Multiple-reflection gas cell

Abstract

Disclosed in the present invention is a multiple-reflection gas cell, comprising an incident side mirror surface and an aiming side mirror surface which are arranged opposite to each other on two sides. The incident side mirror surface and the aiming side mirror surface each comprise a plurality of spherical mirrors which are assembled together; n circulation assemblies are formed on the basis of the incident side mirror surface and the aiming side mirror surface; any circulation assembly comprises a field lens and an objective lens which are arranged opposite to each other on the two sides; n is a positive integer greater than or equal to 2; and light is suitable for being incident from an incidence point on one side of the field lens of one of the circulation assemblies and aiming at the geometric center of the objective lens of said circulation assembly, and is suitable for being emergent from an emergence point on one side of the field lens of said circulation assembly upon the completion of n times of circulation reflection between the incident side mirror surface and the aiming side mirror surface, and finally forming multi-row and multi-column light spots on the aiming side mirror surface and the incident side mirror surface, respectively. The present invention can implement synchronous increase of the utilization rate of mirror surfaces and the repeated utilization frequency of spatial positions of light spots, thereby increasing an optical path.

Description

Multiple reverse chambers Technical Field

[0001] This invention relates to the field of trace gas monitoring technology, and in particular to a multi-reflector gas chamber. Background Technology

[0002] High-precision trace gas detection is crucial for fields such as greenhouse gas monitoring, respiratory diagnostics, semiconductor manufacturing, and air pollution control. For example, long-term, continuous, and highly accurate measurements of the background concentrations of major greenhouse gases such as CH4, CO2, and N2O are significant for studying global climate change and related greenhouse gas emissions. In biomedicine, precise monitoring of metabolic markers in respiratory gases at sub-ppb levels helps achieve non-invasive diagnosis of human diseases, facilitating early treatment of potential illnesses. In advanced semiconductor processes, where harmful gas impurity concentrations are required to be less than 100 ppt, accurate online monitoring ensures product qualification rates and safe equipment operation. NO in the atmosphere... X Online trace high-precision analysis of key pollutants such as SO2, H2S, and NH3 can provide a deeper understanding of the characteristics, sources, and mechanisms of atmospheric pollution, thereby enabling precise regulation and effective prevention of accidents that endanger human health and the ecological environment. Cavity ring-down spectroscopy (CRDS) and off-axis integrated cavity output spectroscopy (OA-ICOS), utilizing kilometer-level optical path length optical resonators, can meet the stringent measurement accuracy requirements for these trace gases. However, these systems are structurally complex, have high environmental requirements, and are costly, making large-scale application in complex and diverse real-world scenarios difficult. Tunable diode laser absorption spectroscopy (TDLAS), combined with a multi-reflection gas chamber measurement scheme, offers advantages such as simple structure, low instrument cost, and high reliability, making it the most promising candidate to overcome the aforementioned shortcomings. However, the current multi-reflector mirrors have low utilization rates and the number of times the spatial position of the light spot can be reused, resulting in optical path lengths limited to the hundreds of meters level, which restricts the detection accuracy of this scheme for trace gases.

[0003] Therefore, a multi-chamber gas exchange system is needed to solve the problems existing in the above-mentioned technical solutions.

[0004] Summary of the Invention

[0005] Therefore, the present invention provides a multi-reverse chamber to solve or at least alleviate the problems mentioned above.

[0006] According to one aspect of the present invention, a multi-reflection chamber is provided, comprising an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides, the incident-side mirror and the aiming-side mirror each comprising a plurality of spherical mirrors spliced ​​together; wherein, n cyclic assemblies are formed based on the incident-side mirror and the aiming-side mirror, each of the cyclic assemblies comprising a field lens and an objective lens arranged opposite to each other on both sides, where n is a positive integer greater than or equal to 2; light is adapted to be incident from an incident point on the field lens side of one of the cyclic assemblies and aimed at the geometric center of an objective lens of the cyclic assemblies, and adapted to undergo n cyclic reflections between the incident-side mirror and the aiming-side mirror, and then exit from an exit point on the field lens side of the cyclic assemblies, ultimately forming multiple rows and columns of light spots on the aiming-side mirror and the incident-side mirror respectively.

[0007] Optionally, in the multi-reflection chamber according to the present invention, the geometric center of one objective lens of the circulation assembly is used as the original aiming point. A first new spherical mirror and a second new spherical mirror are added at the incident point and exit point positions on the field mirror side of one of the circulation assemblies, respectively. Based on the spherical mirror at the original aiming point, the first new spherical mirror, and the second new spherical mirror, a new circulation assembly is formed. The spherical mirror at the original aiming point serves as the field mirror of the new circulation assembly, and the first new spherical mirror and the second new spherical mirror serve as the objective lenses of the new circulation assembly. Light is adapted to enter from the new incident point on the field mirror side of the new circulation assembly and aim at the geometric center of the first new spherical mirror or the second new spherical mirror. After n+1 cyclic reflections between the incident-side mirror and the aiming-side mirror, light exits from the new exit point on the field mirror side of the new circulation assembly, ultimately forming multiple rows and columns of light spots on the aiming-side mirror and the incident-side mirror, respectively.

[0008] Optionally, in the multi-pass counter-current chamber according to the present invention, the type of the circulation assembly includes the Pickett Bradley White cell (PBWC) assembly, the Bernstein Herzberg White cell (BHWC) assembly, and the Chernin multipass matrix system matrix-type multi-pass counter-current chamber.

[0009] Optionally, in the multi-reflection chamber according to the present invention, the incident-side mirror surface includes a first spherical mirror and a second spherical mirror joined together, and the aiming-side mirror surface includes a third spherical mirror, a fourth spherical mirror, and a fifth spherical mirror joined together; wherein, a first circulation assembly is formed based on the third spherical mirror, the first spherical mirror, and the second spherical mirror, and the third spherical mirror serves as the field lens of the first circulation assembly, and the first spherical mirror and the second spherical mirror respectively serve as the objective lenses of the first circulation assembly; a second circulation assembly is formed based on the second spherical mirror, the fourth spherical mirror, and the fifth spherical mirror, and the second spherical mirror serves as the field lens of the second circulation assembly, and the fourth spherical mirror... The first and fifth spherical mirrors serve as the objective lenses of the second cyclic assembly, respectively. The light is adapted to enter from the incident point on one side of the second spherical mirror and aim at the geometric center of the fifth spherical mirror. It is also adapted to undergo two cyclic reflections between the incident side mirror and the aiming side mirror before exiting from the exit point on one side of the second spherical mirror. Each time the light undergoes a complete reflection process on the first cyclic assembly, it will undergo a one-step reflection on the second cyclic assembly and form a light spot on the field lens of the second cyclic assembly. Finally, two rows of light spots are formed on the aiming side mirror and four rows of light spots are formed on the incident side mirror.

[0010] Optionally, in the multi-reflection chamber according to the present invention, the first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror have equal radii of curvature, and the distance between the incident side mirror and the aiming side mirror is equal to the radius of curvature.

[0011] Optionally, in the multi-reverse gas chamber according to the present invention, the first circulation component and the second circulation component are respectively a PBWC component or a BHWC component.

[0012] Optionally, in the multi-reflection chamber according to the present invention, the first circulation assembly and the second circulation assembly are each a PBWC assembly; the first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shapes of the incident side mirror and the aiming side mirror are both rectangular; wherein, each reflection includes multiple reflections.

[0013] Optionally, in the multi-reflector chamber according to the present invention, the first curvature center of the first spherical mirror is located at the geometric center of the third spherical mirror; the second curvature center of the second spherical mirror is located directly below the first curvature center; the third curvature center of the third spherical mirror is located at the center of the boundary line between the first and second spherical mirrors; the fourth curvature center of the fourth spherical mirror is located at the geometric center of the second spherical mirror and is on the same horizontal line as the third curvature center; and the fifth curvature center of the fifth spherical mirror is located directly above the fourth curvature center.

[0014] Optionally, in the multi-reflection chamber according to the invention, the light undergoes a complete reflection process on the first circulation component each time, which is suitable for forming a continuous plurality of light spots on the first circulation component.

[0015] Optionally, in the multi-reflection chamber according to the present invention, forming a continuous plurality of light spots on the first circulation assembly includes: sequentially forming a light spot sequence on the field lens of the first circulation assembly, the light spot sequence comprising a third number of light spots; overlapping and forming a second number of light spots at the same position on the second spherical lens of the first circulation assembly, the second number representing the number of times the spatial position of each light spot on the second spherical lens is reused; and overlapping and forming a first number of light spots at the same position on the first spherical lens of the first circulation assembly, the first number representing the number of times the spatial position of each light spot on the first spherical lens is reused.

[0016] Optionally, in the multi-reflection chamber according to the present invention, each complete reflection of the light on the first circulation assembly is adapted to form a continuous 2×(2×n²-1) light spots on the first circulation assembly, where n² represents the number of light spot rows formed by the light on the aiming side mirror surface; the first complete reflection of the light on the first circulation assembly is adapted to form the first to 2×(2×n²-1) light spots on the first circulation assembly; the first quantity is n²-1, and the second quantity is n².

[0017] Optionally, in the multi-reflection chamber according to the present invention, the number of complete reflection processes of the light on the first circulation component is equal to the number of light spots formed on the field lens of the second circulation component, 2×n1, where n1 represents the number of light spot rows formed on the incident side mirror; the number of times the spatial position of each light spot on the field lens of the first circulation component is reused is equal to the number of complete reflection processes of the light on the first circulation component, 2×n1.

