Sensor array and method for manufacturing the sensor array

Abstract

The present invention relates to a sensor array (100, 110, 120) comprising: at least one grid of nanogranular sensor elements (20), which are deposited on a substrate (10, 12, 14); and at least one grid of electrodes (30), which are electrically connected to the nanogranular sensor elements (20) in order to allow measurement of changes in the conductivity of every individual nanogranular sensor element (20). The invention also relates to a corresponding production method.

Description

[0001] Sensor array and manufacturing process of the sensor array

[0002] Technical field

[0003] The present invention relates to a sensor array with a grid of sensor elements on a substrate, wherein the individual sensor elements detect changes in conductivity.

[0004] State of the art

[0005] A thermal imaging camera is based on the detection of infrared radiation emitted by all objects with a temperature above absolute zero. This thermal radiation is captured by an infrared sensor, such as a microbolometer array. A microbolometer array comprises an array or grid of microbolometers.

[0006] A microbolometer consists of a membrane composed of a sensor layer and an absorber layer, suspended in a vacuum by two electrodes above a substrate containing readout electronics. When thermal radiation from an object strikes the absorption layer, it is at least partially absorbed. This heats the membrane, resulting in a change in the electrical resistance of the sensor layer. This change in electrical resistance is detected by a readout circuit on the substrate.

[0007] By creating a vacuum between the membrane and the substrate, the membrane is thermally isolated from the readout electronics. Improved thermal insulation comes at the cost of reduced mechanical robustness, and vice versa.

[0008] Commercial microbolometers typically range in size from 12 pm to 17 pm. Therefore, smaller microbolometers are needed to create high-resolution thermal imaging cameras. However, this also increases the demands on the microstructuring and mechanical stability of the electrodes.

[0009] Description of the invention Starting from the known prior art, it is an object of the present invention to provide an improved sensor array.

[0010] The problem is solved by a sensor array with the features of claim 1. Advantageous further developments are described in the dependent claims, the description, and the figures.

[0011] Accordingly, a sensor array is proposed comprising: at least one grid of nanogranular sensor elements arranged on a substrate and at least one grid of electrodes electrically connected to the nanogranular sensor elements to enable the measurement of conductivity changes of each individual sensor element.

[0012] The term "nanogranular sensor element" is used here to mean that the sensor element consists of, or at least comprises, a nanogranular material. Nanogranular materials offer the advantage that the measurable temperature range of the sensor element can be precisely adjusted by controlling the shape, shape, material, spacing, and number of grains within the sensor element.

[0013] A sensor element array is an ordered arrangement of multiple sensor elements in a two-dimensional matrix. An electrode array is a similarly ordered arrangement of multiple conductive traces that electrically contact the sensor elements. The electrode array can, for example, be deposited onto the substrate, and the sensor element array can then be deposited onto the electrode array. However, it is also possible for the electrodes to be deposited onto the sensor elements, or for the sensor elements to be arranged between the electrodes.

[0014] In general, a two-dimensional grid can be understood as a distribution of sensor elements. This can also include, in particular, the distribution of sensor elements on curved surfaces. However, a two-dimensional grid can also be defined by concentric circles of sensor elements or by spirally arranged sensor elements. A grid can have an internal order, such that, in particular, a parametric representation of the sensor element locations exists, where the sensor element locations on the substrate can be expressed as a function of one or more variables. For example, the grid can be a two-dimensional grid consisting of a series of rectangles, where the sides of the rectangles are formed by the electrodes and the sensor elements are arranged at the corners of the rectangles and are contacted there. In particular, the rectangles can also be squares.

[0015] However, it is also possible that the grid is a one-dimensional grid.

[0016] The regular arrangement of the sensor elements allows the detected conductivity changes to be easily combined into a thermal image or a detailed radiation map of a measured object by plotting the detected conductivity changes or resistances of the sensor elements against their measurement location. The position of the sensor element in the grid thus ultimately represents the coordinate of the corresponding measured value in the thermal image or radiation map.

[0017] However, it is also possible that the grid has variable or uniform spacing.

[0018] The electrical resistance of each nanogranular sensor element is proportional to the inverse of its electrical conductivity. The electrical conductivity is determined, in principle, by the mobility of the electrons within the nanogranular sensor element. This electron mobility can be adjusted through the manufacturing process itself, as well as through possible post-processing steps of the sensor elements, as shown below.

[0019] Electrical resistance can be measured using electrodes.

[0020] The electrical resistance of each sensor element can be determined by the temperature of the nanogranular sensor element. Therefore, if an object imparts a temperature distribution to the sensor array, this creates a corresponding distribution of electrical resistances on the sensor array. Finally, by determining the electrical resistances of the nanogranular sensor elements using the electrodes, the heat distribution or radiation distribution of the object can be determined from these electrical resistances.

[0021] In other words, the temperature distribution of the object can be directly measured using the sensor array with direct thermal contact between the sensor array and the object. The sensor array can also measure the electromagnetic radiation emitted by the object and incident on the nanogranular sensor elements, since this incident electromagnetic radiation also leads to a change in electrical resistance.

[0022] The electrical resistance of each sensor element can also be changed by irradiating the sensor element with electromagnetic radiation. Nanogranular materials, for example, exhibit an internal photoelectric effect, whereby the individual grains can form discrete electronic states. The electrical conductivity of the sensor elements can be influenced by the energy of the photons of the electromagnetic radiation when they transition into an excited state.

[0023] This photoelectric effect can be used to detect electromagnetic radiation with the sensor array, particularly within a specific wavelength range for which the nanogranular sensor elements were optimized during manufacturing or post-treatment. For example, energy can be deposited in the sensor elements during post-treatment.

[0024] The electronic states can depend on the shape and structure of the grains as well as on the material composition of the nanogranular layer. Accordingly, the maximum detectable wavelength of electromagnetic radiation, up to which such an increase in conductivity can be achieved, can be adjusted by the shape and structure of the grains.

[0025] Electromagnetic radiation can also be measured, for example, by dielectric heating. Dielectric heating is the heating of a non-conductive material by electromagnetic radiation.

[0026] In principle, it can be particularly advantageous if the conductivity is set such that even small temperature changes relative to a reference temperature or small changes in radiation result in large changes in conductivity. Because the change in conductivity is particularly large, the temperature or radiation can be determined with high accuracy, since even small temperature or radiation changes generate large measurement signals. For example, the conductivity or the change in conductivity for a specific temperature or wavelength range can be optimized by post-processing the nanogranular material, as will be shown below.

[0027] However, it can also be particularly advantageous if the conductivity is set so that temperature changes can be detected uniformly and / or equally well over a wide temperature range. For example, the temperature range to be measured by the sensor element can be between 250 K and 350 K.

