Gas analysis device, light emission-inducing gas generation device, and analysis method

Abstract

The present invention suppresses the generation of components other than a light emission-inducing gas. The gas analysis device (100) comprises a light emission-inducing gas generation device (9) that generates a light emission-inducing gas that interacts with a gas to be analyzed to generate reaction light. The light emission-inducing gas generation device (9) has a housing (91) and a light source (92). The housing (91) has an internal space (SP) into which a raw material gas serving as a raw material for the light emission-inducing gas is introduced. The light source (92) is provided in the internal space (SP) and emits light for generating a light emission-inducing gas from the raw material gas. At least one of electric wires of the light source (92) is disposed in the internal space SP of the housing (91). The electrical wires disposed in the internal space (SP) of the housing (91) are electrically connected at a portion facing the internal space of the housing (91).

Description

Gas analyzer, luminescence-inducing gas generator, and analysis method

[0001] The present invention relates to a gas analyzer that analyzes an analyte gas using a chemiluminescence method, a luminescence-inducing gas generator that generates a luminescence-inducing gas that interacts with the analyte gas to generate reaction light, and an analytical method that analyzes an analyte gas using a chemiluminescence method.

[0002] Conventionally, there has been known a gas analyzer that uses a chemical luminescence analysis method (CLA) to analyze an analyte gas contained in a sample gas (e.g., to measure the concentration of the gas). In this analyzer, when the sample gas and a luminescence-inducing gas are introduced into a reaction section, reaction light generated by the interaction between the analyte gas and the luminescence-inducing gas is detected, thereby analyzing the analyte gas (see, for example, Patent Document 1).

[0003] A gas analyzer that analyzes a target gas using chemiluminescence includes a device that generates the luminescence-inducing gas from a predetermined source gas (referred to as a luminescence-inducing gas generator). The luminescence-inducing gas generator generates the luminescence-inducing gas from the source gas, for example, by generating an electric discharge in a space into which the source gas is introduced.

[0004] Japanese Patent Application Publication No. 11-44646

[0005] In the method of generating a light emission inducing gas by discharging in a raw material gas, there is a possibility that components other than the light emission inducing gas may be generated. For example, if the raw material gas is air (nitrogen (N ２ ), oxygen (O ２ ) is used, the luminescence-inducing gas ozone (O ３ In addition to the emission-inducing gas, various nitrogen oxides (NOx) may be generated. These components other than the emission-inducing gas affect the analysis results of the target gas.

[0006] An object of the present invention is to suppress the generation of components other than the luminescence-inducing gas in a gas analyzer that analyzes a target gas by chemiluminescence.

[0007] Below, several aspects will be described as means for solving the problems. These aspects can be combined as desired as necessary. A gas analyzer according to one aspect of the present invention is a gas analyzer that analyzes a gas to be analyzed by chemiluminescence. The gas analyzer includes a luminescence-inducing gas generator. The luminescence-inducing gas generator generates a luminescence-inducing gas that interacts with the gas to be analyzed to generate reaction light. The luminescence-inducing gas generator has a housing and a light source. The housing has an internal space into which a source gas that is a raw material for the luminescence-inducing gas is introduced. The light source is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the source gas.

[0008] In the above gas analyzer, the luminescence-inducing gas generator generates the luminescence-inducing gas by irradiating the raw material gas with light. By generating the luminescence-inducing gas by irradiating the raw material gas with light, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the above gas analyzer can analyze the target gas more accurately.

[0009] In the gas analyzer, the light source of the light emission inducing gas generator is provided in the internal space of the housing of the light emission inducing gas generator, and at least one of the electrical wires of the light source is arranged in the internal space of the housing. Also, the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0010] In this way, by providing the light source of the luminescence-inducing gas generator in the internal space of the housing of the luminescence-inducing gas generator, the luminescence-inducing gas generator can generate a luminescence-inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence-inducing gas to be generated in the internal space of the housing, and therefore the luminescence-inducing gas will not leak out of the luminescence-inducing gas generator and diffuse.

[0011] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0012] The light emission inducing gas generator of the gas analyzer may have an insulating part that insulates the housing from other electrical wiring of the light source, thereby ensuring insulation between the housing and other electrical wiring of the light source connected to a predetermined potential.

[0013] In the light emission-inducing gas generator for the gas analyzer, the insulating section may have an inorganic substance layer and a leak prevention layer. The inorganic substance layer may be provided at a connection portion between the light source and the outer wall surface of the housing of the light emission-inducing gas generator. The leak prevention layer may be provided on the inorganic substance layer to prevent gas leakage from the connection portion between the light source and the outer wall surface of the housing. This ensures insulation between the light source and the housing, and the inorganic substance layer makes the leak prevention layer less likely to come into contact with light irradiated from the light source and gas generated from raw material gases such as the light emission-inducing gas, thereby suppressing deterioration of the leak prevention layer.

[0014] The luminescence-inducing gas generator of the gas analyzer may further include an inlet member and an outlet member. The inlet member introduces the source gas into the internal space of the housing. The outlet member discharges the luminescence-inducing gas from the internal space of the housing. In this case, the inlet member and the outlet member may be provided at positions on the housing that are shaded by light from the light source. This makes it possible to prevent light from the light source from being irradiated onto the inlet member and the outlet member. As a result, it is possible to prevent the inlet member and the outlet member from being deteriorated by light from the light source.

[0015] In the luminescence-inducing gas generator for the gas analyzer described above, the inlet member may be provided at a first corner of the housing, and the outlet member may be provided at a second corner diagonally opposite the first corner of the housing, whereby the source gas introduced through the inlet member can easily pass through the light source while moving toward the outlet member, thereby enabling efficient generation of the luminescence-inducing gas in the internal space.

[0016] In the luminescence inducing gas generator for the gas analyzer described above, the housing may include a first housing and a second housing. The first housing has an internal space. The second housing is separate from the first housing. A light source is attached to the second housing. In this case, a seal member may be disposed between the first housing and the second housing, and the seal member may be disposed in a groove provided in the first housing or the second housing. This makes it difficult for the seal member to come into contact with light from the light source and the luminescence inducing gas, thereby suppressing deterioration of the seal member.

[0017] In the above-mentioned emission-inducing gas generator for the gas analyzer, the light source may irradiate light at a predetermined cycle. This reduces the power supplied to the light source. Also, the temperature around the light source is prevented from becoming too high, allowing the emission-inducing gas to be generated efficiently.

[0018] In the emission-inducing gas generator for the gas analyzer described above, the light source may be an excimer lamp. This allows the emission-inducing gas to be efficiently generated from the raw material gas. Furthermore, by providing the light source (excimer lamp) in the internal space of the housing, it is possible to generate emission-inducing gas at a stable concentration and supply it to the gas analyzer.

[0019] In the gas analyzer, the gas to be analyzed may be nitrogen oxides. The gas analyzer is capable of analyzing nitrogen oxides.

[0020] A luminescence-inducing gas generator according to another aspect of the present invention is used in a gas analyzer that analyzes a target gas by chemiluminescence. The luminescence-inducing gas generator includes a housing and a light source. The housing has an internal space into which a source gas serving as a source of a luminescence-inducing gas that interacts with the target gas to generate reaction light is introduced. The light source is provided in the internal space and irradiates light that generates a luminescence-inducing gas from the source gas. In the above-mentioned luminescence-inducing gas generator, at least one of the electrical wirings of the light source is arranged in the internal space of the housing. Furthermore, the electrical wiring arranged in the internal space of the housing is electrically connected at a portion facing the internal space of the housing.

[0021] The above-mentioned luminescence-inducing gas generator generates luminescence-inducing gas used in a gas analyzer by irradiating light onto a raw material gas. By generating luminescence-inducing gas by irradiating light onto a raw material gas, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the gas analyzer can analyze the target gas more accurately.

