Signal exchange device, target tube cover, signal transmission system and method

Abstract

According to various embodiments, a signal exchange device comprises: a support (102) which has a first side and a second side opposite the first side; a coupling device (108) for coupling a bearing device, by means of which a rotational axis is provided for the support; multiple coils (112, 114), at least one first coil of which is positioned so as to face the first side and / or at least one second coil of which is positioned so as to face the second side; and an electrical feedthrough (116) which passes through the support (102) from the first side to the second side and is electrically conductively coupled to the multiple coils.

Description

[0001] Description

[0002] Signal transmission device, target tube cover, signal transmission system and method

[0003] Various embodiments relate to a signal transmission device, a target tube cover, a signal transmission system and a method.

[0004] In general, a substrate can be treated (processed), e.g., coated, so that the chemical and / or physical properties of the substrate can be changed. To coat a substrate, various coating processes can be carried out in a vacuum, of which cathode sputtering (so-called sputtering or sputter deposition) is an established representative of physical vapor deposition (PVD). For sputtering, a plasma-forming gas can be ionized using a cathode, by means of which a material to be deposited (target material) can be sputtered. Tubular cathodes, which themselves contain the target material (then also referred to as tubular targets), are particularly used for this purpose.

[0005] Modifications of cathode sputtering include sputtering using a magnetron, also known as magnetron sputtering. In this process, plasma formation is assisted by a magnetic field that influences the ionization rate of the plasma-forming gas. The magnetic field can be generated using a magnet system arranged inside the tubular target.

[0006] In cases where high demands are placed on the sputtering result, it is often desirable to exchange an electrical signal with the interior of the tube target (also referred to as signal exchange), e.g., to influence the magnet system within and / or read the sensors within. This signal exchange is often complicated by the fact that cooling water flows through the interior of the tube target, that the plasma is supplied with electrical power via the tube target during operation, that it rotates, and that the plasma itself emits electromagnetic radiation.

[0007] Against this background, it was recognized that this signal exchange is facilitated when the signal exchange takes place contactlessly and is also mediated inductively by means of the rotating target tube cover. Clearly, according to various embodiments, the target tube cover has several coils that can mediate the signal exchange. In this context, it was recognized that the resulting signal transmission system can also facilitate the exchange of electrical signals in other cases.

[0008] On this basis, according to various embodiments, a signal transmission device is provided, which can be implemented by means of a target tube cover and a magnetron arrangement comprising the cover; and / or by means of a signal transmission system. The signal transmission device enables robust signal exchange, for example, for energy and information transmission between two electrical components.

[0009] Various examples are explained below, which relate to the aspects provided herein and the figures. Reference is made, among other things, to a signal transmission device, which can preferably be implemented by means of a target tube cover and / or by means of a signal transmission system.

[0010] Example 1 is configured according to one of the appended claims and / or is a signal transmission device comprising: a carrier having a first side and a second side opposite the first side; a plurality of coils, of which at least one first coil is arranged facing the first side (e.g. on the first side), and / or of which at least one second coil is arranged facing the second side (e.g. on the second side); one or more than one electrical feedthrough penetrating the carrier from the first side to the second side and electrically conductively coupled to one or more than one (e.g. each) coil of the plurality of coils; wherein the carrier preferably couples the plurality of coils (e.g. rigidly) to one another.

[0011] Example 2 is a signal transmission device according to Example 1, comprising: one or more than one coupling device (e.g. comprising a target coupling and / or bearing coupling) for coupling a device, preferably a target tube, a magnet system carrier, and / or a bearing device (e.g. a bearing block thereof), by means of which an axis of rotation is provided to the signal transmission device. This promotes robust signal transmission through and / or into a rotating component (e.g. a target tube). For example, a target cover of a sputtering device can be configured in a cantilever configuration, i.e., not necessarily supported on opposite sides.

[0012] Example 3 a target tube cover or a signal transmission system comprising: the signal transmission device according to Example 1 or 2.

[0013] Example 4 is a target tube cover (preferably according to Example 3), comprising: a carrier having a first side (e.g. target side) and a second side opposite the first side (e.g. bearing side); a first coupling device (also referred to as target coupling) for coupling a target tube (also referred to as tube target) on the first side, and / or a second coupling device for coupling a bearing device (e.g. a bearing block thereof) by means of which a rotation axis is provided to the carrier, on the second side; wherein the carrier preferably couples the first coupling device and the second coupling device (e.g. rigidly) to one another; a plurality of coils, of which at least one first coil is arranged facing the first side (e.g. on the first side), and / or of which at least one second coil is arranged facing the second side (e.g.on the second side); one or more than one electrical feedthrough penetrating the carrier from the first side to the second side and electrically conductively coupled to one or more than one (e.g., each) coil of the plurality of coils.

[0014] Example 5 is a use of any one of Examples 1 to Example 4 for inductively transmitting at least one signal (e.g., into a target tube coupled to the target tube cover), preferably for controlling and / or electrically supplying an actuator arranged in the target tube, e.g., while rotating the plurality of coils about a rotation axis.

[0015] Example 6 is using a target tube cover (preferably configured according to example 3 or 4) having a plurality of coils for inductively transmitting at least one signal (e.g., into a target tube coupled to the target tube cover), preferably for controlling an actuator arranged in the target tube, e.g., while the plurality of coils are rotated about a rotation axis.

[0016] Example 7 a method comprising: rotating a target tube cover (preferably configured according to example 3 or 4) which has a first side, a second side and a plurality of coils, of which at least one first coil is arranged on a first side and / or of which at least one second coil is arranged on a second side, about an axis of rotation which passes through the plurality of coils, transmitting at least one signal by means of the plurality of coils towards the first side, preferably into a target tube which is coupled to the target tube cover, and / or preferably to an actuator which is arranged within the target tube and / or on the first side.

[0017] Example 8 a method (for example configured according to Example 7), comprising: controlling a first actuator configured to influence a rotation of a target tube cover (for example configured according to one of the preceding examples) (e.g.to influence the rotational movement of the target tube cover), which has a first side, a second side and a plurality of coils, of which at least one first coil is arranged on a first side and / or of which at least one second coil is arranged on a second side, about an axis of rotation which runs through the plurality of coils, controlling a second actuator which is configured to influence a transmission of at least one signal by means of the plurality of coils to the first side, preferably into a target tube which is coupled to the target tube cover, and / or preferably to an actuator which is arranged inside the target tube and / or on the first side.

[0018] Example 9 a computer program configured to perform the method according to example 7 or 8.

[0019] Example 10, a computer-readable medium storing instructions configured, when executed by a processor, to cause the processor to perform the method of example 7 or 8.

[0020] Example 11 a control device comprising one or more than one processor configured to perform the method according to example 7 or 8.

[0021] Example 12 is configured according to any one of Examples 1 to 11, the target tube cover further comprising: a third coupling device (also referred to as a magnet carrier coupling) for coupling a magnet system carrier, wherein the first coupling device optionally surrounds the third coupling device in a ring shape; preferably a joint which provides the third coupling device with one or more rotational degrees of freedom relative to the carrier, of which further preferably at least a first rotational degree of freedom is along the rotation axis and / or one or more second rotational degrees of freedom are transverse to the rotation axis. For example, the third coupling device can be rotatably mounted relative to the first coupling device. This promotes robust signal transmission through and / or into a rotating component (e.g. a target tube).The second rotational degree of freedom extends the lifetime, as movements that occur when the target is deformed are compensated.