[0018] Optionally, in the multi-reaction chamber according to the present invention, the total number of passes N of the multi-reaction chamber is... PP = [2×(2×n2-1)]×(2×n1)+2, where n1 and n2 are both positive integers; the optical path length of the multi-reflection chamber is opl = N PP ×d, where d represents the distance between the incident-side mirror and the aiming-side mirror.

[0019] Optionally, in the multi-reflection chamber according to the present invention, the distance between the first curvature center of the first spherical mirror and the second curvature center of the second spherical mirror is d. r2 / 2, where d r2The distance between the rows of light spots on the aiming side mirror is d; the distance between the fourth curvature center of the fourth spherical mirror and the fifth curvature center of the fifth spherical mirror is d. r1 / 2, where d r1 This indicates the spacing between the light spot rows on the incident side mirror surface.

[0020] Optionally, in the multi-reflector chamber according to the present invention, the first circulation assembly and the second circulation assembly are respectively a BHWC assembly and a PBWC assembly; the third spherical mirror is a rectangular concave spherical mirror with two notches at the top and bottom; the first spherical mirror, the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror, and the projection shapes of the incident side mirror and the aiming side mirror are both rectangular; the light is suitable for exiting from the exit point above the second spherical mirror, which is horizontally adjacent to the incident point.

[0021] Optionally, in the multi-reflector chamber according to the present invention, the first circulation assembly and the second circulation assembly are respectively a PBWC assembly and a BHWC assembly; the second spherical mirror is a rectangular concave spherical mirror with upper and lower notches; the first spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror is rectangular; the light is adapted to enter from the incident point at the notch above the second spherical mirror and aim at the geometric center of the fifth spherical mirror, and is adapted to exit from the exit point at the notch below the second spherical mirror.

[0022] Optionally, in the multi-reflector chamber according to the present invention, the first circulation assembly and the second circulation assembly are each a BHWC assembly; the first spherical mirror and the second spherical mirror are rectangular concave spherical mirrors with a notch at the top and symmetrical about the y-axis; the third spherical mirror is a rectangular concave spherical mirror with two notches at the top and bottom; the fourth spherical mirror and the fifth spherical mirror are both rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror; the projection shape of the aiming side mirror is rectangular; the light is adapted to enter from the incident point at the notch of the second spherical mirror and aim at the geometric center of the fifth spherical mirror, and is adapted to exit from the exit point at the notch of the first spherical mirror.

[0023] The multi-reflection chamber provided by the present invention includes an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides. Each incident-side mirror and aiming-side mirror includes multiple spherical mirrors spliced ​​together. Multiple circulating assemblies are formed based on the incident-side mirror and the aiming-side mirror. Each circulating assembly includes a field lens and an objective lens arranged opposite to each other on both sides. Light can enter from the incident point on the field lens side of one of the circulating assemblies and aim at the geometric center of one of the objective lenses of that circulating assembly. After multiple cyclic reflections between the incident-side mirror and the aiming-side mirror, light exits from the exit point on the field lens side of that circulating assembly, ultimately forming multiple rows and columns of light spots on the aiming-side mirror and the incident-side mirror, respectively. Therefore, the multi-reflection chamber of the present invention has a simple structure and can simultaneously improve the utilization rate of both mirrors and the number of times the spatial position of the light spots can be reused, thereby increasing the optical path length and thus improving the detection accuracy and stability of the multi-reflection chamber for trace gases.

[0024] Furthermore, according to the technical solution of the present invention, by adding two new spherical mirrors at the incident and exit points on the field lens side of one of the circulation components, a new circulation component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror, and the second new spherical mirror. The spherical mirror at the original aiming point serves as the field lens of the new circulation component, and the two new spherical mirrors serve as the objective lenses of the new circulation component, thereby obtaining more recirculating multi-reflection chambers. In this way, by increasing the number of circulation components, the optical path length and optical path length-to-volume ratio of the multi-reflection chambers can be further improved.

[0025] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0026] To achieve the foregoing and related objectives, certain illustrative aspects are described herein in conjunction with the following description and accompanying drawings. These aspects indicate various ways in which the principles disclosed herein may be practiced, and all aspects and their equivalents are intended to fall within the scope of the claimed subject matter. The foregoing and other objectives, features, and advantages of this disclosure will become more apparent from the following detailed description, taken in conjunction with the accompanying drawings. Throughout this disclosure, the same reference numerals generally refer to the same parts or elements.

[0027] Figures 1a and 1b show the structural schematic of an existing classic PBWC component and the schematic of the light spot pattern formed on the field lens, respectively.

[0028] Figures 2a and 2b respectively show a structural schematic diagram of a multi-reflection chamber 200 provided according to an embodiment of the present invention, and a schematic diagram of the light spot pattern formed on the two side mirrors of the multi-reflection chamber 200;

[0029] Figure 3 shows a schematic diagram of the formation sequence of the first 28 light spots on both sides of the multi-reflection chamber according to an embodiment of the present invention;

[0030] Figure 4 shows a schematic diagram of the formation sequence of 114 complete light spots (where the exit point "out" can be regarded as the 114th light spot) formed on both sides of the multi-reflection chamber in 114 passes according to an embodiment of the present invention.

[0031] Figure 5 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on PBWC-PBWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0032] Figures 6a and 6b show the structural schematic of the existing classic BHWC component and the schematic diagram of the light spot pattern formed on the field lens, respectively.

[0033] Figure 7 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on BHWC-PBWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0034] Figure 8 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on PBWC-BHWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0035] Figure 9 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on BHWC-BHWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0036] Figure 10 shows a schematic diagram of the light spot pattern formed on both sides of the mirror surface of the multi-reflector chamber based on PBWC-PBWC-PBWC according to an embodiment of the present invention.

[0037] Figure 11 shows a line graph of the optical path length and optical path length-to-volume ratio of n-fold cyclic multi-reflection chambers with different numbers of light spot rows on the field lens of the PBWC. Detailed Implementation

[0038] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0039] It should be noted that the PBWC (Pickett Bradley White cell) and BHWC (Bernstein Herzberg White cell) components are fundamental components of the multi-reactor chamber.

[0040] Figures 1a and 1b show schematic diagrams of the structure of a classic PBWC assembly and the light spot pattern formed on the field lens, respectively. As shown in Figures 1a and 1b, the classic PBWC assembly consists of three concave spherical mirrors with equal radii of curvature. For ease of description, the side on which the light is incident is called the incident side, and the side on which the light is aimed is called the aiming side. The number of reflections at the same spatial position of the light spot, i.e., the number of overlapping light spots, is called the number of times the spatial position of the light spot is reused. The spherical mirror on the incident side of the classic PBWC assembly is a rectangular field lens M3, and the aiming side has two circular objectives M1 and M2. The distance between the two mirrors is equal to the radius of curvature of the spherical mirror. The center of curvature C1 of objective lens M1 and the center of curvature C2 of objective lens M2 are located on the field lens M3 and do not coincide. The center of curvature C3 of the field lens M3 is located at the center of objective lenses M1 and M2. The reflection pattern of a classic PBWC component is as follows: As a confocal resonant cavity, the gas cell refocuses the image of the incident aperture onto the field lens until the beam leaves the gas cell, ultimately forming two beams on the field lens M3. The total number of beams is 2×n. PBWC , where n PBWC Let n be the number of rows of light spots formed on field lens M3, with each light spot's spatial position being reused once. The first and second rows of light spots on field lens M3 are focused by objective lens M2 and objective lens M1, respectively. The number of light spots on objective lenses M1 and M2 is 1, and the number of times the spatial position of the light spot on objective lens M1 is reused is n. PBWC The spatial position of the light spot on objective lens M2 is reused n times. PBWC +1. Number of passes N for the classic PBWC component. PBWC For: N PBWC =2×(2×n) PBWC +1)

[0041] Based on the reflection characteristics of classic PBWC modules, the field lens M3 of a classic PBWC module has a uniform light spot distribution and high mirror utilization, but each light spot is reflected only once (the spatial position of each light spot on the field lens M3 is reused 1 time). In contrast, the objective lenses M1 and M2 have a higher number of times the spatial position of the light spot is reused, but there is only one light spot, resulting in low mirror utilization.

[0042] To address the shortcomings and deficiencies of classic PBWC components, and in order to simultaneously improve the number of times the spatial position of the light spot on the field lens M3 can be reused and the mirror utilization rate on the objectives M1 and M2, this embodiment of the invention provides a multi-reflection chamber 200.

[0043] Figures 2a and 2b respectively show a structural schematic diagram of a multi-reflector chamber 200 provided according to an embodiment of the present invention, and schematic diagrams of the light spot patterns formed on the two mirror surfaces of the multi-reflector chamber 200. It should be noted that the light spot pattern formed on either mirror surface can be observed from the center of the multi-reflector chamber 200 facing that mirror surface.

[0044] As shown in Figures 2a and 2b, a Cartesian coordinate system is established by taking the midpoint of the line connecting the geometric centers of the two mirrors of the multi-reflector chamber 200 as the origin O and the straight line containing the geometric center as the z-axis.

