Shape measuring system, structure manufacturing method, structure manufacturing system, and shape measuring method

Abstract

The objective of the present invention is to appropriately measure the shape of an inspection target object. This shape measuring system comprises: a first imaging device (30) that includes an imaging optical system for imaging an inspection target object (A); an illuminating device (50) that emits illuminating light (La) toward the inspection target object (A) when the inspection target object (A) is being imaged by the first imaging device (30), and that is disposed outside the first imaging device (30); and a measurement light emitting device (60) that emits measurement light (Pb) for measuring the shape of the inspection target object (A). The optical path of the measurement light (Lb) disposed outside the imaging optical system of the first imaging device (30) is disposed in a position different from that of the illuminating device (50).

Description

Shape measurement system, structure manufacturing method, structure manufacturing system, and shape measurement method

[0001] The present invention relates to a shape measurement system, a structure manufacturing method, a structure manufacturing system, and a shape measurement method.

[0002] 2. Description of the Related Art Conventionally, there is known a dimension measuring apparatus that photographs an object to be measured on a stage and determines the dimension values ​​of a measurement target portion of the object to be measured (see, for example, Patent Document 1).

[0003] US Patent Publication No. 2019 / 0139247

[0004] According to a first aspect of the present disclosure, a shape measurement system includes a first imaging device having an imaging optical system that images a test object, an illumination device that is arranged outside the first imaging device and that irradiates illumination light onto the test object when imaging with the first imaging device, and a measurement light irradiation device that irradiates measurement light to measure the shape of the test object, and the optical path of the measurement light that is arranged outside the imaging optical system is arranged at a position different from that of the illumination device.

[0005] According to a second aspect of the present disclosure, a shape measurement system includes a first imaging device having an imaging optical system for imaging a test object, an illumination device arranged outside the first imaging device and irradiating illumination light onto the test object when imaging with the first imaging device, and a measurement light irradiation device that irradiates measurement light to measure the shape of the test object, and measures the shape of the test object based on the measurement light that is not blocked by the illumination device.

[0006] According to a third aspect of the present disclosure, a shape measurement system includes a first imaging device having an imaging optical system for imaging a test object, a measurement light irradiation device that irradiates measurement light for measuring the shape of the test object, a first axis portion extending in a first direction, and a base portion attached to the first axis portion so as to be movable in the first direction, and a lens barrel having the imaging optical system of the first imaging device is attached to the base.

[0007] According to a fourth aspect of the present disclosure, a shape measurement system includes a first imaging device having an imaging optical system that images a test object, an attachment member attached to the outside of the first imaging device, and a measurement light irradiation device that irradiates measurement light to measure the shape of the test object, and the optical path of the measurement light positioned outside the imaging optical system is positioned at a position different from the attachment member.

[0008] According to a fifth aspect of the present disclosure, a method for manufacturing a structure includes a design process for creating design information regarding the shape of the structure, a molding process for manufacturing the structure based on the design information, a measurement process for measuring the shape of the manufactured structure using the shape measurement system, and an inspection process for comparing the shape information obtained in the measurement process with the design information.

[0009] According to a sixth aspect of the present disclosure, a structure manufacturing system includes a design device that creates design information regarding the shape of a structure, a molding device that manufactures the structure based on the design device, a shape measurement system described in any one of claims 1 to 21 that measures the shape of the manufactured structure, and a control device that compares the shape information regarding the shape of the structure obtained by the shape measurement system with the design information.

[0010] According to a seventh aspect of the present disclosure, a shape measurement method includes: performing imaging with a first imaging device having an imaging optical system; irradiating a test object with illumination light using an illumination device arranged outside the first imaging device when imaging with the first imaging device; and irradiating a test object with measurement light for measuring the shape of the test object using a measurement light irradiation device, wherein the optical path of the measurement light arranged outside the imaging optical system is arranged at a position different from that of the illumination device.

[0011] According to an eighth aspect of the present disclosure, a shape measurement method includes: capturing an image using a first imaging device having an imaging optical system; irradiating a test object with illumination light using an illumination device arranged outside the first imaging device when capturing an image using the first imaging device; irradiating measurement light for measuring the shape of the test object using a measurement light irradiation device; and measuring the shape of the test object based on the measurement light that is not blocked by the illumination device.

[0012] According to a ninth aspect of the present disclosure, a shape measurement method includes taking an image using a first imaging device having an imaging optical system, and irradiating measurement light for measuring the shape of a test object using a measurement light irradiation device, and a lens barrel having the imaging optical system of the first imaging device is attached to a base that is attached to a first axis extending in a first direction so as to be movable in the first direction.

[0013] According to a tenth aspect of the present disclosure, a shape measurement method includes taking an image using a first imaging device having an imaging optical system, and irradiating measurement light for measuring the shape of a test object using a measurement light irradiation device, wherein the optical path of the measurement light located outside the imaging optical system is located at a position different from a mounting member attached to the outside of the first imaging device.

[0014] 1 is a schematic perspective view of a shape measurement system according to an embodiment of the present invention; FIG. 2 is an enlarged view of a portion of the shape measurement system according to an embodiment of the present invention; FIG. 3 is a schematic view of an imaging unit as viewed from the Z direction; FIG. 4 is a schematic view showing the configuration of optical members included in the imaging unit; FIG. 5 is a schematic view of a cross section of an illumination device; FIG. 6 is a schematic view of an illumination device as viewed from the Z direction; FIG. 7 is a schematic view showing another example of an illumination device; FIG. 8 is a block diagram of a shape system according to an embodiment of the present invention; FIG. 9 is a functional block diagram of a calculation device according to an embodiment of the present invention; FIG. 10 is a flowchart illustrating control processing of a shape measurement system; FIG. 11 is a flowchart illustrating composite image generation processing; FIG. 12 is a flowchart illustrating calculation processing of the shape of a test object; FIG. 13 is a schematic timing chart illustrating the relationship between the imaging time at which an imaged image is generated and the three-dimensional imaging time at which a pattern image is generated; FIG. 14 is a diagram illustrating an example of a shape measurement system; FIG. 15 is a diagram illustrating an example of a shape measurement system; FIG. 16 is a schematic view showing the configuration of a system including a shape measurement system; FIG. 17 is a block diagram of a manufacturing system; FIG. 18 is a flowchart illustrating the flow of processing by the manufacturing system.

[0015] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The components in the following embodiments include those that can be easily imagined by a person skilled in the art, those that are substantially the same, and those that are within the so-called equivalent range. Furthermore, the components disclosed in the following embodiments can be combined as appropriate.

[0016] (Shape measurement system) Fig. 1A is a schematic perspective view of a shape measurement system according to this embodiment. The shape measurement system 1 is a system that captures an image of an imaging range that includes at least a portion of a test object A placed on a mounting surface ST of a stage, and measures the shape of the test object. The captured image of the test object A is used, for example, to measure the dimensions and shape of the test object. The shape measurement system 1 has an imaging unit 11, a support device 12, an operation device 13, a display device 14, a drive device 15, a memory 17, a communication device 18, a calculation device 19, and a measurement light irradiation device 60.

[0017] The imaging unit 11 is a device that captures an image of the specimen A placed on the placement surface ST. The configuration of the imaging unit 11 will be described in detail later.

[0018] The mounting surface ST is disposed on a base member B. The base member B is disposed on a vibration isolation mechanism 126. The vibration isolation mechanism 126 includes an elastic member. In this embodiment, the elastic member of the vibration isolation mechanism 126 is a plate-shaped member made of rubber.

[0019] The support device 12 is configured to movably support the imaging unit 11 and includes an X-axis 121X, a Y-axis 121Y, and a Z-axis 121Z. Each axis is made of metal, such as cast iron. The X-axis 121X supports the Y-axis 121Y and, together with the Y-axis 121Y, moves the imaging unit 11 in the X-direction (second direction) along the mounting surface ST. The Y-axis 121Y supports the Z-axis 121Z and, together with the Z-axis 121Z, moves the imaging unit 11 in the Y-direction (first direction) along the mounting surface ST and perpendicular to the X-direction. The Z-axis 121Z supports the imaging unit 11 and moves the imaging unit 11 in the Z-direction perpendicular to the mounting surface ST. Note that, hereinafter, the direction toward one of the X-directions is referred to as the +X-direction, and the direction toward the other of the X-directions (the direction opposite to the +X-direction) is referred to as the -X-direction. Similarly, the direction toward one side of the Y direction is the +Y direction, and the direction toward the other side of the Y direction (the opposite direction to the +Y direction) is the -Y direction. A cable guide 125A for guiding a cable that supplies power to move the Y-axis 121Y and the Z-axis 121Z is connected to the X-axis 121X, a cable guide 125B (not shown) for guiding a cable that supplies power to move the Z-axis 121Z is connected to the Y-axis 121Y, and a cable guide 125C for guiding a cable that supplies power to the imaging unit 11 is arranged on the Z-axis 121Z.

[0020] The support device 12 also has a position measurement unit 122. The position measurement unit 122 is configured to measure displacement of the imaging unit 11 in the X, Y, and Z directions from a reference position, and includes, for example, a linear encoder. The position measurement units 122 are arranged on the X-axis 121X, the Y-axis 121Y, and the Z-axis 121Z, respectively.

[0021] The position measurement unit 122 measures the scales held by leaf springs on the surfaces of the X-axis 121X, Y-axis 121Y, and Z-axis 121Z. A low-friction material may be used for the surface or scale of each axis. For example, the static friction coefficient of the low-friction material disposed on the surface of each axis is preferably smaller than the static friction coefficient of the axis itself. This prevents the scale of the position measurement unit 122 from expanding or contracting due to temperature changes. The low-friction material may be a resin such as PTFE (polytetrafluoroethylene). The low-friction material may also be a metal layer disposed on the surface of each axis by plating the axis. The position measurement units 122 for the X-axis 121X and Y-axis 121Y are preferably located closer to the stage ST in terms of accuracy, while the position measurement unit 122 for the Z-axis 121Z is preferably located closer to the optical axis of the imaging unit 11 in terms of accuracy. That is, the position measurement unit 122 for the X-axis 121X is preferably located on the side of the X-axis 121X facing the stage ST, and the position measurement unit 122 for the Y-axis 121Y is preferably located on the bottom surface of the Y-axis 121Y. The position measurement unit 122 for the Z-axis 121Z is preferably located at the top of the imaging unit 11 so as to overlap with the optical axis. The position of the position measurement unit 122 may be any position, and in practice the position should be determined taking into consideration ease of maintenance and anti-fouling properties.

[0022] The operation device 13 is configured to receive operations for the shape measurement system 1, and includes, for example, a keyboard and a mouse. The operation device 13 generates a signal according to the received operation. The operation device 13 may be, for example, a touch panel.

[0023] The display device 14 is configured to display an image and includes, for example, a liquid crystal display, an organic EL (Electro-Luminescence) display, etc. The display device 14 displays an image according to the supplied image data.

[0024] The driving device 15 is a device that drives the shape measurement system 1. Specifically, the driving device 15 moves the Y-axis 121Y, the Z-axis 121Z, and the imaging unit 11 in the X direction, moves the Z-axis 121Z and the imaging unit 11 in the Y direction, and moves the imaging unit 11 in the Z direction. The driving device 15 also moves the illumination device 50 (described below) in the Z direction relative to the lens barrel 20 (described below) using the Z-axis motor 124. The driving device 15 includes a power source for driving the shape measurement system 1.

[0025] The memory 17 is an example of a storage unit, and is a device that stores data and programs. The memory 17 includes, for example, a semiconductor memory. The memory 17 stores an operating system program, a driver program, an application program, data, and the like that are used in processing by the arithmetic unit 19. The programs executed by the arithmetic unit 19 are installed into the memory 17 from a computer-readable, non-transitory, portable storage medium such as a CD-ROM (Compact Disc Read Only Memory) or a DVD-ROM (Digital Versatile Disc Read Only Memory).

[0026] The communication device 18 is a component that enables the shape measurement system 1 to communicate with other devices, and includes a communication interface circuit. The communication interface circuit is a communication interface circuit for a wireless LAN (Local Area Network), a wired LAN, or the like. The shape measurement system 1 supplies data transmitted from other devices to the calculation device 19, and transmits data supplied from the calculation device 19 to other devices.

[0027] The arithmetic unit 19 is a device that comprehensively controls the operation of the shape measurement system 1. The arithmetic unit 19 includes, for example, a CPU (Central Processing Unit). The arithmetic unit 19 may also include a DSP (Digital Signal Processor), an LSI (Large Scale Integration), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), etc. The arithmetic unit 19 executes various processes based on programs stored in the memory 17. Details of the processes executed by the arithmetic unit 19 will be described later.

[0028] (Imaging Unit) The imaging unit 11 captures images while moving in the Y direction. That is, the scanning direction of the imaging unit 11 can be said to be the Y direction. More specifically, the scanning direction in this embodiment is the +Y direction. However, this is not limited to this, and the scanning direction may be the -Y direction. The imaging unit 11 may capture images while moving in the Y direction, or may capture images after moving a predetermined distance in the Y direction and then stopping. Although the scanning direction is the Y direction in this embodiment, scanning in the X direction is also acceptable. There may also be multiple scanning directions. For example, the scanning direction may be changed to the X direction after scanning in the Y direction up to a predetermined position.

