Sealing system, bearing device, sputtering device and method

Abstract

According to various embodiments, a sealing system (100) has: a housing portion (102), through which a receiving opening (102o) for receiving a shaft passes along a direction (101); two annular seals (202, 204), which are arranged one behind the other along the direction (101), are located in the receiving opening (102o) and between which a cavity (212) is formed; an inlet channel (210a) and an outlet channel (210b), which are formed in the housing portion (102) and which are fluidically coupled to one another and to the cavity (212).

Description

[0001] Description

[0002] Sealing system, bearing device, sputtering device and method

[0003] Various embodiments relate to a sealing system, a bearing device, a sputtering device and a method.

[0004] In general, a substrate can be treated (processed) in a vacuum, for example by coating, so that its chemical and / or physical properties can be modified. Various coating processes can be used to coat a substrate, of which sputtering (also known as sputter deposition) is an established example of physical vapor deposition (PVD).

[0005] Sputtering involves ionizing a plasma-forming gas using a cathode (also known as a magnetron cathode). The resulting plasma then atomizes the material to be deposited (target material). This atomized target material can subsequently be directed onto a substrate, where it deposits and forms a layer. Sputtering can be used to deposit, for example, one or more layers onto a substrate. A so-called end block is often used to hold and supply the tubular cathode.

[0006] Examples of typical requirements for an end block include: small footprint, long service life, the ability to transfer as many media as possible, including cooling water, electrical power, and mechanical power, to the target, and low cost. Meeting these requirements is subject to limitations, so compromises are usually necessary. It has been clearly demonstrated that sealing the rotary union in the end block is generally complex, costly, and inadequate, with seal failure often being detected only at a late stage.

[0007] Among other things, sealing fluids (e.g., cooling water) in a rotary union is generally very complex and can only be achieved with complete units available on the supplier market. It should be noted that a ring seal as the sealing stage of a rotary union is designed either for high-pressure applications (e.g., hydraulics and / or a pressure differential up to approximately 120 bar) or for applications with a pressure differential below 1 bar. However, for the intermediate pressure differential, e.g., in a range of approximately 1 bar to approximately 10 bar (e.g., approximately 2 to 6 bar in an end block), there are hardly any suitable seals available.

[0008] Therefore, to minimize risk, the rotary feedthrough features a first sealing stage between vacuum and atmosphere and a second sealing stage exposed to the fluid. This second sealing stage is separated from the vacuum (e.g., the process area) by the first and can thus be implemented using standard components. However, this concept is more difficult in the case of the end block due to limited installation space, high cost pressures, and stringent service life requirements. Therefore, a cost-effective, low-leakage, rotating fluid seal is generally preferred.

[0009] According to various embodiments, it has been recognized that greater flexibility in fulfilling these requirements can be provided through design. In this regard, this document focuses in particular on an end block as a component of a bearing device, whereby it can be understood that the description provided here can apply to any other type of bearing device in which a seal of fluids is created between a stationary component and a rotating component (then more generally also referred to as a rotary feedthrough), for example, for a cooled lock in a conveyor system, for a cooled transport roller in an inline system, etc.

[0010] The following are various examples that refer to what has been described previously and depicted in the figures.

[0011] Example 1 is set up according to one of the attached claims.

[0012] Example 2 (e.g., a sealing system) is set up according to Example 1 and / or comprises a sealing system comprising: a housing section (e.g., housing insert) which is penetrated along one direction (e.g., reference direction) by a receiving opening for receiving a shaft; several (e.g., two or more) ring seals arranged one behind the other along the direction, which are arranged in the receiving opening, of which a (e.g., annular) cavity (also referred to as an intermediate space), e.g., an annular gap, is formed between two (e.g., immediately adjacent) ring seals; an inlet channel (e.g., ventilation channel) and an outlet channel (e.g., vent channel) which are formed in the housing section and which are fluidly coupled to each other and to the cavity.

[0013] Example 3 is configured according to Example 1 or 2, further comprising: a connecting channel (e.g., an overflow channel) which fluidly couples the cavity to the inlet channel and / or the outlet channel, wherein the connecting channel preferably extends from the cavity (e.g., an annular gap) and / or transversely to the direction. Example 4 is configured according to Example 3, wherein the connecting channel opens into the cavity; and / or wherein the outlet channel and the inlet channel open into the connecting channel (e.g., from opposite sides of the connecting channel).

[0014] Example 5 is set up according to one of Examples 1 to 4, and provides a rotary feedthrough.

[0015] Example 6 is set up according to one of Examples 1 to 5, wherein the inlet channel and the outlet channel continue each other, and / or extend along a (e.g. curved) path which, for example, runs in a plane that is perpendicular to the direction.

[0016] Example 7 is set up according to Example 1, wherein the inlet channel and the outlet channel are fluidly coupled to each other by means of the cavity.

[0017] Example 8 is set up according to one of Examples 1 to 7, wherein the cavity is arranged between a first section of the inlet channel and a second section of the outlet channel.

[0018] Example 9 is set up according to one of Examples 1 to 8, wherein the inlet channel and / or the outlet channel run along a (e.g. curved) path which preferably runs in a plane that is transverse to the direction.

[0019] Example 10 is configured according to one of Examples 1 to 9, wherein the inlet channel and / or the outlet channel are provided by means of a (e.g., partially circumferential) groove (also referred to as a channel groove), which is preferably formed on an outer surface of the housing section; wherein the housing section (e.g., its outer surface) preferably has two sealing surfaces which surround the receiving opening along a closed path, between which the channel groove is arranged. For example, each of the sealing surfaces can be arranged in a groove (then also referred to as a sealing groove) in which, for example, a sealing ring can be received or accommodated.

[0020] Example 11 is set up according to one of Examples 1 to 10, wherein the housing section has a groove (also called a receiving groove) for each of the two ring seals in which the ring seal is arranged.

[0021] Example 12 is set up according to one of Examples 1 to 11, wherein one or more than one (e.g. each) ring seal of the two ring seals has a sealing lip.

[0022] Example 13 is set up according to one of Examples 1 to 12, further comprising: an inlet connection (e.g. first hose connection) into which the inlet channel opens; and / or an outlet connection (e.g. second hose connection) into which the outlet channel opens.

[0023] Example 14 is set up according to Example 13, wherein the receiving opening is arranged between the inlet port and the connecting channel; and / or wherein the receiving opening is arranged between the outlet port and the connecting channel.

[0024] Example 15 is configured according to one of Examples 1 to 14, further comprising one or more than one actuator which is configured, e.g., to be actuated (e.g., controlled) in response to it, to influence a fluid exchange via the inlet channel and / or outlet channel, e.g., (e.g., in a first state) to block the fluid exchange and / or (e.g., brought into a second state) to release the fluid exchange.

