Detector and microscope

Abstract

A detector (10) comprises: a diamond substrate (13) having an NV center (131); a first substrate (11) positioned so as to face one surface (13a) of the diamond substrate (13); a second substrate (14) having an opening (14S) that is a through-hole extending in the thickness direction; and a radiator (12) positioned on the first substrate (11).

Description

Detectors and microscopes

[0001] The present disclosure relates to detectors and microscopes.

[0002] Patent Document 1 discloses a magnetic measurement device using a diamond crystal and an image sensor. The technology described in Patent Document 1 is composed of an excitation light source, an image sensor, a lens, a dichroic mirror, and a diamond crystal, and receives light emitted from nitrogen-vacancy pairs (NV centers) that are associated one-to-one with multiple pixels of the image sensor, with the associated pixels receiving the light.

[0003] JP 2016-008961 A

[0004] A detector according to one embodiment comprises a diamond substrate having an NV center, a first substrate positioned opposite one surface of the diamond substrate, a second substrate having a through hole extending in the thickness direction, and an emitter positioned on the first substrate, wherein at least a portion of the diamond substrate, the first substrate, and the emitter are accommodated within the through hole of the second substrate.

[0005] A microscope according to one embodiment includes the above-mentioned detector, a first light source that irradiates excitation light onto the NV center, a second light source having a wavelength different from that of the first light source, an optical component that dims the light incident on the objective lens, an objective lens positioned between the optical component and an object, and an imaging lens that forms an image based on light of the wavelength of the second light source.

[0006] FIG. 1 is a schematic diagram illustrating an example of a microscope according to a first embodiment. FIG. 2 is a schematic diagram illustrating an example of a detector according to the first embodiment. FIG. 3 is a schematic diagram illustrating an example of a microscope according to a second embodiment. FIG. 4 is a schematic diagram illustrating an example of a microscope according to a third embodiment. FIG. 5 is a schematic diagram illustrating an example of a microscope according to a fourth embodiment. FIG. 6 is a schematic diagram illustrating an example of a detector according to a fifth embodiment. FIG. 7 is a schematic diagram illustrating an example of a detector according to a sixth embodiment.

[0007] A detector and a microscope according to the first embodiment will be described below. Fig. 1 is a schematic diagram illustrating an example of a microscope according to the first embodiment. Fig. 2 is a schematic diagram illustrating an example of a detector according to the first embodiment.

[0008] [First embodiment] (Microscope) A microscope 1 is capable of capturing a magnetic image showing a magnetic field generated in an object 300, and an optical image of the surface of the object 300. The microscope 1 includes a detector 10, a first light source 26, a second light source 27, an objective lens 28, an imaging lens 29, optical components 30, and a photoreceiver 40 which is an imager.

[0009] The object 300 is an object to be detected by the detector 10, in other words, a sample. A magnetic field is generated in the object 300 when a current flows through a circuit. The detector 10 detects the magnetism generated in the object 300. The surface of the object 300 detected by the detector 10 is captured as an image.

[0010] (Detector) The detector 10 is a diamond magnetic sensor. The detector 10 is for detecting magnetism generated in the object 300 to be detected. The detector 10 is capable of detecting magnetism generated by the object 300. The detector 10 is positioned between the objective lens 28 of the microscope 1 and the object 300. The detector 10 includes a first substrate 11, a radiator 12, a diamond substrate 13, and a second substrate 14.

[0011] The first substrate 11 is an antenna substrate. The first substrate 11 is a transparent substrate. The first substrate 11 is a substrate that can transmit at least one of green light, red light, white light, and microwaves. A diamond substrate 13 is located on the surface 11b of the first substrate 11. A radiator 12 is located on the surface 11b of the first substrate 11 that faces the diamond substrate 13. The first substrate 11 has an outer shape that is smaller than the opening 14S, which is a through hole extending in the thickness direction of the second substrate 14. The diamond substrate 13 is bonded to the central portion of the first substrate 11, which is exposed from the opening 14S. The outer periphery of the first substrate 11 is bonded onto the step portion 141 of the second substrate 14.

[0012] The radiator 12 applies microwaves to the NV center 131. The radiator 12 is, for example, a micro loop antenna. The opening located in the center of the loop in the micro loop antenna is an optical window that guides at least one of green light, red light, and white light. The radiator 12 has, for example, a frequency of 2.8 GHz or more and 2.9 GHz or less. The radiator 12 has, for example, an input power of -20 dBm or more and +20 dBm or less.

[0013] In the detector 10, the radiator 12 generates a near electromagnetic field of microwaves transmitted from a microwave source (not shown). The radiator 12 is located on the surface 11b of the first substrate 11. The radiator 12 applies microwaves to the NV centers 131 of the diamond substrate 13. The radiator 12 transmits microwaves to be irradiated to the NV centers 131 of the diamond substrate 13. A high-frequency transmission line 122 is connected to the radiator 12.

