Height adjustment tool

Abstract

A height adjustment tool according to one aspect disclosed herein is a tool for adjusting the height of a cup disposed so as to surround a holding unit that holds a substrate in a liquid treatment device for performing liquid treatment on a substrate. This height adjustment tool comprises: a base part that is formed so as to be placeable on a holding part; three work target parts that are disposed around a central axis, intersecting the base part, so as to positioned at least partially above the base part; three or more measurement parts that are disposed around the central axis and measure the height of the cup; and an attachment / detachment part which is provided on the base part and to which a grip member gripped by a worker is detachably attached. Each of the three work target parts is provided below the holding part in the liquid treatment device and can be connected to an adjustment member that changes the height of the cup. Three measurement parts among the three or more measurement parts are disposed along the circumferential direction around the central axis so as to correspond to the three work target parts.

Description

Height adjustment tool

[0001] The present disclosure relates to a height adjustment tool.

[0002] Patent Document 1 discloses a height-adjusting jig that adjusts and holds a workpiece in the height direction.

[0003] Japanese Patent Application Publication No. 9-225763

[0004] The height of a cup of a liquid processing apparatus that performs liquid processing on a substrate may be adjusted in some cases. The present disclosure provides an adjustment tool that can easily adjust the height of the cup of the liquid processing apparatus.

[0005] A height adjustment tool according to one aspect of the present disclosure is a tool for adjusting the height of a cup arranged to surround a holder that holds a substrate in a liquid processing apparatus that performs liquid processing on a substrate. The height adjustment tool includes a base configured to be placed on the holder, three work targets arranged around a central axis that intersects with the base so that at least a portion of the work targets is positioned above the base, three or more measurement units arranged around the central axis and that measure the height of the cup, and a detachable attachment unit provided on the base to which a gripping member to be held by an operator is detachably attached. Each of the three work targets is connectable to an adjustment member provided below the holder in the liquid processing apparatus that raises or lowers the height of the cup. The three measurement units included in the three or more measurement units are arranged to correspond to the three work targets in the circumferential direction around the central axis.

[0006] According to the present disclosure, an adjustment tool is provided that allows for easy adjustment of the height of the cup of a liquid treatment device.

[0007] FIG. 1 is a perspective view showing an example of a height adjustment tool. FIG. 2(a) is a top view showing an example of the height adjustment tool. FIG. 2(b) is a bottom view showing an example of the height adjustment tool. FIG. 3 is a plan view schematically showing an example of a substrate processing apparatus. FIG. 4 is a front view schematically showing an example of the substrate processing apparatus. FIG. 5(a) is a plan view schematically showing an example of a cup of a liquid processing apparatus. FIG. 5(b) is a side view schematically showing an example of a cup of a liquid processing apparatus. FIG. 6(a) is a cross-sectional view schematically showing an example of an adjustment member of the cup. FIG. 6(b) is a side view schematically showing an example of a cup of a liquid processing apparatus. FIG. 7 is a perspective view illustrating a state in which the adjustment tool is in use. FIG. 8(a) is a schematic view showing an example of a guide portion. FIG. 8(b) is a schematic view showing an example of a guide portion. FIG. 9 is a schematic view showing an example of a bottom portion of a base portion of the adjustment tool. FIG. 10 is a cross-sectional view showing an example of a work target portion of the adjustment tool. FIG. 11(a) is a schematic diagram showing an example of a gripping member. FIG. 11(b) is a schematic diagram showing an example of a detachable attachment portion. FIGS. 12(a) and 12(b) are schematic diagrams illustrating an example of a gripping member when attached. FIGS. 13(a) and 13(b) are schematic diagrams illustrating an example of a gripping member when attached. FIGS. 14(a), 14(b), 14(c), and 14(d) are plan views illustrating an example of an adjustment tool when in use. FIG. 15 is a plan view showing an example of an adjustment tool. FIGS. 16(a) and 16(b) are schematic diagrams illustrating an example of an adjustment tool. FIG. 17(a) is a schematic diagram showing an example of a height adjustment motor. FIG. 17(b) is a schematic diagram showing an example of a member for limiting torque. FIG. 18 is a flowchart showing an example of a process flow executed when adjusting the height of a cup.

[0008] An embodiment will be described below with reference to the drawings. In the description, the same elements or elements having the same functions are designated by the same reference numerals, and redundant description will be omitted.

[0009] Figures 1, 2(a), and 2(b) show a height adjustment tool according to one embodiment. Tool 100 (height adjustment tool) shown in Figures 1, 2(a), and 2(b) is a tool for adjusting the height of a cup included in a liquid processing apparatus. Tool 100 is portable by an operator. In the operation of adjusting the height of a cup, for example, an operator places tool 100 at a work position and operates tool 100 to adjust the height of the cup.

