Transport vehicle system and relay device

Abstract

A transport vehicle system (1) comprises an upper level transport vehicle (10A) that travels a track (4) that is provided on the ceiling (W1c) of an upper level (UL), a lower level transport vehicle (10B) that travels a track (4) that is provided on the ceiling (W3c) of a lower level (DL), and a relay device (40) that relays handoff of articles (90) between the upper level transport vehicle (10A) and the lower level transport vehicle (10B). The relay device (40) has an upper level carrier unit (43) that is provided on a floor surface (W2f) of the upper level (UL), a lower level carrier unit (56) that is provided to the lower level (DL), and a transfer device (50) that performs handoff of articles (90) between the upper level carrier unit (43) and the lower level carrier unit (56). The upper level transport vehicle (10A) transfers articles (90) to the upper level carrier unit (43), and the lower level transport vehicle (10B) transfers articles (90) to the lower level carrier unit (56).

Description

Transport vehicle system and relay device

[0001] One aspect of the present invention relates to a guided vehicle system and a relay device.

[0002] A transport vehicle system is known in which an article is transported by a transport vehicle traveling on a track. In the transport vehicle used in such a transport vehicle system, a lifting unit that holds the article is raised and lowered by winding or unwinding a hanging member such as a rope or a belt. For example, Patent Document 1 discloses a transport vehicle system that can transfer articles between an upper-level transport vehicle that travels on a track provided on the ceiling of an upper level and a lower-level transport vehicle that travels on a track provided on the ceiling of a lower level.

[0003] In the transport vehicle system of Patent Document 1, a primary storage shelf is arranged below a communication port connecting the upper and lower levels. The upper level transport vehicle lowers the holding unit by extending the hanging member and delivers the item to the storage shelf arranged on the lower level. Next, the lower level transport vehicle moves the holding unit horizontally and then lowers the holding unit by extending the hanging member, and receives the item from the storage shelf. This makes it possible to deliver items between the upper level transport vehicle and the lower level transport vehicle.

[0004] JP 2010-064833 A

[0005] In the conventional transport vehicle system described above, in order for the upper-level transport vehicle to transfer an item to a storage shelf provided on a lower level, the lifting member needs to be extended further than usual. Therefore, the time required for the upper-level transport vehicle to transfer an item to a storage shelf provided on a lower level is longer than the time required to transfer an item to a storage shelf provided on an upper level. As a result, the upper-level transport vehicle spends a longer time stopped on the track.

[0006] Therefore, one aspect of the present invention aims to provide a transport vehicle system and relay device that enables items to be transferred between upper-level transport vehicles and lower-level transport vehicles without making the hanging members unnecessarily long.

[0007] (1) A transport vehicle system according to one aspect of the present invention is a transport vehicle system that transports items using a transport vehicle having a first main body portion capable of running along a track and a first holding portion that is capable of raising and lowering relative to the first main body portion by winding and unwinding a hanging member and is capable of holding items, and is equipped with an upper level transport vehicle that is a transport vehicle that runs on a track provided on the ceiling of the upper level, a lower level transport vehicle that is a transport vehicle that runs on a track provided on the ceiling of a lower level that is lower than the upper level, and a relay device that relays the transfer of items between the upper level transport vehicle and the lower level transport vehicle, and the relay device has an upper level loading section provided on the floor of the upper level, a lower level loading section provided on the lower level, and a transfer device that transfers items between the upper level loading section and the lower level loading section, and the upper level transport vehicle transfers items to the upper level loading section, and the lower level transport vehicle transfers items to the lower level loading section.

[0008] In this transport vehicle system, the extension length of the suspending member of the upper transport vehicle required to transport items between the upper and lower levels is sufficient to reach the upper level placement section provided on the floor of the upper level, and is shorter than the length required to reach the lower level placement section provided on the lower level. This makes it possible to transfer items between the upper and lower level transport vehicles without making the suspending member unnecessarily long.

[0009] (2) In the transport vehicle system described in (1) above, the transfer device may have a second main body and a second holding part that is movable up and down relative to the second main body by winding and unwinding the hanging member and that can hold an article. In this configuration, the second holding part can be raised and lowered without providing a structure such as a mast, so that equipment such as a fire door can be easily installed in the lifting path of the second holding part.

[0010] (3) In the transport vehicle system described in (2) above, the upper and lower level placement units may be positioned offset from each other in a plan view, and the transfer device may further include a lateral feed unit that moves the second holding unit horizontally between above the upper and lower level placement units. This configuration makes it possible to transfer items to both the upper and lower level placement units with a simple configuration.

[0011] (4) In the transport vehicle system described in (2) or (3) above, the track provided on the ceiling of the upper level and the track provided on the ceiling of the lower level may extend in the same direction, and the second main body may be movable along the extending direction. In this configuration, the transport path for the items between the upper level placement unit and the lower level placement unit can be flexibly set.