[0025] Example 16 is configured according to Example 15, a control device which is configured to control one or more than one actuator according to one or more than one of the following operating modes (also referred to as multiple operating modes), and is, for example, configured to switch between two of the operating modes, wherein the operating modes comprise: a first operating mode (also referred to as the standby mode) in which the outlet channel and the inlet channel are vented by means of fluid exchange, e.g., exposed to the hydrostatic pressure of the Earth's atmosphere; a second operating mode (also referred to as the flow mode) in which a fluid flow is generated from the inlet channel to the outlet channel by means of fluid exchange; a third operating mode (also referred to as the suction mode) in which the outlet channel and the inlet channel are evacuated by means of fluid exchange, e.g.,are subject to a negative pressure; wherein the control device is preferably configured to determine one of the several operating modes as the target operating mode and to control one or more actuators according to the target operating mode; and / or to switch between two of the several operating modes according to an operating scheme and / or according to the target operating mode.

[0026] Example 17 is configured according to Example 15 or 16, comprising one or more actuators: a first actuator, which is coupled to the inlet port and / or configured, e.g., in response to being actuated (e.g., controlled), to influence (e.g., stimulate) fluid exchange via the inlet channel (e.g., into the cavity and / or inlet channel), e.g., (e.g., in a first state) to block the fluid exchange and / or (e.g., brought into a second state) to enable the fluid exchange; and / or a second actuator, which is coupled to the outlet port and / or configured, e.g., in response to being actuated (e.g., controlled), to influence (e.g., stimulate) fluid exchange via the outlet channel (e.g., out of the cavity and / or the outlet channel), e.g., (e.g., in a first state) to block the fluid exchange and / or (e.g., brought into a second state) to enable the fluid exchange.(brought into a second state) to release the fluid exchange.

[0027] Example 18 is set up according to Example 17, wherein the second actuator has a vacuum source which is set up to extract fluid from the outlet channel (e.g. the cavity by means of the outlet channel).

[0028] Example 19 is set up according to Example 18, wherein the vacuum source has a Venturi nozzle and / or is supplied with compressed air; or wherein the vacuum source has a vacuum pump. This simplifies the design.

[0029] Example 20 is configured according to Example 19, wherein the second actuator has a valve configured to influence the fluid flow through the Venturi nozzle in response to being actuated (e.g., controlled), e.g., blocking the fluid flow (e.g., in a first state) and / or releasing the fluid flow (e.g., when brought into a second state). This simplifies the design.

[0030] Example 21 is configured according to one of Examples 1 to 20, wherein the housing section has a partition which separates the inlet channel from the outlet channel (e.g. their end sections from each other) and / or is located on a side of the cavity opposite the connecting channel.

[0031] Example 22 is configured according to one of Examples 1 to 21, wherein the receiving opening is arranged between a section of the outlet channel and a section of the inlet channel; and / or wherein the partition is arranged between a section of the outlet channel and a section of the inlet channel; and / or wherein the partition extends away from the receiving opening.

[0032] Example 23 is set up according to one of Examples 1 to 22, further comprising the shaft which is received in the receiving opening and, for example, rests against each of the ring seals.

[0033] Example 24 is set up according to Example 23, wherein the shaft is tubular and / or penetrated along the direction by a through-opening (also referred to as the shaft interior).

[0034] Example 25 is set up according to one of Examples 1 to 24, wherein the inlet channel and the outlet channel continue to each other to form a fluid line, into which the connecting channel preferably opens and / or which extends around the receiving opening.

[0035] Example 26 is a bearing device (e.g., its end block) comprising: the sealing system according to one of Examples 1 to 25, a bearing housing which has a receiving space (also referred to as the housing interior) for receiving the housing section; preferably a rotary bearing which is arranged along the direction behind the housing section and provides an axis of rotation parallel to the direction which extends through the receiving opening.

[0036] Example 27 is set up according to Example 26, wherein the inlet port and / or the outlet port are provided by means of or attached to the additional housing section.

[0037] Example 28 is set up according to Example 26 or 27, further comprising: one or more fluid lines which open into the receiving space.

[0038] Example 29 is configured according to one of Examples 26 to 28, wherein the shaft is rotatably mounted by means of the rotary bearing. Example 30 is configured according to one of Examples 26 to 29, further comprising a mounting device which is attached to an end face of the shaft.

[0039] Example 31 is set up according to one of Examples 26 to 30, further comprising a support (also referred to as a magnet support, e.g. a tube) which is rigidly coupled to the bearing housing and extends along the direction into the shaft.

[0040] Example 32 is configured according to one of Examples 26 to 31, which has an end block or is configured as an end block (where the end block, for example, has the housing section), and preferably further comprises a sputtering target which is rotatably mounted by means of the shaft and / or coupled to the shaft, preferably by means of the mounting device.

[0041] Example 33 is configured according to one of Examples 26 to 32, further comprising a sliding contact which rests against the shaft; and / or further comprising a drive train which is configured to transmit a torque to the shaft.

[0042] Example 34 is a sputtering device which has the bearing device according to one of Examples 26 to 33; and preferably further has a sputtering target which is held by means of the bearing device (e.g. the shaft), and / or is preferably arranged in a vacuum chamber.

[0043] Example 35 is a method (e.g., for operating a sputtering device, for example, set up according to Example 34) comprising: transporting a liquid (e.g., having a liquid pressure) through a through-opening of a rotating shaft (e.g., of an end block of the sputtering device), against which two ring seals arranged one behind the other (e.g., along an axis of rotation of the shaft and / or directly), between which an (annular) cavity is formed, of which a first ring seal is exposed to the liquid and / or a pressure difference (e.g., between the cavity and the liquid and / or of more than 2 bar) and / or of which a second ring seal is exposed to a gas (e.g., under vacuum); transporting a portion of the liquid (e.g., having a liquid pressure), which (e.g.,The fluid passes through the first ring seal and / or a gap between the ring seal and the shaft into the cavity, and through an outlet channel by means of a fluid flow which is supplied to the outlet channel by means of an inlet channel, wherein the outlet channel and the inlet channel are fluidly coupled to each other and to the cavity. Example 36 is set up according to Example 35, wherein the fluid is transported through a sputtering target, e.g. by means of the through-hole.

[0044] Example 37 is set up according to one of Examples 1 to 36, further comprising: a drive device which is set up to transmit a torque to the shaft (e.g. by means of the drive train).

[0045] Example 38 is set up according to one of Examples 1 to 37, further comprising: a mounting holder which includes the shaft and the mounting device.

[0046] Example 39 is set up according to one of Examples 1 to 38, further comprising: a target which is coupled to the shaft, e.g. by means of the mounting device.

