Composite structure template for nanoimprint lithography and fabrication method therefor

Abstract

A composite structure template (5) for nanoimprint lithography and a fabrication method therefor. The composite structure template (5) comprises an imprinting soft membrane (51) and a framework (52) embedded in the imprinting soft membrane (51), wherein the framework (52) is hollow, and the framework (52) is used for supporting the self-weight of the imprinting soft membrane (51), and is capable of undergoing millimeter-scale bending when the composite structure plate (5) is subjected to pressure. The composite structure template (5) has a simple structure, and the overall rigidity of the imprinting soft membrane (51) is increased by means of the framework (52), thereby eliminating central sagging. During imprinting, the composite structure template (5) can still retain the curvature deformation effect and the ultraviolet light transmission effect of conventional imprinting soft membranes, allowing for uniform pattern transfer from the imprinting soft membrane (51) to a substrate.

Description

Composite structure template for nanoimprinting and preparation method thereof TECHNICAL FIELD

[0001] The present application belongs to the technical field of nanoimprinting, and particularly relates to a composite structure template for nanoimprinting and a preparation method thereof. BACKGROUND

[0002] Micro-nanoimprinting technology commonly uses a PDMS soft template to perform imprinting on imprinting glue on a wafer, as shown in FIG. 1, and the main working process of nanoimprinting is as follows:

[0003] First, a PDMS soft template 1 with a pattern complementary to the pattern after imprinting is placed on an aluminum ring 2 between an upper ultraviolet lamp and a lower platform.

[0004] Second, a wafer 3 coated with imprinting glue is placed on the platform 4.

[0005] Third, the air pressure P1 (such as 20 kpa, etc.) between the upper PDMS soft template 1 and the ultraviolet lamp is filled.

[0006] Fourth, the wafer on the platform 4 is raised until it contacts the PDMS soft template 1.

[0007] Fifth, the air pressure between the PDMS soft template 1 and the ultraviolet lamp is filled to P2 (such as 50 kpa, etc.).

[0008] Sixth, the wafer on the platform 4 is raised again until the wafer 3 is fully in contact with the PDMS soft template 1.

[0009] Seventh, the ultraviolet lamp gate is opened, and the ultraviolet light transmits through the PDMS soft template 1 from the top to expose and cure the imprinting glue.

[0010] Eighth, the air pressure is released, and the platform 4 and the wafer 3 are lowered, and the imprinting is completed.

[0011] The conventional PDMS soft template is supported by an aluminum ring, and is between the upper ultraviolet lamp and the lower wafer. Because of the gravity of the PDMS soft template itself, and to avoid left and right deviation when contacting the wafer, the air pressure P1 is slightly filled, and the platform is gradually raised, the PDMS soft template and the wafer are in contact and pushed from the center to the outside, and at this time, the air pressure P2 is filled. When the pressure P1 is applied, the center of the PDMS soft template forms a curvature, the pattern is stretched and slightly deformed. When the air pressure P2 is applied, the expansion and pushing phenomenon from the center to the outside makes the imprinted pattern possibly inclined. SUMMARY

[0012] To solve the above technical problems, the present application provides a composite structure template for nanoimprinting and a preparation method thereof.

[0013] To achieve the above purpose, the technical scheme of the present application is as follows:

[0014] In one aspect, the application discloses a composite structure template for nano-imprinting, comprising: an imprinting soft film and a skeleton embedded in the imprinting soft film, the skeleton being in a hollow shape, the skeleton being used for supporting the self-weight of the imprinting soft film and being capable of bending in millimeter level when the composite structure film plate is subjected to pressure.

[0015] Based on the above technical solution, the following improvements can be made:

[0016] As a preferred solution, the structure of the imprinting soft film is matched with the structure of the substrate to be imprinted.

[0017] As a preferred solution, the structure of the skeleton is matched with the structure of the substrate to be imprinted.

[0018] As a preferred solution, the skeleton comprises an outer main ring and a reticular support distributed inside the outer main ring.

[0019] As a preferred solution, the diameter of the outer main ring is greater than the diameter of the reticular support.