[0012] (5) In the transport vehicle system described in (4) above, the upper and lower level loading sections may be configured to be able to arrange a plurality of articles along the extension direction, and the second main body section may be provided to be able to move along the extension direction to any article loading position arranged on the upper and lower level loading sections. This configuration enables efficient transport of articles between the upper and lower level loading sections.

[0013] (6) In the transport vehicle system described in (5) above, the upper-level transport vehicle and the lower-level transport vehicle may travel in one direction along the extension direction, and the transfer device may receive an item from one of the multiple item placement positions on the upper-level placement section, travel downstream in one direction, and deliver the item to one of the multiple item placement positions on the lower-level placement section, while also receiving an item from one of the multiple item placement positions on the lower-level placement section, travel downstream in one direction, and deliver the item to one of the multiple item placement positions on the upper-level placement section. In this configuration, each transport vehicle can smoothly perform a series of operations: delivering an item at the placement section upstream in one direction, and receiving an item at the placement section downstream in one direction. This can improve the efficiency of transporting items.

[0014] (7) In the transport vehicle system described in any one of (2) to (6), the transfer device may have a rotating unit that rotates the second holding unit about an axis extending vertically. In this configuration, the relay device can deliver the article to the upper level transport vehicle and the lower level transport vehicle in an appropriate orientation.

[0015] (8) A relay device according to one aspect of the present invention is a relay device that relays the transfer of items between the upper level transport vehicle and the lower level transport vehicle in a transport vehicle system that includes an upper level transport vehicle that is a transport vehicle that runs on a track provided on the ceiling of the upper level, and a lower level transport vehicle that is a transport vehicle that runs on a track provided on the ceiling of a lower level that is lower than the upper level, and that transports the items to a transport vehicle that has a first main body portion that can run along a track and a first holding portion that is capable of holding items and that is capable of raising and lowering relative to the first main body portion by winding and unwinding a hanging member, and the relay device has an upper level loading section that is provided on the floor of the upper level and to which items are transferred from the upper level transport vehicle, a lower level loading section that is provided on the lower level and to which items are transferred from the lower level transport vehicle, and a transfer device that transfers items between the upper level loading section and the lower level loading section.

[0016] In this relay device, the extension length of the suspending member of the upper-level transport vehicle required to transport items between the upper and lower levels is sufficient to reach the placement section provided on the floor of the upper level, and is shorter than the length required to reach the placement section provided on the lower level. This makes it possible to transfer items between the upper-level transport vehicle and the lower-level transport vehicle without making the suspending member unnecessarily long.

[0017] According to one aspect of the present invention, it is possible to transfer articles between an upper-level transport vehicle and a lower-level transport vehicle without making the suspending member unnecessarily long.

[0018] FIG. 1 is a front view of a guided vehicle system according to an embodiment, as viewed from the direction in which the track extends. FIG. 2 is a side view of a guided vehicle system according to an embodiment, as viewed from a direction perpendicular to the direction in which the track extends. FIG. 3 is a front view of an overhead guided vehicle included in FIG. 1. FIG. 4 is a front view, a side view, and a plan view of a relay device included in FIG. 1. FIGS. 5(A) to 5(C) are diagrams illustrating the flow of transferring an item from an upper level placement section to a lower level placement section. FIGS. 6(D) to 6(F) are diagrams illustrating the flow of transferring an item from an upper level placement section to a lower level placement section. FIGS. 7(G) to 7(J) are diagrams illustrating the flow of transferring an item from an upper level placement section to a lower level placement section. FIG. 8 is a diagram illustrating the transfer of an item between an upper level placement section and a lower level placement section in the relay device of FIG. 1. FIG. 9 is a block diagram of the guided vehicle system of FIG. 1. FIG. 10 is a diagram illustrating the transfer of an item between an upper level placement section and a lower level placement section in a relay device according to a modified example. 11A to 11C are diagrams illustrating the rotation of an article by a relay device according to a modified example, and FIG. 12 is a diagram illustrating an embodiment of a relay device according to a modified example.

[0019] Hereinafter, a guided vehicle system 1 according to one embodiment will be described with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions will be omitted.

[0020] Hereinafter, a guided vehicle system 1 according to one embodiment will be described with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and duplicated explanations will be omitted. In this embodiment, for convenience of explanation, the X direction, the Y direction perpendicular to the X direction, and the Z direction (vertical direction) perpendicular to both the X direction and the Y direction are defined.

[0021] As shown in Figures 1 and 2, the transport vehicle system 1 of this embodiment comprises an upper level transport vehicle 10A, which is a transport vehicle 10 that runs on a track 4 provided on the ceiling W1c of the upper level UL, a lower level transport vehicle 10B, which is a transport vehicle 10 that runs on a track 4 provided on the ceiling W3c of the lower level DL that is below the upper level UL, and a relay device 40 that relays the transfer of goods 90 between the upper level transport vehicle 10A and the lower level transport vehicle 10B.

