Magnet damper for suction pad

Abstract

The outer circumferential surface (18a) and the inner circumferential surface (18b) of a fixed magnet (18), which is attached to a body (12), comprise cylindrical surfaces each having a uniform diameter. The outer circumferential surface (34a) of a movable magnet (34), which constitutes a movable part (22), comprises a cylindrical surface having a uniform diameter. The inner circumferential surface (34b) of the movable magnet comprises a conical curved surface. The fixed magnet and the movable magnet are magnetized in the axial direction, and the axial polarity of the fixed magnet is the same as the axial polarity of the movable magnet.

Description

Magnetic damper for suction pads

[0001] The present invention relates to a magnetic damper for a suction pad that relieves pressure when the suction pad comes into contact with a workpiece.

[0002] Generally, the process of attracting a workpiece requires pressing a suction pad against the workpiece. To alleviate the pressure applied to the workpiece at this time, a suction device equipped with a magnetic damper has been known.

[0003] For example, Japanese Patent Application Laid-Open No. 2002-54671 describes a suction pad holder that includes a cylindrical fixed shaft and a columnar movable shaft inserted inside the fixed shaft, with magnets disposed on the outer circumferential surface of the movable shaft and the inner circumferential surface of the fixed shaft. The magnets on the movable shaft and the fixed shaft are each divided circumferentially and disposed so that different magnetic poles face each other.

[0004] According to Japanese Patent Laid-Open Publication No. 2002-54671, when the magnets of the movable shaft and the fixed shaft are misaligned in the axial direction, the magnetic field lines generated at the axial overlapping portion of the two magnets do not exert a force in the axial direction, and only the axial component of the diagonal magnetic field lines generated at the ends of the two magnets exerts a force in the axial direction. As a result, even if there is variation in the stroke when pressing the suction pad against the workpiece, it is possible to press it with a constant force.

[0005] However, it is believed that the axial component force of the oblique magnetic field lines generated at the ends of the magnet on the movable shaft and the magnet on the fixed shaft can be considered to be almost constant only in an extremely limited stroke range.

[0006] By using a magnet divided in the circumferential direction, as in the suction pad holder of JP 2002-54671 A, it is possible to suppress misalignment in the rotational direction between the magnet of the movable shaft and the magnet of the fixed shaft. In order to prevent rotation even when an excessive force is applied, it is necessary to provide a mechanical anti-rotation mechanism. If a mechanical anti-rotation mechanism is provided in the suction pad holder of JP 2002-54671 A, the movable shaft moves in the axial direction while contact pressure is applied in the rotational direction, which may generate large sliding resistance.

[0007] The present invention aims to solve the above-mentioned problems.

[0008] The magnetic damper for suction pads according to the present invention includes a cylindrical body and a movable part supported by the body so as to be displaceable in the axial direction of the body, and relieves pressure when the suction pad comes into contact with a workpiece by magnetic force acting between a cylindrical fixed magnet attached to the body and a cylindrical movable magnet constituting the movable part. The outer and inner peripheral surfaces of the fixed magnet are cylindrical surfaces with a uniform diameter, the outer peripheral surface of the movable magnet is also cylindrical with a uniform diameter, and the inner peripheral surface of the movable magnet is a conical curved surface. The fixed magnet and the movable magnet are magnetized in the axial direction, and the axial polarity of the fixed magnet is the same as the axial polarity of the movable magnet.

[0009] The magnetic damper for suction pads described above combines a fixed magnet whose outer and inner peripheral surfaces are cylindrical with uniform diameters and which is axially magnetized, with a movable magnet whose outer peripheral surface is cylindrical with uniform diameters and whose inner peripheral surface is a conical curved surface and which is axially magnetized. This allows the axial magnetic force acting between the fixed magnet and the movable magnet to be constant regardless of the amount of displacement of the movable part. Furthermore, because no circumferential magnetic force acts between the fixed magnet and the movable magnet, a mechanical anti-rotation mechanism can be provided between the body and the movable part without increasing the sliding resistance of the movable part.

