Processing device, optical unit, and processing method

Abstract

An optical unit (1) included in a processing device (100) comprises: a first camera (11a) and a second camera (11b); a first lens (12a) and a second lens (12b); a half mirror (14); and a first calibration element (15a) having a first calibration mark (MC1), and a second calibration element (15b) having a second calibration mark (MC2).

Description

Processing device, optical unit, and processing method

[0001] The present disclosure relates to a processing device such as a positioning device used, for example, when positioning electronic components relative to each other or when positioning a component relative to a processing location, an optical unit used in the processing device, and a processing method such as a positioning method.

[0002] Conventionally, when manufacturing electronic components, the position of components such as substrates or chip components is grasped using a positioning device composed of a camera, etc., and each component is positioned. During this process, each component is moved to correct the positional misalignment based on the amount of misalignment recognized by the camera. However, when each component undergoes thermal deformation due to thermal expansion, the optical axis of the camera shifts from the relative position of each component, resulting in an error in the positional correction. Therefore, it was necessary to detect the thermal distortion and perform correction using a separate camera or mechanism to detect changes in the field of view.

[0003] For example, Patent Document 1 discloses an alignment device including a calibration camera supported on the same support as the tool, a target mark installed below the calibration camera and movable relative to the calibration camera, an upper and lower simultaneous observation camera installed below the movable target mark and movable relative to the movable target mark, and a target mark formed on a table below the upper and lower simultaneous observation camera. The alignment device disclosed in Patent Document 1 first recognizes the movable target mark and the target mark on the table with the calibration camera, then recognizes the movable target mark with an upper observation unit of the upper and lower simultaneous observation camera, and recognizes the target mark on the table with a lower observation unit of the upper and lower simultaneous observation camera based on each recognition result, and performs alignment by calculating the relative positional deviation between the upper and lower observation units of the upper and lower simultaneous observation camera.

[0004] Patent No. 3569820

[0005] However, conventional methods have difficulty achieving ultra-high-precision positioning with accuracy of less than 1 μm. For example, when positioning a first member and a second member, even slight thermal expansion of some or all of the components (such as prisms, mirrors, and cameras) that make up the optical unit for recognizing the first member and the optical unit for recognizing the second member, or movement of the equipment unit, can cause a misalignment in the optical path, disrupting the coaxiality of the optical path for recognizing the first member and the optical path for recognizing the second member, thereby degrading positioning accuracy. Furthermore, equipment containing a positioning device contains numerous heat sources, such as servo motors, cameras, and control devices. Therefore, even if efforts are made to maintain the equipment at room temperature, it is difficult to eliminate thermal expansion of these sources as long as the equipment is operating. Therefore, in the range of less than 1 μm, the components that make up the positioning device continue to deform due to thermal expansion from moment to moment.

[0006] For example, the positioning device disclosed in Patent Document 1 performs a calibration operation in which a calibration camera recognizes a movable target mark and a target mark on a table to correct the axial tilt between the upper and lower positions of the tool, and the upper and lower observation units of a simultaneous up-and-down observation camera recognize the target mark to align the relative positions of the tool and the camera. However, the mounting operation of the component held by the tool and the component held by the stage is performed after the positioning device calculates the relative positional misalignment, then retracts the movable target mark, brings the recognition points of the components held by the tool and the stage into a state where they are approximately aligned vertically, moves the simultaneous up-and-down observation camera between the tool and the stage, recognizes the components held by the tool and the stage, and then performs a positioning correction operation. During this process, the unit tilts due to changes in weight balance as various units move, and the components constituting the unit continue to thermally expand due to temperature changes even after the target mark is recognized. Therefore, it is not possible to correct misalignment of the vertical field of view due to thermal deformation. Furthermore, performing a calibration operation for each mounting operation significantly reduces productivity. In particular, in the case of equipment that heats the tools or stage, heat transfer to the upper and lower simultaneous observation cameras placed between them is unavoidable, causing large temperature changes in the unit and further increasing the misalignment between the upper and lower fields of view.

[0007] The present disclosure has been made to solve such problems, and aims to provide a processing device, optical unit, processing method, etc. that can position two components with high precision even when the components that make up the device are constantly thermally deforming.

[0008] In order to achieve the above object, one aspect of a processing device according to the present disclosure is a processing device that positions a first member and a second member when the first member and the second member are aligned, the processing device comprising: a head that holds the first member; a stage that holds the second member; an optical unit; and a computing device, wherein the optical unit has an optical element having at least one half mirror, first and second calibration elements, first and second lenses, and first and second cameras, the optical elements are positionable between the head and the stage, the first calibration element has a first calibration mark, and the second calibration element has a second calibration mark, and when the optical elements are positioned between the head that holds the first member and the stage that holds the second member, light from the first member is bent back by the half mirror in the direction of the first lens, passes through the first lens, and is then transmitted to the first camera. the first member is imaged by focusing light onto the imaging element of the second camera, the second member is imaged by light from the second member being reflected by the half mirror toward the second lens and passing through the second lens to be focused onto the imaging element of the second camera, the first calibration mark is imaged by light from the first calibration element passing through the half mirror and being focused onto the imaging element of the first camera, and the second calibration mark is imaged by light from the second calibration element passing through the half mirror and being focused onto the imaging element of the second camera, and the arithmetic device calculates a relative position correction amount between the first member and the second member based on the first calibration mark imaged by the first camera and the second calibration mark imaged by the second camera, and feature points of the first member imaged by the first camera and feature points of the second member imaged by the second camera, and performs position correction of the first member and the second member using the relative position correction amount.

[0009] Furthermore, one aspect of the optical unit according to the present disclosure is an optical unit used in a processing device that performs positioning of a first member held by a head and a second member held by a stage when aligning the first member and the second member, the optical unit including an optical element having at least one half mirror, a first calibration element having a first calibration mark, a second calibration element having a second calibration mark, a first lens, a second lens, a first camera that images the first member and the first calibration mark, and a second camera that images the second member and the second calibration mark, wherein when the first camera images the first member, the imaging element of the first camera When the second camera images the second member, the light from the second member that has been reflected by the half mirror toward the second lens and passed through the second lens is collected on the imaging element of the second camera; when the first camera images the first calibration mark, the light from the first calibration element that has passed through the half mirror is collected on the imaging element of the first camera; when the second camera images the second calibration mark, the light from the second calibration element that has passed through the half mirror is collected on the imaging element of the second camera.

[0010] Furthermore, one aspect of a processing method according to the present disclosure is a processing method for positioning the first member and the second member using the processing device described above, the processing method including the steps of: holding the first member by the head, and holding the second member on the stage; disposing the optical unit between the head and the stage; generating a first image by causing light from the first calibration element to pass through or reflect on the half mirror disposed in the optical unit and be focused on the first camera via the first lens; generating a second image by causing light from the second calibration element to pass through or reflect on the half mirror disposed in the optical unit and be focused on the second camera via the second lens; The method includes the steps of generating a third image by causing light from a first member to reflect or pass through the half mirror and be focused on the first camera via the first lens, generating a fourth image by causing light from the second member to reflect or pass through the half mirror and be focused on the second camera via the second lens, extracting, by the arithmetic device, feature points of the first member, feature points of the second member, the first calibration mark, and the second calibration mark based on the first image, the second image, the third image, and the fourth image, thereby specifying the relationship between upper and lower field of view positions, and calculating a relative position correction amount between the first member and the second member, and correcting the positions of the first member and the second member based on the relative position correction amount.

[0011] According to the present disclosure, two components can be positioned with high precision even when the components constituting the device are constantly thermally deforming.

[0012] FIG. 1A is a front view of a processing apparatus according to the first embodiment. FIG. 1B is a plan view of an optical unit used in the processing apparatus according to the first embodiment. FIG. 2 is a perspective view showing main components of the optical unit used in the processing apparatus according to the first embodiment. FIG. 3A is a diagram for explaining the operation when imaging a first calibration mark using the optical unit according to the first embodiment. FIG. 3B is a diagram for explaining the operation when imaging a second calibration mark using the optical unit according to the first embodiment. FIG. 3C is a diagram for explaining the operation when imaging a first member and a second member using the optical unit according to the first embodiment. FIG. 4 is a flowchart for explaining a processing method according to the first embodiment. FIG. 5A is a diagram for explaining the operation when imaging a first calibration mark when the optical element unit has been displaced due to thermal strain. FIG. 5B is a diagram for explaining the operation when imaging a second calibration mark when the optical element unit has been displaced due to thermal strain. FIG. 5C is a diagram for explaining the operation when imaging a first member and a second member when the optical element unit has been displaced due to thermal strain. FIG. 6 is a plan view of the optical unit in a processing apparatus according to a modified example of the first embodiment. FIG. 7 is a plan view of an optical unit in a processing apparatus according to the second embodiment.

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that each of the embodiments described below represents a specific example of the present disclosure. Therefore, the numerical values, shapes, materials, components, component placement and connection configurations, steps (processes), and step order shown in the following embodiments are merely examples and are not intended to limit the present disclosure. Therefore, among the components in the following embodiments, components that are not described in the independent claims that represent the highest concept of the present disclosure will be described as optional components.

[0014] In addition, in this specification and the drawings, the X-axis, Y-axis, and Z-axis represent the three axes of a three-dimensional Cartesian coordinate system. The X-axis and Y-axis are perpendicular to each other and are also perpendicular to the Z-axis. In this embodiment, the Z-axis direction is the vertical direction. Note that each drawing is a schematic diagram and is not necessarily an exact illustration. Therefore, the scales and the like do not necessarily match in each drawing. In each drawing, substantially identical components are assigned the same reference numerals, and redundant explanations are omitted or simplified.