[0022] The transport vehicle system 1 is a system that uses an upper level transport vehicle 10A to transport items 90 between not-shown loading sections, stockers, and various processing devices arranged along the track 4, and uses a lower level transport vehicle 10B to transport items 90 between not-shown loading sections, stockers, and various processing devices arranged along the track 4, and transfers items 90 between the upper level transport vehicle 10A and the lower level transport vehicle 10B using a relay device 40.

[0023] The term "mounting section" as used herein refers to a section disposed along the track 4 at a position where the transport vehicle 10 can receive and deliver the article 90. The mounting section includes a buffer and a delivery port. The buffer temporarily holds the article 90. The buffer temporarily holds the article 90 when the transport vehicle 10 is unable to transfer the article 90 to the intended delivery port, for example, because another article 90 is already loaded at the intended delivery port. In this embodiment, the side track buffer 6 disposed on the lower level DL corresponds to this buffer. The side track buffer 6 will be described in detail later. The delivery port is a mounting section for delivering the article 90 to and from semiconductor processing equipment (not shown), such as a cleaning equipment, a film forming equipment, a lithography equipment, an etching equipment, a heat treatment equipment, or a planarization equipment. The processing equipment is not particularly limited and may be various types of equipment.

[0024] The upper level UL is the space between the first partition wall W1 and the second partition wall W2. The lower level DL is the space between the third partition wall W3 and a fourth partition wall (not shown), and is formed below the upper level UL. A space Sw of a predetermined size is formed between the second partition wall W2 and the third partition wall W3. A first opening W2h is formed in the second partition wall W2, forming a lifting and lowering area for the transfer device 50 in the relay device 40. A second opening W3h is formed in the third partition wall W3, forming a lifting and lowering area for the transfer device 50 in the relay device 40. The first opening W2h and the second opening W3h are formed to overlap each other in a plan view.

[0025] The articles 90 include, for example, containers such as a FOUP (Front Opening Unified Pod) for storing multiple semiconductor wafers and a reticle pod for storing glass substrates, as well as general parts, etc. Here, the following description will be given taking as an example a transport vehicle system 1 in which a transport vehicle 10 travels along a one-way track 4 installed on the ceiling or the like of a building in a factory or the like.

[0026] The track 4 is laid, for example, near a ceiling W1c formed by the first partition wall W1 and a ceiling W3c formed by the third partition wall W3, which are overhead spaces for workers. The track 4 may be provided directly on the ceilings W1c and W3c, or may be provided indirectly on the ceilings W1c and W3c via other members. In this embodiment, the track 4 is suspended via supports 4A fixed to the ceilings W1c and W3c. In this embodiment, the track 4 on which the upper-level transport vehicle 10A runs and the track 4 on which the lower-level transport vehicle 10B runs extend in the same direction (Y direction).

[0027] The upper-level transport vehicle 10A, which travels on a track 4 laid on the ceiling W1c formed by the first partition wall W1, and the lower-level transport vehicle 10B, which travels on a track 4 laid on the ceiling W3c formed by the third partition wall W3, are both transport vehicles 10 having the configuration shown in FIG. 3 . In this embodiment, the upper-level transport vehicle 10A and the lower-level transport vehicle 10B are configured to travel in the same direction (one direction D1, D2) along the Y direction. Hereinafter, the one direction D1, D2 will also be referred to as the traveling direction D1, D2. The transport vehicle 10 is configured to be able to transfer an article 90. The transport vehicle 10 is an overhead-traveling unmanned transport vehicle. The number of transport vehicles 10 included in the transport vehicle system 1 is not particularly limited and may be more than one. The transport vehicle 10 has a first main body unit 20, a traveling unit 12, and a transport vehicle controller 35.

[0028] The first main body 20 has a main body frame 22, a traverse unit 24, a θ drive 26, an elevation drive unit 28, an elevation platform (first holding unit) 30, and a fall prevention cover 33. The travel unit 12 includes a motor and other components, and drives the transport vehicle 10 along the track 4. The travel unit 12 has, for example, a power receiving and communication unit 14 that receives power from the track 4 via a contactless power supply.

[0029] The lateral feed unit 24 collectively transports the θ drive 26, the lifting drive unit 28, and the lifting platform 30 laterally in a direction perpendicular to the extension direction of the track 4. The θ drive 26 rotates at least one of the lifting drive unit 28 and the lifting platform 30 within a predetermined angular range in a horizontal plane. The lifting drive unit 28 raises and lowers the lifting platform 30 by winding or unwinding a suspension member such as a wire, rope, or belt. The lifting platform 30 is provided with a chuck that can freely grip or release the article 90. A pair of fall prevention covers 33 are provided, for example, at the front and rear of the transport vehicle 10 in the traveling direction. The fall prevention cover 33 has a claw or the like (not shown) protruding and retracting below the article 90 to be transported, thereby preventing the article 90 from falling during transport.