[0047] Example 40 is configured according to any one of Examples 1 to 39, further comprising: a magnetic system which is held by means of the end block (e.g., within the target). Example 41 (e.g., an end block) is configured according to any one of Examples 1 to 40, comprising, among other things: a housing comprising the receiving space; a rotary bearing which is arranged in the receiving space and provides an axis of rotation along which the receiving space is exposed on a first side (e.g., front) of the housing; a mounting holder rotatably mounted in the receiving space by means of the rotary bearing; preferably a housing insert which is configured to be inserted into the receiving space (e.g., by a sideways movement); optionally, an electrical sliding contact, wherein the sliding contact is configured to electrically and / or physically contact a surface section of the mounting holder facing either the first side or the opposite side.

[0048] Example 42 is configured according to one of Examples 1 to 41, further comprising: a fluid line extending along the axis of rotation into a through-opening of the mounting holder, preferably through the through-opening of the mounting holder, and / or through the sliding contact (e.g., a through-opening therein), wherein preferably an area in which the sliding contact is arranged is fluid-conductingly coupled to the fluid line and / or a fluid channel of the cover.

[0049] Example 43 is configured according to Example 42, further comprising: a fluid connection and one or more fluid channels which fluidly couple the fluid connection to the fluid line and / or open into the receiving chamber. This improves fluid exchange, e.g., the exchange of a cooling fluid (e.g., exhibiting fluid pressure).

[0050] Example 44 is configured according to one of Examples 1 to 43 and further includes an electrical connection terminal and an electrical cable that electrically couples the electrical connection terminal to the sliding contact. This facilitates assembly.

[0051] Example 45 is set up according to one of Examples 1 to 44, wherein each of the ring seals arranged one after the other along the direction provides a sealing stage.

[0052] Example 46 is set up according to one of Examples 1 to 45, wherein one or more than one of the ring seals has a sealing lip (then also referred to as a ring lip seal).

[0053] Example 47 (for example, a vacuum arrangement) is set up according to one of Examples 1 to 46, further comprising: a vacuum chamber in which the housing section and / or the shaft are arranged.

[0054] Example 48 is configured according to any one of Examples 1 to 47, wherein the housing section has or consists of a sleeve; and / or wherein the housing section is annular.

[0055] Example 49 is set up according to one of Examples 1 to 48, wherein the housing section provides a hub ring.

[0056] Example 50 is configured according to one of Examples 1 to 49, further comprising a filter (e.g., a particulate filter) which is fluidly coupled to the cavity via the inlet channel, wherein the filter is fluidly coupled to the inlet channel, for example, by means of the second actuator (e.g., its valve). The filter prevents contamination of the inlet channel.

[0057] Example 51 is the use of a conversion process for forming the device (e.g., sealing system, bearing device, and / or sputtering device) according to any one of Examples 1 to 50, wherein the conversion process comprises modifying a precursor of the device (e.g., the sputtering device), preferably by adding the inlet channel to an end block of the sputtering device which has the outlet channel, e.g., by adding the sealing system, which has the outlet channel and the inlet channel, to the end block. Example 52 is set up according to any one of Examples 1 to 51, wherein the inlet channel and the outlet channel form sections of an overflow line which passes through the cavity and / or the connecting channel.

[0058] Example 53 is set up according to one of Examples 1 to 52, wherein the inlet channel and the outlet channel extend past the cavity.

[0059] Example 54 is configured according to one of Examples 1 to 53, wherein the housing section has a first area and a second area between which the receiving opening is arranged (and which, for example, are arranged on opposite sides of the cavity and / or adjoin it), wherein the inlet channel and / or the outlet channel are formed in the first area and in the second area.

[0060] Example 55 is set up according to one of Examples 1 to 54, wherein the cavity is continuous and / or annular.

[0061] Example 56 is set up according to one of Examples 1 to 55, wherein the ring seals are immediately adjacent to each other.

[0062] Example 57 is configured according to one of Examples 1 to 56, wherein the housing section has a (e.g. annular) projection that is arranged between the ring seals and / or spatially separates them from each other, wherein the ring seals abut the projection and / or wherein the connecting channel adjoins or extends through the projection.

[0063] Example 58 is set up according to one of Examples 1 to 57, wherein the housing section is a single piece.

[0064] Example 59 is configured according to one of Examples 1 to 58, wherein the housing section has two sealing surfaces (e.g., facing away from the receiving opening) which surround the receiving opening along a closed path and between which at least one section (e.g., end section) of the inlet channel and / or the outlet channel is exposed. Preferably, a region of the housing section can be arranged between the two sealing surfaces in which at least the section of the inlet channel and / or the outlet channel is formed. For example, each of the sealing surfaces can be arranged in a groove (then also referred to as a sealing groove) in which, for example, a sealing ring can be received or accommodated.

[0065] Example 60 is configured according to one of Examples 1 to 59, wherein, where the inlet channel and / or the outlet channel open into the cavity, a partition wall is preferably arranged into the cavity, which is preferably arranged between a first section of the cavity into which the inlet channel opens and a second section of the cavity into which the outlet channel opens, and / or which preferably has a distance from the inlet channel and / or outlet channel that is less than a distance of the inlet channel from the outlet channel.

[0066] Example 61 is configured according to one of Examples 1 to 60, wherein the inlet channel and the outlet channel open into the connecting channel; and / or wherein the inlet channel and the outlet channel are spaced apart from each other at a distance which is less than an extent (e.g. diameter) of the receiving opening, wherein the extent of the receiving opening is preferably transverse to the direction (along which the housing section is penetrated by the receiving opening).

[0067] Example 62 is set up according to one of Examples 1 to 61, wherein the inlet channel and the outlet channel are spaced away from the cavity, e.g. if they open into the connecting channel and / or are connected to the cavity by means of the connecting channel.

[0068] Example 63 is set up according to one of Examples 1 to 62, wherein the housing section is annular.

[0069] Example 64 describes the use of an outlet channel (provided, for example, according to one of Examples 1 to 62) for transporting (e.g., portions of) a liquid that enters a cavity between two ring seals bearing against a rotating shaft, through the outlet channel by means of a gas flow supplied to the outlet channel via an inlet channel and / or by means of a vacuum that facilitates the gas flow. The rotating shaft and / or at least one of the two ring seals can preferably be exposed to the liquid. Preferably, the shaft is also exposed to the liquid flow. Alternatively or additionally, the other of the two ring seals can be exposed to atmospheric pressure.

[0070] They show

[0071] Figure 1 A and B show a sealing system according to different embodiments in different schematic views;

[0072] Figures 2A to D show a housing section according to different embodiments in a schematic diagram;

[0073] Figures 3A and B show a sleeve as a housing section according to different embodiments in a schematic perspective view;

[0074] Figure 4 shows an end block according to different embodiments in a schematic cross-sectional view;

[0075] Figure 5 shows an end block according to different embodiments in different schematic views; and Figure 6 shows a bearing device according to different embodiments in a schematic coupling diagram.

[0076] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted restrictively, and the scope of protection of the present invention is defined by the appended claims. Within the context of this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0077] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect. Several elements can, for example, be coupled to one another along an interaction chain along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluid-conducting coupled). For example, two coupled elements can exchange an interaction with each other, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) can feature that they are fluid-conducting coupled to one another. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g.,by means of direct physical contact. A coupling can be designed to transmit a mechanical interaction (e.g. force, torque, etc.).