[0020] As a preferred solution, the grid density of the reticular support near the center thereof is greater than the grid density near the edge thereof.

[0021] In addition, the application also discloses a preparation method of a composite structure template for nano-imprinting, which is used for preparing any of the above composite structure templates, and comprises the following steps:

[0022] Step S1: injecting a quantitative soft film glue into a soft film injection mold so that the soft film glue covers a micro-nano structure pattern area on the soft film injection mold;

[0023] Step S2: placing the skeleton into the soft film injection mold;

[0024] Step S3: further injecting a quantitative soft film glue into the soft film injection mold;

[0025] Step S4: demolding after heating and curing.

[0026] As a preferred solution, the imprinting soft film is a PDMS soft film.

[0027] The skeleton is made of one material selected from PMMA, PC, ABS, transparent crystal, metal, acrylic and glass fiber.

[0028] As a preferred solution, a soft film injection mold matched with the structure of the substrate to be imprinted is prepared.

[0029] As a preferred solution, a skeleton matched with the structure of the substrate to be imprinted is prepared.

[0030] The application discloses a composite structure template for nano-imprinting and a preparation method thereof, and has the following beneficial effects.

[0031] The application has simple structure, and the whole rigidity of the imprinting soft film is increased by the framework to eliminate the central sag. During imprinting, the composite structure template can still have the curvature deformation effect and the ultraviolet light transmission effect of the traditional imprinting soft film, and the patterns on the imprinting soft film are pressed on the substrate in an equalizing manner. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0033] Fig. 1 is a schematic diagram of the nano-imprinting of the PDMS soft template provided by the prior art.

[0034] Fig. 2 is a schematic diagram of the nano-imprinting of the composite structure template provided by the embodiments of the application.

[0035] Fig. 3 is a schematic diagram of the structure of the composite structure template provided by the embodiments of the application.

[0036] Fig. 4 is a sectional view of the composite structure template provided by the embodiments of the application.

[0037] Fig. 5 is another sectional view of the composite structure template provided by the embodiments of the application.

[0038] 1-PDMS soft template, 2-aluminum ring, 3-wafer, 4-platform;

[0039] 5-composite structure template, 51-imprinting soft film, 52-framework, 521-outer main ring, 522-net support. DETAILED DESCRIPTION

[0040] The preferred embodiments of the application will be described in detail below with reference to the drawings.

[0041] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only some of the embodiments of the application, but not all the embodiments. Based on the embodiments in the application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.

[0042] In addition, the expression of "including" element is an "open" expression, which only means that the corresponding component or step exists, and should not be interpreted as excluding additional components or steps.

[0043] To achieve the purpose of the present application, in some embodiments of the composite structure template for nano-imprinting and the preparation method thereof, as shown in Figures 2-4, the composite structure template 5 comprises: an imprinting soft film 51 and a skeleton 52 embedded in the imprinting soft film 51, the skeleton is in a hollow shape, the skeleton 52 is used to support the self-weight of the imprinting soft film, and can be bent by millimeter when the composite structure film plate is under pressure.

[0044] To further optimize the implementation effect of the present application, in some other embodiments, the remaining features are the same, and the difference lies in that the structure of the imprinting soft film matches the structure of the substrate to be imprinted.

[0045] Further, on the basis of the above-mentioned embodiments, the structure of the skeleton matches the structure of the substrate to be imprinted.

[0046] It is worth noting that when the substrate to be imprinted is not a conventional planar substrate, the imprinting soft film is supported by the skeleton, so that the composite structure template can have a matching structure with the substrate to be imprinted. For example, when the substrate to be imprinted is a curved surface with downward bending on both sides, the composite structure template can be designed to match this structure (as shown in Figure 5), so that the subsequent pattern imprinting is more accurate.

[0047] To further optimize the implementation effect of the present application, in some other embodiments, the remaining features are the same, and the difference lies in that the skeleton 52 comprises: an outer main ring 521 and a mesh support 522 distributed inside the outer main ring 521.

[0048] The ultraviolet light can pass through the mesh holes of the mesh support 522.

[0049] Further, on the basis of the above-mentioned embodiments, the diameter of the outer main ring 521 is greater than the diameter of the mesh support 522, which ensures the overall rigidity of the skeleton.