[0045] In some embodiments, the present invention makes three main improvements to the classic PBWC assembly: 1) Two rectangular spherical mirrors M4 and M5 are added at the original exit and incident points of the PBWC; 2) The objective lenses M1 and M2 are changed from circular to rectangular, so that M2, together with the newly added M4 and M5, forms a new PBWC; 3) The incident and exit points are adjusted from the field lens M3 side to the M2 side.

[0046] Based on the above improvements, two independent PBWC components can be formed using five rectangular spherical mirrors, resulting in the multi-reflection chamber 200 of this invention. In this multi-reflection chamber 200, M2 serves as both the objective lens of the classic PBWC component and the field lens of the newly added PBWC component. Two rows of light spots are formed on M2, and two rows of mirrored light spots are formed on M1, thereby significantly improving the mirror utilization of M1 and M2. Utilizing the principle of optical path reversibility, by placing the new objective lenses M4 and M5 at the exit and entrance positions of the classic PBWC component, the reflection processes of the two PBWC components can be nested, allowing the field lens M3 to maintain high mirror utilization while effectively increasing the number of times each light spot can be reused in its spatial position. It can be seen that the multi-reflection chamber 200 based on the dual-circulation mode of the double-sided field mirrors according to the present invention can simultaneously improve the utilization rate of the double-sided mirrors and the number of times the spatial position of the light spot is reused while keeping the chamber structure simple, thereby increasing the optical path.

[0047] It is worth noting that in some embodiments, the multi-reflector chamber 200 of the present invention can be obtained based on two PBWC components, that is, in the multi-reflector chamber 200 of the present invention, two PBWC components can be formed based on five spherical mirrors, but the present invention is not limited thereto.

[0048] In other embodiments, in the multi-reflector chamber 200 of the present invention, a PBWC assembly and a BHWC assembly can be formed based on five spherical mirrors, or two BHWC assemblies can be formed based on five spherical mirrors.

[0049] In an embodiment of the present invention, as shown in Figures 2a and 2b, the multi-reflection chamber 200 includes an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides (the incident side and the aiming side). The incident-side mirror and the aiming-side mirror together include five spherical mirrors (specifically rectangular concave spherical mirrors). The incident-side mirror arranged on the incident side includes a first spherical mirror M1 and a second spherical mirror M2 that are spliced ​​together. The aiming-side mirror arranged on the aiming side includes a third spherical mirror M3, a fourth spherical mirror M4, and a fifth spherical mirror M5 that are spliced ​​together.

[0050] In the multi-reflector chamber 200 of the present invention, two circulation components (a first circulation component and a second circulation component) can be formed based on five spherical mirrors. These two circulation components can be two PBWC components (PBWC-PBWC), or they can be a PBWC component and a BHWC component (BHWC-PBWC or PBWC-BHWC), or both can be two BHWC components. That is, the first circulation component and the second circulation component can be either PBWC components or BHWC components, and the present invention does not impose specific limitations in this regard.

[0051] It should be noted that Figures 2a and 2b show a multi-reflector chamber 200 based on PBWC-PBWC, that is, two PBWC components are formed based on five spherical mirrors. Below, the multi-reflector chamber 200 in this embodiment of the invention will be described in detail using the PBWC-PBWC based multi-reflector chamber 200 as an example.

[0052] As shown in Figures 2a and 2b, a first circulation assembly can be formed based on a third spherical mirror M3, a first spherical mirror M1, and a second spherical mirror M2. The third spherical mirror M3 serves as the field lens of the first circulation assembly, and the first spherical mirror M1 and the second spherical mirror M2 serve as the objective lenses of the first circulation assembly. Furthermore, a second circulation assembly can be formed based on a second spherical mirror M2, a fourth spherical mirror M4, and a fifth spherical mirror M5. The second spherical mirror M2 serves as the field lens of the second circulation assembly, and the fourth spherical mirror M4 and the fifth spherical mirror M5 serve as the objective lenses of the second circulation assembly.

[0053] It should be noted that the first loop component and the second loop component can be either a PBWC component or a BHWC component, and the present invention does not impose specific limitations on them. In some embodiments, the first loop component and the second loop component can each be a PBWC component, for example, the first loop component and the second loop component are PBWC-a and PBWC-b, respectively.

[0054] In an embodiment of the present invention, as shown in Figures 2a and 2b, light can be incident from the incident point "in" on the side of the second spherical mirror M2 (i.e., the field lens of the second circulation assembly) on the incident side (e.g., above) into the multi-reflection chamber 200 and aimed at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation assembly) on the aiming side, that is, the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation assembly) on the aiming side. The incident light undergoes two cycles of reflection between the two mirrors (the incident side mirror and the aiming side mirror) (each cycle includes multiple reflections) before exiting. Here, during the two cycles of reflection, the light undergoes a complete reflection process on the first cycle component and then a reflection on the second cycle component, forming a light spot on the field mirror M2 of the second cycle component. Ultimately, two rows of light spots (i.e., multiple rows of two rows of light spots) can be formed on the aiming side mirror (the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5), and four rows of light spots (i.e., multiple rows of four rows of light spots) can be formed on the incident side mirror (the first spherical mirror M1 and the second spherical mirror M2).

[0055] In some embodiments, the radii of curvature (which may be represented as R) of the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 are equal, and the distance d between the incident-side mirror and the aiming-side mirror is equal to the radius of curvature R. In one embodiment, the radius of curvature of each spherical mirror is 1m, but the present invention is not limited thereto.

[0056] In some embodiments, as shown in Figures 2a and 2b, the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 can all be rectangular concave spherical mirrors. The second circulation assembly formed based on the second spherical mirror M2, the fourth spherical mirror M4, and the fifth spherical mirror M5 is specifically a second PBWC assembly (PBWC-b), and the first circulation assembly formed based on the third spherical mirror M3, the first spherical mirror M1, and the second spherical mirror M2 is specifically a first PBWC assembly (PBWC-a). That is, the first circulation assembly and the second circulation assembly can each be a PBWC assembly. Furthermore, the projection shape of the incident-side mirror formed by the first spherical mirror M1 and the second spherical mirror M2 is rectangular, and the first spherical mirror M1 and the second spherical mirror M2 are symmetrical about the y-axis. The projection shape of the aiming-side mirror formed by the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 is rectangular.

[0057] Specifically, the first spherical mirror M1 and the second spherical mirror M2 are the same size and are arranged side by side on the incident side. Specifically, the first spherical mirror M1 and the second spherical mirror M2 are joined together along the x-axis, and the projection shape of the incident side mirror along the z-axis is rectangular. The fourth spherical mirror M4 and the fifth spherical mirror M5 are the same size and are arranged side by side below the third spherical mirror M3 on the aiming side, joined to the bottom of the third spherical mirror M3. Furthermore, the sum of the widths of the fourth spherical mirror M4 and the fifth spherical mirror M5 is equal to the width of the third spherical mirror M3, thus making the projection shape of the aiming side mirror formed by the joining of the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 rectangular along the z-axis.

[0058] It should be noted that Cn is used to represent the center of curvature of the spherical mirror Mn. The centers of curvature of the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 are the first center of curvature C1, the second center of curvature C2, the third center of curvature C3, the fourth center of curvature C4, and the fifth center of curvature C5, respectively.

[0059] As shown in Figures 2a and 2b, the spatial positions of the curvature centers of the five spherical mirrors are set as follows: the first curvature center C1 of the first spherical mirror M1 on the incident side is located at the geometric center of the third spherical mirror M3 on the aiming side; the second curvature center C2 of the second spherical mirror M2 on the incident side is located directly below the first curvature center C1. The third curvature center C3 of the third spherical mirror M3 is located at the center of the boundary line between the first spherical mirror M1 and the second spherical mirror M2. The fourth curvature center C4 of the fourth spherical mirror M4 is located at the geometric center of the second spherical mirror M2 on the incident side, and is on the same horizontal line as the third curvature center C3. The fifth curvature center C5 of the fifth spherical mirror M5 is located directly above the fourth curvature center C4.

[0060] Light can enter the multi-reflection chamber 200 from the incident point "in" on the side (above) of the second spherical mirror M2 (the field lens of the second circulation assembly) on the incident side, and aim at the geometric center of the fifth spherical mirror M5 (one of the objectives of the second circulation assembly). That is, the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (one of the objectives of the second circulation assembly) on the aiming side. After two cycles of reflection between the two mirror surfaces (the incident side mirror surface and the aiming side mirror surface), the incident light can finally exit from the exit point "out" on the side (above) of the second spherical mirror M2 (where the exit point "out" can be...). The light rays exit from the incident point (horizontally adjacent). Here, the two-stage cyclic reflection process includes: for each complete reflection process on the first cyclic component, the light rays undergo a step reflection on the second cyclic component and form a light spot on the field mirror M2 of the second cyclic component. Finally, after multiple complete reflection processes on the first cyclic component, the light rays exit. Ultimately, the light rays form two rows of light spots (multiple rows of two light spots) on the aiming side mirrors (third spherical mirror M3, fourth spherical mirror M4, and fifth spherical mirror M5), and four rows of light spots (multiple rows of four light spots) on the incident side mirrors (first spherical mirror M1 and second spherical mirror M2).

[0061] For ease of description, the following example uses a multi-reflector 200 with 4 rows of light spots formed on both the incident and aiming mirrors and 114 passes to illustrate the reflection pattern of light in the multi-reflector 200.

[0062] Figure 3 shows a schematic diagram of the formation sequence of the first 28 light spots on both sides of the multi-reflection chamber according to an embodiment of the present invention.

