Shape measurement system, structure manufacturing method, structure manufacturing system, and shape measurement method

Abstract

The present invention makes it possible to appropriately measure the shape of a subject. A shape measurement system (1) is provided with: a projection device (60) having a first projection device (60a) that projects illumination light onto a first irradiation region and a second projection device (60b) that projects illumination light onto a second irradiation region, which is different from the first irradiation region; a first imaging device that captures images of the illumination light projected onto the first irradiation region and the second irradiation region, the images being formed on a subject (A); and a computation device that calculates the shape of the subject (A) on the basis of the images of the first irradiation region and the second irradiation region, the images being captured by the first imaging device.

Description

Shape measurement system, structure manufacturing method, structure manufacturing system, and shape measurement method

[0001] The present invention relates to a shape measurement system, a structure manufacturing method, a structure manufacturing system, and a shape measurement method.

[0002] 2. Description of the Related Art Conventionally, there is known a dimension measuring apparatus that photographs an object to be measured on a stage and determines the dimension values ​​of a measurement target portion of the object to be measured (see, for example, Patent Document 1).

[0003] US Patent Publication No. 2019 / 0139247

[0004] According to a first aspect of the present disclosure, a shape measurement system includes a projection device having a first projection device that projects illumination light onto a first illumination area and a second projection device that projects illumination light onto a second illumination area different from the first illumination area; a first imaging device that captures images of the illumination light projected onto the first illumination area and the second illumination area that are formed on a test object; and a calculation device that calculates a shape of the test object based on the images of the first illumination area and the second illumination area captured by the first imaging device.

[0005] According to a second aspect of the present disclosure, a shape measurement system includes a projection device that projects illumination light onto a first illumination area and a second illumination area located at a position different from the first illumination area, a first imaging device that captures images of the illumination light projected onto the first illumination area and the second illumination area, which are formed on a test object, and a calculation device that calculates the shape of the test object based on the images of the first illumination area and the second illumination area captured by the first imaging device.

[0006] According to a third aspect of the present disclosure, a method for manufacturing a structure includes a design process for creating design information regarding the shape of the structure, a molding process for manufacturing the structure based on the design information, a measurement process for measuring the shape of the manufactured structure using the shape measurement system, and an inspection process for comparing the shape information obtained in the measurement process with the design information.

[0007] According to a fourth aspect of the present disclosure, a structure manufacturing system includes a design device that creates design information regarding the shape of a structure, a molding device that manufactures the structure based on the design device, the shape measurement system that measures the shape of the manufactured structure, and a control device that compares the shape information regarding the shape of the structure obtained by the shape measurement system with the design information.

[0008] According to a fifth aspect of the present disclosure, a shape measurement method includes projecting illumination light onto a first illumination area using a first projection device, projecting illumination light onto a second illumination area different from the first illumination area using a second projection device, capturing images of the illumination light projected onto the first illumination area and the second illumination area formed on a test object, and calculating a shape of the test object based on the captured images of the first illumination area and the second illumination area.

[0009] According to a sixth aspect of the present disclosure, a shape measurement method includes projecting illumination light onto a first illumination area and a second illumination area located at a position different from the first illumination area by a projection device; capturing images of the illumination light projected onto the first illumination area and the second illumination area formed on a test object; and calculating a shape of the test object based on the images of the first illumination area and the second illumination area captured by the first imaging device.

[0010] 1 is a schematic perspective view of a shape measurement system according to an embodiment of the present invention. FIG. 1 is a schematic view of an imaging unit viewed from the Z direction. FIG. 2 is a schematic view showing the configuration of optical members included in the imaging unit. FIG. 3 is a schematic view showing the position of a projection device viewed from the Z direction. FIG. 4 is a schematic view illustrating the configuration of optical members of a projection device. FIG. 5 is a schematic perspective view of an optical element. FIG. 6 is a schematic view of an optical element viewed from the Y direction. FIG. 7 is a schematic view illustrating an example of an irradiation area. FIG. 8 is a block diagram of a shape system according to an embodiment of the present invention. FIG. 9 is a functional block diagram of a calculation device according to an embodiment of the present invention. FIG. 10 is a flowchart illustrating control processing of a shape measurement system. FIG. 11 is a flowchart illustrating composite image generation processing. FIG. 12 is a flowchart illustrating calculation processing of the shape of a test object. FIG. 13 is a schematic timing chart illustrating the relationship between the imaging time at which an imaged image is generated and the three-dimensional imaging time at which a pattern image is generated. FIG. 14 is a diagram illustrating an example of a shape measurement system. FIG. 15 is a diagram illustrating an example of a shape measurement system. FIG. 16 is a schematic view showing the configuration of a system including a shape measurement system. FIG. 17 is a block diagram of a manufacturing system. FIG. 18 is a flowchart illustrating the flow of processing by the manufacturing system.

[0011] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The components in the following embodiments include those that can be easily imagined by a person skilled in the art, those that are substantially the same, and those that are within the so-called equivalent range. Furthermore, the components disclosed in the following embodiments can be combined as appropriate.

[0012] (Shape measurement system) Fig. 1 is a schematic perspective view of a shape measurement system according to this embodiment. The shape measurement system 1 is a system that captures an image of an imaging range that includes at least a portion of a test object A placed on a mounting surface ST of a stage, and measures the shape of the test object. The captured image of the test object A is used, for example, to measure the dimensions and shape of the test object. The shape measurement system 1 has an imaging unit 11, a support device 12, an operation device 13, a display device 14, a drive device 15, a memory 17, a communication device 18, a calculation device 19, and a projection device 60.

[0013] The imaging unit 11 is a device that captures an image of the specimen A placed on the placement surface ST. The configuration of the imaging unit 11 will be described in detail later.

[0014] The mounting surface ST is disposed on a base member B. The base member B is disposed on a vibration isolation mechanism 126. The vibration isolation mechanism 126 includes an elastic member. In this embodiment, the elastic member of the vibration isolation mechanism 126 is a plate-shaped member made of rubber.

[0015] The support device 12 is configured to movably support the imaging unit 11 and includes an X-axis 121X, a Y-axis 121Y, and a Z-axis 121Z. Each axis is made of metal such as cast iron. The X-axis 121X supports the Y-axis 121Y and, together with the Y-axis 121Y, moves the imaging unit 11 in the X direction along the mounting surface ST. The Y-axis 121Y supports the Z-axis 121Z and, together with the Z-axis 121Z, moves the imaging unit 11 in the Y direction along the mounting surface ST and perpendicular to the X direction. The Z-axis 121Z supports the imaging unit 11 and moves the imaging unit 11 in the Z direction perpendicular to the mounting surface ST. Note that, hereinafter, the direction toward one of the X directions will be referred to as the +X direction, and the direction toward the other of the X directions (the direction opposite to the +X direction) will be referred to as the -X direction. Similarly, the direction toward one side of the Y direction is the +Y direction, and the direction toward the other side of the Y direction (the opposite direction to the +Y direction) is the -Y direction. A cable guide 125A for guiding a cable that supplies power to move the Y-axis 121Y and the Z-axis 121Z is connected to the X-axis 121X, a cable guide 125B (not shown) for guiding a cable that supplies power to move the Z-axis 121Z is connected to the Y-axis 121Y, and a cable guide 125C for guiding a cable that supplies power to the imaging unit 11 is arranged on the Z-axis 121Z.

[0016] The support device 12 also has a position measurement unit 122. The position measurement unit 122 is configured to measure displacement of the imaging unit 11 in the X, Y, and Z directions from a reference position, and includes, for example, a linear encoder. The position measurement units 122 are arranged on the X-axis 121X, the Y-axis 121Y, and the Z-axis 121Z, respectively.

[0017] The position measurement unit 122 measures the scales held by leaf springs on the surfaces of the X-axis 121X, Y-axis 121Y, and Z-axis 121Z. A low-friction material may be used for the surface or scale of each axis. For example, the static friction coefficient of the low-friction material disposed on the surface of each axis is preferably smaller than the static friction coefficient of the axis itself. This prevents the scale of the position measurement unit 122 from expanding or contracting due to temperature changes. The low-friction material may be a resin such as PTFE (polytetrafluoroethylene). The low-friction material may also be a metal layer disposed on the surface of each axis by plating the axis. The position measurement units 122 for the X-axis 121X and Y-axis 121Y are preferably located closer to the stage ST in terms of accuracy, while the position measurement unit 122 for the Z-axis 121Z is preferably located closer to the optical axis of the imaging unit 11 in terms of accuracy. That is, the position measurement unit 122 for the X-axis 121X is preferably located on the side of the X-axis 121X facing the stage ST, and the position measurement unit 122 for the Y-axis 121Y is preferably located on the bottom surface of the Y-axis 121Y. The position measurement unit 122 for the Z-axis 121Z is preferably located at the top of the imaging unit 11 so as to overlap with the optical axis. The position of the position measurement unit 122 may be any position, and in practice the position should be determined taking into consideration ease of maintenance and anti-fouling properties.

[0018] The operation device 13 is configured to accept operations for the shape measurement system 1, and includes, for example, a keyboard and a mouse. The operation device 13 generates a signal according to the accepted operation. The operation device 13 may be, for example, a touch panel.

[0019] The display device 14 is configured to display an image and includes, for example, a liquid crystal display, an organic EL (Electro-Luminescence) display, etc. The display device 14 displays an image according to the supplied image data.

[0020] The driving device 15 is a device that drives the shape measurement system 1. Specifically, the driving device 15 moves the Y-axis 121Y, the Z-axis 121Z, and the imaging unit 11 in the X direction, moves the Z-axis 121Z and the imaging unit 11 in the Y direction, and moves the imaging unit 11 in the Z direction. The driving device 15 also moves the illumination device 50 (described below) in the Z direction relative to the lens barrel 20 (described below) using the Z-axis motor 124. The driving device 15 includes a power source for driving the shape measurement system 1.

[0021] The memory 17 is an example of a storage unit, and is a device that stores data and programs. The memory 17 includes, for example, a semiconductor memory. The memory 17 stores an operating system program, a driver program, an application program, data, and the like that are used in processing by the arithmetic unit 19. The programs executed by the arithmetic unit 19 are installed into the memory 17 from a computer-readable, non-transitory, portable storage medium such as a CD-ROM (Compact Disc Read Only Memory) or a DVD-ROM (Digital Versatile Disc Read Only Memory).

[0022] The communication device 18 is a component that enables the shape measurement system 1 to communicate with other devices, and includes a communication interface circuit. The communication interface circuit is a communication interface circuit for a wireless LAN (Local Area Network), a wired LAN, or the like. The shape measurement system 1 supplies data transmitted from other devices to the calculation device 19, and transmits data supplied from the calculation device 19 to other devices.

[0023] The arithmetic unit 19 is a device that comprehensively controls the operation of the shape measurement system 1. The arithmetic unit 19 includes, for example, a CPU (Central Processing Unit). The arithmetic unit 19 may also include a DSP (Digital Signal Processor), an LSI (Large Scale Integration), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), etc. The arithmetic unit 19 executes various processes based on programs stored in the memory 17. Details of the processes executed by the arithmetic unit 19 will be described later.

[0024] (Imaging Unit) The imaging unit 11 captures images while moving in the Y direction. That is, the scanning direction of the imaging unit 11 can be said to be the Y direction. More specifically, the scanning direction in this embodiment is the +Y direction. However, this is not limited to this, and the scanning direction may be the -Y direction. The imaging unit 11 may capture images while moving in the Y direction, or may capture images after moving a predetermined distance in the Y direction and then stopping. Although the scanning direction is the Y direction in this embodiment, scanning in the X direction is also acceptable. There may also be multiple scanning directions. For example, the scanning direction may be changed to the X direction after scanning in the Y direction up to a predetermined position.

[0025] 2 is a schematic diagram of the imaging unit 11 as viewed from the Z direction. As shown in Fig. 2, the imaging unit 11 includes a lens barrel 20, a second imaging device 30, a first imaging device 40, an illumination device 50, a projection device 60, an epi-illumination device 70, and a base 123.

[0026] The lens barrel 20 is a casing that houses various components such as the second imaging device 30. The lens barrel 20 may have any shape, but in this embodiment it is a cylindrical member whose longitudinal direction is in the Z direction.

[0027] The second imaging device 30 is a device that images the test object A. The second imaging device 30 images an image of illumination light La (described later) projected onto the test object A by at least one of the illumination device 50 and the epi-illumination device 70, as a two-dimensional shape of the test object A. The second imaging device 30 is housed in the lens barrel 20. The second imaging device 30 is housed in the lens barrel 20 so that the optical axis AX1 is aligned along the Z direction.

[0028] The first imaging device 40 is a device that captures an image of illumination light Lb (described later) projected onto the test object A by the projection device 60. The first imaging device 40 is disposed on the side in a direction perpendicular to the Z direction with respect to the lens barrel 20 (the optical axis AX1 of the second imaging device 30 disposed in the lens barrel 20). In this embodiment, the first imaging device 40 is disposed on the −Y direction side of the lens barrel 20 (the optical axis AX1). However, the position at which the first imaging device 40 is provided, in other words, the relative position of the first imaging device 40 with respect to the lens barrel 20 (the optical axis AX1), is not limited to this and may be arbitrary.

[0029] The projection device 60 projects illumination light Lb onto a first irradiation area on the installation area ST and a second irradiation area located at a position different from the first irradiation area on the installation area ST. That is, the projection device 60 projects illumination light Lb onto multiple areas (irradiation areas) located at different positions during the same period. As will be described in detail later, in this embodiment, the projection device 60 projects illumination light having a light-dark pattern (structured illumination light) as the illumination light Lb. The first imaging device 40 captures an image of the illumination light Lb having a light-dark pattern projected by the projection device 60 onto different positions (irradiation areas) on the test object A.

[0030] The projection device 60 is disposed on the side of the lens barrel 20 (optical axis AX1) in a direction perpendicular to the Z direction. In this embodiment, the projection device 60 is disposed on the X direction side of the lens barrel 20 (optical axis AX1), in other words, on the side in a direction perpendicular to the Y direction, which is the scanning direction. More specifically, in this embodiment, a first projection device 60a and a second projection device 60b are provided as the projection device 60. The first projection device 60a is disposed on the −X direction side of the lens barrel 20 (optical axis AX1), and the second projection device 60b is disposed on the +X direction side of the lens barrel 20 (optical axis AX1). Furthermore, in this embodiment, the projection devices 60 (in this embodiment, the first projection device 60a and the second projection device 60b) are located outside the illumination device 50 (radially outward when the optical axis AX1 is the axial direction). The installation positions of the projection devices 60 (first projection device 60a and second projection device 60b) are not limited to this and may be arbitrary. However, it is preferable that the first projection device 60a and the second projection device 60b are installed so that the optical axis AX1 of the second image capture device 30 is located between the first projection device 60a and the second projection device 60b. It is also preferable that the first projection device 60a and the second projection device 60b are installed so that the optical axis AX2 of the first image capture device 40, which will be described later, is located between the first projection device 60a and the second projection device 60b. It is to be noted that the projection device 60 is not limited to a configuration having two projection devices, and may be a configuration having only one projection device (either the first projection device 60a or the second projection device 60b) or a configuration having three or more projection devices.