[0029] 1B is an enlarged view of a portion of the shape measurement system according to this embodiment. The measurement light irradiation device 60 is not shown in FIG. 1B. The imaging unit 11 is attached to a base 123. The imaging unit 11 is attached to the base 123 so as to be movable in the Z direction along a Z axis 121Z.

[0030] 2 is a schematic diagram of the imaging unit 11 as viewed from the Z direction. As shown in FIG. 2, the imaging unit 11 includes a lens barrel 20, a first imaging device 30, a second imaging device 40, an illumination device 50, a measurement light irradiation device 60, an epi-illumination device 70, and a base 123.

[0031] (Lens barrel) The lens barrel 20 is a casing that houses various components such as the first imaging device 30. The shape of the lens barrel 20 may be arbitrary, but in this embodiment it is a cylindrical component whose longitudinal direction is in the Z direction.

[0032] (First Imaging Device) The first imaging device 30 is a device that images the test object A. The first imaging device 30 images an image of illumination light La (described later) projected onto the test object A by at least one of the illumination device 50 and the epi-illumination device 70, as a two-dimensional shape of the test object A. The first imaging device 30 is housed in the lens barrel 20. The first imaging device 30 is housed in the lens barrel 20 so that the optical axis AX1 is aligned along the Z direction.

[0033] (Second Imaging Device) The second imaging device 40 is a device that captures an image of the measurement light Lb (described later) projected onto the test object A by the measurement light irradiator 60. The second imaging device 40 is disposed on the side of the barrel 20 (the optical axis AX1 of the first imaging device 30 disposed in the barrel 20) in a direction intersecting the Z direction (orthogonal in this example). In this embodiment, the second imaging device 40 is disposed on the −Y direction side of the barrel 20 (optical axis AX1). However, the position at which the second imaging device 40 is provided, in other words, the relative position of the second imaging device 40 with respect to the barrel 20 (optical axis AX1), is not limited to this and may be arbitrary.

[0034] The position of the first imaging device 30 that images the test object A and the position of the second imaging device 40 that images the image of the measurement light Lb may be reversed. That is, the first imaging device 30 that is housed in the lens barrel 20 so that the optical axis AX1 is along the Z direction may have the function of the second imaging device 40 that images the image of the measurement light Lb, and the second imaging device 40 that is arranged in a direction perpendicular to the Z direction with respect to the lens barrel 20 (optical axis AX1) may have the function of the first imaging device 30 that images the test object A.

[0035] (Measurement Light Illumination Device) The measurement light illumination device 60 is a device that illuminates the test object A (installation area ST) with measurement light Lb. As will be described in detail later, in this embodiment, the measurement light illumination device 60 projects illumination light (pattern light) having a light-dark pattern as the measurement light Lb. The second imaging device 40 captures an image of the measurement light Lb having the light-dark pattern projected onto the test object A by the measurement light illumination device 60.

[0036] The measurement light irradiator 60 is disposed on the side of the lens barrel 20 (optical axis AX1) in a direction intersecting the Z direction (orthogonal in this example). In this embodiment, the measurement light irradiator 60 (the optical system of the measurement light irradiator 60) is disposed on the X direction side of the lens barrel 20 (optical axis AX1), in other words, on the side in a direction perpendicular to the Y direction, which is the scanning direction. More specifically, in this embodiment, a first measurement light irradiator 60a and a second measurement light irradiator 60b are provided as the measurement light irradiator 60. The first measurement light irradiator 60a is disposed on the −X direction side of the lens barrel 20 (optical axis AX1), and the second measurement light irradiator 60b is disposed on the +X direction side of the lens barrel 20 (optical axis AX1). Furthermore, in this embodiment, the measurement light irradiator 60 is located outside the illumination device 50 (outside in the radial direction when the optical axis AX1 is the axial direction). The installation position of the measurement light irradiating device 60 is not limited to this and may be any position, but the first measurement light irradiating device 60a and the second measurement light irradiating device 60b are preferably installed so that the optical axis AX1 of the first image capturing device 30 is located between the first measurement light irradiating device 60a and the second measurement light irradiating device 60b. Also, the first measurement light irradiating device 60a and the second measurement light irradiating device 60b are preferably installed so that the optical axis AX2 of the second image capturing device 40, which will be described later, is located between the first measurement light irradiating device 60a and the second measurement light irradiating device 60b.

[0037] Furthermore, in this embodiment, the first measurement light irradiating device 60a and the second measurement light irradiating device 60b are positioned at different positions in the Y direction (scanning direction). That is, the central axis AX4 of the first measurement light irradiating device 60a (the optical axis of the light source device included in the first measurement light irradiating device 60a) when viewed from the Z direction and the central axis AX4 of the second measurement light irradiating device 60b (the optical axis of the light source device included in the second measurement light irradiating device 60b) when viewed from the Z direction are offset in the Y direction.

[0038] More specifically, when viewed from the Z direction, the central axis AX4 of the first measurement light irradiating device 60a is located on one side in the Y direction with respect to the optical axis AX1 of the lens barrel 20, and the central axis AX4 of the second measurement light irradiating device 60b is located on the other side in the Y direction with respect to the optical axis AX1 of the lens barrel 20. In the example of FIG. 2 , the central axis AX4 of the first measurement light irradiating device 60a is located on the −Y direction side of the optical axis AX1, and the central axis AX4 of the second measurement light irradiating device 60b is located on the +Y direction side of the optical axis AX1. However, this is not limited thereto, and the central axis AX4 of the first measurement light irradiating device 60a may be located on the +Y direction side of the optical axis AX1, and the central axis AX4 of the second measurement light irradiating device 60b may be located on the −Y direction side of the optical axis AX1. Note that, when viewed from the Z direction, it is preferable that the first measurement light irradiating device 60a and the second measurement light irradiating device 60b do not protrude from the outer circumferential surface of the lens barrel 20 in the Y direction. That is, it is preferable that the first measurement light irradiation device 60a and the second measurement light irradiation device 60b are located in the Y direction between the position 20Y1 on the outer surface of the lens barrel 20 that is closest to the +Y direction and the position 20Y2 on the outer surface of the lens barrel 20 that is closest to the -Y direction.

[0039] In this way, by providing the first measurement light irradiating device 60a and the second measurement light irradiating device 60b that irradiate the measurement light Lb from different directions, even if the measurement light Lb from the first measurement light irradiating device 60a is blocked by a part of the test object A and is not projected onto another part of the test object A, the measurement light Lb from the second measurement light irradiating device 60b can be projected onto that part, thereby making it possible to appropriately measure the shape. Furthermore, by arranging the first measurement light irradiating device 60a and the second measurement light irradiating device 60b with an offset in the Y direction, the irradiation area of ​​the first measurement light irradiating device 60a (the area on the test object A (installation area ST) onto which the measurement light Lb from the first measurement light irradiating device 60a is projected) and the irradiation area of ​​the second measurement light irradiating device 60b (the area on the test object A (installation area ST) onto which the measurement light Lb from the second measurement light irradiating device 60b is projected) can be located in different positions. This allows the measurement light Lb projected from different directions to be simultaneously projected onto different areas on the test object A, allowing the shape of the test object A to be measured appropriately.

[0040] The measurement light irradiation device 60 is not limited to a configuration having two measurement light irradiation devices, but may be a configuration having only one measurement light irradiation device (either the first measurement light irradiation device 60a or the second measurement light irradiation device 60b), or may be a configuration having three or more measurement light irradiation devices.

[0041] (Epi-illumination Device) The epi-illumination device 70 is a device that irradiates illumination light La onto the installation area ST. The first image capture device 30 captures an image of the test object A illuminated with the illumination light La from the epi-illumination device 70. The epi-illumination device 70 irradiates the illumination light La in a direction along the optical axis AX1 of the first image capture device 30. The epi-illumination device 70 is disposed on the side of the lens barrel 20 (optical axis AX1) in a direction that intersects with the Z direction (orthogonal in this example). In this embodiment, the epi-illumination device 70 is disposed in an oblique direction that is between the +X direction and the +Y direction with respect to the lens barrel 20 (optical axis AX1 of the first image capture device 30) when viewed from the Z direction. In other words, when viewed from the Z direction, if the direction from the center (optical axis AX1) of the lens barrel 20 along the +X direction is defined as 0°, and the direction from the center (optical axis AX1) of the lens barrel 20 along the +Y direction is defined as 90°, the epi-illumination device 70 is disposed on a diagonal side that is greater than 0° and less than 90° with respect to the lens barrel 20 (optical axis AX1). For example, the epi-illumination device 70 may be disposed on a diagonal side that is 45° with respect to the lens barrel 20 (optical axis AX1). In other words, the angle between the direction passing through the center (optical axis AX1) of the lens barrel 20 along the +X direction and the direction passing through the center (optical axis AX1) along the diagonal direction is defined as the inclination angle of the diagonal direction. In this case, the diagonal direction is inclined toward the +Y direction with respect to the +X direction, and the inclination angle of the diagonal direction is greater than 0° and less than 90°, with 45° being preferable.

[0042] However, the position at which the epi-illumination device 70 is provided, in other words, the relative position of the epi-illumination device 70 with respect to the lens barrel 20 (optical axis AX1), is not limited to this and may be arbitrary. Furthermore, the epi-illumination device 70 is not essential and does not have to be provided.

[0043] (Illumination Device) The illumination device 50 is a device that irradiates illumination light La onto the installation area ST. The first imaging device 30 captures an image of the test object A illuminated with the illumination light La from the illumination device 50. The illumination device 50 irradiates the illumination light La in a direction intersecting the optical axis AX1 of the first imaging device 30. The illumination light La from the illumination device 50 illuminates the imaging range of the first imaging device 30. The illumination device 50 irradiates the illumination light La radially inward. Multiple light source units 54 of the illumination device 50 that irradiate radially inward of the illumination device 50 are arranged in the Z direction, and the positions of the light source units 54 vary depending on the position in the Z direction. In the Z direction, the distance between the light source units 54 and the optical axis AX1 becomes shorter as the distance from the test object A increases, and the illumination light La is irradiated obliquely from each light source unit onto the test object A. The detailed arrangement position of the illumination device 50 will be described later.

[0044] (Base) The base 123 is a member that mounts the Z-axis 121Z to the base 121Y so that it can move in the Y direction. The base 120A is a member that mounts the imaging unit 11 to the Z-axis 121Z. The base 120A is mounted to the imaging unit 11 so that its position relative to the imaging unit 11 (the lens barrel 20 in this embodiment) is fixed, and is mounted to the Z-axis 121Z so that its position in the Z direction relative to the Z-axis 121Z can be changed. In this embodiment, the base 120A is mounted to the lens barrel 20 of the imaging unit 11. The base 120A may also be mounted to a member of the imaging unit 11 other than the lens barrel 20.

[0045] The base 120A is attached to the Z-axis 121Z so that its position in the Y direction relative to the Z-axis 121Z is fixed, and the Z-axis 121Z to which the base 120A is attached is attached to the Y-axis 121Y by the base 123 so that it can move in the Y direction. Therefore, it can be said that the base 120A attaches the imaging unit 11 to the Y-axis 121Y so that it can move in the Y direction relative to the Y-axis 121Y (first axis member). In other words, the base 120A is attached to the Y-axis 121Y so that its position in the Y direction relative to the Y-axis 121Y can be changed. Similarly, the Y-axis 121Y is attached to the X-axis 121X so that it can move in the X direction. Therefore, it can be said that the base 120A attaches the imaging unit 11 to the X-axis 121X so that it can move in the X direction relative to the X-axis 121X. In other words, the base 120A is attached to the X-axis 121X so that its position in the X direction relative to the X-axis 121X can be changed.

[0046] The base 120A is disposed on the side of the barrel 20 (optical axis AX1) in a direction intersecting the Z direction (orthogonal in this example). The base 120A is disposed between the second image capture device 40 and the measurement light irradiator 60 (first measurement light irradiator 60a) in the circumferential direction (the circumferential direction when the Z direction (direction along the optical axis AX1) is defined as the axial direction). That is, in this embodiment, the base 120A is disposed in a third direction between the −X direction (first direction) and the −Y direction (second direction) with respect to the barrel 20 (optical axis AX1) when viewed from the Z direction. In other words, when viewed from the Z direction, the direction along the −X direction from the center (optical axis AX1) of the barrel 20 is defined as 0°, and the direction along the −Y direction from the center (optical axis AX1) of the barrel 20 is defined as 90°, the base 120A is disposed on the third direction side that is higher than 0° but less than 90° with respect to the barrel 20 (optical axis AX1). For example, base 120A may be disposed on the third direction side at an angle of 45° with respect to lens barrel 20 (optical axis AX1). In other words, the angle between a direction passing through the center (optical axis AX1) of lens barrel 20 along the −X direction and a direction passing through the center (optical axis AX1) of lens barrel 20 along the third direction is defined as the tilt angle of the third direction. In this case, the third direction is tilted toward the −Y direction with respect to the −X direction, and the tilt angle of the third direction is greater than 0° and less than 90°, with 45° being preferable.