[0063] Figure 4 shows a schematic diagram of the formation sequence of 114 complete light spots (where the exit point "out" can be regarded as the 114th light spot) formed on both sides of the multi-reflection chamber in 114 passes according to an embodiment of the present invention.

[0064] It should be noted that the numbers in Figures 3 and 4 are used to indicate the formation order of the light spots.

[0065] In some embodiments, as shown in FIG3, the reflection of light in the multi-reflector chamber 200 is as follows: Light enters the multi-reflector chamber 200 from the incident point "in" of the second circulation component, and undergoes a first reflection with the geometric center "1" of the fifth spherical mirror M5 (objective lens) of the second circulation component (PBWC-b) as the aiming point. Subsequently, the light forms a light spot "2" at a new position on the field mirror M2 (second spherical mirror) of the second circulation component. The light spot "2" is symmetrical to the incident point "in" about the curvature center C5 of the fifth spherical mirror M5. This can be understood as the first and second steps of reflection on the second circulation component. Since the fifth spherical mirror M5 of the second circulation component is exactly set at the incident position of the first circulation component, the process of light traveling from the light spot "1" position on the fifth spherical mirror M5 to the light spot "2" position on the second spherical mirror M2 is equivalent to light entering the first circulation component (PBWC-a). Next, the first complete reflection process will occur on the first circulating assembly: starting from the initial light spot "1" of the first circulating assembly, a light spot sequence "1-3-5-7-9-11-13" will be formed sequentially on the field lens side (third spherical mirror side) of the first circulating assembly. This light spot sequence contains 7 light spots. Furthermore, 4 light spots "2-6-10-14" will overlap at the same position on the second spherical mirror M2 (objective lens) of the first circulating assembly, meaning the spatial position of the light spots on the second spherical mirror M2 will be reused 4 times. Similarly, 3 corresponding light spots "4-8-12" will overlap at the same position on the first spherical mirror M1 (objective lens) of the first circulating assembly, meaning the spatial position of the light spots on the first spherical mirror M1 will be reused 3 times. The 1st to 14th light spots can represent the first complete reflection process formed on the first circulating assembly.

[0066] Since the fourth spherical mirror M4 (objective) of the second circulation assembly is positioned at the exit position of the first circulation assembly, when light continues to travel from the light spot "14" on the second spherical mirror M2 to the light spot "15" on the fourth spherical mirror M4, a new light spot "16" will be formed on the field mirror M2 (second spherical mirror) of the second circulation assembly. The light spots "16" and "14" are symmetrical about the curvature center C4 of the fourth spherical mirror M4. This can be understood as the third reflection in the second circulation assembly. Simultaneously, according to the principle of optical reversibility, the process of light rays traveling from spot "15" on M4 to spot "16" on M2 is equivalent to the light rays re-entering the first circulation component, initiating a second complete reflection process on the first circulation component: starting from the initial spot "15" of the first circulation component, a sequence of spot patterns "15-17-19-21-23-25-27" is formed sequentially on the field mirror side (third spherical mirror side) of the first circulation component, containing 7 spots; 4 spots "16-20-24-28" are superimposed at the same position on the second spherical mirror M2 (objective lens) of the first circulation component, and 3 corresponding spots "18-22-26" are superimposed at the same position on the first spherical mirror M1 (objective lens) of the first circulation component. Spots 15 to 28 can represent the second complete reflection process formed on the first circulation component.

[0067] It can be observed that during the multiple reflections of the incident light between the incident-side mirror and the aiming-side mirror, that is, before the light exits, for each complete reflection process (i.e., one small cycle a cell) on the first loop assembly, a one-step reflection (i.e., one step reflection of the large cycle b cell) occurs on the second loop assembly, forming a new light spot on the field lens M2 (second spherical mirror) of the second loop assembly (one light spot corresponds to one reflection step). In other words, each light spot on the field lens of the second loop assembly corresponds to one complete reflection process of the light on the first loop assembly. Moreover, the one-step reflection on the second loop assembly (one reflection of the large cycle b cell) is also the first step of the next complete reflection process (the next small cycle a cell) on the first loop assembly. Finally, the light exits after undergoing multiple complete reflection processes on the first loop assembly. Here, the second loop assembly corresponds to the large cycle b cell, and the first loop assembly corresponds to the small cycle a cell.

[0068] It should be noted that each complete reflection of light on the first circulating component creates multiple consecutive light spots on that component. For example, the first complete reflection of light on the first circulating component can create the 1st to 14th light spots (14 consecutive light spots) on the component.

[0069] Furthermore, each complete reflection process of light on the first circulating component, forming multiple consecutive light spots on the first circulating component, specifically includes: forming a sequence of light spots sequentially on the field mirror side of the first circulating component, the light spot sequence containing a third number of light spots; overlapping to form a second number of light spots at the same position on the second spherical mirror M2 of the first circulating component; and overlapping to form a first number of light spots at the same position on the first spherical mirror M1 of the first circulating component. Here, it can be understood that the second number represents the number of times the spatial position of each light spot on the second spherical mirror M2 is reused, and the first number represents the number of times the spatial position of each light spot on the first spherical mirror M1 is reused. It should be noted that the order in which the light spots are formed on the first circulating component can be seen in the numbers in Figures 3 and 4.

[0070] Repeat the above process until the eighth complete reflection process of the first circulation component is completed. As shown in Figure 4, the final 114th light spot (where the exit point "out" can be regarded as the 114th light spot) is symmetrical with the 112th light spot on the second spherical mirror M2 about the curvature center C5 of the fifth spherical mirror M5, that is, the exit point "out" on the field mirror side of the second circulation component.

[0071] In some embodiments, it is assumed that the number of light spot rows ultimately formed by the light on the aiming-side mirror surface (including the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5) is n2. Then, for each complete reflection process of the light on the first circulating assembly, 2 × (2 × n² - 1) consecutive light spots will be formed on the first circulating assembly, where n2 represents the number of light spot rows formed by the light on the aiming-side mirror surface. That is, the aforementioned consecutive multiple light spots can specifically be 2 × (2 × n² - 1) consecutive light spots. Here, n2 represents the number of light spot rows formed by the light on the aiming-side mirror surface, and n2 is a positive integer.

[0072] Accordingly, when light undergoes the first complete reflection process on the first circulating component, it will form the first to 2×(2×n²-1) light spots on the first circulating component. When light undergoes the second complete reflection process on the first circulating component, it will form the second to 4×(2×n²-1)+1 light spots on the first circulating component.

[0073] In some embodiments, assuming that the incident light undergoes multiple reflections between the incident-side mirror and the aiming-side mirror and exits from the exit point of the second spherical mirror M2, and the number of light spot rows finally formed on the incident-side mirror (including the first spherical mirror M1 and the second spherical mirror M2) is n1, then the position of the 2nd × (2 × n2 - 1) × 2 × n1 + 2 light spot formed after the light undergoes the 2nd × n1 complete reflection process on the first circulation component is the position of the exit point "out" above the second spherical mirror M2.

[0074] Since the second spherical mirror M2 serves as the field mirror of the second loop assembly, each light spot on the field mirror of the second loop assembly corresponds to a complete reflection process of light on the first loop assembly. Therefore, the number of complete reflection processes of light on the first loop assembly is equal to the number of light spots formed on the field mirror M2 (the second spherical mirror) of the second loop assembly, which is 2 × n1. Here, n1 represents the number of light spot rows formed on the incident side mirror surface, and n1 is a positive integer. Furthermore, the number of times the spatial position of each light spot on the field mirror M3 (the third spherical mirror) of the first loop assembly is reused is equal to the number of complete reflection processes of light on the first loop assembly, which is 2 × n1. It can be understood that for every complete reflection process of light on the first loop assembly, the number of times the spatial position of each light spot on the field mirror of the first loop assembly is reused increases by 1.

[0075] It should be noted that, based on the theory of classical cyclic components, in the first cyclic component, the number of times the spatial position of each light spot on the first spherical mirror M1 (objective) is reused (i.e., the first quantity) is n2-1, and the number of times the spatial position of each light spot on the first spherical mirror M1 (objective) is reused (i.e., the second quantity) is n2. That is to say, the first quantity is n2-1, and the second quantity is n2, where n2 represents the number of light spot rows formed by the light on the aiming side mirror surface.

[0076] Based on the theory of classical cyclic components, in the second cyclic component, the spatial position of each light spot on the fourth spherical mirror M4 (objective) is reused n1 times, and the spatial position of each light spot on the fifth spherical mirror M5 (objective) is reused n1+1 times. Here, n1 represents the number of light spot rows formed by the light on the incident side mirror surface.

[0077] Based on this, the total number of passes through the multi-reflection chamber 200 of the present invention is equal to the product of the number of passes through the first circulation component and the number of complete reflection processes of light on the first circulation component (i.e., the number of light spots formed on the field mirror of the second circulation component, 2 × n1) plus 2. That is, the total number of passes through the multi-reflection chamber 200, N... PP = [2×(2×n²-1)]×(2×n¹)+2. Where N PPThe total number of passes through the multi-reflection chamber 200 is represented by n1 and n2, both of which are positive integers. Here, the number of passes through the first circulation component refers to the number of times the light passes through the first circulation component to complete one reflection process, that is: the number of light spots formed on the first circulation component for each complete reflection process of the light is 2×(2×n2-1).