[0022] In the above-mentioned luminescence inducing gas generator, the light source is provided in the internal space of the housing of the luminescence inducing gas generator, at least one of the electrical wires of the light source is arranged in the internal space of the housing, and the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0023] In this way, by providing the light source of the luminescence-inducing gas generator in the internal space of the housing of the luminescence-inducing gas generator, the luminescence-inducing gas generator can generate a luminescence-inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence-inducing gas to be generated in the internal space of the housing, and therefore the luminescence-inducing gas will not leak out of the luminescence-inducing gas generator and diffuse.

[0024] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0025] A gas analyzer according to yet another aspect of the present invention analyzes nitrogen oxides by a chemiluminescence method. The gas analyzer includes a luminescence-inducing gas generator. The luminescence-inducing gas generator generates ozone that interacts with nitrogen oxides to generate reaction light. The luminescence-inducing gas generator has an excimer light source that generates ozone by irradiating a source gas containing oxygen with ultraviolet light.

[0026] In the gas analyzer, the light-emission-inducing gas generator irradiates a raw material gas containing oxygen with ultraviolet light from an excimer light source to generate ozone, which interacts with nitrogen oxides to generate reaction light. This makes it possible to suppress the generation of components other than ozone that may affect the analysis results of nitrogen oxides. In this way, by suppressing the generation of components that may affect the analysis results of nitrogen oxides, the gas analyzer can analyze nitrogen oxides more accurately.

[0027] An analytical method according to a further aspect of the present invention is a method for analyzing an analyte gas. The analytical method comprises the following steps: ❍ A step of generating an analyte gas by an analyte gas generating device; ❍ A step of introducing an analyte gas and an analyte gas into a predetermined space; and ❍ A step of analyzing the analyte gas based on reaction light generated by interaction between the analyte gas and the analyte gas in the predetermined space.

[0028] In the above analysis method, the luminescence-inducing gas generator includes a housing and a light source. The housing has an internal space into which a source gas serving as a source of the luminescence-inducing gas is introduced. The light source is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the source gas. In this luminescence-inducing gas generator, at least one of the electrical wirings of the light source is provided in the internal space of the housing. Furthermore, the electrical wiring provided in the internal space of the housing is electrically connected at a portion facing the internal space of the housing.

[0029] In the above-mentioned analysis method, the luminescence-inducing gas generator generates the luminescence-inducing gas by irradiating the raw material gas with light. By generating the luminescence-inducing gas by irradiating the raw material gas with light, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the above-mentioned analysis method can analyze the target gas more accurately.

[0030] In the above-mentioned analysis method, the light source of the luminescence-inducing gas generator is provided in the internal space of the housing of the luminescence-inducing gas generator, and at least one of the electrical wires of the light source is arranged in the internal space of the housing. Also, the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0031] In this way, by providing the light source of the luminescence-inducing gas generator in the internal space of the housing of the luminescence-inducing gas generator, the luminescence-inducing gas generator can generate a luminescence-inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence-inducing gas to be generated in the internal space of the housing, and therefore the luminescence-inducing gas will not leak out of the luminescence-inducing gas generator and diffuse.

[0032] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0033] An analytical method according to yet another aspect of the present invention is a method for analyzing nitrogen oxides. The analytical method comprises the following steps: generating ozone; introducing nitrogen oxides and ozone into a predetermined space; and analyzing nitrogen oxides based on reaction light generated by the interaction between the nitrogen oxides and ozone in the predetermined space.

[0034] The step of generating ozone in the above-described analysis method includes a step of generating ozone by irradiating a source gas containing oxygen with ultraviolet light output from an excimer light source.

[0035] In the above analytical method, ultraviolet light from an excimer light source is irradiated onto a source gas containing oxygen, thereby generating ozone, which interacts with nitrogen oxides to generate reaction light. This makes it possible to suppress the generation of components other than ozone that may affect the analysis results of nitrogen oxides. In this way, by suppressing the generation of components that may affect the analysis results of nitrogen oxides, the above analytical method allows for more accurate analysis of nitrogen oxides.

[0036] When analyzing a target gas using chemiluminescence, a luminescence-inducing gas that interacts with the target gas to generate reaction light is generated by irradiating the raw material gas with light, which makes it less likely that components other than the luminescence-inducing gas that could affect the analysis results of the target gas are generated, allowing for more accurate analysis of the target gas.

[0037] By providing the light source of the luminescence-inducing gas generator in the internal space of the housing, the luminescence-inducing gas generator can generate a luminescence-inducing gas with a stable concentration and supply it to a gas analyzer. Furthermore, when at least one of the electrical wirings of the light source is provided in the internal space of the housing, by electrically connecting the electrical wirings provided in the internal space of the housing in the internal space of the housing, the luminescence-inducing gas generator can minimize the use of a sealing member and minimize the occurrence of problems that may arise from providing a sealing member. As a result, luminescence-inducing gas free of impurities can be stably generated.

[0038] The present invention relates to a gas analyzer, ...

[0039] 1. First Embodiment (1) Configuration of Gas Analyzer The configuration of a gas analyzer 100 will be described with reference to FIG. 1. FIG. 1 is a diagram showing the configuration of the gas analyzer. The gas analyzer 100 shown in FIG. 1 is a device that analyzes a target gas using chemical analysis (CLA). The target gas is, for example, a nitrogen compound gas (such as nitrogen oxide (NOx)). Such target gas is contained, for example, in gas flowing in the atmosphere or a flue, or gas generated in various combustion processes. The above gas containing the target gas is called a sample gas. The gas analyzer 100 is, for example, a device for measuring the concentration of the target gas contained in the sample gas. The gas analyzer 100 includes a reaction unit 1, a light detection unit 3, and a control unit 5.

[0040] The reaction unit 1 is a component having an internal space into which a gas can be introduced. A first gas line L1 is connected to one end of the internal space, and a second gas line L2 is connected to the other end of the internal space. The reaction unit 1 may have any size and any shape depending on the intended use of the gas analyzer 100. The internal space of the reaction unit 1 may be, for example, a rectangular parallelepiped, cylindrical, or elliptical cylindrical shape.

[0041] The first gas line L1 connects the reaction unit 1 and the exhaust unit 7. The exhaust unit 7 exhausts the internal space of the reaction unit 1 via the first gas line L1. The exhaust unit 7 is, for example, a pump.

[0042] The second gas line L2 is connected to the luminescence-inducing gas generator 9 and the gas port b of the gas switching unit 11. The luminescence-inducing gas generator 9 generates a luminescence-inducing gas using the raw material gas introduced through the third gas line L3. The luminescence-inducing gas is a gas that interacts with the analysis target gas contained in the sample gas to generate reaction light. The luminescence-inducing gas generator 9 generates the luminescence-inducing gas by irradiating the raw material gas with light. More specifically, the luminescence-inducing gas generator 9 generates the luminescence-inducing gas by irradiating the raw material gas with oxygen (O ２ ) is irradiated with ultraviolet light to produce ozone (O ３ The raw material gas is, for example, air.

[0043] The gas switching unit 11 is, for example, a solenoid valve having gas ports a and b. The gas port a is connected to a fourth gas line L4 into which the sample gas is introduced. The gas port b is connected to a second gas line L2. The gas switching unit 11 alternately switches between a state in which gas is allowed to flow through the gas ports a and b and a state in which gas is not allowed to flow through the gas ports a and b in a predetermined cycle in accordance with a signal from the control unit 5. By this switching of the gas switching unit 11, the second gas line L2 alternately introduces a mixed gas of the sample gas and the luminescence-inducing gas and only the luminescence-inducing gas (background gas) into the internal space of the reaction unit 1 in a predetermined cycle.

[0044] In the gas analyzer 100, the internal space of the reaction unit 1 is evacuated by the exhaust unit 7, and the sample gas / luminescence-inducing gas is introduced from the second gas line L2 into the internal space of the reaction unit 1. The sample gas and luminescence-inducing gas introduced from the second gas line L2 interact with each other while traveling from one end to the other end of the internal space of the reaction unit 1, generating reaction light, which is then exhausted by the exhaust unit 7 to the first gas line L1.

