Charge amplifier device, and measurement chain comprising such a charge amplifier device

Abstract

The invention relates to a charge amplifier device for at least one piezoelectric sensor which generates electrical charges under the influence of a physical measurement variable to be measured and which can be electrically connected to the charge amplifier device by means of a sensor cable; which charge amplifier device has a housing in which at least one charge amplifier unit, an electrical voltage supply unit, a control unit, and a wireless communication unit are arranged; wherein, when electrically connected to the charge amplifier device, the piezoelectric sensor dissipates electrical charges to the charge amplifier unit via the sensor cable; which charge amplifier unit is designed to amplify derived electrical charges into an electrical voltage; wherein the charge amplifier unit has an operational amplifier and at least one capacitor; wherein the operational amplifier has an inverting input and a signal output; wherein the inverting input has an electrical input resistance; wherein the capacitor is connected in parallel with the inverting input and with the signal output; wherein the capacitor has a capacitance and an electrical insulation resistance; and wherein the charge amplifier unit has a time constant of greater than or equal to 103s, preferably greater than or equal to 5*103s.

Description

Charge amplifier device and measuring chain with such a charge amplifier device Technical field

[0001] Die Erfindung betrifft eine Ladungsverstärkerein- Device according to the preamble of the first independent claim. The invention also relates to a measuring chain with such a charge amplifier device according to the preamble of the twelfth independent claim. State of the art

[0002] Piezoelektrische Sensoren werden zur Messung vonused to measure a wide variety of physical quantities such as force, torque, pressure, acceleration, etc. For this purpose, the sensor contains piezoelectric material that generates electrical charges under the influence of a physical quantity. The electrical charges are tapped by electrodes and are the measured quantity of the sensor. For a typical sensitivity of a sensor based on the longitudinal piezoelectric effect of 4 pCN-1 (picocoulombs per Newton), a force of 10 kN (kilonewtons) causes a charge quantity of 40 nC (nanocoulombs). To detect such a small amount of charge with virtually no loss, a charge amplifier is used. The charge amplifier is a DC amplifier with high internal voltage gain. It has an operational amplifier with an inverting input with the highest possible electrical input resistance, which is fed back to a capacitor. For a capacitor with an electrical Ka-O W 53 4With a capacity of 10 nF (nanofarad), the charge amplifier delivers a DC voltage of 4 V (volts) as a measuring signal.

[0003] Die Schrift EP1338879A1 zeigt einen solchen La- Charge amplifier for a piezoelectric pressure sensor for measuring cylinder pressure in a motor vehicle's internal combustion engine. The charge amplifier is located in the housing of a control unit of the internal combustion engine. The electrical charges are electrically discharged via a cable from the piezoelectric pressure sensor to the charge amplifier. A DC voltage can be tapped at an output of the charge amplifier as a measurement signal and electrically discharged via another cable to an evaluation unit. The charge amplifier receives its electrical operating voltage from a battery in the motor vehicle. A cable for the electrical operating voltage is also laid from the battery to the control unit.

[0004] Nun ist es ein allgemeiner Wunsch beim industriel-When using piezoelectric sensors, it is recommended to use cables that are as short as possible or even no cables at all. This is because in machining, injection molding, or robotics, the piezoelectric sensors used to measure physical parameters are located very close to tools or robot arms. However, there is very limited space, which can make laying cables difficult or impossible. Furthermore, the cables are exposed to chips, cooling lubricants, high temperatures, and moving objects, which can lead to premature aging and damage to the cables. W 53 4 K

[0005] Auch werden oft mehrere Komponenten der physikali-cal measurand is measured simultaneously. For this purpose, either several single-component sensors or a multi-component sensor are used, which in turn requires several single-channel cables or a multi-channel cable with one wire for each component. This increases the number or diameter of the cables and can make laying the cables even more difficult or impossible.

[0006] Zudem ist ein Bedürfnis der Industrie, piezoelekt-rical sensors can also be used for quasi-static applications such as long-term monitoring of engines, force and weight measurements in test benches, etc. However, due to the finite insulation resistance of the measuring chain up to the charge amplifier, leakage currents are unavoidable. The operational amplifier also has a manufacturing-related input offset voltage. The interaction of the leakage currents with the input offset voltage distorts the measurement of the physical quantity. These distortions are particularly pronounced in small measuring ranges, where the distortions are often only an order of magnitude smaller than the upper end value (full scale). Therefore, the duration of a quasi-static measurement of the physical quantity with piezoelectric sensors for small measuring ranges is limited to less than or equal to 10 s (seconds).

[0007] Eine erste Aufgabe der vorliegenden Erfindung istThe aim of the invention is to further develop the charge amplifier of document EP1338879A1, in which the shortest possible cables or no cables at all are required. A second object of the invention is to provide a charge amplifier which has a qua-O W 53 4 K A third object of the invention is to provide a measuring chain with such a charge amplifier. Description of the invention

[0008] Die ersten beiden Aufgaben werden durch die Merkma- le of the first independent claim.

[0009] Die Erfindung betrifft eine Ladungsverstärkerein-Device for at least one piezoelectric sensor, which generates electrical charges under the action of a physical quantity to be measured and which is electrically connectable to the charge amplifier device via a sensor cable; which charge amplifier device has a housing in which at least one charge amplifier unit, a control unit, an electrical voltage supply unit, and a wireless communication unit are arranged; wherein the piezoelectric sensor, when electrically connected to the charge amplifier device, discharges electrical charges to the charge amplifier unit via the sensor cable; which charge amplifier unit is configured to amplify discharged electrical charges into an electrical voltage; wherein the charge amplifier unit has an operational amplifier and at least one capacitor;which operational amplifier has an inverting input and a signal output, which inverting input has an electrical input resistance, which capacitor is connected in parallel to the inverting input and the signal output, whichO; W 53 4 K Capacitor has a capacitance and an electrical insulation resistance; and wherein the charge amplifier unit has a time constant of greater than or equal to 103 s, preferably greater than or equal to 5*10 3 s has.

[0010] Die erfindungsgemässe Ladungsverstärkereinrichtungis largely self-sufficient. The term "self-sufficient" is interpreted in the sense of "self-sufficient." To ensure self-sufficiency, the charge amplifier device has a separate housing, the interior of which is protected from harmful environmental influences. This is a first difference from document EP1338879A1, where the charge amplifier unit is arranged in the housing of the control unit of an internal combustion engine. Thus, the charge amplifier device can be arranged at the measuring location of the piezoelectric sensor, and the electrical charges are discharged to the charge amplifier device via the shortest possible sensor cable.

[0011] Im weiteren Unterschied zur Schrift EP1338879A1 be-The housing also contains an electrical power supply unit, a control unit, and a wireless communication unit. Thanks to the electrical power supply unit, no cable is required to supply the electrical operating voltage to the charge amplifier device when in use. The control unit converts the amplified electrical voltage into digital measurement data, which is then transmitted wirelessly by the wireless communication unit to a spatially separated evaluation device. W 53 4 K

[0012] Die dritte Aufgabe wird durch die Merkmale des second independent claim resolved.

[0013] Die Erfindung betrifft auch eine Messkette, welcheat least one piezoelectric sensor, a sensor cable, a charge amplifier device, and an evaluation device; wherein the piezoelectric sensor, the sensor cable, and the charge amplifier device are arranged at a measuring location; which piezoelectric sensor generates electrical charges under the effect of a physical quantity to be measured and is electrically connected to the charge amplifier device via the sensor cable and dissipates electrical charges to the charge amplifier device via the sensor cable; which charge amplifier device has a housing in which a charge amplifier unit, a control unit, an electrical voltage supply unit, and a wireless communication unit are arranged; which charge amplifier unit is configured to amplify dissipated electrical charges into an electrical voltage;which control unit is configured to convert the amplified electrical voltage into measurement data; which charge amplifier unit comprises an operational amplifier and at least one capacitor, which operational amplifier has an inverting input and a signal output; which inverting input has an electrical input resistance; which capacitor is connected in parallel to the inverting input and the signal output; which capacitor has a capacitance and an electrical insulation resistance; wherein the charge amplifier unit has a time constant of greater than or equal to 10; 3 s, preferably greater than or equal to 5*10 3 s; whereO W 53 4 K the evaluation device is arranged at an evaluation location; wherein the evaluation location is located at a spatial distance from the measurement location; wherein the evaluation device has a further wireless communication unit; and wherein the wireless communication unit and the further wireless communication unit are configured to carry out the wireless data transmission of the measurement data across the spatial distance.