[0078] According to various embodiments, a storage device can be configured to hold (e.g., guide and / or position) one or more components. For example, the storage device can have one or more bearings per component for holding (e.g., guide and / or position) the component. Each bearing of the storage device can be configured to provide the component with one or more degrees of freedom (e.g., translational or rotational) according to which the component can be moved. Examples of bearings include: radial bearings, thrust bearings, radial-axial bearings, and linear bearings (also called linear guides). Each linear bearing can, for example, provide the component with exactly one translational degree of freedom.

[0079] In this context, an assembly device is understood to be a device designed for assembly, for example, for mounting on a complementary assembly device (also referred to as a counter-assembly device). During assembly, several components are connected to one another (e.g., rigidly) using their respective assembly devices. Assembly can be (e.g., exclusively) positive-locking and / or detachable. The assembly device preferably has a (e.g., planar) mounting surface which, during assembly, rests against a complementary mounting surface of the counter-assembly device. The assembly device can, for example, have one or more (e.g., integral) mounting profiles (e.g.,

[0080] The mounting device must have a positive-locking profile, which is provided, for example, by means of a feature (e.g., a projection or recess) on the mounting fixture. Examples of the mounting profile include: a thread, a groove (e.g., for keyway mounting and / or dovetail groove), a locking lug, a bayonet fitting, a pin, etc. Examples of the feature include: an opening (e.g., a through-hole and / or threaded hole), a bolt (e.g., a threaded bolt). An exemplary implementation of the mounting fixture is configured as a flange, e.g., a vacuum flange. The flange can be configured for rigid and / or detachable connection to another flange. An exemplary implementation of the mounting fixture is configured as a coupling device. A coupling device is configured for coupling two (e.g., rotatably mounted) components (e.g.,Shafts), one or more of which are rotatably mounted, are connected to each other, for example, by means of a rigid, elastic, movable, and / or detachable connection between the two components. The coupling device is specifically designed to transmit a torque between the two components, for example, by setting them into a rotary motion. An exemplary implementation of the coupling device may include, for example, a clamping device, teeth, or similar elements for connecting the two components.

[0081] According to various embodiments, the vacuum chamber can be provided by means of a chamber housing in which one or more chambers are provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g., a vacuum pump arrangement (e.g., gas-conducting), to provide a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure in the evacuated state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can enable the removal of some of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be configured as a vacuum chamber housing.A coating chamber can be set up as a vacuum chamber.

[0082] The term "vacuum pressure" here refers to a negative pressure in the vacuum range (i.e., a pressure of less than 0.3 bar), e.g., a pressure in a range of approximately 10 mbar to approximately 1 mbar (in other words, rough vacuum) can be provided, or less, e.g., a pressure in a range of approximately 1 mbar to approximately 10 3 mbar (in other words, fine vacuum) or less, e.g., a pressure in the range of approximately 10 3 mbar to approximately 10 7 mbar (in other words, high vacuum) or less, e.g., a pressure of less than high vacuum, e.g., less than approximately 10 7 mbar.

[0083] A drive device can be understood here as a converter designed to transform electrical energy into mechanical energy. A drive device can, for example, comprise an electric motor (e.g., with electrical coils). A drive device can, for example, comprise a compressor and a piston coupled to it. A drive device can, for example, comprise one or more piezoelectric elements. For example, the drive device can be configured to output the mechanical energy by means of a torque or a rotary motion.

[0084] Regarding the layer-forming process, this section uses sputtering as an example. The term "sputtering" refers to the atomization of a material (also called coating material or target material) using a plasma. The atomized components of the coating material (e.g., individual atoms and / or ions) are separated from one another and can, for example, be deposited elsewhere to form a layer. Sputtering can be performed using a sputtering device, which can have one or more magnet systems (then also called a magnetron). The coating material can be provided by a sputtering target (also referred to simply as a target), which can be, for example, tubular (then also called a tube target) or plate-shaped (then also called a plate target or planar target).To generate the plasma, a voltage (also called sputtering voltage) can be applied to the sputtering target (also referred to simply as the target), so that the sputtering target operates as the cathode. Even though the sputtering voltage is an alternating voltage, the term "cathode" is often retained.

[0085] For sputtering, the sputtering target can be arranged in a vacuum processing chamber (also referred to simply as a vacuum chamber), allowing sputtering to take place in a vacuum and / or using a plasma. The environmental conditions (process parameters) within the vacuum processing chamber (e.g., process pressure, temperature, gas composition, etc.) can be set or controlled during sputtering. For example, a working gas, referred to as the plasma-forming gas or plasma-forming gas mixture, can be provided within the vacuum processing chamber. The vacuum processing chamber can be, for example, airtight, dustproof, and / or vacuum-tight, so that a gas atmosphere with a predefined composition (also referred to as the working atmosphere) or a predefined pressure (also referred to as the working pressure or process pressure) can be provided within the vacuum processing chamber (e.g.,(according to a setpoint). The vacuum chamber can be set up in such a way that the vacuum pressure can be provided within it, e.g. a pressure in the range of approximately 10. 3 mbar to approximately 10 7 mbar.

[0086] A plasma can be generated using a so-called working gas (also known as a plasma-forming gas). Depending on the specific design, the working gas can be a gaseous material that is unreactive, meaning it participates in few or no chemical reactions. A working gas can be defined by, or adapted to, the target material used. For example, a working gas can be a gas or a gas mixture that does not react with the target material to form a solid or is even inert to it. The working gas can be, for example, a noble gas (e.g., helium, neon, argon, krypton, xenon, radon) or several noble gases. The plasma can be generated from the working gas, which essentially causes the target material to atomize.If a reactive gas is used, it may exhibit a higher chemical reactivity than the working gas, for example, with respect to the target material. In other words, the atomized target material may react faster with the reactive gas (if present), forming more reaction product per unit of time, than with the working gas (if it reacts chemically with the working gas at all). The reactive gas and the working gas can be supplied together or separately as a process gas (e.g., as a gas mixture), for example, via the gas supply device.

[0087] It can be understood that what is described here for sputtering can apply analogously to any other coating process, e.g., physical vapor deposition. In general, physical vapor deposition (e.g., sputtering) involves the transfer of the chemical composition of the target or coating material into the layer to be formed. To effectively atomize (also called sputtering) the target material, it can be rotated around the magnetic system. For this purpose, the target material can be arranged in a tubular form, a so-called tube target, with the magnetic system located inside the tube target, allowing the tube target to rotate around the magnetic system. The tube target can, for example, consist of a tube on which the target material is attached as a layer to an outer surface of the tube, partially covering the outer surface.The pipe target can also be formed from the target material.

