Multi-motor module assembly and semiconductor wafer transfer apparatus having same

Abstract

The present invention relates to a multi-motor module assembly comprising: a first motor module that includes a first rotor having a first hollow; and a second motor module that includes a second rotor having a second hollow, wherein the first motor module and the second motor module are coupled so as to be separable so that the second rotor is positioned in the first hollow, and thus unit motor modules can be independently driven and various environments can be easily handled.

Description

Multi-motor module assembly and semiconductor wafer transfer device having the same

[0001] The present invention relates to a multi-motor module assembly, and more particularly, to a multi-motor module assembly in which individual motor modules are combined.

[0002] A motor is a device that converts electrical energy into mechanical energy and is widely used in various fields such as home appliances, automobiles, industrial robots, office equipment, aircraft, and helicopters.

[0003] Motors used in some fields (hereinafter referred to as "coaxial motors") include multiple actuators (rotors) that rotate around the same rotational axis to drive multiple driven objects. For example, the driven objects may be robot arm structures used in industrial robots or propeller structures used in helicopters.

[0004] Conventional coaxial motors feature complex combinations of actuators, stators, and housings. The number of actuators and their intended use are determined at the manufacturing stage. These conventional coaxial motors face the challenge of adapting to changes in operating conditions, such as increasing or decreasing the number of actuators.

[0005] The above-described problem can be seen as originating from the structure of a conventional coaxial motor in which multiple driving units lack independence or some components share functions.

[0006] [Prior Art Literature]

[0007] [Patent Document]

[0008] (Patent Document 1) Registration No. 6325612 Japanese Registration Gazette

[0009] In order to solve the above-described problems, the present invention aims to provide a multi-motor module assembly in which the independence of unit motor modules is enhanced.

[0010] In order to achieve the above-described purpose, a multi-motor module assembly according to an embodiment of the present invention includes a first motor module including a first rotor having a first cavity; and a second motor module including a second rotor having a second cavity; wherein the first motor module and the second motor module can be detachably coupled so that the second rotor is positioned in the first cavity.

[0011] Additionally, in an embodiment of the present invention, the first motor module and the second motor module can be driven simultaneously in a coupled state and independently driven in a separated state.

[0012] In addition, in an embodiment of the present invention, the first motor module may further include a first housing having an opening at one end and formed to surround an outer surface of the first rotor, and a first bracket coupled to the other end of the first housing, and the second motor module may further include a second housing having one end detachably coupled to the first bracket and formed to surround an outer surface of the second rotor, and a second bracket coupled to the other end of the second housing.

[0013] In addition, in an embodiment of the present invention, the first motor module further includes a first housing formed to surround an outer surface of the first rotor and a first stator fixed to an inner surface of the first housing and spaced apart from the first rotor, and the second motor module further includes a second housing formed to surround an outer surface of the second rotor and a second stator fixed to an inner surface of the second housing and spaced apart from the second rotor, and the second stator may be positioned closer to the rotational axis than the first stator.

[0014] Additionally, in an embodiment of the present invention, the inner surface of the second housing may be formed closer to the rotation axis than the inner surface of the first housing.

[0015] In addition, in an embodiment of the present invention, the first stator includes a first tooth portion protruding in the direction of the rotation axis and on which a coil is wound, and the second stator includes a second tooth portion protruding in the direction of the rotation axis and on which a coil is wound, and the second tooth portion may be provided with a smaller width and a larger depth than the first tooth portion.

[0016] Additionally, in an embodiment of the present invention, the outer surface of the second housing may include a recessed portion formed at least partially in the direction of the rotational axis.

[0017] In addition, in an embodiment of the present invention, the second motor module includes a radial communication portion formed to penetrate the side wall of the second housing, and the first hollow portion and the radial communication portion can be connected to provide a space through which an intermediate member passes.

[0018] Additionally, in an embodiment of the present invention, the first hollow portion may extend to one end and the other end of the multi-motor module assembly to provide a space through which an intermediate member passes.

[0019] In addition, the multi-motor module assembly according to an embodiment of the present invention further includes a third motor module including a third rotor having a third cavity; wherein the first motor module to the third motor module are detachably coupled such that the second rotor is positioned in the first cavity and the third rotor is positioned in the second cavity, and the first motor module to the third motor module can be independently driven in a detached state.

[0020] Meanwhile, a multi-motor module assembly according to an embodiment of the present invention includes a plurality of motor modules in which unit motor modules are detachably coupled, wherein the unit motor modules include a rotor capable of independent driving and having a hollow portion, a magnetic body provided on an outer surface of the rotor, a stator that transmits magnetic force to the magnetic body while being spaced apart from the magnetic body, and a housing provided to fix the stator and surround the rotor, wherein the plurality of motor modules can be coupled to each other such that a rotor having another hollow portion is positioned in one hollow portion.