[0015] Furthermore, in this specification, the terms "above," "up," "below," and "below" do not refer to the upward direction (vertically upward) and downward direction (vertically downward) in absolute spatial recognition, but are used as terms defined by a relative positional relationship based on the stacking order in a stacked configuration. Furthermore, the terms "above," "up," "below," and "below" are used not only when two components are arranged with a gap between them and another component is present between them, but also when two components are arranged in contact with each other.

[0016] First Embodiment First, the configuration of a processing apparatus according to a first embodiment will be described with reference to FIGS. 1A, 1B, and 2. FIG. 1A is a front view of a processing apparatus 100 according to the first embodiment. FIG. 1B is a plan view of an optical unit 1 used in the processing apparatus 100 according to the first embodiment. FIG. 2 is a perspective view showing main components of the optical unit 1 used in the processing apparatus 100 according to the first embodiment. In this embodiment, the optical axis directions of the first camera 11a and the second camera 11b and the first lens 12a and the second lens 12b are the X-axis direction.

[0017] The processing device 100 is a device that positions the first member P1 and the second member P2 when they are brought together. In this embodiment, the processing device 100 is a component mounter, and the first member P1 and the second member P2 are mounted components. In this case, the processing device 100, which is a mounter, positions the first member P1 and the second member P2 and places the first member P1 on the second member P2 when mounting an electronic component (e.g., a thin rectangular electronic component) that is the first member P1 (first component) on a substrate that is the second member P2 (second component).

[0018] The processing apparatus 100 is not limited to a mounting machine. For example, the processing apparatus 100 may be an apparatus that processes the first member P1 as a mold by pressing it against a precise position on the second member P2. In this case, the processing apparatus 100 may be, for example, an imprinting apparatus in which the first member P1 is an imprinting mold having a concave-convex structure and the second member P2 is a workpiece to be imprinted. Furthermore, the processing apparatus 100 may not be a processing apparatus such as an imprinting apparatus, but may be an inspection apparatus in which the first member P1 is an inspection probe, the second member P2 is an electronic component, and the first member P1 is accurately positioned relative to the electrodes of the second member P2.

[0019] 1A, the processing device 100 according to this embodiment includes an optical unit 1, a head 2 that holds a first member P1, a stage 3 that holds a second member P2, a calibration jig stage 4, and a computing device 5. The first member P1 and the second member P2 may sometimes be simply referred to as "workpieces."

[0020] As shown in Figures 1B and 2, the optical unit 1 has a set of cameras, namely, a first camera 11a and a second camera 11b, a set of lenses, namely, a first lens 12a and a second lens 12b, a set of reflecting mirrors, namely, a first reflecting mirror 13a and a second reflecting mirror 13b, a half mirror 14, and a set of calibration elements, namely, a first calibration element 15a and a second calibration element 15b.

[0021] The first camera 11a has an imaging element. The first camera 11a captures an image of the first member P1 held by the head 2 and generates an image of the first member P1. The first camera 11a also captures an image of the first calibration mark MC1 of the first calibration element 15a and generates an image including the first calibration mark MC1.

[0022] The second camera 11b has an imaging element. The second camera 11b captures an image of the second member P2 held on the stage 3 and generates an image of the second member P2. The second camera 11b also captures an image of the second calibration mark MC2 of the second calibration element 15b and generates an image including the second calibration mark MC2.

[0023] The first lens 12a is an optical element that focuses light onto the first camera 11a. The first lens 12a is disposed in front of the first camera 11a. The lens optical axis of the first lens 12a coincides with the optical axis (image capture direction) of the first camera 11a.

[0024] The second lens 12b is an optical element that focuses light onto the second camera 11b. The second lens 12b is disposed in front of the second camera 11b. The lens optical axis of the second lens 12b coincides with the optical axis (image capture direction) of the second camera 11b.

[0025] The first lens 12a and the second lens 12b are preferably lenses of a telecentric optical system, but are not limited to this.

[0026] The first reflecting mirror 13a is an optical element that reflects incident light in a predetermined direction. In this embodiment, the first reflecting mirror 13a reflects the incident light by bending it by 90 degrees. For example, the first reflecting mirror 13a reflects the light from the half mirror 14 toward the first camera 11a.

[0027] The second reflecting mirror 13b is an optical element that reflects incident light in a predetermined direction. In this embodiment, the second reflecting mirror 13b reflects the incident light by bending it by 90 degrees. For example, the second reflecting mirror 13b reflects the light from the half mirror 14 toward the second camera 11b.

[0028] The half mirror 14 transmits and / or reflects incident light. The half mirror 14 is a center half mirror and is disposed between the first reflecting mirror 13a and the second reflecting mirror 13b. The half mirror 14 is assumed to have a reflectance equal to or greater than its transmittance (transmittance:reflectance = 5:5 or greater), but the ratio of reflected light is not limited to this. As an example, the ratio of transmittance to reflectance in the half mirror is transmittance:reflectance = 2:8 or greater.

[0029] The first calibration element 15a is an optical element having a first calibration mark MC1. In this embodiment, the first calibration element 15a is a calibration mark glass, and the first calibration mark MC1 is attached to the center of a transparent glass substrate. The first calibration mark MC1 is an opaque mark (opaque portion) that is black or the like, but is not limited to this.

[0030] The first calibration element 15a is disposed on the optical path from the half mirror 14 to the second camera 11b. That is, the first calibration element 15a is disposed on the opposite side from the first camera 11a. Specifically, the first calibration element 15a is disposed between the second reflecting mirror 13b and the second camera 11b. The first calibration element 15a is disposed so that the center of the first calibration mark MC1 coincides with the lens optical axis of the second lens 12b and the optical axis of the second camera 11b. The first calibration element 15a is fixed at a predetermined position within the optical unit 1.

[0031] The second calibration element 15b is an optical element having a second calibration mark MC2. In this embodiment, the second calibration element 15b is a calibration mark glass, and the second calibration mark MC2 is provided at the center of a transparent glass substrate. The second calibration mark MC2 is an opaque mark (opaque portion) that is black or the like, but is not limited to this.

[0032] The second calibration element 15b is disposed on the optical path from the half mirror 14 to the first camera 11a. That is, the second calibration element 15b is disposed on the opposite side to the second camera 11b. Specifically, the second calibration element 15b is disposed between the first reflecting mirror 13a and the first camera 11a. The second calibration element 15b is disposed so that the center of the second calibration mark MC2 coincides with the lens optical axis of the first lens 12a and the optical axis of the first camera 11a. The second calibration element 15b is fixed at a predetermined position within the optical unit 1.

[0033] The first calibration mark MC1 and the second calibration mark MC2 may be, for example, one or more quadrangles, but are not limited to this. The shapes of the first calibration mark MC1 and the second calibration mark MC2 may also be circular, cross, or the like.

[0034] The optical unit 1 also includes an optical element unit 101 and an optical unit holding component 102 .

[0035] The optical element unit 101 is a housing that holds the first reflecting mirror 13 a, the second reflecting mirror 13 b, the half mirror 14, and the first calibration element 15 a and the second calibration element 15 b. The first reflecting mirror 13 a, the second reflecting mirror 13 b, the half mirror 14, and the first calibration element 15 a and the second calibration element 15 b are housed in the optical element unit 101.

[0036] A window 101a is provided above the half mirror 14 of the optical element unit 101. Light from above can be taken into the optical element unit 101 through the window 101a. In addition, a window 101b is provided below the half mirror 14 of the optical element unit 101. Light from below can be taken into the optical element unit 101 through the window 101b. The windows 101a and 101b may be through-holes (spaces) or glass plates placed in the through-holes. In other words, the presence or absence of components and the shape of the components do not matter as long as the windows 101a and 101b can transmit light.

[0037] The optical unit holding part 102 is a member for integrating the first lens 12a to which the first camera 11a is attached and the second lens 12b to which the second camera 11b is attached with the optical element unit 101, and attaching them to an optical unit driving part (not shown).

[0038] The operation of the optical unit 1 configured as above will be described with reference to FIGS. 3A, 3B, and 3C. FIG. 3A is a diagram for explaining the operation when imaging a first calibration mark MC1 using the optical unit 1 in the first embodiment. FIG. 3B is a diagram for explaining the operation when imaging a second calibration mark MC2 using the optical unit 1 in the first embodiment. FIG. 3C is a diagram for explaining the operation when imaging a first member P1 and a second member P2 using the optical unit 1 in the first embodiment. In FIGS. 3A, 3B, and 3C, (a) is a perspective view of the optical unit 1, and (b) shows a captured image. Note that in (a) and (b), the coordinate direction (Vx, Vy) indicates the correspondence between the optical unit 1 and the captured image.

[0039] When capturing an image of the first calibration mark MC1, as shown in (a) of FIG. 3A , light from the first calibration element 15a (first calibration mark MC1) passes through the half mirror 14 and is collected on the image sensor of the first camera 11a. That is, light from the first calibration element 15a that has passed through the half mirror 14 is collected on the image sensor of the first camera 11a. Specifically, the light from the first calibration element 15a (first calibration mark MC1) is reflected by the second reflecting mirror 13b, passes through the half mirror 14, is reflected by the first reflecting mirror 13a, passes through the second calibration element 15b, and then passes through the first lens 12a to be imaged by the image sensor of the first camera 11a. As a result, as shown in (b) of FIG. 3A , the first calibration mark MC1 is captured, and an image including the first calibration mark MC1 as a feature point can be obtained. The image including the first calibration mark MC1 captured by the first camera 11a is output to the calculation device 5.