[0028] The sensor elements can be configured to change their conductivity when exposed to heat and / or thermal radiation and / or electromagnetic radiation. In particular, the sensor elements can be configured to change their conductivity reversibly when exposed to heat and / or thermal radiation and / or electromagnetic radiation. The change in conductivity of the sensor element is reversible if the conductivity value after exposure to heat or radiation corresponds to the conductivity value before exposure or radiation within a certain tolerance range. The tolerance range can, for example, be less than 5%, preferably less than 1%, and most preferably less than 0.1%.

[0029] Applying heat can be achieved, for example, by placing the sensor array onto an object. The heat flow from the object to the sensor array, or vice versa, causes the sensor elements of the array to thermalize within a certain thermalization period. After this period, the temperature of the sensor element matches the temperature of the object at the point of contact. The heat within the sensor element generates the change in conductivity.

[0030] It is also possible that the conductivity of the sensor elements is changed by exposing them to electromagnetic radiation. For example, when exposed to thermal radiation, each sensor element is heated according to the local radiation distribution on the sensor array. After a thermalization period, the temperature of the sensor elements corresponds, for example, to the temperature of the local incident radiation. Blackbody radiation, for instance, is a type of thermal radiation where the spectral energy density follows Planck's law of radiation. However, it is also possible that the spectral power density deviates from Planck's law, for example, due to the surface properties of the object or other characteristics. Thermal radiation can generally be understood as the energy emitted or absorbed by an object through electromagnetic radiation.For example, by applying thermal energy, such as by heating, irradiation with photons or irradiation with other energetic particles, a change in the electronic structure of the nanogranular material of the sensor element can occur, since, for example, the average distances between the grains of the nanogranular sensor element are changed and thereby, for example, tunneling and hopping processes in electronic transport can be simplified or made more difficult.

[0031] For example, the degree of crystallinity and / or the permittivity of the nanogranular material can be influenced by the application of a chemical agent. It is also possible that the mean spacing and / or the mean diameter of the charge carrier centers can be altered by the application.

[0032] In particular, it is also possible that the conductivity of the sensor elements is altered by exposure to electromagnetic radiation. For example, electromagnetic radiation in the visible, UV, and / or X-ray ranges can change the conductivity of the sensor elements. This can be explained, for example, by the internal structure of the sensor elements, especially by an internal photoelectric effect. In this case, for example, the incident electromagnetic radiation performs work on the electronic system of the nanogranular sensor.

[0033] For example, by exposing the nanogranular sensor element to electromagnetic radiation, free charge carriers can be generated, which change the conductivity of the sensor element, in particular reversibly.

[0034] Regardless of the actual radiation source, temperature measurements are always based on the temperature distribution on the sensor array, either directly or via the received electromagnetic radiation. Overall, the proposed sensor array provides a bolometer with high spatial and temperature resolution, as well as a fast response time.

[0035] The width of the sensor element can be less than 12 pm. In particular, the width can be between 1 nm and 3000 nm, preferably between 200 nm and 400 nm, and most preferably between 8 nm and 12 nm. The height of the sensor element can be between 1 nm and 100 nm, preferably between 1 nm and 12 nm, for example, 6 nm. The length of the sensor element can be between 1 nm and 100 nm, preferably between 8 nm and 12 nm. The small dimensions of the sensor elements enable high spatial resolution. Furthermore, the small dimensions also result in small masses, as described below.

[0036] The mass of the sensor element can range between 1x10 -24 kg and 1x10 -18 kg, preferably between 5x10 -21 kg and 1x10 -18 kg, for example 6x10 -21 kg.

[0037] Due to its low mass, the temperature of the sensor element adapts almost instantaneously to the temperature of the environment or the substrate, enabling temperature measurements with high temporal resolution. In particular, this allows temperature changes to be measured quickly.

[0038] For example, the thermal response time T or thermalization time of a sensor element is determined by its characteristic length and the thermal diffusivity a as T = L 2 / a. The thermal diffusivity is given by the thermal conductivity k, the heat capacity c P as well as the density p of the sensor element to a = k / pc P For a sensor element, for example, c P = 400 J / (kg K), p = 6000 kg / m 3 and k = 40 W / (m K), so that at a characteristic length of L = 10 nm a thermal response within 6 x 10 -12 to reach.

[0039] Sensor elements with thermal response times of less than 1 x 10 prove to be particularly advantageous. -9 s is, preferably smaller than 100 x 10 -12 s is, especially preferably smaller than 50 x 10 -12 , especially preferred if smaller than 10 x 10 -12 s be.

[0040] Such short thermal response times make it possible, in particular, to monitor even fast-moving thermal phenomena in real time.

[0041] A cover layer can cover the sensor elements of the sensor array and the electrodes. The cover layer can be transparent to the wavelength or wavelength range of the electromagnetic radiation expected to be measured by means of the internal photoelectric effect.

[0042] The cover layer can protect not only the sensor element itself, but also the electrodes that contact it. In particular, the cover layer can encapsulate the sensor elements and electrodes. This protects the sensor element and electrodes from mechanical damage, provides electrical insulation, and protects them from moisture. The sensor array can also include a conversion layer for absorbing electromagnetic radiation and converting it into heat.

[0043] Such a conversion layer heats up particularly strongly due to electromagnetic radiation, causing the sensor elements to heat up significantly and thus enabling the detection of particularly large temperature changes. In particular, such a conversion layer can achieve a higher conversion efficiency of electromagnetic radiation into heat than the intrinsic absorption by the sensor elements. This allows corresponding thermal images to be generated even with weak electromagnetic radiation.

[0044] For example, such a conversion layer can be a multilayer system that converts electromagnetic radiation in the wavelength range of 250 nm to 1200 nm into heat particularly efficiently. In particular, the multilayer system can be tailored to the wavelengths of a blackbody radiator with a corresponding temperature.

[0045] Other possibilities for forming a conversion layer include metal-semiconductor bilayers, composite materials made of ceramic materials in a metallic matrix (so-called cerments), textured absorbers or photonic crystals.

[0046] The conversion layer can be configured to filter the wavelength of the thermal radiation.

[0047] This allows electromagnetic radiation to be detected at a specific wavelength. In particular, this adds an extra dimension of information to the thermal image, for example, when certain chemical or biological processes occur at a specific wavelength and are location-dependent.

