Mounting head and component mounting device

Abstract

This mounting head comprises: a plurality of shafts to which a component grabbing nozzle is connected and which are arranged along a first direction that intersects a raising / lowering direction; a plurality of raising / lowering motors which are provided in correspondence with the plurality of shafts and which raise and lower the shafts; a first bracket which holds the plurality of raising / lowering motors at a first height position; a second bracket which holds the plurality of raising / lowering motors at a second height position that is lower than the first height position; a support frame which extends along the raising / lowering direction; a first attachment member which attaches the first bracket to the support frame in a cantilever state; and a second attachment member which attaches the second bracket to the support frame in a cantilever state.

Description

Mounting head and component mounting device

[0001] The present disclosure relates to a mounting head and a component mounting apparatus including the same.

[0002] 2. Description of the Related Art Conventionally, component mounting apparatuses have been known that hold components with a nozzle of a mounting head and mount the components on a board (see, for example, Japanese Patent Application Laid-Open No. 2003-124998).

[0003] Japanese Patent Application Laid-Open No. 2022-110914

[0004] There is a demand for mounting heads, including the mounting head of Patent Document 1, to be both lightweight and have sufficient rigidity.

[0005] An object of the present disclosure is to solve the above-mentioned problems by providing a mounting head and a component mounting device including the same that can easily achieve both weight reduction and ensure rigidity.

[0006] In order to achieve the above-mentioned object, the mounting head of the present disclosure comprises a plurality of shafts to which component suction nozzles are connected and which are arranged side by side in a first direction intersecting the lifting direction, a plurality of lifting motors provided corresponding to each of the plurality of shafts and which raise and lower the shaft, a first bracket which holds the plurality of lifting motors at a first height position, a second bracket which holds the plurality of lifting motors at a second height position lower than the first height position, a support frame extending along the lifting direction, a first mounting member which attaches the first bracket to the support frame in a cantilevered state, and a second mounting member which attaches the second bracket to the support frame in a cantilevered state.

[0007] The component mounting device of the present disclosure also includes the mounting head, a component supply unit that supplies components to the component suction nozzle of the mounting head, and a board transport mechanism that transports a board on which components are mounted by the mounting head.

[0008] According to the present disclosure, it is easy to achieve both weight reduction and ensuring rigidity.

[0009] Schematic plan view of a component mounting device according to an embodiment; Perspective view of a mounting head according to an embodiment; Perspective view of a mounting head according to an embodiment; Schematic side view of a mounting head according to an embodiment; Schematic perspective view of a mounting head according to an embodiment; Schematic side view of a first nozzle unit and a second nozzle unit according to an embodiment; Schematic plan view showing a component suction nozzle at the bottom of a mounting head according to an embodiment; Schematic plan view showing a lift motor at the top of a mounting head according to an embodiment; Schematic cross-sectional view showing the peripheral configuration of a manifold according to an embodiment; Schematic perspective view of a support frame according to an embodiment; Schematic perspective view of a support frame according to an embodiment; Schematic perspective view for explaining a method of attaching a support frame according to an embodiment to a motor housing section and a shaft holding section; Schematic front view of a support frame according to an embodiment; Schematic perspective view for explaining a method of attaching a connecting member to a mounting head according to an embodiment; Schematic front view of a connecting member of the embodiment Schematic front view showing a state in which the connecting member is attached to the mounting head of the embodiment Schematic side view showing a state in which the connecting member is attached to the mounting head of the embodiment Schematic perspective view showing a manifold of the embodiment and its peripheral configuration Schematic perspective view showing a manifold of the embodiment and its peripheral configuration Schematic perspective view of a manifold of the embodiment Schematic perspective view of a manifold of the embodiment Schematic perspective view of a sensor board of the embodiment Schematic sectional view for explaining a method of attaching a sensor board of the embodiment to a manifold Schematic sectional view for explaining a method of attaching a sensor board of the embodiment to a manifold Schematic sectional view showing an air flow path of the manifold of the embodiment Schematic view showing the connection relationship of the air flow paths of the manifold of the embodiment Block diagram showing a control system in a component mounting device of the embodiment

[0010] (Regarding aspects of the present disclosure) According to a first aspect of the present disclosure, there is provided a mounting head comprising: a plurality of shafts to which component suction nozzles are connected and which are arranged side by side in a first direction intersecting a lifting direction; a plurality of lifting motors provided corresponding to the plurality of shafts and which raise and lower the shafts; a first bracket which holds the plurality of lifting motors at a first height position; a second bracket which holds the plurality of lifting motors at a second height position lower than the first height position; a support frame extending along the lifting direction; a first mounting member which attaches the first bracket to the support frame in a cantilevered state; and a second mounting member which attaches the second bracket to the support frame in a cantilevered state.

[0011] According to a second aspect of the present disclosure, there is provided the mounting head according to the first aspect, wherein the first mounting members and the second mounting members are each provided in pairs spaced apart in the first direction.

[0012] According to a third aspect of the present disclosure, there is provided a mounting head as described in the first or second aspect, wherein the support frame has at least two pillars extending in the lifting direction and at least two beams extending in the first direction, and has a ladder structure in which the at least two pillars are connected by the at least two beams.

[0013] According to a fourth aspect of the present disclosure, there is provided a mounting head as described in any one of the first to third aspects, further comprising a shaft holding portion that holds the multiple shafts so that they can be raised and lowered at a third height position that is lower than the second height position, and a third mounting member that attaches the shaft holding portion to the support frame in a cantilevered state.

[0014] According to a fifth aspect of the present disclosure, there is provided a mounting head as described in the fourth aspect, further comprising a rotary motor for rotating the plurality of shafts, the shaft holding portion having a block arranged outside the plurality of shafts in the first direction to support the rotary motor, and the third mounting member being attached to the block.

[0015] According to a sixth aspect of the present disclosure, there is provided a mounting head as described in any one of the first to fifth aspects, further comprising a cooling fan that blows air onto the plurality of lifting motors in a second direction that intersects the lifting direction and the first direction.

[0016] According to a seventh aspect of the present disclosure, there is provided a mounting head as described in the sixth aspect, wherein the plurality of shafts are arranged in two rows spaced apart in the second direction, and the cooling fans have a first cooling fan that blows air onto the plurality of lifting motors from one side in the second direction, and a second cooling fan that blows air onto the plurality of lifting motors from the other side in the second direction.

[0017] According to an eighth aspect of the present disclosure, there is provided a component mounting device comprising: the mounting head described in any one of the first to seventh aspects; a component supply unit that supplies components to the component suction nozzle of the mounting head; and a substrate transport mechanism that transports a substrate on which components are mounted by the mounting head.

[0018] (Regarding another aspect of the present disclosure) According to a first aspect of the present disclosure, there is provided a mounting head including: a plurality of first shafts to which component suction nozzles are connected and which are arranged side by side in a first direction intersecting a lifting direction; a plurality of first lifting motors which are arranged side by side in the first direction corresponding to each of the first shafts and which raise and lower the first shafts; a plurality of second shafts which are arranged at positions spaced apart from the plurality of first shafts in a second direction intersecting the lifting direction and the first direction; a plurality of second lifting motors which are arranged side by side in the first direction corresponding to each of the second shafts and which raise and lower the second shafts; and a first offset block which connects the first shafts to the first output shaft of the first lifting motor so as to offset the first shaft in the second direction relative to the first output shaft of the first lifting motor.

[0019] According to a second aspect of the present disclosure, there is provided a mounting head as described in the first aspect, further comprising a second offset block connecting the second shaft and the second output shaft so as to offset the second shaft in the second direction relative to the second output shaft of the second lifting motor, wherein the offset direction of the first shaft by the first offset block and the offset direction of the second shaft by the second offset block are opposite to each other.

[0020] According to a third aspect of the present disclosure, there is provided a mounting head as described in the second aspect, wherein the first offset block offsets the first shaft in a direction away from the second shaft in the second direction, and the second offset block offsets the second shaft in a direction away from the first shaft in the second direction.

[0021] According to a fourth aspect of the present disclosure, there is provided a mounting head as described in any one of the first to third aspects, further comprising a bracket that holds the plurality of first lift motors and the plurality of second lift motors, and a shaft holding portion below the bracket that holds the plurality of first shafts and the plurality of second shafts so that they can be raised and lowered freely, wherein the bracket holds the first lift motors and the second lift motors with the first output shaft of the first lift motor and the second output shaft of the second lift motor facing downward, the shaft holding portion holds the first shafts and the second shafts in a state where they protrude upward from the shaft holding portion, and the first offset block is located between the bracket and the shaft holding portion.

[0022] According to a fifth aspect of the present disclosure, there is provided a component mounting device comprising: the mounting head described in any one of the first to fourth aspects; a component supply unit that supplies components to the component suction nozzle of the mounting head; and a substrate transport mechanism that transports a substrate on which components are to be mounted by the mounting head.

[0023] (Regarding yet another aspect of the present disclosure) According to a first aspect of the present disclosure, there is provided a mounting head comprising: a plurality of nozzle units, each having a shaft to which a component suction nozzle is connected, arranged in a line in a first direction intersecting the lifting direction of the shaft; a motor unit having a plurality of lifting motors for lifting and lowering each of the shafts; a shaft holding section arranged below the motor unit and holding the plurality of shafts so that they can be lifted and lowered; and a support frame to which the motor unit and the shaft holding section are attached, wherein at least the shaft holding section is attached to the support frame in a cantilevered state in a second direction intersecting the lifting direction and the first direction, and further comprising a connecting member connecting the motor unit and the shaft holding section in the vertical direction.

[0024] According to a second aspect of the present disclosure, there is provided a mounting head as described in the first aspect, wherein the connecting member is positioned on the opposite side of the motor unit and the shaft holding portion from the side on which the support frame is positioned in the second direction.

[0025] According to a third aspect of the present disclosure, there is provided a mounting head as described in the first or second aspect, wherein each of the nozzle units further includes a biasing member that biases the shaft upward toward a standby position, and each of the lifting motors lowers the shaft by pushing the shaft downward against the biasing member.

[0026] According to a fourth aspect of the present disclosure, there is provided the mounting head described in the third aspect, further comprising a control unit, wherein the control unit is capable of controlling the plurality of lifting motors so as to simultaneously lower the plurality of shafts from the standby position.

[0027] According to a fifth aspect of the present disclosure, there is provided the mounting head according to any one of the first to fourth aspects, wherein the connecting member has a plate-like shape having a thickness in the second direction.

