Program, information processing method, information processing device, and laser processing device

Abstract

A program according to the present invention causes a computer to execute a process in which device information relating each laser annealing device at a plurality of locations is acquired, each piece of the device information including the location at which the laser annealing device is installed and an identifier uniquely indicating the laser annealing device, summary screen data including summary information in which is used the device information of one or more of the laser annealing devices at the same location is generated on the basis of the identifier, detailed screen data including detailed information using the device information is generated for each of the one or more of the laser annealing devices included in the summary screen data, the generated summary screen data is output to an information terminal, and if an output request for the detailed screen data targeting any one of the laser annealing devices included in the summary screen data has been received from the information terminal that acquired the summary screen data, the detailed screen data is output to the information terminal.

Description

Program, information processing method, information processing device and laser processing device

[0001] The present invention relates to a program, an information processing method, an information processing device, and a laser processing device.

[0002] A semiconductor film surface unevenness detection device, a laser annealing device, and a semiconductor film surface unevenness detection method are known that can detect surface unevenness of a semiconductor film that has been annealed by irradiating it with laser light (for example, Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2016-129171

[0004] The present disclosure aims to provide a program or the like that can output summary screen data including summary information and detailed screen data including detailed information based on device information regarding laser annealing devices at multiple locations.

[0005] The program of this embodiment causes a computer to acquire device information for each laser annealing device at multiple locations, the device information including an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device, generate summary screen data including summary information using the device information of one or more laser annealing devices at the same location based on the identifier, generate detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data, output the generated summary screen data to an information terminal, and when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, execute a process of outputting the detailed screen data to the information terminal.

[0006] The information processing method of this aspect has a computer acquire device information for each laser annealing device at a plurality of locations, the device information including an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device, generate summary screen data including summary information using the device information of one or more of the laser annealing devices at the same location based on the identifier, generate detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data, output the generated summary screen data to an information terminal, and when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, execute a process to output the detailed screen data to the information terminal.

[0007] The information processing device of this aspect is an information processing device that includes a control unit, and the control unit acquires device information for each laser annealing device at a plurality of locations, the device information including an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device, and based on the identifier, generates summary screen data including summary information using the device information of one or more of the laser annealing devices at the same location, generates detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data, outputs the generated summary screen data to an information terminal, and when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, outputs the detailed screen data to the information terminal.

[0008] The laser processing device of this embodiment is a laser processing device equipped with a laser light source that emits laser light, and acquires device information for each laser annealing device at a plurality of locations, the device information including an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device, and based on the identifier, generates summary screen data including summary information using the device information of one or more of the laser annealing devices at the same location, generates detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data, outputs the generated summary screen data to an information terminal, and has the function of outputting the detailed screen data to the information terminal when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data.

[0009] According to the present disclosure, it is possible to provide a program or the like that outputs summary screen data including summary information and detailed screen data including detailed information based on device information related to laser annealing devices at multiple locations.

[0010] 1 is a diagram showing an example of a system configuration of an operation management system including an information processing device and the like according to embodiment 1. FIG. 2 is a diagram showing an example of the configuration of a laser annealing device. FIG. 3 is a diagram showing an example of the configuration of an information processing device (cloud server) that aggregates device information from a plurality of bases. FIG. 4 is an explanatory diagram illustrating a base master table. FIG. 5 is an explanatory diagram illustrating an device master table. FIG. 6 is an explanatory diagram illustrating an device information table. FIG. 7 is a flowchart showing an example of the processing procedure of a control unit of an information processing device. FIG. 8 is an explanatory diagram illustrating screen transitions in a summary screen and a detail screen. FIG. 9 is a diagram illustrating an example of a summary screen. FIG. 10 is a diagram illustrating an example of a detail screen (time series data). FIG. 11 is a diagram illustrating an example of a detail screen (substrate image). FIG. 12 is a flowchart showing an example of the processing procedure of a control unit of an information processing device according to embodiment 2 (pop-up display of an abnormality notification screen). FIG. 13 is a diagram illustrating an example of an abnormality notification screen.

[0011] (Embodiment 1) Hereinafter, an embodiment of the present invention will be described. Fig. 1 is a diagram showing an example of the system configuration of an operation management system including an information processing device 9 according to embodiment 1. A laser annealing device 1 (laser processing device) is, for example, an excimer laser annealing (ELA) device that forms a low temperature polysilicon (LTPS) film.

[0012] The laser annealing apparatus 1 is installed in a manufacturing factory (base) that manufactures semiconductor substrates 8 (substrates 8), such as glass substrates 8 on which a polycrystalline silicon film is formed, and the manufacturing factory (base) is equipped with an on-site computer K (edge ​​computer) that is connected to the laser annealing apparatus 1 via an on-site network (LAN). The on-site computer K (edge ​​computer) may function as a control device that controls the operation of the laser annealing apparatus 1, or may be included in the laser annealing apparatus 1. The on-site computer K (edge ​​computer) is communicably connected to an information processing device 9 (cloud server) via an external network GN, such as the Internet, for example.

[0013] The information processing device 9 (cloud server) may function as a remote monitoring device that acquires device information including substrate images, operating parameters of the laser annealing device 1, and various sensors transmitted from the on-site computer K (edge ​​computer), and monitors the operating status of the laser annealing device 1 installed at each of the multiple sites based on the acquired various data. Furthermore, the information processing device 9 may function as a model server that generates or updates various learning models such as an unevenness detection model 901, a brightness reduction detection model 902, and an abnormality detection model 903 using substrate images, etc. transmitted from the on-site computer K. In this way, an operation management system S is configured by the laser annealing devices 1 installed at each of the multiple sites, the on-site computers K (control devices) that perform operation control of the laser annealing devices 1, and the information processing device 9 (model server).

[0014] 2 is a diagram showing an example of the configuration of the laser annealing apparatus 1. The laser annealing apparatus 1 irradiates a silicon film formed on a substrate 8 with laser light. This makes it possible to convert an amorphous silicon film (amorphous silicon film: a-Si film) into a polycrystalline silicon film (polysilicon film: p-Si film). The substrate 8 is a semiconductor substrate 8.

[0015] As shown in the drawings in this embodiment, in an XYZ three-dimensional Cartesian coordinate system, the Z direction is the vertical direction, that is, the direction perpendicular to the substrate 8. The XY plane is a plane parallel to the surface of the substrate 8 on which the silicon film is formed. For example, the X direction is the longitudinal direction of the rectangular substrate 8, and the Y direction is the lateral direction of the substrate 8. When a θ-axis stage 71 that can rotate from 0° to 90° around the Z axis is used, the X direction can be the lateral direction of the substrate 8, and the Y direction can be the longitudinal direction of the substrate 8.

[0016] The laser annealing apparatus 1 includes an annealing optical system 11 and a laser irradiation chamber 7, and is connected to an on-site computer K (control device). The laser irradiation chamber 7 houses a base 72 and a stage 71 arranged on the base 72. In the laser annealing apparatus 1, the silicon film 201 is irradiated with laser light while the substrate 8 is transported in the +X direction by the stage 71. Furthermore, the apparatus is equipped with a biplanar phototube 62, an OED sensor 63, a line camera 64, and a profiler camera 66 as detection units that detect information related to the emitted laser light.

[0017] The annealing optical system 11 is an optical system that generates laser light for crystallizing the amorphous silicon film formed on the substrate 8 and converting it into a polysilicon film, and irradiates the amorphous silicon film with the laser light. The annealing optical system 11 includes a laser light source 2, an attenuator 3, a polarization ratio control unit 4, a beam shaping optical system 5, an epi-mirror 61, and a projection lens 65, and emits a line-shaped laser light.

[0018] The laser light source 2 is a laser generating device that generates pulsed laser light as laser light to be irradiated onto the amorphous silicon film (object to be processed). The generated laser light is laser light for crystallizing the amorphous film on the substrate 8 to form a crystallized film, and is, for example, gas laser light such as excimer laser light with a center wavelength of 308 nm. Alternatively, the gas laser light is not limited to excimer laser light, and may be other gas lasers such as a Co2 laser.

[0019] The laser light source 2 has a chamber filled with gas such as xenon, and two resonator mirrors arranged facing each other with the gas in between. One resonator mirror is a total reflection mirror that reflects all light, and the other is a partial reflection mirror that transmits a portion of the light. Gas light excited by the gas is repeatedly reflected between the resonator mirrors, and the amplified light is emitted from the resonator mirror as laser light. The laser light source 2 repeatedly emits pulsed laser light at a frequency of, for example, 500 Hz to 600 Hz. The laser light source 2 emits the laser light toward the attenuator 3.

