Vacuum generating device and vacuum pump

Abstract

This device (1) includes a vacuum pump (7) having a detachably attachable part (AT2); a main body (3) to which the vacuum pump (7) can be detachably attached by means of the detachably attachable part (AT2); and a dust collecting member (5) mounted on the main body (3). The main body (3) includes a first opening (31H1) positioned on the vacuum pump (7) side, a second opening (31H2) positioned on the dust collecting member (5) side, a suction passage (31) communicating between the first opening (31H1) and the second opening (31H2), a check valve (33) that is provided in the suction passage (31) and prevents a backflow of gas from the second opening (31H2) to the first opening (31H1) due to the vacuum pump (7), a solenoid valve (34) that is provided in a branch path (31d) communicating with the suction passage (31) and that is switchable between an open state in which the suction passage (31) communicates with the outside in response to a command from an external device (8) and a closed state in which the suction passage (31) is prevented from communicating with the outside, and a first filter (35) that covers the second opening (31H2). The dust collecting member (5) is provided to be detachably attachable to the main body (3) and has an internal space (5s) in which the first filter (35) can be accommodated.

Description

Vacuum generators and vacuum pumps

[0001] The present invention relates to a vacuum generating device and a vacuum pump.

[0002] A vacuum supply device (vacuum generating device) is known that has a filter (first filter) inside the main body and creates a vacuum in a flow path (suction path) formed inside the main body (see, for example, Patent Document 1).

[0003] In this vacuum supply device, a filter is provided detachably on the main body.

[0004] Japanese Patent Application Publication No. 05-69366

[0005] However, in the technology described in Patent Document 1, although a filter is placed on the vacuum port side located on the external side, a filter is not placed on the compressed air supply port side, which is on the vacuum pump side. Therefore, if foreign matter is contained in the air sucked in from the gap inside the main body, there is a risk that the foreign matter will enter the vacuum pump.

[0006] The present invention has been made in consideration of the above, and aims to provide a vacuum generating device etc. that can prevent foreign matter from entering the inside of a vacuum pump and can improve the workability when replacing a filter.

[0007] In order to solve the above-mentioned problems and achieve the object, the vacuum generating device of the present invention comprises a vacuum pump having a detachable part, a main body to which the vacuum pump can be detached by the detachable part, and a dust collecting member attached to the main body, wherein the main body comprises a first opening located on the vacuum pump side, a second opening located on the dust collecting member side, a suction path connecting the first opening and the second opening, a check valve provided in the suction path to prevent backflow of gas flow from the second opening to the first opening by the vacuum pump, an electromagnetic valve provided in a branch path communicating with the suction path and switchable between an open state that connects the suction path to the outside and a closed state that prevents communication between the suction path and the outside in response to a command from an external device, and a first filter covering the second opening, wherein the dust collecting member is detachably provided with respect to the main body and has an internal space capable of accommodating the first filter.

[0008] According to one aspect of the vacuum generating device of the present invention, a pump or the like is provided that can prevent foreign matter from entering the inside of the vacuum pump and can improve the workability when replacing the filter.

[0009] FIG. 1 is a front view of a load port equipped with a vacuum generator according to a first embodiment. FIG. 2 is a perspective view of the vacuum generator shown in FIG. 1. FIG. 3 is a side view of the vacuum generator shown in FIG. 1. FIG. 4 is a front view of the vacuum generator shown in FIG. 1. FIG. 5 is a partial cross-sectional view taken along arrows A-A in FIG. 3. FIG. 6 is a perspective view of the vacuum generator shown in FIG. 1, viewed from the positive Z-axis direction, with the vacuum pump removed from the main body. FIG. 7 is a perspective view of the vacuum generator shown in FIG. 1, viewed from the negative Z-axis direction, with the dust collecting member removed from the main body. FIG. 8 is an exploded perspective view of a branching member and a check valve included in the vacuum generator shown in FIG. 1. FIG. 9 is a cross-sectional view taken along arrows B-B in FIG. 4. FIG. 10 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction path are blocked by the check valve shown in FIG. 8. FIG. 11 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction path are connected by the check valve shown in FIG. 8. FIG. 12 is a perspective view of a suction pad included in the vacuum generator shown in FIG. 1. FIG. 13 is an exploded perspective view of a vacuum pump provided in the vacuum generating apparatus shown in FIG. 1 . FIG. 14 is a perspective view of the vacuum pump shown in FIG. 13 as viewed from the bottom. FIG. 15 is a perspective view of a second contact provided in the vacuum pump shown in FIG. 13 . FIG. 16 is a front view of a conventional load port. FIG. 17 is a front view of a vacuum generating apparatus according to a second embodiment. FIG. 18 is an exploded front view of a first detachable unit provided in a vacuum generating apparatus according to a third embodiment. FIG. 19 is an explanatory diagram sequentially showing the steps of attaching a dust collecting member to a branching member (main body) in the first detachable unit shown in FIG. 18 . FIG. 20 is an explanatory diagram sequentially showing the steps of attaching a dust collecting member to a branching member (main body) in the first detachable unit shown in FIG. 18 . FIG. 21 is an explanatory diagram sequentially showing the steps of attaching a dust collecting member to a branching member (main body) in the first detachable unit shown in FIG. 18 . FIG. 22 is an explanatory diagram sequentially showing the steps of attaching a dust collecting member to a branching member (main body) in the first detachable unit shown in FIG. 18 . Fig. 23 is an explanatory diagram showing in order the work of attaching the dust collecting member to the branching member (main body) in the first attachment / detachment section shown in Fig. 18. Fig. 24 is a perspective view showing an example of a conveying system according to a fourth embodiment. Fig. 25 is a side view of the vacuum generating device shown in Fig. 24. Fig. 26 is a front view of the vacuum generating device shown in Fig. 24.27 is a top view of the vacuum generator shown in FIG. 24. FIG. 28 is a bottom view of the vacuum generator shown in FIG. 24. FIG. 29 is a cross-sectional view taken along arrows C-C in FIG. 27. FIG. 30 is a perspective view of a branching member and a check valve provided in the vacuum generator shown in FIG. 24. FIG. 31 is an exploded perspective view of the branching member and the check valve provided in the vacuum generator shown in FIG. 24. FIG. 32 is an exploded side view showing the positional relationship between a first mounting member and a first suction pad according to a fourth embodiment. FIG. 33 is a cross-sectional view of the first mounting member taken along arrows G-G in FIG. 32. FIG. 34 is an exploded perspective view of a check valve provided in the vacuum generator shown in FIG. 24. FIG. 35 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction path are blocked by the check valve shown in FIG. 29. FIG. 36 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction path are connected by the check valve shown in FIG. 29. FIG. 37 is a cross-sectional view taken along arrows D-D in FIG. 25. FIG. 38 is a cross-sectional view taken along arrows E-E in FIG. 25. FIG. 39 is a cross-sectional view taken along arrows F-F in FIG. 25 when the vacuum pump is operating. FIG. 40 is a cross-sectional view taken along arrows F-F in FIG. 25 when the vacuum pump is stopped. FIG. 41 is an exploded side view showing the positional relationship between the second mounting member and the second suction pad according to the fourth embodiment. FIG. 42 is a cross-sectional view of the second mounting member taken along arrows G-G in FIG. 32. FIG. 43 is a perspective view showing an example of a transport system according to the fifth embodiment. FIG. 44 is an exploded perspective view of the vacuum generating device shown in FIG. 43. FIG. 45 is a cross-sectional view taken along arrows I-I in FIG. 43. FIG. 46 is a perspective view showing an example of a transport system according to the sixth embodiment. FIG. 47 is a side view of a vacuum generating device to which the extension member shown in FIG. 46 is attached. FIG. 48 is a front view of a vacuum generating device to which the extension member shown in FIG. 46 is attached. FIG. 49 is a top view of a vacuum generating device to which the extension member shown in FIG. 46 is attached. Figure 50 is a bottom view of a vacuum generating device to which the expansion member shown in Figure 46 is attached. Figure 51 is a perspective view showing an example of the expansion member shown in Figure 46. Figure 52 is an exploded perspective view showing an example of the expansion member shown in Figure 46. Figure 53 is a cross-sectional view taken along arrows J-J in Figure 49. Figure 54 is a cross-sectional view taken along arrows K-K in Figure 48. Figure 55 is an exploded perspective view of a vacuum generating device according to a seventh embodiment.

[0010] A vacuum generating device and a vacuum pump according to embodiments will be described below with reference to the drawings. Note that the present invention is not limited to these embodiments. Furthermore, the dimensional relationships and ratios of elements in the drawings may differ from the actual situation. The dimensional relationships and ratios may differ between the drawings. Furthermore, the content described in one embodiment is generally applicable to other embodiments as well.

[0011] [First Embodiment] Figure 1 is a front view of a load port 100 equipped with a vacuum generator 1 according to a first embodiment. In describing the load port 100 (vacuum generator 1) shown in Figure 1 according to the first embodiment, to facilitate understanding of directions, the front-to-rear direction of the load port 100 (vacuum generator 1) will be referred to as the X-axis, the left-to-right direction as the Y-axis, and the up-to-down direction as the Z-axis. The X-axis, Y-axis, and Z-axis are mutually orthogonal. The front view of the load port 100 is a drawing of the load port 100 viewed from the negative X-axis side.

[0012] The load port 100 is used in, for example, semiconductor manufacturing equipment. The load port 100 includes, for example, a load port main body 101 having an internal space within the main body, and an opening / closing door 102 that is formed to be openable and closable relative to the load port main body 101 and that transfers a wafer storage pod (item) into and out of the internal space within the main body. The wafer storage pod is, for example, a FOUP (Front Opening Unified Pod) that can store multiple semiconductor wafers. In other words, the load port 100 is an interface that transfers a wafer storage pod, which can store, for example, multiple semiconductor wafers, between the outside and the internal space within the main body.

[0013] A vacuum generator 1 is provided in the load port main body 101. In the load port 100 according to this embodiment, the vacuum generator 1 includes a vacuum pump 7 (see FIG. 2 , etc.), a suction pad 6, etc. The vacuum pump 7 is driven to reduce the pressure on the suction pad 6, thereby holding the door 102 with the suction pad 6, and the door 102 is opened and closed to move a wafer storage pod between the interior space of the load port main body 101 and the outside. In other words, in the vacuum generator 1 according to this embodiment, the wafer storage pod is an example of an article held by the suction pad 6 when the vacuum pump 7 is driven. The vacuum generator 1 includes a suction path forming member 103, for example, between the main body 3 and the suction pad 6. The suction path forming member 103 is composed of a pipe connecting member 103a, a first pipe 103b, and a second pipe 103c.

