Common-mode noise filter

Abstract

This common-mode noise filter (10) is formed on a semiconductor substrate. The common-mode noise filter (10) comprises: a first pad electrode (PDP1) constituting one input / output terminal of a first differential signal; a second pad electrode (PDP2) constituting the other input / output terminal of the first differential signal; a third pad electrode (PDP3) constituting one input / output terminal of a second differential signal; a fourth pad electrode (PDP4) constituting the other input / output terminal of the second differential signal; a ground pad electrode (PDG) connected to a reference potential; a first filter circuit electrode group that constitutes a first filter and is connected to the first pad electrode (PDP1), the second pad electrode (PDP2), and the ground pad electrode (PDG); and a second filter circuit electrode group that constitutes a second filter and is connected to the third pad electrode (PDP3), the fourth pad electrode (PDP4), and the ground pad electrode (PDG). The first filter circuit electrode group and the second filter circuit electrode group are connected to the ground pad electrode (PDG) via an impedance component. The first filter circuit electrode group is provided with a first electrode group constituting a first inductor and a second inductor, and a first shunt capacitor electrode constituting a first shunt capacitor. The second filter circuit electrode group includes a second electrode group constituting a third inductor and a fourth inductor, and a second shunt capacitor electrode constituting a second shunt capacitor. The first pad electrode (PDP1), the first filter circuit electrode group, and the second pad electrode (PDP2) are arranged in the stated order along a first direction of the semiconductor substrate. The third pad electrode (PDP3), the second filter circuit electrode group, and the fourth pad electrode (PDP4) are arranged in the stated order along the first direction. The first pad electrode and the third pad electrode are arranged along a second direction orthogonal to the first direction of the semiconductor substrate. The second pad electrode (PDP2) and the fourth pad electrode (PDP4) are arranged along the second direction of the semiconductor substrate. In the second direction, the ground pad electrode, the first shunt capacitor electrode, and the second shunt capacitor electrode are disposed between the first electrode group and the second electrode group. The ground pad electrode (PDG) is disposed at a position that does not overlap the first shunt capacitor electrode or the second shunt capacitor electrode.

Description

Common Mode Noise Filter

[0001] The present invention relates to a structure of a common mode noise filter.

[0002] The common mode noise filter of Non-Patent Document 1 is formed on a semiconductor substrate, and the common mode noise filter of Non-Patent Document 1 has a group of five pads on one side, a formation region for circuit elements that constitute the filter, and a group of five pads on the other side arranged in this order along a first direction of the semiconductor substrate.

[0003] The five-terminal pad group on one side includes one input / output pad for a first differential signal, one input / output pad for a second differential signal, and three ground connection pads, which are arranged in the following order along a second direction orthogonal to the first direction: the ground connection pad, one input / output pad for the first differential signal, the ground connection pad, one input / output pad for the second differential signal, and the ground connection pad.

[0004] The other five-terminal pad group includes a pad for inputting / outputting the other side of the first differential signal, a pad for inputting / outputting the other side of the second differential signal, and three ground connection pads, which are arranged in the second direction in the following order: ground connection pad, input / output pad for the other side of the first differential signal, ground connection pad, input / output pad for the other side of the second differential signal, and ground connection pad.

[0005] An Ultra-Compact Common Mode Bandstop Filter With Modified-T Circuits in Integrated Passive Device(IPD) Process

[0006] In a common mode noise filter formed on a semiconductor substrate as shown in Non-Patent Document 1, there is a limit to how small the area of ​​the pad group can be made when considering mounting on an external circuit board, etc. Therefore, the area of ​​the pad group relative to the area of ​​the semiconductor substrate becomes large. In addition, the distance between the pads must be at least a certain value. Furthermore, to achieve the desired filter characteristics, the pad layout pattern must also be considered.

[0007] For this reason, it has been difficult to achieve a small size while realizing the desired filter characteristics in conventional common mode noise filters such as those shown in Non-Patent Document 1.

[0008] SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a common mode noise filter that can be miniaturized while achieving desired filter characteristics.

[0009] A common mode noise filter according to one embodiment of the present invention includes a first filter and a second filter. The first filter includes a first series circuit of a first inductor and a second inductor connected in series and magnetically coupled to each other, through which a first differential signal is transmitted, and a first shunt capacitor connected between an intermediate node between the first inductor and the second inductor and a reference potential. The second filter includes a second series circuit of a third inductor and a fourth inductor connected in series and magnetically coupled to each other, through which a second differential signal forming a pair with the first differential signal is transmitted, and a second shunt capacitor connected between the intermediate node between the third inductor and the fourth inductor and the reference potential, and an impedance component connected between the first filter and the second filter and the reference potential.

[0010] The common-mode noise filter is formed on a semiconductor substrate and includes: a first pad electrode constituting one input / output terminal for a first differential signal; a second pad electrode constituting the other input / output terminal for the first differential signal; a third pad electrode constituting one input / output terminal for a second differential signal; a ground pad electrode connected to a reference potential; a first filter circuit electrode group connected to the first, second, and ground pad electrodes and constituting a first filter; and a second filter circuit electrode group connected to the third, fourth, and ground pad electrodes and constituting a second filter. The first filter circuit electrode group and the second filter circuit electrode group are connected to the ground pad electrode via an impedance component.

[0011] The first filter circuit electrode group includes a first electrode group that configures the first inductor and the second inductor, and a first shunt capacitor electrode that configures the first shunt capacitor. The second filter circuit electrode group includes a second electrode group that configures the third inductor and the fourth inductor, and a second shunt capacitor electrode that configures the second shunt capacitor.

[0012] The first pad electrode, the first filter circuit electrode group, and the second pad electrode are arranged in this order along a first direction of the semiconductor substrate. The third pad electrode, the second filter circuit electrode group, and the fourth pad electrode are arranged in this order along the first direction. The first pad electrode and the third pad electrode are arranged in a second direction perpendicular to the first direction of the semiconductor substrate. The second pad electrode and the fourth pad electrode are arranged in the second direction of the semiconductor substrate. In the second direction, the ground pad electrode, the first shunt capacitor electrode, and the second shunt capacitor electrode are arranged between the first electrode group and the second electrode group. The ground pad electrode is arranged in a position not overlapping with the first shunt capacitor electrode and the second shunt capacitor electrode.

[0013] In this configuration, the common-mode noise filter is composed of one each of the first, second, third, and fourth pad electrodes, and the ground pad electrode. Furthermore, the electrode patterns constituting the common-mode noise filter are symmetrical in both the first and second directions around the ground pad electrode, contributing to excellent filter characteristics as a common-mode noise filter. Furthermore, undesired parasitic capacitance generated between the electrodes constituting the shunt capacitor and the ground pad electrode is suppressed.

[0014] According to the present invention, it is possible to realize a desired filter characteristic while achieving a small size.

[0015] Fig. 1 is a circuit diagram of a common mode noise filter according to a first embodiment of the present invention. Fig. 2 is a plan view of the common mode noise filter according to the first embodiment of the present invention. Fig. 3 is an enlarged plan view including a ground pad electrode. Fig. 4 is a side cross-sectional view of the common mode noise filter according to the first embodiment of the present invention. Fig. 5 is a plan view of a common mode noise filter according to a second embodiment of the present invention. Fig. 6 is a plan view of a common mode noise filter according to a third embodiment of the present invention.

[0016] First Embodiment A common mode noise filter according to a first embodiment of the present invention will be described with reference to the drawings.