[0031] The epi-illumination device 70 is a device that irradiates illumination light La onto the installation area ST. The epi-illumination device 70 irradiates illumination light La in a direction along the optical axis AX1 of the second image capture device 30. The epi-illumination device 70 is disposed on a side in a direction perpendicular to the Z direction with respect to the lens barrel 20 (optical axis AX1). In this embodiment, the epi-illumination device 70 is disposed in a direction between the +X direction and the +Y direction (first oblique direction) with respect to the lens barrel 20 (optical axis AX1 of the second image capture device 30) when viewed from the Z direction. In other words, when viewed from the Z direction, if the direction along the +X direction from the center (optical axis AX1) of the lens barrel 20 along the +Y direction is defined as 0° and the direction along the +Y direction from the center (optical axis AX1) of the lens barrel 20 along the +Y direction is defined as 90°, the epi-illumination device 70 is disposed on a first oblique direction side that is higher than 0° but less than 90° with respect to the lens barrel 20 (optical axis AX1). For example, the epi-illumination device 70 may be disposed on the first diagonal direction side at an angle of 45° with respect to the lens barrel 20 (optical axis AX1). However, the position at which the epi-illumination device 70 is provided, in other words, the relative position of the epi-illumination device 70 with respect to the lens barrel 20 (optical axis AX1), is not limited to this and may be arbitrary. Furthermore, the epi-illumination device 70 is not essential and may not be provided.

[0032] The illumination device 50 is a device that irradiates illumination light La onto the installation area ST. The illumination device 50 irradiates illumination light La in a direction intersecting the optical axis AX1 of the second image capture device 30. The illumination device 50 is an annular illumination device provided around the outer circumferential surface of the end of the lens barrel 20 on the Z direction side. The illumination light La from the illumination device 50 illuminates the imaging range of the second image capture device 30. The illumination device 50 irradiates illumination light La radially inward. Multiple light source units of the illumination device 50 that irradiate radially inward of the illumination device 50 are arranged in the Z direction, and the positions of the light source units vary depending on the position in the Z direction. In the Z direction, the distance between the light source unit and the optical axis AX1 becomes shorter as the distance from the test object A increases, and each light source unit irradiates illumination light La obliquely onto the test object A. Note that the illumination device 50 is not essential and may not be provided. The detailed arrangement position of the illumination device 50 will be described later.

[0033] (Base) The base 123 is a member that mounts the Z-axis 121Z to the base 121Y so that it can move in the Y direction. The base 120A is a member that mounts the imaging unit 11 to the Z-axis 121Z. The base 120A is mounted to the imaging unit 11 so that its position relative to the imaging unit 11 (the lens barrel 20 in this embodiment) is fixed, and is mounted to the Z-axis 121Z so that its position in the Z direction relative to the Z-axis 121Z can be changed. In this embodiment, the base 120A is mounted to the lens barrel 20 of the imaging unit 11. The base 120A may also be mounted to a member of the imaging unit 11 other than the lens barrel 20.

[0034] The base 120A is attached to the Z-axis 121Z so that its position in the Y direction relative to the Z-axis 121Z is fixed, and the Z-axis 121Z to which the base 120A is attached is attached to the Y-axis 121Y by the base 123 so that it can move in the Y direction. Therefore, it can be said that the base 120A attaches the imaging unit 11 to the Y-axis 121Y so that it can move in the Y direction relative to the Y-axis 121Y (first axis member). In other words, the base 120A is attached to the Y-axis 121Y so that its position in the Y direction relative to the Y-axis 121Y can be changed. Similarly, the Y-axis 121Y is attached to the X-axis 121X so that it can move in the X direction. Therefore, it can be said that the base 120A attaches the imaging unit 11 to the X-axis 121X so that it can move in the X direction relative to the X-axis 121X. In other words, the base 120A is attached to the X-axis 121X so that its position in the X direction relative to the X-axis 121X can be changed.

[0035] The base 120A is disposed on the side of the lens barrel 20 (optical axis AX1) in a direction intersecting the Z direction (orthogonal in this example). The base 120A is disposed between the first image capture device 40 and the projection device 60 (first projection device 60a) in the circumferential direction (the circumferential direction when the Z direction (direction along the optical axis AX1) is defined as the axial direction). That is, in this embodiment, the base 120A is disposed in a third direction between the −X direction (first direction) and the −Y direction (second direction) with respect to the lens barrel 20 (optical axis AX1) when viewed from the Z direction. In other words, when viewed from the Z direction, if the direction along the −X direction from the center (optical axis AX1) of the lens barrel 20 is defined as 0° and the direction along the −Y direction from the center (optical axis AX1) of the lens barrel 20 is defined as 90°, the base 120A is disposed on the third direction side that is higher than 0° but less than 90° with respect to the lens barrel 20 (optical axis AX1). For example, base 120A may be disposed on the third direction side at an angle of 45° with respect to lens barrel 20 (optical axis AX1). In other words, the angle between a direction passing through the center (optical axis AX1) of lens barrel 20 along the −X direction and a direction passing through the center (optical axis AX1) of lens barrel 20 along the third direction is defined as the tilt angle of the third direction. In this case, the third direction is tilted toward the −Y direction with respect to the −X direction, and the tilt angle of the third direction is greater than 0° and less than 90°, with 45° being preferable.

[0036] In addition, the base 120A has an end on the +X direction side attached to the lens barrel 20, extends in a third direction from the end on the +X direction to the end on the -X direction, and has an end on the -X direction side attached to the Z axis 121Z.

[0037] The bases 123, 121Z, and 120A are disposed in a third direction between the -X direction and the -Y direction. This allows the lens barrel 20 (optical axis AX1) to be disposed closer to the Y axis 121Y. Furthermore, the lens barrel 20 can be moved appropriately in the -Y direction during imaging. However, the positions at which the bases 123, 121Z, and 120A are provided, in other words, the relative positions of the bases 123, 121Z, and 120A with respect to the lens barrel 20 (optical axis AX1), are not limited to this and may be arbitrary.

[0038] (Configuration of Optical Members) Next, a description will be given of the configuration of the optical members of the imaging unit 11. Fig. 3 is a schematic diagram showing the configuration of the optical members of the imaging unit.

[0039] (Illumination Device) As shown in FIG. 3 , in this embodiment, an illumination device 50 is provided around the outer circumferential surface of the end portion 20A on the Z-direction side of the lens barrel 20. The illumination device 50 is a device that irradiates illumination light La toward the installation area ST. The illumination light La is, for example, light in a wavelength band of 400 nm or more and 700 nm or less. The illumination light La may be, for example, light in a wavelength band of 435 nm or more and 700 nm or less. The illumination device 50 is attached to the outer circumferential surface of the end portion 20A via an attachment portion 51. The illumination device 50 has a base 50A and a light source unit 50B. The base 50A is an annular member attached to the outer circumferential surface of the end portion 20A via the attachment portion 51. The inner circumferential surface of the base 50A includes an inner circumferential surface 50A1 and an inner circumferential surface 50A2. The inner circumferential surface 50A1 is the surface of the entire inner circumferential surface of the base 50A that is located on the opposite side of the Z-direction. The inner circumferential surface 50A1 is, for example, a surface with a constant diameter. The inner circumferential surface 50A2 is connected to the inner circumferential surface 50A1 and is located on the Z-direction side of the inner circumferential surface 50A1 within the entire inner circumferential surface of the base 50A. The inner circumferential surface 50A2 has a shape in which the diameter increases in the Z-direction. In other words, the inner circumferential surface 50A2 is inclined radially outward in the Z-direction. The light source unit 50B is provided on this inner circumferential surface 50A2. In this embodiment, the light source unit 50B is configured to emit illumination light La and includes a light source such as an LED (Light Emitting Diode) and a control circuit. The control circuit controls the light source to emit light of different brightness levels using PWM (Pulse Width Modulation) control or the like. In this embodiment, it is preferable that a plurality of light source units 50B be provided throughout the entire inner circumferential surface 50A2. Furthermore, a slit may be formed in the base 50A of the lighting device 50, through which the illumination light Lb from the projection device 60 disposed outside the lighting device 50 can pass.

[0040] (Projection Device) The projection devices 60 (first projection device 60a and second projection device 60b in this embodiment) are devices that project (irradiate) illumination light Lb onto the installation area ST. The illumination light Lb is light in a wavelength band different from that of the illumination light La (illumination light La1 and illumination light La2 described below), for example, light in a wavelength band of 500 nm or more and 650 nm or less. However, the illumination light Lb is not limited to this, and may be light in the same wavelength band as the illumination light La. In this embodiment, the first projection device 60a is disposed on the −X direction side of the lens barrel 20 (optical axis AX1), and the second projection device 60b is disposed on the +X direction side of the lens barrel 20 (optical axis AX1). The detailed configurations of the first projection device 60a and the second projection device 60b will be described later.

[0041] 3, in this embodiment, the second image capturing device 30, the first image capturing device 40, the epi-illumination device 70, the polarizer 201, the optical splitter 202, the light collecting optical system 203, the quarter-wave plate 204, the imaging optical system 205, the polarizer 206, and the optical splitter 207 are provided inside the lens barrel 20. These components may be arranged in any positions inside the lens barrel 20, but an example of their arrangement in this embodiment will be described below.

[0042] (Second Imaging Device) The second imaging device 30 is a device that captures an image of the illumination light La projected onto the test object A as the test object A. In this embodiment, the second imaging device 30 is an imaging element that generates an image based on an image formed on a light receiving surface. The second imaging device 30 may be, for example, a CMOS (Complementary Metal Oxide Semiconductor) or CCD (Charge Coupled Device) type image sensor.

[0043] In this embodiment, the second imaging device 30 is disposed within the lens barrel 20 so that the optical axis AX1 is along the Z direction. For example, the second imaging device 30 is disposed within the lens barrel 20 so that the light receiving surface is perpendicular to the Z direction.

[0044] (First Imaging Device) The first imaging device 40 is a device that captures an image of the illumination light Lb projected onto the test object A. In this embodiment, the first imaging device 40 is an imaging element that generates an image based on an image formed on a light receiving surface. The first imaging device 40 may be, for example, a CMOS or CCD type image sensor.

[0045] In this embodiment, the first image capture device 40 is disposed so that its light receiving surface faces radially inward (i.e., radially outward when the direction along the optical axis AX1 is the axial direction). That is, the first image capture device 40 is disposed so that the optical axis AX2 at the position where the illumination light La is received (the section between the first image capture device 40 and the optical splitter 207) is aligned radially inward. Note that in FIG. 3 , for convenience of explanation, the first image capture device 40 is positioned on the +X direction side with respect to the optical axis AX1, but as described above, in this embodiment, it is preferable that the first image capture device 40 be disposed on the -Y direction side. Also, in FIG. 3 , for convenience of explanation, the light receiving surface of the first image capture device 40 is disposed so that it is perpendicular to the +X direction, but it is preferable that the light receiving surface be disposed so that it is perpendicular to the -Y direction. That is, the optical axis AX2 at the position where the illumination light La is received (the section between the first image capture device 40 and the optical splitter 207) is preferably aligned along the -Y direction. In this embodiment, the first imaging device 40 is disposed between the second imaging device 30 and the placement surface ST in the Z direction.

[0046] (Epi-Illumination Device) The epi-illumination device 70 is a device that irradiates illumination light La toward the installation area ST. In this embodiment, the epi-illumination device 70 is configured to irradiate illumination light La, and includes a light source such as an LED (Light Emitting Diode) and a control circuit. The control circuit causes the light source to irradiate light of different brightness levels by PWM (Pulse Width Modulation) control or the like.

[0047] In this embodiment, the epi-illumination device 70 emits illumination light La in the same wavelength band as the illumination device 50. Hereinafter, when distinguishing between the illumination light La emitted by the epi-illumination device 70 and the illumination light La emitted by the illumination device 50, the illumination light La emitted by the epi-illumination device 70 will be referred to as illumination light La1, and the illumination light La emitted by the illumination device 50 will be referred to as illumination light La2. Note that the illumination light La1 and the illumination light La2 may have different wavelength bands.

[0048] In this embodiment, the epi-illumination device 70 is disposed so that the optical axis AX3 at the position where the illumination light La1 is emitted (the section between the epi-illumination device 70 and the optical splitter 202) is aligned radially inward (i.e., the radially inward direction when the direction along the optical axis AX1 of the second image capture device 30 is defined as the axial direction). Note that in FIG. 3 , for convenience of explanation, the epi-illumination device 70 is positioned on the +X direction side with respect to the optical axis AX1 of the second image capture device 30. However, as described above, in this embodiment, it is preferable that the epi-illumination device 70 is disposed on the first oblique direction side with respect to the optical axis AX1, so that the optical axis AX3 at the position where the illumination light La1 is emitted (the section between the epi-illumination device 70 and the optical splitter 202) is aligned along the first oblique direction. Furthermore, in this embodiment, the epi-illumination device 70 is disposed between the second image capture device 30 and the mounting surface ST in the Z direction. Furthermore, in this embodiment, the epi-illumination device 70 is disposed between the first image capture device 40 and the mounting surface ST in the Z direction.

[0049] (Polarizer) The polarizer 201 is disposed between the incident-light illumination device 70 and the optical splitter 202, has a transmission axis along a predetermined direction, and converts the illumination light La1 emitted from the incident-light illumination device 70 into linearly polarized light having a polarization plane along the direction of the transmission axis and transmits it.

[0050] (Light Splitter) The light splitter 202 is disposed between the first lens group 203a of the focusing optical system 203 and the second lens group 205a of the imaging optical system 205. The light splitter 202 is disposed so as to face the epi-illumination device 70 via the polarizer 201 in a direction perpendicular to the optical axis of the first lens group 203a (the Z direction in this example). The light splitter 202 reflects the illumination light La1 transmitted through the polarizer 201 to the first lens group 203a. The light splitter 202 also transmits light reflected by the test object A placed on the mounting surface ST and transmitted through the first lens group 203a (i.e., the reflected light of the illumination light La and illumination light Lb irradiated on the test object A) to the second lens group 205a. The light splitter 202 is a polarizing beam splitter (PBS) such as a half mirror.

[0051] (Light Condensing Optical System) The light collecting optical system 203 irradiates the test object A placed on the mounting surface ST with illumination light La1 emitted from the epi-illumination device 70 and directed toward the mounting surface ST (Z direction) by the light splitter 202. The light collecting optical system 203 also collects light reflected by the test object A (i.e., the reflected light of the illumination light La and illumination light Lb irradiated on the test object A). The light collecting optical system 203 has a first lens group 203a and a first diaphragm 203b. The first lens group 203a is disposed between the epi-illumination device 70 and the mounting surface ST in the Z direction, more specifically, between the light splitter 202 and the mounting surface ST. The first lens group 203a is disposed so that its optical axis is aligned with the Z direction (the optical axis AX1 of the second image capturing device 30). The first lens group 203a constitutes a telecentric optical system in which the chief ray of illumination light La that is emitted from the epi-illumination device 70 and passes through the first lens group 203a toward the mounting surface ST is parallel to the optical axis. The first aperture 203b is disposed between the epi-illumination device 70 and the optical splitter 202, and is configured to adjust the numerical aperture of the focusing optical system 203.

