Device handler

Abstract

The present invention relates to a device handler and, more specifically, to a device handler that performs a vision inspection on a device. Disclosed is a device handler comprising: a loading unit that moves a tray, loaded with a plurality of devices, in the Y direction and loads the tray in order to perform a vision inspection; a first vision inspection unit that is disposed in the -X direction relative to the loading unit and performs a first vision inspection on devices picked up by a first transfer tool from the tray that is moved to the loading unit; a second vision inspection unit that is installed so as to be movable in the X direction and performs a second vision inspection on the devices, loaded on the tray that is moved to the loading unit, when the first transfer tool is moved toward the first vision inspection unit; a third vision inspection unit that is spaced apart from the first vision inspection unit (410) in the Y direction and performs a third vision inspection on the devices picked up by a second transfer tool from the tray that is moved to the loading unit; a fourth vision inspection unit that is installed so as to be movable in the X direction and performs a fourth vision inspection on the devices (1), loaded on the tray (2) that is moved to the loading unit, when the second transfer tool is moved toward the third vision inspection unit to perform a third bottom vision inspection; and an unloading unit that unloads, in the -Y direction, the trays loaded with the devices that have undergone the first to fourth vision inspections.

Description

Element Handler

[0001] The present invention relates to a device handler, and more particularly, to a device handler that performs vision inspection on a device.

[0002] Semiconductor devices that have completed the semiconductor process are loaded onto customer trays and shipped after undergoing certain tests such as electrical characteristic inspection and vision inspection.

[0003] And the semiconductor devices being shipped go through a marking process where serial numbers, manufacturer logos, etc. are marked on their surfaces using lasers, etc.

[0004] Electrical characteristic tests include burn-in tests to check whether the device operates normally at high temperatures, and DC tests using DC power.

[0005] Additionally, vision inspection includes inspection of the external appearance of semiconductor devices, such as whether the leads or ball grids are in normal condition, whether there are cracks or scratches, and whether the markings formed on the surface are good.

[0006] And depending on the inspection content, the configuration of the device varies, and conventional element handlers include patent documents 1 and 2.

[0007] A device handler such as Patent Documents 1 and 2 may include loading of a tray loaded with a plurality of devices, one or more inspection modules for inspection of each device, and an unloading module according to the inspection results after the inspection.

[0008] In this case, when inspection is performed by a separate device such as a burn-in sorter, the conventional element handler can be configured without an inspection module.

[0009] Meanwhile, conventional component handlers are generally equipped with a transfer tool for picking up and loading components for loading and unloading components.

[0010] And the conventional transport tool is equipped with one or more pickers to pick up or load elements by air pressure, and the conventional picker is composed of a pneumatic rod connected to a pneumatic transmission tube and a pickup head connected to the end of the pneumatic rod to pick up elements.

[0011] Meanwhile, in the case of conventional element handlers, when the specifications of the element to be handled, such as the size and shape of the element, change, it is necessary to replace all of the transport tools for picking up and loading the element or the pickup head.

[0012] Additionally, the pickup head needs to be replaced regularly as a consumable depending on the picker's usable lifespan.

[0013] However, when replacing the pickup heads of the pickers that make up the transfer tool, there is a problem that the work for replacing the pickup heads is cumbersome because the pickup heads of each picker must be replaced while the device is stopped.

[0014] (Patent Document 1) KR 10-2017-0140964 A

[0015] (Patent Document 2) KR 10-2019-0106098 A

[0016] The purpose of the present invention is to provide a device handler that can quickly perform vision inspection on a device by efficiently arranging multiple vision inspections according to the inspection content and speed.

[0017] The present invention has been created to achieve the above-described object of the present invention, and the present invention comprises: a loading unit (100) for loading a tray (2) on which a plurality of elements (1) are loaded in an m×n matrix (m, n are natural numbers of 2 or more) by moving the tray (2) in the Y-axis direction to perform a vision inspection; a first vision inspection unit (410) for performing a first vision inspection on at least one of the bottom and side surfaces of elements (1) picked up by a first transfer tool (610) including a plurality of pickers (631) arranged in a k×l matrix (k, l are natural numbers of 1 or more) from a tray (2) moved to the loading unit (100) while being arranged in the -X-axis direction with respect to the loading unit (100); A second vision inspection unit (420) that is installed to be movable in the X-axis direction and performs a second vision inspection on a device (1) loaded on a tray (2) moved to the loading unit (100) when the first transfer tool (610) is moved toward the first vision inspection unit (410) to perform the first vision inspection; A third vision inspection unit (1000) that is arranged to be spaced apart from the first vision inspection unit (410) in the Y-axis direction and includes a plurality of pickers (631) arranged in an i×j matrix (i, j are natural numbers greater than or equal to 1) from the tray (2) moved to the loading unit (100) and performs a third vision inspection on at least one of the bottom and side surfaces of the devices (1) picked up by the second transfer tool (620); A device handler is disclosed, characterized in that it includes a fourth vision inspection unit (430) that is installed to be movable in the X-axis direction and performs a fourth vision inspection on the upper surface of a device (1) loaded on a tray (2) moved to the loading unit (100) when the second transfer tool (620) is moved toward the third vision inspection unit (1000) to perform the third bottom vision inspection; and an unloading unit (300) that unloads trays (2) loaded with devices (1) that have completed the first to fourth vision inspections in the -Y-axis direction.

[0018] The unloading unit (300) includes one or more first sorting lines (310) that receive trays (2) from the loading unit (100), move them in the -Y-axis direction, and discharge trays (2) loaded with only good components (1) that have been inspected as good by the first to fourth vision inspections to the outside; one or more second sorting lines (320, 330) that receive trays (2) from the loading unit (100), move them in the -Y-axis direction, and discharge trays (2) loaded with only defective components (1) that have been inspected as defective by the first to fourth vision inspections to the outside; It may include a third transfer tool (640) including a plurality of pickers (631) arranged in an a×b matrix (a, b are natural numbers greater than or equal to 2) that pick up or load elements (1) from trays (2) located in the first sorting line (310) and the second sorting line (320, 330) and classify the elements (1) into good and defective products.

[0019] The fifth vision inspection unit (440) may additionally include a fifth vision inspection unit (440) that performs a fifth vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by the fourth transfer tool (630) that is arranged in the +X-axis direction with respect to the above unloading unit (300) and is installed to move in the X-axis direction across the first sorting line (310) and the second sorting line (320, 330), and includes a plurality of pickers (631) arranged in a c×d matrix (c, d are natural numbers of 2 or more).

[0020] It may further include a sixth vision inspection unit (450) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and performs a sixth vision inspection on the upper surface of the element (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

[0021] It may further include a seventh vision inspection unit (460) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and inspects the loading state of the elements (1) loaded on the trays (2) located on the first sorting line (310) and the second sorting line (320, 330).

[0022] It may further include a seventh vision inspection unit (460) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and inspects the loading state of the elements (1) loaded on the trays (2) located on the first sorting line (310) and the second sorting line (320, 330).

[0023] A bottom vision inspection unit that performs a vision inspection on the bottom surface of the element (1) picked up by the first transfer tool (610) may be installed on either the left or right side of the first vision inspection unit (410).

[0024] The third vision inspection unit (1000) may include a bottom image acquisition unit (480) installed in the movement path of the picker (631) of the second transfer tool (620) to acquire a bottom image of the bottom surface of the element (1) picked up by the picker (631); and one or more side image acquisition units (470) installed adjacent to the bottom image acquisition unit (480) to acquire a side image of the side surface of the element (1) that has passed through the bottom image acquisition unit (480) in order to perform a vision inspection on the side surface of the element.

[0025] The above-described side image acquisition unit (470) includes a first side image acquisition unit (471) and a second side image acquisition unit (472) installed as a pair with the movement path of the picker (631) that picked up the element (1) interposed therebetween, and the first side image acquisition unit (471) and the second side image acquisition unit (472) are arranged with a gap in the Y-axis direction that is perpendicular to the X-axis direction, and can be installed as a pair with the movement path of the picker (631) that picked up the element (1) interposed therebetween.