[0010] Adjusting the height of a cup using tool 100 includes, for example, adjusting the vertical position of the cup to match the height position within a predetermined reference range, and level adjustment to make the cup closer to parallel. Below, we will first explain the cup to be adjusted by tool 100, the liquid processing apparatus in which the cup is equipped, and the wafer processing system in which the liquid processing apparatus is installed, and then explain the details of tool 100.

[0011] <Wafer Processing System> First, the configuration of a wafer processing system as a substrate processing apparatus will be described with reference to Figures 3 and 4. Figures 3 and 4 are a plan view and a front view, respectively, that schematically show an outline of the configuration of wafer processing system 1. In this embodiment, the wafer processing system 1 will be described as an example of a photolithography processing system that performs a resist film forming process and a development process on a wafer W (substrate).

[0012] 3, the wafer processing system 1 includes a cassette station 2 into which a cassette C containing a plurality of wafers W is loaded and unloaded, and a processing station 3 equipped with a plurality of various processing devices that perform predetermined processing on the wafers W. The wafer processing system 1 has a configuration in which the cassette station 2, the processing station 3, and an interface station 4 that transfers the wafers W between them and an exposure device (not shown) adjacent to the opposite side of the processing station 3 are integrally connected. Note that, as shown in FIG. 3, two processing stations 3 are installed between the cassette station 2 and the interface station 4, but one, or three or more processing stations may be installed.

[0013] The cassette station 2 is equipped with multiple cassette mounting tables 21 and wafer transfer devices 22 and 23. The cassette station 2 uses the wafer transfer device 22 or 23 to transfer wafers between the cassette C mounted on the mounting table 21 and the processing station 3. To this end, the wafer transfer devices 22 and 23 are each provided with a drive mechanism having movement paths in various directions, such as the horizontal direction (X direction and Y direction), the vertical direction (Z direction), and the vertical axis (θ direction), as needed. Alternatively, the wafer transfer devices 22 and 23 may be provided with a drive mechanism having movement paths in all directions. At least one of the wafer transfer devices 22 and 23 is capable of transferring wafers between the cassette C and the processing station 3. Note that transferring wafers to and from the processing station 3 refers to, for example, transferring wafers between the third block G3, which includes a transfer device accessible by the wafer transfer device 33 in the processing station 3 (described later). The third block G3 may be provided with multiple transfer devices (not shown) arranged vertically.

[0014] An inspection device (not shown) for inspecting the wafer W may be provided at a position accessible to either of the wafer transfer devices 22 and 23 .

[0015] The processing station 3 includes multiple blocks, e.g., three blocks G1, G2, and G4 (first, second, and fourth blocks). As shown in FIG. 4 , multiple layers 31 each including the first and second blocks G1 and G2 are stacked vertically. For example, the first block G1 is provided on the front side of the processing station 3 (the negative X-direction side in FIG. 3 ), and the second block G2 is provided on the rear side of the processing station 3 (the positive X-direction side in FIG. 3 ). The fourth block G4 is provided on the interface station 5 side of the processing station 3 (the positive Y-direction side in FIG. 3 ) or at a connection point with another adjacent processing station 3. The fourth block G4 may include multiple transfer devices arranged vertically. The aforementioned third block G3 may also be provided within the processing station 3.

[0016] The first block G1 is provided with a plurality of processing devices, such as a patterning film forming device and a development processing device, both of which are not shown. The patterning film forming device may include, for example, a resist film forming device and an anti-reflection film forming device. For example, a plurality of processing devices are arranged horizontally. The number, arrangement, and type of these processing devices can be selected arbitrarily.

[0017] In these patterning film forming apparatuses and developing treatment apparatuses, for example, a predetermined processing liquid or a predetermined gas is supplied onto the wafer W. In this manner, the patterning film forming apparatus forms a resist film used as a mask when forming a pattern on an underlying film, or forms an anti-reflection film for efficiently performing a light irradiation process, such as an exposure process. Meanwhile, in the developing treatment apparatus, a portion of the exposed resist film is removed to form an uneven shape as the mask. A liquid treatment apparatus U1 may be provided as an example of the patterning film forming apparatus or developing treatment apparatus.

[0018] For example, the second block G2 is provided with vertically and horizontally aligned heat treatment devices (not shown) that perform heat treatments such as heating and cooling of the wafer W. The second block G2 also is provided with vertically (Z direction in FIG. 3 ) and horizontally aligned hydrophobization devices that perform hydrophobization treatment to improve the fixation of the resist liquid to the wafer W, and peripheral exposure devices that expose the peripheral portion of the wafer W, both of which are not shown. The number and arrangement of these heat treatment devices, hydrophobization treatment devices, and peripheral exposure devices can also be selected as desired.

[0019] 3, a wafer transfer area 32 is formed in an area sandwiched between the first block G1 and the second block G2 in a plan view. In the wafer transfer area 32, for example, a wafer transfer device 33 is disposed.