[0014] Die erfindungsgemässe Messkette kommt mit einemThe shortest possible sensor cable between the piezoelectric sensor and the charge amplifier device is used. The charge amplifier device is self-contained; inside its housing, it contains a charge amplifier unit, a control unit, an electrical power supply unit, and a wireless communication unit. Thanks to the electrical power supply unit, no cable is required to the charge amplifier device for an electrical operating voltage when the measuring chain is in use. This also eliminates the need for a cable for transmitting the measured data between the charge amplifier device and the spatially separated evaluation device when the measuring chain is in use.

[0015] Die Anordnung der autarken Ladungsverstärkerein- direction at the measuring location and the resulting short sensor cable for the derivation of the electrical charges in combination with the time constant of greater than or equal to 10 3s at the inverting input and the capacitor of the charge amplifier unit enables quasi-static measurement of the physical quantity. This is because the shorter the sensor cable, the smaller the leakage currents in the sensor cable. The measurement error O W 53 4K of the measuring chain up to the charge amplifier device then essentially originates from leakage currents at the inverting input and at the capacitor of the charge amplifier unit in conjunction with a manufacturing-related input offset voltage of the operational amplifier. For the purposes of the present invention, a measurement of the physical quantity with a measurement error of less than or equal to 2% is considered highly accurate. The magnitude of the measurement error grows exponentially with the measurement duration of the physical quantity. In a first approximation, the magnitude of the measurement error is equal to the quotient of the measurement duration and the time constant. The inventive long time constant of greater than or equal to 103 s then enables a highly accurate quasi-static measurement of the physical quantity with a time duration of up to 2*10 1 see

[0016] Weder die erfindungsgemässe Ladungsverstärkerein-Neither the device nor the measuring chain according to the invention use permanently installed active high-pass filters to filter low-frequency interference signals from the amplified electrical voltage or the measurement data that occur during quasi-stationary measurements. Such high-pass filters have a cutoff frequency below which they attenuate low-frequency interference signals to a greater or lesser extent. However, this more or less pronounced attenuation in the range of the cutoff frequency distorts the measurement of the physical quantity. With knowledge of the present invention, the person skilled in the art can add active high-pass filters if necessary.

[0017] Vorteilhafte Weiterbildungen der Erfindung sind in listed in the dependent claims. O W 53 4 K Short description of the drawing

[0018] Im Folgenden wird die Erfindung beispielhaft unter Explained in more detail with reference to Fig. 1. Fig. 1 shows a circuit diagram of a preferred embodiment of a charge amplifier device 1.Ways for implementing the invention

[0019] Die Ladungsverstärkereinrichtung 1 ist dazu einge-designed to interact with at least one piezoelectric sensor 2, 2'. In Fig. 1, the charge amplifier device 1 is electrically connected to a piezoelectric sensor 2, 2' via at least one sensor cable 24, 24'. The illustration in Fig. 1 is schematic. The charge amplifier device 1, the sensor cable 24, 24', and the piezoelectric sensor 2, 2' are arranged at a measuring location 200. The measuring location 200 can be an industrial production facility, a research laboratory, etc. THE PIEZOELECTRIC SENSOR

[0020] Der piezoelektrische Sensor 2, 2’ hat die Funktion,to measure a physical quantity M, M' such as a force, a moment, a pressure, an acceleration, etc. In the embodiment of Fig. 1, the piezoelectric sensor 2, 2' comprises a first piezoelectric sensor 2 and a second piezoelectric sensor 2'. The first piezoelectric sensor 2 has a first piezoelectric element 21, a first signal electrode 22 and a first ground electrode 23. The second piezoelectric sensor 2' has a second piezoelectric element 21', a second signal electrode 23 W 53 4 K nal electrode 22' and a second ground electrode 23'. The piezoelectric sensor 2, 2' also has at least one sensor housing, which, however, is not shown in the figure for reasons of clarity. The exemplary embodiment is not binding for the implementation of the present invention. The person skilled in the art can also implement the invention with more than two piezoelectric sensors or with only one piezoelectric sensor. The more than two piezoelectric sensors can be arranged in a common sensor housing or in several separate sensor housings. The more than two piezoelectric sensors can also measure different components of a physical measurement variable, or they can redundantly measure the same components of a physical measurement variable.

[0021] Der piezoelektrische Sensor 2, 2’ misst die physi-physical measurement quantity M, M' with a measuring rate of typically 10 kHz (kilohertz). In the embodiment of Fig. 1, the first piezoelectric element 21 generates first electrical charges Q under the effect of a first physical measurement quantity M. And the second piezoelectric element 21' generates second electrical charges Q' under the effect of a second physical measurement quantity M'. The piezoelectric sensor 2, 2' thus measures two physical measurement quantities M, M'. The two physical measurement quantities M, M' can be different physical measurement quantities such as a force, a torque, etc. However, the two physical measurement quantities M, M' can also be two components of a single physical measurement quantity such as a force along a first direction and a force along a second direction. The person skilled in the art can also use the invention to measure more than W 53 4 K two physical quantities or to measure more than two components of a physical quantity.

[0022] Die Signalelektrode 22, 22’ greift elektrische La- The electrical charges Q, Q' of a first polarity, for example, have a positive sign. In the embodiment of Fig. 1, the first signal electrode 22 taps first electrical charges Q of a first polarity. And the second signal electrode 22' taps second electrical charges Q' of a first polarity. The number of electrical charges Q, Q' is proportional to the value of the physical measured quantity M, M'. The typical sensitivity of a piezoelectric element according to the longitudinal piezoelectric effect is 4 pCN-1.

[0023] Die Erzeugung der elektrischen Ladungen Q, Q’ weista measurement error occurs. The deviation from proportionality is referred to as a linearity error. Typically, the linearity error is less than or equal to 10% (percent). At the zero point, where the value of the physical quantity M, M' is zero, the number of electrical charges Q, Q' should also be zero. If the number of electrical charges Q, Q' is not zero at the zero point, this is referred to as a zero point deviation. Typically, the zero point deviation is less than or equal to 5%. Both measurement errors, linearity error and zero point deviation, are temperature-dependent.

[0024] Die Masseelektrode 24, 24’ greift elektrische La- connections of a second polarity, the electrical charges of the second polarity have, for example, a negative pre-O W 53 4 K sign. In the embodiment of Fig. 1, the first ground electrode 23 picks up first electrical charges of a second polarity. And the second ground electrode 23' picks up second electrical charges of a second polarity. The ground electrode 23, 23' is at a ground potential at the measuring location 200. The ground potential is an electrical reference potential such as 0 V. The ground potential can be the electrical potential of the electrically conductive ground at the measuring location 200.

