Method for detecting a blockage state, and pneumatic system

Abstract

The invention relates to a method for detecting a blockage state of at least one actuating portion of a pneumatic system (1) for industrial automation, said system comprising at least one pneumatic actuator (4) and a valve device (3) having a pressure control unit (9). The method has the following steps: - carrying out a closed-loop pressure control of the output pressure of the pressure control unit (9) in order to pneumatically actuate the pneumatic actuator (4) and thereby set the actuating portion into motion, - detecting the position of the actuating portion, - checking a relationship between the current output pressure and the detected position, and - on the basis of the check, detecting a blockage state of the actuating portion.

Description

[0001] Method for detecting a blockage condition and pneumatic system

[0002] The invention relates to a method for detecting a blockage state of at least one actuating section of a pneumatic system for industrial automation, comprising at least one pneumatic actuator and a valve device having a pressure regulator unit.

[0003] One task of the invention is to efficiently detect the blockage state of the actuator section.

[0004] The task is solved by a procedure with the following steps: performing a pressure control of an output pressure of the pressure regulator unit in order to pneumatically actuate the pneumatic actuator and thereby set the actuating section in motion, detecting a position of the actuating section, checking a relationship between the current output pressure and the detected position, and, based on the checking, detecting a blockage state of the actuating section.

[0005] A blockage state is defined in particular as a state in which the actuating section does not move despite pneumatic actuation of the pneumatic actuator (and a resulting pneumatic driving force applied to the actuating section). The blockage state can occur, for example, when an object, such as a wafer, which is to be set in motion by means of the actuating section, cannot be set in motion despite pneumatic actuation of the pneumatic actuator and the resulting driving force applied by the actuating section to the object.

[0006] When the actuator is blocked, the current output pressure for the detected position of the actuator may be higher than in a non-blocked state, where the blockage is not present. Because the actuator is blocked, the relationship between the detected position and the current output pressure changes in the blocked state. With continued pneumatic actuation (and, for example, an increasing output pressure applied for this purpose), the output pressure continues to rise, while the position does not change or changes only slightly. Consequently, the presence of the blocked state can be detected based on this altered relationship between the position and the output pressure—especially based on the increased output pressure.

[0007] Advantageous further training is the subject of the subclaims.

[0008] The invention relates to a pneumatic system for industrial automation, comprising at least one pneumatic actuator and a valve device, which has a pressure regulator unit with a valve unit and is configured to perform pressure regulation with the pressure regulator unit in order to pneumatically actuate the pneumatic actuator with an output pressure of the pressure regulator unit in order to thereby set an actuating section of the pneumatic system in motion, wherein the valve device is further configured to detect a position of the actuating section, to check a relationship between the current output pressure and the detected position, and to recognize a blockage state of the actuating section based on the check.

[0009] Advantageous further training is the subject of the subclaims.

[0010] Further exemplary details and exemplary forms of execution are explained below with reference to the figures. This shows

[0011] Figure 1 is a schematic representation of a pneumatic system.

[0012] Figure 2 shows a block diagram of a signal flow in a pneumatic system.

[0013] Figure 3 shows a diagram of a position-pressure characteristic and a test zone.

[0014] Figure 1 shows an exemplary embodiment of a pneumatic system 1 for industrial automation. The pneumatic system 1 is used, for example, for handling a wafer 2. The pneumatic system 1 is implemented, for instance, as a so-called pinlifting system. The pneumatic system 1 is used, for example, in a semiconductor plant.

[0015] The pneumatic system 1 comprises a valve device 3 and at least one pneumatic actuator 4. The valve device 3 serves to pneumatically actuate the at least one pneumatic actuator 4. By way of example, the pneumatic system 1 comprises several, in particular exactly three, pneumatic actuators 4: a first pneumatic actuator 4a, a second pneumatic actuator 4b, and a third pneumatic actuator 4c. Each pneumatic actuator 4 is exemplified as a pneumatic drive cylinder. The valve device 3 serves to pneumatically actuate several, in particular all, of the pneumatic actuators 4.

[0016] Each pneumatic actuator 4 has a respective actuator element 5, which is exemplified as a piston assembly. Each piston assembly has a respective piston and, exemplified, a respective piston rod. Each pneumatic actuator 4 has a respective pressure chamber 6, which can be selectively pressurized or vented via the valve device 3 to set the respective actuator element 5 in motion. For example, each pneumatic actuator 4 is designed as a single-acting actuator. In particular, each pneumatic actuator 4 has only one pressure chamber 6 and / or one spring 7 acting on the respective actuator element 5.