[0052] (Quarter Wave Plate) The quarter wave plate 204 is a flat optical member disposed between the first lens group 203a and the mounting surface ST, and changes the polarization state of light passing through it. The quarter wave plate 204 converts the linearly polarized illumination light La1 that has passed through the polarizer 201 and the first lens group 203a into circularly polarized light and transmits the light. The quarter wave plate 204 also converts the circularly polarized light reflected by the test object A (i.e., the illumination light La projected onto the test object A) into linearly polarized light having a polarization plane perpendicular to the polarization plane of the light that has passed through the polarizer 201 and transmits the light.

[0053] The quarter-wave plate 204 is disposed so as to be tilted at a predetermined acute angle with respect to the object plane of the focusing optical system 203, i.e., the plane perpendicular to the optical axis of the first lens group 203 a. This makes it difficult for light reflected by the quarter-wave plate 204 to enter the imaging optical system 205.

[0054] (Imaging Optical System) The imaging optical system 205 forms an image of light reflected by the test object A (i.e., reflected light of the illumination light La and illumination light Lb irradiated on the test object A). The imaging optical system 205 has a second lens group 205a and a second diaphragm 205b. The second lens group 205a is disposed between the first image capturing device 40 (second image capturing device 30) and the mounting surface ST in the Z direction, more specifically, between the optical splitter 202 and the first image capturing device 40 (second image capturing device 30). The second lens group 205a is disposed such that its optical axis is aligned with the optical axis of the first lens group 203a (in this example, the Z direction). The second lens group 205a forms an image of the light reflected by the test object A and passing through the first lens group 203a and the optical splitter 202 on the light receiving surfaces of the first image capturing device 40 and the second image capturing device 30. The second diaphragm 205b is a component for adjusting the numerical aperture of the imaging optical system 205. The second diaphragm 205b and the first diaphragm 203b are disposed at optically equivalent positions with respect to the optical splitter 202. For example, the distance between the second diaphragm 205b and the optical splitter 202 is equal to the distance between the first diaphragm 203b and the optical splitter 202.

[0055] (Polarizer) The polarizer 206 is disposed between the second lens group 205a and the first image capturing device 40 (second image capturing device 30). The polarizer 206 is disposed so as to be in a crossed Nicol state with the polarizer 201. That is, the polarizer 206 transmits only linearly polarized light having a polarization plane orthogonal to the polarization plane of the light transmitted through the polarizer 201, and blocks light having other polarization components. Because the light that reaches the polarizer 206 without transmitting through the quarter-wave plate 204 is linearly polarized light having a polarization plane aligned with the direction of the transmission axis of the polarizer 201, the polarizer 206 makes it difficult for light reflected by areas other than the test object A to reach the first image capturing device 40 and the second image capturing device 30.

[0056] (Splitter) The splitter 207 is disposed on the optical axis of the second lens group 205a, between the polarizer 206 and the first imaging device 40 (second imaging device 30). The splitter 207 reflects a portion of the light reflected by the test object A and guides it to the first imaging device 40, and transmits the remaining portion and guides it to the second imaging device 30. In this embodiment, the splitter 207 transmits light in the wavelength band of the illumination light La and reflects light in the wavelength band of the illumination light Lb. Therefore, in this embodiment, the splitter 207 reflects the illumination light Lb reflected by the test object A and guides it to the first imaging device 40, and transmits the illumination light La reflected by the test object A and guides it to the second imaging device 30. However, the splitter 207 may be configured to transmit the illumination light Lb reflected by the test object A and reflect the illumination light La reflected by the test object A. In this case, it is preferable to exchange the positions of the first imaging device 40 and the second imaging device 30 with respect to those shown in Fig. 3. The splitter 207 is a beam splitter such as a half mirror.

[0057] (Illumination Light) The optical members of the imaging unit 11 are configured as described above. Therefore, the illumination light La1 emitted from the epi-illumination device 70 travels in a direction perpendicular to the Z direction (the −X direction in FIG. 3 ), passes through the polarizer 201, is reflected by the optical splitter 202, and travels in the Z direction. The illumination light La1 reflected by the optical splitter 202 and traveling in the Z direction passes through the first lens group 203a and the quarter-wave plate 204, is emitted from the end 20A of the lens barrel 20 to the outside of the lens barrel 20, and is irradiated onto the test object A placed on the mounting surface ST. That is, the optical axis AX3 of the epi-illumination device 70 runs along a direction perpendicular to the optical axis AX1 (Z direction) of the second imaging device 30 (the first oblique direction in this example) in the section from the epi-illumination device 70 to the optical splitter 202, and is coaxial with the optical axis AX1 in the section from the optical splitter 202 to the mounting surface ST (test object A). The end 20A of the lens barrel 20 is capable of passing the illumination lights La and Lb, and may be provided with a member that is transparent to the illumination lights La and Lb, or may be an opening without any member.

[0058] Furthermore, the illumination light La2 emitted from the illumination device 50 is irradiated onto the test object A placed on the placement surface ST.

[0059] The illumination light La (illumination light La1 and La2) irradiated onto the test object A is reflected by the test object A and enters the lens barrel 20 from the end 20A of the lens barrel 20. The reflected light of the illumination light La that entered the lens barrel 20 travels in the direction opposite to the Z direction, passes through the quarter-wave plate 204, the first lens group 203a, the optical splitter 202, the second lens group 205a, the polarizer 206, and the splitter 207, and enters the second image capturing device 30. The second image capturing device 30 captures the reflected light of the incident illumination light La as an image of the test object A (an image of the illumination light La projected onto the test object A). Therefore, the optical axis AX1 of the second image capturing device 30 is along the Z direction. In a configuration in which the illumination light La is not emitted, light other than the illumination light La and the illumination light Lb reflected by the test object A (natural light and light from other light sources) enters the lens barrel 20, passes through the quarter-wave plate 204, the first lens group 203 a, the optical splitter 202, the second lens group 205 a, the polarizer 206, and the splitter 207, and enters the first imaging device 40. In this case, the first imaging device 40 captures the light other than the illumination light La and the illumination light Lb reflected by the test object A as an image of the test object A (an image of light projected onto the test object A).

[0060] Furthermore, the illumination light Lb emitted from the projection device 60 is irradiated onto the test object A placed on the placement surface ST. The illumination light Lb irradiated onto the test object A is reflected by the test object A and enters the lens barrel 20 from the end 20A of the lens barrel 20. Note that the illumination light Lb irradiated onto the test object A may be scattered by the test object A and enter the lens barrel 20 from the end 20A. The reflected light of the illumination light Lb that enters the lens barrel 20 travels in the direction opposite to the Z direction, passes through the quarter-wave plate 204, the first lens group 203a, the optical splitter 202, the second lens group 205a, and the polarizer 206, and enters the splitter 207. The reflected light of the illumination light Lb that enters the splitter 207 travels in the +X direction and enters the first imaging device 40. The first imaging device 40 captures reflected light of the incident illumination light Lb as an image of the illumination light Lb projected onto the test object A. The optical axis AX2 of the first imaging device 40 is coaxial with the optical axis AX1 in the section from the placement surface ST (test object A) to the optical splitter 207, and is along a direction (in this example, the −Y direction) perpendicular to the optical axis AX1 (Z direction) of the second imaging device 30 in the section from the optical splitter 207 to the first imaging device 40.

[0061] (Details of Projection Device) Next, a detailed configuration of the projection device 60 will be described. Fig. 4 is a schematic diagram showing the position of the projection device when viewed from the Z direction.

[0062] As described above, in this embodiment, the first projection device 60a and the second projection device 60b are disposed on the −X direction side and the X direction side (sides in a direction perpendicular to the Y direction, which is the scanning direction) of the lens barrel 20 (optical axis AX1). Furthermore, in this embodiment, as shown in FIG. 4 , the first projection device 60a and the second projection device 60b are positioned at different positions in the Y direction (scanning direction). That is, the central axis AX4 of the first projection device 60a when viewed from the Z direction (the optical axis of the first light source device 601A in the section from the first light source device 601A to the first lens group 602A, which will be described later) is offset in the Y direction from the central axis AX4 of the second projection device 60b when viewed from the Z direction (the optical axis of the first light source device 601A in the section from the first light source device 601A to the first lens group 602A, which will be described later).

[0063] More specifically, when viewed from the Z direction, the central axis AX4 of the first projection device 60a is located on one side in the Y direction with respect to the optical axis AX1 of the lens barrel 20, and the central axis AX4 of the second projection device 60b is located on the other side in the Y direction with respect to the optical axis AX1 of the lens barrel 20. In the example of FIG. 4 , the central axis AX4 of the first projection device 60a is located on the −Y direction side of the optical axis AX1, and the central axis AX4 of the second projection device 60b is located on the +Y direction side of the optical axis AX1. However, this is not limited thereto, and the central axis AX4 of the first projection device 60a may be located on the +Y direction side of the optical axis AX1, and the central axis AX4 of the second projection device 60b may be located on the −Y direction side of the optical axis AX1. Note that, when viewed from the Z direction, it is preferable that the first projection device 60a and the second projection device 60b do not protrude from the outer circumferential surface of the lens barrel 20 in the Y direction. That is, it is preferable that the first projection device 60a and the second projection device 60b are located in the Y direction between the position 20Y1 on the outer surface of the lens barrel 20 that is closest to the +Y direction and the position 20Y2 on the outer surface of the lens barrel 20 that is closest to the -Y direction.

[0064] In this way, by offsetting the first projection device 60a and the second projection device 60b in the Y direction, the positions of the irradiation area of ​​the illumination light Lb from the first projection device 60a onto the mounting surface ST (test object A) and the irradiation area of ​​the illumination light Lb from the second projection device 60b onto the mounting surface ST (test object A) can be appropriately shifted in the Y direction. The irradiation areas will be described later.

[0065] (Optical Members of Projection Device) Next, the optical members of the projection device 60 will be described. FIG. 5 is a schematic diagram illustrating the configuration of the optical members of the projection device. Hereinafter, the structure of the projection device 60 will be described using the first projection device 60a as an example, but the second projection device 60b also has a similar structure to the first projection device 60a. However, when viewed from the Y direction, the second projection device 60b has a structure that is line-symmetrical with respect to a line extending in the Z direction between the first projection device 60a and the second projection device 60b. For example, in the example of FIG. 5, a second light source device 601B, a second lens group 602B, a second optical element 603B, and a half-wave plate 604 (described later) of the first projection device 60a are located on the −X direction side with respect to a first light source device 601A (described later), while a second light source device 601B, a second lens group 602B, a second optical element 603B, and a half-wave plate 604 of the second projection device 60b are located on the +X direction side with respect to the first light source device 601A.

[0066] 5 , the projection device 60 (first projection device 60a) includes a light source device 601, a lens group 602, an optical element 603, a half-wave plate 604, a combining unit 605, and a projection optical system 606. In this embodiment, the projection device 60 includes a plurality of light source devices 601. Specifically, the projection device 60 includes a first light source device 601A and a second light source device 601B as the light source devices 601. The projection device 60 also includes a first lens group 602A corresponding to the first light source device 601A and a second lens group 602B corresponding to the second light source device 601B as the lens group 602, and a first optical element 603A corresponding to the first light source device 601A and a second optical element 603B corresponding to the second light source device 601B as the optical element 603. However, the number of light source devices 601 included in the projection device 60 is not limited to two, and may be three or more, or may be one. When the projection device 60 has one light source device 601, it is preferable that the number of projection devices 60 is two or more. This allows the illumination light Lb to be irradiated onto different irradiation regions.

[0067] (Light Source Device) The light source device 601 is a light source that emits illumination light Lb, and in this embodiment, is a laser diode. That is, the illumination light Lb in this embodiment is laser light. Here, a direction perpendicular to the optical axis of the illumination light Lb emitted from the light source device 601 is defined as a first alignment direction, and a direction perpendicular to the optical axis and the first alignment direction is defined as a second alignment direction. In this case, the illumination light Lb emitted from the light source device 601, more specifically, the illumination light Lb in the section between the light source device 601 and the lens group 602, has a half-value angle (directivity angle) indicating the angle at which the illumination light Lb spreads in the first alignment direction that is larger than the half-value angle indicating the angle at which the illumination light Lb spreads in the second alignment direction. However, the half-value angle of the illumination light Lb is not limited to being nonuniform in this manner. For example, the half-value angle in the first alignment direction and the half-value angle in the second alignment direction may be the same. Hereinafter, when distinguishing between the illumination light Lb emitted by the first light source device 601A and the illumination light Lb emitted by the second light source device 601B, the illumination light Lb emitted by the first light source device 601A will be referred to as illumination light Lb1, and the illumination light Lb emitted by the second light source device 601B will be referred to as illumination light Lb2. The wavelengths of the first light source device 601A and the second light source device 601B are the same. However, the wavelengths of the first light source device 601A and the second light source device 601B may be different.

[0068] In this embodiment, the first light source device 601A is arranged so that the optical axis in the section from the first light source device 601A to the first lens group 602A is aligned with the Z direction, i.e., so that the illumination light Lb1 is emitted in the Z direction. The first light source device 601A is also arranged so that the first orientation direction, in which the half-value angle is large, is aligned with the X direction. Meanwhile, the second light source device 601B is arranged so that the optical axis in the section from the second light source device 601B to the second lens group 602B is aligned with a direction perpendicular to the Z direction, i.e., so that the illumination light Lb2 is emitted in a direction perpendicular to the Z direction. In the example of FIG. 5 , the second light source device 601B is arranged so that the optical axis is aligned with the +X direction. In the example of FIG. 5 , the first light source device 601A is also arranged so that the first orientation direction, in which the half-value angle is large, is aligned with the Z direction.

[0069] (Lens Group) The lens group 602 is provided between the light source device 601 and the optical element 603. The lens group 602 is composed of multiple lenses arranged in the optical axis direction. The lens group 602 expands the illumination light Lb emitted from the light source device 601 in a direction perpendicular to the optical axis. In this embodiment, the lens group 602 expands the illumination light Lb emitted from the light source device 601 more toward the first alignment direction than toward the second alignment direction. That is, the lens group 602 expands the illumination light Lb toward an angle with a larger half-value angle of the illumination light Lb (i.e., toward the first alignment direction). This allows the illumination light Lb's irradiation area to be appropriately elongated horizontally by utilizing the alignment direction of the illumination light Lb. Note that in this embodiment, the lens group 602 does not expand the illumination light Lb toward the second alignment direction, but may also expand it toward the second alignment direction.

[0070] The lens group 602 narrows the illumination light Lb, which has been spread in the first alignment direction, to a parallel beam. Therefore, the illumination light Lb emitted from the lens group 602 has a full width at half maximum in the first alignment direction that is longer than the full width at half maximum in the second alignment direction.

[0071] The lens group 602 includes a convex lens 602a, a concave lens 602b, and a convex lens 602c arranged along the optical axis of the light source device 601. The convex lens 602a focuses the illumination light Lb from the light source device 601 to form parallel light. The concave lens 602b is located on the side farther from the light source device 601 than the convex lens 602a and expands the illumination light Lb emitted from the convex lens 602a in a direction perpendicular to the optical axis. Specifically, the concave lens 602b expands the illumination light Lb emitted from the light source device 601 toward an angle larger than the half-value angle of the illumination light Lb (i.e., toward the first orientation direction). The convex lens 602c is located on the side farther from the light source device 601 than the concave lens 602b and focuses the illumination light Lb emitted from the concave lens 602b to form parallel light. However, the configuration of the lens group 602 is not limited to this, and any configuration that spreads the illumination light Lb toward an angle greater than the half-value angle of the illumination light Lb may be used.

