Filter-based achromatic optical device, and manufacturing method therefor and application thereof
By adopting filter-based achromatic optics in optical devices, using the combination of filter layer and light deflection devices, the serious dispersion effect in existing optical devices is solved, and high-quality imaging effects are achieved.
Patent Information
- Application Number
- PCT/CN2024/131185
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-12-29
- Filing Date
- 2024-11-11
- Publication Date
- 2025-06-26
AI Technical Summary
Existing optical devices have severe dispersion effects during imaging, and the existing dispersion elimination technology is complex and has poor results, which affects the imaging accuracy of the optical devices.
Filter-based achromatic optics are employed, which include a filter layer and a light deflection device. The filter layer consists of a plurality of combined pixels, each combined pixel consisting of a plurality of monochrome sub-pixels arranged adjacently, and the monochrome sub-pixels are used to selectively transmit monochrome light of the corresponding color and absorb light of other colors. The light deflection device is attached to the surface of the filter layer, and the propagation direction of the monochromatic light is adjusted through the sub-light deflection device, so that the monochromatic light converges at a designated position.
By simplifying technical means, the dispersion elimination effect is significantly improved, the effect of optical devices during imaging is optimized, and high-quality and clean imaging is achieved.
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Figure CN2024131185_26062025_PF_FP_ABST
Abstract
Description
Achromatic optical device based on filtering and its manufacturing method and application
[0001] Related applications
[0002] This application claims priority to the Chinese patent application with application number 202311860298.9 filed on December 29, 2023, entitled “Achromatic optical device, optical lens and imaging module based on filter” and the Chinese patent application with application number 202311786261.6 filed on December 22, 2023, entitled “Achromatic programmable optical device based on filter, its manufacturing method and application”, the entire contents of which are incorporated by reference into this application. Technical Field
[0003] The present application relates to the field of imaging technology, and in particular to an achromatic optical device based on filtering, a manufacturing method thereof, and an application thereof. Background Art
[0004] Traditional refractive optical devices mostly achieve specific phase distributions by constructing curved surfaces, but these devices are typically large and heavy. With the development and advancement of technology, binary optics based on diffraction theory (i.e., diffractive optical devices) can achieve a certain degree of planarization of optical devices. This not only helps reduce the size and weight of devices, but also offsets dispersion to a certain extent by leveraging its complementary dispersion properties with traditional refractive optical devices, which has a wide range of applications in optical imaging.
[0005] However, in the traditional imaging field, the traditional method of achromatic aberration is to combine diffractive and refractive optical devices. However, due to the large difference in the Abbe number of PB optics and refractive optics, chromatic aberration is difficult to completely cancel. Related technologies have proposed using the inherent characteristics of liquid crystal optics to compensate for dispersion. However, due to the strong restrictions on the wavelengths of red, green and blue, for example, the half-wave plate (HWP) is required to only affect blue light without affecting the chirality of red and green. These conditions are difficult to meet and can only be used in special scenarios. Even if these conditions are met, the blue HWP will cause new problems for red and green, such as low diffraction efficiency.
[0006] Therefore, existing optical devices in current technology often have a strong dispersion effect, and existing dispersion elimination technologies are often complex and ineffective, which seriously affects the accuracy of optical devices during imaging.
[0007] Summary of the Invention
[0008] According to various embodiments of the present application, a filtering-based achromatic optical device, a manufacturing method thereof, and an application thereof are provided, wherein the filtering-based achromatic optical device can be implemented as a filter-based achromatic optical device, and can also be implemented as a filtering-based achromatic programmable optical device.
[0009] According to one aspect of the present application, the present application provides an achromatic optical device based on light filtering, comprising a light filtering layer and a light deflecting device;
[0010] The filter layer includes a plurality of combined pixels, each of which is composed of a plurality of adjacently arranged single-color sub-pixels; each of the single-color sub-pixels is configured to selectively transmit single-color light of a corresponding color and absorb light of other colors;
[0011] The light deflection device is attached to the surface of the filter layer, and includes multiple sub-light deflection devices, each of which corresponds to the position of each monochrome sub-pixel. Each sub-light deflection device is used to adjust the propagation direction of the monochromatic light of the corresponding monochrome sub-pixel to propagate the monochromatic light to a specified position.
[0012] In one embodiment of the present application, the light deflection device includes at least one of a microprism, a grating, a transmission holographic optical device, and a metasurface device.
[0013] In one embodiment of the present application, the grating includes at least one of a relief grating and a PB grating.
[0014] In one embodiment of the present application, the multiple monochromatic sub-pixels corresponding to the same combined pixel are of different light-transmitting types, and are respectively used to transmit monochromatic light of different colors.
[0015] In one embodiment of the present application, the filter layer is an RGB filter layer; each of the combined pixels in the RGB filter layer includes a red sub-pixel for selectively transmitting red light, a green sub-pixel for selectively transmitting green light, and a blue sub-pixel for selectively transmitting blue light.
[0016] In one embodiment of the present application, the characteristic width of the monochrome sub-pixel is within the geometric optical region.
[0017] In one embodiment of the present application, the shape of the combined pixel includes at least one of a square, a strip, and a ring.
[0018] In one embodiment of the present application, the light deflection device is used to converge the monochromatic light of all the monochromatic sub-pixels passing through the filter layer at the same designated position.
[0019] In one embodiment of the present application, the light deflection device is used to converge the monochromatic light of multiple monochromatic sub-pixels corresponding to the same combined pixel at the same designated position; wherein the designated positions corresponding to different combined pixels are different.
[0020] According to another aspect of the present application, the present application also provides an optical lens, comprising any of the above-mentioned filtering-based achromatic optical devices.
[0021] According to another aspect of the present application, the present application also provides an imaging module, including: a photosensitive component and the above-mentioned optical lens, and the optical lens is located on the photosensitive side of the photosensitive component.
[0022] In summary, the aforementioned achromatic optical device based on filtering includes a filter layer and a light deflection device. The filter layer includes a plurality of combined pixels, each of which is composed of a plurality of adjacently arranged monochromatic sub-pixels. Each of the monochromatic sub-pixels is used to selectively transmit monochromatic light of a corresponding color and absorb light of other colors. The light deflection device is attached to the surface of the filter layer and includes a plurality of sub-light deflection devices, each of which corresponds one-to-one to the position of each monochromatic sub-pixel. Each sub-light deflection device is used to adjust the propagation direction of the monochromatic light of the corresponding monochromatic sub-pixel to propagate the monochromatic light to a designated location. The aforementioned optical device, while simplifying the technology, can also ensure improved dispersion elimination, optimizing the optical device's imaging performance.
[0023] According to another aspect of the present application, the present application also provides an achromatic optical device based on filtering, comprising:
[0024] light-transmitting substrate;
[0025] a color filter layer attached to the light-transmitting substrate, comprising a plurality of combined pixels arranged on the light-transmitting substrate, each of the combined pixels being composed of a plurality of adjacently arranged single-color sub-pixels; each of the single-color sub-pixels being configured to selectively transmit single-color light of a corresponding color and absorb light of other colors; and
[0026] The light deflection modulation structure formed on the color filter layer includes a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, for modulating the propagation direction of the transmitted light to a designated position while the monochrome sub-pixels filter the light.
[0027] In one embodiment of the present application, the multiple monochrome sub-pixels in each combined pixel have different colors, and the light deflection modulation structure is used to converge the monochrome light passing through all the monochrome sub-pixels in each combined pixel at the same designated position.
[0028] In one embodiment of the present application, the multiple monochrome sub-pixels in each combined pixel have different colors, and the light deflection modulation structure is used to make the monochrome light with the same color passing through the monochrome sub-pixels converge at the same designated position.
[0029] In one embodiment of the present application, the color filter layer is an RGB color filter; each of the combined pixels in the RGB color filter includes a red sub-pixel for selectively transmitting red light, a green sub-pixel for selectively transmitting green light, and a blue sub-pixel for selectively transmitting blue light.
[0030] In one embodiment of the present application, the characteristic width of the monochrome sub-pixel is required to be within the geometric optical region.
[0031] In one embodiment of the present application, the shape of the combined pixel is one of a square, a strip, and a circular strip.