[0020] The attenuator 3 attenuates the incident laser light to adjust it to a predetermined energy density. These attenuators have a transmittance characteristic that indicates the ratio of the emitted laser light to the incident laser light, and the transmittance is configured to be variable based on a signal from the in-site computer K (control device). The attenuator 3 is provided midway along the optical path from the laser light source 2 to the beam shaping optical system 5. The attenuator 3 attenuates the laser light emitted by the laser light source 2 in accordance with the transmittance.

[0021] The energy density (E) emitted from the attenuator 3 is equal to the energy density (E) of the laser light emitted from the laser light source 2 multiplied by the transmittance (T) of the attenuator 3 (E=E×T). The on-site computer K (control device) may identify (derive) and change the transmittance of the attenuator 3 so that the energy density emitted from the attenuator 3 becomes the optimal energy density.

[0022] The polarization ratio control unit 4 is disposed on the output side of the attenuator 3. The polarization ratio control unit 4 is configured with, for example, a half-wave plate (λ / 2 plate) and a polarizing beam splitter, and changes the polarization ratio between P polarization and S polarization of the incident laser light. In other words, the polarization ratio of the laser light output from the attenuator 3 is changed by the polarization ratio control unit 4. The polarization ratio control unit 4 is configured to change (variably change) the polarization ratio based on a control signal output from the in-site computer K (control device).

[0023] When the transmittance of the attenuator 3 is changed, the polarization ratio of the laser light emitted from the attenuator 3 is changed in accordance with the change in transmittance. In response to this, the on-site computer K (control device) may control the polarization ratio of the laser light emitted from the polarization ratio control unit 4 to be constant by changing the polarization ratio of the polarization ratio control unit 4 in accordance with the changed transmittance.

[0024] When changing the polarization ratio of the polarization ratio control unit 4, the on-site computer K (control device) may refer to information stored in a storage unit of the on-site computer K in the form of a table (a polarization ratio table) and specify (derive) the polarization ratio according to the transmittance. The polarization ratio table defines the polarization ratios corresponding to the respective transmittances.

[0025] The laser light emitted from the polarization ratio control unit 4 is incident on the beam shaping optical system 5, which shapes the incident laser light to generate laser light having a beam shape suitable for irradiating a silicon film. The beam shaping optical system 5 generates a line beam that is linear along the Y direction.

[0026] The beam shaping optical system 5 splits one beam into multiple beams (multiple line beams aligned in the Z direction) using, for example, a homogenizer made up of a lens array. After splitting into multiple beams, the multiple beams can be combined using a condenser lens to form a line beam. The beam shaping optical system 5 emits the generated (shaped) linear laser light to the epi-illumination mirror 61.

[0027] The epi-mirror 61 is a rectangular reflecting mirror extending in the Y direction and reflects the laser light, which is a plurality of line beams generated by the beam shaping optical system 5. The epi-mirror 61 is, for example, a dichroic mirror, which is a partial reflecting mirror that transmits a portion of the light. The epi-mirror 61 reflects the line-shaped laser light to generate reflected light and transmits a portion of the line-shaped laser light to generate transmitted light. The epi-mirror 61 irradiates the reflected laser light onto the silicon film of the substrate 8 and emits the transmitted laser light to a pulse measuring device, for example, a biplanar phototube.

[0028] The projection lens 65 is disposed above the substrate 8. The projection lens 65 has a plurality of lenses for projecting the laser light onto the substrate 8, i.e., the silicon film. The projection lens 65 focuses the laser light onto the substrate 8. On the substrate 8, the laser light forms a linear irradiation area along the Y direction. That is, on the substrate 8, the laser light is a line beam with the Y direction as the longitudinal direction. Furthermore, while the substrate 8 is being transported in the +X direction, the laser light is irradiated onto the silicon film. This allows the laser light to be irradiated onto a band-shaped area whose width is the length of the irradiation area in the Y direction.

[0029] The line beam-shaped laser light irradiated onto the epi-illumination mirror 61 has a beam shape with a widened minor axis width, i.e., the minor axis width is somewhat widened and the shape is distorted after being emitted from the condenser lens. The laser light reflected by the epi-illumination mirror 61 passes through the projection lens 65 and is shaped into a line beam-shaped laser light with a minor axis width of about 1 / 5.

[0030] The biplanar phototube 62 is provided adjacent to the beam shaping optical system 5 at the end of the annealing optical system 11, and detects the pulse waveform of the laser light emitted from the laser light source 2 based on the transmitted light that has passed through the epi-illumination mirror 61. The biplanar phototube 62 outputs (transmits) the detected pulse waveform to the on-site computer K (control device).

[0031] The OED sensor 63 includes a light sensor (light detection mechanism) and a light source for the OED sensor 63, and detects reflected light (light reflected by the substrate 8) of light emitted from the light source (light source for the OED sensor) to obtain information about the crystal surface on the substrate 8. The OED sensor 63 outputs (transmits as a signal) the brightness (detection value) of the detected reflected light to the in-site computer K (control device). The line light 641 is provided above the base 72.

[0032] The line camera 64 captures an image of the region of interest of the substrate 8 irradiated with the laser light and outputs the captured image of the substrate 8 (substrate image) to the on-site computer K. The line camera 64 also uses light emitted from a line light 641 provided above the base 72 to capture an image of the surface of the substrate 8 irradiated with the light emitted from the line light 641 (substrate image). Furthermore, the line camera 64 may function as an unevenness monitor that detects the average luminance of the region of interest included in the captured substrate image and acquires information about scattered light of the surface shape of the substrate 8. In addition, the line camera 64 functioning as an unevenness monitor may output (transmit as a signal) the detected average luminance (detection value) of the substrate 8 (region of interest) to the on-site computer K (control device).

[0033] The profiler camera 66 is a sensor (line beam sensor) that detects information about the shape of the laser light shaped into a line beam by the projection lens 65, and is, for example, a beam profiler. The profiler camera 66 is provided, for example, on the side of the stage 71 and is aligned so that the top surface of the profiler camera 66 is at the same height as the substrate 8 placed on the stage 71. The laser light shaped into a line beam by the annealing optical system 11 is irradiated onto the top surface of the profiler camera 66. The profiler camera 66 includes an imaging unit, such as a CMOS camera, and captures the laser light shaped into a line beam with the imaging unit to obtain information (data) about the shape of the laser light, such as an image (captured image). The profiler camera 66 may detect, as information about the shape of the laser light shaped into a line beam, information about the axial widths of the minor and major axes of the rectangular line beam, distortion or depression of the axis, tilt when the line beam is viewed stereoscopically, and angle or curvature between adjacent surfaces. The profiler camera 66 may further detect information about the shape of the raw beam before being shaped into a line beam. In addition to the profiler camera 66 of this embodiment, a line beam sensor that acquires information about the shape of the laser beam may be provided, for example, near the biplanar phototube 62, with its Y-axis direction different from that of the biplanar phototube 62.

[0034] The on-site computer K is an edge computer such as a personal computer or server device that performs overall or integrated control or management of the laser annealing apparatus 1. Like the information processing device 9 (cloud server) described below, the on-site computer K includes a control unit, a memory unit, a communication unit, and an input / output I / F, and is communicatively connected to a control device (another control device) that controls the laser light source 2 or each optical system in the annealing optical system 11 via the communication unit or the input / output I / F. The on-site computer K may acquire substrate images or various detection values ​​from a detection unit such as a biplanar photoelectric tube 62, an OED sensor 63, a line camera 64 (unevenness monitor), or a profiler camera 66 via the input / output I / F. The on-site computer K is communicatively connected to various measurement devices, such as a pulse counter and a photodetector, included in the laser annealing apparatus 1, and may perform various controls on the laser light source 2 or the annealing optical system 11 based on measurement data output from these various measurement devices.

[0035] 3 is a diagram showing an example of the configuration of an information processing device 9 (cloud server) that aggregates device information from multiple locations. The information processing device 9 is, for example, a server device such as a cloud server, and includes a control unit 91, a storage unit 92, a communication unit 93, and an input / output I / F 94. The information processing device 9 is operated, for example, by a maintenance company of the laser annealing device 1.

