Radio-frequency power measurement apparatus and system

Abstract

Provided in the embodiments of the present application are a radio-frequency power measurement apparatus and system. The apparatus comprises: a first microstrip line connected to a radio-frequency power supply; a second microstrip line arranged in parallel with and coupled to the first microstrip line, wherein a preset point on the second microstrip line is grounded; a voltage measurement unit connected to one end of the second microstrip line and configured to test the voltage of the second microstrip line; a capacitor unit comprising a capacitor subunit and a control subunit, wherein the capacitor subunit is connected to the control subunit, and the capacitor unit is connected to the first microstrip line and the second microstrip line, or the preset point on the second microstrip line is grounded by means of the capacitor unit; and a distance test unit connected to the capacitor unit and the voltage measurement unit and configured to measure the voltage at the preset point and transmit a distance signal. By means of the present application, the voltage of a microstrip line can be measured, and the radio-frequency power can be calculated, thereby improving the voltage measurement accuracy of a radio-frequency power supply.

Description

Radio frequency power detection device and system

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 26, 2023, with application number 2023117992018 and application name “RF Power Detection Device and System”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of radio frequency circuit technology, and in particular to a radio frequency power detection device and system. Background Art

[0003] During production, a microstrip line has a physical isolation point with one end grounded. The voltage at the physical isolation point is 0V. However, in actual production, the spacing between microstrip lines may not be accurate enough, resulting in the grounded point on the microstrip line not being a physical isolation point. Therefore, the voltage of the microstrip line cannot be accurately detected, and therefore the RF power cannot be accurately calculated.

[0004] Summary of the Invention

[0005] Embodiments of the present application provide a radio frequency power detection device and system to improve the voltage detection accuracy of a radio frequency power supply.

[0006] In a first aspect, an embodiment of the present application provides a radio frequency power detection device, comprising:

[0007] a first microstrip line connected to a radio frequency power supply;

[0008] a second microstrip line, the second microstrip line being arranged in parallel with the first microstrip line and coupled to the first microstrip line, a preset point on the second microstrip line being grounded, the preset point being used to indicate a physical isolation point of the second microstrip line;

[0009] a voltage detection unit, connected to one end of the second microstrip line and configured to test a voltage of the second microstrip line;

[0010] a capacitor unit, the capacitor unit comprising a capacitor subunit and a control subunit, the capacitor subunit being connected to the control subunit, the control subunit being configured to control an output capacitance value of the capacitor unit based on the capacitor subunit, the capacitor unit being respectively connected to the first microstrip line and the second microstrip line, or a preset point on the second microstrip line being grounded through the capacitor unit, the capacitor unit being configured to select different capacitance values ​​according to an actual distance between the first microstrip line and the second microstrip line, so as to achieve that the actual distance is equal to a preset distance between the first microstrip line and the second microstrip line;

[0011] A distance testing unit, wherein the distance testing unit is respectively connected to the capacitor unit and the voltage detection unit, and the distance testing unit is used to measure the voltage of the preset point; and sends a first distance signal to the control subunit when the voltage of the preset point is greater than zero, sends a second distance signal to the control subunit when the voltage of the preset point is less than zero, and sends a third distance signal to the voltage detection unit when the voltage of the preset point is zero, wherein the first distance signal is used to indicate that the actual distance is less than the preset distance, the second distance signal is used to indicate that the actual distance is greater than the preset distance, and the third distance signal is used to indicate that the actual distance is equal to the preset distance.

[0012] In which, the capacitor subunit includes multiple capacitors, and the multiple capacitors are connected in parallel. The control subunit includes at least one switch, and the at least one switch is respectively connected to the multiple capacitors, so that the connection mode of each capacitor in the multiple capacitors and the second microstrip line is controlled based on the at least one switch, and the connection mode includes normal connection or disconnection.

[0013] In which, when the preset point on the second microstrip line is grounded through the capacitor unit, the capacitor subunit includes a variable capacitor, the variable capacitor includes a first pole piece and a second pole piece, the first pole piece and the second pole piece are insulated from each other, the first pole piece is grounded, and the control subunit is used to control the rotation of the first pole piece to control the capacitance value of the variable capacitor.

[0014] The control subunit includes at least one capacitance regulator, and the at least one capacitance regulator is respectively connected to the variable capacitor. The control subunit is used to control the rotation of the first pole piece based on the at least one capacitance regulator.