[0047] In addition, the base 120A has an end on the +X direction side attached to the lens barrel 20, extends in a third direction from the end on the +X direction to the end on the -X direction, and has an end on the -X direction side attached to the Z axis 121Z.

[0048] The bases 123, 121Z, and 120A are disposed in a third direction between the -X direction and the -Y direction. This allows the lens barrel 20 (optical axis AX1) to be disposed closer to the Y axis 121Y. Furthermore, the lens barrel 20 can be moved appropriately in the -Y direction during imaging. However, the positions at which the bases 123, 121Z, and 120A are provided, in other words, the relative positions of the bases 123, 121Z, and 120A with respect to the lens barrel 20 (optical axis AX1), are not limited to this and may be arbitrary.

[0049] (Configuration of Optical Members) Next, a description will be given of the configuration of the optical members of the imaging unit 11. Fig. 3 is a schematic diagram showing the configuration of the optical members of the imaging unit.

[0050] (Measurement Light Illumination Device) The measurement light illumination device 60 is a device that illuminates the test object A (installation area ST) with measurement light Lb. For example, the measurement light illumination device 60 has a light source unit that emits measurement light Lb and an optical system that guides the measurement light Lb emitted from the light source unit. The measurement light Lb is light in a wavelength band different from that of the illumination light La (illumination light La1 and illumination light La2 described below), for example, light in a wavelength band of 500 nm or more and 650 nm or less. However, the measurement light Lb is not limited thereto, and may be light in the same wavelength band as the illumination light La. Furthermore, the measurement light Lb illuminated by the measurement light illumination device 60 is projected onto an illumination area on the test object A (installation area ST) as pattern light having a light-dark pattern (stripes) whose phase changes in the X direction. Any method may be used to make the measurement light Lb into pattern light, but for example, the measurement light irradiation device 60 may have, as its optical system, a diffraction element that separates light emitted from a light source unit into multiple diffracted light beams and an optical element that combines the multiple diffracted light beams and irradiates the irradiation area. This allows the measurement light Lb to be appropriately made into pattern light.

[0051] As shown in FIG. 3, in this embodiment, the first measurement light emitting device 60a irradiates the test object A (installation area ST) with measurement light Lb from the −X direction side of the lens barrel 20 (optical axis AX1), and the second measurement light emitting device 60b irradiates the test object A (installation area ST) with measurement light Lb from the +X direction side of the lens barrel 20 (optical axis AX1).

[0052] The optical path of the measurement light Lb irradiated from the measurement light irradiator 60 is disposed outside the first image capture device 30. The optical path of the measurement light Lb irradiated from the measurement light irradiator 60 can be said to be disposed outside the imaging optical system of the first image capture device 30, and can also be said to pass through the space outside the lens barrel 20. The optical path of the measurement light Lb irradiated from the measurement light irradiator 60 refers to the optical path of the measurement light Lb in the section from the measurement light irradiator 60 to the test object A (installation area ST). The optical path of the measurement light Lb here refers to a region (region inside the full width at half maximum) where the intensity of the measurement light Lb is half or more of that of the central portion of the measurement light Lb. The term "outside" here refers to the radially outer side when the optical axis AX1 is the axial direction.

[0053] (Illumination Device) As shown in FIG. 3 , the illumination device 50 is a device that irradiates illumination light La toward the installation area ST. The illumination light La is, for example, light with a wavelength of 435 nm or more and 465 nm or less. The wavelength of the illumination light La is not limited to this, and light with a wavelength of 435 nm or more and 700 nm or less may also be used. The illumination device 50 is disposed outside the first image capture device 30. The illumination device 50 can also be said to be disposed outside the imaging optical system of the first image capture device 30, or in the space outside the lens barrel 20. The illumination device 50 is also located between the first image capture device 30 and the measurement light irradiator 60 in the radial direction. Note that, here, "outside" means the radially outer side when the optical axis AX1 is taken as the axial direction.

[0054] The illumination device 50 is disposed at a position different from the optical path of the measurement light Lb emitted from the measurement light emitting device 60. In other words, the illumination device 50 is disposed at a position different from the region through which the measurement light Lb travels in the section between the measurement light emitting device 60 and the test object A (installation region ST). This makes it possible to prevent the measurement light Lb from being blocked by the illumination device 50, and to appropriately measure the shape of the test object A.

[0055] The illumination device 50 is disposed at a position different from the optical path of the measurement light Lb emitted from the measurement light irradiation device 60. The structure of the illumination device 50 in this embodiment will be described below.

[0056] FIG. 4 is a schematic cross-sectional view of the illumination device, and FIG. 5 is a schematic view of the illumination device viewed from the Z direction. As shown in FIGS. 3 and 5 , the illumination device 50 is disposed in a circumferential direction. The circumferential direction here refers to the circumferential direction when the optical axis AX1 is defined as the axial direction. It can be said that the illumination device 50 extends along the circumferential direction radially outward from the optical axis AX1. The illumination device 50 is annular. Specifically, as shown in FIG. 3 , the illumination device 50 is provided around the outer circumferential surface of the end 20A on the Z direction side of the barrel 20 and extends in the circumferential direction. This is an annular illumination device. Furthermore, as shown in FIG. 4 , the illumination device 50 extends in the circumferential direction radially outward from the optical axis AX1 and the irradiation area AR (the area irradiated with the measurement light Lb).

[0057] As shown in FIGS. 3 and 4 , the illumination device 50 includes an attachment portion 51, a main body portion 52, and a light source portion 54 provided on the main body portion 52. The attachment portion 51 is a member that attaches the main body portion 52 and the light source portion 54 to the lens barrel 20. That is, the illumination device 50 is attached to the lens barrel 20 via the attachment portion 51. The attachment portion 51 may have any structure that allows the illumination device 50 to be attached to the lens barrel 20, but in this embodiment, for example, it is annular. The attachment portion 51 is attached to the main body portion 52 at its end surface 51A and to the outer peripheral surface of the lens barrel 20 at its inner peripheral surface 51B, thereby attaching the illumination device 50 to the lens barrel 20. In this embodiment, the illumination device 50 is attached to the lens barrel 20 so as to be movable in the Z direction relative to the lens barrel 20. The illumination device 50 is moved by a drive device 15 in the Z direction (a direction toward the test object A) and in the opposite direction to the Z direction (a direction away from the test object A) relative to the lens barrel 20. For example, the lighting device 50 may be attached to the lens barrel 20 so that the mounting portion 51 is fixed in position relative to the lens barrel 20, and the main body portion 52 (and the light source portion 54) is movable in the Z direction relative to the mounting portion 51 and the lens barrel 20.

[0058] The main body 52 is an annular member extending in the circumferential direction. The main body 52 may be made of any material, but may be a member that blocks the measurement light Lb. As shown in FIG. 4 , an end face 52B of the main body 52 opposite the Z direction is attached to an end face 51A of the attachment portion 51. The inner circumferential surface 52C of the main body 52 includes an inner circumferential surface 52C1 and an inner circumferential surface 52C2. The inner circumferential surface 52C1 is a portion of the entire inner circumferential surface 52C that extends in the Z direction from the end face 52B of the inner circumferential surface 52C1. The inner circumferential surface 52C1 is, for example, a surface with a constant diameter. The inner circumferential surface 52C2 is a portion of the entire inner circumferential surface 52C that extends in the Z direction from the end of the inner circumferential surface 52C1 on the Z direction side to the end face 52A of the main body 52 on the Z direction side. The diameter of the inner circumferential surface 52C2 increases in the Z direction.

[0059] Main body 52 is provided at a position that protrudes in the Z direction beyond end 20A of barrel 20, but is not limited to this, and end face 52A may be at the same position in the Z direction as end 20A of barrel 20, or end face 52A may be located on the opposite side in the Z direction from end 20A of barrel 20. Furthermore, the positional relationship between end face 52A and end 20A of barrel 20 may change as illumination device 50 moves relative to barrel 20.

[0060] The light source unit 54 is provided on the inner circumferential surface 52C2 of the main body 52. ​​In this embodiment, the light source unit 54 is configured to emit illumination light La and includes a light source such as an LED (Light Emitting Diode) and a control circuit. The control circuit controls the light source to emit light of different brightness levels using PWM (Pulse Width Modulation) control or the like. In this embodiment, a plurality of light source units 54 are provided across the entire inner circumferential surface 52C2. The light source units 54 are attached to the inner circumferential surface 52C so that their optical axes are perpendicular to the inner circumferential surface 52C2. Therefore, the optical axes of the light source units 54 are inclined radially inward with respect to the Z direction (optical axis AX). Therefore, the lighting device 50 emits illumination light La in a direction that inclines radially inward as it approaches the Z direction.

[0061] As shown in FIG. 5 , the illumination device 50 (main body 52) includes a first illumination portion 52a and a second illumination portion 52b. The first illumination portion 52a is a portion of the main body 52 located on the +Y direction side, and a light source portion 54 is provided on the inner circumferential surface 52C. The second illumination portion 52b is a portion of the main body 52 located on the −Y direction side of the first illumination portion 52a, and a light source portion 54 is provided on the inner circumferential surface 52C. The first illumination portion 52a and the second illumination portion 52b are separated from each other in at least a portion of the area. The optical path of the measurement light Lb emitted from the measurement light irradiation device 60 is located in the area between the first illumination portion 52a and the second illumination portion 52b (the area where the first illumination portion 52a and the second illumination portion 52b are separated from each other). Furthermore, a slit portion SL is formed between the first illumination portion 52a and the second illumination portion 52b. The slit portion SL is a space where the main body portion 52 and the light source portion 54 are not formed, and the first lighting portion 52a and the second lighting portion 52b are separated from each other via the slit portion SL.

[0062] The optical path of the measurement light Lb emitted from the measurement light emitting device 60 is arranged in this slit portion SL. In other words, the illumination device 50 is provided so that the measurement light Lb emitted from the measurement light emitting device 60 passes through the slit portion SL. Note that the slit portion SL is a space in which no components including the main body 52 and the light source 54 are formed, but is not limited thereto, and a component that transmits the measurement light Lb may be provided in the slit SL.

[0063] The size of the slit portion SL is determined based on the irradiation range irradiated by the measurement light Lb. That is, for example, the width of the slit portion SL in the Y direction is set to be larger than the width of the section of the optical path of the measurement light Lb that passes through the slit portion SL in the Y direction. Also, for example, the length of the slit portion SL in the Z direction is set to be larger than the length of the section of the optical path of the measurement light Lb that passes through the slit portion SL in the Z direction. For example, in this embodiment, the slit portion SL is formed in the Z direction from the end face 52A to the end face 52B of the main body 52. ​​The position of the slit portion SL is also determined based on the irradiation range irradiated by the measurement light Lb. That is, for example, the position of the slit portion SL in the Y direction is set to overlap the position of the section of the optical path of the measurement light Lb that passes through the slit portion SL in the Y direction. Also, the shape of the slit portion SL may be set arbitrarily.

[0064] Furthermore, as described above, the illumination device 50 may move in the Z direction relative to the lens barrel 20. In this case, the slit portion SL is set so that the optical path of the measurement light L is positioned at the slit portion SL even when the illumination device 50 is brought closer to the test object A by the driving device 15 (i.e., even when the illumination device 50 is moved to the maximum extent in the Z direction).

[0065] In this way, by arranging the illumination device 50 so that the optical path of the measurement light Lb passes through the slit portion SL, the illumination device 50 can be positioned close to the test object A (mounting surface ST) while preventing the measurement light Lb from being blocked.Therefore, the illumination light La from the illumination device 50 and the measurement light Lb from the measurement light irradiation device 60 can be properly irradiated onto the test object A, and the shape of the test object A can be properly measured.

[0066] 3, in this embodiment, a first image capturing device 30, a second image capturing device 40, an epi-illumination device 70, a polarizer 201, an optical splitter 202, a focusing optical system 203, a quarter-wave plate 204, an imaging optical system 205, a polarizer 206, and an optical splitter 207 are provided inside the lens barrel 20. These components may be arranged in any positions inside the lens barrel 20, but an example of their arrangement in this embodiment will be described below.

[0067] (First Imaging Device) The first imaging device 30 is a device that captures an image of the illumination light La projected onto the test object A as the test object A. In this embodiment, the first imaging device 30 is an imaging element that generates an image based on an image formed on a light receiving surface. The first imaging device 30 may be, for example, a CMOS (Complementary Metal Oxide Semiconductor) or CCD (Charge Coupled Device) image sensor. Note that a configuration including the first imaging device 30, which is an imaging element, and an imaging optical system (optical system) that introduces light into the imaging element may be referred to as the first imaging device. In this case, at least one (preferably all) of the polarizer 206, the light splitter 207, and the imaging optical system 205 constitutes the imaging optical system (optical system) of the first imaging device.