[0078] The total number of passes N through the multi-reaction chamber 200 is determined. PP Then, furthermore, it can be based on the total number of passes N PP The optical path length opl of the multi-reflector chamber 200 is calculated using the distance between the incident-side mirror and the aiming-side mirror. Specifically, the optical path length opl of the multi-reflector chamber 200 is N. PP ×d=[2×(2×n2-1)]×(2×n1)×d+2×d. Where, d represents the distance between the incident-side mirror and the aiming-side mirror.

[0079] Therefore, the optical path length (opl) of the multi-reflector chamber is related to the following parameters: the number of light spot rows (n1) formed by the light on the incident-side mirror, the number of light spot rows (n2) formed by the light on the aiming-side mirror, and the distance d between the incident-side and aiming-side mirrors (equal to the radius of curvature of each spherical mirror). Thus, given a fixed distance d between the incident-side and aiming-side mirrors, multi-reflector chambers with different optical paths can be obtained by adjusting the number of light spot rows (n1) formed by the light on the incident-side mirror and the number of light spot rows (n2) formed by the light on the aiming-side mirror.

[0080] Figure 5 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on PBWC-PBWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0081] As shown in Figure 5, on the aiming side, the distance between the curvature centers C1 and C2 of the two objectives M1 and M2 of the first circulation assembly is the spot spacing d on its field lens M3. r2 Half of that. That is, the distance between the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 is the spot spacing d on the aiming side mirror surface. r2 Half of it. That is, the distance between the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 is d. r2 / 2, where d r2 This represents the spacing between the rows of light spots on the aiming side mirror. Based on this, by adjusting the positions of the first curvature center C1 and the second curvature center C2, the spacing between the rows of light spots on the aiming side mirror can be adjusted, thereby increasing or decreasing the number of light spot rows formed on the aiming side mirror. Furthermore, the distance in the x-direction between the aiming point "aim" and C1C2 is the spacing d between the rows of light spots on the aiming side mirror. c2Half of it.

[0082] On the incident side, the distance between the centers of curvature C4 and C5 of the two objectives M4 and M5 of the second circulation assembly is the spot spacing d on the incident side mirror surface. r1 Half of that. That is, the distance between the fourth curvature center C4 of the fourth spherical mirror M4 and the fifth curvature center C5 of the fifth spherical mirror M5 is the light spot row spacing d on the incident side mirror surface. r1 Half of it. That is, the distance between the fourth curvature center C4 of the fourth spherical mirror M4 and the fifth curvature center C5 of the fifth spherical mirror M5 is d. r1 / 2, where d r1 This represents the spacing between the light spot rows on the incident mirror surface. Based on this, by adjusting the positions of the fourth curvature center C4 and the fifth curvature center C5, the spacing between the light spot rows on the incident mirror surface can be adjusted, thereby increasing or decreasing the number of light spot rows formed on the incident mirror surface. Furthermore, the distance in the x-direction between the incident point "in" and C4C5 is the light spot column spacing d on the incident mirror surfaces (M1 and M2). c1 Half of it. Furthermore, the distance in the x-direction between the third curvature centers C3 and C4C5 is equal to the spacing d between the light spots on the incident mirror surface. c1 .

[0083] It is understandable that, based on the above reflection laws and the optical path calculation formula opl = N PP ×d=[2×(2×n2-1)]×(2×n1)×d+2×d, and multi-reflector chambers with different optical paths can be designed according to actual needs. Specifically, by adjusting the positions of the fourth curvature center C4 and the fifth curvature center C5, the spacing between the light spots on the incident side mirror can be adjusted, thereby increasing or decreasing the number of light spot rows n1 formed on the incident side mirror; by adjusting the positions of the first curvature center C1 and the second curvature center C2, the spacing between the light spots on the aiming side mirror can be adjusted, thereby increasing or decreasing the number of light spot rows n2 formed on the aiming side mirror. Based on this, multi-reflector chambers with different numbers of light spot rows and different spacing between light spot rows can be obtained. The number of light spot rows n1 formed on the incident side mirror and the number of light spot rows n2 formed on the aiming side mirror can affect the optical path of the multi-reflector chamber, thus enabling the obtaining of multi-reflector chambers with different optical paths. For example, when the mirror spacing d=1m, n1=20, and n2=20, a multi-reflector chamber with an optical path of three kilometers can be obtained.

[0084] As mentioned above, the multi-reflector chamber includes a first spherical mirror M1, a second spherical mirror M2, a third spherical mirror M3, a fourth spherical mirror M4, and a fifth spherical mirror M5. The radii of curvature (which can be represented as R) of the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 are equal, and the distance between the incident side mirror and the aiming side mirror is equal to the radius of curvature R.

[0085] Refer to Figure 5 for the mirror coordinate axes and Table 1 below for the various parameters of the multi-reflector chamber based on PBWC-PBWC. Wherein, n spots n represents the number of light spots on each spherical mirror. re The number of times the spatial position of the light spot on each spherical mirror is reused is represented, and d represents the distance between the incident-side mirror and the aiming-side mirror. As shown in Figure 5, in the multi-reflection chamber, the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 are located on the aiming-side mirror. The third curvature center C3 of the third spherical mirror M3, the fourth curvature center C4 of the fourth spherical mirror M4, and the fifth curvature center C5 of the fifth spherical mirror M5 are located on the incident-side mirror. The incident point "in" is located to one side (above) of the second spherical mirror M2 (i.e., the field lens of the second circulation assembly), and the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (i.e., one of the objective lenses of the second circulation assembly).

[0086] Table 1. Parameters of the multi-chamber reaction system based on PBWC-PBWC

[0087] It should also be noted that the optical path stability of the multi-reflector chamber is the main factor restricting its performance and long-term reliability in actual measurement. In practical applications, interference from the external environment may have a certain impact on the optical path. For example, factors such as vibration at the production site may cause slight changes in the direction of incident light, and local deformation of the chamber caused by changes in ambient temperature may cause deviation of the curvature center of the spherical mirror. The multi-reflector chamber based on PBWC-PBWC in this invention is a typical confocal cavity structure, which has the following two main advantages: (1) The optical path is not sensitive to the angle of incident light. Specifically, the aiming point "aim" is located on the fifth spherical mirror M5. The slight shift in the position of the aiming point will only affect the spatial position of the two columns of light spots on the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 on the aiming side. It has almost no impact on the position of the outgoing light spot and the measurement. Therefore, the optical path adjustment is extremely simple and is not sensitive to slight disturbances in the direction of incident light caused by environmental factors. In addition, the light spot on the aiming side is stable. (2) The larger the spacing, the less sensitive the optical path is to the angle of incident light; (3) The beam quality is good and the beam spot deformation is small. Specifically, the multi-reflection chamber provided in this embodiment of the invention has a radius of curvature of 1000mm for each spherical mirror. The long optical path chamber strictly satisfies the paraxial approximation condition. The four columns of beam spots on the incident side, including the out point "out" beam spot, are perfect mirror images of the incident point "in" beam spot, while the two columns of beam spots on the aiming side are perfect mirror images of the aiming point "aim" beam spot. By adjusting the collimation of the incident light, the shape and size of the beam spots on both sides can be adjusted, which has the advantages of small beam spot deformation and good beam quality.

[0088] Furthermore, the positional deviation of the curvature center is a crucial factor affecting the performance of the multi-reflector chamber based on PBWC-PBWC. Since the five spherical mirrors perform different functions within the PBWC assembly, their sensitivities to environmental disturbances such as temperature and vibration vary. The first spherical mirror M1 and the second spherical mirror M2 are the objective lenses of the first PBWC assembly (PBWC-a). Their curvature centers C1 and C2 are located on the field mirror M3 of the first PBWC assembly (PBWC-a). The function of curvature centers C1 and C2 is to form two columns of light spots on the aiming side, typical of PBWC assemblies, and the distance between curvature centers C1 and C2 determines the row spacing of the light spots on the aiming side. In practical applications, the adjusted first spherical mirror M1 and the second spherical mirror M2 can be fixed as a single unit, ensuring that the row spacing of the light spots on the aiming side remains constant. An overall offset or deflection of the spatial positions of curvature centers C1 and C2 in the x and y directions will cause a synchronous offset or deflection of the two columns of light spots on the aiming side. During the offset or deflection process, if the light spot does not exit the mirror or hit the spherical mirror interface, it will not significantly affect the position of the emitted light spot, thus not affecting the use of the gas cell and demonstrating excellent stability. The third spherical mirror M3 is the field mirror of the first PBWC assembly (PBWC-a). Its curvature center C3 is located at the center of the objective lenses M1 and M2 on the incident side of PBWC-b. Its function is to realize the mirror mapping of the light spot on M2 onto M1, and it exhibits the best stability in the x and y directions. The spatial displacement of the curvature center C3 mainly affects the spatial position of the mirrored light spot on M1. Under the condition that the light spot does not exit the mirror or hit the spherical mirror interface, the position of the emitted light is almost unaffected by the initial disturbance. The fourth spherical mirror M4 and the fifth spherical mirror M5 are the objectives of the second PBWC assembly (PBWC-b). Their curvature centers C4 and C5 are located on the field mirror M2 of the second PBWC assembly (PBWC-b) on the incident side. Since the outgoing light spot "out" of the gas cell is located at the exit position of PBWC-a, any shift or deflection of the curvature centers C4 and C5 will directly cause a shift or deflection of the outgoing light spot position, and the amount of shift is positively correlated with the number of reflections. The curvature centers C4 and C5 are most sensitive to disturbances in the x and y directions caused by the environment. Therefore, in order to reduce the impact of curvature center position deviation on the gas chamber, after completing the optical path adjustment, the first spherical mirror M1 and the second spherical mirror M2 on the incident side can be fixed as a whole, and the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 on the aiming side can be fixed as a whole to ensure that the curvature center on both sides changes synchronously. An optical frame with excellent structural stability and good adjustability is adopted to improve the stability and reliability of the multi-reflector gas chamber in practical applications.