[0017] Alternatively, one, several or all pneumatic actuators can be designed to be double-acting and in this case each include a second pressure chamber and / or each do not include a spring 7.

[0018] Each pneumatic actuator 4 has, for example, a respective actuator housing 38 in which the respective actuator element 5 and / or the respective pressure chamber 6 is expediently arranged. The pneumatic actuators 4 are preferably identical in construction to one another.

[0019] The respective actuator 5 can be moved into a first end position, in which the actuator 5 is, for example, in a fully retracted position, and / or into a second end position, in which the actuator 5 is in a fully extended position. The term "end position" refers in particular to a position in which the actuator 5 can no longer be moved, especially in the direction in which it was moved to reach the end position. For example, the actuator 5 rests against a respective end stop in each end position.

[0020] The pneumatic system 1 expediently comprises a position detection device for detecting the respective position of each actuator 5 (or of a control section comprising the respective actuator 5). The position detection device comprises, for example, a position detection unit 8 for each pneumatic actuator 4, which is designed, for example, as a displacement measuring system, in particular as a continuous displacement measuring system. Preferably, each position detection unit 8 serves to detect the respective position of the respective actuator 5 along its entire respective path of movement – ​​i.e., in particular from the first end position to the second end position. For example, each control section (or each actuator 5) comprises a respective magnet, and each position detection unit 8 comprises a respective magnetic field sensor for detecting a magnetic field of the respective magnet.Each position detection unit 8 can, for example, be arranged on the outside of the actuator housing 38 of the respective pneumatic actuator 4.

[0021] The valve device 3 comprises, by way of example, at least one pressure regulator unit 9. Optionally, the valve device 3 comprises several, in particular exactly three, pressure regulator units 9. Each pressure regulator unit 9 is expediently assigned to a respective pneumatic actuator 4 and serves to selectively pressurize or vent the pressure chamber 6 of the respective assigned pneumatic actuator 4. By way of example, each pressure regulator unit 9 is designed as a separate module, in particular as a plate-shaped module. By way of example, the pressure regulator units 9 are arranged in a series. For example, the pressure regulator units 9 form a valve manifold or are part of a valve manifold. Expediently, each pressure regulator unit 9 is connected to a compressed air source (not shown).

[0022] Each pressure regulator unit 9 is designed to provide a respective output pressure with which the pressure chamber 6 of the respective associated pneumatic actuator 4 is actuated.

[0023] For example, each pressure regulator unit 9 has a valve unit 12 through which the pneumatic actuation of the respective associated pneumatic actuator 4 is effected. For example, each valve unit 12 is designed as a piezoelectric valve unit. Preferably, each valve unit is designed as a proportional valve unit.

[0024] For example, each pressure regulator unit 9 has a respective control unit 13 for controlling the respective valve unit 12, in particular with a control signal. Each control unit 13 is, for example, implemented as a microcontroller.

[0025] According to an alternative embodiment, the valve device 3 comprises a control unit, in particular a microcontroller, which provides a respective control signal for each valve unit. Advantageously, in this case, each pressure regulator unit is formed from a combination of this single control unit and a respective valve unit. In particular, in this case, several pressure regulator units share one control unit. The pressure regulator units are, in this case, in particular functional units.

[0026] Each pressure regulator unit 9 is pneumatically connected to a respective pneumatic actuator 4 via a respective pneumatic line 10 of the pneumatic system 1. The pneumatic lines 10 are, for example, hoses.

[0027] For example, pneumatic system 1 has several pressure sensors 14. For example, each pressure regulator unit 9 has a respective pressure sensor 14. The pressure sensors 14 serve in particular to detect the respective output pressure - i.e., in particular the pressure of the compressed air in the respective associated pneumatic line 10 and / or the respective associated pressure chamber 6 - and in particular to provide it as an actual pressure value 29.

[0028] Advantageously, each control unit 13 performs a comparison of a current setpoint pressure value of one of the setpoint pressure curves 25 supplied to the respective pressure regulator unit 9 with the respective actual pressure value 29 and, based on the comparison, controls the respective valve unit 12 with the respective control signal in order to cause the output pressure to change towards the setpoint pressure value.