[0068] In this embodiment, the first imaging device 30 is disposed within the lens barrel 20 so that the optical axis AX1 is along the Z direction. For example, the first imaging device 30 is disposed within the lens barrel 20 so that the light receiving surface is perpendicular to the Z direction.

[0069] (Second Imaging Device) The second imaging device 40 is a device that captures an image of the measurement light Lb projected onto the test object A. In this embodiment, the second imaging device 40 is an imaging element that generates an image based on an image formed on a light receiving surface. The second imaging device 40 may be, for example, a CMOS or CCD image sensor. Note that a configuration including the second imaging device 40, which is an imaging element, and an imaging optical system (optical system) that causes light to be incident on the imaging element may be referred to as the second imaging device. In this case, at least one (preferably all) of the polarizer 206, the light splitter 207, and the imaging optical system 205 constitutes the imaging optical system (optical system) of the second imaging device. That is, in this embodiment, the first imaging device and the second imaging device share the same imaging optical system.

[0070] In this embodiment, the second image capture device 40 is disposed so that its light receiving surface faces radially inward (i.e., radially outward when the direction along the optical axis AX1 is the axial direction). That is, the second image capture device 40 is disposed so that the optical axis AX2 at the position where the illumination light La is received (the section between the second image capture device 40 and the optical splitter 207) is aligned radially inward. Note that in FIG. 3 , for convenience of explanation, the second image capture device 40 is positioned on the +X direction side with respect to the optical axis AX1, but as described above, in this embodiment, it is preferable that the second image capture device 40 be disposed on the -Y direction side. Also, in FIG. 3 , for convenience of explanation, the light receiving surface of the second image capture device 40 is disposed so that it is perpendicular to the +X direction, but it is preferable that the light receiving surface be disposed so that it is perpendicular to the -Y direction. That is, the optical axis AX2 at the position where the illumination light La is received (the section between the second image capture device 40 and the optical splitter 207) is preferably aligned along the -Y direction. In this embodiment, the second imaging device 40 is disposed between the first imaging device 30 and the placement surface ST in the Z direction.

[0071] (Epi-Illumination Device) The epi-illumination device 70 is a device that irradiates illumination light La toward the installation area ST. In this embodiment, the epi-illumination device 70 is configured to irradiate illumination light La, and includes a light source such as an LED (Light Emitting Diode) and a control circuit. The control circuit causes the light source to irradiate light of different brightness levels by PWM (Pulse Width Modulation) control or the like.

[0072] In this embodiment, the epi-illumination device 70 emits illumination light La in the same wavelength band as the illumination device 50. Hereinafter, when distinguishing between the illumination light La emitted by the epi-illumination device 70 and the illumination light La emitted by the illumination device 50, the illumination light La emitted by the epi-illumination device 70 will be referred to as illumination light La1, and the illumination light La emitted by the illumination device 50 will be referred to as illumination light La2. Note that the illumination light La1 and the illumination light La2 may have different wavelength bands.

[0073] In this embodiment, the epi-illumination device 70 is disposed so that the optical axis AX3 at the position where the illumination light La1 is emitted (the section between the epi-illumination device 70 and the optical splitter 202) is aligned radially inward (i.e., the radially inward direction when the direction along the optical axis AX1 of the first image capture device 30 is defined as the axial direction). Note that in FIG. 3 , for convenience of explanation, the epi-illumination device 70 is positioned on the +X direction side of the optical axis AX1 of the first image capture device 30. However, as described above, in this embodiment, it is preferable that the epi-illumination device 70 is disposed obliquely with respect to the optical axis AX1, so that the optical axis AX3 at the position where the illumination light La1 is emitted (the section between the epi-illumination device 70 and the optical splitter 202) is aligned obliquely. Furthermore, in this embodiment, the epi-illumination device 70 is disposed between the first image capture device 30 and the mounting surface ST in the Z direction. Furthermore, in this embodiment, the epi-illumination device 70 is disposed between the second image capture device 40 and the mounting surface ST in the Z direction.

[0074] (Polarizer) The polarizer 201 is disposed between the incident-light illumination device 70 and the optical splitter 202, has a transmission axis along a predetermined direction, and converts the illumination light La1 emitted from the incident-light illumination device 70 into linearly polarized light having a polarization plane along the direction of the transmission axis and transmits it.

[0075] (Light Splitter) The light splitter 202 is disposed between the first lens group 203a of the focusing optical system 203 and the second lens group 205a of the imaging optical system 205. The light splitter 202 is disposed so as to face the epi-illumination device 70 via the polarizer 201 in a direction perpendicular to the optical axis of the first lens group 203a (the Z direction in this example). The light splitter 202 reflects the illumination light La1 transmitted through the polarizer 201 to the first lens group 203a. The light splitter 202 also transmits light reflected by the test object A placed on the mounting surface ST and transmitted through the first lens group 203a (i.e., the illumination light La irradiated on the test object A and the reflected light of the measurement light Lb) to the second lens group 205a. The light splitter 202 is a polarizing beam splitter (PBS) such as a half mirror.

[0076] (Light Concentrating Optical System) The light focusing optical system 203 irradiates the test object A placed on the mounting surface ST with illumination light La1 emitted from the epi-illumination device 70 and directed toward the mounting surface ST (Z direction) by the light splitter 202. The light focusing optical system 203 also condenses light reflected by the test object A (i.e., the illumination light La irradiated on the test object A and the reflected light of the measurement light Lb). The light focusing optical system 203 has a first lens group 203a and a first aperture 203b. The first lens group 203a is disposed between the epi-illumination device 70 and the mounting surface ST in the Z direction, more specifically, between the light splitter 202 and the mounting surface ST. The first lens group 203a is disposed so that its optical axis is aligned with the Z direction (the optical axis AX1 of the first image capturing device 30). The first lens group 203a constitutes a telecentric optical system in which the chief ray of illumination light La that is emitted from the epi-illumination device 70 and passes through the first lens group 203a toward the mounting surface ST is parallel to the optical axis. The first aperture 203b is disposed between the epi-illumination device 70 and the optical splitter 202, and is configured to adjust the numerical aperture of the focusing optical system 203.

[0077] (Quarter Wave Plate) The quarter wave plate 204 is a flat optical member disposed between the first lens group 203a and the mounting surface ST, and changes the polarization state of light passing through it. The quarter wave plate 204 converts the linearly polarized illumination light La1 that has passed through the polarizer 201 and the first lens group 203a into circularly polarized light and transmits the light. The quarter wave plate 204 also converts the circularly polarized light reflected by the test object A (i.e., the reflected light of the illumination light La and measurement light Lb projected onto the test object A) into linearly polarized light having a polarization plane perpendicular to the polarization plane of the light that has passed through the polarizer 201, and transmits the light.

[0078] The quarter-wave plate 204 is disposed so as to be tilted at a predetermined acute angle with respect to the object plane of the focusing optical system 203, i.e., the plane perpendicular to the optical axis of the first lens group 203 a. This makes it difficult for light reflected by the quarter-wave plate 204 to enter the imaging optical system 205.

[0079] (Imaging Optical System) The imaging optical system 205 forms an image of light reflected by the test object A (i.e., the reflected light of the illumination light La and measurement light Lb irradiated on the test object A). The imaging optical system 205 has a second lens group 205a and a second diaphragm 205b. The second lens group 205a is disposed between the second image capture device 40 (first image capture device 30) and the mounting surface ST in the Z direction, more specifically, between the optical splitter 202 and the second image capture device 40 (first image capture device 30). The second lens group 205a is disposed such that its optical axis is aligned with the optical axis of the first lens group 203a (in this example, the Z direction). The second lens group 205a forms an image of the light reflected by the test object A and passing through the first lens group 203a and the optical splitter 202 on the light receiving surfaces of the second image capture device 40 and the first image capture device 30. The second diaphragm 205b is a component for adjusting the numerical aperture of the imaging optical system 205. The second diaphragm 205b and the first diaphragm 203b are disposed at conjugate positions with respect to the optical splitter 202. For example, the distance between the second diaphragm 205b and the optical splitter 202 is equal to the distance between the first diaphragm 203b and the optical splitter 202.

[0080] (Polarizer) The polarizer 206 is disposed between the second lens group 205a and the second image capturing device 40 (first image capturing device 30). The polarizer 206 is disposed so as to be in a crossed Nicol state with the polarizer 201. That is, the polarizer 206 transmits only linearly polarized light having a polarization plane orthogonal to the polarization plane of the light transmitted through the polarizer 201, and blocks light having other polarization components. Because the light that reaches the polarizer 206 without passing through the quarter-wave plate 204 is linearly polarized light having a polarization plane aligned with the direction of the transmission axis of the polarizer 201, the polarizer 206 makes it difficult for light reflected by areas other than the test object A to reach the second image capturing device 40 and the first image capturing device 30.

[0081] (Splitter) The splitter 207 is disposed on the optical axis of the second lens group 205a, between the polarizer 206 and the second image capturing device 40 (first image capturing device 30). The splitter 207 reflects a portion of the light reflected by the test object A and guides it to the second image capturing device 40, and transmits the remaining portion and guides it to the first image capturing device 30. In this embodiment, the splitter 207 reflects light in the wavelength band of the illumination light La and transmits light in the wavelength band of the measurement light Lb. Therefore, in this embodiment, the splitter 207 reflects the measurement light Lb reflected by the test object A and guides it to the second image capturing device 40, and transmits the illumination light La reflected by the test object A and guides it to the first image capturing device 30. However, the splitter 207 may be configured to transmit the measurement light Lb reflected by the test object A and reflect the illumination light La reflected by the test object A. In this case, it is preferable to exchange the positions of the second image capturing device 40 and the first image capturing device 30 with respect to that shown in Fig. 3. The splitter 207 is a beam splitter such as a half mirror.

[0082] (Illumination Light) The optical members of the imaging unit 11 are configured as described above. Therefore, the illumination light La1 emitted from the epi-illumination device 70 travels in a direction perpendicular to the Z direction (the −X direction in FIG. 3 ), passes through the polarizer 201, is reflected by the optical splitter 202, and travels in the Z direction. The illumination light La1 reflected by the optical splitter 202 and traveling in the Z direction passes through the first lens group 203a and the quarter-wave plate 204, is emitted from the end 20A of the lens barrel 20 to the outside of the lens barrel 20, and is irradiated onto the test object A placed on the mounting surface ST. That is, the optical axis AX3 of the epi-illumination device 70 runs along a direction perpendicular to the optical axis AX1 (Z direction) of the first imaging device 30 (the first oblique direction in this example) in the section from the epi-illumination device 70 to the optical splitter 202, and is coaxial with the optical axis AX1 in the section from the optical splitter 202 to the mounting surface ST (test object A). The end 20A of the lens barrel 20 is capable of passing the illumination lights La and Lb, and may be provided with a member that is transparent to the illumination lights La and Lb, or may be an opening without any member.

[0083] Furthermore, the illumination light La2 emitted from the illumination device 50 is irradiated onto the test object A placed on the placement surface ST.

[0084] The illumination light La (illumination light La1 and La2) irradiated onto the test object A is reflected by the test object A and enters the lens barrel 20 from the end 20A of the lens barrel 20. The reflected light of the illumination light La that entered the lens barrel 20 travels in the direction opposite to the Z direction, passes through the quarter-wave plate 204, the first lens group 203a, the optical splitter 202, the second lens group 205a, the polarizer 206, and the splitter 207, and enters the first image capturing device 30. The first image capturing device 30 captures the reflected light of the incident illumination light La as an image of the test object A (an image of the illumination light La projected onto the test object A). Therefore, the optical axis AX1 of the first image capturing device 30 is along the Z direction. In a configuration in which the illumination light La is not irradiated, light other than the illumination light La and the measurement light Lb reflected by the test object A (natural light and light from other light sources) enters the lens barrel 20, passes through the quarter-wave plate 204, the first lens group 203 a, the optical splitter 202, the second lens group 205 a, the polarizer 206, and the splitter 207, and enters the first imaging device 30. In this case, the first imaging device 30 captures the light other than the illumination light La and the measurement light Lb reflected by the test object A as an image of the test object A (an image of the light projected onto the test object A).

[0085] Furthermore, the measurement light Lb emitted from the measurement light emitting device 60 is irradiated onto the test object A placed on the placement surface ST. The measurement light Lb irradiated onto the test object A is reflected by the test object A and enters the lens barrel 20 from the end 20A of the lens barrel 20. Note that the measurement light Lb irradiated onto the test object A may be scattered by the test object A and enter the lens barrel 20 from the end 20A. The reflected light of the measurement light Lb that enters the lens barrel 20 travels in the direction opposite to the Z direction, passes through the quarter-wave plate 204, the first lens group 203a, the optical splitter 202, the second lens group 205a, and the polarizer 206, and enters the splitter 207. The reflected light of the measurement light Lb that enters the splitter 207 travels in the +X direction and enters the second imaging device 40. The second image capturing device 40 captures the reflected light of the incident measurement light Lb as an image of the measurement light Lb projected onto the test object A. The optical axis AX2 of the second image capturing device 40 is coaxial with the optical axis AX1 in the section from the placement surface ST (test object A) to the optical splitter 207, and is aligned along a direction (in this example, the -Y direction) perpendicular to the optical axis AX1 (Z direction) of the first image capturing device 30 in the section from the optical splitter 207 to the second image capturing device 40. In this way, in this embodiment, the optical axis AX2 in a partial section of the optical system of the second image capturing device 40 and the optical axis AX1 of the optical system of the first image capturing device 30 are parallel to each other.