[0032] In one embodiment of the present application, the thickness of the color filter layer is greater than the height or depth of the light deflection modulation structure, so as to form a filter substrate between the light deflection modulation structure and the transparent substrate.
[0033] In one embodiment of the present application, the light deflection modulation structure is one of a metasurface optical structure, a micro-geometric optical structure, and a diffraction optical structure.
[0034] In one embodiment of the present application, the light deflection modulation structure is a transmission phase-type metasurface formed on the color filter layer; each of the light deflection modulation units in the transmission phase-type metasurface includes a plurality of periodically arranged dielectric pillars of different widths, and the characteristic dimensions of the dielectric pillars are required to be in the subwavelength region.
[0035] In one embodiment of the present application, the light deflection modulation structure is a geometric phase-type metasurface formed on the color filter layer; each of the light deflection modulation units in the geometric phase-type metasurface includes a plurality of columns arranged in an array and with varying pointing angles, and the characteristic width of the columns is required to be in the subwavelength region.
[0036] In one embodiment of the present application, the light deflection modulation structure is a micro-geometric lens array formed on the color filter layer; each of the light deflection modulation units in the micro-geometric lens array is a Fresnel lens corresponding one-to-one to the monochrome sub-pixel.
[0037] In one embodiment of the present application, the light deflection modulation structure is a diffraction grating array formed on the color filter layer; each of the light deflection modulation units in the diffraction grating array is a relief grating corresponding one-to-one to the monochrome sub-pixel.
[0038] According to another aspect of the present application, the present application further provides an optical lens, comprising any of the above-mentioned filtering-based achromatic optical devices.
[0039] According to another aspect of the present application, the present application further provides an imaging module, comprising:
[0040] Photosensitive components; and
[0041] The above-mentioned optical lens is located on the photosensitive side of the photosensitive component.
[0042] According to another aspect of the present application, the present application further provides a method for manufacturing an achromatic optical device based on filtering, comprising the steps of:
[0043] Fabricating a color filter layer on a light-transmitting substrate to form a plurality of combined pixels arranged on the light-transmitting substrate, wherein each combined pixel is composed of a plurality of adjacently arranged single-color sub-pixels, and each single-color sub-pixel is configured to selectively transmit single-color light of a corresponding color and absorb light of other colors; and
[0044] A light deflection modulation structure is fabricated on the color filter layer to form a plurality of light deflection modulation units corresponding to the monochrome sub-pixels. The light deflection modulation units are used to modulate the propagation direction of the transmitted light to a designated position while the monochrome sub-pixels filter the light.
[0045] In one embodiment of the present application, in the step of forming the color filter layer on the surface of the light-transmitting substrate: the RGB color filter is attached to the surface of the light-transmitting substrate by an attachment, coating or deposition coating process.
[0046] In one embodiment of the present application, in the step of fabricating the light deflection modulation structure in the color filter layer: one of a metasurface optical structure, a microgeometric optical structure, and a diffraction optical structure is fabricated in the color filter layer by photolithography or nanoimprinting process.
[0047] In summary, the filtering-based achromatic optical device and its manufacturing method and application of the present application can completely solve the dispersion problem.
[0048] In one embodiment of the present application, the filtering-based achromatic optical device can completely replace the application of traditional curved lenses in white light imaging.
[0049] In one embodiment of the present application, the filtering-based achromatic optical device can completely solve the dispersion problem while having low processing difficulty, and is easy to promote and popularize in industrial applications.
[0050] In one embodiment of the present application, the filtering-based achromatic optical device can have no specific restrictions on polarization characteristics and has good practicality and applicability.
[0051] In one embodiment of the present application, the filtering-based achromatic optical device can achieve high-quality and clean imaging, fully realizing the potential of metasurface optics in the white-light imaging industry.
[0052] Furthermore, the present application provides achromatic optical devices based on light filtering, their manufacturing methods, and applications, and achieves the aforementioned objectives and advantages without the need for expensive materials or complex structures. Therefore, the present application successfully and effectively provides a solution that not only provides a simple achromatic optical device based on light filtering, their manufacturing methods, and applications, but also increases the practicality and reliability of the achromatic optical device based on light filtering, their manufacturing methods, and applications.
[0053] The details of one or more embodiments of the present application are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the present application will become apparent from the description, drawings, and claims. BRIEF DESCRIPTION OF THE DRAWINGS
[0054] In order to better describe and illustrate the embodiments and / or examples of the inventions disclosed herein, reference may be made to one or more of the accompanying drawings. The additional details or examples used to describe the accompanying drawings should not be considered to limit the scope of the disclosed inventions, the presently described embodiments and / or examples, and any of the best modes currently understood for these inventions.
[0055] FIG1 is a schematic diagram of a refractive lens in the prior art;
[0056] FIG2 is a schematic diagram of a diffraction lens in the prior art;
[0057] FIG3 is a schematic structural diagram of an achromatic optical device based on a filter according to an embodiment of the present application;
[0058] FIG4 is a schematic diagram of a manufacturing process of a PB grating according to an embodiment of the present application;
[0059] FIG5 is a schematic diagram of an RGB filter layer according to an embodiment of the present application;
[0060] FIG6 is a schematic diagram of the appearance of a combined pixel according to an embodiment of the present application;
[0061] FIG7 is a schematic diagram of a first optical path state of an achromatic optical device based on a filter according to an embodiment of the present application;
[0062] FIG8 is a schematic diagram of a second optical path state of an achromatic optical device based on a filter according to an embodiment of the present application;
[0063] FIG9 is a schematic diagram of a third optical path state of a filter-based achromatic optical device after superposition of gratings of different thicknesses in one embodiment of the present application;
[0064] FIG10 is an imaging module in one embodiment of the present application;
[0065] FIG11 is a schematic diagram of a method for preparing an achromatic optical device based on a filter in one embodiment of the present application;
[0066] FIG12 is a schematic diagram of a conventional color filter manufacturing process according to an embodiment of the present application;
[0067] FIG13 is a schematic diagram of a conventional planar grating manufacturing process in one embodiment of the present application;
[0068] FIG14 is a schematic structural diagram of an achromatic programmable optical device based on optical filtering according to an embodiment of the present application;
[0069] FIG15 is a schematic diagram showing a first optical path state of the achromatic programmable optical device based on filtering according to the above embodiment of the present application;
[0070] FIG16 is a schematic diagram showing a second optical path state of the achromatic programmable optical device based on filtering according to the above embodiment of the present application;
[0071] FIG17 is a schematic diagram showing a third optical path state of the achromatic programmable optical device based on filtering according to the above embodiment of the present application;
[0072] FIG18A shows a schematic diagram of a first state of a combined pixel in an achromatic programmable optical device based on filtering according to the above embodiment of the present application;
[0073] FIG18B shows a second schematic diagram of a combined pixel in the filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0074] FIG18C shows a schematic diagram of a third state of a combined pixel in the filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0075] FIG18D shows a fourth state schematic diagram of a combined pixel in the filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0076] FIG19 shows a first example of a light deflection modulation structure in an achromatic programmable optical device based on filtering according to the above embodiment of the present application;
[0077] FIG20 shows a second example of a light deflection modulation structure in a filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0078] FIG21 shows a third example of a light deflection modulation structure in a filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0079] FIG22 shows a fourth example of a light deflection modulation structure in a filtering-based achromatic programmable optical device according to the above embodiment of the present application;
[0080] FIG23 is a block diagram of an imaging module according to an embodiment of the present application;
[0081] FIG24 is a flow chart of a method for manufacturing an achromatic programmable optical device based on filtering according to an embodiment of the present application. DETAILED DESCRIPTION
[0082] The following description is intended to disclose the present application and enable those skilled in the art to implement the present application. The preferred embodiments described below are for illustrative purposes only, and those skilled in the art may readily conceive of other obvious variations. The basic principles of the present application defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present application.
[0083] Those skilled in the art should understand that, in the disclosure of this application, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting this application.
[0084] In this application, the term "a" or "an" in the claims and the specification should be understood as "one or more." That is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple. Unless the disclosure of this application clearly indicates that the number of the element is only one, the term "a" or "an" should not be understood as unique or singular, and the term "a" or "an" should not be understood as a limitation on quantity.