[0014] Next, the vacuum generator 1 will be described in detail with reference to Figures 2 to 5. Figure 2 is a perspective view of the vacuum generator 1 shown in Figure 1. Figure 3 is a side view of the vacuum generator 1 shown in Figure 1. Figure 4 is a front view of the vacuum generator 1 shown in Figure 1. Figure 5 is a part of a cross-sectional view taken along arrows A-A in Figure 3. The side view of the vacuum generator 1 is a view of the vacuum generator 1 from the negative side of the X-axis. The front view of the vacuum generator 1 is a view of the vacuum generator 1 from the positive side of the Y-axis.

[0015] The vacuum generator 1 is disposed, for example, in the internal space of the load port main body 101. The vacuum generator 1 includes, for example, a housing 2, a main body 3, a terminal box 4, a dust collection member 5, a suction pad 6 (see FIG. 12 ), and a vacuum pump 7. Although not shown, the vacuum generator 1 according to this embodiment includes one main body 3, one vacuum pump 7, and two suction pads 6.

[0016] The housing 2 shown in Figures 2 to 4 is formed, for example, by bending a metal plate, and has a pair of opposing portions 21a, 21b that face each other in the Z-axis direction, and a connecting portion 22 that connects the pair of opposing portions 21a, 21b.

[0017] The main body 3 includes, for example, a case 3 a and a cover 3 b, and is formed of a synthetic resin in a rectangular parallelepiped shape. As shown in Fig. 5, the main body 3 further includes a suction passage 31, a branching member 32, a check valve 33, an electromagnetic valve 34 (see Fig. 6), a first filter 35, and a second O-ring 36.

[0018] As shown in FIG. 5 , the suction path 31 is formed inside the main body 3. The suction path 31 according to this embodiment is formed, for example, linearly inside the main body 3. More specifically, the suction path 31 is formed linearly extending, for example, along the Z-axis direction. In other words, the suction path 31 is formed along an axis 31o1 extending along the Z-axis direction. When the vacuum pump 7 is driven with the suction pad 6 in contact with the opening / closing door 102, the suction path 31 reduces the pressure in the suction path 31 and the suction pad 6 by a predetermined value below atmospheric pressure, creating a low-pressure state (hereinafter referred to as a "vacuum"). In other words, in this embodiment, a "vacuum" refers to a state in which the pressure is lower by a predetermined value than atmospheric pressure.

[0019] The vacuum pump 7 is disposed on one side of the suction path 31 (e.g., the positive Z-axis side), while the dust collector 5 is disposed on the other side of the suction path 31 (e.g., the negative Z-axis side). Therefore, for convenience, the vacuum pump 7 side of the suction path 31 of the vacuum generating device 1 according to this embodiment will be referred to as the upstream side, and the dust collector 5 side will be referred to as the downstream side. The first opening 31H1 is disposed at the most upstream side of the suction path 31 in the main body 3, while the second opening 31H2 is disposed at the most downstream side of the suction path 31 in the main body 3. In other words, the first opening 31H1 is disposed on the vacuum pump 7 side of the main body 3, and the second opening 31H2 is disposed on the dust collector 5 side of the main body 3. The suction path 31 communicates between the first opening 31H1 and the second opening 31H2.

[0020] Next, the positive Z-axis side of the main body 3 will be described with reference to Figure 6. Figure 6 is a perspective view of the vacuum generator 1 shown in Figure 1, viewed from the positive Z-axis side, with the vacuum pump 7 removed from the main body 3. When the vacuum pump 7 is removed, the adapter 71 is also removed from the main body at the same time. However, in Figure 6, the adapter 71 is shown by a dashed line for convenience.

[0021] 6, an engaging portion 7N2, which is a hole that penetrates the cover 3b in the Z-axis direction, is formed on the positive side of the Z-axis of the case 3a of the main body 3. In the main body 3 according to this embodiment, for example, a pair of engaging portions 7N2 is formed on the cover 3b. The engaging portion 7N2 is configured to be located on the main body 3 side of the second detachable portion AT2 that detachably attaches the vacuum pump 7 to the main body 3.

[0022] Furthermore, a second contact 7E2 is exposed from the cover 3b on the positive side of the case 3a in the Z-axis direction. The second contact 7E2 is a contact on the main body 3 side of the electrical connection part E that electrically connects the vacuum pump 7 and the main body 3.

[0023] Next, the negative Z-axis side of the main body 3 will be described with reference to Fig. 7. Fig. 7 is a perspective view of the vacuum generating device 1 shown in Fig. 1 when viewed from the negative Z-axis side with the dust collecting member 5 removed from the main body 3.

[0024] Next, the branching member 32 will be described with reference to Figures 5, 8, and 9. Figure 8 is an exploded perspective view of the branching member 32 and the check valve 33 provided in the vacuum generating device 1 shown in Figure 1. Figure 9 is a cross-sectional view taken along the arrows B-B in Figure 4. The branching member 32 and the check valve 33 shown in Figure 8 to which the dust collecting member 5 is attached may be referred to as a piping body 30.

[0025] In the suction path 31, a branch path 31d branching from the suction path 31 is formed by a branching member 32. In the vacuum generating device 1 according to this embodiment, for example, two branch paths 31d (a first branch path 31d1 and a second branch path 31d2) are formed branching from the suction path 31. More specifically, as shown in Fig. 8 , the suction path 31 is formed with a first branch path 31d1 branching from the suction path 31 toward the positive side of the Y-axis and a second branch path 31d2 branching from the suction path 31 toward the negative side of the X-axis.

[0026] The branching member 32 forms a part of the suction path 31, as well as a part of the first branched path 31d1 and a part of the second branched path 31d2.

[0027] The upstream side of the first branched passage 31d1 extends along an axis 31o2 along the Y-axis direction, and the upstream side of the second branched passage 31d2 extends along an axis 31o3 along the X-axis direction.

[0028] The branching member 32 has an upper portion 32a located on the positive side of the Z axis, a lower portion 32b located on the negative side of the Z axis, and a first branch portion 32c and a second branch portion 32d located between the upper portion 32a and the lower portion 32b.

[0029] In the branching member 32, the upper portion 32a and the lower portion 32b are each formed in a cylindrical shape. A pair of engaging portions 321 that protrude radially outward are formed on the outer peripheral surface of the lower portion 32b. The engaging portions 321 are configured to be disposed on the main body 3 side of the first detachable portion AT1 that detachably attaches the dust collecting member 5 to the main body 3. The dust collecting member 5 according to this embodiment can be attached to and detached from the main body 3 by the first detachable portion (detachable portion) AT1.

[0030] The first branched path 31d1 is formed by the first branch portion 32c, a first branched path forming member 3211 such as a tube, and a first connecting member 3212 that connects the first branched path forming member 3211 and the first branched path 32c. In the first branched path 31d1, a solenoid valve 34 is connected to the downstream end of the first branched path forming member 3211. In other words, the first branched path 31d1 branches off from the suction path 31 and is provided with the solenoid valve 34.

[0031] Here, the first branched passage 31d1 will be described assuming that the branching member 32 is located upstream and the solenoid valve 34 is located downstream. The first branched passage 31d1 may be provided with a third filter 3213 and a third O-ring 3214. In other words, the main body 3 may include the third filter 3213 and the third O-ring 3214. The third filter 3213 is disposed upstream of the solenoid valve 34 in the first branched passage 31d1. The third filter 3213 covers the third opening 32H3 of the first branch portion 32c of the branching member 32.

[0032] More specifically, the third filter 3213 covers the third opening 32H3 on the downstream side of the third opening 32H3. In this case, the radial size r31 of the third filter 3213 shown in FIG. 9 is larger than the radial size r32 of the first branch passage forming member 3211, which is located downstream of the third opening 32H3 and forms part of the first branch passage 31d1. In other words, the radial size r31 of the third filter 3213 is larger than the radial size r32 of the first branch passage 31d1, which is located downstream of the third filter 3213.

[0033] As a result, when the inside of the vacuum pump 7 is evacuated and the solenoid valve 34 is opened, even if foreign matter is mixed in with the external gas sucked in through the solenoid valve 34, the third filter 3213 can prevent foreign matter from entering the inside of the vacuum pump 7.

[0034] Furthermore, because the outer diameter of the first connecting member 3212 is slightly smaller than the inner diameter of the first branch portion 32c of the branching member 32, the tip of the first connecting member 3212 is inserted into the first branch portion 32c to form the first branched passage 31d1. At this time, a third filter 3213 and a third O-ring 3214 are disposed between the first branch portion 32c and the first connecting member 3212. Furthermore, by driving the vacuum pump 7, the pressure in the suction passage 31, the first branched passage 31d1, etc. is evacuated, and the first connecting member 3212 is pulled into the main body 3. This prevents the first connecting member 3212 from becoming detached from the main body 3. After a predetermined period of time has elapsed, for example, the first connecting member 3212 can be removed from the first branch portion 32c of the branching member 32, and the third filter 3213 can be replaced if necessary. Then, by performing the above-described procedure, the first connecting member 3212 can be attached to the first branched passage 32c of the branching member 32.

[0035] The second branched path 31d2 is formed by the second branch portion 32d, a second branched path forming member 3221 such as a tube, and a second connecting member 3222 that connects the second branched path forming member 3221 and the second branched path 32d. In the second branched path 31d2, a pressure sensor 37 (see FIG. 6) is connected to the downstream end of the second branched path forming member 3221. In other words, the second branched path 31d2 branches off from the suction path 31 and is provided with the pressure sensor 37.

[0036] Here, the second branch path 31d2 will be described assuming that the branching member 32 is on the upstream side and the pressure sensor 37 is on the downstream side. The second branch path 31d2 may be provided with a fourth filter (fourth filter) 3223 and a fourth O-ring 3224. In other words, the main body 3 may include the fourth filter 3223 and the fourth O-ring 3224. The fourth filter 3223 is disposed on the second branch path 31d2 upstream of the pressure sensor 37. The fourth filter 3223 covers the fourth opening 32H4 of the second branch portion 32d of the branching member 32.

[0037] More specifically, the fourth filter 3223 covers the fourth opening 32H4 downstream of the fourth opening 32H4. The radial size r41 of the fourth filter 3223 is larger than the radial size r42 of the second branch path forming member 3221, which is located downstream of the fourth opening 32H4 and forms part of the second branch path 31d2. In other words, the radial size r41 of the fourth filter 3223 is larger than the radial size r42 of the second branch path 31d2, which is located downstream of the fourth filter 3223.

[0038] As a result, even if foreign matter is mixed in with the external gas sucked in from the suction pad 6 when the vacuum pump 7 is running, the fourth filter 3223 can prevent the foreign matter from entering the pressure sensor 37.