[0026] When the element (1) has a rectangular planar shape by the first side image acquisition unit (471) and the second side image acquisition unit (472), after passing through the bottom image acquisition unit (480), it moves to the first side image acquisition unit (471) and the second side image acquisition unit (472), and a first vision inspection is performed on a pair of first side surfaces that are opposed to each other, and the element (1) on which the first vision inspection is performed is moved back to the first side image acquisition unit (471) and the second side image acquisition unit (472) after the picker (631) is rotated 90°, and a second vision inspection can be performed on a pair of second side surfaces that are opposed to each other and are perpendicular to the first side.

[0027] When the above picker (631) is arranged in a double row and transported, the side image acquisition unit (470) may be arranged in pairs with the first side image acquisition unit (471) and the second side image acquisition unit (472) corresponding to the corresponding row.

[0028] After the elements (1) of each column are moved in the first direction and images of the sides of all elements (1) are acquired, the picker (631) rotates 90° and then moves in the opposite direction between the pair of first side image acquisition units (471) and second side image acquisition units (472) to acquire images of the sides of the elements (1).

[0029] The control unit may include a control unit that analyzes the bottom image acquired by the bottom image acquisition unit (480) and rotates the picker (631) so that the side of the element (1) is perpendicular to the optical axis of the side image acquisition unit (470).

[0030] When the plane shape of the element (1) to be inspected is a rectangular shape and the lengths of the long and short sides are different, the first side image acquisition unit (471) and the second side image acquisition unit (472) may include a camera (510) that acquires an image of the side of the long side or the short side of the element (1), an optical system (550) that guides light to the camera (510) for capturing the image of the side of the long side or the short side of the element (1), and an optical distance adjustment means that maintains a constant optical distance (L) from the long side or the short side of the element (1) to the camera (510).

[0031] The optical distance adjustment means can maintain the optical distance (L) from the long side or short side of the element (1) to the camera (510) constant by varying the distance between the camera (510) and the reflective member (551) and the length of the optical tube.

[0032] The optical distance adjustment means uses each of the first side image acquisition unit (471) and the second side image acquisition unit (472) as one image acquisition module, and moves the image acquisition modules to adjust the distance between the image acquisition modules with respect to the side of the element (1), thereby maintaining the optical distance (L) from the long side or short side of the element (1) to the camera (510).

[0033] The element handler according to the present invention has the advantage of being able to efficiently perform vision inspection by positioning vision inspection devices that perform 2D and 3D vision inspections at multiple points along the movement path of the tray.

[0034] That is, the element handler according to the present invention can quickly perform vision inspection on elements by efficiently arranging them according to the inspection content and speed when performing multiple vision inspections.

[0035] In particular, by positioning the unloading section so that precise vision inspection, such as for micro-cracks, can be performed as an option after performing other vision inspections, vision inspection can be performed quickly.

[0036] Specifically, by placing the relatively slow micro-vision inspection on the unloading side, the efficiency of the vision inspection can be greatly improved by omitting the vision inspection for elements that were found to be defective in the previous vision inspection.

[0037] In addition, by performing the vision inspection on the upper surface of the element, i.e. the fourth vision inspection, as the last vision inspection during the tray transport path in the loading section in consideration of damage to the element during the element pickup process by the picker, there is an advantage in that damage to the element can be minimized during the element pickup process.

[0038] FIG. 1 is a plan view showing an example of a device handler according to one embodiment of the present invention.

[0039] Figure 2 is a conceptual diagram showing an example of the operation of the vision inspection unit among the element handlers of Figure 1.

[0040] Figure 3 is a conceptual diagram showing the operation of a modified example of the vision inspection unit in Figure 2.

[0041] Fig. 4 is a side view showing the configuration of the vision inspection unit of Fig. 2.

[0042] Fig. 5 is a conceptual diagram showing the alignment status of the elements in the vision inspection section of Fig. 2.

[0043] Figure 6 is a conceptual diagram showing another example of a vision inspection unit among the element handlers in Figure 1.

[0044] Fig. 7 is a front view showing an example of an image acquisition module that constitutes the vision inspection unit among the element handlers in Fig. 1.

[0045] Figures 8a and 8b are conceptual diagrams showing the operation of another modified example of the vision inspection unit among the element handlers of Figure 1.

[0046] Figures 9a and 9b are conceptual diagrams showing the operation of another modified example of the vision inspection unit among the element handlers of Figure 1.

[0047] Fig. 10 is a perspective view showing an example of a pickup head replacement module according to the present invention.

[0048] Fig. 11 is an exploded perspective view of the pickup head replacement module of Fig. 10.

[0049] Fig. 12 is a front view of the pickup head replacement module of Fig. 10.

[0050] Fig. 13 is a cross-sectional view of the pickup head replacement module of Fig. 10.

[0051] Fig. 14 is a conceptual diagram showing the concept for transmitting rotation of the drive pulley and the rotary pulley in the pickup head replacement module of Fig. 10.

[0052] Fig. 15 is a perspective view showing an example of a detachable joint part of the pickup head replacement module of Fig. 10.

[0053] Figure 16 is a conceptual diagram showing the replacement process of the pickup head for the detachable coupling part among the pickup head replacement modules from the back.

[0054] Figure 17 is a conceptual diagram showing the replacement process of the pickup head for the detachable coupling part among the pickup head replacement modules on a plane.

[0055] Hereinafter, a pickup head replacement module and a component handler having the same according to the present invention will be described with reference to the attached drawings.

[0056] According to one embodiment of the present invention, a device handler comprises: a loading unit (100) for moving a tray (2) on which a plurality of devices (1) are loaded in an m×n matrix (m, n are natural numbers greater than or equal to 2) in the Y-axis direction to perform a vision inspection; a first vision inspection unit (410) for performing a first vision inspection on at least one of the bottom and side surfaces of devices (1) picked up by a first transfer tool (610) including a plurality of pickers (631) arranged in a k×l matrix (k, l are natural numbers greater than or equal to 1) from a tray (2) moved to the loading unit (100) while being arranged in the -X-axis direction with respect to the loading unit (100); A second vision inspection unit (420) that is installed to be movable in the X-axis direction and performs a second vision inspection on a device (1) loaded on a tray (2) moved to the loading unit (100) when the first transfer tool (610) is moved toward the first vision inspection unit (410) to perform the first vision inspection; A third vision inspection unit (1000) that is arranged to be spaced apart from the first vision inspection unit (410) in the Y-axis direction and includes a plurality of pickers (631) arranged in an i×j matrix (i, j are natural numbers greater than or equal to 1) from the tray (2) moved to the loading unit (100) and performs a third vision inspection on at least one of the bottom and side surfaces of the devices (1) picked up by the second transfer tool (620); It is installed so as to be movable in the X-axis direction, and includes a fourth vision inspection unit (430) that performs a fourth vision inspection on the upper surface of the element (1) loaded on the tray (2) moved to the loading unit (100) when the second transfer tool (620) is moved toward the third vision inspection unit (1000) to perform the third bottom vision inspection; and an unloading unit (300) that unloads the trays (2) loaded with the elements (1) that have completed the first to fourth vision inspections in the -Y-axis direction.

[0057] Here, the element (1) can be any semiconductor element that has completed a semiconductor process, such as memory, SD RAM, flash RAM, CPU, GPU, etc., and has a polygonal, particularly rectangular, planar shape.

[0058] The above tray (2) is configured such that one or more elements (1) are loaded in an m×n matrix (m, n are natural numbers greater than or equal to 2), and is generally standardized according to the type of element to be loaded, such as a memory element, or the process step.

[0059] The tray (2) may have a mounting groove (not shown) formed on the upper surface for mounting the element (1).

[0060] The above loading unit (100) is configured to load a tray (2) loaded with a number of elements (1) in an m×n matrix (m, n are natural numbers greater than or equal to 2) by moving it in the Y-axis direction to perform a vision inspection, and various configurations are possible.