[0015] In which, the capacitor subunit includes a programmable capacitor, the programmable capacitor is configured with capacitance value control logic, the control subunit generates a capacitance value control signal according to the first distance signal or the second distance signal, and the programmable capacitor responds to the capacitance value control signal based on the capacitance value control logic to control the capacitance value of the programmable capacitor.

[0016] In which, when the capacitor unit is respectively connected to the first microstrip line and the second microstrip line, the control subunit is used to generate a first control strategy according to the first distance signal or the second distance signal; when a preset point on the second microstrip line is grounded through the capacitor unit, the control subunit is used to generate a second control strategy according to the first distance signal or the second distance signal.

[0017] The capacitance value of at least one capacitor among the plurality of capacitors is different from the capacitance values ​​of the other capacitors.

[0018] In a second aspect, an embodiment of the present application provides a radio frequency power detection system, comprising a radio frequency power detection device according to the first aspect and a radio frequency power supply; the radio frequency power supply is connected to the radio frequency power detection device.

[0019] It can be seen that in an embodiment of the present application, a radio frequency power detection device is provided, including: a first microstrip line, the first microstrip line is connected to a radio frequency power supply; a second microstrip line, the second microstrip line is arranged in parallel with the first microstrip line and is coupled to the first microstrip line, a preset point on the second microstrip line is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line; a voltage detection unit, the voltage detection unit is connected to one end of the second microstrip line and is used to test the voltage of the second microstrip line; a capacitor unit, the capacitor unit includes a capacitor subunit and a control subunit, the capacitor subunit is connected to the control subunit, and the control subunit is used to control the output capacitance value of the capacitor unit based on the capacitor subunit, the capacitor unit is respectively connected to the first microstrip line and the second microstrip line, or the preset point on the second microstrip line is grounded through the capacitor unit, and the capacitor unit is used to detect the voltage of the second microstrip line. The invention also provides a method for selecting different capacitance values ​​according to the actual distance between the first microstrip line and the second microstrip line to achieve that the actual distance is equal to the preset distance between the first microstrip line and the second microstrip line; a distance testing unit, the distance testing unit being connected to the capacitance unit and the voltage detection unit, and configured to measure the voltage at the preset point; and transmitting a first distance signal to the control subunit when the voltage at the preset point is greater than zero, a second distance signal to the control subunit when the voltage at the preset point is less than zero, and a third distance signal to the voltage detection unit when the voltage at the preset point is zero, wherein the first distance signal indicates that the actual distance is less than the preset distance, the second distance signal indicates that the actual distance is greater than the preset distance, and the third distance signal indicates that the actual distance is equal to the preset distance. The capacitance unit is used to adjust the actual distance between the first microstrip line and the second microstrip line according to the preset distance between the first microstrip line and the second microstrip line to achieve that the actual distance is equal to the preset distance, so that the voltage at the physical isolation point is zero, thereby detecting the voltage of the second microstrip line and calculating the RF power based on the voltage, thereby improving the voltage detection accuracy of the RF power supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG1 is a system architecture diagram of a radio frequency power detection system provided in an embodiment of the present application;

[0021] FIG2 is a structural diagram of a first radio frequency power detection device provided in an embodiment of the present application;

[0022] FIG3 is a structural diagram of a second radio frequency power detection device provided in an embodiment of the present application;

[0023] FIG4 is a structural diagram of a capacitor unit in a radio frequency power detection device provided in an embodiment of the present application;

[0024] FIG5 is a position structure diagram of a first type of capacitor unit in a radio frequency power detection device provided in an embodiment of the present application;

[0025] FIG6 is a position structure diagram of a second type of capacitor unit in the radio frequency power detection device provided in an embodiment of the present application;

[0026] 7 is a position structure diagram of a third type of capacitor unit in the radio frequency power detection device provided in an embodiment of the present application;

[0027] FIG8 is a structural diagram of a third radio frequency power detection device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0029] The terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish between different objects, not to describe a particular order. Furthermore, the terms "including," "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or apparatus.

[0030] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0031] Currently, in actual production, the spacing between microstrip lines may not be accurate enough, which will result in the grounding point on the microstrip line not being a physical isolation point. As a result, the voltage of the microstrip line cannot be accurately detected, and therefore the RF power cannot be accurately calculated.