[0088] The pipe target can be rotatably mounted at opposite end sections by means of so-called end blocks, whereby the end blocks can provide a supply to the pipe target (e.g. with electrical power and cooling fluid).

[0089] Among other things, reference is made here to a storage device which may have one or more than one end block for storing a pipe target.

[0090] If the bearing device has two end blocks, one of the end blocks (the so-called drive end block) can have a drive train coupled to a drive device (also called a target drive) for rotating the pipe target; and the other end block (the so-called media end block) can have a fluid line for supplying and removing cooling fluid (e.g., a water-based mixture) that can be guided through the target. The two end blocks are mounted, for example, suspended from a chamber ceiling (i.e., a chamber cover).

[0091] However, a single end block (also called a compact end block) can also be used, which incorporates the drive train and the fluid line, thus providing the combined functions of a drive end block and a media end block. The side of the pipe target opposite the compact end block can, for example, cantilever freely (i.e., hang freely), a configuration known as cantilever. In a cantilever configuration, the compact end block can be mounted to a side wall of the vacuum chamber through which the axis of rotation of the pipe target extends. Alternatively, the side of the pipe target opposite the compact end block can be supported by a bearing block (visually described as a counter-bearing), a configuration known as a bearing block. The bearing block can also be provided by a passive end block, i.e., an end block that neither exchanges energy nor material with the pipe target but merely supports it.

[0092] The bearing device can generally (e.g., in the case of a tube target and a plate target) have a support (also called a magnetic support) designed to hold the magnetic system. The magnetic support can be hollow (e.g., a tube) and fluidically coupled at its end face to an end block that holds the magnetic support (e.g., via its fluid line), allowing the cooling fluid to exchange with the end block. On the side opposite the end block, the tube can be closed at the end face and have a lateral opening through which the cooling fluid can pass. The magnetic support can be round or polygonal, e.g., a round tube or a square tube. The magnetic support and / or the magnetic system can have a length (extent along the axis of rotation) ranging from approximately 1 m to approximately 6 m, e.g., from approximately 2 m to approximately 5 m.According to various embodiments, sealing a gap can be understood as sealing a first region (e.g., an atmospheric region, i.e., a region at atmospheric pressure) at or within the gap against a second region (e.g., a vacuum region, i.e., a vacuum region). The first and second regions may differ in pressure, i.e., they may have a pressure difference. By means of sealing, mass transfer between the first and second regions may be disrupted or disrupted, e.g., at least partially suppressed. The vacuum region may be a region in which a vacuum is generated and / or can be generated. The vacuum region may, for example, comprise several vacuum sub-regions that are interconnected by vacuum technology and may be sealed against an external environment (e.g., the exterior of the vacuum chamber).For example, the vacuum area (or at least a vacuum sub-area) can be defined, at least partially, by a chamber housing of the vacuum chamber, i.e., be limited externally.

[0093] Sealing a gap (e.g., against a vacuum or vacuum region) can be understood as reducing, limiting, or preventing mass transfer or exchange (e.g., gas exchange) through the gap by means of the sealing structure. For example, mass transfer into a vacuum can be reduced, limited, or prevented.

[0094] In this context, a ring seal is understood to be a seal that extends along a closed path (also referred to as a ring) around a region (e.g., a cavity). The ring seal can have one or more sealing lips, which extend towards or away from the region.

[0095] A C-groove is understood to be a groove that extends along a C-shaped path, meaning it is not closed in itself. For example, the C-groove can have two opposing end faces that border a partition and are separated by a distance smaller than the dimensions (e.g., diameter) of the receiving opening.

[0096] In this context, overpressure is defined as a pressure greater than 1 bar (e.g., 2 bar), for example, in a range of approximately 1 bar to approximately 10 bar (e.g., approximately 2 to 6 bar). Atmospheric pressure is defined as the hydrostatic pressure of the atmosphere at the location of the object (e.g., device and / or process).

[0097] Fig. 1A illustrates a sealing system 100 according to various embodiments 100a in a schematic side view or cross-sectional view (preferably according to Example 2), showing the reference direction 101 and a direction 105 perpendicular to it (which, for example, can be the direction of gravity during operation). Fig. 1B illustrates the sealing system in a cross-sectional view 100b looking along the reference direction 101.

[0098] An exemplary implementation of the multiple ring seals has two immediately adjacent ring seals 202, 204, between which an annular space 212 (then also referred to as an annular gap) is formed in the receiving opening 102o. It can be understood that what is described here can apply analogously to more than two ring seals and / or more than one annular gap 212. For example, three ring seals 202, 204 arranged one behind the other can provide two annular gaps. An exemplary implementation (preferably according to) the housing section 102 has or consists of a sleeve (or at least a tubular base body) which can be inserted into an end-block housing (then also referred to as a housing insert). Alternatively or additionally, the housing section (preferably according to Example 3) has a connecting channel 206 (for example, an overflow channel) which opens into the annular gap 212.On one side opposite the space 212, the connecting channel 206 leads into a section 208, into which the outlet channel 210 and the inlet channel also open.

[0099] An exemplary implementation of the outlet channel 210a and / or the inlet channel 210b is provided by means of a groove (also referred to as a channel groove) formed in the housing section 102. This simplifies manufacturing.

[0100] It can be understood that the outlet channel and / or the inlet channel do not necessarily have to be provided by means of a channel groove, but can also be provided, for example, by means of a bore. Alternatively or additionally, the connecting channel 206 can extend through the housing section 102, but this is not necessarily required. This is explained below.

[0101] Figures 2A to 2D each illustrate the housing section according to different embodiments 200a to 200d in a schematic diagram with a view along the reference direction, preferably arranged according to embodiment 100a, which differ from each other in the implementation of one or more than one of the channels (outlet channel, inlet channel and / or connecting channel).

[0102] According to embodiment 200a, the housing section 102 has a channel groove that provides the outlet channel 210a, the inlet channel 210b, and the section 208 between them. The channel groove surrounds the receiving opening 102o in a C-shape (then also referred to as a C-groove), for example, within an angular range of approximately 180° (e.g., 270°) to approximately 350° (e.g., 300°). This simplifies manufacturing. Furthermore, the housing section 102 has a bore that provides the connecting channel 206 and opens into the receiving opening 102o. The groove can adjoin a partition 220 that separates the outlet channel 210a and the inlet channel 210b from each other. Alternatively or additionally, the partition 220 can be a monolithic part of the housing section 102 and / or be located on a side of the receiving opening 102o opposite the connecting channel 206. The latter improves the utilization of the installation space.It can be understood that there may also be several connection channels 206.

[0103] An exemplary implementation of embodiment 200a is oriented during operation such that the connecting channel 206 extends along the direction of gravity, thus facilitating drainage. In essence, gravity supports the transport of liquid into and / or through the connecting channel 206. More generally, the connecting channel 206 can open into a section of the receiving opening 102o that faces the Earth's center during operation.