[0050] Further, on the basis of the above-mentioned embodiments, the grid density near the center of the mesh support is greater than the grid density near the edge thereof.

[0051] The rigidity of the center of the skeleton is stronger and less likely to sag.

[0052] The embodiment of the present application also discloses a preparation method of a composite structure template for nano-imprinting, which is used to prepare the composite structure template disclosed in any of the above-mentioned embodiments, comprising:

[0053] Step S1: injecting a quantitative soft film glue into the soft film injection mold, so that the soft film glue covers the micro-nano structure pattern area on the soft film injection mold;

[0054] Step S2: placing the skeleton into the soft film injection mold;

[0055] Step S3: further injecting a quantitative soft film glue into the soft film injection mold;

[0056] Step S4: after heating and curing, demolding.

[0057] The embossed soft film is a PDMS soft film.

[0058] The skeleton is made of one of PMMA, PC, ABS, transparent crystal, metal, acrylic, and glass fiber.

[0059] Further, a soft film injection mold matched with the structure of the substrate to be embossed is prepared.

[0060] Further, a skeleton matched with the structure of the substrate to be embossed is prepared.

[0061] The present application discloses a composite structure template for nano-imprinting and a preparation method thereof, which has the following beneficial effects:

[0062] The present application has the following beneficial effects:

[0063] The present application can effectively solve the problems of soft template gravity sagging, large contact range when bending, and the like, which cause the wafer (substrate) to easily present uneven stretching of the soft template during imprinting, and the problems of forming an arc surface between the soft template and the embossed pattern during demolding, and further forming soft template deformation and pulling the pattern, which causes pattern defects, and can also withstand the application of inflation pressure, so that the PDMS pattern is uniformly applied to the wafer by pressure.

[0064] Further, the composite structure template of the present application can be supported by the skeleton to bend into a structure matched with the substrate to be embossed, thereby ensuring the accuracy of the imprinting.

[0065] In the description of the present application, it needs to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "central", "both ends" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0066] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "setting", "connecting", "fixing", "screwed" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0067] The basic principles and main features of the present application and the advantages of the present application have been shown and described above, those skilled in the art should understand that the present application is not limited by the above examples, the above examples and the description in the specification are only to illustrate the principles of the present application, various changes and improvements can be made to the present application without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the present application, the scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A composite structure template for nanoimprinting, characterized by, The composite structure film plate comprises: a soft film and a skeleton embedded in the soft film, the skeleton being in a hollow shape, the skeleton being used to support the dead weight of the soft film and being able to bend in millimeter level when the composite structure film plate is under pressure.

2. The composite structural template of claim 1, wherein, The structure of the soft film matches the structure of the substrate to be embossed.

3. The composite structural form of claim 2, wherein, The structure of the skeleton matches the structure of the substrate to be embossed.

4. The composite structural form of any of claims 1-3, wherein, The skeleton comprises an outer main ring and a mesh support distributed inside the outer main ring.

5. The composite structural form of claim 4, wherein, The diameter of the outer main ring is larger than the diameter of the mesh support.

6. The composite structural template of claim 4, wherein, The mesh density of the mesh support near the center is larger than the mesh density near the edge.

7. A method for preparing a composite structure template for nanoimprinting, characterized by, A method for preparing the composite structure template according to any one of claims 1-6, comprising: S1: injecting a certain amount of soft film glue into a soft film injection mold so that the soft film glue covers the area with micro-nano structure patterns on the soft film injection mold; S2: placing the skeleton into the soft film injection mold; S3: further injecting a certain amount of soft film glue into the soft film injection mold; S4: after heating and curing, demolding.

8. The preparation method according to claim 7, characterized in that, The soft film is a PDMS soft film. The skeleton is made of one of PMMA, PC, ABS, transparent crystal, metal, acrylic and glass fiber.

9. The preparation method according to claim 7, characterized in that, A soft film injection mold matching the structure of the substrate to be embossed is prepared.

10. The preparation method according to claim 7, characterized in that, A skeleton matching the structure of the substrate to be embossed is prepared.

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