[0045] The light detection unit 3 is provided near the reaction unit 1, detects light generated in the reaction unit 1, and outputs a light detection signal related to the detected light. The light detection unit 3 is, for example, a photodiode.

[0046] The control unit 5 is a computer system equipped with a CPU, storage devices (RAM, ROM, HDD, SSD, etc.), various interfaces, and a display. The control unit 5 processes information related to the control of the gas analyzer 100 and information related to the analysis of the target gas. Specifically, the control unit 5 analyzes the target gas contained in the sample gas based on the light detection signal output from the light detection unit 3. The control unit 5 calculates, for example, the concentration of the target gas contained in the sample gas.

[0047] The control unit 5 also processes information related to the control of the luminescence inducing gas generator 9. The control unit 5 processes information to switch, at a predetermined interval, between a state in which gas ports a and b of the gas switching unit 11 are not allowed to communicate with each other (only the luminescence inducing gas is introduced into the second gas line L2) and a state in which gas ports a and b are allowed to communicate with each other (a mixed gas of the sample gas and the luminescence inducing gas is introduced into the second gas line L2).

[0048] The control unit 5 has a drive unit 51 that drives the light source 92 of the light emission inducing gas generator 9. The drive unit 51 is, for example, a two-pole AC power supply circuit that can switch between outputting and stopping power at a predetermined cycle. The drive unit 51 is also capable of adjusting the ratio (duty ratio) of power output time to power stop time within one cycle of switching between outputting and stopping power.

[0049] The control unit 5 may implement part or all of the information processing related to the above analysis and control by executing a program stored in a storage device. Also, the control unit 5 may implement part or all of the information processing related to the above control, etc. by hardware.

[0050] (2) Light Emission Inducing Gas Generator Hereinafter, the detailed configuration of the light emission inducing gas generator 9 will be described with reference to Fig. 2 and Fig. 3. Fig. 2 is a perspective view of the light emission inducing gas generator 9. Fig. 3 is a cross-sectional view of the light emission inducing gas generator 9. The light emission inducing gas generator 9 has a housing 91 and a light source 92.

[0051] The housing 91 constitutes the main body of the light emission inducing gas generator 9. The housing 91 is separated into a first housing 91a and a second housing 91b. The first housing 91a is a cylindrical member having an internal space SP. A light source 92 is disposed in the internal space SP. A wiring attachment portion 911 is provided on an inner wall surface of the first housing 91a facing the internal space SP. As will be described later, a second terminal 922 ( FIG. 3 ) connected to a second electrical wiring 92e of the light source 92 is fixed to the wiring attachment portion 911.

[0052] The first housing 91a also has a wiring connection hole 912. The wiring connection hole 912 is for attaching one of the two poles of the drive unit 51 that drives the light source 92 to the first housing 91a. Specifically, the wiring connection hole 912 is a hole for screwing one pole of the drive unit 51. In this manner, the second electrical wiring 92e of the light source 92 is connected to one pole of the drive unit 51 that drives the light source 92 via the first housing 91a. In this configuration, the first housing 91a is made of a conductive metal to electrically connect the second electrical wiring 92e of the light source 92 to the drive unit 51. The first housing 91a can be made of aluminum, for example. By making the first housing 91a out of aluminum, heat dissipation from the light emission inducing gas generator 9 can also be performed efficiently.

[0053] The first housing 91a is connected to the earth potential of the gas analyzer 100. That is, the second electrical wiring 92e of the light source 92, the second electrode portion 92c of the light source 92 connected thereto (FIGS. 3 and 4), and one pole of the driving portion 51 are all at the earth potential.

[0054] A second housing 91b is fixed to a first end of the first housing 91a. A first seal member 914 is provided between the first housing 91a and the second housing 91b. The first seal member 914 functions as a gas seal between the first housing 91a and the second housing 91b. The first seal member 914 is an O-ring made of, for example, rubber, silicone, or resin. In this embodiment, the first seal member 914 is disposed in a first seal groove 915 provided at the first end of the first housing 91a.

[0055] This makes it difficult for the first seal member 914 to come into contact with the light (ultraviolet rays) from the light source 92 and the light emission inducing gas (ozone) generated in the internal space SP between the first housing 91a and the second housing 91b. As a result, it is possible to prevent substances that become impurities in the analysis of the target gas from being generated from the first seal member 914. Furthermore, by making it difficult for the first seal member 914 to come into contact with the light (ultraviolet rays) from the light source 92 and the light emission inducing gas (ozone) generated in the internal space SP, deterioration of the first seal member 914 is prevented, and gas leakage from between the first housing 91a and the second housing 91b can be prevented.

[0056] On the other hand, a lid portion 91c is fixed to the second end of the first housing 91a. The lid portion 91c is a member for closing the second end side of the first housing 91a. A second seal member 916 is provided between the first housing 91a and the lid portion 91c. The second seal member 916 functions as a gas seal between the first housing 91a and the lid portion 91c. The second seal member 916 is, for example, an O-ring made of rubber, silicone, resin, or the like. In this embodiment, the second seal member 916 is disposed in a second seal groove 917 provided at the second end of the first housing 91a.

[0057] This makes it difficult for the second seal member 916 to come into contact with the light from the light source 92 and the light emission inducing gas generated in the internal space SP between the first housing 91a and the lid portion 91c. As a result, it is possible to prevent substances that become impurities in the analysis of the target gas from being generated from the second seal member 916. Furthermore, by making it difficult for the second seal member 916 to come into contact with the light (ultraviolet rays) from the light source 92 and the light emission inducing gas (ozone) generated in the internal space SP, deterioration of the second seal member 916 is prevented, and gas leakage from between the first housing 91a and the lid portion 91c can be prevented.

[0058] The second housing 91b is fixed to a first end of the first housing 91a. A through hole O1 is provided in the center of the second housing 91b. The through hole O1 communicates with the internal space SP of the first housing 91a. A base end portion of the light source 92 is inserted into the through hole O1. The base end portion of the light source 92 is fixed to the second housing 91b at the end of the through hole O1 via a bushing 96.

[0059] A seal 93 is provided at a connection portion between the outer wall surface of the second housing 91b and the bush 96 so as to close the connection portion. The seal 93 is provided to prevent gas leakage between the bush 96 and the second housing 91b.

[0060] 3, the first electrical wiring 92d of the light source 92 is led out of the housing 91 through a through-hole O2 provided in an insulating bushing 96. Furthermore, a seal portion 93 made of an insulating material is disposed so as to fill the gap between the first electrical wiring 92d and the second housing 91b. Therefore, the seal portion 93 and the bushing 96 function as an insulating portion that insulates the first electrical wiring 92d of the light source 92 from the housing 91. This ensures insulation between the first electrical wiring 92d, which is connected to a predetermined potential, and the housing 91.

[0061] The seal portion 93 has an inorganic material layer 93a and a leak prevention layer 93b. The inorganic material layer 93a is a layer mainly composed of an inorganic material and provided at the connection portion between the second housing 91b and the bushing 96. The inorganic material layer 93a is provided so as to close the through-hole O1 of the second housing 91b and the through-hole O2 of the bushing 96. The inorganic material constituting the inorganic material layer 93a is, for example, alumina (Al ２ O ３ The inorganic substance layer 93 a can be formed, for example, by filling the connecting portion between the second housing 91 b and the bushing 96 with an alumina-based adhesive.

[0062] The leak prevention layer 93b is a layer of a sealing material such as silicone provided on the inorganic substance layer 93a. The leak prevention layer 93b prevents gas leakage from the connection between the outer wall surface of the second housing 91b and the bushing 96. The leak prevention layer 93b can be formed, for example, by applying a silicone adhesive onto the inorganic substance layer 93a and covering the inorganic substance layer 93a with the silicone adhesive.