[0022] Example 13 is configured according to any one of Examples 1 to 12, wherein the electrical feedthrough provides one or more than one signal path (e.g., via an electrical line, e.g., a cable) between two coils of the plurality of coils, which is galvanically separated from the carrier. This promotes robust signal transmission.

[0023] Example 14 is configured according to any one of Examples 1 to 13, wherein the first coupling device and / or the second coupling device comprise a sealing device. This promotes robust signal transmission across regions of different pressure values ​​and / or chemical compositions.

[0024] Example 15 is a signal transmission system (e.g. according to any one of Examples 1 to 14), comprising: a bearing device, and a plurality of coils, of which: at least one first coil and at least one second coil are electrically conductively (galvanically) coupled to one another; at least one third coil and at least one fourth coil are arranged one behind the other along an axis of rotation of the bearing device, wherein the at least one first coil and the at least one second coil are rotatably mounted by means of the bearing device about the axis of rotation relative to the at least one third coil and the at least one fourth coil; wherein preferably the at least one third coil is inductively coupled to the at least one second coil; and / or wherein preferably the at least one first coil is inductively coupled to the at least one fourth coil.

[0025] Example 16 is the signal transmission system according to Example 15, further comprising: a carrier which is rotatably mounted by means of the bearing device about the rotation axis relative to the at least one third coil and the at least one fourth coil; the signal transmission system preferably further comprising: one or more than one electrical feedthrough which penetrates the carrier and is electrically conductively coupled to one or more than one (e.g., each) coil of the plurality of coils. This promotes robust signal transmission through and / or into a rotating component (e.g., a target tube).

[0026] Example 17 is the signal transmission system according to Example 16, further comprising: one or more coupling devices (e.g., a first coupling device and / or a second coupling device) which are coupled to one another by means of the carrier and / or at least one of which is configured to be coupled to the bearing device. This promotes robust signal transmission through and / or into a rotating component (e.g., a target tube).

[0027] Example 18 is configured according to any one of Examples 1 to 17, wherein the at least one first coil comprises a plurality of first coils (which are arranged, for example, one behind the other or concentrically along the axis of rotation), which preferably differ from one another (e.g. in inductance and / or distance from the at least one second coil). This promotes separate transmission of power signal and data signal. Example 19 is configured according to any one of Examples 1 to 18, wherein the at least one second coil comprises a plurality of second coils, which are arranged, for example, one behind the other or concentrically along the axis of rotation, which preferably differ from one another (e.g. in inductance and / or distance from the at least one first coil). This promotes separate transmission of power signal and data signal.

[0028] Example 20 is configured according to any one of Examples 1 to 19, wherein the carrier has an opening penetrating the carrier from the first side to the second side, wherein the electrical feedthrough is received in the opening. This promotes robust signal transmission.

[0029] Example 21 is configured according to any one of Examples 1 to 20, wherein the or each second coil has at least two windings that are interconnected in opposite directions. This promotes robust signal transmission.

[0030] Example 22 is configured according to any one of Examples 1 to 21, further comprising: a magnetizable (e.g., multi-part and / or annular) housing (also referred to as a shell core, coil housing, or housing-shaped coil core), which has a (e.g., trench-shaped) cavity (e.g., extending along a path running around the axis of rotation and / or in a closed path), in which a plurality of turns of one of the plurality of coils (e.g., one of the at least one first coil and / or one of the at least one second coil) are arranged. This promotes robust signal transmission.

[0031] Example 23 is a magnetron assembly comprising: the article (e.g., target tube cover or signal transmission system) according to any one of Examples 1 to 22, the bearing device that provides the rotation axis, and / or is configured, when coupled to the second coupling device, to support the target tube cover rotatably about the rotation axis. This promotes robust signal transmission within the magnetron assembly, e.g., into a target tube of the magnetron assembly.

[0032] Example 24 is the magnetron assembly according to Example 23, wherein the bearing device provides two bearing points for rotatably supporting the target tube, of which: at least a first bearing point is configured as an end block; and / or a second bearing point is configured, coupled to the second coupling device, to support the target tube cover rotatably about the rotation axis, preferably facing the second side of the carrier. This promotes robust signal transmission within the magnetron assembly, e.g., into a target tube of the magnetron assembly.

[0033] Example 25 is the magnetron assembly according to example 23 or 24, wherein the bearing device, preferably the second bearing point, has at least one third coil, which, when the second coupling device is coupled to the bearing device, is inductively coupled to the at least one second coil or at least faces the second side of the carrier. This promotes robust signal transmission within the magnetron assembly, e.g., into a target tube of the magnetron assembly.Example 26 is the magnetron arrangement according to any one of examples 23 to 25, further comprising: the magnet system carrier, which has at least one fourth coil which, when the magnet system carrier is coupled to the target tube cover, preferably the third coupling device, is inductively coupled to the at least one first coil or at least faces the first side of the carrier; preferably a magnet system carried by means of the magnet system carrier, which has a plurality of magnets and an actuator, wherein the actuator is electrically conductively coupled to the fourth coil and is configured to change a spatial position of at least one of the plurality of magnets relative to the magnet system carrier in response to a signal from the fourth coil. This promotes robust signal transmission within the magnetron arrangement, e.g., into a target tube of the magnetron arrangement.

[0034] Example 27 is the magnetron arrangement according to any one of examples 23 to 26, wherein the bearing device, preferably the end block, is configured to supply electrical power and / or a cooling fluid to the target and / or to transmit a rotational movement to the target or at least the carrier.

[0035] Example 28 is configured according to any one of Examples 1 to 27, further comprising: a signal source configured to provide and / or transmit at least one signal by means of the plurality of coils, wherein the bearing device (e.g., one or more than one coil thereof) is preferably configured to couple the at least one signal into the coils of the target tube cover.

[0036] Example 29 is a vacuum arrangement comprising: the article according to any one of Examples 1 to 28, a vacuum chamber in which the rotation axis is arranged; and preferably a transport device for transporting a substrate along a transport direction which is, for example, transverse to the rotation axis.

[0037] Example 30, a method comprising: transmitting a signal between two coils (e.g., comprising the third and fourth coils) by means of two additional coils (e.g., comprising the first and second coils) arranged between the two coils, wherein the two additional coils are electrically conductively coupled to one another and are preferably galvanically separated from the two coils; rotating the two additional coils relative to the two coils about an axis of rotation that passes through the two coils and the two additional coils when (preferably during) the transmission, the method optionally further configured in analogy to any one of examples 1 to 29.

[0038] Example 31 a method (for example set up according to example 30), comprising: controlling a first actuator that is set up to influence a transmission of a signal between two first coils by means of two second coils that are arranged between the two first coils, wherein the two second coils are electrically conductively coupled to one another and are preferably galvanically separated from the two first coils, controlling a second actuator that is set up to influence a rotation of the two second coils relative to the two first coils about an axis of rotation that runs through the two first coils and the two second coils when (preferably during) the transmission takes place, the method optionally further set up in analogy to one of examples 1 to 30. Example 32 a computer program that is set up to carry out the method according to example 30 or 31.

[0039] Example 33, a computer-readable medium storing instructions configured, when executed by a processor, to cause the processor to perform the method of example 30 or 31.