[0061] For example, the loading unit (100) may be configured to include a guide unit (not shown) that guides the movement of a tray (2) on which a plurality of elements (1) are loaded, and a driving unit (not shown) that moves the tray (2) along the guide unit, as shown in FIG. 1 and Korean Patent Publication No. 10-2008-0092671.

[0062] The first vision inspection unit (410) is configured to perform a first vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by the first transfer tool (610) including a plurality of pickers (631) arranged in a k×l matrix (k, l are natural numbers greater than or equal to 1) from a tray (2) that is arranged in the -X-axis direction with respect to the loading unit (100) and moved to the loading unit (100), and various configurations are possible.

[0063] As an example, the first vision inspection can perform a 2D or 3D vision inspection on the bottom surface of the element (1) picked up and transported by the first transport tool (610).

[0064] At this time, the first vision inspection unit (410) may include a first image acquisition unit that acquires an image of the bottom surface of the element (1) picked up and transferred by the first transfer tool (610) for 3D vision inspection, and a first light source unit that irradiates light to the bottom surface of the element (1) picked up and transferred by the first transfer tool (610) for image acquisition of the first image acquisition unit.

[0065] The above second vision inspection unit (420) is installed so as to be movable in the X-axis direction, and is configured to perform a second vision inspection on the element (1) loaded on the tray (2) moved to the loading unit (100) when the first transfer tool (610) is moved toward the first vision inspection unit (410) to perform the first vision inspection, and various configurations are possible.

[0066] The above second vision inspection can perform a 2D inspection on the element (1), particularly on the upper surface of the element (1).

[0067] At this time, the second vision inspection unit (420) may include a second image acquisition unit that acquires an image of the element (1) loaded on the tray (2) located in the loading unit (100) when the first transfer tool (610) is moved toward the first vision inspection unit (410) for the first vision inspection, and a second light source unit that irradiates light to the upper surface of the element (1) for image acquisition by the second image acquisition unit.

[0068] Meanwhile, a bottom vision inspection unit that performs a vision inspection on the bottom surface of the element (1) picked up by the first transfer tool (610) may be installed on either the left or right side (in FIG. 1) of the first vision inspection unit (410) instead of or together with the second vision inspection unit (420).

[0069] The above-mentioned bottom vision inspection unit is configured to be installed on either the left or right side of the first vision inspection unit (410) and performs a vision inspection on the bottom surface of the element (1) picked up by the first transfer tool (610), and can be configured similarly to the second vision inspection unit.

[0070] Meanwhile, the second vision inspection unit (420) and the first vision inspection unit (410) may have various configurations.

[0071] It can be configured as shown in the example presented in Korean Patent Publication No. 10-2010-0122140 and FIGS. 2a and 2b.

[0072] Here, the first light source unit of the first vision inspection unit (410) can have various configurations, and monochromatic light such as a laser, white light, etc. can be used.

[0073] In particular, when the three-dimensional shape to be measured is minute, laser light has a large amount of diffuse reflection, making measurement difficult. Therefore, it is preferable to use white light, which has less diffuse reflection.

[0074] And, the first light source unit of the first vision inspection unit (410) is preferably configured to irradiate light in a slit shape onto the surface of the element (1), and may include an optical fiber that transmits light from the light source, and a slit unit that is connected to the optical fiber and irradiates light in a slit shape onto the surface of the element (1).

[0075] Meanwhile, the second vision inspection unit (420) and the first vision inspection unit (410) can be arranged parallel to the third vision inspection unit (1000) described later, as illustrated in FIG. 1.

[0076] In particular, the second vision inspection unit (420) and the first vision inspection unit (410) may be installed on the front side of the third vision inspection unit (1000) and performed before the third vision inspection, such as the 5D vision inspection, is performed by the third vision inspection unit (1000).

[0077] The third vision inspection unit (1000) is configured to perform a third vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by the second transfer tool (620), which is arranged spaced apart from the first vision inspection unit (410) in the Y-axis direction and includes a plurality of pickers (900) arranged in an i×j matrix (i, j are natural numbers greater than or equal to 1) from the tray (2) moved to the loading unit (100), and various configurations are possible.

[0078] For example, the third vision inspection unit (1000) is installed on one side of the loading unit (100) and is configured to acquire an image of the element (1) using a camera, scanner, etc. to perform a third vision inspection on the element (1). Various configurations are possible depending on the type of the element (1) to be inspected, the type of inspection, and the configuration of the system.

[0079] For example, the third vision inspection unit (1000) may be installed on one side of the loading unit (100) perpendicular to the transport direction of the tray (2) in the loading unit (100), but is not limited thereto.

[0080] Specifically, as illustrated in FIG. 1, when the transport direction of the tray (2) within the loading section (100) is the Y-axis direction, the third vision inspection section (1000) can be installed on one side of the X-axis direction that is perpendicular to the Y-axis direction.

[0081] Meanwhile, the third vision inspection unit (1000) is a vision inspection module that performs vision inspection on the element (1) in a state picked up by the picker (631), and can be configured in various ways.

[0082] As an example, the third vision inspection unit (1000) may include, as illustrated in FIGS. 2 to 5, a bottom image acquisition unit (480) installed in the movement path of the picker (631) of the second transfer tool (620) to acquire a bottom image of the bottom surface of the element (1) picked up by the picker (631); and one or more side image acquisition units (470) installed adjacent to the bottom image acquisition unit (480) to acquire a side image of the side surface of the element (1) that has passed through the bottom image acquisition unit (480) to perform a vision inspection on the side surface of the element.

[0083] The above-mentioned bottom image acquisition unit (480) is installed in the movement path of the picker (631) and is configured to acquire a bottom image of the bottom surface of the element (1) picked up by the picker (631), and various configurations are possible.

[0084] In particular, the bottom image acquisition unit (480) may be configured with a camera or scanner in consideration of acquiring a bottom image of the bottom surface of the element (1).

[0085] And the bottom image of the element (1) acquired by the bottom image acquisition unit (480) can be utilized for the rotational alignment of the element (1) described below as well as the state of the bottom of the element (1), especially for performing 2D inspection.

[0086] Meanwhile, the bottom image acquisition unit (480) may be configured as in the example of Korean Patent Publication No. 10-2010-0122140, Patent Document 2.

[0087] The above-mentioned side image acquisition unit (470) is installed adjacent to the bottom image acquisition unit (480) and is configured to acquire a side image of the side of the device (1) that has passed through the bottom image acquisition unit (480) in order to perform a vision inspection on the side of the device, and various configurations are possible.

[0088] For example, the side image acquisition unit (470) may be the side inspection unit of Patent Document 1 or the vision inspection module of Patent Document 2.

[0089] In particular, the side image acquisition unit (470) may include a first side image acquisition unit (471) and a second side image acquisition unit (472) installed as a pair with the movement path of the picker (631) that picks up the element (1) interposed between them, as illustrated in FIG. 2.

[0090] The first side image acquisition unit (471) and the second side image acquisition unit (472) are arranged with a gap in the Y-axis direction, which is perpendicular to the movement direction of the element (1), i.e., the X-axis direction, and are installed as a pair with the movement path of the picker (631) that picks up the element (1) interposed therebetween, and various configurations are possible.

[0091] For example, the first side image acquisition unit (471) and the second side image acquisition unit (472) may include a camera and an optical system, and may be configured as one camera depending on the configuration of the optical system, as in Patent Document 2.

[0092] When the element (1) has a rectangular planar shape by the first side image acquisition unit (471) and the second side image acquisition unit (472), after passing through the bottom image acquisition unit (480), it moves to the first side image acquisition unit (471) and the second side image acquisition unit (472), and a first vision inspection is performed on a pair of first side surfaces that are opposed to each other, and the element (1) on which the first vision inspection is performed is moved back to the first side image acquisition unit (471) and the second side image acquisition unit (472) after the picker (631) is rotated 90° (Fig. 2(b)), and a second vision inspection can be performed on a pair of second side surfaces that are opposed to each other and are perpendicular to the first side.