[0040] Similarly, when capturing an image of the second calibration mark MC2, as shown in (a) of FIG. 3B , light from the second calibration element 15b (second calibration mark MC2) passes through the half mirror 14 and is collected on the image sensor of the second camera 11b. That is, light from the second calibration element 15b that has passed through the half mirror 14 is collected on the image sensor of the second camera 11b. Specifically, the light from the second calibration element 15b (second calibration mark MC2) is reflected by the first reflecting mirror 13a, passes through the half mirror 14, is reflected by the second reflecting mirror 13b, passes through the first calibration element 15a, and then passes through the second lens 12b to be imaged by the image sensor of the second camera 11b. As a result, as shown in (b) of FIG. 3B , the second calibration mark MC2 is captured, and an image including the second calibration mark MC2 as a feature point can be obtained. The image including the second calibration mark MC2 captured by the second camera 11b is output to the calculation device 5.

[0041] 1B and 2, the optical unit 1 in this embodiment includes an illumination device 16a that can irradiate light from the opposite side of the first camera 11a coaxially with the optical axis of the first lens 12a and the second camera 11b, and an illumination device 16b that can irradiate light from the opposite side of the second camera 11b coaxially with the optical axis of the second lens 12b and the second camera 11b. In other words, the illumination devices 16a and 16b provide coaxial illumination. As shown in FIG. 3A(a), the illumination device 16a irradiates light (coaxial light) when capturing an image of the first calibration mark MC1. As shown in FIG. 3B(a), the illumination device 16b irradiates light (coaxial light) when capturing an image of the second calibration mark MC2. In this embodiment, the illumination device 16a is provided on the first lens 12a, and the illumination device 16b is provided on the second lens 12b, but this is not limiting. For example, the illumination devices 16a and 16b, which are coaxial illumination devices, may be disposed between the optical unit 1 and the workpiece (first member P1, second member P2).

[0042] Furthermore, in the processing device 100, the optical unit 1 is configured to be movable at least in the horizontal direction (X-axis direction, Y-axis direction), and can be placed between the head 2 and the stage 3. For example, the optical unit 1 can be moved between the head 2 and the stage 3, or the optical unit 1 can be retracted from between the head 2 and the stage 3 to another location. When the optical unit 1 is moved between the head 2 and the stage 3, the optical unit 1 is moved so that the half mirror 14 is positioned between the head 2 and the stage 3. The optical unit 1 may also be configured to be movable in the vertical direction (Z-axis direction).

[0043] When imaging the first member P1 and the second member P2, the optical unit 1 is moved so that the half mirror 14 is located between the first member P1 and the second member P2 (i.e., between the head 2 and the stage 3) while the first member P1 held by the head 2 and the second member P2 held by the stage 3 are approximately aligned in the horizontal direction.

[0044] At this time, as shown by the solid line in FIG. 3C (a), light from the first member P1 is reflected by the half mirror 14 toward the first lens 12a and passes through the first lens 12a before being collected on the image sensor of the first camera 11a. In other words, when the first camera 11a captures an image of the first member P1, the light from the first member P1 that has been reflected by the half mirror 14 toward the first lens 12a and passed through the first lens 12a is collected on the image sensor of the first camera 11a. Specifically, the light from the first member P1 is reflected by the half mirror 14, then reflected by the first reflecting mirror 13a, transmitted through the second calibration element 15b, and then formed on the image sensor of the first camera 11a via the first lens 12a. As a result, the first member P1 is captured, and an image of the first member P1 can be obtained, as shown in FIG. 3C (b). The image of the first member P1 captured by the first camera 11a is output to the calculation device 5.

[0045] Similarly, as shown by the dashed line in FIG. 3C (a), light from the second member P2 is reflected by the half mirror 14 toward the second lens 12b, passes through the second lens 12b, and is collected on the imaging element of the second camera 11b. That is, when the second camera 11b captures an image of the second member P2, the light from the second member P2 is reflected by the half mirror 14 toward the second lens 12b and collected on the imaging element of the second camera 11b. Specifically, the light from the second member P2 is reflected by the half mirror 14, then reflected by the second reflecting mirror 13b, passes through the first calibration element 15a, and is imaged on the imaging element of the second camera 11b via the second lens 12b. As a result, the second member P2 is captured, and an image of the second member P2 can be obtained, as shown in FIG. 3C (b). The image of the second member P2 captured by the second camera 11b is output to the calculation device 5.

[0046] 1A and 1B, the optical unit 1 in this embodiment includes an illumination device 17a that irradiates the first member P1 with light at an oblique angle with respect to the optical axis of the first camera 11a (the lens optical axis of the first lens 12a), and an illumination device 17b that irradiates the second member P2 with light at an oblique angle with respect to the optical axis of the second camera 11b (the lens optical axis of the second lens 12b). In other words, the illumination devices 17a and 17b provide oblique illumination. The illumination device 17a irradiates light when imaging the first member P1. The illumination device 17b irradiates light when imaging the second member P2. The illumination device 17a is provided on the upper surface of the optical element unit 101 (for example, around the window 101a), and the illumination device 17b is provided on the lower surface of the optical element unit 101 (for example, around the window 101b), but this is not limiting.

[0047] Furthermore, in the optical unit 1 of this embodiment, the focal length for capturing images of the first member P1 and the second member P2 is approximately equal to the focal length for capturing images of the first calibration mark MC1 and the second calibration mark MC2.

[0048] According to the optical unit 1 configured as described above, the first calibration element 15a having the first calibration mark MC1 and the second calibration element 15b having the second calibration mark MC2 are disposed within the optical unit 1, and the half mirror 14 is also provided. Therefore, when the optical unit 1 images the first member P1 and the second member P2, as described below, it is not necessary to change the focal length by moving the lenses (first lens 12a, second lens 12b) or cameras (first camera 11a, second camera 11b) within the optical unit 1 from a state in which the first calibration mark MC1 and the second calibration mark MC2 are imaged. This significantly shortens the time interval between the image capture of the first member P1 and the second member P2 and the image capture of the first calibration mark MC1 and the second calibration mark MC2, thereby minimizing misalignment of the optical axis due to thermal distortion. Therefore, the first member P1 and the second member P2 can be positioned with high precision even when the components constituting the processing device 100 are constantly thermally deforming.

[0049] Furthermore, since there is no need to move the optical unit 1 to the position of a calibration jig outside the optical unit 1, it is also possible to eliminate vertical field of view position deviations that may occur if the optical unit 1 itself is slightly tilted between the time of calibration and the time of image capture for positioning. This makes it possible to align the first member P1 and the second member P2 with high precision.

[0050] Furthermore, in the optical unit 1 of this embodiment, the first camera 11a is used to image the first calibration mark MC1 located on the opposite side from the first camera 11a, and the second camera 11b is used to image the second calibration mark MC2 located on the opposite side from the second camera 11b. This makes it possible to image the first calibration mark MC1 and the second calibration mark MC2 by making the focal length for imaging the first member P1 and the second member P2 approximately the same as the focal length for imaging the first calibration mark MC1 and the second calibration mark MC2, without having to refocus the first camera 11a and the second camera 11b.

[0051] The head 2 is a holding device that holds the first member P1. The head 2 has a holding surface on the underside of the head 2 that holds the first member P1. The head 2 can hold the first member P1 by, for example, sucking or gripping the first member P1. Note that the method for holding the first member P1 is not limited to this. For example, the first member P1 may be held by being fixed to the head 2 with a fixing member such as a screw.

[0052] The head 2 can be placed above the stage 3. That is, the head 2 can move above the stage 3. For example, the head 2 can move horizontally (in the X-axis direction and the Y-axis direction). Therefore, although not shown, the processing device 100 has a mechanism that can move the head 2 in the X-axis direction and the Y-axis direction. Furthermore, the head 2 may be configured to be able to move in the Z-axis direction and rotate around the Z-axis.

[0053] The stage 3 holds the second member P2. Specifically, the stage 3 holds the second member P2 on its upper portion. For example, the second member P2 is held on the stage 3 by being placed on the upper surface of the stage 3. Note that the method for holding the second member P2 is not limited to this. For example, the second member P2 may be held on the stage 3 by suction or by a fixing member such as a screw.

[0054] The stage 3 can move in the horizontal direction (X-axis direction, Y-axis direction). Therefore, although not shown, the processing apparatus 100 has a mechanism that can move the stage 3 in the X-axis direction and the Y-axis direction. The stage 3 may also be configured to be able to move in the Z-axis direction.

[0055] It is sufficient that the head 2 is able to move relative to the stage 3. The movement mechanism may be provided on either the head 2 or the stage 3, or may be provided on both the head 2 and the stage 3 in a redundant manner.

[0056] In this embodiment, both the head 2 and the stage 3 are configured to be movable in the horizontal direction, but this is not limited to this. For example, as long as the head 2 and the stage 3 can move relatively in the horizontal direction, only one of the head 2 and the stage 3 may be configured to be movable in the horizontal direction. Also, both the head 2 and the stage 3 do not have to be configured to be movable in the vertical direction (Z-axis direction). For example, as long as the head 2 and the stage 3 can move relatively in the vertical direction, only one of the head 2 and the stage 3 may be configured to move in the vertical direction. By moving the head 2 and the stage 3 relatively in the vertical direction, it is possible to perform a proximity movement in which the head 2 and the stage 3 are brought closer to each other.

[0057] The processing apparatus 100 includes a calibration jig stage 4 (second stage) in addition to the stage 3 (first stage). The calibration jig stage 4 holds a calibration jig 41. For example, the calibration jig 41 is held by the calibration jig stage 4 by being placed on the upper surface of the calibration jig stage 4. Note that the calibration jig stage 4 may be replaced by the stage 3.

