Light irradiation device and measurement device

Abstract

Provided is a light irradiation device 2 that can be mounted to a measuring instrument capable of measuring the surface shape of an object under measurement through a light cutting method, the light irradiation device 2 comprising: a light source LS2 for emitting marker light indicating a measurable range, which is the range in which the measuring instrument can measure the surface shape of the object under measurement; and a position changing unit 23 having a changing member for changing the direction of radiation of the marker light.

Description

Light irradiation device and measuring device

[0001] The present invention relates to a light irradiation device and a measurement device for measuring the surface shape of a measurement object by a light section method.

[0002] 2. Description of the Related Art There is known an apparatus that projects a mark onto a measurement object so that a measuring instrument that measures the three-dimensional shape of the measurement object can perform appropriate measurement (see, for example, Patent Document 1 and Non-Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2015-206753

[0004] “Absolute Scanner Module,” [online], [searched June 10, 2024], Internet <URL: https: / / hexagon.com / ja / products / absolute-scanner-as1-portable-measuring-arms / absolute-scanner-modular>

[0005] When measuring the surface shape of a measurement object using a measuring instrument using the light-section method, there is a measurable range within which the measuring instrument can measure the surface shape of the measurement object. It is effective for the measuring instrument to have a function to project marker light indicating the measurable range so that the measuring instrument can be installed in an appropriate position. However, when multiple measuring instruments are used in a fixed manner on a factory production line, although it is sufficient to check the measurable range of each measuring instrument when installing it, there is a problem in that the cost of the production equipment increases if each of the multiple measuring instruments has a function to emit marker light indicating the measurable range.

[0006] The present invention has been made in consideration of these points, and aims to enable appropriate installation of measuring instruments while suppressing the cost of production equipment.

[0007] A light irradiation device according to a first aspect of the present invention is a light irradiation device that can be attached to a measuring instrument that can measure the surface shape of a measurement object by a light-section method, and includes a light source that emits marker light that indicates a measurable range within which the measuring instrument can measure the surface shape of the measurement object, and a position change unit that has a change member for changing the irradiation direction of the marker light.

[0008] The position changer may be configured to change a position or an angle of the change member so that the marker light is irradiated onto a center position of the measurable range on the surface of the object to be measured.

[0009] The position changer may be configured to change a position or an angle of the change member so that the marker light is irradiated onto both end positions of the measurable range on the surface of the object to be measured.

[0010] The position changer may have an opening formed therein that allows the marker light emitted by the light source to pass therethrough, and may include a slit member as the changer, the slit member being capable of changing the position of the light irradiation device.

[0011] The light irradiation device may further include a memory unit that stores the position of the slit member in association with the type of measuring instrument, an actuator that moves the slit member, and a control unit that identifies the type of measuring instrument and controls the actuator to move the slit member to the position stored in the memory unit in association with the identified type.

[0012] The position change unit may have as the change member an optical element that refracts or reflects the marker light emitted by the light source, and that can change the angle or position of the marker light so that the traveling direction of the refracted marker light changes.

[0013] The measuring instrument may further include a memory unit that stores the angle or position of the optical element in association with the type of the measuring instrument, an actuator that changes the angle of the optical element relative to the light source or moves the optical element, and a control unit that identifies the type of the measuring instrument and controls the actuator to change the angle of the optical element to the angle stored in the memory unit in association with the identified type, or to move the optical element to the position stored in the memory unit in association with the identified type.

[0014] The position change unit may have as the change member a lens that refracts the marker light emitted by the light source and that can change the position or angle of the lens in the light irradiation device so as to change the direction of travel of the marker light after refraction.

[0015] The measuring instrument may further include a memory unit that stores the position or angle of the lens in association with the type of the measuring instrument, an actuator that moves the lens or changes the angle of the lens relative to the light source, and a control unit that identifies the type of the measuring instrument and controls the actuator to move the lens to a position stored in the memory unit in association with the identified type, or to change the angle of the lens to an angle stored in the memory unit in association with the identified type.

[0016] The light irradiation device may further have an attachment section for attaching the light irradiation device to the measuring device so that the positional relationship between the measuring device and the light irradiation device is a predetermined relationship, and a housing having an auxiliary mark for changing the position or angle of the change member so that the irradiation direction of the marker light becomes a predetermined direction corresponding to the measurable range when the light irradiation device is attached to the measuring device so that the positional relationship is the predetermined relationship.

[0017] The light irradiation device may further have a plurality of mounting sections corresponding to a plurality of measuring devices of different types, and a plurality of auxiliary marks associated with the types may be attached to the housing.

[0018] The change member may be capable of changing the position or angle of the change member in the light irradiation device by a force applied by a protrusion of the measuring device when the measuring device is attached to the light irradiation device.

[0019] The light irradiation device may further have an attachment section for enabling the light irradiation device to be attached to multiple side surfaces of the measuring instrument, and a housing having an auxiliary mark associated with the side surface for changing the position or angle of the change member so that the irradiation direction of the marker light becomes a predetermined direction corresponding to the measurable range when the light irradiation device is attached to any one of the multiple side surfaces.

[0020] A measuring device according to a second aspect of the present invention comprises a measuring instrument capable of measuring the surface shape of a measurement object by a light-section method, and a light irradiation device attachable to the measuring instrument, wherein the light irradiation device has a light source that emits marker light indicating a measurable range within which the measuring instrument can measure the surface shape of the measurement object, and a position change unit having a change member for changing the irradiation direction of the marker light.