[0040] Example 34 a control device comprising one or more than one processor configured to perform the method according to example 30 or 31.

[0041] Example 35 a use of two coils rotating about an axis of rotation for transmitting (also referred to as switching) at least one signal between two stationary coils which are arranged one behind the other along the axis of rotation and between which the two rotating coils are arranged, wherein the axis of rotation preferably extends through the two rotating coils and the two stationary coils, the use optionally further configured in analogy to one of examples 1 to 34.

[0042] Example 36 is configured according to any one of Examples 1 to 35, wherein one or more of the coils (e.g., each of the coils) is arranged concentrically to the axis of rotation.

[0043] Example 37 is configured according to any one of examples 1 to 36, wherein a signal transmitted by means of the coils is configured according to a communication protocol, e.g., according to a fieldbus communication protocol.

[0044] Example 38 is configured according to any one of Examples 1 to 37, wherein the plurality of coils comprises one or more than one coil pair, each coil pair comprising a coil of the at least one first coil and a coil of the at least one second coil, which are electrically conductively (e.g., ohmically) coupled to one another (e.g., by means of the electrical feedthrough); wherein, for example, the coils of each coil pair match in their geometry, number of windings, and / or inductance; and / or wherein, for example, the coil pairs (e.g., their coils) differ from one another in their geometry, number of windings, and / or inductance.

[0045] Example 39 is configured according to any one of Examples 1 to 38, wherein the first coupling device, the second coupling device and / or the third coupling device are arranged concentrically to the axis of rotation and / or to each other (or at least have a contour concentric thereto).

[0046] Example 40 is configured according to any one of Examples 1 to 39, wherein the plurality of coils comprises at least two coils that differ from each other (e.g., in their geometry, number of turns, and / or inductance), and / or at least two coils that match (e.g., in their geometry, number of turns, and / or inductance).

[0047] Example 41 is configured according to any one of Examples 1 to 40, wherein the plurality of coils comprises at least two coils that differ from one another in their position along the rotation axis and / or that are arranged one behind the other along the rotation axis. Example 42 is configured according to any one of Examples 1 to 41, wherein each coil (e.g., of the plurality of coils) has one or more turns around the rotation axis.

[0048] Example 43 is configured according to any one of examples 1 to 42, wherein the first coil and the second coil are galvanically separated from the third coil and / or fourth coil.

[0049] Example 44 is configured according to any one of Examples 1 to 43, wherein the at least one first coil and at least one second coil are rigidly coupled to each other, e.g., by means of the carrier, and / or embedded in the carrier.

[0050] Example 45 is configured according to any one of examples 1 to 44, wherein the at least one signal comprises a plurality of signals, preferably a power signal for transmitting electrical power and / or a data signal for controlling an actuator, which differ from one another (e.g. frequency and / or electrical power) and / or are transmitted galvanically separated by means of the plurality of coils.

[0051] Example 46 is configured according to any one of examples 1 to 45, wherein the at least one signal comprises a data signal configured according to a communication protocol, e.g., generated according to the communication protocol.

[0052] Example 47 is configured according to any one of examples 1 to 46, wherein the carrier is a rotational body or at least has a contour that is rotationally symmetrical with respect to the axis of rotation.

[0053] Example 48 is configured according to any one of Examples 1 to 47, wherein the axis of rotation extends through each of the plurality of coils, e.g., such that their windings (also referred to as coil windings) extend around the axis of rotation.

[0054] Example 49 is configured according to any one of examples 1 to 48, wherein the at least one signal is transmitted at least partially through a vacuum and / or through a liquid (e.g., water).

[0055] Example 50 is configured according to any one of Examples 1 to 49 and further configured according to any one of the appended claims.

[0056] Reference is made herein, among other things, to a target tube cover and a signal transmission system as exemplary implementations of aspects of the signal transmission device. It should be understood that what is described herein may apply analogously to any other implementation of aspects of the signal transmission device and / or a standalone signal transmission device, which, for example, may not necessarily provide a target tube cover.

[0057] It shows

[0058] Figures 1 and 2 each show a target tube cover according to various embodiments in a schematic side view or cross-sectional view; Figure 3 shows a magnetron arrangement according to various embodiments in a schematic sectioned perspective view;

[0059] Figure 4 shows various components of the magnetron arrangement according to various embodiments in a schematic circuit diagram;

[0060] Figures 5A to C each show a target tube cover according to various embodiments in a schematic construction diagram;

[0061] Figure 6 shows a vacuum arrangement according to various embodiments in a schematic view; and

[0062] Figures 7A to C each show aspects of a signal switching device according to various embodiments in a schematic diagram.

[0063] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top," "bottom," "front," "back," "fore," "rear," etc., will be used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology is for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention.It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the scope of the present invention is defined by the appended claims.

[0064] Throughout this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., resistive and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0065] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect, connection and / or interaction. For example, several elements can be coupled to one another along an interaction chain, along which the interaction can be exchanged, e.g., electrical power (then also referred to as electrically coupled). According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g., by means of direct physical contact. A coupling can be configured to transmit a mechanical interaction (e.g., force, torque, etc.).The expression "at least one," "at least one," "at least one," and the like with reference to an element can be understood as referring to exactly one element or to multiple elements. The at least one element can, for example, be exactly one element or multiple (e.g., two, three, or more) elements. The at least one element can, for example, comprise one or more than one element, for example, one or more than one group of elements.

[0066] An ohmic coupling can be understood as electrically conductive for direct current, i.e. a coupling that is electrically conductive for direct current.

[0067] The term "actuator" (e.g. having an actuator) can be understood as a transducer that is configured to influence a state, a process (e.g. a coating process) or a device in response to actuation of the actuator. The actuator can convert a control signal supplied to it (by means of which actuation takes place) into mechanical movements or changes in physical quantities such as pressure or temperature. An electromechanical (also referred to as electromotive) actuator can, for example, be configured to convert electrical energy into mechanical energy (e.g. through movement) in response to actuation. Examples of components of an actuator include: a voltage source (if present), a valve (e.g. a pump arrangement and / or gas supply device), a motor (e.g. a valve or a pump), or the like.

[0068] With regard to the layer-forming process, reference is made here by way of example to so-called sputtering. The term “sputtering” refers to the atomization of a material (also referred to as coating material or target material) using a plasma. The atomized components of the coating material (e.g. individual atoms and / or ions) are separated from one another and can, for example, be deposited elsewhere to form a layer. Sputtering can be carried out using a so-called sputtering device, which can have one or more than one magnet system (in this case also referred to as a magnetron). The coating material can be provided by means of a so-called sputtering target (also referred to as target for short), which can, for example, be tubular (in this case also referred to as a tube target or target tube) or plate-shaped (in this case also referred to as a plate target or planar target).To generate the plasma, a voltage (also called sputtering voltage) can be applied to the sputtering target (also referred to as the target for short), so that the sputtering target acts as a cathode. Even if the sputtering voltage is an alternating voltage, the term "cathode" is often retained.