[0072] In this embodiment, the first lens group 602A is provided between the first light source device 601A and the first optical element 603A. The first lens group 602A includes a convex lens 602a, a concave lens 602b, and a convex lens 602c that are aligned along the optical axis (Z direction) of the first light source device 601A. The first lens group 602A expands the illumination light Lb1 emitted from the first light source device 601A in the first alignment direction (X direction in this example) and narrows the illumination light Lb1 expanded in the first alignment direction (X direction in this example), thereby emitting the illumination light Lb1 in the Z direction as parallel light whose full width at half maximum in the first alignment direction (X direction in this example) is longer than the full width at half maximum in the second alignment direction (Y direction in this example).

[0073] The second lens group 602B is provided between the second light source device 601B and the second optical element 603B. The second lens group 602B includes a convex lens 602a, a concave lens 602b, and a convex lens 602c that are aligned along the optical axis (+X direction) of the second light source device 601B. The second lens group 602B expands the illumination light Lb2 emitted from the second light source device 601B toward the first alignment direction (the Z direction and the opposite direction of the Z direction in this example) and narrows the illumination light Lb1 expanded toward the first alignment direction (the Z direction and the opposite direction of the Z direction in this example), thereby emitting the illumination light Lb1 in the +X direction as parallel light whose full width at half maximum in the first alignment direction (the Z direction and the opposite direction of the Z direction in this example) is longer than the full width at half maximum in the second alignment direction (the Y direction in this example).

[0074] (Optical Element) Fig. 6 is a schematic perspective view of the optical element, and Fig. 7 is a schematic view of the optical element as viewed from the Y direction. As shown in Fig. 5, the optical element 603 is provided between the light source device 601 and the combining unit 605, more specifically, between the lens group 602 and the combining unit 605. The optical element 603 (more specifically, a diffraction grating 603a described below) is disposed at a position conjugate with the test object A (mounting surface ST) with respect to the diaphragm unit 606B described below.

[0075] As shown in FIGS. 6 and 7 , the optical element 603 includes a diffraction grating 603a and a mask portion 603b. The diffraction grating 603a diffracts incident light and separates it into multiple orders of light with different diffraction angles. That is, the diffraction grating 603a separates the incident light into a first diffracted light and a second diffracted light having an angle different from that of the first diffracted light. The diffraction grating 603a may have any structure, and may be, for example, a member having multiple slits formed thereon. In this embodiment, the diffraction gratings 603Aa and 603B are the same. For example, if a pattern is arranged on the diffraction grating, the pattern period of the diffraction gratings 603a and 603b is the same. However, the diffraction gratings 603Aa and 603B may be different. For example, if a pattern is arranged on the diffraction grating, the pattern period of the diffraction gratings 603a and 603b is different.

[0076] The mask portion 603b is a member that blocks the illumination light Lb1. The mask portion 603b may be any member that blocks the illumination light Lb1. An opening OP is formed in a partial area of ​​the mask portion 603b. The mask portion 603b blocks (absorbs or reflects) the illumination light Lb1 in areas where the opening OP is not formed, and transmits the illumination light Lb1 in areas where the opening OP is formed. Note that the opening OP is not provided with a member such as the mask portion 603b or another member, but may be provided with a member that transmits the illumination light Lb1.

[0077] The shape of the opening OP may be any shape, but in this embodiment, it is set to a shape that matches the desired shape of the irradiation area (described below) of the test object A (mounting surface ST) onto which the illumination light Lb1 is irradiated. As will be described in detail later, the irradiation area has a horizontally elongated shape in which the length in one direction is longer than the length in the other direction perpendicular to that direction. Similarly, the opening OP has a horizontally elongated shape in which the length in one direction is longer than the length in the other direction perpendicular to that direction. Specifically, the length of the opening OP in the first orientation direction (the direction in which the illumination light Lb is spread) is longer than the length in the second orientation direction. In the example of FIG. 6, the opening OP is a rectangle that is elongated in the first orientation direction, but is not limited to a rectangle and may be any shape, such as an ellipse, a rectangle with curved corners, or a polygon.

[0078] The mask portion 603b is provided on the surface of the diffraction grating 603a opposite to the light source device 601 side. However, the position at which the mask portion 603b is provided is not limited to this. For example, the mask portion 603b may be provided at a position away from the diffraction grating 603a on the opposite side from the light source device 601 side. Furthermore, the mask portion 603b may be provided on the surface of the diffraction grating 603a facing the light source device 601, or may be provided at a position away from the diffraction grating 603a on the light source device 601 side.

[0079] Since the optical element 603 has the above-described structure, the illumination light Lb incident on the optical element 603 is separated into first diffracted light and second diffracted light by the diffraction grating 603a, and a portion of the first diffracted light and second diffracted light is emitted from the optical element 603 through the opening OP.

[0080] The first optical element 603A is provided between the first light source device 601A and the combining unit 605, more specifically, between the first lens group 602A and the combining unit 605. The first optical element 603A has a diffraction grating 603Aa as the diffraction grating 603a and a mask unit 603Ab as the mask unit 603b. The length of an opening OP of the mask unit 603Ab in the X direction, which is the first alignment direction, is longer than the length in the Y direction, which is the second alignment direction. The illumination light Lb1 incident on the first optical element 603A is separated by the diffraction grating 603Aa into illumination light Lb1a, which is the first diffracted light, and illumination light Lb1b, which is the second diffracted light. Portions of the illumination light Lb1a and illumination light Lb1b pass through the opening OP and are emitted from the first optical element 603A in the Z direction. The illumination light Lb1a and the illumination light Lb1b travel along different optical paths in the Z direction. Note that the diffraction grating 603Aa may emit diffracted light other than the first diffracted light (illumination light Lb1a) and the second diffracted light (illumination light Lb1b), but this diffracted light is blocked by the diaphragm unit 606B, which will be described later.

[0081] The second optical element 603B is provided between the second light source device 601B and the combining unit 605, more specifically, between the second lens group 602B and the combining unit 605. The second optical element 603B has a diffraction grating 603Ba as the diffraction grating 603a and a mask unit 603Bb as the mask unit 603b. The length of an opening OP of the mask unit 603Bb in the Z direction, which is the first alignment direction, is longer than its length in the Y direction, which is the second alignment direction. The illumination light Lb2 incident on the second optical element 603B is separated by the diffraction grating 603Ba into illumination light Lb2a, which is the first diffracted light, and illumination light Lb2b, which is the second diffracted light. Portions of the illumination light Lb2a and illumination light Lb2b pass through the opening OP and are emitted from the second optical element 603B in the +X direction. The illumination light Lb2a and the illumination light Lb2b travel along different optical paths in the +X direction. The diffraction grating 603Ba may emit diffracted light other than the first diffracted light (illumination light Lb2a) and the second diffracted light (illumination light Lb2b), but this diffracted light is blocked by the diaphragm unit 606B, which will be described later.

[0082] Here, the opening OP of the second optical element 603B (mask portion 603Bb) is located at a different position in the Y direction (scanning direction) from the opening OP of the first optical element 603A (mask portion 603Ab). Furthermore, the imaginary locus formed by projecting the periphery of the opening OP of the second optical element 603B in the +X direction does not overlap with the imaginary locus formed by projecting the periphery of the opening OP of the first optical element 603A in the Z direction. In the examples of FIGS. 6 and 7 , the opening OP of the second optical element 603B is located closer to the −Y direction than the opening OP of the first optical element 603A. The end of the opening OP of the second optical element 603B closest to the +Y direction is located closer to the −Y direction than the end of the opening OP of the first optical element 603A closest to the −Y direction. In other words, the opening OP of the second optical element 603B and the opening OP of the first optical element 603A are spaced apart in the Y direction. However, the positional relationship may be reversed, and for example, the opening OP of the second optical element 603B may be located on the +Y direction side of the opening OP of the first optical element 603A.

[0083] In this way, by making the positions of the openings OP of the first optical element 603A and the second optical element 603B different in the Y direction, the optical paths of the illumination lights Lb1a and Lb1b passing through the opening OP of the first optical element 603A and the optical paths of the illumination lights Lb2a and Lb2b passing through the opening OP of the second optical element 603B can be shifted in the Y direction. In the example of this embodiment, the optical paths of the illumination lights Lb2a and Lb2b are located on the -Y direction side of the optical paths of the illumination lights Lb1a and Lb1b. In this way, by shifting the optical paths of the illumination lights Lb1a and Lb1b and the optical paths of the illumination lights Lb2a and Lb2b in the Y direction without overlapping, it is possible to shift the irradiation area on the test object A (mounting surface ST) by the illumination light Lb1 and the irradiation area on the test object A (mounting surface ST) by the illumination light Lb2 in the Y direction so that they do not overlap.

[0084] (Half-Wave Plate) As shown in FIG. 5 , the half-wave plate 604 is provided between the second optical element 603B and the combining unit 605. The half-wave plate 604 is a flat optical element that changes the polarization state of transmitted light. More specifically, it rotates the polarization direction of linearly polarized light before transmitting it. The illumination light beams Lb2a and Lb2b emitted from the second optical element 603B are emitted from the half-wave plate 604 with their polarization direction rotated by the half-wave plate 604. By providing the half-wave plate 604 between the second optical element 603B and the combining unit 605 in this manner, the illumination light beams Lb2a and Lb2b can be appropriately reflected in the subsequent combining unit 605, thereby preventing a decrease in the intensity of the illumination light beams Lb2a and Lb2b irradiated onto the test object A. Note that the half-wave plate 604 does not necessarily have to be provided between the second optical element 603B and the combining unit 605. The half-wave plate 604 may be disposed anywhere between the second light source device 601B and the combining unit 605. For example, the half-wave plate 604 may be disposed between the second optical element 603B and the second light source device 602B. For example, the half-wave plate 604 may be disposed between the convex lens 602a and the concave lens 602b. For example, the half-wave plate 604 may be disposed on the first light source device 601A side. For example, the half-wave plate 604 may be disposed anywhere between the first light source device 601A and the combining unit 605. For example, the half-wave plate 604 may be disposed between the first optical element 603A and the first light source device 601A. For example, the half-wave plate 604 may be disposed between the convex lens 602a and the concave lens 602b. Furthermore, if the polarization directions of the light emitted from the first light source device 601A and the second light source device 601B are different, the half-wave plate does not need to be provided.

[0085] 5, the combining unit 605 is provided between the optical element 603 and the projection optical system 606. The combining unit 605 combines the incident illumination light Lb1 irradiated from the first light source device 601A (more specifically, illumination light Lb1a, Lb1b emitted from the first optical element 603A) and the incident illumination light Lb2 irradiated from the second light source device 601B (more specifically, illumination light Lb2a, Lb2b emitted from the second optical element 603B), and emits the combined light in the Z direction. That is, the combining unit 605 emits the illumination light Lb1 (illumination light Lb1a, Lb1b) and the illumination light Lb2 (illumination light Lb2a, Lb2b) in the Z direction. In this embodiment, the combining unit 605 transmits illumination light Lb1 (illumination light Lb1a, Lb1b) traveling in the Z direction and emits it in the Z direction, and reflects illumination light Lb2 (illumination light Lb2a, Lb2b) traveling in the +X direction and emits it in the Z direction. In this embodiment, the combining unit 605 is a polarizing beam splitter (PBS).

[0086] (Projection Optical System) The projection optical system 606 is provided between the combining unit 605 and the placement surface ST. The projection optical system 606 projects the light combined by the combining unit 605, i.e., the illumination lights Lb1a, Lb1b, Lb2a, and Lb2b emitted from the combining unit 605, onto the test object A on the placement surface ST. The projection optical system 606 has a condenser 606A, an aperture unit 606B, a condenser 606C, a reflector 606D, and a half-wave plate 606E. The condenser 606A, the aperture unit 606B, the condenser 606C, the reflector 606D, and the half-wave plate 606E are arranged side by side in the Z direction.

[0087] The light collecting unit 606A collects (narrows) the illumination light Lb1a, Lb1b, Lb2a, and Lb2b emitted from the combining unit 605, and emits the collected illumination light Lb1a, Lb1b, Lb2a, and Lb2b in the Z direction. The light collecting unit 606A is, for example, a convex lens.

[0088] The diaphragm section 606B is disposed on the Z direction side of the condensing section 606A. The diaphragm section 606B is provided at the focal position of the light emitted from the condensing section 606A. The diaphragm section 606B transmits only the illumination lights Lb1a, Lb1b, Lb2a, and Lb2b out of the light emitted from the condensing section 606A. In other words, the diaphragm section 606B blocks light of orders other than the illumination lights Lb1a, Lb1b, Lb2a, and Lb2b. The diaphragm section 606B blocks light of diffraction angles other than the illumination lights Lb1a, Lb1b, Lb2a, and Lb2b. As described above, the diffraction grating 603b may emit diffracted light other than the first diffracted light (illumination light Lb1a, Lb2a) and the second diffracted light (illumination light Lb1b, Lb2b), and the diaphragm unit 606B blocks this diffracted light and transmits only the illumination light Lb1a, Lb1b, Lb2a, and Lb2b. The position where the illumination light from the first light source device 601A is condensed and the position where the illumination light from the second light source device 601B is condensed are different in the Y direction of the diaphragm unit 606B, as shown in FIG. 5 . As will be described later, the light from the diaphragm unit 606B is reflected by the reflector 606D and guided to the test object A (mounting surface ST). The illumination light from the first light source device 601A and the illumination light from the second light source device 601B are irradiated onto the reflector 606D from different positions in the Y direction in the aperture section 606B, resulting in different angles of incidence on the test object A (mounting surface ST). In this embodiment, the diffraction gratings 603a and 603b are the same, and the spacing between their respective bright and dark patterns is the same. However, the angles of incidence on the test object A (mounting surface ST) of the illumination light from the first light source device 601A and the illumination light from the second light source device 601B are different, so the spacing between the bright and dark patterns irradiated onto the test object A can be made different. Note that different diffraction gratings may be used for the diffraction gratings 603a and 603b, and focal positions may be set at different positions in the Y direction of the aperture section 606B. Alternatively, different diffraction gratings may be used for the diffraction gratings 603a and 603b, and focal positions may be set at the same position in the Y direction of the aperture section 606B.

[0089] The light collecting unit 606C is disposed on the Z direction side of the diaphragm unit 606B. The light collecting unit 606C collects (stops down) the illumination light Lb1a, Lb1b, Lb2a, and Lb2b emitted from the diaphragm unit 606B, and emits the collected illumination light Lb1a, Lb1b, Lb2a, and Lb2b in the Z direction. The light collecting unit 606C is, for example, a convex lens.