[0039] Furthermore, because the outer diameter of the second connecting member 3222 is slightly smaller than the inner diameter of the second branch portion 32d of the branching member 32, the tip of the second connecting member 3222 is inserted into the second branch portion 32d to form the second branch passage 31d2. At this time, a fourth filter 3223 and a fourth O-ring 3224 are disposed between the second branch portion 32d and the second connecting member 3222. Furthermore, by driving the vacuum pump 7, the pressure in the suction passage 31, the second branch passage 31d2, etc. is evacuated, and the second connecting member 3222 is pulled into the main body 3. This prevents the second connecting member 3222 from becoming detached from the main body 3. After a predetermined period of time has elapsed, for example, the second connecting member 3222 can be removed from the second branch portion 32d of the branching member 32, the fourth filter 3223 replaced if necessary, and then the above-described procedure performed to attach the second connecting member 3222 to the second branch portion 32d of the branching member 32.

[0040] Next, the check valve 33 will be described with reference to Figures 5, 8, 10, and 11. Figure 10 is a cross-sectional view showing a state in which the upstream side and downstream side of the suction path 31 are blocked by the check valve 33 shown in Figure 8. Figure 11 is a cross-sectional view showing a state in which the upstream side and downstream side of the suction path 31 are connected by the check valve 33 shown in Figure 8.

[0041] 5 is provided in the suction path 31 and prevents backflow of gas from the second opening 31H2 toward the first opening 31H1 caused by the vacuum pump 7. The check valve 33 includes a housing 331, a valve body 332, a biasing member 333, and a first O-ring 334. The housing 331 includes, for example, a cylindrical case 331a and a cylindrical cover 331b that covers the case 331a, and has an accommodation space 33s that can accommodate a valve body main body 332a of the valve body 332. In addition, in the radial direction of the check valve 33, an upper portion 32a of the branching member 32 is sandwiched between the case 331a and the cover 331b.

[0042] The case 331a has a through hole 33H formed therein, which connects the upstream side and the downstream side of the suction path 31 .

[0043] The valve body 332 includes a valve body main body 332a formed in a disk shape, and a rod member 332b, a portion of which is located in the accommodation space 33s and a portion of which protrudes outward from the accommodation space 33s.

[0044] The biasing member 333 constantly biases the valve body 332 downward in the up-down direction Z relative to the housing 331. The biasing member 333 is, for example, a coil spring.

[0045] The first O-ring 334 is disposed in a space formed by the case 331 a , the cover 331 b , and the upper portion 32 a of the branching member 32 .

[0046] In the check valve 33 according to this embodiment, the valve element 332 is provided so as to be movable in the Z-axis direction relative to the housing 331. When the vacuum pump 7 is driven, the valve element 332 moves in the positive Z-axis direction against the force biasing it in the negative Z-axis direction.

[0047] 10, when the valve element 332 is biased in the negative Z direction, the valve element 332 moves in the negative Z direction, causing the through-hole 33H to be blocked by the valve element main body 332a, and communication between the upstream side and the downstream side of the suction path 31 is blocked. On the other hand, when the valve element 332 is biased in the positive Z direction, the valve element 332 moves in the positive Z direction, causing communication between the upstream side and the downstream side of the suction path 31 via the through-hole 33H.

[0048] That is, the check valve 33 is provided in the suction path 31 and prevents the gas flow caused by the vacuum pump 7 from the second opening 31H2 toward the first opening 31H1 from flowing backward.

[0049] The solenoid valve 34 shown in FIG. 9 is disposed inside the main body 3. The solenoid valve 34 is provided in a first branch path (branch path) 31d1 communicating with the suction path 31 and is switchable between an open state that connects the suction path 31 to the outside and a closed state that prevents communication between the suction path 31 and the outside in response to a command from the external device 8 (see FIG. 1). In the vacuum generator 1 according to this embodiment, when the solenoid valve 34 is closed and the vacuum pump 7 is driven, the pressure in the suction path 31 is reduced, thereby allowing the door 102 to be suctioned by the suction pad 6. On the other hand, when the vacuum pump 7 is stopped and the solenoid valve 34 is opened to increase the pressure in the suction path 31 from the state in which the door 102 is suctioned, the suction pad 6 can immediately release the door 102 from its suction state. The external device 8 also includes a control unit that comprehensively controls each component of the semiconductor manufacturing apparatus, and each component of the vacuum generator 1 operates and stops in response to a command from the control unit.

[0050] 6 is disposed inside the terminal box 4. The pressure sensor 37 detects the pressure in the suction path 31. The control unit of the external device 8 then transmits a command to drive and stop the vacuum pump 7 to the vacuum pump 7 based on the pressure of the pressure sensor 37, and transmits a command to open and close the solenoid valve 34 to the solenoid valve 34.

[0051] The dust collecting member 5 shown in Figure 8 is detachably attached to the main body 3 and has an internal space 5s (see Figure 5) that can accommodate a first filter 35. The dust collecting member 5 is attached to the main body 3 on the negative side in the Z axis direction. More specifically, the dust collecting member 5 is detachably attached to the main body 3 by a first detachable part AT1. The first detachable part AT1 is composed of, for example, a pair of engaging parts 321 and a pair of engaging grooves 51. The engaging parts 321 are provided on, for example, the branching member 32. The engaging grooves 51 are provided on, for example, the dust collecting member 5.

[0052] Each of the engagement grooves 51 includes a first linear portion 51 a and a second linear portion 51 b. The engagement grooves 51 are L-shaped when viewed from the side. The side view refers to when the vacuum generating device 1 is viewed from the Y-axis direction.

[0053] The first linear portion 51a extends linearly from the end of the dust collecting member 5 on the positive side of the Z axis toward the negative side of the Z axis.

[0054] The second linear portion 51b extends in the circumferential direction of the dust collecting member 5. The end of the first linear portion 51a on the negative Z-axis side is connected to the other end of the second linear portion 51b in the circumferential direction (the end on the right side in FIG. 8 ). The end of the first linear portion 51a on the negative Z-axis side is connected to the other end of the second linear portion 51b in the circumferential direction.

[0055] In the first attachment / detachment part AT1 having the above-described configuration, when attaching the dust collecting member 5 to the branching member 32 (main body 3), the worker performs the following operations.

[0056] First, with the main body 3 fixed, the worker moves the dust collecting member 5 from the negative side of the Z axis to the positive side of the Z axis, thereby inserting the engaging portion 321 into the first linear portion 51a of the engaging groove 51.

[0057] Next, the worker continues to move the dust collecting member 5 relative to the main body 3 until the engaging portion 321 abuts against the end of the first linear portion 51a on the negative Z-axis direction side.

[0058] Next, the worker can attach the dust collecting member 5 to the main body 3 by rotating the dust collecting member 5 to one side in the circumferential direction and abutting the engaging portion 321 against the end portion on one side in the circumferential direction of the second linear portion 51b.

[0059] On the other hand, when removing the dust collecting member 5 from the branching member 32 (main body 3), the above-mentioned order of operations is reversed.

[0060] In other words, the dust collecting member 5 is of a screw type that can be attached to the main body 3 when rotated in one circumferential direction, and can be removed from the main body 3 when rotated in the other circumferential direction.

[0061] 7, when the dust collecting member 5 is removed from the branching member 32 (main body 3), the first filter 35 and the second O-ring 36 are exposed from the main body 3. At this time, the first filter 35 and the second O-ring 36 are replaced as necessary, and the first filter 35 and the second O-ring 36 are disposed between the branching member 32 (main body 3) and the dust collecting member 5 in the Z-axis direction.

[0062] 5 , the first filter 35 covers the second opening 31H2 of the main body 3. More specifically, the first filter 35 covers the second opening 31H2 on the downstream side of the suction path 31. The radial size r21 of the first filter 35 is larger than the radial size r22 of the inner periphery of the dust collecting member 5, which is located downstream of the second opening 31H2 and forms part of the suction path 31. In other words, the radial size r21 of the first filter 35 is larger than the radial size r22 of the suction path 31, which is located downstream of the first filter 35.

[0063] As a result, even if foreign matter such as dust is mixed in the external gas sucked from the tip 62 of the suction pad 6, the foreign matter can be removed from the gas by the first filter 35. Therefore, it is possible to prevent foreign matter from entering the vacuum pump 7.

[0064] Next, the suction pad 6 will be described with reference to Fig. 12. Fig. 12 is a perspective view of the suction pad 6 provided in the vacuum generating device 1 shown in Fig. 1.

[0065] The suction pad 6 is attached to the main body 3 via the suction path forming member 103. In other words, the vacuum generating device 1 according to this embodiment includes the suction pad 6 that is indirectly attached to the main body 3 and can suction the open / close door 102 (see FIG. 1 ) by reducing the pressure caused by the vacuum pump 7.

[0066] The suction pad 6 has, for example, a pad body 61 and a tip portion 62 formed at the tip of the pad body 61, and is integrally formed from synthetic rubber or the like.

[0067] Next, the vacuum pump 7 will be described with reference to Figures 13 to 15. Figure 13 is an exploded perspective view of the vacuum pump 7 provided in the vacuum generating device 1 shown in Figure 1. Figure 14 is a perspective view of the vacuum pump 7 shown in Figure 13 as viewed from the bottom side. Figure 15 is a perspective view of the second contact 7E2 provided in the vacuum pump 7 shown in Figure 13.

[0068] The vacuum pump 7 includes a cylindrical pump body 7a that is closed at the top and forms a first internal space, and a bottom plate 7b that closes the first internal space at the bottom of the pump body 7a. The vacuum pump 7 also includes an adapter 71, a second filter 72, a second detachable part AT2, and an electrical connection part E. The vacuum pump 7 according to this embodiment is detachable from the main body 3 via the second detachable part AT2.

[0069] The vacuum pump 7 has a suction port 7H in the center for inserting and removing the adapter 71. The adapter 71 is located between the main body 3 and the vacuum pump 7, and connects the main body 3 and the vacuum pump 7. The plan view refers to the vacuum generator 1 as viewed from the positive side of the Z axis.

[0070] The vacuum pump 7 is of a cartridge type and is detachably attached to the main body 3 by a second detachable part (detachable part) AT2. When the vacuum pump 7 is driven, a vacuum is generated in the suction path 31 formed in the main body 3.

[0071] The second attachment / detachment part AT2 is composed of an elastically deformable engagement claw 7N1 and an engagement part 7N2 (see FIG. 6) that can be engaged with the engagement claw 7N1.

[0072] The engagement claw 7N1 has a base end 11 arranged on the pump body 7a, a tip end 12 protruding from the pump body 7a toward the negative Z-axis direction, and a pressing portion 13 located between the base end 11 and the tip end 12 in the Z-axis direction.

[0073] The pump body 7a is also formed with a pair of notches 7a1. The pair of notches 7a1 are arranged on both sides of the engagement claw 7N1 in the pump body 7a to facilitate elastic deformation of the engagement claw 7N1. Each of the notches 7a1 extends from the end of the pump body 7a on the negative Z-axis side toward the positive Z-axis side.