[0085] In the description of this application, it should be understood that "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of this application, it should be noted that, unless otherwise clearly specified and limited, "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through a medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.
[0087] Refractive optics, such as converging lenses, generate phase differences based on optical path differences. Despite their bulky form factor, refractive optics are widely used as optical combiners and imaging optics in near-eye display devices. Diffractive optics, on the other hand, can provide the same phase pattern in a thinner form factor, but their chromatic dispersion is typically more pronounced than that of refractive optics. Another significant difference between refractive and diffractive optics is their opposite chromatic aberration behavior.
[0088] Taking a lens as an example, refer to Figure 1, which shows a schematic diagram of a refractive lens. A refractive lens is a refractive optical device whose focal length depends on the refractive index of the lens medium. According to Lensmaker's formula, of the incident red, green, and blue (RGB) light, red has the lowest refractive index and, therefore, the longest focal length. However, the order is reversed for a diffractive lens, as shown in Figure 2, which shows a schematic diagram of a diffractive lens. This is because for a diffractive lens, the diffraction angle is proportional to the wavelength. This means that red wavelengths will have a larger angle, resulting in a shorter focal length, than green and blue wavelengths.
[0089] An effective method for mitigating chromatic aberration is to combine diffractive optics with refractive optics. However, in such systems, the chromatic aberration to be corrected originates from the refractive optics, while the diffractive optics acts as a compensator. Consequently, the entire system remains bulky, and achieving high-quality achromatic imaging performance while maintaining a compact form factor and a large aperture remains a significant technical challenge. If these issues can be resolved, new possibilities for the practical application of diffractive optics will emerge.
[0090] Based on this, the present application provides a filtering-based achromatic optical device, a manufacturing method and application thereof, which can completely solve the dispersion problem; wherein the filtering-based achromatic optical device can attach a light deflection device to the surface of the filter layer to form a filter-based achromatic optical device.
[0091] Specifically, referring to FIG3 , FIG3 is a schematic structural diagram of an achromatic optical device based on a filter. An embodiment of the present application provides an achromatic optical device 1 based on a filter, comprising a filter layer 10 and a light deflection device 20;
[0092] The filter layer 10 includes a plurality of combined pixels 11, each of which is composed of a plurality of adjacently arranged single-color sub-pixels 110; each single-color sub-pixel 110 is configured to selectively transmit single-color light of a corresponding color and absorb light of other colors;
[0093] The light deflection device 20 is attached to the surface of the filter layer 10, and the light deflection device 20 includes a plurality of sub-light deflection devices 21, each of which matches the position of each monochrome sub-pixel 110, and each of which is used to adjust the propagation direction of the monochromatic light of the corresponding monochrome sub-pixel 110 to propagate the monochromatic light to a specified position.
[0094] Specifically, the light deflection device 20 and the filter layer 10 are disassembled for attachment, and the multiple sub-light deflection devices 21 can also be disassembled and attached to each other. In other specific embodiments, the attachment style of the grating can be determined based on actual conditions, and no specific restrictions are made here.
[0095] Specifically, white light, natural light, or mixed color light (i.e., light containing multiple colors) is irradiated onto the filter-based achromatic optical device 1, and each monochromatic sub-pixel 110 of the filter layer 10 only allows monochromatic light of a certain color to pass through. The monochromatic light refers to light of a narrow wavelength band.
[0096] The filter-based achromatic optical device 1 includes a filter layer 10 and a light deflection device 20. The filter layer 10 includes a plurality of combined pixels 11, each of which is composed of a plurality of adjacently arranged monochromatic sub-pixels 110. Each monochromatic sub-pixel 110 is configured to selectively transmit monochromatic light of a corresponding color and absorb light of other colors. The light deflection device 20 is attached to the surface of the filter layer 10 and includes a plurality of sub-light deflection devices 21, each of which is aligned with the position of a monochromatic sub-pixel 110 and configured to adjust the propagation direction of the monochromatic light of the corresponding monochromatic sub-pixel to direct the monochromatic light to a designated location. The filter-based achromatic optical device 1 simplifies the technology while ensuring improved dispersion elimination, thereby optimizing the imaging performance of the optical device.
[0097] In one embodiment, the light deflecting device 20 includes at least one of a microprism, a grating, a transmissive holographic optical device, and a metasurface device.
[0098] Specifically, optical deflection devices are devices used to change or adjust the path of a light beam. They have a wide range of applications in optical communications, imaging, laser processing, and other fields. Based on various design principles, optical deflection devices can achieve functions such as deflection, splitting, combining, and focusing of light beams, thereby meeting the needs of various optical systems.
[0099] Specifically, among light deflection devices, common ones include microprisms, gratings, transmissive holographic optical devices and metasurface devices.
[0100] A microprism is a device that uses the reflection effect of an array of tiny prisms on a mirror surface to change the direction of light beam propagation. By adjusting the shape, size, and arrangement of the microprisms, the beam can be precisely controlled and deflected.
[0101] Gratings utilize periodic optical elements to alter the propagation direction of a light beam through interference and diffraction. The grating constant and period can be adjusted as needed, enabling precise control of the light beam. Gratings offer wide spectral response, high resolution, and excellent tunability, making them widely used in laser spectrometers and wavelength division multiplexing in optical communication systems.
[0102] Transmissive holographic optical devices use the principle of holographic diffraction to change the propagation direction of a light beam. Through appropriate design and fabrication techniques, multiple holographic optical elements can be combined to achieve complex modulation and deflection of the light beam.
[0103] Metasurface devices are a new type of optical device whose basic structure consists of multiple micron-scale sub-waveguide units and control elements. By adjusting the phase and amplitude of the control elements, efficient control and deflection of the light beam can be achieved.
[0104] In the above embodiment, the light deflection device 20 is determined to be one of a microprism, a grating, a transmission holographic optical device, and a metasurface device, which can be comprehensively considered from a variety of devices to ensure accurate control and deflection of the light beam.
[0105] In one embodiment, the grating includes at least one of a relief grating and a PB grating.
[0106] Specifically, a relief grating is an optical element that uses the interference and diffraction effects of its surface microstructure to achieve functions such as light splitting, deflection, and spectral analysis. Compared to traditional planar gratings, relief gratings have a more complex three-dimensional structure, enabling more efficient optical performance.
[0107] The production process of relief grating generally includes the following steps: photoresist coating, exposure, development, etching and back removal of photoresist.
[0108] First, a photoresist is coated on the desired substrate. Photoresist is a special photosensitive material that can be formed into the desired photolithographic pattern through exposure and development.
[0109] Next, the photoresist surface is exposed to ultraviolet light using a photolithography machine. During the exposure process, the period and shape of the grating can be determined by controlling the position of the light source and mask of the photolithography machine.
[0110] The exposed sample is then developed, which removes the portions of the photoresist that were not exposed to the UV light. This development process can be done using either a wet or dry process, depending on the type of photoresist and the choice of developer.
[0111] After development, the sample is etched. Etching is the process of transferring the pattern exposed on the developed photoresist to the substrate. Common etching methods include wet etching and dry etching.
[0112] Finally, the back side is stripped of photoresist. In some cases, in order to reduce the impact of back side reflection of the relief grating on optical performance, it is necessary to remove the photoresist from the back side.
[0113] The production of relief gratings requires highly sophisticated equipment and processes. Photoresist coating must be uniform and well-controlled in thickness, and exposure requires precise alignment of the light source and mask. The development process requires careful control of developer concentration and duration to avoid over- or underdevelopment. The etching process requires careful consideration of both etch rate and depth. Each step requires stringent parameter control to ensure the final relief grating meets the desired design performance.
[0114] Specifically, PB grating, short for Planar Binary Grating, is a specialized optical element used to manipulate the transmission and reflection properties of incident light. PB gratings consist of periodic structures created by alternating transparent and opaque regions on a plane, with spacing comparable to the wavelength of the light wave.