[0028] According to a sixth aspect of the present disclosure, there is provided the mounting head according to any one of the first to fifth aspects, wherein the connecting member is made of sheet metal.

[0029] According to a seventh aspect of the present disclosure, there is provided a mounting head described in any one of the first to sixth aspects, wherein the connecting member has a flat shape when viewed from the first direction from a first end connected to the motor unit to a second end connected to the shaft holding portion.

[0030] According to an eighth aspect of the present disclosure, there is provided a mounting head described in any one of the first to tenth aspects, wherein the motor unit has a plurality of motor cases each having a cylindrical shape and each housing a lifting motor, and a bracket that bundles the plurality of motor cases, and the connecting member is connected to the bracket.

[0031] According to a ninth aspect of the present disclosure, there is provided a mounting head as described in the eighth aspect, wherein the bracket has a first bracket that holds the multiple lifting motors at a first height position and a second bracket that holds them at a second height position lower than the first height position, and the connecting member is connected to the second bracket.

[0032] According to a tenth aspect of the present disclosure, there is provided a component mounting device comprising: the mounting head described in any one of the first to ninth aspects; a component supply unit that supplies components to the component suction nozzle of the mounting head; and a substrate transport mechanism that transports a substrate on which components are to be mounted by the mounting head.

[0033] (Regarding still another aspect of the present disclosure) According to a first aspect of the present disclosure, there is provided a mounting head comprising: a plurality of first component suction nozzles; a plurality of first valve devices provided corresponding to the plurality of first component suction nozzles, each for selectively connecting one of a plurality of air supply sources to the first component suction nozzle; a plurality of first flow rate sensors provided corresponding to the plurality of first component suction nozzles, each for measuring the flow rate of air supplied to the first component suction nozzle; a first I / O control unit to which the plurality of first valve devices and the plurality of first flow rate sensors are electrically connected; and a head control unit connected to the first I / O control unit via a first serial communication wiring.

[0034] According to a second aspect of the present disclosure, there is provided a mounting head as described in the first aspect, further comprising a first sensor substrate on which the plurality of first flow sensors are mounted, and the first sensor substrate and the first I / O control unit are connected by wiring for second serial communication.

[0035] According to a third aspect of the present disclosure, there is provided a mounting head as described in the second aspect, wherein the first sensor substrate has one I / O chip electrically connected to each of the first flow sensors, and the I / O chip is connected to the first I / O control unit via the wiring for the second serial communication.

[0036] According to a fourth aspect of the present disclosure, there is provided a mounting head as defined in any one of the first to third aspects, further comprising a first manifold having first air flow paths connected to the plurality of first component suction nozzles, the first manifold having a first surface on which the first valve device is mounted and a second surface located opposite the first surface on which the first flow sensor is mounted.

[0037] According to a fifth aspect of the present disclosure, there is provided the mounting head according to the fourth aspect, wherein the first I / O control unit is attached to the first manifold.

[0038] According to a sixth aspect of the present disclosure, there is provided a mounting head as described in the fifth aspect, wherein the first manifold has a first surface for mounting the first valve device, a second surface for mounting the first flow sensor, and a third surface for mounting the first I / O control unit.

[0039] According to a seventh aspect of the present disclosure, there is provided a mounting head as described in the sixth aspect, wherein the first surface and the second surface are opposing side surfaces of the first manifold, and the third surface is an upper surface of the first manifold.

[0040] According to an eighth aspect of the present disclosure, there is provided a mounting head described in any one of the fourth to seventh aspects, wherein the first I / O control unit is indirectly attached to the first manifold via a fixing member.

[0041] According to a ninth aspect of the present disclosure, there is provided a mounting head as defined in any one of the first to eighth aspects, further comprising: a plurality of second component suction nozzles; second valve devices provided corresponding to the plurality of second component suction nozzles, and configured to selectively connect one of a plurality of air supply sources to the second component suction nozzles; second flow sensors provided corresponding to the plurality of second component suction nozzles, and configured to measure the flow rate of air supplied to the second component suction nozzles; and a second I / O control unit to which the plurality of second valve devices and the plurality of second flow sensors are electrically connected, wherein the second I / O control unit is connected to the first I / O control unit via a third wiring for serial communication.

[0042] According to a tenth aspect of the present disclosure, there is provided a mounting head as described in the ninth aspect, further comprising a second sensor substrate on which the plurality of second flow sensors are mounted, and the second sensor substrate and the second I / O control unit are connected by a fourth wiring for serial communication.

[0043] According to an eleventh aspect of the present disclosure, there is provided a mounting head as described in the tenth aspect, wherein the second sensor substrate has one I / O chip electrically connected to each of the second flow sensors, and the I / O chip is connected to the second I / O control unit via the fourth serial communication wiring.

[0044] According to a twelfth aspect of the present disclosure, there is provided a mounting head as defined in any one of the ninth to eleventh aspects, further comprising a second manifold having second air flow paths connected to the plurality of second component suction nozzles, the second manifold having a first surface on which the second valve device is mounted and a second surface located opposite the first surface on which the second flow sensor is mounted.

[0045] According to a thirteenth aspect of the present disclosure, there is provided the mounting head according to the twelfth aspect, wherein the second I / O control unit is attached to the second manifold.

[0046] According to a fourteenth aspect of the present disclosure, there is provided a mounting head as described in the thirteenth aspect, wherein the second manifold has a first surface for mounting the second valve device, a second surface for mounting the second flow sensor, and a third surface for mounting the second I / O control unit.

[0047] According to a fifteenth aspect of the present disclosure, there is provided a mounting head as described in the fourteenth aspect, wherein the first surface and the second surface are opposing side surfaces of the second manifold, and the third surface is an upper surface of the second manifold.

[0048] According to a sixteenth aspect of the present disclosure, there is provided a mounting head described in any one of the twelfth to fifteenth aspects, wherein the second I / O control unit is indirectly attached to the second manifold via a fixing member.

[0049] According to a seventeenth aspect of the present disclosure, there is provided a component mounting device comprising: the mounting head described in any one of the first to sixteenth aspects; a component supply unit that supplies components to the component suction nozzle of the mounting head; and a substrate transport mechanism that transports a substrate on which components are to be mounted by the mounting head.

[0050] (Embodiments) Exemplary embodiments of a mounting head and a component mounting device according to the present disclosure will be described below with reference to the accompanying drawings. The present disclosure is not limited to the specific configurations of the following embodiments, and configurations based on similar technical ideas are included in the present disclosure. The configurations, shapes, etc. described below are examples for explanatory purposes and can be modified as appropriate depending on the specifications of the mounting head and the component mounting device.

[0051] In the following description, the two axes that are orthogonal to each other in the horizontal plane are defined as the X-axis direction in the substrate transport direction and the Y-axis direction that is orthogonal to the substrate transport direction, and the height direction that is orthogonal to the horizontal plane is defined as the Z-axis direction.

[0052] First, the configuration of a component mounting apparatus 2 will be described with reference to Fig. 1. Fig. 1 is a schematic plan view showing a component mounting apparatus 2 according to an embodiment.

[0053] The component mounting device 2 has a function of performing a component mounting operation of mounting components (electronic components) such as dies and IC chips supplied from the component supply units 4 and 6 onto the substrates W1 and W2. The component mounting device 2 constitutes a component mounting system that mounts components onto the substrates W1 and W2.

[0054] The component mounting apparatus 2 of this embodiment has the function of processing two boards W1 and W2 in parallel using two component supply units 4 and 6 and two mounting heads 26 A and 26 B. The component mounting apparatus 2 is not limited to processing multiple boards in parallel, and may also be used to process only one board individually.

[0055] Board transport mechanisms 10 and 12 are arranged along the X-axis direction at the center of base 8. Board transport mechanisms 10 and 12 each transport boards W1 and W2 carried in from upstream in the X-axis direction and position them at a predetermined mounting work position. Board transport mechanisms 10 and 12 each carry out boards W1 and W2 downstream after component mounting work has been completed.

[0056] Component supply units 4 and 6 are arranged on both sides of the board transport mechanisms 10 and 12 in the Y-axis direction. Each of the component supply units 4 and 6 has a plurality of tape feeders 14 and 16 arranged side by side along the X-axis direction. The tape feeders 14 and 16 are attached to carriages 15 and 17, respectively, and feed a carrier tape containing components by pitch feeding to sequentially supply the components to predetermined component supply positions.

[0057] 1, Y-axis beams 18 and 20 equipped with Y-axis linear drive mechanisms are arranged along the Y-axis on both sides of the base 8 in the X-axis direction. The Y-axis beams 18 and 20 are equipped with linear rails extending in the Y-axis direction, and X-axis beams 22 and 24 are engaged therewith so as to be able to slide freely in the Y-axis direction.

[0058] The X-axis beams 22 and 24 are each equipped with a moving table 22T, 24T that moves along a linear rail (not shown) extending in the X-axis direction, and an X-axis linear drive mechanism (not shown) that moves the moving table 22T, 24T along the linear rail. Mounting heads 26A, 26B are attached to the moving tables 22T, 24T. The mounting heads 26A, 26B are detachable from the moving tables 22T, 24T.

[0059] The first mounting head 26A engaged with the X-axis beam 22 is a head that picks up components supplied from the component supply unit 4 and mounts them on the boards W1 and W2. The second mounting head 26B engaged with the X-axis beam 24 is a head that picks up components supplied from the component supply unit 6 and mounts them on the boards W2 and W1.

[0060] The Y-axis beams 18 and 20 and the X-axis beams 22 and 24 constitute a head moving mechanism that moves the mounting heads 26A and 26B within the XY plane.

[0061] Component recognition cameras 28, 30 are provided between the component supply units 4, 6 and the board transport mechanisms 10, 12, respectively. Mounting heads 26A, 26B that have picked up components from the component supply units 4, 6 move above the component recognition cameras 28, 30, thereby acquiring images of the components held by mounting heads 26A, 26B. The acquired images are subjected to recognition processing to detect any misalignment of the components while they are held by mounting heads 26A, 26B.

[0062] Mounting heads 26A and 26B are respectively equipped with head cameras 32 and 34 that move integrally. The head cameras 32 and 34 are attached to the mounting heads 26A and 26B with their imaging optical axes facing downward, and capture images of the boards W1 and W2 facing downward from above the boards W1 and W2. The captured images are processed to detect misalignment of the boards W1 and W2, i.e., misalignment of the mounting points. Then, based on the detection results of the component misalignment and the mounting point misalignment, position correction is performed during component mounting. The position correction includes rotational alignment, which aligns the rotational position of the component around the θ axis in the correct direction.