[0058] The calibration jig 41 has a mark (calibration mark) of a predetermined shape that can be imaged by the first camera 11a and the second camera 11b. The calibration jig 41 is a thin plate-like member with a mark that can be recognized from above and below. The mark on the calibration jig 41 can be recognized by the cameras as the same mark from above and below. In this embodiment, a glass with a mark on one side is used as the calibration jig 41. The calibration jig stage 4 (calibration jig 41) is positioned so that it can be held by the head 2.

[0059] In this embodiment, the calibration jig stage 4 and the calibration jig 41 are permanently installed within the processing device 100, but they do not necessarily have to be permanently installed within the processing device 100, and the calibration jig 41 may be configured to be able to be installed on the stage 3 when the calibration jig 41 is to be used.

[0060] The calculation device 5 issues commands to each device in the processing device 100 (for example, commands to operate or stop the head 2 or stage 3, commands to capture images for the camera, output to a monitor, etc.), and performs calculations from the obtained data (for example, extracting feature points from the image and calculating the amount of correction, etc.).

[0061] For example, the calculation device 5 calculates the relative position correction amount between the first member P1 and the second member P2 based on the first calibration mark MC1 captured by the first camera 11a and the second calibration mark MC2 captured by the second camera 11b, as well as the characteristic points of the first member P1 captured by the first camera 11a and the characteristic points of the second member P2 captured by the second camera 11b, and performs position correction of the first member P1 and the second member P2 using the relative position correction amount.

[0062] In this embodiment, the calculation device 5 extracts feature points (calibration marks, reference marks) based on an image captured by the first camera 11a that includes the first calibration mark MC1 as a feature point, an image captured by the second camera 11b that includes the second calibration mark MC2 as a feature point, and an image captured by the first camera 11a that includes the feature points (reference marks) of the first member P1 and an image captured by the second camera 11b that includes the feature points (reference marks) of the second member P2, and calculates a relative position correction amount between the first member P1 and the second member P2 based on the extracted feature points. Then, the calculation device 5 moves the head 2 holding the first member P1 and / or the stage 3 holding the second member P2 based on the calculated relative position correction amount so as to correct the relative position between the first member P1 and the second member P2.

[0063] Furthermore, when the calibration jig 41 is imaged by the first camera 11a and the second camera 11b, the calculation device 5 may calculate a relative position correction amount between the first member P1 and the second member P2 based on the first calibration mark MC1 imaged by the first camera 11a and the second calibration mark MC2 imaged by the second camera 11b, the feature points of the first member P1 imaged by the first camera 11a and the feature points of the second member P2 imaged by the second camera 11b, as well as the marks of the calibration jig 41 imaged by the first camera 11a and the marks of the calibration jig 41 imaged by the second camera 11b, and may perform position correction of the first member P1 and the second member P2 using the relative position correction amount.

[0064] Information such as the relative position correction amount calculated by the arithmetic unit 5 may be output to a monitor (not shown).

[0065] <Processing Method> Next, as a processing method using the processing apparatus 100, the operation of the processing apparatus 100 in this embodiment will be described with reference to Figures 1A to 3C and Figure 4. Figure 4 is a flowchart for explaining the processing method according to the first embodiment.

[0066] [Step 1: Correction of Vertical Reference Positions] First, the vertical reference positions of the optical unit 1 are corrected using the calibration jig 41 (step S1).

[0067] When correcting the vertical reference positions, first, the calibration jig 41 is held and raised by the head 2. As mentioned above, the calibration jig 41 does not need to be permanently installed inside the processing device 100, but in that case, it is preferable to place the calibration jig 41 on the stage 3 in advance so that the calibration jig 41 can be held by the head 2.

[0068] Thereafter, the optical unit 1 is positioned so that it is located below the calibration jig 41, and the mark on the calibration jig 41 is imaged from below using the upper field of view of the optical unit 1. Specifically, the calibration jig 41 is imaged by the first camera 11a, and an image including the mark on the calibration jig 41 is generated.

[0069] The shape and number of marks on the calibration jig 41 are not important. Here, the marks on the calibration jig 41 are two circular marks. In this case, the midpoint between the centers of the two circular marks is used as the reference point for the upper field of view, and the straight line connecting the centers of the two marks is used as the reference angle for the upper field of view. In this correction, correction using the reference point is essential, but correction using the reference angle can be used or not depending on the required accuracy.

[0070] Next, with the optical unit 1 remaining in its current position, the first camera 11a is used to capture an image of the first calibration element 15a (first calibration mark MC1), and the reference point and reference angle of the first calibration mark MC1 are calculated. Note that this image capture may be performed using the illumination device 16b in a light-dark inversion state. While the shape and number of the first calibration marks MC1 are not critical, it is desirable that the ratio of the area of ​​the first calibration marks MC1 (opaque portions) to the area of ​​the first lens 12a be less than 30%. If this ratio were 30% or greater, the image resolution of the first camera 11a would be significantly reduced. In this embodiment, the first calibration marks MC1 are two small squares, the center of gravity of the first calibration marks MC1 measured from the image is used as the reference point, and the inclination angle of the two squares is used as the reference angle.

[0071] Next, the optical unit 1 is temporarily retracted and then the head 2 is lowered, the calibration jig 41 is placed on the stage 3 or the calibration jig stage 4, and the head 2 is raised. Thereafter, the optical unit 1 is moved to the same position as the position where the mark on the calibration jig 41 was imaged in the upper field of view of the optical unit 1, and then the mark on the calibration jig 41 is imaged in the lower field of view of the optical unit 1. Specifically, the calibration jig 41 is imaged by the second camera 11b, and an image of the calibration jig 41 is generated. In this case, a reference point and a reference angle are calculated for the mark on the calibration jig 41 in the lower field of view, in the same way as in the image capture in the upper field of view.

[0072] Next, the optical unit 1 is left in its current position, and the second camera 11b is used to capture an image of the second calibration element 15b (second calibration mark MC2), and the reference point and reference angle of the second calibration mark MC2 are calculated. Note that the shape, number, reference point, and reference angle of the second calibration mark MC2 are the same as those of the first calibration mark MC1.

[0073] As a result, it is possible to obtain the relationship between the position where the calibration jig 41 is held by the head 2 and the position where the calibration jig 41 is placed on the stage 3, and also to obtain the reference positions of the first calibration mark MC1 and the second calibration mark MC2 at that time. Then, using the data obtained in this way as a reference, subsequent position corrections are performed.

[0074] In this embodiment, the imaging starts with the first camera 11a, but it may start with the second camera 11b. Similarly, the imaging order of the first calibration mark MC1, the second calibration mark MC2, and the calibration jig 41 does not matter.

[0075] Furthermore, step S1 is an essential operation when starting up the processing device 100, but depending on the required accuracy, it may be sufficient to use previously acquired data, and the operation of step S1 may be omitted. On the other hand, when high-accuracy positioning is required and thermal fluctuations relative to the target are severe, step S1 may be performed frequently.

[0076] 1A, the first member P1 and the second member P2, which are the workpieces, are set in the processing device 100 (step S2). Specifically, the first member P1 is held by the head 2, and the second member P2 is held by the stage 3.

[0077] 2, a reference mark M1 used for alignment is provided on the surface of the first member P1 as a characteristic point of the first member P1. Also, a reference mark M2 used for alignment is provided on the surface of the second member P2 as a characteristic point of the second member P2. The reference mark M1 of the first member P1 is located at a position where it can be seen (imaged) from below, and the reference mark M2 of the second member P2 is located at a position where it can be seen (imaged) from above.

[0078] [Step 3: Imaging of Workpiece Calibration Mark] Next, by moving one or both of the head 2 holding the first member P1 and the stage 3 holding the second member P2, the first member P1 and the second member P2 are arranged vertically and the horizontal positions of the first member P1 and the second member P2 are made to approximately coincide with each other. In this embodiment, the head 2 holding the first member P1 is located above the stage 3 holding the second member P2.

[0079] Next, the optical unit 1 is moved to position it between the first member P1 and the second member P2 (for example, at an intermediate position), and images of the first calibration element 15a and the second calibration element 15b in the optical unit 1 are taken, as well as images of the first member P1 and the second member P2, which are the workpieces (step S3). Specifically, images of the first calibration mark MC1 of the first calibration element 15a and the second calibration mark MC2 of the second calibration element 15b are taken, as well as images of the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2.

[0080] In this case, the reference marks M1 on the first member P1 and the reference marks M2 on the second member P2 may each be multiple points, and their arrangement may be arbitrary. Also, instead of attaching separate reference marks, the outer shapes of the first member P1 and the second member P2, such as corners, may be used as feature points (alignment portions).

[0081] In this embodiment, the first member P1, which is a thin rectangular parallelepiped, has a total of two tiny circular reference marks M1, one near each diagonal corner of the underside of the first member P1, and the second member P2, which is a substrate, has two tiny circular reference marks M2 on the top surface of the second member P2, which are located at approximately the same position as the reference mark M1 when the first member P1 and the second member P2 are placed opposite each other.

[0082] First, the optical unit 1 is moved to a position where it can capture images of the reference mark M1 on the first member P1 and the reference mark M2 on the second member P2 at a first location between the head 2 and the stage 3. Thereafter, the first calibration element 15a (first calibration mark MC1) is captured by the first camera 11a, then, without changing the position of the optical unit 1, the second calibration element 15b (second calibration mark MC2) is captured by the second camera 11b, and further, while maintaining the position of the optical unit 1, the reference mark M1 on the first member P1 is captured by the first camera 11a and the reference mark M2 on the second member P2 is captured by the second camera 11b.