[0063] In this way, it is preferable that the leak prevention layer 93b made of silicon or the like covers the inorganic substance layer 93a and becomes the outermost portion (portion exposed to the outside) of the sealing portion 93. As a result, even if the inorganic substance layer 93a made of an alumina-based adhesive (alumina particles) or the like has many gaps and has low gas leakage prevention capability, gas leakage from the connection portion can be more reliably prevented by covering the inorganic substance layer 93a with the leak prevention layer 93b having high gas leakage prevention capability.

[0064] In the seal portion 93 having the above configuration, the inorganic material layer 93a is provided directly at the connection portion between the second housing 91b and the bushing 96, and the leak prevention layer 93b is formed on the inorganic material layer 93a. In other words, the leak prevention layer 93b is not directly exposed to the connection portion. Therefore, the leak prevention layer 93b is less likely to come into contact with the light irradiated from the light source 92 and the gases generated from the source gases such as the light emission inducing gas. By being less likely to come into contact with the light irradiated from the light source 92 and the gases generated from the source gases such as the light emission inducing gas, it is possible to suppress the generation of substances that become impurities in the analysis of the target gas from the leak prevention layer 93b.

[0065] In addition, since the leak prevention layer 93b is less likely to come into contact with the light irradiated from the light source 92 and gases generated from raw material gases such as luminescence-inducing gas, deterioration of the leak prevention layer 93b is suppressed, thereby suppressing gas leakage from the connection portion between the second housing 91b and the bush 96.

[0066] Since the inorganic substance layer 93a is made of a chemically stable substance such as alumina, impurities are unlikely to be generated from the inorganic substance layer 93a and deterioration of the inorganic substance layer 93a is unlikely to occur even if the inorganic substance layer 93a is exposed to light irradiated from the light source 92 or gases generated from raw material gases such as a light emission inducing gas. Furthermore, since the inorganic substance layer 93a and the leak prevention layer 93b are insulators, insulation between the light source 92 (first electrical wiring 92d) and the housing 91 can be ensured.

[0067] The light source 92 emits light that generates a light-emission inducing gas from the raw material gas introduced into the internal space SP. Specifically, the light source 92 irradiates ultraviolet light onto the oxygen-containing raw material gas introduced into the internal space SP, thereby generating ozone, which is a light-emission inducing gas, from the oxygen contained in the raw material gas. The light source 92 is, for example, an excimer lamp. An excimer lamp can emit ultraviolet light with an optimum wavelength (for example, about 170 nm) for generating ozone from oxygen. Therefore, by using an excimer lamp as the light source 92, it is possible to efficiently generate ozone, which is a light-emission inducing gas, from oxygen, which is a raw material gas.

[0068] 1 to 3, the configuration of the light source 92 will be described. The light source 92 has a hollow member 92a, a first electrode portion 92b, a second electrode portion 92c, a first electrical wiring 92d, and a second electrical wiring 92e.

[0069] The hollow member 92a is disposed in the center of the internal space SP of the first housing 91a. The hollow member 92a is a hollow cylindrical member made of a dielectric material and has an internal space. The hollow member 92a is, for example, a hollow cylindrical member made of quartz glass. The internal space of the hollow member 92a is filled with a predetermined substance (for example, xenon). The substance filled in the internal space of the hollow member 92a can be changed as appropriate depending on the wavelength of the light generated by the light source 92.

[0070] The base end portion of the hollow member 92a is housed in a through-hole O1 provided in the second housing 91b. At the through-hole O1, the base end portion of the hollow member 92a is attached to the second housing 91b via an insulating bushing 96. That is, the hollow member 92a is attached to the second housing 91b via the insulating bushing 96. In this way, by disposing the light source 92 (hollow member 92a) in the internal space SP of the first housing 91a and inside the through-hole O1 of the second housing 91b and attaching the hollow member 92a to the second housing 91b via the insulating bushing 96, the hollow member 92a and the housing 91 can be electrically insulated from each other.

[0071] As will be described later, the hollow member 92a is provided with a first electrode portion 92b and a second electrode portion 92c, and a high voltage is applied between these electrodes. However, as described above, the hollow member 92a and the housing 91 are electrically insulated by the bushing 96, thereby ensuring insulation between the light source 92 and the housing 91.

[0072] The first electrode portion 92b is disposed in the internal space of the hollow member 92a with a predetermined distance between it and the inner wall of the hollow member 92a. The first electrode portion 92b is connected to one end of a first electrical wiring 92d. The other end of the first electrical wiring 92d is taken out to the outside through a through-hole O2 provided in the bushing 96. A first terminal 921 is provided at the other end of the first electrical wiring 92d. The other end of the first electrical wiring 92d is connected via the first terminal 921 to one of two poles of the drive unit 51 at which a predetermined potential is generated. In other words, the first electrode portion 92b is connected via the first electrical wiring 92d to the pole of the drive unit 51 at which a predetermined potential is generated.

[0073] The second electrode portion 92c is provided on the outer wall of the hollow member 92a. The second electrode portion 92c is connected to one end of a second electrical wiring 92e. The other end of the second electrical wiring 92e is connected to the pole of the two poles of the drive unit 51 that is at the earth potential (reference potential). A second terminal 922 is provided at the other end of the second electrical wiring 92e.

[0074] As described above, the hollow member 92a of the light source 92 is disposed in the internal space SP of the first housing 91a. Therefore, as shown in Fig. 3 , the second electrode 92c, the second electrical wiring 92e connected to the second electrode 92c, and the second terminal 922 connected to the second electrical wiring 92e are disposed in the internal space SP of the first housing 91a.

[0075] In the light emission inducing gas generator 9 of this embodiment, the second electrical wiring 92e is electrically connected to the first housing 91a via the second terminal 922 at a portion facing the internal space SP of the first housing 91a. Specifically, the second electrical wiring 92e is fixed to the second terminal 922, and the second terminal 922 is fixed to the wiring attachment portion 911, thereby electrically connecting the second electrical wiring 92e to the first housing 91a in the internal space SP of the first housing 91a. Furthermore, since the ground potential side pole of the driving unit 51 is fixed by the wiring connection hole 912 of the first housing 91a, the second electrical wiring 92e is connected to the ground potential side pole of the driving unit 51 via the first housing 91a. As a result, the second electrode portion 92c of the light source 92 is electrically connected to the ground potential side pole of the driving unit 51.

[0076] As described above, in the light-emission inducing gas generator 9, the second electric wiring 92e arranged in the internal space SP of the first housing 91a is electrically connected to the first housing 91a at a portion of the first housing 91a facing the internal space SP (i.e., the wiring attachment portion 911). Therefore, in the light-emission inducing gas generator 9, there is no need to extract the second electric wiring 92e from the internal space SP to the outside, and therefore there is no need to provide a hole in the housing 91 for extracting the second electric wiring 92e. That is, in the light-emission inducing gas generator 9, the number of holes provided in the housing 91 can be minimized. By minimizing the number of holes provided in the housing 91, the use of a sealing member can be minimized. As a result, the light-emission inducing gas generator 9 can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of a sealing member, and can stably generate a light-emission inducing gas that is free of impurities.

[0077] The method for electrically connecting the second electrical wiring 92e to the first housing 91a at the portion facing the internal space SP of the first housing 91a is not limited to the method using the second terminal 922 and the wiring attachment portion 911. For example, the second electrical wiring 92e can also be directly fixed to the portion of the first housing 91a facing the internal space SP (e.g., the wiring attachment portion 911, the inner wall of the first housing 91a, etc.) by screwing, welding, or other methods.

[0078] In the above-mentioned light source 92, by applying an AC voltage between the first electrode portion 92b and the second electrode portion 92c using the driving unit 51, a discharge is generated in the internal space of the hollow member 92a, and light having a wavelength corresponding to the type of substance filled in the internal space of the hollow member 92a can be generated.