[0021] Meanwhile, a semiconductor wafer transport device according to an embodiment of the present invention includes a first motor module including a first rotor having a first cavity; a second motor module including a second rotor having a second cavity; a first driven body coupled to and driven by the first rotor; and a second driven body coupled to and driven by the second rotor; wherein the first motor module and the second motor module are detachably coupled and can be independently driven in a coupled state.

[0022] The present invention provides an effect in which a multi-motor module assembly can easily respond to various environments through an independent driving structure of a unit motor module and a coupling structure between unit motor modules.

[0023] FIG. 1 is a drawing showing a multi-motor module assembly according to an embodiment of the present invention.

[0024] FIG. 2 is a drawing showing a separated state of a multi-motor module assembly according to an embodiment of the present invention.

[0025] FIG. 3 is a drawing showing the interior of a multi-motor module assembly according to an embodiment of the present invention.

[0026] FIG. 4 is a drawing showing a hollow and radially connected portion of a multi-motor module assembly according to an embodiment of the present invention.

[0027] FIG. 5 is a drawing showing an electric cable or gas pipe passing through a hollow and radially ...

[0028] FIG. 6 is a drawing showing a multi-motor module assembly in which three unit motor modules are combined, according to an embodiment of the present invention.

[0029] FIG. 7 is a drawing showing a state in which a multi-motor module assembly according to an embodiment of the present invention is used.

[0030] Those skilled in the art will be able to develop various devices that embody the principles of the invention and fall within the scope and spirit of the invention, even if not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concept and should be understood as being in no way limiting to the specifically listed embodiments and conditions.

[0031] The above-described objects, features and advantages will become more apparent through the following detailed description of the invention in conjunction with the accompanying drawings, so that those skilled in the art will be able to easily implement the technical idea of ​​the invention.

[0032] The embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal illustrations of the present invention. The dimensions of components depicted in these drawings may be exaggerated for the purpose of effectively explaining the technical content. The form of the illustrations may be altered due to manufacturing techniques and / or tolerances.

[0033] When describing various embodiments, components that perform the same function are given the same names and reference numbers for convenience even if the embodiments are different.

[0034] Expressions such as 'one direction' and 'one side' do not mean a specific direction and a specific side, but correspond to 'the other direction' and 'the other side'. Expression 'at least one of A, B, and C' means composed of one, two, or three of A, B, and C. The longitudinal direction means the +z direction and / or the -z direction, the rotation axis direction means the direction that is perpendicular to the z-axis and faces the rotation axis, and the radial direction means the direction opposite to the rotation axis direction. Furthermore, in some parts of this specification, components named 'first' and 'second' will be described by replacing them with components named 'units' or components from which 'first' and 'second' are omitted, and the configurations and operations already described in other embodiments will be omitted for convenience.

[0035] The present invention provides a multi-motor module assembly in which a plurality of single motor modules are detachably coupled to each other. The fundamental solution of the present invention lies in enabling the plurality of single motor modules to operate in a coupled state while also operating independently in a separated state. To this end, each single motor module may be formed as a complete unit containing the components necessary for independent operation.

[0036] Hereinafter, a unit motor module (1), which is a unit of a multi-motor module assembly (2) according to an embodiment of the present invention, will be described.

[0037] Fig. 1 is a drawing showing a multi-motor module assembly (2) according to an embodiment of the present invention. Fig. 2 is a drawing showing a separated state of a multi-motor module assembly (2) according to an embodiment of the present invention. Fig. 3 is a drawing showing the inside of a multi-motor module assembly (2) according to an embodiment of the present invention.

[0038] Referring to FIGS. 1 to 3, a unit motor module (1) may include at least one of a rotor (10), a stator (20), a bearing (30), a housing (40), and a bracket (50), and may further include an encoder (60) and / or a cover (70). The unit motor modules (1) may be provided in multiple numbers and may be detachably coupled to each other, and may be driven simultaneously in a coupled state and driven independently in a separated state.

[0039] The rotor (10) may include a hollow body (11), a magnetic body (12), a shaft portion (13), and a main body portion (14). The main body portion (14) may include a magnetic body support portion (15) and / or a bearing support portion (16).

[0040] A hollow (11) may be provided along the length direction from one end to the other end of the rotor (10). Each of a plurality of unit motor modules (1) constituting the multi-motor module assembly (2) may be provided with a hollow (11). The hollows (11) provided in each unit motor module (1) may have different inner diameters. The inner diameter of the first hollow (111) may be larger than the inner diameter of the second hollow (211). The first hollow (111) may be larger than the outer diameter of at least a portion of the second rotor (210).