[0069] For sputtering, the sputtering target can be arranged in a vacuum processing chamber (also referred to as a vacuum chamber for simplicity), so that sputtering can take place in a vacuum. For this purpose, the ambient conditions (the process parameters) within the vacuum processing chamber (e.g., process pressure, temperature, gas composition, etc.) can be set or regulated during sputtering. For example, a working gas can be provided within the vacuum processing chamber, which designates the plasma-forming gas or the plasma-forming gas mixture. The vacuum processing chamber can, for example, be designed to be airtight, dusttight, and / or vacuum-tight, so that a gas atmosphere with a predefined composition (also referred to as the working atmosphere) or a predefined pressure (also referred to as the working pressure or process pressure) can be provided within the vacuum processing chamber (e.g., according to a setpoint).The vacuum chamber may be configured to contain a vacuum (i.e. a pressure less than 0.3 bar) and / or a pressure in a range of approximately 1 mbar to approximately 10. 3 mbar (in other words fine vacuum) or less, e.g. a pressure in a range of approximately 10 3 mbar to approximately 10 7 mbar (in other words high vacuum) or less, e.g. a pressure of less than high vacuum, e.g. less than approximately 10 7 mbar (in other words, ultra-high vacuum). The lowest pressure achievable in the vacuum chamber is also referred to as the residual vacuum. It should be understood that what is described herein for sputtering can apply analogously to any other coating process, e.g., physical vapor deposition.

[0070] To effectively atomize the target material (also known as sputtering), the target material can be rotated around the magnet system. For this purpose, the target material can be configured in a tubular shape, known as a tubular target, with the magnet system arranged inside the tubular target so that the tubular target can be rotated around the magnet system. The tubular target can, for example, comprise a tube on which the target material can be attached as a layer on an outer surface of the tube, partially covering the surface of the tube. However, the tubular target can also be formed from the target material.

[0071] The tubular target may be or become rotatably supported at only one or two opposite end portions by means of a target support device, wherein the support device may provide a supply of the tubular target (e.g., with electrical power and cooling fluid).

[0072] According to various embodiments, a bearing device can be configured for supporting (e.g., guided positioning and / or holding) one or more than one component. For example, the bearing device can have one or more than one bearing for supporting (e.g., guided positioning and / or holding) the component, for example per component. Each bearing of the loading device can be configured to provide the component with one or more than one degree of freedom (e.g., translational degree of freedom or rotational degree of freedom), according to which the component can be moved. Examples of a bearing include: radial bearings, axial bearings, radial axial bearings, linear bearings (also referred to as linear guides). For example, exactly one translational degree of freedom can be provided to the component per linear bearing.

[0073] A degree of freedom can, for example, be a translational degree of freedom or a rotational degree of freedom. Each degree of freedom can be assigned an axis to which the degree of freedom is related. The translational degree of freedom can, for example, enable linear movement (i.e., translation) along the axis associated with the translational degree of freedom. The rotational degree of freedom can, for example, enable rotational movement (i.e., rotation) around the axis associated with the rotational degree of freedom.

[0074] Among other things, reference is made herein to a storage device (also referred to as a target storage device), which may have one or more than one end block for storing a tubular target. If the target storage device has two end blocks, one of the end blocks (the so-called drive end block) may have a drive train coupled to a drive (also referred to as target drive) for rotating the tubular target (also referred to as target tube); and the other of the end blocks (the so-called media end block) may have a fluid line for supplying and removing cooling fluid (e.g., a water-based mixture), which can be passed through the target. The two end blocks are mounted, for example, suspended from a chamber ceiling (i.e., a chamber lid).

[0075] However, it is also possible to use just one end block (also referred to as a compact end block), which has the drive train, which can be coupled to a drive device, and the fluid line, thus providing the functions of a drive end block and a media end block together. The side of the tubular target opposite the compact end block can, for example, project freely (i.e., hang freely), which is referred to as a cantilever configuration. The compact end block can be mounted in the cantilever configuration on a side wall of the vacuum chamber, through which the rotational axis of the tubular target extends. The side of the tubular target opposite the compact end block can, however, also be supported by means of a bearing block (illustratively a counter bearing), which is referred to as a bearing block configuration. The bearing block can also be provided by means of a passive end block, i.e.an end block which neither exchanges energy nor material with the tube target, but only supports it.

[0076] In general, it can be understood here that the displacement of an object (e.g. carrier) into a rotational movement (also referred to as turning) can take place by means of the drive device, clearly in that the drive device generates a torque that is transmitted to the object. A drive device (also referred to as drive) can be understood here as a converter which is designed to convert electrical energy into mechanical energy. A drive device can, for example, have an electric motor (e.g. with electrical coils). A drive device can, for example, have a compressor and a reciprocating piston coupled thereto. A drive device can, for example, have one or more than one piezo element. For example, the drive device can be designed to output the mechanical energy by means of a torque or a rotational movement.

[0077] The target storage device can further comprise a carrier (also referred to as a magnet system carrier or, for short, a magnet carrier) which is designed to hold the magnet system. The magnet carrier can, for example, be hollow (e.g., comprising a tube) and fluidically coupled at its end face to an end block that holds the magnet carrier (e.g., with its fluid line), so that the end block can exchange the cooling fluid with the end block. On the side opposite the end block, the tube can, for example, be closed at its end face, for example, by means of a coupling device, and have a lateral opening there through which the cooling fluid can pass. The magnet carrier can be round or polygonal, e.g., comprising a round tube or an angular tube. The magnet carrier and / or the magnet system can have a length (extension along the rotation axis) in a range from approximately 1 m to approximately 6 m, e.g.,in a range of approximately 2 m to approximately 5 m. A magnet system (e.g. its magnet system parts) may comprise a plurality of magnets (e.g. permanent magnets). A magnet may comprise a ferromagnetic material, e.g. a chemical compound (e.g. an alloy) or a ferrite. The chemical compound may comprise or be formed from a rare earth metal (such as neodymium, samarium, praseodymium, dysprosium, terbium and / or gadolinium), iron, cobalt and / or nickel. For example, a magnet may comprise or be formed from at least neodymium, iron and / or boron, e.g. a chemical compound thereof. Alternatively or additionally, a magnet may comprise or be formed from at least aluminum, nickel and / or cobalt, e.g. a chemical compound thereof. Alternatively or additionally, a magnet may comprise or be formed from at least samarium and / or cobalt, e.g. a chemical compound thereof.A magnet can have a coercive field strength greater than about 500 kiloamperes per meter (kA / m), e.g. greater than about 1000 kA / m.

[0078] The magnets of a magnet system can be arranged in several rows (magnet rows). A magnet system can have several (for example, at least three) magnet rows. Two magnet rows can differ in at least one (i.e., one or more than one) directional component of their magnetization direction (e.g., adjacent magnet rows) and / or can define a forward or backward section of the plasma region.

[0079] The term "communication" may refer herein, depending on the context, to an electrical signal and / or to data (also referred to as information), which is conveyed, for example, by means of the electrical signal, preferably conveyed along a signal path. Examples of communication processes include: generating the electrical signal (for example, by means of a signal generator), transmitting the electrical signal; receiving the electrical signal; and / or processing the electrical signal. The communication, e.g., embedding data (data transmission) in the signal, may, according to various embodiments, take place according to a communication protocol.

[0080] A communication protocol can be descriptively described as an agreement according to which communication between two or more parties proceeds. In its simplest form, a communication protocol can be defined as a set of rules that determine the syntax, semantics, and synchronization of communication. The communication protocol(s) used (e.g., one or more network protocols) can, in principle, be freely selected and can (but do not have to) be configured according to the OSI (Open Systems Interconnect) reference model. Any protocols can also be used in the respective protocol layers, which are combined into a stack (also known as a communication protocol stack). For example, protocols according to Bluetooth or other radio-based communication protocols can be used.