[0017] (Circuit Configuration) Fig. 1 is a circuit diagram of a common mode noise filter according to a first embodiment of the present invention. As shown in Fig. 1, a common mode noise filter 10 includes a first common mode noise filter 21, a second common mode noise filter 22, and a third common mode noise filter 23. The common mode noise filter 10 includes a first input / output terminal P1, a second input / output terminal P2, a third input / output terminal P3, a fourth input / output terminal P4, and a reference potential connection terminal PGND.

[0018] The first input / output terminal P1 and the second input / output terminal P2 are input / output terminals for a first differential signal. The third input / output terminal P3 and the fourth input / output terminal P4 are input / output terminals for a second differential signal (a signal that forms a pair with the first differential signal). The first input / output terminal P1 and the third input / output terminal P3 constitute input / output terminals at one end of a pair of differential signals in the common mode noise filter 10. The second input / output terminal P2 and the fourth input / output terminal P4 constitute input / output terminals at the other end of the pair of differential signals in the common mode noise filter 10.

[0019] The first input / output terminal P1 and the third input / output terminal P3 are connected to a first common mode noise filter 21. The first common mode noise filter 21 is connected to a second common mode noise filter 22. The second common mode noise filter 22 is connected to a third common mode noise filter 23. The third common mode noise filter 23 is connected to the second input / output terminal P2 and the fourth input / output terminal P4. The first common mode noise filter 21, the second common mode noise filter 22, and the third common mode noise filter 23 are connected to a reference potential connection terminal PGND via an inductor 300. The inductor 300 corresponds to an "impedance component" of the present invention. The reference potential connection terminal PGND is connected to a reference potential (e.g., ground potential).

[0020] In this way, the first common mode noise filter 21, the second common mode noise filter 22, and the third common mode noise filter 23 are connected in series between the input / output terminal pair of the first input / output terminal P1 and the third input / output terminal P3 and the input / output terminal pair of the second input / output terminal P2 and the fourth input / output terminal P4, thereby forming the common mode noise filter 10 as a three-stage common mode noise filter.

[0021] (Circuit of First Common Mode Noise Filter 21) The first common mode noise filter 21 includes a first T-type filter circuit 21T1 and a second T-type filter circuit 21T2.

[0022] The first T-type filter circuit 21T1 includes an inductor 311, an inductor 312, a capacitor 313, and a shunt capacitor 317. The inductors 311 and 312 are connected in series. The inductors 311 and 312 are magnetically coupled in the forward direction.

[0023] The series circuit of inductor 311 and inductor 312 is connected in parallel to capacitor 313. One terminal of shunt capacitor 317 is connected to an intermediate node connecting inductor 311 and inductor 312. The terminal of inductor 311 opposite to the end connected to inductor 312 is connected to first input / output terminal P1.

[0024] The second T-type filter circuit 21T2 includes an inductor 314, an inductor 315, a capacitor 316, and a shunt capacitor 318. The inductors 314 and 315 are connected in series. The inductors 314 and 315 are magnetically coupled in the forward direction.

[0025] The series circuit of inductor 314 and inductor 315 is connected in parallel with capacitor 316. One terminal of shunt capacitor 318 is connected to an intermediate node connecting inductor 314 and inductor 315. The terminal of inductor 314 opposite to the end connected to inductor 315 is connected to third input / output terminal P3.

[0026] The other terminal of the shunt capacitor 317 is connected to the other terminal of the shunt capacitor 318. This connection point is connected to the reference potential connection terminal PGND via the inductor 300.

[0027] The inductance of inductor 311, the inductance of inductor 312, the inductance of inductor 314, and the inductance of inductor 315 are the same.

[0028] The capacitance of the capacitor 313 is the same as the capacitance of the capacitor 316. The capacitance of the shunt capacitor 317 is the same as the capacitance of the shunt capacitor 318.

[0029] (Circuit of Second Common Mode Noise Filter 22) The second common mode noise filter 22 includes a third T-type filter circuit 22T1 and a fourth T-type filter circuit 22T2.

[0030] The third T-type filter circuit 22T1 includes an inductor 321, an inductor 322, a capacitor 323, and a shunt capacitor 327. The inductors 321 and 322 are connected in series. The inductors 321 and 322 are magnetically coupled in the forward direction.

[0031] The series circuit of inductor 321 and inductor 322 is connected in parallel with capacitor 323. One terminal of shunt capacitor 327 is connected to an intermediate node connecting inductor 321 and inductor 322. The terminal of inductor 321 opposite to the end connected to inductor 322 is connected to inductor 312 of the first T-type filter circuit 21T1.

[0032] The fourth T-type filter circuit 22T2 includes an inductor 324, an inductor 325, a capacitor 326, and a shunt capacitor 328. The inductors 324 and 325 are connected in series. The inductors 324 and 325 are magnetically coupled in the forward direction.

[0033] The series circuit of inductor 324 and inductor 325 is connected in parallel with capacitor 326. One terminal of shunt capacitor 328 is connected to an intermediate node connecting inductor 324 and inductor 325. The terminal of inductor 324 opposite to the end connected to inductor 325 is connected to inductor 315 of the second T-type filter circuit 21T2.

[0034] The other terminal of the shunt capacitor 327 is connected to the other terminal of the shunt capacitor 328. This connection point is connected to the reference potential connection terminal PGND via the inductor 300.

[0035] The inductance of inductor 321 is the same as the inductance of inductor 322, the inductance of inductor 324, and the inductance of inductor 325. The inductances of inductors 321, 322, 324, and 325 are the same as the inductance of inductor 311, the inductance of inductor 312, the inductance of inductor 314, and the inductance of inductor 315.

[0036] The capacitance of the capacitor 323 is the same as the capacitance of the capacitor 326. The capacitance of the capacitors 323 and 326 is the same as the capacitance of the capacitor 313 and the capacitance of the capacitor 316.

[0037] The capacitance of the shunt capacitor 327 is the same as the capacitance of the shunt capacitor 328. The capacitance of the shunt capacitors 327 and 328 is the same as the capacitance of the shunt capacitor 317 and the capacitance of the shunt capacitor 318.

[0038] (Circuit of Third Common Mode Noise Filter 23) The third common mode noise filter 23 includes a fifth T-type filter circuit 23T1 and a sixth T-type filter circuit 23T2.

[0039] The fifth T-type filter circuit 23T1 includes an inductor 331, an inductor 332, a capacitor 333, and a shunt capacitor 337. The inductors 331 and 332 are connected in series. The inductors 331 and 332 are magnetically coupled in the forward direction.

[0040] The series circuit of inductor 331 and inductor 332 and capacitor 333 are connected in parallel. One terminal of shunt capacitor 337 is connected to an intermediate node where inductor 331 and inductor 332 are connected. The terminal of inductor 331 opposite to the terminal connected to inductor 332 is connected to inductor 322 of the third T-type filter circuit 22T1. The terminal of inductor 332 opposite to the terminal connected to inductor 331 is connected to second input / output terminal P2.

[0041] The sixth T-type filter circuit 23T2 includes an inductor 334, an inductor 335, a capacitor 336, and a shunt capacitor 338. The inductors 334 and 335 are connected in series. The inductors 334 and 335 are magnetically coupled in the forward direction.

