Optical phased array antenna for monitoring phase distribution of laser beam, and lidar comprising same

Abstract

An optical phased array antenna for monitoring the phase distribution of a laser beam output using an optical phased array (OPA), according to one embodiment, may comprise: a light distribution unit for receiving the laser beam and distributing same into a plurality of channels; a phase control unit for controlling the phase of each of the laser beams distributed into the plurality of channels; a light output unit for outputting the phase-controlled laser beam; and a beamforming unit for monitoring the phase distribution of the laser beam that was output.

Description

Optical phased array antenna for monitoring phase distribution of laser beam and lidar including the same

[0001] The present invention relates to an optical phased array antenna for monitoring the phase distribution of a laser beam and a lidar including the same.

[0002] LiDAR (Light detection and ranging) is a technology that measures the location coordinates of a reflector by emitting a laser pulse and measuring the time it takes for it to be reflected and return. It is used as an essential element in many fields such as autonomous vehicles, drones, unmanned aerial vehicles, and data communications in free space.

[0003] Recently, many research results have been reported on optical phased array (OPA) structures capable of non-mechanical beam steering based on silicon photonics technology as an alternative to the existing mechanical beam scanning-based lidar technology.

[0004] Optical phased array is a technology that controls the phase of light waves transmitted, reflected, or received by a two-dimensional surface using adjustable surface elements. In order to perform beamforming radiated into external space through an optical phased array structure, a procedure for optimizing the phase distribution in an optical antenna array formed from an array of thermo-optic or electro-optic phase controllers must be performed.

[0005] One common method for optimizing the phase distribution is to use an infrared camera or optical lens system to confirm the beamforming state radiated into the air. However, to apply optical phased array technology to digital signal-based or automated systems, a means of internally confirming and optimizing the phased array chip without external radiating is required. A study utilizing internal beamforming based on a slab waveguide has been reported as a method for optimizing the phase distribution state internally. However, this requires a free-propagation region on the order of millimeters in waveguide length.

[0006] In such cases, a method to resolve this is needed because the size of the optical phase array structure increases in order to monitor the phase distribution.

[0007] The problem to be solved by the present invention is to provide an optical phased array antenna for monitoring the phase distribution of a laser beam and a lidar including the same.

[0008] However, the problems to be solved by the present invention are not limited to those mentioned above, and other problems to be solved that are not mentioned can be clearly understood by a person having ordinary skill in the art to which the present invention pertains from the description below.

[0009] An optical phased array antenna for monitoring the phase distribution of a laser beam output using an optical phased array (OPA) according to one embodiment may include an optical distribution unit for receiving a laser beam and distributing it to a plurality of channels; a phase control unit for controlling the phase of each of the laser beams distributed to the plurality of channels; an optical output unit for outputting a laser beam whose phase is controlled; and a beamformer for monitoring the phase distribution of the output laser beam.

[0010] The beamformer may include a nanoslot structure that changes the phase of the output laser beam; and an output optical waveguide that outputs the laser beam with the changed phase to the outside.

[0011] The above nanoslot structure may include a box formed using silicon dioxide (SiO2); and a core positioned on the box and through which the output laser beam is transmitted, wherein the core may be formed using silicon (Si).

[0012] The above core is formed in the shape of a D-shape, and as the above core is formed in the shape of a D-shape, a space is formed between three sides surrounded by the core, and the laser beam may not be transmitted into the space between the three sides.

[0013] The phase change of the laser beam as it passes through the core can be determined based on at least one of the length and width of the interstitial space.

[0014] The phase of the laser beam can change more significantly as the length of the interspace increases.

[0015] The phase of the above laser beam can change more significantly as the width of the interspace increases.

[0016] The beamformer includes a plurality of nanoslot structures having different lengths of the interspace, and a first nanoslot structure among the plurality of nanoslot structures having a first length of the interspace may be positioned closer to the center of the beamformer than a second nanoslot structure among the plurality of nanoslot structures having a second length of the interspace longer than the first length.

[0017] According to another embodiment, a lidar may include a laser generator for generating a laser beam; and an optical phased array antenna for controlling the phase of the laser beam using an optical phased array and monitoring the phase distribution of the laser beam in real time.

[0018] The optical phase array antenna includes a beamformer that changes the phase of the laser beam, and the beamformer includes a box formed using silicon dioxide (SiO2), and a nanoslot structure positioned on the box and including a core through which the laser beam is transmitted, and the core may be formed using silicon (Si).

