Holding device

The holding device with actuators and optical waveguides simplifies deformation measurement and correction, addressing complexity and cost issues in existing systems, enabling precise deformation detection for optical elements.

WO2026013230A1PCT designated stage Publication Date: 2026-01-15PHYSIK INSTRUMENTE (PI) GMBH & CO KG
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Patent Information

Application Number
PCT/EP2025/069842
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-07-10
Filing Date
2025-07-10
Publication Date
2026-01-15

AI Technical Summary

Technical Problem

The existing measuring systems for optical elements in projection exposure systems require complex reflective elements that affect mechanical properties and alignment, making them cumbersome and costly.

Method used

A holding device with actuators and measuring elements on a support body that allows for detachable attachment of flat elements, enabling direct measurement of deformations without additional optical elements, and using optical waveguides for precise deformation detection.

Benefits of technology

The solution simplifies the design, reduces costs, and allows for precise deformation correction of optical surfaces, facilitating applications in integrated circuits, semiconductor processes, and other fields with high spatial resolution.

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Abstract

The invention relates to a holding device (1) for supporting a flat element (2), wherein the flat element (2) can be detachably fastened, via one of its two main surfaces (22, 24), which main surface is a contact surface (26), to support points (32) of a support body (3) of the holding device, and wherein at least one actuator (4) and at least one measuring element (52) of a measurement system (5) are arranged on the support body, and the at least one actuator is designed, when a flat element is detachably fastened to the holding device, to exert a force on its contact surface and thereby to locally deform the flat element in the region of a contact location (6) between the actuator and the contact surface, and the at least one measuring element is designed to contactlessly determine, by direct measurement against the contact surface, a change, caused by the local deformation, in a distance (A) between the contact surface of the flat element in the immediate vicinity of the contact location and a reference surface of the measuring element.
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Citation Information

Patent Citations

  • Optical module

    DE102014209147A1

  • Projection exposure system for microlithography with multiple optical elements

    DE102014209873A1

  • Optical device, method for setting a target deformation and lithography system

    DE102021205425A1