[0115] Specifically, referring to Figure 4, Figure 4 is a schematic diagram of the manufacturing process of the PB grating. First, the photocalibration material is dissolved and spin-coated onto a clean glass substrate. BY (an organic diazo dye) and SD1 (sulfonic acid dye 1) are two commonly used photo-orientation materials. Both BY and SD1 have excellent photo-orientation effects. Secondly, a 457nm laser is used to expose the photo-orientation layer. A uniform LC material layer is formed after spin coating using the reactive intermediate RM257. Finally, the PB grating is exposed to ultraviolet light to achieve grating stabilization. In other specific embodiments, the detailed quantitative parameters for the preparation of the PB grating can be determined based on the actual requirements for dispersion elimination, and are not limited here.
[0116] Specifically, the PB grating may also be a geometric metasurface grating or an ECB grating.
[0117] Specifically, geometric metasurface grating (GMG). A geometric metasurface is an artificial structure designed with microscopic geometric shapes that can control the propagation of incident light with great precision. Compared with traditional gratings, GMGs have higher degrees of freedom and can realize more complex optical functions such as lenses, polarization control, and light beams. By adjusting the structural parameters of the GMG, the phase, amplitude, and polarization state of the light wave can be precisely controlled.
[0118] ECB grating refers to electrically controlled birefringence grating (ECB), a grating structure used in liquid crystal light modulators. ECB gratings control the direction of liquid crystal molecules by applying an electric field, thereby manipulating the propagation characteristics of light. ECB gratings are based on the electro-birefringence properties of liquid crystal materials. Liquid crystals have two main refractive indices: the fast-axis refractive index and the slow-axis refractive index. When liquid crystal molecules are aligned along the fast axis, light will experience birefringence inside them, and the light wave will be split into two light waves with different phases, called fast-axis light and slow-axis light. When liquid crystal molecules are aligned along the slow axis, light only has one refractive index when propagating. The principle of ECB grating is to modulate the direction of liquid crystal molecules through an electric field, causing them to switch between the fast axis and the slow axis, thereby achieving light modulation.
[0119] The structure is as follows: An ECB grating typically consists of two parallel transparent electrode plates with a liquid crystal material filling the gap. One of the electrode plates has a fine grating structure that produces spatial phase modulation. Under the influence of an electric field, the liquid crystal molecules align along the direction of the field, thereby changing the propagation characteristics of light. A typical ECB grating structure includes a control plane, an encapsulation plate, and an alignment film.
[0120] ECB gratings are widely used in display technology. Common applications include LCD televisions, LCD monitors, and projectors. These devices display and modulate images by controlling the electric field of the ECB grating. Compared to other liquid crystal modulators, ECB gratings offer advantages such as fast response, high contrast, and a wide viewing angle. Furthermore, because ECB gratings can adjust grayscale levels, they can also be used to display images with varying grayscale levels.
[0121] In one embodiment, the multiple monochromatic sub-pixels 110 corresponding to the same combined pixel 11 are of different light-transmitting types, and are respectively used to transmit monochromatic light of different colors.
[0122] It should be understood that the monochromatic light mentioned in this application refers to a narrow wavelength band. For example, monochromatic light can be visible light such as red, green, or blue light, or it can be light of various narrow wavelength bands such as infrared light. The combined pixel can be obtained by combining different monochromatic sub-pixels based on different arrangements. For example, red, green, and blue monochromatic sub-pixels can be a group of combined pixels. In some other embodiments, red and green monochromatic sub-pixels can also be a group of combined pixels; green and blue monochromatic sub-pixels can also be a group of combined pixels; and red and blue monochromatic sub-pixels can also be a group of combined pixels. This is not limited to one by one here.
[0123] In the above embodiment, based on the multiple monochromatic sub-pixels 110 corresponding to the combined pixel 11, accurate transmission of monochromatic light can be achieved, thereby improving the separation efficiency of white light.
[0124] In one embodiment, referring to FIG. 5 , FIG. 5 is a schematic diagram of an RGB filter layer, wherein the filter layer 10 is an RGB filter layer 100 ; each of the combined pixels 11 in the RGB filter layer 100 includes a red sub-pixel 111 for selectively transmitting red light, a green sub-pixel 112 for selectively transmitting green light, and a blue sub-pixel 113 for selectively transmitting blue light.
[0125] Specifically, as mentioned in this embodiment, the red light band may be between 600nm and 630nm; the green light band may be between 500nm and 600nm; and the blue light band may be between 430nm and 470nm.
[0126] It is understandable that in other examples of the present application, the filter layer 10 can also be implemented as a filter layer composed of other color combinations, such as a three-color filter layer based on red, yellow and blue, etc., which will not be described in detail here.
[0127] For example, the RGB filter layer 100 of the present application can be manufactured through processes such as lamination, coating, or deposition coating. It is understood that the RGB filter layer 100 of the present application is generally a mixture of pigment and resin, which selectively absorbs two of the RGB colors and transmits one color. Its manufacturing process is very mature and widely used in LCD screens in the liquid crystal display industry and CMOS image sensors in the imaging industry. This application will not elaborate on this process. In addition, the transmittance and light transmission bandwidth of the monochrome sub-pixels 110 in the RGB filter layer 100 of the present application can be adjusted, for example, by adjusting the pigment concentration or the thickness of the film layer.
[0128] In the above embodiment, the filter layer 10 is determined to be an RGB filter layer 100, which can accurately achieve the transmission of red, blue and green light.
[0129] In one embodiment, the characteristic width of the monochrome sub-pixel 110 is within the geometric optical region.
[0130] Specifically, in order to avoid diffraction interference between different monochrome sub-pixels 110, the characteristic width of the monochrome sub-pixel 110 in this embodiment is required to be in the geometric optical area; for example, the width of each monochrome sub-pixel 110 is greater than one hundred wavelengths of the corresponding monochromatic light, that is, the width of each monochrome sub-pixel 110 is more than one hundred times the wavelength of the corresponding monochromatic light.
[0131] It can be understood that the geometric optical area mentioned in the present application refers to a size that is more than one hundred times the wavelength. In other embodiments, the size of the geometric optical area can also be determined based on actual conditions.
[0132] Specifically, according to scalar diffraction theory, the characteristic width of a pixel depends on the optical system used, and the characteristic width of the monochrome sub-pixel 110 refers to the width corresponding to the structure constituting the monochrome sub-pixel.
[0133] In the above embodiment, the characteristic width of the monochromatic sub-pixel 110 is within the geometric optical region, thereby minimizing diffraction interference.
[0134] In one embodiment, referring to FIG. 6 , FIG. 6 is a schematic diagram of the appearance of a combined pixel. The combined pixel 11 is in the shape of a square, a strip, or a circular strip.
[0135] Specifically, the combined pixel 11 of the present application may also be implemented in other forms, as long as it can be ensured that each combined pixel 11 includes monochrome sub-pixels 110 of different colors, which will not be elaborated in this application.
[0136] In the above embodiment, the shape of the combined pixel is determined to be one of a square, a strip, and a circular strip, which meets various transmission requirements in different application scenarios.
[0137] In one embodiment, referring to FIG. 7 , FIG. 7 is a schematic diagram of a first optical path state of the filter-based achromatic optical device, wherein the light deflection device 20 is configured to converge the monochromatic light of all the monochromatic sub-pixels 110 passing through the filter layer 10 at the same designated position.
[0138] Specifically, in the filter-based achromatic optical device 1 of this embodiment, the light deflection device 20 is used to converge the monochromatic light of all the monochromatic sub-pixels 110 passing through the filter layer 10 at the same designated position. In the above embodiment, the filter-based achromatic optical device 1 of this application can realize the application function of a traditional curved lens in white light imaging, and also has the advantages of small size and light weight.
[0139] In one embodiment, referring to FIG8 , FIG8 is a schematic diagram of the second optical path state of the filter-based achromatic optical device, and the light deflection device 20 is used to make the monochromatic light of multiple monochromatic sub-pixels 110 corresponding to the same combined pixel 11 converge at the same designated position; wherein, the designated positions corresponding to different combined pixels 11 are different.
[0140] The light deflection device 20 is used to make the monochromatic lights of the multiple monochromatic sub-pixels 110 corresponding to the same combined pixel 11 converge at the same designated position, that is, the focal points corresponding to different groups are also different.