[0074] Next, we will explain how to attach the vacuum pump 7 to the main body 3 using the second attachment / detachment part AT2. The operator applies force to the pressing part 13 so that the pair of engagement claws 7N1 move closer to each other in the radial direction of the vacuum pump 7, elastically deforming the base ends 11 of the pair of engagement claws 7N1, and then inserts the tip ends 12 of the pair of engagement claws 7N1 into the engagement parts 7N2 in this elastically deformed state.

[0075] The worker then removes the force applied to the pressing portion 13, allowing the base end 11 of the engaging claw 7N1 to elastically return, thereby engaging the tip end 12 of the engaging claw 7N1 with the peripheral portion of the engaging portion 7N2, thereby attaching the vacuum pump 7 to the main body 3.

[0076] Next, we will explain how to remove the vacuum pump 7 from the main body 3 using the second attachment / detachment part AT2. The operator applies force to the pressing part 13 so that the pair of engaging claws 7N1 move toward each other in the radial direction of the vacuum pump 7, elastically deforming the base ends 11 of the pair of engaging claws 7N1, and then removes the tip ends 12 of the pair of engaging claws 7N1 from the engaging parts 7N2 in this elastically deformed state.

[0077] Thereafter, the operator removes the force applied to the pressing portion 13 to allow the base end portion 11 of the engaging claw 7N1 to return to its original elastic state, thereby removing the vacuum pump 7 from the main body 3.

[0078] Furthermore, in the above operation, with the vacuum pump 7 removed from the main body 3, the second filter 72 attached to the main body 3 via the adapter 71 is replaced as necessary, and the second filter 72 and the adapter 71 are positioned between the main body 3 and the vacuum pump 7 in the Z-axis direction.

[0079] 5 covers the first opening 31H1 of the main body. More specifically, the second filter 72 covers the first opening 31H1 on the upstream side of the suction path 31. The radial size r11 of the second filter 72 is located downstream of the first opening 31H1 and is larger than the radial size r12 of the inner circumferential surface of the cover 331b of the housing 331 of the check valve 33 that forms part of the suction path 31. In other words, the radial size r11 of the second filter 72 is larger than the radial size r12 of the suction path 31 that is located downstream of the second filter 72.

[0080] As a result, even if foreign matter such as dust is mixed in the external gas sucked from the tip side of the suction pad 6, the second filter 72 can remove the foreign matter from the gas. This makes it possible to prevent foreign matter from entering the vacuum pump 7. In other words, the vacuum generator 1 according to this embodiment can prevent foreign matter from entering the vacuum pump 7 by arranging the double filters 35, 72 between the dust collecting member 5 and the vacuum pump 7. Furthermore, even if foreign matter enters the inside of the suction path 31 through a gap in the main body 3, the second filter 72 can remove the foreign matter from the gas.

[0081] Furthermore, when the vacuum pump 7 is removed from the main body 3, the second contact 7E2 is exposed from the main body 3 as shown in FIG. 6, and the first contact 7E1 is exposed from the bottom plate 7b of the vacuum pump 7 as shown in FIG. 14.

[0082] The plurality of first contacts 7E1 and the plurality of second contacts 7E2 constitute an electrical connection portion E. The electrical connection portion E electrically connects the vacuum pump 7 to an external power source.

[0083] The first contact 7E1 is formed of, for example, a conductive metal material. The first contact 7E1 has a plate-shaped portion 7Ea when viewed from the bottom. The plate-shaped portion 7Ea extends, for example, in the X-axis direction. Furthermore, the first contact 7E1 according to this embodiment has multiple (for example, five) plate-shaped portions 7Ea. The bottom view refers to the case where the vacuum generating device 1 is viewed from the negative side of the Z-axis.

[0084] 5 is made of, for example, a conductive metal material. The second contact 7E2 has a curved portion 7Eb in side view, which is elastically deformable. The curved portion 7Eb has a ring shape when viewed from the Y-axis direction.

[0085] When the vacuum pump 7 is attached to the main body 3 by the second attachment / detachment part AT2, the first contact 7E1 arranged on the vacuum pump 7 side comes into contact with the second contact 7E2, and the second contact 7E2 is pressed in the negative Z-axis direction by the first contact 7E1, and is compressed in the Z-axis direction, thereby elastically deforming. This ensures reliable electrical connection between the first contact 7E1 and the second contact 7E2.

[0086] On the other hand, in the conventional electrical connection part, a rod-shaped first contact is brought into contact with a cylindrical second contact, and an operator must carefully work to bring the rod-shaped first contact and the cylindrical second contact into contact to electrically connect the two, which has the problem of poor workability. On the other hand, the electrical connection part E of the vacuum generating device 1 according to the present embodiment has the above-mentioned configuration, and therefore can improve workability.

[0087] As described above, the vacuum generating device 1 according to this embodiment comprises a vacuum pump 7 having a second detachable part (detachable part) AT2, a main body 3 to which the vacuum pump 7 can be detached by the detachable part, and a dust collecting member 5 attached to the main body 3. The main body 3 includes a first opening 31H1 located on the vacuum pump 7 side, a second opening 31H2 located on the dust collecting member 5 side, a suction passage 31 connecting the first opening 31H1 and the second opening 31H2, a check valve 33 provided in the suction passage 31 to prevent backflow of gas from the second opening 31H2 toward the first opening 31H1 by the vacuum pump 7, an electromagnetic valve 34 provided in a branch passage 31d communicating with the suction passage 31 and switchable between an open state that connects the suction passage 31 to the outside and a closed state that prevents communication between the suction passage 31 and the outside in response to a command from an external device 8, and a first filter 35 that covers the second opening 31H2. The dust collecting member 5 is detachably provided with respect to the main body 3 and has an internal space 5s capable of accommodating the first filter 35. 7, when the dust collecting member 5 is removed from the main body 3, the first filter 35 is exposed from the main body 3, facilitating replacement of the first filter 35. As a result, the vacuum generating device 1 according to this embodiment can prevent foreign matter from entering the inside of the vacuum pump 7 and can improve the workability when replacing the first filter 35.

[0088] FIG. 16 is a front view of a conventional load port 100′. The load port 100′ comprises a load port main body 101′, an opening / closing door 102′ for inserting and removing wafer storage pods into and from the main body's internal space, a large compressor 1′ disposed outside the load port main body 101′, and a suction pad 6′. The load port 100′ also comprises a suction path forming member 103′ disposed between the large compressor 1′ and the suction pad 6′. The suction path forming member 103′ is composed of a piping connecting member 103a′, a first pipe 103b′, and a second pipe 103c′. The conventional load port 100′ requires the large compressor 1′ to be disposed outside the load port main body 101′, which poses a problem of the large size of the load port 100′. In contrast, the vacuum generating device 1 according to this embodiment is compact and does not suffer from the above problem.

[0089] Furthermore, in the vacuum generator 1 according to this embodiment, the radial size r21 of the first filter 35 is larger than the radial size r22 of the suction path 31. Therefore, the first filter 35 can prevent foreign matter from flowing upstream. As a result, the vacuum generator 1 according to this embodiment can prevent foreign matter from entering the vacuum pump 7.

[0090] Furthermore, in the vacuum generator 1 according to this embodiment, the suction port 7H of the vacuum pump 7 is covered with a second filter (second filter) 72. Therefore, in the vacuum generator 1 according to this embodiment, foreign matter can be prevented from entering the suction path 31 upstream of the second filter 72. Furthermore, when the vacuum pump 7 is detached from the main body 3 by the second detachable part (detachable part) AT2, the second filter 72 is exposed from the main body 3 as shown in FIG. 6 , making it easy to replace the second filter 72. As a result, the vacuum generator 1 according to this embodiment can prevent foreign matter from entering the vacuum pump 7 and can improve the workability when replacing the second filter 72. Furthermore, in the vacuum generator 1 according to this embodiment, the radial size r11 of the second filter 72 is larger than the radial size r12 of the suction path 31. Therefore, the second filter 72 can prevent foreign matter from flowing upstream. As a result, the vacuum generator 1 according to this embodiment can prevent foreign matter from entering the vacuum pump 7.

[0091] Furthermore, the vacuum generator 1 according to this embodiment includes a first branched path 31d1 branched from the suction path 31 and provided with the electromagnetic valve 34, and a third filter (third filter) 3213 arranged in the first branched path 31d1 upstream of the electromagnetic valve 34. Therefore, even if the electromagnetic valve 34 is opened and gas is introduced into the suction path 31 from the outside through the electromagnetic valve 34, the third filter 3213 can prevent foreign matter contained in the gas from entering the inside of the vacuum pump 7.

[0092] Furthermore, the vacuum generating device 1 according to this embodiment includes a second branched path 31d2 branching from the suction path 31 and including the pressure sensor 37, and a fourth filter (fourth filter) 3223 arranged in the second branched path 31d2 upstream of the pressure sensor 37. This prevents foreign matter contained in the external gas from entering the pressure sensor 37.

[0093] In addition, in the vacuum generating device 1 according to this embodiment, the second detachable part (detachable part) AT2 of the vacuum pump 7 is composed of an elastically deformable engaging claw 7N1 and an engaging part 7N2 that can engage with the engaging claw 7N1.

[0094] Furthermore, the dust collecting member 5 of the vacuum generating device 1 according to this embodiment is of a screw type that can be attached to the main body 3 when rotated in one circumferential direction, and can be removed from the main body 3 when rotated in the other circumferential direction. This makes it easy to attach and detach the dust collecting member 5 to and from the main body 3.

[0095] The vacuum generating device 1 according to this embodiment further includes a suction pad 6 that is indirectly or directly attached to the main body 3 via a dust collecting member 5 and that can suck up an article by reducing pressure using a vacuum pump 7 .

[0096] The vacuum pump 7 according to this embodiment also includes an adapter 71 located between the main body 3 and the vacuum pump 7, connecting the main body 3 and the vacuum pump 7, and a second filter 72 located between the vacuum pump 7 and the adapter 71, adjacent to the suction port 7H of the vacuum pump 7. The vacuum pump 7 according to this embodiment generates a vacuum in the suction path 31 formed in the main body 3. The vacuum pump 7 is detachably attached to the main body 3 by a second detachable part (detachable part) AT2, which is composed of an elastically deformable engaging claw 7N1 and an engaging part 7N2 that can engage with the engaging claw 7N1. This facilitates the attachment and detachment of the vacuum pump 7 to and from the main body 3.

[0097] Furthermore, the vacuum pump 7 according to this embodiment is electrically connected to the main body 3 by an electrical connection part E that is composed of a plurality of first contacts 7E1 that are conductive and a plurality of second contacts 7E2 that are elastically deformable and conductive. Therefore, the electrical connection between the vacuum pump 7 and the main body 3 can be reliably established.