[0029] Each pressure regulator unit 9 has, by way of example, a respective (in particular plate-shaped) pressure regulator unit housing 15 in which the respective valve unit 12, the respective control unit 13 and / or the respective pressure sensor 14 is preferably arranged. The pressure regulator units 9 are preferably identical in construction to one another.

[0030] By way of example, the valve device 3 further comprises a control unit 11, which is designed in particular as a higher-level control unit, for example as a PLC (programmable logic controller). The control unit 11 is expediently connected to the pressure regulator units 9 via one or more communication lines 16 and expediently transmits setpoint pressure profiles 25 to the pressure regulator units 9 via these communication lines 16. Expediently, the control unit 11 is connected to the position sensing units 8 in order to receive a respective position signal from each position sensing unit 8, which represents the position of the respective actuator element 5 (or actuating section).

[0031] According to an optional embodiment, the controller 11 and the pressure regulator units 9 are integrated in one device. For example, the valve device 3 comprises a valve device housing, which in particular represents the outer housing of the valve device 3. The controller 11 and the pressure regulator units 9 are expediently arranged in the valve device housing. Optionally, the function of the control units 13 can be implemented on the controller 11 in this case. By way of example, the pneumatic system 1 has a wafer support 17 for placing the wafer 2. The wafer support 17 has, for example, a wafer support surface 18, which is expediently oriented vertically upwards with its normal vector. Preferably, the pneumatic system 1 has a holding device for the wafer 2, and the wafer support 17 is part of the holding device. The holding device can also be referred to as a chuck.The wafer layer 17, for example, is designed as a round plate.

[0032] The holding device is specifically designed to hold the wafer 2 on the wafer support 17 by means of an electrical force, in particular an electrostatic force. Advantageously, the electrical force counteracts the lifting of the wafer 2 from the wafer support 17. The holding device can be selectively moved into a holding state, in which the holding device holds the wafer 2 on the wafer support 17, or into a release state, in which the holding device releases the wafer 2.

[0033] The pneumatic system 1 includes, by way of example, a positioning arrangement 19, movable relative to the wafer support 17 by means of pneumatic actuators 4, which serves to position the wafer 2 relative to the wafer support 17. In particular, the positioning arrangement 19 serves to lift the wafer 2 from the wafer support 17 and / or to lower it onto the wafer support 17. Specifically, the wafer 2 is lifted vertically upwards from the wafer support 17 by means of the positioning arrangement 19, as indicated by the arrow 22. The positioning arrangement 19 includes several contact points 21 for supporting the wafer 2. By way of example, the positioning arrangement 19 includes exactly three contact points 21 for supporting the wafer 2. Advantageously, the three contact points 21 are located at the same height and / or are arranged distributed relative to each other within a horizontal plane.Preferably, when lifting or lowering the wafer 2 by means of the positioning arrangement 19, it rests exclusively on the contact points 21.

[0034] For example, each contact point 21 is assigned to a respective pneumatic actuator 4. In particular, each contact point 21 is set in motion by a respective pneumatic actuator 4. For example, each contact point 21 is part of a respective actuator element 5, in particular a respective piston rod. For example, each contact point 21 is formed by an end of a respective piston rod. Furthermore, each contact point 21 can be part of a respective contact section 20, wherein each contact section 20 is motionally coupled to a respective actuator element 5, in particular attached to it. For example, each contact section 20 is attached to a respective piston rod. The contact sections 20 are in particular part of the positioning arrangement.

[0035] The pneumatic system 1 is expediently designed, starting from a state in which the wafer 2 rests on the wafer support 17 and the holding device is in the holding state, first to move the holding device into the release state and then to lift the wafer 2 from the wafer support 17 by means of the positioning arrangement 19.

[0036] It can happen – for example, due to a defect in the holding device – that the pneumatic system 1 attempts to lift the wafer 2 from the wafer support 17 using the positioning arrangement 19, while the holding device is still in the holding state (and continues to hold the wafer 2 on the wafer support 17). In this situation, the force exerted on the wafer 2 by the positioning arrangement 19 can damage the wafer 2. This situation is an example of a blockage state of an actuating section. The actuating section is formed, for example, by the actuator element 5 and / or the contact section 20.

[0037] With reference to Figure 2, an exemplary signal flow in pneumatic system 1 will be discussed below.