[0079] The light emission inducing gas generator 9 further includes an inlet member 94 and an outlet member 95. One end of the inlet member 94 is fixed to the first housing 91a so as to allow gas to flow between the inlet member 94 and the internal space SP of the first housing 91a. Meanwhile, the other end of the inlet member 94 is connected to a third gas line L3 through which the source gas flows. The inlet member 94 is a member that introduces the source gas flowing through the third gas line L3 into the internal space SP. The inlet member 94 is, for example, a gas piping member made of resin.

[0080] One end of the outlet member 95 is fixed to the first housing 91a so as to allow gas to flow through the internal space SP of the first housing 91a. Meanwhile, the other end of the outlet member 95 is connected to a second gas line L2 connected to the internal space of the reaction unit 1. The outlet member 95 is a member that discharges the luminescence-inducing gas generated in the internal space SP into the internal space of the reaction unit 1 via the second gas line L2. The outlet member 95 is, for example, a gas piping member made of resin.

[0081] The entrance member 94 and the exit member 95 are disposed in positions that are shaded by the light from the light source 92. Here, "shaded positions" means that no light from the light source 92 reaches the entrance member 94 or only a small amount of light (for example, light that does not cause deterioration of the entrance member 94 and the exit member 95) reaches the entrance member 94 and the exit member 95. Specifically, as shown in FIG. 2 , the entrance member 94 and the exit member 95 are disposed in corner portions of the first housing 91a. Specifically, the entrance member 94 is disposed at a first corner ED1 of the first housing 91a. Meanwhile, the exit member 95 is disposed at a second corner ED2 of the first housing 91a that is diagonally opposite the first corner ED1.

[0082] As described above, the hollow member 92a (i.e., the light-emitting portion) of the light source 92 is disposed at the center of the internal space SP. Therefore, when the hollow member 92a of the light source 92 is used as a reference, the entrance member 94 disposed at the first corner ED1 and the exit member 95 disposed at the second corner ED2 are each disposed at a position away from the hollow member 92a of the light source 92. By providing the entrance member 94 and the exit member 95 at positions away from the light source 92 of the first housing 91a (the first corner ED1 and the second corner ED2), the light emitted from the light source 92 is less likely to reach the entrance member 94 and the exit member 95. As a result, deterioration of the entrance member 94 and the exit member 95 due to the light from the light source 92 can be suppressed.

[0083] Furthermore, by arranging the entrance member 94 at the first corner ED1 of the first housing 91a and the exit member 95 at the second corner ED2 diagonally opposite the first corner ED1, the entrance member 94 and the exit member 95 are positioned such that a line connecting the entrance member 94 and the exit member 95 crosses the hollow member 92a (i.e., the light-emitting portion) of the light source 92. By arranging the entrance member 94 and the exit member 95 in this positional relationship, the source gas introduced from the entrance member 94 into the internal space SP easily passes through the hollow member 92a of the light source 92 while moving toward the exit member 95. In other words, most of the source gas introduced from the entrance member 94 into the internal space SP is not discharged from the exit member 95 without passing through the hollow member 92a of the light source 92.

[0084] As a result, most of the source gas introduced into the internal space SP from the inlet member 94 is irradiated with light from the light source 92, so that the light emission inducing gas can be efficiently generated in the internal space SP.

[0085] (3) Analytical Operation of the Gas Analyzer The following describes the analytical operation of the gas to be analyzed in the gas analyzer 100. First, to start the analysis, the gas analyzer 100 is started up. Specifically, the exhaust unit 7 is started up.

[0086] After the gas analyzer 100 is started, an analysis operation of a gas to be analyzed is started. The analysis operation is performed according to the flowchart shown in FIG. 4. FIG. 4 is a flowchart showing the analysis operation of a gas to be analyzed. First, the control unit 5 controls the drive unit 51 to cause the light source 92 of the light emission inducing gas generator 9 to generate light, thereby generating a light emission inducing gas in the internal space SP of the light emission inducing gas generator 9 (step S1). Specifically, with a source gas (e.g., a source gas containing oxygen) introduced into the internal space SP of the light emission inducing gas generator 9, the light source 92 irradiates the internal space SP with light (e.g., ultraviolet light from an excimer lamp), thereby generating a light emission inducing gas (e.g., ozone).

[0087] At this time, the drive unit 51 repeatedly switches between outputting and stopping the output of electric power (AC voltage) at a predetermined cycle. That is, the drive unit 51 does not drive the light source 92 constantly, but causes the light source 92 to irradiate light intermittently. By irradiating light intermittently in this manner, the electric power supplied from the drive unit 51 to the light source 92 can be reduced. Furthermore, the temperature around the light source 92 can be prevented from becoming too high, allowing the light emission inducing gas to be generated efficiently.

[0088] The drive unit 51 can adjust the ratio (duty ratio) of power output time to power stop time in one cycle of switching between power output and power stop, thereby adjusting the power supplied to the light source 92. The drive unit 51 can supply power to the light source 92 with a duty ratio of, for example, 50%. The optimal duty ratio can be determined as appropriate depending on the efficiency of generation of the light emission inducing gas, the heat generation status from the light source 92 due to power supply, etc.

[0089] Next, the control unit 5 introduces the sample gas containing the gas to be analyzed (e.g., nitrogen oxides) and the luminescence-inducing gas generated in step S1 into the internal space of the reaction unit 1 (step S2). In the gas analyzer 100, when the sample gas and the luminescence-inducing gas are introduced into the internal space of the reaction unit 1, the control unit 5 operates the gas switching unit 11 to switch, at a predetermined cycle, between a state in which gas flow is disabled through the gas inlets a and b and a state in which gas flow is enabled through the gas inlets a and b. By suction by the exhaust unit 7 and switching of the gas flow path by the gas switching unit 11 as described above, the gas analyzer 100 switches, at a predetermined cycle, between a state in which a mixed gas of the sample gas and the luminescence-inducing gas is introduced into the internal space of the reaction unit 1 and a state in which only the luminescence-inducing gas is introduced into the internal space of the reaction unit 1.

[0090] After the pressure in the reaction unit 1 reaches a predetermined pressure while switching between the above two states, analysis of the target gas is started. First, when a mixed gas of the sample gas and the luminescence-inducing gas is introduced into the internal space of the reaction unit 1, reaction light generated by the interaction between the target gas and the luminescence-inducing gas is detected (step S3).

[0091] In the gas analyzer 100, the control unit 5 measures the light intensity IB detected by the light detection unit 3 when only the luminescence-inducing gas is introduced into the internal space of the reaction unit 1, i.e., when no reaction light is generated, and the light intensity IM detected by the light detection unit 3 when a mixed gas of the sample gas and the luminescence-inducing gas is introduced into the internal space of the reaction unit 1, i.e., when the gas to be analyzed in the sample gas interacts with the luminescence-inducing gas to generate reaction light.

[0092] Thereafter, the control unit 5 analyzes the target gas contained in the sample gas based on the detection result of the reaction light detected in step S3 (step S4). Specifically, the control unit 5 calculates the concentration of the target gas contained in the sample gas based on the difference (IM-IB) between the light intensities IM and IB measured in step S3 or the ratio (IM / IB) of the intensities IM and IB.

[0093] In the gas analyzer 100, the luminescence inducing gas generator 9 generates luminescence inducing gas (ozone) by irradiating light (ultraviolet light) onto a raw material gas (gas containing oxygen). By generating luminescence inducing gas by irradiating light onto the raw material gas, it is possible to suppress the generation of components other than the luminescence inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the gas analyzer 100 can analyze the target gas more accurately.

[0094] Furthermore, in the luminescence inducing gas generator 9 provided in the gas analyzer 100, the light source 92 of the luminescence inducing gas generator 9 is provided in the internal space SP of the housing 91 of the luminescence inducing gas generator 9, and at least one of the electric wires of the light source 92 (second electric wire 92e) is arranged in the internal space SP of the housing 91. Furthermore, the second electric wire 92e arranged in the internal space SP of the housing 91 is electrically connected to the housing 91 at a portion facing the internal space SP.