[0098] Furthermore, in the vacuum pump 7 according to this embodiment, the first contact 7E1 has a plate-shaped portion 711 in a bottom view, and the second contact 7E2 has a curved portion 721 in a side view, and the curved portion 721 is elastically deformable. Therefore, the first contact 7E1 and the second contact 7E2 can be reliably electrically connected to each other.

[0099] The vacuum pump 7 according to this embodiment includes a cylindrical pump body 7a that is closed at the top and defines a first internal space, and a bottom plate 7b that closes the first internal space at the bottom of the pump body 7a. The bottom plate 7b has a suction port 7H in the center, as viewed from the bottom, through which the adapter 71 is inserted and removed. This improves the ease of installation of the vacuum pump 7 on the main body 3.

[0100] [Second Embodiment] Next, a vacuum generating apparatus 1A according to a second embodiment will be described with reference to Fig. 17. Fig. 17 is a front view of the vacuum generating apparatus 1A according to the second embodiment. In the following description of each embodiment and each modification, only parts that differ from those shown in the drawings described above will be described, and the same components will be denoted by the same reference numerals and will not be described again.

[0101] The vacuum generating device 1A according to this embodiment is mounted on, for example, a so-called six-axis articulated robot that can move the vacuum generating device 1A in the X-axis, Y-axis, and Z-axis directions. In other words, the vacuum generating device 1A according to this embodiment can be moved in the X-axis, Y-axis, and Z-axis directions by driving a six-axis articulated robot 900, which will be illustrated later.

[0102] In the vacuum generating device 1A according to this embodiment, the suction pad 6 is directly attached to the main body 3 via the dust collecting member 5B.

[0103] In the vacuum generating device 1A according to this embodiment, a main body 3 is provided with one vacuum pump 7, one dust collecting member 5, and a suction pad 6.

[0104] Then, by driving the vacuum pump 7, a vacuum is created inside the suction path 31 and the suction pad 6, making it possible to hold the cardboard box (item) placed on the tip 62 of the suction pad 6. Then, by driving the six-axis articulated robot with the cardboard box held on the tip 62 of the suction pad 6, the cardboard box can be moved to an appropriate location.

[0105] In this embodiment, the vacuum generator 1A is described as being mounted on a six-axis articulated robot. However, the vacuum generator 1A according to this embodiment is not limited to this. For example, the vacuum generator 1A can be mounted on industrial robots such as horizontal articulated robots, parallel link robots, Cartesian robots, and collaborative robots.

[0106] Third Embodiment Next, a vacuum generator 1B according to a third embodiment will be described with reference to FIGS. 18 to 23. FIG. 18 is an exploded front view of a first detachable unit AT1B included in the vacuum generator 1B according to the third embodiment. FIGS. 19 to 23 are explanatory diagrams sequentially showing the steps for attaching a dust collection member 5B to a branching member 32 (main body 3) in the first detachable unit AT1B shown in FIG. 18. Note that in the following description of the vacuum generator 1B according to the third embodiment, only the parts that differ from the vacuum generator 1 according to the first embodiment will be described, and the same components will be designated by the same reference numerals and will not be described again.

[0107] 18 according to this embodiment is composed of a pair of engaging portions 321 and a pair of engaging grooves 51B that respectively engage with the pair of engaging portions 321. The engaging portions 321 are provided, for example, on the branching member 32. The engaging grooves 51B are provided, for example, on the dust collecting member 5B.

[0108] Each of the engagement grooves 51B is composed of a first linear portion 51a extending in the Z-axis direction, a second linear portion 51b extending in the circumferential direction of the dust collecting member 5, and a step portion 51c disposed between the first linear portion 51a and the second linear portion 51b. In addition, the engagement groove 51B is formed in a substantially L-shape in a side view.

[0109] The first linear portion 51a extends linearly from the end of the dust collecting member 5B on the positive Z-axis side to the negative Z-axis side. The end of the first linear portion 51a on the positive Z-axis side is an entrance through which the engaging portion 321 is initially inserted into the engaging groove 51B.

[0110] The second linear portion 51b extends linearly in the circumferential direction of the dust collecting member 5B. When the engaging portion 321 is disposed at one end of the second linear portion 51b in the circumferential direction, the engaging portion 321 is engaged with the engaging groove 51B, and the dust collecting member 5B is attached to the branching member 32.

[0111] The step portion 51c is disposed between the first linear portion 51a and the second linear portion 51b. More specifically, the step portion 51c is disposed at a corner of the L-shaped engagement groove 51B, and is composed of a third linear portion 51c1 and a fourth linear portion 51c2.

[0112] The third linear portion 51c1 extends linearly from the end of the first linear portion 51a on the negative Z-axis direction side to one side in the circumferential direction of the dust collecting member 5B.

[0113] The fourth linear portion 51c2 extends linearly from the other circumferential end of the second linear portion 51b toward the positive direction of the Z axis.

[0114] An end portion on one circumferential side of the third straight portion 51c1 and an end portion on the positive Z-axis direction side of the fourth straight portion 51c2 are connected to each other.

[0115] In the first detachable part AT1B having the above-described configuration, when attaching the dust collecting member 5B to the branching member 32 (main body 3), the worker performs the following operation.

[0116] First, with the main body 3 fixed, the operator moves the dust collecting member 5 from the negative side of the Z axis to the positive side of the Z axis, thereby inserting the engaging portion 321 into the first linear portion 51a of the engaging groove 51 as shown in Figure 19.

[0117] Next, the worker continues to move the dust collecting member 5 relative to the main body 3 until the engaging portion 321 abuts against the end of the first linear portion 51a on the negative Z-axis direction side, as shown in FIG.

[0118] Next, the worker rotates the dust collecting member 5 to one side in the circumferential direction (to the left in Figure 21), thereby moving the engaging portion 321 along the third linear portion 51c1 of the stepped portion 51c, as shown in Figure 21.

[0119] Next, the worker moves the dust collecting member 5 from the negative side of the Z axis to the positive side of the Z axis, thereby moving the engaging portion 321 along the fourth linear portion 51c2 of the step portion 51c, as shown in Figure 22.

[0120] Finally, the worker can attach the dust collecting member 5B to the main body 3 by rotating the dust collecting member 5 to one side in the circumferential direction, and thereby abutting the engaging portion 321 against the end of the second linear portion 51b on one side in the circumferential direction (the left side in Figure 23), as shown in Figure 23.

[0121] On the other hand, when removing the dust collecting member 5B from the branching member 32 (main body 3), the above-mentioned order of operations is reversed.

[0122] With such a first detachable part AT1B, simply moving the dust collecting member 5B once to the other circumferential side (right side in Figure 23) relative to the main body 3 and once from the negative Z-axis side to the positive Z-axis side relative to the main body 3 does not allow the dust collecting member 5B to be removed from the main body 3 due to the step part 51c, and therefore it is possible to prevent the dust collecting member 5B from coming off the main body 3.

[0123] [Fourth Embodiment] Next, a vacuum generating apparatus 1D according to a fourth embodiment will be described with reference to Figures 24 to 29. Figure 24 is a perspective view showing an example of a transfer system according to the fourth embodiment. Figure 25 is a side view of the vacuum generating apparatus shown in Figure 24. Figure 26 is a front view of the vacuum generating apparatus shown in Figure 24. Figure 27 is a top view of the vacuum generating apparatus shown in Figure 24. Figure 28 is a bottom view of the vacuum generating apparatus shown in Figure 24. Figure 29 is a cross-sectional view taken along arrows CC in Figure 27.

[0124] As shown in Fig. 24, the vacuum generator 1D according to the fourth embodiment is mounted on, for example, a six-axis articulated robot 900. The tip of the six-axis articulated robot 900 is coupled, for example, via a bolt (not shown), to a mounting hole 211 formed in the facing portion 21a on the positive side in the Y-axis direction of the housing 2 of the vacuum generator 1D shown in Fig. 27. The six-axis articulated robot 900 and the vacuum generator 1D are connected to each other, for example, by a power line 91. The six-axis articulated robot 900 and the vacuum generator 1D are controlled, for example, by a control device (not shown). The six-axis articulated robot 900 and the vacuum generator 1D constitute a transfer system 10D.

[0125] 26 , the vacuum generator 1D includes, for example, a housing 2, a main body 3D, a terminal box 4D, a first mounting member 5D, a suction pad 6, and a vacuum pump 7. In the following description, the suction pad 6 may be referred to as a first suction pad 6.

[0126] 26 , in a vacuum generating device 1D according to the fourth embodiment, a first suction pad 6 is directly attached to a main body 3D via a first attachment member 5D. The first suction pad 6 can suck an article by reducing the pressure using a vacuum pump 7.

[0127] The main body 3D includes, for example, a case 3e and a cover 3f, and is formed of synthetic resin in a rectangular parallelepiped shape. Furthermore, as shown in Fig. 29 , the main body 3D also includes a suction path 31, a branching member 32D, a check valve 33, and a solenoid valve 34. Also, as shown in Fig. 29 , the first opening 31H1 of the main body 3D is located on the vacuum pump 7 side (positive side on the Z axis), and the second opening 31H2 is located on the first mounting member 5D side (negative side on the Z axis). The first opening 31H1 and the second opening 31H2 are connected by the suction path 31.

[0128] Furthermore, in a vacuum generator 1D according to the fourth embodiment, as shown in Fig. 31 , a first filter 35D is disposed on the negative side of the Z axis relative to a second O-ring 36D, i.e., closer to the suction pad 6. Fig. 30 is a perspective view of a branching member and a check valve provided in the vacuum generator shown in Fig. 24 . Fig. 31 is an exploded perspective view of the branching member and the check valve provided in the vacuum generator shown in Fig. 24 . Note that the branching member 32D and the check valve 33 to which a first mounting member 5D is attached, as shown in Figs. 30 and 31 , may be referred to as a piping body 30D.

[0129] As shown in FIG. 33 , the first mounting member 5D according to the fourth embodiment has an internal space 55D capable of accommodating a first filter 35D and a pair of engagement grooves 51B. FIG. 32 is an exploded side view showing the positional relationship between the first mounting member and the suction pad according to the fourth embodiment. FIG. 33 is a cross-sectional view of the first mounting member taken along arrows G-G in FIG. 32 . Also, as shown in FIG. 31 , a pair of engagement portions 321 are formed on the outer peripheral surface of the lower portion 32f of the branching member 32D according to the fourth embodiment. In the fourth embodiment, the pair of engagement grooves 51B and the pair of engagement portions 321 form a first detachable portion AT1B. With this configuration, the first mounting member 5D, to which the first suction pad 6 is connected, is detachably attached to the main body 3D. The engagement grooves 51B are an example of a third connecting portion.

[0130] 31 , a recessed groove 32g in which a second O-ring 36D is disposed is formed on the outer peripheral surface of a lower portion 32f of the branching member 32D, on the negative side in the Z axis direction of the pair of engaging portions 321. The lower portion 32f of the branching member 32D is an example of a second opening, and the second O-ring 36D is an example of an elastic member.