[0104] According to embodiment 200b, the housing section 102 has two bores, a first bore providing the outlet channel 210a and a second bore providing the inlet channel 210b, each bore opening into the receiving opening 102o. The bore is more cost-effective compared to the groove. In this case, it is advantageous if the partition 220 is arranged between the two ring seals 202, 204, or at least extends into the space 212. This promotes a fluid flow that circulates around the shaft. An exemplary implementation of embodiment 200b is oriented in operation such that the first bore and / or the second bore extends along the direction of gravity, which improves the utilization of the installation space.

[0105] According to embodiment 200c, the housing section 102 has several bores, a first bore providing the outlet channel 210a, a second bore providing the inlet channel 210b, and a third bore providing the connecting channel 206, each bore opening into the receiving opening 102o. The bores are more cost-effective compared to the groove. Alternatively or additionally, the partition 220 can be a monolithic part of the housing section 102 and / or be located on a side of the receiving opening 102o opposite the connecting channel 206.

[0106] An exemplary implementation of embodiment 200b is oriented in operation such that the third borehole opens into a section of the receiving opening 102o which, in operation, faces the center of the earth.

[0107] According to embodiment 200d, the housing section 102 has two pairs of C-grooves and bores adjacent to each other, each pair opening into the receiving opening 102o; a first pair providing the outlet channel 210a and a second pair the inlet channel 210b. This facilitates drainage, as a fluid flow in the outlet channel 210a must pass through the receiving opening 102o. Optionally, the outlet channel 210a and the inlet channel 210b can be adjacent to each other, forming a mesh. Fig. 3A illustrates a sleeve as housing section 102 according to various embodiments 300a (preferably according to Example 2) in a schematic perspective view. Fig. 3B illustrates the housing section 300 in a cross-sectional view 300b looking along the reference direction 101, preferably configured according to embodiments 100a and / or 200d.

[0108] The sleeve can be ring-shaped and penetrated by the receiving opening 102o. Several grooves are formed on one outer side of the sleeve 102 opposite the receiving opening 102o, arranged one behind the other along the reference direction 101, and of which:

[0109] - one or more than one first groove is c-shaped (also called C-groove), each C-groove providing an outlet channel 210a and an inlet channel 210b;

[0110] - two second grooves 302 are provided as sealing grooves for receiving a sealing ring (e.g. O-ring), between which one or more than one first groove is arranged; if several channel grooves are present, one or more than one third groove 304 is provided as a sealing groove and is arranged between each two of the several channel grooves.

[0111] Optionally, several connection channels 206 can be provided per C-slot, each of which fluidly couples the receiving opening 102o to the C-slot.

[0112] Fig. 4 illustrates an end block according to various embodiments 400, which has components of the sealing system 100 (preferably according to Example 2), in a schematic cross-sectional view from the reference direction.

[0113] An exemplary implementation of the end block comprises a bearing housing 402 (then also referred to as the end block housing) and a mounting base 410, by means of which the end block housing 402 can be mounted on a vacuum chamber housing (not shown) during operation. The mounting base 410 can be monolithically connected to the bearing housing 402 or provided separately.

[0114] An exemplary implementation of the end block housing 402 has a receiving space 402o in which the housing section 102 can be arranged during operation. The C-slot is bounded on its side opposite the receiving opening 102o by the bearing housing 402.

[0115] An exemplary implementation of the shaft 404 is arranged in the receiving opening 102o and is tubular, e.g., such that it is penetrated by a through-opening 404o. The shaft 404 can extend through each of the ring seals 202, 204, each of which bears against a lateral surface (also referred to as circumferential surface) of the shaft 404 and / or extends into a recess of the shaft.

[0116] An exemplary implementation of the sealing system 100 has an inlet port 406, into which the inlet channel opens, and an outlet port 408, into which the outlet channel opens. The inlet port 406 and the outlet port 408 can be located inside the end block housing 402, e.g., in a housing interior 402h of the end block 402, for example, an interior space of the mounting base 410. For example, the inlet port 406 and the outlet port 408 can face an opening in a chamber wall of the vacuum chamber housing (not shown) on which the end block is mounted.

[0117] Fig. 5 illustrates an end block according to various embodiments 500, which has components of the sealing system 100 (preferably according to Example 2), in a schematic cross-sectional view with a view to the axis of rotation of the shaft 404, and further detailed views 500a and 500b thereof.

[0118] An exemplary implementation of the shaft 404 is rotatably mounted by means of a rotary bearing 502 (e.g. ball bearing) about an axis of rotation 111 which is parallel to the reference direction.

[0119] An exemplary implementation of aspects of the sealing system 100 features a pre-assembled unit (also referred to as a sealing package) comprising the housing section 102 and several (e.g., two or three) annular lip seals 504, for example, two annular seals 202, 204 immediately adjacent to each other. The assembly can be inserted as a whole into a gap formed between the shaft 404 and the end block housing, so that the sealing lips of each of the several (e.g., two or three) annular lip seals 504 bear against the shaft. An annular gap 512 is arranged between each pair of immediately adjacent annular lip seals 504.

[0120] An exemplary implementation of housing section 102 has several grooves, including:

[0121] - for each ring lip seal 504 a receiving groove which is arranged on one side of the housing section 102 facing the axis of rotation 111, in which the ring lip seal 504 is arranged;

[0122] - per space 212 a c-shaped groove which provides an outlet channel 210a and an inlet channel 210b which are fluidly coupled to the space 212 (e.g. by means of a connecting channel);

[0123] - two sealing grooves 302, each sealing groove 302 being arranged on a side of the housing section 102 facing away from the axis of rotation 111 and having received a sealing ring (e.g. O-rings), between which one or more c-shaped grooves are arranged; an additional sealing groove 302, arranged between two immediately adjacent c-shaped grooves, which is located on the side of the housing section 102 facing away from the axis of rotation 111 and has received a sealing ring (e.g. O-rings).

[0124] Each of the 212 gaps in the sealing system can have one drainage system, each of which has:

[0125] - a c-shaped groove which provides an outlet channel 210a and an inlet channel 210b which are fluidly coupled to the space 212 (e.g. by means of a connecting channel 206);

[0126] - a pair of ports 512, each pair having an inlet port 406 into which the inlet channel 210b opens and an outlet port 408 into which the outlet channel 210a opens; an optional connecting channel located on a side of the shaft opposite the pair of ports 512, opening both into the c-shaped groove and into the space 212.

[0127] Each of the ring seals 504 (e.g., ring lip seals) can provide a sealing stage, for which various working examples are explained below. For ease of understanding, the sealing stages and annular gaps are numbered (from 1 to N) according to their sequence. The housing interior 402o has a first area 511 (also referred to as the fluid area, operating under positive pressure), into which, for example, the fluid line (see Example 25) and / or the shaft interior 404o open, and which adjoins sealing stage 1. The housing interior 402o has a second area 513 (also referred to as the atmospheric area, operating at atmospheric pressure), in which the rotary bearing 502 is located, and which adjoins sealing stage N (N>1).