[0014] The high-frequency transmission line 122 connects the radiator 12 and the high-frequency connector 123. At least a portion of the high-frequency transmission line 122 is located on the surface 11b of the first substrate 11 that faces the diamond substrate 13. At least a remaining portion of the high-frequency transmission line 122 is located within the second substrate 14.

[0015] The high-frequency connector 123 is located on a surface 14a of the second substrate 14 opposite to a surface 14b facing the target object 300. The high-frequency connector 123 is fed with power from a microwave source (not shown) and transmits microwaves to the radiator 12 via the high-frequency transmission line 122.

[0016] The diamond substrate 13 is a so-called diamond sensor, and has an NV center 131 arranged in a diamond crystal.

[0017] The diamond crystal has a side length of, for example, 2 mm and a thickness of, for example, 100 to 300 μm.

[0018] The NV center 131 may be arranged singly on one surface of the diamond crystal, or multiple NV centers 131 may be arranged. The NV center 131 may be oriented in one direction. The NV center 131 may be a crystal with multiple different orientations. The NV center 131 is formed on the extreme surface of the surface 13b by, for example, a chemical vapor deposition (CVD) method or an ion implantation method. The NV center 131 is an ensemble NV center that exists at a certain density (for example, 0.001 ppm to 100 ppm) over the entire surface of the surface 13b or within a predetermined range (for example, a width of 50 μm).

[0019] The NV center 131 is a complex defect in a diamond crystal where carbon would normally be present, replaced by nitrogen, with a vacancy at the adjacent position. The NV center 131 is missing a portion of the degenerate shared electron pair. The NV center 131 has electrons with orbital angular momentum at two levels, m = 0 and m = ±1, in zero magnetic field. The m = ±1 electrons have a magnetic moment, so they are affected by an external magnetic field, and the degeneracy of m = ±1 is lifted, resulting in two more energy levels. The strength of the external magnetic field can be detected by detecting the electron spin resonance caused by these using light waves and microwaves.

[0020] The electrons in the NV center 131 are excited by light with a wavelength of 532 nm and emit fluorescence with a wavelength of 638 nm during the relaxation process. This fluorescence process is unlikely to occur at the electron spin resonance frequency. Therefore, by utilizing this property, the state of the electrons at m = ±1 can be observed. The electron spin resonance frequency of the NV center 131 in a diamond crystal is known to be approximately 2.87 GHz in zero magnetic field. When microwaves at the frequency of this resonance point (resonance frequency) are irradiated, the fluorescence with a wavelength of 638 nm is quenched. Furthermore, the resonant frequency of the microwave changes due to changes in the state of the electrons at m = ±1 depending on the magnitude of the external magnetic field, etc. Then, by capturing this change as a frequency change in the fluorescence intensity, magnetic fields and currents can be detected.

[0021] The surface 13a of the diamond substrate 13 is located within an opening 14S of the second substrate 14, which will be described later. In this embodiment, the entire surface of the surface 13b of the diamond substrate 13 is exposed from the opening 14S. The surface 13a of the diamond substrate 13 is an optical incidence surface. Microwaves and green light are incident on the surface 13a of the diamond substrate 13. The surface 13b of the diamond substrate 13 is a magnetic detection surface. Red light is emitted from the surface 13b of the diamond substrate 13. This red light is PL (Photo Luminescence) due to the NV center 131. The first substrate 11 is located on the surface 13a of the diamond substrate 13. The diamond substrate 13 and the first substrate 11 are bonded together, for example, with an ultraviolet-curing optical adhesive.

[0022] The second substrate 14 is a dielectric substrate such as a printed circuit board (PCB), a ceramic substrate, or a glass substrate, and is a single-layer or multi-layer substrate. The second substrate 14 has an opening 14S in the center. The first substrate 11, the radiator 12, and at least a portion of the diamond substrate 13 are housed within the opening 14S of the second substrate 14. The outer periphery of the first substrate 11 is bonded onto a step portion 141 of the second substrate 14.

[0023] A high-frequency transmission line 122 that supplies microwaves to the radiator 12 is located on the second substrate 14 .

[0024] The opening 14S has a circular shape in a plan view. The opening 14S has a first opening 14S1 and a second opening 14S2. The first opening 14S1 has a larger diameter than the second opening 14S2. The first opening 14S1 and the second opening 14S2 are connected to each other. The circumferential surface of the opening 14S is defined by a circumferential surface 14Sa of the first opening 14S1, a circumferential surface 14Sc of the second opening 14S2, and a surface 14Sb connecting the circumferential surfaces 14Sa and 14Sc. The step created by the first opening 14S1 and the second opening 14S2 is called a step portion 141. The opening 14S has a step portion 141 on its circumferential surface.