[0025] Der piezoelektrische Sensor 2, 2’ weist ein Sensor-housing 20, 20'. The sensor housing 20, 20' has the function of protecting the components of the piezoelectric sensor 2, 2' arranged within the sensor housing 20, 20', such as the piezoelectric element 21, 21', the signal electrode 22, 22', and the ground electrode 23, 23', from harmful environmental influences such as moisture, air, etc. This is achieved by a hermetically sealed closure of the components arranged within the sensor housing 20, 20' with respect to the measuring location 200. The term "hermetically sealed" refers to a leak rate with respect to helium of less than 10 -6 mbar*ls -1The sensor housing 20, 20' is made of a mechanically resistant material such as a pure metal, a metal alloy such as steel, etc. In the exemplary embodiment of Fig. 1, the sensor housing 20, 20' comprises a first sensor housing 20 and a second sensor housing 20'. The first sensor housing 20 and the second sensor housing 20' are shown in dashed lines in Fig. 1. Here, too, the exemplary embodiment is not binding for the implementation of the present invention. The person skilled in the art can also implement the invention with more than two sensor housings or with only one sensor housing. O W 53 4 K

[0026] Das Sensorkabel 24, 24’ hat die Funktion, die vonto electrically dissipate the electrical charges Q, Q' tapped at the signal electrodes 22, 22' without loss. The sensor cable 24, 24' has at least one electrical conductor, electrical insulation, and a sheath. In the exemplary embodiment of Fig. 1, the sensor cable 24, 24' comprises a first sensor cable 24 with a first electrical conductor and a second sensor cable 24' with a second electrical conductor. The first signal electrode 22 is electrically connected to the first sensor cable 24 via means not shown in the figure. The second signal electrode 22' is electrically connected to the second sensor cable 24' via means also not shown in the figure. The electrical insulation is highly insulating against the ground potential at the measuring location 200. The high electrical insulation is at least 10 +12Ω (Ohm). The first sensor cable 24 and the second sensor cable 24' may have a common electrical insulation and a common jacket, or the first sensor cable 24 may have its own electrical insulation and jacket, and the second sensor cable 24' may have its own electrical insulation and jacket.

[0027] Das Sensorkabel 24, 24’ ist möglichst kurz und has a length l, l' of less than or equal to 0.5 m (meters). The length l, l' of the sensor cable 24, 24' is determined between the sensor housing 20, 20' and a housing 10 of the charge amplifier device 1. In the embodiment of Fig. 1, the first sensor cable 24 has a first length l and the second sensor cable 24' has a second length l'. O W 53 4 K THE HOUSING

[0028] Die Ladungsverstärkereinrichtung 1 weist ein Gehäu- se 10. The housing 10 is made of a mechanically resistant material such as metal, plastic, etc.

[0029] Das Gehäuse 10 ist ein dreidimensionaler Körper und completely encloses an interior 100. The interior 100 is a cavity.

[0030] Das Innere 100 kann staubdicht und wasserdicht ge-The terms "dustproof" and "waterproof" refer to protection against the ingress of dust with a particle diameter of less than 1.0 mm (millimeters), as well as protection against the ingress of water during continuous submersion to a depth of more than 1 m. According to DIN EN 60529, the housing 10 thus has an International Protection (IP) rating of IP68.

[0031] Das Gehäuse 10 ist bereichsweise elektrisch leitend and is at ground potential at measuring point 200. THE ELECTRICAL FEEDTHROUGH

[0032] Das Gehäuse 10 weist mindestens eine elektrische Feedthrough 11, 11'. The electrical feedthrough 11, 11' is electrically connected to the sensor cable 24, 24' by means not shown in the figure. The electrical feedthrough 11, 11' has the function of transferring electrical charges Q, Q' electrically derived from the sensor cable 24, 24' into the interior 100O without loss when the charge amplifier device 1 is electrically connected to the sensor cable 24, 24'. W 53 4 K to electrically transmit the signal. For this purpose, the electrical feedthrough 11, 11' has an electrical conductor which is highly electrically insulated from the housing 10. The high electrical insulation is at least 10+12 Ω. In the exemplary embodiment in Fig. 1, the electrical feedthrough 11, 11' comprises a first electrical feedthrough 11 and a second electrical feedthrough 11'. The first electrical feedthrough 11 is electrically connected to the first sensor cable 24. The second electrical feedthrough 11' is electrically connected to the second sensor cable 24'. However, with knowledge of the present invention, a person skilled in the art can also use a single sensor cable.

[0033] Die elektrische Durchführung 11, 11’ ist im Einsatzthe charge amplifier device 1 is the only cable-based connection means of the charge amplifier device 1. The term "use" is understood to mean the period of time during which the charge amplifier device 1 measures the physical measurement quantity M, M' in operative connection with the piezoelectric sensor 2, 2'.

[0034] Im Inneren 100 des Gehäuses 10 sind mindestens eine Charge amplifier unit 12, 12', an electrical voltage supply unit 13, a control unit 15 and a wireless communication unit 16 are arranged. THE CHARGE AMPLIFIER UNIT

[0035] Die Ladungsverstärkereinheit 12, 12’ hat die Funk- tion to electrically amplify transmitted electrical charges Q, Q' into an electrical voltage U, U'. The charge amplifier unit 12, 12' has an operational amplifier O W 53 4 capacitors 121, 121' and at least one capacitor 122, 123,122', 123'.

[0036] Dem piezoelektrischen Sensor 2, 2’ ist genau eineCharge amplifier unit 12, 12' is assigned. In the embodiment of Fig. 1, the charge amplifier unit 12, 12' comprises a first charge amplifier unit 12 with a first operational amplifier 121 and two first capacitors 122, 123, and a second charge amplifier unit 12' with a second operational amplifier 121' and two second capacitors 122', 123'. The first charge amplifier unit 12 amplifies passed-on first electrical charges Q into a first electrical voltage U. The second charge amplifier unit 12' amplifies passed-on second electrical charges Q' into a second electrical voltage U'. The first charge amplifier unit 12 and the second charge amplifier unit 12' are shown in dashed lines in Fig. 1.

[0037] Der Operationsverstärker 121, 121’ weist einen in-inverting input i-, i-', a non-inverting input i+, i+', and a signal output o, o'. In the embodiment of Fig. 1, the first operational amplifier 121 has a first inverting input i-, a first non-inverting input i+, and a first signal output o. The second operational amplifier 121' has a second inverting input i-', a second non-inverting input i+', and a second signal output o'. At a temperature T equal to 25°C, the first inverting input i- has a first electrical input resistance Ri of greater than or equal to 10+13 Ω and a leakage current of 10-15 A (amperes). W 53 4 Purchase and the second inverting input i-' has a second electrical input resistance Ri' of greater than or equal to 10+13 Ω and a leakage current of 10-15 A. The non-inverting input i+, i+' is at the ground potential of the housing 10.

[0038] Für die Versorgung mit einer elektrischen Betriebs-The operational amplifier 121, 121' has a voltage supply input and a ground input. With the ground input, the operational amplifier 121, 121' is connected to the ground potential at measuring point 200.

[0039] Die elektrische Durchführung 11, 11’ ist mit dem inverting input i-, i-' of the operational amplifier 121, 121'. Thus, the electrical charges Q, Q' are present at the inverting input i-, i-'. In the embodiment of Fig. 1, the first electrical feedthrough 11 is electrically connected to the first inverting input i- of the first operational amplifier 121, and first electrical charges Q are present at the first inverting input i-. The second electrical feedthrough 11' is electrically connected to the second inverting input i-' of the second operational amplifier 121', and second electrical charges Q' are present at the second inverting input i-'.

[0040] Im Ausführungsbeispiel der Fig. 1 sind zwei ersteCapacitors 122, 123 and two second capacitors 122', 123' are shown. The two first capacitors 122, 123 are also referred to below as the first capacitor 122 and the further first capacitor 123. The two O W 53 4 K The second capacitors 122', 123' are also referred to below as the first second capacitor 122' and the further second capacitor 123'. At a temperature T of 25°C, the first capacitor 122 has an electrical insulation resistance R122 of greater than or equal to 10 13 Ω, the further first capacitor 123 has an electrical insulation resistance R123 of greater than or equal to 10 13 Ω, the first second capacitor 122' has an electrical insulation resistance R122' of greater than or equal to 10 13Ω, and the further second capacitor 123' has an electrical insulation resistance R123' of greater than or equal to 1013 Ω. With knowledge of the invention, one skilled in the art can provide far more than two capacitors 122, 123, 122', 123' per charge amplifier unit 12, 12'.

[0041] Der Kondensator 122, 123, 122’, 123’ ist parallel to the inverting input i-, i-' and to the signal output o, o' of the operational amplifier 121, 121'. The first capacitor 122 and the further first capacitor 123 are connected in parallel to the first inverting input i- and to the first signal output o of the first operational amplifier 121. The first second capacitor 122' and the further second capacitor 123' are connected in parallel to the second inverting input i-' and to the second signal output o' of the second operational amplifier 121'. Feedback electrical charge flows from the signal output o, o' to the inverting input i-, i-' via the capacitor 122, 123, 122', 123'.

