Laminated film for gasket comprising fluorine layers and manufacturing method therefor

Abstract

The present disclosure provides a laminated film for a gasket, the film comprising fluorine layers, and a manufacturing method therefor. The laminated film for a gasket comprises: a first fluorine layer; a polyimide layer formed on the first fluorine layer; and a second fluorine layer formed on the polyimide layer, wherein the first fluorine layer and the second fluorine layer extend further than the polyimide layer in the width direction, and a boundary portion of the first fluorine layer and a boundary portion of the second fluorine layer are bonded directly to each other, surrounding the side surfaces of the polyimide layer.

Description

Laminated film for gasket containing fluorine layer and method for manufacturing same

[0001] The present disclosure relates to a laminated film and a method for manufacturing the same, and more particularly, to a laminated film for a gasket including a fluorine layer and a method for manufacturing the same.

[0002] As semiconductor manufacturing processes become increasingly sophisticated, the role of the ESC (Electrostatic Chuck) used in the semiconductor manufacturing process is increasingly recognized as having a significant impact on the overall semiconductor yield. Accordingly, the importance of the gasket, a key material that makes up the ESC, is also increasing.

[0003] Polyimide is a high-performance polymer material with exceptional thermal stability, mechanical strength, heat resistance, and chemical stability. It is widely used as a component and material in various industries requiring high-temperature environments, such as the automotive, electronics, and aerospace industries. In particular, polyimide gaskets are primarily manufactured and supplied to the market by global companies such as DuPont in the US and Daikin in Japan, creating a global market worth over 50 billion won annually.

[0004] Polyimide composite materials currently used for gaskets or cable wraps have the problem of interfacial delamination occurring during use due to low adhesion between polyimide and fluorine-containing films, such as polytetrafluoroethylene (PTFE). This reduces the service life of the resulting gaskets or cable wraps and makes them difficult to use in harsh environments, such as electrostatic chucks (ESCs) used in semiconductor manufacturing.

[0005] In order to solve the above problems, the present disclosure provides a laminated film for a gasket including a fluorine layer and a method for manufacturing the same.

[0006] According to one embodiment of the present invention for solving the above technical problem, a laminated film for a gasket includes a first fluorine layer, a polyimide layer formed on the first fluorine layer, and a second fluorine layer formed on the polyimide layer, wherein the first fluorine layer and the second fluorine layer are formed to extend in the width direction longer than the polyimide layer, and an edge portion of the first fluorine layer and an edge portion of the second fluorine layer are directly bonded to each other so as to wrap a side surface of the polyimide layer.

[0007] According to one embodiment of the present invention, the first fluorine layer may include fluorinated ethylene propylene (FEP).

[0008] According to one embodiment of the present invention, the second fluorine layer may include perfluoroalkoxyl alkanes (PFA).

[0009] According to one embodiment of the present invention, a pigment can be added to the first fluorine layer or the second fluorine layer to distinguish the upper and lower layers.

[0010] According to one embodiment of the present invention, the thickness of the first fluorine layer or the second fluorine layer is 30 may apply.

[0011] According to one embodiment of the present invention, the thickness of the polyimide layer is 75 may apply.

[0012] According to one embodiment of the present invention, an adhesive epoxy primer may be coated on the surface where the first fluorine layer and the polyimide layer are in contact or on the surface where the polyimide layer and the second fluorine layer are in contact.

[0013] A gasket for a plasma processing device according to one embodiment of the present invention may include a laminated film according to another embodiment disclosed.

[0014] A method for manufacturing a laminated film for a gasket according to one embodiment of the present invention may include a step of forming a first fluorine layer, a step of laminating a polyimide layer on the first fluorine layer, a step of laminating a second fluorine layer on the polyimide layer, and a step of pressing a laminated film including the first fluorine layer, the polyimide layer, and the second fluorine layer.

[0015] According to one embodiment of the present invention, the pressing step may include a step of roll-to-roll laminating the laminate film.

[0016] According to various embodiments of the present disclosure, a composite film in the form of a 3-layer laminate of fluorine film / polyimide film / fluorine film is provided to provide thermal durability and electrical insulation, while also providing stability in a vacuum environment, resistance to thermal decomposition at high temperatures, and corrosion resistance to halogen gases, and can be maintained at a high operating temperature, a high power density, and a long RF time without causing a peeling phenomenon.