[0036] The control unit 91 has an arithmetic processing device with a timing function, such as one or more CPUs (Central Processing Units), MPUs (Micro-Processing Units), GPUs (Graphics Processing Units), etc., and performs various information processing by reading and executing a program P (program product) stored in the storage unit 92. Furthermore, the control unit 91 uses various learning models, such as an unevenness detection model 901, a brightness reduction detection model 902, or an abnormality detection model 903, stored in the storage unit 92, to perform a process of deriving unevenness information regarding surface unevenness in a board image, and a process of determining whether an abnormal event has occurred.

[0037] The unevenness detection model 901 is trained to output unevenness information regarding multiple types of surface unevenness on the substrate 8 when a substrate image included in the apparatus information is input. The unevenness information regarding multiple types of surface unevenness on the substrate 8 output by the unevenness detection model 901 may include, for example, the presence or absence of surface unevenness on the surface of the substrate 8, and, if surface unevenness is present, the area and type of the surface unevenness. In this case, if it is estimated that multiple types of surface unevenness have occurred on the surface of the substrate 8, the unevenness detection model 901 may output unevenness information that also includes the probability for each type of surface unevenness. The types of surface unevenness include, for example, streak unevenness, poor irradiation, film skipping, and flow unevenness.

[0038] The luminance reduction detection model 902 is trained to output information regarding the occurrence of luminance reduction when the operating state data (time-series data) included in the device information is input. The information regarding the occurrence of luminance reduction may include a determination result regarding the presence or absence of surface unevenness or luminance reduction at the present time and in the future.

[0039] The anomaly detection model 903 detects abnormal events other than surface unevenness and brightness reduction by inputting the device information. Alternatively, the anomaly detection model 903 may include the functions of the unevenness detection model 901 and the brightness reduction detection model 902 and detect all abnormal events including surface unevenness and brightness reduction. The control unit of the information processing device 9 is described as using a learning model such as the anomaly detection model 903, but is not limited to this and may detect abnormal events using rule-based calculation processing.

[0040] These various learning models, such as the unevenness detection model 901, the brightness reduction detection model 902, and the anomaly detection model 903, may be learning models constructed using other machine learning algorithms, such as R-CNN (Region Convolutional Neural Network), DNN (Deep Neural Network), Transformer, BERT, GPT, RNN (Recurrent Neural Network), LSTM (Long-Short Term Model), SVM (Support Vector Machine), Bayesian network, linear regression, regression tree, multiple regression, random forest, and ensemble. Alternatively, the learning model may be constructed using a pre-trained language model (LLM) that has already undergone pre-training, such as ChatGPT. In this case, the LLM may be fine-tuned to efficiently output information about various abnormal events. Alternatively, a question generated using an external database such as a WebDB may be input, along with device information, into a prompt, which is the input interface of ChatGPT.

[0041] The memory unit 92 includes a volatile memory area such as a static random access memory (SRAM), a dynamic random access memory (DRAM), or a flash memory, and a non-volatile memory area such as an EEPROM or a hard disk. The memory unit 92 pre-stores a program P (program product) and data referenced during processing. The program P stored in the memory unit 92 may be a program P (program product) read from a recording medium M readable by the control unit 91. Alternatively, the program P (program product) may be downloaded from an external computer (not shown) connected to a communication network (not shown) and stored in the memory unit 92. The memory unit 92 stores actual files of various learning models. The actual files of the learning models may be configured as modules included in the program P (program product). Furthermore, the memory unit 92 stores a base master table, an equipment master table, and an equipment information table (described below).

[0042] The communication unit 93 is, for example, a communication module or communication interface conforming to the Ethernet (registered trademark) standard, and an Ethernet cable is connected to the communication unit 93. The communication unit 93 is not limited to being a wired communication module such as an Ethernet cable, but may be a communication interface compatible with wireless communication, such as a short-range wireless communication module such as Wi-Fi (registered trademark) or Bluetooth (registered trademark), or a wide-area wireless communication module such as 4G or 5G. The information processing device 9 may communicate with, for example, an in-site computer K or an information terminal T connected to an external network GN via the communication unit 93.

[0043] The input / output I / F 94 is a communication interface that complies with communication standards such as RS232C or USB, etc. To the input / output I / F 94, an input device such as a keyboard or a display device 941 such as a liquid crystal display is connected.

[0044] The information terminal T is, for example, a smartphone, a tablet, or a PC, and includes a control unit, a storage unit, and a communication unit similar to the information processing device 9. The information terminal T and the information processing device 9 may be communicably connected via an in-base network (LAN) and an external network GN (WAN) such as the Internet.

[0045] 4 is an explanatory diagram illustrating an example of a base master table. The base master table is pre-stored in the storage unit 92 of the information processing device 9. Types of management items in the base master table include, for example, a base ID, a base name, a computer name within the base, and a customer name.

[0046] The base ID management item stores an identifier (base ID) that uniquely identifies the base where the laser annealing apparatus 1 is installed. The base name management item stores the name of the base (base name) indicated by the base ID stored in the same record. The base name management item stores the host name or IP address of the in-base computer K installed at the base indicated by the base ID stored in the same record. The customer name management item stores the name of the customer that owns the base indicated by the base ID stored in the same record.

[0047] 5 is an explanatory diagram illustrating an example of the device master table. The device master table is stored in advance in the storage unit 92 of the information processing device 9. Types of management items in the device master table include, for example, a device ID, a base ID, and a model.

[0048] The management item of the device ID stores an identifier (device ID) that uniquely identifies the laser annealing device 1. The management item of the base ID stores an identifier (base ID) of the base where the laser annealing device 1 indicated by the device ID stored in the same record is installed. The base ID sets an association (relation) between the device master table and the base master table, and normalization is performed. The management item of the model stores the model or model name of the laser annealing device 1 indicated by the device ID stored in the same record.

[0049] 6 is an explanatory diagram illustrating an example of an apparatus information table. The apparatus information table is stored in advance in the storage unit 92 of the information processing device 9. Types of management items in the apparatus information table include, for example, an apparatus ID, a substrate image, the number of voltage applications, the number of oscillations, an unevenness score, an operating rate, laser pulse energy, a standard deviation, a synchronization deviation amount, an applied voltage, a surface unevenness, a decrease in brightness, an oxygen concentration abnormality, a tube, and a cryopump.

[0050] The management item of the device ID stores an identifier (device ID) that uniquely identifies the laser annealing device 1. The device ID sets the association (relation) between the device information table and the device master table, and normalization is performed.

[0051] The management item for substrate image stores a substrate image of a substrate 8 irradiated with laser light from the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item for number of voltage applications stores the number of times (TC) that voltage has been applied to the tube electrode provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item for number of oscillations stores the number of times (UC) that the laser has oscillated in the laser light source provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item for unevenness score stores an unevenness score (a calculated numerical value indicating surface unevenness) derived based on the substrate image in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item for availability stores the availability of the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record.

[0052] The management item of laser pulse energy stores the value of laser pulse energy from the laser light source provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item of standard deviation stores the standard deviation derived based on the value of laser pulse energy in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item of synchronization deviation amount stores the amount of synchronization deviation between the two laser light sources provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item of applied voltage stores the voltage value applied to the tube electrode provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record.

[0053] The management items related to abnormal events include, for example, surface unevenness, brightness reduction, and oxygen concentration abnormality. The management item of surface unevenness stores information about surface unevenness derived based on a substrate image in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item of brightness reduction stores information about brightness reduction derived based on the brightness of reflected light from the substrate 8 in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The management item of oxygen concentration abnormality stores information about oxygen concentration abnormality derived based on the amount of gas components in the laser irradiation chamber 7 (processing chamber) of the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record.

[0054] The remaining service life management item includes, for example, a tube and a cryopump. The tube management item stores the remaining service life of a tube electrode provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record. The cryopump management item stores the remaining service life of a cryopump provided in the laser annealing apparatus 1 indicated by the apparatus ID stored in the same record.

[0055] These management items are merely examples, and the apparatus information table may include items corresponding to all parameters such as detection values ​​acquired by various sensors when the laser annealing apparatus 1 is operated, and may further include items corresponding to various setting values ​​when the laser annealing apparatus 1 is operated. The control unit 91 of the information processing device 9 may store and manage the periodically acquired apparatus information group as time-series data by appending the apparatus information (operating state data, etc.) periodically acquired from each of the in-site computers K in the apparatus information table. In this way, the information processing device 9 may store all of the apparatus information acquired from each site in the apparatus information table, and may use the apparatus information table to store and manage all data (big data) generated by the operation of the laser annealing apparatus 1.