[0042] Jeder Kondensator 122, 123, 122’, 123’ weist eineCapacity C122, C123, C122', C123'. In the embodiment O W 53 4 In the example of Fig. 1, the first capacitor 122 has a first capacitance C122, and the further first capacitor 123 has a further first capacitance C123. The first second capacitor 122' has a first second capacitance C122', and the further second capacitor 123' has a further second capacitance C123'. The capacitances C122, C123, C122', C123' are of different sizes. Thus, the first first capacitance C122 and the first second capacitance C122 can be a factor of 10 larger than the further first capacitance C122' and the further second capacitance C123'.

[0043] Die verstärkte elektrische Spannung U, U’ liegt amSignal output o, o' of the operational amplifier 121, 121'. In the embodiment of Fig. 1, the first electrical voltage U is applied to the first signal output o of the first operational amplifier 121. And the second electrical voltage U' is applied to the second signal output o' of the second operational amplifier 121'.

[0044] Über die Grösse der Kapazität C122, C123, C122’, An amplification factor F, F' can be set at C123' of the capacitor 122, 123, 122', 123'. Amplification factor F, F' comprises a first amplification factor F and a second amplification factor F'. For this purpose, the parallel connection of the capacitor 122, 123, 122', 123' to the inverting input i-, i-' and to the signal output o, o' of the operational amplifier 121, 121' can be selectively accomplished or interrupted. This can be done by reversibly switchable switches. In the embodiment of Fig. 1, the parallel connection of the first capacitor 122 is accomplished by a switch, while the parallel connection of the further OW 53 4 Kersten capacitor 123 is interrupted by a switch. The first amplification factor F is equal to C122 = Q / U. The parallel connection of the first and second capacitors 122' is accomplished by a switch, while the parallel connection of the further second capacitor 123' is interrupted by a switch. The second amplification factor F' is equal to C122' = Q / U'. Typically, by selecting the capacitance C122, C123, C122', C123' of the capacitors 122, 123, 122', 123', the amplification factor F, F' can be adjusted over several orders of magnitude.

[0045] Über den Verstärkungsfaktor F, F’ wird auch einA measuring range R, R' is set in which the amplified electrical voltage U, U' lies. Typically, the charge amplifier unit 12, 12' has a plurality of mutually graduated measuring ranges R, R', which differ from one another by at least one order of magnitude. Each measuring range R, R' has an upper end value FS, FS' (full scale). In the exemplary embodiment in Fig. 1, the first charge amplifier unit 12 has first measuring ranges R with first upper end values ​​FS for the first amplified electrical voltage U, which are set via the first amplification factor F. And the second charge amplifier unit 12' has second measuring ranges R' with second upper end values ​​FS' for the second amplified electrical voltage U', which are set via the second amplification factor F'.To avoid overloading and thus distorting the measurement of the physical quantity M, M', the amplified electrical voltage U, U' should not exceed the upper limit value FS, FS', and it should also not be more than one order of magnitude smaller than the limit value FS, FS'. The higher the amplified voltage, the higher the W 53 4 The lower the resolution of the amplified electrical voltage U, U', the smaller its measured value-to-noise ratio. The linearity error also varies in severity across the different measuring ranges R, R'. For a measurement of the physical quantity M, M' with the highest possible resolution, the measuring range R, R' should be set so that the amplified electrical voltage U, U' is greater than or equal to 10% of the final value FS, FS' and less than or equal to 90% of the final value FS, FS'.

[0046] Die elektrische Verstärkung der elektrischen Ladun-The charges Q, Q' exhibit a gain error. Thus, the deviation between the actual electrical gain of the electrical charges Q, Q' and the set gain factor F, F' is referred to as a gain error. The gain error is often caused by manufacturing-related variations in the size of the capacitor 122, 123, 122', 123'. At a temperature T of 25°C, the gain error is less than or equal to 5%.

[0047] Die elektrische Verstärkung der elektrischen Ladun-The resistors Q, Q' have a time constant τ122, τ123, τ122', τ123'. The time constant τ122, τ123, τ122', τ123' is the product of a parallel circuit of various electrical resistances of the charge amplifier unit 12, 12' and the capacitance C122, C123, C122', C123' of the charge amplifier unit 12, 12'. The electrical resistances include the electrical input resistance Ri, Ri', the electrical insulation resistance R122, R123, R122', R123', an electrical resistance of the electrical circuit of the operational amplifier 121, 121', an electrical resistance of a reset O W 53 4 K switching element 124, 124', an electrical resistance of the lines of the charge amplifier unit 12, 12', etc. In a first approximation, the time constant τ122, τ123, τ122', τ123' is formed by the product of the parallel connection of the electrical input resistance Ri, Ri' and the electrical insulation resistance R122, R123, R122', R123' with the capacitance C122, C123, C122', C123'. The time constant τ122, τ123, τ122', τ123' comprises a first time constant τ122 = (Ri+ R122) * C122, another first time constant τ123 = (Ri+ R123) * C123, a first second time constant τ122' = (Ri'+ R122') * C122' and another second time constant τ123' = (Ri'+ R123') * C123'. According to the invention, the time constant τ122, τ123, τ122', τ123' is greater than or equal to 10 3 s, preferably greater than or equal to 5*10 3 see

[0048] Aufgrund der endlich hohen elektrischen Isolations-Leakage currents occur at the inverting input i-, i-' and at the capacitor 122, 123, 122', 123' of the charge amplifier unit 12, 12' due to the resistance of the resistors. Furthermore, the operational amplifier 121, 121' has a manufacturing-related input offset voltage. The interaction of the leakage currents with the input offset voltage leads to a measurement error Δ, Δ'. The measurement of the physical quantity M, M' is considered highly accurate if the measurement error Δ, Δ' is less than or equal to 2%. The magnitude of the measurement error Δ, Δ' increases exponentially with the measurement time t of the physical quantity M, M'. In a first approximation, the time duration t of a highly accurate quasi-static measurement of the physical quantity M, M' is equal to the product of the measurement error Δ, Δ' and the time constant τ122, τ123, τ122', τ123'. The charge amplifier unit 12, 12' is designed to measure the physical quantity M, M' via a W 53 4KTime duration t to measure quasi-statically with high precision. For a time constant τ122, τ123, τ122', τ123' greater than or equal to 10 3 s, the time duration t of a highly accurate quasi-static measurement of the physical quantity M, M' is up to 2*10 1 s. For a time constant τ122, τ123, τ122', τ123' greater than or equal to 5*10 3 s, the time duration t of a high-precision quasi-static measurement of the physical quantity M, M' is up to 10 2 see

[0049] Die Ladungsverstärkereinheit 12, 12’ ist dazu ein-directed to discharge the inverting input i-, i-' and the capacitor 122, 123, 122', 123' at the beginning of a measurement of the physical quantity M, M'. For this purpose, the charge amplifier unit 12, 12' has a reset switching element 124, 124'. The reset switching element 124, 124' is connected in parallel to the inverting input i-, i-' and to the signal output o, o' of the operational amplifier 121, 121' and thus also in parallel to the capacitor 122, 123, 122', 123'. By closing the reset switching element 124, 124', leakage currents flow at the inverting input i-, i-' and at the capacitor 122, 123, 122', 123' of the charge amplifier unit 12, 12'. THE ELECTRICAL POWER SUPPLY UNIT

[0050] Die elektrische Spannungsversorgungseinheit 13 istshown in dashed lines in Fig. 1. It has the function of supplying electrical energy as an electrical operating voltage of 5 V, 10 V, etc. for the charge amplifier unit 12, 12', the control unit 15 and the wireless communication unit 16. For this purpose, the electrical voltage supply unit 13 has at least one rechargeable battery such as W 53 4 K a lithium-ion accumulator, a nickel-metal hydride accumulator, etc., or at least one non-rechargeable battery such as a lithium battery, an alkaline-manganese battery, etc. In the embodiment of Fig. 1, the electrical power supply unit 13 is a rechargeable accumulator, which can be recharged via electrical charging contacts 14, 14' in the housing 10. However, one skilled in the art can also implement the invention with a non-rechargeable battery as the electrical power supply unit 13; in this case, no electrical charging contacts 14, 14' are necessary. In this case, the housing can have a closable opening, through which opening the non-rechargeable battery in the housing can be replaced.