[0063] The component mounting apparatus 2 further includes a main body control unit 36. The main body control unit 36 ​​is a control unit that controls each component of the component mounting apparatus 2. The main body control unit 36 ​​is configured, for example, by a microcomputer that includes a processor and a memory that stores a computer program executed by the processor.

[0064] Next, the detailed configuration of the mounting heads 26A and 26B will be described with reference to Figure 2 and subsequent drawings. Because the two mounting heads 26A and 26B have the same structure, in the following description they will be collectively referred to as "mounting head 26," and only one mounting head 26 will be described.

[0065] 2 and 3 are perspective views of the mounting head 26. Fig. 4 is a schematic side view of the mounting head 26, and Fig. 5 is a schematic perspective view of the mounting head 26.

[0066] 2 to 5, the mounting head 26 is provided with a head cover 38 that covers the top of the mounting head 26. A main board 39 for controlling the entire mounting head 26 is disposed inside the head cover 38. The main board 39 is electrically connected to the main body control unit 36 ​​shown in FIG. 1, and is also referred to as the "head control unit."

[0067] The mounting head 26 further includes a first nozzle unit 40 and a second nozzle unit 50 as units for picking up components.

[0068] Each of the nozzle units 40 and 50 is a unit that is configured with a plurality of component suction nozzles and a drive mechanism for driving the nozzles. The first nozzle unit 40 has a plurality of component suction nozzles 41 (41A to 41H) arranged along the X-axis direction, and the second nozzle unit 50 has a plurality of component suction nozzles 51 (51A to 51H) arranged along the X-axis direction.

[0069] In this embodiment, the component suction nozzle 41 has eight component suction nozzles 41A to 41H, and the component suction nozzle 51 has eight component suction nozzles 51A to 51H. The number of component suction nozzles 41, 51 in each nozzle unit 40, 50 is not limited to eight, and may be any number.

[0070] The first nozzle unit 40 and the second nozzle unit 50 are arranged in the Y-axis direction, which is perpendicular to the X-axis direction, to form two rows of nozzle units. Each mounting head 26 is equipped with 8 nozzles x 2 rows = a total of 16 component suction nozzles 41, 51. Note that the nozzle units 40, 50 are not limited to being arranged in two rows, and may be arranged in only one row, for example.

[0071] The other components of the nozzle units 40, 50 also have a corresponding number of component suction nozzles 41, 51, and will be represented in the same manner as "XX (XXA to XXH)" in the following explanations and drawings.

[0072] FIG. 6 is a schematic side view of the first nozzle unit 40 and the second nozzle unit 50. As shown in FIG.

[0073] The first nozzle unit 40 has a plurality of shafts 45 (45A to 45H), a plurality of pulleys 46 (46A to 46H), and a plurality of air connection parts 47 (47A to 47H) as a drive mechanism for driving the plurality of component suction nozzles 41.

[0074] The mounting head 26 further includes a motor unit 60 in addition to the first nozzle unit 40 and the second nozzle unit 50. The motor unit 60 includes a plurality of lift motors 42 (42A to 42H) and a plurality of output shafts 43 (43A to 43H), a plurality of lift motors 52 (52A to 52H) and a plurality of output shafts 53 (53A to 53H), and brackets 63 and 64, which will be described later.

[0075] The lifting motor 42 is a linear motor that raises and lowers the output shaft 43 in the Z-axis direction (arrow Z1). Offset blocks 44 (44A to 44H) are connected to the lower end of the output shaft 43. The offset blocks 44 are blocks that offset the positions of the output shaft 43 and the shaft 45 in the horizontal direction. The output shaft 43 is connected to the upper surface of the offset block 44, and the shaft 45 is connected to the lower surface of the offset block 44.

[0076] The shaft 45 is a shaft for raising and lowering the component suction nozzle 41 and is connected to the component suction nozzle 41. When the output shaft 43 and the shaft 45 rise and fall together (arrow Z1), the component suction nozzle 41 attached to the lower end of the shaft 45 rises and falls (arrow Z2).

[0077] A pulley 46 is attached to the middle of the shaft 45. Each pulley 46 is engaged with a belt connected to a rotary motor 100 shown in FIG. 5 , and when the rotary motor 100 rotates the belt, the pulleys 46 rotate together around the Z-axis direction. Accordingly, the shafts 45 and the component suction nozzles 41 rotate together. Note that any structure may be used for transmitting power to the pulleys 46 via the belt, and for example, the structure described in Japanese Patent No. 4,894,841 may be used.

[0078] The air connection part 47 is a connecting member for supplying air to the suction holes 48 (48A to 48H) of the component suction nozzle 41. The air connection part 47 is connected to a connection hose 72 (72A to 72H) shown in FIG.

[0079] Similarly, the second nozzle unit 50 has a plurality of shafts 55 (55A to 55H), a plurality of pulleys 56 (56A to 56H), and a plurality of air connections 57 (57A to 57H) as a drive mechanism for driving the plurality of component suction nozzles 51. An offset block 54 (54A to 54H) is provided between the shaft 55 and the output shaft 53.

[0080] As the output shaft 53 and shaft 55 move up and down together (arrow Z3), the component suction nozzles 51 connected to the shaft 55 move up and down together (arrow Z4). Suction holes 58 (58A-58H) are provided at the lower end of the component suction nozzle 51, and air is supplied to the suction holes 58 via an air connection 57. Connection hoses 82 (82A-82H) shown in FIG. 4 are connected to the air connection 57. Each pulley 56 attached to the middle of the shaft 55 engages with a belt connected to a rotary motor 102 shown in FIG. 5. When the rotary motor 102 rotates the pulleys 56, the shafts 55 and the component suction nozzles 51 rotate together about the Z-axis.

[0081] The offset block 44 offsets the position of the shaft 45 in the Y-axis direction relative to the lift motor 42 and the output shaft 43 away from the second nozzle unit 50 (arrow Y1). The offset block 54 offsets the position of the shaft 55 in the Y-axis direction relative to the lift motor 52 and the output shaft 53 away from the first nozzle unit 40 (arrow Y2).

[0082] According to this offset direction, the pitch in the Y-axis direction between the lift motors 42 and 52 at the upper part of the mounting head 26 can be made shorter than the pitch in the Y-axis direction between the component suction nozzles 41 and 51 at the lower part of the mounting head 26. This allows the lift motors 42, 42, which are heavy objects, to be concentrated in one location, leading to a reduction in the size and weight of the mounting head 26.

[0083] 7 is a schematic plan view showing the component suction nozzles 41 and 51 at the bottom of the mounting head 26, and FIG. 8 is a schematic plan view showing the lift motors 42 and 52 at the top of the mounting head 26.

[0084] 7, a guide block 37 is provided between the component suction nozzles 41 and 51. The guide block 37 is a block for guiding the lifting and lowering of the component suction nozzles 41 and 51. The guide block 37 has a first surface 37A that engages the component suction nozzles 41 and a second surface 37B that engages the component suction nozzles 51. The first surface 37A and the second surface 37B are provided with grooves (not shown) that position the component suction nozzles 41 and 51 horizontally so that they can be lifted and lowered.

[0085] The pitch between component suction nozzles 41 and 51 in the Y-axis direction is D1, and the pitch in the X-axis direction is D2. Due to the presence of guide block 37, it is necessary to ensure that pitch D1 in the Y-axis direction is at least a certain length.

[0086] By providing the offset blocks 44 and 54 described above, the pitch between the lift motors 42 and 52 can be reduced regardless of the restriction on the pitch between the component suction nozzles 41 and 51 in the Y-axis direction.

[0087] 8, the pitch between the lift motors 42 and 52 in the Y-axis direction is D3, and the pitch in the X-axis direction is D2. Due to the offset blocks 44 and 54 described above, the pitch in the Y-axis direction is D3<D1. This makes it easier to arrange the heavy lift motors 42 and 52 in a concentrated manner in a horizontal plane, making it easier to reduce the size and weight of the mounting head 26.

[0088] In this embodiment, the offset blocks 44, 54 do not have the function of changing the pitch in the X-axis direction. The pitch in the X-axis direction of the component suction nozzles 41 and 51 shown in Fig. 7 and the pitch in the X-axis direction of the lift motors 42 and 52 shown in Fig. 8 are both D2.

[0089] In this embodiment, the offset blocks 44, 54 are connected to the nozzle units 40, 50, respectively, but this is not the only possible case. An offset block (for example, the offset block 44) may be connected to only one of the nozzle units, and no offset block (for example, the offset block 54) may be connected to the other nozzle unit.

[0090] 6 , the first bracket 63 is a member that holds the plurality of lift motors 42 and the plurality of lift motors 52 at a first height position. The second bracket 64 is a member that holds the plurality of lift motors 42 and the plurality of lift motors 52 at a second height position that is lower than the first height position. The two brackets 63, 64 are also used as members for attaching a support frame 90, which will be described later.

[0091] The mounting head 26 further includes a shaft holder 66 that holds the shafts 45 and 55 so that they can be raised and lowered. The configuration of the shaft holder 66 will be described later.

[0092] As shown in FIG. 4, the mounting head 26 includes, as components related to the first nozzle unit 40, a manifold 70, connection hoses 72 (72A to 72H), valves 74 (74A to 74H), and valves 76 (76A to 76H).

[0093] The manifold 70 is a member for circulating air to be supplied to the component suction nozzles 41. The manifold 70 has multiple internal flow paths for circulating air, and two types of valves 74 and 76 are attached to communicate with the internal flow paths.

[0094] The valves 74 and 76 are components for switching the communication state between the internal flow paths of the manifold 70 to switch the type of air supplied to the component suction nozzle 41. The two valves 74 and 76 constitute one valve device. The valve 74 is located downstream, and the valve 76 is located upstream.

[0095] In this embodiment, the manifold 70 allows three types of air to flow: positive pressure air, negative pressure air, and atmospheric pressure air. By opening and closing the valves 74 and 76, it is possible to selectively supply one of the three types of air to the component suction nozzle 41.

[0096] Similarly, for the second nozzle unit 50, the mounting head 26 includes a manifold 80, connection hoses 82 (82A to 82H), valves 84 (84A to 84H), and valves 86 (86A to 86H).