[0048] Wavelength filtering can be achieved in a variety of ways. For example, a specific wavelength can be filtered out of the electromagnetic spectrum using thin-film interference. The conversion layer can be a layered system, particularly a multilayer system. Alternatively, the wavelength can be set via the transmissivity of the conversion layer, or via a wavelength-dependent reflectivity that reflects the unwanted electromagnetic radiation away from the sensor array. It is also possible to adjust the geometry of the conversion layer, specifically by adding height texturing or modifying the conversion layer along the Z-direction (the height axis). Similarly, the surface roughness can be adjusted.

[0049] The conversion layer can be configured to focus the heat or electromagnetic radiation onto the nanogranular sensor element.

[0050] The conversion layer can include an optical imaging element. For example, the conversion layer can comprise an array of microlenses. One or more microlenses can be arranged over each sensor element. Alternatively, a single microlens can cover multiple sensor elements. A multilayer system can then be arranged beneath the microlenses, which converts the focused electromagnetic radiation into heat. Alternatively, the sensor element itself can absorb the focused electromagnetic radiation. In particular, the sensor element can have a surface roughness to enable particularly high absorption.

[0051] In particular, the sensor element can also be textured to achieve particularly high absorption.

[0052] However, it is also possible that the conversion layer itself is an imaging element. For example, the conversion layer can be a multilayer system, but structured in the form of a Fresnel lens.

[0053] However, it is possible that the conversion layer is structured with a tapered profile above each sensor element, thus focusing the heat onto the surface of the sensor element. In particular, such a tapered structure can also match the thermal impedance of the sensor element and the conversion layer, making heat transfer into the sensor element especially efficient.

[0054] The conversion layer generally allows for targeted heat transfer from the conversion layer to the sensor elements, enabling the sensor elements to detect even greater temperature changes.

[0055] The conversion layer can also extend only to the locations of the sensor elements.

[0056] In particular, the conversion layer at the level of the top of the sensor elements can extend only to the locations of the sensor elements. This ensures that the electrodes located between the sensor elements are thermally stressed and heated, thereby reducing thermal electrical noise in the readout electronics.

[0057] The sensor array can comprise at least a first grid and a second grid of sensor elements, wherein conversion layers of a first kind are arranged on the sensor elements of the first grid, and wherein conversion layers of a second kind are arranged on the sensor elements of the second grid.

[0058] Even if the sensor elements are assigned to different grids, their conductivity can react in the same way to exposure to heat and / or thermal radiation and / or electromagnetic radiation. The different functionality of the sensor elements of the different grids results from the arranged first and second conversion layers.

[0059] For example, a first conversion layer can filter a first wavelength, while a second conversion layer filters a second wavelength. However, more conversion layers with additional wavelengths can also be used.

[0060] This allows the sensors to detect electromagnetic radiation at different wavelengths. The advantage is that spectral resolution can be provided in addition to spatial resolution.

[0061] The second covering layer can block electromagnetic radiation.

[0062] This ensures that the sensor elements under the second conversion layers only measure the local thermal dark current.

[0063] In particular, the two grids of sensor elements can be arranged offset in height and width by half a grid length, with each grid of sensor elements being contacted via its own grid of electrodes.

[0064] However, it is also possible that a first or a second conversion layer is arranged alternately on a single grid of electrodes above the sensor elements.

[0065] The alternating arrangement of the sensor elements with the conversion layers allows the dark current of a sensor element to be directly determined by the average of its four nearest neighbors. Due to the small size of the sensor elements, thermal insulation, especially vacuum insulation, can be omitted, while still maintaining a high spatial resolution of the sensor array.

[0066] The sensor array can comprise at least a first grid of nanogranular sensor elements, a second grid of nanogranular sensor elements, and a third grid of nanogranular sensor elements, wherein conversion layers of a first type are arranged on the sensor elements of the first grid, wherein conversion layers of a second type are arranged on the sensor elements of the second grid, and wherein conversion layers of a third type are arranged on the sensor elements of the third grid. In particular, three adjacent sensor elements with three different conversion layers can be arranged within a geometric area smaller than half the wavelength of a wavelength range to be observed. This allows the sensor elements to be arranged, in particular, below the optical resolution limit, thereby reaching or falling below the physically possible resolution limit of the sensor.

[0067] The sensor elements can be in direct contact with the substrate.

[0068] This makes it possible, in particular, to ensure that the sensor element is firmly connected to the substrate, thus providing protection against mechanical stresses that could cause the sensor element to detach.

[0069] The substrate can be electrically insulating, wherein the substrate preferably consists of a polymer or a ceramic or comprises a polymer and a ceramic.

[0070] The electrical insulation allows the electrodes to be applied directly to the substrate, thus preventing a short circuit between the electrodes.

[0071] The substrate can be electrically non-insulating, and in particular conductive. The substrate can preferably consist of a metal or a semiconductor, or comprise a metal or a semiconductor. An insulating layer must be arranged between the electrodes and the substrate, with the electrically non-insulating substrate forming a second electrode.

[0072] The substrate can be flexible.

[0073] Due to the small size of the sensor element, it can be mounted or embedded in flexible substrates. For example, a sensor element can be mounted on a flexible circuit board. Alternatively, the sensor array can be embedded in plasters or wound dressings to measure the temperature distribution in and around the wound and thus provide early warning of potential inflammation.

[0074] The sensor array has two basic operating modes, which can also be partially combined. In the first operating mode, a temperature distribution is imprinted on the sensor array by thermal radiation. In the second operating mode, the sensor array is brought into contact with an object, so that the object's heat distribution is imprinted on the sensor array.

[0075] In both cases, the accuracy of the temperature measurement can be improved by insulating the sensor elements on one side with a barrier layer. In particular, the barrier layer can be positioned above or below the sensor elements.

[0076] If the barrier layer is located above the sensor elements, i.e. on the side facing away from the substrate, the sensor elements can measure the temperature of the substrate, or the temperature distribution of the object in contact with the substrate, with particular accuracy.

[0077] If the barrier layer is located below the sensor elements, i.e., between the sensor elements and the substrate, the sensor elements can measure the temperature particularly accurately through an electromagnetic radiation distribution.

[0078] The barrier layer can have a thickness between 5nm and 100nm, preferably a height between 5nm and 15nm.

[0079] This ensures mechanical and / or thermal protection while keeping the dimensions of the sensor array small.

[0080] Another aspect of the invention is to provide a suitable method for manufacturing the sensor array. The manufacturing process also determines, in particular, the physical properties of the nanogranular sensor elements.

[0081] Accordingly, a method for fabricating a sensor array is proposed. The method comprises the following steps: providing a substrate, providing a grid of electrodes, depositing a grid of sensor elements, and connecting the sensor elements to the electrodes to enable the measurement of conductivity changes in the sensor elements. Depositing, in this context, can mean that the sensor elements are grown on the substrate in a controlled manner through chemical and / or physical processes.