[0128] The gauge pressure and atmospheric pressure can have a pressure difference of more than 2 bar and be separated from each other by means of the N ring seals 504. The pressure difference can be, for example, 6 bar or less.

[0129] According to working example 1, the ring seals 504 under consideration differ in their design with regard to the sealing characteristic, for example having one or more than one ring seal 1 to k designed for the separation of a pressure difference in a range from approximately 1 bar to approximately 6 bar (or 8 bar); having one or more than one ring seal k+1 to g designed for the separation of a pressure difference in a range from approximately 0 bar to approximately 1 bar, and having one or more than one optional ring seal g+1 to N designed for the separation of particles.

[0130] According to working example 2, annular gaps formed between two immediately adjacent ring seals 504 differ in the operating pressure prevailing therein (pressure during operation), e.g.

[0131] - having one or more than one annular gap 1 to k-1 in which the operating pressure is an overpressure (e.g. in a range between 1 bar and 6 bar) and / or is the pressure of a liquid (then also referred to as liquid pressure);

[0132] - having one or more than one annular gap k to g-1 in which the operating pressure is a negative pressure (e.g. in a range between 10 2 mbar and 20 mbar); having one or more than one optional annular gap g to N-1 in which the operating pressure is atmospheric pressure (e.g., approximately 1 bar). According to Working Example 3, each of the ring seals is geometrically installed, e.g.

[0133] - with sealing lip in the direction of the higher pressure; or with sealing lip in the direction of the lower pressure.

[0134] According to working example 4, one or more of the annular gaps between two adjacent ring seals are functionally used as:

[0135] - Annular gap without external connection, i.e. this area is not intended for the connection of lines for drainage, intermediate extraction or compressed air.

[0136] - Annular gap into which a drainage system empties;

[0137] - Annular gap coupled to a connection for intermediate extraction;

[0138] Annular gap coupled to a compressed air connection.

[0139] According to Working Example 5, the ring seals and annular gaps are arranged axially (i.e., along the axis of rotation 111) one behind the other, regardless of number, pressure range, and functional use. An optional exception to this is the radial arrangement of the sliding element and the sealing element 572 for particle separation. A stationary sliding element rubs against the end face of the rotating shaft; due to geometric constraints, only minimal fluid transfer through the gap is possible between the two parts.

[0140] According to working example 6, a stationary sealing element 572 is provided for particle separation, which radially surrounds the sliding element on its outer circumference. As a technical felt 572, it has semipermeable properties, allowing fluid to seep through while retaining particles. The area 514 between this element and the ring seal 1 is filled with stationary, but filtered, fluid. The pressure is equal to the gauge pressure and / or fluid pressure.

[0141] According to working example 7, ring seal 1 is designed to separate a pressure difference of 6 bar or more, e.g., 8 bar or more, but can (e.g., despite particle filtration) come into contact with particles, e.g., their sealing lip, which promotes leakage of ring seal 1. As a result of the leakage, fluid (also referred to as fluid leakage of ring seal 1) can collect in the annular gap 1. Via the inlet channel, the annular gap 1 (which is located between ring seals 1 and 2) can be exposed to atmospheric pressure.

[0142] According to working example 8, ring seal 2 separates a pressure difference of less than 1 bar and is therefore subjected to only minimal mechanical stress. This has a very beneficial effect on the remaining leakage from ring seal 2 to the gap 2 (which is located between ring seals 2 and 3).

[0143] According to working example 9, the space 2 or 3 is subjected to a pre-vacuum by means of a vacuum pump, e.g., a pressure of less than 20 mbar. This promotes the evaporation of any residual leakage from ring seal 2. The suction capacity is designed for the expected residual leakage.

[0144] According to working example 10, ring seal 3 separates the annular gap 2 from the atmospheric region adjacent to ring seal 3, in which the rotary bearing and / or the drive train (e.g., its toothed belt drive) are located, which remains dry. Fig. 6 illustrates a bearing device according to various embodiments 600 (e.g., according to example 6), which has components of the sealing system 100 (preferably according to example 2) in a schematic coupling diagram.

[0145] The bearing device comprises the housing section 102, the surface of which facing the axis of rotation 111 (also referred to as the inner surface) defines the space 212, which is arranged between and bounded by the two immediately adjacent ring seals. The space 212 also borders the shaft 404, against which the two immediately adjacent ring seals (e.g., their sealing lip) bear.

[0146] The bearing device further comprises a C-groove 602, which is bounded by the bearing housing 604 and / or a surface (also referred to as the cylindrical surface) of the housing section 102 facing away from the axis of rotation 111; and / or which is formed in the bearing housing 604 and / or the housing section 102. The partition 220 is arranged between two end sections of the C-groove 602. The C-groove 602 provides the outlet channel and the inlet channel, which open into the connecting channel 206, which in turn opens into the annular gap 212.

[0147] For this bearing device, further components of the sealing system according to Example 17 are described below, whereby what is described here can apply by analogy to any other implemented bearing device according to different embodiments.

[0148] An exemplary implementation of the first actuator 610 features a Venturi nozzle 61 Od as a vacuum source, which is configured to extract fluid from the C-slot 602 during operation (e.g., via the inlet port 406). During operation, compressed air can be supplied to the Venturi nozzle 61 Od, thereby generating a vacuum in the C-slot 602. Operation of the Venturi nozzle 61 Od initiates a fluid exchange, which potentially transports fluid located in the C-slot 602 to the Venturi nozzle 61 Od.

[0149] The exemplary implementation of the first actuator 610 also includes a first valve 61 Ov (also referred to as a pneumatic supply valve) by means of which compressed air is supplied to the Venturi nozzle 61 Od (for example, the supply of compressed air is influenced), which for example comes from a gas cylinder as a compressed air source 612.

[0150] An exemplary implementation of the second actuator 612 has a second valve 61 Ov (also called a shut-off valve) by means of which gas, e.g. air from the Earth's atmosphere, is supplied to the C-slot 602 (e.g. by means of the outlet port 408).

[0151] According to various embodiments, a control device (not shown) can be used to control the first actuator 610 and / or the second actuator 612 according to an operating mode (e.g. standby mode, suction mode or flow mode).

[0152] One exemplary implementation of the standby mode might involve keeping the pneumatic supply valve closed, thus disabling the Venturi nozzle 61 Od. Alternatively or additionally, the shut-off valve could be open, exposing the space to atmospheric pressure, e.g., approximately 1 bar.

[0153] An exemplary implementation of the suction mode might involve keeping the pneumatic supply valve open so that the Venturi nozzle 61 Od is operational and supplied with compressed air, while keeping the shut-off valve closed. The Venturi nozzle 61 Od can, for example, generate a negative pressure of approximately 150 mbar, which is applied to the space between the nozzles. This can stimulate the transport of water located in the space into the C-groove. The suction mode can be used, for example, for a maximum duration of 5 seconds.