[0141] In the above-mentioned embodiment, the filter-based achromatic optical device 1 of the present application can achieve the effects brought by the traditional microlens array to meet the requirements of corresponding imaging applications.
[0142] In one embodiment, if the light deflection device 20 is a PB grating, the period of the PB grating is on the micrometer scale. Specifically, the grating period refers to the length from one refractive index change point to the adjacent refractive index change point. Designing the PB grating period to be on the micrometer scale can eliminate the adverse effects of light dispersion in most scenarios.
[0143] In one embodiment, the thickness of the light deflecting device 20 is determined based on a preset wavelength and a preset diffraction angle.
[0144] Specifically, refer to Figure 9, which is a schematic diagram of the third optical path state of the filter-based achromatic optical device after superposition of gratings of different thicknesses. The sub-light deflection device 21 diffracts and separates light waves according to its surface structure. Therefore, when a single sub-light deflection device 21 cannot meet the requirements of the preset diffraction angle, the sub-light deflection devices can be superimposed.
[0145] Take the sub-light deflection device 21 as a PB grating as an example:
[0146] The light incident on the PB grating is diffracted according to the grating equation, which is as follows: mλ=d(sinα+sinβ);
[0147] Where: m is an integer value describing the diffraction (or spectral) order, λ is the wavelength of the light, d is the spacing between the grooves on the grating, α is the angle of incidence of the light, and β is the diffraction angle of the light leaving the grating.
[0148] Constructive interference of the different diffracted wavefronts occurs at integer multiples of the wavelength, known as "m," which defines the diffraction order, where a diffraction angle of m = 1 is considered "first order" diffraction and m = 2 is considered "second order" diffraction. If m = 0, the light is reflected directly from or transmitted through the grating, and this light is considered "0th order" diffraction.
[0149] In the principle of wave superposition, if the crests (or troughs) of two waves arrive at the same location at the same time, the two waves are said to be in phase at that point, and the interfering wave will produce the largest amplitude, which is called constructive interference.
[0150] In one embodiment, the optical lens 3 comprises any filter-based achromatic optical device.
[0151] In one embodiment, as shown in Figure 10, an embodiment of the present application further provides an imaging module, which may include a photosensitive component 2 and an optical lens 3 having the above-mentioned filter-based achromatic optical device 1, and the optical lens 3 is located on the photosensitive side of the photosensitive component 2, so as to utilize the filter-based achromatic optical device 1 to replace the traditional lens to achieve high-quality and clean white light imaging.
[0152] It is worth noting that the optical lens 3 mentioned in this application can include only the filter-based achromatic optical device 1, or can be composed of the filter-based achromatic optical device 1 and a traditional lens. In addition, in addition to being able to be used in the imaging module for imaging modulation, the optical lens 3 mentioned in this application can also be used in other scenarios such as the eyepiece or objective lens in a microscope according to actual needs, and will not be described in detail here.
[0153] According to another aspect of the present application, as shown in FIG11 , an embodiment of the present application further provides a method for manufacturing an achromatic optical device based on a filter, which may include the steps of:
[0154] S110: Sending a first instruction to a color film preparation device to control the device to produce a filter layer, where the filter layer includes a plurality of combined pixels, wherein each combined pixel is composed of a plurality of adjacently arranged single-color sub-pixels, and each single-color sub-pixel is configured to selectively transmit single-color light of a corresponding color and absorb light of other colors;
[0155] S120: Send a second instruction to the optical device preparation equipment to control the equipment to produce a light deflection device, which is attached to the surface of the filter layer. The light deflection device includes multiple sub-light deflection devices, each of which corresponds to the position of each monochrome sub-pixel one by one, and each of which is used to adjust the propagation direction of the monochromatic light of the corresponding monochrome sub-pixel to propagate the monochromatic light to a specified position.
[0156] It is worth noting that in step S110 of the present application, the filter layer can be prepared by attachment, coating or deposition coating process.
[0157] For example, refer to Figure 12, which is a schematic diagram of the traditional filter layer color film manufacturing process. First, a glass substrate is obtained and then cleaned; secondly, a black matrix is attached to the glass substrate, and then a red color photoresist is applied, exposed, developed, and then cleaned for the first time.
[0158] Apply green color photoresist and blue color photoresist in sequence according to the same steps as above, that is: apply green color photoresist, expose, develop, and perform a second cleaning; apply blue color photoresist, expose, develop, and perform a third cleaning.
[0159] After the above steps, a color filter is finally obtained.
[0160] Optionally, in step S120 of the present application: a sub-light deflection device is prepared by photolithography or nanoimprinting process.
[0161] Among them, the sub-light deflection device can also be replaced with other types of grating layers. For example, the nanoimprint process can be used to produce a metasurface optical structure. The preparation process is as follows: first, photoresist is applied to the surface of the color filter layer; then, it is imprinted with a mold to be demolded after curing by light / heat; then, after removing the residual glue, the color filter layer is etched; finally, all the photoresist is removed to produce a metasurface optical structure in the color filter layer.
[0162] When using photolithography to create a metasurface optical structure, photoresist is first applied to the surface of the color filter layer; then it is exposed and developed to form a photoresist mask; then the color filter layer is etched; and finally, all the photoresist is removed to create the metasurface optical structure within the color filter layer.
[0163] For example, refer to FIG13 , which is a schematic diagram of a conventional planar grating manufacturing process.
[0164] Step 1: Clean the substrate glass;
[0165] During the LCD grating fabrication process, the first step is to clean the substrate glass. This is a crucial step, as any contaminants on the substrate surface can adversely affect subsequent processing steps. Various cleaning methods, such as ultrasonic cleaning and solvent cleaning, can be used to remove contaminants and impurities from the substrate glass. After cleaning, the substrate glass should be kept dry to facilitate further processing.
[0166] Step 2: coating a liquid crystal alignment layer;
[0167] The next step is to apply the liquid crystal alignment layer. This layer serves as the foundation for the alignment of liquid crystal molecules, and its quality and performance are crucial for the fabrication of liquid crystal gratings. Typically composed of organic macromolecular materials, this layer possesses high surface energy and a specific surface orientation, guiding the liquid crystal molecules to align in a specific direction. When applying the layer, careful attention must be paid to uniformity and thickness control to ensure the correct orientation of the liquid crystal molecules in subsequent steps.
[0168] Step 3: Dual-beam interference exposure alignment;
[0169] In the third step, dual-beam interference exposure is used to align the liquid crystal. Interference exposure creates a periodic light intensity distribution pattern. This pattern influences the alignment of the liquid crystal molecules, controlling their orientation. Dual-beam interference exposure offers greater precision and flexibility, enabling more complex alignment of liquid crystal molecules to meet the requirements of diverse applications.
[0170] Step 4: The molecules in the alignment layer form a periodic arrangement along the designed distribution;
[0171] In the fourth step, the molecules in the liquid crystal alignment layer are arranged according to a pre-designed pattern. This arrangement is periodic, forming an ordered structure. By precisely controlling the position and orientation of the molecules in the liquid crystal alignment layer, directional alignment of the liquid crystal molecules can be achieved. This ordered arrangement can alter the optical properties and response characteristics of the liquid crystal molecules, providing the basis for the functionality of the liquid crystal grating.
[0172] Step 5: Apply liquid crystal, and the liquid crystal molecules follow the alignment molecules to arrange themselves, and the thickness of the liquid crystal layer meets the design requirements;
[0173] The next fifth step is to apply liquid crystal material onto the alignment layer. During this step, the liquid crystal molecules align themselves according to the alignment molecules. By controlling the thickness of the liquid crystal layer, the response characteristics and optical properties of the liquid crystal molecules can be adjusted. The thickness of the liquid crystal layer typically requires precise control to ensure the desired optical effect and display performance.
[0174] In the sixth step, the liquid crystal molecules are exposed to ultraviolet light to polymerize into a film, and the grating is completed.
[0175] The final step is to subject the liquid crystal molecules to a UV-light polymerization reaction, transforming them into a solid film. UV exposure excites free radicals within the liquid crystal molecules, which react with surrounding molecules to form a cross-linked network. This cross-linking maintains the orderly arrangement of the liquid crystal molecules and increases the mechanical strength and stability of the liquid crystal layer. Once fabricated, the planar grating can be used in a variety of liquid crystal displays and optical devices.