[0042] The series circuit of inductor 334 and inductor 335 and capacitor 336 are connected in parallel. One terminal of shunt capacitor 338 is connected to an intermediate node where inductor 334 and inductor 335 are connected. The terminal of inductor 334 opposite to the end connected to inductor 335 is connected to inductor 325 of the fourth T-type filter circuit 22T2. The terminal of inductor 335 opposite to the end connected to inductor 334 is connected to fourth input / output terminal P4.

[0043] The other terminal of the shunt capacitor 337 and the other terminal of the shunt capacitor 338 are connected together, and this connection point is connected to the reference potential connection terminal PGND via the inductor 300 .

[0044] The inductance of inductor 331 is the same as the inductance of inductor 332, the inductance of inductor 334, and the inductance of inductor 335. The inductances of inductors 331, 332, 334, and 335 are the same as the inductance of inductor 311, the inductance of inductor 312, the inductance of inductor 314, and the inductance of inductor 315.

[0045] The capacitance of the capacitor 333 is the same as the capacitance of the capacitor 336. The capacitance of the capacitors 333 and 336 is the same as the capacitance of the capacitor 313 and the capacitance of the capacitor 316.

[0046] The capacitance of the shunt capacitor 337 is the same as the capacitance of the shunt capacitor 338. The capacitance of the shunt capacitors 337 and 338 is the same as the capacitance of the shunt capacitor 317 and the capacitance of the shunt capacitor 318.

[0047] With this configuration, the common mode noise filter 10 receives a first differential signal of the pair of differential signals through the first input / output terminal P1, transmits it through the first T-type filter circuit 21T1, the third T-type filter circuit 22T1, and the fifth T-type filter circuit 23T1, and outputs it from the second input / output terminal P2. Furthermore, the common mode noise filter 10 receives a second differential signal of the pair of differential signals through the third input / output terminal P3, transmits it through the second T-type filter circuit 21T2, the fourth T-type filter circuit 22T2, and the sixth T-type filter circuit 23T2, and outputs it from the fourth input / output terminal P4. With this circuit configuration, the common mode noise filter 10 suppresses common mode noise superimposed on the pair of differential signals.

[0048] Alternatively, the common mode noise filter 10 receives a first differential signal of the pair of differential signals from the second input / output terminal P2, transmits it through the fifth T filter circuit 23T1, the third T filter circuit 22T1, and the first T filter circuit 21T1, and outputs it from the first input / output terminal P1. Furthermore, the common mode noise filter 10 receives a second differential signal of the pair of differential signals from the fourth input / output terminal P4, transmits it through the sixth T filter circuit 23T2, the fourth T filter circuit 22T2, and the second T filter circuit 21T2, and outputs it from the third input / output terminal P3. The common mode noise filter 10 uses the above circuit configuration to suppress common mode noise superimposed on the pair of differential signals.

[0049] (Structure) Fig. 2 is a plan view of the common mode noise filter according to the first embodiment of the present invention. Fig. 3 is an enlarged plan view including a ground pad electrode. Fig. 4 is a side cross-sectional view of the common mode noise filter according to the first embodiment of the present invention. Fig. 4 is a cross-sectional view taken along the bold two-dot chain line that bends at a right angle in Figs. 2 and 3 .

[0050] As shown in Figures 2, 3, and 4, the common mode noise filter 10 includes a substrate 90. The substrate 90 includes a base material 900 and multiple insulator layers 91, 92, 93, and 94. The base material 900 is, for example, a semiconductor substrate and is made of an undoped semiconductor. The insulator layer 91 is formed on the surface of the base material 900 and is made of a highly insulating material such as SiN. The insulator layers 92, 93, and 94 are made of a material having a predetermined dielectric constant. The insulator layers 92, 93, and 94 are formed on the surface of the insulator layer 91 in this order.

[0051] The interface (contact surface) between the insulator layer 91 and the insulator layer 92 is used as the third conductor layer CLY3. The interface between the insulator layer 92 and the insulator layer 93 is used as the second conductor layer CLY2. The interface between the insulator layer 91 and the insulator layer 92 is used as the first conductor layer CLY1.

[0052] The common mode noise filter 10 includes a first pad electrode PDP1, a second pad electrode PDP2, a third pad electrode PDP3, a fourth pad electrode PDP4, and a ground pad electrode PDG.

[0053] The first pad electrode PDP1 constitutes a first input / output terminal P1. The second pad electrode PDP2 constitutes a second input / output terminal P2. The third pad electrode PDP3 constitutes a third input / output terminal P3. The fourth pad electrode PDP4 constitutes a fourth input / output terminal P4. The ground pad electrode PDG constitutes a reference potential connection terminal PGND.

[0054] The first pad electrode PDP1, the second pad electrode PDP2, the third pad electrode PDP3, the fourth pad electrode PDP4, and the ground pad electrode PDG are each substantially square in plan view (viewed in the stacking direction of the multiple insulator layers of the substrate 90). The first pad electrode PDP1, the second pad electrode PDP2, the third pad electrode PDP3, the fourth pad electrode PDP4, and the ground pad electrode PDG have a minimum area that allows solder bonding when mounting the common mode noise filter 10 on another circuit board or the like.

[0055] The first pad electrode PDP1, the second pad electrode PDP2, the third pad electrode PDP3, the fourth pad electrode PDP4, and the ground pad electrode PDG are formed on the first conductor layer CLY1, and are exposed to the outside of the substrate 90 over a predetermined area through openings formed in the insulator layer 91.

[0056] The first pad electrode PDP1 and the second pad electrode PDP2 are arranged at a predetermined distance along a first direction (the Y-axis direction in FIG. 2) of the substrate 90. The first pad electrode PDP1 and the second pad electrode PDP2 are arranged on a line parallel to the Y-axis.

[0057] The third pad electrode PDP3 and the fourth pad electrode PDP4 are arranged at a predetermined distance along the first direction (the Y-axis direction in FIG. 2) of the substrate 90. The third pad electrode PDP3 and the fourth pad electrode PDP4 are arranged on a line parallel to the Y-axis.

[0058] The first pad electrode PDP1 and the third pad electrode PDP3 are arranged at a predetermined distance along the second direction (the X-axis direction in FIG. 2) of the substrate 90. The first pad electrode PDP1 and the third pad electrode PDP3 are arranged on a line parallel to the X-axis.

[0059] The second pad electrode PDP2 and the fourth pad electrode PDP4 are arranged at a predetermined distance along the second direction (the X-axis direction in FIG. 2) of the substrate 90. The second pad electrode PDP2 and the fourth pad electrode PDP4 are arranged on a line parallel to the X-axis.

[0060] The ground pad electrode PDG is arranged so as to include the center point of a rectangle whose four corners are the first pad electrode PDP1, the second pad electrode PDP2, the third pad electrode PDP3, and the fourth pad electrode PDP4. In this case, it is preferable that the center point of the ground pad electrode PDG and the center point of the rectangle coincide with each other.

[0061] As a result, the first pad electrode PDP1 and the second pad electrode PDP2 are arranged at positions that are line-symmetrical with respect to the X-axis reference line AxeX that passes through the center point of the ground pad electrode PDG, and the third pad electrode PDP3 and the fourth pad electrode PDP4 are arranged at positions that are line-symmetrical with respect to the X-axis reference line AxeX.

[0062] The first pad electrode PDP1 and the third pad electrode PDP3 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY that passes through the center point of the ground pad electrode PDG. The second pad electrode PDP2 and the fourth pad electrode PDP4 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY.