[0017] According to one embodiment of the present disclosure, by adding pigments of different colors to the PFA layer and the FEP layer, a user can easily recognize the bonding direction of the laminated film for a gasket.

[0018] According to one embodiment of the present disclosure, by coating an epoxy adhesive at the interface between FEP and PFA and polyimide, the interfacial adhesion strength, which was at the level of 100 to 200 g / in, can be increased to the level of 1,000 g / in or more, thereby improving long-term reliability and further increasing the lifespan of expensive ESC components.

[0019] The effects of the present disclosure are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by a person having ordinary skill in the art to which the present disclosure belongs (referred to as “one skilled in the art”) from the description of the claims.

[0020] Embodiments of the present disclosure will be described below with reference to the accompanying drawings, wherein like reference numerals represent similar elements, but are not limited thereto.

[0021] FIG. 1 is a schematic diagram showing an example of a laminated film for a gasket according to one embodiment of the present invention.

[0022] FIG. 2 is a drawing showing a cross-section of a laminated film for a gasket according to one embodiment of the present invention.

[0023] Figure 3 is a schematic diagram showing the surface where the fluorine layer and the polyimide layer of the laminated film for a gasket are in contact according to one embodiment of the present invention.

[0024] FIG. 4 is a drawing showing the peel strength test measurement results of a laminated film for a gasket according to one embodiment of the present invention together with the peel strength test measurement results of a conventional laminated film.

[0025] Figure 5 is a flow chart showing a method for manufacturing a laminated film for a gasket according to one embodiment of the present invention.

[0026] Hereinafter, specific details for implementing the present disclosure will be described in detail with reference to the attached drawings. However, in the following description, specific descriptions of widely known functions or configurations will be omitted if they may unnecessarily obscure the gist of the present disclosure.

[0027] In the attached drawings, identical or corresponding components are assigned the same reference numerals. Furthermore, in the description of the embodiments below, duplicate descriptions of identical or corresponding components may be omitted. However, even if a description of a component is omitted, it is not intended that such component is not included in any embodiment.

[0028] The advantages and features of the disclosed embodiments, and methods for achieving them, will become clearer with reference to the embodiments described below, along with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed below and may be implemented in various different forms. These embodiments are provided solely to ensure the completeness of the disclosure and to fully inform those skilled in the art of the scope of the invention.

[0029] The terms used in this specification will be briefly explained, followed by a detailed description of the disclosed embodiments. The terms used in this specification have been selected from widely used, current terms, taking into account the functions of the present disclosure. However, these terms may vary depending on the intentions of engineers working in the relevant field, precedents, the emergence of new technologies, etc. Furthermore, in certain cases, terms may be arbitrarily selected by the applicant, and in such cases, their meanings will be described in detail in the relevant description of the invention. Therefore, the terms used in this disclosure should not be defined simply as names of terms, but rather based on their meanings and the overall content of the present disclosure.

[0030] In this specification, singular expressions include plural expressions unless the context clearly indicates otherwise. Furthermore, plural expressions include singular expressions unless the context clearly indicates otherwise. When a part of the specification is said to include a component, this does not exclude other components, but rather implies that other components may be included, unless otherwise specifically stated.

[0031] Throughout this specification, whenever a part is said to "include" a component, this does not mean that it excludes other components, but rather that it may include other components, unless otherwise specifically stated.

[0032] The term "about" used throughout this specification is used to encompass the tolerance when there is a tolerance.

[0033] Throughout this specification, the term "at least one" in a Markush format expression means including one or more selected from the group consisting of components described in the Markush format expression.

[0034] Throughout this specification, references to “A and / or B” mean “A, or B, or A and B.”

[0035] Throughout this specification, the term "layer" refers to a layer having a thickness. Furthermore, throughout this specification, when it is said that a component is positioned "on" another component, unless otherwise specifically stated, this includes not only cases where one component is in contact with another component, but also cases where another component exists between the two components.

[0036] In this disclosure, the term "gasket" may refer to a structure that blocks or seals mechanical defects at the joint between two or more mechanical components or devices to prevent fluid or gas leakage. Specifically, a gasket can play a crucial role in ensuring efficient energy transfer and system safety by filling imperfect joints between two components and protecting them from fluid or gas leakage.