[0093] Meanwhile, when the picker (631) is arranged in a double row and transported as shown in FIG. 3, the side image acquisition unit (470) may be arranged in pairs with the first side image acquisition unit (471) and the second side image acquisition unit (472) corresponding to the corresponding row, as shown in FIG. 3.

[0094] By the above configuration, the elements (1) picked up by the plurality of pickers (631) arranged in the X-axis direction form a row in the X-axis direction, and the elements (1) forming each row move between the pair of the first side image acquisition unit (471) and the second side image acquisition unit (472), thereby obtaining an image of the side of the element (1).

[0095] And after the elements (1) of each column are moved in the first direction, for example, the -X-axis direction, and images of the sides of all elements (1) are acquired, the picker (631) rotates 90° and then moves in the opposite direction, that is, the +X-axis direction, between the pair of first side image acquisition units (471) and second side image acquisition units (472), thereby acquiring images of the sides of the elements (1).

[0096] Meanwhile, when performing the first and second vision inspections, the element (1) picked up by the picker (631) needs to be perpendicular to the optical axis of the side image acquisition unit (470), i.e., the Y-axis.

[0097] However, the element (1) picked up by the picker (631) may be picked up by the picker (631) in a state that is not perpendicular to the Y-axis, as shown in FIG. 5, depending on the pickup state, and in this case, the measurement distance in the direction of the optical axis of the side image acquisition unit (470) may be different, so that the resolution of the image for a portion outside the FOV may not be suitable for vision inspection.

[0098] Here, the measurement distance is the optical distance from the surface of the subject to an imaging device such as a camera. If the measurement distance is outside the FOV range, there is a problem that the clarity is reduced and the vision inspection becomes inaccurate or impossible.

[0099] Accordingly, before acquiring a side image by the side image acquisition unit (470), it is necessary to ensure that the angle formed between the optical axis of the side image acquisition unit (470), i.e., the Y-axis, and the side of the element (1) is perpendicular, i.e., rotational alignment.

[0100] Accordingly, the present invention includes a control unit that analyzes the bottom image acquired by the bottom image acquisition unit (480) and rotates the picker (631) so that the side of the element (1) is perpendicular to the optical axis of the side image acquisition unit (470).

[0101] The above control unit is configured to analyze the bottom image acquired by the bottom image acquisition unit (480) and rotate the picker (631) so that the side of the element (1) is perpendicular to the optical axis of the side image acquisition unit (470), and various configurations are possible with a circuit configuration rather than a physical configuration.

[0102] Specifically, as illustrated in FIG. 5, the control unit analyzes the bottom image of the element (1) to calculate the angular error between the optical axis of the side image acquisition unit (470), i.e., the Y-axis, and the side surface of the element (1), i.e., the angular deviation with respect to 90°, and rotates the picker (631) based on the calculated angular deviation, thereby controlling the side surface of the element (1) to be perpendicular to the optical axis of the side image acquisition unit (470).

[0103] Here, the control unit can rotate the picker (631) that picks up the element (1) by rotating the picker rotation drive unit described later, and rotate the picker (631) based on the calculated angular deviation.

[0104] Meanwhile, the above control unit can perform overall control of the element handler as well as bottom image analysis and rotation control of the picker (631).

[0105] And, the above vision inspection module and control unit constitute a single module, and can be applied to various element handlers requiring vision inspection as an independent module regardless of the specific configuration of the element handler.

[0106] The above second transfer tool (620) can be configured in various ways, such as picking up the element (1) from the tray (2) of the loading section (100) and transferring it to the third vision inspection section (1000), and transferring the element (1) that has completed the vision inspection to the tray (2) and loading it.

[0107] For example, the second transfer tool (620) may include a main body and a plurality of pickers (631) arranged in one or more rows, which are coupled to the main body and adsorb and fix the back surface (hereinafter, the second plane) of the first plane of the element (1), as illustrated in Patent Document 2 and FIG. 4.

[0108] It is preferable that the above plurality of pickers (631) are installed in a row or multiple rows to increase inspection speed, etc.

[0109] The above picker (631) is configured to pick up the element (1) by adsorbing and fixing the second plane by vacuum pressure, and can be configured in various ways.

[0110] The above second transfer tool (620) may additionally include a picker rotation drive unit that rotates the picker (631) about a central axis (c) parallel to the normal direction (-Z-axis direction) of the first plane.

[0111] In addition, the second transfer tool (620) may further include a linear movement driving unit that linearly moves a main body to which a plurality of pickers (631) are coupled so that a plurality of elements (1) picked up by a plurality of pickers (631) arranged in a row can move along a movement path to a third vision inspection unit (1000) including a bottom image acquisition unit (480) and a side image acquisition unit (470).

[0112] The above second transfer tool (620) can be combined with the first guide rail (680) so as to move along the first guide rail (680) arranged in a vertical direction (X-axis direction based on the drawing) and the direction of movement of the tray (2) in the loading section (100) (Y-axis direction based on the drawing).

[0113] The above first guide rail (680) is arranged perpendicular to the direction of movement of the tray (2) in the loading section (100) to support the first transfer tool (610) and guide its movement, and various configurations are possible.

[0114] The above fourth vision inspection unit (430) is installed so as to be movable in the X-axis direction, and is configured to perform a fourth vision inspection on the upper surface of the element (1) loaded on the tray (2) moved to the loading unit (100) when the second transfer tool (620) is moved toward the third vision inspection unit (1000) to perform the third bottom vision inspection, and various configurations are possible.

[0115] For example, the fourth vision inspection unit (430) may be configured similarly to the second vision inspection unit (420) described above.

[0116] That is, the above fourth vision inspection can perform a 2D inspection on the upper surface of the element (1).

[0117] At this time, the fourth vision inspection unit (430) may include a third image acquisition unit that acquires an image of the upper surface of the element (1) loaded on the tray (2) located in the loading unit (100) when the second transfer tool (620) is moved toward the third vision inspection unit (1000) for the third vision inspection, and a third light source unit that irradiates light onto the upper surface of the element (1) for image acquisition by the third image acquisition unit.

[0118] In particular, the above-mentioned fourth vision inspection is an inspection of the upper surface of the element (1), and it is preferable that there is no additional pickup of the element (1), so it is preferable to perform the vision inspection on the element (1) after performing the third vision inspection.

[0119] The above unloading unit (300) is configured to unload trays (2) loaded with elements (1) that have completed the first to fourth vision inspections in the -Y-axis direction, and various configurations are possible.

[0120] The above unloading unit (300) is configured to receive trays (2) containing elements (1) that have undergone vision inspection from the loading unit (100) and classify them into the corresponding trays (2) according to the vision inspection results, and can be configured in various ways.

[0121] The unloading unit (300) has a configuration similar to that of the loading unit (100), and includes one or more first sorting lines (310) that receive trays (2) from the loading unit (100), move them in the -Y-axis direction, and discharge trays (2) loaded with only the components (1) of good products inspected as good by the first to fourth vision inspections to the outside; one or more second sorting lines (320, 330) that receive trays (2) from the loading unit (100), move them in the -Y-axis direction, and discharge trays (2) loaded with only the components (1) of bad products inspected as bad by the first to fourth vision inspections to the outside; It may include a third transfer tool (640) including a plurality of pickers (900) arranged in an a×b matrix (a, b are natural numbers greater than or equal to 2) that pick up or load elements (1) from trays (2) located in the first sorting line (310) and the second sorting line (320, 330) and classify the elements (1) into good and defective products.

[0122] And, the first sorting line (310) and the second sorting line (320, 330) may be installed in parallel with a plurality of unloading tray parts including a guide part (not shown) installed parallel to one side of the loading part (100) and a driving part (not shown) for moving the tray (2) along the guide part.

[0123] Meanwhile, in the unloading section (310, 320, 330), a third transfer tool (640) may be separately installed to transfer the element (1) between each unloading tray section according to the classification level of each unloading tray section.