[0082] The electrode placement step can be performed before or after the sensor elements are deposited. Accordingly, in the sensor array, the sensor element is positioned above or below the electrodes.

[0083] The connecting step here includes establishing the electrical contact between the sensor element and the electrodes, i.e., depositing the electrodes onto the sensor elements or depositing the sensor elements onto the electrodes.

[0084] A wide variety of methods are available for the production of nanogranular materials.

[0085] One possibility is the local production of nanogranular materials by local application of thermal energy to, for example, precursor materials with the aim of producing nanogranularity as a material property.

[0086] In localized fabrication, energy is applied locally to a precursor material, causing it to decompose in place. Chayaka et al., "Nanogranular Co-Al-O films prepared by laser ablation," PSSB 241 7 2004, describes a process using Cox(Al2O3)1-x as the precursor material. This precursor material is bombarded with pulsed laser beams, altering its properties, for example, by melting or dissociating the precursor material, undergoing a change of state, a change of state of matter, or reconfiguring into nanogranularity. With suitable process control, determined by the laser energy, wavelength, pulse duration, and focus, as well as by the appropriate precursor material and its composition and grain size, the nanogranular material is produced, comprising, for example, two metals or a metal and a metal oxide.Through local energy application, the nanogranular material is produced on-site on a target substrate at a defined location.

[0087] Local sensor elements can also be fabricated using lacquer-based materials. By applying metal compounds dissolved in a carrier solution, such as organometallic compounds, the precursor material can be applied locally via a masking process and then thermally converted. For a lacquer containing metal particles, this is achieved, for example, by sintering or laser beam treatment. Electron beam-induced deposition is another process in which gaseous molecules are selectively dissociated by an electron beam, leading to the deposition of non-volatile fragments on a nearby substrate. The electron beam is typically provided by a scanning electron microscope (SEM), resulting in high spatial accuracy and the ability to produce freestanding three-dimensional structures. The focused electron beam of an SEM or a scanning transmission electron microscope (STEM) is frequently used.The precursor materials are typically liquid or solid and are gasified prior to deposition, usually by evaporation or sublimation, and introduced into the high-vacuum chamber of the electron microscope at a precisely controlled rate. The deposition rate depends on a variety of processing parameters, such as the precursor partial pressure, the substrate temperature, the electron beam parameters, the applied current density, etc. It is typically on the order of 10 nm / s. The electron beam can also be replaced by other beam types, e.g., ion beams.

[0088] A second possibility for producing nanogranular materials is provided by coating processes.

[0089] By applying energy to precursor materials, target substrates can be coated with nanogranular layers. The target substrate can be equipped with a mask, such as a paint mask, allowing the nanogranular coating to be localized to specific areas on the substrate. In ballistic atomization processes, local application to the target substrate can be achieved using shadow masks.

[0090] Silicon-based precursor materials, for example, can be used, which are atomized by applying high amounts of energy. This is the case with processes such as Low-Energy Cluster Beam Deposition (LCBD) or Supersonic Cluster Beam Deposition (SBB). The amount of energy applied to the precursor material controls its growth on the target substrate. With suitable process control, the production of nanogranular materials is possible. Precursor materials can be silicon-based materials, metals, or metal compounds.

[0091] Sputtering processes can also be used to produce nanogranular materials, for example, for the production of CuSiO2 nanogranular films via co-sputtering on slightly heated glass substrates (50°C). Process parameters such as chamber vacuum influence the formation of the nanogranular films. Other methods focus on the production of so-called core-shell structures, in which precursor materials are converted into strontium ferromolybdate / strontium molybdate ceramics. These processes utilize temperatures of several hundred degrees Celsius and high pressures.

[0092] The sensor elements can be post-processed in particular, thereby changing the crystal structure and / or grain structure, preferably shifting the temperature with the maximum conductivity change into a temperature measurement range to be measured.

[0093] The electrical behavior of the sensor element can be specifically tailored by modifying its crystal structure or grain structure. By altering the degree of crystallinity, grain size, or grain spacing, the sensor element's conductivity at a given temperature, or its rate of change at a given temperature, can be adjusted. In particular, the permittivity of the sensor element can also be influenced.

[0094] For example, post-processing can consist of irradiating the sensor elements with an electron beam or an ion beam.

[0095] This allows the conductivity change of the sensor elements to be optimized for a wide temperature and electromagnetic wavelength measurement range.

[0096] Post-processing can also consist of annealing, particularly local laser annealing. In this process, the sensor elements are heated locally, so that the thermal motion can, for example, induce crystallization of the sensor elements, thereby adjusting their conductivity.

[0097] In general, the sensor element can undergo thermal post-treatment, for example by heating or by exposure to an electron or laser beam. Ultimately, this applies energy to the material to initiate formation processes that positively influence its properties. For example, post-irradiation with high-energy electrons at several keV can be performed. It is also possible to heat the sensor elements, for example at 450°C for one hour, or to deposit energy locally using laser beams.

[0098] The process may include the step of providing the electrodes, as well as the step of providing an insulating layer. Furthermore, the process may include a step of providing a covering layer.

[0099] Furthermore, the process can include a step of providing a conversion layer.

[0100] Brief description of the characters

[0101] Preferred further embodiments of the invention are explained in more detail by the following description of the figures. These show:

[0102] Figures 1A and 1B show a top view and a cross-sectional view of a first

[0103] embodiment of a sensor array,

[0104] Figures 2, 3A, B, show a cross-sectional view of a sensor element in different embodiments.

[0105] Figures 4A, B, C show a cross-sectional view of a sensor element in various configurations.

[0106] Designs with conversion layer,

[0107] Figures 5A and 5B show a top view and a cross-sectional view of a second embodiment of a sensor array with conversion layers.

[0108] Figures 6A, B, C, D, E, F show top views of further embodiments of the

[0109] Sensor arrays, and

[0110] Figure 7 shows a schematic representation of the manufacturing process.

[0111] Detailed description of preferred implementation examples

[0112] Preferred embodiments are described below with reference to the figures. Identical, similar, or equivalent elements in the different figures are designated with identical reference numerals, and repeated descriptions of these elements are sometimes omitted to avoid redundancy.

[0113] The present disclosure provides sensor arrays with nanogranular sensor elements that are compact in size and have a very small mass. For example, the size of each nanogranular sensor element can be only 10 nm x 10 nm x 10 nm, while the weight is only about 6 x 10 -21 The weight is kg. This allows for a direct, unadulterated and rapid temperature measurement of the temperature distribution of the sensor elements.