[0086] (Other Configuration Examples of the Illumination Device) As described above, the illumination device 50 according to this embodiment is formed with the slit portion SL and is disposed so that the optical path of the measurement light Lb passes through the slit portion SL. However, the illumination device 50 is not limited to this, and may have any structure that is disposed at a position different from the optical path of the measurement light Lb, as described above. Other configuration examples of the illumination device 50 will be described below.

[0087] FIG. 6 is a schematic diagram showing another example of an illumination device. As shown in FIG. 6 , in this example, the illumination device 50 is also positioned between the first image capture device 30 and the measurement light emitting device 60 in the radial direction. Meanwhile, in this example, the illumination device 50 is disposed between the optical path of the measurement light Lb and the optical axis AX1 of the first image capture device 30. That is, the illumination device 50 is disposed at a position that does not overlap with the optical path of the measurement light Lb throughout the entire section between the measurement light emitting device 60 and the test object A (installation area ST). For example, the illumination device 50 is disposed above the optical path of the measurement light Lb (in the direction opposite to the Z direction). In this example, by disposing the measurement light emitting device 60 radially outward from the configuration of FIG. 3 , the illumination device 50 can be disposed at a position that does not overlap with the optical path of the measurement light Lb. In this case, the illumination device 50 does not need to have a slit portion SL.

[0088] FIG. 7 is a schematic diagram showing another example of an illumination device. As shown in FIG. 7 , in this example, the illumination device 50 is located radially outward of the optical axis AX1 of the first imaging device 30 and radially outward of the optical path of the measurement light Lb. That is, in this example, the illumination device 50 is also located at a position that does not overlap with the optical path of the measurement light Lb throughout the entire section between the measurement light emitting device 60 and the test object A (installation area ST). In this example, by locating the illumination device 50 radially outward of the measurement light emitting device 60, the illumination device 50 can be located at a position that does not overlap with the optical path of the measurement light Lb. In this case, the illumination device 50 does not need to have a slit portion SL.

[0089] (Mounting Member) Furthermore, a mounting member having a function other than that of the lighting device 50 may be disposed at the position of the lighting device 50 described above. In other words, in this case, the mounting member is attached to the outside of the first imaging device 30, and the optical path of the measurement light Lb is disposed at a position different from that of the mounting member. The mounting member here may be any member having a function other than that of the lighting device 50, and examples thereof include at least one of a contact sensor and a non-contact sensor. Note that when a mounting member is provided, the mounting member may be disposed instead of the lighting device 50, or both the lighting device 50 and the mounting member may be disposed.

[0090] (System configuration of shape measurement system) Next, the system configuration of the shape measurement system 1 and the function of the arithmetic device 19 will be described. Fig. 8 is a block diagram of the shape system according to this embodiment, and Fig. 9 is a functional block diagram of the arithmetic device according to this embodiment. As shown in Fig. 8, the shape measurement system 1 according to this embodiment has the imaging unit 11, the support device 12, the operation device 13, the display device 14, the drive device 15, the memory 17, the communication device 18, the arithmetic device 19, and the measurement light irradiation device 60, as described above.

[0091] (Calculation device) The calculation device 19 calculates the shape of the test object A based on the image of the measurement light Lb projected onto the test object A, which is imaged by the second imaging device 40. That is, the calculation device 19 calculates the shape of the test object A based on the measurement light Lb emitted from the measurement light irradiation device 60 and not blocked by the illumination device 50. In this embodiment, since an image of the measurement light Lb having a light and dark pattern is projected onto the test object A, the calculation device 19 calculates the three-dimensional shape of the test object A by a phase shift method using the image of the measurement light Lb imaged by the second imaging device 40.

[0092] The arithmetic device 19 includes at least one processor (i.e., one processor or multiple processors) as hardware. The processor may include, for example, a processor conforming to a von Neumann computer architecture. The processor conforming to the von Neumann computer architecture may include at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor may include, for example, a processor conforming to a non-von Neumann computer architecture. The processor conforming to the non-von Neumann computer architecture may include at least one of an FPGA (Field Programmable Gate Array) and an ASIC (Application Specific Circuit). The processor may also be referred to as a group of circuits.

[0093] The arithmetic unit 19 reads a computer program 171 including at least one of computer program code and computer program instructions. For example, the arithmetic unit 19 may read the computer program 171 stored in the memory 17. For example, the arithmetic unit 19 may read the computer program 171 stored in a computer-readable, non-transitory recording medium using a recording medium reading device (not shown) included in the shape measurement system 1. The computer program 171 read from the recording medium may be stored in the memory 17. The arithmetic unit 19 may acquire (i.e., download or read) the computer program 171 from a device (not shown) located outside the shape measurement system 1 via the communication device 18 (or another communication device). The downloaded computer program 171 may be stored in the memory 17.

[0094] The arithmetic device 19 executes the loaded computer program 171. As a result, logical functional blocks for executing the processing to be performed by the shape measurement system 1 (for example, the processing to calculate the three-dimensional shape of the test object A described below) are realized within the arithmetic device 19. In other words, the arithmetic device 19, together with the memory 17 etc. in which the computer program 171 is recorded (in other words, together with the memory 17 and the computer program 171 recorded in the memory 17 etc.), can function as a controller or computer for realizing the logical functional blocks for executing the processing to be performed by the shape measurement system 1. That is, the shape measurement system 1 is configured to perform the processing (for example, the processing to calculate the three-dimensional shape of the test object A described below) provided by the memory 17 etc. together with at least one processor provided in the arithmetic device 31.

[0095] The memory 17 includes at least one memory capable of storing desired data. In other words, the memory 17 includes at least one memory containing desired data. For example, the memory 17 may store a computer program 171 executed by the arithmetic device 19. In this case, the memory 17 may be used as the above-mentioned recording medium for recording the computer program 171 executed by the arithmetic device 19. The memory 17 may temporarily store data used by the arithmetic device 19 when the arithmetic device 19 is executing the computer program 171. The memory 17 may also store data to be stored long-term by the shape measurement system 1. The memory 17 may include at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a disk array device. In other words, the memory 17 may include a non-temporary recording medium.

[0096] 9 , the arithmetic device 19 includes a drive control unit 191, an irradiation control unit 192, an imaging control unit 193, a synthesis unit 194, and an estimation unit 195. The arithmetic device 19 implements the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 by reading and executing a computer program 171 (software) from the memory 17. The drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 perform their respective processes. That is, the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the synthesis unit 194, and the estimation unit 195 are logical functional blocks for executing processes to be performed by the shape measurement system 1 (e.g., processes for calculating the three-dimensional shape of the test object A, which will be described later). The arithmetic device 19 may execute these processes using a single CPU, or may be provided with multiple CPUs and execute the processes using the multiple CPUs. Furthermore, at least some of the drive control unit 191, the irradiation control unit 192, the imaging control unit 193, the composition unit 194, and the estimation unit 195 may be realized by hardware. That is, when the drive control unit 191 is realized by hardware, the drive control unit 191 can be called a drive control device, when the irradiation control unit 192 is realized by hardware, the irradiation control unit 192 can be called an irradiation control device, when the imaging control unit 193 is realized by hardware, the imaging control unit 193 can be called an imaging control device, when the composition unit 194 is realized by hardware, the composition unit 194 can be called a composition device, and when the estimation unit 195 is realized by hardware, the estimation unit 195 can be called an estimation device.

[0097] The drive control unit 191 controls the drive device 15 to move the imaging unit 11 relative to the test object A (mounting surface ST) using the drive device 15. The irradiation control unit 192 controls the illumination device 50 to cause the illumination device 50 to emit illumination light La. The irradiation control unit 192 controls the epi-illumination device 70 to cause the epi-illumination device 70 to emit illumination light La. The irradiation control unit 192 controls the measurement light irradiation device 60 to cause the measurement light irradiation device 60 to emit measurement light Lb. The imaging control unit 193 controls the second imaging device 40 to cause the second imaging device 40 to capture an image of the measurement light Lb projected onto the irradiation area on the test object A by the measurement light irradiation device 60. The imaging control unit 193 controls the first imaging device 30 to cause the first imaging device 30 to capture an image of the test object A. The synthesis unit 194 calculates the shape (two-dimensional shape) of the test object A based on the image captured by the first imaging device 30. The estimation unit 195 calculates the shape (three-dimensional shape) of the test object A based on the image of the measurement light Lb projected onto the irradiation area captured by the second imaging device 40.

[0098] As described above, in this embodiment, the arithmetic device 19 has both the function of controlling each part of the shape measurement system 1 and the function of calculating the shape of the test object A. However, without being limited thereto, the arithmetic device 19 may have the function of calculating the shape of the test object A without having the function of controlling each part of the shape measurement system 1. In other words, the shape measurement system 1 may include a device having the function of controlling each part of the shape measurement system 1 and the arithmetic device 19 having the function of calculating the shape of the test object A.

[0099] (Image Capture Processing) Next, an image capture processing of the shape measurement system 1 performed by the arithmetic device 19 will be described. In this embodiment, the arithmetic device 19 causes the drive control unit 191 to move the imaging unit 11 relative to the test object A (mounting surface ST) in the Y direction, while the imaging control unit 193 causes at least one of the first imaging device 30 and the second imaging device 40 to capture an image. Specifically, while the imaging unit 11 is moving relative to the test object A (mounting surface ST) in the Y direction, the arithmetic device 19 causes the first imaging device 30 to capture an image of the test object A (an image of the illumination light La projected onto the test object A) in a state where at least one of the illumination device 50 and the epi-illumination device 70 is irradiated with the illumination light La. Thereafter, while the imaging unit 11 is moving relative to the test object A (mounting surface ST) in the Y direction, the arithmetic device 19 stops the illumination device 50 and the epi-illumination device 70 from emitting the illumination light La and causes the measurement light irradiating device 60 to irradiate the measurement light Lb, and causes the second imaging device 40 to capture an image of the measurement light Lb projected onto the irradiated area of ​​the test object A. The arithmetic device 19 repeats this process, causing the first imaging device 30 and the second imaging device 40 to capture an image of the area to be measured (for example, the entire area) of the test object A.

[0100] Fig. 10 is a flowchart illustrating the control processing of the shape measurement system. The flow shown in Fig. 10 is executed by the arithmetic device 19. More specifically, in this embodiment, the flow shown in Fig. 11 is executed by the arithmetic device 19 reading and executing a computer program 171 (software), in other words, by logical functional blocks such as a drive control unit 191, an irradiation control unit 192, an imaging control unit 193, a synthesis unit 194, and an estimation unit 195. As described above, at least some of these functional blocks may be executed by hardware, and therefore the processing of Fig. 11 may be executed by hardware or by a combination of hardware and the computer program 171 (software).

[0101] 10, the drive control unit 191 controls the drive device 15 to start control to move the imaging unit 11 relative to the test object A (mounting surface ST) in the Y direction (+Y direction in this example) (step S10). The drive control unit 191 supplies a control signal to the drive device 15 to move the imaging unit 11 in the Y direction at a predetermined speed.

[0102] Next, it is determined whether the imaging unit 11 is located at an imaging position for the test object A (step S11). For example, the imaging control unit 193 calculates the position of the imaging unit 11 on the test object A based on the position information of the imaging unit 11 from the position measurement unit 122 and the placement position of the test object A on the placement surface ST, thereby determining whether the imaging unit 11 is located at a position where imaging is scheduled to begin. The calculated position is compared with the position stored in the memory 17, and it is determined whether the imaging unit 11 is located at an imaging position for the test object A.

[0103] Next, the irradiation control unit 192 causes at least one of the illumination device 50 and the epi-illumination device 70 to irradiate the test object A (mounting surface ST) with illumination light La (step S12).

[0104] Next, the imaging control unit 193 determines whether the imaging time has arrived (step S14). For example, the imaging control unit 193 determines that the imaging time has arrived when a predetermined time has elapsed since the imaging unit 11 started moving in the Y direction or since the previous imaging timing. If the imaging time has not arrived (step S14; No), the imaging control unit 193 returns to step S14 and waits until the imaging time arrives.

[0105] When the imaging time arrives (Step S14; Yes), the imaging control unit 193 controls the first imaging device 30 to capture an image of the imaging area of ​​the first imaging device 30 while the imaging unit 11 is moving (Step S16). The imaging control unit 193 supplies a control signal to the first imaging device 30, causing the first imaging device 30 to generate an image. The imaging control unit 193 acquires the image (image of the test object A) captured by the first imaging device 30 from the first imaging device 30, and stores it in the memory 17 in association with the imaging time.