[0010] FIG. 1 is a cross-sectional view of a magnetic damper for a suction pad according to a first embodiment of the present invention. FIG. 2 is an exploded view of the components of the magnetic damper for a suction pad shown in FIG. 1. FIG. 3 is a cross-sectional view of the magnetic damper for a suction pad shown in FIG. 1 when the movable part is displaced upward. FIG. 4 is a graph showing the magnetic force acting in the axial direction between the fixed magnet and the movable magnet of the magnetic damper for a suction pad shown in FIG. 1 in comparison with a case in which the movable magnet is cylindrical. FIG. 5 is a cross-sectional view of a magnetic damper for a suction pad according to a second embodiment of the present invention. FIG. 6 is an exploded view of the components of the magnetic damper for a suction pad shown in FIG. 5. FIG. 7 is a cross-sectional view of the magnetic damper for a suction pad shown in FIG. 5 when the movable part is displaced upward. FIG. 8 is a cross-sectional view of a magnetic damper for a suction pad according to a third embodiment of the present invention. FIG. 9 is an exploded view of the magnetic damper for a suction pad shown in FIG. 8. FIG. 10 is a cross-sectional view of the magnetic damper for a suction pad shown in FIG. 8 when the movable part is displaced upward.

[0011] The magnetic damper for a suction pad according to the present invention will be described below with reference to several preferred embodiments and the accompanying drawings. In the following description, when terms relating to up and down directions are used, they refer to directions in the drawings for convenience and do not limit the actual arrangement of components, etc.

[0012] First Embodiment A magnetic damper 10 for a suction pad according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 4. FIG.

[0013] 1 and 2, the suction pad magnetic damper 10 includes a cylindrical body 12 and a movable part 22 supported by the body 12 so as to be displaceable in the axial direction of the body 12. The body 12 is supported by a robot arm or a transport device (not shown). The movable part 22 includes a piston 24, a movable magnet 34, a pad adapter 36, and a piston tube 38.

[0014] The piston 24 is made of a paramagnetic material such as an aluminum alloy and is slidably disposed inside the body 12. The piston 24 has a hole 26 that passes through the center of the piston 24 in the axial direction. The piston 24 has a flange 28 that protrudes radially outward and a shaft 30 that extends downward from the flange 28. When the flange 28 of the piston 24 is cut along a plane perpendicular to the axis of the piston 24, the outer shape is a hexagon with each side curving inward. In this embodiment, the cross section of the flange 28 is hexagonal, but any polygonal shape may be used. The flange 28 of the piston 24 forms part of a mechanical anti-rotation mechanism, which will be described later.

[0015] The moving magnet 34 is disposed below the piston 24 and is connected to the piston 24 via a piston tube 38. The moving magnet 34 is configured in a cylindrical shape with a length L1. The moving magnet 34 is magnetized in the axial direction (up and down direction). The outer peripheral surface 34a of the moving magnet 34 is a cylindrical surface with a uniform diameter, and the inner peripheral surface 34b of the moving magnet 34 is a conical curved surface whose diameter gradually increases from top to bottom. The thickness of the moving magnet 34 gradually decreases from top to bottom.

[0016] The pad adapter 36 is cylindrical and made of a paramagnetic material such as an aluminum alloy. The pad adapter 36 is disposed in contact with the lower end of the movable magnet 34 and is connected to the piston 24 together with the movable magnet 34 via a piston tube 38. The pad adapter 36 protrudes downward from the body 12. The amount of protrusion of the pad adapter 36 changes according to the displacement of the movable part 22. A suction pad (not shown) is attached to the lower end of the pad adapter 36.