[0038] The controller 11 includes a trajectory planner 26, which receives a target position signal 27 defining a target position. Based on the target position signal 27, the trajectory planner 26 calculates a target position profile 24. The target position profile 24 is a time-dependent progression of a target position for the actuator elements 5. The target position profile 24 can also be described as a target position trajectory. The target position profile 24 comprises a plurality of position values, e.g., z. The target position profile 24 is, for example, rising, but can alternatively also be falling or have a different shape. For example, the target position profile 24 has a curved shape and / or a decreasing slope over time (for example, to achieve a smooth approach to the target position zp).

[0039] A subtraction element 40 calculates a difference between a current target position value of the target position curve 24 and an actual position value 41 (in particular by means of the position detection device) and provides the difference to a position controller 28, which calculates a target pressure value on the basis of the difference.

[0040] The (sequentially calculated) target pressure values ​​together form a target pressure curve 25, which is transmitted to the respective pressure regulator unit 9, in particular as an electrical signal.

[0041] The pressure regulator unit 9 compares a current setpoint pressure value of the setpoint pressure curve 25 with an actual pressure value 29 determined by means of the pressure sensor 14 and performs a venting or aeration of the pressure chamber 6 by means of the valve unit 12 in order to change the output pressure so that the actual pressure value 29 changes towards the setpoint pressure value.

[0042] The control unit 11 further comprises a blockage detection unit 33, which is configured to detect a blockage state based on the actual pressure value 29 and the actual position value 41, as will be explained in more detail below. Optionally, the blockage detection unit 33 provides blockage information 42 based on the detected blockage state, in particular to the position controller 28.

[0043] The trajectory planner 26, the subtraction element 40, the position controller 28 and / or the blockage detection unit 33 are preferably implemented as software components, which are expediently executed on a processor of the controller 11.

[0044] Figure 2 shows only one pneumatic actuator 4; as explained above, preferably several, in particular three, pneumatic actuators 4 are provided. Preferably, for each pneumatic actuator 4, a respective subtraction element 40, a respective position controller 28 and / or a respective blockage detection unit 33 is provided, which is / are designed in particular as explained above.

[0045] The following section will explain in more detail how a blockage state of an actuating section of the pneumatic system can be detected. For example, each actuating section comprises a respective actuator 5 and / or a respective contact section 20. For example, the pneumatic system 1 comprises three actuating sections, each of which has a respective actuator 5 and a respective contact section 20 that is motion-coupled with, and in particular attached to, the respective actuator 5. The following explanations relating to the detection of a blockage state of an actuating section expediently apply to each of the actuating sections. In particular, the valve device 3 is designed to detect a respective blockage state for each actuating section.The explanations relating to a pressure regulator unit 9 and / or a pneumatic actuator 4 shall apply accordingly to each pressure regulator unit 9 or each pneumatic actuator 4 of the pneumatic system 1.

[0046] The pressure regulator unit 9 regulates its output pressure to pneumatically actuate the pneumatic actuator 4 and thereby set the actuating section in motion. The pressure regulation is carried out in particular according to the setpoint pressure profile 25. For example, the setpoint pressure profile 25 is increasing, in particular monotonically increasing. The setpoint pressure profile 25 is specifically designed to achieve an extension movement of the actuator element 5 and / or an upward movement of the actuating section, in particular vertically upward. The pneumatic system 1, in particular the control unit 11, detects a current position of the actuating section by means of the position detection device, for example as the actual position value 41.

[0047] The valve device 3, in particular the blockage detection unit 33, checks a relationship between the current output pressure (for example, the actual pressure value 29) and the detected position (for example, the actual position value 41), and on the basis of this check detects the blockage state of the actuating section.

[0048] Preferably, based on this finding, the valve device 3 generates the blockage information 42, which indicates that the blockage state exists.

[0049] The following section will discuss blockage detection in the exemplary case where the pneumatic system 1 comprises several actuating sections, several pneumatic actuators 4 and several pressure regulator units 9.

[0050] Each pressure regulator unit 9 performs a pressure regulation of the respective output pressure (in particular based on a respective setpoint pressure profile 25) in order to pneumatically actuate the respective pneumatic actuator 4 and thereby set the respective actuating section in motion. The valve device 3 detects the respective position of the respective actuating section. For each actuating section, the valve device 3, in particular the respective blockage detection unit 33, checks the respective relationship between the respective current output pressure and the respective detected position, and, based on this check, detects a respective blockage state of the respective actuating section.

[0051] The following section will discuss the blockage situation in more detail.

[0052] The actuating section serves as an example to set an object in motion. In this example, the object is wafer 2. A blockage state exists, in particular, when the object cannot be set in motion despite pneumatic actuation of the pneumatic actuator 4 and the resulting driving force applied to the object by the actuating section.

