Method for manufacturing coating layer and plasma-resistant member manufactured by same

A two-layer coating process using aerosol deposition and EB-PVD/IBAD enhances plasma resistance and bonding strength in semiconductor devices, addressing contamination issues from high-energy etching processes.

WO2025225897A1 Publication Date: 2025-10-30KOMICO CO LTD
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Patent Information

Application Number
PCT/KR2025/003842
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-04-26
Filing Date
2025-03-26
Publication Date
2025-10-30

AI Technical Summary

Technical Problem

Semiconductor devices face challenges in plasma resistance due to increased demands for finer line widths and stacked packaging technologies, leading to device failures from contaminants generated during high-energy etching processes, which are exacerbated by surface roughness and chemical changes on internal components.

Method used

A method involving a two-layer coating process, where a first layer is formed using aerosol deposition (e.g., Al2O3, Y2O3, YSZ) and a second layer using EB-PVD or IBAD (e.g., Y2O3, YF3) with columnar crystals perpendicular to the surface, enhancing plasma resistance and bonding strength.

Benefits of technology

The method improves plasma resistance, hardness, and bonding strength of semiconductor device components, reducing contaminant generation and extending their lifespan and production yield.

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Abstract

An embodiment of the present invention provides a method for manufacturing a coating layer, comprising the steps of: preparing an object to be coated; forming, on the object to be coated, an aluminum oxide-based, yttrium oxide-based or zirconium oxide-based first coating layer by means of aerosol deposition; and forming, on the first coating layer, an aluminum oxide-based, yttrium oxide-based or yttrium fluoride-based second coating layer by means of physical vapor deposition, wherein the second coating layer includes an array of columnar crystals that extend perpendicularly to the surface of the object to be coated.
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