[0020] The wafer transfer device 33 has a transfer arm that is movable in, for example, the Y direction, the front-rear direction, the θ direction, and the up-down direction. The wafer transfer device 33 moves within the wafer transfer area 32 and can transfer the wafer W to predetermined devices in the surrounding first block G1, second block G2, third block G3, and fourth block G4. When there are multiple processing stations 3 as shown in Figure 3, the wafer transfer device 33 provided in the processing station 3 located on the interface station 4 side can transfer the wafer W to predetermined devices in the first, second, and fourth blocks G1, G2, and G3, as well as the fifth block G5 described below.

[0021] A plurality of wafer transfer devices 33 are arranged vertically, for example, as shown in FIG. 4 . One wafer transfer device 33 can transfer wafers W to a predetermined device located at the height of the upper layers 31 among the multiple layers 31 stacked vertically. Another wafer transfer device 33 can transfer wafers W to a predetermined device located at the height of multiple layers 31 located below the above layers 31. A plurality of wafer transfer regions 32 are provided to enable such transfer of wafers W. Note that the number of wafer transfer devices 33 and the number of layers 31 corresponding to one wafer transfer device 33 can be selected arbitrarily, such as by providing a wafer transfer device 33 for each layer 31.

[0022] The wafer transfer area 32, the first block G1, or the second block G2 may also include a shuttle transfer device (not shown). The shuttle transfer device linearly transfers wafers W between a space adjacent to one side of the processing station 3 and another space adjacent to the opposite side.

[0023] The interface station 4 includes a fifth block G5 equipped with a plurality of transfer devices, and wafer transfer devices 41 and 42. The interface station 4 uses the wafer transfer device 41 or 42 to transfer the wafer W between the fifth block G5, where the wafer W is transferred by the wafer transfer device 33, and the exposure device. To this end, the wafer transfer devices 41 and 42 are each provided with a drive mechanism having movement paths in various directions, such as the horizontal direction (X direction, Y direction), the vertical direction (Z direction), and around the vertical axis (θ direction), as needed, or may be provided with a drive mechanism having movement paths in all directions. At least one of the wafer transfer devices 41 and 42 can support the wafer W and transfer the wafer W between the transfer device in the fifth block G5 and the exposure device.

[0024] A cleaning device for cleaning the surface of the wafer W and the aforementioned peripheral exposure device may be provided in the interface station 4 at a position accessible to either of the wafer transfer devices 41 and 42 .

[0025] The inspection device may be provided in the cassette station 2 as described above, but it may also be provided in the processing station 3 and the interface station 4 at a position accessible to any of the transport arms (33, 41, 42 in Figure 3 or Figure 4) provided inside each station.

[0026] The wafer processing system 1 described above is provided with a control device 10. The control device 10 is, for example, a computer, and has a program storage unit (not shown). The program storage unit stores a program for controlling the processing of wafers W in the wafer processing system 1. The program storage unit also stores a program for controlling the operation of drive systems such as the various processing devices and transfer devices described above to realize wafer processing in the wafer processing system 1.

[0027] (Liquid Processing Apparatus / Cup) Figures 5(a) and 5(b) illustrate an example of a liquid processing apparatus equipped with a cup. The liquid processing apparatus U1 shown in Figures 5(a) and 5(b) is an apparatus that performs liquid processing on a wafer W. The liquid processing apparatus U1, for example, supplies a processing liquid for film formation (e.g., a resist liquid) to the surface of the wafer W to form a coating of the processing liquid. Alternatively, the liquid processing apparatus U1 supplies a processing liquid for development to the surface of the wafer W to perform development processing.

[0028] 5(a) and 5(b) show some components of the liquid processing device U1, and omit the parts that supply the processing liquid, etc. In FIGS. 5(a) and 5(b), the "Z-axis" direction represents the up-down direction. FIG. 5(a) is a plan view that schematically illustrates a portion of the liquid processing device U1, and FIG. 5(b) is a side view that schematically illustrates a portion of the liquid processing device U1. The liquid processing device U1 includes a holder 50, a cup 60, and three adjustment members 70.

[0029] The holding unit 50 holds a wafer W to be processed. The wafer W is placed on an upper surface 50a of the holding unit 50. The holding unit 50 holds the wafer W by, for example, suction. The holding unit 50 is configured to hold the wafer W approximately horizontally. The holding unit 50 is rotatable around a vertical axis of rotation. In Figures 5(a) and 5(b), the center of rotation corresponding to the vertical axis of rotation is indicated by "RC". A rotation drive unit is connected to the holding unit 50 via a shaft 52. The holding unit 50 holds the wafer W so that the center of rotation RC approximately coincides with the center of the wafer W.

[0030] Cup 60 is a member arranged to surround holding part 50 in liquid processing apparatus U1. Cup 60 is a member for receiving processing liquid supplied to wafer W held by holding part 50. Cup 60 forms a processing space with an open upper end, and accommodates holding part 50 and wafer W held by holding part 50 in the processing space. Cup 60 is configured to collect processing liquid splashed around from the outer periphery of wafer W rotated by holding part 50.