[0089] Figures 6a and 6b show schematic diagrams of the structure of existing classic BHWC components and schematic diagrams of the light spot patterns formed on the field lens, respectively.

[0090] As shown in Figures 6a and 6b, the classic BHWC assembly also consists of three concave spherical mirrors with equal radii of curvature. The incident mirror is a rectangular field lens M3 with two notches, corresponding to the incident and exit positions, respectively. The aiming side has two circular objectives, M1 and M2. The reflection pattern of the classic BHWC assembly is basically the same as that of the classic PBWC assembly, ultimately producing two rows of intersecting light spots on the field lens M3, with a trapezoidal distribution. The total number of light spots is 2 × n. BHWC -1, where n BHWC This represents the number of light spots on the short base of the trapezoid, with each light spot's spatial position being reused once. In Figure 6, the first and second columns of light spots on field lens M3 are focused by objective lenses M2 and M1, respectively. The number of light spots on objective lenses M1 and M2 is 1, and the number of times the spatial position of the light spots on objective lenses M1 and M2 is reused is n. BHWC The number of passes (N) for the classic BHWC component. BHWC For: N BHWC =2×(2×n) BHWC )

[0091] It should be noted that the mirror utilization rate and the number of times the spatial position of the light spot is reused in the classic BHWC module are similar to those in the classic PBWC module. Therefore, the classic BHWC module is also suitable for a dual-sided field mirror design strategy. Unlike the classic PBWC module where the incident and exit points are adjacent, the classic BHWC module has its incident and exit points located at opposite ends of the field mirror, providing more installation space for the TDLAS laser emitting and receiving devices.

[0092] In some embodiments, any one or both of the first circulation component and the second circulation component described above may also be BHWC components. Specifically, the first circulation component and the second circulation component may be BHWC components and PBWC components, respectively, thereby obtaining a multi-reaction chamber based on BHWC-PBWC. Alternatively, the first circulation component and the second circulation component may be PBWC components and BHWC components, respectively, thereby obtaining a multi-reaction chamber based on PBWC-BHWC. Furthermore, the first circulation component and the second circulation component may each be a BHWC component, thereby obtaining a multi-reaction chamber based on BHWC-BHWC. It should be noted that the BHWC-PBWC based multi-reflector chamber, the PBWC-BHWC based multi-reflector chamber, and the BHWC-BHWC based multi-reflector chamber all use 5 spherical mirrors (for example, rectangular concave spherical mirrors). The incident side mirror includes 2 spherical mirrors, and the aiming side mirror includes 3 spherical mirrors. Specifically, the incident side mirror includes a first spherical mirror M1 and a second spherical mirror M2 that are spliced ​​together, and the aiming side mirror includes a third spherical mirror M3, a fourth spherical mirror M4, and a fifth spherical mirror M5 that are spliced ​​together. The distance d between the incident side mirror and the aiming side mirror is equal to the radius of curvature of each spherical mirror. Furthermore, the above reflection law also applies (for every complete reflection process of light on the first circulation component, it will undergo a step reflection on the second circulation component, forming a new light spot on the field mirror M2 of the second circulation component), and it also applies to the calculation formulas for the total number of passes and optical path.

[0093] It should be noted that the number of light spots formed on the incident-side mirror is denoted as n1, and the spacing between the light spots on the incident-side mirror is denoted as d. r1 The spacing between the light spots on the incident side mirror is denoted as d. c1 The number of light spots formed on the aiming side mirror is denoted as n2, and the spacing between the light spots on the aiming side mirror is denoted as d. r2 The spacing between the light spots on the aiming side mirror is denoted as d. c2 .

[0094] Figure 7 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on BHWC-PBWC and the curvature center of each spherical mirror in an embodiment of the present invention.

[0095] As shown in Figure 7, in some embodiments, the first circulation component and the second circulation component can be a BHWC component and a PBWC component, respectively, thereby obtaining a multi-reaction chamber based on BHWC-PBWC.

[0096] Specifically, in the multi-reflection chamber based on BHWC-PBWC, the third spherical mirror M3 is a rectangular concave spherical mirror with two notches at the top and bottom.

[0097] The first spherical mirror M1, the second spherical mirror M2, the fourth spherical mirror M4, and the fifth spherical mirror M5 are all rectangular concave spherical mirrors. The fourth spherical mirror M4 and the fifth spherical mirror M5 are arranged (embedded) in the two notches of the third spherical mirror M3, each filling one notch. Thus, the projected shape (projected shape along the z-axis) of the incident-side mirror formed by the first spherical mirror M1 and the second spherical mirror M2 is rectangular, and the projected shape (projected shape along the z-axis) of the aiming-side mirror formed by the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 is also rectangular.

[0098] In this embodiment, light can enter from the incident point above the second spherical mirror M2 and aim at the geometric center of the fifth spherical mirror M5. After multiple reflections between the incident side mirror and the aiming side mirror, the incident light can exit from the exit point "out" above the second spherical mirror M2, which is horizontally adjacent to the incident point "in".

[0099] Figure 8 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on PBWC-BHWC and the curvature centers of each spherical mirror in an embodiment of the present invention.

[0100] As shown in Figure 8, in some embodiments, the first circulation component and the second circulation component can be a PBWC component and a BHWC component, respectively, thereby obtaining a multi-reaction chamber based on PBWC-BHWC.

[0101] Specifically, in the multi-reflection chamber based on PBWC-BHWC, the second spherical mirror M2 is a rectangular concave spherical mirror with two notches at the top and bottom.

[0102] The first spherical mirror M1, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 are all rectangular concave spherical mirrors, and the projected shape of the mirror surface on the aiming side is rectangular. Specifically, the fourth spherical mirror M4 and the fifth spherical mirror M5 are the same size and are arranged side-by-side below the third spherical mirror M3 on the aiming side, joining together at the bottom end of the third spherical mirror M3. Furthermore, the sum of the widths of the fourth spherical mirror M4 and the fifth spherical mirror M5 is equal to the width of the third spherical mirror M3, thus making the projected shape of the aiming side mirror surface (the projected shape along the z-axis) formed by the three spherical mirrors M3, M4, and M5 rectangular. The first spherical mirror M1 and the second spherical mirror M2 are joined together along the x-axis.

[0103] In this embodiment, light can enter from the incident point "in" at the notch above the second spherical mirror M2 and aim at the geometric center of the fifth spherical mirror M5. After multiple reflections between the incident side mirror and the aiming side mirror, the incident light can exit from the exit point "out" at the notch below the second spherical mirror M2.

[0104] Figure 9 shows a schematic diagram of the positional relationship between the light spots formed on both sides of the multi-reflector chamber based on BHWC-BHWC and the curvature centers of each spherical mirror in an embodiment of the present invention.

[0105] As shown in Figure 9, in some embodiments, the first circulation component and the second circulation component can each be a BHWC component, thereby obtaining a multi-reaction chamber based on BHWC-BHWC.

[0106] Specifically, in the BHWC-BHWC-based multi-reflector chamber, the first spherical mirror M1 and the second spherical mirror M2 are rectangular concave spherical mirrors with a notch at the top. The first spherical mirror M1 and the second spherical mirror M2 are spliced ​​together along the x-axis and are symmetrical with respect to the y-axis. The third spherical mirror M3 is a rectangular concave spherical mirror with two notches at the top and bottom.

[0107] Both the fourth spherical mirror M4 and the fifth spherical mirror M5 are rectangular concave spherical mirrors, and they are positioned at the two notches of the third spherical mirror M3. Thus, the projected shape (projected shape along the z-axis) of the aiming side mirror formed by the splicing of the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 is rectangular.

[0108] In this embodiment, light can enter from the incident point "in" at the notch of the second spherical mirror M2 and aim at the geometric center of the fifth spherical mirror M5. After multiple reflections between the incident side mirror and the aiming side mirror, the incident light can exit from the exit point "out" at the notch of the first spherical mirror M1.

[0109] As shown in Figures 7 to 9, in the multi-reflector chambers based on BHWC-PBWC, PBWC-BHWC, and BHWC-BHWC, the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 are located on the aiming side mirror surface. The third curvature center C3 of the third spherical mirror M3, the fourth curvature center C4 of the fourth spherical mirror M4, and the fifth curvature center C5 of the fifth spherical mirror M5 are located on the incident side mirror surface. The incident point "in" is located to one side (above) of the second spherical mirror M2, and the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5.

[0110] Refer to the mirror coordinate axes shown in Figures 7 to 9, and Table 2 below shows the parameters of the multi-reacting gas chambers based on BHWC-PBWC, PBWC-BHWC, and BHWC-BHWC. The first circulation component corresponds to the small circulation cell a, and the second circulation component corresponds to the large circulation cell b. spots n represents the number of light spots on each spherical mirror. reN represents the number of times the spatial position of the light spot on each spherical mirror is reused, and d represents the distance between the incident-side mirror and the aiming-side mirror. BP N represents the number of passes through the multi-reaction chamber based on BHWC-PBWC. PB N represents the number of passes through the multi-reaction chamber based on PBWC-BHWC. BB This indicates the number of times the multi-reaction chamber based on BHWC-BHWC passes through.