[0025] (Optical Unit) The optical unit 20 includes a first light source 26, a second light source 27, an objective lens 28, an imaging lens 29, optical components 30, a non-reflective terminator 39, and a photodetector 40. The optical unit 20 includes a first lens barrel 21, a second lens barrel 22, a third lens barrel 23, and a fourth lens barrel 24 that house these components. The first lens barrel 21, the second lens barrel 22, the third lens barrel 23, and the fourth lens barrel 24 are all cylindrical. The first lens barrel 21, the second lens barrel 22, the third lens barrel 23, and the fourth lens barrel 24 are positioned along the direction of the optical path.

[0026] The first light source 26 illuminates the detector 10. In this embodiment, the first light source 26 is an excitation light source. The first light source 26 irradiates the NV center 131 with excitation light. The first light source 26 is a light-emitting element that irradiates the diamond substrate 13 with green light. The first light source 26 emits excitation light that irradiates the diamond crystal. The first light source 26 is, for example, a laser diode. The first light source 26 emits laser light with a wavelength of, for example, 532 nm. The first light source 26 emits green excitation light. The first light source 26 can be, for example, a green light-emitting diode (LED: Light Emitting Diode), a green surface-emitting laser diode (VCSEL: Vertical Cavity Surface Emitting Laser), a green edge-emitting laser diode (LD: Laser Diode), or the like. The first light source 26 is located at one end of the second lens barrel 22 in the axial direction.

[0027] The second light source 27 has a different wavelength from the first light source 26. For example, a white light emitting diode (LED) or the like can be used as the second light source 27. The second light source 27 illuminates the surface of the object 300. The second light source 27 is located at one end of the third lens barrel 23 in the axial direction.

[0028] The objective lens 28 is located between the optical component 30 and the detector 10. Green light, red light, and white light pass through the objective lens 28. The objective lens 28 passes green light irradiated from the first light source 26. The objective lens 28 passes white light irradiated from the second light source 27. The objective lens 28 passes red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface. The objective lens 28 passes white light from the surface of the object 300. The objective lens 28 is located inside the fourth lens barrel 24. The objective lens 28 is located facing the detector 10.

[0029] The imaging lens 29 forms an image based on light of the wavelength of the second light source 27. The imaging lens 29 transmits white light from the surface of the object 300. The imaging lens 29 is located between the optical system component 30 and the light receiver 40. The imaging lens 29 is located inside the first lens barrel 21. The imaging lens 29 is located opposite the light receiver 40.

[0030] The optical system components 30 are various optical system components that modulate the light incident on the objective lens 28. The optical system components 30 are various optical system components that optically couple the first light source 26, the second light source 27, the object 300, the detector 10, and the light receiver 40. The optical system components 30 irradiate light emitted from the first light source 26 and the second light source 27 toward the detector 10. The optical system components 30 receive red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and white light from the surface of the object 300 at the light receiver 40. The optical system components 30 are located between the first light source 26, the second light source 27, and the detector 10. The optical system components 30 are located inside a plurality of combined lens barrels, which are cylindrical structures in the direction of the optical path.

[0031] In this embodiment, the optical system components 30 include a first lens 31 , a dichroic mirror 32 , a second lens 35 , and a half mirror 36 .

[0032] The first lens 31 is an illumination lens. The first lens 31 transmits the green light emitted from the first light source 26. The first lens 31 distributes the green light emitted from the first light source 26. The first lens 31 is positioned opposite the first light source 26. The first lens 31 is positioned inside the second lens barrel 22.

[0033] The dichroic mirror 32 transmits light that is incident on the imaging lens 29. The dichroic mirror 32 optically adjusts the light from the first light source 26 and the second light source 27 so that it is incident on the objective lens 28. The dichroic mirror 32 reflects the green light that has passed through the first lens 31 toward the detector 10. The dichroic mirror 32 transmits the white light that has passed through the second lens 35 and reflected by the half mirror 36. The dichroic mirror 32 transmits the red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and the white light from the surface of the object 300. The dichroic mirror 32 is located between the first lens 31 and the objective lens 28. The dichroic mirror 32 is located inside the first lens barrel 21.

[0034] The second lens 35 is an illumination lens. The second lens 35 transmits the white light emitted from the second light source 27. The second lens 35 distributes the white light emitted from the second light source 27. The second lens 35 is positioned opposite the second light source 27. The second lens 35 is positioned inside the third lens barrel 23.

[0035] The half mirror 36 transmits light that is incident on the imaging lens 29. The half mirror 36 optically adjusts the light from the second light source 27 so that it is incident on the objective lens 28. The half mirror 36 reflects the white light that has passed through the second lens 35 toward the detector 10. The half mirror 36 transmits red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and white light from the surface of the object 300. The half mirror 36 is located between the second lens 35 and the objective lens 28. The half mirror 36 is located inside the first lens barrel 21.

[0036] By passing through the optical system component 30 configured in this manner, the green light from the first light source 26 and the white light from the second light source 27 are condensed at the rear focal position of the objective lens 28 and emitted as parallel light from the objective lens 28. The light is uniformly irradiated within at least a predetermined range of the object 300.