[0017] The piston tube 38 is made of a non-magnetic austenitic stainless steel and has a thin-walled cylindrical shape. The shaft 30 of the piston 24 is press-fitted into the upper inside of the piston tube 38, the movable magnet 34 is press-fitted into the piston tube 38 over its entire length, and the upper part of the pad adapter 36 is press-fitted into the lower inside of the piston tube 38. This forms a vacuum passage 40 inside the movable part 22 for generating vacuum pressure.

[0018] The upper inner surface of the body 12 has a piston guide surface 14 that guides the flange portion 28 of the piston 24. The piston guide surface 14 has recesses 14a that receive protrusions 28a that correspond to the vertices of the polygonal cross section of the flange portion 28, and together with the flange portion 28, constitute a mechanical anti-rotation mechanism. The mechanical anti-rotation mechanism formed by the flange portion 28 of the piston 24 and the piston guide surface 14 of the body 12 prevents the movable portion 22 from rotating around the axis of the body 12.

[0019] A fixed magnet 18 is attached to the inner surface of the lower part of the body 12 via a bushing 16. The fixed magnet 18 is cylindrical with a length L2. Both the outer peripheral surface 18a and the inner peripheral surface 18b of the fixed magnet 18 are cylindrical surfaces with a uniform diameter. The fixed magnet 18 is magnetized in the axial direction (up and down). The axial polarity of the fixed magnet 18 is the same as the axial polarity of the movable magnet 34. In this embodiment, the upper part of the fixed magnet 18 and the upper part of the movable magnet 34 are north poles, and the lower part of the fixed magnet 18 and the lower part of the movable magnet 34 are south poles. The length L2 of the fixed magnet 18 is approximately the same as the length L1 of the movable magnet 34.

[0020] The piston tube 38 is inserted inside the fixed magnet 18. A ring-shaped stopper 20 is attached to the inner surface of the body 12 at the axial center via a groove. The flange portion 28 of the piston 24 abuts against the stopper 20, thereby restricting downward displacement of the movable portion 22. When the flange portion 28 of the piston 24 abuts against the stopper 20, the protrusion amount of the pad adapter 36 is maximized. At this time, the axial overlap length between the fixed magnet 18 and the movable magnet 34 is minimized.

[0021] A piping adapter 42 is attached to the upper part of the body 12. The piping adapter 42 includes a main body 44 and a thin, tubular vacuum inlet 46 extending downward from the main body 44. A pipe (not shown) extending from a vacuum generator (not shown) is connected to the main body 44 of the piping adapter 42. The vacuum inlet 46 of the piping adapter 42 is inserted into the hole 26 of the piston 24. An O-ring 32 attached to the hole 26 of the piston 24 makes sliding contact with the vacuum inlet 46 of the piping adapter 42. Vacuum pressure is introduced into the vacuum passage 40 of the movable part 22 through the piping adapter 42, making it possible for a suction pad attached to the pad adapter 36 to adsorb the workpiece.

[0022] 3 , the flange portion 28 of the piston 24 abuts against the main body portion 44 of the piping adapter 42, thereby restricting upward displacement of the movable portion 22. When the flange portion 28 of the piston 24 abuts against the piping adapter 42, the amount of protrusion of the pad adapter 36 is minimized. At this time, the length by which the fixed magnet 18 and the movable magnet 34 overlap each other in the axial direction is maximized. The movable portion 22 can be displaced between a position where the flange portion 28 of the piston 24 abuts against the stopper 20 and a position where the flange portion 28 of the piston 24 abuts against the piping adapter 42.

[0023] The side of the main body 44 of the piping adapter 42 has a groove 44a for releasing pressure. The pressure in the back pressure chamber 48 defined by the body 12, the piping adapter 42, and the flange 28 of the piston 24 is always maintained at atmospheric pressure by the action of the groove 44a of the piping adapter 42. Therefore, even if the movable part 22 is displaced, the pressure in the back pressure chamber 48 does not affect the movement of the movable part 22.

