Real-time measurement and analysis system for fluorine gas content

Abstract

Disclosed in the present utility model is a real-time measurement and analysis system for fluorine gas content, the system comprising: a sample gas circuit, which has a sample gas intake end and a sample gas output end opposite each other and is used for the intake and output of a sample gas; a reference gas circuit, which has a reference gas intake end and a reference gas output end opposite each other and is used for the intake and output of a reference gas; a pretreatment device, which is connected to both the sample gas intake end and the reference gas intake end; a measurement device, which is connected to the pretreatment device and used for measuring fluorine gas concentration, and is connected to the sample gas output end and the reference gas output end; a PLC controller, which is used for controlling the gas intake and output in the sample gas circuit and the reference gas circuit; and a control computer, which is used for calculating and displaying the fluorine gas concentration measured by the measurement device. The problems of a high level of risk and the poor timeliness of measurement information during manual sampling in existing fluorine gas content analysis and measurement are solved.

Description

A fluorine gas content real-time detection and analysis system TECHNICAL FIELD

[0001] The utility model relates to a gas analysis technical field especially relates to a fluorine gas content real-time detection and analysis system. BACKGROUND

[0002] Fluorine gas, the gaseous element of fluorine, is a kind of pale yellow two-atomic gas with strong irritability and corrosiveness, and is highly toxic, which has great harm to human body and environment.Fluorine gas is extremely active in chemical properties and has extremely strong oxidizing property, and can react with almost all organic matter and inorganic matter except perfluorinated compounds.Fluorine gas, as a strong oxidizing agent and active gas, is widely used in chemical industry, pharmaceutical industry, atomic energy industry, semiconductor manufacturing, aviation and other industries.In the chemical industry, fluorine gas is an important raw material for the preparation of various fluorides.These fluorides have unique chemical properties and application value, and are widely used in metal processing, electroplating, glass manufacturing and other industries.For example, hydrogen fluoride, as an important chemical raw material, has a wide range of applications in organic synthesis, inorganic synthesis and fine chemical industry.Sodium fluoride is widely used in the manufacture of ceramics, glass, enamel, pesticides, etc., and provides key support for the development of these industries.

[0003] In the industrial production process, due to the toxicity and corrosiveness of fluorine gas, it is very important to accurately monitor and control its content, which is of great significance to ensure production safety and prevent environmental pollution.The factory also needs to adjust the production raw material ratio during production to reduce production cost and improve product quality.

[0004] The traditional fluorine gas content analysis and detection method is usually gas chromatography analysis.Laboratory gas chromatography analysis usually needs manual sampling, has a high risk coefficient, and has the problems of poor timeliness of detection information, etc., which cannot meet the real-time and accurate monitoring needs of modern industrial production.

[0005] Utility model content

[0006] The utility model discloses a fluorine gas content real-time detection and analysis system, which solves the problems of manual sampling of existing fluorine gas content analysis and detection, high risk coefficient and poor timeliness of detection information.

[0007] A fluorine gas content real-time detection and analysis system, comprising:

[0008] A sample gas path has opposite sample gas inlet and sample gas outlet for sample gas inlet and outlet;

[0009] A reference gas path has opposite reference gas inlet and reference gas outlet for reference gas inlet and outlet;

[0010] a pretreatment device, connected to the sample gas inlet end and the reference gas inlet end respectively;

[0011] a detection device, connected to the pretreatment device, for detecting the concentration of fluorine gas, and connected to the sample gas outlet end and the reference gas outlet end;

[0012] a PLC controller, for controlling the gas inlet and outlet of the sample gas path and the reference gas path;

[0013] a control computer, for calculating and displaying the concentration of fluorine gas detected by the detection device.

[0014] In the present application, the sample gas path and the reference gas path are directly connected to the sample gas source and the reference gas source for direct gas sampling, avoiding manual sampling; the control computer controls the pretreatment device to perform gas sampling from the sample gas inlet end and the reference gas inlet end respectively; after the fluorine gas passes through the pretreatment device, it is transmitted to the detection device for detection, so as to obtain the concentration value, which can save the step of manual sampling test and realize real-time sampling, improving the timeliness.

[0015] The following also provides several optional modes, but not as an additional limitation to the above overall scheme, just a further supplement or preferred, without technical or logical contradiction, each optional mode can be combined with the above overall scheme, and can also be combined between multiple optional modes.