[0056] 7 is a flowchart showing an example of a processing procedure of the control unit 91 of the information processing device 9. The control unit 91 of the information processing device 9 (cloud server) that acquires, aggregates, and stores device information from multiple bases and is operated and managed by, for example, a maintenance company of the laser annealing device 1, accepts an operation by an operator using, for example, a keyboard connected to an input / output, and performs the following processing based on the accepted operation.

[0057] The control unit 91 of the information processing device 9 acquires device information on the laser annealing devices 1 at the plurality of bases (S101). The control unit 91 of the information processing device 9 acquires device information on the laser annealing devices 1 installed at each of the plurality of bases from each of the in-base computers K (edge ​​computers) installed at each of the plurality of bases via an external network GN such as the Internet.

[0058] The on-site computer K installed at each site is communicably connected to each of the multiple laser annealing apparatuses 1 installed at the same site as itself, or to various sensors arranged in the laser annealing apparatus 1, and periodically acquires operating state data or operating parameters including substrate images and various sensor detection values ​​from these laser annealing apparatuses 1, etc. The on-site computer K may periodically acquire operating state data, etc. related to the multiple laser annealing apparatuses 1 installed at the same site as itself, and store the data, etc. in the memory unit 92 of the on-site computer K, in association with the device ID of the laser annealing apparatus 1 that is the subject of the operating state data, etc., and the time of acquisition.

[0059] The on-site computer K generates apparatus information by adding a site ID indicating its own site to the operating status data stored in this manner, and transmits the apparatus information to an information processing device 9 (cloud server) operated and managed by a maintenance company of the laser annealing apparatus 1. Therefore, the apparatus information transmitted from the on-site computer K installed at each of the sites includes the site ID indicating the site from which the transmission originated, and operating status data associated with the apparatus ID of each of the laser annealing apparatuses 1 installed at the site.

[0060] The control unit 91 of the information processing device 9 periodically acquires the operating state data or operating parameters of each laser annealing device 1 installed at each of the bases by acquiring each piece of apparatus information transmitted from each of the on-site computers K. The control unit 91 of the information processing device 9 uses the base ID and apparatus ID from the apparatus information thus acquired from each of the on-site computers K to extract the operating state data of each laser annealing device 1 indicated by each apparatus ID, expands it into each data item, and stores it in the corresponding management item of the apparatus information table together with the acquisition time (timestamp) of the apparatus information.

[0061] The control unit 91 of the information processing device 9 may store the device information (operating state data, etc.) periodically acquired from each of the in-site computers K in the device information table in an appended manner, thereby saving the device information as time-series data. In this way, the control unit 91 of the information processing device 9 stores the device information (operating state data, etc.) periodically acquired from each of the in-site computers K in the device information table, and thereby can perform various types of arithmetic processing such as various statistical analyses, time-series analyses, comparison operations, deviation operations, and variance operations using the multiple pieces of device information (device information groups) stored in chronological order in the device information table.

[0062] The control unit 91 of the information processing device 9 may use a BI (Business Intelligence) tool to perform such various analytical processes. Application software related to the BI tool is stored in the storage unit 92 of the information processing device 9, and the control unit 91 of the information processing device 9 can execute various aggregation processes such as drill-down, slicing, or dicing by executing the application software (BI tool).

[0063] The control unit 91 of the information processing device 9 acquires a base ID that uniquely identifies one of the multiple bases (S102). The control unit 91 of the information processing device 9 transmits base selection screen data that constitutes a base selection screen, for example, as an initial screen, to each connected information terminal T. That is, the information processing device 9 also functions as, for example, a web server, and transmits the base selection screen data to an information terminal T accessed via a browser or the like. The information terminal T that acquires the base selection screen data from the information processing device 9 displays the base selection screen on a display unit such as a display in accordance with the base selection screen data.

[0064] 8 is an explanatory diagram illustrating screen transitions between the summary screen and the detail screen. This diagram illustrates screen transitions between the summary screen and the detail screen, including the location selection screen, i.e., the hierarchical structure of the screens. The location selection screen is displayed on the display of the information terminal T as an initial screen when the information terminal T accesses the information processing device 9. The location selection screen may display the location ID, location name, and customer name in a list format.

[0065] In accordance with a base ID selected on the base selection screen, a summary screen (parent dashboard) that lists one or more laser annealing apparatuses 1 associated with the base ID, i.e., installed at the base of the base ID, and displays summary information such as relatively main data, is displayed on the display of the information terminal T. In accordance with an apparatus ID selected on the summary screen (parent dashboard), a detail screen (child dashboard) that displays time-series data that chronologically shows detailed information of the laser annealing apparatus 1 of the apparatus ID is displayed on the display of the information terminal T. In an operation management system S operated by a maintenance company of the laser annealing apparatus 1, the information terminal T (maintenance personnel's personal computer) used by the maintenance personnel may have the base selection screen as a top screen (initial screen), and may hierarchically display, as subordinate configurations, a summary screen (parent dashboard) that displays summary information at the base, and a detail screen (child dashboard) that chronologically shows detailed information of each laser annealing apparatus 1.

[0066] The information terminal T receives the device ID selected by the maintenance technician on the base selection screen, and transmits the received device ID to the information processing device 9. The control unit 91 of the information processing device 9 acquires the base ID transmitted from the information terminal T.

[0067] The control unit 91 of the information processing device 9 outputs summary screen data according to the acquired site ID (S103). The control unit 91 of the information processing device 9 refers to the site master table and the device master table based on the acquired site ID, thereby identifying the device IDs of all laser annealing devices 1 associated with the site ID, i.e., installed at the site of the site ID. Note that if multiple site IDs are associated with the same customer (user), i.e., if a single customer (user) has multiple sites, the device IDs of all laser annealing devices 1 installed at all sites (site IDs) owned by the customer (user) may be identified.

[0068] Based on the identified device ID, the control unit 91 of the information processing device 9 references the device information table to extract summary information for the laser annealing device 1 associated with the device ID. The summary information includes, for example, the number of times voltage is applied to the tube electrode (TC), the number of times the laser is oscillated (UC) in the laser light source, an unevenness score (a calculated value indicating surface unevenness) derived based on a substrate image, the availability rate of the laser annealing device 1, abnormal events, and the remaining useful life of replacement parts. The control unit 91 of the information processing device 9 may calculate the unevenness score (a calculated value indicating surface unevenness) using, for example, the method described in Japanese Patent Application Laid-Open No. 2016-129171. This summary information may be included in the device information transmitted from the on-site computer K at each base station, or may be derived by the control unit 91 of the information processing device 9 performing secondary processing using the device information. In this case, the control unit 91 of the information processing device 9 may derive information regarding various detection results based on the device information, for example, using an unevenness detection model 901, a brightness reduction detection model 902, or an abnormality detection model 903.

[0069] The control unit 91 of the information processing device 9 generates summary screen data written in, for example, HTML using summary information extracted from the device information table based on the identified device ID. The control unit 91 of the information processing device 9 transmits the generated summary screen data to an information terminal T (a personal computer for maintenance personnel) used by the maintenance company. Alternatively, the control unit 91 of the information processing device 9 may output the generated summary screen data to a display device 941, such as a display connected to the input / output I / F 94 of the information processing device 9.

[0070] 9 is a diagram illustrating an example of a summary screen. The control unit of the information terminal T receives summary screen data from the information processing device 9 and displays the summary screen on a display unit such as a display in accordance with the received summary screen data. The summary screen includes, for example, a device list display area, an unevenness score display area, an availability display area, an alert display area, and a remaining useful life display area.

[0071] The device list display area displays in tabular form the device ID, model, voltage application count (TC), and number of oscillations (UC) of all laser annealing devices 1 installed at the selected site. Furthermore, the device list display area may also include an object (in this embodiment, a hyperlinked display item referred to as a "details screen") for selecting a target laser annealing device 1 when transitioning to a details screen. In the device list display area, if the voltage application count (TC) or the number of oscillations (UC) exceeds a predetermined threshold, the display format may be changed, such as by changing the display color, highlighting, blinking, or changing the display character size.