[0063] The common mode noise filter 10 includes a plurality of capacitor electrodes Pt313, Pt316, Pt323, Pt326, Pt333, and Pt 336. The plurality of capacitor electrodes Pt313, Pt316, Pt323, Pt326, Pt333, and Pt336 constitute a plurality of capacitors 313, 316, 323, 326, 333, and 336, respectively.

[0064] Each of the multiple capacitor electrodes Pt313, Pt316, Pt323, Pt326, Pt333, and Pt336 is configured such that a first flat plate electrode formed on the first conductive layer CLY1 and a second flat plate electrode formed on the second conductive layer CLY2 face each other with an insulator layer 91 sandwiched between them.

[0065] The plurality of capacitor electrodes Pt313, Pt323, and Pt333 are arranged between the first pad electrode PDP1 and the second pad electrode PDP2 in the Y-axis direction. The plurality of capacitor electrodes Pt313, Pt323, and Pt333 are arranged in the order of the capacitor electrode Pt313, the capacitor electrode Pt323, and the capacitor electrode Pt333 from the first pad electrode PDP1 side toward the second pad electrode PDP2 side.

[0066] The capacitor electrodes Pt313, Pt323, and Pt333 are arranged in an array along the Y-axis direction. This arrangement is preferably at equal intervals along the Y-axis direction. The center of this arrangement in the Y-axis direction is arranged to overlap or nearly overlap the X-axis reference line AxeX. The capacitor electrodes Pt313, Pt323, and Pt333 are arranged in positions that overlap the arrangement positions of the first pad electrode PDP1 and the second pad electrode PDP2 in the X-axis direction.

[0067] The plurality of capacitor electrodes Pt316, Pt326, and Pt336 are arranged between the third pad electrode PDP3 and the fourth pad electrode PDP4 in the Y-axis direction. The plurality of capacitor electrodes Pt316, Pt326, and Pt336 are arranged in the order of the capacitor electrode Pt316, the capacitor electrode Pt326, and the capacitor electrode Pt336 from the third pad electrode PDP3 side toward the fourth pad electrode PDP4 side.

[0068] The capacitor electrodes Pt316, Pt326, and Pt336 are arranged in an array along the Y-axis direction. This arrangement is preferably at equal intervals along the Y-axis direction. Furthermore, the center of this arrangement in the Y-axis direction is arranged to overlap or nearly overlap the X-axis reference line AxeX. The capacitor electrodes Pt316, Pt326, and Pt336 are arranged in positions that overlap the arrangement positions of the third pad electrode PDP3 and the fourth pad electrode PDP4 in the X-axis direction.

[0069] The capacitor electrodes Pt313 and Pt316 are arranged in line-symmetric positions about the Y-axis reference line AxeY. The capacitor electrodes Pt323 and Pt326 are arranged in line-symmetric positions about the Y-axis reference line AxeY. The capacitor electrodes Pt333 and Pt336 are arranged in line-symmetric positions about the Y-axis reference line AxeY.

[0070] The common mode noise filter 10 includes a plurality of inductor electrodes Pt311, Pt312, Pt314, Pt315, Pt321, Pt322, Pt324, Pt325, Pt331, Pt332, Pt334, and Pt335. The plurality of inductor electrodes Pt311, Pt312, Pt314, Pt315, Pt321, Pt322, Pt324, Pt325, Pt331, Pt332, Pt334, and Pt335 constitute a plurality of inductors 311, 312, 314, 315, 321, 322, 324, 325, 331, 332, 334, and 335, respectively.

[0071] The multiple inductor electrodes Pt311, Pt312, Pt314, Pt315, Pt321, Pt322, Pt324, Pt325, Pt331, Pt332, Pt334, and Pt335 are each formed as a linear electrode and are formed on the first conductor layer CLY1 and the second conductor layer CLY2.

[0072] The multiple inductor electrodes Pt311, Pt312, Pt321, Pt322, Pt331, and Pt332 are arranged between the first pad electrode PDP1 and the second pad electrode PDP2 in the Y-axis direction. The multiple inductor electrodes Pt311, Pt312, Pt321, Pt322, Pt331, and Pt332 are formed in the following order from the first pad electrode PDP1 side toward the second pad electrode PDP2 side: inductor electrode Pt311, inductor electrode Pt312, inductor electrode Pt321, inductor electrode Pt322, inductor electrode Pt331, and inductor electrode Pt332.

[0073] The inductor electrodes Pt311, Pt312, Pt321, Pt322, Pt331, and Pt332 are arranged along the Y-axis direction. This arrangement is preferably at equal intervals along the Y-axis direction. The center of this arrangement in the Y-axis direction is positioned so as to overlap or nearly overlap the X-axis reference line AxeX.

[0074] In a plan view, the inductor electrodes Pt311 and Pt312 are shaped to surround the capacitor electrode Pt313. In a plan view, the inductor electrodes Pt321 and Pt322 are shaped to surround the capacitor electrode Pt323. In a plan view, the inductor electrodes Pt331 and Pt332 are shaped to surround the capacitor electrode Pt333.

[0075] Most of the inductor electrodes Pt311, Pt312, Pt321, Pt322, Pt331, and Pt332 are positioned in the X-axis direction farther from the ground pad electrode PDG than the positions of the first pad electrode PDP1 and the second pad electrode PDP2.

[0076] The multiple inductor electrodes Pt314, Pt315, Pt324, Pt325, Pt334, and Pt335 are arranged between the third pad electrode PDP3 and the fourth pad electrode PDP4 in the Y-axis direction. The multiple inductor electrodes Pt314, Pt315, Pt324, Pt325, Pt334, and Pt335 are formed in the following order from the third pad electrode PDP3 side toward the fourth pad electrode PDP4 side: inductor electrode Pt314, inductor electrode Pt315, inductor electrode Pt324, inductor electrode Pt325, inductor electrode Pt334, and inductor electrode Pt335.

[0077] The inductor electrodes Pt314, Pt315, Pt324, Pt325, Pt334, and Pt335 are arranged along the Y-axis direction. This arrangement is preferably at equal intervals along the Y-axis direction. The center of this arrangement in the Y-axis direction is positioned so as to overlap or nearly overlap the X-axis reference line AxeX.

[0078] In a plan view, the inductor electrodes Pt314 and Pt315 are shaped to surround the capacitor electrode Pt316. In a plan view, the inductor electrodes Pt324 and Pt325 are shaped to surround the capacitor electrode Pt326. In a plan view, the inductor electrodes Pt334 and Pt335 are shaped to surround the capacitor electrode Pt336.

[0079] Most of the inductor electrodes Pt314, Pt315, Pt324, Pt325, Pt334, and Pt335 are positioned in the X-axis direction farther from the ground pad electrode PDG than the positions of the third pad electrode PDP3 and the fourth pad electrode PDP4.

[0080] The inductor electrodes Pt311 and Pt314 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY. The inductor electrodes Pt312 and Pt315 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY.

[0081] The inductor electrodes Pt321 and Pt324 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY. The inductor electrodes Pt322 and Pt325 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY.

[0082] The inductor electrodes Pt331 and Pt334 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY. The inductor electrodes Pt332 and Pt335 are arranged at positions that are line-symmetrical with respect to the Y-axis reference line AxeY.

[0083] The common mode noise filter 10 includes a plurality of filter-side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338 of the shunt capacitor electrodes, and reference potential connection electrodes PtCG1 and PtCG2 of the shunt capacitor electrodes.