[0111] Table 2 Parameters of multi-reaction chambers based on BHWC-PBWC, PBWC-BHWC, and BHWC-BHWC

[0112] The multi-reflection chambers based on PBWC-PBWC, BHWC-PBWC, PBWC-BHWC, and BHWC-BHWC provided in the above embodiments of the present invention are all based on a dual-cycle reflection mode and are composed of two cycle components.

[0113] In embodiments of the present invention, the multi-reacting chamber based on two circulation components can be expanded to three or more circulation components.

[0114] Specifically, in embodiments of the present invention, the multi-reflector chamber may include an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides. Each of the incident-side and aiming-side mirrors includes multiple spherical mirrors (rectangular concave spherical mirrors) joined together. A total of n circulating assemblies are formed based on the incident-side and aiming-side mirrors. Any of the n circulating assemblies includes a field lens and an objective lens arranged opposite to each other on both sides. That is, any circulating assembly can be a matrix-type multi-reflector chamber with the characteristic of "one side is a field lens, and the other side is an objective lens." The present invention does not limit the specific type of circulating assembly, as long as it conforms to the characteristic of "one side is a field lens, and the other side is an objective lens." Here, n can be a positive integer greater than or equal to 2.

[0115] Light can enter from the incident point on the field lens side of one of the loop components (hereinafter referred to as "the loop component") and aim at the geometric center of one of the objective lenses of the loop component (which is the current aiming point). After the light undergoes n cyclic reflections between the incident side mirror and the aiming side mirror (where each cyclic reflection includes multiple reflections), it can exit from the exit point on the field lens side of the loop component, and finally form multiple rows and columns of light spots on the aiming side mirror and the incident side mirror respectively.

[0116] It is understandable that the aforementioned multi-reflection chamber is also known as an "n-cycle multi-reflection chamber". In an n-cycle multi-reflection chamber, the incident point and the exit point are located on one side of the field lens of one of the circulation components.

[0117] In an embodiment of the present invention, provided that n is a positive integer greater than or equal to 2, for any n-fold cyclic multiple reflection chamber, taking the geometric center of one objective lens of one of the cyclic components ("the cyclic component") as the original aiming point, a new cyclic component can be added to the n-fold cyclic multiple reflection chamber to form an n+1-fold cyclic multiple reflection chamber in the following manner: by adding a first new spherical mirror and a second new spherical mirror at the incident point and exit point positions on the field mirror side of one of the cyclic components ("the cyclic component") respectively (or, adding a first new spherical mirror and a second new spherical mirror at the exit point and incident point positions respectively), a new cyclic component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror, and the second new spherical mirror, and the spherical mirror at the original aiming point serves as the field mirror of the new cyclic component, and the first new spherical mirror and the second new spherical mirror serve as the objective lenses of the new cyclic component respectively. In this way, a new circulation assembly is formed on the basis of the n-fold circulation multi-reflection chamber. Based on the addition of two new spherical mirrors to the original incident side mirror, a total of n+1 circulation assemblies are formed on the original incident side mirror (including the added first new spherical mirror and the second new spherical mirror) and the original aiming side mirror, resulting in an n+1-fold circulation multi-reflection chamber.

[0118] It is worth noting that two new spherical mirrors can be added at the incident point and exit point positions on the field mirror side of one of the above-mentioned circulation components ("the circulation component"). In the embodiments of the present invention, for ease of distinction, the two new spherical mirrors are named the first new spherical mirror and the second new spherical mirror, respectively.

[0119] Based on the aforementioned n+1 recirculating multi-reflection chamber, light can enter from a new incident point on the field lens side of the new recirculation assembly (i.e., the spherical mirror where the original aiming point is located) and aim at the geometric center (as the new aiming point) of either the first or second new spherical mirror (i.e., any objective lens of the new recirculation assembly). After n+1 recirculating reflections between the incident and aiming mirrors, the light can exit from a new exit point on the field lens side of the new recirculation assembly, ultimately forming multiple rows and columns of light spots on both the aiming and incident mirrors. It can be understood that in the n+1 recirculating multi-reflection chamber, the new incident and exit points are located on the field lens side of the new recirculation assembly.

[0120] It should be noted that, in the embodiments of the present invention, the type of the circulation component may include, but is not limited to, PBWC components, BHWC components, and Chernin matrix-type multiple reflector cells. The circulation component in the present invention can be any matrix-type multiple reflector cell with the characteristic of "one side being the field lens and the other side being the objective lens".

[0121] Taking a double multi-reflection chamber based on PBWC-PBWC as an example, it can be expanded into a triple multi-reflection chamber based on PBWC-PBWC-PBWC using the following method: Two new spherical mirrors (rectangular concave spherical mirrors) are added to the current exit point "out" and incident point "in" positions of the original PBWC-PBWC multi-reflection chamber: a sixth spherical mirror M6 (corresponding to the aforementioned "second new spherical mirror") and a seventh spherical mirror M7 (corresponding to the aforementioned "first new spherical mirror"). Thus, based on the original aiming point (the original aiming point of the double multi-reflection chamber based on PBWC-PBWC), the fifth spherical mirror M5, the sixth spherical mirror M6, and the seventh spherical mirror M7 can form a new circulation assembly (the third circulation assembly PBWC-c). The sixth spherical mirror M6 and the seventh spherical mirror M7 serve as the two objective lenses of the new circulation assembly (the third circulation assembly PBWC-c), and the fifth spherical mirror M5 serves as the field lens of the new circulation assembly (the third circulation assembly PBWC-c). Thus, a new circulation assembly (third circulation assembly PBWC-c) is formed on the basis of the two-fold circulation multi-reflection chamber based on PBWC-PBWC. Based on the addition of two new spherical mirrors to the original incident side mirror, three circulation assemblies (PBWC) are formed on the original incident side mirror (including the added sixth spherical mirror M6 and seventh spherical mirror M7) and the original aiming side mirror, resulting in a triple multi-reflection chamber based on PBWC-PBWC-PBWC.

[0122] Furthermore, the sixth curvature center C6 of the sixth spherical mirror M6 can be adjusted to the center position of the fifth spherical mirror M5, the seventh curvature center C7 of the seventh spherical mirror M7 can be adjusted to the right of C6 on the fifth spherical mirror M5, the incident light can be adjusted to the right position of the fifth spherical mirror M5, and the center position of the seventh spherical mirror M7 can be used as the aiming point. Based on this, a triple multi-reflection chamber based on PBWC-PBWC-PBWC can be constructed.

[0123] Using the above method, a PBWC-PBWC-based multi-reflection chamber with 114 passes can be expanded into a PBWC-PBWC-PBWC-PBWC-based multi-reflection chamber with 398 passes. Figure 10 shows a schematic diagram of the light spot patterns formed on both mirror surfaces of the PBWC-PBWC-PBWC-PBWC-based multi-reflection chamber according to an embodiment of the present invention.

[0124] Figure 11 shows a line graph of the optical path length and optical path length-to-volume ratio of n-fold cyclic multi-reflection gas cells with different numbers of light spot rows on the field lens of the PBWC. As shown in Figure 11, increasing the number of cyclic components and the number of passes of the cyclic components significantly improves both the optical path length and the optical path length-to-volume ratio of the gas cells.

[0125] In summary, the multi-reflection chamber provided by the embodiments of the present invention includes an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides. Each incident-side mirror and aiming-side mirror includes multiple spherical mirrors spliced ​​together. Multiple circulating assemblies are formed based on the incident-side mirror and the aiming-side mirror. Each circulating assembly includes a field lens and an objective lens arranged opposite to each other on both sides. Light can enter from the incident point on the field lens side of one of the circulating assemblies and aim at the geometric center of one of the objective lenses of that circulating assembly. After multiple cyclic reflections between the incident-side mirror and the aiming-side mirror, light exits from the exit point on the field lens side of that circulating assembly, ultimately forming multiple rows and columns of light spots on the aiming-side mirror and the incident-side mirror, respectively. It can be seen that the multi-reflection chamber of the present invention has a simple structure and can simultaneously improve the utilization rate of both mirrors and the number of times the spatial position of the light spots can be reused, thereby increasing the optical path length and thus improving the detection accuracy and stability of the multi-reflection chamber for trace gases.

[0126] Furthermore, according to the technical solution of the present invention, by adding two new spherical mirrors at the incident and exit points on the field lens side of one of the circulation components, a new circulation component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror, and the second new spherical mirror. The spherical mirror at the original aiming point serves as the field lens of the new circulation component, and the two new spherical mirrors serve as the objective lenses of the new circulation component, thereby obtaining more recirculating multi-reflection chambers. In this way, by increasing the number of circulation components, the optical path length and optical path length-to-volume ratio of the multi-reflection chambers can be further improved.

[0127] In this specification, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. Furthermore, the terms "front," "rear," "upper," "lower," "inner," "outer," "top," "bottom," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and for simplification, and do not indicate or imply that the device or unit referred to must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this application.

[0128] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of this application may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0129] Similarly, it should be understood that, in order to simplify this disclosure and aid in understanding one or more aspects of the various applications, in the above description of exemplary embodiments of the present application, various features of the present application are sometimes grouped together in a single embodiment, figure, or description thereof. However, this approach to disclosure should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of the present application.