[0016] Optionally, the detection device is provided with a sample flow cell, which includes a hollow tube, a visible window piece, a gas inlet pipeline and a gas outlet pipeline, the visible window piece is arranged at both ends of the hollow tube and closes the hollow tube, and one end of the gas inlet pipeline and the gas outlet pipeline communicates with the inside of the hollow tube.

[0017] Optionally, the sample flow cell further comprises a temperature sensor and a pressure sensor, the temperature sensor is installed on the surface of the hollow tube close to the gas inlet pipeline, and the pressure sensor is installed on the surface of the hollow tube close to the gas outlet pipeline.

[0018] Optionally, the pretreatment device has a first pretreatment pipeline, the first pretreatment pipeline comprises an inlet valve, a filter, a pressure regulating valve and an adjustable flow meter connected in sequence, the inlet valve is connected to the sample gas inlet end, and the adjustable flow meter is connected to the detection device.

[0019] Optionally, the pretreatment device further has a second pretreatment pipeline, the second pretreatment pipeline has the same structure as the first pretreatment pipeline, one end of the second pretreatment pipeline is connected to the reference gas inlet end, and the other end is connected to the detection device.

[0020] Optionally, the detection device is respectively provided with a sample gas inlet interface, a reference gas inlet interface, a sample gas outlet interface and a reference gas outlet interface, the sample gas inlet interface and the reference gas inlet interface are respectively connected with corresponding pretreatment pipelines, the sample gas outlet interface is connected with the sample gas outlet end, and the reference gas outlet interface is connected with the reference gas outlet end.

[0021] Optionally, the sample gas outlet end and the reference gas outlet end are both provided with an outlet valve for controlling the outlet of the sample gas outlet end and the reference gas outlet end.

[0022] The beneficial effects of the present application are as follows:

[0023] 1. The present application adopts a PLC controller to control the pretreatment device to sample fluorine gas in the sample gas pipeline in real time, which is beneficial to the timeliness of concentration value detection.

[0024] 2. The present application directly sets the sample gas pipeline and the reference gas pipeline to directly sample fluorine gas, which saves the manual sampling step and reduces the operation risk. BRIEF DESCRIPTION OF DRAWINGS

[0025] Fig. 1 is a structural schematic diagram of the present application;

[0026] Fig. 2 is a structural schematic diagram of the detection device in the present application;

[0027] Fig. 3 is a structural schematic diagram of the sample flow cell in the present application;

[0028] Fig. 4 is a schematic diagram of the gas pipeline structure of the present application.

[0029] The reference signs in the drawings are explained as follows: 1, sample gas pipeline; 11, sample gas inlet end; 12, sample gas outlet end; 2, reference gas pipeline; 21, reference gas inlet end; 22, reference gas outlet end; 3, PLC controller; 4, control computer; 100, detection device; 101, sample gas inlet interface; 102, reference gas inlet interface; 103, sample gas outlet interface; 104, reference gas outlet interface; 200, pretreatment device; 201, inlet valve; 202, filter; 203, pressure regulating valve; 204, adjustable flow meter; 205, outlet valve; 300, sample flow cell; 301, hollow tube; 302, temperature sensor; 303, pressure sensor; 304, visual window piece; 305, inlet pipeline; 306, outlet pipeline.

[0030] DETAILED EMBODIMENT

[0031] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of the present application.

[0032] It should be noted that when a component is referred to as being "connected" with another component, it can be directly connected with the other component or there can be intervening components. When a component is referred to as being "disposed on" another component, it can be directly disposed on the other component or there can be intervening components.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this description, the terms "and / or" includes any and all combinations of one or more of the associated listed items.

[0034] Referring to FIGS. 1 to 4, in an embodiment of the present application, a fluorine gas content real-time detection and analysis system is disclosed, comprising: a sample gas path 1, a reference gas path 2, a pretreatment device 200, a detection device 100, a PLC controller 3, and a control computer 4. The sample gas path 1 and the reference gas path 2 are both connected to the pretreatment device 200 and the detection device 100. The PLC controller 3 controls the pretreatment device 200 to sample gas from the sample gas path 1 and the reference gas path 2. The detection device 100 detects the gas after the pretreatment device 200, and the control computer 4 analyzes and calculates the fluorine gas concentration value.