[0019] According to an embodiment of the present invention, since the optical phased array antenna includes a beamformer inside, the phase distribution of a laser beam inside the antenna can be monitored in real time without a separate device such as an infrared camera.

[0020] In addition, according to an embodiment of the present invention, by manufacturing a core included in a nanoslot structure for monitoring the phase distribution of a laser beam using silicon (Si), the size of the beamformer can be reduced compared to a core manufactured using silicon nitride or the like, and as the size of the beamformer is reduced, the spatial limitation of the optical phased array antenna can be resolved.

[0021] However, the effects that can be obtained from the present disclosure are not limited to the effects mentioned above, and other effects that are not mentioned can be clearly understood by a person having ordinary skill in the technical field to which the present disclosure belongs from the description below.

[0022] Fig. 1 shows an optical phase array antenna according to an embodiment.

[0023] Fig. 2 shows a beamformer according to an embodiment.

[0024] Fig. 3 shows an example of a nanoslot structure according to an embodiment.

[0025] Figure 4 shows another example of a nanoslot structure according to an embodiment.

[0026] Figures 5 to 7 are drawings for explaining that the focal length of the laser beam changes as the width and length of the interstitial space change.

[0027] Fig. 8 shows a lidar according to an embodiment.

[0028] FIG. 9 is a drawing for explaining that a nanoslot structure according to an embodiment can reduce the size of a beamformer compared to a conventional nanoslot structure.

[0029] The various embodiments described in this specification are exemplified for the purpose of clearly explaining the technical concept of the present disclosure and are not intended to be limited to specific embodiments. The technical concept of the present disclosure includes various modifications, equivalents, alternatives, and embodiments selectively combined from all or part of the embodiments described herein. Furthermore, the scope of the technical concept of the present disclosure is not limited to the various embodiments presented below or the specific descriptions thereof.

[0030] Terms used herein, including technical or scientific terms, unless otherwise defined, may have the meaning commonly understood by one of ordinary skill in the art to which this disclosure belongs.

[0031] As used herein, expressions such as "includes," "may include," "comprises," "may have," "have," and "may have" indicate the presence of a target feature (e.g., a function, operation, or component), but do not exclude the presence of other additional features. In other words, such expressions should be understood as open-ended terms that imply the possibility of including a second embodiment.

[0032] In this specification, singular expressions include plural expressions unless the context clearly indicates otherwise. Furthermore, plural expressions include singular expressions unless the context clearly indicates otherwise. When a part of the specification is said to include a component, this does not exclude other components, but rather implies that other components may be included, unless otherwise specifically stated.

[0033] Also, the term 'module' or 'part' used in the specification means a software or hardware component, and the 'module' or 'part' performs certain roles. However, the 'module' or 'part' is not limited to software or hardware. The 'module' or 'part' may be configured to reside on an addressable storage medium and may be configured to execute one or more processors. Thus, as an example, the 'module' or 'part' may include at least one of components such as software components, object-oriented software components, class components, and task components, processes, functions, attributes, procedures, subroutines, segments of program code, drivers, firmware, microcode, circuitry, data, databases, data structures, tables, arrays, or variables. The functionality provided within the components and 'modules' or 'parts' may be combined into a smaller number of components and 'modules' or 'parts', or further separated into additional components and 'modules' or 'parts'.

[0034] According to one embodiment of the present disclosure, a 'module' or 'unit' may be implemented as a processor and a memory. 'Processor' should be broadly construed to include a general-purpose processor, a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a controller, a microcontroller, a state machine, and the like. In some circumstances, a 'processor' may also refer to an application-specific integrated circuit (ASIC), a programmable logic device (PLD), a field-programmable gate array (FPGA), and the like. A 'processor' may also refer to a combination of processing devices, such as, for example, a combination of a DSP and a microprocessor, a combination of multiple microprocessors, a combination of one or more microprocessors in conjunction with a DSP core, or any other such combination of configurations. In addition, 'memory' should be broadly construed to include any electronic component capable of storing electronic information. 'Memory' may refer to various types of processor-readable media, such as random access memory (RAM), read-only memory (ROM), non-volatile random access memory (NVRAM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable PROM (EEPROM), flash memory, magnetic or optical data storage, registers, etc. Memory is said to be in electronic communication with the processor if the processor can read information from, and / or write information to, the memory. Memory integrated in a processor is in electronic communication with the processor.