[0041] The radius of the hollow (11) can vary along the longitudinal direction. The hollow (11) can have a radius that varies according to the protruding radial length of the magnetic support member (15) and bearing support member (16) described later.

[0042] The magnetic body (12) may be provided on the outer surface of the rotor (10). The magnetic body (12) may be provided in multiple numbers and may be provided spaced apart from each other in the circumferential direction along the outer surface of the rotor (10). The magnetic body (12) may be provided in a state of being spatially spaced apart from the stator (20). The magnetic body (12) may receive a magnetic force (attractive force or repulsive force) by a coil wound on the stator (20) to rotate the rotor (10) along the rotational axis, and may rotate together with the rotation of the rotor (10).

[0043] The magnetic support member (15) may be provided circumferentially along the outer surface of the rotor (10) in a portion of the rotor (10). The magnetic support member (15) may be provided to protrude radially from the outer surface of the rotor (10). The magnetic support member (15) may be provided to protrude up to a first length. The magnetic support member (15) may be an area where the magnetic body (12) is mounted and may support the magnetic body (12). The first length may mean a radial length from the rotation axis.

[0044] The bearing support (16) may be provided circumferentially along the outer surface of the rotor (10) in a portion of the rotor (10). The bearing support (16) may be provided to protrude radially from the outer surface of the rotor (10). The bearing support (16) may be provided to protrude to a second length that is smaller than the first length. The bearing support (16) may be an area that comes into contact with the inner ring (32) of the bearing (30) and may support the bearing (30). The bearing support (16) may be formed to extend from the magnetic support (15) in one longitudinal direction and / or the other longitudinal direction. The bearing support (16) may form a step together with the magnetic support (15). The second length may mean a radial length from the rotation axis.

[0045] The shaft portion (13) may constitute a part of the rotor (10). The shaft portion (13) may be formed to extend longitudinally from the main body portion (14). The shaft portion (13) may be connected to a driven body and may rotate the driven body. The driven body may be, but is not limited to, a robot arm or a propeller. The shaft portion (13) may be positioned and rotate within the housing (40) and / or within the hollow space (11) of another rotor (10). The shaft portion (13) may rotate while being spatially separated from the inner surface of the housing (40) and the inner surface of another rotor (10). The shaft portion (13) may form a step together with the main body portion (14).

[0046] The shaft portion (13) may be provided in various lengths. In some embodiments, when the shaft portion (13) is extremely short, the rotor (10) may appear to be composed of only the main body portion (14), and in this case, the area of ​​the main body portion (14) that is connected to the driven body and rotates the driven body may be treated as a shaft.

[0047] For example, the first shaft portion (113) of the first rotor (110) may be provided with a relatively short length, and the second shaft portion (213) of the second rotor (210) may be provided with a relatively long length (see FIG. 3). Preferably, the (n-1)th shaft may be provided with a shorter length than the nth shaft.

[0048] The stator (20) may include a base portion (21) and a plurality of teeth portions (22).

[0049] The base portion (21) can be mounted on the inner surface of the housing (40). The base portion (21) can be provided in a circumferential direction along the inner surface of the housing (40). The base portion (21) can include metal. The outer surface of the base portion (21) can be in contact with the inner surface of the housing (40), and the inner surface can be connected to a plurality of teeth portions (22) protruding from the inner surface. A plurality of teeth portions (22) can be provided for each unit motor module (1).

[0050] The teeth (22) may be provided to protrude from the inner surface of the base (21) in the direction of the rotation axis. The teeth (22) may be provided to be spaced apart from each other in the circumferential direction along the inner surface of the base (21). The teeth (22) may have a smaller width than the base (21). The teeth (22) may be provided to be spatially spaced apart from the magnetic body (12). The teeth (22) may be an area where a coil is wound. The teeth (22) may be provided to face the magnetic body (12). The coil is wound around the teeth (22) to provide magnetic force to the magnetic body (12) to rotate the rotor (10) along the rotation axis. The depth (radial direction) and width (longitudinal direction) of the first teeth (122) and the second teeth (222) may be provided to be different from each other (see FIG. 3).

[0051] The bearing (30) may include an outer ring (31) forming the outer side, an inner ring (32) forming the inner side, and a rolling element (33) provided between the outer ring (31) and the inner ring (32). The bearing (30) may be provided such that the outer ring (31) and the inner ring (32) are in contact with the housing (40) and the rotor (10), respectively. The rolling element (33) may be at least one of a ball and a roller, but is not limited thereto. The bearing (30) may fix the position of the stator (20) while reducing friction caused by the rotation of the stator (20).