[0051] Durch die elektrische SpannungsversorgungseinheitWhen using the charge amplifier device 1, no cable is required to supply an electrical operating voltage to the charge amplifier device 1. The electrical voltage supply unit 13 stores sufficient electrical energy for continuous operation of the charge amplifier device 1 for at least 5 hours, preferably at least 10 hours, preferably at least 20 hours, preferably at least 40 hours.

[0052] Die elektrische Spannungsversorgungseinheit 13 has a first output and a second output. The first output is electrically connected via electrical supply lines to voltage supply inputs of the charge amplifier unit 12, 12', the control unit 15, and the wireless communication unit 16. The charge amplifier unit 12, 0 is supplied with power via the electrical supply lines. W 53 4K12', the control unit 15, and the wireless communication unit 16 are provided with an electrical operating voltage. In the exemplary embodiment of Fig. 1, the first output of the electrical voltage supply unit 13 is electrically connected via an electrical supply line to a voltage supply input of the first charge amplifier unit 12 and via a further electrical supply line to a voltage supply input of the second charge amplifier unit 12'. THE CONTROL UNIT

[0053] Die Steuereinheit 15 weist mindestens einen Analog-The control unit 15 has a digital / analog converter 151, at least one data memory 152, and at least one data processor 153. The control unit 15 has several functions. One of its functions is to convert the amplified electrical voltage U, U' into digital measurement data D, D'. For this purpose, the control unit 15 has at least one signal input i, i', which is electrically connected to the signal output o, o' of the operational amplifier 121, 121' via at least one signal line 101, 101'. Thus, the amplified electrical voltage U, U' reaches the signal input i, i' of the control unit 15 and is present there. In the embodiment of Fig. 1, the control unit 15 has at least a first signal input i, which is electrically connected via a first signal line 101 to the first signal output o of the first operational amplifier 121, so that the first amplified electrical voltage U reaches the first signal input i.And the control unit 15 has a second signal input i', which is connected via a second signal line 101' to the second signal output o' of the second O. W 53 4 K operational amplifier 121' is electrically connected so that the second amplified electrical voltage U' reaches the second signal input i'.

[0054] Das am Signaleingang i anliegende verstärkte elekt- Electrical voltage U, U' is converted by the analog / digital converter 151 of the control unit 15 into digital measurement data D, D'. In the embodiment of Fig. 1, the analog / digital converter 151 converts the first amplified electrical voltage U into first measurement data D and converts the second amplified electrical voltage U' into second measurement data D'.

[0055] Die Steuereinheit 15 weist einen Datenausgang o’’ The control unit 15 is configured to provide measurement data D,D' at the data output o''.

[0056] Die Steuereinheit 15 weist mindestens ein Steuer- program S, which is stored in the data memory 152 and can be loaded into the data processor 153.

[0057] Das in den Datenprozessor 153 geladene Steuerpro-Program S can compress the measurement data D, D'. In doing so, the control program S removes redundant information from the measurement data D, D'. Compression reduces the amount of measurement data D, D', so that a reduced amount of measurement data D, D' remains to be processed. Compression reduces the amount of measurement data D, D' by at least half.

[0058] Das in den Datenprozessor 153 geladene Steuerpro- Program S can correct the measurement data D, D'. For this purpose, 152 correction data KD can be stored in the data memory. With the correction data KD, at least one of the following measurement O W 53 4K error corrected, a linearity error, a zero point deviation, and a gain error. The correction data KD were generated prior to the measurement of the physical quantity M, M' in at least one separate correction process. The control program S loaded into the data processor 153 accesses the stored correction data KD and corrects the measurement data D, D' with the correction data KD by multiplying individual measurement data D, D' by individual correction data KD. The corrected measurement data D, D' exhibit a measurement error of less than or equal to 1%.

[0059] Die Messdaten D, D’ sind binäre Zahlenfolgen mit a resolution of 12 bits, 16 bits, etc.

[0060] Eine zweite Funktion der Steuereinheit 15 besteht to form status data D2 about the status of the piezoelectric sensor 2, 2' and the charge amplifier device 1. The status data D2 are digital data with binary number sequences.

[0061] Das in den Datenprozessor 153 geladene Steuerpro-Program S can detect the current charging status CS of the electrical power supply unit 13 and generate status data D2 for the detected current charging status CS of the electrical power supply unit 13.

[0062] Das in den Datenprozessor 153 geladene Steuerpro- Program S can also detect the currently set measuring range R, R' of the charge amplifier unit 12, 12' and generate status data D2 for the detected currently set measuring range R, R'.O W 53 4 K

[0063] Auch können im Datenspeicher 152 der Steuereinheit15 Status data D2 about the sensitivity SE, SE' of the piezoelectric sensor 2, 2' is stored. The sensitivity SE, SE' is sensor-specific and indicates the number of electrical charges Q, Q' the piezoelectric sensor 2, 2' generates per unit of the physical measured quantity M, M'. The sensitivity SE, SE' is determined in a separate calibration process prior to the measurement of the physical measured quantity M, M'. In the embodiment of Fig. 1, the first piezoelectric sensor 2 has a first sensitivity SE, and the second piezoelectric sensor 2' has a second sensitivity SE'. The control program S loaded into the data processor 153 forms the status data D2 about the sensitivity SE, SE' of the piezoelectric sensor 2, 2' by loading it from the data memory 152.

[0064] Somit bildet das in den Datenprozessor 153 geladeneControl program S at least one of the following status data D2: status data D2 about the current charge status CS of the electrical voltage supply unit 13, status data D2 about the currently set measuring range R, R' of the charge amplifier unit 12, 12' and status data D2 about the sensitivity SE, SE' of the piezoelectric sensor 2, 2'. The control unit 15 is configured to provide status data D2 at the data output o''.

[0065] Eine weitere Funktion der Steuereinheit 15 besteht to generate control signals S1, S1' for control data D1, D1' to control the charge amplifier device 1. Therefore, the control unit 15 is configured to load control data D1, D1 present at the data output o''. TheO W 53 4 K Control data D1, D1' are digital data with binary number sequences. The control program S loaded into the data processor 153 can generate control signals S1, S1' for control data D1, D1' to control the charge amplifier device 1. In the embodiment of Fig. 1, the control data D1, D1' comprise first control data D1 and second control data D1'.

[0066] Das in den Datenprozessor 153 geladene Steuerpro-Program S can switch on the switched-off charge amplifier device 1 for control data D1, D1', and conversely, the control program S can switch off the switched-on charge amplifier device 1 for control data D1, D1'. For this purpose, the control program S generates at least one control signal S1, S1' with the control data D1, D1' in order to switch off the switched-on charge amplifier device 1 with the control signal S1, S1' or to switch on the switched-off charge amplifier device 1. In the embodiment of Fig. 1, the control program S generates a first control signal S1 with first control data D1, and a second control signal S1' with second control data D1'.

[0067] Auch kann das in den Datenprozessor 153 geladeneControl program S for control data D1, D1' sets a commanded gain factor F, F' for the charge amplifier unit 12, 12'. To do so, the control program S generates at least one control signal S1, S1' with control data D1, D1' in order to set a commanded gain factor F, F' for the charge amplifier unit 12, 12' with the control signal S1, S1' so that the amplified electrical voltage U, U' lies in a measuring range R, R' with the best possible resolution. The setting of the commanded gain factor F, F' is carried out by O W 53 4 K Optionally establishing or interrupting the parallel connection of the capacitor 122, 123, 122', 123' to the inverting input i-, i-' and to the signal output o, o'. In the embodiment of Fig. 1, the control program S loaded into the data processor 153 generates a first control signal S1 with the first control data D1 in order to set a commanded first amplification factor F in the first charge amplifier unit 12 with the first control signal S1 so that the first amplified electrical voltage U lies in a first measuring range R with the best possible resolution. And with the second control data D1', the control program S loaded into the data processor 153 generates a second control signal S1' in order to set a commanded second amplification factor F' in the second charge amplifier unit 12' with the second control signal S1' so that the second amplified electrical voltage U' lies in a second measuring range R' with the best possible resolution.