[0072] The object selected to transition to the detailed screen, i.e., the object for selecting the base ID, is not limited to a hyperlinked display item. The transition to the detailed screen may be performed by drilling down the graphs in the mura score display area, the availability display area, the alert display area, and the remaining useful life display area, or by pressing an item related to the laser annealing device 1 (base ID) displayed in a side menu included in the summary screen.

[0073] The unevenness score display area displays, for example, in the form of a line graph, data showing the time series change in the unevenness score of each target laser annealing apparatus 1. In the graph, the vertical axis indicates the unevenness score value, and the horizontal axis indicates the elapsed time.

[0074] The availability display area displays, for example, in a pie chart format, data indicating the availability of each target laser annealing apparatus 1. The availability may be shown as a ratio of operation time, stop time, and maintenance time within a predetermined period.

[0075] The alert display area displays the details of the abnormal event that occurred in each of the target laser annealing devices 1, along with the time point at which the abnormal event occurred. When displaying the details of the abnormal event, the control unit of the information terminal T may add a classification (warning, caution, reference) according to the severity of the abnormal event.

[0076] The remaining service life display area displays, for example, in the form of a line graph, a prediction of the remaining service life of replacement parts such as tube electrodes or cryopumps of each target laser annealing apparatus 1. In the graph, the vertical axis indicates the value of the remaining service life, and the horizontal axis indicates the elapsed time.

[0077] The control unit 91 of the information processing device 9 may continue to periodically acquire device information from each base station, periodically regenerate or update summary screen data using the most recently acquired device information (latest device information), and periodically output the regenerated latest summary screen data to the information terminal T. The information terminal T may periodically acquire the latest summary screen data from the information processing device 9, thereby periodically updating the summary screen displayed on the display.

[0078] When regenerating (updating) the summary screen data using the most recently acquired device information (latest device information), the control unit 91 of the information processing device 9 may determine whether the number of voltage applications (TC) or the number of oscillations (UC) has exceeded a predetermined threshold in each laser annealing device 1. The thresholds for the number of voltage applications (TC) and the number of oscillations (UC) are pre-stored in the storage unit 92. When the number of voltage applications or the number of oscillations exceeds the threshold, the control unit 91 of the information processing device 9 generates summary screen data in which the display format of the number of voltage applications or the number of oscillations that has exceeded the threshold is changed, and transmits the generated summary screen data to the information terminal T.

[0079] The control unit 91 of the information processing device 9 determines whether or not an apparatus ID uniquely identifying the laser annealing device 1 has been acquired (S104). When any laser annealing device 1 (apparatus ID) is selected on the summary screen displayed on the information terminal T, the information terminal T transmits an output request including the apparatus ID to the information processing device 9. That is, the output request including the apparatus ID corresponds to an output request for detailed screen data to the information processing device 9. The control unit 91 of the information processing device 9 determines whether or not an apparatus ID uniquely identifying the laser annealing device 1 has been acquired, depending on whether or not an output request transmitted from the information terminal T has been received. When an apparatus ID has not been acquired (S104: NO), the control unit 91 of the information processing device 9 performs loop processing by executing the processing of S104 again, and continues processing to wait for input of an apparatus ID.

[0080] When the device ID is acquired (S104: YES), the control unit 91 of the information processing device 9 outputs detailed screen data according to the acquired device ID (S105). When the control unit 91 of the information processing device 9 acquires the device ID, that is, when it acquires an output request including the device ID from the information terminal T, it generates detailed screen data according to the device ID. The control unit 91 of the information processing device 9 may extract detailed information of the laser annealing device 1 associated with the device ID by referring to the device information table based on the acquired device ID.

[0081] The detailed information includes, for example, the laser pulse energy of the laser light emitted from the laser light source of the laser annealing apparatus 1, the standard deviation of the laser pulse energy, and, if the laser annealing apparatus 1 is equipped with two laser light sources, the amount of synchronization deviation between the two laser light sources, and the voltage applied to the tube electrodes. These detailed information may be included in the apparatus information transmitted from the in-site computer K of each site, or may be derived by the control unit 91 of the information processing device 9 performing secondary processing using the apparatus information. In this case, the control unit 91 of the information processing device 9 may use, for example, an unevenness detection model 901, a brightness decrease detection model 902, or an abnormality detection model 903 based on the apparatus information.

[0082] The control unit 91 of the information processing device 9 generates detailed screen data written in, for example, HTML, using the detailed information extracted from the device information table based on the acquired device ID. The control unit 91 of the information processing device 9 transmits the generated detailed screen data to the information terminal T that is the sender of the output request.

[0083] FIG. 10 is a diagram illustrating an example of a detail screen (time-series data). FIG. 11 is a diagram illustrating an example of a detail screen (board image). In this embodiment, the control unit 91 of the information processing device 9 generates a detail screen showing the time-series data and a detail screen showing the board image, as an example of generating a detail screen. Alternatively, the control unit 91 of the information processing device 9 may generate only a detail screen showing the time-series data or only a detail screen showing the board image. Alternatively, the control unit 91 of the information processing device 9 may generate a single detail screen by including the time-series data and the detail screen.

[0084] The control unit of the information terminal T receives detailed screen data showing the time series data from the information processing device 9, and displays a detailed screen showing the time series data on a display unit such as a display in accordance with the received detailed screen data. The detailed screen showing the time series data includes, for example, a laser pulse energy transition display area, a standard deviation display area, a synchronization deviation amount display area, and an applied voltage display area.

[0085] The laser pulse energy transition display area displays, for example, in the form of a line graph, data showing the time series transition of the laser pulse energy of each target laser annealing device 1. In the graph, the vertical axis indicates the value of the laser pulse energy, and the horizontal axis indicates the elapsed time.

[0086] The standard deviation display area displays, for example, in the form of a line graph, data indicating the time series transition of the standard deviation of the laser pulse energy of each of the target laser annealing devices 1. In the graph, the vertical axis indicates the value of the standard deviation of the laser pulse energy, and the horizontal axis indicates the elapsed time.

[0087] The synchronization deviation amount display area displays, for example, in the form of a line graph, data indicating the time series change in the synchronization deviation amount of each target laser annealing apparatus 1. In the graph, the vertical axis indicates the value of the synchronization deviation amount, and the horizontal axis indicates the elapsed time.

[0088] The applied voltage display area displays, for example, in the form of a line graph, data showing the time series changes in the applied voltage to each tube electrode of the target laser annealing device 1. In the graph, the vertical axis indicates the applied voltage value, and the horizontal axis indicates the elapsed time.

[0089] The control unit of the information terminal T receives detailed screen data showing the board image from the information processing device 9, and displays a detailed screen showing the board image on a display unit such as a display in accordance with the received detailed screen data. The detailed screen showing the board image includes, for example, a board image display area, a label display area, and an inspection result display area.

[0090] The board image display area displays a board image acquired from the line camera 64 with a graphic such as a bounding box indicating the area where surface unevenness has occurred superimposed on it. The board image displayed in the board image display area may be one on which a heat map is superimposed, which is generated to indicate the affected locations or areas according to the degree of influence when outputting the probability of each type of surface unevenness. The board image displayed in the board image display area may be one in which a plurality of board images captured by the line camera 64 are combined according to the position of the board image, i.e., the position of the imaged surface area.

[0091] The label display area displays in tabular form the color or line type of the figure (frame) to be superimposed on the substrate image according to the type of surface unevenness. By changing the figure (frame) to be superimposed on the substrate image according to the type of surface unevenness in this way, it is possible to improve the visibility for the operator of the laser annealing apparatus 1, etc.

[0092] In the inspection result display area, unevenness information output by the unevenness detection model 901 for multiple board images captured by the line camera 64, i.e., board images of regions on the surface of the board 8, is displayed in tabular form. The board image for each region on the surface of the board 8 may be indicated by a board ID and assigned a sub-number corresponding to the region. For each of these board images, the type and probability of surface unevenness contained in the unevenness information output by the unevenness detection model 901 is displayed. At this time, the type of surface unevenness for which the probability exceeds a predetermined probability threshold, or a message indicating that the surface is normal, may be displayed. If surface unevenness is found, a countermeasure (countermeasure information) corresponding to the type of surface unevenness is displayed.

[0093] The control unit 91 of the information processing device 9 may continue to periodically acquire device information from each base station, periodically regenerate or update the detailed screen data using the most recently acquired device information (latest device information), and periodically output the regenerated latest detailed screen data to the information terminal T. The information terminal T may periodically acquire the latest detailed screen data from the information processing device 9, thereby periodically updating the detailed screen displayed on the display.