[0031] The cup 60 has a bottom wall 61, an outer wall 62, an inclined wall 63, an inner wall 64, an umbrella-shaped portion 66, and a base portion 68. The bottom wall 61 extends horizontally and is formed in an annular shape. In a plan view, the bottom wall 61 is disposed so as to surround the holding portion 50. The outer wall 62 protrudes vertically upward from the outer edge of the bottom wall 61 and is formed in a cylindrical shape. The inclined wall 63 is connected to the upper end of the outer wall 62 and is formed in an annular shape tilted inward. The end of the inclined wall 63 opposite the connection portion with the outer wall 62 extends vertically upward. The inner wall 64 protrudes vertically upward from the inner edge of the bottom wall 61 and is formed in a cylindrical shape.

[0032] The umbrella-shaped portion 66 has the function of guiding the processing liquid supplied to the surface of the wafer W into a space formed by the bottom wall 61, the outer wall 62, and the inner wall 64. The umbrella-shaped portion 66 is formed in an annular shape, and its inner end is connected to the upper end of the inner wall 64. The upper surface of the umbrella-shaped portion 66 is composed of two inclined surfaces. The inner inclined surface is inclined so as to become higher outward, and the outer inclined surface is inclined so as to become lower outward. As a result, the vertical cross section of the umbrella-shaped portion 66 is formed in a mountain shape. In a plan view, the inner portion of the umbrella-shaped portion 66 is not covered by the inclined wall 63 and is exposed.

[0033] The base portion 68 is provided inside the inner wall 64, and its outer edge is connected to the inner wall 64. The base portion 68 has the function of supporting the portions of the cup 60 other than the base portion 68. The base portion 68 is provided so as not to interfere with the holding portion 50 and the shaft 52. When the base portion 68 moves up and down, the entire cup 60 moves up and down.

[0034] Each of the three adjustment members 70 is a member that adjusts the height of the cup 60 (base portion 68). Each of the three adjustment members 70 supports the base portion 68 of the cup 60 so that it can move up and down. Each adjustment member 70 is provided to penetrate the base portion 68 in the up and down direction. An operator can adjust the height of the cup 60 by operating the operation target portion of each of the three adjustment members 70 with a tool or the like. In the present disclosure, the height of the cup 60 does not refer to the vertical dimension of the cup 60 itself, but rather refers to the distance (height position) from a reference position in the up and down direction.

[0035] The three adjustment members 70 are provided below the holding part 50. The positioning of the adjustment members 70 below the holding part 50 means that the upper end of each adjustment member 70 is located below the upper surface 50a of the holding part 50 on which the back surface of the wafer W is placed. This prevents contact between the wafer W and each adjustment member 70 when the wafer W is placed on the holding part 50. In a plan view, the three adjustment members 70 are located outward from the outer edge of the holding part 50.

[0036] The three adjustment members 70 are fixed to a base portion 58 provided in the liquid processing apparatus U1. The base portion 58 may be fixed to the housing of the liquid processing apparatus U1 by a fixing member 59. The height (relative position in the upward direction) of the base portion 68 of the cup 60 with respect to the base portion 58 changes by operating each adjustment member 70. Each adjustment member 70 may be switchable between a state in which the base portion 68 can be moved up and down and a state in which the height of the base portion 68 is fixed.

[0037] The three adjustment members 70 are arranged around the center of rotation RC. The three adjustment members 70 are arranged on a circumference around the center of rotation RC. The distances (shortest distances) between each of the three adjustment members 70 and the center of rotation RC are approximately the same. The three adjustment members 70 are arranged at equal intervals from one another in the circumferential direction around the center of rotation RC (the direction along the circle centered on the center of rotation RC). For all combinations of pairs of adjustment members 70, when observed in a plan view, the centers of one adjustment member 70 and the other adjustment member 70 are separated by 120° in the circumferential direction around the center of rotation RC.

[0038] In this disclosure, when referring to each of the three adjustment members 70 individually, the three adjustment members 70 will be referred to as "adjustment member 70A," "adjustment member 70B," and "adjustment member 70C." When observed clockwise around a circle centered on the rotation center RC, the adjustment members 70A, 70B, and 70C are arranged in this order. Figure 5(b) schematically shows a cross section taken along line IVb-IVb in Figure 5(a), which is set to pass through adjustment members 70A and 70B.

[0039] As shown in FIG. 6A , the adjustment member 70 includes a first adjustment portion 72 and a second adjustment portion 74. The first adjustment portion 72 is rotatable about an adjustment axis Ax2 and adjusts the height of the base portion 68. The adjustment axis Ax2 is, for example, a vertical axis. The first adjustment portion 72 may be a bolt having a through-hole extending along the adjustment axis Ax2. The first adjustment portion 72 is disposed to penetrate the base portion 68 in the direction along the adjustment axis Ax2, and the threaded portion of the first adjustment portion 72 is threadedly engaged with the inner surface of the through-hole of the base portion 68.