[0021] According to the present invention, it is possible to suppress the cost of production equipment and to appropriately install measuring instruments.

[0022] 1 is a diagram showing an example of the configuration of a measuring device 100 including a measuring instrument 1 and a light irradiation device 2. FIG. 1 is a diagram showing an example of the relationship between the measurable range of the measuring instrument 1 and the marker light of the light irradiation device 2. FIG. 1 is a diagram showing an example of the configuration of the measuring instrument 1. FIG. 2 is a diagram showing an example of the configuration of the light irradiation device 2. FIG. 3 is a diagram showing a state in which the marker light M is irradiated when the surface of the workpiece W is closer to the measuring instrument 1 than the center position of the measurable range. FIG. 4 is a diagram showing a state in which the marker light M is irradiated when the surface of the workpiece W is farther from the measuring instrument 1 than the center position of the measurable range. FIG. 5 is a diagram showing a state in which the marker light M is irradiated when the surface of the workpiece W is within the measurable range. FIG. 6 is a diagram showing a state in which the marker light M is irradiated when the surface of the workpiece W is outside the measurable range. FIG. 7 is a diagram showing an example of changing the irradiation direction of the marker light using a slit member. FIG. 8 is a diagram showing an example of a position setting table. FIG. 9 is a diagram showing an example of changing the irradiation direction of the marker light when multiple openings are formed in the slit member. FIG. 10 is a diagram showing an example of changing the irradiation direction of the marker light using a prism. FIG. 11 is a diagram showing an example of changing the irradiation direction of the marker light using a lens. FIG. 12 is a diagram showing an example of a housing of the light irradiation device 2 with an auxiliary mark for changing the position of the changing member. 10A and 10B are diagrams illustrating an example of changing the irradiation direction of the marker light using a protrusion of the measuring instrument 1.

[0023] <First embodiment> [Outline of measuring device 100] Fig. 1 is a diagram showing an example of the configuration of a measuring device 100 including a measuring instrument 1 and a light irradiation device 2. The measuring instrument 1 is a device capable of measuring the surface shape of a workpiece W (measurement object) by a light section method. The measuring instrument 1 has a light source LS1 and a camera CA. In the light section method, as shown in Fig. 1, laser light L emitted from the light source LS1 is irradiated onto the workpiece W and reflected by the surface of the workpiece W. Then, based on the shape of reflected light R from the workpiece W that is imaged on the image sensor of the camera CA, the measuring instrument 1 can measure the height, shape, position, etc. of the workpiece W.

[0024] In order for the measuring instrument 1 to measure the workpiece W, the reflected light R from the workpiece W must reach the imaging range of the imaging element of the camera CA. If the installation position of the measuring instrument 1 is too close or too far from the position of the workpiece W, the reflected light R will not be included in the imaging range of the imaging element, so the measuring instrument 1 needs to be installed in an appropriate position.

[0025] Conventionally, measuring instruments have been equipped with a function for emitting a marker light indicating the measurable range so that the measuring instrument can be installed in an appropriate position. However, when a large number of measuring instruments are fixed and used on a factory production line, although it is sufficient to check the measurable range of each measuring instrument when installing it, providing each of the many measuring instruments with a function for emitting a marker light indicating the measurable range increases the cost of the production equipment. To solve this problem, measuring device 100 has a light irradiation device 2 that is detachable from measuring instrument 1 and emits a marker light indicating the measurable range of measuring instrument 1.

[0026] The light irradiating device 2 has a light source LS2 and a changing member for changing the irradiation direction of the marker light M emitted by the light source LS2. The light source LS2 emits the marker light M that indicates the measurable range of the measuring instrument 1. As will be described in detail later, the marker light M is, for example, a single spot light or a single sheet light. The wavelength of the marker light M emitted by the light source LS2 of the light irradiating device 2 is different from the wavelength of the laser light L emitted by the light source LS1 of the measuring instrument 1.

[0027] Fig. 2 is a diagram showing an example of the relationship between the measurable range of the measuring instrument 1 and the marker light M of the light irradiation device 2. Fig. 2 schematically shows the measuring device 100 and the workpiece W as viewed from the side. The thick line in Fig. 2 in the direction of the laser light L indicates the measurable range. Fig. 2 shows the state in which the light irradiation device 2 is emitting marker light M that indicates the center of the measurable range. Position P1 is the measurement target position on the workpiece W (i.e., the position where the laser light L is irradiated).

[0028] 2(a) shows a state in which the measuring instrument 1 is installed at an appropriate position relative to the workpiece W. In this state, a marker light M is also irradiated at position P1. The user can recognize that the measuring instrument 1 is installed at an appropriate position because the marker light M is irradiated at position P1.

[0029] 2(b) shows a state in which the measuring instrument 1 is installed in a position that is too close to the workpiece W. In this state, the marker light M is irradiated at position P2, which is distant from position P1. The user can recognize that the measuring instrument 1 is not installed in an appropriate position because the marker light M is irradiated at position P2. The user can install the measuring instrument 1 in an appropriate position by moving the position of the measuring instrument 1 so that the irradiation position of the marker light M approaches position P1.