[0090] The reflecting unit 606D is disposed on the Z-direction side of the condensing unit 606C. The reflecting unit 606D reflects the illumination light Lb1a, Lb1b, Lb2a, and Lb2b emitted from the condensing unit 606C and guides the illumination light Lb1a, Lb1b, Lb2a, and Lb2b to the test object A (mounting surface ST). The reflecting unit 606D is, for example, a mirror. Here, when light traveling along the Z direction is reflected by the reflecting unit 606D, the axis along the traveling direction of the reflected light is defined as an optical axis AX5. The direction of the optical axis AX5 is determined by the orientation of the reflecting surface of the reflecting unit 606D. In this case, the reflecting unit 606D is disposed so that the optical axis AX5 is inclined with respect to the optical axis AX2 (Z direction) of the first imaging device 40. Furthermore, the optical axis AX5 is set so as to tilt radially inward (radially inward when the optical axis AX1 is defined as the axial direction) as it approaches the Z direction. That is, the angle θ1 formed between the optical axis AX1 and the optical axis AX5 is preferably greater than 0° and less than 90°, and more preferably greater than or equal to 45° and less than or equal to 75°.

[0091] (Half-Wave Plate) The half-wave plate 606E is provided between the focusing unit 606A and the aperture unit 606B. The half-wave plate 604 is a flat optical element that changes the polarization state of transmitted light. More specifically, it rotates the polarization direction of linearly polarized light before transmitting it. The illumination light beams Lb2a and Lb2b emitted from the second optical element 603B are emitted from the half-wave plate 606E with their polarization direction rotated by the half-wave plate 604. This prevents the difference in brightness between the scattered light beams Lb2a and Lb2b and the scattered light beams Lb1a and Lb1b from increasing in the captured image. However, the half-wave plate 606E is not essential and need not be provided.

[0092] (Illumination Lights Lb1a, Lb1b, Lb2a, Lb2b) The projection device 60 is configured as described above. Therefore, illumination light Lb1 emitted from the first light source device 601A is expanded by the first lens group 602A so that its full width at half maximum in the first alignment direction (X direction) is increased, and is separated into illumination light Lb1a and illumination light Lb1b by the first optical element 603A. Furthermore, illumination light Lb2 emitted from the second light source device 601B is expanded by the second lens group 602B so that its full width at half maximum in the first alignment direction (Z direction) is increased, and is separated into illumination light Lb2a and illumination light Lb2b by the second optical element 603B. Illumination light Lb1a, Lb1b and illumination light Lb2a, Lb2b are combined by the combining unit 605 and travel in the Z direction. The illumination light Lb1a, Lb1b, Lb2a, and Lb2b traveling in the Z direction pass through the focusing section 606A, the aperture section 606B, and the focusing section 606C, are reflected by the reflecting section 606D, and are irradiated (projected) onto the test object A placed on the mounting surface ST.

[0093] The illumination lights Lb1a and Lb1b reflected by the reflecting unit 606D are combined and irradiated onto the same irradiation region on the test object A. The illumination lights Lb1a and Lb1b interfere with each other, and are projected as structured illumination light having a light-dark pattern (stripe) whose brightness or intensity varies in the X direction, in the same irradiation region on the test object A. Similarly, the illumination lights Lb2a and Lb2b reflected by the reflecting unit 606D are combined and irradiated onto the same irradiation region on the test object A. The illumination lights Lb2a and Lb2b interfere with each other, and are projected as structured illumination light having a light-dark pattern whose brightness or intensity varies in the X direction, in the same irradiation region on the test object A. The structured illumination light of illumination lights Lb1a and Lb1b projected (irradiated) onto the test object A and the structured illumination light of illumination lights Lb2a and Lb2b are scattered by the test object A, enter the lens barrel 20 from the end 20A of the lens barrel 20, and are then incident on the first image capturing device 40. As a result, the first image capturing device 40 captures an image of the illumination lights Lb1a and Lb1b (structured illumination light) projected onto the test object A and an image of the illumination lights Lb2a and Lb2b (structured illumination light) projected onto the test object A.

[0094] (Irradiation Area) Next, we will explain the irradiation area on the test object A (mounting surface ST) that is irradiated with the illumination light Lb from the projection device 60. Fig. 8 is a schematic diagram for explaining an example of the irradiation area. Fig. 8 shows an example of the irradiation area when viewed from the Z direction.

[0095] (Irradiation Area of ​​Illumination Light from One Projection Device) As described above, the projection device 60 irradiates the same irradiation area on the test object A (mounting surface ST) with structured illumination light obtained by combining the illumination lights Lb1a and Lb1b as the illumination light Lb, and irradiates the same irradiation area on the test object A (mounting surface ST) with structured illumination light obtained by combining the illumination lights Lb2a and Lb2b as the illumination light Lb. Hereinafter, the irradiation area irradiated with the illumination lights Lb1a and Lb1b (the area onto which the images of the illumination lights Lb1a and Lb1b are projected), in other words, the irradiation area irradiated with the illumination lights Lb1a and Lb1b that have transmitted through the opening OP of the first optical element 603A, will be referred to as the irradiation area ARA. On the other hand, the illumination area irradiated with the illumination lights Lb2a and Lb2b (the area onto which the images of the illumination lights Lb2a and Lb2b are projected), in other words, the illumination area irradiated with the illumination lights Lb2a and Lb2b that have passed through the opening OP of the second optical element 603B, is referred to as the illumination area ARB. The orientation of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARA is inclined with respect to the Y direction (scanning direction). The orientation of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARA is determined by the orientation of the pattern of the diffraction grating 603a. Therefore, in this embodiment, the orientation of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARA is inclined with respect to the Y direction (scanning direction) depending on the orientation of the pattern of the diffraction grating 603a. Similarly, the orientation of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARB is inclined with respect to the Y direction. In this embodiment, the direction of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARA is tilted relative to the direction of the stripes of the light and dark pattern formed by the structured illumination light projected onto the illumination area ARB.

[0096] The irradiation area ARA and the irradiation area ARB are located at different positions. In other words, the projection device 60 irradiates the illumination light Lb onto the irradiation area ARA (first irradiation area) and the irradiation area ARB (second irradiation area) different from the irradiation area ARA. In this embodiment, as described above, the opening OP of the first optical element 603A through which the illumination lights Lb1a and Lb1 pass and the opening OP of the second optical element 603B through which the illumination lights Lb2a and Lb2 pass are formed at different positions, so that the irradiation area ARA and the irradiation area ARB are also located at different positions.

[0097] More specifically, the opening OP of the first optical element 603A through which the illumination lights Lb1a and Lb1 pass and the opening OP of the second optical element 603B through which the illumination lights Lb2a and Lb2 pass are located at different positions in the Y direction. Therefore, the irradiation areas ARA and ARB are also located at different positions in the Y direction (first direction; scanning direction). In other words, the irradiation areas ARA and ARB are aligned in the Y direction on the test object A (mounting surface ST). In this embodiment, the irradiation area ARB is located on the -Y direction side of the irradiation area ARA. Furthermore, the opening OP of the first optical element 603A and the opening OP of the second optical element 603B through which the illumination lights Lb2a and Lb2 pass are spaced apart in the Y direction. Therefore, the irradiation areas ARA and ARB are formed at positions spaced apart in the Y direction on the test object A (mounting surface ST).

[0098] The configuration for making the irradiation areas ARA and ARB different or spaced apart is not limited to shifting the position of the opening OP. For example, the irradiation areas ARA and ARB may be made different or spaced apart by shifting the positions of the first light source device 601A and the second light source device 601B.

[0099] In this way, by forming the irradiation area ARA and the irradiation area ARB at different positions, different light and dark patterns can be simultaneously projected onto different areas on the test object A, allowing the three-dimensional shape of the test object A to be properly measured. Furthermore, by positioning the irradiation area ARA and the irradiation area ARB at different positions in the Y direction, which is the scanning direction, the three-dimensional shape of the test object A can be properly measured. Furthermore, by setting the irradiation area ARA and the irradiation area ARB at positions spaced apart in the Y direction, overlap between the irradiation area ARA and the irradiation area ARB can be prevented, even if the sizes of the irradiation areas ARA and ARB change depending on the shape of the test object A, for example. Furthermore, the illumination light Lb from the projection device 60 is irradiated onto the test object A (mounting surface ST) in a direction tilted from the optical axis AX2 of the first imaging device 40. This may result in blurring of the illumination light Lb, which may cause the irradiation areas ARA and ARB to be larger than expected. In contrast, by setting the irradiation areas ARA and ARB at positions separated in the Y direction, it is possible to prevent the irradiation areas ARA and ARB from overlapping.

[0100] Here, the length D2A of the irradiation area ARA in the X direction is longer than the length D1A in the Y direction. Similarly, the length D2B of the irradiation area ARB in the X direction is longer than the length D1B in the Y direction. That is, the irradiation areas ARA and ARB have a horizontally elongated shape that is longer in the X direction than in the Y direction. In the example of FIG. 8 , the irradiation areas ARA and ARB are rectangular with a longer length in the X direction when the surface of the test object A (mounting surface ST) onto which the image of the illumination light Lb is projected is a plane perpendicular to the Z direction. However, this is not limited to a rectangle, and they may have any shape, such as an ellipse, a rectangle with curved corners, or a polygon. In this way, by shortening the irradiation areas ARA and ARB in the Y direction (scanning direction), the three-dimensional shape of the test object A can be measured with high accuracy while maintaining the frame rate within an appropriate range. Furthermore, by lengthening the irradiation areas ARA and ARB in the X direction, the three-dimensional shape of a wide area can be measured with a single irradiation of the illumination light Lb.

[0101] In this embodiment, when the surface of the test object A (mounting surface ST) is a plane perpendicular to the Z direction, the length D2A of the irradiation area ARA and the length D2B of the irradiation area ARB are the same. Similarly, when the surface of the test object A (mounting surface ST) is a plane perpendicular to the Z direction, the length D1A of the irradiation area ARA and the length D1B of the irradiation area ARB are the same. Since the lengths of the irradiation areas ARA and ARB in the X and Y directions are the same in this way, the shape of the test object A can be appropriately calculated. However, this is not limited thereto, and the length D2A and the length D2B may be different, or the length D1A and the length D1B may be different.

[0102] Furthermore, the distance between the irradiation area ARA and the irradiation area ARB in the Y direction is defined as distance D3A. In this case, distance D3A is shorter than lengths D2A and D2B of the irradiation areas ARA and ARB. Furthermore, distance D3A is shorter than lengths D1A and D1B of the irradiation areas ARA and ARB. By shortening the length of distance D3A in this way, it is possible to prevent the entirety of the multiple irradiation areas in a single irradiation of illumination light from becoming too long in the Y direction, and it is possible to measure the three-dimensional shape of the test object A with high accuracy while maintaining the frame rate within an appropriate range.

[0103] (Illumination Areas Illuminated by Illumination Light from Multiple Projection Devices) As described above, in this embodiment, the projection device 60 includes a first projection device 60a and a second projection device 60b. The first projection device 60a and the second projection device 60b irradiate the test object A (mounting surface ST) with illumination light from different directions. In this embodiment, the first projection device 60a is provided on the +X direction side of the lens barrel 20 (the optical axis AX2 of the first image pickup device 40) and irradiates the test object A (mounting surface ST) with illumination light from the +X direction side. On the other hand, the second projection device 60b is provided on the −X direction side of the lens barrel 20 (the optical axis AX2 of the first image pickup device 40) and irradiates the test object A (mounting surface ST) with illumination light from the −X direction side.

[0104] The irradiation area of ​​the illumination light Lb (structured illumination light) emitted from the first projection device 60a and the irradiation area of ​​the illumination light Lb (structured illumination light) emitted from the second projection device 60b are located at different positions. In other words, the projection device 60 has the first projection device 60a that projects the illumination light Lb onto a first irradiation area, and the second projection device 60b that projects the illumination light Lb onto a second irradiation area different from the first irradiation area. In this embodiment, the first projection device 60a and the second projection device 60b are arranged at different positions, so that the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b are located at different positions.

[0105] More specifically, the first projection device 60a and the second projection device 60b are located at different positions in the Y direction. Therefore, the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b are also located at different positions in the Y direction (first direction; scanning direction). In other words, the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b are aligned in the Y direction on the test object A (mounting surface ST). In this embodiment, the irradiation area of ​​the second projection device 60b is located on the -Y direction side of the irradiation area of ​​the first projection device 60a. Furthermore, the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b are formed at positions separated in the Y direction on the test object A (mounting surface ST).

[0106] Note that the configuration for making the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b different or distant from each other is not limited to shifting the positions of the first projection device 60a and the second projection device 60b. For example, the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b may be made different or distant from each other by shifting the positions of the opening OP of the optical element 603 of the first projection device 60a and the opening OP of the optical element 603 of the second projection device 60b or by shifting the positions of the light source device 601 of the first projection device 60a and the light source device 601 of the second projection device 60b.

[0107] By providing the first projection device 60a and the second projection device 60b that irradiate illumination light Lb from different directions in this manner, even if the illumination light Lb from the first projection device 60a is blocked by a portion of the test object A and is not projected onto another portion of the test object A, the illumination light Lb from the second projection device 60b can be projected onto that portion, thereby enabling appropriate measurement of the three-dimensional shape. Furthermore, by positioning the irradiation areas of the first projection device 60a and the second projection device 60b at different positions, the illumination light Lb projected from different directions can be simultaneously projected onto different regions on the test object A, enabling appropriate measurement of the three-dimensional shape of the test object A. Furthermore, by positioning the irradiation areas of the first projection device 60a and the irradiation areas of the second projection device 60b at different positions in the Y direction, which is the scanning direction, the three-dimensional shape of the test object A can be appropriately measured. Furthermore, by setting the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b at positions separated in the Y direction, it is possible to prevent the irradiation area ARA and the irradiation area ARB from overlapping.

[0108] In this embodiment, when the surface of the test object A (mounting surface ST) onto which the image of the illumination light Lb is projected is a plane perpendicular to the Z direction, the lengths in the X direction of the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b (lengths D2A and D2B) are the same. Similarly, when the surface of the test object A (mounting surface ST) is a plane perpendicular to the Z direction, the lengths in the Y direction of the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b (lengths D1A and D1B) are the same. In this way, the lengths in the X direction and the Y direction of the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b are the same, so that the shape of the test object A can be appropriately calculated. However, this is not limited thereto, and the lengths in the X direction and the Y direction of the irradiation areas may be different.

[0109] Furthermore, the distance in the Y direction between the irradiation area of ​​the first projection device 60a and the irradiation area of ​​the second projection device 60b (the distance between the irradiation area ARAa of the first projection device 60a and the irradiation area ARAb of the second projection device 60b, and the distance between the irradiation area ARBa of the first projection device 60a and the irradiation area ARBb of the second projection device 60b) is defined as a distance D3B. In this case, the distance D3B is shorter than the length in the X direction of the irradiation areas of the first projection device 60a and the second projection device 60b. Furthermore, the distance D3B is shorter than the length in the Y direction of the irradiation areas of the first projection device 60a and the second projection device 60b. By shortening the length of the distance D3B in this way, it is possible to prevent the entire length of the multiple irradiation areas in a single irradiation of illumination light from becoming too long in the Y direction, and it is possible to measure the three-dimensional shape of the test object A with high accuracy while maintaining the frame rate within an appropriate range.