[0037] The non-reflective terminator 39 suppresses reflections and reduces interference noise. The non-reflective terminator 39 is located in the first lens barrel 21.

[0038] The first lens barrel 21 is connected to a second lens barrel 22, a third lens barrel 23, and a fourth lens barrel 24. The internal spaces of the first lens barrel 21, the second lens barrel 22, the third lens barrel 23, and the fourth lens barrel 24 are connected to each other. The second lens barrel 22 and the third lens barrel 23 are connected to the circumferential surface of the first lens barrel 21. The central axis of the first lens barrel 21 and the central axes of the second lens barrel 22 and the third lens barrel 23 are perpendicular to each other. The central axes of the second lens barrel 22 and the third lens barrel 23 are parallel to each other. The second lens barrel 22 is located closer to the objective lens 28 than the third lens barrel 23 in the axial direction of the first lens barrel 21. One axial end of the first lens barrel 21 is connected to one axial end of the fourth lens barrel 24. The first lens barrel 21 and the fourth lens barrel 24 are coaxial.

[0039] The first lens barrel 21 accommodates a dichroic mirror 32, a half mirror 36, and an imaging lens 29 therein.

[0040] The second lens barrel 22 accommodates a first lens 31 therein.

[0041] The third lens barrel 23 accommodates a second lens 35 therein.

[0042] The fourth lens barrel 24 houses an objective lens 28. At the other axial end of the fourth lens barrel 24, the detector 10 is located with the surface 13b of the diamond substrate 13, which is the magnetic detection surface, facing outward.

[0043] The photoreceiver 40 is capable of capturing a magnetic image showing the magnetic field generated in the object 300, and an optical image of the surface of the object 300. The photoreceiver 40 receives red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and white light from the surface of the object 300. The photoreceiver 40 may be, for example, a Si-PIN photodiode (PD: Photo Diode), an InGaAs-PIN photodiode, or a single-element photodiode having magnetism.

[0044] The light receiver 40 receives red light generated by inputting green light to the diamond substrate 13. The light receiver 40 detects fluorescence from the diamond substrate 13. The light receiver 40 is a photodiode. The light receiver 40 receives fluorescence emitted from the diamond crystal in response to excitation light.

[0045] The light receiver 40 optically detects the image of the object 300 that has been optically transmitted through the detector 10 and formed by the imaging lens 29. The light receiver 40 receives red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface. The light receiver 40 receives white light from the surface of the object 300.

[0046] (Detection method and operation) When observing the object 300, the object 300 is brought close to or in close contact with the surface 10b, which is the magnetic field acting surface of the diamond substrate 13 of the detector 10 of the microscope 1. Either optical observation or magnetic field observation by the microscope 1 is selected, taking into consideration the speed and quality of observation for each observation field of the object 300.

[0047] When optical observation is performed using the microscope 1, the first light source 26 and the microwaves supplied from the high-frequency connector 123 are turned off, and the second light source 27 is turned on, and the object 300 is optically observed via the photodetector 40.

[0048] In FIG. 1, the direction of travel of the white light emitted from the second light source 27 is indicated by a fine dashed arrow A21, and the direction of travel of the reflected light of the white light reflected on the surface of the object 300 is indicated by a coarse dashed arrow A22.

[0049] When performing magnetic field observation using the microscope 1, the first light source 26 and the microwaves supplied from the high-frequency connector 123 are turned on, and the second light source 27 is turned off, and the magnetic field of the object 300 is observed via the photoreceiver 40. In this way, by performing appropriate observation for each observation field of the object 300, the efficiency and quality of observation using the microscope 1 as a whole are improved.

[0050] A method for detecting the magnetic field of the object 300 in the detector 10 of the microscope 1, in other words, a magnetic field observation method, will be described.

[0051] The microwaves generated by the microwave source propagate to the radiator 12 through the high-frequency connector 123 and high-frequency transmission line 122. The radiator 12 then generates a microwave near electromagnetic field. The near magnetic field of the microwaves generated by the radiator 12 acts on the NV center 131 of the diamond substrate 13 with a magnetic field component perpendicular to the NV axis, causing electron spin resonance. Spatial changes in the direction or magnitude of the magnetic field generated in the object 300 act on the NV center 131 of the diamond crystal in the diamond substrate 13 of the detector 10.

[0052] 1, the direction of travel of the green excitation light from first light source 26 is indicated by dashed-dotted arrow A11, and the direction of travel of the red fluorescence is indicated by solid-line arrow A12. The green excitation light from first light source 26 enters the diamond crystal from face 10a. The green excitation light that has entered the diamond crystal then uniformly irradiates and excites NV centers 131 within a predetermined range within the diamond crystal plane, which is face 10b of first substrate 11.