[0030] As described above, the measurable range differs depending on the type of measuring instrument 1, and therefore the irradiation direction of the marker light M emitted by the light irradiation device 2 needs to be changed depending on the type of measuring instrument 1. Therefore, the light irradiation device 2 has a changer for changing the irradiation direction of the marker light M. As will be described in detail later, the light irradiation device 2 may be configured so that the user can change the irradiation direction of the marker light M by operating the changer, or the light irradiation device may change the irradiation direction of the marker light M by controlling the changer based on the type of measuring instrument 1. Furthermore, an auxiliary mark may be attached to the housing of the light irradiation device 2 to allow the user to manually change the position or angle of the changer so that the irradiation direction of the marker light M is at a position corresponding to the measurable range.

[0031] In this way, the light irradiation device 2 according to this embodiment is detachable from the measuring instrument 1 and has a change member for changing the irradiation direction of the marker light M. This eliminates the need for each of the multiple measuring instruments 1 to have the function of emitting a mark indicating the measurable range, and at the same time makes it possible to display an appropriate measurable range according to the type of measuring instrument 1. As a result, it becomes possible to appropriately install the measuring instruments 1 while suppressing the cost of production equipment.

[0032] Furthermore, by configuring the light irradiation device 2 to be detachable from the measuring instrument 1, the measuring instrument 1 can be made smaller than a measuring instrument that has the function of irradiating a mark indicating the measurable range, which results in a reduction in the installation space for the measuring instrument 1 on a factory production line.

[0033] 3 is a diagram showing an example of the configuration of the measuring device 1. The measuring device 1 has an attachment unit A1, a light source LS1, a camera CA, a measuring device communication unit 11, a storage unit 12, and a control unit 13.

[0034] The mounting part A1 is a portion to which the light irradiation device 2 is detachably attached. The mounting part A1 is provided, for example, on the side surface of the measuring device 1, and the light irradiation device 2 is attached to the side surface of the measuring device 1 as shown in Fig. 1. The mounting part A1 may have any shape as long as it can be coupled to the mounting part A2 of the light irradiation device 2.

[0035] The light source LS1 emits a laser light L for measuring the surface shape of the workpiece W by the light cutting method in accordance with control from the control unit 13. The light source LS1 irradiates the laser light L.

[0036] The camera CA has an imaging element. The imaging element of the camera CA receives reflected light R from the workpiece W. The camera CA inputs image data indicating the reflected light R to the control unit 13. The camera CA may store the image data in the storage unit 12 so that the control unit 13 can process the image data.

[0037] The meter communication unit 11 is a communication interface for communicating with the light irradiation device 2. The meter communication unit 11 transmits, for example, information indicating the type of the meter input from the control unit 13 to the light irradiation device 2. The wireless communication technology used by the meter communication unit 11 is, for example, Bluetooth Low Energy (BLE), near field communication (NFC), radio frequency identification (RFID), or the like.

[0038] The storage unit 12 is a storage medium including a ROM (Read Only Memory) and a RAM (Random Access Memory), etc. The storage unit 12 stores programs executed by the control unit 13. The storage unit 12 also stores the type of measuring device.

[0039] The control unit 13 is, for example, a central processing unit (CPU). The control unit 13 executes the information processing program stored in the storage unit 12.

[0040] The control unit 13 controls the light source LS1 to start or end the irradiation of the laser light L. In addition, the control unit 13 determines the height, shape, position, etc. of the workpiece W based on information indicating the reflected light R input from the camera CA.

[0041] 4 is a diagram showing an example of the configuration of the light irradiation device 2. The light irradiation device 2 includes an attachment unit A2, a light source LS2, a reading unit 20, a device communication unit 21, an operation unit 22, a position change unit 23, an actuator 24, a storage unit 25, and a control unit 26.

[0042] The mounting part A2 is a part of the light irradiation device 2 for detachably mounting the light irradiation device 2 to the measuring device 1. The mounting part A2 is a member for mounting the light irradiation device 2 to the measuring device 1 so that the measuring device 1 and the light irradiation device 2 have a predetermined positional relationship. The predetermined relationship is, for example, a positional relationship in which the side surface of the measuring device 1 having the mounting part A1 and the side surface of the light irradiation device 2 having the mounting part A2 are parallel and adjacent to each other. The position at which the mounting part A1 is provided may vary depending on the type of measuring device 1. Therefore, the light irradiation device 2 may have multiple mounting parts A2 corresponding to multiple measuring devices 1 of different types.

[0043] The mounting unit A2 is provided on the side of the light irradiation device 2. The mounting unit A2 may have any shape as long as it can be coupled to the mounting unit A1 of the meter 1. The mounting unit A2 may recognize a protrusion pattern formed on the mounting unit A1 of the meter 1 that indicates the type of meter 1, and input information indicating the recognized protrusion pattern to the control unit 26. As an example, the mounting unit A2 may have multiple push switches, and input information to the control unit 26 for identifying the push switch that has been pressed by one or more protrusions corresponding to the protrusion pattern. This allows the control unit 26 to identify the type of meter 1.

[0044] The light source LS2 emits marker light that indicates the measurable range of the measuring instrument 1 in response to control from the control unit 26. The marker light emitted by the light source LS2 is irradiated as marker light M to the outside of the light irradiation device 2 via the position change unit 23. The irradiation direction of the marker light M is determined by the position change unit 23. As a result of determining the irradiation direction of the marker light M, the projection position of the marker light M on the workpiece W is also determined.