[0083] Next, the optical unit 1 is moved to a position where it can capture the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 at the second location, and at that position, in the same manner as described above, the first calibration mark MC1 of the first calibration element 15a, the second calibration mark MC2 of the second calibration element 15b, the reference mark M1 of the first member P1, and the reference mark M2 of the second member P2 are captured.

[0084] Note that if there are multiple reference marks on the first member P1 and the second member P2, the order in which the reference marks are imaged may be arbitrary, but since a small error will inevitably occur in the amount of movement each time the optical unit 1 is moved, the fewer the number of movements the more accurate the imaging will be. In particular, if the corresponding reference marks on the first member P1 and the second member P2 can be imaged at the same position, it is better to image them at the same position.

[0085] Furthermore, it is desirable to image the first calibration mark MC1 and the second calibration mark MC2 at the imaging position of the reference marks of the first member P1 and the second member P2 after moving the optical unit 1, but if not much time has passed since the previous imaging of the first calibration mark MC1 and the second calibration mark MC2, the amount of thermal distortion in the meantime is likely to be small, and it is possible to omit imaging as appropriate and use the previous results.

[0086] Furthermore, when capturing images of the first calibration mark MC1 and the second calibration mark MC2, illumination devices 16a and 16b, which provide coaxial illumination, may be used, if necessary. For example, when capturing an image of the first calibration mark MC1, the illumination device 16b is turned on. As a result, in an image including the first calibration mark MC1 captured by the first camera 11a, the first calibration mark MC1, which is an opaque portion, appears black because it does not transmit light toward the first camera 11a, while the background portion appears white because it transmits light toward the first camera 11a, thereby obtaining a sufficient amount of light.

[0087] On the other hand, when imaging the first member P1 and the second member P2 that are the workpieces, the images are captured using light that passes through the first calibration element 15a and the second calibration element 15b and reaches the first camera 11a and the second camera 11b. However, because the sizes of the first calibration marks MC1 and the second calibration marks MC2 are small, they do not affect the imaging of the workpieces (first member P1, second member P2). Note that if the sizes of the first calibration marks MC1 and the second calibration marks MC2 are large, a greater proportion of the light from the workpieces is blocked when the workpieces are imaged, which may result in insufficient resolution being obtained. Therefore, it is desirable that the sizes of the first calibration marks MC1 and the second calibration marks MC2 be as small as possible within a range that allows for clear imaging. Image resolution is affected not only by the size, reflectivity, and shape of the first calibration mark MC1 and the second calibration mark MC2, but also by the element size of the first camera 11a and the second camera 11b, and the lens diameter and magnification of the first lens 12a and the second lens 12b. Therefore, it is difficult to determine the image resolution according to specific rules. However, if the area of ​​the first calibration mark MC1 and the second calibration mark MC2, which are opaque portions, is 30% or more of the lens area ratio of the first lens 12a and the second lens 12b, it becomes difficult to capture images at high resolution. For this reason, it is preferable that the size of the first calibration mark MC1 relative to the lens diameter of the first camera 11a be less than 30%. Similarly, it is preferable that the size of the second calibration mark MC2 relative to the lens diameter of the second camera 11b be less than 30%.

[0088] Furthermore, when using the illumination devices 16a and 16b, which are coaxial illumination devices, to capture images of the first and second workpieces P1 and P2, it is necessary to consider reflections from the first and second calibration marks MC1 and MC2. For example, if the first and second calibration marks MC1 and MC2 are made of highly reflective materials such as silver chrome-deposited films, capturing an image of the workpiece using coaxial illumination may result in the image being captured with the reflected light from the first and second calibration marks MC1 and MC2, making it difficult to obtain a clear image of the workpiece. Therefore, it is effective to use a half mirror 14 with a high reflectivity and a low transmittance. Specifically, it is recommended to use a half mirror 14 with a reflectance ratio (transmittance:reflectance), which is the ratio of reflectance to transmittance, greater than 2:8. In other words, it is recommended that the reflectance ratio of the half mirror 14 be 80% or higher. This allows for high-resolution images of the workpiece.

[0089] Furthermore, the imaging positions of the first calibration mark MC1 and the second calibration mark MC2 and the imaging positions of the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 may be in different regions of the captured image. This makes it possible to suppress a decrease in resolution due to reflection from the first calibration mark MC1 and the second calibration mark MC2. For example, the first calibration mark MC1 and the second calibration mark MC2 may be imaged at the edge of the image, and the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 may be imaged at the center of the image. In this case, it is also possible to image the first calibration mark MC1 and the second calibration mark MC2 and the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 at the same time.

[0090] Furthermore, as in the present embodiment, by combining the coaxial illumination when imaging the first member P1 and the second member P2 and the coaxial illumination when imaging the first calibration mark MC1 and the second calibration mark MC2, not only is the optical unit 1 less expensive, but it can also be made more compact, facilitating the design of incorporating the optical unit 1 into the processing device 100. Furthermore, by making the optical unit 1 more compact, the optical unit 1 can be made lighter, making it less susceptible to the effects of vibrations and the like. This improves the accuracy of alignment.

[0091] [Step S4: Calculation of Relative Position Correction Amount] Next, the calculation device 5 extracts feature points from an image (first image) including the first calibration mark MC1 captured by the first camera 11a, an image (second image) including the second calibration mark MC2 captured by the second camera 11b, an image (third image) including the reference mark M1 of the first member P1 captured by the first camera 11a, and an image (fourth image) including the reference mark M1 of the second member P2 captured by the second camera 11b, and calculates a relative position correction amount between the first member P1 and the second member P2 based on the extracted feature points (step S4). In this embodiment, feature points are extracted from these images, as well as an image (fifth image) of the calibration jig 41 captured by the first camera 11a and an image (sixth image) of the calibration jig 41 captured by the second camera 11b, and the relationship between the upper and lower field of view positions is identified based on the extracted feature points, and the relative position correction amount between the first member P1 and the second member P2 is calculated.

[0092] Step 4 will now be described in detail.

[0093] In step S4, first, the state of the calibration jig 41 after the vertical reference position correction (step S1) is considered as the base. That is, the positions of the marks on the calibration jig 41 when the calibration jig 41 is held by the head 2 and when the calibration jig 41 is placed on the stage 3 are set as the reference positions for the upper and lower fields of view. In this case, when the head 2 and the stage 3 are brought close to each other and the first member P1 and the second member P2 are brought into contact, it is considered that the position at which the marks on the calibration jig 41 are detected in the image captured by the first camera 11a coincides with the position at which the marks on the calibration jig 41 are detected in the image captured by the second camera 11b. In addition, the positions of the first calibration mark MC1 of the first calibration element 15a and the second calibration mark MC2 of the second calibration element 15b at the time when these vertical reference positions are obtained are obtained.

[0094] Then, in step S4, the positions of the first calibration mark MC1 and the second calibration mark MC2 in the optical unit 1 at the corrected position are obtained. By determining the difference between these positions and the positions of the first calibration mark MC1 and the second calibration mark MC2 in step S1, it is possible to calculate the amount of deviation (amount of blur) of the optical axis from the time when the vertical reference position correction was performed. Using this amount of deviation as the correction amount, it is possible to accurately calculate the relative position of the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 (i.e., the relative position between the first member P1 and the second member P2).

[0095] 5A, 5B, and 5C, a specific example of a method for calculating the amount of relative position correction between the first member P1 and the second member P2 will be described. Figures 5A, 5B, and 5C are diagrams for explaining the operation of the optical unit 1 when calculating the amount of relative position correction using the processing device 100 according to the first embodiment when the optical unit 1 is affected by thermal distortion.

[0096] 5A, 5B, and 5C show a case where the optical element unit 101 in the optical unit 1 is displaced by D1 in the Y direction due to thermal strain. In Figures 5A, 5B, and 5C, (a) is a plan view (X-Y view) of the optical unit 1, (b) is a left side view (Y-Z view) of the optical unit 1, (c) is a front view (X-Z view) of the optical unit 1, and (d) shows a captured image. Note that the reference mark M1 of the first member P1 and the reference mark M2 of the second member P2 are indicated by "○", and the first calibration mark MC1 and the second calibration mark MC2 are indicated by "□".

[0097] For ease of explanation, the correction of the upper and lower reference positions in step S1 is performed separately, and after step S1, the deviation of the center of the optical axis and the vertical deviation of the workpiece are zero (the center of the captured image = the center of the optical axis for both the upper and lower fields of view).

[0098] First, as in Fig. 3A, the first camera 11a captures an image of the first calibration element 15a, thereby generating a first image that includes the first calibration mark MC1 (first image generation step). In this case, as shown in (a) and (b) of Fig. 5A, light from the first calibration element 15a passes through the half mirror 14, passes through the first lens 12a, and is collected on the image sensor of the first camera 11a, thereby obtaining an image of the first calibration mark MC1, as shown in (d) of Fig. 5A.

[0099] 3B, the second camera 11b captures an image of the second calibration element 15b, thereby generating a second image including the second calibration mark MC2 (second image generation step). In this case, as shown in (a) to (c) of FIG. 5B, the light from the second calibration element 15b passes through the half mirror 14 and passes through the second lens 12b to be collected by the second camera 11b, thereby obtaining an image of the second calibration mark MC2 as shown in (d) of FIG.