[0131] 32, the first suction pad 6 includes a first connecting portion 63. Furthermore, as shown in Fig. 33, the first mounting member 5D includes a connected portion 56D. The first suction pad 6 is attached to the first mounting member 5D by, for example, screwing the first connecting portion 63 into the connected portion 56D of the first mounting member 5D.

[0132] The first filter 35D is pressed toward the negative side of the Z axis by a fixture 38D shown in FIG. 32 . The fixture 38D is a generally C-shaped spring made of, for example, metal, with a claw on its inner diameter side, which holds the first filter 35D. That is, the vacuum generator 1D according to the fourth embodiment includes the first filter 35D and a fixture 38D that fixes the first filter 35D. The first filter 35D is sandwiched between the fixture 38D and the first mounting member 5D in the direction in which the suction path 31 extends, for example, in the Z axis direction.

[0133] According to this configuration, the fixing member 38D prevents the first filter 35D from shifting, so that the intrusion of foreign matter into the vacuum pump 7 and the pressure sensor 37 can be further prevented.

[0134] In addition, in the vacuum generator 1D according to the fourth embodiment, the upstream and downstream sides of the suction path 31 transition between a blocked state and a communicated state by movement of the valve element 332 of the check valve 33 shown in Figures 31 and 34. Figure 34 is an exploded perspective view of the check valve provided in the vacuum generator shown in Figure 24. As shown in Figure 34, the valve element main body 332a of the valve element 332 is formed of an elastic material such as rubber, and is attached to the positive side of the rod member 332b in the Z axis direction.

[0135] Figure 35 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction passage are blocked by the check valve shown in Figure 29. Figure 36 is a cross-sectional view showing a state in which the upstream and downstream sides of the suction passage are connected by the check valve shown in Figure 29. As shown in Figure 35, when valve element 332 is biased in the negative Z-axis direction, valve element 332 moves in the negative Z-axis direction, causing through hole 33H to be blocked by valve element main body 332a, and communication between the upstream and downstream sides of suction passage 31 is blocked. On the other hand, as shown in Figure 36, when valve element 332 is biased in the positive Z-axis direction, valve element 332 moves in the positive Z-axis direction, causing communication between the upstream and downstream sides of suction passage 31 through through hole 33H.

[0136] 31 , in a branching member 32D of a vacuum generating device 1D according to the fourth embodiment, a separate branch connector 391 is attached to the first branch portion 32c. Meanwhile, a stopper 392 including an O-ring 3922 is attached to the second branch portion 32d. In this configuration, a fourth filter 3223 is provided in the second branched path 31d2, while a third filter 3213 is not provided in the first branched path 31d1.

[0137] Next, the internal structure of the main body 3D and the flow of air sucked from the first suction pad 6 will be described with reference to Figures 37 to 40. Figure 37 is a cross-sectional view taken along arrows D-D in Figure 25. Figure 38 is a cross-sectional view taken along arrows E-E in Figure 25. Figure 39 is a cross-sectional view taken along arrows F-F in Figure 25 when the vacuum pump is operating. Figure 40 is a cross-sectional view taken along arrows F-F in Figure 25 when the vacuum pump is stopped. The vacuum generator 1D according to the fourth embodiment also has a solenoid valve 34 disposed inside the main body 3D and a pressure sensor 37 inside the terminal box 4D.

[0138] In the vacuum generator 1D, the solenoid valve 34 and the branching member 32D are connected by a tube 3941, and the pressure sensor 37 and the branching member 32D are connected by a tube 3931. As shown in Figures 37 to 40, the tubes 3931 and 3941 are housed inside the main body 3D and the terminal box 4D and do not protrude outside the main body 3D or the terminal box 4D. In this case, the vacuum generator 1D according to the fourth embodiment does not have a first branch path forming member 3211 that protrudes from the main body 3D in the positive direction on the Y axis and a second branch path forming member 3221 that protrudes from the main body 3D and the terminal box 4D in the negative direction on the X axis.

[0139] Furthermore, both tubes 3931 and 3941 are connected to the second branch path 31d2 of branching member 32D. Specifically, tube 3931 is connected to a first branch hole 3913 of branching connector 391 that communicates with branching member 32D, and tube 3941 is connected to a second branch hole 3914 of branching connector 391.

[0140] 31 , a connection portion 3911 of the branch connector 391 is inserted into the second branch path 31d2 of the branching member 32D. A groove 3912 is formed on the outer circumferential surface of the connection portion 3911, and an O-ring 3921 is fitted in the groove 3912. A fourth filter 3223 is disposed in the second branch path 31d2.

[0141] In this case, when the vacuum pump 7 is driven with the solenoid valve 34 in the closed state, air is sucked out by the vacuum pump 7 through the tubes 3931 and 3941, as shown by the arrows in Fig. 39. On the other hand, when the solenoid valve 34 is opened and the vacuum pump 7 is stopped, the tubes 3931 and 3941 are opened to the atmosphere, as shown by the arrows in Fig. 40.

[0142] As described above, the vacuum generation device 1D according to the fourth embodiment includes a vacuum pump 7, a main body 3D, a first mounting member 5D attached to the main body 3D, a first suction pad 6 capable of suctioning an object by reducing pressure generated by the vacuum pump 7, a first filter 35D, and a fastener 38D for fastening the first filter. The main body 3D includes a first opening 31H1 located on the vacuum pump 7 side, a second opening 31H2 located on the first mounting member 5D side, and a suction path 31 connecting the first opening 31H1 and the second opening 31H2. The first mounting member 5D, to which the first suction pad 6 is connected, is indirectly or directly and detachably attached to the main body 3D. The first mounting member 5D has an internal space 55D capable of accommodating the first filter 35D, and the first filter 35D is sandwiched between the fastener 38D and the first mounting member 5D in the direction in which the suction path 31 extends. This configuration can prevent the first filter 35D from becoming displaced.

[0143] Furthermore, according to the vacuum generation device 1D according to the fourth embodiment, the vacuum pump 7 can be connected to the solenoid valve 34 and the pressure sensor 37 without using the first branch path forming member 3211 and the second branch path forming member 3221 that protrude outside the main body 3. Furthermore, since the single fourth filter 3223 can prevent foreign matter from entering the vacuum pump 7 and the pressure sensor 37, the third filter 3213 arranged in the first branch path 31d1 can be omitted.

[0144] The first mounting member 5D in the vacuum generator 1D according to the fourth embodiment may be modified as desired depending on the shape of the suction pad, as shown in Figures 41 and 42. Figure 41 is an exploded side view showing the positional relationship between the second mounting member and the suction pad according to a modified example. Figure 42 is a cross-sectional view of the second mounting member taken along arrows G-G in Figure 32. As shown in Figure 41, the shape of the second connecting portion 69 of the second suction pad 6E according to the modified example differs from the shape of the first connecting portion 63 of the first suction pad 6 according to the fourth embodiment.

[0145] 42, the shape of the connection receiving portion 56E of the second mounting member 5E is different from the shape of the connection receiving portion 56D of the first mounting member 5D. By using this second mounting member 5E in place of the first mounting member 5D, a second suction pad 6E including a second connection portion 69 can be attached to the main body 3D. Note that the shape of the vacuum generator 1E according to the modified example, excluding the second mounting member 5E and the second suction pad 6E, is the same as the shape of the vacuum generator 1D, and therefore the entire vacuum generator 1E is not shown in the drawing.

[0146] Furthermore, the shape of the engagement groove 51B of the second mounting member 5E is the same as the shape of the engagement groove 51B of the first mounting member 5D. In this case, the engagement groove 51B of the second mounting member 5E and the engagement portion 321 of the main body 3D constitute the first detachable portion AT1B. That is, in this modified example, by replacing the first mounting member 5D with the second mounting member 5E, a second suction pad 6E having a different shape from the first suction pad 6 can be easily attached to the main body 3D.

[0147] As described above, the vacuum generator 1E according to the modified example includes a vacuum pump 7, a main body 3D, a first mounting member 5D or a second mounting member 5E attached to the main body 3D, a first suction pad 6 or a second suction pad 6E capable of suctioning an object by reducing the pressure generated by the vacuum pump 7, a first filter 35D, and a fastener 38D for fastening the first filter. The first suction pad 6 includes a first connecting portion 63 attached to the first mounting member 5D, and the second suction pad 6E includes a second connecting portion 69 attached to the second mounting member 5E. The first mounting member 5D and the second mounting member 5E each include a third connecting portion 51B attached to the main body 3D. The third connecting portion 51B of the first mounting member 5D and the third connecting portion 51B of the second mounting member 5E have substantially the same shape, while the first connecting portion 63 and the second connecting portion 69 have different shapes. At least one of a first mounting member 5D connected to a first suction pad 6 and a second mounting member 5E connected to a second suction pad 6E is indirectly or directly and detachably attached to the main body 3D. With this configuration, suction pads 6 and 6E of different shapes can be attached to the same main body 3D simply by replacing the connecting member. Note that by using mounting members other than the first mounting member 5D and the second mounting member 5E, suction pads other than the first suction pad 6 and the second suction pad 6E can be easily replaced.

[0148] [Fifth Embodiment] Next, a vacuum generating device 1F according to a fifth embodiment will be described with reference to Figs. 43 to 45. Fig. 43 is a perspective view showing an example of a transfer system according to the fifth embodiment. Fig. 44 is an exploded perspective view of the vacuum generating device shown in Fig. 43. Fig. 45 is a cross-sectional view taken along the line II in Fig. 43.

[0149] In the vacuum generator 1F according to this embodiment, the main body 3D and the first attachment member 5D are connected via the extension member 200. That is, in the vacuum generator 1F according to the sixth embodiment, the first attachment member 5D is indirectly attached to the main body 3D via the extension member 200.

[0150] The main body 3D and the extension member 200 are attached via a third attachment member 23F shown in Figures 44 and 45. Specifically, a bolt 231 inserted through the third attachment member 23F is threadedly engaged with a nut 341 held in a nut holder 301 formed on the bottom surface of the cover 3f of the main body 3D. The third attachment member 23F and the extension member 200 are also threadedly engaged with a bolt 241 shown in Figure 44.

[0151] 44, in a vacuum generator 1F according to the fifth embodiment, an engagement portion 321 is formed on a connecting member 25F that is coupled to an extension member 200. As shown in Figures 44 and 45, the extension member 200 and the connecting member 25F are connected by a bolt 251.

[0152] Furthermore, an engaging portion 321 that engages with the engaging groove 51B of the first mounting member 5D is formed on the negative side of the connecting member 25F in the Z axis direction. In this case, the first mounting member 5D according to the fifth embodiment is connected to the extension member 200 via the connecting member 25F.