[0052] At least one bearing (30) may be provided for each unit motor module (1). The bearing (30) may be provided such that the inner ring (32) contacts the bearing support (16) along the circumferential direction. The bearing (30) may be provided such that the outer ring (31) contacts the rotor (10) and / or the bracket (50) along the circumferential direction.

[0053] The housing (40) may include a side wall (41) formed to circumferentially surround the rotor (10), an opening forming portion (42) extending from the side wall (41) in the direction of the rotation axis to form an opening of the unit motor module (1) and an opening (80) of the multi-motor module assembly (2), and a housing extension portion (43) extending longitudinally from the opening forming portion (42) to contact the bearing (30).

[0054] The side wall (41) may be provided to surround the outer surface of the first rotor (110) while being spatially separated from the outer surface of the first rotor (110). The inner surface of the housing (40) may refer to the inner surface of the side wall (41). The side wall (41) may prevent foreign substances from entering the interior of the unit motor module (1) and protect the components from external impact.

[0055] An opening forming portion (42) may be provided to extend from the side wall (41) in the direction of the rotation axis. The opening forming portion (42) may be provided in an annular shape to form an opening and / or an opening (80) at the center. The opening forming portion (42) may prevent foreign substances from entering the interior of the unit motor module (1) and protect components from external impact.

[0056] The opening (80) can expose the rotor (10) to the outside. The opening (80) can expose multiple rotors (10) simultaneously. The opening (80) can expose at least one rotor (10, 110, 210, 310) to the outside.

[0057] The housing extension (43) may be provided to extend longitudinally from the opening forming portion (42). The housing extension (43) may be provided along the circumferential direction and may come into contact with the bearing (30). Specifically, the housing extension (43) may come into contact with the outer ring (31) of the bearing (30) along the circumferential direction.

[0058] The bracket (50) may include a circular bracket body portion (51) and a bracket extension portion (52) that extends longitudinally from the bracket body portion (51) and comes into contact with the bearing (30).

[0059] The bracket body part (51) can be coupled to the other end of a housing (40) having an opening or openings (80) at one end. The bracket body part (51) can prevent foreign substances from entering the interior of the unit motor module (1) and protect the components from external impact.

[0060] The bracket extension (52) may be provided to extend longitudinally from the bracket body (51). The bracket extension (52) may be provided along the circumferential direction and may come into contact with the bearing (30). Specifically, the housing extension (43) may come into contact with the outer ring (31) of the bearing (30) along the circumferential direction.

[0061] An encoder (60) can be coupled to one end (side) of a bracket (50) that is coupled to a housing (40). The encoder (60) can detect the rotation of the rotor (10) to determine the rotation speed. The encoder (60) can be coupled to the housing (40) and / or the cover (70).

[0062] The cover (70) can be coupled to the other end (side) of the encoder (60) which is coupled to the housing (40) at one end (side). The cover (70) can protect the encoder (60) from external impact.

[0063] The housing (40), bearing (30), stator (20), bracket (50), encoder (60) and cover (70) can form an opening to provide a space in which a rotor (10) can be positioned and a space in which another rotor (10) (another shaft portion (13)) can be positioned.

[0064] Next, a multi-motor module assembly (2) according to an embodiment of the present invention will be described.

[0065] The multi-motor module assembly (2) will be described, but the same content as that described in the above-described unit motor module (1) will be omitted.

[0066] With continued reference to FIGS. 1 to 3, a multi-motor module assembly (2) according to an embodiment of the present invention may include a first motor module (100) including a first rotor (110) having a first cavity (111); and a second motor module (200) including a second rotor (210) having a second cavity (211). The multi-motor module may be detachably coupled to the first motor module (100) and the second motor module (200) such that the second rotor (210) is positioned in the first cavity (111).

[0067] The second rotor (210) may be positioned in the first cavity (111). Specifically, the second body part (214) of the second rotor (210) may be positioned in the second motor module (200), and the second shaft part (213) may be positioned in the first cavity (111). The second rotor (210) may pass through the first cavity (111) and be positioned up to the opening of the first motor module (100) and the opening (80) of the multi-motor module assembly (2).

[0068] The outer diameter of the second shaft portion (213) may be smaller than the radius of the first hollow portion (111). The outer surface of the second shaft is positioned spatially apart from the inner surface of the first shaft, so that it can rotate independently of the first shaft without friction.