[0035] As used herein, the expressions “first,” “second,” or “first,” “second,” etc., unless the context indicates otherwise, are used to refer to multiple similar objects and to distinguish one object from another, and do not limit the order or importance among the objects.

[0036] As used herein, the expressions "A, B, and C," "A, B, or C," "A, B, and / or C," or "at least one of A, B, and C," "at least one of A, B, or C," "at least one of A, B, and / or C," "at least one selected from A, B, and C," "at least one selected from A, B, or C," "at least one selected from A, B, and / or C," and the like can mean each listed item or all possible combinations of the listed items. For example, "at least one selected from A and B" can refer to (1) A, (2) at least one of A, (3) B, (4) at least one of B, (5) at least one of A and at least one of B, (6) at least one of A and B, (7) at least one of B and A, and (8) both A and B.

[0037] The expression "based on" as used herein is used to describe one or more factors that influence a decision, act of judgment, or action described in a phrase or sentence containing the expression, and this expression does not exclude additional factors that influence the decision, act of judgment, or action.

[0038] As used herein, the expression that a component (e.g., a first component) is “connected” or “connected” to another component (e.g., a second component) may mean that the component is directly connected or connected to the other component, as well as connected or connected via a new other component (e.g., a third component).

[0039] The expression "configured to" used herein may have the meanings of "set to", "having the ability to", "modified to", "made to", "capable of", etc., depending on the context. The expression is not limited to the meaning of "specifically designed in hardware", and for example, a processor configured to perform a specific operation may mean a generic-purpose processor that can perform the specific operation by executing software.

[0040] Hereinafter, various embodiments of the present disclosure will be described with reference to the attached drawings. In the attached drawings and the description of the drawings, identical or substantially equivalent components may be assigned the same reference numerals. Furthermore, in the description of various embodiments below, duplicate descriptions of identical or corresponding components may be omitted, but this does not mean that the corresponding components are not included in the embodiments.

[0041] The advantages and features of the present invention, and the methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various different forms. These embodiments are provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined solely by the scope of the claims.

[0042] When describing embodiments of the present invention, detailed descriptions of known functions or configurations will be omitted if they are deemed to unnecessarily obscure the gist of the invention. Furthermore, the terms described below are defined in light of their functions in the embodiments of the present invention and may vary depending on the intent or custom of the user or operator. Therefore, their definitions should be based on the overall content of this specification.

[0043]

[0044] Fig. 1 shows an optical phase array antenna according to an embodiment.

[0045] Referring to FIG. 1, an optical phased array antenna (10) is used to monitor the phase distribution of an output laser beam in real time while controlling the phase of the output laser beam using an optical phased array (OPA), and may include an optical distribution unit (100), a phase control unit (200), an optical output unit (300), and a beamformer (400).

[0046] The optical distribution unit (100) can receive a laser beam generated from a predetermined laser generator (20 in FIG. 4) and distribute the received laser beam into multiple channels. The optical distribution unit (100) can distribute the laser beam into multiple channels and transmit it to the phase control unit (200).

[0047] To this end, according to an embodiment, the optical distribution unit (100) may include an optical input unit that receives a laser beam from a laser generator (20 in FIG. 4), and an optical splitter that distributes the laser beam received from the optical input unit into a plurality of channels.

[0048] In one embodiment, the optical splitter may include a plurality of couplers. The couplers may include a multimode interference coupler, a Y-junction coupler, or a directional coupler. In addition, in one embodiment, the optical input unit and the optical splitter may be implemented as parts of an optical waveguide.

[0049] According to an embodiment, the optical distribution unit (100) may use a single optical splitter that distributes 1:N to distribute the laser beam, or may connect optical splitters that distribute 1:M in multiple stages to distribute the laser beam in 1:N. For example, the optical distribution unit (100) may distribute the laser beam by arranging a 1:16 splitter, may distribute the laser beam in 1:16 by arranging 1:4 splitters in two stages, or may distribute the laser beam in 1:16 by arranging 1:2 splitters in four stages. According to an embodiment, the optical splitter may be implemented by utilizing an optical device such as a multi-mode interference (MMI) coupler or a beam splitter.

[0050] The phase control unit (200) can control (modulate) the phase of the laser beam distributed to multiple channels in the optical distribution unit (100).