[0110] In this embodiment, the first projection device 60a and the second projection device 60b project illumination light onto the irradiation area ARA and the irradiation area ARB, respectively. That is, the first projection device 60a projects images of illumination light Lb1a and Lb1b onto the irradiation area ARAa, and projects images of illumination light Lb2a and Lb2b onto the irradiation area ARBa. Similarly, the second projection device 60b projects images of illumination light Lb1a and Lb1b onto the irradiation area ARAb, and projects images of illumination light Lb2a and Lb2b onto the irradiation area ARBb. The irradiation areas ARAa, ARBa, ARAb, and ARBb are aligned in the Y direction and spaced apart from one another in the Y direction. In this embodiment, the irradiation areas ARAa, ARBa, ARAb, and ARBb are aligned in the -Y direction in this order. In this embodiment, the irradiation areas ARAa, ARBa, ARAb, and ARBb are positioned so as not to overlap with the optical axis AX2 of the first imaging device 40 when viewed from the Z direction. More specifically, the optical axis AX2 is located between the irradiation areas ARBa and ARAb when viewed from the Z direction. This allows the irradiation areas to be evenly arranged around the optical axis AX2, allowing each irradiation area to be properly imaged. Note that in this embodiment, the irradiation areas ARAa, ARBa, ARAb, and ARBb are arranged in this order in the -Y direction, but this is not limiting. For example, the order of the irradiation areas ARAa, ARBa, ARBb, and ARAb in the -Y direction may also be the same.

[0111] Furthermore, the length in the Y direction of the region including all the irradiation regions onto which the illumination light Lb is projected by the projection device 60 in a single irradiation is defined as length D4. In this case, length D4 is shorter than the length in the X direction of the irradiation region (lengths D2A and D2B in this embodiment). This prevents the entire irradiation region from becoming too long in the Y direction, and enables the three-dimensional shape of the test object A to be measured with high accuracy while maintaining the frame rate within an appropriate range. Note that length D4 refers to the length in the Y direction from the end of the irradiation region furthest in the -Y direction that is closest to the -Y direction to the end of the irradiation region furthest in the +Y direction that is closest to the +Y direction. That is, in this embodiment, length D4 refers to the length from the end of the irradiation region ARBb furthest in the -Y direction to the end of the irradiation region ARAa furthest in the +Y direction.

[0112] Here, the imaging area of ​​the first imaging device 40 is referred to as imaging area AR0. The imaging area AR0 is the range (imaging range) imaged by the first imaging device 40 in one imaging. In this case, all irradiation areas onto which the illumination light Lb is projected by the projection device 60 in one irradiation are located within the imaging area AR0. That is, in this embodiment, the entire irradiation areas ARAa, ARBa, ARAb, and ARBb are located within the imaging area AR0. In this embodiment, when the surface of the test object A (mounting surface ST) is a plane perpendicular to the Z direction, the length of the imaging area AR0 in the X direction is the same as the length of the irradiation area of ​​the projection device 60 in the X direction (lengths D2A and D2B in this embodiment). Furthermore, when the surface of the test object A (mounting surface ST) is a plane perpendicular to the Z direction, the length D4 is shorter than the length D5 of the imaging area AR0 in the Y direction. By setting the imaging area AR0 in this way, it is possible to properly image the entire irradiation area in one imaging operation. Also, it is possible to use an area sensor instead of a line sensor as the first imaging device 40.

[0113] In the present embodiment, the imaging area of ​​the second imaging device 30 coincides with the imaging area AR0 of the first imaging device 40, but this is not limiting. For example, a part of the imaging area of ​​the second imaging device 30 may be located outside the imaging area AR0 of the first imaging device 40, or a part of the imaging area AR0 of the first imaging device 40 may be located outside the imaging area of ​​the second imaging device 30.

[0114] As described above, in this embodiment, the first projection device 60a and the second projection device 60b project illumination light onto the irradiation area ARA and the irradiation area ARB, respectively, but this is not limited thereto. For example, the first projection device 60a and the second projection device 60b may project illumination light onto only one of the irradiation area ARA and the irradiation area ARB. Furthermore, only one projection device 60 may be provided, and the single projection device 60 may project illumination light onto the irradiation area ARA and the irradiation area ARB.

[0115] (System configuration of shape measurement system) Next, the system configuration of the shape measurement system 1 and the function of the arithmetic device 19 will be described. Fig. 9 is a block diagram of the shape system according to this embodiment, and Fig. 10 is a functional block diagram of the arithmetic device according to this embodiment. As shown in Fig. 9, the shape measurement system 1 according to this embodiment has the imaging unit 11, support device 12, operation device 13, display device 14, drive device 15, memory 17, communication device 18, arithmetic device 19, and projection device 60, as described above.

[0116] (Calculation device) The calculation device 19 calculates the shape of the test object A based on the image of the first irradiation area and the image of the second irradiation area captured by the first imaging device 40. In this embodiment, since an image of the illumination light Lb having a light and dark pattern is projected onto the first irradiation area and the second irradiation area, the calculation device 19 calculates the three-dimensional shape of the test object A by a phase shift method using the image of the illumination light Lb captured by the first imaging device 40.

[0117] The arithmetic device 19 includes at least one processor (i.e., one processor or multiple processors) as hardware. The processor may include, for example, a processor conforming to a von Neumann computer architecture. The processor conforming to the von Neumann computer architecture may include at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor may include, for example, a processor conforming to a non-von Neumann computer architecture. The processor conforming to the non-von Neumann computer architecture may include at least one of an FPGA (Field Programmable Gate Array) and an ASIC (Application Specific Circuit). The processor may also be referred to as a group of circuits.

[0118] The arithmetic unit 19 reads a computer program 171 including at least one of computer program code and computer program instructions. For example, the arithmetic unit 19 may read the computer program 171 stored in the memory 17. For example, the arithmetic unit 19 may read the computer program 171 stored in a computer-readable, non-transitory recording medium using a recording medium reading device (not shown) included in the shape measurement system 1. The computer program 171 read from the recording medium may be stored in the memory 17. The arithmetic unit 19 may acquire (i.e., download or read) the computer program 171 from a device (not shown) located outside the shape measurement system 1 via the communication device 18 (or another communication device). The downloaded computer program 171 may be stored in the memory 17.

[0119] The arithmetic device 19 executes the loaded computer program 171. As a result, logical functional blocks for executing the processing to be performed by the shape measurement system 1 (for example, the processing to calculate the three-dimensional shape of the test object A described below) are realized within the arithmetic device 19. In other words, the arithmetic device 19, together with the memory 17 etc. in which the computer program 171 is recorded (in other words, together with the memory 17 and the computer program 171 recorded in the memory 17 etc.), can function as a controller or computer for realizing the logical functional blocks for executing the processing to be performed by the shape measurement system 1. That is, the shape measurement system 1 is configured to perform the processing (for example, the processing to calculate the three-dimensional shape of the test object A described below) provided by the memory 17 etc. together with at least one processor provided in the arithmetic device 31.

[0120] The memory 17 includes at least one memory capable of storing desired data. In other words, the memory 17 includes at least one memory containing desired data. For example, the memory 17 may store a computer program 171 executed by the arithmetic device 19. In this case, the memory 17 may be used as the above-mentioned recording medium for recording the computer program 171 executed by the arithmetic device 19. The memory 17 may temporarily store data used by the arithmetic device 19 when the arithmetic device 19 is executing the computer program 171. The memory 17 may also store data to be stored long-term by the shape measurement system 1. The memory 17 may include at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a disk array device. In other words, the memory 17 may include a non-temporary recording medium.

[0121] 10 , the arithmetic device 19 includes a drive control unit 191, an irradiation control unit 192, an imaging control unit 193, a synthesis unit 194, and an estimation unit 195. The arithmetic device 19 implements the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 by reading and executing a computer program 171 (software) from the memory 17. The drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 perform their respective processes. That is, the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 are logical functional blocks for executing processes to be performed by the shape measurement system 1 (e.g., processes for calculating the three-dimensional shape of the test object A, which will be described later). The arithmetic device 19 may execute these processes using a single CPU, or may be provided with multiple CPUs and execute the processes using the multiple CPUs. Furthermore, at least some of the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the composition unit 194, and the estimation unit 195 may be realized by hardware. That is, when the drive control unit 191 is realized by hardware, the drive control unit 191 can be called a drive control device, when the irradiation control unit 192 is realized by hardware, the irradiation control unit 192 can be called an irradiation control device, when the imaging control unit 193 is realized by hardware, the imaging control unit 193 can be called an imaging control device, when the composition unit 194 is realized by hardware, the composition unit 194 can be called a composition device, and when the estimation unit 195 is realized by hardware, the estimation unit 195 can be called an estimation device.

[0122] The drive control unit 191 controls the drive device 15 to move the imaging unit 11 relative to the test object A (mounting surface ST) using the drive device 15. The irradiation control unit 192 controls the illumination device 50 to cause the illumination device 50 to emit illumination light La. The irradiation control unit 192 controls the epi-illumination device 70 to cause the epi-illumination device 70 to emit illumination light La. The irradiation control unit 192 controls the projection device 60 to cause the projection device 60 to emit illumination light Lb. The imaging control unit 193 controls the first imaging device 40 to cause the first imaging device 40 to capture an image of the illumination light Lb projected onto the irradiation area on the test object A by the projection device 60. The imaging control unit 193 controls the second imaging device 30 to cause the second imaging device 30 to capture an image of the test object A. The synthesis unit 194 calculates the shape (two-dimensional shape) of the test object A based on the captured image captured by the second imaging device 30. The estimation unit 195 calculates the shape (three-dimensional shape) of the test object A based on the image of the illumination light Lb projected onto the irradiation area captured by the first imaging device 40 .

[0123] As described above, in this embodiment, the arithmetic device 19 has both the function of controlling each part of the shape measurement system 1 and the function of calculating the shape of the test object A. However, without being limited thereto, the arithmetic device 19 may have the function of calculating the shape of the test object A without having the function of controlling each part of the shape measurement system 1. In other words, the shape measurement system 1 may include a device having the function of controlling each part of the shape measurement system 1 and the arithmetic device 19 having the function of calculating the shape of the test object A.

[0124] (Image Capture Processing) Next, an image capture processing of the shape measurement system 1 performed by the arithmetic device 19 will be described. In this embodiment, the arithmetic device 19 causes the drive control unit 191 to move the imaging unit 11 relative to the test object A (mounting surface ST) in the Y direction, while causing the imaging control unit 193 to perform imaging. Specifically, while the imaging unit 11 is moving relative to the test object A (mounting surface ST) in the Y direction, the arithmetic device 19 causes the second imaging device 30 to capture an image of the test object A (an image of the illumination light La projected onto the test object A) in a state where at least one of the illumination device 50 and the epi-illumination device 70 is irradiated with the illumination light La. Thereafter, while the imaging unit 11 is moving in the Y direction relative to the test object A (mounting surface ST), the computing device 19 stops the illumination light La from the illumination device 50 and the epi-illumination device 70 and causes the projection device 60 to emit illumination light Lb, and causes the first imaging device 40 to capture an image of the illumination light Lb projected onto the illuminated area of ​​the test object A. The computing device 19 repeats this process, causing the second imaging device 30 and the first imaging device 40 to capture an image of the area to be measured (for example, the entire area) of the test object A.

[0125] Fig. 11 is a flowchart illustrating the control processing of the shape measurement system. The flow shown in Fig. 11 is executed by the arithmetic device 19. More specifically, in this embodiment, the flow shown in Fig. 11 is executed by the arithmetic device 19 reading and executing a computer program 171 (software), in other words, by logical functional blocks such as a drive control unit 191, an irradiation control unit 192, an imaging control unit 193, a synthesis unit 194, and an estimation unit 195. As described above, at least some of these functional blocks may be executed by hardware, and therefore the processing of Fig. 11 may be executed by hardware or by a combination of hardware and the computer program 171 (software).

[0126] 11 , the drive control unit 191 controls the drive device 15 to start control to move the imaging unit 11 relative to the test object A (mounting surface ST) in the Y direction (+Y direction in this example) (step S10). The drive control unit 191 supplies a control signal to the drive device 15 to move the imaging unit 11 in the Y direction at a predetermined speed.

[0127] Next, it is determined whether the imaging unit 11 is located at an imaging position for the test object A (step S11). For example, the imaging control unit 193 calculates the position of the imaging unit 11 on the test object A based on the position information of the imaging unit 11 from the position measurement unit 122 and the placement position of the test object A on the placement surface ST, thereby determining whether the imaging unit 11 is located at a position where imaging is scheduled to begin. The calculated position is compared with the position stored in the memory 17, and it is determined whether the imaging unit 11 is located at an imaging position for the test object A.

[0128] Next, the irradiation control unit 192 causes at least one of the illumination device 50 and the epi-illumination device 70 to irradiate the test object A (mounting surface ST) with illumination light La (step S12).

[0129] Next, the imaging control unit 193 determines whether the imaging time has arrived (step S14). For example, the imaging control unit 193 determines that the imaging time has arrived when a predetermined time has elapsed since the imaging unit 11 started moving in the Y direction or since the previous imaging timing. If the imaging time has not arrived (step S14; No), the imaging control unit 193 returns to step S14 and waits until the imaging time arrives.

[0130] When the imaging time arrives (Step S14; Yes), the imaging control unit 193 controls the second imaging device 30 to capture an image of its imaging area while the imaging unit 11 is moving (Step S16). The imaging control unit 193 supplies a control signal to the second imaging device 30, causing the second imaging device 30 to generate an image. The imaging control unit 193 acquires the image (image of the test object A) captured by the second imaging device 30 from the second imaging device 30, and stores it in the memory 17 in association with the imaging time.

[0131] Furthermore, the imaging control unit 193 acquires information indicating the position of the imaging unit 11 at the time of imaging from the position measurement unit 122. The imaging control unit 193 stores the information of the imaging unit 11 in association with the captured image in the memory 17. After the captured image is generated (after imaging by the second imaging device 30 is completed), the irradiation control unit 192 controls at least one of the illumination device 50 and the epi-illumination device 70 to stop the irradiation of the illumination light La from the illumination device 50 and the epi-illumination device 70.

[0132] Next, the illumination control unit 192 controls the projection device 60 to irradiate the first irradiation region and the second irradiation region with illumination light Lb (step S18). That is, the illumination control unit 192 controls the projection device 60 to irradiate the first irradiation region and the second irradiation region with illumination light Lb during a time when the imaging unit 11 is moving and the illumination device 50 and the epi-illumination device 70 are not irradiating the illumination light La. The illumination control unit 192 causes the projection device 60 to simultaneously project the illumination light Lb onto the first irradiation region and the second irradiation region. In this embodiment, the illumination control unit 192 controls the first projection device 60a and the second projection device 60b to simultaneously irradiate the illumination light Lb onto the irradiation region ARAa, the irradiation region ARBa, the irradiation region ARAb, and the irradiation region ARBb. As a result, images of illumination light Lb (structured illumination light) having a light and dark pattern are simultaneously projected onto illumination areas ARAa, ARBa, ARAb, and ARBb.

[0133] Next, the imaging control unit 193 determines whether the 3D imaging time has arrived (step S20). For example, the imaging control unit 193 determines that the 3D imaging time has arrived when a predetermined time has elapsed since the imaging time arrived in the most recent step S14.

[0134] If the three-dimensional imaging time has not arrived (step S20; No), the imaging control unit 193 returns to step S20 and waits until the three-dimensional imaging time arrives.