[0024] When vacuum pressure is introduced into the vacuum passage 40 of the movable part 22, the balance of the vertical forces due to atmospheric pressure acting on the movable part 22 is lost, and the movable part 22 may be unintentionally displaced upward. To address this problem, the outer diameter of the vacuum inlet 46 of the piping adapter 42 is set to a relatively small value. In this embodiment, the outer diameter of the vacuum inlet 46 is approximately one-fifth the outer diameter of the body 12.

[0025] The movable magnet 34 is urged downward by a magnetic force acting in the axial direction between it and the fixed magnet 18. When no external force is acting on the pad adapter 36, the piston 24 abuts against the stopper 20. The magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34 appears as a force that tries to move the upper end of the movable magnet 34 away from the upper end of the fixed magnet 18, and a force that tries to move the upper end of the movable magnet 34 closer to the lower end of the fixed magnet 18.

[0026] By combining the fixed magnet 18 and the movable magnet 34 having the above-described shapes, the magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34 can be made constant, regardless of the amount of displacement of the movable part 22. This constant value is set to a value that will not damage the workpiece. Furthermore, because the magnetic force is constant, the load applied to the workpiece does not fluctuate.

[0027] 4 is a graph showing the magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34, compared with the case where the movable magnet 34 is configured cylindrically. The horizontal axis represents the displacement of the movable part 22. Specifically, the position of the movable part 22 when the pad adapter 36 protrudes to the maximum is taken as the reference position, and the graph represents the amount of upward displacement of the movable part 22 from the reference position. The vertical axis represents the magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34. The solid line represents the magnetic force in this embodiment, and the dotted line represents the magnetic force when the movable magnet 34 is configured cylindrically.

[0028] 4, when the movable magnet 34 is configured in a cylindrical shape, the magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34 is not constant, and tends to increase as the amount of displacement of the movable part 22 increases, particularly in regions where the displacement of the movable part 22 is large. Therefore, as the displacement of the movable part 22 increases, the force that urges the movable magnet 34 downward increases. In contrast, in this embodiment, the magnetic force acting in the axial direction between the fixed magnet 18 and the movable magnet 34 is constant throughout the entire displacement region of the movable part 22.

[0029] Next, we will explain the action when a workpiece is attracted by the suction pad magnetic damper 10. When a command to attract a workpiece is issued, the robot arm or the transport device is driven, and the suction pad magnetic damper 10, to which the suction pad is attached, approaches the workpiece.

[0030] The robot arm or transport device is driven and controlled so that the suction pad magnetic damper 10 reaches the target position. In this case, the target position of the suction pad magnetic damper 10 is set so that the protrusion amount of the pad adapter 36 is midway between the maximum and minimum values ​​while the suction pad is in contact with the workpiece. After the suction pad comes into contact with the workpiece and the suction pad magnetic damper 10 is displaced to the target position, vacuum pressure is introduced into the vacuum passage 40. This allows the force pressing the workpiece to be the constant value described above. After the vacuum pressure introduced into the vacuum passage 40 acts on the workpiece to ensure that the workpiece is in an adsorbed and held state, the force pressing the workpiece is released, and the suction pad magnetic damper 10, adsorbing and holding the workpiece, moves to the specified location.

[0031] Even if the precision of control to make the suction pad magnet damper 10 reach the target position is low, or even if there is variation in the size of the workpieces, the magnitude of the force pressing the workpieces does not fluctuate, and the workpieces can be pressed with a stable force.

[0032] In this embodiment, a mechanical anti-rotation mechanism is formed by the flange portion 28 of the piston 24 and the piston guide surface 14 of the body 12, and the piston guide surface 14 has recesses 14a that receive protrusions 28a that correspond to the vertices of the polygonal cross section of the flange portion 28. However, the mechanical anti-rotation mechanism is not limited to this configuration.