[0051] More specifically, the phase control unit (200) can control (modulate) the phase of the laser beam so that the phase difference of the laser beams distributed to adjacent channels among a plurality of channels is the same. For example, when the laser beam is distributed to four channels (a first channel, a second channel, a third channel, and a fourth channel), the difference between the phase of the first channel and the phase of the second channel among the four channels can be the same as the difference between the phase of the second channel and the phase of the third channel.

[0052] According to an embodiment, the phase control unit (200) may include a first electrode and a second electrode arranged on both sides of each of the plurality of channels. Accordingly, the phase control unit (200) may control the phase of a laser beam transmitted to each of the plurality of channels by applying a current to the first electrode and the second electrode (by forming an electric field). For example, the phase control unit (200) may form an electric field in each of the first electrode and the second electrode arranged in each of the plurality of channels so that the phases of the laser beams distributed to each of the plurality of channels have an equal difference.

[0053] The optical output unit (300) can output a laser beam according to the phase controlled by the phase control unit (200).

[0054] According to an embodiment, the light output unit (300) may include a plurality of channels for outputting a laser beam. At this time, the number of the plurality of channels included in the light output unit (300) may be the same as the number of the plurality of channels included in the phase control unit (200). According to an embodiment, each of the plurality of channels included in the light output unit (300) may correspond to each of the plurality of channels included in the phase control unit (200) and may be connected to each other.

[0055] According to an embodiment, the plurality of channels included in the optical output unit (300) may be formed such that the distance between adjacent channels is constant. More specifically, the plurality of channels included in the optical output unit (300) may be formed such that the phase difference according to the distance between adjacent channels is constant according to the following mathematical expression 1 related to Huygens' principle. Through this, the optical output unit (300) may steer the laser beam to the output optical waveguide (420 of FIG. 2) included in the beamformer (400).

[0056]

[0057] Here, ψ represents the steering angle of the laser beam (e.g., the horizontal steering angle), λ represents the wavelength of the laser beam, φ represents the phase of the laser beam output to a given channel, Δφ represents the phase difference between the laser beams output to adjacent channels, and Λ ch can represent the distance between adjacent channels.

[0058] The beamformer (400) can monitor the phase distribution of the laser beam output to the output optical waveguide (420 in FIG. 2). More specifically, the beamformer (400) can monitor the phase distribution of the laser beam output to the output optical waveguide (420 in FIG. 2) by using a plurality of nanoslot structures.

[0059] The function and configuration of the beamformer (400) will be described in more detail with reference to Fig. 2.

[0060] FIG. 2 shows a beamformer according to an embodiment, FIG. 3 shows an example of a nanoslot structure according to an embodiment, FIG. 4 shows another example of a nanoslot structure according to an embodiment, and FIGS. 5 to 7 are drawings for explaining that the focal length of a laser beam changes as the width and length of the interstitial space change.

[0061] Referring to FIGS. 1 and 2, the beamformer (400) may include a plurality of nanoslot structures (410-1 to 410-n) and an output optical waveguide (420).

[0062] The nanoslot structure (410-i, i is a natural number less than or equal to n, hereinafter collectively referred to as 410) can serve to focus (beamform) a laser beam output to a beamformer (400) through a plurality of channels included in the optical output unit (300) so that the laser beam can be monitored within the beamformer (400).

[0063] The nanoslot structure (410) may have the same role as a lens (more specifically, a metalens) in that it focuses a laser beam. Therefore, the nanoslot structure (410) or a plurality of nanoslot structures (410-1 to 410-n) may be called an on-chip metalens in that they are configured within the beamformer (400).

[0064] In this way, since the nanoslot structure (410) focuses the laser beam like a metalens, beam formation can be performed within a shorter distance compared to when there is no nanoslot structure (410) or when a metalens other than the nanoslot structure (410) is used, and therefore, an optical phased array antenna (10) that can monitor the phase distribution of the output laser beam in real time while outputting the laser beam using an optical phased array can be manufactured in a smaller size.

[0065] Referring further to FIG. 3, the nanoslot structure (410) may include a cladding (411), a core (413), and a box (415).

[0066] According to an embodiment, the cladding (411) and the box (415) may be formed using silicon dioxide (SiO2), and the core (413) may be formed using silicon (Si). At this time, the cladding (411) and the box (415) are made of the same material, but the only difference is that the cladding (411) is positioned above the core (413), and the box (415) is positioned below the core (413). Therefore, the cladding (411) may be referred to as an upper cladding, and the box (415) may be referred to as a lower cladding.