[0084] The filter side electrodes Pt317, Pt327, and Pt337 correspond to first filter side electrodes, and the filter side electrodes Pt318, Pt328, and Pt338 correspond to second filter side electrodes. The pair of reference potential connecting electrodes PtCG1 and PtCG2 corresponds to the first and second reference potential connecting electrodes.

[0085] The plurality of filter side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338 are each rectangular with a predetermined area, and are formed on the second conductor layer CLY2.

[0086] The reference potential connection electrode PtCG1 is formed on the first conductor layer CLY1, and the reference potential connection electrode PtCG2 is formed on the third conductor layer CLY3.

[0087] The reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 overlap with the plurality of filter side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338 in plan view.

[0088] The overlapping and opposing portions of the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt317 constitute a shunt capacitor 317. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt317 correspond to shunt capacitor electrodes for the shunt capacitor 317.

[0089] The overlapping and opposing portions of the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt318 constitute the shunt capacitor 318. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt318 correspond to the shunt capacitor electrodes for the shunt capacitor 318.

[0090] The portions where the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt327 overlap and face each other constitute the shunt capacitor 327. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt327 correspond to the shunt capacitor electrodes for the shunt capacitor 327.

[0091] The overlapping and opposing portions of the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt328 constitute the shunt capacitor 328. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt328 correspond to the shunt capacitor electrodes for the shunt capacitor 328.

[0092] The overlapping and opposing portions of the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt337 constitute a shunt capacitor 337. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt337 correspond to shunt capacitor electrodes for the shunt capacitor 337.

[0093] The overlapping and opposing portions of the reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt338 constitute a shunt capacitor 338. The reference potential connecting electrodes PtCG1, PtCG2 and the filter side electrode Pt338 correspond to shunt capacitor electrodes for the shunt capacitor 338.

[0094] The multiple filter side electrodes Pt317, Pt327, and Pt337 are arranged in the Y-axis direction between the first pad electrode PDP1 and the second pad electrode PDP2. In the Y-axis direction, the multiple filter side electrodes Pt317, Pt327, and Pt337 are arranged in the order of the filter side electrode Pt317, the filter side electrode Pt327, and the filter side electrode Pt337, from the first pad electrode PDP1 side toward the second pad electrode PDP2 side.

[0095] As a result, the plurality of shunt capacitors 317, 327, and 337 are arranged between the first pad electrode PDP1 and the second pad electrode PDP2 in the Y-axis direction.

[0096] The filter side electrodes Pt317, Pt327, and Pt337 are arranged along the Y-axis direction. This arrangement is preferably at equal intervals along the Y-axis direction. Furthermore, the center of this arrangement in the Y-axis direction overlaps or nearly overlaps the X-axis reference line AxeX.

[0097] The filter-side electrode Pt317 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt311, Pt312, and capacitor electrode Pt313 in the X-axis direction. The filter-side electrode Pt327 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt321, Pt322, and capacitor electrode Pt323 in the X-axis direction. The filter-side electrode Pt337 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt331, Pt332, and capacitor electrode Pt333 in the X-axis direction.

[0098] The multiple filter side electrodes Pt318, Pt328, and Pt338 are arranged in the Y-axis direction between the third pad electrode PDP3 and the fourth pad electrode PDP4. In the Y-axis direction, the multiple filter side electrodes Pt318, Pt328, and Pt338 are arranged in the order of the filter side electrode Pt318, the filter side electrode Pt328, and the filter side electrode Pt338, from the third pad electrode PDP3 side toward the fourth pad electrode PDP4 side.

[0099] As a result, the plurality of shunt capacitors 318, 328, and 338 are arranged between the third pad electrode PDP3 and the fourth pad electrode PDP4 in the Y-axis direction.

[0100] The filter side electrodes Pt318, Pt328, and Pt338 are arranged along the Y-axis direction. This arrangement is preferably spaced equally apart along the Y-axis direction. Furthermore, the center of this arrangement in the Y-axis direction overlaps or nearly overlaps the X-axis reference line AxeX.

[0101] The filter-side electrode Pt318 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt314, Pt315, and capacitor electrode Pt316 in the X-axis direction. The filter-side electrode Pt328 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt324, Pt325, and capacitor electrode Pt326 in the X-axis direction. The filter-side electrode Pt338 is arranged on the ground pad electrode PDG side of the inductor electrodes Pt334, Pt335, and capacitor electrode Pt336 in the X-axis direction.

[0102] The first filter circuit electrode group is constituted by the above-mentioned multiple inductor electrodes Pt311, Pt312, Pt321, Pt322, Pt331, Pt332, the multiple capacitor electrodes Pt313, Pt323, Pt333, the multiple filter side electrodes Pt317, Pt327, Pt337, and the portions of the reference potential connecting electrodes PtCG1, PtCG2 that overlap with the multiple filter side electrodes Pt317, Pt327, Pt337.

[0103] The second filter circuit electrode group is constituted by the above-mentioned multiple inductor electrodes Pt314, Pt315, Pt324, Pt325, Pt334, Pt335, the multiple capacitor electrodes Pt316, Pt326, Pt336, the multiple filter side electrodes Pt318, Pt328, Pt338, and the portions of the reference potential connecting electrodes PtCG1, PtCG2 that overlap with the multiple filter side electrodes Pt318, Pt328, Pt338.

[0104] Although the connection relationships of the above-mentioned electrodes are not described in detail, they are established to configure the circuit of FIG. 1 so as to minimize the occurrence of parasitic inductance and parasitic capacitance.

[0105] The inductor 300 is configured by a linear, wound inductor electrode Pt300 formed on the second conductor layer CLY2 and the third conductor layer CLY3. The inductor electrode Pt300 is disposed outward from the reference potential connecting electrodes PtCG1 and PtCG2 in a plan view.

[0106] The inductor electrode Pt300 is preferably disposed on the Y-axis reference line AxeY. Furthermore, the inductor electrode Pt300 is preferably disposed between the second pad electrode PDP2 and the fourth pad electrode PDP4.

[0107] Furthermore, as shown in FIG. 2, the inductor electrode Pt300 is preferably connected to the reference potential connection electrode PtCG2 and the ground pad electrode PDG by wiring electrodes that overlap the Y-axis reference line AxeY and extend in the Y-axis direction.

[0108] (Relationship Between Reference Potential Connection Electrode and Ground Pad Electrode PDG) The ground pad electrode PDG has a rectangular shape in a plan view, and includes a first side S1, a second side S2, a third side S3, and a fourth side S4.

[0109] The first side S1 and the second side S2 extend in the Y-axis direction. The first side S1 is the side of the ground pad electrode PDG that faces the first filter circuit electrode group in the X-axis direction, and the second side S2 is the side of the ground pad electrode PDG that faces the second filter circuit electrode group in the X-axis direction.

[0110] The third side S3 and the fourth side S4 are sides extending in the X-axis direction. The third side S3 is the side of the ground pad electrode PDG on the side of the first pad electrode PDP1 and the third pad electrode PDP3 in the Y-axis direction, and the fourth side S4 is the side of the ground pad electrode PDG on the side of the second pad electrode PDP2 and the fourth pad electrode PDP4 in the Y-axis direction.

[0111] The reference potential connecting electrode PtCG1 has a partially cut ring shape, and has an end ED1 at one end in the extending direction (circumferential direction) and an end ED2 at the other end. The reference potential connecting electrode PtCG1 is formed in the first conductor layer CLY1, which is the same layer as the ground pad electrode PDG.