[0114] Due to their small possible feature size, the sensor elements also enable high spatial resolution. These advantages make the sensor elements proposed here suitable for a wide variety of applications requiring precise and robust temperature measurements. A sensor array 100 is shown with reference to Figures 1A and 1B. The sensor array 100 comprises a multitude of nanogranular sensor elements 20 arranged in a grid pattern on a substrate 10. Each nanogranular sensor element 20 is deposited on the substrate 10, as shown below. The nanogranular sensor elements 20 are interconnected by a grid of electrodes 30, which electrically contact the nanogranular sensor elements 20 to enable the measurement of conductivity changes of each individual sensor element 20. Since the substrate is electrically insulating, the electrodes 30 can be deposited directly onto the substrate.

[0115] The Sensor Array 100 enables precise temperature measurements over a defined range. This is particularly useful in applications requiring detailed thermal mapping and monitoring, such as thermal management in electronic devices, thermal process control in manufacturing, or environmental monitoring. The high spatial resolution of the 20 sensor elements, combined with their adjustable temperature response, makes the Sensor Array 100 a versatile and adaptable solution for temperature sensing and measurement.

[0116] In other words, the proposed sensor array can provide a bolometer with high spatial resolution, high temperature resolution, and a fast response time.

[0117] The sensor elements 20 can also react to magnetic fields, so that an image of magnetic fields can also be generated.

[0118] The sensor elements 20 can also react to electric fields, so that an image of electric fields can also be generated, for example the image of electrosmog.

[0119] Referring to Figure 2, a single nanogranular sensor element 20 on the substrate 10, 14 (flexible substrate) is shown in a schematic cross-sectional view, wherein the sensor element 20 and the electrodes 30 are positioned on an electrically insulating substrate 10.

[0120] The sensor element 20, for example, has a width, height, and length of less than 12 pm, such as a width, height, and / or length between 1 nm, 200 nm, 500 nm, 3000 nm, and 5600 nm. In particular, the mass of such a sensor element 20 is between 1 x 10 -24 kg and 1x10 -18kg. The substrate 10 can, for example, be a mechanically flexible substrate 14. The sensor element 20 is electrically contacted by two electrodes 30, which are firstly part of the electrode array and secondly positioned on both sides of the sensor element 20. These electrodes 30 enable the measurement of conductivity changes of the sensor element 20. For example, the electrical conductivity, or rather its electrical resistance, of the sensor element 20 changes when the temperature of the sensor element 20 changes. This change in conductivity can be measured via the contact by means of the electrodes 30 and thus provides a means of determining the temperature of the sensor element 20.

[0121] The sensor element 20 and the electrodes 30 can be encapsulated in an optional cover layer 40. This cover layer 40 serves as a protective casing and shields the sensor element 20 and the electrodes 30 from external environmental influences.

[0122] For example, the covering layer can be designed as a thermal barrier, protecting the sensor element from thermal influences on one side. For example, the barrier layer can have a height of 50 nm. This barrier layer 40 thus ensures the stability and longevity of the sensor elements 20 and the electrodes 30, enabling long-term use in various applications and under harsh conditions.

[0123] The cover layer 40 can also be made transparent, in particular transparent to the electromagnetic radiation emanating from an object to be monitored.

[0124] Referring to Figure 3A, a single nanogranular sensor element 20 is shown on an electrically non-insulating substrate 12. The electrically non-insulating substrate 12 can be a conductive material, such as a metal or a semiconductor. The electrically non-insulating substrate 12 can, for example, be a component of a device, such as the pin of a connector, in which temperature measurements are desired. More generally, the electrically non-insulating substrate can also be a semiconductor device.

[0125] As shown in Figure 3B, the insulating layer 60 can also be arranged below the sensor element 20. If the sensor element 20 has a lower specific resistance, i.e., a higher conductivity, than the substrate 12, then the insulating layer 60 below the sensor element 20 can be omitted, as shown in Figure 3A. The conductivity ratio must be greater than the smallest measurable change in resistance of the sensor element 20. Accordingly, the conductivity ratio can be lower if the conductivity of the sensor element 20 changes significantly, rather than if it changes only slightly. Furthermore, the substrate 12 below the sensor element 20 can be thinned, thus minimizing the thermal mass below the sensor element 20 and enabling rapid thermalization.In addition, a reflector layer can be arranged under the substrate to reflect electromagnetic radiation transmitted through the sensor element back to the sensor element 20 (not shown).

[0126] An insulating layer 60 can be arranged between the electrodes and the electrically non-insulating substrate. The insulating layer 60 serves to electrically isolate the electrode 30 from the electrically non-insulating substrate 12 and to reduce or prevent electrical interference from the electrically non-insulating substrate 12 that could potentially affect the measurement of conductivity changes of the sensor element 20. In this way, a short circuit between the electrodes 30 via the electrically non-insulating substrate 12 is also avoided.

[0127] Analogous to Figure 2, the nanogranular sensor element 20 can be deposited onto the insulating layer 60 and the electrodes 30. Alternatively, the sensor element 20 and the electrodes 30 can also be encapsulated with a covering layer 40.

[0128] Figure 4A shows that a conversion layer 50 is arranged above the sensor element 20 and the electrodes 30. This layer absorbs electromagnetic radiation and converts it into heat. The conversion layer 50 thus transforms the incident radiation into a temperature signal that can be detected by the sensor element 20.

[0129] The conversion layer 50 can be adapted to the specific wavelengths to be detected. In other words, the conversion layer 50 can filter specific wavelengths of the electromagnetic spectrum. For example, the conversion layer can be made of or coated with a radiation-absorbing material specific to a particular wavelength or wavelength range. The sensor element 20 and the electrodes 30 can be encapsulated in an optional cover layer 40. This cover layer 40 serves as a protective casing and shields the sensor element 20 and the electrodes 30 from external environmental influences. This casing ensures the stability and longevity of the sensor and makes it suitable for long-term use in various applications. Figure 4B shows that a microlens 50' is arranged above the sensor element 20 and the conversion layer 50.The microlens 50' focuses the electromagnetic radiation onto the conversion layer 50, which thereby generates a particularly large heat signal.

[0130] Figure 4C shows that the conversion layer can be tapered above the sensor element 20. The large upper surface of the conversion layer 50 is accordingly exposed to a large amount of electromagnetic radiation and conducts it to the underside of the conversion layer 50 via thermal conduction. Furthermore, such a conversion layer can also be equipped with a focusing element, analogous to Figure 4B (not shown).

[0131] With reference to Figure 5A, a sensor array 110 is shown. The sensor array 110 comprises a plurality of sensor elements 20 arranged in a grid pattern on an insulating substrate 10. The sensor elements 20 are interconnected by a grid of electrodes 30, which electrically contact the sensor elements 20 to enable the measurement of conductivity changes of each individual sensor element 20.