[0067] The core (413) may correspond to a passage through which the laser beam moves. That is, the core (413) may be configured to allow the laser beam to move. The laser beam may be transmitted through total reflection within the core (413).

[0068] In addition, referring further to FIG. 4, the nanoslot structure (410') may include a core (413) and a box (415) without a cladding (411). That is, a laser beam entering the nanoslot structure (410 or 410') is not transmitted to the cladding (411) and the box (415) but only through the core (413). Even if the cladding (411) is not included in the nanoslot structure (410), the function of the nanoslot structure (410) in which the laser beam is transmitted through the core (413) may not be affected.

[0069] Additionally, depending on the embodiment, the configuration of the nanoslot structure (410 or 410') may not be limited to the cladding (411), the core (413) and the box (415), or the core (413) and the box (415). That is, the nanoslot structure (410 or 410') may be modified into various configurations that include a core (413) formed of silicon and perform the function of changing the phase (or refractive index) of the transmitted laser beam.

[0070] Referring again to FIG. 3, according to an embodiment, the core (413) may be formed in the shape of a D-shape. In this case, an interstitial space (414) having the same height as the core (413) and having three sides surrounding the core (413) may be formed.

[0071] In some embodiments, the interspace (414) may be identical to the cladding (411). That is, in some embodiments, the interspace (414) may be formed using silicon dioxide, or may be an empty space (i.e., a space filled with air) in the absence of the cladding (411). Accordingly, the laser beam may not be transmitted into the interspace (414).

[0072] In some embodiments, the phase (i.e., the refractive index of the laser beam) that changes as the laser beam passes through the core (413) may be determined based on at least one of the length and width of the interspace (414). That is, at least one of the length and width of the interspace (414) may determine the focal length of the laser beam. Here, the length of the interspace (414) may be defined as the distance from a surface sandwiched between the mutually facing surfaces among the three surfaces of the interspace (414) facing the core (413) to the end point of the nanoslot structure (410) in the direction of the interspace (414), and the width of the interspace (414) may be defined as the distance between the mutually facing surfaces among the three surfaces of the interspace (414) facing the core (413).

[0073] For example, referring further to FIGS. 5 and 6, when the length of the nanoslot structure (410) is a first length (L1) and the width of the nanoslot structure (410) is a first width (W1), when the length of the interspace (414) is a second length (L2), the phase of the laser beam can be changed more significantly compared to when the length of the interspace (414) is a third length (L3) that is shorter than the second length (L2).

[0074] In addition, referring further to FIG. 5 and FIG. 7, when the width of the nanoslot structure (410) is the first length (L1) and the width of the nanoslot structure (410) is the first width (W1), when the width of the interspace (414) is the second width (W2), the phase of the laser beam can be changed more significantly compared to when the width of the interspace (414) is the third width (W3) that is narrower than the second width (W2).

[0075] That is, the phase of the laser beam changes more as the length of the interspace (414) becomes longer or the width of the interspace (414) becomes wider, and therefore, the focal length of the laser beam can become shorter as the length of the interspace (414) becomes longer or the width of the interspace (414) becomes wider.

[0076] Referring again to FIG. 2, among the plurality of nanoslot structures (410-1 to 410-n), a nanoslot structure having a wider space between them may be positioned outside the beamformer (400) compared to a nanoslot structure having a smaller space between them. This is because the larger the space between them, the higher the rate of change in the phase of the laser beam.

[0077] According to an embodiment, the number of the plurality of nanoslot structures (410-1 to 410-n) may be determined based on the total width of the light output unit (300) (e.g., the total width of the plurality of channels included in the light output unit (300). More specifically, the number of the plurality of nanoslot structures (410-1 to 410-n) may be determined based on the total width of the light output unit (300) (e.g., the total width of the plurality of channels included in the light output unit (300)) and the spacing between the nanoslot structures (410).

[0078] The output optical waveguide (420) may be a passage through which a laser beam formed through the nanoslot structure (410) is output to the outside.

[0079] According to an embodiment, the output optical waveguide (420) may include at least one optical waveguide. The number of optical waveguides included in the output optical waveguide (420) and the steering angle of each optical waveguide included in the output optical waveguide (420) may be determined according to a user's selection. That is, although FIG. 2 illustrates that the output optical waveguide (420) includes three optical waveguides, the present invention is not limited thereto.