[0124] The third transfer tool (640) has the same or similar configuration as the first transfer tool (610) described above and may have a double-row structure or a single-row structure. As shown in FIG. 1, it may be installed so as to be movable along the first guide rail (680) or may be installed so as to be movable along the second guide rail (not shown) arranged parallel to the first guide rail (680).

[0125] Meanwhile, the tray (2) can be transferred between the loading section (100) and the unloading section (310, 320, 330) by a tray transfer device (not shown), and may additionally include an empty tray section (200) that supplies an empty tray (2) on which a semiconductor device (1) is not loaded to the unloading section (310, 320, 330).

[0126] The device handler according to the present invention as described above can obtain a clear image of the device side by compensating the angular difference between the optical axis of the image acquisition unit for device side inspection and the device side when performing a vision inspection on the device side, thereby greatly improving the reliability of the vision inspection.

[0127] Meanwhile, in performing the third vision inspection, especially the 5D vision inspection, when the plane shape of the element (1) that is the subject of the vision inspection is rectangular, the lengths of the long and short sides are different, so when performing the vision inspection by rotating the element (1) as shown in FIGS. 2 and 3, it is necessary to correct the focus of the optical system on the side of the element (1).

[0128] Specifically, in acquiring an image of the side surface of a rectangular-shaped element (1), as shown in FIGS. 6, 8a and 8b, it is rotated from the long side to the short side or from the short side to the long side.

[0129] At this time, the first measurement distance (D1) formed by the short side of the rectangular-shaped element (1) and the first side image acquisition unit (471) and the second side image acquisition unit (472) becomes smaller than the second measurement distance (D2) formed by the long side of the element (1), and accordingly, the distance from the side of the element (1) to the camera (510) changes.

[0130] Accordingly, the vision inspection module according to the present invention can be configured so that the optical distance (L) to the element (1) that is the subject of vision inspection can be adjusted, as shown in FIGS. 6 to 9b.

[0131] Specifically, the first side image acquisition unit (471) and the second side image acquisition unit (472) may include, as illustrated in FIGS. 6 and 7, a camera (510) for acquiring an image of the side of the long side or the short side of the device (1), an optical system (550) for guiding light to the camera (510) for capturing an image of the side of the long side or the short side of the device (1), and an optical distance adjustment means for maintaining a constant optical distance (L) from the long side or the short side of the device (1) to the camera (510).

[0132] The above camera (510) is configured to acquire an image of the side of the long side or short side of the element (1), and may be configured as a camera made of an imaging element.

[0133] The optical system (550) is configured to guide light from the image of the long side or short side of the element (1) to the camera (510), and may be configured to include one or more lenses, reflectors, etc.

[0134] For example, the optical system (550) may be composed of one or more lenses when the camera (510) faces the long side or short side of the element (1) as the front.

[0135] As another example, the optical system (550) may include a reflective member (551) for vertically converting the optical path (L) in addition to one or more lenses when the camera (510) is oriented perpendicular to the long side or short side of the element (1).

[0136] Additionally, the optical system (550) may include a tube (552) or the like to eliminate interference from ambient light.

[0137] In addition, the optical system (550) may include a light irradiation unit (520) that irradiates light to the long side or short side of the element (1) so that the camera (510) can smoothly acquire an image of the long side or short side of the element (1).

[0138] The above light irradiation unit (520) is configured to irradiate light to the long side or short side of the element (1) by the camera (510), and can be configured in various ways, such as irradiating visible light, single light of a specific wavelength, etc., depending on the type and content of the vision inspection.

[0139] The above optical distance adjustment means is configured to maintain a constant optical distance (L) from the long side or short side of the element (1) to the camera (510), and various configurations are possible depending on the method of adjusting the optical distance (L).

[0140] As an example, the optical distance adjustment means can maintain the optical distance (L) from the long side or short side of the element (1) to the camera (510) constant by varying the length of the optical system (550) composed of a lens, a mirror, etc., as shown in FIGS. 8a and 8b.

[0141] Specifically, the optical distance adjustment means can maintain the optical distance (L) from the long side or short side of the element (1) to the camera (510) constant by varying the distance between the camera (510) and the reflective member (551) and the length of the optical tube.

[0142] In addition, as shown in FIGS. 8a and 8b, by moving the camera (510), the optical distance (L) from the long side or short side of the element (1) to the camera (510) can be kept constant.

[0143] At this time, the distance of the optical distance (L) of the optical system (550) from the long side or short side of the element (1) to the camera (510) is varied.

[0144] As another example, the optical distance adjustment means, as shown in FIGS. 8A and 8B, uses each of the first side image acquisition unit (471) and the second side image acquisition unit (472) as one image acquisition module, and moves the image acquisition modules to adjust the distance between the image acquisition modules with respect to the side of the element (1), thereby maintaining the optical distance (L) from the long side or short side of the element (1) to the camera (510) constant.

[0145] At this time, the optical distance adjustment means may include a linear movement unit (560) that linearly moves the image acquisition module to increase or decrease the measurement distance with respect to the side of the element (1).

[0146] The above linear movement unit (560) is configured to linearly move the image acquisition module so that the measurement distance increases or decreases with respect to the side of the element (1), and various configurations are possible.

[0147] When the image acquisition target changes from the short side of the element (1) to the long side by rotation of the element (1), and increases from the first measurement distance (D1) to the second measurement distance (D2), or conversely, when the image acquisition target changes from the long side of the element (1) to the short side, and decreases from the second measurement distance (D2) to the first measurement distance (D1), the optical distance (L) from the long side or short side of the element (1) to the camera (510) can be kept constant by the optical distance adjusting means.

[0148] Meanwhile, the rectangular-shaped element (1) performs a first vision inspection on a pair of first sides while passing through the side image acquisition unit (470), and then rotates 90° and performs a second vision inspection on a pair of second sides while passing through the side image acquisition unit (470).

[0149] At this time, after the first vision inspection and the 90° rotation, it is necessary to check whether the rotation of each element (1) is performed appropriately according to the rotation precision of each element (1).

[0150] Accordingly, the bottom image acquisition unit (480) is installed in front and behind the side image acquisition unit (470) based on the movement direction of the element (1), so that the rotational state of each element before the first vision inspection (see FIG. 5) can be inspected by the bottom image acquisition unit (480) installed in the front, and the rotational state of each element (see FIG. 5) can be inspected by the rear image acquisition unit (not shown) installed in the rear after the first vision inspection and a 90° rotation.

[0151] Meanwhile, the element handler according to the present invention may further include a fifth vision inspection unit (440) that performs a fifth vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by a fourth transfer tool (630) that is arranged in the +X-axis direction with respect to the unloading unit (300) and is installed to move in the X-axis direction across the first sorting line (310) and the second sorting line (320, 330), and includes a plurality of pickers (900) arranged in a c×d matrix (c, d are natural numbers of 2 or more).

[0152] The fifth vision inspection unit (440) is configured to perform a fifth vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by the fourth transfer tool (630), which is arranged in the +X-axis direction with respect to the unloading unit (300), and is installed to move in the X-axis direction across the first sorting line (310) and the second sorting line (320, 330), and includes a plurality of pickers (900) arranged in a c×d matrix (c, d are natural numbers of 2 or more), and various configurations are possible.

[0153] The fifth vision inspection unit (440) is configured to perform a fifth vision inspection on at least one of the bottom and side surfaces of the elements (1) picked up by the fourth transfer tool (630), and may be configured similarly to either the first vision inspection unit (410) or the third vision inspection unit (1000) described above, depending on the content of the vision inspection.

[0154] In particular, considering that the fifth vision inspection unit (440) is performed after the first to fourth vision inspections described above are performed, the vision inspection for the element (1) that was inspected as defective as a result of the previous vision inspection (the first to fourth vision inspections) can be omitted.

[0155] At this time, the fifth vision inspection unit (440) can perform a different inspection from the first to fourth vision inspections, for example, a precise vision inspection for micro cracks, micro shapes, etc., taking into account that this is an additional vision inspection for the element (1) that was inspected as a good product as a result of the first to fourth vision inspections.