[0176] Through the six steps above, we have detailed the fabrication process of a planar grating. This process requires careful operation and precise control to ensure the excellent performance and reliable quality of the planar grating. Gratings play a vital role in modern optics and display technology, and their fabrication process is constantly being improved and optimized to meet evolving application demands.
[0177] Those skilled in the art will appreciate that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, database or other media used in the embodiments provided in this application may include at least one of non-volatile and volatile memory. Non-volatile memory may include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory may include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in the various embodiments provided herein may include at least one of a relational database and a non-relational database. Non-relational databases may include, but are not limited to, distributed databases based on blockchains. The processor involved in the various embodiments provided herein may be, but are not limited to, a general-purpose processor, a central processing unit, a graphics processing unit, a digital signal processor, a programmable logic unit, a data processing logic unit based on quantum computing, and the like.
[0178] It is worth mentioning that in other embodiments of the present application, the filtering-based achromatic optical device can also form a light deflection modulation structure in the color filter layer to form a filtering-based achromatic programmable optical device, which can completely solve the dispersion problem so as to completely replace the application of traditional curved lenses in white light imaging.
[0179] Specifically, referring to Figures 14 to 22 of the accompanying drawings in the specification of the present application, according to one embodiment of the present application, a filtering-based achromatic programmable optical device 1A is provided, which may include a transparent substrate 10A, a color filter layer 20A attached to the transparent substrate 10A, and a light deflection modulation structure 30A formed on the color filter layer 20A.
[0180] More specifically, as shown in Figures 14 to 17 , the color filter layer 20A may include a plurality of combined pixels 21A arranged on the light-transmitting substrate 10A. Each combined pixel 21A is composed of a plurality of adjacently arranged monochromatic sub-pixels 210A. Each monochromatic sub-pixel 210A is configured to selectively transmit monochromatic light of a corresponding color and absorb light of other colors. The light deflection modulation structure 30A includes a plurality of light deflection modulation units 300A corresponding one-to-one to each monochromatic sub-pixel 210A. These units are configured to simultaneously filter light and modulate the propagation direction of the transmitted light, thereby ensuring that the monochromatic light transmitted through the monochromatic sub-pixel 210A is directed to a desired location. This completely eliminates chromatic aberration and resolves the dispersion problem.
[0181] It is noteworthy that because the light deflection modulation structure 30A of the present application is directly formed on the color filter layer 20A, and the monochromatic sub-pixels 210A correspond one-to-one with the light deflection modulation units 300A, although the light irradiating the filter-based achromatic programmable optical device 1A may be white light or mixed-color light (i.e., light containing multiple colors), each monochromatic sub-pixel 210A only allows monochromatic light of a certain color to pass through, ensuring that each light deflection modulation unit 300A only modulates monochromatic light of the same color, without modulating light of different colors. This eliminates chromatic aberration in principle and completely solves the dispersion problem. It should be understood that the monochromatic light mentioned in this application refers to a narrow band. For example, monochromatic light can be visible light such as red, green, or blue light, or it can be light of various narrow bands such as infrared light.
[0182] For example, in the first example of the present application, as shown in FIG15 , the multiple monochromatic sub-pixels 210A in each combined pixel 21A have different colors, and the light deflection modulation structure 30A is used to converge the monochromatic light passing through all the monochromatic sub-pixels 210A in each combined pixel 21A to a single designated location, such as a focal point. Thus, because the filter-based achromatic programmable optical device 1A of the present application integrates the light deflection modulation structure 30A with the color filter layer 20A, white light can be deflected and modulated while eliminating chromatic aberration regardless of which side the filter-based achromatic programmable optical device 1A is incident from, achieving high-quality and clean imaging, thereby fully realizing the potential of the filter-based achromatic programmable optical device 1A in the white light imaging industry.
[0183] In particular, as shown in FIG15 , in the filtering-based achromatic programmable optical device 1A of the present application, light rays passing through all the combined pixels 21A converge at the same designated position at the same time, so that the filtering-based achromatic programmable optical device 1A of the present application can completely replace the application of traditional curved lenses in white light imaging, while still having the advantages of small size and light weight.
[0184] Optionally, in the second example of the present application, as shown in FIG16 , light rays passing through different combined pixels 21A converge at different designated positions (such as different focal points), so that the filter-based achromatic programmable optical device 1A of the present application can be a traditional microlens array to meet the needs of corresponding imaging applications.
[0185] In addition, in the third example of the present application, as shown in FIG17 , monochromatic light having the same color passing through the monochromatic sub-pixel 210A can be converged at the same designated position to achieve the desired light programming effect.
[0186] Preferably, as shown in Figures 14 to 17, the thickness of the color filter layer 20A is greater than the height / depth of the light deflection modulation structure 30A, so as to form a filter substrate between the light deflection modulation structure 30A and the transparent substrate 10A, ensuring that the color filter layer 20A effectively filters light, allowing only light of a specific color to pass through and preventing light of other colors from passing through.
[0187] For example, the light-transmitting substrate 10A of the present application may be, but is not limited to, implemented as a glass substrate, a plastic substrate, or a polymer material substrate, etc., as long as it can allow light to pass through, and this application will not elaborate on this.
[0188] Furthermore, as shown in Figures 14 to 17 , the color filter layer 20A of the present application can be, but is not limited to, implemented as an RGB color filter 200A. That is, each combined pixel 21A in the RGB color filter 200A can include a red sub-pixel 211A for selectively transmitting red light, a green sub-pixel 212A for selectively transmitting green light, and a blue sub-pixel 213A for selectively transmitting blue light. It should be understood that the red light band mentioned in this application can be between 600 nanometers and 630 nanometers, the green light band can be between 500 nanometers and 600 nanometers, and the blue light band can be between 430 nanometers and 470 nanometers.
[0189] It is worth noting that in other examples of the present application, the color filter layer 20A can also be implemented as a color filter composed of other color combinations, such as a three-color filter based on red, yellow, and blue.
[0190] Optionally, the RGB color filter 200A of the present application is attached to the surface of the light-transmitting substrate 10A by processes such as attachment, coating, or deposition coating. It is understood that the RGB color filter 200A of the present application is generally a mixture of pigments and resins, which can selectively absorb two colors of RGB and transmit one color. Its manufacturing process is very mature and is widely used in LCD screens in the liquid crystal display industry or CMOS image sensors in the imaging industry. This application will not go into details. In addition, the transmittance and light transmission bandwidth of the monochrome sub-pixel 210A in the RGB color filter 200A of the present application can be adjusted, such as by adjusting the concentration of the pigment or the thickness of the film layer.
[0191] Optionally, to avoid diffraction interference between different monochromatic sub-pixels 210A, the characteristic width of the monochromatic sub-pixels 210A of the present application is required to be within the geometric optical area; for example, the width of each monochromatic sub-pixel 210A is greater than one hundred wavelengths of the corresponding monochromatic light, that is, the width of each monochromatic sub-pixel 210A is at least one hundred times the wavelength of the corresponding monochromatic light. It will be understood that the geometric optical area mentioned in the present application refers to a size that is greater than one hundred times the wavelength.
[0192] It is worth noting that the shape of the combined pixel 21A can be, but is not limited to, a square as shown in FIG18A , a strip as shown in FIG18B and FIG18C , or a circular strip as shown in FIG18D . It is understood that the combined pixel 21A of the present application can also be implemented in other shapes, as long as each combined pixel 21A can include monochromatic sub-pixels 210A of different colors. This application will not elaborate on this.
[0193] According to the above-mentioned embodiments of the present application, the light deflection modulation structure 30A of the present application can be, but is not limited to, implemented as an optical structure with light deflection modulation function such as a metasurface optical structure, a microgeometric optical structure or a diffraction optical structure, wherein each light deflection modulation unit 300A can be individually designed according to the corresponding light deflection modulation requirements, so that all monochromatic light passing through each combined pixel 21A can converge at the same point.