[0112] The reference potential connecting electrode PtCG2 has a ring shape and is formed on the third conductive layer CLY3.

[0113] The reference potential connection electrode PtCG1 and the reference potential connection electrode PtCG2 are connected through a via electrode VIA1 formed in the insulator layer 91, an intermediate connection electrode Ptcnt formed in the second conductor layer CY2, and a via electrode VIA2 formed in the insulator layer 92.

[0114] The reference potential connecting electrodes PtCG1 and PtCG2 have an opening (a non-electrode portion) in the center of their ring shapes. In other words, no electrodes are formed in the portions surrounded by the annular reference potential connecting electrodes PtCG1 and PtCG2. The planar areas of the portions surrounded by the annular reference potential connecting electrodes PtCG1 and PtCG2 are larger than the planar area of ​​the ground pad electrode PDG. The area of ​​the ground pad electrode PDG exposed to the outside is smaller than the planar area of ​​the ground pad electrode PDG.

[0115] The reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 are arranged with respect to the ground pad electrode PDG so that the ground pad electrode PDG fits within the opening in a plan view. In other words, the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 are arranged so as to surround the ground pad electrode PDG along the outer periphery of the ground pad electrode PDG in a plan view.

[0116] As a result, the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 are disposed at positions that do not overlap the ground pad electrode PDG in a plan view.

[0117] The reference potential connecting electrode PtCG2 is disposed along the entire periphery of the ground pad electrode PDG in plan view, but the reference potential connecting electrode PtCG1 has a notch (electrode non-forming portion) in its ring shape.

[0118] The notch of the reference potential connection electrode PtCG1 is located on the fourth side S4 side of the ground pad electrode PDG. A wiring electrode that connects the ground pad electrode PDG and the inductor electrode Pt300 is routed through this notch.

[0119] In this case, it is preferable that the notch of the reference potential connection electrode PtCG1 has a shape that is line-symmetrical with respect to the Y-axis reference line AxeY.

[0120] With the above-described configuration, the common mode noise filter 10 can be configured with one each of the first pad electrode PDP1, second pad electrode PDP2, third pad electrode PDP3, fourth pad electrode PDP4, and ground pad electrode PDG, thereby enabling the common mode noise filter 10 to be miniaturized.

[0121] Furthermore, since the ground pad electrode PDG is disposed within the rectangle formed by the first pad electrode PDP1, the second pad electrode PDP2, the third pad electrode PDP3, and the fourth pad electrode PDP4, the common mode noise filter 10 can be made even smaller.

[0122] Furthermore, the electrodes constituting the shunt capacitors 317, 318, 327, 328, 337, and 338 (the filter-side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338, and the reference potential connection electrodes PtCG1 and PtCG2) do not overlap with the ground pad electrode PDG. This suppresses undesirable parasitic capacitance between the shunt capacitors 317, 318, 327, 328, 337, and 338 and the ground pad electrode PDG. This allows the common-mode noise filter 10 to be compact and achieve desired filter characteristics.

[0123] The common-mode noise filter 10 also has a shape that is substantially symmetrical with respect to the Y-axis reference line AxeY that passes through the center point Po of the ground pad electrode PDG, thereby enabling the common-mode noise filter 10 to more reliably achieve the desired filter characteristics as a common-mode noise filter for differential signals (differential delay line type common-mode noise filter).

[0124] The common-mode noise filter 10 also has a shape that is substantially symmetrical with respect to the X-axis reference line AxeX that passes through the center point of the ground pad electrode PDG. This reduces the difference between the filter characteristics in a first usage mode, in which the first input / output terminal P1 and the third input / output terminal P3 are used as input terminals and the second input / output terminal P2 and the fourth input / output terminal P4 are used as output terminals, and the filter characteristics in a second usage mode, in which the second input / output terminal P2 and the fourth input / output terminal P4 are used as input terminals and the first input / output terminal P1 and the third input / output terminal P3 are used as output terminals. This makes the common-mode noise filter 10 even easier to use.

[0125] 3, the width W11 (length in the X-axis direction) of a first portion of the reference potential connecting electrode PtCG1 on the side S1 of the ground pad electrode PDG is the same as the width W12 (length in the X-axis direction) of a first portion of the reference potential connecting electrode PtCG1 on the side S2 of the ground pad electrode PDG. Also, the length L11 (length in the X-axis direction) of the first portion of the reference potential connecting electrode PtCG1 on the side S1 of the ground pad electrode PDG is the same as the width L12 (length in the X-axis direction) of a second portion of the reference potential connecting electrode PtCG1 on the side S2 of the ground pad electrode PDG.

[0126] As a result, the reference potential connecting electrode PtCG1 also has a shape that is line-symmetrical with respect to the Y-axis reference line AxeY. The reference potential connecting electrode PtCG2 has the same configuration as the reference potential connecting electrode PtCG1. Therefore, the common-mode noise filter 10 contributes to achieving desired filter characteristics regardless of the shapes of the reference potential connecting electrodes PtCG1 and PtCG2.

[0127] 3, the width W11 of the first portion of the reference potential connecting electrode PtCG1 is larger than the width W37 of the filter-side electrodes Pt317, Pt327, and Pt337. This makes it possible to suppress changes in the capacitance of the shunt capacitors 317, 327, and 337 even if the filter-side electrodes Pt317, Pt327, and Pt337 are misaligned to some extent in the X-axis direction.

[0128] Similarly, the width W12 of the second portion of the reference potential connecting electrode PtCG1 is larger than the width W38 of the filter-side electrodes Pt318, Pt328, and Pt338. This makes it possible to suppress changes in the capacitance of the shunt capacitors 318, 328, and 338 even if the filter-side electrodes Pt318, Pt328, and Pt338 are misaligned to some extent in the X-axis direction.

[0129] In this regard, the reference potential connecting electrode PtCG2 has the same configuration as the reference potential connecting electrode PtCG1, so that the common mode noise filter 10 can more reliably achieve the desired filter characteristics.

[0130] 3 , the length L11 of the first portion of the reference potential connecting electrode PtCG1 is equal to or greater than the sum of the length W37 of the filter-side electrodes Pt317, Pt327, and Pt337 and twice the distance between adjacent filter-side electrodes. This makes it possible to suppress changes in the capacitance of the shunt capacitors 317, 327, and 337 even if the filter-side electrodes Pt317, Pt327, and Pt337 are misaligned to some extent in the X-axis direction. Similarly, changes in the capacitance of the shunt capacitors 318, 328, and 338 can also be suppressed.

[0131] In this regard, the reference potential connecting electrode PtCG2 has the same configuration as the reference potential connecting electrode PtCG1, so that the common mode noise filter 10 can more reliably achieve the desired filter characteristics.

[0132] 3 and 4 , the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 sandwich the filter side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338 from both sides in the stacking direction. This allows the capacitance of the shunt capacitors 317, 327, 337, 318, 328, and 338 relative to the shapes of the filter side electrodes Pt317, Pt318, Pt327, Pt328, Pt337, and Pt338 to be larger than when only the reference potential connecting electrode PtCG1 is used. In other words, the area required to achieve the desired capacitance of the shunt capacitors 317, 327, 337, 318, 328, and 338 can be reduced. This allows the common mode noise filter 10 to be further miniaturized.