[0068] Die Steuereinheit 15 weist einen Spannungsversor-power input and a ground input. With the ground input, the control unit 15 is connected to the ground potential at the measuring location 200. THE WIRELESS COMMUNICATION UNIT

[0069] Die drahtlose Kommunikationseinheit 16 weist einen Data input i''. The data input i'' is electrically connected to the data output o'' of the control unit 15 via a data line 102. Thus, measurement data D, D' and / or status data D2 are transferred via the data line 102 from the data output o'' of the control unit 15 to the data input i'' of the O W 53 4 K wireless communication unit 16 and are present there. The conjunction "and / or" comprises three logical operations: the AND operation (conjunction), the OR operation (disjunction), and the EITHER-OR operation (alternative). The wireless communication unit 16 is configured to load the measurement data D, D' and / or status data D2 present at data input i''.

[0070] Die drahtlose Kommunikationseinheit 16 hat dieFunction to wirelessly transmit the measurement data D, D' and / or the status data D2 and to wirelessly receive the control data D1, D1'. During wireless data transmission, measurement data D, D' and / or status data D2 and control data D1, D1' are sent as electromagnetic waves. For this purpose, the wireless communication unit 16 has an antenna for transmitting measurement data D, D' and / or status data D2 and for receiving control data D1, D1'. The wireless data transmission of the measurement data D, D' and / or the status data D2 and the control data D1, D1' is shown in Fig. 1 as curved circular segments.

[0071] Die drahtlose Datenübertragung der Messdaten D, D’ and / or the status data D2 and the control data D1, D1' can be transmitted using a wireless standard such as Bluetooth Low Energy (BLE). The wireless data transmission of the measurement data D, D' and / or the status data D2 and the control data D1, D1' occurs with a transmission power L in the range of 0.1 mW (milliwatt) to 10 mW.

[0072] Die drahtlose Datenübertragung der Messdaten D, D’and / or the status data D2 and the control data D1, D1'O W 53 4 K can be carried out in the Industrial Scientific and Medical (ISM) band from 2.402 GHz (gigahertz) to 2.480 GHz. Multiple transmission channels can be used in the ISM band. For example, the ISM band can accommodate forty transmission channels, each with a bandwidth of 2 MHz (megahertz).

[0073] Die drahtlose Datenübertragung der Messdaten D, D’occurs in real time. For the purposes of the present invention, this means wireless data transmission of the measurement data D, D' in a time of less than or equal to 0.5 seconds, preferably less than or equal to 1.0 seconds, after the generation of the electrical charges Q, Q'. Thus, no buffering of the measurement data D, D' in the data memory 152 of the control unit 15 and / or in a data memory of the wireless communication unit 16 is necessary, which is cost-effective since no memory is required. This also enables continuous and rapid evaluation of the measurement data D, D' in the evaluation device 3.

[0074] Die drahtlose Kommunikationseinheit 16 ist dazu configured to provide control data D1, D1' at data input i''. From here, the control data D1, D1' are routed via data line 102 to the data output o'' of the control unit 15. Thus, the data line 102 is a bidirectional data line for conducting measurement data D, D' and / or control data D2 as well as for conducting control data D1, D1'.

[0075] Die drahtlose Kommunikationseinheit 16 weist einenPower supply input and a ground input. With O W 53 4 K The ground input of the wireless communication unit 16 is connected to the ground potential at the measuring point 200. THE MEASURING CHAIN

[0076] Die Ladungsverstärkereinrichtung 1 ist dazu einge- designed to interact not only with the piezoelectric sensor 2, 2', but also with an evaluation device 3. The piezoelectric sensor 2, 2', the charge amplifier device 1, and the evaluation device 3 form a measuring chain 123. While the piezoelectric sensor 2, 2' and the charge amplifier device 1 are arranged at the measuring location 200, the evaluation device 3 is located at an evaluation location 300. The evaluation location 300 is located at a spatial distance 30 from the measuring location 200. The evaluation location 300 can be a workplace in an office, in a control room, etc. The spatial distance 30 is a distance of greater than or equal to 0.2 m and less than or equal to 20 m. THE EVALUATION DEVICE

[0077] Die Auswerteeinrichtung 3 hat mehrere Funktionen.One of its functions is to receive and evaluate the measurement data D, D' and / or status data D2 transmitted by the wireless communication unit 16. Another of its functions is to generate control data D1, D1' and send it to the charge amplifier device 1 in order to control the charge amplifier device 1 with the control data D1, D1'. For this purpose, the evaluation device 3 has an evaluation unit 31 with at least one further data memory 312, at least one further data processor 313, at least one input unit 314, and at least one output unit 0. W 53 4 K315. The evaluation device 3 also has a further data line 301 and a further wireless communication unit 36. THE FURTHER WIRELESS COMMUNICATION UNIT

[0078] Die weitere drahtlose Kommunikationseinheit 36has an antenna for receiving measurement data D, D' and / or status data D2 and for transmitting control data D1, D1'. The wireless communication unit 16 and the further wireless communication unit 36 ​​are configured to carry out the wireless data transmission of the measurement data D, D' and / or status data D2 as well as the control data D1, D1' across the spatial spacing 30.

[0079] Vor der drahtlosen Datenübertragung der Messdaten D, D' and / or the status data D2 and the control data D1, D1', the wireless communication unit 16 and the further wireless communication unit 36 ​​establish a connection. Three of the forty transmission channels of the ISM band are registration channels. In the three registration channels, the wireless communication unit 16 and the further wireless communication unit 36 ​​send and receive connection data VD to establish a connection.

[0080] Die drahtlose Datenübertragung der Messdaten D, D’can be carried out either with a low or a high data transmission rate DR. Thus, the low transmission rate can be 1 Mbit / sec (megabits per second) and the high transmission rate DR can be 2 Mbit / sec. For this purpose, the additional wireless communication unit 36 ​​generates and transmits connection data D3 with details of the selected data transmission rate. W 53 4 K rate DR to the wireless communication unit 16. The wireless communication unit 16 receives the connection data D3 with the information on the selected data transmission rate DR. The wireless communication unit 16 then sends the measurement data D, D' and / or the status data D2 with the selected data transmission rate DR to the further wireless communication unit 36.

[0081] Die weitere drahtlose Kommunikationseinheit 36 undThe evaluation unit 31 can be electrically connected to the additional data line 301 via interfaces not shown in the figure. The additional data line 301 has the function of transmitting measurement data D, D' and / or status data D2 from the additional wireless communication unit 36 ​​to the evaluation unit 31 and of transmitting control data D1, D1' from the evaluation unit 31 to the additional wireless communication unit 36. Thus, the additional data line 301 is a bidirectional data line and can be a data bus such as the Universal Serial Bus (USB), etc. THE EVALUATION UNIT

[0082] Die Auswerteeinheit 31 weist mindestens ein Auswer-The evaluation program A is stored in the additional data memory 312 and can be loaded into the additional data processor 313. The evaluation program A loaded into the additional data processor 313 generates commands, which commands are automatically executed by the evaluation unit 31. The adjective "automatic" means that the commands generated by the evaluation program A are executed by the evaluation unit 31 without the assistance of a human person. O W 53 4 K

[0083] Die Auswerteeinheit 31 ist dazu eingerichtet, Mess- data D, D' and status data D2.