[0033] According to this embodiment, the axial magnetic force acting between the fixed magnet 18 and the movable magnet 34 can be kept constant regardless of the amount of displacement of the movable part 22. Moreover, a mechanical anti-rotation mechanism can be provided between the body 12 and the movable part 22 without increasing the sliding resistance of the movable part 22.

[0034] Second Embodiment A magnetic damper 50 for a suction pad according to a second embodiment of the present invention will be described with reference to Figures 5 to 7. Note that components that are the same as or equivalent to those in the magnetic damper 10 for a suction pad according to the first embodiment are given the same reference numerals, and detailed descriptions thereof may be omitted.

[0035] 5 and 6 , the suction pad magnetic damper 50 includes a cylindrical body 12 and a movable part 22 supported by the body 12 so as to be displaceable in the axial direction of the body 12. The movable part 22 includes a piston 54, a movable magnet 34, a pad adapter 36, and a piston tube 38.

[0036] The moving magnet 34 is magnetized in the axial direction. The outer peripheral surface 34a of the moving magnet 34 is a cylindrical surface with a uniform diameter, and the inner peripheral surface 34b of the moving magnet 34 is a conical curved surface whose diameter gradually increases from top to bottom. The fixed magnet 18 attached to the body 12 is magnetized in the axial direction. The outer peripheral surface 18a and inner peripheral surface 18b of the fixed magnet 18 are both cylindrical surfaces with a uniform diameter. The axial polarity of the fixed magnet 18 is the same as the axial polarity of the moving magnet 34.

[0037] The piston 54 has a hole 56 that penetrates the center of the piston 54 in the axial direction. The piston 54 has a flange 58 that protrudes radially outward, a lower shaft 60 that extends downward from the flange 58, and an upper shaft 62 that extends upward from the flange 58. When the flange 58 of the piston 54 is cut along a plane perpendicular to the axis of the piston 54, the outer shape is a hexagon with each side curving inward. The upper inner surface of the body 12 has a piston guide surface 14 that guides the flange 58 of the piston 54. The piston guide surface 14 has recesses 14a that receive protrusions 58a that correspond to the vertices of the polygonal cross section of the flange 58, and together with the flange 58, constitute a mechanical anti-rotation mechanism.

[0038] A ring-shaped guide bush 64 is attached to the upper end of the body 12. The upper shaft portion 62 of the piston 54 is inserted into the guide bush 64, with a portion of the upper shaft portion 62 protruding upward from the guide bush 64. A pipe (not shown) extending from a vacuum generator (not shown) is connected to the upper shaft portion 62 of the piston 54. The amount of protrusion of the upper shaft portion 62 of the piston 54 changes in accordance with the displacement of the movable portion 22. The pipe is displaced integrally with the movable portion 22.

[0039] The lower shaft portion 60 of the piston 54 is press-fitted into the inside of the upper portion of the piston tube 38, the movable magnet 34 is press-fitted into the inside of the piston tube 38 over the entire length of the movable magnet 34, and the upper portion of the pad adapter 36 is press-fitted into the inside of the lower portion of the piston tube 38. As a result, a vacuum passage 66 for generating vacuum pressure is formed inside the movable part 22. Vacuum pressure from a vacuum generator (not shown) is introduced into the vacuum passage 66 of the movable part 22.

[0040] As shown in Figure 5, when the flange portion 58 of the piston 54 abuts against the stopper 20, the amount of protrusion of the pad adapter 36 is maximum. As shown in Figure 7, when the flange portion 58 of the piston 54 abuts against the guide bush 64, the amount of protrusion of the pad adapter 36 is minimum.

[0041] Third Embodiment A magnetic damper 70 for a suction pad according to a third embodiment of the present invention will be described with reference to Figures 8 to 10. Note that components that are the same as or equivalent to those in the magnetic damper 10 for a suction pad according to the first embodiment are given the same reference numerals, and detailed descriptions thereof may be omitted.