[0135] When the three-dimensional imaging time arrives (Step S20; Yes), the imaging control unit 193 controls the first imaging device 40 to capture an image of the imaging area AR0 of the first imaging device 40 while the imaging unit 11 is moving (Step S22). In this embodiment, the imaging control unit 193 controls the first imaging device 40 to capture an image of the imaging area AR0 of the first imaging device 40 multiple times while the imaging unit 11 is moving. The imaging control unit 193 supplies a control signal to the first imaging device 40, causing the first imaging device 40 to generate a pattern image (an image obtained by capturing an image of the illumination light Lb (structured illumination light) projected onto the test object A). The imaging control unit 193 acquires multiple pattern images from the first imaging device 40 and stores them in the memory 17 in association with the imaging times. The imaging control unit 193 also stores the position of the imaging unit 11 at the imaging time of each pattern image in association with the pattern image in the memory 17.

[0136] Generally, in estimating a three-dimensional structure using the phase shift method, it is necessary to sequentially irradiate the test object with multiple structured illumination light beams having light-dark patterns with mutually different phase shifts, and acquire images for each light-dark pattern. Shape measurement using the phase shift method is described, for example, in Japanese Patent Application Laid-Open Nos. 2011-21970, 2012-93235, 2014-35198, 2008-170280, and 2000-9444. However, in this embodiment, the first imaging device 40 captures images multiple times while moving together with the projection device 60. In this embodiment, the orientation of the structured illumination light pattern is inclined with respect to the Y direction (scanning direction). Therefore, by varying the imaging timing in the scanning direction, multiple pattern images are generated in which light beams having mutually different phases are irradiated at specific positions on the test object A. The three-dimensional shape of the test object A can be estimated based on the multiple pattern images thus generated. Therefore, in order to estimate the three-dimensional shape of the test object A, it is not necessary to change the phase of light and dark of the structured illumination light emitted by the projection device 60. Note that in the above-described embodiment, a diffraction grating is used to create a light and dark pattern, but the method for creating a light and dark pattern is not limited to this. A projector that projects a light and dark pattern may also be used. When a projector that projects a light and dark pattern is used, for example, multiple projectors may be used in the first projection device 60a, or multiple patterns may be projected by a single projector.

[0137] Next, the drive control unit 191 determines whether the imaging unit 11 has reached an end in the Y direction (step S24). For example, the drive control unit 191 determines that the imaging unit 11 has reached an end in the Y direction when the time required for the imaging unit 11 to reach from one end to the other end in the Y direction has elapsed. The drive control unit 191 may determine whether the imaging unit 11 has reached an end in the Y direction by acquiring information indicating the position of the imaging unit 11 from the position measurement unit 122.

[0138] If the imaging unit 11 has not reached the end in the Y direction (step S24; No), the calculation device 19 stops the imaging by the first imaging device 40 and the irradiation by the projection device 60, returns to step S12, and continues control.

[0139] When the imaging unit 11 reaches the end in the Y direction (step S24; Yes), the calculation device 19 stops the imaging of the first imaging device 40 and the irradiation of the projection device 60, and controls the drive device 15 to stop the imaging unit 11 (step S26). The drive control unit 191 supplies a control signal to the drive device 15 to stop the imaging unit 11.

[0140] Next, the drive control unit 191 determines whether the imaging unit 11 has reached the end in the X direction and all imaging has been completed (step S28). If the imaging unit 11 has not reached the end in the X direction (step S28; No), the drive control unit 191 moves the imaging unit 11 in the X direction (step S30) and returns to step S10 to continue the process. The drive control unit 191 supplies a control signal to the drive device 15 to move the imaging unit 11 in the X direction. Note that in this case, since the imaging unit 11 has reached the end in the +Y direction, the drive control unit 191 may move the imaging unit 11 in the -Y direction in step S12. Alternatively, the drive control unit 191 may move the imaging unit 11 in the X direction and to the end in the -Y direction in step S30 and continue the process of step S10.

[0141] If the imaging unit 11 has reached the end in the X direction (step S28; Yes), the calculation device 19 ends the imaging process.

[0142] In this embodiment, the imaging time can be based on the imaging time at a predetermined position. For example, the imaging time is managed using the time at which the image of the start position where imaging of the test object A is started as the reference time.

[0143] (Composite Image Generation Process) Next, a process of generating a composite image by the synthesis unit 194 based on multiple captured images captured by the second imaging device 30 will be described. The synthesis unit 194 acquires multiple captured images captured by the second imaging device 30 stored in the memory 17 and information (position information) indicating the position of the imaging unit 11 at the time of imaging for each captured image. The synthesis unit 194 synthesizes the multiple captured images based on the multiple captured images and the position information to generate a composite image. The composite image is a two-dimensional image of a region of the test object A that is imaged while the second imaging device 30 is moving.

[0144] FIG. 12 is a flowchart illustrating the composite image generation process. The flow shown in FIG. 12 (processing for generating a composite image) is executed by the arithmetic unit 19. More specifically, in this embodiment, the flow shown in FIG. 12 is executed by the arithmetic unit 19 reading and executing a computer program 171 (software), in other words, by the synthesis unit 194, which is a logical functional block. As described above, at least a portion of the functional block may be executed by hardware. Therefore, the process shown in FIG. 12 may be executed by hardware or by a combination of hardware and the computer program 171 (software). Furthermore, the flow shown in FIG. 12 may be executed by a processor dedicated to image processing, such as an ASIC. The process for generating a composite image is executed in parallel with the image capture process each time a captured image is stored in the memory 17 in step S16 of the image capture process. However, the process is not limited to this, and the process for generating a composite image may be executed after the image capture process is completed.

[0145] The composition unit 194 acquires the captured image stored in the memory 17 in step S16 of the imaging process (step S40). The composition unit 194 may correct the acquired captured image based on the environmental temperature of the imaging unit 11, for example.

[0146] Next, the composition unit 194 determines whether or not there are captured images to be linked to the composite image generated in the most recent composite image generation process (step S42). If the captured image acquired in the most recent step S40 is an image captured at the third or subsequent imaging time after the imaging unit 11 started moving in the Y direction, the composite image generated in the most recent step S44 (an image generated by linking captured images) and the composite image generated in the immediately preceding step S44 exist. The composite image generated in the immediately preceding step S44 becomes the image to be linked to the composite image generated in the most recent step S44. Therefore, if the captured image acquired in the most recent step S40 is an image captured at the third or subsequent imaging time after the imaging unit 11 started moving in the Y direction, the composition unit 194 determines that there are captured images to be linked.

[0147] If there are no images to be linked (step S42; No), the combining unit 194 returns to step S40 and continues the process.

[0148] If there are images to be linked (step S42; Yes), the compositing unit 194 stitches the composite image generated in the most recent step S44 to the images to be linked (step S44). The compositing unit 194 stitches the composite images based on the positional relationship of the composite images.

[0149] Next, the composition unit 194 determines whether or not all captured images to be generated in the imaging process have been acquired (step S46). For example, the composition unit 194 determines that all captured images to be generated in the imaging process have been acquired when a predetermined number of captured images have been acquired.

[0150] If all the captured images have not been acquired (step S46; No), the combining unit 194 returns to step S40 and continues the process.

[0151] When all captured images have been acquired (Step S46; Yes), the composition unit 194 outputs an image of the test object A in which all the composite images have been connected (Step S48). For example, the composition unit 194 outputs the image of the test object by transmitting it to another device via the communication device 18. The composition unit 194 may also output the image of the test object by displaying it on the display device 14. The composition unit 194 may calculate the two-dimensional shape of the test object A based on the image of the test object A in which all the composite images have been connected. This completes the composition process.

[0152] (Calculation Process of Shape of Test Object) Next, the calculation process of the shape (three-dimensional shape) of the test object A by the estimation unit 195 based on the plurality of pattern images captured by the first imaging device 40 will be described. FIG. 13 is a flowchart illustrating the calculation process of the shape of the test object A. The flow shown in FIG. 13 (calculation process of the shape of the test object A) is executed by the arithmetic unit 19. More specifically, in this embodiment, the flow shown in FIG. 13 is executed by the arithmetic unit 19 reading and executing the computer program 171 (software), in other words, by the estimation unit 195, which is a logical functional block. As described above, at least a portion of the functional block may be executed by hardware. Therefore, the process of FIG. 13 may be executed by hardware or by a combination of hardware and the computer program 171 (software). In this embodiment, the calculation process of the shape of the test object A is executed in parallel with the imaging process every time a pattern image is stored in the memory 17 in step S22 of the imaging process. However, this is not limited thereto, and the calculation process of the shape of the test object A may be executed after the imaging process is completed.

[0153] 13 , the estimation unit 195 acquires the plurality of pattern images stored in the memory 17 in step S22 of the imaging process (step S50). The estimation unit 195 may correct the acquired pattern images based on, for example, the environmental temperature of the imaging unit 11.

[0154] Next, the estimation unit 195 calculates the positional relationship between the imaging regions AR0 of the multiple pattern images (step S52). The estimation unit 195 acquires the position of the imaging unit 11 at the time of capturing each pattern image from the memory 17. Note that the position of the imaging unit 11 may be corrected based on, for example, the environmental temperature of the imaging unit 11. The estimation unit 195 calculates the positional relationship between the imaging regions AR0 of the multiple pattern images based on the acquired position of the imaging unit 11.

[0155] Next, the estimation unit 195 estimates the shape of the test object A based on the calculated positional relationship and the luminance values ​​of multiple pixels included in each of the multiple pattern captured images (step S54). For example, the estimation unit 195 estimates the three-dimensional shape of the test object A using a phase shift method. In this case, the estimation unit 195 identifies an area in each pattern image where the captured areas AR0 of all pattern images overlap based on the calculated positional relationship. The estimation unit 195 acquires the luminance values ​​of each of the multiple pixels included in the identified area from each pattern image. The estimation unit 195 estimates the three-dimensional shape of the test object by calculating the height of the test object A at the position of each pixel based on the combination of the acquired luminance values. The relationship between the combination of luminance values ​​and the height of the test object A may be stored in advance in the memory 17 or may be calculated according to a predetermined formula.

[0156] The estimation unit 195 outputs information about the calculated shape of the test object A (step S56). For example, the estimation unit 195 outputs the information of the estimation unit 195 by transmitting it to another device via the communication device 18. The synthesis unit 194 may output the information of the estimation unit 195 by displaying it on the display device 14. This completes the estimation process.

[0157] 14 is a schematic timing chart for explaining the relationship between the imaging time at which a captured image is generated and the three-dimensional imaging time at which a pattern image is generated. As shown in FIG. 14 , when the imaging time arrives, the second imaging device 30 images the test object A and generates a captured image during a period T1. The generated captured image is stored in the memory 17 during a period T2. In parallel, a synthesis process is performed on the stored captured image. While the captured image is being stored in the memory 17, the three-dimensional imaging time arrives, and the first imaging device 40 images the test object multiple times during a period T3 to generate multiple pattern images. The generated multiple pattern images are stored in the memory 17 during a period T4. In parallel, an estimation process is performed on the stored multiple pattern images. Once the multiple pattern images are stored in the memory 17, the imaging time arrives again, and during a period T5, the second imaging device 30 images the test object and generates captured images.

[0158] In this way, the first imaging device 40 captures an image of the test object A and generates a pattern image while the captured images generated by the second imaging device 30 are being stored in the memory 17 or while a synthesis process is being performed on the captured images. Generally, the time required to generate a captured image is shorter than the time required for the imaging unit 11 to move, so there is a period of time during which no imaging is performed. The shape measurement system 1 performs three-dimensional measurement during such imaging times, thereby enabling efficient estimation of the three-dimensional structure of the test object.

[0159] As described above, the shape measurement system 1 controls the projection device 60 to irradiate illumination light Lb during times when illumination light La is not being emitted while the imaging unit 11 is moving, and controls the first imaging device 40 to capture images while illumination light Lb is being emitted, thereby acquiring multiple pattern images for each region of the test object A and estimating the three-dimensional shape of the test object A based on the multiple pattern images for each region. This enables the shape measurement system 1 to estimate the three-dimensional structure of the test object in a short period of time.

[0160] Note that a safety cover may be provided for the shape measurement system 1. FIG. 15 is a diagram illustrating an example of a shape measurement system. For example, if a high-class laser is used for the shape measurement system 1, a safety cover 150 is provided. The safety cover 150 is a cover that covers the shape measurement system 1 (e.g., houses the shape measurement system 1 inside). In the example of FIG. 15 , the safety cover 150 covers all devices in the shape measurement system 1 except the operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19. The safety cover 150 has a window 151 through which the inside of the shape measurement system 1 can be seen. The operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19 are attached to the outer surface of the safety cover 150. However, among the operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19, only the operation device 13 and the display device 14 may be provided on the outer surface of the safety cover 150, and the other devices may be housed within the safety cover 150. The safety cover 150 is provided with an interlock 153 that opens and closes only when a laser beam is not being emitted. That is, the interlock 153 locks the safety cover 150 so that it cannot be opened (exposing the shape measurement system 1 inside) while a laser beam is being emitted. The interlock 153 also unlocks the safety cover 150 while a laser beam is not being emitted. The safety cover 150 may also be provided with a transport window 152 for transporting the test object A from the outside into the safety cover 150. The transport window 152 may be provided with an opening / closing mechanism that switches between opening and closing the transport window 152, or the transport window 152 may be opened when the test object A is being transported and closed after transport.

[0161] It should be noted that a safety cover need not be provided in the shape measurement system 1. Fig. 16 is a diagram showing an example of a shape measurement system. For example, if the laser used in the shape measurement system 1 is of a low class and a safety cover is not necessary, a safety cover may not be provided. In this case, as shown in Fig. 16, the shape measurement system 1 may be provided with an operation device 13, a display device 14, a memory 17, a communication device 18, and a calculation device 19.

[0162] (System Example) Although the shape measurement system 1 in the above embodiment performs processing using a single device, multiple devices may be combined. FIG. 17 is a schematic diagram showing the configuration of a system including a shape measurement system. Next, a manufacturing system 300 including the shape measurement system 1 will be described using FIG. 17 . The manufacturing system 300 includes multiple shape measurement systems 1 (three in FIG. 17 ) and a program creation device 302. The shape measurement systems 1 and the program creation device 302 are connected via a wired or wireless communication line. The program creation device 302 creates various settings and programs to be created by the arithmetic device 19 of the shape measurement system 1. The program creation device 302 outputs the created programs and the shape measurement system 1. The shape measurement system 1 acquires area and range information and shape measurement programs from the program creation device 302 and performs processing using the acquired data and programs. The manufacturing system 300 performs shape measurement using the shape measurement system 1 using the data and programs created by the program creation device 302, thereby making effective use of the created data and programs.

[0163] Next, a manufacturing system including the above-described shape measurement system 1 will be described with reference to Fig. 18. Fig. 18 is a block diagram of the manufacturing system. A manufacturing system 200 of this embodiment includes the shape measurement system 1 as described in the above embodiment, a design device 202, a manufacturing device 204, and a repair device 206.

[0164] The design device 202 creates design information relating to the shape and composition of the test object A, and transmits the created design information to the manufacturing device 204 .