[0037] In this disclosure, "laminating" may refer to the process or result of two or more materials or structures forming layers to form a single composite. This can be understood as a process in which various materials or structures are layered one upon another to form a single composite. Furthermore, in this disclosure, "laminated film" may refer to a film having a structure in which two or more different types of films or thin films are laminated. This structure combines various properties to provide improved functionality and performance, and can be designed to meet product requirements.

[0038] In this disclosure, "primer" may refer to a substance used to improve adhesion to a specific surface. Specifically, a primer may refer to a substance that enhances adhesion by modifying the properties of the surface to which it is applied or by promoting interaction with other substances to be adhered to the surface, thereby helping adhesives, paints, coatings, etc. adhere well to specific substances.

[0039] Figure 1 is a schematic diagram showing an example of a laminated film for a gasket according to one embodiment of the present invention. The laminated film (100) for a gasket according to one embodiment of the present invention may include a first fluorine layer (110), a polyimide layer (120) formed on the first fluorine layer (110), and a second fluorine layer (130) formed on the polyimide layer (120).

[0040] In the present disclosure, a fluoride layer may refer to a special layer containing a fluoropolymer. Here, the fluoropolymer may refer to a synthetic polymer or plastic having a fluorine atom in its molecular structure. Specifically, depending on the type of monomer used, the fluoropolymer may correspond to any one of a fully fluorinated resin having a structure in which all hydrogen atoms in a hydrocarbon are replaced with fluorine atoms, a partially fluorinated resin having a structure in which fluorine atoms occupy only a portion of the monomer molecule, a fluorinated copolymer formed by combining a monomer containing a fluorine atom and a monomer not containing a fluorine atom, or a combination thereof.

[0041] In one embodiment, the fluorine layer may be a special layer comprising a completely fluorinated resin. For example, the first fluorine layer (110) or the second fluorine layer (130) may correspond to a special layer comprising polytetrafluoroethylene (PTFE, Teflon).

[0042] In one embodiment, the fluorine layer may be a special layer comprising a partially fluorinated resin. For example, the first fluorine layer (110) or the second fluorine layer (130) may be a special layer comprising any one of polychlorotrifluoroethylene (PCTFE or Chlorotrifluoroethylene, CTFE), polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), or a combination thereof. A fluorine layer comprising a partially fluorinated resin may generally be more advantageous in terms of cost reduction or processability while maintaining some of the properties of a fluorine layer comprising a fully fluorinated resin.

[0043] In another embodiment, the fluorine layer may be a special layer comprising a fluorinated copolymer. For example, the first fluorine layer (110) or the second fluorine layer (130) may correspond to a special layer comprising any one of perfluoroalkoxy, perfluoroalkoxy alkane (PFA), fluorinated ethylene propylene (FEP), ethylene tetrafluoroethylene (ETFE), ethylene chlorotrifluoroethylene (ECTFE), or a combination thereof.

[0044] According to one embodiment of the present disclosure, the first fluorine layer (110) and the second fluorine layer (130) may include different types of fluoropolymers. For example, in one embodiment, the first fluorine layer may include fluorinated ethylene propylene (FEP), and the second fluorine layer may include perfluoroalkoxyl alkanes (PFA).

[0045] In the present disclosure, the polyimide layer (120) may correspond to a special layer including a polyimide polymer compound having an imide ring. Depending on the chemical stability of the imide ring, the polyimide layer (120) may exhibit excellent heat resistance, low thermal expansion coefficient, chemical stability, wear resistance, and low air permeability. According to one embodiment, the polyimide layer (120) may include an inorganic filler to effectively improve mechanical properties such as the expansion coefficient of the final product. For example, the inorganic filler may correspond to silica, glass fiber, silicon nitride, calcium carbonate, magnesium carbonate, aluminum oxide, aluminum borate, titanium oxide, calcium silicate, calcium zirconate, or barium zirconate. The amount of such inorganic filler used may be adjusted by a person skilled in the art to control the mechanical properties.

[0046] According to one embodiment, the thickness of the polyimide layer (120) is 75 may correspond to. In addition, according to one embodiment, the thickness of the first fluorine layer (110) or the second fluorine layer (130) is 30 may correspond to. Accordingly, the total thickness of the laminated film (100) for the gasket is 140 The total thickness of the laminated film (100) for gasket, the thickness of the polyimide layer (120), and the thickness of the first fluorine layer (110) or the second fluorine layer (130) are not limited thereto, and may be variously selected by a person skilled in the art to have an appropriate thickness depending on the use of the laminated film (100).