[0030] The guided vehicle controller 35 is an electronic control unit including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The guided vehicle controller 35 controls various operations of the guided vehicle 10. Specifically, the guided vehicle controller 35 controls the traveling unit 12, the lateral feed unit 24, the θ drive 26, the lifting drive unit 28, and the lifting platform 30. The guided vehicle controller 35 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example. The guided vehicle controller 35 may also be configured as hardware including electronic circuits, etc.

[0031] A side track buffer 6 is disposed on the lower level DL. The side track buffer 6 is disposed on one or both sides in the width direction (X direction) of the first main body 20 of the lower level transport vehicle 10B traveling on the track 4. Note that in the location shown in FIG. 1 , the side track buffer 6 is disposed on one side in the width direction. The side track buffer 6 is loaded with articles 90 when the lateral feed unit 24 of the lower level transport vehicle 10B moves the θ drive 26, the lifting drive unit 28, and the lifting platform 30 in the width direction together, and then the lifting drive unit 28 raises and lowers the lifting platform 30. The side track buffer 6 has a pair of first suspenders 6A, 6A, a first connecting portion 6B, a loading shelf 6C, and a second connecting portion 6D.

[0032] The pair of first suspending portions 6A, 6A are suspending members extending from the ceiling W3c. The pair of first suspending portions 6A, 6A are arranged at equal intervals in the extension direction (Y direction) of the track 4. The first connecting portion 6B connects the lower end of one of the pair of first suspending portions 6A, 6A to the lower end of the other of the pair of first suspending portions 6A, 6A. The second connecting portion 6D connects one of the pair of first suspending portions 6A, 6A to the other of the pair of first suspending portions 6A, 6A above the first connecting portion 6B. The loading shelf 6C spans between one and the other of the first connecting portions 6B, 6B adjacent to each other in the Y direction. The loading shelf 6C is a plate-shaped member on which the item 90 is placed. The loading shelf 6C may be provided with a positioning pin for determining the position where the item 90 is placed.

[0033] As shown in Figures 1, 2 and 4, the relay device 40 has a storage section 41, an upper level loading section 43 provided on the floor surface of the upper level UL, a lower level loading section 56 provided on the lower level DL, a slide section 45, and a transfer device 50 that transfers items 90 between the upper level loading section 43 and the lower level loading section 56.

[0034] The storage section 41 is fixed to the floor surface of the upper level UL. The storage section 41 is formed in a rectangular shape in a plan view. The storage section 41 has four side surfaces 41A and a top surface 41B that is fixed to the upper ends of the four side surfaces 41A and covers the space surrounded by the four side surfaces 41A. The side surfaces 41A and the top surface 41B are formed from materials such as aluminum or stainless steel. The storage section 41 stores in the space the upper level loading section 43, the slide section 45, and the transfer device 50 in a state where the hanging member 54 is not extended toward the lower level loading section 56 on the lower level DL.

[0035] The upper level placement section 43 is configured as a placement platform on which the item 90 can be placed. The placement surface of the upper level placement section 43 on which the item 90 is placed may be provided with a positioning pin for positioning the item 90. The upper level placement section 43 is housed in the space S formed by the storage section 41. An opening 41Ba is formed in the upper surface section 41B above the upper level placement section 43. In other words, the upper level placement section 43 is arranged in a state surrounded by the storage section 41, but is arranged so that it can be accessed from above the storage section 41. This allows the upper level transport vehicle 10A to lower the lifting platform 30 from above the storage section 41 and transfer the item 90 to the upper level placement section 43.

[0036] The slide portion 45 extends in the horizontal direction (Y direction). The slide portion 45 supports the transfer device 50 so that it can move in the horizontal direction (Y direction). The slide portion 45 is fixed to the upper surface portion 41B of the storage portion 41. Examples of the slide portion 45 include a slide rail and a linear guide.

[0037] The transfer device 50 transfers the article 90 between the upper level placement section 43 and the lower level placement section 56. The transfer device 50 has a second main body section 51, a lateral feed section 52, and a second holding section 53.

[0038] The second main body portion 51 supports the lateral feed portion 52 and the second holding portion 53. The second main body portion 51 is configured to be movable along the slide portion 45 extending in the Y direction. The second main body portion 51 is provided to be movable along the extension direction of the slide portion 45 by a linear motion mechanism constituted by an actuator such as a motor or an air cylinder. The second main body portion 51 is provided to be movable in the extension direction of the slide portion 45 to a position where the articles 90 can be transferred to each of the multiple upper level placement portions 43 and the multiple lower level placement portions 56.