[0081] Communication can, for example, take place via one or more messages (also referred to as message-based communication or packet-based communication). For example, the message can be addressed to a recipient, as defined by the communication protocol according to which the message is generated. For example, message-based communication can involve generating and / or transmitting a message containing the data, for example, via the electrical signal. The message and / or signal can be generated and / or transmitted according to the communication protocol.

[0082] As an exemplary implementation of communication, reference is made here to the so-called fieldbus communication network and its components.

[0083] According to various aspects, the fieldbus communication network can be understood as a network for real-time communication, e.g., via a message-based communication protocol. The fieldbus communication network can be deployed, e.g., in a daisy-chain, star, ring, branch, and / or tree network topology, or a mixture thereof. The order and priority of a multitude of messages sent over the fieldbus communication network is defined by the fieldbus communication protocol. Such a fieldbus communication protocol can be configured for distributed real-time control, e.g., standardized as International Electrotechnical Commission (IEC) 61158 (title "Digital data communications for measurement and control - Fieldbus for use in industrial control systems," e.g., in the version of May 2, 2017).The fieldbus communication protocol can be configured for packet-based communication (also called message-based communication). Each message can contain at least one frame and embedded data to be transmitted via the message. Packet-based communication can, for example, be carried out using the data signal.

[0084] What is described here for CAN ("Controller Area Network") as an exemplary implementation of a fieldbus network can apply analogously to any other implementation of the fieldbus network or a network of another type. This applies analogously to the components configured according to CAN. CAN is internationally standardized in ISO 11898-1 and defines at least Layer 2 (i.e., the data link layer) according to the OSI reference model. This applies analogously to the CAN bus, which provides a serial bus system as an exemplary representative of fieldbuses. A bus generally refers to a system for transmitting data between multiple participants over a common transmission path.

[0085] The term electrical "signal" herein refers to a time-dependent electrical quantity, examples of which include: electrical current, electrical voltage, and / or one or more properties thereof. Examples of these properties of the voltage and / or voltage include: a phase shift (e.g., between voltage and current) and / or to a reference, a frequency, duty cycle, equivalence, peak value, etc. Various implementations of the electrical signal are configured to convey electrical power (then also referred to as a power signal) and / or to convey data (then also referred to as a data signal). In this regard, it should be understood that conveying data by means of the data signal refers to the logical data transmission as part of the communication, in which, for example, a power transmission may also occur. The data signal may be generated and / or processed according to a communication protocol, e.g.,a network communication protocol.

[0086] In this context, the term "signal path" refers to the physical components through which the signal is transmitted, e.g., through which communication takes place and / or power is transmitted. The signal path can, for example, comprise galvanically separated components that are inductively and / or capacitively coupled to one another, i.e., configured to exchange the signal via an inductive and / or capacitive interaction.

[0087] By way of example, reference is made here to a data signal and a power signal that are generated and / or transmitted separately from one another. This improves data transmission and provides robust operation. In this regard, it can be understood that what has been described here can apply analogously to a data signal and a power signal that are generated and / or transmitted together, e.g., superimposed on one another. For example, the electrical power to be transmitted and the data to be transmitted can be divided into different frequency ranges, which are transmitted via the same coil.

[0088] In an exemplary implementation, a power LL of the power signal may be greater than a power LD of the data signal. For example, the following relation may be approximately satisfied: LL > 10 kLo, where k>0, e.g., k>1, e.g., k>2, e.g., k>3, e.g., k>4, e.g., k>5, e.g., k>6. Alternatively or additionally, a frequency FL of the power signal may be smaller than a frequency FD of the data signal. For example, the following relation may be approximately satisfied: FD > 10 L FL, where l>0, e.g., I>1, e.g., I>2, e.g., I>3, e.g., I>4, e.g., I>5, e.g., f>6. In general, an electrical signal (e.g., the data signal and / or the power signal) can be an analog signal or a digital signal. For example, a frequency FL oriented toward power transmission is different from a frequency FD oriented toward data transmission.

[0089] A control signal as an exemplary implementation of the data signal can be configured to control a receiver of the control signal, for example, an actuator or at least one circuit (e.g., of the actuator), e.g., a processor thereof. For this purpose, the control signal can be configured to transmit data for controlling (also referred to as control data) the actuator. Examples of control data include: one or more instructions, one or more values ​​(e.g., target value or at least for a target change; and / or actual value), one or more operating parameters, and the like.

[0090] Fig.1 illustrates a signal transmission device 100, preferably in the form of a target tube cover, according to various embodiments in a schematic side view or cross-sectional view, preferably configured according to one of Examples 1 to 4.

[0091] An exemplary implementation of the carrier 102, preferably according to Example 47, is at least partially (ie partially or completely) rotationally symmetrical to the rotation axis 111, e.g. on the first side 102i (also referred to as target side 102i) and / or on the second side 102a (also referred to as bearing side 102a). For example, the first coupling device 104 (also referred to as target coupling 104), e.g. one of the target side 102i of the carrier 102, can be configured at least partially (e.g. partially or completely) rotationally symmetrical to the axis of rotation 111, e.g. a sealing surface and / or sealing groove of the coupling device 104 facing the target side 102i. For example, the second coupling device 108 (also referred to as bearing coupling 108) can be configured as a rotational body (e.g. cylindrical) or have at least one rotationally symmetrical outer surface 108m (also referred to as radial outer surface).An exemplary implementation of the target coupling 104, preferably according to Example 14, has a sealing device 104, which, for example, has or is adjacent to a sealing surface and / or a sealing groove. A seal, e.g., a polymer seal, can preferably be accommodated in the sealing groove. The target coupling 104 preferably has a mounting device 104k, implemented, for example, by means of a clamp or the like, which is configured to receive a target tube 106 (its position, if present, is schematically illustrated here) in a first state, and, when brought into a second state, to press the target tube 106 against the sealing surface 104d.

[0092] An exemplary implementation of the bearing coupling 108 has a (e.g., cylindrical) projection (e.g., pin) configured to be received in a rotary bearing or at least to implement a plain bearing. The plain bearing can, for example, have two surfaces configured to slide on one another around the rotation axis 111, a first surface of which is provided by the lateral surface 108m of the bearing coupling 108 (e.g., the projection), and a second surface of which is provided by a bearing point 110 of the target bearing device (the position of which, if present, is schematically illustrated here), e.g., an inner surface of the bearing point 110, as will be explained in more detail later. Alternatively or additionally, the bearing coupling 108 can, in the assembled state, be at least partially received in a cavity of the target bearing device.

[0093] An exemplary implementation of bearing point 110 is configured as a bearing block. This reduces interference with signal transmission.

[0094] An exemplary implementation of the signal transmission device (e.g., the target tube cover) is monolithically connected to and / or at least adjacent to one or more components of the target coupling 104 and / or one or more components of the bearing coupling 108.

[0095] Herein and below, various exemplary implementations of the multiple coils of the signal transmission device (also referred to as carrier coils) are explained with reference to the target tube cover, which can apply analogously to any other implementation of the signal transmission device.