[0154] An exemplary implementation of the flow mode might involve keeping the pneumatic supply valve open, so that the Venturi nozzle 61 Od is in operation and supplied with compressed air, and keeping the shut-off valve open. This facilitates air flowing through the shut-off valve into the C-groove, where it is drawn out by the Venturi nozzle 61 Od. The Venturi nozzle 61 Od can, for example, generate a negative pressure of approximately 150 mbar, to which the annular gap is subjected. The resulting airflow can stimulate the transport of the water located in the C-groove towards the shut-off valve. The water exiting the shut-off valve can, for example, be released into the Earth's atmosphere or transported into a collection container (not shown).

[0155] Depending on the application, the flow mode can be used continuously or repeatedly (e.g., briefly) interrupted by the suction mode and / or the standby mode. Which operating mode, and / or whether multiple operating modes are used (for example, in what temporal sequence), may depend on the actual water leakage of the ring seal 1.

[0156] For example, switching between two of the several operating modes (e.g., between flow mode and suction mode) can stimulate a pressure variation in the space, which promotes the transport of liquid out of the space.

[0157] According to a comparative example, a multi-stage sealing system is present, with the ring seal 1 adjacent to an intermediate space into which only a vacuumed channel opens, preventing the introduction of additional air. As a result, the channel fills completely with water before it can escape. Depending on the length of the connecting pipe, significant quantities of water (e.g., several cubic decimeters) may be required as a leak before the water transported through the channel reaches an area outside the vacuum chamber where it can be detected. A leak can thus only be detected with a delay, potentially...The end of the service life of the ring seal 1 is only detected shortly before its end, or at least only at an advanced stage, making it difficult to recognize the end of the service life of the ring seal 1 in time, for example, if the desired continuous operating time is long. This could be addressed with predictive maintenance, which, however, increases costs, especially if the service life varies statistically.

[0158] In contrast, the inlet and outlet channels, according to various embodiments, allow for the implementation of a flow mode that facilitates the removal of even small amounts of fluid that enter the gap (also referred to as the sealing gap). This enables the early detection of incipient leakage and, if desired, the collection of data reflecting the progression and / or stage of the leakage. According to various embodiments, the comparative example can be retrofitted, for instance, using the method provided herein, so that after the retrofit it is configured according to various embodiments.

[0159] It can be understood that suctioning the outlet channel using a vacuum (e.g., from the vacuum source) is only one exemplary, albeit advantageous, implementation for stimulating fluid exchange through the outlet channel. Alternatively or additionally, the outlet channel can be purged, for example, by subjecting the inlet channel to positive pressure, such as with compressed air (or another gas under positive pressure). However, the latter can promote leakage of the ring seal 1, for example, if it results in a pressure reduction at its sealing lip.

[0160] Replacement sheet

Claims

Patent claims 1. Sealing system (100), comprising: • a housing section (102) which is penetrated along a direction (101) by a receiving opening (102o) for receiving a shaft; • two ring seals (202, 204) arranged one behind the other along the direction (101), which are immediately adjacent to each other and are arranged in the receiving opening (102o), and between which a cavity (212) is formed; • an inlet channel (210a) and an outlet channel (210b) which are formed in the housing section (102) and which are fluidly coupled to each other and to the cavity (212).

2. Sealing system (100) according to claim 1, further comprising: • a connecting channel (206) which fluidly couples the cavity (212) to the inlet channel (210a) and / or the outlet channel (210b), • wherein the connecting channel (206) extends away from the cavity (212).

3. Sealing system (100) according to claim 2, • wherein the outlet channel (210b) and the inlet channel (210a) open into the connecting channel (206) from opposite sides of the connecting channel (206); • and wherein the housing section (102) has a partition which separates the inlet channel (210a) from the outlet channel (210b) and is located on a side of the cavity (212) opposite the connecting channel.

4. Sealing system according to any one of claims 1 to 3, wherein the inlet channel and the outlet channel (210b) open into each other or have a distance from each other which is less than an extension of the receiving opening transverse to the direction.

5. Sealing system (100) according to one of claims 1 to 4, further comprising: two sealing surfaces facing away from the receiving opening, which surround the receiving opening along a closed path and between which at least a section of the inlet channel and / or the outlet channel is exposed.

6. Sealing system (100) according to any one of claims 1 to 5, wherein the inlet channel (210a) and / or the outlet channel (210b) are provided by means of a groove which is formed on an outside of the housing section (102).

7. Sealing system (100) according to one of claims 1 to 6, further comprising one or more than one actuator which is configured to influence a fluid exchange via the inlet channel (210a) and / or outlet channel (210b).

8. Sealing system (100) according to claim 7, further comprising: a control device which is configured to control one or more than one actuator according to an operating mode in which a fluid flow is generated from the inlet channel (210a) to the outlet channel (210b) by means of fluid exchange.

9. Sealing system (100) according to claim 7 or 8, further comprising: an inlet port into which the inlet channel opens; and wherein the one or more than one actuator has a first actuator which is coupled to the inlet port and is configured to influence a fluid exchange into the inlet channel (210a).

10. Sealing system (100) according to one of claims 1 to 9, further comprising the shaft which is received in the receiving opening (102o) and bears against each of the two ring seals (202, 204).

11. Sealing system (100) according to any one of claims 1 to 10, wherein the inlet channel (210a) and the outlet channel (210b) extend along a curved path which runs in a plane that is transverse to the direction (101).

12. Storage device comprising: • the sealing system (100) according to any one of claims 1 to 11, • a bearing housing which has a receiving space for receiving the housing section (102); • a rotary bearing which is arranged along the direction (101) behind the housing section (102) and provides an axis of rotation parallel to the direction (101) which extends through the receiving opening (102o).

13. Storage device according to claim 11 or 12, further comprising: one or more than one fluid line which opens into the receiving space.

14. Sputtering device comprising the bearing device according to any one of claims 11 to 13, wherein the bearing device has an end block comprising the housing section and is configured to hold a sputtering target.

15. Using an outlet channel (210b) to transport liquid which enters a cavity (212) between two ring seals bearing against a rotating shaft, through the outlet channel (210b) by means of a gas stream which is supplied to the outlet channel (210b) by means of an inlet channel (210a).

16. Procedure, comprising: • Transporting a liquid through a through-opening of a rotating shaft, against which two ring seals (202, 204) arranged one behind the other are located, between which a cavity (212) is formed, a first ring seal (202) of which is exposed to the liquid and a pressure difference between the cavity (212) and the liquid; • Transporting a portion of the liquid that enters the cavity (212) through an outlet channel (210b) by means of a gas flow which is supplied to the outlet channel (210b) by means of an inlet channel (210a), wherein the outlet channel (210b) and the inlet channel (210a) are fluidly coupled to each other and to the cavity (212).

Images