[0039] The lateral feed unit 52 feeds the second holding unit 53 laterally in a direction perpendicular to the extension direction of the slide unit 45. The lateral feed unit 52 moves the second holding unit 53 horizontally between above the upper level placement unit 43 and above the lower level placement unit 56. The lateral feed unit 52 is provided with a lifting drive unit that raises and lowers the second holding unit 53 by winding and unwinding the hanging member 54. The second holding unit 53 is provided so as to be able to raise and lower relative to the second main body unit 51 by winding and unwinding the hanging member 54, and holds the item 90. The second holding unit 53 is provided with, for example, a chuck that holds the item 90 in a suspended state, and is capable of freely gripping or releasing the item 90.

[0040] The lower-level mounting section 56 has the same configuration as the side track buffer 6. That is, the lower-level mounting section 56 has a pair of first suspending sections 56A, 56A, a first connecting section 56B, a mounting shelf 56C, and a second connecting section 56D. The pair of first suspending sections 56A, 56A are suspending members extending from the ceiling W3c. The pair of first suspending sections 56A, 56A are arranged at equal intervals in the extension direction of the track 4 (Y direction). The first connecting section 56B connects the lower end of one of the pair of first suspending sections 56A, 56A to the lower end of the other of the pair of first suspending sections 56A, 56A. The second connecting section 56D connects one of the pair of first suspending sections 56A, 56A to the other of the pair of first suspending sections 56A, 56A above the first connecting section 56B. The loading shelf 56C spans between one and the other of the first connection portions 56B, 56B adjacent to each other in the Y direction. The loading shelf 56C is a plate-shaped member on which the article 90 is placed. The loading shelf 56C may be provided with a positioning pin that determines the position at which the article 90 is placed.

[0041] The upper level loading section 43 is configured to be able to arrange items 90 along the extension direction of the track 4. In this embodiment, the upper level loading section 43 is configured to be able to place four items 90 along the extension direction of the track 4. The lower level loading section 56 is configured to be able to arrange items 90 along the extension direction of the track 4. In this embodiment, the lower level loading section 56 is configured to be able to place four items 90 along the extension direction of the track 4. The upper level loading section 43 and the lower level loading section 56 are arranged at positions offset from each other in a planar view. In this embodiment, the upper level loading section 43 and the lower level loading section 56 are offset in the X direction in a planar view.

[0042] The above-described storage section 41, slide section 45, and transfer device 50 may be unitized. In this case, the upper level placement section 43 is installed on the floor surface W2f of the second partition wall W2, the storage section 41, slide section 45, and transfer device 50 that are unitized to store the upper level placement section 43 are installed on the floor surface W2f of the second partition wall W2, and the lower level placement section 56 is set on the ceiling W3c of the third partition wall W3, thereby forming the relay device 40.

[0043] In the relay device 40 configured as described above, the upper level transport vehicle 10A transfers the item 90 to the upper level loading section 43, and the lower level transport vehicle 10B transfers the item 90 to the lower level loading section 56. The transfer device 50 receives the item 90 from one of the multiple item loading positions of the upper level loading section 43, travels downstream in the traveling directions D1 and D2, and delivers the item 90 to one of the multiple item loading positions of the lower level loading section 56. The transfer device 50 further receives the item 90 from one of the multiple item loading positions of the lower level loading section 56, travels downstream in the traveling directions D1 and D2, and delivers the item 90 to one of the multiple item loading positions of the upper level loading section 43.

[0044] Next, the operation of transferring the item 90 from the upper-level transport vehicle 10A to the lower-level transport vehicle 10B will be described. As shown in FIG. 5A, the upper-level transport vehicle 10A, holding the item 90, travels on the track 4 in the traveling direction D1 and stops above one of the multiple item placement positions on the upper-level placement section 43. Next, as shown in FIG. 5B, the upper-level transport vehicle 10A pays out the suspending member to lower the lifting platform 30 and place the item 90 on one of the multiple item placement positions on the upper-level placement section 43. After transferring the item 90 to the upper-level placement section 43, the upper-level transport vehicle 10A retracts the suspending member to raise the lifting platform 30, and then travels on the track 4 in the traveling direction D1 and moves away from above one of the multiple item placement positions on the upper-level placement section 43.

[0045] Next, as shown in Fig. 5(C), the transfer device 50 slides the second main body portion 51 to the side of one of the multiple item placement positions of the upper level placement section 43. With the second main body portion 51 stopped to the side of one of the multiple item placement positions of the upper level placement section 43, as shown in Fig. 6(D), the transfer device 50 drives the lateral feed portion 52 to stop the second holding portion 53 above one of the multiple item placement positions of the upper level placement section 43. Next, the transfer device 50 pays out the hanging member 54 from the lateral feed portion 52 to lower the second holding portion 53 and hold the item 90 placed at one of the multiple item placement positions of the upper level placement section 43.

[0046] Next, as shown in Fig. 6(E), the transfer device 50 winds up the hanging member 54 to raise the second holding unit 53 and lift the item 90 placed on one of the multiple item placement positions on the upper level placement unit 43. Next, as shown in Fig. 6(F), the transfer device 50 drives the lateral feed unit 52 to stop the second holding unit 53 above the lower level placement unit 56. Next, the transfer device 50 slides the second main body unit 51 above one of the multiple item placement positions on the lower level placement unit 56.