[0042] 8 and 9, the suction pad magnetic damper 70 includes a cylindrical body 72 and a movable part 22 supported by the body 72 so as to be displaceable in the axial direction of the body 72. The movable part 22 includes a piston 78, a movable magnet 34, a pad adapter 36, and a piston tube 38.

[0043] The body 72 has a first groove 72a, a pair of second grooves 72b and 72c, and a third groove 72d. The first groove 72a, the pair of second grooves 72b and 72c, and the third groove 72d surround the outer circumferential surface of the body 72. One second groove 72b is formed above the first groove 72a, and the other second groove 72c is formed below the first groove 72a. The third groove 72d is formed below the other second groove 72c. The body 72 has a pair of vacuum introduction holes 74 extending from the inner circumferential surface of the body 72 to the bottom surface of the first groove 72a.

[0044] A pipe (not shown) extending from a vacuum generator (not shown) is connected to the vacuum introduction hole 74. A seal ring 94 is attached to the second grooves 72b and 72c. The seal ring 94 prevents the vacuum pressure from decreasing when the vacuum pressure is supplied from the vacuum generator to the vacuum introduction hole 74. The body 72 is supported by a robot arm or a transport device (not shown) using a set screw (not shown) that engages with the third groove 72d.

[0045] The moving magnet 34 is magnetized in the axial direction. The outer peripheral surface 34a of the moving magnet 34 is a cylindrical surface with a uniform diameter, and the inner peripheral surface 34b of the moving magnet 34 is a conical curved surface whose diameter gradually increases from top to bottom. The fixed magnet 18 attached to the body 72 is magnetized in the axial direction. The outer peripheral surface 18a and inner peripheral surface 18b of the fixed magnet 18 are both cylindrical surfaces with a uniform diameter. The axial polarity of the fixed magnet 18 is the same as the axial polarity of the moving magnet 34.

[0046] The piston 78 has a flange portion 80 that protrudes radially outward, a lower shaft portion 82 that extends downward from the flange portion 80, and an upper shaft portion 84 that extends upward from the flange portion 80. When the flange portion 80 of the piston 78 is cut along a plane perpendicular to the axis of the piston 78, the outer shape is a hexagon with each side curving inward. The inner surface of the body 72 has a piston guide surface 76 that guides the flange portion 80 of the piston 78. The piston guide surface 76 has recesses 76a that receive protrusions 80a that correspond to the vertices of the polygonal cross section of the flange portion 80, and together with the flange portion 80, constitute a mechanical anti-rotation mechanism.

[0047] The piston 78 has a bottomed vertical hole 86 that opens to the underside of the piston 78, and a pair of horizontal holes 88 that open to the side surfaces of the flange portion 80 of the piston 78. The vertical hole 86 of the piston 78 is connected to the horizontal hole 88 of the piston 78. The horizontal hole 88 of the piston 78 communicates with the vacuum introduction hole 74 of the body 72 through the gap between the body 72 and the piston 78. A ring-shaped guide bush 90 is attached to the upper end of the body 72. The upper shaft portion 84 of the piston 78 is inserted into the guide bush 90, and a portion of the upper shaft portion 84 protrudes upward from the guide bush 90.

[0048] The lower shaft portion 82 of the piston 78 is press-fitted into the upper inside of the piston tube 38, the movable magnet 34 is press-fitted into the piston tube 38 over the entire length of the movable magnet 34, and the upper portion of the pad adapter 36 is press-fitted into the lower inside of the piston tube 38. A vacuum passage 92 including the vertical hole 86 and horizontal hole 88 of the piston 78 is formed inside the movable part 22. Vacuum pressure from a vacuum generator (not shown) is introduced into the vacuum passage 92 of the movable part 22 through the vacuum inlet hole 74 of the body 72.