[0097] FIG. 9 is a schematic vertical cross-sectional view showing the peripheral configuration of the manifolds 70 and 80. As shown in FIG.

[0098] 9, the manifold 70 has a plurality of air flow paths 71, and valves 74, 76 are attached so as to communicate with the air flow paths 71. Each of the valves 74 is electrically connected to the I / O board 73 via connectors 75 (75A to 75H) and wiring (not shown). Each of the valves 76 is also electrically connected to the I / O board 73 via connectors 77 (77A to 77H) and wiring (not shown).

[0099] A sensor board 78 is also electrically connected to the I / O board 73. The sensor board 78 is a board on which a flow sensor is mounted to measure the flow rate of air flowing through the air flow path of the manifold 70. The sensor board 78 is attached to the manifold 70, and in particular, to the side surface (second surface) opposite to the side surface (first surface) on which the valves 74 and 76 are attached.

[0100] The I / O board 73 is fixed to the upper surface (third surface) of the manifold 70 via a fixing member 79 .

[0101] Similarly, the manifold 80 has a plurality of air flow paths 81, and valves 84 and 86 are attached so as to communicate with the air flow paths 81. Each of the valves 84 is electrically connected to the I / O board 83 via connectors 85 (85A to 85H) and wiring (not shown), and each of the valves 86 is electrically connected to the I / O board 83 via connectors 87 (87A to 87H) and wiring (not shown).

[0102] The I / O board 83 is fixed to the upper surface of the manifold 80 via a fixing member 89. The I / O board 83 is further electrically connected to a sensor board 88 on which a flow rate sensor is mounted.

[0103] The I / O board 73 is electrically connected to the main board 39 shown in Figures 2 and 3 via wiring (not shown). The I / O board 83 is not connected to the main board 39, but is electrically connected to the I / O board 73 via wiring (not shown).

[0104] According to the above configuration, the wiring (16 wirings in total) of the valves 74, 76 and the wiring (1 wirings in total) of the sensor board 78 are collected and connected to the I / O board 73, and the wiring (16 wirings in total) of the valves 84, 86 and the wiring (1 wirings in total) of the sensor board 88 are collected and connected to the I / O board 83. In this state, by connecting the I / O board 83 to the I / O board 73 and connecting the I / O board 73 to the main board 39, the main board 39 can control the opening and closing of all the valves 74, 76, 84, 86 and obtain the measured values ​​of the flow rate sensors on the sensor boards 78, 88.

[0105] Furthermore, when performing maintenance on the valves 74, 76, 84, 86 or the sensor boards 78, 88, etc., it is sufficient to individually plug and unplug the wires between the I / O board 73 and the connectors 75, 77 and the wires between the I / O board 83 and the connectors 85, 87. Therefore, compared to when the wires are directly connected to the main board 39, there is no need to plug and unplug unrelated wires or remove components such as the head cover 38, improving workability during maintenance.

[0106] In this embodiment, communication on each line is performed as serial communication.

[0107] Returning to FIG. 4, the mounting head 26 further includes a support frame 90 .

[0108] The support frame 90 is a frame for supporting the components of the mounting head 26, including the nozzle units 40 and 50. The support frame 90 is fixed to the moving table 22T or 24T (see FIGS. 1 and 4) with bolts or a clamp mechanism. The support frame 90 of this embodiment supports the components of the mounting head 26, including the nozzle units 40 and 50, in a cantilever manner on one side in the Y-axis direction via attachment members 92, 94, and 96, which will be described later (arrow Y3).

[0109] The support frame 90 has three types of mounting members: a first mounting member 92 , a second mounting member 94 , and a third mounting member 96 .

[0110] All three types of mounting members 92, 94, 96 are provided to protrude from the support frame 90 to one side in the Y-axis direction (arrow Y3). The mounting members 92, 94, 96 may also be referred to as "support posts" as they cantilever the components of the mounting head 26, including the nozzle units 40 and 50.

[0111] The first mounting member 92 is attached to the first bracket 63 of the motor unit 60, the second mounting member 94 is attached to the second bracket 64 of the motor unit 60, and the third mounting member 96 is attached to blocks 106 and 108, which will be described later.

[0112] With this structure, high rigidity can be achieved by supporting the box-shaped motor unit 60 and the shaft holder 66 in a cantilevered manner by the mounting members 92, 94, and 96. This eliminates the need to provide high rigidity to the multiple lift motors 42, 52 themselves (FIG. 6), and eliminates the need to add members (such as rigid plates) to the lift motors 42, 52 to maintain high rigidity, leading to a reduction in the weight and size of the mounting head 26.

[0113] As shown in FIG. 5, the mounting head 26 further includes rotation motors 100 and 102 .

[0114] Rotary motors 100 and 102 are motors for rotating shafts 45 and 55, respectively, shown in Fig. 6 etc. Rotary motor 100 rotates multiple shafts 45 in synchronization via a belt and pulley 46 (not shown), and rotary motor 102 rotates multiple shafts 55 in synchronization via another belt and pulley 56 (not shown).

[0115] As shown in FIG. 5, two rotary motors 100, 102 are supported by blocks 106, 108 of the shaft holder 66.

[0116] The shaft holding portion 66 includes a first block 104, a shaft case 105 (FIGS. 6 and 9), and second blocks 106 and 108.

[0117] The first block 104 is a block that holds the shafts 45, 55 shown in FIG. 6 and other figures so that they can be inserted therethrough. The first block 104 holds a plurality of shaft cases 105, through which the shafts 45, 55 are individually inserted. The shaft cases 105 are cylindrical members that extend vertically, and a rotor 105A having a spline structure that guides the shafts 45, 55 in the Z-axis direction is built into the shaft case 105 (see FIG. 9 ). The rotor 105A is mounted within the shaft case 105 in a state that allows it to rotate about the Z-axis direction. Therefore, the shaft holder 66 supports the shafts 45, 55 so that they can move in the Z-axis direction and rotate about the Z-axis direction.

[0118] The second blocks 106 and 108 are blocks for supporting the rotary motors 100 and 102, respectively. The second blocks 106 and 108 are disposed outward in the X-axis direction relative to the first block 104. A third mounting member 96, which protrudes from the support frame 90, is attached to the second blocks 106 and 108.

[0119] As shown in FIG. 5, the mounting head 26 further includes connecting members 110 and 112 .

[0120] The connecting members 110 and 112 are members that connect the motor unit 60 and the shaft holding portion 66 to each other. The connecting members 110 and 112 extend in the Z-axis direction so as to connect the motor unit 60 and the shaft holding portion 66 that are separated from each other in the Z-axis direction.

[0121] By providing the connecting members 110 and 112, as will be described later, it is possible to suppress bending of the tip end of the mounting head 26 that occurs when multiple shafts 45 or multiple shafts 55 are lowered simultaneously, leading to improved mounting accuracy. The connecting members 110 and 112 may also be called "suspenders."

[0122] In this embodiment, the upper ends of the connecting members 110 , 112 are attached to the second bracket 64 of the motor unit 60 , and the lower ends of the connecting members 110 , 112 are attached to the second blocks 106 , 108 of the shaft holding portion 66 .

[0123] As shown in FIG. 4, the motor unit 60 is provided with cooling fans 114 and 116 .

[0124] The cooling fans 114, 116 are fans for cooling the lift motors 42, 52, which are heat-generating elements, and are provided in positions where they blow air onto the lift motors 42, 62 that house the lift motors 42, 52. In this embodiment, the cooling fans 114, 116 are fixed between the first bracket 63 and the second bracket 64 of the motor unit 60.

[0125] As shown in Figure 8, the first cooling fan 114 and the second cooling fan 116 are positioned opposite each other in the Y-axis direction, with the first cooling fan 114 positioned to blow air in the +Y direction toward the lift motor 42, and the second cooling fan 116 positioned to blow air in the -Y direction toward the lift motor 52.

[0126] By arranging the two cooling fans 114, 116 opposite each other, the lift motors 42, 52 of the nozzle units 40, 50 can be efficiently cooled even when the nozzle units 40, 50 are arranged in two rows in the Y-axis direction. Furthermore, when the airflows blown out from the two cooling fans 114, 116 collide with each other, the airflow also flows outward along the X-axis direction, which is perpendicular to the Y-axis direction. This makes it possible to efficiently cool not only the lift motors 42, 52 in the center in the X-axis direction, but also the lift motors 42, 52 at both ends in the X-axis direction.

[0127] 9, mounting head 26 further includes manifold mounting members 200 for mounting manifold 70 to first block 104, and manifold mounting members 202 for mounting manifold 80 to first block 104. At least two manifold mounting members 200, 202 are provided at different height positions, and manifolds 70, 80 are mounted to first block 104 via fixing means such as screws (not shown).

[0128] Next, the support frame 90 and its peripheral configuration, which are included in the configuration of the mounting head 26, will be described with reference to FIG. 10 and subsequent figures.

[0129] 10 and 11 are perspective views of the support frame 90, and FIG. 12 is a perspective view for explaining a method of attaching the support frame 90 to the motor unit 60 and the shaft holder 66.

[0130] 10 and 11, the support frame 90 has a ladder structure in which multiple pillars are connected by multiple beams. The support frame 90 shown in Figures 10 and 11 includes a pair of pillars 120, 122 extending in the vertical direction (Z-axis direction) and a pair of beams 124, 126 extending in the horizontal direction (X-axis direction).

[0131] 10, the posts 120, 122 are each provided with a plurality of mounting holes 128. Rod-shaped members 130 are inserted into the mounting holes 128 to attach and fix the mounting members 92, 94, 96 shown in FIG.

[0132] Each of the mounting members 92, 94, and 96 shown in Figure 11 has a through hole that penetrates in the axial direction, and the mounting members 92, 94, and 96 are attached to the support frame 90 by inserting a rod-shaped member 130 into the through holes of the mounting members 92, 94, and 96 and the mounting hole 128 of the support frame 90.

[0133] The rod-shaped member 130 has a threaded portion at its tip, and when the mounting members 92, 94, 96 are attached to the support frame 90 as shown in FIG. 11, the threaded portion of the rod-shaped member 130 protrudes from the through-holes of the mounting members 92, 94, 96.

[0134] 12 , with the threaded portions of the rod-shaped member 130 protruding from the through-holes of the mounting members 92, 94, and 96, the tip ends of the rod-shaped member 130 are screwed into the mounting holes provided in the motor unit 60 and the shaft holding portion 66. In this way, the mounting members 92, 94, and 96 are attached to the motor unit 60 and the shaft holding portion 66, and the main components of the mounting head 26 can be cantilevered by the mounting members 92, 94, and 96.