[0047] Next, as shown in Fig. 7(G), the transfer device 50 pays out the hanging member 54 from the lateral feed section 52 to lower the second holding section 53, passes the article 90 through the first opening W2h and the second opening W3h, and places the article 90 on one of the multiple article placement positions on the lower level placement section 56, as shown in Fig. 7(H). After delivering the article 90 to the upper level placement section 43, the transfer device 50 winds up the hanging member 54 to raise the second holding section 53, as shown in Fig. 7(I).

[0048] Furthermore, the lower-level transport vehicle 10B, which is not holding an item 90, travels on the track 4 in the traveling direction D2 and stops to the side of one of the multiple item placement positions on the lower-level placement section 56. Next, the lower-level transport vehicle 10B drives the lateral feed unit 24 to stop the lifting platform 30 above one of the multiple item placement positions on the lower-level placement section 56. Next, the lower-level transport vehicle 10B pays out the suspending member to lower the lifting platform 30 and hold the item 90 placed at one of the multiple item placement positions on the lower-level placement section 56. Next, as shown in FIG. 7(J), the lower-level transport vehicle 10B retracts the suspending member to raise the lifting platform 30, and then drives the lateral feed unit 24 to return the lifting platform 30 to its original position. Next, the lower-level transport vehicle 10B travels on the track 4 in the traveling direction D2 and moves away from the side of one of the multiple item placement positions on the lower-level placement section 56.

[0049] Here, using Figure 8, we will explain the operation when the transfer device 50 receives an item 90 placed on one of the multiple item placement positions of the upper level placement section 43 and places the item 90 on one of the multiple item placement positions of the lower level placement section 56.

[0050] 8, the transfer device 50 receives the item 90 from one (e.g., position A) of the multiple item placement positions (positions A to D) of the upper level placement section 43, travels downstream in the traveling directions D1 and D2, and delivers the item 90 to one (e.g., position G) of the multiple item placement positions (positions E to H) of the lower level placement section 56. The transfer device 50 also receives the item 90 from one (e.g., position E) of the multiple item placement positions (positions E to H) of the lower level placement section 56, travels downstream in the traveling directions D1 and D2, and delivers the item 90 to one (e.g., position C) of the multiple item placement positions (positions A to D) of the upper level placement section 43.

[0051] In this embodiment, the article placement position on the lower level placement section 56 to which the article 90 is transferred from the article placement position on the upper level placement section 43 is predetermined (for example, position A → position G, position B → position H). Similarly, the item loading position of the upper level loading section 43 to which the item 90 is transferred from the item loading position of the lower level loading section 56 is predetermined (for example, position E → position C, position F → position D).As a result, for example, when the transfer device 50 detects that an item 90 has been placed at the item loading position (position A) of the upper level loading section 43, it can automatically move the item 90 placed at the item loading position (position A) of the upper level loading section 43 to the item loading position (position G) of the lower level loading section 56, or when it detects that an item 90 has been placed at the item loading position (position E) of the lower level loading section 56, it can move the item 90 placed at the item loading position (position E) of the lower level loading section 56 to the item loading position (position C) of the upper level loading section 43. In this method, the article 90 can be moved by simple control without the intervention of the transport vehicle controller 70 that manages the allocation of movement to each transport vehicle 10A, 10B.

[0052] Furthermore, the transfer of the article 90 between the upper-level transport vehicle 10A and the transfer device 50 via the upper-level placement unit 43, and the transfer of the article 90 between the lower-level transport vehicle 10B and the transfer device 50 via the lower-level placement unit 56, can be performed by an interlock sequence using an E84 sensor or the like that complies with the SEMI standard, as shown in FIG. 9 . Specifically, the operation of the transfer device 50 is realized by four upper-level E84 sensors 61 that detect when the upper-level placement unit 43 stops above each of the multiple article placement positions (positions A to D), four lower-level E84 sensors 62 that detect when the lower-level placement unit 56 stops to the side of each of the multiple article placement positions (positions E to H), and a relay controller 49 that controls the transfer device 50. The relay controller 49 receives power from a distribution board 67 installed in the building.

[0053] The effects of the transport vehicle system 1 of the above embodiment will be described. In the transport vehicle system 1 of the above embodiment, the extension length of the suspension member of the upper level transport vehicle 10A required to transport the item 90 between the upper level UL and the lower level DL is sufficient to reach the upper level placement section 43 provided on the floor surface W2f of the upper level UL, and is shorter than the length to reach the lower level placement section 56 provided on the lower level DL. This makes it possible to transfer the item 90 between the upper level transport vehicle 10A and the lower level transport vehicle 10B without making the suspension member unnecessarily long.