[0194] It is worth noting that each light deflection modulation unit 300A in the metasurface optical structure of the present application can transmit the corresponding transmitted light to a designated position (such as a focus), thereby eliminating the chromatic aberration existing in the metasurface itself.
[0195] For example, in the first example of the present application, as shown in FIG19 , the light deflection modulation structure 30A is implemented as a transmission phase-type metasurface 31A formed on the color filter layer 20A, so as to facilitate the realization of metasurface optical imaging.
[0196] Optionally, as shown in FIG19 , each light deflection modulation unit 300A in the transmission phase-type metasurface 31A includes a plurality of periodically arranged dielectric pillars 310A of varying widths. The characteristic dimensions of the dielectric pillars 310A are required to be in the subwavelength region. For example, the width of the dielectric pillars 310A is less than half the wavelength of the corresponding monochromatic light, and the depth of the dielectric pillars 310A is greater than the wavelength of the corresponding monochromatic light. It will be appreciated that the transmission phase-type metasurface 31A of the present application does not require the polarization state of light when performing light deflection modulation, and thus has a wide range of applications.
[0197] In the second example of the present application, as shown in FIG20 , the light deflection modulation structure 30A is implemented as a geometric phase-type metasurface 32A formed on the color filter layer 20A, so as to facilitate metasurface optical imaging.
[0198] Optionally, as shown in FIG20 , each light deflection modulation unit 300A in the geometric phase-type metasurface 32A includes a plurality of pillars 320A arranged in an array with varying pointing angles. The characteristic width of each pillar 320A is required to be in the subwavelength region. For example, each pillar 320A is a rectangular metal pillar having a subwavelength rectangular cross-section. The height of each pillar 320A can be much greater than the wavelength of the corresponding monochromatic light. It is understood that the equivalent refractive index (i.e., the average refractive index of the material and air) seen by light along the long side of each pillar 320A is greater than the equivalent refractive index seen along the short side of each pillar 320A, making the geometric phase-type metasurface 32A equivalent to a row of liquid crystals.
[0199] In addition, although the geometric phase metasurface 32A of the present application is sensitive to the polarization state of light when performing light deflection modulation, it satisfies the half-wave condition: When the optical rotation polarization wavefront is modulated, the optical rotation polarization wavefront can be modulated to meet the needs of specific application scenarios.
[0200] In a third example of the present application, as shown in FIG21 , the light deflection modulation structure 30A is implemented as a micro-geometric lens array 33A formed on the color filter layer 20A to modulate the phase by refraction to facilitate geometric optical imaging.
[0201] Optionally, as shown in FIG21 , each light deflection modulation unit 300A in the micro-geometric lens array 33A can be, but is not limited to, implemented as a Fresnel lens 330A corresponding one-to-one to a monochromatic sub-pixel 210A. In this manner, the geometric dimensions of each Fresnel lens 330A are comparable to the dimensions of the monochromatic sub-pixel 210A, i.e., much larger than the wavelength; for example, the geometric dimensions of each Fresnel lens 330A are one hundred times the wavelength of the corresponding monochromatic light. It will be appreciated that each Fresnel lens 330A can refract the corresponding transmitted light to a designated location (e.g., a focal point), thereby eliminating chromatic aberration associated with refractive optics.
[0202] In a fourth example of the present application, as shown in FIG22 , the light deflection modulation structure 30A is implemented as a diffraction grating array 34A formed on the color filter layer 20A to modulate the phase by diffraction to facilitate diffraction grating imaging.
[0203] Optionally, as shown in FIG22 , each light deflection modulation unit 300A in the diffraction grating array 34A can be implemented, but is not limited to, as a relief grating 340A corresponding one-to-one to the monochrome sub-pixel 210A. It will be appreciated that each relief grating 340A can operate at a specific diffraction order. The relief grating 340A corresponding to the monochrome sub-pixel 210A can diffract the corresponding transmitted light to a specified position (e.g., a focal point), thereby eliminating chromatic aberration in diffraction optics. Furthermore, because the geometric dimensions of the monochrome sub-pixels 210A of the present application are much larger than the wavelength, such as one hundred times the wavelength, the relief grating 340A corresponding to each monochrome sub-pixel 210A operates as a whole in the refractive optical region.
[0204] According to another aspect of the present application, as shown in Figure 23, an embodiment of the present application further provides an imaging module, which may include a photosensitive component 2A and an optical lens 3A having the above-mentioned filtering-based achromatic programmable optical device 1A, and the optical lens 3A is located on the photosensitive side of the photosensitive component 2A so as to utilize the filtering-based achromatic programmable optical device 1A to replace the traditional lens to achieve high-quality and clean white light imaging.
[0205] It is worth noting that the optical lens 3A mentioned in this application can include only the achromatic programmable optical device 1A based on filtering, or it can be composed of the achromatic programmable optical device 1A based on filtering and a traditional lens. In addition, in addition to being able to be used in imaging modulation within the imaging module, the optical lens 3A mentioned in this application can also be used in other scenarios such as the eyepiece or objective lens in a microscope, which will not be described in detail in this application.
[0206] According to another aspect of the present application, as shown in FIG24 , an embodiment of the present application further provides a method for manufacturing an achromatic programmable optical device based on optical filtering, which may include the steps of:
[0207] S210: forming a color filter layer on a light-transmitting substrate to form a plurality of combination pixels arranged on the light-transmitting substrate, wherein each combination pixel is composed of a plurality of adjacently arranged single-color sub-pixels, and each single-color sub-pixel is configured to selectively transmit single-color light of a corresponding color and absorb light of other colors; and
[0208] S220: Making a light deflection modulation structure on the color filter layer to form a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, for modulating the propagation direction of the transmitted light to a specified position while the monochrome sub-pixels filter the light.
[0209] It is worth noting that in step S210 of the present application: the RGB color filter is attached to the surface of the light-transmitting substrate by an attachment, coating or deposition coating process.
[0210] Optionally, in step S220 of the present application: one of a metasurface optical structure, a micro-geometric optical structure and a diffraction optical structure is produced in the color filter layer through a photolithography or nano-imprinting process.
[0211] For example, when using the nanoimprint process to produce a metasurface optical structure: first, photoresist is applied to the surface of the color filter layer; then, it is imprinted with a mold to be demolded after curing by light / heat; then, after removing the residual resist, the color filter layer is etched; finally, all the photoresist is removed to produce the metasurface optical structure within the color filter layer.
[0212] When using photolithography to create a metasurface optical structure, photoresist is first applied to the surface of the color filter layer; then it is exposed and developed to form a photoresist mask; then the color filter layer is etched; and finally, all the photoresist is removed to create the metasurface optical structure within the color filter layer.
[0213] The various technical features of the above embodiment can be combined arbitrarily. In order to make the description concise, not all possible combinations of the various technical features in the above embodiment are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0214] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.
Claims
1. Achromatic optical devices based on filtering, including filter layers and light deflection devices; The filter layer includes a plurality of combined pixels, each of which is composed of a plurality of adjacently arranged monochrome sub-pixels; each of the monochrome sub-pixels is used to selectively transmit monochrome light of a corresponding color and absorb light of other colors; The light deflection device is attached to the surface of the filter layer, and includes a plurality of sub-light deflection devices, each of which corresponds to the position of each monochrome sub-pixel, and each of which is used to adjust the propagation direction of the monochrome light of the corresponding monochrome sub-pixel to propagate the monochrome light to a specified position.
2. The filter-based achromatic optical device according to claim 1, wherein: The light deflection device includes at least one of a microprism, a grating, a transmission holographic optical device, and a metasurface device.
3. The filter-based achromatic optical device according to claim 2, wherein: The grating includes at least one of a relief grating and a PB grating.
4. The filter-based achromatic optical device of claim 1, wherein: The multiple monochrome sub-pixels corresponding to the same combined pixel are of different light-transmitting types and are respectively used to transmit monochrome lights of different colors.
5. The filter-based achromatic optical device of claim 1, wherein: The filter layer is an RGB filter layer; each of the combined pixels in the RGB filter layer includes a red sub-pixel for selectively transmitting red light, a green sub-pixel for selectively transmitting green light, and a blue sub-pixel for selectively transmitting blue light.