[0035] Further, the detection device is configured to automatically extract fluorine gas for detection. The sample gas path 1 has a sample gas inlet end 11 and a sample gas outlet end 12 for sample gas inlet and outlet. The reference gas path 2 has a reference gas inlet end 21 and a reference gas outlet end 22 for reference gas inlet and outlet. The pretreatment device 200 is connected to the sample gas inlet end 11 and the reference gas inlet end 21. The detection device 100 is located downstream of the pretreatment device 200 and is connected to the sample gas outlet end 12 and the reference gas outlet end 22.

[0036] It should be noted that the PLC controller 3 and the control computer 4 in the present application do not have model and specification limitations. The PLC controller 3 is used to control the on-off of the gas path in the pretreatment device 200, and the control computer 4 is used to cooperate with the detection device 100 to obtain and display the concentration value, both of which can be normally obtained by market procurement.

[0037] Referring to FIG. 3, in some embodiments, the detection device 100 is provided with a sample flow cell 300, which includes a hollow tube 301, a visual window sheet 304, an inlet gas pipeline 305, and an outlet gas pipeline 306. The visual window sheet 304 is arranged at two ends of the hollow tube 301 respectively and oppositely, and can seal the hollow tube 301 to form a chamber for storing fluorine gas in the hollow tube 301. One end of the inlet gas pipeline 305 and the outlet gas pipeline 306 communicates with the inside of the hollow tube 301, and is used for inputting or outputting fluorine gas to the chamber.

[0038] Further, the sample flow cell further includes a temperature sensor 302 and a pressure sensor 303. The temperature sensor 302 is installed on the surface of the hollow tube 301 close to the inlet gas pipeline 305, and the pressure sensor 303 is installed on the surface of the hollow tube 301 close to the outlet gas pipeline 306, which are used for detecting the pressure and temperature in the chamber, so that the pressure and temperature in the chamber are uniform during each detection.

[0039] Referring to FIG. 4, in an embodiment of the present application, the pretreatment device 200 is provided with a first pretreatment pipeline, which includes an inlet valve 201, a filter 202, a pressure regulating valve 203, and an adjustable flow meter 204 connected in sequence. The inlet valve 201 is connected to the sample inlet end 11, and the adjustable flow meter 204 is connected to the detection device 100.

[0040] Further, the pretreatment device 200 is further provided with a second pretreatment pipeline, which has the same structure as the first pretreatment pipeline. One end of the second pretreatment pipeline is connected to the reference inlet end 21, and the other end is connected to the detection device 100.

[0041] The second pretreatment pipeline and the first pretreatment pipeline are interchangeable, and do not affect the function of the equipment.

[0042] Referring to FIG. 2, the detection device 100 is provided with a sample gas inlet interface 101, a reference gas inlet interface 102, a sample gas outlet interface 103, and a reference gas outlet interface 104. The sample gas inlet interface 101 and the reference gas inlet interface 102 are connected to the corresponding pretreatment pipelines respectively. The sample gas outlet interface 103 is connected to the sample outlet end 12, and the reference gas outlet interface 104 is connected to the reference outlet end 22.

[0043] Further, the sample outlet end 12 and the reference outlet end 22 are both provided with an outlet valve 205 for controlling the outlet of the sample outlet end 12 and the reference outlet end 22.

[0044] In combination with FIGS. 1 to 4, the working principle of the device is as follows:

[0045] Fast sample replacement:

[0046] After starting the device, open the gas inlet valve 201, filter 202, pressure regulating valve 203, adjustable flow meter 204, and gas outlet valve 205 on the first pretreatment pipeline corresponding to the sample gas path 1. The fluorine gas sample enters the pretreatment device 200 through the reference gas inlet end 21, and the necessary pretreatment steps are performed. After the pretreatment is completed, the sample gas quickly enters the gas inlet pipeline 305 and directly flows into the sample flow cell 300; the reference gas enters the second pretreatment pipeline in the same way.

[0047] Wait for a period of time until the sample flow cell 300 is filled with newly replaced fluorine gas sample and reference gas, and then start the sample detection.