[0053] The excited NV centers 131 generate red fluorescence, which enters the diamond crystal and is uniformly reflected within a predetermined range within the diamond crystal plane, which is the surface 10b of the first substrate 11, before entering the photodetector 40.

[0054] The photodetector 40 receives, from the diamond crystal, the electron spin resonance signal of the NV center 131 excited by the excitation light, as fluorescence.

[0055] (Effects) As described above, in this embodiment, the detector 10 includes the diamond substrate 13, the first substrate 11, and the emitter 12 located on the first substrate 11. According to this embodiment, the thickness of the detector 10 of the microscope 1 can be reduced to make it smaller. As a result, in this embodiment, by using this detector 10, the entire microscope 1 can be made smaller.

[0056] In this embodiment, at least a portion of the first substrate 11, the emitter 12, and the diamond substrate 13 are housed within the opening 14S of the second substrate 14. According to this embodiment, the thickness of the detector 10 can be reduced, thereby making it smaller. According to this embodiment, the working distance WD of the objective lens 28 of the microscope 1 can be shortened.

[0057] In this embodiment, the outer periphery of the first substrate 11 can be bonded onto the stepped portion 141 on the peripheral surface of the opening 14S of the second substrate 14. According to this embodiment, the first substrate 11 can be bonded appropriately.

[0058] In this embodiment, the emitter 12 can be located on the surface 11b of the first substrate 11. According to this embodiment, the numerical aperture NA of the objective lens 28 of the microscope 1 can be increased. According to this embodiment, the thickness of the detector 10 can be reduced, thereby making it more compact.

[0059] In this embodiment, the high-frequency connector 123 is located on the surface 14b of the second substrate 14. In this embodiment, at least a portion of the high-frequency transmission line 122 connecting the radiator 12 and the high-frequency connector 123 is located on the surface 11b of the first substrate 11, and at least a portion of the remaining portion is located inside the second substrate 14. According to this embodiment, the thickness of the detector 10 can be reduced, thereby making it smaller. According to this embodiment, the working distance WD of the microscope 1 can be shortened.

[0060] As described above, in this embodiment, the numerical aperture NA of the objective lens 28 of the microscope 1 can be increased and the working distance WD can be shortened, so that magnetic field images and optical images can be made high resolution and high resolution.

[0061] In this embodiment, the microscope 1 includes a detector 10, a first light source 26, a second light source 27, an objective lens 28, an imaging lens 29, and optical components 30. According to this embodiment, either optical observation or magnetic field observation using the microscope 1 can be selected, taking into consideration the speed and quality of observation for each observation field of the object 300.

[0062] In this embodiment, the dichroic mirror 32 reflects light that has passed through the first lens 31 to the detector 10 and transmits light irradiated from the second light source 27. In this embodiment, the half mirror 36 reflects light that has passed through the second lens 35 to the detector 10 and transmits light that enters the imaging lens 29. According to this embodiment, it is possible to select either optical observation or magnetic field observation using the microscope 1, taking into consideration the speed and quality of observation for each observation field of the object 300. According to this embodiment, the same location and the same field of view can be appropriately observed using a magnetic field image and an optical image.

[0063] According to this embodiment, the observation position of the object 300 can be easily identified by observing the optical image.

[0064] In this embodiment, light sources suitable for magnetic field observation and optical observation can be selected for the first light source 26 and the second light source 27. According to this embodiment, the image quality of the magnetic field image and the optical image can be improved.

[0065] In this embodiment, light from the first light source 26 and the second light source 27 is incident on the objective lens 28 without passing through the imaging lens 29. According to this embodiment, even if the imaging lens 29 is an existing lens, the illumination lenses located in each lens barrel can be designed according to various applications.

[0066] In this embodiment, the green light from the first light source 26 and the white light from the second light source 27 are focused at the rear focal position of the objective lens 28 and emitted as parallel light from the objective lens 28. This allows the light to be uniformly irradiated onto at least a predetermined range of the detector 10 and the object 300.

[0067] In contrast, the technology described in Patent Document 1 can perform magnetic measurements of an object, but cannot directly observe the surface of the object using optical images. This can result in, for example, the need to align the measurement position of the object with the magnetic measurement device (microscope), which can be time-consuming. Therefore, it is desirable to be able to perform both magnetic and optical observations of an object using a single microscope.

[0068] However, when magnetic observation and optical observation are performed using a single microscope using conventional techniques, there is a risk that the overall size of the microscope will increase. Therefore, it is desirable to be able to perform magnetic observation and optical observation of an object while suppressing the overall size.

[0069] Second Embodiment Fig. 3 is a schematic diagram illustrating an example of a microscope according to a second embodiment. In this embodiment, the configuration of the optical unit 20 differs from that of the first embodiment. More specifically, in this embodiment, the configurations of the optical system components 30 and the lens barrel differ from those of the first embodiment. Identical or corresponding components are denoted by identical or corresponding reference numerals, and a description thereof will be omitted. The same applies to the following embodiments.