[0100] 3C, the first member P1 is imaged by the first camera 11a to generate a third image including the reference mark M1 of the first member P1 (third image generation step). In this case, as shown by the solid lines in (a) to (c) of FIG. 5C, light from the first member P1 is reflected by the half mirror 14, passes through the first lens 12a, and is collected by the first camera 11a, thereby obtaining an image of the reference mark M1 of the first member P1 as shown in (d) of FIG.

[0101] 3C, the second member P2 is imaged by the second camera 11b, thereby generating a fourth image including the reference mark M2 of the second member P2 (fourth image generation step). In this case, as shown by the dashed lines in (a) to (c) of FIG. 5C, light from the second member P2 is reflected by the half mirror 14, passes through the second lens 12b, and is collected by the second camera 11b, thereby obtaining an image of the reference mark M2 of the second member P2 as shown in (d) of FIG.

[0102] Then, based on the image of the first calibration mark MC1 (first image), the image of the second calibration mark MC2 (second image), the image of the reference mark M1 of the first member P1 (third image), and the image of the reference mark M2 of the second member P2 (fourth image), the characteristic points (reference marks, calibration marks) of the first member P1, the second member P2, the first calibration element 15a, and the second calibration element 15b are extracted to identify the relationship between the upper and lower field of view positions, and the amount of relative position correction between the first member P1 and the second member P2 is calculated.

[0103] Specifically, as shown in (d) of Figures 5A, 5B, and 5C, the coordinate vector from the center of the optical axis (center of the image) when the first member P1 is imaged to the reference mark M1 of the first member P1 is defined as Vp1, the coordinate vector from the center of the optical axis (center of the image) when the second member P2 is imaged to the reference mark M2 of the second member P2 is defined as Vp2, the coordinate vector from the center of the optical axis (center of the image) when the first member P1 is imaged to the first calibration mark MC1 is defined as Vc1, and the coordinate vector from the center of the optical axis (center of the image) when the second member P2 is imaged to the second calibration mark MC2 is defined as Vc2.

[0104] In this way, for the first member P1, the position of the reference mark M1 of the first member P1 imaged by the first camera 11a is captured at Vp1, but it can be measured that the first calibration mark MC1 has shifted by Vc1 since the vertical reference position correction using the calibration jig 41, and therefore it can be seen that the actual position of the first member P1 is (Vp1 - Vc1), obtained by subtracting this vector. Similarly, for the second member P2, the actual position of the second member P2 is (Vp2 - Vc2).

[0105] Therefore, the relative position correction amount (vertical position correction amount) between the first member P1 and the second member P2 is (Vp2-Vc2)-(Vp1-Vc1). Note that the positive and negative values ​​of this value depend on whether the first member P1 side or the second member P2 side is considered to be the reference, so the value can be selected appropriately.

[0106] In this way, the amount of correction for the relative position between the first member P1 and the second member P2 can be calculated. Note that the calculation procedure is not limited to the above, and may be designed as appropriate.

[0107] Note that the correction of the vertical reference positions in step S1 may be performed before step S4. In this case, the calibration jig 41 is held above the stage 3 by the head 2, the optical unit 1 is disposed above the calibration jig 41, and an image (fifth image) including the mark on the calibration jig 41 is generated by capturing an image of the calibration jig 41 from above, and the calibration jig 41 is held above the stage 3 by the head 2, the optical unit 1 is disposed below the calibration jig 41, and an image (sixth image) including the mark on the calibration jig 41 is generated by capturing an image of the calibration jig 41 from below. Then, in step S4, the calculation device 5 calculates the amount of correction of the relative position between the first member P1 and the second member P2 by further correcting the vertical field of view positions based on the fifth and sixth images, which are images of the mark on the calibration jig 41, in addition to the first, second, third, and fourth images.

[0108] [Steps S5 and S6: Position Correction] Next, after calculating the relative position correction amount between the first member P1 and the second member P2 in step S4, it is determined whether or not position correction of the first member P1 and the second member P2 is necessary (step S5).As a result, if it is determined that position correction of the first member P1 and the second member P2 is necessary (Yes in step S5), position correction of the first member P1 and the second member P2 is performed (step S6).

[0109] Specifically, in step S5, the calculation device 5 determines whether the amount of relative position correction calculated in step S4 is within an allowable range. If it is determined that the amount of relative position correction is outside the allowable range, the calculation device 5 corrects the positions of the first member P1 and the second member P2 based on the amount of relative position correction calculated in step S4. In other words, the calculation device 5 issues a command to correct the positions of the first member P1 and the second member P2, and moves the stage 3 or the head 2 to adjust the relative positional relationship between the first member P1 and the second member P2.

[0110] A specific operation for position correction is, for example, adjusting the relative positional relationship between the first member P1 and the second member P2 by moving the stage 3 holding the second member P2 in the X-axis direction, Y-axis direction and / or Z-axis direction, or rotating it around the Z-axis.

[0111] In this embodiment, the position correction is performed by moving only the stage 3, but this is not limiting. For example, the position correction may be performed by moving only the head 2 that holds the first member P1, or by moving both the stage 3 and the head 2. In other words, as long as the head 2 and the stage 3 can be positioned relative to each other, it does not matter which one is moved. Furthermore, if high-precision positioning is required, it is advisable to return to step S3 after performing the position correction in step S6 and recheck the state after the position correction.

[0112] On the other hand, if it is determined in step S5 that there is no need to correct the positions of the first member P1 and the second member P2 (No in step S5), the positions of the first member P1 and the second member P2 are not corrected, and the process proceeds to the mounting operation in step S7. Specifically, if the calculation device 5 determines that the relative position correction amount calculated in step S4 is within an allowable range, the process proceeds to the mounting operation in step S7.

[0113] [Steps S7 and S8: Mounting Operation] The first member P1 and the second member P2 are mated together in the mounting operation of step S7. Specifically, the first member P1, which is an electronic component, is mounted on the second member P2, which is a substrate.

[0114] When performing the mounting operation, first, the optical unit 1 located between the head 2 and the stage 3 is retracted. At this time, the head 2 and the stage 3 are not moved. After the optical unit 1 is retracted, the head 2 is moved closer to the stage 3, and the first member P1 is brought into contact with the second member P2 to bond the first member P1 to the second member P2 for mounting. Specific mounting methods that can be used include thermocompression bonding, which bonds the members using heat and pressure, or ultrasonic bonding, which bonds electrodes together using ultrasound and pressure. Alternatively, the first member P1 may be simply placed on the second member P2, and bonding (such as collective heating and pressure bonding) may be performed in a later step.

[0115] Thereafter, the first member P1 is separated from the head 2, and only the head 2 is raised. This completes the mounting operation of combining the first member P1 and the second member P2, and a determination is made as to whether or not the next workpiece (first member P1, second member P2) will be mounted (step S8). If it is determined that the next workpiece will be mounted (Yes in step S8), the process returns to step S2, and the next workpiece is set. On the other hand, if it is determined that the next workpiece will not be mounted (No in step S8), all processing ends.

[0116] In step S7, in this embodiment, only the head 2 is moved to bring the first member P1 and the second member P2 into contact, but it is also possible to move only the stage 3 to bring the first member P1 and the second member P2 into contact, or to move both the head 2 and the stage 3 to bring the first member P1 and the second member P2 into contact.

[0117] Furthermore, in this embodiment, the processing apparatus 100 is a component mounter, and so the above method has been described, but the present invention is not limited to this. For example, if the processing apparatus 100 is a processing apparatus that processes a first member P1 as a mold by pressing it against a second member P2, the head 2 may be raised together with the mold for the first member P1 after heating and pressurization. Furthermore, if the processing apparatus 100 is used as an inspection apparatus, for example, the first member P1 may be a member on which multiple fine electrodes are arranged, the second member P2 may be an electronic component, and the first member P1 and the second member P2 may be brought into contact with each other to perform an electrical continuity test.

[0118] [Summary] As described above, the processing device 100 according to this embodiment includes the head 2 that holds the first member P1, the stage 3 that holds the second member P2, the optical unit 1, and the calculation device 5. The optical unit 1 includes the half mirror 14, the first calibration element 15a having the first calibration mark MC1 and the second calibration element 15b having the second calibration mark MC2, the first lens 12a and the second lens 12b, and the first camera 11a and the second camera 11b.

[0119] When the half mirror 14 is disposed between the head 2 holding the first member P1 and the stage 3 holding the second member P2, the optical unit 1 images the first member P1 by bending the light from the first member P1 in the direction of the first lens 12a by the half mirror 14 and collecting the light through the first lens 12a on the image pickup element of the first camera 11a, and images the second member P2 by bending the light from the second member P2 in the direction of the second lens 12b by the half mirror 14 and collecting the light through the second lens 12b on the image pickup element of the second camera 11b, and images the second member P2 by bending the light from the first calibration element 15a on the half mirror 14. The first calibration mark MC1 is imaged by light passing through the half mirror 14 and being focused on the imaging element of the first camera 11a, and the second calibration mark MC2 is imaged by light from the second calibration element 15b passing through the half mirror 14 and being focused on the imaging element of the second camera 11b, so that the first member P1 and the first calibration mark MC1 can be imaged by the first camera 11a and the second member P2 and the second calibration mark MC2 can be imaged by the second camera 11b without moving the optical unit 1.

[0120] Then, the calculation device 5 calculates the relative position correction amount between the first member P1 and the second member P2 based on the first calibration mark MC1 imaged by the first camera 11a and the second calibration mark MC2 imaged by the second camera 11b, as well as the characteristic point (reference mark M1) of the first member P1 imaged by the first camera 11a and the characteristic point (reference mark M2) of the second member P2 imaged by the second camera 11b, and performs position correction of the first member P1 and the second member P2 using the relative position correction amount.