[0165] The manufacturing device 204 creates a test object A based on the design information input from the design device 202. The shape measurement system 1 measures the shape of the created test object A and determines whether the created test object A is a non-defective product. If the test object A is not a non-defective product, the shape measurement system 1 determines whether the test object A can be repaired. If the test object A can be repaired, the shape measurement system 1 calculates the defective portion and the repair content based on the measurement results of the shape of the test object A, and transmits information indicating the defective portion and the repair content to the repair device 206.

[0166] The repair device 206 repairs the defective portion of the test object A based on the information indicating the defective portion and the information indicating the repair content received from the shape measurement system 1.

[0167] 19 is a flowchart showing the flow of processing by the manufacturing system. In the manufacturing system 200, first, the design device 202 creates design information for the test object A (step S101). Next, the manufacturing device 204 creates the test object A based on the design information (step S102). Next, the shape measurement system 1 inspects (measures the shape of) the created test object A (step S103). Next, the shape measurement system 1 determines whether the test object A is a non-defective product (step S104). For example, if the shape of the test object A is within a predetermined design value range, the shape measurement system 1 determines that the test object A is a non-defective product, and if the shape is outside the design value range, the shape measurement system 1 determines that the test object A is a non-defective product.

[0168] If the shape measurement system 1 determines that the created test object A is a non-defective product (step S105; Yes), the process ends. On the other hand, if the shape measurement system 1 determines that the created test object A is not a non-defective product (step S105; No), the shape measurement system 1 determines whether the created test object A can be repaired (step S106).

[0169] If the manufacturing system 200 determines that the created specimen A can be repaired (Yes in step S106), the repair device 206 repairs the specimen A (step S107), and the process returns to step S103. If the manufacturing system 200 determines that the created specimen A cannot be repaired (No in step S106), the process ends and the defective product is collected. With this, the manufacturing system 200 ends the process of the flowchart shown in FIG. 19.

[0170] The manufacturing system 200 of this embodiment can determine whether the manufactured test object A is a non-defective product because the shape measurement system 1 of the above embodiment can inspect the shape of the test object A with high accuracy. Furthermore, the manufacturing system 200 can repair the test object A if it is not a non-defective product.

[0171] The repair process performed by the repair device 206 in this embodiment may be replaced with a process in which the manufacturing device 204 re-executes the manufacturing process. In this case, if the shape measurement system 1 determines that the product can be repaired, the manufacturing device 204 re-executes the manufacturing process.

[0172] (Effect) A shape measurement system 1 according to the present disclosure includes a projection device 60 having a first projection device 60a that projects illumination light Lb onto a first irradiation area and a second projection device 60b that projects illumination light Lb onto a second irradiation area different from the first irradiation area, a first imaging device 40 that captures images of the illumination light Lb projected onto the first irradiation area and the second irradiation area formed on the test object A, and a calculation device 19 that calculates the shape of the test object A based on the images of the first irradiation area and the second irradiation area captured by the first imaging device 40. According to the present disclosure, the shape of the test object A can be appropriately calculated by capturing images of the illumination light Lb projected onto different irradiation areas.

[0173] The optical axis AX2 of the first imaging device 40 is located between the first projection device 60a and the second projection device 60b. According to the present disclosure, the first projection device 60a and the second projection device 60b irradiate the illumination light Lb from different directions, so that the shape of the test object A can be appropriately calculated.

[0174] A shape measurement system 1 according to the present disclosure includes a projection device 60 that projects illumination light Lb onto a first irradiation area (irradiation area ARA) and a second irradiation area (irradiation area ARB) located at a position different from the first irradiation area, a first imaging device 40 that captures images of the illumination light Lb projected onto the first irradiation area and the second irradiation area formed on the test object A, and a calculation device 19 that calculates the shape of the test object A based on the images of the first irradiation area and the second irradiation area captured by the first imaging device 40. According to the present disclosure, the shape of the test object A can be appropriately calculated by capturing images of the illumination light Lb projected onto different irradiation areas.

[0175] The projection device 60 includes a first light source device 601A, a first optical element 603A having a first opening (opening OP) formed therein that transmits a portion of the light from the first light source device 601A, a second light source device 601B, a second optical element 603B having a second opening (opening OP) formed therein that transmits a portion of the light from the second light source device 601B, a combining unit 605 that combines the light that has passed through the first opening and the light that has passed through the second opening, and a projection optical system 606 that projects the light combined by the combining unit 605. The projection optical system 606 projects the light that has passed through the first opening (illumination lights Lb1a, Lb1b) of the light combined by the combining unit onto a first illumination region, and projects the light that has passed through the second opening (illumination lights Lb2a, Lb2b) of the light combined by the combining unit onto a second illumination region. According to the present disclosure, images of illumination light Lb can be appropriately projected at different positions.

[0176] The first optical element 603A and the second optical element 603B include a diffraction grating 603a that separates the incident light into a first diffracted light and a second diffracted light. According to the present disclosure, the illumination light Lb can be appropriately separated, and the three-dimensional shape of the test object A can be appropriately calculated.

[0177] Between the first light source device 601A and the first optical element 603A, a lens (concave lens 602b) is provided that expands the light emitted from the first light source device 601A toward an angle with a larger half-value angle of the light, and between the second light source device 601B and the second optical element 603B, a lens (concave lens 602b) is provided that expands the light emitted from the second light source device 601B toward an angle with a larger half-value angle of the light. According to the present disclosure, by expanding the light from the light source device 601 toward an angle with a larger half-value angle, it is possible to appropriately set, for example, a horizontally elongated (long in the X direction) irradiation area by utilizing the original spread angle of the light.

[0178] The shape measurement system 1 is set so that the first irradiation area and the second irradiation area are aligned in a first direction (Y direction). According to the present disclosure, the shape of the test object A can be appropriately calculated by capturing images of the illumination light Lb projected onto different irradiation areas in the Y direction.

[0179] In the projection device 60, the first irradiation area and the second irradiation area are set to be separated in the first direction (Y direction). According to the present disclosure, it is possible to prevent the first irradiation area and the second irradiation area from overlapping, and it is possible to appropriately calculate the shape of the test object A.

[0180] The projection device 60 projects the illumination light Lb so that the distance between the first and second irradiation regions is shorter than the lengths of the first and second irradiation regions in the first direction (Y direction). According to the present disclosure, it is possible to prevent the entire region including the multiple irradiation regions from becoming too long in the Y direction.

[0181] The projection device 60 projects the illumination light Lb so that the lengths of the first and second irradiation regions in a second direction (X direction) perpendicular to the first direction (Y direction) are longer than the lengths of the first and second irradiation regions in the first direction (Y direction). According to the present disclosure, by setting an irradiation region that is long in the X direction in this manner, it is possible to measure the three-dimensional shape of the test object A with high accuracy while maintaining the frame rate within an appropriate range, and it is possible to measure the shape of a wide area with a single irradiation of the illumination light Lb.

[0182] In the shape measurement system 1, the first irradiation region and the second irradiation region have the same length in the second direction (X direction). According to the present disclosure, the shape of the test object A can be calculated appropriately.

[0183] In the shape measurement system 1, the lengths of the first and second irradiation areas in the second direction (X direction) are the same as the length of one of the imaging areas AR0 of the first imaging device 40. According to the present disclosure, the first irradiation area and the second irradiation area can be appropriately imaged at the same time.

[0184] The shape measurement system 1 moves the imaging unit 11, which includes the projection device 60 and the first imaging device 40, and the test object A relatively in a first direction (Y direction), and the first imaging device 40 captures an image of the test object A. According to the present disclosure, the shape of the test object A can be appropriately calculated.

[0185] The shape measurement system 1 moves the imaging unit 11 and the test object A relatively in the Y direction, captures an image of the test object A in the first irradiation area, and then captures an image of the test object A in the second irradiation area. According to the present disclosure, the shape of the test object A can be appropriately calculated.

[0186] The shape measurement system 1 further includes a second imaging device 30 that images the test object A, and the calculation device 19 calculates the shape of the test object A based on the image of the test object A captured by the second imaging device 30. According to the present disclosure, the shape of the test object A can be appropriately calculated.

[0187] The method for manufacturing a structure according to the present disclosure includes a design process for creating design information relating to the shape of a structure (test object A), a molding process for manufacturing the structure based on the design information, a measurement process for measuring the shape of the manufactured structure using a shape measurement system 1, and an inspection process for comparing the shape information obtained in the measurement process with the design information. According to the present disclosure, a structure can be manufactured appropriately.

[0188] The method for manufacturing a structure according to the present disclosure includes a repair step that is executed based on the comparison results of the inspection step and processes the structure. According to the present disclosure, the structure can be appropriately repaired.

[0189] A manufacturing system 200 according to the present disclosure includes a design device 202 that creates design information related to the shape of a structure (test object A), a molding device 204 that manufactures the structure based on the design device 202, a shape measurement system 1 that measures the shape of the manufactured structure, and a control device (arithmetic device 19) that compares design information with shape information related to the shape of the structure obtained by the shape measurement system 1. According to the present disclosure, a structure can be manufactured appropriately.

[0190] A shape measurement method according to the present disclosure includes projecting illumination light Lb onto a first irradiation area using a first projection device 60a, projecting illumination light Lb onto a second irradiation area different from the first irradiation area using a second projection device 60b, capturing images of the illumination light Lb projected onto the first irradiation area and the second irradiation area formed on the test object A, and calculating a shape of the test object based on the captured images of the first irradiation area and the second irradiation area. According to the present disclosure, the shape of the test object A can be appropriately calculated.

[0191] A shape measurement method according to the present disclosure includes projecting illumination light Lb onto a first irradiation area and a second irradiation area located different from the first irradiation area using a projection device 60, capturing images of the illumination light Lb projected onto the first irradiation area and the second irradiation area formed on the test object A, and calculating the shape of the test object based on the captured images of the first irradiation area and the second irradiation area. According to the present disclosure, the shape of the test object A can be appropriately calculated.

[0192] Although preferred embodiments of the present invention have been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to these examples. The shapes and combinations of the components shown in the above examples are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention. The components of the above-described embodiments can be combined as appropriate. In addition, some components may not be used. Furthermore, to the extent permitted by law, the disclosures of all published patent applications relating to the inspection apparatus, etc. cited in the above-described embodiments are incorporated by reference into this description. Other embodiments and operational techniques, etc., made by those skilled in the art based on the above-described embodiments are all included within the scope of the present embodiments.

[0193] REFERENCE SIGNS LIST 1 Shape measurement system 11 Imaging unit 19 Computing device 20 Lens barrel 30 Second imaging device 40 First imaging device 50 Illumination device 60 Projection device 60a First projection device 60b Second projection device 70 Epi-illumination device

Claims

1. A shape measurement system comprising: a projection device having a first projection device that projects illumination light onto a first illumination area and a second projection device that projects illumination light onto a second illumination area different from the first illumination area; a first image capture device that captures images of the illumination light projected onto the first illumination area and the second illumination area, which are formed on the object to be measured; and a calculation device that calculates the shape of the object to be measured based on the images of the first illumination area and the second illumination area captured by the first image capture device.

2. The shape measurement system of claim 1, wherein the optical axis of the first imaging device is located between the first projection device and the second projection device.

3. A shape measurement system comprising: a projection device that projects illumination light onto a first illumination area and a second illumination area that is located differently from the first illumination area; a first image capture device that captures images of the illumination light projected onto the first illumination area and the second illumination area, which are formed on the object to be measured; and a calculation device that calculates the shape of the object to be measured based on the images of the first illumination area and the second illumination area captured by the first image capture device.

4. The shape measurement system of claim 3, wherein the projection device comprises: a first light source device; a first optical element having a first opening formed therein that transmits a portion of the light from the first light source device; a second light source device; a second optical element having a second opening formed therein that transmits a portion of the light from the second light source device; a combining unit that combines the light that has passed through the first opening and the light that has passed through the second opening; and a projection optical system that projects the light combined by the combining unit, the light that has passed through the first opening, onto the first illumination area, and the projection optical system that projects the light that has passed through the second opening, out of the light combined by the combining unit, onto the second illumination area.

5. The shape measurement system according to claim 4, wherein the first optical element and the second optical element include a diffraction grating that separates incident light into a first diffracted light and a second diffracted light.

6. A shape measurement system as described in claim 4 or 5, wherein a lens is provided between the first light source device and the first optical element to expand the light emitted from the first light source device toward an angle that is larger than the half-value angle of the light, and a lens is provided between the second light source device and the second optical element to expand the light emitted from the second light source device toward an angle that is larger than the half-value angle of the light.

7. A shape measurement system according to any one of claims 1 to 6, wherein the projection device is set so that the first illumination area and the second illumination area are aligned in a first direction.

8. The shape measurement system according to claim 7, wherein the projection device sets the first illumination area and the second illumination area apart in the first direction.

9. The shape measurement system of claim 8, wherein the projection device projects the illumination light so that the distance between the first illumination area and the second illumination area is shorter than the length of the first illumination area and the second illumination area in the first direction.

10. A shape measurement system described in any one of claims 7 to 9, wherein the projection device projects the illumination light so that the length of the first illumination area and the second illumination area in a second direction perpendicular to the first direction is longer than the length in the first direction.

11. The shape measurement system of claim 10, wherein the lengths of the first illumination area and the second illumination area in the second direction are the same.

12. A shape measurement system according to claim 11, wherein the lengths of the first illumination area and the second illumination area in the second direction are the same as the length of one of the imaging areas of the first imaging device.

13. A shape measurement system according to any one of claims 7 to 12, wherein an imaging unit including the projection device and the first imaging device and the test object are moved relative to each other in the first direction, and the first imaging device images the test object.

14. A shape measurement system as described in claim 13, wherein the imaging unit and the test object are moved relative to each other in the first direction, and after imaging the test object in the first illumination area, the test object is imaged in the second illumination area.

15. A shape measurement system according to any one of claims 1 to 14, further comprising a second imaging device that images the test object, and the arithmetic device calculates the shape of the test object based on the image of the test object captured by the second imaging device.

16. A method for manufacturing a structure, comprising: a design process for creating design information regarding the shape of a structure; a molding process for manufacturing the structure based on the design information; a measurement process for measuring the shape of the manufactured structure using a shape measurement system described in any one of claims 1 to 15; and an inspection process for comparing the shape information obtained in the measurement process with the design information.

17. The method for manufacturing a structure according to claim 16, further comprising a repair step that is executed based on the comparison result of the inspection step and that processes the structure.

18. A structure manufacturing system comprising: a design device that creates design information regarding the shape of a structure; a molding device that produces the structure based on the design device; a shape measurement system described in any one of claims 1 to 14 that measures the shape of the produced structure; and a control device that compares the shape information regarding the shape of the structure obtained by the shape measurement system with the design information.

19. A shape measurement method comprising: projecting illumination light onto a first illumination area using a first projection device; projecting illumination light onto a second illumination area different from the first illumination area using a second projection device; capturing images of the illumination light projected onto the first illumination area and the second illumination area, which are formed on a test object; and calculating the shape of the test object based on the captured images of the first illumination area and the second illumination area.

20. A shape measurement method comprising: projecting illumination light onto a first illumination area and a second illumination area located differently from the first illumination area using a projection device; capturing images of the illumination light projected onto the first illumination area and the second illumination area, which are formed on the object to be measured; and calculating the shape of the object to be measured based on the captured images of the first illumination area and the second illumination area.

Images