[0132] Above the sensor elements 20 is a conversion layer 50, which absorbs radiation and thus converts it into heat. The conversion layer 50 therefore converts the incident electromagnetic radiation into a temperature signal that can be detected by the sensor element 20. The conversion layer 50 can be adapted to the specific wavelengths to be detected. In other words, the conversion layer 50 can be made of or coated with a radiation-absorbing material that may be specific to a particular wavelength or wavelength range.

[0133] However, it is also possible that instead of a conversion layer 50 for converting electromagnetic radiation into heat, the conversion layer 50 is a catalyst layer that, for example, supports a chemical reaction.

[0134] In particular, it is possible that the conversion layer 50 is an antibody layer, which means that the sensor elements 20 - if different conversion layers with different antibodies are used - can measure the reaction enthalpy with spatial resolution and thus, for example, detect the presence of a virus.

[0135] The nanogranular sensor elements 20 and the electrodes 30 are encapsulated in a cover layer 40. This cover layer 40 serves as a protective sheath and shields the sensor elements 20 and the electrodes 30 from external environmental influences. This sheath ensures the stability and longevity of the sensor and makes it suitable for long-term use in various applications.

[0136] The Sensor Array 110 enables precise and locally resolved radiation measurements over a defined temperature and energy range. This is particularly useful in applications requiring detailed radiation mapping and monitoring, such as radiation management in nuclear power plants, radiation process control in medical treatments, or environmental radiation monitoring. The high spatial resolution of the sensor elements 20, combined with their adjustable temperature response, makes the Sensor Array 110 a versatile and adaptable solution for radiation sensing and measurement.

[0137] The small feature size of the sensor elements enables high spatial resolution, which is particularly advantageous when imaging small details. For example, drones, satellites, and aircraft can thus provide detailed thermal images that can contain spectral data. Furthermore, the sensor array can also be used to measure hard radiation, such as X-rays.

[0138] With reference to Figure 5B, a side view of the sensor array 110 is shown. In this view, the sensor elements 20 are positioned on the insulating substrate 10. The electrodes 30, which are essential for the operation of the sensor elements 20, connect the sensor elements 20 and form a network that facilitates electrical connectivity across the entire array. This configuration enables the precise measurement of conductivity changes in each of the sensor elements 20 individually and provides a detailed spatial map of the temperature distribution or radiation map. The insulating substrate 10 provides a stable base for the sensor array 110 and ensures the structural integrity and functionality of the array.The insulating substrate 10 can be made of a material that is electrically insulating, such as ceramic or a polymer or semiconductor silicon, to prevent any electrical interference that could potentially affect the measurement of conductivity changes in the sensor elements 20.

[0139] In some aspects, the Sensor Array 110 can function as a radiation camera. In this configuration, each sensor element 20 acts as a pixel, with its conductivity changes providing a measure of the temperature at that pixel. This enables the creation of a thermal image where each pixel represents a specific temperature, providing a detailed spatial map of the temperature distribution. This can be particularly useful in applications such as thermal imaging, thermal management in electronic devices, thermal process control in manufacturing, and environmental monitoring. The high spatial resolution of the sensor elements 20, combined with their adaptable temperature response, makes the Sensor Array 110 a versatile and customizable solution for temperature sensing and measurement.

[0140] With reference to Figure 6A, another sensor array 120 is shown. The sensor array 120 comprises a plurality of nanogranular sensor elements 20, 20' arranged in two identical grid patterns on a substrate 10. The grid patterns are offset from each other by half a grid length in each direction. The dimensions of the sensor elements 20 are smaller than typical wavelengths in both the optical and infrared ranges. Therefore, the grids can be offset from each other by less than half a wavelength. This makes it possible to arrange three sensor elements 20 below the optical resolution limit. The sensor elements 20 are interconnected by a grid of electrodes 30, which electrically contact the sensor elements 20 to enable the measurement of conductivity changes of each individual sensor element 20.The sensor elements 20' are interconnected by a grid of electrodes 30', which electrically contact the sensor elements 20' to enable the measurement of conductivity changes of each individual sensor element 20. These conductivity changes can be caused, for example, by exposure to heat, thermal radiation, or electromagnetic radiation in general.

[0141] Above the sensor elements 20 is a first conversion layer 50, which absorbs radiation of a first wavelength and converts it into heat. The conversion layer 50 thus converts the incident radiation into a temperature signal that can be detected by the sensor element 20.

[0142] At the same time, a second conversion layer 50' is located above the sensor elements 20', which absorbs radiation of a second wavelength and converts it into heat.

[0143] By allowing the conversion layers to absorb 50, 50' different wavelengths, the heat distribution can thus provide not only spatial resolution but also spectral resolution.

[0144] In particular, it is also possible that the second conversion layer 50' blocks the incident radiation, so that the associated sensor elements 20' are not heated by the incident radiation. The heat distribution measured by the sensor elements 20' therefore originates exclusively from the dark current, which results, for example, from the heat distribution by the readout electronics in the substrate 10. For example, each sensor element 20 can be assigned four adjacent sensor elements 20' that measure the dark current in the immediate vicinity of the sensor element 20. By simple averaging or weighted averaging, the dark current at the location of the sensor element 20 can then be determined. Because the dark current can be determined at the location of the sensor element 20, no or only simple thermal insulation of the sensor elements 20 from the substrate 10 is necessary.However, it is particularly advantageous if the sensor elements 20, 20' are directly coupled to the substrate 10, for example directly or by means of an insulating intermediate layer.

[0145] With reference to Figure 6B, another sensor array 120 is shown. In contrast to Figure 6A, there is only a grid of electrodes 30, thus simplifying the fabrication. The nanogranular sensor elements 20 are alternately coated with a first and a second conversion layer 50, 50'.

[0146] With reference to Figure 6C, another sensor array 120 is shown. In contrast to Figure 6B, the sensor elements 20 are not covered with two different conversion layers 50, 50', but with three different conversion layers 50, 50', 50". The conversion layers are arranged, for example, according to a Bayer matrix. This allows, for example, a thermal image to be generated at three characteristic wavelengths.

[0147] Referring to Figure 6D, the conversion layers can be selected, for example, based on expected blackbody spectra. For instance, a first conversion layer 50 can convert electromagnetic radiation at 400 nm into heat. For instance, a second conversion layer 50' can convert electromagnetic radiation at 800 nm into heat. For instance, a third conversion layer 50" can convert electromagnetic radiation at 1500 nm into heat. By introducing heat at three different wavelengths, the surface temperature of the radiating object can be precisely determined. For instance, this allows for the exact determination of the surface temperature profile of the radiating object.