[0084] So kann das in den weiteren Datenprozessor 313 ge-The loaded evaluation program A can evaluate the measurement data D, D' by correcting the measurement data D, D' that have not already been corrected by the control program S of the control unit 15. For this purpose, correction data KD can be stored in the additional data memory 312. The correction data KD corrects at least one of the following measurement errors: a linearity error, a zero point deviation, and a gain error. The correction data KD were generated in at least one separate correction process prior to the measurement of the physical quantity M, M'. The evaluation program A loaded into the additional data processor 313 accesses the stored correction data KD and corrects the measurement data D, D' with the correction data KD by multiplying individual measurement data D, D' by individual correction data. The corrected measurement data D, D' have a measurement error of less than or equal to 1%.

[0085] Die Messdaten D, D’ sowie die Statusdaten D2 lassenare stored in the additional data memory 312 of the evaluation unit 31. The measurement data D, D' stored in the additional data memory 312 can be compressed or uncompressed. The measurement data D, D' stored in the additional data memory 312 or the measurement data D, D' evaluated by the evaluation unit 31 can be corrected or uncorrected.

[0086] Auch kann das in den weiteren Datenprozessor 313 loaded evaluation program A evaluates the measured data D, D',O W 53 4 The evaluation program A graphically displays measurement data D, D' over time. The output unit 315 can be a screen on which data can be graphically displayed for the human being. Thus, the evaluation program A can graphically display measurement data D, D' over time on the output unit 315.

[0087] Zudem kann das in den weitere Datenprozessor 313The loaded evaluation program A evaluates the measurement data D, D' by checking whether the measurement data D, D' lie within predefined limit values ​​R1, R1', R2, R2' of a measuring range R, R' of the charge amplifier unit 12, 12'. This is because the electrical voltage U, U' amplified by the charge amplifier unit 12, 12' should lie within a measuring range R, R' with the best possible resolution. A lower limit value R1, R1' is defined as greater than or equal to 10% of the final value FS, FS' of a measuring range R, R', and an upper limit value R2, R2' is defined as less than or equal to 90% of the final value FS, FS' of a measuring range R, R'. For this purpose, predefined limit values ​​R1, R1', R2, R2' of measuring ranges R, R' of the charge amplifier unit 12, 12' are stored in the additional data memory 312. The evaluation program A loaded into the additional data processor 313 accesses the stored predefined limit values ​​R1, R1', R2, R2'.The evaluation program A loaded into the further data processor 313 evaluates the status data D2 and determines the currently set measuring range R, R' of the charge amplifier unit 12, 12'. The evaluation program A loaded into the further data processor 313 evaluates the measured data D, D' and checks whether the measured data D, D' lie within predefined limit values ​​R1, R1', R2, R2' of the currently set measuring range R, R'.O. W 53 4 If the measurement data D, D' are not within the predefined limit values ​​R1, R1', R2, R2' of the currently set measurement range R, R', the evaluation program A loaded into the further data processor 313 generates control data D1, D1' with the command to set a different amplification factor F, F' in the charge amplifier unit 12, 12' so that the amplified electrical voltage U, U' lies in a different measurement range R, R' with the best possible resolution.

[0088] Das in den weitere Datenprozessor 313 geladene Aus-Evaluation program A can also evaluate status data D2 by checking whether the current charge status of electrical power supply unit 13 does not fall below a predetermined lower charge limit R3. If the current charge status of electrical power supply unit 13 falls below the lower charge limit R3, evaluation program A loaded into further data processor 313 can generate an alarm signal S2 and output it on output unit 315, so that a person is alerted to the low charge status of electrical power supply unit 13.

[0089] Weiter kann das in den weitere Datenprozessor 313 The loaded evaluation program A evaluates the status data D2 by outputting the sensitivity of the piezoelectric sensor 2, 2' as a sensor signal S4 on the output unit 315, so that a human person becomes aware of it.

[0090] Die Auswerteeinheit 31 ist über die Eingabeeinheit 314 operable. The verb "operate" means that a human person can use the input unit 314 to issue commands OW 53 4 K can enter which commands are to be executed by the evaluation unit 31. The input unit 314 can be a keyboard or a touch-sensitive screen for entering commands. Commands can be entered as a character string via the input unit 314, and the evaluation unit 31 is configured to generate control data D1, D1' for entered commands. Thus, the entered command can be to switch the charge amplifier device 1 on or off, and the evaluation unit 31 generates control data D1, D1' for the command. O W 53 4 K List of reference symbols 1 Charge amplifier device piezoelectric sensor 3, 3' evaluation device 10 housing 11, 11' electrical feedthrough 12, 12' charge amplifier unit 13 electrical voltage supply unit 14, 14' electrical charging contacts 15 control unit 16 wireless communication unit 20, 20' sensor housing 21, 21' piezoelectric element 22, 22' signal electrode 23, 23' ground electrode 24, 24' sensor cable 30 spatial spacing 31 evaluation unit 36 ​​further wireless communication unit 100 interior of the housing 101, 101' signal line 102 data line 121, 121' operational amplifier 122, 122' first capacitor 123, 123' second capacitor 124, 124' reset switching element 125 measuring chain 151 analog / digital converter 152 data memory 153 data processor 200 measuring location 300 Evaluation locationO W 53 4K301 additional data line 312 additional data memory 313 additional data processor 314 input unit 315 output unit i-, i-' inverting input of the operational amplifier si+, i+' non-inverting input of the operational amplifier A evaluation program CS charge status C122, C122' first capacitance C123, C123' second capacitance Δ, Δ' measurement error D, D' measurement data D1, D1' control data D2 status data D3 connection data DR data transmission rate F, F' gain factor FS, FS' final value of the measuring range i, i' signal input of the control unit i'' data input of the wireless communication unit KD correction data l, l' length of the sensor cable L transmission power o, o' signal output of the operational amplifier o'' data output of the control unit M, M' physical measured quantity Q, Q' electrical charges R, R' measuring range O W 53 4KR1, R1' lower limit of the measuring range R2, R2' upper limit of the measuring range R3 lower charge limit S control program S1, S1' control signal S2 alarm signal SE, SE' sensitivity of the piezoelectric sensor τ122, τ123 first time constant τ122', τ123' second time constant t duration temperature U, U' amplified electrical voltage O W 53 4 K

Claims

Patent claims 1. Charge amplifier device (1) for at least one piezoelectric sensor (2, 2'), which generates electrical charges (Q, Q') under the action of a physical quantity to be measured (M, M'), and which is electrically connectable to the charge amplifier device (1) via a sensor cable (24, 24'); which charge amplifier device (1) has a housing (10) in which at least one charge amplifier unit (12, 12'), a control unit (15), an electrical voltage supply unit (13), and a wireless communication unit (16) are arranged; wherein the piezoelectric sensor (2, 2'), when electrically connected to the charge amplifier device (1), discharges electrical charges (Q, Q') to the charge amplifier unit (12, 12') via the sensor cable (24, 24'). which charge amplifier unit (12, 12') is designed to amplify derived electrical charges (Q, Q') into an electrical voltage (U, U');characterized in that the charge amplifier unit (12, 12') comprises an operational amplifier (121, 121') and at least one capacitor (122, 123, 122', 123'); which operational amplifier (121, 121') has an inverting input (i-, i-') and a signal output (o, o'), which inverting input (i-, i-') has an electrical input resistance (Ri, Ri'), which capacitor (122, 123, 122', 123') is connected in parallel to the inverting input (i-, i-') and to the signal output (o, o'), which capacitor (122, 123, 122', 123') has a capacitance (C122, C123, C122', C123') and an electrical insulation resistance (R122, O; W 53 4 KR123, R122', R123'); and that the charge amplifier unit (12, 12') has a time constant (τ122, τ123, τ122', τ123') of greater than or equal to 103 s, preferably greater than or equal to 5*10 3s.

2. Charge amplifier device (1) according to claim 1, characterized in that the time constant (τ122, τ123, τ122', τ123') results from the product of the parallel connection of the electrical input resistance (Ri, Ri') and the electrical insulation resistance (R122, R123, R122', R123') with the capacitance (C122, C123, C122', C123').