[0053] Preferably, the actuating section serves to lift the wafer 2 from the wafer support 17. The blockage state occurs particularly when the wafer 2 cannot be lifted from the wafer support 17 despite pneumatic actuation of the pneumatic actuator 4 and the resulting drive force applied to the wafer 2 by the actuating section. For example, the wafer support 17 is part of the wafer holding device, which may, in particular, faultily hold the wafer 2 in the blockage state and thus prevent it from being lifted. The wafer holding device is part of the pneumatic system 1. The blockage state can occur, in particular, if the wafer holding device faultily fails to switch from the holding state to the release state.

[0054] Preferably, the pneumatic system is switched to a safety state in response to the detection of a blockage condition. For example, the controller 11 requests the safety state in response to the blockage information. For example, the blockage detection unit 33 transmits blockage information to the position controller 28 in response to the detected blockage condition, and the position controller 28 causes the system to enter the safety state in response to the blockage information. In the safety state, for example, each pneumatic actuator 4 is switched to a predefined state. For example, in the safety state, each pneumatic actuator 4 is de-energized, in particular by the valve device 3 venting each pneumatic actuator 4.Furthermore, in the safety state, each actuating section, in particular each actuator element 5, can be moved to a predetermined position, for example an end position, in particular a maximally retracted position, and / or a zero position.

[0055] The following section will explain in more detail how the blockage state can be identified based on checking the relationship between the output pressure and the recorded position.

[0056] Preferably, the relationship between the current output pressure and the detected position is checked by the valve device 3, in particular the blockage detection unit, checking whether the current output pressure is within a respective pressure range defined for the detected position.

[0057] In particular, the valve device 3 provides a respective pressure range for each position of the actuating section. The respective pressure range is, in particular, a pressure interval. The pressure range expediently comprises (in particular exclusively) those pressure values ​​at which (for the respective position) it cannot be assumed that a blockage condition exists. Expediently, the valve device 3 (in particular the blockage detection unit 33) detects the blockage condition in response to the fact that the current outlet pressure (for example, the current actual pressure value 29) is outside (in particular above) the pressure range, i.e., in particular, in response to the fact that the current outlet pressure is greater than the largest value of the pressure range.

[0058] Preferably, the relationship between the current output pressure and the detected position of the actuating section is checked using pressure range information that defines a respective pressure range—in particular, a respective pressure interval—for each position within a position range of the actuating section. The pressure range information is stored, for example, in the valve device 3, particularly in the control unit 11. The position range of the actuating section is, for example, the entire travel path of the actuating section during pneumatic actuation and / or the total possible travel path of the actuating section achievable by pneumatic actuation of the respective pneumatic actuator 4. For example, the position range is the entire travel path of the actuator element 5 achievable by pneumatic actuation, particularly from the first end position to the second end position.

[0059] The entirety of pressure zones shall also be referred to as test zone 39. Figure 3 shows an example of a test zone 39.

[0060] Preferably, the valve device 3, in particular the blockage detection unit 33, checks the relationship between the current outlet pressure and the detected position based on a position-pressure characteristic 23. The position-pressure characteristic 23 assigns a plurality of positions of the actuating section to a plurality of pressure values ​​of the outlet pressure. In particular, each position is assigned to a respective pressure value, specifically the pressure value required to move the actuating section to the respective position. The positions are position values. In particular, there is a 1:1 mapping between the positions and the pressure values. The position-pressure characteristic is, in particular, a position-pressure characteristic curve.

[0061] Figure 3 shows an example of a position-pressure characteristic 23. In the diagram of Figure 3, the output pressure p of the pressure regulator unit 9 is plotted on the horizontal axis, and the position z of the actuating section is plotted on the vertical axis. The position-pressure characteristic 23 begins, for example, at a starting position zel, where the actuator 5 is, for instance, in the first end position. With a continuous increase in the output pressure p, the actuating section initially remains in the starting position zel until the output pressure is high enough to set the actuator 5 in motion. This occurs at a starting pressure ps, which is also referred to as the breakaway pressure. From the starting pressure ps, the position z increases with increasing output pressure p, for example linearly; however, the relationship can also be non-linear.At an end pressure pe, the actuator 5 reaches the second end position (and the actuating section the end position ze2), so that a further increase in the output pressure p no longer leads to a change in position and the actuating section remains in the end position ze2. Advantageously, the valve device determines the position-pressure characteristic 23 during a learning run of the actuating section, for example by pneumatically actuating the pneumatic actuator 4 and moving the actuator 5 from the first end position to the second end position. In particular, during the learning run, the valve device 3 continuously detects the position of the actuating section (as the Istpositions value 41) and the current output pressure (as the Istdruchs value 29) and generates the position-pressure characteristic 23 based on the detected positions and pressures.The position-pressure characteristic 23 is determined in particular for a state in which the blockage state is not present.