[0095] As described above, by providing the light source 92 of the luminescence inducing gas generator 9 in the internal space SP of the housing 91 of the luminescence inducing gas generator 9, the luminescence inducing gas generator 9 can generate a luminescence inducing gas at a stable concentration and supply it to the reaction unit 1 of the gas analyzer 100. This is because the housing 91 is gas-sealed, and by providing the light source 92 in the internal space SP of the housing 91, the luminescence inducing gas can be generated within the internal space SP, so that the luminescence inducing gas generated in the internal space SP will not leak out of the luminescence inducing gas generator 9 and diffuse.

[0096] Furthermore, the light source 92 used in the light emission inducing gas generator 9 receives a supply of power and generates a discharge, thereby generating light for generating a light emission inducing gas. Even if the light source 92 requires power, at least one of the electrical wirings of the light source 92 (e.g., the second electrical wiring 92e) is connected to a reference potential such as a ground potential. When the electrical wiring connected to the reference potential is disposed in the internal space SP of the housing 91, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide a hole in the housing for extending the electrical wiring in the internal space to the outside. In other words, in the light emission inducing gas generator 9, the number of holes provided in the housing 91 can be minimized.

[0097] By minimizing the use of sealing members, it is possible to prevent the sealing members from coming into contact with the light from the light source 92 and the luminescence inducing gas. Therefore, in the luminescence inducing gas generator 9, the generation of substances that become impurities in gas analysis from the sealing members is prevented, and the occurrence of gas leaks due to deterioration of the sealing members is prevented. As a result, the luminescence inducing gas generator 9 can efficiently generate luminescence inducing gas that does not contain impurities. By being able to introduce luminescence inducing gas that does not contain impurities into the internal space of the reaction unit 1, the gas to be analyzed can be analyzed more accurately.

[0098] 2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit and scope of the invention. In particular, the multiple embodiments and modifications described in this specification can be arbitrarily combined as needed. (A) A light source that generates ultraviolet light other than an excimer lamp can be used as the light source 92 of the light emission inducing gas generator 9. For example, a mercury lamp can be used as the light source 92. Even when a mercury lamp is used as the light source 92, if the electrical wiring of the mercury lamp is arranged in the internal space SP, this electrical wiring can be electrically connected to the portion of the first housing 91a facing the internal space SP (i.e., the wiring mounting portion 911, etc.).

[0099] (B) Ozone (O) as a luminescence-inducing gas ３ When a fluorine-containing gas (fluorine-containing gas) is used, it emits light particularly strongly when it interacts with nitric oxide (NO) among nitrogen oxides (NOx). Therefore, in order to enable the gas analyzer 100 to detect other nitrogen oxides (NOx), a member that converts nitrogen oxides (NOx) to nitric oxide (NO) may be provided in the fourth gas line L4 of the gas analyzer 100.

[0100] (C) The light detection unit 3 is not limited to a photodiode, but may be a photomultiplier tube. By using a photomultiplier tube as the light detection unit 3, it is possible to detect the reaction light with high sensitivity.

[0101] (D) The background intensity IB of the light detection signal may be obtained by introducing a source gas, which is a raw material for generating the luminescence-inducing gas, into the internal space of the reaction unit 1.

[0102] (E) In addition to the components described above, the gas analyzer 100 may also be provided with, for example, a filter for removing dust and the like from the sample gas, a component for removing moisture from the gas introduced into the reaction section 1 (such as a mist trap), and the like.

[0103] (F) The gas switching unit 11 may be a three-way solenoid valve having other gas ports in addition to the gas ports a and b. The gas switching unit 11, which is a three-way solenoid valve, switches between a state in which gas port a and gas port b are communicable and a state in which gas port a and the other gas ports are communicable, under the control of the control unit 5. When the gas switching unit 11 enables communication between the gas port a and gas port b, the sample gas and the luminescence-inducing gas are introduced into the internal space of the reaction unit 1. On the other hand, when gas port a and the other gas ports are communicable, only the luminescence-inducing gas is introduced into the internal space of the reaction unit 1. In this case, the other gas port may be connected to a predetermined position (e.g., a membrane dryer).

[0104] (G) When a sample gas and a luminescence-inducing gas are introduced into the internal space of the reaction unit 1, if luminescence occurs with sufficient sensitivity to the target gas, the pressure in the internal space of the reaction unit 1 during analysis of the target gas does not need to be as low as several tens of kPa. The pressure in the internal space of the reaction unit 1 may be, for example, atmospheric pressure.

[0105] (H) The gas flow in the gas analyzer 100 is not limited to the flow shown in Fig. 1. For example, the gas switching unit 11 may be omitted, and the sample gas may always flow through the second gas line L2.

[0106] (I) The second gas line L2 may be provided with a gas line for introducing a dilution gas (e.g., air) that dilutes the sample gas flowing through the second gas line L2. This allows the sample gas to be mixed with the dilution gas before being introduced into the internal space of the reaction unit 1, for example, when the sample gas contains a gas component (e.g., carbon dioxide (CO2)) that inhibits luminescence due to the interaction between the gas to be analyzed and the luminescence-inducing gas.

[0107] (J) The first seal groove 915 in which the first seal member 914 is disposed may be provided in the second housing 91b instead of the first housing 91a.

[0108] (K) The second seal groove 917 in which the second seal member 916 is disposed may be provided in the cover portion 91c instead of the first housing 91a.

[0109] (L) If there are multiple electrical wires arranged in the internal space SP, these multiple electrical wires may be fixed to a portion of the first housing 91a that faces the internal space SP.

[0110] (M) As shown in FIG. 5 , the seal portion 93 may include a first insulating material 93c, which fills the through-hole O2 between the bushing 96 and the first electrical wiring 92d, in addition to or instead of the inorganic material layer 93a and the leak prevention layer 93b. The first insulating material 93c may be the same material as the inorganic material layer 93a, such as alumina, or the same material as the leak prevention layer 93b, such as silicone rubber. The first insulating material 93c is preferably the same material as the leak prevention layer 93b, such as silicone rubber. This allows for a more dense filling between the bushing 96 and the first electrical wiring 92d, thereby more reliably ensuring insulation between the light source 92 (the first electrical wiring 92d of the light source 92) and the housing 91. FIG. 5 shows another embodiment of the seal portion 93.

[0111] The seal portion 93 may also have a second insulating material 93d filled in the through hole O1 between the second housing 91b and the hollow member 92a. The second insulating material 93d may be the same material as the inorganic material layer 93a, such as alumina, or the same material as the leak prevention layer 93b, such as silicone rubber. This allows the light source 92 to be held more firmly while ensuring insulation between the second housing 91b and the first electrical wiring 92d.

[0112] In the above case, it is preferable that the outermost layer of the seal portion 93 be a layer (leak prevention layer 93b) made of a rubber material such as a silicone adhesive, in order to more reliably prevent gas leakage.

[0113] 3. Features of the Embodiments (1) A gas analyzer (e.g., gas analyzer 100) is a gas analyzer that analyzes a gas to be analyzed by a chemiluminescence method. The gas analyzer includes a luminescence-inducing gas generator (e.g., luminescence-inducing gas generator 9). The luminescence-inducing gas generator generates a luminescence-inducing gas that interacts with the gas to be analyzed to generate reaction light. The luminescence-inducing gas generator has a housing (e.g., housing 91) and a light source (e.g., light source 92). The housing has an internal space (e.g., internal space SP) into which a source gas that is a raw material for the luminescence-inducing gas is introduced. The light source is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the source gas.

[0114] In the above-mentioned light emission inducing gas generator, at least one (e.g., second electrical wiring 92e) of the electrical wirings (e.g., first electrical wiring 92d, second electrical wiring 92e) of the light source is arranged in the internal space of the housing. The electrical wirings arranged in the internal space of the housing are electrically connected at a portion (e.g., wiring attachment portion 911) facing the internal space of the housing.