[0096] An exemplary implementation of the at least one (i.e., one or more than one) first coil 112 of the target tube cover (then also referred to as target-side carrier coil 112) is arranged on the target side 102i and / or at least partially integrated into the carrier 102. Alternatively or additionally, the at least one target-side carrier coil 112 comprises two target-side carrier coils, e.g., a target-side data coil and / or a target-side power coil, as will be explained in more detail later.

[0097] An exemplary implementation of the at least one second coil 114 of the target tube cover (then also referred to as bearing-side support coil 114) is arranged on the bearing side 102a and / or at least partially integrated into the support 102. Alternatively or additionally, the at least one bearing-side support coil 112 has two bearing-side support coils, e.g., a bearing-side data coil and / or a bearing-side power coil, as will be explained in more detail later. An exemplary implementation of the plurality of coils, for example, configured according to Example 3, has one or more than one pair of coils (also a group of two coils or referred to as a coil pair for short), e.g., a pair of data coils and / or a pair of power coils. The pair of data coils comprises, for example, the target-side data coil and / or the bearing-side data coil and / or is ohmically coupled to one another.The pair of power coils comprises, for example, the target-side power coils and / or the bearing-side power coils and / or are ohmically coupled to each other.

[0098] An exemplary implementation of the electrical feedthrough 116, preferably according to Example 13, couples the coils of each coil pair to each other, e.g., the bearing-side data coil and the target-side data coil to each other and / or the bearing-side power coil and the target-side power coil to each other, for example, resistively. Alternatively or additionally, the electrical feedthrough 116 can galvanically separate the coil pairs from each other, e.g., such that the coil pairs do not exchange resistively mediated electrical current with each other. This improves signal transmission.

[0099] The exemplary implementation of the carrier coil(s) illustrated here (e.g., target-side and / or bearing-side), e.g., power coil and / or data coil, is configured as a radial coil, as shown. It should be understood that one or more carrier coils (e.g., target-side and / or bearing-side) can also be configured as a cylindrical coil. For example, cylindrical coils allow for greater axial bearing clearance and / or can be integrated into a coupling device.

[0100] Fig.2 illustrates a target tube cover 200 as an exemplary signal transmission device 100 according to various embodiments in a schematic side view or cross-sectional view, for example configured according to Example 12.

[0101] An exemplary implementation of the third coupling device 202 (also referred to as magnet carrier coupling 202) has a pin and / or recess (e.g., for receiving a pin of the magnet system carrier 210) facing the target side 102i.

[0102] An exemplary implementation of the joint 202d provides an articulated connection between the magnet carrier coupling 202 and the carrier 102, which provides the magnet carrier coupling 202 with two rotational degrees of freedom 111x relative to the carrier 102, e.g., the first rotational degree of freedom and one or more than one second rotational degree of freedom 111, e.g.,

[0103] An exemplary implementation of the first rotational degree of freedom 111x is configured such that the magnetic carrier coupling 202 and the carrier 102 can rotate relative to each other about the rotation axis.

[0104] An exemplary implementation of the one or more than one second rotational degree of freedom 111z is configured such that the magnet carrier coupling 202 and carrier 102 can rotate relative to one another about two mutually perpendicular axes, each axis of which is transverse to the rotation axis. This clearly allows compensation for bending of the magnet system carrier 210, for example due to the gravitational force and / or vibrations that can be excited during operation. An exemplary implementation of the magnet system carrier 210 is configured as part of the target storage device and / or is configured to be coupled to a magnet system, e.g., to accommodate the magnet system. During operation of a magnetron arrangement, the magnet system carrier 210 is arranged within the target tube 106, for example, in a stationary manner.

[0105] Fig. 3 illustrates a magnetron arrangement 300 according to various embodiments in a schematically sectioned perspective view, preferably configured according to Example 13, by means of which the signal transmission system 100, preferably configured according to Example 15, is implemented. In this case, the first coil of the signal transmission system is implemented by means of the target-side carrier coil 112 and the second coil of the signal transmission system is implemented by means of the bearing-side carrier coil 114.

[0106] With regard to the components of the magnetron assembly 300 by means of which the signal transmission system 100 is implemented, it can be understood that these are exemplary, and what is described here can apply analogously to components that do not necessarily have to be part of a magnetron assembly 300. For example, the signal transmission system 100 can also be provided individually, for example, for retrofitting an existing magnetron assembly.

[0107] The magnetron assembly 300 (e.g., its bearing device, e.g., its bearing point 110) has at least one third coil 314 (e.g., of the signal transmission system). The at least one third coil 314 preferably comprises a power coil and / or a data coil and can optionally be provided by the bearing device (e.g., its bearing point 110).

[0108] The magnetron assembly 300 (e.g., its magnet system carrier 210) has at least one fourth coil 312 (e.g., of the signal transmission system). The at least one fourth coil 312 preferably comprises a power coil and / or a data coil and can optionally be provided by the magnet system carrier 210 (e.g., its end face).

[0109] An exemplary implementation of the signal transmission system 100 can couple a first circuit 302 of the magnetron arrangement 300 (also referred to as internal circuit 302) at least partially inductively to a second circuit 304 of the magnetron arrangement 300 (also referred to as external circuit 304), for example by means of the target tube cover 200. The signal transmission system 100 can be configured to transmit at least one signal between the first circuit 302 and the second circuit 304.

[0110] An exemplary implementation of the at least one signal may include a power signal conveyed by the power coils of the signal transmission system 100 and configured to supply electrical power to the first circuit 302, which power is provided by the second circuit 304. Alternatively or additionally, the at least one signal may include a data signal conveyed by the data coils of the signal transmission system 100 and provided by the second circuit 304 (e.g., a control device).

[0111] It can be understood that the coils provided herein can optionally be coupled to one or more than one (e.g., passive or active) electronic component (e.g., capacitor, signal amplifier, resonant circuit, etc.) (e.g., as an extension of the signal transmission system), e.g., for resonance enhancement or amplification.

[0112] An exemplary implementation of the internal circuit 302 provides an actuator (e.g., comprising an electric motor) configured, for example, to influence a spatial distribution of the magnets of the magnet system of the magnetron arrangement 300 (then also referred to as a magnet system actuator). An exemplary implementation of the external circuit 304 provides a signal source (e.g., comprising a control device and / or an electrical generator) configured, for example, to generate the at least one signal (e.g., the power signal and / or the data signal).

[0113] The support of the signal transmission system 100 is preferably provided by the support 102 of the target tube cover 200, by means of which the first coil 112 and the second coil 114 are rigidly coupled to one another. The bearing device of the signal transmission system is preferably implemented by means of the bearing point 110, by means of which the support 102, to which, for example, the first coil 112 and / or the second coil 114 are rigidly coupled, is rotatably mounted.

[0114] An exemplary implementation of the magnet system carrier 210 includes a (e.g., fluid-tight) housing in which the internal circuitry 302 and / or the magnet system are arranged. This can extend the lifetime of the internal circuitry 302 and / or the magnet system.

[0115] Fig.4 illustrates components of the magnetron arrangement 300 according to various embodiments 400 in a schematic circuit diagram by means of which the signal transmission system 100, preferably configured according to Example 15, is implemented.