[0040] The lower end of the first adjustment part 72 is fixed to the base part 58. Even when the first adjustment part 72 rotates around the adjustment axis Ax2, the position of the first adjustment part 72 with respect to the base part 58 does not change. When an external force that rotates the head of the first adjustment part 72 around the adjustment axis Ax2 is applied to the head of the first adjustment part 72, the first adjustment part 72 rotates around the adjustment axis Ax2, and in conjunction with this rotation, the vertical position of the base part 68 of the cup 60 with respect to the base part 58 changes.

[0041] The second adjustment unit 74 is rotatable about the adjustment axis Ax2 and fixes the height of the cup 60. The second adjustment unit 74 is, for example, a screw disposed inside the first adjustment unit 72. The threaded portion of the second adjustment unit 74 screws into the inner surface of the screw hole in the base unit 58. The second adjustment unit 74 switches between a state in which the first adjustment unit 72 is rotatable about the adjustment axis Ax2 and a state in which the first adjustment unit 72 is not rotatable about the adjustment axis Ax2.

[0042] The head of the second adjustment part 74 can be operated with a tool or the like from the upper end of the through-hole of the first adjustment part 72. When the first adjustment part 72 is in a rotatable state, an external force is applied to the head of the second adjustment part 74 to rotate it in the tightening direction about the adjustment axis Ax2, thereby fastening the first adjustment part 72 to the base part 58. When the first adjustment part 72 is in a fastened state, an external force is applied to the head of the second adjustment part 74 to rotate it in the loosening direction about the adjustment axis Ax2, thereby putting the first adjustment part 72 into a rotatable state.

[0043] By operating each of adjustment members 70A, 70B, and 70C, the entire base portion 68 (the entire cup 60) moves up and down, changing its height position and also changing the tilt of the cup 60. Figure 5(b) illustrates a state in which the height of the cup 60 is "H1." Figure 6(b) illustrates a state in which the height of the cup 60 is "H2," which is lower than H1.

[0044] 1, 2(a), and 2(b), the tool 100 according to one embodiment is used to adjust the height of the cup 60. For example, an operator uses the tool 100 to measure the height of the cup 60 while individually operating the three adjustment members 70 via the tool 100. In describing a specific example of the tool 100, the terms "upper" and "lower" are used based on the state of use of the tool 100. The "direction D1" shown in FIG. 1 and other figures is a direction (orientation) that faces vertically upward when the tool 100 is in use, and the "direction D2" is a direction (orientation) that faces vertically downward when the tool 100 is in use.

[0045] The tool 100 includes a base 110, three work target parts 120, three or more measuring parts 130, a gripping member 140, and a detachable attachment part 150. Below, an overview of each part included in the tool 100 will be first described, and then each part will be described in detail.

[0046] The base 110 is a base portion for supporting the portions of the tool 100 other than the base 110. The base 110 is formed so as to be mountable on the holder 50 of the liquid processing apparatus U1. The base 110 is formed in a plate shape so as to extend in a direction intersecting (for example, perpendicular to) the directions D1 and D2. The base 110 may be formed in a disk shape. The base 110 may be formed by stacking two or more plates.

[0047] In FIG. 1 and other figures, "Ax1" represents the central axis of the tool 100. The central axis Ax1 is an imaginary line that intersects with the base 110. For example, the central axis Ax1 passes through the center of the base 110 and extends along the direction D1 and the direction D2. The center of the base 110 may coincide with the center of gravity of the base 110. In describing the tool 100, the direction toward the central axis Ax1 is referred to as "inner" or "inside," and the direction away from the central axis Ax1 is referred to as "outer" or "outside." Furthermore, in describing the tool 100, "planar view" means viewing the upper side of the tool 100 from the axial direction along which the central axis Ax1 extends.

[0048] The three work targets 120 are arranged around the central axis Ax1. The three work targets 120 are arranged on a circumference around the central axis Ax1. The distances (shortest distances) between each of the three work targets 120 and the central axis Ax1 are approximately the same. The three work targets 120 are arranged at equal intervals from one another in the circumferential direction around the central axis Ax1 (the direction along a circle centered on the central axis Ax1). For all combinations of pairs of work targets 120, when observed in a plan view, the centers of one work target 120 and the other work target 120 are separated by 120° in the circumferential direction around the central axis Ax1.

[0049] The distance (shortest distance) between central axis Ax1 and the position where the center of work target unit 120 is located is approximately the same as the distance (shortest distance) between the center of rotation RC of liquid processing device U1 and the center of adjustment member 70. In this disclosure, when referring to each of the three work target units 120 individually, they are referred to as "work target unit 120A," "work target unit 120B," and "work target unit 120C." When observed clockwise on a circumference around central axis Ax1, work target unit 120A, work target unit 120B, and work target unit 120C are arranged in this order.

