and the shape of the internal space when viewed in the height direction is also circular. However, the shape of the valve membrane 30 when viewed in the height direction and the shape of the internal space when viewed in the height direction may be elliptical, oval, or polygonal (particularly, regular polygonal).

[0160] In the above-described embodiment, the first top surface F19 may be located closer to the second air vent 22 than the fourth surface F212 in the height direction of the housing 10. In this case, in the exhaust state, the valve membrane 30 more reliably abuts against the first top surface F19.

[0161] In the above-described embodiment, it is preferable that the ridges on the outer peripheral edge of the first top surface F19 of the first valve seat 19 and the ridges on the second top surface F29 of the second valve seat 29 are chamfered. This prevents sharp shapes from coming into contact with the valve membrane 30, and the valve 1 can prevent damage to the valve membrane 30.

[0162] (Examples of Derived Cuff Structures) FIGS. 30(A) and 30(B) are side cross-sectional views showing examples of derivations of the cuff shape.

[0163] In the configuration shown in Fig. 30(A), the cuff 3 does not have a cylindrical neck portion and is connected to the fluid control device 2K. In the configuration shown in Fig. 30(B), the opening area of ​​the neck portion 301 of the cuff 3 is larger than the opening area of ​​the second air hole 22.

[0164] As described above, as long as the internal space of the cuff 3 is configured to communicate with the second air hole 22, various shapes of the cuff 3 can be adopted.

[0165] 1, 1A, 1B, 1BX, 1C, 1D, 1E, 1F, 1G1, 1G2, 1H, 1I, 1J: Valve 2I, 2J: Fluid control device 3: Cuff 10, 10A, 10B, 10BX, 10D, 10F, 10G1, 10G2: Housing 11, 11A, 11B, 11BX: First housing member 12, 12B, 12C, 12D, 12E, 12F, 12G1, 12G2: Second housing member 18, 18X: Protrusion 19: First valve seat 21: First vent hole 22: Second vent hole 23: Third vent hole 29: Second valve seat 30: Valve membrane 31: First portion 32: Second portion 40: Adhesive tape 80, 80J: Pump 82, 82J: Piezoelectric element 83, 83J: Side wall member for pump housing 84: Flow path forming member 85, 85J: Substrate 86, 86J: Wiring electrode 87, 87J: Flexible member 88: Through hole 111: First end member 112: First side wall member 121, 121G: Second end member 122, 122F, 122G: Second side wall member 1110: Recess 119: Protrusion 113: Groove 123: Recess 124: Auxiliary hole 125: Protrusion 126: Protruding portion 217F1, 217F2: Recess 210: First space 220: Second space 231: Vertical hole 232: Horizontal hole 300: Through hole 301: Neck portion 330: Outer end portion 811, 811J: Main flat plate 812, 812J: Frame body 813, 813J: Connecting member 814: Through hole 830: Hollow 831: Side wall member for pump housing 840: Through hole 850J: Groove 870: Through hole 1250: Hole CO12: Notch F1111: First surface F1112: Second surface F1113: Outer surface F1122: Third surface F2111: Fourth surface F2112: Fifth surface F2121: Sixth surface F2122: Seventh surface F2123: Outer surface F220: Inner surface F19: First top surface F29: Second top surface

Claims

1. A housing comprising: a valve membrane; the housing comprising a first housing member and a second housing member; the first housing member comprising: a first end member having a first surface and a second surface; and a ring-shaped first sidewall member connected directly or indirectly to the first end member and having a third surface on an opposite side to a side connected to a portion of the second surface; the second housing member comprising: a second end member having a fourth surface and a fifth surface facing the portion of the second surface; and a ring-shaped second sidewall member connected directly or indirectly to the second end member and having a sixth surface facing or joining to the portion of the fifth surface and a seventh surface facing or joining to a portion of the third surface of the first sidewall member; the first end member comprising: a plurality of first air holes communicating between the first surface and the second surface; and a first valve seat connected to the second surface and disposed within the ring of the first sidewall member when the second surface is viewed in plan; the first valve seat has a first top surface, the first top surface is located closer to the fifth surface than the second surface in a thickness direction of the first housing member, the second end member has a second air hole communicating between the fourth surface and the fifth surface, the second sidewall member has: an exhaust hole communicating with the seventh surface, and a second valve seat arranged between an inner wall surface of a ring of the second sidewall member and the exhaust hole in a front view of the fourth surface, the second valve seat having a second top surface on the seventh surface side, the valve membrane is fixed to the housing in a state in which at least a portion of it is deformable within the ring of the first sidewall member or within the ring of the second sidewall member, and has a first portion overlapping the first valve seat and a second portion overlapping the second valve seat in a height direction in which the first housing member and the second housing member are aligned, the valve membrane and the first valve seat constitute a check valve, and the valve membrane and the second valve seat constitute an exhaust valve, The exhaust valve is disposed at a position surrounding the check valve when viewed in the height direction.

2. The valve according to claim 1, wherein a plurality of exhaust holes are provided, and when viewed in the height direction, the plurality of exhaust holes are arranged in symmetrical positions with respect to the check valve.

3. A valve as described in claim 1 or claim 2, wherein the second side wall member has a second side wall member recess recessed from the seventh surface outside the exhaust hole when viewed in the height direction, the first housing member has a first protrusion at a position overlapping the second side wall member recess when viewed in the height direction, and a portion of the valve membrane is sandwiched between a bottom surface of the second side wall member recess and the first protrusion.

4. A valve as described in claim 1 or claim 2, wherein the first housing member comprises: a first protrusion having a top surface at a position overlapping the seventh surface when viewed in the height direction and closer to the second surface in the height direction than the third surface; and a groove positioned closer to the outer surface than the first protrusion and recessed from the third surface, wherein the outer peripheral edge of the valve membrane is accommodated in the groove and a part of the valve membrane is sandwiched between the seventh surface and the first protrusion.

5. A valve as described in claim 1 or claim 2, wherein the first housing member has a second protrusion protruding from the second surface toward the third surface, and a portion of the valve membrane is sandwiched between the second protrusion and the seventh surface.

6. The valve according to claim 5, wherein a plurality of said second protrusions are provided, and when viewed in the height direction, said plurality of second protrusions are disposed at equal intervals in a ring shape.

7. A valve as described in any one of claims 1 to 6, wherein, when viewed in the height direction, an opening surface of the seventh surface of the exhaust hole and the first air vent hole have an overlapping portion.

8. A valve as set forth in any one of claims 1 to 7, wherein said second valve seat has an auxiliary hole, one end of which communicates with the inside of the ring of said second side wall member and the other end of which opens into said second top surface.

9. A valve as set forth in any one of claims 1 to 8, wherein the second housing member is provided with a third protrusion protruding from the fifth surface toward the valve membrane.

10. A fluid control device comprising: a valve as claimed in any one of claims 1 to 9; and a pump having a discharge hole communicating with the first air hole.

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