[0116] As shown, the target tube cover 200 has a pair of power coils L and a pair of data coils D, to which corresponding power coils L and data coils D are provided by the bearing point 110 and the magnet system carrier 210. The magnet system carrier 210 can be held stationary relative to the bearing point 110 by means of an end block (not shown), by means of which the target tube cover 200 is rotatably mounted. During operation of the magnetron arrangement 300, a tube target (not shown) can be rigidly coupled to the target tube cover 200, so that a rotational movement is transmitted to the target tube cover 200 by means of the tube target (also referred to simply as a target).

[0117] From a signal transmission perspective, the target tube cover 200 provides a rotatably mounted interface between the bearing point 110 and the magnet system carrier 210, which inductively couples the bearing point 110 and the magnet system carrier 210. As illustrated, the bearing point 110 and the magnet system carrier 210 can each provide a separate interface between which the power signal and the data signal are exchanged via the target tube cover 200.

[0118] Exemplary implementation of communication An exemplary implementation of communication is explained below, in which the control data is transmitted using data signals of different types, which are converted into one another, for example by means of a processor.

[0119] The exemplary implementation of external circuitry 304 includes a processor 304a (also referred to as external processor 304a) and / or a signal source 304b, which are communicatively coupled to one another. The exemplary implementation of internal circuitry 302 includes a processor 302a (also referred to as internal processor 302a) and / or an actuator 304b, which are communicatively coupled to one another.

[0120] An exemplary implementation of the signal source 304b includes a generator 452 configured to generate electrical power, which is transmitted to the power coil D of the bearing 110 by means of the power signal. The exemplary implementation of the signal source 304b further includes a control device configured to generate control data, according to which a data signal of the first type is generated, which is transmitted, for example, via a fieldbus (here, for example, a CAN bus). For example, the data signal of the first type can include one or more messages according to a CAN communication protocol.

[0121] An exemplary implementation of the external processor 304a (e.g., implementing a modem or at least a modulator) is configured to convert the first-type data signal into a second-type data signal and to supply the second-type data signal to the data coil D of the storage location 304a. Various electrical quantities of the data signal can be converted into one another, such as frequency, duty cycle, equivalence, peak value, etc.

[0122] An exemplary implementation of actuator 304b is configured to generate a mechanical force in response to being controlled and to transmit it to the magnet system. For example, the mechanical force can be configured to influence an actual state of the magnet system, e.g., the spatial distribution of magnets of the magnet system. Actuator 304b can, for example, be configured to generate the mechanical force using the power signal and / or according to the control data.

[0123] An exemplary implementation of the internal processor 302a (e.g., implementing a modem or at least a demodulator) is configured to receive the second-type data signal from the data coil D of the magnet system carrier 210 and convert it into a third-type data signal, and to supply the third-type data signal to the actuator 304b. Various electrical variables of the data signal can be converted into one another, such as frequency, duty cycle, equivalence, peak value, etc. The third-type data signal can be transmitted, for example, via a fieldbus (here, for example, a CAN bus). For example, the third-type data signal can comprise one or more messages of the first-type data signal and / or according to a CAN communication protocol.

[0124] It can be understood that this can apply to the exemplary implementation of communication by analogy to any other implementation of communication.

[0125] Working Examples Various working examples for the operation of the magnetron arrangement 300 are described below, which relate to what has been described above and shown in the figures.

[0126] During operation of the magnetron assembly 300, a voltage Vs (also referred to as sputtering voltage) can be generated, which can, for example, be in a range from approximately 0.5 kilovolts (kV) to approximately 6 kV, but can be higher or lower as needed. The sputtering voltage can, for example, be generated by a generator 402 (also referred to as a power source) and / or supplied to the tube target via an end block.

[0127] The tube target can be electrically coupled to the carrier 102 of the target tube cover 200, so that the sputtering voltage applied to the tube target during operation of the magnetron assembly 300 is transferred to the carrier 102 of the target tube cover 200. During operation of the magnetron assembly 300, the interior of the target can be exposed to a cooling liquid (here, for example, water). The cooling liquid can electrically couple the tube target and the magnet system and / or the magnet system carrier 210, so that the sputtering voltage is transferred thereto.

[0128] During operation of the magnetron assembly 300, the bearing point 110 and / or the bearing side 102a of the target tube cover 200 can be exposed to a vacuum, e.g., a fine vacuum or a high vacuum, at least in sections. During operation of the magnetron assembly 300, the magnet system carrier 210 and / or the target side 102i of the target tube cover 200 can be exposed to a cooling medium, e.g., a cooling liquid, at least in sections.

[0129] If the magnet system carrier 210 comprises the housing in which the internal circuit 302 and / or the magnet system are arranged, the internal circuit 302 and / or the magnet system can be exposed, at least in sections, to a gas in the housing that does not necessarily have to be under vacuum. The gas can, for example, comprise or consist of air (or at least nitrogen) and / or be low in water, which extends the service life of the internal circuit 302 and / or the magnet system.

[0130] According to another working example, the signal transmission device implements an inductive transmission path, which provides a passive transmission system consisting of two electrically connected coils (for example, instead of a dielectric signal path). An inductive transmission path makes it easier to overcome areas that are under vacuum or contain water, as well as the wall of the tube target. If the inductive signal exchange were to take place only via a dielectric section of the target tube cover as a dielectric signal path, this section would be partially permeable to electromagnetic fields but would also be exposed to a significantly large pressure difference during operation (from cooling water to vacuum), which is why it is advantageous to design this section with a correspondingly thick thickness.The resulting length of the dielectric signal path through the cover promotes significant stray inductance and leads to transmission losses. Various embodiments explained herein significantly improve the energy and / or information transmission compared to the dielectric signal path. In an exemplary implementation of the working example, the coils of the target tube cover 200, for example, each having a coil on the inner and outer wall of the rotating support 102, are electrically connected to one another and, with each additional coil, form two series-connected inductive transmission systems. Various aspects provided herein further enable a robust and compact design that minimizes interference during target changes.

[0131] Further working examples are explained below using various embodiments.

[0132] Fig. 5A illustrates the target tube cover 200 according to Example 4 in a schematic assembly diagram 500a, which has two coils (e.g., data coil D and power coil P) on the same side of the carrier 102 (e.g., on the target side or on the bearing side), which are galvanically separated from each other. On the opposite side, two resistive signal exchange devices 502, 504 are arranged on the carrier 102. Each of the two signal exchange devices 502, 504 can be implemented, for example, by means of a sliding contact and / or an annular surface against which a sliding contact can press. Each of the two signal exchange devices 502, 504 can, for example, have two concentric sliding contact rings. Alternatively, each signal exchange device 502, 504 can, for example, have two sliding contacts.

[0133] The two coils can differ from each other, for example in their diameter (which makes it easier to arrange them inside each other) and / or their inductance (which reduces their interaction with each other).

[0134] It can be understood that the two coils of the construction diagram 500a can also be arranged on opposite sides of the carrier 102, for example in order to inhibit their inductive interaction.

[0135] A slip ring in water, for example, can offer advantages over a coil, for example, for the power signal. In a vacuum, inductive signal transmission can offer advantages.

[0136] Fig. 5B illustrates the target tube cover 500 according to Example 4 in a schematic assembly diagram 500b, which has two coils 506, 508 (e.g., two data coils D or two power coils P) on different sides of the carrier 102 that are coupled to each other. In this case, the data signal and the power signal can be transmitted jointly, e.g., superimposed, by means of the two coils 506, 508. For example, the electrical power to be transmitted and the data to be transmitted can be divided into different frequency ranges, which are transmitted via the two coils 506, 508.