[0156] Meanwhile, the element handler according to the present invention may additionally include a sixth vision inspection unit (450) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and performs a sixth vision inspection on the upper surface of the element (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

[0157] The above-mentioned sixth vision inspection unit (450) is configured to perform a sixth vision inspection on the upper surface of the element (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330) and is arranged on the first sorting line (310) and the second sorting line (320, 330), and various configurations are possible.

[0158] The sixth vision inspection unit (450) may be configured similarly to either the second vision inspection unit (420) or the fourth vision inspection unit (430) described above, considering that it is a vision inspection of the upper surface of the element (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330) and positioned on the first sorting line (310) and the second sorting line (320, 330).

[0159] In particular, considering that the sixth vision inspection unit (450) is performed after the first to fourth vision inspections described above are performed, the vision inspection for the element (1) that was inspected as defective as a result of the previous vision inspection (the first to fourth vision inspections, or the fifth vision inspection) can be omitted.

[0160] At this time, the fifth vision inspection unit (440) can perform a different inspection from the first to fourth vision inspections, for example, a precise vision inspection for micro cracks, micro shapes, etc., taking into account that this is an additional vision inspection for the element (1) that was inspected as a good product as a result of the first to fourth vision inspections.

[0161] Meanwhile, the element handler according to the present invention may additionally include a seventh vision inspection unit (460) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and inspects the loading state of the elements (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

[0162] The above-mentioned seventh vision inspection unit (460) is configured to inspect the loading status of the elements (1) loaded on the trays (2) located on the first sorting line (310) and the second sorting line (320, 330) and is arranged on the first sorting line (310) and the second sorting line (320, 330), and various configurations are possible.

[0163] Meanwhile, the first to sixth vision inspections are vision inspections for at least one of the upper surface, lower surface, and side surface of the element (1), and may be performed as 2D inspection, 3D inspection, etc. depending on the inspection location.

[0164] 3D inspection of the bottom surface of the element (1) (which can be performed in the bottom vision inspection section, the fifth vision inspection, etc.) can inspect the alignment status of the element, the coplanarity of the bottom surface of the element, the height of the entire and / or part of the bottom surface of the element, the height and / or three-dimensional shape of the ball, the warpage of the element, etc.

[0165] 2D inspection of the bottom surface of the element (1) (which can be performed in the first vision inspection section, etc.) is a 2D vision inspection that can perform inspections on the BGA 2D shape, chipping (presence of debris), presence of cracks, presence of scratches, presence of foreign substances, exposure of metal materials, poor molding condition, and the 2D shape of the element.

[0166] 2D inspection (which can be performed in the second vision inspection unit, the fourth vision inspection unit, the sixth vision inspection unit, etc.) and 3D inspection (which can be performed in the second vision inspection unit, the fourth vision inspection unit, the sixth vision inspection unit, etc.) on the upper surface of the element (1) can be performed to inspect the marking status, surface defects, upper ball status, etc.

[0167] In particular, 3D inspection (which can be performed in the second vision inspection section, the fourth vision inspection section, etc.) on the upper surface of the above-mentioned element (1) can be performed to inspect for swelling of the element (1), formation of a cavity, and imprinting, etc.

[0168] In addition, 3D inspection of the upper surface of the above-mentioned element (1), particularly the sixth vision inspection, can perform 3D inspection of relatively small-scale microcracks, etc.

[0169] In particular, by omitting the performance of the vision inspection on the element (1) that was inspected as defective in the previous vision inspection during the performance of the first to sixth vision inspections, the performance speed of the vision inspection can be increased.

[0170] Furthermore, in the case of 3D inspection for micro cracks, etc., which is a precision vision inspection, considering that the performance speed is low, the performance of vision inspection for elements (1) that were inspected as defective in the previous vision inspection results after performing the fourth vision inspection and / or the fifth vision inspection can be omitted.

[0171] In addition, the fifth vision inspection also allows for more precise vision inspection when performing vision inspection on at least one of the bottom and side surfaces of the element (1), and considering the low performance speed, the performance of vision inspection on the element (1) that was inspected as defective in the previous vision inspection after performing the fourth vision inspection and / or the fifth vision inspection can be omitted.

[0172] The above-mentioned seventh vision inspection may be an inspection of the loading status of the elements (1), such as the presence or absence of the elements (1) in the mounting groove of the tray (2), the lifting of the elements (1), and the presence or absence of two or more elements (1).

[0173] Meanwhile, the first transfer tool (610), the second transfer tool (620), the third transfer tool (640), the fourth transfer tool (630), and the transfer tool, which include a plurality of pickers (631) that pick up the element (1) by vacuum pressure, can be installed to move in at least one direction among the X-axis and Y-axis directions according to the transfer of the element (1).

[0174] And the above-mentioned transfer tool can be configured such that a plurality of pickers (631) are arranged in a single row or multiple rows depending on the number of pickups of the element (1).

[0175] Meanwhile, the picker (631) constituting the above-mentioned transfer tool needs to be replaced in response to changes in specifications such as the lifespan and the size of the element (1) being handled.

[0176] At this time, the picker (631) is generally configured to include a pickup head (910) that picks up the element (1) by vacuum pressure, and a vacuum rod (920) to which the pickup head (910) is detachably coupled at the end to transmit vacuum pressure to the pickup head (910). Therefore, it is preferable to replace only the pickup head (910).

[0177] Accordingly, the present invention provides a pickup head replacement module (2000) applicable to a device handler that performs at least one of inspection, classification, loading on a board, and withdrawal on a board for a device (1) using a loading member on which a plurality of devices (1) are loaded in an m×n matrix (m, n are natural numbers of 2 or more), as well as the device handler described in FIGS. 1 to 9b.

[0178] The component handler for which the pickup head replacement module (2000) according to the present invention can be used may be the component handler described in FIGS. 1 to 9b, as well as a burn-in sorter, etc.

[0179] The pickup head replacement module (2000) according to the present invention is a pickup head replacement module (2000) for a picker including a pickup head (910) that picks up an element (1) by vacuum pressure, as illustrated in FIGS. 10 to 17, and a vacuum rod (920) to which the pickup head (910) is detachably coupled at an end for transmitting vacuum pressure to the pickup head (910), the pickup head replacement module (2000) comprising: a rotating member (710) that rotates around a rotation axis (C); a plurality of detachable coupling parts (720) that are coupled to the rotating member (710) along a circumferential direction and have at least one head coupling part (722) to which the pickup head (910) is coupled; It includes a rotary driving unit (810) that rotates the rotary member (710) so that the detachable coupling unit (720) is positioned at an exchange position where the pickup head (910) of the picker coupled to the head coupling unit (722) is coupled to the vacuum rod (920), or the pickup head (910) of the picker is coupled to the head coupling unit (722).

[0180] The above picker is configured to include a pickup head (910) that picks up an element (1) by vacuum pressure, and a vacuum rod (920) to which the pickup head (910) is detachably coupled at the end to transmit vacuum pressure to the pickup head (910), and various configurations are possible.

[0181] The above pickup head (910) is configured to pick up the element (1) by vacuum pressure and may have at least one material among rubber and metal.

[0182] In particular, the above pickup head (910) may be provided with an insertion portion (931) that is fitted and fixed by a head coupling portion (722) formed of the above-described inlet portion so that it can be coupled to a detachable coupling portion (710) described later.

[0183] The above insertion portion (931) is a portion that is inserted and fixed by the head coupling portion (722) formed by the above-described inlet portion so that it can be coupled to the detachable coupling portion (710) described later, and the outer diameter can be formed to be equal to or smaller than the width of the inlet side of the inlet portion of the head coupling portion (722).

[0184] And, the pickup head (910) may be provided with a pair of annular parts (932) having an outer diameter larger than the outer diameter of the insertion part (931) on the upper and lower sides of the insertion part (931) so that the insertion part (931) is maintained in a state of being fitted into the inlet of the head coupling part (722).