[0045] Reading unit 20 is a barcode reader or a camera. Reading unit 20 reads, for example, a code attached to measuring device 1 to identify the type of measuring device 1, and inputs information indicating the read code to control unit 26. The code is, for example, a one-dimensional barcode or a two-dimensional image code such as a QR code (registered trademark). Reading unit 20 may also photograph a protrusion pattern formed on mounting unit A1 of measuring device 1, and input information indicating the protrusion pattern identified based on the photographed image to control unit 26.

[0046] The device communication unit 21 is a communication interface for communicating with the measuring device 1. The device communication unit 21 inputs, for example, information received from the measuring device 1 and indicating the type of the measuring device 1 to the control unit 26.

[0047] The operation unit 22 is a device that receives user operations, such as a keyboard or a touch panel. The operation unit 22 may receive input of the type of the meter 1 from the user and input information indicating the received type of the meter 1 to the control unit 26.

[0048] The position change unit 23 has a change member for changing the irradiation direction of the marker light. The position change unit 23 is configured to be able to change the position or angle of the change member so that the marker light emitted by the light irradiation device 2 is irradiated at the center position of the measurable range on the surface of the workpiece W, for example.

[0049] 5A and 5B are diagrams showing a state in which the marker light M is irradiated onto the surface of the workpiece W when the surface is closer to the measuring instrument 1 than the center position of the measurable range. Fig. 5A is a side view of the measuring instrument 1 and the workpiece W. Figs. 5B and 5C are views of the workpiece W as seen from the measuring instrument 1 side.

[0050] Fig. 5(b) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is a single spot light. Fig. 5(c) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is a single sheet light. When the top surface of the workpiece W is closer to the measuring instrument 1 than the center position O of the measurable range, as shown in Figs. 5(b) and 5(c), the marker light M is located to the left of the laser light L. By seeing such marker light M, the user can recognize that the measuring instrument 1 is too close to the workpiece W.

[0051] 6A and 6B are diagrams showing a state in which the marker light M is irradiated onto the surface of the workpiece W when the surface is positioned farther from the center of the measurable range than the measuring instrument 1. Fig. 6A is a side view of the measuring instrument 1 and the workpiece W. Figs. 6B and 6C are views of the workpiece W as viewed from the measuring instrument 1 side.

[0052] Fig. 6(b) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is a single spot light. Fig. 6(c) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is a single sheet light. When the top surface of the workpiece W is farther from the measuring instrument 1 than the center position O of the measurable range, as shown in Figs. 6(b) and 6(c), the marker light M is located to the right of the laser light L. By seeing such marker light M, the user can recognize that the measuring instrument 1 is too far from the workpiece W.

[0053] The position change unit 23 may be configured to be able to change the position or angle of the change member so that the marker light emitted by the light irradiation device 2 is irradiated onto positions at both ends of the measurable range on the surface of the workpiece W. When the marker light is irradiated onto positions at both ends of the measurable range, the marker light irradiated from the light irradiation device 2 is, for example, two spot lights or two sheet lights. By irradiating the marker light onto positions at both ends of the measurable range, the user can determine whether the top surface of the workpiece W is within the measurable range.

[0054] 7A and 7B are diagrams showing a state in which the marker light M is irradiated onto the surface of the workpiece W when the surface is within the measurable range. Fig. 7A is a side view of the measuring instrument 1 and the workpiece W. Figs. 7B and 7C are diagrams of the workpiece W as seen from the measuring instrument 1 side.

[0055] Fig. 7(b) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is two spot lights. Fig. 7(c) is a diagram of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is two sheet lights. When the top surface of the workpiece W is within the measurable range, as shown in Figs. 7(b) and 7(c), the laser light L is located in the area sandwiched between the two marker lights M. By seeing such marker light M, the user can recognize that the measuring instrument 1 is at a distance where the workpiece W can be measured.

[0056] 8A and 8B are diagrams showing a state in which the marker light M is irradiated when the surface of the workpiece W is outside the measurable range. Fig. 8A is a side view of the measuring instrument 1 and the workpiece W. Figs. 8B and 8C are diagrams of the workpiece W as seen from the measuring instrument 1 side.

[0057] Fig. 8(b) is a view of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is two spot lights. Fig. 8(c) is a view of the workpiece W viewed from the side of the measuring instrument 1 when the marker light M is two sheet lights. When the top surface of the workpiece W is outside the measurable range and is closer to the measuring instrument 1, as shown in Figs. 8(b) and 8(c), the laser light L is located outside the area sandwiched between the two marker lights M and to the right of said area. By seeing such marker light M, the user can recognize that the measuring instrument 1 is too close to the workpiece W.

[0058] In this way, the relationship between the laser light L emitted by the measuring instrument 1 and the marker light M emitted by the light irradiation device 2 is indicated on the workpiece W, so the user can install the measuring instrument 1 in an appropriate position on the factory production line while checking the measurable range of the measuring instrument 1. In other words, the user does not need to actually measure the workpiece W with the measuring instrument 1 and check whether the workpiece W is within the measurable range by looking at the measurement results. As a result, the efficiency of the work of installing the measuring instrument 1 on the factory production line is improved.

[0059] The actuator 24 changes the position or angle of the change member. The actuator 24 changes the position or angle of the change member by, for example, moving under the control of the control unit 26. Details of the actuator 24 will be described later.