[0153] As described above, the vacuum generating device 1F according to the fifth embodiment further includes an extension member 200 that connects the second opening 31H2 of the main body 3D to the first mounting member 5D and extends in the direction of the suction path 31. With this configuration, an object, for example, inside a deep box can also be sucked and transported by the transport system 10F.

[0154] Sixth Embodiment Next, a vacuum generator 1G according to a sixth embodiment will be described with reference to FIGS. 46 to 54. FIG. 46 is a perspective view showing an example of a transport system according to the sixth embodiment. FIG. 47 is a side view of a vacuum generator to which the expansion member shown in FIG. 46 is attached. FIG. 48 is a front view of a vacuum generator to which the expansion member shown in FIG. 46 is attached. FIG. 49 is a top view of a vacuum generator to which the expansion member shown in FIG. 46 is attached. FIG. 50 is a bottom view of a vacuum generator to which the expansion member shown in FIG. 46 is attached. FIG. 51 is a perspective view showing an example of the expansion member shown in FIG. 46. FIG. 52 is an exploded perspective view of an example of the expansion member shown in FIG. 46. FIG. 53 is a cross-sectional view taken along the line J-J in FIG. 49. FIG. 54 is a cross-sectional view taken along the line K-K in FIG. 48. Note that the upper part of the vacuum generator 1G, including the opposing portion 21a, is not shown in FIG. 53.

[0155] In a transfer system 10G according to the sixth embodiment, a plurality of, for example, four, first mounting members 5D are connected to a main body 3D of a vacuum generating device 1G. The main body 3D and the four first mounting members 5D are connected via expansion members 400. In the sixth embodiment, the main body 3D and the expansion members 400 are also joined by four bolts 431 shown in FIGS. 50 and 54 .

[0156] The expansion member 400 has a connection part 419 that connects to the second opening 31H2 of the main body 3D, and four ventilation paths 411 to 414 that extend radially from the connection part 419. The ends of the ventilation paths 411 and 414 are closed by, for example, closing plugs 491 and 494 shown in Figure 52. The same applies to the ventilation paths 412 and 413.

[0157] As shown in Fig. 52, suction pads 6 are connected to the ends of the air passages 411 to 414 via first attachment member 5D. In this configuration, as shown by the arrows in Figs. 53 and 54, air is sucked from the suction pad 6 so as to pass through the air passages 411 to 414 and connecting portion 419. When the four suction pads 6 need to be distinguished from one another, they may be referred to as suction pads 601 to 604, respectively.

[0158] 52, an engagement portion 321 is formed in the ventilation passages 411 to 414. The engagement portion 321 and the engagement groove 51B of the first mounting member 5D constitute a first detachable portion AT1B.

[0159] In the vacuum generator 1G according to the sixth embodiment, a first filter 35D is also disposed on the first mounting member 5D. The first filter 35D is pressed by a fixing device 38D. As described above, the vacuum generator 1G according to the sixth embodiment further includes an extension member 400 that connects the second opening 31H2 of the main body 3D to the plurality of first mounting members 5D. This configuration can prevent foreign matter from entering each suction pad 6.

[0160] Furthermore, an internal space 55D and an engagement groove 51B may also be formed in the connecting portion 419, and the first filter 35D and the fixing device 38D may be disposed in the internal space 55D. With this configuration, the air passes through the first filter 35D both before and after passing through each of the air passages 411 to 414, thereby further preventing the intrusion of foreign matter.

[0161] [Seventh Embodiment] As shown in Fig. 55, the first mounting member 5H may be attached to the main body 3H with a screw 59. Fig. 55 is an exploded perspective view of a vacuum generation device according to the seventh embodiment. As shown in Fig. 55, in the seventh embodiment, a screw groove 326 is formed in the branch member 32H of the main body 3H, and a screw hole 526 is formed in the first mounting member 5H at a position corresponding to the screw groove 326. In this case, as shown by the dashed line in Fig. 55, the screw 59 is threaded into the screw hole 526 and the screw groove 326, thereby fixing the first mounting member 5H to the branch member 32H of the main body 3H.

[0162] As shown in FIG. 55, an O-ring 36H may be disposed on the mating surface 325 between the branching member 32H and the first mounting member 5H.

[0163] Furthermore, the configuration for fixing the filter 35D shown in Figure 32 to the first mounting member 5D is not limited to using the fixing device 38H shown in Figure 32, but may also use screws, magnets, press fitting, snap fitting, tape fastening, etc.

[0164] In the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the above-described embodiments, each component of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G is driven, stopped, etc., based on commands transmitted from the external device 8 or another external device. However, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the present embodiments are not limited to this. For example, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G may include a control unit that comprehensively controls each component of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G, and the control units of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G may drive, stop, etc., each component of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G based on commands from the external device 8.

[0165] Furthermore, the vacuum generator 1 according to the first embodiment has been described as including a vacuum pump 7, two dust collecting members 5, and a suction pad 6 on one main body 3. The vacuum generators 1A and 1B according to the second and third embodiments have been described as including a vacuum pump 7, one dust collecting member 5, and a suction pad 6 on one main body 3. However, the vacuum generators 1, 1A, and 1B according to the present embodiments are not limited to this. For example, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the present embodiments may include three or more vacuum pumps 7, three or more dust collecting members 5, 5B, and a suction pad 6 on one main body 3. For example, the main body 3 may be rectangular in plan view, and a vacuum pump 7, a dust collecting member 5, 5B, and a suction pad 6 may be provided at each of the four corners of the main body 3. Furthermore, for example, the second mounting member 5E and a second suction pad 6E according to a modified example may also be connected to the vacuum generator 1 according to the first embodiment.

[0166] Furthermore, in the vacuum generator 1 according to the first embodiment, a wafer storage pod is described as an object to be sucked by the suction pad 6, and in the vacuum generator 1A according to the second embodiment, a cardboard box is described as an object to be sucked by the suction pad 6. However, the objects to be sucked by the suction pads 6, 6E of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the present embodiments are not limited to these. For example, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G can suck any object that can be tightly attached to the suction pads 6, 6E, such as a bag, a liquid container, or a flexible container.

[0167] Furthermore, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the above-described embodiments have been described as using the suction pads 6 and 6E to suction items such as wafer storage pods and cardboard boxes. However, the uses of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G according to the present embodiments are not limited to this. For example, the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G may be placed inside a refrigerator to create a vacuum inside the refrigerator, thereby extending the shelf life of food and other items.

[0168] The above has been a description of the vacuum generators 1, 1A, 1B, 1D, 1E, 1F, and 1G and the vacuum pump 7 according to the present invention, but the present invention is not limited to these embodiments, and various modifications are possible without departing from the spirit of the present invention. The present invention also includes configurations in which the components of the above-described embodiments are appropriately combined. Such modifications without departing from the spirit of the present invention are also included within the technical scope of the present invention, and this will be clear to those skilled in the art from the claims.

[0169] As explained in detail through the embodiments, the detailed description of the invention also describes inventions relating to a vacuum generating device and a vacuum pump, which are appended below.

[0170] a vacuum generating device comprising: a vacuum pump having a detachable part; a main body to which the vacuum pump is detachable by the detachable part; and a dust collecting member attached to the main body, wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the dust collecting member side; a suction path communicating between the first opening and the second opening; a check valve provided in the suction path to prevent backflow of gas caused by the vacuum pump from the second opening to the first opening; an electromagnetic valve provided in a branch path communicating with the suction path, the electromagnetic valve being switchable between an open state that communicates the suction path with the outside and a closed state that prevents communication between the suction path and the outside in response to a command from an external device; and a first filter covering the second opening, wherein the dust collecting member is detachably provided with respect to the main body and has an internal space capable of accommodating the first filter.

[0171] [Supplementary Note 2] The vacuum generating device according to Supplementary Note 1, wherein the diameter of the first filter is larger than the diameter of the suction path.

[0172] [Supplementary Note 3] The vacuum generating device according to Supplementary Note 1 or 2, wherein the vacuum pump has a suction port covered with a second filter.

[0173] [Supplementary Note 4] The vacuum generating device according to Supplementary Note 1 or 2, further comprising: a first branched path branched from the suction path and provided with the electromagnetic valve; and a third filter arranged in the first branched path upstream of the electromagnetic valve.

[0174] [Supplementary Note 5] The vacuum generating device according to Supplementary Note 1 or 2, further comprising: a second branched path branched from the suction path and provided with a pressure sensor; and a fourth filter arranged in the second branched path upstream of the pressure sensor.

[0175] [Supplementary Note 6] The vacuum generating device according to Supplementary Note 1 or 2, wherein the detachable portion of the vacuum pump is configured by an elastically deformable engaging claw and an engaging portion that can engage with the engaging claw.

[0176] [Supplementary Note 7] The vacuum generating device according to Supplementary Note 1 or 2, wherein the dust collecting member is of a screw type that can be attached to the main body when rotated in one circumferential direction and can be detached from the main body when rotated in the other circumferential direction.

[0177] [Supplementary Note 8] The vacuum generating device according to Supplementary Note 1 or 2, further comprising a suction pad that is indirectly or directly attached to the main body via the dust collecting member and that can suction an article by reducing pressure caused by the vacuum pump.

[0178] [Supplementary Note 9] A vacuum pump that generates a vacuum in a suction path formed in a main body, comprising: an adapter located between the main body and the vacuum pump and connecting the main body and the vacuum pump; and a filter located between the vacuum pump and the adapter and disposed adjacent to a suction port of the vacuum pump, wherein the vacuum pump is detachably attached to the main body by a detachable part constituted by an elastically deformable engaging claw and an engaging part that can engage with the engaging claw.

[0179] [Supplementary Note 10] The vacuum pump according to Supplementary Note 9, wherein the vacuum pump is electrically connected to the main body by an electrical connection portion formed of a plurality of first contacts having electrical conductivity and a plurality of second contacts having elastically deformable electrical conductivity.

[0180] [Supplementary Note 11] The vacuum pump according to Supplementary Note 10, wherein the first contact has a plate-shaped portion, and the second contact has a curved portion, the curved portion being elastically deformable.

[0181] [Supplementary Note 12] The vacuum pump according to any one of Supplementary Notes 9 to 11, further comprising: a cylindrical pump body that is closed at an upper portion and forms a first internal space; and a bottom plate that closes the first internal space at a lower portion of the pump body, wherein the bottom plate has a suction port in the center for inserting and removing the adapter.

[0182] [Supplementary Note 13] A vacuum generating device comprising: a vacuum pump; a main body; a first mounting member attached to the main body; and a first filter; wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the first mounting member side; and a suction path communicating between the first opening and the second opening; and the first mounting member has an internal space capable of accommodating the first filter.

[0183] [Appendix 14] A vacuum generating device as described in Appendix 13, comprising: a first suction pad capable of suctioning an article by reducing the pressure generated by the vacuum pump; a first filter; and a fixing device for fixing the first filter, wherein the first mounting member to which the first suction pad is connected is indirectly or directly and detachably attached to the main body, and the first filter is sandwiched between the fixing device and the first mounting member in the direction in which the suction path extends.