[0106] Furthermore, the imaging control unit 193 acquires information indicating the position of the imaging unit 11 at the time of imaging from the position measurement unit 122. The imaging control unit 193 stores the information of the imaging unit 11 in association with the captured image in the memory 17. After the captured image is generated (after imaging by the first imaging device 30 is completed), the illumination control unit 192 controls at least one of the illumination device 50 and the epi-illumination device 70 to stop the irradiation of the illumination light La from the illumination device 50 and the epi-illumination device 70.

[0107] Next, the irradiation control unit 192 controls the measurement light irradiation device 60 to irradiate the measurement light Lb (step S18). That is, the irradiation control unit 192 controls the measurement light irradiation device 60 to irradiate the measurement light Lb during the time when the imaging unit 11 is moving and the illumination device 50 and the epi-illumination device 70 are not irradiating the illumination light La. In this embodiment, the irradiation control unit 192 controls the first measurement light irradiation device 60a and the second measurement light irradiation device 60b to simultaneously irradiate the measurement light Lb from the first measurement light irradiation device 60a and the second measurement light irradiation device 60b. As a result, images of the measurement light Lb (pattern light) having light and dark patterns from the first measurement light irradiation device 60a and the second measurement light irradiation device 60b are simultaneously projected onto different positions on the test object A.

[0108] Next, the imaging control unit 193 determines whether the 3D imaging time has arrived (step S20). For example, the imaging control unit 193 determines that the 3D imaging time has arrived when a predetermined time has elapsed since the imaging time arrived in the most recent step S14.

[0109] If the three-dimensional imaging time has not arrived (step S20; No), the imaging control unit 193 returns to step S20 and waits until the three-dimensional imaging time arrives.

[0110] When the three-dimensional imaging time arrives (Step S20; Yes), the imaging control unit 193 controls the second imaging device 40 to capture an image of the imaging area of ​​the second imaging device 40 while the imaging unit 11 is moving (Step S22). In this embodiment, the imaging control unit 193 controls the second imaging device 40 to capture an image of the imaging area of ​​the second imaging device 40 multiple times while the imaging unit 11 is moving. The imaging control unit 193 supplies a control signal to the second imaging device 40, causing the second imaging device 40 to generate a pattern image (an image obtained by capturing an image of the measurement light Lb projected onto the test object A). The imaging control unit 193 acquires multiple pattern images from the second imaging device 40 and stores them in the memory 17 in association with the imaging times. The imaging control unit 193 also stores the position of the imaging unit 11 at the imaging time of each pattern image in association with the pattern image in the memory 17.

[0111] Generally, in estimating a three-dimensional structure using the phase shift method, it is necessary to sequentially irradiate a test object with multiple pattern lights having light-dark patterns with mutually different phase shifts and acquire images for each light-dark pattern. Shape measurement using the phase shift method is described, for example, in Japanese Patent Application Laid-Open Nos. 2011-21970, 2012-93235, 2014-35198, 2008-170280, and 2000-9444. However, in this embodiment, the second image capture device 40 captures images multiple times while moving together with the measurement light irradiator 60. Therefore, even without changing the light-dark pattern of the pattern light irradiated by the measurement light irradiator 60, multiple pattern images in which light having mutually different phases is irradiated at specific positions on the test object A can be generated by varying the image capture timing. The three-dimensional shape of the test object A can be estimated based on the multiple pattern images generated in this manner. In the above-described embodiment, a light and dark pattern is created using a diffraction grating, but the method for creating the light and dark pattern is not limited to this. A projector that projects a light and dark pattern may also be used. When a projector that projects a light and dark pattern is used, for example, multiple projectors may be used in the first measurement light irradiation device 60a, or multiple patterns may be projected using one projector.

[0112] Next, the drive control unit 191 determines whether the imaging unit 11 has reached an end in the Y direction (step S24). For example, the drive control unit 191 determines that the imaging unit 11 has reached an end in the Y direction when the time required for the imaging unit 11 to reach from one end to the other end in the Y direction has elapsed. The drive control unit 191 may determine whether the imaging unit 11 has reached an end in the Y direction by acquiring information indicating the position of the imaging unit 11 from the position measurement unit 122.

[0113] If the imaging unit 11 has not reached the end in the Y direction (step S24; No), the calculation device 19 stops the imaging by the second imaging device 40 and the irradiation by the measurement light irradiation device 60, returns to step S12, and continues control.

[0114] When the imaging unit 11 reaches the end in the Y direction (step S24; Yes), the calculation device 19 stops the imaging by the second imaging device 40 and the irradiation by the measurement light irradiation device 60, and controls the drive device 15 to stop the imaging unit 11 (step S26). The drive control unit 191 supplies a control signal for stopping the imaging unit 11 to the drive device 15.

[0115] Next, the drive control unit 191 determines whether the imaging unit 11 has reached the end in the X direction and all imaging has been completed (step S28). If the imaging unit 11 has not reached the end in the X direction (step S28; No), the drive control unit 191 moves the imaging unit 11 in the X direction (step S30) and returns to step S10 to continue the process. The drive control unit 191 supplies a control signal to the drive device 15 to move the imaging unit 11 in the X direction. Note that in this case, since the imaging unit 11 has reached the end in the +Y direction, the drive control unit 191 may move the imaging unit 11 in the -Y direction in step S12. Alternatively, the drive control unit 191 may move the imaging unit 11 in the X direction and to the end in the -Y direction in step S30 and continue the process of step S10.

[0116] If the imaging unit 11 has reached the end in the X direction (step S28; Yes), the calculation device 19 ends the imaging process.

[0117] In this embodiment, the time of imaging can be based on the time of imaging at a predetermined position. For example, the imaging time is managed using the time of imaging the start position of imaging the test object A as the reference time.

[0118] (Composite Image Generation Process) Next, a process of generating a composite image by the synthesis unit 194 based on multiple captured images captured by the first imaging device 30 will be described. The synthesis unit 194 acquires multiple captured images captured by the first imaging device 30 stored in the memory 17 and information (position information) indicating the position of the imaging unit 11 at the time of imaging for each captured image. The synthesis unit 194 synthesizes the multiple captured images based on the multiple captured images and the position information to generate a composite image. The composite image is a two-dimensional image of a region of the test object A that is imaged while moving by the first imaging device 30.

[0119] FIG. 11 is a flowchart illustrating the composite image generation process. The flow shown in FIG. 11 (processing for generating a composite image) is executed by the arithmetic unit 19. More specifically, in this embodiment, the flow shown in FIG. 11 is executed by the arithmetic unit 19 reading and executing a computer program 171 (software), in other words, by the synthesis unit 194, which is a logical functional block. As described above, at least a portion of the functional block may be executed by hardware. Therefore, the process shown in FIG. 11 may be executed by hardware or by a combination of hardware and the computer program 171 (software). Furthermore, the flow shown in FIG. 11 may be executed by a processor dedicated to image processing, such as an ASIC. The process for generating a composite image is executed in parallel with the image capture process each time a captured image is stored in the memory 17 in step S16 of the image capture process. However, this is not limited thereto, and the process for generating a composite image may be executed after the image capture process is completed.

[0120] The composition unit 194 acquires the captured image stored in the memory 17 in step S16 of the imaging process (step S40). The composition unit 194 may correct the acquired captured image based on the environmental temperature of the imaging unit 11, for example.

[0121] Next, the composition unit 194 determines whether or not there are captured images to be linked to the composite image generated in the most recent composite image generation process (step S42). If the captured image acquired in the most recent step S40 is an image captured at the third or subsequent imaging time after the imaging unit 11 started moving in the Y direction, the composite image generated in the most recent step S44 (an image generated by linking captured images) and the composite image generated in the immediately preceding step S44 exist. The composite image generated in the immediately preceding step S44 becomes the image to be linked to the composite image generated in the most recent step S44. Therefore, if the captured image acquired in the most recent step S40 is an image captured at the third or subsequent imaging time after the imaging unit 11 started moving in the Y direction, the composition unit 194 determines that there are captured images to be linked.

[0122] If there are no images to be linked (step S42; No), the combining unit 194 returns to step S40 and continues the process.

[0123] If there are images to be linked (step S42; Yes), the compositing unit 194 stitches the composite image generated in the most recent step S44 to the images to be linked (step S44). The compositing unit 194 stitches the composite images based on the positional relationship of the composite images.

[0124] Next, the composition unit 194 determines whether or not all captured images to be generated in the imaging process have been acquired (step S46). For example, the composition unit 194 determines that all captured images to be generated in the imaging process have been acquired when a predetermined number of captured images have been acquired.

[0125] If all the captured images have not been acquired (step S46; No), the combining unit 194 returns to step S40 and continues the process.

[0126] When all captured images have been acquired (Step S46; Yes), the composition unit 194 outputs an image of the test object A in which all the composite images have been connected (Step S48). For example, the composition unit 194 outputs the image of the test object by transmitting it to another device via the communication device 18. The composition unit 194 may also output the image of the test object by displaying it on the display device 14. The composition unit 194 may calculate the two-dimensional shape of the test object A based on the image of the test object A in which all the composite images have been connected. This completes the composition process.

[0127] (Calculation Process of Shape of Test Object) Next, the calculation process of the shape (three-dimensional shape) of the test object A by the estimation unit 195 based on the plurality of pattern images captured by the second imaging device 40 will be described. FIG. 12 is a flowchart illustrating the calculation process of the shape of the test object A. The flow shown in FIG. 12 (calculation process of the shape of the test object A) is executed by the arithmetic unit 19. More specifically, in this embodiment, the flow shown in FIG. 12 is executed by the arithmetic unit 19 reading and executing the computer program 171 (software), in other words, by the estimation unit 195, which is a logical functional block. As described above, at least a portion of the functional block may be executed by hardware. Therefore, the process of FIG. 12 may be executed by hardware or by a combination of hardware and the computer program 171 (software). In this embodiment, the calculation process of the shape of the test object A is executed in parallel with the imaging process every time a pattern image is stored in the memory 17 in step S22 of the imaging process. However, this is not limited thereto, and the calculation process of the shape of the test object A may be executed after the imaging process is completed.

[0128] 12 , the estimation unit 195 acquires the plurality of pattern images stored in the memory 17 in step S22 of the imaging process (step S50). The estimation unit 195 may correct the acquired pattern images based on, for example, the environmental temperature of the imaging unit 11.

[0129] Next, the estimation unit 195 calculates the positional relationship between the imaging regions of the multiple pattern images (step S52). The estimation unit 195 acquires the position of the imaging unit 11 at the time of capturing each pattern image from the memory 17. Note that the position of the imaging unit 11 may be corrected based on, for example, the environmental temperature of the imaging unit 11. The estimation unit 195 calculates the positional relationship between the imaging regions of the multiple pattern images based on the acquired position of the imaging unit 11.

[0130] Next, the estimation unit 195 estimates the shape of the test object A based on the calculated positional relationship and the luminance values ​​of multiple pixels included in each of the multiple pattern captured images (step S54). For example, the estimation unit 195 estimates the three-dimensional shape of the test object A using a phase shift method. In this case, the estimation unit 195 identifies an area in each pattern image where the captured areas of all pattern images overlap based on the calculated positional relationship. The estimation unit 195 acquires the luminance values ​​of each of multiple pixels included in the identified area from each pattern image. The estimation unit 195 calculates the height of the test object A at the position of each pixel based on the combination of the acquired luminance values, thereby estimating the three-dimensional shape of the test object. The relationship between the combination of luminance values ​​and the height of the test object A may be stored in advance in the memory 17 or may be calculated according to a predetermined formula.

[0131] The estimation unit 195 outputs information about the calculated shape of the test object A (step S56). For example, the estimation unit 195 outputs the information of the estimation unit 195 by transmitting it to another device via the communication device 18. The synthesis unit 194 may output the information of the estimation unit 195 by displaying it on the display device 14. This completes the estimation process.

[0132] 13 is a schematic timing chart for explaining the relationship between the imaging time at which a captured image is generated and the three-dimensional imaging time at which a pattern image is generated. As shown in FIG. 13 , when the imaging time arrives, the first imaging device 30 images the test object A and generates a captured image during a period T1. The generated captured image is stored in the memory 17 during a period T2. In parallel, a synthesis process is performed on the stored captured image. While the captured image is being stored in the memory 17, the three-dimensional imaging time arrives, and during a period T3, the second imaging device 40 images the test object multiple times and generates multiple pattern images. The generated multiple pattern images are stored in the memory 17 during a period T4. In parallel, an estimation process is performed on the stored multiple pattern images. Once the multiple pattern images are stored in the memory 17, the imaging time arrives again, and during a period T5, the first imaging device 30 images the test object and generates a captured image.