[0069] The first rotor (110) and the second rotor (210) can be coupled with the first driven body and the second driven body, respectively, and can rotate independently. Here, independent rotation means that the unit motor module (1) is driven without the influence of another unit motor module (1) in a coupled state, and independent driving means that the unit motor module (1) is driven in a separated state, and the two are distinct concepts. The first driven body and the second driven body can be coupled with the first rotor (110) and the second rotor (210), respectively, and can rotate independently.

[0070] The first motor module (100) and the second motor module (200) can be driven simultaneously in a coupled state, and can be driven independently in a separated state. Specifically, the first motor module (100) and the second motor module (200) can be driven independently without interference from each other in a coupled state, and can be driven as a single, complete unit in a separated state.

[0071] The first motor module (100) may include at least one of a first rotor (110), a first stator (120), a first housing (140), and a first bracket (150), and may include a first encoder (160) and / or a first cover (170). Accordingly, the first motor module (100) is configured as a complete body and can be driven independently while being separated from the second motor module (200).

[0072] The second motor module (200) may include at least one of a second rotor (210), a second stator (220), a second housing (240), and a second bracket (250), and may include a second encoder (260) and / or a second cover (270). Accordingly, the second motor module (200) is configured as a complete body and can be driven independently while being separated from the first motor module (100).

[0073] The first opening forming portion (142) may be provided so as to extend in the direction of the rotation axis from one end of the first side wall (141). The second opening forming portion (242) may be provided so as to extend in the direction of the rotation axis between one end and the other end of the second side wall (241).

[0074] The second motor module (200) may include a receiving portion (81) in which one side of the second opening-forming portion (242) and one end of the second side wall (241) are formed to be stepped, and which receives the first encoder (160) and / or the first cover (170) of the first motor module (100). The second motor module (200) may be detachably coupled to the first bracket (150) of the first motor module (100) while receiving the first encoder (160) and / or the first cover (170). The n-th motor module may be detachably coupled to the (n-1) bracket of the (n-1)th motor module while receiving the (n-1)th encoder and / or the (n-1)th cover through the n-th receiving portion (n>=2).

[0075] The multi-motor module assembly (2) according to an embodiment of the present invention is provided to enable independent driving and independent driving in a combined state and a separated state, respectively, so that it can easily respond to various environments by combining the number of unit motor modules (1) corresponding to the number of driven objects as needed.

[0076] The first motor module (100) may include a first housing (140) having an opening (80) at one end and a first bracket (150) coupled to the other end of the first housing (140). The second motor module (200) may include a second housing (240) having one end detachably coupled to the first bracket (150) and a second bracket (250) coupled to the other end of the second housing (240). The opening may be a concept including the opening (80), but the opening (80) is provided at one end of the first motor module (100) and at one end of the multi-motor module assembly (2), and thus the two are distinct concepts. That is, the opening (80) may refer to an opening provided at one end of the first motor module (100).

[0077] The first bracket (150) and the second housing (240) can be detachably coupled. A detachable coupling means a coupling that can be operated as a complete unit even when the unit motor modules (1) coupled to each other are separated.

[0078] The first bracket (150) and the first housing (140) cannot be interpreted as a separable combination because they lose their function of protecting the components when separated. The first motor module (100) and the second motor module (200) can be driven independently in a combined state through the separable combination of the first bracket (150) and the second housing (240), and can be driven independently in a separated state.

[0079] With continued reference to FIGS. 2 and 3, the first motor module (100) may include a first housing (140) formed to surround an outer surface of the first rotor (110) and a first stator (120) fixed to an inner surface of the first housing (140) and spaced apart from the first rotor (110). The second motor module (200) may include a second housing (240) formed to surround at least a portion of an outer surface of the second rotor (210) and a second stator (220) fixed to an inner surface of the second housing (240) and spaced apart from the second rotor (210). In this case, the inner surface of the second housing (240) may be formed closer to the rotational axis than the inner surface of the first housing (140). Additionally, the second stator (220) may be positioned closer to the rotation axis than the first stator (120).

[0080] The outer diameter of the second shaft portion (213) may be provided to be smaller than the radius of the first hollow portion (111). The outer diameter of the second main body portion (214) may be provided to be smaller than the outer diameter of the first main body portion (114). In order for the first stator (120) and the second stator (220) to maintain the same distance from the first main body portion (114) and the second main body portion (214) (or the first magnetic body (112) and the second magnetic body (212)), the second stator (220) may be positioned closer to the rotation axis than the first stator (120).

[0081] In addition, the inner surface of the second housing (240) (second side wall (241)) may be formed closer to the rotation axis than the inner surface of the first housing (140) (first side wall (141)). Since the second stator (220) is located on the inner surface of the second housing (240) and the first stator (120) is located on the inner surface of the first housing (140), the second stator (220) may be located closer to the rotation axis than the first stator (120).