[0048] Continue sample detection:

[0049] The temperature sensor 302 and pressure sensor 303 monitor and adjust the temperature and pressure in the sample flow cell 300 in real time, ensuring that they are within the set range. When the temperature and pressure reach the set value, the light source inside the detection device 100 starts to work, emitting a light beam of a specific wavelength. The light beam passes through the visible window sheet 304 at both ends of the sample flow cell 300 and interacts with the sample gas.

[0050] The light source inside the detection device 100 emits a light beam of a specified wavelength, which passes through the visible window sheet 304 at both ends of the sample flow cell 300. The detection device 100 converts the received light signal into an electrical signal and amplifies it. The amplified electrical signal enters the signal processing unit, which calculates the content of fluorine gas using a specific algorithm and displays the final result on the control computer 4. The result can also be transmitted to the designated system through various signal transmission methods.

[0051] During the entire detection process, the system will continuously detect the sample and update the results in real time as needed. This continuous monitoring method ensures the accuracy and real-time nature of the fluorine gas content.

[0052] The technical features of the above embodiments can be combined in any way. To make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combination of the technical features does not exist, it should be considered as within the scope of the present disclosure. When the technical features in different embodiments are embodied in the same figure, it can be considered that the figure also discloses the combination of the embodiments involved.

[0053] The above embodiments only express several implementation ways of the present application, and the description is more specific and detailed, but it should not be considered as a limitation on the scope of the patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, some modifications and improvements can be made, which are within the scope of the present application.

Claims

1. A real-time fluorine content detection and analysis system, characterized in that, include: The sample gas path (1) has a sample gas inlet end (11) and a sample gas outlet end (12) for the inlet and outlet of sample gas. The reference gas path (2) has a reference gas inlet end (21) and a reference gas outlet end (22) for the inlet and outlet of reference gas; A pretreatment device (200) is connected to the sample inlet (11) and the reference inlet (21) respectively; The detection device (100) is connected to the pretreatment device (200) for detecting the concentration of fluorine gas, and is connected to the sample outlet (12) and the reference outlet (22). The PLC controller (3) is used to control the inlet and outlet of the sample gas path (1) and the reference gas path (2); A control computer (4) is used to calculate and display the concentration of fluorine gas detected by the detection device (100).

2. The real-time fluorine content detection and analysis system according to claim 1, characterized in that, The detection device (100) includes a sample flow cell (300), which includes a hollow tube (301), a viewing window (304), an air inlet pipe (305), and an air outlet pipe (306). The viewing window (304) is distributed at both ends of the hollow tube (301) and closes the hollow tube (301). One end of the air inlet pipe (305) and the air outlet pipe (306) are connected to the interior of the hollow tube (301).

3. The real-time fluorine content detection and analysis system according to claim 2, characterized in that, The sample flow cell also includes a temperature sensor (302) and a pressure sensor (303). The temperature sensor (302) is installed on the side of the hollow tube (301) near the surface of the inlet pipe (305), and the pressure sensor (303) is installed on the side of the hollow tube (301) near the surface of the outlet pipe (306).

4. The real-time fluorine content detection and analysis system according to claim 1, characterized in that, The pretreatment device (200) has a first pretreatment pipeline, which includes an air inlet valve (201), a filter (202), a pressure regulating valve (203), and an adjustable flow meter (204) connected in sequence. The air inlet valve (201) is connected to the sample air inlet (11), and the adjustable flow meter (204) is connected to the detection device (100).

5. The real-time fluorine content detection and analysis system according to claim 4, characterized in that, The pretreatment device (200) also has a second pretreatment pipeline, which has the same structure as the first pretreatment pipeline. One end of the second pretreatment pipeline is connected to the reference air inlet (21), and the other end is connected to the detection device (100).

6. The real-time fluorine content detection and analysis system according to claim 5, characterized in that, The detection device (100) is equipped with a sample gas inlet port (101), a reference gas inlet port (102), a sample gas outlet port (103), and a reference gas outlet port (104). The sample gas inlet port (101) and the reference gas inlet port (102) are respectively connected to the corresponding pretreatment pipelines. The sample gas outlet port (103) is connected to the sample outlet end (12), and the reference gas outlet port (104) is connected to the reference outlet end (22).

7. The real-time fluorine content detection and analysis system according to claim 6, characterized in that, Both the sample outlet (12) and the reference outlet (22) are equipped with outlet valves (205) to control the outlet of the sample outlet (12) and the reference outlet (22).

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