[0135] FIG. 13 is a front view of the support frame 90.

[0136] 13, a pair of pillars 120, 122 extending in the Z-axis direction have a shape in which the spacing in the X-axis direction changes. Specifically, upper portions 120A, 122A extend parallel to the Z-axis direction, while middle portions 120B, 122B extend so as to spread outward in the X-axis direction, and lower portions 120C, 122C also extend parallel to the Z-axis direction.

[0137] According to this configuration, the distance D5 in the X-axis direction between the upper portions 120A and 122A is shorter than the distance D6 in the X-axis direction between the lower portions 120AC and 122C (D5<D6).

[0138] This makes it possible to accommodate cases where, as shown in Figure 12, the second blocks 106, 108, where the third mounting member 96 is attached, are positioned outside in the X-axis direction relative to the motor unit 60, where the first mounting member 92 and the second mounting member 94 are attached.

[0139] Returning to FIG. 13, mounting portions 132 and 134 are provided above the posts 120 and 122.

[0140] The mounting portions 132, 134 are portions for attaching and fixing the hook members 91. In this embodiment, the mounting portions 132, 134 are disposed outward in the X-axis direction relative to the pillars 120, 122. The locations for attaching the hook members 91 are located at the outermost positions in the X-axis direction on the support frame 90. The hook members 91 are provided to temporarily hook the mounting head 26 to the movable tables 22T, 24T when attaching the mounting head 26 to the movable tables 22T, 24T. Providing the hook members 91 in this manner makes it easier for the worker to attach the mounting head 26 to the movable tables 22T, 24T.

[0141] FIG. 14 is a perspective view for explaining a method for attaching the connecting members 110 and 112 to the mounting head 26, and FIG. 15 is a front view of the connecting members 110 and 112. As shown in FIG.

[0142] 14 , both connecting members 110, 112 are provided to connect second bracket 64 of motor unit 60 and second block 106 of shaft holding portion 66. An attachment hole 140 is provided in second bracket 64, and an attachment hole 142 is also provided in second block 106. Through holes are formed in the upper and lower ends of each of connecting members 110, 112, and connecting members 110, 112 can be attached and fixed by inserting fixing members 144 such as screws into the through holes and threading them into mounting holes 140, 142.

[0143] As shown in FIG. 15, the connecting members 110 and 112 each have an upper portion 110A, 112A, a middle portion 110B, 112B, and a lower portion 110C, 112C.

[0144] Through holes 146 are provided in the upper portions 110A, 112A and lower portions 110C, 112C, which are attachment portions to the motor unit 60 and the shaft holding portion 66. The upper portions 110A, 112A and lower portions 110C, 112C extend parallel to the Z-axis direction, while the middle portions 110B, 112B extend downward at an angle so as to widen outward in the X-axis direction (arrows X1, X2).

[0145] The connecting members 110 and 112 of this embodiment each have a plate shape with a thickness in the Y-axis direction and are made of, for example, sheet metal. When viewed from the X-axis direction, the connecting members 110 and 112 are flat.

[0146] 16 and 17 are a front view and a side view showing the state in which the connecting members 110 and 112 are attached to the mounting head 26. FIG.

[0147] As shown in Figure 16, even if the second blocks 106, 108, where the lower ends of the connecting members 110, 112 are attached, are positioned outside in the X-axis direction relative to the second bracket 64, where the upper ends of the connecting members 110, 112 are attached, the connecting members 110, 112 can be installed without interfering with the shaft 45 or the offset block 44.

[0148] 17 , the motor unit 60 and shaft holder 66 of this embodiment are cantilevered on one side in the Y-axis direction by mounting members 92, 94, and 96 (arrow Y3). Meanwhile, the nozzle units 40 and 50 are each provided with biasing members 150 and 152 that bias the shafts 45 and 55 upward, thereby positioning the component suction nozzles 41 and 51 in their upper standby positions. In order to operate the lift motors 42 and 52 to lower the shafts 45 and 55 against the biasing forces of the biasing members 150 and 152, the lift motors 42 and 52 must be operated with a driving force greater than the biasing force of the biasing members 150 and 152.

[0149] The mounting head 26 of this embodiment can simultaneously pick up multiple components from the component supply units 4 and 6 by simultaneously lowering the eight component suction nozzles 41A-41H of the first nozzle unit 40 or the eight component suction nozzles 51A-51H of the second nozzle unit 50. Therefore, when the eight shafts 45 or eight shafts 55 are simultaneously lowered, a resultant force F1 of the eight biasing members 150 or eight biasing members 152 acts on the shaft case 104, i.e., the shaft holder 66. Because the shaft holder 66 is cantilevered on the support frame 90 by the third mounting member 96, the third mounting member 96 bears most of the resultant force F1. Therefore, the downward resultant force F1 deforms the third mounting member 96 and the middle portion 120A and lower portion 120B of the support frame 90, displacing the shaft holder 66 along the dashed arrow R. Such displacement of the shaft holding portion 66 displaces the component suction nozzles 41, 51, which are the tips of the nozzle units 40, 50, to one side in the Y-axis direction (towards the support frame 90 (arrow S)), which may lead to an increase in pickup errors when picking up components with the component suction nozzles 41, 51.

[0150] In contrast, in the mounting head 26 of this embodiment, the motor unit 60 and the shaft holder 66 are connected by connecting members 110, 112 on the side opposite to the side supported by the support frame 90. As a result, part of the resultant force F1 is received by the first attachment member 92 and the second attachment member 94 via the connecting members 110, 112, which suppresses displacement of the shaft holder 66 in the direction of the dashed arrow R and keeps displacement of the component suction nozzles 41, 51 in the direction of the arrow S within an allowable range. This reduces pickup errors by the component suction nozzles 41, 51.

[0151] 16 , the cooling fan 114 is fixed to the brackets 63 and 64 by a fan fixing device 115. The fan fixing device 115 fixes the upper part of the cooling fan 114 to the first bracket 63 and the lower part of the cooling fan 114 to the second bracket 64 via fixing means such as screws (not shown).

[0152] Next, the peripheral configuration of the manifolds 70 and 80 will be described with reference to Figure 18 and subsequent drawings. Note that, since the manifolds 70 and 80 and their peripheral configurations have the same structure, the following description will mainly illustrate and describe the manifold 70 and its peripheral configuration.

[0153] 18 and 19 are perspective views showing the manifold 70 and its surrounding structure, and FIGS. 20 and 21 are perspective views showing the manifold 70 alone.

[0154] 18 and 19 , the manifold 70 has three surfaces: a first surface 70A (first side surface), a second surface 70B (second side surface), and a third surface 70C (top surface). The first surface 70A is a surface for attaching the valves 74 and 76, the second surface 70B is a surface for attaching the sensor board 78, and the third surface 70C is a surface for attaching a fixing member 79 ( FIG. 19 ) that fixes the I / O board 73.

[0155] 18 and 19 , the I / O board 73 is housed in a board housing box 154. A fixing member 79 shown in FIG. 19 fixes the board housing box 154 to the third surface 70C of the manifold 70, thereby fixing the I / O board 73 to the manifold 70.

[0156] As shown in Figure 20, a first surface 70A of manifold 70 is provided with a plurality of ports for connecting air flow path 71 of manifold 70 to valves 74, 76 (not shown). In the example shown in Figure 20, six rows of ports are provided vertically, including ports 160 (160A to 160H), ports 162 (162A to 162H), ports 164 (164A to 164H), ports 166 (166A to 166H), ports 168 (168A to 168H), and port 170.

[0157] Manifold 70 further incorporates a negative pressure flow path 172 and a positive pressure flow path 174 as air flow paths 71. Negative pressure flow path 172 and positive pressure flow path 174 are connected to a negative pressure source and a positive pressure source, respectively, via connecting members (not shown).

[0158] As shown in FIG. 21, the second surface 70B of the manifold 70 is provided with a plurality of ports for connecting the air flow passage 71 of the manifold 70 to the flow rate sensor of the sensor board 78 (not shown).

[0159] 21, ports 176 (176A to 176H) for communicating with the flow rate sensors of the sensor board 78 and recesses 178 (178A to 178H) different from the ports 176 are provided alternately. The recesses 178 are shaped to allow components different from the flow rate sensors of the sensor board 78 (for example, resistance components) to be placed therein and to allow them to escape, and do not communicate with the air flow path 71.

[0160] Fig. 22 is a perspective view of the sensor board 78. Figs. 23 and 24 are vertical cross-sectional views for explaining a method of attaching the sensor board 78 to the manifold 70.

[0161] As shown in FIG. 22, the sensor board 78 includes a board main body 180 , a plurality of flow sensors 182 ( 182 A to 182 H), and an I / O chip 183 .

[0162] The board main body 180 is a plate-shaped board on which a flow sensor 182 and other electrical components are mounted. The flow sensor 182 is a component for measuring the flow rate of air flowing through the terminal flow paths 161 (161A to 161H) in the air flow path 71 of the manifold 70. The multiple flow sensors 182 are arranged in a row with spaces between them, and are inserted into each of the multiple ports 176 of the manifold 70 shown in FIG.

[0163] The I / O chip 183 is a chip electrically connected to each of the plurality of flow sensors 182. The I / O chip 183 is electrically connected to each of the flow sensors 182 through wiring formed on the substrate main body 180. The I / O chip 183 is connected to the I / O substrate 73 (FIG. 18) through wiring (not shown).

[0164] 23 , each flow sensor 182 of the present embodiment has two connection portions 184, and the port 176 of the manifold 70 also has two corresponding recesses 177. The two recesses 177 are connected to the terminal flow path 161 by branch flow paths 179. One branch flow path 179 is formed downstream of the other branch flow path 179. With the two connection portions 184 inserted into the two recesses 177, the substrate main body 180 is fixed to the second surface 70B of the manifold 70 using fixing members such as screws (not shown), thereby fixing the flow sensor 182 in a state connected to the terminal flow path 161.

[0165] As shown in FIG. 24 , a sensor board 78 is attached to the manifold 70, and a flow rate sensor 182 is connected to the terminal flow path 161 of the air flow path 71 of the manifold 70, making it possible to measure the flow rate of air flowing through the terminal flow path 161 with the flow rate sensor 182.

[0166] Next, the air flow path 71 of the manifold 70 will be described with reference to FIG. 25 and subsequent figures.