3. Charge amplifier device (1) according to one of claims 1 or 2, characterized in that the charge amplifier unit (12, 12') is configured to measure the physical measurement variable (M, M') quasi-statically over a time period (t) which, to a first approximation, is equal to the product of the measurement error (Δ, Δ') and the time constant (τ122, τ123, τ122', τ123'); and in that the measurement of the physical measurement variable (M, M') is highly accurate for a measurement error (Δ, Δ') of less than or equal to 2%.4.Charge amplifier device (1) according to one of claims 1 to 3, characterized in that the charge amplifier unit (12, 12') has a reset switching element (124, 124') which is connected in parallel to the capacitor (122, 123, 122', 123'); and in that the charge amplifier unit (12, 12') is designed to close the inverting input (i-, i-') and the capacitor (122, 123, 122', 0) by closing the reset switching element (124, 124'). W 53 4K123') at the beginning of a measurement of the physical measurement quantity (M, M').

5. Charge amplifier device (1) according to one of claims 1 to 4, characterized in that the control unit (15) has an analog / digital converter (151); that the charge amplifier unit (12, 12') is electrically connected to the control unit (15) via at least one signal line (101, 101'); that the amplified electrical voltage (U, U') reaches the control unit (15) via the signal line (101, 101'); and that the analog / digital converter (151) converts the amplified electrical voltage (U, U') into digital measurement data (D, D').6.Charge amplifier device (1) according to claim 5, characterized in that the control unit (15) has at least one data memory (152), at least one data processor (153), and at least one control program (S), which control program (S) is stored in the data memory (152) and can be loaded into the data processor (153); that the control program (S) loaded into the data processor (153) compresses the measurement data (D, D') and / or that the control program (S) loaded into the data processor (153) corrects the measurement data (D, D'); that the control unit (15) is electrically connected to the wireless communication unit (16) via a data line (102); that the measurement data (D, D') reach the wireless communication unit (16) via the data line (102); and that the wireless communication unit (16) transmits measurement data (D, D') wirelessly. O. W 53 4K7. Charge amplifier device (1) according to claim 6, characterized in that the control program (S) loaded into the data processor (153) forms at least one of the following status data (D2): status data (D2) about a current charging status (CS) of the electrical voltage supply unit (13), status data (D2) about a currently set measuring range (R, R') of the charge amplifier unit (12, 12'), and status data (D2) about a sensitivity (SE, SE') of the piezoelectric sensor (2, 2'); that the control unit (15) is electrically connected to the wireless communication unit (16) via a data line (102); that the status data (D2) reach the wireless communication unit (16) via the data line (102); and that the wireless communication unit (16) transmits status data (D2) wirelessly.8.Charge amplifier device (1) according to one of claims 6 or 7, characterized in that the wireless data transmission of the measurement data (D, D') takes place with a transmission power (L) in the range from 0.1 mW to 10 mW.

9. Charge amplifier device (1) according to one of claims 6 to 8, characterized in that a data transmission rate (DR) of the wireless data transmission of the measurement data (D, D') is adjustable.

10. Charge amplifier device (1) according to one of claims 6 to 9, characterized in that the wireless data transmission of the measurement data (D, D') takes place in real time. O. W 53 4K11. Charge amplifier device (1) according to one of claims 1 to 10, characterized in that the housing (10) protects the interior (100) in a dust-tight manner against the ingress of dust with a particle diameter of less than 1.0 mm, and in that the housing (10) protects the interior (100) in a water-tight manner against the ingress of water during permanent submersion to a depth of more than 1 m.12.Charge amplifier device (1) according to one of claims 1 to 11, characterized in that the housing (10) has an electrical feedthrough (11, 11'); that the sensor cable (24, 24') is electrically connectable to the electrical feedthrough (11, 11'); that the electrical feedthrough (11, 11'), when the charge amplifier device (1) is electrically connected to the sensor cable (24, 24'), electrically conducts electrical charges (Q, Q') electrically derived from the sensor cable (24, 24') into the interior (100) of the charge amplifier unit (12, 12'); and that the electrical feedthrough (11, 11') is the only cable-based connection means of the charge amplifier device (1) during operation of the charge amplifier device (1).13.Measuring chain (123) comprising at least one piezoelectric sensor (2, 2'), a sensor cable (24, 24'), a charge amplifier device (1), and an evaluation device (3); wherein the piezoelectric sensor (2, 2'), the sensor cable (24, 24'), and the charge amplifier device (1) are arranged at a measuring location (200); which piezoelectric sensor (2, 2') under the effect of a physical quantity (M, M') to be measured O. W 53 4K generates electrical charges (Q, Q') and is electrically connected to the charge amplifier device (1) via the sensor cable (24, 24') and discharges electrical charges (Q, Q') to the charge amplifier unit (12, 12') via the sensor cable (24, 24'); which charge amplifier device (1) has a housing (10) in which at least one charge amplifier unit (12, 12'), a control unit (15), an electrical voltage supply unit (13), and a wireless communication unit (16) are arranged; which charge amplifier unit (12, 12') is configured to amplify discharged electrical charges (Q, Q') into an electrical voltage (U, U'); which control unit (15) is configured to convert the amplified electrical voltage (U, U') into measurement data (D, D');characterized in that the charge amplifier unit (12, 12') has an operational amplifier (121, 121') and at least one capacitor (122, 123, 122', 123'), which operational amplifier (121, 121') has an inverting input (i-, i-') and a signal output (o, o'); which inverting input (i-, i-') has an electrical input resistance (Ri, Ri'); which capacitor (122, 123, 122', 123') is connected in parallel to the inverting input (i-, i-') and to the signal output (o, o'); which capacitor (122, 123, 122', 123') has a capacitance (C122, C123, C122', C123') and an electrical insulation resistance (R122, R123, R122', R123'); that the charge amplifier unit (12, 12') has a time constant (τ122, τ123, τ122', τ123') of greater than or equal to 103 s, preferably greater than or equal to 5*10; 3 s; that the evaluation device (3) is arranged at an evaluation location (300); that theO W 53 4 K Evaluation location (300) is located at a spatial distance (30) from the measurement location (200); that the evaluation device (3) has a further wireless communication unit (36); and that the wireless communication unit (16) and the further wireless communication unit (36) are configured to carry out the wireless data transmission of the measurement data (D, D') across the spatial distance (30).14.Measuring chain (123) according to claim 13, characterized in that the evaluation device (3) has an evaluation unit (31) with at least one further data memory (312), at least one further data processor (313) and at least one evaluation program (A), which evaluation program (A) is stored in the further data memory (312) and can be loaded into the further data processor (313); that the further wireless communication unit (36) is electrically connected to the evaluation unit (31) via a further data line (301); that the measurement data (D, D') reach the evaluation unit (31) via the further data line (301); and that the evaluation program (A) loaded into the further data processor (313) evaluates the measurement data (D, D') and / or that the evaluation program (A) loaded into the further data processor (313) corrects the measurement data (D, D').15.Measuring chain (123) according to claim 14, characterized in that the control unit (15) forms status data (D2) about the status of the piezoelectric sensor (2, 2') and the charge amplifier device (1); that the wireless communication unit (16) and the further wireless communication unit (16) W 53 4 K communication unit (36) are configured to carry out the wireless data transmission of the status data (D2) across the spatial distance (30); that the status data (D2) reach the evaluation unit (31) via the further data line (301); and that the evaluation program (A) loaded into the further data processor (313) evaluates the status data (D2).

16. Measuring chain (123) according to one of claims 14 or 15, characterized in that the evaluation program (A) loaded into the further data processor (313) generates control data (D1, D1'); that the wireless communication unit (16) and the further wireless communication unit (36) are configured to carry out the wireless data transmission of the control data (D1, D1') across the spatial distance (30); that the wireless communication unit (16) is electrically connected to the control unit (15) via a data line (102);that the control data (D1, D1') reach the control unit (15) via the data line (102); that the control unit (15) has at least one data memory (152), at least one data processor (153), and at least one control program (S), which control program (S) is stored in the data memory (152) and can be loaded into the data processor (153); that the control program (S) loaded into the data processor (153) generates control signals (S1, S1') for the control data (D1, D1') for controlling the charge amplifier device (1). O; W 53 4 K

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