[0054] 1 and 2, in the transfer device 50 in the relay device 40 of the transport vehicle system 1 of the above embodiment, the second holding section 53 capable of holding the article 90 is provided so as to be able to rise and fall relative to the second main body section 51 by winding and unwinding the hanging member. This allows the second holding section 53 to rise and fall without providing a structure such as a mast, so that equipment such as a fire door 80 can be easily installed in the lifting path of the second holding section 53.

[0055] In the transport vehicle system 1 of the above embodiment, the upper level placement section 43 and the lower level placement section 56 are positioned at positions offset from each other in a plan view, and the transfer device 50 has a lateral feed section 52 that moves the second holding section 53 horizontally between above the upper level placement section 43 and above the lower level placement section 56. This makes it possible to transfer items 90 to both the upper level placement section 43 and the lower level placement section 56 with a simple configuration.

[0056] 2, in the transport vehicle system 1 of the above embodiment, the track 4 provided on the ceiling W1c of the upper level UL and the track 4 provided on the ceiling W3c of the lower level DL extend in the same direction (Y direction), and the second main body 51 of the relay device 40 is arranged to be movable along the extension direction. This makes it possible to flexibly set the transport path for the article 90 between the upper level placement section 43 and the lower level placement section 56.

[0057] 8, in the transport vehicle system 1 of the above embodiment, the upper level loading section 43 and the lower level loading section 56 are configured to be able to arrange four (plural) articles 90 along the extension direction, and the second main body section 51 is provided so as to be able to move along the extension direction to any article loading position (positions A to D and positions E to H) arranged on the upper level loading section 43 and the lower level loading section 56. This makes it possible to efficiently transport the articles 90 between the upper level loading section 43 and the lower level loading section 56.

[0058] 8, in the transport vehicle system 1 of the above embodiment, the transfer device 50 receives the item 90 from one (e.g., position A) of the multiple item placement positions (positions A to D) of the upper level placement section 43, travels downstream in the traveling directions D1 and D2, and delivers the item to one (e.g., position G) of the multiple item placement positions (positions E to H) of the lower level placement section 56. The transfer device 50 also receives the item 90 from one (e.g., position E) of the multiple item placement positions (positions E to H) of the lower level placement section 56, travels downstream in the traveling directions D1 and D2, and delivers the item 90 to one (e.g., position C) of the multiple item placement positions (positions A to D) of the upper level placement section 43. As a result, even when the upper-level transport vehicle 10A and the lower-level transport vehicle 10B are set in the same traveling direction D1, D2 along the extension direction of the track 4, each transport vehicle 10A, 10B can smoothly perform a series of operations of handing over the article 90 at the upstream loading section (positions A, B, E, F) in the traveling direction D1, D2 and receiving the article 90 at the downstream loading section (positions C, D, G, H) in the traveling direction D1, D2. This improves the efficiency of transporting the article 90.

[0059] Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the invention.

[0060] In addition to the configuration of the transfer device 50 of the above embodiment, a swivel unit 55 (see FIG. 11C) may be provided between the lateral feed unit 52 and the second holding unit 53, which rotates the second holding unit 53 relative to the lateral feed unit 52 (second main body unit 51). The swivel unit 55 rotates the second holding unit 53 around an axis extending vertically. In a transport vehicle system 1 equipped with this modified transfer device 50, the relay device 40 can deliver the item 90 in an appropriate orientation to the upper level transport vehicle 10A and the lower level transport vehicle 10B. For example, if the item 90 is a FOUP, the orientation of the item 90 here is determined by the position where the FOUP lid 90A is placed.

[0061] For example, as shown in Figure 11 (A), when the running direction D1 of the upper level transport vehicle 10A and the running direction D2 of the lower level transport vehicle 10B are the same, the orientation of the item 90 is not a particular issue, but when the running direction D1 of the upper level transport vehicle 10A and the running direction D3 of the lower level transport vehicle 10B are opposite to each other, as shown in Figure 11 (B), the orientation of the item 90 becomes an issue. The transfer device 50 of the modified example is equipped with a turning unit 55, so that the orientation of the item 90 can be turned when moving the item 90 between the upper level loading unit 43 and the lower level loading unit 56.

[0062] An interfloor conveying device 85 shown in FIG. 12 is a device similar to the relay device 40 of the above embodiment and the above modification. The interfloor conveying device 85 is a so-called lift device, and a transfer device is provided that can be raised and lowered along a member such as a vertically extending mast. The relay device 40 can also be used in combination with such an interfloor conveying device 85. However, since the interfloor conveying device 85 requires a structure with a vertically fixed mast, restrictions are imposed when installing fire doors 80 (see FIG. 1) between floors. In contrast, the relay device 40 of the above embodiment and the above modification does not have such restrictions and can be flexibly incorporated into the guided vehicle system 1.