[0137] Fig.5C illustrates the target tube cover 500 according to Example 1 in a schematic construction diagram 500c, which has several coils (e.g. data coil D and power coil P) on the same side of the carrier 102 (e.g. on the target side or on the bearing side), which are galvanically separated from each other, and of which one coil is coupled to signal exchange devices 502 and one coil is coupled to an additional coil.

[0138] Figure 6 illustrates a vacuum assembly 600 according to various embodiments in a schematic cross-sectional view, including a vacuum chamber 802, the magnetron assembly 300 (which is at least partially disposed within the vacuum chamber 802), and a transport system 610. The transport system 610 may, for example, include one or more rotatably mounted transport rollers. The magnet system 602 and an end block 604 of the bearing device are also shown.

[0139] Fig. 7A illustrates aspects of a signal switching device, preferably according to Example 22, and implementations based thereon in a schematic construction diagram 700a, which is provided by means of two coils 702, 704 (e.g., two power coils or two data coils) which are rotatably mounted relative to one another (e.g., at a distance from one another) and galvanically separated from one another. The two coils 702, 704 can, for example, be the first coil and a fourth coil of Example 15, or can be the second coil and the third coil of Example 15. Each of the coils can have a plurality of windings w wound around the rotation axis 111. Furthermore, a magnetizable (e.g., multi-part and / or annular) housing 706 (also referred to as a coil housing, housing-shaped coil core, or as a shell core 706) can provide a cavity in which the windings w are arranged.This improves the inductive coupling between the two coils 702, 704. The coil housing 706 can be made of ferrite, for example.

[0140] Fig. 7B illustrates aspects of a signal transmission device and implementations based thereon in a schematic construction diagram 700b, which is provided by two coils 712, 714 (e.g., a power coil and a data coil) that differ from one another, e.g., in an inductance that is, for example, a function of the number of turns and / or the geometry of the coils. For example, a power coil 712 (which is preferably arranged within the coil housing 706) can be arranged within the data coil 714, or vice versa. Alternatively or additionally, the data coil 714 can be configured as a flat coil, e.g., by means of a printed circuit board as a carrier for the flat coil.

[0141] Furthermore, it should be noted that the inductive interaction between the data coil and the power coil can be reduced by varying the geometric position of the coils relative to each other.

[0142] Fig.7C illustrates aspects of a signal switching device, preferably according to Example 1, and implementations based thereon in a schematic construction diagram 700c, which is provided by means of two coils 712, 714 (eg two power coils 112, 312 or two data coils 112, 312) which are configured as radial coils (ie coils for radial transmission), so that a radially extending inductive signal path is provided.

Claims

Patent claims 1. Signal transmission device (100), comprising: • a carrier (102) having a first side and a second side opposite the first side; • a coupling device (108) for coupling a device, preferably a bearing device, by means of which an axis of rotation is provided to the carrier; • a plurality of coils (112, 114) arranged concentrically to the axis of rotation and rigidly coupled to one another by means of the carrier (102), of which at least one first coil is arranged facing the first side and / or of which at least one second coil is arranged facing the second side; • an electrical feedthrough (116) which penetrates the carrier (102) from the first side to the second side and is electrically conductively coupled to the plurality of coils.

2. Signal switching device (100) according to claim 1, wherein the plurality of coils comprise a plurality of coil pairs, each coil pair comprising a coil of the at least one first coil and a coil of the at least second coil, which are electrically conductively coupled to one another by means of the electrical feedthrough.

3. Signal switching device (100) according to one of claims 1 or 2, wherein the electrical feedthrough provides one or more than one signal path between two coils of the plurality of coils, which is galvanically separated from the carrier (102).

4. Signal switching device (100) according to one of claims 1 to 3, • wherein the at least one first coil comprises a plurality of first coils which differ from one another in their inductance and / or geometry; and / or • wherein the at least one second coil comprises a plurality of second coils which differ from one another in their inductance and / or geometry.

5. Signal switching device (100) according to one of claims 1 to 4, wherein the carrier (102) has an opening which penetrates the carrier (102) from the first side to the second side, wherein the electrical feedthrough is received in the opening and wherein the opening is closed in a fluid-tight manner.

6. Target tube cover (200), comprising: • the signal switching device according to one of claims 1 to 5; • one or more than one additional coupling device (104) for coupling a target tube and / or for coupling a magnet system carrier (210) on the first side; • wherein the coupling device (108) is arranged to couple the bearing device on the second side; wherein the coupling device (104) and the additional coupling device (108) are coupled to one another by means of the carrier (102).

7. Target tube cover (200) according to claim 6, further comprising: • wherein the more than one additional coupling device (104) comprises a first additional coupling device (104) for coupling a target tube and a second additional coupling device for coupling the magnet system carrier (210), wherein the first additional coupling device surrounds at least the second additional coupling device in an annular manner; • preferably a joint which provides the additional coupling device with one or more rotational degrees of freedom relative to the carrier (102).

8. Magnetron arrangement, comprising: • the target tube cover (200) according to one of claims 6 or 7, • the bearing device, which is configured to be coupled to the coupling device, to support the target tube cover (200) rotatably around the axis of rotation.

9. Vacuum arrangement, having: • the magnetron arrangement according to claim 8, • a vacuum chamber in which the axis of rotation is arranged.

10. Signal transmission system, comprising: • the signal switching device according to one of claims 1 to 5; • the storage device, and the several coils, of which: • the at least one first coil and the at least one second coil are electrically conductively coupled to one another; • a third coil and a fourth coil are arranged one behind the other along the axis of rotation of the bearing device, wherein the at least one first coil and the at least one second coil are rotatably mounted by means of the bearing device about the axis of rotation relative to the third coil and the fourth coil; • wherein the third coil is inductively coupled to the second coil; and • wherein the fourth coil is inductively coupled to the first coil.

11. A method comprising: • Rotating a carrier (102) about an axis of rotation, which has a first side and a second side and rigidly couples together a plurality of coils arranged concentrically to the axis of rotation, of which at least one first coil is arranged on the first side and / or of which at least one second coil is arranged on the second side, about an axis of rotation which runs through the plurality of coils, Communicating at least one signal between the first side and the second side by means of the plurality of coils.

12. Method according to claim 11, comprising: • Controlling a first actuator which is designed to influence the rotation, • Controlling a second actuator which is configured to influence the transmission.

13. A computer program configured to perform the method according to claim 12.

14. A computer-readable medium storing instructions arranged, when executed by a processor, to cause the processor to perform the method of claim 12.

15. Control device comprising one or more processors configured to perform the method according to claim 12.

16. Using two coils which are rigidly coupled to one another and rotate about an axis of rotation for transmitting at least one signal between two stationary coils which are arranged one behind the other along the axis of rotation and between which the two rotating coils are arranged, wherein the axis of rotation extends through the two rotating coils and the two stationary coils.

17. Using a target tube cover (200) having the plurality of coils according to claim 16 for inductively transmitting the at least one signal by means of the plurality of coils into a target tube coupled to the target tube cover (200), preferably for controlling and / or electrically supplying an actuator arranged in the target tube.

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