[0070] 3, there are a plurality of imaging lenses 29 and a plurality of first lenses 31. The number of each lens is not limited.

[0071] The optical system components 30 include a first lens 31 , a first dichroic mirror 32 , a third lens 33 , a second dichroic mirror 34 , and a second lens 35 .

[0072] The first lens 31 is located between the first light source 26 and the first dichroic mirror 32 .

[0073] The first dichroic mirror 32 optically adjusts the light from the first light source 26 and the second light source 27 so that it is incident on the objective lens 28. The first dichroic mirror 32 reflects the green light that has passed through the first lens 31. The first dichroic mirror 32 transmits the white light that has passed through the second lens 35. The first dichroic mirror 32 is located between the second light source 27 and the objective lens 28. The first dichroic mirror 32 is located between the second lens 35 and the third lens 33. The first dichroic mirror 32 is located inside the third lens barrel 23.

[0074] The third lens 33 is an illumination lens. The third lens 33 distributes light from the first light source 26 and the second light source 27. The third lens 33 transmits green light reflected by the first dichroic mirror 32. The third lens 33 transmits white light transmitted by the first dichroic mirror 32. The third lens 33 is located between the first dichroic mirror 32 and the objective lens 28. The third lens 33 is located between the first dichroic mirror 32 and the second dichroic mirror 34. The third lens 33 is located inside the third lens barrel 23.

[0075] The second dichroic mirror 34 transmits light that is incident on the imaging lens 29. The second dichroic mirror 34 optically adjusts the light from the first light source 26 and the second light source 27 so that it is incident on the objective lens 28. The second dichroic mirror 34 reflects the green light that has passed through the third lens 33 toward the detector 10. The second dichroic mirror 34 reflects the white light that has passed through the third lens 33 toward the detector 10. The second dichroic mirror 34 transmits red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and white light from the surface of the object 300. The second dichroic mirror 34 is located between the objective lens 28 and the imaging lens 29. The second dichroic mirror 34 is located inside the first lens barrel 21.

[0076] A third lens barrel 23 is connected to the circumferential surface of the first lens barrel 21. The central axis of the first lens barrel 21 and the central axis of the third lens barrel 23 are perpendicular to each other. A second lens barrel 22 is connected to the circumferential surface of the third lens barrel 23. The central axis of the third lens barrel 23 and the central axis of the second lens barrel 22 are perpendicular to each other. The central axes of the first lens barrel 21 and the third lens barrel 23 are parallel. A fourth lens barrel 24 is connected to one axial end of the first lens barrel 21. The first lens barrel 21 and the fourth lens barrel 24 are coaxial.

[0077] The first lens barrel 21 accommodates a second dichroic mirror 34 and an imaging lens 29 therein.

[0078] The second lens barrel 22 accommodates a first lens 31 therein.

[0079] The third lens barrel 23 accommodates a second lens 35 , a first dichroic mirror 32 , and a third lens 33 therein.

[0080] (Effects) As described above, in this embodiment, the optical system component 30 does not include a half mirror. According to this embodiment, the red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, does not pass through the half mirror, so even weak emitted light can be received. According to this embodiment, detection with greater emission contrast is possible. This embodiment can improve the image quality of magnetic field images and optical images.

[0081] [Third Embodiment] Fig. 4 is a schematic diagram illustrating an example of a microscope according to a third embodiment. In this embodiment, the configuration of the optical unit 20 differs from that of the first embodiment. More specifically, in this embodiment, the configurations of the optical system components 30 and the lens barrel differ from those of the second embodiment. Specifically, this embodiment differs from the second embodiment in that it does not include a first lens 31 and a lens barrel that houses the first lens 31.

[0082] The optical system components 30 include a first dichroic mirror 32 , a third lens 33 , a second dichroic mirror 34 , and a second lens 35 .

[0083] The first light source 26 is disposed directly on the second lens barrel 22 .

[0084] A second lens barrel 22 is connected to the peripheral surface of the first lens barrel 21. The central axis of the first lens barrel 21 and the central axis of the second lens barrel 22 are perpendicular to each other. A fourth lens barrel 24 is connected to one axial end of the first lens barrel 21. The first lens barrel 21 and the fourth lens barrel 24 are coaxial.

[0085] The first lens barrel 21 accommodates a second dichroic mirror 34 and an imaging lens 29 therein.

[0086] The second lens barrel 22 accommodates a second lens 35 , a first dichroic mirror 32 , and a third lens 33 therein.

[0087] (Effects) As described above, in this embodiment, the number of lens barrels can be reduced compared to the second embodiment, and the microscope 1 can be made smaller in size in this embodiment.

[0088] In this embodiment, as in the second embodiment, the optical system 30 does not include a half mirror, so even weak emitted light can be received. According to this embodiment, detection with greater emission contrast is possible. This embodiment can improve the image quality of magnetic field images and optical images.