[0032] Please refer to Figure 1, which is a system architecture diagram of a radio frequency power detection system provided in an embodiment of the present application. As shown in Figure 1, the radio frequency power detection system 100 includes a radio frequency power detection device 10 and a radio frequency power supply 20. The radio frequency power detection device 10 and the radio frequency power supply 20 are connected, wherein the radio frequency power supply 20 energizes the first microstrip line in the radio frequency power detection device 10, so that the second microstrip line in the radio frequency power detection device 10 is subjected to the dual effects of magnetic field and electric field. The magnetic field strength at the two ends of the second microstrip line is one positive and one negative. Therefore, there will be a point in the second microstrip line where the magnetic field strength is zero. At this time, in order to make this grounded point on the microstrip line a physical isolation point with a voltage of 0V, it is necessary to adjust the capacitance value of the capacitor unit in the radio frequency power detection device 10 to adjust the distance between the first microstrip line and the second microstrip line so that the actual distance between the first microstrip line and the second microstrip line is equal to the preset distance between the first microstrip line and the second microstrip line. Therefore, the voltage of the second microstrip line can be detected, thereby calculating the radio frequency power, thereby improving the voltage detection accuracy of the radio frequency power supply.

[0033] Please refer to Figures 2 and 3. Figure 2 is a structural diagram of a first radio frequency power detection device provided in an embodiment of the present application, and Figure 3 is a structural diagram of a second radio frequency power detection device provided in an embodiment of the present application. As shown in Figure 2, the device includes: a first microstrip line 101, which is connected to the radio frequency power supply 20; a second microstrip line 102, which is arranged parallel to the first microstrip line 101 and coupled with the first microstrip line 101, and a preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line 102; a voltage detection unit 103, which is connected to one end of the second microstrip line 102 and is used to test the voltage of the second microstrip line 102; a capacitor unit 104, which is respectively connected to the first microstrip line 101 and the second microstrip line 102, and the capacitor unit 104 is used to select different capacitance values ​​according to the actual distance between the first microstrip line 101 and the second microstrip line 102, so as to achieve that the actual distance is equal to the preset distance between the first microstrip line 101 and the second microstrip line 102. As shown in Figure 3, the device includes: a first microstrip line 101, which is connected to the RF power supply 20; a second microstrip line 102, which is arranged parallel to the first microstrip line 101 and coupled with the first microstrip line 101, and a preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line 102; a voltage detection unit 103, which is connected to one end of the second microstrip line 102 and is used to test the voltage of the second microstrip line 102; a capacitor unit 104, a preset point on the second microstrip line 102 is grounded through the capacitor unit 104, and the capacitor unit 104 is used to select different capacitance values ​​according to the actual distance between the first microstrip line 101 and the second microstrip line 102, so as to achieve that the actual distance is equal to the preset distance between the first microstrip line 101 and the second microstrip line 102, thereby detecting the voltage of the second microstrip line 102, thereby calculating the RF power, and improving the voltage detection accuracy of the RF power supply.

[0034] The first microstrip line 101 is powered by the RF power supply 20. Under the influence of the current, the second microstrip line 102 is affected by both the magnetic field and the electric field. At this time, the electric field value at a point on the microstrip line is: △E×d, and the magnetic field value is:

[0035] Where ΔE is the electric field strength at a point on the first microstrip line 101, d is the preset distance between the first microstrip line 101 and the second microstrip line 102, is the magnetic permeability, is the dielectric constant, is the length of the second microstrip line 102, and is the current in the first microstrip line 101. At one end of the second microstrip line 102, the electric and magnetic field strengths are equal in magnitude and in the same direction; at the other end, the electric and magnetic field strengths are equal in magnitude and in opposite directions.

[0036] Therefore, the relationship of d can be determined according to the above equation, namely:

[0037] Where R is the main circuit resistance. According to the situation where the magnetic field strength is one positive and one negative at both ends, there is a point in the second microstrip line 102 where the grounded magnetic field strength is 0. This point is the physical isolation point, but there is a gap between the preset distance d and the actual distance d1. As shown in Figure 2, a capacitor unit 104 can be added between the first microstrip line 101 and the second microstrip line 102 by voltage division. The capacitor unit 104 can include multiple capacitors, or variable capacitors, or programmable capacitors. Different capacitance values ​​can be selected according to the difference between the preset distance d and the actual distance d1 to find a suitable distance. At this time, the microstrip voltage detected at the physical isolation point is 0V. At this time, the voltage of the second microstrip line 102 can be accurately detected, and the RF power can be calculated based on the voltage of the second microstrip line 102. As shown in Figure 3, a preset point on the second microstrip line 102 can also be set to be grounded through the capacitor unit 104 by voltage division, wherein the capacitor unit 104 can include multiple capacitors, or variable capacitors, or programmable capacitors, etc., to select different capacitance values ​​according to the difference between the preset distance d and the actual distance d1 to find a suitable distance so that the microstrip voltage detected at the physical isolation point is 0V. At this time, the voltage of the second microstrip line 102 can be accurately detected, and the RF power can be calculated based on the voltage of the second microstrip line 102, thereby improving the voltage detection accuracy of the RF power supply.