6. The filter-based achromatic optical device of claim 1, wherein: The characteristic width of the monochrome sub-pixel is within the geometrical optical region.
7. The filter-based achromatic optical device of claim 1, wherein: The shape of the combined pixel includes at least one of a square, a strip and a ring.
8. The filter-based achromatic optical device of claim 1, wherein: The light deflection device is used to converge the monochromatic lights of all the monochromatic sub-pixels passing through the filter layer at the same designated position.
9. The filter-based achromatic optical device of claim 1, wherein: The light deflection device is used to converge the monochromatic lights of multiple monochromatic sub-pixels corresponding to the same combined pixel at the same designated position; wherein the designated positions corresponding to different combined pixels are different.
10. An optical lens, comprising an achromatic optical device based on light filtering, wherein the achromatic optical device based on light filtering comprises a light filtering layer and a light deflection device; The filter layer includes a plurality of combined pixels, each of which is composed of a plurality of adjacently arranged monochrome sub-pixels; each of the monochrome sub-pixels is used to selectively transmit monochrome light of a corresponding color and absorb light of other colors; The light deflection device is attached to the surface of the filter layer, and includes a plurality of sub-light deflection devices, each of which corresponds to the position of each monochrome sub-pixel, and each of which is used to adjust the propagation direction of the monochrome light of the corresponding monochrome sub-pixel to propagate the monochrome light to a specified position.
11. Imaging module, including: A photosensitive component and an optical lens, wherein the optical lens is located on the photosensitive side of the photosensitive component; wherein the optical lens comprises an achromatic optical device based on light filtering, wherein the achromatic optical device based on light filtering comprises a light filtering layer and a light deflection device; The filter layer includes a plurality of combined pixels, each of which is composed of a plurality of adjacently arranged monochrome sub-pixels; each of the monochrome sub-pixels is used to selectively transmit monochrome light of a corresponding color and absorb light of other colors; The light deflection device is attached to the surface of the filter layer, and includes a plurality of sub-light deflection devices, each of which corresponds to the position of each monochrome sub-pixel, and each of which is used to adjust the propagation direction of the monochrome light of the corresponding monochrome sub-pixel to propagate the monochrome light to a specified position.
12. Achromatic optical devices based on filtering, including: Light-transmitting substrate; The color filter layer attached to the light-transmitting substrate comprises a plurality of combined pixels arranged on the light-transmitting substrate, each of the combined pixels is composed of a plurality of adjacently arranged monochrome sub-pixels; each of the monochrome sub-pixels is used to selectively transmit monochrome light of a corresponding color and absorb Other colors of light; as well as The light deflection modulation structure formed in the color filter layer includes a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, and is used to modulate the propagation direction of the transmitted light to propagate to a designated position while the monochrome sub-pixels filter the light.
13. The filter-based achromatic optical device of claim 12, wherein: The plurality of monochromatic sub-pixels in each of the combined pixels have different colors, and the light deflection modulation structure is used to converge the monochromatic light passing through all of the monochromatic sub-pixels in each of the combined pixels at the same designated position.
14. The filter-based achromatic optical device of claim 12, wherein: The plurality of monochromatic sub-pixels in each of the combined pixels have different colors, and the light deflection modulation structure is used to converge monochromatic lights having the same color that pass through the monochromatic sub-pixels at the same designated position.
15. The filter-based achromatic optical device of claim 12, wherein: The color filter layer is an RGB color filter; each of the combined pixels in the RGB color filter includes a red sub-pixel for selectively transmitting red light, a green sub-pixel for selectively transmitting green light, and a blue sub-pixel for selectively transmitting blue light.
16. The filter-based achromatic optical device of claim 12, wherein: The characteristic width of the monochrome sub-pixel is required to be within the geometric optical region.
17. The filter-based achromatic optical device of claim 12, wherein: The combined pixel is in a shape of a square, a strip, or a circular strip.
18. The filter-based achromatic optical device of claim 12, wherein: The thickness of the color filter layer is greater than the height or depth of the light deflection modulation structure, so as to form a filter substrate between the light deflection modulation structure and the light-transmitting substrate.
19. The filter-based achromatic optical device according to any one of claims 12 to 18, wherein: The light deflection modulation structure is one of a metasurface optical structure, a microgeometric optical structure and a diffraction optical structure.
20. The filter-based achromatic optical device according to any one of claims 12 to 18, wherein: The light deflection modulation structure is a transmission phase type metasurface formed on the color filter layer; each of the light deflection modulation units in the transmission phase type metasurface includes a plurality of dielectric columns arranged periodically and having different widths, and the characteristic dimensions of the dielectric columns are required to be in the sub-wavelength region.
21. The filter-based achromatic optical device according to any one of claims 12 to 18, wherein: The light deflection modulation structure is a geometric phase-type metasurface formed on the color filter layer; each of the light deflection modulation units in the geometric phase-type metasurface includes a plurality of columns arranged in an array and with varying pointing angles, and the characteristic width of the columns is required to be in the sub-wavelength region.
22. The filter-based achromatic optical device according to any one of claims 12 to 18, wherein: The light deflection modulation structure is a micro-geometric lens array formed on the color filter layer; each of the light deflection modulation units in the micro-geometric lens array is a Fresnel lens corresponding to the monochrome sub-pixel one by one.
23. The filter-based achromatic optical device according to any one of claims 12 to 18, wherein: The light deflection modulation structure is a diffraction grating array formed on the color filter layer; each of the light deflection modulation units in the diffraction grating array is a relief grating corresponding to the monochrome sub-pixel one by one.
24. An optical lens, comprising a filter-based achromatic optical device, wherein the filter-based achromatic optical device comprises: Light-transmitting substrate; A color filter layer attached to the light-transmitting substrate comprises a plurality of combined pixels arranged on the light-transmitting substrate, each of the combined pixels being composed of a plurality of adjacently arranged monochromatic sub-pixels; each of the monochromatic sub-pixels is used to selectively transmit monochromatic light of a corresponding color and absorb light of other colors; as well as The light deflection modulation structure formed in the color filter layer includes a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, and is used to modulate the propagation direction of the transmitted light to propagate to a designated position while the monochrome sub-pixels filter the light.
25. Imaging module, including: Photosensitive components; and An optical lens, wherein the optical lens is located on the photosensitive side of the photosensitive component; The optical lens comprises an achromatic optical device based on light filtering, wherein the achromatic optical device based on light filtering comprises: Light-transmitting substrate; The color filter layer attached to the light-transmitting substrate comprises a plurality of combined pixels arranged on the light-transmitting substrate, each of the combined pixels is composed of a plurality of adjacently arranged monochrome sub-pixels; each of the monochrome sub-pixels is used to selectively transmit monochrome light of a corresponding color and absorb Other colors of light; and The light deflection modulation structure formed in the color filter layer includes a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, and is used to modulate the propagation direction of the transmitted light to propagate to a designated position while the monochrome sub-pixels filter the light.
26. A method for manufacturing an achromatic optical device based on filtering, comprising the steps of: A color filter layer is formed on a light-transmitting substrate to form a plurality of combined pixels arranged on the light-transmitting substrate, wherein each combined pixel is composed of a plurality of adjacently arranged monochrome sub-pixels, and each monochrome sub-pixel is used to selectively transmit monochrome light of a corresponding color and absorb light of other colors; and A light deflection modulation structure is fabricated on the color filter layer to form a plurality of light deflection modulation units corresponding to the monochrome sub-pixels, for correspondingly modulating the propagation direction of the transmitted light to propagate to a designated position while the monochrome sub-pixels filter the light.
27. The method for manufacturing achromatic optical devices based on filtering according to claim 26, wherein: In the step of making the color filter layer on the surface of the light-transmitting substrate: the RGB color filter is attached to the surface of the light-transmitting substrate by means of attachment, coating or deposition coating process.
28. The method for manufacturing achromatic optical device based on filtering according to claim 26 or 27, wherein: In the step of making the light deflection modulation structure in the color filter layer: a metasurface optical structure, a micro-geometric optical structure and a diffraction optical structure are made in the color filter layer by photolithography or nano-imprinting process.
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