[0167] FIG. 25 is a vertical cross-sectional view of the air flow path 71 of the manifold 70, and FIG. 26 is a diagram showing the connection relationship of the air flow path 71 of the manifold 70.

[0168] As shown in FIG. 25, port 160 is labeled (A), port 162 is labeled (B), port 164 is labeled (C), port 166 is labeled (D), port 168 is labeled (E), and port 170 is labeled (F).

[0169] As shown in Figure 25, in addition to the negative pressure flow path 172 and the positive pressure flow path 174, the air flow path 71 has a terminal flow path 161 (161A to 161H), a negative pressure intake flow path 163 (163A to 163H), a connecting flow path 167 (167A to 167H), and a positive pressure intake flow path 175 (175A to 175H).

[0170] The port 160 is the most upstream end of the terminal flow passage 161 and is a connection port that connects the terminal flow passage 161 to the valve 74 (first valve device). The terminal flow passage 161 communicates with the connection portion 186 of the manifold 71. The terminal flow passage 161 is a flow passage that runs from the valve 74 (first valve device) to the component suction nozzle 74. The upstream portion of the terminal flow passage 161 is formed inside the manifold 70, and the port 160 is the starting point of the terminal flow passage 161.

[0171] An air filter 188 is disposed between the terminal flow passage 161 and the connecting portion 186. The connecting hose 72 (FIG. 4) is connected to the connecting portion 186, and the air flowing through the terminal flow passage 161 is supplied to the component suction nozzle 41.

[0172] Ports 162 and 164 both communicate with port 160 via valve 74. Port 162 communicates with negative pressure flow path 172 via negative pressure inlet flow path 163, and is supplied with negative pressure air. Negative pressure inlet flow path 163 is a flow path for drawing the negative pressure supplied to negative pressure flow path 172 into valve 74, with one end connected to port 162 and the other end connected to negative pressure flow path 172. Port 164 communicates with upper port 166 via connecting flow path 167. Connecting flow path 167 is a flow path for connecting two valves 74 and 76 that constitute the valve device to each other, with one end connected to port 164 and the other end connected to port 166.

[0173] Both ports 168 and 170 communicate with port 168 via valve 76. Port 168 communicates with positive pressure flow path 174 via positive pressure inlet flow path 175, and positive pressure air is supplied to port 168. Positive pressure inlet flow path 175 is a flow path for drawing the positive pressure supplied to positive pressure flow path 174 into valve 76, and one end is connected to port 168 and the other end is connected to positive pressure flow path 174. Port 170 is a groove formed in the first surface 70A in the X-axis direction, and is open to the atmosphere.

[0174] 26 , the valve 74 switches between connecting the port 160(A) to the port 162(B) and connecting it to the port 164(C). When the port 160(A) is connected to the port 162(B), negative pressure air is supplied from a negative pressure source, one of the air supply sources, to the component suction nozzle 41 connected to the end of the terminal flow path 161 via the port 162(B) and the negative pressure intake flow path 163. When the port 160(A) is connected to the port 164(C), air upstream of the valve 74 is supplied to the component suction nozzle 41 via the port 164(C), the connecting flow path 167, and the port 166(D).

[0175] The valve 76 switches between connecting the port 166(D) to the port 168(E) and connecting it to the port 170(F). When the port 166(D) is connected to the port 168(E), positive pressure air is supplied from a positive pressure source, which is one of the air supply sources, to the downstream side of the port 166(D) via the port 168(E) and the positive pressure intake flow path 175. When the port 166(D) is connected to the port 170(F), the air pressure in the connecting flow path 167, the terminal flow path 161, and the component suction nozzle 41 downstream of the port 166(D) becomes atmospheric pressure via the port 170(F), which is open to atmospheric pressure.

[0176] According to the above configuration, (1) when the valve 74 connects port 160(A) to port 162(B), negative air pressure is supplied to the component suction nozzle 41; (2) when the valve 74 connects port 160(A) to port 164(C) and the valve 76 connects port 166(D) to port 168(E), positive air pressure is supplied to the component suction nozzle 41; and (3) when the valve 74 connects port 160(A) to port 164(C) and the valve 76 connects port 166(D) to port 170(F), the component suction nozzle 41 is opened to the atmosphere, and the air pressure inside it becomes atmospheric pressure.

[0177] In this way, by switching the connection state between the ports through the operation of the two valves 74, 76, it is possible to supply (connect) one type of air selected from three types of air: negative pressure air, positive pressure air, and atmospheric pressure air to each of the multiple component suction nozzles 41.

[0178] 18 and 19 , in the manifold 70, the valves 74 and 76 are attached to the first surface 70A, the sensor board 78 is attached to the second surface 70B, and the I / O board 73 is attached to the third surface 70C. By using each surface of the manifold 70 to attach each component in this way, the space around the manifold 70 can be used effectively, leading to a reduction in the size of the mounting head 26.

[0179] Furthermore, by arranging the I / O board 73 above the valves 74, 76 and the sensor board 78, and by arranging the main board 39 above the I / O board 73, the main board 39, I / O board 73, valves 74, 76, and sensor board 78 are located in that order from top to bottom. This allows for easy attachment and detachment of each wire.

[0180] FIG. 27 is a block diagram showing a control system in the component mounting apparatus 2 including two mounting heads 26A and 26B.

[0181] 27 , the main body control unit 36 ​​is electrically connected to the main board 39 (head control unit) of each of the two mounting heads 26A and 26B via a communication cable. In each of the mounting heads 26A and 26B, the main board 39 is electrically connected to an I / O board 73 (first I / O control unit), lift motors 42 and 52 (Z-axis drive units), and rotary motors 100 and 102.

[0182] The main board 39 is connected to the I / O board 73 via a serial communication cable 211 (first serial communication wiring), and the I / O board 73 is further electrically connected to the I / O board 83 (second I / O control unit) via a serial communication cable 213 (third serial communication wiring). As a result, the main board 39 is connected to the I / O board 73 and the I / O board 83 in a state where they can communicate with each other via serial communication.

[0183] The I / O board 73 is further electrically connected to the sensor board 78 via a communication cable 212 for serial communication (second wiring for serial communication). As described above, the sensor board 78 has an I / O chip 183 connected to each of the flow sensors 182A to 182H, and the communication cable 212 for serial communication is connected to the I / O chip 183. This makes it possible to connect the I / O board 73 and the sensor board 78 with a single communication cable 212.

[0184] The I / O board 73 is further electrically connected to a plurality of valves 74A to 74H and a plurality of valves 76A to 76H. The I / O board 73 is connected to each of the valves 74A to 74H and 76A to 76H by a single cable.

[0185] Similarly, the I / O board 83 is electrically connected to the sensor board 88 via a single communication cable 214 for serial communication (fourth serial communication wiring), and is further electrically connected to a plurality of valves 84A to 84H and a plurality of valves 86A to 86H via individually provided cables.

[0186] In this way, I / O boards 73 and 83 are provided, and flow sensors 182A to 182H, valves 74A to 74H, and valves 76A to 76H are collectively connected to I / O board 73, and flow sensors 192A to 192H, valves 84A to 84H, and valves 86A to 86H are collectively connected to I / O board 83. Furthermore, I / O board 83 is connected to I / O board 73, and I / O board 73 is connected to main board 39. Also, flow sensors 182A to 182H are collectively mounted on a single sensor board 78, and sensor board 78 and I / O board 73 are connected by wiring for serial communication. Similarly, flow sensors 192A to 192H are collectively mounted on a single sensor board 88, and sensor board 88 and I / O board 83 are connected by wiring for serial communication.

[0187] According to the above configuration, the internal wiring of the mounting head 26 is simplified, and therefore the weight of the mounting head 26 can be reduced.

[0188] According to the above configuration, when performing maintenance on the valves 74, 76, 84, 86 or the flow rate sensors 182, 192, it is only necessary to remove the wiring between the relevant component and the I / O boards 73, 83, without removing the wiring to the upstream main board 39. This eliminates the need to remove other unrelated wiring or remove the head cover 38 that covers the main board 39, thereby improving the ease of maintenance work.

[0189] (Effect 1: Cantilever structure) As described above, the mounting head 26 of this embodiment includes: a plurality of shafts 45 to which component suction nozzles 41 are connected and which are arranged side by side in the X-axis direction (first direction) intersecting the Z-axis direction (lifting and lowering direction); a plurality of lifting motors 42 provided corresponding to each of the plurality of shafts 45 and which raise and lower the shafts 45; a first bracket 63 which holds the plurality of lifting motors 42 at a first height position; a second bracket 64 which holds the plurality of lifting motors 42 at a second height position lower than the first height position; a support frame 90 which extends along the Z-axis direction; an attachment member 92 (first attachment member) which attaches the first bracket 63 to the support frame 70 in a cantilevered state; and an attachment member 94 (second attachment member) which attaches the second bracket 64 to the support frame 70 in a cantilevered state.

[0190] According to this configuration, the individual lifting motors 42 are held by the first bracket 63 and the second bracket 64, thereby reducing the weight of the motor unit 60, and the rigidity of the mounting head 26 as a whole is ensured by the structure in which the brackets 63, 64 are attached to the support frame 90 by the attachment members 92, 94. This eliminates the need to manufacture the motor unit 60 itself with high rigidity, making it easier to achieve both lightweight mounting head 26 and ensure its rigidity.

[0191] Furthermore, in the mounting head 26 of this embodiment, the mounting members 92 and 94 are provided in pairs spaced apart in the X-axis direction. This configuration makes it possible to achieve both weight reduction and rigidity.

[0192] Furthermore, in the mounting head 26 of this embodiment, the support frame 90 has at least two pillars 120, 122 extending in the Z-axis direction and at least two beams 124, 126 extending in the X-axis direction, and has a ladder structure in which the pillars 120, 122 are connected by the beams 124, 126. With this configuration, the support frame 90 has a ladder structure, which reduces the weight of the support frame 90 and leads to a reduction in the weight of the mounting head.

[0193] The mounting head 26 of the embodiment further includes a shaft holding portion 66 that holds the plurality of shafts 45 at a third height position that is lower than the second height position so that the shafts 45 can be raised and lowered, and an attachment member 96 (third attachment member) that attaches the shaft holding portion 66 in a cantilevered state to the support frame 90. With this configuration, the shaft holding portion 66 can be fixed to the support frame 90 that fixes the motor unit 60, which leads to a reduction in the number of parts and thus a weight reduction of the mounting head.