[0038] In a possible embodiment, please refer to Figure 4, which is a structural diagram of a capacitor unit in a radio frequency power detection device provided in an embodiment of the present application. As shown in Figure 4, the capacitor unit 104 includes a capacitor subunit 1041 and a control subunit 1042. The capacitor subunit 1041 is connected to the control subunit 1042, and the control subunit 1042 is used to control the output capacitance value of the capacitor unit 104 based on the capacitor subunit 1041.

[0039] Wherein, the capacitor subunit 1041 may include multiple capacitors, or variable capacitors, or programmable capacitors, etc., and the above-mentioned capacitors are controlled by the control subunit 1042 to change the capacitance value outputted by them. Please refer to Figure 5, which is a position structure diagram of the first capacitor unit in the radio frequency power detection device provided in an embodiment of the present application. As shown in Figure 5, the capacitor unit 104 is connected to the first microstrip line 101 and the second microstrip line 102 respectively, and the first microstrip line 101 is energized; the second microstrip line 102 is arranged in parallel with the first microstrip line 101 and coupled with the first microstrip line 101, and a preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line 102. In the case where the capacitor subunit 1041 includes multiple capacitors, the multiple capacitors are connected in parallel, and exemplarily they can be capacitor C1, capacitor C2 and capacitor C3, and the number of the capacitors is not limited here. The control subunit 1042 may further include at least one switch, wherein the at least one switch is respectively connected to the plurality of capacitors, so that the control subunit 1042 controls the connection and disconnection of each of the plurality of capacitors and the second microstrip line 102 based on the at least one switch. The capacitance value of each of the plurality of capacitors may be different, so that the control subunit 1042 can adaptively select the capacitance value according to the difference between the preset distance d and the actual distance d1. The switches for the plurality of capacitors may be single-pole multi-throw switches; or each of the plurality of capacitors may be connected to a switch; or a combination of the above two switches, wherein each of a portion of the capacitors is connected to a switch, and at least one single-pole multi-throw switch is present in the remaining portion of the capacitors. The plurality of capacitors may also be arranged between the second microstrip line 102 and the ground terminal.

[0040] Wherein, please refer to Figure 6, which is a position structure diagram of the second type of capacitor unit in the radio frequency power detection device provided in an embodiment of the present application. As shown in Figure 6, the preset point on the second microstrip line 102 is grounded through the capacitor unit 104, and the first microstrip line 101 is energized; the second microstrip line 102 is arranged in parallel with the first microstrip line 101 and coupled with the first microstrip line 101, and the preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line 102. In the case where the capacitor subunit 1041 includes a variable capacitor C4, the variable capacitor may include a first pole piece and a second pole piece, the first pole piece and the second pole piece are insulated from each other, and the first pole piece is grounded, wherein the control subunit 1042 includes at least one capacitor adjuster, which may exemplarily include a capacitor adjuster S1, a capacitor adjuster S2, and a capacitor adjuster S3. The capacitance adjuster S1, capacitance adjuster S2 and capacitance adjuster S3 are respectively connected to the variable capacitor, wherein each capacitance adjuster corresponds to a different capacitance value range. The control subunit 1042 selects the capacitance adjuster according to the difference between the preset distance d and the actual distance d1, and controls the rotation of the first pole piece within the selected corresponding capacitance value range to change the size of the capacitance value so that the preset distance d and the actual distance d1 are equal.

[0041] In particular, please refer to Figure 7, which is a position structure diagram of the third type of capacitor unit in the RF power detection device provided in an embodiment of the present application. As shown in Figure 7, a preset point on the second microstrip line 102 is grounded through the capacitor unit 104, and the first microstrip line 101 is energized; the second microstrip line 102 is arranged parallel to the first microstrip line 101 and coupled to the first microstrip line 101, and a preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line 102. In the case where the capacitor subunit 1041 includes a programmable capacitor C5, the programmable capacitor C5 has a capacitance value control logic, and the control subunit 1042 can generate a capacitance value control signal based on the difference between the preset distance d and the actual distance d1. The programmable capacitor C5 responds to the capacitance value control signal based on the capacitance value control logic and inputs the desired capacitance value to control the capacitance value of the programmable capacitor. In particular, the programmable capacitor C5 can also be arranged between the first microstrip line 101 and the second microstrip line 102.