[0047] According to one embodiment of the invention, different fluorine layers are formed in the first fluorine layer (110) and the second fluorine layer (130), so that physical and chemical properties such as chemical stability, coefficient of friction, adhesiveness, and thermal and electrical insulation properties can be different from each other.

[0048] For example, the first fluorine layer (110) may include polytetrafluoroethylene, which corresponds to a fully fluorinated resin, and the second fluorine layer (130) may include polyvinyl fluoride, which corresponds to a partially fluorinated resin. In this case, due to the high degree of fluorination of the first fluorine layer (110), the chemical stability of the first fluorine layer (110) may be higher than that of the second fluorine layer (130).

[0049] Therefore, if the upper and lower layers of the laminated film (100) for gaskets are used interchangeably, damage to the entire device to which the gasket is joined or a shortened lifespan of the device may occur. However, there is a problem in that it is difficult to distinguish between the upper and lower layers because the fluororesin itself is transparent or has the same color. Accordingly, the probability of the laminated film (100) for gaskets being joined in the wrong direction may increase.

[0050] To overcome this, according to one embodiment of the present invention, pigments of different colors can be added to the first fluorine layer (110) or the second fluorine layer (130) to distinguish the upper and lower layers. This allows the user to easily recognize the bonding direction of the laminated film (100) for the gasket. The type and color of the pigment can be selected from a variety of pigments used in the art, depending on the purpose and intention of the product manufacturer or user.

[0051] A method for manufacturing a laminated film for a gasket according to one embodiment is described below in FIG. 5.

[0052] FIG. 2 is a drawing showing a cross-section (200) of a laminated film for a gasket according to one embodiment of the present invention. The fluoropolymer included in the first fluorine layer (110) and the second fluorine layer (130) is composed of carbon and fluorine atoms, and the polyimide included in the polyimide layer (120) is composed of an imide functional group containing oxygen and nitrogen atoms. Due to these differences in chemical structure, the intermolecular interactions between the first fluorine layer (110) and the polyimide layer (120) and between the second fluorine layer (130) and the polyimide layer (120) are low, and thus low adhesion may be exhibited.

[0053] According to one embodiment, the first fluorine layer (110) and the second fluorine layer (130) are formed to extend in the width direction longer than the polyimide layer (120), and the edge portion (112) of the first fluorine layer and the edge portion (132) of the second fluorine layer are directly bonded to each other to wrap the side surface of the polyimide layer (120). Here, the edge portions (112, 132) may refer to a portion of the fluorine layer that is formed to extend in the width direction longer than the polyimide layer (120) and does not directly physically contact the polyimide layer (120).

[0054] According to one embodiment, the edge portion (112) of the first fluorine layer and the edge portion (132) of the second fluorine layer are directly bonded to each other to cover the entire polyimide layer (120) with the first fluorine layer (110) and the second fluorine layer (130) so as to prevent external substances from coming into contact with the polyimide layer (120). In this way, the laminated film for the gasket is configured as a composite film in the form of a fluorine film / polyimide film / fluorine film three-layer laminate, thereby providing thermal durability and electrical insulation, and at the same time providing stability in a vacuum environment, resistance to thermal decomposition at high temperatures, corrosion resistance to halogen gases, and being able to continue without peeling at high operating temperatures, high power densities, and long RF times.

[0055] Figure 3 is a schematic diagram showing the surface where the fluorine layer and the polyimide layer of the laminated film for a gasket are in contact according to one embodiment of the present invention.

[0056] According to one embodiment, an adhesive epoxy primer (310) may be coated on the surface where the first fluorine layer (110) and the polyimide layer (120) are in contact or on the interface where the polyimide layer (120) and the second fluorine layer (130) are in contact. Specifically, the adhesive epoxy primer (310) may strengthen the interface where the first fluorine layer (110) and the polyimide layer (120) are in contact or on the interface where the polyimide layer (120) and the second fluorine layer (130) are in contact, prevent corrosion, and improve the adhesiveness of each layer as part of the surface treatment.

[0057] For example, the first fluorine layer may include fluoroethylene propylene, and the second fluorine layer may include perfluoroalkoxy alkane. In this embodiment, by coating an epoxy adhesive on the interface between the first fluorine layer and the polyimide layer and the interface between the second fluorine layer and the polyimide layer, the interfacial adhesive strength, which was at the level of 100 to 200 g / in, can be increased to the level of 1,000 g / in or more. This can improve the long-term reliability of the laminated film for gaskets and further increase the lifespan of expensive ESC components.