[0133] In this way, the second imaging device 40 captures an image of the test object A and generates a pattern image while the captured images generated by the first imaging device 30 are being stored in the memory 17 or while a synthesis process is being performed on the captured images. Generally, the time required to generate a captured image is shorter than the time required for the imaging unit 11 to move, so there is a period of time during which no imaging is performed. The shape measurement system 1 performs three-dimensional measurement during such imaging times, thereby enabling efficient estimation of the three-dimensional structure of the test object.

[0134] As described above, the shape measurement system 1 controls the measurement light irradiation device 60 to irradiate the measurement light Lb while the imaging unit 11 is moving and during times when the illumination light La is not being irradiated, and controls the second imaging device 40 to capture an image while the measurement light Lb is being irradiated, thereby acquiring multiple pattern images for each region of the test object A, and estimating the three-dimensional shape of the test object A based on the multiple pattern images for each region. This enables the shape measurement system 1 to estimate the three-dimensional structure of the test object in a short time.

[0135] The shape measurement system 1 may be provided with a safety cover. FIG. 14 is a diagram showing an example of a shape measurement system. For example, if the laser class used in the shape measurement system 1 is high, a safety cover 150 is provided. The safety cover 150 is a cover that covers the shape measurement system 1 (for example, houses the shape measurement system 1 inside). In the example of FIG. 14 , the safety cover 150 covers all devices in the shape measurement system 1 except the operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19. The safety cover 150 has a window 151 through which the inside of the shape measurement system 1 can be seen. The operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19 are attached to the outer surface of the safety cover 150. However, among the operation device 13, the display device 14, the memory 17, the communication device 18, and the arithmetic unit 19, only the operation device 13 and the display device 14 may be provided on the outer surface of the safety cover 150, and the other devices may be housed within the safety cover 150. The safety cover 150 is provided with an interlock 153 that opens and closes only when a laser beam is not being emitted. That is, the interlock 153 locks the safety cover 150 so that it cannot be opened (exposing the shape measurement system 1 inside) while a laser beam is being emitted. The interlock 153 also unlocks the safety cover 150 while a laser beam is not being emitted. The safety cover 150 may also be provided with a transport window 152 for transporting the test object A from the outside into the safety cover 150. The transport window 152 may be provided with an opening / closing mechanism that switches between opening and closing the transport window 152, or the transport window 152 may be opened when the test object A is being transported and closed after transport.

[0136] It should be noted that a safety cover need not be provided in the shape measurement system 1. Fig. 15 is a diagram showing an example of a shape measurement system. For example, if the laser class used in the shape measurement system 1 is low and a safety cover is not necessary, a safety cover may not be provided. In this case, as shown in Fig. 15, the shape measurement system 1 may be provided with an operation device 13, a display device 14, a memory 17, a communication device 18, and a calculation device 19.

[0137] (System Example) Although the shape measurement system 1 in the above embodiment performs processing using a single device, multiple devices may be combined. FIG. 16 is a schematic diagram showing the configuration of a system including a shape measurement system. Next, a manufacturing system 300 including the shape measurement system 1 will be described using FIG. 16. The manufacturing system 300 includes multiple shape measurement systems 1 (three in FIG. 16 ) and a program creation device 302. The shape measurement systems 1 and the program creation device 302 are connected via a wired or wireless communication line. The program creation device 302 creates various settings and programs to be created by the arithmetic device 19 of the shape measurement system 1. The program creation device 302 outputs the created programs and the shape measurement system 1. The shape measurement system 1 acquires area and range information and shape measurement programs from the program creation device 302 and performs processing using the acquired data and programs. The manufacturing system 300 performs shape measurement using the shape measurement system 1 using the data and programs created by the program creation device 302, thereby making effective use of the created data and programs.

[0138] Next, a manufacturing system including the above-described shape measurement system 1 will be described with reference to Fig. 17. Fig. 17 is a block diagram of the manufacturing system. A manufacturing system 200 of this embodiment includes the shape measurement system 1 as described in the above embodiment, a design device 202, a manufacturing device 204, and a repair device 206.

[0139] The design device 202 creates design information relating to the shape and composition of the test object A, and transmits the created design information to the manufacturing device 204 .

[0140] The manufacturing device 204 creates a test object A based on the design information input from the design device 202. The shape measurement system 1 measures the shape of the created test object A and determines whether the created test object A is a non-defective product. If the test object A is not a non-defective product, the shape measurement system 1 determines whether the test object A can be repaired. If the test object A can be repaired, the shape measurement system 1 calculates the defective portion and the repair content based on the measurement results of the shape of the test object A, and transmits information indicating the defective portion and the repair content to the repair device 206.

[0141] The repair device 206 repairs the defective portion of the test object A based on the information indicating the defective portion and the information indicating the repair content received from the shape measurement system 1.

[0142] 18 is a flowchart showing the flow of processing by the manufacturing system. In the manufacturing system 200, first, the design device 202 creates design information for the test object A (step S101). Next, the manufacturing device 204 creates the test object A based on the design information (step S102). Next, the shape measurement system 1 inspects (measures the shape of) the created test object A (step S103). Next, the shape measurement system 1 determines whether the test object A is a non-defective product (step S104). For example, if the shape of the test object A is within a predetermined design value range, the shape measurement system 1 determines that the test object A is a non-defective product, and if the shape is outside the design value range, the shape measurement system 1 determines that the test object A is a non-defective product.

[0143] If the shape measurement system 1 determines that the created test object A is a non-defective product (step S105; Yes), the process ends. On the other hand, if the shape measurement system 1 determines that the created test object A is not a non-defective product (step S105; No), the shape measurement system 1 determines whether the created test object A can be repaired (step S106).

[0144] If the manufacturing system 200 determines that the created specimen A can be repaired (Yes in step S106), the repair device 206 repairs the specimen A (step S107), and the process returns to step S103. If the manufacturing system 200 determines that the created specimen A cannot be repaired (No in step S106), the process ends and the defective product is collected. With this, the manufacturing system 200 ends the process of the flowchart shown in FIG. 18.

[0145] The manufacturing system 200 of this embodiment can determine whether the manufactured test object A is a non-defective product because the shape measurement system 1 of the above embodiment can inspect the shape of the test object A with high accuracy. Furthermore, the manufacturing system 200 can repair the test object A if it is not a non-defective product.

[0146] The repair process performed by the repair device 206 in this embodiment may be replaced with a process in which the manufacturing device 204 re-executes the manufacturing process. In this case, if the shape measurement system 1 determines that the product can be repaired, the manufacturing device 204 re-executes the manufacturing process.

[0147] (Effects) As described above, the shape measurement system 1 according to the present disclosure includes a first imaging device 30 having an imaging optical system that images a test object A, an illumination device 50 that is arranged outside the first imaging device 30 and that irradiates the test object A with illumination light La when imaging with the first imaging device 30, and a measurement light irradiator 60 that irradiates measurement light Pb that measures the shape of the test object A. The optical path of the measurement light Lb that is arranged outside the imaging optical system of the first imaging device is arranged at a position different from that of the illumination device 50. According to the present disclosure, by arranging the optical path of the measurement light Lb at a position different from that of the illumination device 50, it is possible to prevent the measurement light Lb from being blocked by the illumination device 50, so that the illumination light La from the illumination device 50 and the measurement light Lb from the measurement light irradiator 60 can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0148] The illumination device 50 has a first illumination portion 52 a and a second illumination portion 52 b, and the optical path of the measurement light Lb is arranged between the first illumination portion 52 a and the second illumination portion 52 b. According to the present disclosure, the illumination device 50 can be arranged close to the test object A while preventing the measurement light Lb from being blocked, so that the illumination light La and the measurement light Lb can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0149] The optical path of the measurement light Lb is disposed in a slit portion SL formed between the first illumination portion 52 a and the second illumination portion 52 b. According to the present disclosure, the illumination device 50 can be disposed in a position close to the test object A while preventing the measurement light Lb from being blocked, so that the illumination light La and the measurement light Lb can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0150] The shape measurement system 1 includes a drive device 15 that drives the illumination device 50 to approach the test object A along the optical axis AX direction (Z direction) of the first imaging device 30, and the optical path of the measurement light Lb is positioned in the slit portion SL even when the illumination device 50 is moved closer to the test object A by the drive device 15. According to the present disclosure, the illumination device 50 can be positioned close to the test object A while preventing the measurement light Lb from being blocked, thereby enabling the shape of the test object A to be measured appropriately.

[0151] The size of the slit portion SL is determined based on the irradiation range of the measurement light Lb. According to the present disclosure, blocking of the measurement light Lb can be suppressed, and therefore the shape of the test object A can be measured appropriately.

[0152] The illumination device 50 is disposed between the optical path of the measurement light Lb and the optical axis AX1 of the first imaging device 30. According to the present disclosure, blocking of the measurement light Lb can be suppressed, and therefore the illumination light La and the measurement light Lb can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0153] The illumination device 50 is disposed outside the optical path of the measurement light Lb and the optical axis AX1 of the first imaging device 30. According to the present disclosure, blocking of the measurement light Lb can be suppressed, so that the illumination light La and the measurement light Lb can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0154] The illumination devices 50 are arranged in the circumferential direction. By using the illumination devices 50 arranged in the circumferential direction, the measurement light Lb can be appropriately irradiated onto the test object A from the outside, so that the shape of the test object A can be appropriately measured.

[0155] The illumination device 50 is annular. By using the annular illumination device 50, the measurement light Lb can be appropriately irradiated onto the test object A from the outside, and therefore the shape of the test object A can be appropriately measured.

[0156] The shape measurement system 1 further includes a first imaging device 30 that images the test object A irradiated with illumination light La from the illumination device 50, and a second imaging device 40 that images measurement light Lb irradiated onto the test object A from the measurement light irradiating device 60. According to the present disclosure, the test object A can be properly imaged with the illumination light La, and an image of the measurement light Lb can be properly imaged, so that the shape of the test object A can be properly measured.

[0157] The measurement light Lb is pattern light, and the shape measurement system 1 measures the shape of the test object A by capturing an image of the pattern light projected onto the test object A with the second imaging device 40. According to the present disclosure, the two-dimensional shape of the test object A can be appropriately measured from the image captured by the first imaging device 30, and the three-dimensional shape of the test object A can be appropriately measured from the image captured by the second imaging device 40.

[0158] The shape measurement system 1 further includes an epi-illumination device 70 that irradiates light (illumination light La) in a direction along the optical axis AX1 of the first imaging device 30, and the first imaging device 30 captures an image of the test object A illuminated by the light from the epi-illumination device 70. According to the present disclosure, since the test object A is imaged using the light from the epi-illumination device 70, the test object A can be appropriately imaged and the shape of the test object A can be appropriately measured.

[0159] The optical axis AX2 in a portion of the optical system of the second imaging device 40 is parallel to the optical axis AX1 of the optical system of the first imaging device 30. According to the present disclosure, by making the optical axes parallel to each other over at least a portion of the optical system, the size of the imaging unit 11 (the lens barrel 20 in this embodiment) can be reduced.

[0160] The shape measurement system 1 performs imaging using at least one of the first imaging device 30 and the second imaging device 40 while moving the imaging unit 11, which includes the first imaging device 30, the second imaging device 40, the illumination device 50, and the measurement light irradiation device 60, and the test object A relatively in a first direction (Y direction). According to the present disclosure, the shape of the test object A can be appropriately measured.

[0161] The first imaging device 30 captures an image during a period in which the driving device 15 relatively moves the imaging unit 11 in the first direction (Y direction), and the second imaging device 40 captures an image during a period in which the driving device 15 relatively moves the imaging unit 11 in the first direction but the first imaging device 30 is not capturing an image. According to the present disclosure, the shape of the test object A can be appropriately measured.

[0162] The second imaging device 40 is disposed in a direction intersecting the first direction (Y direction) with respect to the optical axis AX1 of the first imaging device 30. According to the present disclosure, the size of the imaging unit 11 (the lens barrel 20 in this embodiment) can be reduced.

[0163] A shape measurement system 1 according to the present disclosure includes a first imaging device 30 having an imaging optical system that images a test object A, an illumination device 50 disposed outside the first imaging device 30 that irradiates the test object A with illumination light La when imaging by the first imaging device 30, and a measurement light irradiator 60 that irradiates measurement light Pb that measures the shape of the test object A. The shape measurement system 1 measures the shape of the test object A based on measurement light Lb that is not blocked by the illumination device 50. According to the present disclosure, the illumination light La from the illumination device 50 and the measurement light Lb from the measurement light irradiator 60 can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0164] A shape measurement system 1 according to the present disclosure includes a first imaging device 30 having an imaging optical system that images a test object A, a measurement light irradiator 60 that irradiates measurement light Pb that measures the shape of the test object A, a first axis (Y axis 121Y) extending in a first direction (Y direction), and a base 123 attached to the first axis so as to be movable in the first direction, and a lens barrel 20 having the imaging optical system of the first imaging device 30 is attached to the base 123. According to the present disclosure, by attaching the base 123 to the lens barrel 20, the lens barrel 20 having the first imaging device 30 can be appropriately moved in the Y direction, and the shape of the test object A can be appropriately measured.