[0194] Moreover, the mounting head 26 of this embodiment further includes a rotary motor 100 for rotating the plurality of shafts 45, and the shaft holding unit 66 has a second block 106 that is disposed outward in the X-axis direction relative to the plurality of shafts 45 so as to support the rotary motor 100, and the mounting member 96 is attached to the second block 106. This ensures a large space between the mounting members 96, allowing the manifolds 70, 80, valve devices, and the like to be disposed close to the shaft holding unit 66, which leads to a reduction in the size of the mounting head 26.

[0195] Furthermore, the mounting head 26 of the embodiment further includes cooling fans 114, 116 that blow air along the Y-axis direction (second direction) that intersects with the Z-axis direction (lift direction) and the X-axis direction (first direction) onto the multiple lift motors 42. With this configuration, the exposed lift motors 42 can be directly air-cooled, which leads to a reduction in the weight of the mounting head 26 by making the cooling fans 114, 116 smaller.

[0196] Furthermore, in the mounting head 26 of this embodiment, the multiple shafts 45 are arranged in two rows spaced apart in the Y-axis direction, and the cooling fans 114, 116 include a first cooling fan 114 that blows air onto the multiple lift motors 42 from one side in the Y-axis direction, and a second cooling fan 116 that blows air onto the multiple lift motors 42 from the other side in the Y-axis direction. With this configuration, even in a mounting head 26 equipped with two rows of nozzle units 40, the exposed lift motors 42 can be directly air-cooled, which leads to a reduction in the weight of the mounting head 26 by making the cooling fans 114, 116 smaller.

[0197] As described above, the component mounting device 2 of the embodiment includes a mounting head 26, a component supply unit 4 that supplies components to the component suction nozzle 41 of the mounting head 26, and a substrate transport mechanism 10 that transports the substrate W1 on which the components are mounted by the mounting head 26.

[0198] With this configuration, a lightweight and compact mounting head 26 is used, which allows the mounting head 26 to move faster and suppresses vibrations associated with the movement of the mounting head 26, leading to the realization of a highly productive and highly accurate component mounting device 2.

[0199] (Action effect 2: Connecting member (suspender)) As described above, the mounting head 26 of this embodiment comprises a plurality of nozzle units 40, each of which has a shaft 45 to which a component suction nozzle 41 is connected, arranged side by side in the X-axis direction (first direction) that intersects the Z-axis direction (lifting direction), a motor unit 60 having a plurality of lifting motors 42 that raise and lower each of the shafts 45, a shaft holding portion 66 that is arranged below the motor unit 60 and holds the plurality of shafts 45 so that they can be raised and lowered, and a support frame 90 to which the motor unit 60 and the shaft holding portion 66 are attached, and at least the shaft holding portion 66 is attached to the support frame 90 in a cantilevered state in the Y-axis direction (second direction) that intersects the Z-axis direction and the X-axis direction, and further comprises connecting members 110, 112 that connect the motor unit 60 and the shaft holding portion 66 vertically.

[0200] With this configuration, the shaft holder 66 is attached to the support frame 90 in a cantilevered manner, simplifying the structure and reducing the weight of the mounting head 26. However, when the lift motor 42 is driven to raise and lower the shaft 45, the shaft holder 66 attached to the support frame 90 in a cantilevered manner tends to displace downward, causing the component suction nozzle 41 attached to the tip of the shaft 45 to easily shift (displace) in the horizontal direction (second direction). However, by providing the connecting members 110 and 112, the component suction nozzle 41 is prevented from tipping over. This makes it possible to achieve a mounting head 26 that is both rigid and lightweight.

[0201] Furthermore, in the mounting head 26 of this embodiment, the connecting members 110, 112 are disposed on the opposite side of the motor unit 60 and the shaft holder 66 in the Y-axis direction from the side on which the support frame 90 is disposed. With this configuration, by disposing the connecting members 110, 112 on the opposite side of the support frame 90, it is possible to further suppress displacement of the component suction nozzle 41 when the shaft 45 is raised and lowered.

[0202] Furthermore, the mounting head 26 of this embodiment further includes a biasing member 150 that biases each of the multiple shafts 45 upward toward the standby position, and each of the lift motors 42 lowers the shaft 45 by pressing the shaft 45 downward against the biasing member 150. With this configuration, when the shaft 45 is lowered due to the biasing member 150, a downward load is applied to the shaft holding portion 66 by the repulsive force of the biasing member 150. However, by providing the connecting members 110 and 112, it is possible to suppress displacement of the shaft holding portion 66 due to this load, and ultimately to suppress misalignment of the component suction nozzle 41.

[0203] Furthermore, the mounting head 26 of this embodiment further includes a main body control unit 36 ​​(control unit), which can control the multiple lifting motors 42 to simultaneously lower the multiple shafts 45 from the standby position. With this configuration, when the multiple shafts 45 are lowered simultaneously, a large load is applied to the shaft holding unit 66 due to the repulsive forces of the multiple biasing members 150. However, even in this case, it is possible to suppress displacement of the shaft holding unit 66 and, ultimately, misalignment of the component suction nozzle 41.

[0204] Furthermore, in the mounting head 26 of this embodiment, the connecting members 110, 112 have a plate-like shape with a thickness in the Y-axis direction. With this configuration, it is possible to suppress an increase in the weight of the mounting head 26 due to the addition of the connecting members 110, 112, and to realize a mounting head 26 that is both rigid and lightweight.

[0205] Furthermore, in the mounting head 26 of this embodiment, the connecting members 110 and 112 are made of sheet metal. With this configuration, it is possible to suppress an increase in the weight of the mounting head 26 due to the addition of the connecting members 110 and 112, and to realize a mounting head 26 that is both rigid and lightweight.

[0206] Furthermore, in the mounting head 26 of this embodiment, the connecting members 110, 112 have a flat shape when viewed in the X-axis direction from the first end connected to the motor unit 60 to the second end connected to the shaft holding portion 66. This configuration can more effectively suppress displacement of the shaft holding portion 66 and misalignment of the component suction nozzle 41 than when the connecting members 110, 112 have a non-flat shape when viewed in the X-axis direction.

[0207] Furthermore, in the mounting head 26 of this embodiment, the motor unit 60 has brackets 63, 64 that hold the multiple lift motors 42, and the connecting members 110, 112 are connected to the brackets 63, 64. With this configuration, the connecting members 110, 112 can be easily installed.

[0208] Furthermore, in the mounting head 26 of the embodiment, the brackets 63, 64 have a first bracket 63 that holds the multiple lifting motors 42 at a first height position and a second bracket 64 that holds the motors 42 at a second height position that is lower than the first height position, and the connecting members 110, 112 are connected to the second bracket 64. With this configuration, the connecting members 110, 112 can be easily installed.

[0209] As described above, the component mounting device 2 of the embodiment includes a mounting head 26, a component supply unit 4 that supplies components to the component suction nozzle 41 of the mounting head 26, and a substrate transport mechanism 10 that transports the substrate W1 on which the components are mounted by the mounting head 26.

[0210] With this configuration, a lightweight and compact mounting head 26 is used, which allows the mounting head 26 to move faster and suppresses vibrations associated with the movement of the mounting head 26, leading to the realization of a highly productive and highly accurate component mounting device 2.

[0211] (Effect 3: Offset Block) As described above, the mounting head 26 of this embodiment includes a plurality of shafts 45 (first shafts) to which the component suction nozzles 41 are connected and which are arranged side by side in the X-axis direction (first direction) that intersects the Z-axis direction (lifting and lowering direction), a plurality of lift motors 42 (first lift motors) which are arranged side by side in the X-axis direction corresponding to each of the shafts 45 and which raise and lower the shafts 45, a plurality of shafts 55 (second shafts) which are arranged at positions spaced apart from the plurality of shafts 45 in the Y-axis direction (second direction) that intersects the Z-axis direction and the X-axis direction, a plurality of lift motors 52 (second lift motors) which are arranged side by side in the X-axis direction corresponding to each of the shafts 55 and which raise and lower the shafts 55, and an offset block 44 (first offset block) which connects the shaft 45 to the output shaft 43 (first output shaft) of the lift motor 42 so that the shaft 45 is offset in the Y-axis direction relative to the output shaft 43.

[0212] With this configuration, the pitch of shafts 45 and 55 and the pitch of lift motors 42 and 52 can be made different from each other in terms of the pitch in the Y-axis direction, and the lift motors 42 and 52 can be arranged at a narrow pitch, making it easier to make the mounting head 26 smaller and lighter.

[0213] Furthermore, the mounting head 26 of the embodiment further includes an offset block 54 (second offset block) that connects the shaft 55 and the output shaft 43 so as to offset the shaft 55 in the Y-axis direction relative to the output shaft 43 (second output shaft) of the lift motor 52, and the offset direction of the shaft 45 by the offset block 44 is opposite to the offset direction of the shaft 55 by the offset block 54. With this configuration, by reversing the offset directions, it becomes easier to make the pitch between the shaft 45 and the shaft 55 different from the pitch between the lift motor 42 and the lift motor 52.

[0214] Furthermore, in the mounting head 26 of the embodiment, the offset block 44 offsets the shaft 45 in the Y-axis direction away from the shaft 55, and the offset block 54 offsets the shaft 55 in the Y-axis direction away from the shaft 45. With this configuration, the lift motors 42 and 52 can be arranged at a narrow pitch, which makes it easier to reduce the size and weight of the multiple lift motors 42, 52, which are heavy objects.

[0215] The mounting head 26 of the embodiment further includes brackets 63, 64 that hold the plurality of lift motors 42 and the plurality of lift motors 52, and a shaft holding portion 66 below the brackets 63, 64 that holds the plurality of shafts 45 and the plurality of shafts 55 so that they can be raised and lowered, the brackets 63, 64 hold the lift motors 42 and the lift motors 52 with the output shafts 43 and 53 of the lift motors 42 and 52 facing downward, the shaft holding portion 66 holds the shafts 45 and 55 with them protruding upward from the shaft holding portion 66, and the offset blocks 44 and 54 are located between the brackets 63, 64 and the shaft holding portion 66. This configuration makes it easier to reduce the size and weight of the mounting head 26.

[0216] As described above, the component mounting device 2 of the embodiment includes a mounting head 26, a component supply unit 4 that supplies components to the component suction nozzles 41, 51 of the mounting head 26, and a substrate transport mechanism 10 that transports the substrate W1 on which the components are mounted by the mounting head 26.