[0082] By maintaining the distance between the first stator (120) and the first magnetic body (112) and the distance between the second stator (220) and the second magnetic body (212) the same, it is possible to more easily maintain the output of the first rotor (110) and the second rotor (210) having different outer and inner diameters the same.

[0083] Referring to FIGS. 2 and 3, the first stator (120) may include a first tooth portion (122) protruding in the direction of the rotation axis and on which a coil is wound, and the second stator (220) may include a second tooth portion (222) protruding in the direction of the rotation axis and on which a coil is wound. At this time, the second tooth portion (222) may be provided with a smaller width (longitudinal direction) and a larger depth (radial direction) than the first tooth portion (122).

[0084] In order for the first stator (120) and the second stator (220) to maintain the same distance from the first main body (114) and the second main body (214) (or, the first magnetic body (112) and the second magnetic body (212)), respectively, the rotational axis direction depth (length) of the second stator (220) may be greater than the rotational axis direction depth (length) of the first stator (120). In order to maintain the same output of the first rotor (110) and the second rotor (210), the longitudinal width (length) of the second stator (220) may be smaller than the longitudinal width (length) of the first stator (120).

[0085] The first tooth section (122) and the second tooth section (222) may be regions where coils are wound. The output of the first motor module (100) and the second motor module (200) may be determined by the thickness of the coil, the number of coil turns, the coil space factor, etc. As the depth of the second tooth section (222) increases compared to the first tooth section (122), the width is reduced so that the range of the coil winding region can be adjusted, and by making it possible to easily adjust elements such as the thickness of the coil, the number of coil turns, and the coil space factor, the output of the first motor module (100) and the second motor module (200) can be maintained the same.

[0086] With continued reference to FIGS. 2 and 3, the outer surface of the second housing (240) may include a recessed portion (82) formed at least partially in the direction of the rotational axis.

[0087] The first motor module (100) and the second motor module (200) can be detachably coupled to each other. The first bracket (150) and the second housing (240) can be detachably coupled to each other. The first motor module (100) and the second motor module (200) can be provided via a coupling means (83). The coupling means (83) may preferably include a bolt, but is not limited thereto.

[0088] The recessed portion (82) can provide a space for accommodating a coupling means (83). By accommodating the coupling means (83) in the recessed portion (82) to couple the first motor module (100) and the second motor module (200), the outermost outer diameter of the first motor module (100) and the outermost outer diameter of the second motor module (200) can be made the same.

[0089] Since the inner surface of the second housing (240) can be formed closer to the rotation axis than the inner surface of the first housing (140), the thickness from the inner surface of the second housing (240) in the area where the second stator (220) is positioned to the outermost outer surface can be maintained to be greater than the thickness from the inner surface of the first housing (140) in the area where the first stator (120) is positioned to the outermost outer surface.

[0090] Since the thickness of the second stator (220) can be maintained greater than the thickness of the first stator (120), the second stator (220) can provide a space in which a coupling means (83) is accommodated by including a recessed portion (82).

[0091] The multi-motor module assembly (2) according to an embodiment of the present invention can easily and quickly respond to various environments by easily switching between the combined and separated states by separably combining the unit motor modules (1) with only the combining means (83).

[0092] Fig. 4 is a drawing showing a hollow portion (11) and a radial communication portion (84) of a multi-motor module assembly (2) according to an embodiment of the present invention. Fig. 5 is a drawing showing an electric cable or gas pipe passing through a hollow portion (11) and a radial communication portion (84) of a multi-motor module assembly (2) according to an embodiment of the present invention.

[0093] Referring to FIGS. 4 and 5, the second motor module (200) may include a radial communication portion (84) formed to penetrate the side wall (41) of the second housing (240). The first hollow portion (111) and the radial communication portion (84) may be connected to provide a space through which an intermediate member (85) passes. The first hollow portion (111) may extend to one end and the other end of the multi-motor module assembly (2) to provide a space through which an intermediate member (85) passes.

[0094] The second radial opening (284) may be formed to penetrate the second side wall (241) of the second housing (240) from the first hollow (111). The second radial opening (284) may be in communication with the first hollow (111) and the outside. The second radial opening (284) may provide a space through which the intermediate member (85) passes.

[0095] The intermediary member (85) may be at least one of an electric cable and a gas pipe. The intermediary member (85) may be a means of transmitting energy, wherein the force may be energy in a physical sense such as electric power or pneumatic pressure.

[0096] For example, by passing the intermediate member (85) through the opening (80), the first hollow (111) and the second radial connection (284), power can be supplied to the multi-motor module assembly (2) from the outside or air pressure can be supplied to the robot arm.