[0184] [Supplementary Note 15] A vacuum pump, a main body, a first attachment member or a second attachment member attached to the main body, a first suction pad or a second suction pad capable of suctioning an article by reducing pressure by the vacuum pump, a first filter, and a fixture for fixing the first filter, wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the first attachment member side; and a suction path communicating the first opening and the second opening, wherein the first suction pad comprises a first connecting portion attached to the first attachment member, the second suction pad comprises a second connecting portion attached to the second attachment member, the first attachment member and the second attachment member comprise third connecting portions attached to the main body, the third connecting portion of the first attachment member and the third connecting portion of the second attachment member have substantially the same shape, and the first connecting portion and the second connecting portion have mutually different shapes, A vacuum generating device in which at least one of the first mounting member to which a first suction pad is connected and the second mounting member to which the second suction pad is connected is indirectly or directly and detachably attached to the main body, the first mounting member and the second mounting member having an internal space capable of accommodating the first filter, and the first filter is sandwiched between the fixing device and the first mounting member or the second mounting member in the direction in which the suction path extends.

[0185] [Supplementary Note 16] The vacuum generating device according to any one of Supplementary Notes 13 to 15, wherein the diameter of the first filter is larger than the diameter of the suction path.

[0186] [Supplementary Note 17] The vacuum generating device according to any one of Supplementary Notes 13 to 15, wherein the vacuum pump has a suction port covered with a second filter.

[0187] [Supplementary Note 18] The vacuum generating device according to any one of Supplementary Notes 13 to 15, further comprising: a first branched path branched from the suction path and provided with an electromagnetic valve; and a third filter arranged in the first branched path upstream of the electromagnetic valve.

[0188] [Supplementary Note 19] The vacuum generating device according to any one of Supplementary Notes 13 to 15, further comprising: a second branched path branched from the suction path and provided with a pressure sensor; and a fourth filter arranged in the second branched path upstream of the pressure sensor.

[0189] [Supplementary Note 20] The vacuum generating device according to any one of Supplementary Notes 13 to 15, further comprising an elastic member, wherein a groove into which the elastic member is attached is formed on an outer peripheral surface of the second opening.

[0190] [Supplementary Note 21] The vacuum generating device according to any one of Supplementary Notes 13 to 15, further comprising an elastic member, the elastic member being disposed on a mating surface between the second opening and the first mounting member.

[0191] [Appendix 22] The vacuum generating device described in any one of Appendices 13 to 15, wherein the first mounting member is of a screw type that can be attached to the main body when rotated in one circumferential direction and can be detached from the main body when rotated in the other circumferential direction.

[0192] [Appendix 23] The vacuum generating device according to appendix 22, wherein radially protruding ribs are formed on the outer peripheral surface of the first mounting member.

[0193] [Appendix 24] The vacuum generating device described in any one of Appendices 13 to 15, further comprising an extension member that connects the second opening of the main body and the first mounting member and extends in the direction in which the suction path extends.

[0194] [Supplementary Note 25] The vacuum generating device according to any one of Supplementary Notes 13 to 15, further comprising an extension member that connects the second opening of the main body and the plurality of first attachment members.

[0195] [Supplementary Note 26] A vacuum generating device comprising: a vacuum pump having a detachable part; a main body to which the vacuum pump is detachable by the detachable part; and a dust collecting member, wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the dust collecting member side; a suction path connecting the first opening and the second opening; an electromagnetic valve provided in a branch path communicating with the suction path, the electromagnetic valve being switchable between an open state that connects the suction path with the outside and a closed state that prevents communication between the suction path and the outside in response to a command from an external device; and a first filter covering the second opening, wherein the dust collecting member has an internal space capable of accommodating the first filter.

[0196] [Supplementary Note 27] The vacuum generating device according to Supplementary Note 26, wherein the dust collecting member is fixed to the main body by screws.

[0197] 1, 1A, 1B, 1D, 1E, 1F, 1G Vacuum generating device, 10D, 10F, 10G Conveying system, 2 Housing, 3, 3D, 3H Main body, 31 Suction path, 31d1 First branch path, 31d2 Second branch path, 31H1 First opening, 31H2 Second opening, 3213 Third filter (Third filter), 3223 Fourth filter (Fourth filter), 33 Check valve, 34 Solenoid valve, 35 First filter (First filter), 4, 4D Terminal box, 5, 5B Dust collecting member, 5D, 5H First mounting member, 5E Second mounting member, 5s Internal space, 6, 6E Suction pad, 7 Vacuum pump, 7a Pump main body, 7b Bottom plate, 7E1 First contact, 7Ea Plate-shaped portion, 7E2 Second contact point, 7Eb Curved portion, 7H Suction port, 7N1 Engagement claw, 7N2 Engagement portion, 71 Adapter, 72 Second filter (second filter), 8 External device, 91 Power supply line, 200 Extension member, 400 Expansion member, 900 Six-axis articulated robot, AT1 First detachable portion (detachable portion), AT2 Second detachable portion (detachable portion), E Electrical connection portion, r11 Radial size of second filter 72 (radial size of second filter), r12, r22 Radial size of suction path 31, r21 Radial size of first filter 35 (radial size of first filter)

Claims

1. A vacuum generating device comprising: a vacuum pump having a detachable part; a main body to which the vacuum pump is detachable using the detachable part; and a dust collecting member attached to the main body, wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the dust collecting member side; a suction path connecting the first opening and the second opening; a check valve provided in the suction path to prevent backflow of gas from the second opening to the first opening caused by the vacuum pump; an electromagnetic valve provided in a branch path communicating with the suction path, which is switchable between an open state that connects the suction path to the outside and a closed state that prevents communication between the suction path and the outside in response to a command from an external device; and a first filter covering the second opening, wherein the dust collecting member is detachably provided on the main body and has an internal space capable of accommodating the first filter.

2. The vacuum generating device according to claim 1, wherein the diameter of the first filter is larger than the diameter of the suction path.

3. The vacuum generating device according to claim 1 or 2, wherein the suction port of the vacuum pump is covered with a second filter.

4. The vacuum generating device according to claim 1 or 2, further comprising: a first branched path branching from the suction path and having the electromagnetic valve provided therein; and a third filter arranged in the first branched path upstream of the electromagnetic valve.

5. The vacuum generating device according to claim 1 or 2, further comprising: a second branched path branching from the suction path and provided with a pressure sensor; and a fourth filter arranged in the second branched path upstream of the pressure sensor.

6. A vacuum generating device according to claim 1 or 2, wherein the detachable portion of the vacuum pump is constituted by an elastically deformable engaging claw and an engaging portion that can engage with the engaging claw.

7. A vacuum generating device as claimed in claim 1 or 2, wherein the dust collecting member is of a screw type that can be attached to the main body when rotated in one circumferential direction, and can be removed from the main body when rotated in the other circumferential direction.

8. The vacuum generating device according to claim 1 or 2, further comprising a suction pad that is indirectly or directly attached to the main body via the dust collecting member and that can suck up an object by reducing the pressure caused by the vacuum pump.

9. A vacuum pump that generates a vacuum in a suction path formed in a main body, comprising: an adapter located between the main body and the vacuum pump and connecting the main body to the vacuum pump; and a filter located between the vacuum pump and the adapter and arranged adjacent to the suction port of the vacuum pump, wherein the vacuum pump is detachably attached to the main body by a detachable part consisting of an elastically deformable engaging claw and an engaging part that can engage with the engaging claw.

10. The vacuum pump according to claim 9, wherein the vacuum pump is electrically connected to the main body by an electrical connection portion formed by a plurality of first contacts having electrical conductivity and a plurality of second contacts having elastically deformable electrical conductivity.

11. A vacuum pump according to claim 10, wherein the first contact has a plate-shaped portion, and the second contact has a curved portion, the curved portion being elastically deformable.

12. A vacuum pump according to any one of claims 9 to 11, further comprising: a cylindrical pump body that is closed at the top and forms a first internal space; and a bottom plate that closes off the first internal space at the bottom of the pump body, wherein the bottom plate has a suction port in the center for inserting and removing the adapter.

13. A vacuum generating device comprising: a vacuum pump; a main body; a first mounting member attached to the main body; and a first filter, wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the first mounting member side; and a suction path connecting the first opening and the second opening, and the first mounting member has an internal space capable of accommodating the first filter.

14. A vacuum generating device as described in claim 13, comprising: a first suction pad capable of suctioning an object by reducing the pressure generated by the vacuum pump; a first filter; and a fixing device for fixing the first filter; wherein the first mounting member to which the first suction pad is connected is indirectly or directly and detachably attached to the main body; and the first filter is sandwiched between the fixing device and the first mounting member in the direction in which the suction path extends.

15. A vacuum pump comprising: a main body; a first or second mounting member attached to the main body; a first suction pad or a second suction pad capable of adsorbing an article by reducing pressure with the vacuum pump; a first filter; and a fixture for fixing the first filter; wherein the main body comprises: a first opening located on the vacuum pump side; a second opening located on the first mounting member side; and a suction path connecting the first opening and the second opening; the first suction pad comprises a first connecting portion attached to the first mounting member; the second suction pad comprises a second connecting portion attached to the second mounting member; the first mounting member and the second mounting member comprise third connecting portions attached to the main body; the third connecting portion of the first mounting member and the third connecting portion of the second mounting member have substantially the same shape; and the first connecting portion and the second connecting portion have mutually different shapes; A vacuum generating device in which at least one of the first mounting member to which a first suction pad is connected and the second mounting member to which the second suction pad is connected is indirectly or directly and detachably attached to the main body, the first mounting member and the second mounting member having an internal space capable of accommodating the first filter, and the first filter is sandwiched between the fixing device and the first mounting member or the second mounting member in the direction in which the suction path extends.

16. A vacuum generating device according to any one of claims 13 to 15, comprising an elastic member, and a groove in which the elastic member is attached is formed on the outer circumferential surface of the second opening.

17. A vacuum generating device according to any one of claims 13 to 15, further comprising an elastic member, the elastic member being disposed on the mating surface between the second opening and the first mounting member.

18. A vacuum generating device as described in any one of claims 13 to 15, wherein the first mounting member is of a screw type that can be attached to the main body when rotated in one circumferential direction, and can be removed from the main body when rotated in the other circumferential direction.

19. The vacuum generating device according to claim 18, wherein the first mounting member has radially protruding ribs formed on its outer circumferential surface.

20. A vacuum generating device as described in any one of claims 13 to 15, further comprising an extension member that connects the second opening of the main body and the first mounting member and extends in the direction in which the suction path extends.

21. A vacuum generating device according to any one of claims 13 to 15, further comprising an extension member connecting the second opening of the body and the plurality of first mounting members.

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