Mask frame and processing method using same

The metal mask frame with a support frame, mesh, and reinforcing bar stabilizes large-area metal masks during processing, addressing sagging and deformation issues to prevent processing errors and edge defects.

WO2025216424A1PCT designated stage Publication Date: 2025-10-16YESUNG PRECISION INC
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Patent Information

Application Number
PCT/KR2025/002244
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-04-11
Filing Date
2025-02-17
Publication Date
2025-10-16

AI Technical Summary

Technical Problem

Large-area metal masks used in organic light-emitting display manufacturing suffer from sagging and deformation during processing, leading to processing errors and edge shape defects due to the load when separated from the metal mask.

Method used

A metal mask frame with a support frame and a support mesh made of polymer fibers, reinforced by a reinforcing bar, stabilizes the metal mask during processing, preventing sagging and deformation.

Benefits of technology

Prevents sagging and deformation of the metal mask, minimizing processing errors and edge shape defects by supporting the mask during opening processing.

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Abstract

A metal mask frame according to the present invention may comprise: a support frame configured to support the outside of an object to be processed from the lower side thereof; and a support mesh provided to be coupled to the support frame and support the lower part of an area of the object to be processed, which is not supported by the support frame.
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Description

Mask frame and processing method using the same

[0001] The present invention relates to a mask frame and a processing method using the same.

[0002] Recently, flat panel displays are widely used as display devices for video displays.

[0003] Among these flat panel displays, the use of organic light-emitting diodes (OLEDs) is increasing. Organic light-emitting diodes (OLEDs) are self-luminous displays that utilize the electroluminescence phenomenon of organic materials. They utilize the principle that electrons and holes are injected from electrodes, and then light is emitted when they undergo an excited state and recombine.

[0004] Organic light-emitting display devices are manufactured by repeating the process of forming a thin film of organic or inorganic materials on a flexible substrate and then patterning them.

[0005] In the organic light-emitting display manufacturing process, a mask assembly is used to deposit organic or inorganic materials on a substrate.

[0006] The mask assembly includes a metal mask having aperture areas formed in a lattice structure on a metal sheet and a mask frame supporting the metal mask.

[0007] Metal masks can be divided into open metal masks (OMMs) in which aperture areas are formed in the size of cell areas corresponding to displays such as TVs, PCs, and smartphones, and fine metal masks (FMMs) in which fine aperture areas are formed to correspond to each pixel area within a cell area.

[0008] Because these metal masks are formed from thin metal sheets, it is not easy to form openings in the metal masks.

[0009] In particular, as display devices become larger in area, metal masks are also becoming larger in area, and these metal masks have the problem of sagging and deformation occurring during the processing.

[0010] In addition, there is a problem that the processing piece falls due to the load at the moment it is separated from the metal mask during the process of processing the opening, resulting in a defective edge shape.

[0011] Therefore, the development of technology to solve the problems that arise when manufacturing such large-area metal masks is required.

[0012] The present invention is an invention devised to solve the problems of the above-described prior art, and has the purpose of improving processing errors and edge shape defects caused by sagging and deformation of a metal mask that occur during processing of the metal mask.

[0013] The tasks of the present invention are not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art from the description below.

[0014] A metal mask frame according to the present invention may include a support frame configured to support the outer side of a lower portion of a workpiece, and a support mesh coupled to the support frame and provided to support the lower portion of a region of the workpiece that is not supported by the support frame.

[0015] Additionally, the support mesh can be formed by weaving polymer fibers.

[0016] Additionally, it may be coupled to the support frame and provided to support the support mesh at the bottom of the support mesh.

[0017] Additionally, the reinforcing bar may be a plate shape with a curved portion formed at the top.

[0018] Meanwhile, a mask processing method using a mask frame according to the present invention may include a step of positioning a mask as a processing object on the mask frame, a step of moving the mask frame to a processing position, a step of processing a mask area supported by the support mesh, and a step of moving and loading a processed mask.

[0019] The metal mask frame of the present invention for solving the above-mentioned problem is configured to support the front surface of the metal mask, thereby preventing sagging and deformation of the metal mask, thereby preventing errors occurring during metal mask processing.

[0020]

[0021] In addition, it has the effect of preventing edge shape defects caused by the dropping of the processed piece during metal mask opening processing.