[0089] [Fourth embodiment] Fig. 5 is a schematic diagram illustrating an example of a microscope according to a fourth embodiment. This embodiment differs from the first embodiment in the configuration of the optical unit 20. More specifically, this embodiment differs from the first embodiment in that the second light source 27 is a transmitted light source. The microscope 1 observes an optical image using the transmitted light source. This example is applied when light can be transmitted from the rear side of the observation surface of the object 300.

[0090] The second light source 27 is a transmitted light source that transmits and illuminates the object 300. The second light source 27 is located on the side of the surface 13b of the diamond substrate 13, which is the magnetic detection surface of the detector 10. The second light source 27 is located opposite the objective lens 28 with the detector 10 in between.

[0091] The optical system components 30 include a first lens 31 , a dichroic mirror 32 , and a second lens 35 .

[0092] The dichroic mirror 32 transmits light that is incident on the imaging lens 29. The dichroic mirror 32 reflects the green light that has transmitted through the first lens 31 toward the detector 10. The dichroic mirror 32 transmits red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and white light from the surface of the object 300. The dichroic mirror 32 is located between the first lens 31 and the objective lens 28. The dichroic mirror 32 is located inside the first lens barrel 21.

[0093] The second lens 35 is an illumination lens. The second lens 35 transmits white light emitted from the second light source 27. The second lens 35 is positioned opposite the second light source 27. The second lens 35 is positioned inside the fifth lens barrel 50.

[0094] A second lens barrel 22 is connected to the peripheral surface of the first lens barrel 21. The central axis of the first lens barrel 21 and the central axis of the second lens barrel 22 are perpendicular to each other. A fourth lens barrel 24 is connected to one axial end of the first lens barrel 21. The first lens barrel 21 and the fourth lens barrel 24 are coaxial.

[0095] The first lens barrel 21 accommodates a dichroic mirror 32 and an imaging lens 29 therein.

[0096] The second lens barrel 22 accommodates a first lens 31 therein.

[0097] The fifth lens barrel 50 may be an observation stage mechanism for the object 300 .

[0098] (Effects) As described above, in this embodiment, the number of lens barrels can be reduced compared to the second embodiment, and the microscope 1 can be made smaller in size.

[0099] 6 is a schematic diagram illustrating an example of a detector according to a fifth embodiment. In this embodiment, the configuration of the detector 10 is different from that in the first embodiment.

[0100] The detector 10 comprises a first substrate 11 , an emitter 12 and a diamond substrate 13 .

[0101] The radiator 12 is located on the surface 11 a of the first substrate 11 .

[0102] The high-frequency transmission line 122 and the high-frequency connector 123 are located on the surface 11 a of the first substrate 11 .

[0103] (Effects) As described above, in this embodiment, the configuration of the detector 10 can be simplified compared to other embodiments.

[0104] 7 is a schematic diagram illustrating an example of a detector according to a sixth embodiment. This embodiment differs from the fourth embodiment in the configuration of the optical unit 20. More specifically, this embodiment differs from the fourth embodiment in that it does not include a second light source 27.

[0105] In this embodiment, light emitted (PL) by the NV center 131 excited by the green excitation light from the first light source 26 acts as incident light on the object 300. As a result, reflected light from the object 300 is detected as an optical image by the photodetector 40. In Fig. 7, the traveling direction of the green excitation light from the first light source 26 is indicated by a dashed-dotted arrow A11, and the traveling direction of the red fluorescence is indicated by a solid-line arrow A12. Furthermore, the traveling direction of the incident light on the object 300 is indicated by a thick arrow A31, and the traveling direction of the reflected light reflected on the surface of the object 300 is indicated by a coarse-dashed arrow A22.

[0106] The optical system components 30 include a first lens 31 and a dichroic mirror 32 .

[0107] The dichroic mirror 32 reflects the green light transmitted through the first lens 31 toward the detector 10. The dichroic mirror 32 transmits the red light from the surface 13b of the diamond substrate 13, which is the magnetic detection surface, and the white light from the surface of the object 300.

[0108] (Effects) As described above, in this embodiment, it is possible to observe a magnetic field image and an optical image using only the first light source 26 without increasing the size of the entire microscope.

[0109] In this embodiment, the emitter 12 can be located on the surface 11a of the first substrate 11. According to this embodiment, the numerical aperture NA of the objective lens 28 of the microscope 1 can be increased. According to this embodiment, the thickness of the detector 10 can be reduced, thereby making it smaller.

[0110] In this embodiment, the high-frequency connector 123 can be positioned on the surface 11a of the first substrate 11. According to this embodiment, the thickness of the detector 10 can be reduced to make it smaller. According to this embodiment, the working distance WD of the microscope 1 can be shortened.