[0058] In one embodiment, the adhesive epoxy primer (310) may include an epoxy resin and a hardener (Hardner or Curing agent). Specifically, the epoxy resin is one of the main components of the epoxy primer and may refer to a polymer material having an epoxide functional group. Specifically, the epoxy resin may correspond to an epoxy resin used in the art, such as a bisphenol A epoxy resin, a bisphenol F epoxy resin, a novolac epoxy resin, a dimeric acid modified epoxy resin, or a hydrogenated epoxy resin thereof, which provide strong adhesive strength, chemical resistance, and heat resistance.

[0059] In one embodiment, the curing agent may refer to a substance that, when mixed with an epoxy resin, induces a curing chemical reaction. Specifically, the curing agent may react with the epoxy resin to form a strong three-dimensional network structure. This structure may enhance the strength and chemical stability of the epoxy coating. For example, the curing agent may be any one of amine curing agents, anhydride epoxy hardeners, or catalytic hardeners.

[0060] A gasket for a plasma processing device according to one embodiment of the present invention may include a laminated film according to another embodiment disclosed. Here, the plasma processing device may include internal electrodes (or, anode and cathode) that form plasma through a voltage difference, a plasma reaction chamber, a gas supply system that supplies an appropriate gas to generate plasma within the plasma reaction chamber, a vacuum system that dilutes air within the plasma reaction chamber and controls the internal environment to maintain vacuum, an RF power supply system that supplies RF (Radio Frequency) energy to generate and maintain plasma, and a control device for monitoring and controlling temperature, pressure, gas flow, etc. of the plasma reaction chamber.

[0061] For example, a gasket for a plasma processing device according to an embodiment of the present invention may be applied to a lower portion of a Si lower electrode and an Al coupling ring in a plasma reaction chamber for etching semiconductor substrates to controllably separate the inside and the outside of the chamber, maintain a vacuum level, and provide a contact with guaranteed electrical insulation and thermal durability. As another example, a gasket for a plasma processing device according to an embodiment of the present invention may be applied to a lower portion of an ESC of the plasma processing device to protect internal components of the ESC in a corrosive environment and provide electrical insulation.

[0062] FIG. 4 is a drawing showing the peel strength test measurement results of a laminated film for a gasket according to one embodiment of the present invention together with the peel strength test measurement results of an existing laminated film.

[0063] In this disclosure, a peel strength test may refer to an experiment that measures the ability of an adhesive or coating material to adhere to two different surfaces. For example, a peel strength test may be performed using equipment that separates two samples at a constant speed. By measuring the force required to separate the two samples in this test, the strength and durability of the adhesive or coating can be determined.

[0064] As disclosed, a peel strength test was measured for a conventional laminate film in which an epoxy adhesive was not coated at the interface between the first fluorine layer and the polyimide layer and at the interface between the second fluorine layer and the polyimide layer, and the adhesive strength was observed to be measured to be about 100 g / in. In a subsequent embodiment, a peel strength test was measured for a laminate film in which an epoxy adhesive was coated at the interface between the first fluorine layer and the polyimide layer and at the interface between the second fluorine layer and the polyimide layer, and the adhesive strength was observed to be measured to be about 1000 g / in or more, indicating an improvement in the adhesive strength of about 10 times or more.

[0065] Figure 5 is a flowchart illustrating a method for manufacturing a laminated film for a gasket according to one embodiment of the present invention. The method (400) for manufacturing a laminated film for a gasket may begin by forming a first fluorine layer (S410). In one embodiment, the first fluorine layer may be formed by applying a resin composition containing a fluoropolymer in a liquid form, followed by drying and curing the same.

[0066] Thereafter, a polyimide layer can be laminated on the first fluorine layer (S420). According to one embodiment, the polyimide layer can be laminated by applying a polyimide layer-forming composition including a polyimide polymer compound on the first fluorine layer, and then drying and curing the same. According to another embodiment, the polyimide layer can be laminated by pressing a pre-dried and cured polyimide resin film onto a separate film including the first fluorine layer.