[0050] Each work target unit 120 is disposed on the base 110 such that at least a portion thereof is located above the base 110. Each work target unit 120 includes, for example, a portion to be operated by an operator, and is disposed on the base 110 such that the portion to be operated is located above the base 110. "The portion to be operated of the work target unit 120 being located above the base 110" means that at least a portion of the portion to be operated is located above the top end of the base 110. The portion to be operated by an operator includes not only a portion that is operated by the operator through direct contact, but also a portion that is operated by the operator using a tool. In other words, the operator operates the portion to be operated of the work target unit 120 by directly touching it, or operates the portion to be operated using a tool or the like.

[0051] Each of the three work target parts 120 is connectable to an adjusting member 70 in the liquid processing apparatus U1. For example, work target part 120A is connected to adjusting member 70A, work target part 120B is connected to adjusting member 70B, and work target part 120C is connected to adjusting member 70C. Each work target part 120 is configured so that an operator can operate an operating target part of work target part 120 connected to adjusting member 70, thereby operating adjusting member 70.

[0052] The three or more measuring units 130 are arranged around the central axis Ax1. The tool 100 includes, for example, three measuring units 130 as the three or more measuring units 130. Each of the three measuring units 130 is a sensor that measures the height of the cup 60. The sensor used as the measuring unit 130 may measure the height using any method. Each of the three measuring units 130 acquires information indicating the height of a corresponding measurement point on the cup 60. The three measuring units 130 are arranged on a circumference around the central axis Ax1. The distances (shortest distances) between each of the three measuring units 130 and the central axis Ax1 are approximately the same.

[0053] The three measuring units 130 are arranged at equal intervals from one another in the circumferential direction about the central axis Ax1 (the direction along a circle centered on the central axis Ax1). For all combinations of pairs of measuring units 130, when observed in a plan view, the centers of one measuring unit 130 and the other measuring unit 130 are separated by 120° in the circumferential direction about the central axis Ax1.

[0054] The distance (shortest distance) between the measurement unit 130 and the central axis Ax1 may be greater than the distance (shortest distance) between the work target unit 120 and the central axis Ax1. The measurement unit 130 may be disposed outward of the work target unit 120. In the present disclosure, when referring to each of the three measurement units 130 individually, the three measurement units 130 are referred to as "measurement unit 130A," "measurement unit 130B," and "measurement unit 130C." When observed clockwise on a circumference around the central axis Ax1, the measurement units 130A, 130B, and 130C are arranged in this order.

[0055] The three measuring units 130 are arranged to correspond to the three work target units 120 in the circumferential direction around the central axis Ax1. Measuring unit 130A corresponds to work target unit 120A, and in a plan view, work target unit 120A and measuring unit 130A are arranged on a line passing through the central axis Ax1. Measuring unit 130B corresponds to work target unit 120B, and in a plan view, work target unit 120B and measuring unit 130B are arranged on a line passing through the central axis Ax1. Measuring unit 130C corresponds to work target unit 120C, and in a plan view, work target unit 120C and measuring unit 130C are arranged on a line passing through the central axis Ax1.

[0056] The tool 100 may include three brackets 138. Each of the three measuring units 130 may be fixed to the base 110 via the bracket 138. The bracket 138 is formed to extend outward from the base 110. An inner end of each bracket 138 is connected to the outer edge of the base 110 (at or near the outer edge), and an outer end of each bracket 138 is connected to the corresponding measuring unit 130.

[0057] The gripping member 140 is a member that is gripped by an operator when placing the tool 100 at a working position. The gripping member 140 is detachable from the base 110. When the gripping member 140 is attached to the base 110, the main body portion of the gripping member 140 that is gripped by the operator extends in a direction intersecting the central axis Ax1. For example, the length of the main body portion is greater than the shortest distance between the measuring unit 130 and the central axis Ax1.

[0058] The detachable attachment portion 150 is provided on the base portion 110, and is a portion to which the gripping member 140 can be detached. With the gripping member 140 attached to the detachable attachment portion 150, an operator grasps (supports) the gripping member 140 to move the tool 100. After the operator places the tool 100 inside the cup 60 to be adjusted, the gripping member 140 may be detached from the base portion 110, as shown in FIG. 7 . With the gripping member 140 detached, the operator may operate the operation target portion of each work target portion 120 with a tool. FIG. 7 illustrates an example of the operation target portion of the work target portion 120B being operated with tools T1 and T2.

[0059] The tool 100 may include a relay connector 170. The relay connector 170 may be provided on the base 110. A cable may be connected to the relay connector 170, and information indicating the height measurement values ​​by each measuring unit 130 may be output to a display via the cable.

[0060] (Base / Guide) The height adjustment of cup 60 is performed with base 110 of tool 100 placed on holder 50 of liquid processing apparatus U1. When installing tool 100 on holder 50, it is necessary to align central axis Ax1 of tool 100 with center of rotation RC of holder 50 and to align corresponding work target portion 120 and adjustment member 70 in the circumferential direction.