[0060] Storage unit 25 is a storage medium including ROM, RAM, etc. Storage unit 25 stores a program executed by control unit 26. Storage unit 25 stores the positions or angles of the change members in light irradiation device 2 as a position setting table, in association with the type of measuring device 1. Storage unit 25 may also store information indicating a code attached to measuring device 1 or information indicating a protrusion pattern formed on mounting portion A1 of measuring device 1, in association with the type of measuring device 1.

[0061] The control unit 26 is, for example, a CPU. The control unit 26 executes an information processing program stored in the storage unit 25. The control unit 26 controls the light source LS2 to start or end irradiation of the marker light M. The control unit 26 also identifies the type of the measuring instrument 1.

[0062] Control unit 26 identifies the type of measuring device 1 based on, for example, information input from device communication unit 21 or operation unit 22. Control unit 26 may identify the type of measuring device 1 by referencing type data stored in storage unit 25 in association with information indicating the code input from reading unit 20. Control unit 26 may identify the type of measuring device 1 by referencing type data stored in storage unit 25 in association with information indicating the protrusion pattern input from attachment unit A2 or reading unit 20.

[0063] The control unit 26 identifies the position or angle of the change member stored in the storage unit 25 in association with the identified type of measuring instrument 1. The control unit 26 then controls the actuator 24 to set the change member to the identified position or angle. Below, the control of the actuator 24 performed by the control unit 26 will be specifically described for each type of change member.

[0064] The change member is, for example, a slit member having an opening formed therein that allows the marker light emitted by the light source LS2 of the light irradiation device 2 to pass through, and whose position in the light irradiation device 2 can be changed. The slit member is provided, for example, so as to move along the side surface of the light irradiation device 2 through which the marker light passes.

[0065] 9 is a diagram showing an example of changing the irradiation direction of the marker light M using a slit member. As shown in FIG. 9, the marker light emitted by the light source LS2 of the light irradiation device 2 generates interference fringes in the diffractive optical element (DoE) DE. Of the multiple marker light beams with increased light intensity, light that travels to areas other than the openings in the slit member SL is blocked, and light that travels to the openings in the slit member SL passes through the slit member SL. Therefore, the irradiation direction of the marker light M can be changed by changing the position of the slit member SL.

[0066] The actuator 24 moves the slit member SL. For example, under the control of the control unit 26, the actuator 24 moves the slit member SL in parallel with the side surface on which the slit member SL is placed.

[0067] Control unit 26 identifies the type of measuring instrument 1 and controls actuator 24 to move slit member SL to a position associated with the identified type and stored in memory unit 25. Control unit 26 identifies, as the type of measuring instrument 1, for example, one of the following: a type input by the user via operation unit 22, a type received from measuring instrument 1 by device communication unit 21, or a type identified by reading an image by reading unit 20.

[0068] Fig. 10 is a diagram showing an example of a position setting table. In the position setting table shown in Fig. 10, the type ID of the measuring instrument is associated with the movement distance from the reference position. The control unit 26, for example, refers to the position setting table to identify the movement distance from the reference position associated with the identified type of measuring instrument 1. Then, the control unit 26 controls the actuator 24, for example, to move the slit member SL from the reference position by the identified movement distance.

[0069] The slit member SL may be formed with a plurality of openings that allow the marker light to pass through. Figure 11 is a diagram showing an example of changing the irradiation direction of the marker light when a plurality of openings are formed in the slit member SL. In the example shown in Figure 11(a), four marker lights are generated by the diffractive optical element DE from one marker light emitted by the light source LS2 of the light irradiation device 2, and the inner two marker lights of these pass through the slit member SL. In this case, when the slit member SL is viewed from the direction of the arrow marked "viewpoint" in Figure 11(a), the relationship between the four marker lights and the positions of the openings in the slit member SL is as shown in Figure 11(b).

[0070] Here, when the slit member SL shown in FIG. 11(b) slides in the direction of the arrow marked "slide," two outer marker beams separate from the two inner marker beams that passed through the slit member SL in FIG. 11(b) pass through the slit member SL, as shown in FIG. 11(c). In this way, by changing the position of the slit member SL in which multiple openings are formed, it is possible to change the marker beams that pass through the slit member SL among the multiple marker beams whose light intensity has increased due to the generation of interference fringes in the diffractive optical element DE. This makes it possible to change the irradiation direction of the marker beam M irradiated onto the workpiece W.

[0071] The change member may be an optical member that refracts or reflects the marker light emitted by the light source LS2 of the light irradiation device 2. This optical member is configured to be able to change its angle or position so that the traveling direction of the marker light M after refracting it changes. The optical member is, for example, a prism such as a pentaprism. The prism is, for example, inside the light irradiation device 2 and is provided on the path of the marker light emitted by the light source LS2. Note that the optical member may be a mirror instead of a prism.

[0072] 12 is a diagram showing an example of changing the irradiation direction of the marker light using a prism. As shown in FIG. 12, the marker light emitted by the light source LS2 of the light irradiation device 2 is reflected by the reflecting surface of the prism PR and then travels outside the prism PR. By changing the angle of the prism PR, the position at which the marker light is reflected within the prism PR can be changed. Therefore, by changing the angle of the prism PR, the irradiation direction of the marker light M irradiated onto the workpiece W can be changed.