[0121] According to the processing apparatus 100 configured in this manner, even when the components constituting the processing apparatus 100 are constantly thermally deforming, the first calibration element 15a and the second calibration element 15b in the optical unit 1 can correct changes in the upper and lower field of view positions, thereby enabling high-precision positioning of the two components, the first member P1 and the second member P2. Furthermore, each time the first member P1 and the second member P2 are positioned, a calibration operation can be performed almost simultaneously with positioning image capture without changing the state of the apparatus, allowing position correction to be performed with almost no loss of productivity. Furthermore, not only can the effects of thermal expansion that occur after calibration be minimized, but changes in weight balance due to movement of the optical unit 1 can also be minimized, thereby preventing a decrease in positioning accuracy due to these factors.

[0122] Furthermore, the processing device 100 according to this embodiment further uses a calibration jig 41 having a mark, and when calculating the amount of correction for the relative position between the first member P1 and the second member P2, the amount of correction for the relative position between the first member P1 and the second member P2 is calculated based on the first calibration mark MC1 imaged by the first camera 11a and the second calibration mark MC2 imaged by the second camera 11b, the feature points of the first member P1 imaged by the first camera 11a and the feature points of the second member P2 imaged by the second camera 11b, as well as the feature points (marks) of the calibration jig 41 imaged by the first camera 11a and the feature points (marks) of the calibration jig 41 imaged by the second camera 11b.

[0123] With this configuration, the upper and lower reference positions can be corrected using the calibration jig 41, and then position correction can be performed using the first calibration mark MC1 and the second calibration mark MC2, allowing the first member P1 and the second member P2 to be positioned with even higher precision.

[0124] Depending on the required accuracy, the vertical reference position correction using the calibration jig 41 may be performed using an alternative method (for example, a method of calculating the upper and lower field of view positions using a U-shaped jig that can recognize the upper and lower fields of view simultaneously) or may be omitted. Furthermore, the vertical reference position correction using the calibration jig 41 may be substituted by, for example, measuring the mounting position after performing a mounting operation on a component and using the amount of deviation as the amount of vertical reference position correction.

[0125] (Modification of First Embodiment) Next, a modification of the first embodiment will be described with reference to Fig. 6. Fig. 6 is a plan view of an optical unit 1A in a processing apparatus 100A according to a modification of the first embodiment.

[0126] In the first embodiment, the first calibration element 15a is located within the optical axis of the second lens 12b on the opposite side to the first camera 11a, and the second calibration element 15b is located within the optical axis of the first lens 12a on the opposite side to the second camera 11b, but this is not limiting. The first calibration element 15a and the second calibration element 15b may be located at any position where they can be imaged by the corresponding first camera 11a or second camera 11b (i.e., at the optical focal position of the lens).

[0127] Specifically, as shown in FIG. 6, the optical unit 1A of the processing device 100A in this modified example is configured such that the first reflecting mirror 13a and the second reflecting mirror 13b in the optical unit 1 of the first embodiment are changed to a first half mirror 13c and a second half mirror 13d, the arrangement of the first calibration element 15a and the second calibration element 15b is changed, and further, illumination devices 16c and 16d, which are coaxial illumination devices, are arranged outside the first calibration element 15a and the second calibration element 15b, respectively.

[0128] In this modification, the first calibration element 15a and the second calibration element 15b are disposed in positions in the Y-axis direction, as viewed from the center half mirror 14, where light passes through the first half mirror 13c and the second half mirror 13d, respectively, and where the light is the focal position of the corresponding first lens 12a or second lens 12b. Furthermore, illumination devices 16c and 16d are disposed outside the first calibration element 15a and the second calibration element 15b. Therefore, the illumination device 16c irradiates light from the backside of the first calibration element 15a. The illumination device 16d irradiates light from the backside of the second calibration element 15b.

[0129] The configuration of the processing device 100A and the optical unit 1A in this modified example can also achieve the same effects as those in the above-described first embodiment. Furthermore, in this modified example, the increased number of half mirrors reduces the amount of light reaching the cameras (first camera 11a, second camera 11b) from the workpiece (first member P1, second member P2), which may result in a slight decrease in contrast, but light from the first calibration element 15a and the second calibration element 15b does not enter the imaging optical path on the opposite side, which improves the design freedom of the first calibration element 15a and the second calibration element 15b.

[0130] Second Embodiment Next, a second embodiment will be described with reference to Fig. 7. Fig. 7 is a plan view of an optical unit 1B in a processing apparatus 100B according to the second embodiment.

[0131] The optical unit 1B of the processing device 100B in this embodiment is configured such that, in the optical unit 1 of the first embodiment described above, the half mirror 14 is changed to a mirror 14a that does not transmit light, a first half mirror 13c and a second half mirror 13d are placed at the positions of the first reflecting mirror 13a and the second reflecting mirror 13b, respectively, the first reflecting mirror 13a and the second reflecting mirror 13b are placed beyond the first half mirror 13c and the second half mirror 13d as viewed from the first lens 12a and the second lens 12b, respectively, and the light passes through the first half mirror 13c and the second half mirror 13d as viewed from the first camera 11a and the second camera 11b, is reflected by the first reflecting mirror 13a and the second reflecting mirror 13b, and a first calibration element 15a and a second calibration element 15b are placed at the respective focal positions beyond that.

[0132] According to the configurations of the processing device 100B and optical unit 1B in this embodiment, as in the first embodiment, by disposing the optical unit 1B between the first member P1 and the second member P2 while the first member P1 held by the head 2 and the second member P2 held by the stage 3 are substantially aligned in the horizontal direction, it is possible to capture an image including the reference mark M1 of the first member P1, the reference mark M2 of the second member P2, the first calibration mark MC1, and the second calibration mark MC2 without moving the optical unit 1B. Therefore, by operating the optical unit 1B in the same manner as the optical unit 1 in the first embodiment, it is possible to correct the influence of vertical field position misalignment due to thermal distortion immediately before positioning, as in the first embodiment.

[0133] Furthermore, in this embodiment, compared to the first embodiment, the first calibration element 15a and the second calibration element 15b are not used when capturing images of the first member P1 and the second member P2, which improves the design freedom of the first calibration element 15a and the second calibration element 15b. Furthermore, the number of half mirrors through which light passes is the same between this embodiment and the first embodiment, which also results in good contrast and other characteristics.

[0134] (Modifications) The processing apparatus and processing method according to the present disclosure have been described above based on the first and second embodiments, but the present disclosure is not limited to the first and second embodiments.

[0135] For example, in the first embodiment, the transmittance and reflectance of the half mirror 14 for individually capturing the light from the first member P1, the light from the second member P2, and the light from the first calibration element 15a and the second calibration element 15b using the same camera are not wavelength-dependent. However, this is not limited to this. Specifically, the half mirror 14 may be configured using a dichroic mirror or the like having different transmittance and reflectance depending on the wavelength, and the coaxial illumination devices 16a and 16b and the oblique illumination devices 17a and 17b may be configured using a plurality of illumination devices with different wavelengths. In other words, the wavelength of the light from the illumination devices 17a and 17b used when capturing the first member P1 and the second member P2 may be switched between the wavelength of the light from the illumination devices 16a and 16b used when capturing the first calibration element 15a and the second calibration element 15b. In other words, the light from the first member P1 and the second member P2 and the light from the first calibration element 15a and the second calibration element 15b may be selectively switched.

[0136] Alternatively, a similar effect can be achieved by using a polarizing beam splitter, whose transmission and reflection characteristics vary depending on the polarization direction of light, as the half mirror 14. In this case, in the optical unit 1, the half mirror 14 is replaced with a polarizing beam splitter, and polarizing elements such as polarizing plates with a specific polarization direction of transmitted light are placed between the coaxial illumination devices 16a and 16b and the first lens 12a and second lens 12b, respectively. In other words, the illumination devices 16a and 16b are placed between the first calibration element 15a and the second calibration element 15b. The polarizing elements can change the polarization direction of transmitted light relative to the optical axis of the optical unit 1. As a result, for example, by using a polarizing beam splitter to convert the polarizing plate on the illumination device 16a side to P-polarized light, the light from the illumination device 16b passes through the first calibration element 15a and the polarizing beam splitter and proceeds toward the first camera 11a, allowing the first camera 11a to capture an image of the first calibration mark MC1. Furthermore, by setting the light from the illumination device 16a in a direction that reflects it off the polarizing beam splitter (S-polarized light), the light from the illumination device 16a can be irradiated onto the first member P1. The S-polarized component of the light reflected off the first member P1 is reflected by the polarizing beam splitter toward the first camera 11a, allowing the first camera 11a to capture an image of the first member P1. Similarly, the second camera 11b can capture images of the second calibration mark MC2 and the second member P2 separately. In this way, by using a polarizing beam splitter and a polarizing element (polarizing plate) with a specific polarization direction, as well as illumination devices 16a and 16b that can irradiate light coaxially with the first lens 12a and the second lens 12b, it is possible to correct the upper and lower field of view positions using the first calibration mark MC1 and the second calibration mark MC2 without operating other equipment units at the location where positioning and recognition are performed. The polarizing plate, which is a polarizing element, may be configured to rotate itself, or may be configured to electrically change the polarization direction, such as by combining a polarizing plate with a liquid crystal.