[0061] 2B, the tool 100 includes a guide portion 164 and a guide portion 166. The guide portion 164 and the guide portion 166 have the function of guiding the position of the base portion 110 when the tool 100 is installed in the holding portion 50. The guide portion 164 may be removably attached to the base portion 110. The guide portion 166 may be removably attached to the base portion 110.

[0062] The guide portion 164 may be composed of two or more portions arranged at two or more locations in the circumferential direction around the central axis Ax1. Fig. 8(a) is a schematic diagram illustrating the function of the guide portion 164. The guide portion 164 has a function of guiding the base portion 110 so that the central axis Ax1 of the tool 100 approaches the center (rotation center RC) of the holding portion 50. The guide portion 164 includes an inclined surface 164a.

[0063] The inclined surface 164a is a surface that inclines outward as it moves away from the base 110. When the base 110 is brought closer to the holding part 50 from above in order to place the base 110 on the holding part 50, the holding part 50 can abut against the inclined surface 164a. Even if the central axis Ax1 and the center of rotation RC are misaligned, the outer edge of the upper surface of the holding part 50 abuts against the inclined surface 164a, and the position of the base 110 is adjusted.

[0064] 2B, the tool 100 has two guide units 166. The two guide units 166 are attached at positions 180° apart from each other in the circumferential direction about the central axis Ax1. Either one of the two guide units 166 may be used to guide the orientation of the base unit 110 about the central axis Ax1 (the angles of the work target units 120 and the measuring units 130).

[0065] 8(b) is a schematic diagram illustrating the function of guide portion 166. In liquid processing apparatus U1, rod-shaped member 80 is provided around holding portion 50. Member 80 is, for example, a cylindrical member for protecting the pins that support wafer W. Guide portion 166 forms recess 166a that is open downward. With central axis Ax1 and center of rotation RC substantially aligned, the upper end of member 80 is fitted into recess 166a of guide portion 166, thereby fixing the orientation of base 110 around central axis Ax1.

[0066] As shown in FIG. 9 , a plurality of protrusions 50b are provided on the upper surface 50a of the holding unit 50. The plurality of protrusions 50b are formed to protrude upward from a flat portion of the upper surface 50a. In a plan view, each of the plurality of protrusions 50b may be formed linearly. In the liquid processing apparatus U1, when a wafer W is placed on the upper surface 50a of the holding unit 50, the plurality of protrusions 50b support the wafer W with the backside of the wafer W in contact with the upper ends of the plurality of protrusions 50b. When the plurality of protrusions 50b support the wafer W, a space is formed between adjacent protrusions 50b and the backside of the wafer W, and this space is sucked by the suction unit 55, creating a negative pressure. As a result, the wafer W is attracted to the holding unit 50.

[0067] The base 110 may include an upper layer 112 and a lower layer 114. The upper layer 112 is disposed so as to overlap the lower layer 114. The bottom of the base 110 is formed so as to be able to be placed on the upper surface 50a of the holder 50, and the bottom of the lower layer 114 corresponds to the bottom of the base 110. The upper layer 112 may be made of metal, and the lower layer 114 may be made of resin.

[0068] A plurality of protrusions 110a are provided on the lower surface of the lower layer 114. The plurality of protrusions 110a are formed at positions that do not contact the plurality of protrusions 50b when the base 110 is placed on the holder 50 with the central axis Ax1 of the tool 100 and the rotation center RC of the holder 50 aligned. The protrusions 110a have a length that prevents the plurality of protrusions 50b from contacting the bottom of the lower layer 114 when the base 110 is placed on the holder 50. The plurality of protrusions 110a form recesses 110b that accommodate the protrusions 50b when the base 110 is placed on the holder 50. When the base 110 is placed and the height of the cup 60 is adjusted using the tool 100, the base 110 may be held to the holder 50 by suction using the suction unit 55.

[0069] (Work target unit) Fig. 10 shows a cross-sectional view that schematically illustrates the work target unit 120. A through-hole is formed in the base 110, into which the work target unit 120 can be inserted. The work target unit 120 may be arranged on the base 110 in a state where it is inserted into the through-hole of the base 110. The work target unit 120 may be arranged on the base 110 in a rotatable and detachable state. The work target unit 120 includes a first working unit 122 and a second working unit 124.

[0070] The first working unit 122 is rotatable about a working axis Ax3 and can be fitted to the first adjustment unit 72 of the adjustment member 70. The working axis Ax3 is an axis parallel to the central axis Ax1 of the tool 100 and extends vertically, for example, when the base 110 is placed on the holding unit 50. A through-hole extending along the working axis Ax3 is provided inside the first working unit 122, and a recess is provided at the lower end of the first working unit 122 to fit over the head of the first adjustment unit 72, which is a bolt.