[0067] According to one embodiment, the polyimide layer can be laminated by condensation reaction of a compound containing a diamine functional group and a compound containing a tetracarboxylic acid functional group, applying the reactant on the first fluorine layer, and then drying and curing the same. Before laminating the polyimide layer, an adhesive epoxy primer can be coated on the interface where the first fluorine layer and the composition for forming the polyimide layer come into contact.

[0068] Thereafter, a second fluorine layer can be laminated on the polyimide layer (S430). In one embodiment, the second fluorine layer can be laminated by applying a resin composition including a fluoropolymer in a liquid state on the polyimide layer and then drying and curing the same. Before laminating the second fluorine layer, an adhesive epoxy primer can be coated on the interface where the polyimide layer and the composition for forming the second fluorine layer come into contact. In another embodiment, the second fluorine layer can be laminated by pressing a previously dried and cured resin film onto a separate film including the polyimide layer. This lamination process can be performed simultaneously with the pressing step (S440) of the laminated film described below.

[0069] Finally, the laminate film including the first fluorine layer, the polyimide layer, and the second fluorine layer can be pressed (S440). According to one embodiment of the present invention, the pressing step may include a roll-to-roll laminating step of the laminate film. The roll-to-roll laminating step may refer to a process of thinning the thickness of the laminate film through a roll-to-roll process. Specifically, in a laminate roller unit having a pair of rollers, a first roller and a second roller, the first roller and the second roller may be installed corresponding to each other with a gap between the outer peripheral surfaces according to the thickness of the laminate film for the gasket. In one embodiment, the thickness of the laminate film for the gasket is about 140 It may correspond to, but is not limited to, and may have various thicknesses as selected by a person skilled in the art depending on the component and use.

[0070] According to the method for manufacturing a laminated film for a gasket of the present invention, a laminated film for a gasket having a uniform bonding can be provided by uniformly pressing the laminated film in a roll-to-roll laminating process in a laminating roller section.

[0071] While the present disclosure has been described in connection with certain embodiments herein, various modifications and variations may be made without departing from the scope of the present disclosure, which would be apparent to those skilled in the art. Furthermore, such modifications and variations are intended to fall within the scope of the claims appended to this specification.

[0072] The above preferred embodiments of the present invention are disclosed for the purpose of illustration, and those skilled in the art with ordinary knowledge of the present invention will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions should be considered to fall within the scope of the patent claims.

[0073] Anyone having ordinary skill in the art to which the present invention pertains can make various substitutions, modifications, and changes within the scope that does not depart from the technical spirit of the present invention, and therefore the present invention is not limited to the above-described embodiments and the attached drawings.

Claims

1. In laminated films for gaskets, First fluorine layer; A polyimide layer formed on the first fluorine layer; and A second fluorine layer formed on the above polyimide layer Including, A laminated film, wherein the first fluorine layer and the second fluorine layer are formed to extend in the width direction longer than the polyimide layer, and the edge portion of the first fluorine layer and the edge portion of the second fluorine layer are directly adhered to each other to wrap the side surface of the polyimide layer.

2. In paragraph 1, A laminated film, wherein the first fluorine layer comprises fluorinated ethylene propylene (FEP).

3. In paragraph 1, A laminated film, wherein the second fluorine layer comprises perfluoroalkoxyl alkanes (PFA).

4. In paragraph 1, A laminated film that distinguishes the upper and lower layers by adding pigment to the first fluorine layer or the second fluorine layer.

5. In paragraph 1, The thickness of the first fluorine layer or the second fluorine layer is 30 A laminated film corresponding to .

6. In paragraph 1, The thickness of the above polyimide layer is 75 A laminated film corresponding to .

7. In paragraph 1, A laminated film, wherein an adhesive epoxy primer is coated on the surface where the first fluorine layer and the polyimide layer are in contact or on the surface where the polyimide layer and the second fluorine layer are in contact.

8. A gasket for a plasma treatment device comprising a laminated film according to paragraph 1.

9. In a method for manufacturing a laminated film for a gasket, Step of forming the first fluorine layer; A step of laminating a polyimide layer on the first fluorine layer; A step of laminating a second fluorine layer on the polyimide layer; and A step of pressing a laminated film including the first fluorine layer, the polyimide layer, and the second fluorine layer. A method for manufacturing a laminated film, comprising:

10. In paragraph 9, A method for manufacturing a laminated film, wherein the pressing step includes a roll-to-roll laminating step of the laminated film.

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