[0022]

[0023] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0024] FIG. 1 is a drawing showing a metal mask frame according to one embodiment of the present invention.

[0025] FIG. 2 is a drawing showing a mask frame according to another embodiment of the present invention.

[0026] FIG. 3 is a drawing showing a processing method using a metal mask according to one embodiment of the present invention.

[0027] In this specification, when it is said that a component (or region, layer, portion, etc.) is “on,” “connected to,” or “coupled to” another component, it means that it can be directly disposed / connected / coupled to the other component, or a third component may be disposed between them.

[0028] Identical drawing numbers indicate identical components. Furthermore, in the drawings, the thicknesses, proportions, and dimensions of components are exaggerated for the purpose of effectively illustrating the technical content.

[0029] “And / or” includes any combination of one or more of the associated constructs that can be defined.

[0030] While terms such as "first" and "second" may be used to describe various components, these components should not be limited by these terms. These terms are used solely to distinguish one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a "second component," and similarly, a second component may also be referred to as a "first component." Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0031] Additionally, terms such as "below," "lower," "above," and "upper" are used to describe the relationships between components depicted in the drawings. These terms are relative concepts and are described based on the directions indicated in the drawings.

[0032] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. Furthermore, terms defined in commonly used dictionaries should be interpreted to have a meaning consistent with their meaning in the relevant technical context, and unless interpreted in an idealized or overly formal sense, they are explicitly defined herein.

[0033] Terms such as "include" or "have" should be understood to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0034]

[0035] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0036]

[0037] mask frame

[0038] FIG. 1 is a drawing showing a mask and a mask frame supporting the mask according to the present invention.

[0039]

[0040] As illustrated in FIG. 1, the mask frame (100) may include a support frame (110) and a support mesh (120).

[0041] The support frame (110) may be formed in a square frame shape with a perforated center, and may be configured to support the outer edge of the mask during mask processing.

[0042] There is no particular limitation on the material of the support frame (110), and any material such as metal or composite material can be used as long as it has the rigidity to support the mask and is not easily deformed by heat.

[0043]

[0044] Meanwhile, a support mesh (120) can be attached to the support frame (110).

[0045] As shown in Fig. 1 (a), the support mesh (120) can be fixed in a form attached to the upper surface of the support frame (110).

[0046] The support mesh (120) may be attached to the support frame (110) using an adhesive, adhesive tape, etc., or may be fixed using a mechanical fixing device such as a nail or stapler.

[0047] Meanwhile, as shown in Fig. 1 (b), the support mesh (120) may be combined in a form in which it is sandwiched between an upper support frame (110-1) and a lower support frame (110-2) consisting of two upper and lower parts.

[0048] At this time, the upper support frame (110-1) may be formed in a thin plate shape to minimize the height difference between the support mesh (120) and the upper support frame (110-1).

[0049]

[0050] The above support mesh (120) can be formed by weaving polymer fibers horizontally and vertically, and polyester can preferably be used.

[0051] The above support mesh (120) serves to support the center of the mask whose outer end is supported by the support frame (110), thereby preventing the center of the large-area mask from sagging.

[0052]

[0053] The support mesh (120) is configured to support a large-area mask together with the support frame (110), and can stably support the mask during the process of processing the metal mask using a laser, water jet laser, etc.

[0054]

[0055] Laser processing is a processing method that utilizes the phenomenon in which the energy level of atoms that absorb laser light becomes excited, causing resonant vibration and rapid heat conduction.

[0056] The wavelength of the laser varies depending on the processing purpose and target, and the laser used to process the metal mask has the advantage of not damaging the support mesh (120) made of polymer.

[0057] This is because the support mesh made of polymer does not react significantly to the wavelength of the processing laser, and at the same time, the mesh is made of very thin fibers woven together, so the time it takes for the laser to pass through the fibers that make up the mesh during processing is very short, so no damage occurs.

[0058]

[0059] Accordingly, even if the opening of the metal mask is processed with a laser, the lower support mesh (120) is not damaged and the metal mask can be stably supported during the processing.

[0060] In addition, if the processing piece falls off the mask during the opening processing, burrs may be generated in the processing section of the mask as the processing piece ultimately falls down due to its own weight, resulting in processing defects.