[0148] In another embodiment (not shown), the sensor array 120 utilizes the internal photoelectric effect of the nanogranular sensor elements 20, so that instead of temperature, the radiation flux at different wavelengths can be measured directly. Here, the conversion layer 50 can also perform filtering according to specific wavelengths or focus the radiation onto the sensor elements 50.

[0149] The sensor array 120, which detects the internal photoelectric effect of the nanogranular

[0150] Utilizing sensor elements 20, it can also be provided without a conversion layer or with a transparent cover layer, so that the radiation flux directly hits the nanogranular sensor elements 20 and accordingly causes a change in conductivity.

[0151] A particular embodiment is shown in Figure 6E. The three adjacent sensor elements 20 are spaced, for example, 100 nm apart. Accordingly, the three sensor elements 20 are arranged within half a wavelength of the optical range. The three sensor elements 20 are thus arranged side by side below the optical resolution. This makes it possible, in particular, to achieve images that contain and represent the physically perceptible details (lossless acquisition of optical information from electromagnetic (heat) radiation). In particular, this avoids the resolution loss that occurs, for example, in optical camera systems such as CMOS or CCD systems using a Bayer matrix.

[0152] This concept can be extended by arranging a large number of optical sensor elements within a minimum half-wavelength. With a sensor size of 10 nm and a minimum half-wavelength of 200 nm, approximately 20 x 20 sensor elements can be arranged at the same optical location. In the visible wavelength range from 400 nm to 800 nm, this allows for a sensor array with a spectral resolution of 1 nm.

[0153] Another particular embodiment is shown in Figure 6F. The three adjacent sensor elements 20 are spaced 50 nm apart. Accordingly, the three sensor elements 20 are arranged within half a wavelength of the optical range. The three sensor elements 20 are thus arranged side by side below the optical resolution. At least one further additional sensor element 20' is arranged behind the aforementioned sensor elements 20. The additional sensor element 20' can provide additional measurement information about the electrodes 20'. For example, the additional sensor element 20' can measure the thermal radiation or the heat distribution of the object, while the sensor elements 20 measure the optical distribution of the radiation. Accordingly, the temperature of the object can be measured at the same optical location as the sensor elements 20' using the additional sensor element 20'.

[0154] This concept can be extended by stacking additional sensor elements 20' on top of each other, with each additional sensor element 20' being sensitive to a different temperature range. In other words, a hyperspectral camera can be provided that covers both a particularly wide optical wavelength range and a particularly wide thermal range. Figure 7 shows a schematic representation of the fabrication process for the sensor array. The fabrication process enables the nanogranular sensor elements 20 to be seamlessly deposited in or onto various substrates 10, 12, 14, or integrated into them, thereby increasing adaptability in different applications.

[0155] For example, the nanogranular sensor elements 20 shown in Figures 1 to 6 can be generated using EBID.

[0156] In a first step S1, a substrate is therefore provided in the coating system.

[0157] In a second step S2, a precursor gas is introduced in the immediate vicinity of the electron beam focus, with the electron beam focus located on the substrate surface.

[0158] In a third step S3, which may also precede the first step in the sequence of events, electrodes 30 can be pre-structured on the substrate surface using standard lithography techniques, so that the sensor elements 20 can be applied to the electrodes 30.

[0159] However, it is also possible that the electrodes 30 are applied to the substrate 10, 12, 14 only after the sensor elements 20 have been manufactured, so that the third step S3 is after the second step S2.

[0160] In a fourth step S4, the substrate 10, 12, 14 is described by guiding the electron beam over the substrate 10, 12, 14 in a raster pattern.

[0161] However, it is also possible that the nanogranular sensor elements 20 are produced by pulsed laser deposition. Laser evaporation processes are also conceivable, for example, cluster deposition processes of clusters on the order of a few nanometers, or sputtering processes, in particular co-sputtering processes, in which the components of the sensor elements 20 are simultaneously deposited onto the substrate 10, 12, 14, as described above.

[0162] In the above methods, the nanogranular sensor elements 20 can be locally generated by masking the substrate 10 accordingly before the coating process.

[0163] In a fifth step S5, the nanogranular sensor elements 20 can be post-processed, which allows the Coulomb barrier of each nanogranular sensor element 20 to be adjusted.

[0164] By adjusting the Coulomb barrier of the nanogranular sensor elements 20, the temperature response of the sensor elements 20 can be adapted to suit the expected temperature range of the substrate to be measured. This adaptation is achieved by applying a selected post-irradiation dose or laser beam energy, which leads to a specific crystal size that is in turn specific for the Coulomb barrier.

[0165] In other words, post-processing can change the crystal structure and / or grain structure, preferably shifting the temperature with the maximum conductivity change into a specific temperature measurement range.

[0166] The various configurations of the sensor array revealed here are industrially applicable due to their versatile and adaptable design across a wide range of industries. The sensor's compact size, high spatial resolution, and adjustable temperature response make it suitable for precise temperature measurements in diverse applications.

[0167] In some configurations, the sensor array and / or sensor elements can be adapted for subcutaneous implantation in animals, particularly mammals, to monitor body temperature and detect conditions such as fever, hypothermia, or hyperthermia due to environmental changes. When deposited on a biocompatible substrate using locally depositing methods (laser sintering, sputtering with masks, or uaEBID), the sensor element can be designed for subcutaneous implantation, enabling continuous and non-invasive temperature monitoring.

[0168] The sensor array's high spatial resolution and sensitivity to temperature changes make it ideal for detecting subtle variations in body temperature that may indicate fever or other medical conditions. The sensor array and / or sensor elements can be integrated into medical devices such as wearable patches or embedded in medical equipment requiring precise patient temperature monitoring.

[0169] In some versions, the sensor array can be adapted for use in neonatal intensive care units for continuous and spatially resolved monitoring of newborns' body temperature. When deposited on a biocompatible, flexible substrate, the sensor element can be designed to lie gently on the delicate skin of newborns, enabling non-invasive and continuous temperature monitoring.

[0170] The high spatial resolution and sensitivity of the sensor array to

[0171] Temperature changes make it ideal for detecting minor variations in

[0172] Body temperature is of particular importance in neonatology. Newborns, especially premature infants, are unable to effectively regulate their body temperature, making them vulnerable to hypothermia and hyperthermia. Continuous temperature monitoring with the sensor array and / or sensor elements can provide healthcare providers with real-time data to ensure that newborns are kept within the narrow temperature range that is safe and beneficial for their health and development.

[0173] By leveraging the adaptability and precision of the sensor array, neonatal care providers can benefit from a tool that improves patient care through the accurate and timely detection of temperature-related health problems in newborns. This application of the sensor array represents a valuable tool in the field of neonatal health and patient well-being.