[0094] In this embodiment, the series of processes shown in the flowcharts are performed by an information processing device 9 (cloud server) operated and managed by a maintenance company of the laser annealing apparatus 1, but this is not limited to this. The processes may be executed by an on-site computer K, such as an edge computer, connected to the laser annealing apparatus 1 at each site. Alternatively, if the on-site computer K functions as a control device included in the laser annealing apparatus 1, the laser annealing apparatus 1 (laser processing device) may essentially perform the series of processes shown in the flowcharts. In this case, the on-site computer K (edge ​​computer) may store device information for the laser annealing apparatus 1 at the site where the on-site computer K is installed, and a detailed screen of the laser annealing apparatus 1 installed at the site may be displayed with a summary screen for the site as the top screen.

[0095] 12 is a flowchart showing an example of a processing procedure of the control unit 91 of the information processing device 9 according to the second embodiment (pop-up display of an abnormality notification screen). The control unit 91 of the information processing device 9 (cloud server) accepts an operation by an operator using, for example, a keyboard connected to an input / output, and performs the following processing based on the accepted operation. The processing may be executed by an in-site computer K such as an edge computer connected to the laser annealing device 1 at each site. Alternatively, when the in-site computer K functions as a control device included in the laser annealing device 1, the laser annealing device 1 may perform a series of processing substantially shown in the flowchart.

[0096] The control unit 91 of the information processing device 9 determines whether or not an abnormal event has occurred in each of the laser annealing devices 1 at each of the multiple locations based on the acquired device information (S201). The control unit 91 of the information processing device 9 continues to periodically acquire device information from each location, and determines whether or not an abnormal event has occurred in each of the laser annealing devices 1 at each of the multiple locations using the most recently acquired device information (latest device information).

[0097] The control unit 91 of the information processing device 9 may, for example, input operating state data such as a substrate image or sensor detection values ​​extracted from the device information into the unevenness detection model 901, the brightness decrease detection model 902, or the abnormality detection model 903, and thereby acquire the determination results of the occurrence or non-occurrence of abnormal events such as unevenness information, brightness decrease, oxygen concentration abnormality, etc. output (estimated) by these models. If no abnormal event has occurred in any of the laser annealing devices 1 (S201: NO), the control unit 91 of the information processing device 9 continues the process of determining whether or not an abnormal event has occurred in any of the laser annealing devices 1, based on the device information acquired periodically, when no abnormal event has occurred in any of the laser annealing devices 1.

[0098] When an abnormal event occurs in any of the laser annealing apparatuses 1 (S201: YES), the control unit 91 of the information processing apparatus 9 identifies the information terminal T displaying a summary screen for the base of the laser annealing apparatus 1 where the abnormal event occurred (S202). When the control unit 91 of the information processing apparatus 9 determines that an abnormal event has occurred in any of the laser annealing apparatuses 1, it identifies the base (base ID) where the laser annealing apparatus 1 where the abnormal event occurred is installed, for example, by referring to the apparatus master table based on the apparatus ID of the laser annealing apparatus 1.

[0099] When outputting each summary screen data targeted for each base to each information terminal T, the control unit 91 of the information processing device 9 stores session information indicating the connection status with the information terminal T in the storage unit 92. The session information includes, for example, the IP address of the information terminal T and information related to the output summary screen data. The control unit 91 of the information processing device 9 identifies the information terminal T on which the summary screen of the identified base (base ID) is displayed, based on the session information indicating the connection status with the information terminal T displaying the summary screen.

[0100] The control unit 91 of the information processing device 9 outputs an abnormality notification screen to the identified information terminal T (S203). The control unit 91 of the information processing device 9 generates abnormality notification screen data that constitutes the abnormality notification screen based on the information used to determine whether an abnormal event has occurred, and outputs the abnormality notification screen to the identified information terminal T.

[0101] The control unit of the information terminal T receives the abnormality notification screen data from the information processing device 9, and pops up (displays in a pop-up window) an abnormality notification screen on a display unit such as a display in accordance with the received abnormality notification screen data. The pop-up displayed abnormality notification screen may be a different abnormality notification screen (screen data) for each of surface unevenness, brightness reduction, and other abnormal events, or may include information corresponding to these abnormal events in a single abnormality notification screen.

[0102] FIG. 13 is a diagram illustrating an example of an abnormality notification screen. When it is determined that an abnormal event has occurred, the abnormality notification screen includes, for example, an abnormal event display area, a time-series data display area, and a response information display area. The abnormal event display area displays the type of abnormal event (in this embodiment, an increase in the oxygen concentration in the processing chamber). The time-series data display area displays, in a graphical format, operational state data (parameters) that are time-series data included in the operational state data and that serve as the basis for determining whether or not the abnormal event has occurred. The response information display area displays response information corresponding to the type of abnormal event, i.e., response information (parameters requiring countermeasures or confirmation) defined for the type of abnormal event in a check parameter table. The check parameter table is pre-stored in the storage unit 92.

[0103] Furthermore, the abnormality notification screen may include a character string (in this embodiment, "details") or an icon hyperlinked to a corresponding page in a manual that describes information corresponding to the type of abnormal event. By clicking on the character string, document data such as a manual that describes various response information related to the type of abnormal event can be accessed. Similarly, when surface unevenness or a decrease in brightness occurs, the abnormality notification screen pops up and displays information corresponding to the surface unevenness or decrease in brightness that has occurred in the abnormal event display area, the time-series data display area, and the response information display area.

[0104] According to this embodiment, an information processing device 9 configured as a cloud server or the like is communicatively connected to each of the laser annealing apparatuses 1 installed at a plurality of bases, or to an on-site computer K such as an edge computer connected to the laser annealing apparatus 1 at the base, via an external network GN such as the Internet. A control device included in the laser annealing apparatus 1 may function or operate as the on-site computer K (edge ​​computer). The on-site computer K may be communicatively connected to the plurality of laser annealing apparatuses 1 installed at the same base, for example, via an on-site network (LAN), and may acquire and aggregate apparatus information for each of the laser annealing apparatuses 1 at the same base and store it in a memory unit 92 of the on-site computer K. The apparatus information includes, for example, operating status data of the laser annealing apparatus 1 that is the subject of the apparatus information, or various setting values ​​when operating the laser annealing apparatus 1. In this case, the operating status data may include parameters such as a substrate image of a substrate irradiated with laser light and detection values ​​from various sensors provided in the laser annealing apparatus 1, and may be associated with time information (timestamp) such as the time at which the substrate image was captured or detected. That is, the operating status data may be periodically acquired and may be time-series data consisting of a group of data at multiple acquisition times (detection times, etc.). The on-site computer K assigns an identifier such as an apparatus ID that uniquely identifies the laser annealing apparatus 1 that is the subject of the apparatus information to each of the aggregated apparatus information, and transmits each piece of apparatus information with the assigned identifier to the information processing device 9. In this case, when transmitting the apparatus information to the information processing device 9, the on-site computer K may assign an identifier such as a site ID that uniquely identifies its own site to the apparatus information.

[0105] The information processing device 9 acquires and aggregates each piece of equipment information transmitted from each of the in-site computers K (edge ​​computers) at each of the multiple sites, associates the information with the time of acquisition, and stores it in the storage unit 92 of the information processing device 9. The information processing device 9 generates summary screen data for each site using identification information (site ID, device ID) associated with the equipment information from the aggregated multiple site information, and transmits the generated summary screen data to, for example, an information terminal T (maintenance staff personal computer) used by a maintenance company of the laser annealing device 1. The summary screen data is configured, for example, in HTML, and the information terminal T, which receives the summary screen data from the information processing device 9, displays the summary screen on a display unit such as a display in accordance with the summary screen data. The summary screen configured with the summary screen data displays summary information using the equipment information of one or more laser annealing devices 1 installed at the target site, for example, in list format or graph format. Therefore, the information terminal T can list and display information about multiple laser annealing devices 1 installed at the same site. The summary screen (summary screen data) has objects such as icons or menu items for selecting one of the laser annealing devices 1 listed and displayed, and pressing the object selects the laser annealing device 1 that will be the subject of the detailed screen. The information terminal T that displays the summary screen accepts an operation to select the laser annealing device 1 that will be the subject of the detailed screen, and sends an output request for detailed screen data to the information processing device 9, triggered by the selection operation. When the information processing device 9 receives an output request for detailed screen data from the information terminal T that has acquired the summary screen data, it identifies the laser annealing device 1 that will be the subject of the detailed screen in response to the output request, generates detailed screen data including detailed information about the laser annealing device 1, and sends it to the information terminal T. The information terminal T receives the detailed screen data from the information processing device 9, and displays the detailed screen on a display unit such as a display in response to the received detailed screen data.In this way, the information processing device 9 first generates and outputs summary screen data for each base, thereby displaying a summary screen that displays summary information such as relatively important data for the multiple laser annealing devices 1 installed at each base on the information terminal T. Then, when an output request for detailed screen data is received from the information terminal T that displays the summary screen, the information processing device 9 generates detailed screen data and outputs it to the information terminal T, so that the summary screen and each of the detailed screens corresponding to the multiple laser annealing devices 1 listed on the summary screen can be displayed in a hierarchical manner, and screen transition from the summary screen to the detailed screen of the selected laser annealing device 1 can be performed efficiently.