[0133] Furthermore, the reference potential connecting electrodes PtCG1 and PtCG2 are connected to each other by providing a plurality of pairs of via electrodes VIA1, intermediate connecting electrodes Ptcnt, and via electrodes VIA2. This allows the common mode noise filter 10 to suppress undesired parasitic capacitance occurring between the reference potential connecting electrodes PtCG1 and PtCG2. Furthermore, by using both the reference potential connecting electrodes PtCG1 and PtCG2, the width of the transmission line connecting one end of the shunt capacitors 317, 327, 337, 318, 328, and 338 can be substantially increased. This allows the common mode noise filter 10 to suppress undesired parasitic inductance.

[0134] 3, the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 are connected at both ends ED1 and ED2 of the reference potential connecting electrode PtCG1. Furthermore, the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 are connected at a midpoint in the direction in which the reference potential connecting electrode PtCG1 extends. This makes it possible to suppress undesirable variations in the potential difference between the reference potential connecting electrode PtCG1 and the reference potential connecting electrode PtCG2 depending on the position in the plane.

[0135] Furthermore, the set of via electrode VIA1, intermediate connection electrode Ptcnt, and via electrode VIA2 that connects the reference potential connection electrode PtCG1 and the reference potential connection electrode PtCG2 is arranged line-symmetrically with respect to the Y-axis reference line AxeY, so that the common mode noise filter 10 can realize a desired filter.

[0136] Furthermore, the set of the via electrode VIA1, the intermediate connection electrode Ptcnt, and the via electrode VIA2 that connects the reference potential connection electrode PtCG1 and the reference potential connection electrode PtCG2 is arranged approximately symmetrically with respect to the X-axis reference line AxeX, and therefore the common mode noise filter 10 can achieve the ease of use described above.

[0137] Second Embodiment A common mode noise filter according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 5 is a plan view of the common mode noise filter according to the second embodiment of the present invention.

[0138] 5, the common mode noise filter 10A according to the second embodiment differs from the common mode noise filter 10 according to the first embodiment in that it includes reference potential connecting electrodes PtCG11, PtCG12, and PtCG2A. The other configuration of the common mode noise filter 10A is the same as that of the common mode noise filter 10, and a description of similar parts will be omitted.

[0139] The reference potential connecting electrodes PtCG11 and PtCG12 are configured by eliminating the portion of the reference potential connecting electrode PtCG1 shown in the first embodiment that runs adjacent to and parallel to the side S3 of the ground pad electrode PDG. The reference potential connecting electrode PtCG11 is arranged along the side S1 and part of the side S4 of the ground pad electrode PDG. The reference potential connecting electrode PtCG12 is arranged along the side S2 and part of the side S4 of the ground pad electrode PDG.

[0140] The reference potential connecting electrode PtCG2A is configured by eliminating the portion of the reference potential connecting electrode PtCG2 shown in the first embodiment that runs adjacent to and parallel to the side S3 of the ground pad electrode PDG. The reference potential connecting electrode PtCG2A is arranged along the sides S1, S4, and S2 of the ground pad electrode PDG.

[0141] With this configuration, the common mode noise filter 10A can achieve the same effects as the common mode noise filter 10.

[0142] [Third Embodiment] A common mode noise filter according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 6 is a plan view of the common mode noise filter according to the third embodiment of the present invention.

[0143] 6, the common-mode noise filter 10B according to the third embodiment differs from the common-mode noise filter 10 according to the first embodiment in that it includes reference potential connecting electrodes PtCG1B and PtCG2B. The other configuration of the common-mode noise filter 10B is the same as that of the common-mode noise filter 10, and a description of similar parts will be omitted.

[0144] The reference potential connecting electrode PtCG1B is configured by eliminating the portion of the reference potential connecting electrode PtCG1 shown in the first embodiment that runs adjacent to and parallel to the side S4 of the ground pad electrode PDG. The reference potential connecting electrode PtCG1B is arranged along the sides S1, S3, and S2 of the ground pad electrode PDG.

[0145] The reference potential connecting electrode PtCG2B is configured by eliminating the portion of the reference potential connecting electrode PtCG2 shown in the first embodiment that runs adjacent to and parallel to the side S4 of the ground pad electrode PDG. The reference potential connecting electrode PtCG2B is arranged along the sides S1, S3, and S2 of the ground pad electrode PDG.

[0146] With this configuration, the common mode noise filter 10B can achieve substantially the same effects as the common mode noise filter 10.

[0147] In the above-described embodiments, a three-stage common mode noise filter has been described as an example, but the number of stages is not limited to 3. The electrode groups constituting each of the multiple-stage common mode noise filters may be formed in order along the Y-axis direction between the positions of the first pad electrode PDP1 and the third pad electrode PDP3 and the positions of the second pad electrode PDP2 and the fourth pad electrode PDP4.

[0148] <1> A common mode noise filter formed on a semiconductor substrate, comprising: a first filter including: a first series circuit of a first inductor and a second inductor that transmits a first differential signal and that are connected in series to each other and magnetically coupled to each other; and a first shunt capacitor connected between an intermediate node of the first inductor and the second inductor and a reference potential; a second filter including: a second series circuit of a third inductor and a fourth inductor that transmits a second differential signal that is a pair of the first differential signal and that are connected in series to each other and magnetically coupled to each other; and a second shunt capacitor connected between an intermediate node of the third inductor and the fourth inductor and a reference potential; and an impedance component connected between the first filter and the second filter and the reference potential, the first filter circuit electrode group is connected to the first pad electrode, the second pad electrode, and the ground pad electrode and constitutes the first filter; and the second filter circuit electrode group is connected to the third pad electrode, the fourth pad electrode, and the ground pad electrode and constitutes the second filter; the first filter circuit electrode group and the second filter circuit electrode group are connected to the ground pad electrode via the impedance component; the first filter circuit electrode group comprises: a first electrode group constituting the first inductor and the second inductor; and a first shunt capacitor electrode constituting the first shunt capacitor; the second filter circuit electrode group comprises: a second electrode group constituting the third inductor and the fourth inductor; and a second shunt capacitor electrode constituting the second shunt capacitor; the first pad electrode, the first filter circuit electrode group, and the second pad electrode are arranged in this order along a first direction of the semiconductor substrate;a common mode noise filter, wherein the third pad electrode, the second filter circuit electrode group, and the fourth pad electrode are arranged in this order along the first direction, the first pad electrode and the third pad electrode are arranged along a second direction of the semiconductor substrate that is perpendicular to the first direction, the second pad electrode and the fourth pad electrode are arranged along the second direction of the semiconductor substrate, the ground pad electrode, the first shunt capacitor electrode, and the second shunt capacitor electrode are arranged between the first electrode group and the second electrode group in the second direction, and the ground pad electrode is arranged in a position that does not overlap the first shunt capacitor electrode and the second shunt capacitor electrode.

[0149] <2> The common mode noise filter according to <1>, wherein, in the second direction, at least a portion of the first shunt capacitor electrode is arranged between the ground pad electrode and the first electrode group, and at least a portion of the second shunt capacitor electrode is arranged between the ground pad electrode and the second electrode group.

[0150] <3> The common mode noise filter according to <1> or <2>, wherein the first shunt capacitor electrode comprises: a first reference potential connection electrode connected to the ground pad electrode; and a first filter-side electrode connected to the first electrode group; the second shunt capacitor electrode comprises: a second reference potential connection electrode connected to the ground pad electrode; and a second filter-side electrode connected to the second electrode group; and the first reference potential connection electrode and the second reference potential connection electrode are arranged along an outer periphery of the ground pad electrode.