[0080] Fig. 8 shows a lidar according to an embodiment.

[0081] Referring to FIGS. 1 and 8, the Light Detection and Ranging (LiDAR) (1) may include an optical phased array antenna (10) and a laser generator (20).

[0082] The optical phase array antenna (10) controls the phase of a laser beam generated from a laser generator (20) using an optical phase array, and can monitor the phase distribution of the laser beam in real time through a nanoslot structure (410) included in a beam former (400).

[0083] The laser generator (20) can generate a laser beam to be supplied to the optical phased array antenna (10). Depending on the embodiment, the laser generator (20) can change the wavelength of the laser beam in real time or through a setting before use. The laser generator (20) can rotate the laser beam output to the outside from the optical phased array antenna (10) in one direction by changing the wavelength of the laser beam.

[0084] Although omitted in Fig. 8, the lidar (1) may further include an optical receiving unit that receives a laser beam output from an optical phased array antenna (10) reflected from an object, and a signal processing unit that controls the optical phased array antenna (10), a laser generator (20), and the optical receiving unit.

[0085] FIG. 9 is a drawing for explaining that a nanoslot structure according to an embodiment can reduce the size of a beamformer compared to a conventional nanoslot structure.

[0086] Referring to FIG. 9, the left drawing of FIG. 9 shows the length of the nanoslot structure required when changing the phase of the laser beam through a core manufactured using silicon nitride (Si3N4), and the right drawing shows the length of the nanoslot structure (410) required when changing the phase of the laser beam through a core (413) according to an embodiment.

[0087] As can be seen from the left drawing, when manufacturing a core using silicon nitride, the length of the nanoslot structure must be 5 to 6 μm in order to change the phase by 2π. On the other hand, as can be seen from the right drawing, when manufacturing a core (413) using silicon according to an embodiment, the length of the nanoslot structure (410) in order to change the phase by 2π only needs to be approximately 3 μm.

[0088] Therefore, since the nanoslot structure (410) according to the embodiment has a shorter length required to change the phase of a laser beam compared to a nanoslot structure in which a core is manufactured using silicon nitride, an antenna capable of real-time monitoring of the phase distribution of an output laser beam can be implemented in a smaller size according to the embodiment.

[0089] According to an embodiment of the present invention, since the optical phased array antenna includes a beamformer inside, the phase distribution of a laser beam inside the antenna can be monitored in real time without a separate device such as an infrared camera.

[0090] In addition, according to an embodiment of the present invention, by manufacturing a core included in a nanoslot structure for monitoring the phase distribution of a laser beam using silicon (Si), the size of the beamformer can be reduced compared to a core manufactured using silicon nitride or the like, and as the size of the beamformer is reduced, the spatial limitation of the optical phased array antenna can be resolved.

[0091]

[0092] It is obvious that each step or operation of the method according to the embodiments of the present disclosure can be performed by a computer including one or more processors according to the execution of a computer program stored in a computer-readable recording medium.

[0093] The computer-executable instructions stored in the aforementioned recording medium can be implemented through a computer program programmed to perform each corresponding step, and such a computer program can be stored in a computer-readable recording medium and executed by a processor. The computer-readable recording medium may be a non-transitory readable medium. In this case, the non-transitory readable medium means a medium that semi-permanently stores data and can be read by a device, rather than a medium that stores data for a short period of time, such as a register, a cache, or a memory. Specifically, the programs for performing the various methods described above can be stored and provided in a non-transitory readable medium, such as semiconductor memory devices such as erasable programmable read-only memories (EPROMs), electrically erasable programmable read-only memories (EEPROMs), and flash memory devices, magnetic disks such as internal hard disks and removable disks, optical-magnetic disks, and non-volatile memories including CD-ROMs and DVD-ROM disks.

[0094] The methods according to various examples disclosed in this document may be provided as a computer program product. The computer program product may be distributed in the form of a machine-readable storage medium (e.g., compact disc read-only memory (CD-ROM)) or online through an application store (e.g., Play Store™). In the case of online distribution, at least a portion of the computer program product may be temporarily stored or temporarily generated in a storage medium, such as the memory of a manufacturer's server, an application store's server, or a relay server.