[0165] The optical system of the measurement light emitting device 60 is disposed in a second direction (X direction) of the lens barrel 20 that is perpendicular to the first direction, and the base 123 is disposed in a third direction of the lens barrel 20 between the first and second directions. That is, the shape measurement system 1 disclosed herein is configured such that the measurement light emitting device 60 is disposed in the second direction of the lens barrel 20, the base 123 is attached in the third direction of the lens barrel 20, and the lens barrel 20 is moved in the first direction. This allows the lens barrel 20 to be moved appropriately in the Y direction without increasing the overall size, thereby enabling appropriate measurement of the shape of the test object A. Furthermore, the lens barrel 20 can also be disposed on the opposite side of the first axis to the direction of movement of the lens barrel 20, allowing the lens barrel 20 to be moved during imaging.

[0166] The imaging element of the first imaging device 30 or the second imaging device 40 is disposed in the first direction (Y direction) of the lens barrel 20, and a base 123 is disposed between the optical system and the imaging element of the measurement light irradiator 60. That is, the shape measurement system 1 disclosed herein is configured such that the measurement light irradiator 60 is disposed in the second direction of the lens barrel 20, the first imaging device 30 or the second imaging device 40 is disposed in the first direction of the lens barrel 20, the base 123 is attached in a third direction between them, and the lens barrel 20 is moved in the first direction. The base 123 is attached and the lens barrel 20 is moved in the first direction. This allows the lens barrel 20 to be moved appropriately in the Y direction without increasing the overall size, thereby enabling the shape of the test object A to be measured appropriately. Furthermore, the lens barrel 20 can also be disposed on the opposite side of the first axis from the direction of movement of the lens barrel 20, allowing the lens barrel 20 to be moved during imaging.

[0167] A shape measurement system 1 according to the present disclosure includes a first imaging device 30 having an imaging optical system that images a test object A, a mounting member attached to the outside of the first imaging device 30, and a measurement light irradiator 60 that irradiates measurement light Pb that measures the shape of the test object A, and the optical path of measurement light Lb that is arranged outside the imaging optical system of the first imaging device 30 is arranged at a position different from that of the mounting member. According to the present disclosure, by arranging the optical path of measurement light Lb at a position different from that of the mounting member, it is possible to prevent the measurement light Lb from being blocked by the mounting member, so that the measurement light Lb from the measurement light irradiator 60 can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0168] The mounting member is a contact sensor and / or a non-contact sensor. According to the present disclosure, the measurement light Lb from the measurement light emitting device 60 can be appropriately irradiated onto the test object A, and the shape of the test object A can be appropriately measured.

[0169] The method for manufacturing a structure according to the present disclosure includes a design process for creating design information relating to the shape of a structure (test object A), a molding process for manufacturing the structure based on the design information, a measurement process for measuring the shape of the manufactured structure using a shape measurement system 1, and an inspection process for comparing the shape information obtained in the measurement process with the design information. According to the present disclosure, a structure can be manufactured appropriately.

[0170] The method for manufacturing a structure according to the present disclosure includes a repair step that is executed based on the comparison results of the inspection step and processes the structure. According to the present disclosure, the structure can be appropriately repaired.

[0171] A manufacturing system 200 according to the present disclosure includes a design device 202 that creates design information related to the shape of a structure (test object A), a molding device 204 that manufactures the structure based on the design device 202, a shape measurement system 1 that measures the shape of the manufactured structure, and a control device (arithmetic device 19) that compares design information with shape information related to the shape of the structure obtained by the shape measurement system 1. According to the present disclosure, a structure can be manufactured appropriately.

[0172] A shape measurement method according to the present disclosure includes imaging a test object A with a first imaging device 30 having an imaging optical system, irradiating the test object A with illumination light La using an illumination device 50 arranged outside the first imaging device 30 when imaging with the first imaging device 30, and irradiating the test object A with measurement light Lb for measuring the shape of the test object A using a measurement light irradiation device 60, wherein the optical path of the measurement light Lb arranged outside the imaging optical system is arranged at a position different from that of the illumination device 50. According to the present disclosure, it is possible to prevent the measurement light Lb from being blocked by the illumination device 50, and therefore the shape of the test object A can be appropriately measured.

[0173] A shape measurement method according to the present disclosure includes imaging a test object A with a first imaging device 30 having an imaging optical system, irradiating the test object A with illumination light La using an illumination device 50 disposed outside the first imaging device 30 when imaging is performed by the first imaging device 30, irradiating the test object A with measurement light Lb using a measurement light irradiation device 60 to measure the shape of the test object A, and measuring the shape of the test object A based on the measurement light Lb that is not blocked by the illumination device 50. According to the present disclosure, the shape of the test object A can be appropriately measured.

[0174] A shape measurement method according to the present disclosure includes capturing an image of a test object A using a first imaging device 30 having an imaging optical system, and irradiating the test object A with measurement light irradiation device 60 with measurement light Lb that measures the shape of the test object A, and a lens barrel 20 having the imaging optical system of the first imaging device 30 is attached to a base 123 that is attached to a first axis extending in a first direction so as to be movable in the first direction. According to the present disclosure, by attaching base 123 to lens barrel 20, it is possible to appropriately move lens barrel 20 having first imaging device 30 in the Y direction, and it is possible to appropriately measure the shape of test object A.

[0175] A shape measurement method according to the present disclosure includes capturing an image of a test object A using a first imaging device 30 having an imaging optical system, and irradiating the test object A with measurement light Lb that measures the shape of the test object A using a measurement light irradiator 60, wherein the optical path of the measurement light Lb, which is disposed outside the imaging optical system, is disposed at a position different from that of a mounting member attached to the outside of the first imaging device 30. According to the present disclosure, the shape of the test object A can be appropriately measured.

[0176] Although preferred embodiments of the present invention have been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to these examples. The shapes and combinations of the components shown in the above examples are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention. The components of the above-described embodiments can be combined as appropriate. In addition, some components may not be used. Furthermore, to the extent permitted by law, the disclosures of all published patent applications relating to the inspection apparatus, etc. cited in the above-described embodiments are incorporated by reference into this description. Other embodiments and operational techniques, etc., made by those skilled in the art based on the above-described embodiments are all included within the scope of the present embodiments.

[0177] REFERENCE SIGNS LIST 1 Shape measurement system 11 Imaging unit 19 Computing device 20 Lens barrel 30 First imaging device 40 Second imaging device 50 Illumination device 60 Measurement light irradiation device 70 Epi-illumination device A Test object La Illumination light Lb Measurement light

Claims

1. A shape measurement system comprising: a first imaging device having an imaging optical system for imaging a test object; an illumination device arranged outside the first imaging device for irradiating the test object with illumination light when imaging with the first imaging device; and a measurement light irradiation device for irradiating measurement light for measuring the shape of the test object, wherein the optical path of the measurement light arranged outside the imaging optical system is arranged at a position different from that of the illumination device.

2. The shape measurement system according to claim 1, wherein the illumination device has a first illumination portion and a second illumination portion, and the optical path of the measurement light is arranged between the first illumination portion and the second illumination portion.

3. The shape measurement system according to claim 2, wherein the optical path of the measurement light is arranged in a slit portion formed between the first illumination portion and the second illumination portion.

4. A shape measurement system as described in claim 3, further comprising a drive device that drives the illumination device so as to approach the test object along the optical axis direction of the first imaging device, and even when the illumination device is brought closer to the test object by the drive device, the optical path of the measurement light is positioned at the slit portion.

5. A shape measurement system according to claim 3 or 4, wherein the size of the slit portion is determined based on the irradiation range irradiated by the measurement light.

6. The shape measurement system according to claim 1, wherein the illumination device is disposed between the optical path of the measurement light and the optical axis of the first imaging device.

7. The shape measurement system according to claim 1, wherein the illumination device is disposed outside the optical path of the measurement light and the optical axis of the first imaging device.

8. A shape measurement system according to any one of claims 1 to 7, wherein the illumination devices are arranged in a circumferential direction.

9. The shape measurement system of claim 8, wherein the illumination device is annular.

10. A shape measurement system according to any one of claims 1 to 9, further comprising: a first imaging device that images an object illuminated by light from the illumination device; and a second imaging device that images measurement light irradiated onto the object from the measurement light irradiation device.

11. A shape measurement system according to claim 10, wherein the measurement light is pattern light, and the shape of the test object is measured by capturing an image of the pattern light projected onto the test object with the second imaging device.

12. A shape measurement system as described in claim 10 or 11, further comprising an epi-illumination device that irradiates light in a direction along the optical axis of the first imaging device, and an image of the test object illuminated by the light from the epi-illumination device is captured by the first imaging device.

13. A shape measurement system according to any one of claims 10 to 12, wherein the optical axis of a portion of the optical system of the second imaging device is parallel to the optical axis of the optical system of the first imaging device.

14. A shape measurement system according to any one of claims 10 to 13, wherein an imaging unit including the first imaging device, the second imaging device, the illumination device, and the measurement light irradiation device and the test object are moved relative to each other in a first direction, and imaging is performed by at least one of the first imaging device and the second imaging device.

15. A shape measurement system as described in claim 14, wherein the first imaging device captures images during a period in which the driving device is moving the imaging unit relatively in the first direction, and the second imaging device captures images during a period in which the driving device is moving the imaging unit relatively in the first direction but the first imaging device is not capturing images.

16. A shape measurement system according to claim 14 or 15, wherein the second imaging device is disposed in a direction intersecting the first direction with respect to the optical axis of the first imaging device.

17. A shape measurement system comprising: a first imaging device having an imaging optical system for imaging a test object; an illumination device arranged outside the first imaging device and irradiating illumination light onto the test object when imaging with the first imaging device; and a measurement light irradiation device that irradiates measurement light to measure the shape of the test object, and measures the shape of the test object based on the measurement light that is not blocked by the illumination device.

18. A shape measurement system comprising: a first imaging device having an imaging optical system that images a test object; a measurement light irradiation device that irradiates measurement light that measures the shape of the test object; a first axis portion extending in a first direction; and a base portion attached to the first axis portion so as to be movable in the first direction, wherein a lens barrel having the imaging optical system of the first imaging device is attached to the base.

19. A shape measurement system as described in claim 18, wherein the optical system of the measurement light irradiation device is arranged in a second direction of the lens barrel that is perpendicular to the first direction, and the base is arranged in a third direction of the lens barrel that is between the first direction and the second direction.

20. A shape measurement system as described in claim 19, wherein an imaging element of the first imaging device or a second imaging device that images the measurement light is arranged in the first direction of the lens barrel, and the base is arranged between the optical system of the measurement light irradiation device and the imaging element.

21. A shape measurement system comprising: a first imaging device having an imaging optical system that images a test object; a mounting member attached to the outside of the first imaging device; and a measurement light irradiation device that irradiates measurement light to measure the shape of the test object, wherein the optical path of the measurement light arranged outside the imaging optical system is arranged at a position different from that of the mounting member.

22. The shape measurement system according to claim 21, wherein the mounting member is a contact sensor and / or a non-contact sensor.

23. A method for manufacturing a structure, comprising: a design process for creating design information regarding the shape of a structure; a molding process for manufacturing the structure based on the design information; a measurement process for measuring the shape of the manufactured structure using a shape measurement system described in any one of claims 1 to 22; and an inspection process for comparing the shape information obtained in the measurement process with the design information.

24. The method for manufacturing a structure according to claim 23, further comprising a repair step that is executed based on the comparison result of the inspection step and that processes the structure.

25. A structure manufacturing system comprising: a design device that creates design information regarding the shape of a structure; a molding device that manufactures the structure based on the design device; a shape measurement system according to any one of claims 1 to 22 that measures the shape of the manufactured structure; and a control device that compares the shape information regarding the shape of the structure obtained by the shape measurement system with the design information.

26. A shape measurement method comprising: capturing an image with a first imaging device having an imaging optical system; irradiating a test object with illumination light from an illumination device arranged outside the first imaging device when capturing an image with the first imaging device; and irradiating a measurement light for measuring the shape of the test object with a measurement light irradiation device, wherein the optical path of the measurement light arranged outside the imaging optical system is arranged at a position different from that of the illumination device.

27. A shape measurement method comprising: capturing an image with a first imaging device having an imaging optical system; irradiating a test object with illumination light from an illumination device disposed outside the first imaging device when capturing an image with the first imaging device; irradiating a measurement light irradiating device with measurement light for measuring the shape of the test object; and measuring the shape of the test object based on the measurement light not blocked by the illumination device.

28. A shape measurement method comprising: taking an image with a first imaging device having an imaging optical system; and irradiating measurement light for measuring the shape of a test object with a measurement light irradiation device; wherein a lens barrel having the imaging optical system of the first imaging device is attached to a base attached to a first axis extending in a first direction so as to be movable in the first direction.

29. A shape measurement method comprising: taking an image using a first imaging device having an imaging optical system; and irradiating measurement light for measuring the shape of a test object using a measurement light irradiation device; wherein the optical path of the measurement light, which is located outside the imaging optical system, is located at a position different from that of an attachment member attached to the outside of the first imaging device.

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