[0042] It can be seen that in this embodiment, the capacitance value of the capacitor subunit 1041 can be controlled by the control subunit 1042 to adjust the distance between the first microstrip line 101 and the second microstrip line 102, so as to more accurately calculate the RF power.

[0043] In a possible embodiment, the capacitor subunit 1041 includes multiple capacitors, which are connected in parallel. The control subunit 1042 includes at least one switch, which is respectively connected to the multiple capacitors, so that the connection mode of each of the multiple capacitors and the second microstrip line 102 is controlled based on the at least one switch, and the connection mode includes normal connection or disconnection.

[0044] The capacitance value of each capacitor in the multiple capacitors may be the same or different, and there is at least one capacitor whose capacitance value is different from the capacitance values ​​of the other capacitors, so that the control subunit 1042 can adapt and select the capacitance value according to the difference between the preset distance d and the actual distance d1. The switches of the multiple capacitors may be single-pole multi-throw switches; or each capacitor in the multiple capacitors may be connected to a switch; or a combination of the above two switches, such as each capacitor in a part of the capacitors is connected to a switch, and there is at least one single-pole multi-throw switch in the remaining capacitors. The multiple capacitors may be arranged between the second microstrip line 102 and the ground end, or between the second microstrip line 102 and the first microstrip line 101. The capacitance value is adjusted by controlling the switches of the multiple capacitors by the control subunit 1042.

[0045] It can be seen that in this embodiment, the control subunit 1042 controls the switches of the plurality of capacitors to adjust the capacitance value, so as to more accurately control the capacitance value.

[0046] In a possible embodiment, the device further includes a distance testing unit 105, which is respectively connected to the capacitor unit 104 and the voltage detection unit 103; the distance testing unit is used to measure the voltage of the preset point; and sends a first distance signal to the control subunit 1042 when the voltage of the preset point is greater than zero, sends a second distance signal to the control subunit 1042 when the voltage of the preset point is less than zero, and sends a third distance signal to the voltage detection unit 103 when the voltage of the preset point is zero, the first distance signal is used to indicate that the actual distance is less than the preset distance, the second distance signal is used to indicate that the actual distance is greater than the preset distance, and the third distance signal is used to indicate that the actual distance is equal to the preset distance.

[0047] Please refer to FIG8 , which is a structural diagram of a third RF power detection device provided in an embodiment of the present application. As shown in FIG8 , the RF power detection device 10 further includes a distance testing unit 105, which is connected to the capacitor unit 104 and the voltage detection unit 103. The distance testing unit 105 is configured to measure the voltage at the preset point. The capacitor unit 104 is connected to the first microstrip line 101 and the second microstrip line 102, respectively, with the first microstrip line 101 being energized. The second microstrip line 102 is arranged parallel to and coupled to the first microstrip line 101. A preset point on the second microstrip line 102 is grounded, and the preset point is used to indicate a physical isolation point of the second microstrip line 102. The voltage detection unit 103 is connected to one end of the second microstrip line 102 and is configured to test the voltage of the second microstrip line 102. When the distance testing unit 105 receives a voltage test signal from the voltage detection unit 103, it detects the voltage at the preset physical isolation point in response to the voltage test signal. When the voltage obtained from the test is greater than zero, a signal is sent to the control subunit 1042, indicating that the actual distance d1 is less than the preset distance d. When the control subunit 1042 receives the signal, the capacitance value of the capacitor in the capacitor subunit 1041 is adjusted according to the current capacitance value, so that the actual distance d1 is equal to the preset distance d; when the voltage obtained from the test is less than zero, a signal is sent to the control subunit 1042, indicating that the actual distance d1 is greater than the preset distance d. When the control subunit 1042 receives the signal, the capacitance value of the capacitor in the capacitor subunit 1041 is adjusted according to the current capacitance value, so that the actual distance d1 is equal to the preset distance d; when the voltage obtained from the test is equal to zero, a signal is sent to the voltage detection unit 103, indicating that the actual distance d1 is equal to the preset distance d, thereby indicating that the voltage detection unit 103 can test the voltage of the second microstrip line 102 to calculate the radio frequency power.