[0137] Furthermore, a similar effect can be achieved by using polarization cameras as the first camera 11a and the second camera 11b instead of using a polarizing element (polarizing plate). In this case, similar to the above, in the optical unit 1, the half mirror 14 is replaced with a polarization beam splitter whose transmission and reflection characteristics vary depending on the polarization direction of light, and the first camera 11a and the second camera 11b are replaced with polarization cameras. As a result, the light from the first member P1 and the second member P2 becomes S-polarized light by the polarization beam splitter, and the light from the first calibration element 15a and the second calibration element 15b becomes P-polarized light and travels toward the first camera 11a and the second camera 11b. Because the polarization camera can capture images while separating the polarization directions, it is possible to obtain separate images of the first member P1 and the second member P2 and the first calibration mark MC1 and the second calibration mark MC2.

[0138] In addition, the present disclosure also includes forms obtained by applying various modifications to the above-described embodiments that would occur to a person skilled in the art, and forms realized by arbitrarily combining the components and functions of each embodiment within the scope of the present disclosure. Furthermore, the present disclosure also includes any combination of two or more claims from among the multiple claims set forth in the claims at the time of filing, within the scope of technical compatibility. For example, when a dependent claim set forth in the claims at the time of filing is made into a multiple claim or multiple multiple claims that cite all of the superordinate claims within the scope of technical compatibility, the present disclosure also includes all combinations of claims included in that multiple claim or multiple multiple multiple claims.

[0139] The techniques of the present disclosure can be used to position two members relative to each other.

[0140] REFERENCE SIGNS LIST 1, 1A, 1B Optical unit 2 Head 3 Stage 4 Calibration jig stage 5 Arithmetic unit 11a First camera 11b Second camera 12a First lens 12b Second lens 13a First reflecting mirror 13b Second reflecting mirror 13c First half mirror 13d Second half mirror 14 Half mirror 14a Mirror 15a First calibration element 15b Second calibration element 16a, 16b, 16c, 16d, 17a, 17b Illumination device 41 Calibration jig 100, 100A, 100B Processing device 101 Optical element unit 101a, 101b Window 102 Optical unit holding part P1 First member P2 Second member M1, M2 Reference mark MC1 First calibration mark MC2 Second calibration mark

Claims

1. A processing device that positions a first member and a second member when the first member and the second member are aligned, the processing device comprising: a head that holds the first member; a stage that holds the second member; an optical unit; and a computing device, wherein the optical unit has an optical element having at least one half mirror, first and second calibration elements, first and second lenses, and first and second cameras, the optical elements being positionable between the head and the stage, the first calibration elements having a first calibration mark, and the second calibration elements having a second calibration mark, and when the optical element is positioned between the head that holds the first member and the stage that holds the second member, the first member is imaged by light from the first member being reflected by the half mirror in the direction of the first lens and passing through the first lens to be focused on the image sensor of the first camera, and the second member is imaged by light from the second member being reflected by the half mirror in the direction of the second lens and passing through the second lens to be focused on the image sensor of the second camera, a processing device in which light from the first calibration element is transmitted through the half mirror and focused on an imaging element of the first camera to capture an image of the first calibration mark; and light from the second calibration element is transmitted through the half mirror and focused on an imaging element of the second camera to capture an image of the second calibration mark; and the arithmetic device calculates a relative position correction amount between the first member and the second member based on the first calibration mark captured by the first camera and the second calibration mark captured by the second camera, and feature points of the first member captured by the first camera and feature points of the second member captured by the second camera, and corrects the positions of the first member and the second member using the relative position correction amount.

2. The processing device according to claim 1, further comprising a calibration jig having marks that can be imaged by the first camera and the second camera, wherein the arithmetic device calculates the relative position correction amount based on the first calibration mark imaged by the first camera and the second calibration mark imaged by the second camera, the feature points of the first member imaged by the first camera and the feature points of the second member imaged by the second camera, as well as the mark of the calibration jig imaged by the first camera and the mark of the calibration jig imaged by the second camera, and performs the position correction using the relative position correction amount.

3. The processing device according to claim 1, further comprising an illumination device that can irradiate light from the opposite side of the first camera and the second camera, coaxially with the optical axes of the first camera and the second camera, when capturing images of the first calibration mark and the second calibration mark.

4. The processing device according to claim 1, further comprising an illumination device that irradiates the first member and the second member with light at an oblique angle relative to the optical axes of the first camera and the second camera.

5. The processing device according to claim 1, wherein the reflectance of the half mirror is equal to or greater than the transmittance of the half mirror.

6. The processing device according to claim 1, wherein when capturing images of the first calibration mark and the second calibration mark and the first member and the second member, the capturing positions of the first calibration mark and the second calibration mark and the capturing positions of the characteristic points of the first member and the second member are in different areas of the captured image.

7. The processing device according to claim 1, wherein the first calibration mark and the second calibration mark are opaque portions, the size of the first calibration mark relative to the lens diameter of the first camera is less than 30%, and the size of the second calibration mark relative to the lens diameter of the second camera is less than 30%.

8. The processing device according to claim 1, wherein the half mirror has characteristics in which the transmittance and reflectance vary depending on the wavelength, and switches between the wavelength of light from an illumination device used when imaging the first member and the second member and the wavelength of light from an illumination device used when imaging the first calibration mark and the second calibration mark.

9. The processing device described in claim 3, wherein the half mirror has different transmission and reflection characteristics depending on the polarization direction of light, the illumination device has a polarizing element with a specified polarization direction between the first calibration element and the second calibration element, and the polarizing element can change the polarization direction of transmission relative to the optical axis of the optical unit.

10. The processing device according to claim 3, wherein the half mirror has different transmission and reflection characteristics depending on the polarization direction of light, and the first camera and the second camera are polarization cameras.

11. The optical element has a first half mirror and a second half mirror as the one or more half mirrors, and the optical unit has a first lighting device that irradiates light from the back of the first calibration element and a second lighting device that irradiates light from the back of the second calibration element, and when the optical element is placed between the head that holds the first member and the stage that holds the second member, a mirror that reflects light from each of the first member and the second member in the opposing direction is placed between the first member and the second member, the light from the first member is reflected by the mirror toward the first lens and passes through or is reflected by the first half mirror, and then passes through the first lens and is collected on the image sensor of the first camera, thereby capturing an image of the first member, and the light from the second member is reflected by the mirror toward the second lens and passes through or is reflected by the second half mirror, and then passes through the second lens and is collected on the image sensor of the second camera, thereby capturing an image of the second member, 2. The processing device according to claim 1, wherein when light from the first illumination device is irradiated onto the first calibration element, light from the first calibration element is reflected or transmitted through the first half mirror and converged onto the image sensor of the first camera via the first lens, thereby capturing an image of the first calibration mark; and when light from the second illumination device is irradiated onto the second calibration element, light from the second calibration element is reflected or transmitted through the second half mirror and converged onto the image sensor of the second camera via the second lens, thereby capturing an image of the second calibration mark.

12. The processing device according to any one of claims 1 to 11, wherein the processing device is a component mounter.

13. The processing device according to any one of claims 1 to 11, wherein the processing device is an imprint device.

14. An optical unit used in a processing device that positions a first member held by a head and a second member held on a stage when aligning the first member and the second member, the optical unit comprising: an optical element having at least one half mirror; a first calibration element having a first calibration mark; a second calibration element having a second calibration mark; a first lens; a second lens; a first camera that images the first member and the first calibration mark; and a second camera that images the second member and the second calibration mark; when the first camera images the first member, light from the first member that has been reflected by the half mirror toward the first lens and passed through the first lens is collected on the image pickup element of the first camera; when the second camera images the second member, light from the second member that has been reflected by the half mirror toward the second lens and passed through the second lens is collected on the image pickup element of the second camera; an optical unit in which, when the first camera captures an image of the first calibration mark, light from the first calibration element that has passed through the half mirror is collected on an imaging element of the first camera, and, when the second camera captures an image of the second calibration mark, light from the second calibration element that has passed through the half mirror is collected on an imaging element of the second camera.

15. A processing method for positioning the first member and the second member using the processing device of claim 1, comprising the steps of: holding the first member with the head and holding the second member on the stage; arranging the optical unit between the head and the stage; generating a first image by having light from the first calibration element pass through or reflect on the half mirror arranged in the optical unit and be focused on the first camera via the first lens; generating a second image by having light from the second calibration element pass through or reflect on the half mirror arranged in the optical unit and be focused on the second camera via the second lens; generating a third image by having light from the first member reflect on or pass through the half mirror and be focused on the first camera via the first lens; and generating a fourth image by having light from the second member reflect on or pass through the half mirror and be focused on the second camera via the second lens. a step of extracting, by the arithmetic device, feature points of the first member, feature points of the second member, the first calibration mark, and the second calibration mark based on the first image, the second image, the third image, and the fourth image, thereby specifying the relationship between upper and lower field of view positions, and calculating a relative position correction amount between the first member and the second member; and a step of correcting the positions of the first member and the second member based on the relative position correction amount.

16. The processing method according to claim 15, wherein when capturing images of the first calibration mark and the second calibration mark, the first calibration mark and the second calibration mark are captured while irradiating them with light from the side opposite to the first camera side and the second camera side.

17. The processing method according to claim 15, comprising the steps of: holding a calibration jig above the stage with the head, positioning the optical unit above the calibration jig, and capturing an image of the calibration jig from above to generate a fifth image; holding a calibration jig above the stage with the head, positioning the optical unit below the calibration jig, and capturing an image of the calibration jig from below to generate a sixth image; and calculating, in the arithmetic device, the amount of relative position correction by further applying correction of upper and lower field of view positions based on the fifth and sixth images in addition to the first, second, third, and fourth images.

18. The processing method according to any one of claims 15 to 17, wherein the processing method is a method for manufacturing electronic components.

Images