[0097] The multi-motor module assembly (2) according to an embodiment of the present invention can minimize the movement path of the intermediate member (85) through the radial communication portion (84).

[0098] The first hollow (111) may be formed to extend to one end and the other end of the multi-motor module assembly (2). The first hollow (111) may be connected to the outside at both ends. The first hollow (111) may provide a space through which the intermediate member (85) passes.

[0099] The second hollow (211) may be formed to extend to one end and the other end of the multi-motor module assembly (20). The second hollow (211) may be connected to the outside at both ends. The second hollow (211) may provide a space through which an intermediate member (85) passes. The function of the intermediate member (85) is as described above.

[0100] The multi-motor module assembly (2) according to an embodiment of the present invention can minimize the movement path of the intermediate member (85) through the first hollow (111) and / or the second hollow (211).

[0101] Next, a multi-motor module assembly (2) in which three or more unit module assembly units are combined is described.

[0102] FIG. 6 is a drawing showing a multi-motor module assembly (2) in which three unit motor modules (1) are combined, in an embodiment of the present invention.

[0103] Referring to FIG. 6, the multi-motor module assembly (2) according to an embodiment of the present invention may further include a third motor module (300) including a third rotor (310) having a third cavity (311). The multi-motor module assembly (2) may be detachably coupled with the first motor module (100), the second motor module (200), and the third motor module (300) such that the second rotor (210) is positioned in the first cavity (111) and the third rotor (310) is positioned in the second cavity (211). The first motor module (100), the second motor module (200), and the third motor module (300) may be independently driven in a separated state. Components not mentioned in the third motor module (300) may be at least partially identical to components of the second motor module (200) or the first motor module (100).

[0104] The third motor module (300) may include at least one of a third rotor (310), a third stator (320), a third housing (340), and a third bracket (350), and may include a third encoder (360) and / or a third cover (370). Accordingly, the third motor module (300) is configured as a complete body and can be driven independently while being separated from the first motor module (100) and the second motor module (200). The nth motor module is also as described above.

[0105] The second rotor (210) may be positioned in the first hollow (111). The third rotor (310) may be positioned in the second hollow (211). As described above, the relationship between the third rotor (310) and the second rotor (210) may be formed to be identical or similar to the relationship between the second rotor (210) and the first rotor (110). A detailed description will be omitted.

[0106] With continued reference to FIG. 6, a multi-motor module assembly (2) according to an embodiment of the present invention may include a plurality of motor modules to which unit motor modules (1) are detachably coupled. The unit motor module (1) may be independently driven and may include a rotor (10) provided with a hollow portion (11), a magnetic body (12) provided on an outer surface of the rotor (10), a stator that transmits magnetic force to the magnetic body (12) while being spaced apart from the magnetic body (12), and a housing (40) provided to fix the stator and surround the rotor (10). The plurality of motor modules may be coupled to each other so that a rotor (10) provided with a hollow portion (11) is positioned in one hollow portion (11) and another hollow portion (11).

[0107] Next, the usage status of the multi-motor module assembly (2) according to an embodiment of the present invention will be examined.

[0108] Fig. 7 is a drawing showing a state in which a multi-motor module assembly (2) according to an embodiment of the present invention is used.

[0109] Referring to Fig. 7, a state in which a multi-motor module assembly (2) according to an embodiment of the present invention is used in a semiconductor wafer transport device is shown. A first driven body (3) and a second driven body (4) are coupled to a first rotor (110) and a second rotor (210) of the multi-motor module assembly (2) and can be driven according to the rotation of the first rotor (110) and the second rotor (210).

[0110] Since the first motor module (100) and the second motor module (200) can be driven independently in a coupled state, the first rotor (110) and the second rotor (210) can be rotated in the same or opposite direction. Accordingly, the first driven body (3) and the second driven body (4) can transport semiconductors while rotating in the same or opposite direction.

[0111] A multi-motor module assembly (2) can include at least two unit motor modules (1) and can independently drive at least two driven bodies (3, 4).

[0112] Unlike FIG. 7, the multi-motor module assembly (2) according to an embodiment of the present invention can be connected to and used with the propellers of a helicopter or drone. Two or more unit motor modules (1) can be each connected to two or more blades to independently drive the blades. Furthermore, it can be used in any field where coaxial rotation of multiple driven bodies is required.

[0113] A multi-motor module assembly (2) according to an embodiment of the present invention may include a plurality of motor modules. The plurality of motor modules may be the number of unit motor modules (1) coupled to each other. Here, the number is not limited to that described herein and may be selected as needed.