[0151] <4> The common mode noise filter according to <3>, wherein the first reference potential connection electrode is arranged along a side of the ground pad electrode that faces the first electrode group, and the second reference potential connection electrode is arranged along a side of the ground pad electrode that faces the second electrode group.

[0152] <5> The common mode noise filter according to <3> or <4>, wherein the first reference potential connection electrode and the second reference potential connection electrode are formed in the same layer of the semiconductor substrate and are connected to each other within the same layer.

[0153] <6> The common mode noise filter according to any one of <1> to <5>, wherein the ground pad electrode is arranged in the first direction at an intermediate position between the first pad electrode and the second pad electrode and an intermediate position between the third pad electrode and the fourth pad electrode, and in the second direction at an intermediate position between the first pad electrode and the third pad electrode and an intermediate position between the second pad electrode and the fourth pad electrode.

[0154] <7> The common mode noise filter according to any one of <1> to <6>, wherein the first filter and the second filter have a multi-stage configuration, and a plurality of first filter circuit electrode groups constituting each of the multi-stage first filters and a plurality of second filter circuit electrode groups constituting each of the multi-stage second filters are respectively arranged along the first direction.

[0155] 10, 10A, 10B: common mode noise filter 21: first common mode noise filter 21T1: first T-type filter circuit 21T2: second T-type filter circuit 22: second common mode noise filter 22T1: third T-type filter circuit 22T2: fourth T-type filter circuit 23: third common mode noise filter 23T1: fifth T-type filter circuit 23T2: sixth T-type filter circuit 90: substrate 91, 92, 93, 94: insulator layers 300, 311, 312, 314, 315, 321, 322, 324, 325, 331, 332, 334, 335: inductors 313, 316, 323, 326, 333, 336: capacitors 317, 318, 327, 328, 337, 338: shunt capacitor 900: substrate AxeX: X-axis reference line AxeY: Y-axis reference line CLY1: first conductive layer CLY2: second conductive layer CLY3: third conductive layer CY2: second conductive layer ED1, ED2: end P1: first input / output terminal P2: second input / output terminal P3: third input / output terminal P4: fourth input / output terminal PDG: ground pad electrode PDP1: first pad electrode PDP2: second pad electrode PDP3: third pad electrode PDP4: fourth pad electrode PGND: reference potential connection terminal Po: center point Pt300, Pt311, Pt312, Pt314, Pt315, Pt321, Pt322, Pt324, Pt325, Pt331, Pt332, Pt334, Pt335: Inductor electrodes Pt313, Pt316, Pt323, Pt326, Pt333, Pt336: Capacitor electrodes Pt317, Pt318, Pt327, Pt328, Pt337, Pt338: Filter side electrodes PtCG1, PtCG11, PtCG12, PtCG1B, PtCG2, PtCG2A, PtCG2B: Reference potential connection electrodes Ptcnt: Intermediate connection electrode VIA1, VIA2: Via electrodes

Claims

1. A common mode noise filter formed on a semiconductor substrate, comprising: a first filter comprising: a first series circuit of a first inductor and a second inductor that transmit a first differential signal and are connected in series to each other and magnetically coupled to each other; and a first shunt capacitor connected between an intermediate node between the first inductor and the second inductor and a reference potential; a second filter comprising: a second series circuit of a third inductor and a fourth inductor that transmit a second differential signal that is a pair of the first differential signal and are connected in series to each other and magnetically coupled to each other; and a second shunt capacitor connected between an intermediate node between the third inductor and the fourth inductor and a reference potential; and an impedance component connected between the first filter and the second filter and the reference potential, wherein the common mode noise filter is formed on a semiconductor substrate, comprising: a first pad electrode that constitutes one input / output terminal of the first differential signal; a second pad electrode that constitutes the other input / output terminal of the first differential signal; a third pad electrode that constitutes one input / output terminal of the second differential signal; a fourth pad electrode that constitutes the other input / output terminal of the second differential signal; and a ground pad electrode connected to the reference potential. the first filter circuit electrode group is connected to the first pad electrode, the second pad electrode, and the ground pad electrode and constitutes the first filter; and the second filter circuit electrode group is connected to the third pad electrode, the fourth pad electrode, and the ground pad electrode and constitutes the second filter; the first filter circuit electrode group and the second filter circuit electrode group are connected to the ground pad electrode via the impedance component; the first filter circuit electrode group comprises: a first electrode group constituting the first inductor and the second inductor; and a first shunt capacitor electrode constituting the first shunt capacitor; the second filter circuit electrode group comprises: a second electrode group constituting the third inductor and the fourth inductor; and a second shunt capacitor electrode constituting the second shunt capacitor; the first pad electrode, the first filter circuit electrode group, and the second pad electrode are arranged in this order along a first direction of the semiconductor substrate;a common mode noise filter, wherein the third pad electrode, the second filter circuit electrode group, and the fourth pad electrode are arranged in this order along the first direction, the first pad electrode and the third pad electrode are arranged along a second direction of the semiconductor substrate that is perpendicular to the first direction, the second pad electrode and the fourth pad electrode are arranged along the second direction of the semiconductor substrate, the ground pad electrode, the first shunt capacitor electrode, and the second shunt capacitor electrode are arranged between the first electrode group and the second electrode group in the second direction, and the ground pad electrode is arranged in a position that does not overlap the first shunt capacitor electrode and the second shunt capacitor electrode.

2. A common mode noise filter as described in claim 1, wherein, in the second direction, at least a portion of the first shunt capacitor electrode is arranged between the ground pad electrode and the first electrode group, and at least a portion of the second shunt capacitor electrode is arranged between the ground pad electrode and the second electrode group.

3. A common mode noise filter as claimed in claim 1 or claim 2, wherein the first shunt capacitor electrode comprises: a first reference potential connection electrode connected to the ground pad electrode; and a first filter side electrode connected to the first electrode group; and the second shunt capacitor electrode comprises: a second reference potential connection electrode connected to the ground pad electrode; and a second filter side electrode connected to the second electrode group; and the first reference potential connection electrode and the second reference potential connection electrode are arranged along the outer periphery of the ground pad electrode.

4. The common mode noise filter according to claim 3, wherein the first reference potential connection electrode is arranged along the side of the ground pad electrode that faces the first electrode group, and the second reference potential connection electrode is arranged along the side of the ground pad electrode that faces the second electrode group.

5. A common mode noise filter according to claim 3 or 4, wherein the first reference potential connection electrode and the second reference potential connection electrode are formed in the same layer of the semiconductor substrate and are connected within that same layer.

6. A common mode noise filter according to any one of claims 1 to 5, wherein the ground pad electrode is arranged in the first direction at an intermediate position between the first pad electrode and the second pad electrode and an intermediate position between the third pad electrode and the fourth pad electrode, and in the second direction at an intermediate position between the first pad electrode and the third pad electrode and an intermediate position between the second pad electrode and the fourth pad electrode.

7. A common mode noise filter according to any one of claims 1 to 6, wherein the first filter and the second filter are configured in multiple stages, and the multiple first filter circuit electrode groups that configure each of the multiple stages of the first filter and the multiple second filter circuit electrode groups that configure each of the multiple stages of the second filter are each arranged along the first direction.

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