[0106] According to this embodiment, for example, the apparatus information transmitted from the laser annealing apparatuses 1 installed at multiple locations or the on-site computers K (edge ​​computers) to the information processing device 9 (cloud server) includes operating status data or operating parameters of the laser annealing apparatus 1, such as the number of times voltage is applied to the tube electrodes (TC) of the laser annealing apparatus 1, the number of times the laser oscillates in the laser light source (UC), the unevenness score (a numerical value indicating the calculated surface unevenness) derived based on the substrate image, the availability rate of the laser annealing apparatus 1, abnormal events, and the remaining useful life of replacement parts. Abnormal events include, for example, surface unevenness, brightness reduction, or oxygen concentration abnormalities. In this case, the apparatus information transmitted from each location may include substrate images, and the information processing device 9 (cloud server) may calculate the unevenness score using the substrate images included in the apparatus information. The calculation process of the mura score may use, for example, an mura detection model 901 trained to output mura information related to multiple types of surface mura on a substrate when a substrate image is input, or may use a processing method similar to the surface mura detection method described in Japanese Patent Application Laid-Open No. 2016-129171. The device information transmitted from each location is not limited to including the operating status data used in the summary screen data itself, but may also include original data of the operating status data used in the summary screen data, and the information processing device 9 may use the original data to derive the operating status data used in the summary screen data. The summary screen data includes at least one of the number of voltage applications (TC), number of oscillations (UC), mura score, availability, abnormal events, and remaining useful life of replacement parts for each laser annealing device 1 at any location, and includes relatively important data regarding the operation of the laser annealing device 1. Therefore, on the information terminal T that receives the summary screen data, the main data of each of the multiple laser annealing devices 1 installed at the same location can be displayed on the summary screen, and useful information can be provided to the maintenance staff using the information terminal T.

[0107] According to this embodiment, the information processing device 9 periodically or steadily acquires device information from each location, and periodically generates and outputs summary screen data using, for example, the most recently acquired device information (latest device information). In this manner, the information processing device 9 periodically generates and outputs summary screen data using the periodically acquired device information, thereby updating the summary screen displayed on the information terminal T that acquired the summary screen data to the latest version. At this time, if the number of voltage applications or oscillations included in the currently acquired device information exceeds a predetermined threshold, the information processing device 9 generates summary screen data in which the display format of the number of voltage applications or oscillations that exceeds the threshold is changed, and outputs the changed summary screen data to the information terminal T. When changing the display format, the information processing device 9 may change the color, font, or character size of the number of voltage applications or oscillations displayed on the summary screen. By generating and outputting summary screen data in which the display format of the number of voltage applications or oscillations that exceeds the threshold is changed, the summary screen with the changed display format is displayed on the information terminal T that received the summary screen data, thereby efficiently alerting the maintenance personnel using the information terminal T.

[0108] According to this embodiment, for example, the apparatus information transmitted from the laser annealing apparatuses 1 installed at multiple locations or the on-site computers K (edge ​​computers) to the information processing device 9 (cloud server) includes, for example, the laser pulse energy of the laser light emitted from the laser light source of the laser annealing apparatus 1, the standard deviation of the laser pulse energy, and if the laser annealing apparatus 1 has two laser light sources, the synchronization error between the two laser light sources, and the voltage applied to the tube electrodes. In this case, the apparatus information transmitted from each location includes the laser pulse energy, and the information processing device 9 (cloud server) may use the laser pulse energy included in the apparatus information to perform secondary processing on the data included in the apparatus information, such as calculating the standard deviation, to derive various data. The detailed screen data includes time-series data showing detailed information, such as the laser pulse energy, standard deviation of the laser pulse energy, synchronization error, and voltage applied to the tube electrodes, of the laser annealing apparatus 1 selected on the summary screen. Therefore, on the information terminal T that receives the detailed screen data, time series data showing detailed information of the laser annealing device 1 selected on the summary screen in chronological order can be displayed on the detailed screen, thereby providing useful information to the maintenance personnel using the information terminal T.

[0109] According to this embodiment, the information processing device 9 (cloud server) is equipped with an unevenness detection model 901 that has been trained to output unevenness information regarding multiple types of surface unevenness on the substrate 8 when a substrate image is input. In other words, the information processing device 9 may function as a model server. The information processing device 9 inputs substrate images included in device information acquired from multiple locations into the unevenness detection model 901, thereby acquiring unevenness information from the unevenness detection model 901. The unevenness information output by the unevenness detection model 901 may include the presence or absence of surface unevenness on the surface of the substrate 8, and, if surface unevenness is present, the area and type of the surface unevenness. In this case, if it is estimated that multiple types of surface unevenness have occurred on the surface of the substrate 8, the unevenness detection model 901 may also output the unevenness information including the probability for each type of surface unevenness. The types of surface unevenness include, for example, streak unevenness, poor irradiation, film skipping, and flow unevenness. The information processing device 9 derives unevenness information using the unevenness detection model 901 based on the board image included in the device information, generates detailed screen data including the unevenness information and the board image, and outputs it to an information terminal T (a personal computer for maintenance personnel). The information terminal T, which has acquired the detailed screen data from the information processing device 9, displays a detailed screen in accordance with the detailed screen data. At this time, the detailed screen includes the unevenness information and the board image, so that useful information can be provided to the maintenance personnel. When the unevenness information from the unevenness detection model 901 indicates the presence of surface unevenness, the information processing device 9 may generate summary screen data including an indication that the surface unevenness is present, and transmit this to the information terminal T, thereby updating (re-displaying) the summary screen displayed on the information terminal T.

[0110] According to this embodiment, the information processing device 9 (cloud server) determines, based on the device information from each site, whether or not an abnormal event such as surface unevenness, brightness reduction, or oxygen concentration abnormality has occurred in each laser annealing device 1 installed at the site. In this case, the information processing device 9 is equipped with an unevenness detection model 901 that estimates the presence or absence of surface unevenness and a brightness reduction detection model 902 that estimates the presence or absence of brightness reduction by inputting the device information. The information processing device 9 may determine the presence or absence of surface unevenness or brightness reduction by using the unevenness detection model 901 or the brightness reduction detection model 902. Alternatively, an in-site computer K (edge ​​computer) at each site may determine the presence or absence of an abnormal event in the laser annealing device 1 installed at the same site and transmit the device information including the determination result to the information processing device 9 (cloud server). At this time, the information processing device 9 may extract a determination result regarding the abnormal event included in the device information, thereby deriving whether or not an abnormal event such as surface unevenness, a decrease in brightness, or an oxygen concentration abnormality has occurred in each of the laser annealing devices 1 installed at each of the bases. When the information processing device 9 determines, based on the device information, that an abnormal event has occurred in any of the laser annealing devices 1, the information processing device 9 generates abnormality notification screen data. The information processing device 9 outputs the generated abnormality notification screen data to an information terminal T that displays a summary screen of the base where the laser annealing device 1 where the abnormal event has occurred is installed, thereby causing an abnormality notification screen corresponding to the abnormality notification screen data to be displayed as a pop-up on the information terminal T that is the output destination. That is, the information terminal T that has acquired the abnormality notification screen data notifying the occurrence of an abnormality from the information processing device 9 displays the abnormality notification screen as a pop-up (displays it in a pop-up window) in response to the acquisition of the abnormality notification screen data. Therefore, on the information terminal T, the abnormality notification screen is automatically displayed in a separate window from the summary screen when an abnormality occurs in the laser annealing device 1, and when an abnormal event such as surface unevenness or reduced brightness occurs, maintenance personnel, etc. can be efficiently alerted.