[0073] The actuator 24 changes the angle of the prism PR relative to the light source LS2. For example, the actuator 24 rotates the prism by a predetermined angle in response to control from the control unit 26. The actuator 24 may rotate the prism in response to a user operation. The actuator 24 may move the prism PR.

[0074] The control unit 26 identifies the type of measuring instrument 1 and controls the actuator 24 to change the angle of the prism PR to an angle stored in the storage unit 25 in association with the identified type. The control unit 26, for example, references a position setting table in which the type ID of the measuring instrument and the angle of the prism PR (the angle changed from the reference angle) are associated, and identifies the angle changed from the reference angle associated with the identified type of measuring instrument 1. The control unit 26 then controls the actuator 24 to rotate the prism PR from the reference position by the identified angle changed. The control unit 26 may also control the actuator 24 to move the prism PR to a position stored in the storage unit 25 in association with the identified type.

[0075] The changing member may be a lens that refracts the marker light emitted by the light source LS2 of the light irradiation device 2 and whose position or angle in the light irradiation device 2 can be changed so as to change the traveling direction of the refracted marker light M. The lens is, for example, provided inside the light irradiation device 2 and on the path of the marker light emitted by the light source LS2. The lens may be either a spherical lens or an aspherical lens as long as it is capable of refracting the marker light.

[0076] FIG. 13 is a diagram showing an example of changing the irradiation direction of the marker light using a lens. As shown in FIG. 13( a), when the marker light emitted by the light source LS2 of the light irradiation device 2 passes through the center of the lens LE, the marker light travels in a straight line. On the other hand, as shown in FIG. 13( b), when the marker light emitted by the light source LS2 of the light irradiation device 2 passes through the edge of the lens LE, the marker light is refracted by the lens. The closer the point through which the marker light passes is to the edge of the lens, the more the marker light is refracted by the lens LE. Therefore, by changing the position of the lens LE, the angle at which the marker light is refracted by the lens LE can be changed. Therefore, by changing the position of the lens LE, the irradiation direction of the marker light M irradiated onto the workpiece W can be changed.

[0077] The actuator 24 moves the lens LE. For example, the actuator 24 moves the lens LE in a direction perpendicular to the marker light emitted by the light source LS2 of the light irradiation device 2 in accordance with control from the control unit 26. The actuator 24 may move the lens LE in accordance with an operation by a user. The actuator 24 may change the angle of the lens LE relative to the light source LS2.

[0078] The control unit 26 identifies the type of measuring instrument 1 and controls the actuator 24 to move the lens LE to a position associated with the identified type and stored in the storage unit 25. The control unit 26, for example, references a position setting table in which the type ID of the measuring instrument is associated with the movement distance of the lens LE from a reference position, to identify the movement distance associated with the identified type of measuring instrument 1. The control unit 26 then controls the actuator 24 to move the lens LE from the reference position by the identified movement distance. The control unit 26 may also control the actuator 24 to change the angle of the lens LE to the angle stored in the storage unit 25 in association with the identified type.

[0079] In this way, by using the slit member SL, prism PR, or lens LE to change the irradiation direction of the marker light emitted by the light source LS2 of the light irradiation device 2, it is possible to display an appropriate measurable range according to the type of measuring instrument 1. Furthermore, by changing the irradiation direction of the marker light M using the slit member SL, prism PR, or lens LE, it is not necessary to move the light source LS2 or other components in the light irradiation device 2, so the irradiation direction of the marker light M can be changed without increasing the size of the light irradiation device 2.

[0080] Second Embodiment In the light irradiation device 2 according to the first embodiment, the control unit 26 can change the position or angle of the change member by controlling the actuator 24. The light irradiation device 2 according to the second embodiment differs from the first embodiment in that the control unit 26 does not change the position or angle of the change member, but is configured so that the position or angle of the change member can be easily changed by a user's operation. The light irradiation device 2 according to the second embodiment includes an attachment unit A2, a light source LS2, a control unit 26 that has a function of controlling the light source LS2 to start or stop irradiation of the marker light M, and a position change unit 23.

[0081] As described above, when the position or angle of the adjustment member is configured to be changeable by the user, it is required that the user be able to change the position or angle of the adjustment member to an appropriate position or angle. Therefore, in the light irradiation device 2 according to the second embodiment, for example, a plurality of auxiliary marks MK associated with the type of measuring instrument 1 may be attached to the housing of the light irradiation device 2.

[0082] FIG. 14 is a diagram showing examples of auxiliary marks. FIG. 14 shows the surface of the housing of the light irradiation device 2 on which the change member is provided. In FIG. 14, along with an arrow indicating the direction in which the sliding member SL is moved, an auxiliary mark MK1 indicating the position of the sliding member SL when the measuring instrument 1 is measuring instrument X, an auxiliary mark MK2 indicating the position of the sliding member SL when the measuring instrument 1 is measuring instrument Y, and an auxiliary mark MK3 indicating the position of the sliding member SL when the measuring instrument 1 is measuring instrument Z are shown. By providing such auxiliary marks on the housing of the light irradiation device 2, the user can move the sliding member SL to a position appropriate for the measuring instrument 1 to which the light irradiation device 2 is attached.

[0083] In addition, instead of or together with the auxiliary mark indicating the position of the slide member SL, the housing of the light irradiation device 2 may be provided with an auxiliary mark indicating the angle of the prism PR or an auxiliary mark indicating the position of the lens LE.