[0048] It can be seen that in this embodiment, the actual distance between the first microstrip line 101 and the second microstrip line 102 is obtained by the distance testing unit 105, and a distance signal is sent to the control subunit 1042 and the voltage detection unit 103 according to the actual distance and the preset distance, so that the control subunit 1042 adjusts the capacitance value based on the distance signal, and enables the voltage detection unit 103 to accurately detect the voltage of the second microstrip line 102.

[0049] In a possible embodiment, when a preset point on the second microstrip line 102 is grounded through the capacitor unit 104, the capacitor subunit 1041 includes a variable capacitor, the variable capacitor includes a first pole piece and a second pole piece, the first pole piece and the second pole piece are insulated from each other, the first pole piece is grounded, and the control subunit 1042 is used to control the rotation of the first pole piece to control the capacitance value of the variable capacitor.

[0050] Where the capacitor subunit 1041 includes a variable capacitor C4, the variable capacitor may include a first pole piece and a second pole piece, the first pole piece and the second pole piece being insulated from each other, and the first pole piece being grounded. The first pole piece may be a movable pole piece, and the second pole piece may be a fixed pole piece. The capacitance value may be adjusted by adjusting the angle at which the movable pole piece rotates relative to the fixed pole piece. The greater the angle of rotation, the greater the capacitance value.

[0051] It can be seen that in this embodiment, the capacitance value of the variable capacitor is changed by adjusting the rotation angle of the first pole piece, which is simple to operate and can more accurately adjust the capacitance value.

[0052] In a possible embodiment, the control subunit 1042 includes at least one capacitor regulator, and the at least one capacitor regulator is respectively connected to the variable capacitor. The control subunit 1042 is used to control the rotation of the first pole piece based on the at least one capacitor regulator.

[0053] 6 and 8 , the control subunit 1042 includes at least one capacitance adjuster, which may include capacitance adjuster S1, capacitance adjuster S2, and capacitance adjuster S3. The capacitance adjuster S1, capacitance adjuster S2, and capacitance adjuster S3 are respectively connected to the variable capacitor, wherein each capacitance adjuster corresponds to a different capacitance value range. The control subunit 1042 selects a capacitance adjuster based on the first distance signal or the second distance signal, and controls the rotation of the first pole piece within the selected corresponding capacitance value range to change the capacitance value so that the preset distance d is equal to the actual distance d1.

[0054] It can be seen that in this embodiment, the capacitance adjuster is selected according to demand, and the first pole piece is controlled to rotate within the capacitance value range corresponding to the selected capacitance adjuster to change the capacitance value, thereby achieving precise adjustment of the capacitance value.

[0055] In one possible embodiment, the capacitor subunit 1041 includes a programmable capacitor, which is configured with capacitance value control logic. The control subunit 1042 generates a capacitance value control signal based on the first distance signal or the second distance signal. The programmable capacitor responds to the capacitance value control signal based on the capacitance value control logic to control the capacitance value of the programmable capacitor.

[0056] 7 and 8 , the capacitor subunit 1041 includes a programmable capacitor C5. The programmable capacitor C5 has capacitance value control logic. The control subunit 1042 can generate a capacitance value control signal based on the first distance signal or the second distance signal. The programmable capacitor C5 responds to the capacitance value control signal based on the capacitance value control logic and inputs a desired capacitance value based on the current capacitance value and the received distance signal to control the capacitance value of the programmable capacitor. The programmable capacitor C5 can also be disposed between the first microstrip line 101 and the second microstrip line 102.

[0057] It can be seen that in this embodiment, the capacitance value to be adjusted can be directly input according to the programmable capacitor, which simplifies the steps of adjusting the capacitance value and achieves accurate adjustment of the capacitance value.

[0058] In a possible embodiment, when the capacitor unit 104 is respectively connected to the first microstrip line 101 and the second microstrip line 102, the control subunit 1042 is used to generate a first control strategy according to the first distance signal or the second distance signal; when a preset point on the second microstrip line 102 is grounded through the capacitor unit 104, the control subunit 1042 is used to generate a second control strategy according to the first distance signal or the second distance signal.

[0059] Among them, when the capacitor unit 104 is between the first microstrip line 101 and the second microstrip line 102, the larger the capacitance value, the smaller the distance between the first microstrip line 101 and the second microstrip line 102; when the capacitor is between the second microstrip line 102 and the ground end, the larger the capacitance value, the larger the distance between the first microstrip line 101 and the second microstrip line 102.