[0063] In the above embodiment and modified example, the upper level loading section 43 and the lower level loading section 56 are described as being configured to be able to arrange four (multiple) items 90 along the extension direction of the track 4, but each may have one to three, or five or more. Also, in the above embodiment and modified example, the upper level loading section 43 and the lower level loading section 56 are described as being configured as being configured with the same number of positions dedicated to transfers from the upper level transport vehicle 10A to the lower level transport vehicle 10B and the same number of positions dedicated to transfers from the lower level transport vehicle 10B to the upper level transport vehicle 10A, but these may be configured with different numbers, or one of them may not be configured.

[0064] In the above embodiment and modified example, the upper level transport vehicle 10A and the lower level transport vehicle 10B run in the same direction, but they may run in opposite directions. Also, in the above embodiment and modified example, the extension direction of the track 4 on which the upper level transport vehicle 10A runs and the extension direction of the track 4 on which the lower level transport vehicle 10B runs are the same, but they may be perpendicular to each other, for example, and are not limited to the above embodiment and modified example.

[0065] 1...transport vehicle system, 4...track, 6...side track buffer, 10...transport vehicle, 10A...upper level transport vehicle, 10B...lower level transport vehicle, 30...lifting platform (first holding section), 40...relay device, 41...storage section, 43...upper level loading section, 45...slide section, 49...relay controller, 50...transfer device, 51...second main body section, 52...lateral feed section, 53...second holding section, 54...hanging member, 55...swivel section, 56...lower level loading section, 80...fire door, 85...inter-floor transport device, 90...item, D1, D2, D3...one direction (travel direction), DL...lower level, UL...upper level.

Claims

1. A transport vehicle system in which an item is transported by a transport vehicle having a first main body section capable of running along a track, and a first holding section that is capable of raising and lowering relative to the first main body section by winding and unwinding a hanging member and can hold an item, the transport vehicle system comprising: an upper level transport vehicle that is the transport vehicle running on the track installed on the ceiling of an upper level; a lower level transport vehicle that is the transport vehicle running on the track installed on the ceiling of a lower level that is lower than the upper level; and a relay device that relays the transfer of the item between the upper level transport vehicle and the lower level transport vehicle, the relay device having an upper level loading section installed on the floor of the upper level, a lower level loading section installed on the lower level, and a transfer device that transfers the item between the upper level loading section and the lower level loading section, the upper level transport vehicle transfers the item to the upper level loading section, and the lower level transport vehicle transfers the item to the lower level loading section.

2. The transport vehicle system of claim 1, wherein the transfer device has a second main body portion and a second holding portion that is movable up and down relative to the second main body portion by winding and unwinding a hanging member and that is capable of holding the item.

3. A transport vehicle system as described in claim 2, wherein the upper level loading section and the lower level loading section are positioned at offset positions from each other when viewed in a plane, and the transfer device further has a lateral feed section that moves the second holding section horizontally between above the upper level loading section and above the lower level loading section.

4. A transport vehicle system as described in claim 2 or 3, wherein the extension directions of the track provided on the ceiling of the upper level and the track provided on the ceiling of the lower level are the same, and the second main body portion is arranged to be movable along the extension direction.

5. A transport vehicle system as described in claim 4, wherein the upper level loading section and the lower level loading section are configured to be able to arrange multiple items along the extension direction, and the second main body section is configured to be able to move along the extension direction to any item loading position arranged on the upper level loading section and the lower level loading section.

6. The upper level transport vehicle and the upper level transport vehicle travel in one direction along the extension direction, and the transfer device receives the item from one of the multiple item loading positions of the upper level loading section, travels downstream in the one direction, and delivers the item to one of the multiple item loading positions of the lower level loading section, and receives the item from one of the multiple item loading positions of the lower level loading section, travels downstream in the one direction, and delivers the item to one of the multiple item loading positions of the upper level loading section. A transport vehicle system as described in claim 5.

7. A transport vehicle system according to claim 2 or 3, wherein the transfer device has a rotating part that rotates the second holding part around an axis extending in the vertical direction.

8. A transport vehicle system comprising an upper level transport vehicle that is the transport vehicle that runs on the track provided on the ceiling of an upper level, and a lower level transport vehicle that is the transport vehicle that runs on the track provided on the ceiling of a lower level that is lower than the upper level, and in which the items are transported by a transport vehicle having a first main body portion that can run along a track and a first holding portion that is capable of holding items and that is capable of raising and lowering relative to the first main body portion by winding and unwinding a hanging member, wherein the items are transported by a transport vehicle having such a first main body portion that can run along a track and that is capable of holding items by winding and unwinding a hanging member, and a relay device that relays the transfer of the items between the upper level transport vehicle and the lower level transport vehicle, the relay device comprising: an upper level loading section that is provided on the floor of the upper level and to which the items are transferred from the upper level transport vehicle; a lower level loading section that is provided on the lower level and to which the items are transferred from the lower level transport vehicle; and a transfer device that transfers the items between the upper level loading section and the lower level loading section.

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