[0111] According to this embodiment, the information processing device 9 (cloud server) that acquires, aggregates, and stores device information from multiple locations is operated or managed, for example, by a maintenance company of the laser annealing device 1. In this case, a summary screen for each location is also displayed on the information terminal T used by the maintenance company. Meanwhile, the information terminal T may display a location selection screen for selecting one of the multiple locations, and the information terminal T may include a location ID uniquely identifying the location selected on the location selection screen in an output request for summary screen data and transmit the same to the information processing device 9. The information terminal T may receive the location selection screen data transmitted from the information processing device 9 and display the location selection screen in accordance with the received location selection screen data. The information processing device 9 acquires from the information terminal T a location ID uniquely identifying one of the multiple locations, and extracts device information associated with the acquired location ID (device information of the selected location) from the stored device information in accordance with the acquired location ID. The information processing device 9 generates summary screen data using the device information extracted in this manner (device information of the selected base), and outputs the summary screen data to the information terminal T that is the sender of the output request for the summary screen data. By generating summary screen data in this manner according to the acquired base ID, the information processing device 9 can efficiently generate summary screen data for each base, even if the number of bases to be managed increases.

[0112] The embodiments disclosed herein are to be considered as illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above meaning, and is intended to include all modifications within the meaning and scope of the claims.

[0113] Multiple claims in the claims may be combined with each other regardless of the form of reference. Multiple dependent claims are defined in the claims that depend on multiple dependent claims. Multiple dependent claims that depend on multiple dependent claims may not be defined in the claims, but multiple dependent claims that depend on multiple dependent claims may be defined.

[0114] S Operation management system GN External network K In-site computer (edge ​​computer, control device) T Information terminal 1 Laser annealing device (laser processing device) 11 Annealing optical system 2 Laser light source 3 Attenuator 4 Polarization ratio control unit 5 Beam shaping optical system 61 Epi-illumination mirror 62 Biplanar phototube 63 OED sensor 64 Line camera (unevenness monitor) 641 Line-type lighting 65 Projection lens 66 Profiler camera (line beam sensor) 7 Laser irradiation chamber 71 Stage 72 Base 8 Board 9 Information processing device (cloud server, model server) 91 Control unit 92 Storage unit M Recording medium P Program (program product) 93 Communication unit 94 Input / output I / F 941 Display device 901 Unevenness detection model 902 Brightness decrease detection model 903 Abnormality detection model

Claims

1. A program causing a computer to execute the following process: acquire device information for each laser annealing device at a plurality of locations; the device information includes an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device; generate summary screen data including summary information using the device information for one or more of the laser annealing devices at the same location based on the identifier; generate detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data; output the generated summary screen data to an information terminal; and, when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, output the detailed screen data to the information terminal.

2. The program according to claim 1, wherein the summary screen data includes at least one of the number of times voltage has been applied to the tube electrodes of each of the laser annealing devices at the same site, the number of oscillations, the unevenness score, the operating rate, abnormal events, and the remaining useful life of replacement parts.

3. The program according to claim 2, wherein, when the number of voltage applications or the number of oscillations exceeds a predetermined threshold, the summary screen data is generated with a modified display format for the number of voltage applications or the number of oscillations that exceeds the threshold, and the modified summary screen data is output.

4. The program according to claim 1, wherein the summary screen data includes an object for identifying any one of the laser annealing devices included in the summary screen data and calling up the detailed screen data, and an output request for the detailed screen data is sent from the information terminal that has acquired the summary screen data when an operation is performed on the object.

5. The program according to claim 1, wherein the detailed screen data is configured for each of the laser annealing devices at the same site, and includes time series data that shows, in time series, at least one of the laser pulse energy of the laser light emitted from the laser light source of the laser annealing device, the standard deviation of the laser pulse energy, the amount of synchronization deviation, and the applied voltage.

6. The program according to claim 1, wherein the device information includes a substrate image captured of a substrate irradiated with laser light from the laser annealing device, and the detailed screen data includes the substrate image and unevenness information output by an unevenness detection model trained to output unevenness information regarding multiple types of surface unevenness on the substrate based on the substrate image.

7. The program according to claim 1, which determines whether an abnormal event has occurred in the laser annealing device that is the subject of the device information based on the acquired device information, and if it is determined that the abnormal event has occurred, generates abnormality notification screen data, and outputs the generated abnormality notification screen data, thereby popping up an abnormality notification screen corresponding to the abnormality notification screen data on the information terminal that is the output destination.

8. The program according to claim 1, further comprising: acquiring a base ID that uniquely identifies one of the plurality of bases; and generating the summary screen data according to the acquired base ID.

9. An information processing method for causing a computer to execute the following processes: acquire device information for each laser annealing device at a plurality of locations; the device information includes an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device; generate summary screen data including summary information using the device information for one or more of the laser annealing devices at the same location based on the identifier; generate detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data; output the generated summary screen data to an information terminal; and, when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, output the detailed screen data to the information terminal.

10. The information processing method according to claim 9, wherein the summary screen data includes at least one of the number of times voltage is applied to the tube electrodes of each of the laser annealing devices at the same site, the number of oscillations, the unevenness score, the operating rate, abnormal events, and the remaining useful life of replacement parts.

11. An information processing method according to claim 10, wherein, when the number of voltage applications or the number of oscillations exceeds a predetermined threshold, the summary screen data is generated with a modified display format for the number of voltage applications or the number of oscillations that exceeds the threshold, and the modified summary screen data is output.

12. The information processing method according to claim 9, wherein the summary screen data includes an object for identifying any one of the laser annealing devices included in the summary screen data and calling up the detailed screen data, and an output request for the detailed screen data is sent from the information terminal that has acquired the summary screen data when an operation is performed on the object.

13. An information processing device having a control unit, wherein the control unit: acquires device information for each of laser annealing devices at a plurality of locations; the device information includes an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device; generates summary screen data including summary information using the device information for one or more of the laser annealing devices at the same location based on the identifier; generates detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data; outputs the generated summary screen data to an information terminal; and when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, outputs the detailed screen data to the information terminal.

14. The information processing device according to claim 13, wherein the summary screen data includes at least one of the number of times voltage is applied to the tube electrodes of each of the laser annealing devices at the same site, the number of oscillations, the unevenness score, the operating rate, abnormal events, and the remaining useful life of replacement parts.

15. An information processing device as described in claim 14, wherein, when the number of voltage applications or the number of oscillations exceeds a predetermined threshold, the summary screen data is generated with a modified display format for the number of voltage applications or the number of oscillations that exceeds the threshold, and the modified summary screen data is output.

16. The information processing device according to claim 13, wherein the summary screen data includes an object for identifying any one of the laser annealing devices included in the summary screen data and calling up the detailed screen data, and an output request for the detailed screen data is sent from the information terminal that has acquired the summary screen data when an operation is performed on the object.

17. A laser processing device equipped with a laser light source that emits laser light, the laser processing device having the functions of: acquiring device information for each laser annealing device at a plurality of locations, the device information including an identifier that uniquely identifies the location where the laser annealing device is installed and the laser annealing device; generating summary screen data including summary information using the device information for one or more of the laser annealing devices at the same location based on the identifier; generating detailed screen data including detailed information using the device information for each of the one or more laser annealing devices included in the summary screen data; outputting the generated summary screen data to an information terminal; and, when an output request for the detailed screen data for any of the laser annealing devices included in the summary screen data is received from the information terminal that acquired the summary screen data, outputting the detailed screen data to the information terminal.

18. The laser processing device according to claim 17, wherein the summary screen data includes at least one of the number of times voltage has been applied to the tube electrodes of each of the laser annealing devices at the same site, the number of oscillations, the unevenness score, the operating rate, abnormal events, and the remaining useful life of replacement parts.

19. A laser processing device as described in claim 18, wherein, when the number of voltage applications or the number of oscillations exceeds a predetermined threshold, the summary screen data is generated with a modified display format for the number of voltage applications or the number of oscillations that exceeds the threshold, and the modified summary screen data is output.

20. The laser processing device described in claim 17, wherein the summary screen data includes an object for identifying any one of the laser annealing devices included in the summary screen data and calling up the detailed screen data, and an output request for the detailed screen data is sent from the information terminal that has acquired the summary screen data when an operation is performed on the object.

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