[0130] Those skilled in the art will understand that modules, units, or components of the devices disclosed in the examples herein can be arranged in the devices described in this embodiment, or alternatively, can be located in one or more devices different from the devices in this example. The modules in the foregoing examples can be combined into a single module or, in addition, can be divided into multiple sub-modules.

[0131] Those skilled in the art will understand that the modules in the device of the embodiment can be adaptively changed and placed in one or more devices different from that embodiment. Modules, units, or components in the embodiment can be combined into a single module, unit, or component, and further, they can be divided into multiple sub-modules, sub-units, or sub-components.

Claims

1. A multi-reflection chamber, comprising an incident-side mirror and an aiming-side mirror arranged opposite to each other on both sides, wherein the incident-side mirror and the aiming-side mirror each comprise a plurality of spherical mirrors spliced ​​together. in, Based on the incident side mirror and the aiming side mirror, n cyclic components are formed in total. Each cyclic component includes a field lens and an objective lens arranged opposite to each other on both sides, where n is a positive integer greater than or equal to 2. The light is adapted to be incident from the field lens side of one of the loop components and aimed at the geometric center of one of the objective lenses of the loop component, and adapted to be emitted from the exit point on the field lens side of the loop component after n cyclic reflections between the incident side mirror and the aiming side mirror, and finally form multiple rows and columns of light spots on the aiming side mirror and the incident side mirror respectively.

2. The multi-reflection chamber as described in claim 1, wherein the geometric center of one objective lens of the circulation assembly is used as the original aiming point. in, By adding a first new spherical mirror and a second new spherical mirror at the incident point and exit point positions on the field lens side of one of the circulation components, respectively, a new circulation component is formed based on the spherical mirror where the original aiming point is located, the first new spherical mirror, and the second new spherical mirror. The spherical mirror where the original aiming point is located serves as the field lens of the new circulation component, and the first new spherical mirror and the second new spherical mirror serve as the objective lenses of the new circulation component. The light is adapted to be incident from a new incident point on the field lens side of the new circulation assembly and aimed at the geometric center of the first new spherical mirror or the second new spherical mirror, and is adapted to be reflected n+1 times between the incident side mirror and the aiming side mirror, and then exit from a new exit point on the field lens side of the new circulation assembly, ultimately forming multiple rows and columns of light spots on the aiming side mirror and the incident side mirror respectively.

3. The multi-pass gas chamber as described in claim 1 or 2, wherein the type of the circulation assembly includes a Pickett Bradley White cell (PBWC) assembly, a Bernstein Herzberg White cell (BHWC) assembly, or a Chernin multipass matrix system matrix-type multi-pass gas chamber.

4. The multi-reacting chamber as described in any one of claims 1-3, wherein, The incident side mirror includes a first spherical mirror and a second spherical mirror that are spliced ​​together, and the aiming side mirror includes a third spherical mirror, a fourth spherical mirror and a fifth spherical mirror that are spliced ​​together. The first circulation assembly is formed based on a third spherical mirror, a first spherical mirror, and a second spherical mirror, with the third spherical mirror serving as the field lens of the first circulation assembly, and the first and second spherical mirrors serving as the objective lenses of the first circulation assembly; the second circulation assembly is formed based on a second spherical mirror, a fourth spherical mirror, and a fifth spherical mirror, with the second spherical mirror serving as the field lens of the second circulation assembly, and the fourth and fifth spherical mirrors serving as the objective lenses of the second circulation assembly. The light is adapted to enter from the incident point on one side of the second spherical mirror and aim at the geometric center of the fifth spherical mirror, and is adapted to exit from the exit point on one side of the second spherical mirror after undergoing two cyclic reflections between the incident side mirror and the aiming side mirror. The light undergoes a complete reflection process on the first cyclic component, and then undergoes a step reflection on the second cyclic component, forming a light spot on the field mirror of the second cyclic component. Finally, two rows of light spots are formed on the aiming side mirror and four rows of light spots are formed on the incident side mirror.

5. The multi-reacting gas chamber as described in claim 4, wherein, The first, second, third, fourth, and fifth spherical mirrors have the same radius of curvature, and the distance between the incident-side mirror and the aiming-side mirror is equal to the radius of curvature.

6. The multi-reacting gas chamber as described in claim 4 or 5, wherein, The first loop component and the second loop component are either PBWC components or BHWC components, respectively.

7. The multi-reacting gas chamber as described in claim 6, wherein, The first loop component and the second loop component are each a PBWC component; The first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror, and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shapes of the incident side mirror and the aiming side mirror are both rectangular. Each reflection consists of multiple reflections.

8. The multi-reacting gas chamber as described in claim 7, wherein, The first curvature center of the first spherical mirror is located at the geometric center of the third spherical mirror; The second curvature center of the second spherical mirror is located directly below the first curvature center; The third curvature center of the third spherical mirror is located at the center of the boundary line between the first spherical mirror and the second spherical mirror. The fourth curvature center of the fourth spherical mirror is located at the geometric center of the second spherical mirror and is on the same horizontal line as the third curvature center; The fifth curvature center of the fifth spherical mirror is located directly above the fourth curvature center.

9. The multi-reacting chamber as described in any one of claims 4-8, wherein, Each time the light undergoes a complete reflection process on the first circulation component, it is suitable for forming a continuous plurality of light spots on the first circulation component.

10. The multi-reacting gas chamber as claimed in claim 9, wherein, Forming a series of light spots on the first loop component includes: A sequence of light spots is formed sequentially on the field lens of the first loop component, the sequence of light spots containing a third number of light spots; A second number of light spots are formed overlapping at the same position on the second spherical mirror of the first recycling component, wherein the second number represents the number of times the spatial position of each light spot on the second spherical mirror is reused; and A first number of light spots are formed by overlapping at the same position on the first spherical mirror of the first cyclic component, wherein the first number is used to represent the number of times the spatial position of each light spot on the first spherical mirror is reused.

11. The multi-reacting gas chamber as claimed in claim 9 or 10, wherein, Each time the light undergoes a complete reflection process on the first circulation component, it is suitable to form a continuous 2×(2×n2-1) light spots on the first circulation component, where n2 represents the number of light spot rows formed by the light on the aiming side mirror surface; The light undergoes a first complete reflection process on the first circulation component, which is suitable for forming the first to 2×(2×n2-1) light spots on the first circulation component; The first quantity is n²-1, and the second quantity is n².

12. The multi-reacting chamber as claimed in claim 11, wherein, The number of complete reflection processes of the light on the first circulation component is equal to the number of light spots formed on the field lens of the second circulation component, which is 2×n1, where n1 represents the number of light spot rows formed on the incident side mirror. The number of times the spatial position of each light spot on the field lens of the first loop component is reused is equal to the number of complete reflection processes of the light on the first loop component, which is 2×n1.

13. The multi-reacting chamber as described in claim 12, wherein, The total number of times N passes through the multi-reverse gas chamber PP = [2×(2×n2-1)]×(2×n1)+2, where n1 and n2 are both positive integers; The optical path length of the multi-reflection chamber is opl = N PP ×d, where d represents the distance between the incident-side mirror and the aiming-side mirror.

14. The multi-reacting chamber as described in any one of claims 4-13, wherein, The distance between the first center of curvature of the first spherical mirror and the second center of curvature of the second spherical mirror is d. r2 / 2, where d r2 This indicates the spacing between the rows of light spots on the aiming side mirror surface; The distance between the fourth curvature center of the fourth spherical mirror and the fifth curvature center of the fifth spherical mirror is d. r1 / 2, where d r1 This indicates the spacing between the light spot rows on the incident side mirror surface.

15. The multi-reacting gas chamber as claimed in claim 6, wherein, The first loop component and the second loop component are the BHWC component and the PBWC component, respectively; The third spherical mirror is a rectangular concave spherical mirror with two notches at the top and bottom; The first, second, fourth, and fifth spherical mirrors are all rectangular concave spherical mirrors, and the fourth and fifth spherical mirrors are arranged at the two notches of the third spherical mirror. The projection shapes of the incident side mirror and the aiming side mirror are both rectangular. The light is adapted to exit from an exit point above the second spherical mirror that is horizontally adjacent to the incident point.

16. The multi-reacting chamber as claimed in claim 6, wherein, The first loop component and the second loop component are the PBWC component and the BHWC component, respectively; The second spherical mirror is a rectangular concave spherical mirror with two notches at the top and bottom; The first, third, fourth, and fifth spherical mirrors are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror is rectangular. The light is adapted to enter from the notch above the second spherical mirror and be aimed at the geometric center of the fifth spherical mirror, and to exit from the notch below the second spherical mirror.

17. The multi-reacting chamber as claimed in claim 6, wherein, The first loop component and the second loop component are each a BHWC component; The first spherical mirror and the second spherical mirror are rectangular concave spherical mirrors with a notch at the top and are symmetrical with respect to the y-axis, and the third spherical mirror is a rectangular concave spherical mirror with two notches at the top and bottom. The fourth and fifth spherical mirrors are both rectangular concave spherical mirrors, and the fourth and fifth spherical mirrors are arranged at the two notches of the third spherical mirror. The projection shape of the aiming side mirror is rectangular. The light is adapted to enter from the point of incidence at the notch of the second spherical mirror and be aimed at the geometric center of the fifth spherical mirror, and to exit from the point of exit at the notch of the first spherical mirror.

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