[0115] In the above gas analyzer, the luminescence-inducing gas generator generates the luminescence-inducing gas by irradiating the raw material gas with light. By generating the luminescence-inducing gas by irradiating the raw material gas with light, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the above gas analyzer can analyze the target gas more accurately.

[0116] In the gas analyzer, the light source of the light emission inducing gas generator is provided in the internal space of the housing of the light emission inducing gas generator, and at least one of the electrical wires of the light source is arranged in the internal space of the housing. Also, the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0117] In this way, by providing the light source of the luminescence inducing gas generating device in the internal space of the housing of the luminescence inducing gas generating device, the luminescence inducing gas generating device can generate a luminescence inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence inducing gas to be generated in the internal space of the housing, and therefore the luminescence inducing gas will not leak out of the luminescence inducing gas generating device and diffuse.

[0118] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0119] (2) The light emission inducing gas generator of the gas analyzer of (1) above may have an insulating part (e.g., seal part 93, bushing 96) that insulates the housing from other electrical wiring of the light source (e.g., first electrical wiring 92d). This ensures insulation between the housing and other electrical wiring of the light source connected to a predetermined potential.

[0120] (3) In the light emission-inducing gas generator of the gas analyzer of (2) above, the insulating section may have an inorganic material layer (e.g., inorganic material layer 93a) and a leak prevention layer (e.g., leak prevention layer 93b). The inorganic material layer may be provided at a connection portion between the light source and the outer wall surface of the housing of the light emission-inducing gas generator. The leak prevention layer may be provided on the inorganic material layer to prevent gas leakage from the connection portion between the light source and the outer wall surface of the housing. This ensures insulation between the light source and the housing, and the inorganic material layer makes the leak prevention layer less likely to come into contact with light irradiated from the light source and gas generated from raw material gases such as the light emission-inducing gas, thereby suppressing deterioration of the leak prevention layer.

[0121] (4) The luminescence-inducing gas generator of any one of the gas analyzers (1) to (3) above may further include an inlet member (e.g., inlet member 94) and an outlet member (e.g., outlet member 95). The inlet member introduces the source gas into the internal space of the housing. The outlet member discharges the luminescence-inducing gas from the internal space of the housing. In this case, the inlet member and the outlet member may be provided at positions on the housing that are shaded by light from the light source. This makes it possible to prevent light from the light source from irradiating the inlet member and the outlet member. As a result, it is possible to prevent the inlet member and the outlet member from being deteriorated by light from the light source.

[0122] (5) In the luminescence-inducing gas generator for the gas analyzer of (4) above, the inlet member may be provided at a first corner (e.g., first corner ED1) of the housing, and the outlet member may be provided at a second corner (e.g., second corner ED2) diagonally opposite the first corner of the housing. This makes it easier for the source gas introduced through the inlet member to pass through the light source while moving toward the outlet member, thereby enabling efficient generation of the luminescence-inducing gas in the internal space.

[0123] (6) In the luminescence inducing gas generator for the gas analyzer according to any one of (1) to (5) above, the housing may include a first housing (e.g., first housing 91a) and a second housing (e.g., second housing 91b). The first housing has an internal space. The second housing is separate from the first housing. A light source is attached to the second housing. In this case, a seal member (e.g., first seal member 914) may be disposed between the first housing and the second housing, and the seal member may be disposed in a groove (e.g., first seal groove 915) provided in the first housing or the second housing. This makes it difficult for the seal member to come into contact with light from the light source and the luminescence inducing gas, thereby suppressing deterioration of the seal member.

[0124] (7) In the luminescence-inducing gas generator for the gas analyzer according to any one of (1) to (6) above, the light source may irradiate light at a predetermined cycle. This reduces the power supplied to the light source. Furthermore, the luminescence-inducing gas can be efficiently generated by preventing the area around the light source from becoming too hot.

[0125] (8) In the emission-inducing gas generator for the gas analyzer according to any one of (1) to (7) above, the light source may be an excimer lamp, thereby enabling efficient generation of the emission-inducing gas from the raw material gas.

[0126] (9) In the gas analyzer according to any one of (1) to (8), the gas to be analyzed may be nitrogen oxides. The gas analyzer is capable of analyzing nitrogen oxides.

[0127] (10) A luminescence-inducing gas generator is used in a gas analyzer that analyzes a target gas by chemiluminescence. The luminescence-inducing gas generator includes a housing and a light source. The housing has an internal space into which a source gas serving as a source for a luminescence-inducing gas that interacts with the target gas to generate reaction light is introduced. The light source is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the source gas. In the above-described luminescence-inducing gas generator, at least one of the electrical wirings of the light source is arranged in the internal space of the housing. Furthermore, the electrical wiring arranged in the internal space of the housing is electrically connected at a portion facing the internal space of the housing.

[0128] The above-mentioned luminescence-inducing gas generator generates luminescence-inducing gas used in a gas analyzer by irradiating light onto a raw material gas. By generating luminescence-inducing gas by irradiating light onto a raw material gas, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the gas analyzer can analyze the target gas more accurately.

[0129] In the above-mentioned luminescence inducing gas generator, the light source is provided in the internal space of the housing of the luminescence inducing gas generator, at least one of the electrical wires of the light source is arranged in the internal space of the housing, and the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0130] In this way, by providing the light source of the luminescence-inducing gas generator in the internal space of the housing of the luminescence-inducing gas generating unit, the luminescence-inducing gas generator can generate luminescence-inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence-inducing gas to be generated in the internal space of the housing, and therefore the luminescence-inducing gas will not leak out of the luminescence-inducing gas generator and diffuse.

[0131] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0132] (11) A gas analyzer analyzes nitrogen oxides by a chemiluminescence method. The gas analyzer includes a luminescence-inducing gas generator. The luminescence-inducing gas generator generates ozone that interacts with nitrogen oxides to generate reaction light. The luminescence-inducing gas generator has an excimer light source that generates ozone by irradiating a raw material gas containing oxygen with ultraviolet light.

[0133] In the gas analyzer, the light-emission-inducing gas generator irradiates a raw material gas containing oxygen with ultraviolet light from an excimer light source to generate ozone, which interacts with nitrogen oxides to generate reaction light. This makes it possible to suppress the generation of components other than ozone that may affect the analysis results of nitrogen oxides. In this way, by suppressing the generation of components that may affect the analysis results of nitrogen oxides, the gas analyzer can analyze nitrogen oxides more accurately.

[0134] (12) The analysis method is a method for analyzing a gas to be analyzed. The analysis method includes the following steps: A step of generating a light-emission inducing gas by a light-emission inducing gas generator (for example, step S1). A step of introducing a gas to be analyzed and a light-emission inducing gas into a predetermined space (for example, step S2). A step of analyzing the gas to be analyzed based on reaction light generated by the interaction between the gas to be analyzed and the light-emission inducing gas in the predetermined space (for example, steps S3 to S4).

[0135] In the above analysis method, the luminescence-inducing gas generator includes a housing and a light source. The housing has an internal space into which a source gas serving as a source of the luminescence-inducing gas is introduced. The light source is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the source gas. In this luminescence-inducing gas generator, at least one of the electrical wirings of the light source is provided in the internal space of the housing. Furthermore, the electrical wiring provided in the internal space of the housing is electrically connected at a portion facing the internal space of the housing.

[0136] In the above-mentioned analysis method, the luminescence-inducing gas generator generates the luminescence-inducing gas by irradiating the raw material gas with light. By generating the luminescence-inducing gas by irradiating the raw material gas with light, it is possible to suppress the generation of components other than the luminescence-inducing gas that may affect the analysis results of the target gas. In this way, by suppressing the generation of components that may affect the analysis results of the target gas, the above-mentioned analysis method can analyze the target gas more accurately.