[0061] In the present invention, since the processed piece is supported by the support mesh (120), there is an advantage in that defects due to the processing piece falling off are minimized.

[0062] The diameter, weaving pattern, and mesh density of the polymer fibers constituting the above support mesh (120) may vary depending on the size of the mask to be processed and the shape of the processing portion.

[0063]

[0064] Meanwhile, as the mask becomes larger in area, the support frame (110) may be warped or deformed, and during the processing, the polymer may be stretched due to a rise in temperature, which may result in the support mesh (120) not being able to sufficiently support the mask.

[0065] To prevent this, the support frame (110) may be additionally provided with a reinforcing bar (130).

[0066]

[0067] As illustrated in FIG. 2, the reinforcing member (130) may be configured to connect opposing frames of the supporting frame (110) within the supporting frame (110).

[0068] At this time, the reinforcing bar (130) may be formed in a long plate shape along the vertical direction of the support frame (110) and configured to support the support mesh (120) at the bottom of the support mesh (120).

[0069] Meanwhile, the upper part of the reinforcing bar (130) can be formed into a wave shape to minimize contact with the mask during processing.

[0070] The above waveform can be formed into various shapes, such as a triangle, and any shape is possible as long as it is in point contact with the mask, which is the workpiece.

[0071] The above support mesh (120) supports the center of a large-area mask to prevent sagging, but if the area of ​​the mask is large and the support mesh (120) is tensioned by heat during the processing, the support capacity of the support mesh (120) may decrease, causing some sagging of the mask.

[0072] The above reinforcing bar (130) can support the support mesh (120) from below to prevent the mask from sagging as described above.

[0073] In addition, the reinforcing bar (130) can be prevented from being deformed by interconnecting the frames.

[0074] The above reinforcement (130) may be made of a polymer such as plastic, wood, or other materials, but there are no special restrictions on the material.

[0075] Additionally, it goes without saying that the number of the above-mentioned reinforcement bars (130) may vary depending on the size of the support frame (110).

[0076]

[0077] Processing method using a mask frame

[0078] Using Figure 3, a mask processing method according to the present invention will be examined.

[0079] As shown in FIGS. 3(a) and 3(b), a mask (200) is positioned on the upper surface of the mask frame (100) of the present invention.

[0080] The outer side of the above mask (200) may be supported by the support frame (110) of the mask frame (100), and the inner side may be supported by the support mesh (120).

[0081] When the reinforcing bar (130) is installed, the inner side of the mask (200) can be supported by the support mesh (120) and the reinforcing bar (130) supporting the support mesh (120).

[0082] Thereafter, as shown in Fig. 3(c), a processing device (300) is positioned on top of the mask (200).

[0083] The mask frame (100) may be moved for processing or the processing device (300) may be moved.

[0084] Next, as shown in Fig. 3(d), an opening is formed in the mask (200) using a processing device (300).

[0085] At this time, since the processed piece (210) that occurs is not removed by the support mesh (120), edge defects occurring on the cut surface of the mask (200) and the processed part (210) can be prevented.

[0086]

[0087] As described above, preferred embodiments of the present invention have been described. It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms, in addition to the embodiments described above, without departing from the spirit or scope thereof. Therefore, the above-described embodiments should be considered illustrative rather than restrictive, and accordingly, the present invention is not limited to the above description, but may be modified within the scope of the appended claims and their equivalents.

[0088]

[0089] [Explanation of symbols]

[0090] 100: Mask frame 110: Support frame

[0091] 120: Support mesh 130: Reinforcement bar

Claims

1. A support frame configured to support the outer side of the lower portion of the workpiece; and A support mesh is provided to support the lower part of the workpiece area that is not supported by the support frame, and is connected to the support frame; The above support mesh is a mask frame made by weaving polymer fibers.

2. In paragraph 1, A mask frame including a reinforcing member coupled to the support frame and provided to support the support mesh at the lower portion of the support mesh.

3. In paragraph 2, The above reinforcement is a mask frame in the shape of a plate with a curved portion formed at the top.

4. In a mask processing method using a mask frame of any one of clauses 1 to 3, A step of positioning a mask, which is a workpiece, on the above mask frame; A step of moving the above mask frame to a processing position; A step of processing a mask area supported by the above support mesh; and A step of moving and loading a processed mask; Mask processing method.

Citation Information

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