[0084] In the above description, an example has been given in which the light irradiation device 2 is attached to the measuring device 1 in the positional relationship shown in Fig. 1 , but depending on the environment in which the measuring device 100 is used, it may be difficult to attach the light irradiation device 2 in the position shown in Fig. 1 . Therefore, the light irradiation device 2 may be configured to be attachable to multiple side surfaces of the measuring device 1. That is, the measuring device 1 may have multiple attachment parts A1, and the attachment part A2 of the light irradiation device 2 may be configured to be coupled to any one of the multiple attachment parts A1. The light irradiation device 2 may have multiple attachment parts A2 corresponding to the multiple attachment parts A1.

[0085] When the measuring instrument 1 and the light irradiation device 2 are configured in this manner, the position or angle of the change member for irradiating the marker light M in an irradiation direction corresponding to the measuring instrument 1 varies depending on the position at which the light irradiation device 2 is attached to the measuring instrument 1. Therefore, the housing of the light irradiation device 2 may be provided with an auxiliary mark for changing the position or angle of the change member so that the irradiation direction of the marker light M becomes a predetermined direction corresponding to the measurable range of the measuring instrument 1 when the light irradiation device 2 is attached to any position of the measuring instrument 1. Specifically, the housing of the light irradiation device 2 may be provided with auxiliary marks indicating the characters "front," "left side," "right side," and "rear," as well as at least one of the position of the slide member SL, the angle of the prism PR, and the position of the lens LE corresponding to each side.

[0086] In this way, since the housing of the light irradiation device 2 is provided with auxiliary marks corresponding to each of the multiple sides of a single measuring device 1, even if it is difficult or impossible to attach the light irradiation device 2 to a specific side of the measuring device 1 due to the installation space constraints of the measuring device 1 on a factory production line, the light irradiation device 2 can be attached to another side of the measuring device 1 and the marker light M can be irradiated in the appropriate irradiation direction in that state.

[0087] <Third Embodiment> When the light irradiation device 2 can be attached to any of multiple sides of the measuring device 1, as in the light irradiation device 2 of the second embodiment, the control unit 26 may change the position or angle of the change member by controlling the actuator 24 without user operation. In order for the light irradiation device 2 to operate in this manner, the storage unit 25 stores a setting table in which the position on the measuring device 1 at which the light irradiation device 2 is attached is associated with the position or angle of the change member. In the setting table, the type of the measuring device 1, the position on the measuring device 1, and the position or angle of the change member may be associated.

[0088] Control unit 26 identifies the position (side surface) of measuring device 1 where light irradiation device 2 is attached, using the position input by the user via operation unit 22, the position received from measuring device 1 by device communication unit 21, or the position identified by reading unit 20 of an image showing the position of the side surface of measuring device 1. Control unit 26 controls actuator 24 so that the position or angle of the change member becomes the position or angle stored in the setting table in association with the identified position. With light irradiation device 2 configured in this way, regardless of the position of light irradiation device 2 attached to measuring device 1, it is possible to irradiate marker light M appropriate for the attached position.

[0089] Fourth Embodiment In the above description, an example has been given in which the position or angle of the changeable member is changed by the control of the control unit 26 or by a user's operation, but the method for changing the position or angle of the changeable member is not limited to this. The measuring device 100 may be configured such that, when the light irradiating device 2 is attached to the measuring instrument 1, a predetermined portion of the measuring instrument 1 applies a force to the light irradiating device 2, thereby changing the position or angle of the changeable member.

[0090] The light irradiation device 2 according to the fourth embodiment is configured so that the position or angle of the change member in the light irradiation device 2 can be changed by the force applied by the protrusion of the measuring device 1 when the measuring device 1 is attached to the light irradiation device 2. The configuration of the light irradiation device 2 in the fourth embodiment is the same as the configuration of the light irradiation device 2 in the second embodiment, except that the housing of the light irradiation device 2 does not have an auxiliary mark MK and that a protrusion of the measuring device 1 can be attached.

[0091] 15A and 15B illustrate an example of changing the direction of marker light irradiation using a protrusion on a measuring instrument 1. As shown in FIG. 15A, when a light irradiation device 2 having a slit member SL is not attached to a measuring instrument 1 having a protrusion T, the marker light M emitted by the light source LS2 is blocked by the slit member SL. On the other hand, as shown in FIG. 15B, when the light irradiation device 2 is attached to the measuring instrument 1, the slit member SL of the light irradiation device 2 moves parallel to the side on which the slit member SL is installed, toward the side opposite to the side on which the protrusion T is located, due to a force applied by the protrusion T of the measuring instrument 1. This allows the marker light M emitted by the light source LS2 to pass through the opening of the slit member SL.

[0092] In this way, when the light irradiation device 2 is attached to the measuring instrument 1, the position or angle of the change member is uniquely determined by the physical structure of the measuring instrument 1, making it possible for the user to emit the marker light M in the appropriate irradiation direction without manually changing the position or angle of the change member.