[0137] In the above-mentioned analysis method, the light source of the luminescence-inducing gas generator is provided in the internal space of the housing of the luminescence-inducing gas generator, and at least one of the electrical wires of the light source is arranged in the internal space of the housing. Also, the electrical wires arranged in the internal space of the housing are electrically connected in the internal space of the housing.

[0138] In this way, by providing the light source of the luminescence-inducing gas generator in the internal space of the housing of the luminescence-inducing gas generator, the luminescence-inducing gas generator can generate a luminescence-inducing gas at a stable concentration and supply it to the gas analyzer, because providing the light source in the internal space of the housing allows the luminescence-inducing gas to be generated in the internal space of the housing, and therefore the luminescence-inducing gas will not leak out of the luminescence-inducing gas generator and diffuse.

[0139] Furthermore, the light source used in the luminescence-inducing gas generator receives a power supply and generates light for generating the luminescence-inducing gas. Even if the light source requires power, at least one of the electrical wiring of the light source is connected to a reference potential such as a ground potential. If the electrical wiring connected to the reference potential is disposed in the internal space of the housing, this electrical wiring can be electrically connected in the internal space of the housing. By electrically connecting the electrical wiring connected to the reference potential in the internal space of the housing, it is not necessary to extend this electrical wiring from the internal space to the outside. As a result, it is not necessary to provide holes in the housing for extending the electrical wiring in the internal space to the outside. That is, in the above-mentioned luminescence-inducing gas generator, the number of holes provided in the housing can be minimized. By minimizing the number of holes provided in the housing, the use of sealing members can be minimized. As a result, the above-mentioned luminescence-inducing gas generator can suppress the occurrence of problems (generation of impurities, gas leakage) that may arise from the provision of sealing members and can stably generate luminescence-inducing gas that is free of impurities.

[0140] (13) The analytical method is a method for analyzing nitrogen oxides. The analytical method includes the following steps: ❍ Generating ozone; ❍ Introducing nitrogen oxides and ozone into a predetermined space; and ❍ Analyzing nitrogen oxides based on reaction light generated by the interaction between nitrogen oxides and ozone in the predetermined space.

[0141] The step of generating ozone in the above-described analysis method includes a step of generating ozone by irradiating a source gas containing oxygen with ultraviolet light output from an excimer light source.

[0142] In the above analytical method, ultraviolet light from an excimer light source is irradiated onto a source gas containing oxygen, thereby generating ozone, which interacts with nitrogen oxides to generate reaction light. This makes it possible to suppress the generation of components other than ozone that may affect the analysis results of nitrogen oxides. In this way, by suppressing the generation of components that may affect the analysis results of nitrogen oxides, the above analytical method allows for more accurate analysis of nitrogen oxides.

[0143] The present invention can be widely applied to gas analyzers using the chemiluminescence method.

[0144] 100: Gas analyzer 1: Reaction section 3: Light detection section 5: Control section 51: Drive section 7: Exhaust section 9: Luminescence inducing gas generator 91: Housing 91a: First housing SP: Internal space 91b: Second housing O1: Through hole 91c: Lid section 911: Wiring attachment section 912: Wiring connection hole 913: Ground connection groove 914: First seal member 915: First seal groove 916: Second seal member 917: Second seal groove 92: Light source 92a: Hollow member 92b: First electrode section 92c: Second electrode section 92d: First electric wiring 921: First terminal 92e: Second electric wiring 922: Second terminal 93: Seal section 93a : inorganic substance layer 93b : leak prevention layer 93c : first insulating substance 93d : second insulating substance 94 : inlet member 95 : outlet member 11 : gas switching section L1 : first gas line L2 : second gas line L3 : third gas line L4 : fourth gas line

Claims

1. A gas analyzer for analyzing a gas to be analyzed by a chemiluminescence method, comprising: a luminescence-inducing gas generator for generating a luminescence-inducing gas that interacts with the gas to be analyzed to generate reaction light, the luminescence-inducing gas generator comprising: a housing having an internal space into which a raw material gas that is a raw material for the luminescence-inducing gas is introduced; and a light source provided in the internal space for irradiating light that generates the luminescence-inducing gas from the raw material gas, at least one of the electrical wirings of the light source is arranged in the internal space of the housing, and the electrical wiring arranged in the internal space of the housing is electrically connected at a portion of the housing facing the internal space.

2. The gas analyzer according to claim 1, wherein said light emission inducing gas generator further comprises an insulating portion for insulating other electrical wiring of said light source from said housing.

3. The gas analyzer according to claim 2, wherein the insulating section comprises: an inorganic material layer provided at a connection portion between the outer wall surface of the housing and the light source; and a leak prevention layer provided on the inorganic material layer to prevent gas leakage from the connection portion between the outer wall surface of the housing and the light source.

4. The gas analyzer according to any one of claims 1 to 3, wherein the luminescence-inducing gas generator further comprises an inlet member for introducing the raw material gas into the internal space of the housing, and an outlet member for discharging the luminescence-inducing gas from the internal space of the housing, and the inlet member and the outlet member are provided at positions on the housing that are shaded by the light from the light source.

5. A gas analyzer according to claim 4, wherein the inlet member is provided at a first corner of the housing, and the outlet member is provided at a second corner of the housing that is diagonally opposite the first corner.

6. A gas analyzer according to any one of claims 1 to 5, wherein the housing comprises a first housing having the internal space and a second housing separate from the first housing and in which the light source is attached, a sealing member is disposed between the first housing and the second housing, and the sealing member is disposed in a groove provided in the first housing or the second housing.

7. A gas analyzer according to any one of claims 1 to 6, wherein the light source irradiates the light at a predetermined cycle.

8. A gas analyzer according to any one of claims 1 to 7, wherein the light source is an excimer lamp.

9. A gas analyzer according to any one of claims 1 to 8, wherein the gas to be analyzed is nitrogen oxide.

10. A luminescence-inducing gas generator used in a gas analyzer that analyzes a gas to be analyzed by chemiluminescence, comprising: a housing having an internal space into which a raw material gas that is a raw material for a luminescence-inducing gas that interacts with the gas to be analyzed to generate reaction light is introduced; and a light source that is provided in the internal space and irradiates light that generates the luminescence-inducing gas from the raw material gas, wherein at least one of the electrical wirings of the light source is arranged in the internal space of the housing, and the electrical wiring arranged in the internal space of the housing is electrically connected at a portion of the housing that faces the internal space.

11. A gas analyzer for analyzing nitrogen oxides by a chemiluminescence method, comprising: a luminescence-inducing gas generator for generating ozone that interacts with the nitrogen oxides to generate reaction light, the luminescence-inducing gas generator having an excimer light source for generating ozone by irradiating a raw material gas containing oxygen with ultraviolet light.

12. An analytical method for analyzing a gas to be analyzed, comprising: a step of generating a luminescence-inducing gas by a luminescence-inducing gas generator; a step of introducing the gas to be analyzed and the luminescence-inducing gas into a predetermined space; and a step of analyzing the gas to be analyzed based on reaction light generated by an interaction between the gas to be analyzed and the luminescence-inducing gas in the predetermined space, wherein the luminescence-inducing gas generator comprises: a housing having an internal space into which a raw material gas that is a raw material for the luminescence-inducing gas is introduced; and a light source that is provided in the internal space and irradiates light that causes the raw material gas to generate the luminescence-inducing gas, wherein at least one of the electrical wirings of the light source is provided in the internal space of the housing, and the electrical wirings provided in the internal space of the housing are electrically connected at a portion of the housing facing the internal space.

13. An analytical method for analyzing nitrogen oxides, comprising the steps of: generating ozone; introducing the nitrogen oxides and the ozone into a predetermined space; and analyzing the nitrogen oxides based on reaction light generated by interaction between the nitrogen oxides and the ozone in the predetermined space, wherein the step of generating ozone includes the step of generating ozone by irradiating a raw material gas containing oxygen with ultraviolet light output from an excimer light source.

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