[0062] For example, the valve device 3 can check for a currently detected position of the actuating section whether the current output pressure corresponds to the pressure assigned to this position in the position-pressure characteristic 23 or deviates so much from this assigned pressure (and in particular is greater than the largest pressure value of the assigned pressure range) that a blockage state must be assumed.

[0063] Preferably, the valve device 3 generates the pressure range information based on the position-pressure characteristic 23. For example, the valve device 3 defines each pressure range such that it includes a respective pressure value of the position-pressure characteristic 23, for example as the smallest value in the respective pressure range.

[0064] Preferably, the blockage condition is detected without using a force sensor for the actuating section. As explained above, the blockage condition can be detected based on the current output pressure and the detected position, so a force sensor is not required.

Claims

Claims 1. Method for detecting a blockage state of at least one actuating section of a pneumatic system (1) for industrial automation, comprising at least one pneumatic actuator (4) and a valve device (3) which pressure regulator unit (9) includes the following steps: - Performing pressure control of an output pressure of the pressure regulator unit (9) in order to pneumatically actuate the pneumatic actuator (4) and thereby set the actuating section in motion, - Capturing the position of the control section, - Checking a relationship between the current output pressure and the detected position, and - based on testing and detecting a blockage state of the actuator section.

2. Method according to claim 1, wherein the step of checking comprises checking whether the current output pressure is within a respective pressure range defined for the detected position.

3. Method according to claim 1 or 2, wherein the testing is carried out using pressure range information which defines a respective pressure range for each position of a position range of the actuating section.

4. Method according to a preceding claim, wherein the testing is based on a position-pressure characteristic that assigns a plurality of positions of the actuating section to a plurality of pressure values ​​of the output pressure, and / or the pressure range information is generated based on the position-pressure characteristic.

5. Method according to claim 3 or 4, wherein the position-pressure characteristic is determined during a learning run of the actuating section.

6. Method according to a preceding claim, wherein the actuating section serves to set an object in motion, and the blockage state is present when the object cannot be set in motion despite pneumatic actuation of the pneumatic actuator (4) and a driving force thereby applied to the object by the actuating section.

7. Method according to claim 6, wherein the object is a wafer (2) and the actuating section serves to lift the wafer (2) from a wafer support (17), and the blockage state is present when the wafer (2) cannot be lifted from the wafer support (17) despite pneumatic actuation of the pneumatic actuator (4) and a driving force thereby applied to the wafer (2) by the actuating section.

8. Method according to claim 7, wherein the wafer support (17) is part of a wafer holding device which holds the wafer (2) in a blocked state, in particular in a faulty state, and thereby prevents the wafer (2) from being lifted off.

9. Method according to a preceding claim, wherein the pneumatic system (1) is placed in a safety state in response to the detection of the blockage state.

10. Method according to a preceding claim, wherein the pneumatic system (1) comprises multiple actuating sections, multiple pneumatic actuators (4) and multiple pressure regulator units (9), comprising the steps: - Performing, with each pressure regulator unit, a respective pressure regulation of the respective output pressure in order to pneumatically actuate the respective pneumatic actuator (4), and thereby set the respective actuating section in motion, - Recording the respective position of the respective control section, - Check, for each control section, the respective relationship between a given current output pressure and a given detected position, and - based on checking and detecting a respective blockage state of the respective actuating section.

11. Pneumatic system (1) for industrial automation, comprising at least one pneumatic actuator (4) and a valve device (3) which has a pressure regulator unit (9) with a valve unit (12) and is designed is to carry out pressure control with the pressure control unit (9) in order to pneumatically actuate the pneumatic actuator (4) with an output pressure of the pressure control unit (9) in order to thereby set an actuating section of the pneumatic system (1) in motion, wherein the valve device (3) is further configured to detect a position of the actuating section, to check a relationship between the current output pressure and the detected position, and to recognize a blockage state of the actuating section on the basis of the check.

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