[0185] The above pair of annular parts (932) are provided on the upper and lower sides of the insertion part (931) and are parts that maintain the state in which the insertion part (931) is fitted into the concave part of the head coupling part (722). Any structure is possible as long as it is a structure that can maintain the state in which the insertion part (931) is fitted into the concave part of the head coupling part (722).

[0186] The above vacuum rod (920) is configured to have the pickup head (910) detachably coupled to the end in order to transmit vacuum pressure to the pickup head (910), and any configuration that can transmit vacuum pressure is possible.

[0187] The above-mentioned rotating member (710) is configured to rotate around a rotation axis (C), and can have various configurations depending on the coupling structure with the detachable coupling part (720).

[0188] In particular, it is preferable that the above-mentioned rotating member (710) be directly or indirectly detachably coupled to the main rotating shaft (841) described later, and various configurations are possible depending on the coupling structure with the main rotating shaft (841).

[0189] For example, the above-mentioned rotating member (710) can be detachably coupled to a hub coupling part (842) coupled to a main rotating shaft (841).

[0190] The above hub coupling part (842) is coupled to the main rotation shaft (841) and is configured such that the rotation member (710) is detachably coupled, and various configurations are possible.

[0191] At this time, the rotating member (710) can maintain a coupled state with the hub coupling part (842) by the coupled state maintaining part (890).

[0192] The above-mentioned coupling state maintenance unit (890) is a configuration that maintains the coupling state of the rotating member (710) to the hub coupling unit (842), and can be configured in various ways, such as a clamper.

[0193] The above-described plurality of detachable and attachable parts (720) are configured to be coupled to the rotating member (710) along the circumferential direction and are provided with one or more head coupling parts (722) to which the pickup head (910) is coupled, and various configurations are possible.

[0194] For example, when the pickup head (910) has an insertion portion (931) that is inserted and fixed by a head-joining portion (722) formed of the indentation portion, the detachable-joining portion (720) may be formed of a plate member having one or more indentations forming the head-joining portion (722).

[0195] And the above insertion part (931) can be inserted into the above inlet portion so that the pickup head (910) can be fixed to the above inlet portion.

[0196] At this time, the inlet portion may be formed so that the width of the inlet end into which the insertion portion (931) is introduced is equal to or smaller than the outer diameter of the insertion portion (931) at a level where the insertion portion (931) is inserted by elastic deformation or the like.

[0197] And the plane shape of the above-mentioned inlet portion can have various shapes, such as a part of a circle.

[0198] Meanwhile, the head coupling portion (722) of each of the above detachable coupling portions (720) may be provided in multiple numbers, as shown in FIGS. 15 to 17.

[0199] For example, when the above transfer tool has pickers (631) arranged in a 2x8 configuration, the head coupling portion (722) of the detachable coupling portion (720) may be provided in two pieces to enable replacement of the pickup head (910) for two pickers (631).

[0200] Meanwhile, the rotating member (710) can be coupled to the outer surface of the detachable coupling part (720).

[0201] And the above-mentioned rotating member (710) can have a regular polygonal shape when viewed in the direction of the rotation axis (C) so that the detachable and connecting part (720) made of a plate member is coupled to the outer surface.

[0202] And, the above-mentioned rotating member (710) can be formed with an axial cross-sectional shape in the shape of a 'U' so that the lower part of the pickup head (910) can be inserted into the inside of the joint portion (713) to which the above-mentioned detachable joint portion (720) is joined, thereby forming a pocket (714).

[0203] Meanwhile, the plurality of detachable and coupled parts (720) may include a first detachable and coupled part (720) in which one or more pickup heads (910) to be separated from the vacuum rod (920) are coupled to the head coupling part (722) as the detachable and coupled part (720) in a state in which the pickup heads (910) are not coupled to the head coupling part (722), and a second detachable and coupled part (720) in which one or more pickup heads (910) to be newly coupled to the vacuum rod (920) from which the pickup heads (910) are separated from the first detachable and coupled part (720) are coupled to the head coupling part (722).

[0204] As described above, the first detachable-coupled portion (720) and the second detachable-coupled portion (720) are alternately arranged along the circumferential direction of the rotating member (710), so that separation of the pickup head (910) and attachment of a new pickup head (910) can be efficiently performed.

[0205] Meanwhile, the pickup head replacement module (2000) having the above configuration can be automatically or manually replaced with a rotating member (710) to which a new detachable / coupled unit (720) is coupled, after the operator has finished exchanging all pickup heads (910) in the plurality of detachable / coupled units (720), by moving the module to a position that does not interfere with the operation of the previously described element handler.

[0206] The above-mentioned rotary drive unit (810) is configured to rotate the rotary member (710) so that the detachable coupling unit (720) is positioned at an exchange position where the pickup head (910) of the picker coupled to the head coupling unit (722) is coupled to the vacuum rod (920), or the pickup head (910) of the picker is coupled to the head coupling unit (722). Various configurations are possible depending on the rotary drive structure.

[0207] As an example, the rotary drive unit (810) may be configured as a rotary motor that generates rotary force.

[0208] At this time, the above-mentioned rotating member (710) requires precise control so that each detachable / removable part (720) can be sequentially positioned at the exchange position of the pickup head (910), and may be equipped with a reducer, etc., and may be configured as a step motor.

[0209] And, a rotation position detection unit (not shown) can be installed to detect the position of the above-mentioned rotation member (710), and the rotation position detection unit can have various configurations depending on the rotation position detection structure.

[0210] Meanwhile, the driving rotation shaft (811) of the above-described rotary drive unit (810) may be aligned with the main rotation shaft (841) described later in the axial direction (C), or may be arranged to be spaced apart from the main rotation shaft (841) and parallel to it.

[0211] To this end, the pickup head replacement module (2000) may include a main rotation shaft (841) coupled to the center of the rotation member (710); a rotation pulley (831) to which the main rotation shaft (841) is fixedly coupled; a drive pulley (812) coupled to the drive rotation shaft (811) of the rotation drive unit (810) positioned parallel to the rotation shaft (C); and a rotation transmission member (822) coupled to the drive pulley (812) and the rotation pulley (831) to transmit the rotational force of the drive pulley (812) to the rotation pulley (831).

[0212] The above main rotation axis (841) is configured to be coupled to the center of the rotation member (710), and various configurations are possible.

[0213] The above rotary pulley (831) is configured to be fixedly coupled to the main rotary shaft (841), and can have various configurations depending on the coupling structure of the rotation transmission member (822) described later.

[0214] The above drive pulley (812) is configured to be coupled to the drive rotation shaft (811) of the rotation drive unit (810) positioned parallel to the rotation axis (C), and can have various configurations depending on the coupling structure of the rotation transmission member (822) described later.

[0215] The above rotation transmission member (822) is configured to be coupled to the drive pulley (812) and the rotation pulley (831) to transmit the rotational force of the drive pulley (812) to the rotation pulley (831), and various configurations are possible depending on the coupling structure of the drive pulley (812) and the rotation pulley (831).

[0216] For example, the drive pulley (812) and the rotation pulley (831) may be timing pulleys, and the rotation transmission member (822) may be configured as a timing belt.

[0217] Here, the timing belt can be maintained in elasticity by a separate pressurized rotation roller (821), as shown in Fig. 14.

[0218] Meanwhile, the main rotation shaft (841) and the drive rotation shaft (811) of the rotation drive unit (810) can be rotatably supported by a support member (861).

[0219] The above support member (861) is configured to rotatably support the main rotation shaft (841) and the drive rotation shaft (811) of the rotation drive unit 810, and various configurations are possible.

[0220] At this time, the support member (861) can be moved by linear movement, rotational movement, etc. along at least one of the X-axis, Y-axis, and Z-axis so that the worker can replace the rotary member (710) - indicated as 700 in FIG. 10 - to which the new detachable coupling part (720) to which new pickup heads (910) are coupled by being coupled with a separate structure.

[0221] Meanwhile, a pickup head replacement module (2000) having the above configuration can be placed on the movement path of a transfer tool (610, 620, 630, 640) to replace the pickup head (910) of a picker (631).