[0049] As shown in Figure 8, when the flange portion 80 of the piston 78 abuts against the stopper 20, the amount of protrusion of the pad adapter 36 is maximum. As shown in Figure 10, when the flange portion 80 of the piston 78 abuts against the guide bush 90, the amount of protrusion of the pad adapter 36 is minimum.

[0050] The body 72 in the third embodiment is provided with a third groove 72d for supporting the body 72 on a robot arm or a transport device, but a similar groove may be formed in the body 12 in the first embodiment.

[0051] The magnetic damper for a suction pad according to the present invention is not limited to the above-described embodiment, and various configurations can be adopted without departing from the gist of the present invention.

Claims

1. An adsorption pad magnetic damper (10, 50, 70) that includes a cylindrical body (12, 72) and a movable part (22) supported by the body so as to be displaceable in the axial direction of the body, and that mitigates the pressure when the adsorption pad contacts the workpiece by a magnetic force acting between a cylindrical fixed magnet (18) attached to the body and a cylindrical movable magnet (34) that constitutes the movable part, wherein an outer peripheral surface (18a) and an inner peripheral surface (18b) of the fixed magnet are each formed of a cylindrical surface having a uniform diameter, an outer peripheral surface (34a) of the movable magnet is formed of a cylindrical surface having a uniform diameter, an inner peripheral surface (34b) of the movable magnet is formed of a conical curved surface, the fixed magnet and the movable magnet are magnetized in the axial direction, and an axial polarity of the fixed magnet is the same as an axial polarity of the movable magnet.

2. The adsorption pad magnetic damper according to claim 1, wherein a magnetic force acting axially between the fixed magnet and the movable magnet is constant regardless of displacement of the movable part.

3. The adsorption pad magnetic damper according to claim 1, further comprising a mechanical anti-rotation mechanism that suppresses rotation of the movable part about the axis of the body.

4. The adsorption pad magnetic damper according to claim 3, wherein the movable part includes a piston (24, 54, 78) having a flange part (28, 58, 80), a cross-section of the flange part is polygonal, a piston guide surface (14, 76) of the body has recesses (14a, 76a) that receive convex portions (28a, 58a, 80a) corresponding to respective vertices of the polygonal cross-section of the flange part, and the mechanical anti-rotation mechanism is constituted by the flange part and the piston guide surface.

5. The adsorption pad magnetic damper according to claim 1, wherein the movable part includes a piston (24, 54, 78) and a pad adapter (36), the pad adapter protrudes from the body, and displacement of the movable part in a direction in which a protruding amount of the pad adapter increases is restricted by the piston abutting against a stopper (20) to which the piston is attached to the body.

6. The magnet damper for a suction pad according to claim 1, wherein the movable part includes a piston (24, 54, 78), a pad adapter (36), and a piston tube (38), the movable magnet and the pad adapter are connected to the piston via the piston tube, and a vacuum passage (40, 66, 92) is formed inside the movable part.

7. The magnet damper for a suction pad according to claim 1, wherein the movable part includes a piston (24), a pipe adapter (42) is attached to the body, and the pipe adapter includes a main body part (44) to which a pipe is attached and a vacuum introduction part (46) that is inserted into a hole (26) of the piston via an O-ring (32).

8. The magnet damper for a suction pad according to claim 7, wherein the pipe adapter has a groove part (44a) for releasing the pressure of a back pressure chamber (48) partitioned by the body, the pipe adapter, and the piston.

9. The magnet damper for a suction pad according to claim 1, wherein the movable part includes a piston (54), a guide bush (64) is attached to the body, the piston includes a shaft part (62) to which a pipe is connected, and the shaft part is inserted into the guide bush.

10. The magnet damper for a suction pad according to claim 1, wherein the movable part includes a piston (78), the piston has a bottomed vertical hole (86) and a horizontal hole (88) that opens on a side surface of the piston, the vertical hole is connected to the horizontal hole, the body has a vacuum introduction hole (74), and the horizontal hole communicates with the vacuum introduction hole.

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