[0060] Wherein, when the capacitor unit 104 is between the first microstrip line 101 and the second microstrip line 102, if the control subunit 1042 receives the first distance signal, the first control strategy may include: the control subunit 1042 adjusts the capacitance value as required based on the capacitance values ​​of the multiple capacitors and the current capacitance value; if the control subunit 1042 detects that the current capacitance value is large and insufficient to achieve the actual distance equal to the preset distance, then appropriately disconnecting the capacitance switch to reduce the capacitance value, thereby increasing the actual distance between the first microstrip line 101 and the second microstrip line 102, so that the actual distance is equal to the preset distance. If the control subunit 1042 receives the second distance signal, the first control strategy may also include: the control subunit 1042 adjusts the capacitance value as required based on the capacitance values ​​of the multiple capacitors and the current capacitance value; if the control subunit 1042 detects that the current capacitance value is small and insufficient to achieve the actual distance equal to the preset distance, then appropriately opening the capacitance switch to increase the capacitance value, thereby reducing the actual distance between the first microstrip line 101 and the second microstrip line 102, so that the actual distance is equal to the preset distance. The first control strategy may also be to adjust the capacitance value of the programmable capacitor as required based on the current capacitance value and the received distance signal, so as to achieve that the actual distance is equal to the preset distance.

[0061] Wherein, when the capacitor is between the second microstrip line 102 and the ground end, if the control subunit 1042 receives the first distance signal, the second control strategy may include: the control subunit 1042 adjusts the capacitance value as required based on the capacitance values ​​of the multiple capacitors and the current capacitance value; if the control subunit 1042 detects that the current capacitance value is large and insufficient to achieve the actual distance equal to the preset distance, then appropriately opening the capacitance switch to increase the capacitance value, thereby increasing the actual distance between the first microstrip line 101 and the second microstrip line 102, so that the actual distance is equal to the preset distance. If the control subunit 1042 receives the second distance signal, the second control strategy may also include: the control subunit 1042 adjusts the capacitance value as required based on the capacitance values ​​of the multiple capacitors and the current capacitance value; if the control subunit 1042 detects that the current capacitance value is small and insufficient to achieve the actual distance equal to the preset distance, then appropriately opening the capacitance switch to reduce the capacitance value, thereby reducing the actual distance between the first microstrip line 101 and the second microstrip line 102, so that the actual distance is equal to the preset distance. Among them, if the control subunit 1042 receives the first distance signal or the second distance signal, the second control strategy may also include: the control subunit 1042 selects a capacitor regulator as required based on the current capacitance value, and rotates the rotation angle of the first-stage sheet within the capacitance range corresponding to the selected capacitance regulator to adjust the capacitance value to achieve the actual distance being equal to the preset distance. The larger the rotation angle, the larger the capacitance value. The second control strategy may also be to adjust the capacitance value of the programmable capacitor as required based on the current capacitance value and the received distance signal to achieve the actual distance being equal to the preset distance.

[0062] It can be seen that in this embodiment, the capacitance value can be directly adjusted according to the first control strategy and the second control strategy, so as to achieve accurate adjustment of the capacitance value.

[0063] In a possible embodiment, a capacitance value of at least one capacitor among the multiple capacitors is different from capacitance values ​​of the other capacitors.

[0064] Among them, the capacitance value of each capacitor in the multiple capacitors can be the same or different, but there is at least one capacitor whose capacitance value is different from the other capacitance values, so that the control subunit 1042 can adapt and select the capacitor according to the difference between the preset distance d and the actual distance d1.

[0065] It should be noted that for the aforementioned method implementations, for the sake of simplicity, they are all expressed as a series of action combinations, but those skilled in the art should be aware that this application is not limited by the order of the actions described, because according to this application, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the implementations described in the specification are all optional implementations, and the actions and modules involved are not necessarily required for this application.

[0066] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments.

[0067] In the several embodiments provided in this application, it should be understood that the disclosed devices can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, and the indirect coupling or communication connection of devices or units can be electrical or other forms.

[0068] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of this embodiment.

[0069] In addition, the functional units in the various embodiments of the present application may be integrated into a single processing unit, or each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or in the form of software program modules.