[0222] For example, the pickup head replacement module (2000) can be installed near the first vision inspection unit (410), near the third vision inspection unit (1000), near the fifth vision inspection unit (440), etc., as shown in FIG. 1.

[0223] Although the preferred embodiments of the present invention have been described above by way of example, the scope of the present invention is not limited to these specific embodiments, and may be appropriately modified within the scope set forth in the claims.

[0224] *** Explanation of symbols ***

[0225] 1: Element 2: Tray

[0226] 100: Loading section 300: Unloading section

[0227] 410: 1st Vision Inspection Department 420: 2nd Vision Inspection Department

[0228] 1000: 3rd Vision Inspection Department 430: 4th Vision Inspection Department

[0229] 610: First transfer tool 620: Second transfer tool

Claims

A loading unit (100) that loads a tray (2) loaded with a plurality of elements (1) in an m×n matrix (m, n are natural numbers greater than or equal to 2) by moving the tray in the Y-axis direction to perform a vision inspection; A first vision inspection unit (410) that performs a first vision inspection on at least one of the bottom and side surfaces of elements (1) picked up by a first transfer tool (610) including a plurality of pickers (631) arranged in a k×l matrix (k, l are natural numbers greater than or equal to 1) from a tray (2) that is arranged in the -X-axis direction with respect to the loading unit (100) and moved to the loading unit (100); A second vision inspection unit (420) that is installed to be movable in the X-axis direction and performs a second vision inspection on a component (1) loaded on a tray (2) moved to the loading unit (100) when the first transfer tool (610) is moved toward the first vision inspection unit (410) to perform the first vision inspection; A third vision inspection unit (1000) that performs a third vision inspection on at least one of the bottom and side surfaces of elements (1) picked up by a second transfer tool (620) that includes a plurality of pickers (631) arranged in an i×j matrix (i, j are natural numbers greater than or equal to 1) from a tray (2) that is moved to the loading unit (100) and is spaced apart from the first vision inspection unit (410) in the Y-axis direction; A fourth vision inspection unit (430) that is installed to be movable in the X-axis direction and performs a fourth vision inspection on the upper surface of the element (1) loaded on the tray (2) moved to the loading unit (100) when the second transfer tool (620) is moved toward the third vision inspection unit (1000) to perform the third bottom vision inspection; A component handler characterized by including an unloading unit (300) that unloads trays (2) loaded with components (1) that have completed the first to fourth vision inspections in the -Y-axis direction.

2. In claim 1, The above unloading part (300) is One or more first sorting lines (310) that receive trays (2) from the loading section (100), move them in the -Y-axis direction, and discharge trays (2) loaded with only the components (1) of good products inspected as good products through the first to fourth vision inspections to the outside; One or more second sorting lines (320, 330) that receive a tray (2) from the loading section (100) and move it in the -Y-axis direction, and discharge the tray (2) loaded with only defective components (1) that have been inspected as defective by the first to fourth vision inspections to the outside; A component handler characterized by including a third transfer tool (640) including a plurality of pickers (631) arranged in an a×b matrix (a, b are natural numbers greater than or equal to 2) that pick up or load components (1) from trays (2) located on the first sorting line (310) and the second sorting line (320, 330) and sort the components (1) into good and defective products.

3. In claim 2, An element handler characterized in that it further includes a fifth vision inspection unit (440) that performs a fifth vision inspection on at least one of the bottom and side surfaces of elements (1) picked up by a fourth transfer tool (630) that is arranged in the +X-axis direction with respect to the unloading unit (300) and is installed to move in the X-axis direction across the first sorting line (310) and the second sorting line (320, 330), and includes a plurality of pickers (631) arranged in a c×d matrix (c, d are natural numbers of 2 or more).

4. In claim 2 or claim 3, A component handler characterized in that it further includes a sixth vision inspection unit (450) that is arranged on the first sorting line (310) and the second sorting line (320, 330) and performs a sixth vision inspection on the upper surface of the component (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

5. In claim 4, A component handler characterized in that it further includes a seventh vision inspection unit (460) arranged on the first sorting line (310) and the second sorting line (320, 330) and inspecting the loading status of the components (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

6. In claim 2 or claim 3, A component handler characterized in that it further includes a seventh vision inspection unit (460) arranged on the first sorting line (310) and the second sorting line (320, 330) and inspecting the loading status of the components (1) loaded on the tray (2) located on the first sorting line (310) and the second sorting line (320, 330).

7. In claim 1, On either the left or right side of the first vision inspection unit (410), A component handler characterized in that a bottom vision inspection unit is installed to perform a vision inspection on the bottom surface of the component (1) picked up by the first transfer tool (610).

8. In any one of claims 1 to 5 and claim 7, The above third vision inspection department (1000) is, A bottom image acquisition unit (480) installed in the movement path of the picker (631) of the second transfer tool (620) and acquiring a bottom image of the bottom surface of the element (1) picked up by the picker (631); A device handler characterized by including at least one side image acquisition unit (470) installed adjacent to the bottom image acquisition unit (480) to acquire a side image of the side of the device (1) that has passed through the bottom image acquisition unit (480) in order to perform a vision inspection on the side of the device.

9. In claim 8, The above side image acquisition unit (470) is It includes a first side image acquisition unit (471) and a second side image acquisition unit (472) installed as a pair with the movement path of the picker (631) that picked up the element (1) in between, The first side image acquisition unit (471) and the second side image acquisition unit (472) are A component handler characterized in that it is arranged at intervals in the Y-axis direction perpendicular to the X-axis direction and is installed in pairs with the movement path of a picker (631) that picks up a component (1) interposed therebetween.

10. In claim 9, When the element (1) has a rectangular shape in planar shape by the first side image acquisition unit (471) and the second side image acquisition unit (472), after passing through the bottom image acquisition unit (480), it moves to the first side image acquisition unit (471) and the second side image acquisition unit (472), and a first vision inspection is performed on a pair of first sides that are opposite to each other. A device handler characterized in that the device (1) on which the first vision inspection has been performed is moved back to the first side image acquisition unit (471) and the second side image acquisition unit (472) after the picker (631) is rotated 90°, and a second vision inspection is performed on a pair of second sides that are perpendicular to and opposite the first side.

11. In claim 10, When the above picker (631) is arranged in a double row and transported, the side image acquisition unit (470) is characterized in that the first side image acquisition unit (471) and the second side image acquisition unit (472) are arranged in pairs corresponding to the corresponding row.

12. In claim 10, An element handler characterized in that after the elements (1) of each column are moved in the first direction and images of the sides of all elements (1) are acquired, the picker (631) rotates 90° and then moves in the opposite direction between the pair of first side image acquisition units (471) and second side image acquisition units (472) to acquire images of the sides of the elements (1).

13. In claim 10, A device handler characterized by including a control unit that analyzes the bottom image acquired by the bottom image acquisition unit (480) and rotates the picker (631) so that the side of the device (1) is perpendicular to the optical axis of the side image acquisition unit (470).

14. In claim 10, When the plane shape of the element (1) to be inspected is rectangular and the lengths of the long and short sides are different, The first side image acquisition unit (471) and the second side image acquisition unit (472) are A camera (510) that acquires an image of the side of the long side or short side of the device (1), An optical system (550) that guides light to the camera (510) to capture an image of the side of the long side or short side of the device (1), A device handler characterized by including an optical distance adjustment means for maintaining a constant optical distance (L) from the long side or short side of the device (1) to the camera (510).

15. In claim 14, The above optical distance adjustment means, A device handler characterized in that the optical distance (L) from the long side or short side of the device (1) to the camera (510) is kept constant by varying the distance between the camera (510) and the reflective member (551) and the length of the optical tube.

16. In claim 14, The above optical distance adjustment means, A device handler characterized in that each of the first side image acquisition unit (471) and the second side image acquisition unit (472) is an image acquisition module, and the distance between the image acquisition modules with respect to the side of the device (1) is adjusted by moving the image acquisition module, thereby maintaining the optical distance (L) from the long side or short side of the device (1) to the camera (510).

Images