[0095] As described above, those skilled in the art will appreciate that the present disclosure can be implemented in other specific forms without altering the technical spirit or essential characteristics thereof. Therefore, the above-described embodiments should be understood as illustrative in all respects and not restrictive. The scope of the present disclosure is defined by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be construed as being included within the scope of the present disclosure.

[0096] The features and advantages described in this specification are not exhaustive, and many additional features and advantages will become apparent to those skilled in the art upon review of the drawings, specification, and claims. Furthermore, it should be noted that the language used in this specification has been primarily selected for readability and instructional purposes, and may not be intended to delineate or circumscribe the subject matter of the present disclosure.

[0097] The above description of the embodiments of the present disclosure has been presented for illustrative purposes. It is not intended to limit the disclosure to the precise form disclosed, nor to omit anything. Those skilled in the art will appreciate that numerous modifications and variations are possible in light of the above disclosure.

[0098] Therefore, the scope of this disclosure is not limited by the detailed description, but is defined by any claims of the application based on this description. Accordingly, the disclosure of embodiments of this disclosure is illustrative and does not limit the scope of this disclosure, which is set forth in the following claims.

[0099]

[0100] [Explanation of symbols]

[0101] 10: Optical phased array antenna

[0102] 100: Optical distribution unit

[0103] 200: Phase control unit

[0104] 300: Optical output section

[0105] 400: Beamformer

[0106] 410: Nanoslot structure

[0107] 411: Cladding

[0108] 413: Core

[0109] 415: Box

Claims

1. In an optical phased array antenna that monitors the phase distribution of an output laser beam using an optical phased array (OPA), An optical distribution unit that receives a laser beam and distributes it into multiple channels; A phase control unit that controls the phase of each laser beam distributed to the plurality of channels; An optical output unit that outputs a phase-controlled laser beam; and An optical phased array antenna including a beamformer that monitors the phase distribution of the output laser beam.

2. In paragraph 1, The above beamformer, A nanoslot structure that changes the phase of the output laser beam; and An optical phased array antenna including an output optical waveguide that outputs a laser beam with a changed phase to the outside.

3. In paragraph 2, The above nanoslot structure is, A box formed using silicon dioxide (SiO2); and A core positioned on the above box and through which the output laser beam is transmitted, The above core is an optical phased array antenna formed using silicon (Si).

4. In paragraph 3, The above core is formed in the shape of a digut, As the above core is formed in the shape of a digut, a space is formed between the three sides surrounded by the core, An optical phased array antenna in which the laser beam is not transmitted through the above intervening space.

5. In paragraph 4, An optical phase array antenna in which the phase of the laser beam passing through the core is changed based on at least one of the length and width of the intervening space.

6. In paragraph 5, An optical phase array antenna in which the phase of the laser beam changes more significantly as the length of the space between the two increases.

7. In paragraph 5, An optical phased array antenna in which the phase of the laser beam changes more significantly as the width of the space between the two increases.

8. In paragraph 4, The beamformer includes a plurality of nanoslot structures having different lengths of the interspaces, An optical phased array antenna in which, among the plurality of nanoslot structures, a first nanoslot structure having a first length of the interspace is located at the center of the beamformer, and a second nanoslot structure having a second length of the interspace, among the plurality of nanoslot structures, is located at a second length longer than the first length.

9. A laser generator that generates a laser beam; and A laser device comprising an optical phase array antenna that controls the phase of the laser beam using an optical phase array and monitors the phase distribution of the laser beam in real time.

10. In paragraph 9, The above optical phased array antenna includes a beamformer that changes the phase of the laser beam, The beamformer comprises a box formed using silicon dioxide (SiO2), and a nanoslot structure positioned on the box and including a core through which the laser beam is transmitted. The above core is formed using silicon (Si).

11. In paragraph 10, The above core is formed in the shape of a digut, As the above core is formed in the shape of a digut, a space is formed between the three sides surrounded by the core, The laser beam is not transmitted through the above interspace.

12. In paragraph 11, The phase of the laser beam as it passes through the core is determined based on at least one of the length and width of the interspace.

13. In paragraph 11, The above optical phase array antenna includes a plurality of nanoslot structures having different lengths of the interspaces, Among the plurality of nanoslot structures, a first nanoslot structure having a first length of the interspace is located at the center of the beamformer, and a second nanoslot structure having a second length of the interspace among the plurality of nanoslot structures is located at the center of the beamformer, and is longer than the first length.

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