[0093] [Effects of Measuring Device 100] As described above, in measuring device 100, the light irradiating device 2 is detachable from the measuring device 1, and the light irradiating device 2 has a change member for changing the irradiation direction of the marker light. This eliminates the need for each of the multiple measuring devices 1 to have the function of irradiating a marker light that indicates the measurable range of the measuring device 1, and makes it possible to display an appropriate measurable range according to the type of measuring device 1. As a result, it becomes possible to appropriately install the measuring device 1 while reducing the time, cost, and labor required for installation of the measuring device 1. Furthermore, the cost of the measuring device 1 itself can be kept low.

[0094] Furthermore, by configuring the light irradiation device 2 to be detachable from the measuring instrument 1, the volume of the measuring instrument 1 can be smaller than the volume of a measuring instrument 1 that has the function of irradiating a mark indicating the measurable range. As a result, the installation space for the measuring instrument 1 on a factory production line can be reduced.

[0095] The present invention has been described above using embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by functionally or physically distributing or integrating in any unit. Furthermore, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effects of the new embodiments resulting from the combination also have the effects of the original embodiments.

[0096] REFERENCE SIGNS LIST 1 Measuring device A1 Mounting section LS1 Light source CA Camera 11 Measuring device communication section 12 Memory section 13 Control section 2 Light irradiation device A2 Mounting section LS2 Light source 20 Reading section 21 Device communication section 22 Operation section 23 Position change section SL Slit member PR Prism LE Lens 24 Actuator 25 Memory section 26 Control section 100 Measuring device

Claims

1. A light irradiation device that can be attached to a measuring instrument that can measure the surface shape of a measurement object by a light-section method, the light irradiation device comprising: a light source that emits marker light that indicates a measurable range within which the measuring instrument can measure the surface shape of the measurement object; and a position change unit that has a change member for changing the irradiation direction of the marker light.

2. The light irradiation device according to claim 1, wherein the position change unit is configured to be able to change the position or angle of the change member so that the marker light is irradiated onto the center position of the measurable range on the surface of the object to be measured.

3. The light irradiation device according to claim 1, wherein the position change unit is configured to be able to change the position or angle of the change member so that the marker light is irradiated onto positions at both ends of the measurable range on the surface of the object to be measured.

4. The light irradiation device according to claim 1, wherein the position change section has an opening formed therein that allows the marker light emitted by the light source to pass through, and the change member is a slit member whose position in the light irradiation device can be changed.

5. The light irradiation device according to claim 4, further comprising: a memory unit that stores the position of the slit member in association with the type of measuring instrument; an actuator that moves the slit member; and a control unit that identifies the type of measuring instrument and controls the actuator to move the slit member to the position stored in the memory unit in association with the identified type.

6. The light irradiation device according to claim 1, wherein the position change unit is an optical element that refracts or reflects the marker light emitted by the light source, and the change element is an optical element that can change the angle or position of the marker light so as to change the direction of travel of the refracted marker light.

7. The light irradiation device according to claim 6, further comprising: a memory unit that stores the angle or position of the optical element in association with the type of the measuring instrument; an actuator that changes the angle of the optical element relative to the light source or moves the optical element; and a control unit that identifies the type of the measuring instrument and controls the actuator to change the angle of the optical element to the angle stored in the memory unit in association with the identified type, or to move the optical element to the position stored in the memory unit in association with the identified type.

8. The light irradiation device according to claim 1, wherein the position change unit has as the change member a lens that refracts the marker light emitted by the light source and that can change the position or angle of the marker light in the light irradiation device so as to change the direction of travel of the refracted marker light.

9. The light irradiation device according to claim 8, further comprising: a memory unit that stores the position or angle of the lens in association with the type of measuring instrument; an actuator that moves the lens or changes the angle of the lens relative to the light source; and a control unit that identifies the type of measuring instrument and controls the actuator to move the lens to a position stored in the memory unit in association with the identified type, or to change the angle of the lens to an angle stored in the memory unit in association with the identified type.

10. A light irradiation device according to any one of claims 1 to 9, further comprising: an attachment section for attaching the light irradiation device to the measuring device so that the positional relationship between the measuring device and the light irradiation device is a predetermined relationship; and a housing having an auxiliary mark for changing the position or angle of the change member so that the irradiation direction of the marker light becomes a predetermined direction corresponding to the measurable range when the light irradiation device is attached to the measuring device so that the positional relationship is said predetermined relationship.

11. The light irradiation device according to claim 10, further comprising a plurality of attachment sections corresponding to a plurality of different types of measuring devices, and a plurality of auxiliary marks associated with the types are attached to the housing.

12. A light irradiation device according to any one of claims 1 to 9, wherein the change member is capable of changing its position or angle in the light irradiation device by a force applied by a protrusion on the measuring device when the measuring device is attached to the light irradiation device.

13. A light irradiation device according to any one of claims 1 to 9, further comprising: an attachment section for enabling the light irradiation device to be attached to a plurality of side surfaces of the measuring instrument; and a housing having an auxiliary mark associated with the side surface for changing the position or angle of the change member so that the irradiation direction of the marker light becomes a predetermined direction corresponding to the measurable range when the light irradiation device is attached to any one of the plurality of side surfaces.

14. A measuring device comprising: a measuring instrument capable of measuring the surface shape of an object to be measured by a light-section method; and a light irradiating device attachable to the measuring instrument, wherein the light irradiating device has: a light source that emits marker light indicating a measurable range within which the measuring instrument can measure the surface shape of the object to be measured; and a position changing unit having a changing member for changing the irradiation direction of the marker light.

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