[0217] Such a configuration leads to a reduction in the weight and size of the mounting head 26 .

[0218] (Effect 4: Serial communication wiring) As described above, the mounting head 26 of this embodiment includes a plurality of component suction nozzles 41 (first component suction nozzles), a plurality of valves 74, 76 (first valve devices) provided to correspond individually to the plurality of component suction nozzles 41 and selectively connecting one of a plurality of air supply sources, a plurality of flow sensors 182 (first flow sensors) provided to correspond individually to the plurality of component suction nozzles 41 and measuring the flow rate of air supplied to the component suction nozzles 41, an I / O board 73 (first I / O control unit) to which the plurality of valves 74, 76 and the plurality of flow sensors 182 are electrically connected, and a main board 39 (head control unit) connected to the I / O board 73 via a communication cable 211 (first serial communication wiring).

[0219] According to this configuration, the flow sensor 182 and the valves 74, 76 are first connected to the I / O board 73 via wiring for serial communication, and then connected to the main board 39. This makes it possible to reduce wiring, for example, by eliminating the need to remove the wiring around the main board 39 when performing maintenance around the manifold 70.

[0220] The mounting head 26 of the embodiment further includes a sensor board 78 (first sensor board) on which a plurality of flow sensors 182 are mounted, and the sensor board 78 and the I / O board 73 are connected by a communication cable 212 (wiring for second serial communication). This configuration makes it easy to attach the flow sensors 182 to the manifold 70.

[0221] Furthermore, in the mounting head 26 of the embodiment, the sensor board 78 has one I / O chip 183 electrically connected to each of the flow sensors 182, and the I / O chip 183 is connected to the I / O board 73 via a communication cable 212 (wiring for second serial communication). With this configuration, it is possible to reduce the amount of wiring compared to when wiring is prepared for each flow sensor 182 and connected to the I / O board 73.

[0222] The mounting head 26 of this embodiment also has a manifold 70 (first manifold) having air flow paths 71 (first air flow paths) connected to the multiple component suction nozzles 41. The manifold 70 has a first surface 70A on which valves 74 and 76 are attached, and a second surface 70B located opposite the first surface 70A on which a flow sensor 182 is attached. With this configuration, using the two opposing surfaces of the manifold 70, the first surface 70A and the second surface 70B, leads to space savings.

[0223] In the mounting head 26 of the embodiment, the I / O board 73 is attached to the manifold 70. With this configuration, the I / O board 73 can be installed using the manifold 70.

[0224] Furthermore, in the mounting head 26 of the embodiment, the manifold 70 has a first surface 70A on which the valves 74, 76 are attached, a second surface 70B on which the flow sensor 182 is attached, and a third surface 70C on which the I / O board 73 is attached. With this configuration, the valves 74, 76, the flow sensor 182, and the I / O board 73 can be attached using each surface of the manifold 70, which leads to space savings.

[0225] Furthermore, in the mounting head 26 of the embodiment, the first surface 70A and the second surface 70B are side surfaces of the manifold 70 that face each other, and the third surface 70C is the top surface of the manifold 70. With this configuration, the space around the manifold 70 can be effectively utilized, making it easy to reduce the size of the mounting head 26.

[0226] Furthermore, in the mounting head 26 of the embodiment, the I / O board 73 is indirectly attached to the manifold 70 via a fixing member 79. With this configuration, the I / O board 73 can be disposed at a position away from the manifold 70, and space can be effectively utilized, for example, space can be secured for arranging wiring.

[0227] In the mounting head 26 of this embodiment, the valves 74, 76 are configured as two valves: an upstream valve 76 and a downstream valve 74. With this configuration, by using two valves 74, 76, it is possible to selectively supply air to the component suction nozzle 41 from one of three air supply sources, for example.

[0228] The mounting head 26 of the embodiment further includes a plurality of component suction nozzles 51 (second component suction nozzles), a plurality of valves 84, 86 (second valve devices) respectively provided to the component suction nozzles 51 and selectively connecting one of a plurality of air supply sources, a plurality of flow sensors 192 (second flow sensors) respectively provided to the component suction nozzles 51 and measuring the flow rate of air supplied to the component suction nozzles 51, and an I / O board 83 (second I / O control unit) to which the valves 84, 86 and the flow sensors 192 are electrically connected, and the I / O board 83 is connected to the I / O board 73 via a communication cable 213 (third wiring for serial communication). With this configuration, even if there are two manifolds 70, 80 and two I / O boards 73, 83, by connecting the two I / O boards 73, 83 via serial communication, it is sufficient to connect only one of the I / O boards 73 to the main board 39, thereby reducing the wiring required.

[0229] In addition, the mounting head 26 of the embodiment further includes a sensor board 88 (second sensor board) on which a plurality of flow sensors 192 are mounted, and the sensor board 88 and the I / O board 83 are connected by a communication cable 214 (wiring for fourth serial communication).

[0230] In addition, in the mounting head 26 of the embodiment, the sensor board 88 has one I / O chip 193 electrically connected to each of the flow sensors 192, and the I / O chip 193 is connected to the I / O board 83 via a communication cable 214 (wiring for the fourth serial communication).

[0231] In addition, the mounting head 26 of the embodiment further has a manifold 80 (second manifold) having an air flow path 81 (second air flow path) connected to multiple component suction nozzles 51, and the manifold 80 has a first surface 80A on which valves 84 and 86 are attached, and a second surface 80B located opposite the first surface 80A and on which a flow sensor 192 is attached.

[0232] In the mounting head 26 of the embodiment, the I / O board 83 is attached to the manifold 80 .

[0233] In the mounting head 26 of this embodiment, the manifold 78 has a first surface 80A on which the valves 84 and 86 are attached, a second surface 80B on which the flow sensor 192 is attached, and a third surface 80C on which the I / O board 83 is attached.

[0234] In the mounting head 26 of the embodiment, the first surface 80A and the second surface 80B are side surfaces of the manifold 80 that face each other, and the third surface 80C is the upper surface of the manifold 80.

[0235] In the mounting head 26 of the embodiment, the I / O board 83 is indirectly attached to the manifold 80 via the fixing member 89 .

[0236] In the mounting head 26 of this embodiment, the valves 84 and 86 are composed of two valves: an upstream valve 86 and a downstream valve 84 .

[0237] As described above, the component mounting device 2 of the embodiment includes a mounting head 26, a component supply unit 4 that supplies components to the component suction nozzle 41 of the mounting head 26, and a substrate transport mechanism 10 that transports the substrate W1 on which the components are mounted by the mounting head 26.

[0238] With this configuration, it is possible to reduce the amount of wiring.

[0239] (Others) Although the present disclosure has been described above using the above-mentioned embodiments, the present disclosure is not limited to the above-mentioned embodiments.

[0240] Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various variations and modifications will be apparent to those skilled in the art. Such variations and modifications should be understood to be included within the scope of the present disclosure as defined by the appended claims, unless they depart therefrom. Furthermore, changes in the combination and order of elements in each embodiment may be made without departing from the scope and spirit of the present disclosure.

[0241] The present disclosure is applicable to any mounting head and component mounting device including the same.

[0242] 2 Component mounting device 4, 6 Component supply unit 10, 12 Board transport mechanism 26 Mounting head 26A First mounting head 26B Second mounting head 36 Main body control unit (control unit) 39 Main board (head control unit) 40 First nozzle unit 41 First component suction nozzle 42 First lift motor 43 First output shaft 44 First offset block 45 First shaft 50 Second nozzle unit 51 Second component suction nozzle 52 Second lift motor 53 Second output shaft 54 ​​Second offset block 55 Second shaft 60 Motor unit 63 First bracket 64 Second bracket 66 Shaft holding unit 70 First manifold 71 First air flow path 73 I / O board (first I / O control unit) 74, 76 Valve (first valve device) 78 First sensor board 80 Second manifold 81 Second air flow path 83 I / O board (second I / O control unit) 84, 86 Valve (second valve device) 88 Second sensor board 90 Support frame 92 First mounting member 94 Second mounting member 96 Third mounting member 100 First rotary motor 102 Second rotary motor 104 First block 105 Shaft case 106, 108 Second block 110 First connecting member 112 Second connecting member 161 Terminal flow path 182 First flow sensor 192 Second flow sensor 211 Communication cable (wiring for first serial communication) 212 Communication cable (wiring for second serial communication) 213 Communication cable (wiring for third serial communication) 214 Communication cable (wiring for fourth serial communication)

Claims

1. A mounting head comprising: a plurality of shafts to which component suction nozzles are connected and which are arranged side by side in a first direction intersecting a lifting direction; a plurality of lifting motors provided corresponding to each of the plurality of shafts and which raise and lower the shaft; a first bracket which holds the plurality of lifting motors at a first height position; a second bracket which holds the plurality of lifting motors at a second height position lower than the first height position; a support frame extending along the lifting direction; a first attachment member which attaches the first bracket to the support frame in a cantilevered manner; and a second attachment member which attaches the second bracket to the support frame in a cantilevered manner.

2. The mounting head according to claim 1, wherein the first mounting members and the second mounting members are provided in pairs spaced apart in the first direction.

3. The mounting head according to claim 1, wherein the support frame has at least two pillars extending in the lifting direction and at least two beams extending in the first direction, and has a ladder structure in which the at least two pillars are connected by the at least two beams.

4. A mounting head as described in claim 1, further comprising: a shaft holding portion that holds the plurality of shafts so that they can be raised and lowered at a third height position that is lower than the second height position; and a third mounting member that attaches the shaft holding portion to the support frame in a cantilevered manner.

5. A mounting head as described in claim 4, further comprising a rotary motor for rotating the plurality of shafts, wherein the shaft holding portion has a block arranged outside the plurality of shafts in the first direction so as to support the rotary motor, and the third mounting member is attached to the block.

6. The mounting head according to claim 1, further comprising a cooling fan that blows air onto said plurality of lifting motors in a second direction that intersects with said lifting direction and said first direction.

7. A mounting head as described in claim 6, wherein the plurality of shafts are arranged in two rows spaced apart in the second direction, and the cooling fans include a first cooling fan that blows air onto the plurality of lift motors from one side in the second direction, and a second cooling fan that blows air onto the plurality of lift motors from the other side in the second direction.

8. A component mounting device comprising: the mounting head according to any one of claims 1 to 7; a component supply unit that supplies components to the component suction nozzle of the mounting head; and a board transport mechanism that transports a board on which components are to be mounted by the mounting head.

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