[0174] In another embodiment, the sensor array and / or sensor elements are used to determine the temperature of solar cells or batteries by being applied directly to the substrate of the solar module, directly to the housing, or even inside a battery. The sensor elements can be designed to conform to the contours of the solar cell substrate or the complex shapes of battery housings, enabling precise and continuous temperature monitoring.

[0175] The sensor element's high spatial resolution and sensitivity to temperature changes make it ideal for detecting temperature gradients that can affect the efficiency and lifespan of solar cells and batteries. By continuously monitoring the temperature, the sensor can provide valuable data for optimizing the performance and safety of these energy systems.

[0176] In another embodiment, the sensor arrays, due to their high possible resolution, can be used particularly advantageously at high altitudes, for example in satellites, rockets, aircraft, drones, and weather balloons. For instance, the sensor array provides information about the homogeneity of vegetation, such as in agriculture. A sensor array can also detect forest fires or arson at an early stage.

[0177] Where applicable, all individual features illustrated in the exemplary embodiments can be combined and / or interchanged without departing from the scope of the invention. List of reference symbols

[0178] 10, 12, 14 substrate

[0179] 20 sensor elements

[0180] 30 electrodes 40 covering layer

[0181] 50 Conversion layer

[0182] 60 Insulation layer

Claims

Claims 1. Sensor array (100, 110, 120) comprising: at least one grid of nanogranular sensor elements (20) deposited on a substrate (10, 12, 14); and at least one grid of electrodes (30) electrically connected to the nanogranular sensor elements (20) to enable the measurement of conductivity changes of each individual nanogranular sensor element (20).

2. Sensor array according to claim 1, characterized in that the sensor elements (20) are configured to reversibly change their conductivity when exposed to heat and / or thermal radiation and / or electromagnetic radiation.

3. Sensor array according to one of the preceding claims, characterized in that the width of the sensor element (20) is less than 12 pm, preferably between 1 nm and 3000 nm, preferably between 200 nm and 400 nm, particularly preferably between 8 nm and 12 nm, wherein the height of the sensor element (20) is between 1 nm and 100 nm, preferably 8 nm to 12 nm, wherein the length of the sensor element (20) is between 1 nm and 100 nm, preferably 8 nm to 12 nm.

4. Sensor array according to one of the preceding claims, characterized in that the mass of the sensor element (20) is between 1x10 -24 kg and 1x10 -18 kg, preferably between 5x10 -21 kg and 1x10 -18 kg.

5. Sensor array according to one of the preceding claims, characterized in that the thermal response time of a nanogranular sensor element (20) is less than 100x10 -12 s is, preferably smaller than 50x10 -12especially preferred smaller than 10x10 -12 s is.

6. Sensor array according to one of the preceding claims, characterized by at least one covering layer (40) that covers the sensor elements (20) of the grid of sensor elements and the electrodes (30).

7. Sensor array according to claim 6, characterized in that the cover layer (40) is transparent to electromagnetic radiation.

8. Sensor array according to one of the preceding claims, characterized by a conversion layer (50) for absorbing electromagnetic radiation and converting it into heat, wherein the conversion layer (50) is preferably configured to filter the wavelength of the thermal radiation.

9. Sensor array according to claim 8, characterized in that the conversion layer (50) is configured to focus the heat from the electromagnetic radiation onto the sensor elements (20).

10. Sensor array according to one of the preceding claims, characterized by at least a first grid of nanogranular sensor elements (20) and a second grid of nanogranular sensor elements (20'), wherein conversion layers (50) of a first type are arranged on the sensor elements (20) of the first grid, wherein conversion layers (50') of a second type are arranged on the sensor elements (20') of the second grid.

11. Sensor array according to claim 10, characterized in that the first conversion layers (50) filter a first wavelength and the second conversion layers (50') filter a second wavelength.

12. Sensor array according to claim 10 or 11, characterized in that the second conversion layer (50') completely blocks the electromagnetic radiation and the relevant sensor elements (20') thereby only measure the thermal dark current.

13. Sensor array according to any one of the preceding claims 1 to 9, characterized by at least a first grid of nanogranular sensor elements (20), a second grid of nanogranular sensor elements (20') and a third grid of nanogranular sensor elements (20"), wherein conversion layers (50) of a first type are arranged on the sensor elements (20) of the first grid, wherein conversion layers (50) of a second type are arranged on the sensor elements (20') of the second grid, and wherein conversion layers (50) of a third type are arranged on the sensor elements (20") of the third grid 14. Sensor array according to one of the preceding claims, characterized in that the sensor element (20) is in direct contact with the substrate (10, 12, 14).

15. Sensor array according to one of the preceding claims, characterized in that the substrate is electrically insulating or electrically non-insulating.

16. Sensor array according to one of the preceding claims, characterized in that the substrate (10, 12, 14) is mechanically flexible.

17. Sensor array according to one of the preceding claims, characterized by a barrier layer which is configured to thermally insulate the sensor elements (20) on one side, wherein the barrier layer is preferably arranged above or below the sensor elements (20).

18. Method for manufacturing a sensor array, comprising the steps: Providing a substrate; Providing a grid of electrodes; Deposition of a grid of nanogranular sensor elements; and Connect each nanogranular sensor element to at least two electrodes of the grid of electrodes to enable the measurement of conductivity changes of the sensor elements.

19. Method according to claim 18, characterized in that the step of depositing the sensor elements (20) comprises the following steps: Masking the deposition site of the sensor elements (20); Deposition of the nanogranular sensor elements (20) by means of pulsed laser deposition and / or laser evaporation and / or cluster deposition and / or sputtering and / or co-sputtering; and Removing the mask.

20. Method according to claim 18, characterized in that the step of depositing the sensor elements (20) comprises the following steps: Local deposition of the nanogranular sensor elements (20) by means of Electron Beam Induced Deposition or Focused Ion Beam Deposition.

21. Method according to one of claims 18 to 20, characterized in that the sensor elements (20) are post-processed, preferably by changing the crystal structure and / or grain structure, preferably by shifting the temperature with the maximum conductivity change into a temperature measurement range.

22. Method according to one of claims 18 to 21, characterized in that the post-processing consists of a bake-out, preferably an annealing and / or tempering, in particular a local laser annealing.

23. Method according to one of claims 18 to 22, characterized in that the step of providing the electrodes (30) also includes the step of providing an insulating layer (60).

24. Method according to one of claims 18 to 23, characterized by a step of providing a covering layer (40), preferably a covering layer transparent to electromagnetic radiation.

25. Method according to any one of claims 18 to 24, characterized by a step of providing a conversion layer (40).

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