[0070] If the integrated unit is implemented in the form of a software program module and sold or used as an independent product, it can be stored in a computer-readable memory. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a memory and includes a number of instructions for enabling a computer device (which can be a personal computer, server or network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application. The aforementioned memory includes various media that can store program codes, such as a USB flash drive, a read-only memory (ROM), a random access memory (RAM), a mobile hard disk, a magnetic disk or an optical disk.

[0071] Those skilled in the art will appreciate that all or part of the steps in the various methods of the above embodiments can be completed by instructing related hardware through a program, and the program can be stored in a computer-readable memory, which may include: a flash drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc.

[0072] The above is a detailed introduction to the implementation methods of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above implementation methods is only used to help understand the method and core idea of ​​the present application. At the same time, for those skilled in the art, based on the ideas of the present application, there may be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A radio frequency power detection device, characterized in that, Comprising: A first microstrip line, which is connected to a radio frequency power supply; A second microstrip line, which is arranged in parallel with the first microstrip line and coupled to the first microstrip line, and a preset point on the second microstrip line is grounded, and the preset point is used to indicate the physical isolation point of the second microstrip line; A voltage detection unit, which is connected to one end of the second microstrip line and is used to test the voltage of the second microstrip line; A capacitance unit, which includes a capacitance sub-unit and a control sub-unit, the capacitance sub-unit is connected to the control sub-unit, the control sub-unit is used to control the output capacitance value of the capacitance unit based on the capacitance sub-unit, the capacitance unit is respectively connected to the first microstrip line and the second microstrip line, or the preset point on the second microstrip line is grounded through the capacitance unit, and the capacitance unit is used to select different capacitance values according to the actual distance between the first microstrip line and the second microstrip line, so as to make the actual distance equal to the preset distance between the first microstrip line and the second microstrip line; A distance test unit, which is respectively connected to the capacitance unit and the voltage detection unit, and the distance test unit is used to measure the voltage of the preset point; And when the voltage of the preset point is greater than zero, a first distance signal is sent to the control sub-unit, when the voltage of the preset point is less than zero, a second distance signal is sent to the control sub-unit, and when the voltage of the preset point is zero, a third distance signal is sent to the voltage detection unit, the first distance signal is used to indicate that the actual distance is less than the preset distance, the second distance signal is used to indicate that the actual distance is greater than the preset distance, and the third distance signal is used to indicate that the actual distance is equal to the preset distance.

2. The device according to claim 1, characterized in that The capacitance sub-unit includes a plurality of capacitors, the plurality of capacitors are connected in parallel, the control sub-unit includes at least one switch, and the at least one switch is respectively connected to the plurality of capacitors, so that the connection mode of each capacitor in the plurality of capacitors to the second microstrip line is controlled based on the at least one switch, and the connection mode includes normal connection or disconnection.

3. The device according to claim 1, characterized in that, When the preset point on the second microstrip line is grounded through the capacitance unit, the capacitance sub-unit includes a variable capacitor, the variable capacitor includes a first pole piece and a second pole piece, the first pole piece and the second pole piece are insulated from each other, the first pole piece is grounded, and the control sub-unit is used to control the rotation of the first pole piece to control the capacitance value of the variable capacitor.

4. The device according to claim 3, characterized in that, The control sub-unit includes at least one capacitance regulator, the at least one capacitance regulator is respectively connected to the variable capacitor, and the control sub-unit is used to control the rotation of the first pole piece based on the at least one capacitance regulator.

5. The device according to claim 1, characterized in that, The capacitor sub-unit includes a programmable capacitor, the programmable capacitor is configured with capacitance value control logic, the control sub-unit generates a capacitance value control signal according to the first distance signal or the second distance signal, and the programmable capacitor responds to the capacitance value control signal based on the capacitance value control logic to control the capacitance value of the programmable capacitor.

6. The device according to any one of claims 3 to 5, characterized in that When the capacitor unit is respectively connected to the first microstrip line and the second microstrip line, the control sub-unit is used to generate a first control strategy according to the first distance signal or the second distance signal; When a preset point on the second microstrip line is grounded through the capacitor unit, the control sub-unit is used to generate a second control strategy according to the first distance signal or the second distance signal.

7. The device according to claim 2, characterized in that, The capacitance value of at least one capacitor among the multiple capacitors is different from the capacitance values of other capacitors.

8. A radio frequency power detection system, characterized in that, Including the radio frequency power detection device and the radio frequency power supply according to any one of claims 1-7; The radio frequency power supply is connected to the radio frequency power detection device.

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