[0111] As described above, in this embodiment, the numerical aperture NA of the objective lens 28 of the microscope 1 can be increased and the working distance WD can be shortened, so that magnetic field images and optical images can be made high resolution and high resolution.

[0112] The embodiments disclosed in the present application can be modified without departing from the spirit and scope of the invention. Furthermore, the embodiments disclosed in the present application and their modifications can be combined as appropriate.

[0113] Although specific embodiments have been described to fully and clearly disclose the claimed technology, the appended claims should not be limited to the above-described embodiments, but should be construed to embody all modifications and alternative arrangements that may be made by those skilled in the art within the scope of the basic concept presented herein.

[0114] For example, the optical component 30 may include a pinhole that shapes the light profile of the first light source 26 or the second light source 27 .

[0115] REFERENCE SIGNS LIST 1 microscope 10 detector 11 first substrate 11a, 11b surface 12 radiator 122 high-frequency transmission line 123 high-frequency connector 13 diamond substrate 13a, 13b surface 131 NV center 14 second substrate 14a, 14b surface 141 step portion 14S opening (through hole) 20 optical unit 21 first lens barrel 22 second lens barrel 23 third lens barrel 24 fourth lens barrel 26 first light source 27 second light source 28 objective lens 29 imaging lens 30 optical system component 31 first lens 32 dichroic mirror 35 second lens 36 half mirror 40 photodetector 300 object NA numerical aperture WD working distance

Claims

1. A detector comprising: a diamond substrate having an NV center; a first substrate positioned opposite one surface of the diamond substrate; a second substrate having a through hole extending in the thickness direction; and a emitter positioned on the first substrate, wherein at least a portion of the diamond substrate, the first substrate, and the emitter are housed within the through hole of the second substrate.

2. The detector according to claim 1, wherein the through-hole has a stepped portion on its peripheral surface, and the outer periphery of the first substrate is positioned on the stepped portion.

3. The detector according to claim 2, wherein the emitter is located on a surface of the first substrate facing the diamond substrate.

4. A detector as described in claim 1, comprising: a high-frequency connector located on the surface of the second substrate opposite to the surface facing the object; and a high-frequency transmission line connecting the radiator and the high-frequency connector, wherein at least a portion of the high-frequency transmission line is located on the surface of the first substrate facing the diamond substrate, and at least a remaining portion of the high-frequency transmission line is located inside the second substrate.

5. A microscope comprising: a detector according to any one of claims 1 to 4; a first light source that irradiates excitation light onto the NV center; a second light source that has a wavelength different from that of the first light source and that irradiates an object; an optical component that modulates the light incident on an objective lens; an objective lens located between the optical component and the object; and an imaging lens that forms an image based on light of the wavelength of the second light source.

6. The microscope according to claim 5, wherein the optical components comprise a first lens that distributes light from the first light source, a dichroic mirror located between the first lens and the objective lens, a second lens that distributes light from the second light source, and a half mirror located between the second lens and the objective lens, wherein the dichroic mirror reflects light that has passed through the first lens to the detector and transmits light irradiated from the second light source, and the half mirror reflects light that has passed through the second lens to the detector and transmits light that enters the imaging lens.

7. The microscope of claim 5, wherein the optical components include a second lens that distributes light from the second light source, a first dichroic mirror located between the second light source and the objective lens, a third lens that is located between the first dichroic mirror and the objective lens, and a second dichroic mirror located between the objective lens and the imaging lens, wherein the first dichroic mirror reflects light irradiated from the first light source to the detector and transmits light irradiated from the second light source, the third lens distributes light from the first light source and the second light source, and the second dichroic mirror reflects light that has transmitted through the third lens to the detector and transmits light that enters the imaging lens.

8. The microscope according to claim 7, further comprising: a first lens that distributes light from the first light source, the first lens being positioned between the first light source and the first dichroic mirror.

9. The microscope of claim 5, wherein the second light source is a transmitted light source, the optical components include a first lens that distributes light from the first light source, a dichroic mirror located between the first lens and the objective lens, and a second lens that distributes light from the second light source, and the dichroic mirror reflects light that has transmitted through the first lens to the detector and transmits light that is incident on the imaging lens.

10. The microscope according to claim 6, further comprising: a photodetector for receiving an image of an object formed by said imaging lens.

11. A microscope comprising: a detector including a diamond substrate having an NV center; a first substrate positioned opposite one side of the diamond substrate; and a radiator positioned on the first substrate; a first light source that irradiates excitation light to the NV center; a second light source having a wavelength different from that of the first light source; an optical component that modulates the light incident on an objective lens; an objective lens positioned between the optical component and an object; and an imaging lens that forms an image based on light of the wavelength of the second light source.

12. A microscope comprising: a detector according to any one of claims 1 to 4; a first light source that illuminates an object and irradiates excitation light to the NV center; an optical component that modulates the light incident on the objective lens; an objective lens located between the optical component and the object; and an imaging lens that forms an image based on the light from the first light source.

Images