[0114] The multi-motor module assembly (2) according to an embodiment of the present invention can provide an effect in which the multi-motor module assembly (2) can easily respond to various environments through the independent driving structure of the unit motor modules (1) and the chain coupling structure between the unit motor modules (1).

[0115] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0116] [Explanation of symbols]

[0117] 1: Unit motor module

[0118] 2: Multi-motor module assembly

[0119] 10: Rotor

[0120] 11: Hollow

[0121] 12: Magnetic body

[0122] 13: Shaft section

[0123] 14: Main body

[0124] 15: Magnetic support part

[0125] 16: Bearing support

[0126] 20: Stator

[0127] 21: Bass section

[0128] 22: Teeth

[0129] 30: Bearing

[0130] 31: Outer ring

[0131] 32: Inner ring

[0132] 33: Electric body

[0133] 40: Housing

[0134] 41: Side wall

[0135] 42: Opening formation

[0136] 43: Housing extension

[0137] 50: Bracket

[0138] 51: Bracket body part

[0139] 52: Bracket extension

[0140] 60: Encoder

[0141] 70: Cover

[0142] 80: Opening

[0143] 81: Reception area

[0144] 82: Depression

[0145] 83: Combination means

[0146] 84: Radial joint

[0147] 85: Absence of mediator

[0148] 100: First motor module

[0149] 200: Second motor module

[0150] 300: Third motor module

Claims

1. A first motor module including a first rotor having a first cavity; and A second motor module including a second rotor having a second cavity; A multi-motor module assembly in which the first motor module and the second motor module are detachably coupled so that the second rotor is positioned in the first hollow.

2. In paragraph 1, A multi-motor module assembly in which the first motor module and the second motor module are driven simultaneously in a coupled state and can be driven independently in a separated state.

3. In paragraph 1, The above first motor module, It further includes a first housing having an opening formed to surround the outer surface of the first rotor and a first bracket coupled to the other end of the first housing, The above second motor module, A multi-motor module assembly further comprising a second housing formed to be detachably coupled to the first bracket and surround an outer surface of the second rotor, and a second bracket coupled to the other end of the second housing.

4. In paragraph 1, The above first motor module, It further includes a first housing formed to surround the outer surface of the first rotor and a first stator fixed to the inner surface of the first housing and spaced apart from the first rotor, The above second motor module, It further includes a second housing formed to surround the outer surface of the second rotor and a second stator fixed to the inner surface of the second housing and spaced apart from the second rotor. A multi-motor module assembly wherein the second stator is positioned closer to the rotation axis than the first stator.

5. In paragraph 4, A multi-motor module assembly in which the inner surface of the second housing is formed closer to the rotation axis than the inner surface of the first housing.

6. In paragraph 4, The first stator includes a first tooth portion protruding in the direction of the rotation axis and on which a coil is wound, and the second stator includes a second tooth portion protruding in the direction of the rotation axis and on which a coil is wound. A multi-motor module assembly in which the second tooth portion is provided with a smaller width and a larger depth than the first tooth portion.

7. In paragraph 1, A multi-motor module assembly, wherein the outer surface of the second housing includes a recessed portion formed at least partially in the direction of the rotation axis.

8. In paragraph 1, The second motor module includes a radial connecting portion formed to penetrate the side wall of the second housing, A multi-motor module assembly in which the first hollow and radial communication portions are connected to provide a space through which an intermediate member passes.

9. In paragraph 1 A multi-motor module assembly, wherein the first hollow portion extends to one end and the other end of the multi-motor module assembly to provide a space through which an intermediate member passes.

10. In paragraph 1, Further comprising a third motor module including a third rotor having a third cavity; A multi-motor module assembly, wherein the first motor module to the third motor module are detachably coupled so that the second rotor is positioned in the first hollow and the third rotor is positioned in the second hollow, and the first motor module to the third motor module are each capable of independent driving in a detached state.

11. A unit motor module comprises a plurality of motor modules that are detachably coupled, The above unit motor module can be driven independently, It comprises a rotor having a hollow cavity, a magnetic body provided on the outer surface of the rotor, a stator that transmits magnetic force to the magnetic body while being spaced apart from the magnetic body, and a housing that fixes the stator and surrounds the rotor. A multi-motor module assembly in which the above plurality of motor modules are coupled to each other so that a rotor having a different hollow is positioned in one hollow.

12. A first motor module including a first rotor having a first cavity; A second motor module including a second rotor having a second cavity; A first driven body coupled to and driven by the first rotor; and A second driven body coupled to and driven by the second rotor is included; A semiconductor wafer transfer device having a multi-motor module assembly in which the first motor module and the second motor module are detachably coupled and independently driven in a coupled state.

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