[0071] The diameter of a portion including the upper end of the first working unit 122 is larger than the diameter of the through-hole into which the first working unit 122 is inserted, and this portion is caught around the periphery of the through-hole in the base 110, thereby supporting the first working unit 122 on the base 110. When the work target unit 120 is placed on the base 110, the portion of the first working unit 122 that is located above the base 110 is the operation target site of the first working unit 122. When the head of the first adjustment unit 72 is engaged with the recess at the lower end of the first working unit 122, an external force about the work axis Ax3 is applied to the first working unit 122, causing the first adjustment unit 72 to rotate about the adjustment axis Ax2 along with the rotation of the first working unit 122.

[0072] The second working unit 124 is rotatable about the working axis Ax3 and is engageable with the second adjustment unit 74. At least a portion of the second working unit 124 is disposed inside the first working unit 122. The second working unit 124 is provided inside the first working unit 122 so as to be movable in the axial direction along which the working axis Ax3 extends and rotatable relative to the first working unit 122. The second working unit 124 may be supported by the first working unit 122 by a packing and a ring provided inside the first working unit 122 or on the outer periphery of the second working unit 124.

[0073] The second working unit 124 may be a screwdriver formed to extend along the working axis Ax3. The lower end (tip) of the second working unit 124 protrudes beyond the lower end of the first working unit 122 and can be fitted into a recess provided in the upper surface of the head of the second adjustment unit 74. A portion of the second working unit 124, including its upper end, protrudes beyond the upper end of the first working unit 122. The portion of the second working unit 124 that protrudes beyond the upper end of the first working unit 122 is the area to be manipulated by the second working unit 124. When an external force about the working axis Ax3 is applied to the second working unit 124 with the lower end of the second working unit 124 fitted into the recess in the head of the second adjustment unit 74, the second adjustment unit 74 rotates about the adjustment axis Ax2 along with the rotation of the second working unit 124.

[0074] When the tool 100 is not installed, the portion to be operated to rotate the adjustment member 70 is located below the holding unit 50. When the tool 100 including the work target unit 120 configured as described above is installed, the portion to be operated to rotate the adjustment member 70 moves to a position above the holding unit 50. This allows the worker to operate the adjustment member 70 via the tool 100 (work target unit 120) without having to access a position below the holding unit 50 using a tool or the like.

[0075] (Gripping Member / Detachable Mounting Portion) As shown in FIG. 11( a), the gripping member 140 includes a gripping main body 142, an attachment portion 144, and a connecting portion 146. The gripping main body 142 is a main body portion that is gripped by an operator and is formed in a rod shape extending in one direction. The attachment portion 144 is connected to one end of the gripping main body 142 via the connecting portion 146. The attachment portion 144 is formed in a rod shape extending in one direction. The extending direction of the attachment portion 144 may coincide with the extending direction of the gripping main body 142. The length of the attachment portion 144 in the extending direction may be approximately half the maximum diameter of the base 110. The connecting portion 146 may be connected to the center of the longitudinal direction of the attachment portion 144.

[0076] 11( b), the detachable attachment portion 150 includes an insertion hole 152, a storage groove 154, a leaf spring 156a, and a leaf spring 156b. The insertion hole 152 opens to the upper surface of the base 110 and is a hole into which the attachment portion 144 of the gripping member 140 can be inserted. The storage groove 154 is a groove in which the attachment portion 144 is stored. The storage groove 154 is provided inside the base 110 and connected to the insertion hole 152. The storage groove 154 is formed to extend in a direction different from the direction in which the insertion hole 152 extends. In a plan view, the angle formed between the extension direction of the insertion hole 152 and the extension direction of the storage groove 154 may be approximately 15° to 45°, or may be approximately 20° to 40°.

[0077] The leaf springs 156a and 156b are provided below the insertion hole 152 and the accommodating groove 154 (see also FIG. 12A), and apply a force from below to the attachment portion 144 so as to maintain the attachment portion 144 housed in the accommodating groove 154. Furthermore, when the leaf springs 156a and 156b are deformed by an external force, they allow the attachment portion 144 to move between the insertion hole 152 and the accommodating groove 154. The leaf springs 156a and 156b are provided so that their extending direction intersects with the accommodating groove 154.

[0078] The leaf springs 156a and 156b may be provided in a space that communicates with the insertion hole 152 and the accommodation groove 154 in the lower layer 114 of the base 110. The space in which the leaf springs 156a and 156b are disposed does not open to the bottom of the lower layer 114. This allows particles that may be generated by contact between the attachment portion 144 and the leaf springs 156a and 156b to remain inside the lower layer 114.

[0079] One end of the leaf spring 156a may be fixed, and the other end of the leaf spring 156a may not be fixed. One end of the leaf spring 156b may be fixed, and the other end of the leaf spring 156b may not be fixed. Of a pair of side regions sandwiching the accommodating groove 154 in a direction perpendicular to the extension direction of the accommodating groove 154, one region is defined as a first region and the other region is defined as a second region. One end of the leaf spring 156a may be fixed in the first region, and one end of the leaf spring 156b may be fixed in the second region.

[0080] 12(a) and 12(b) schematically illustrate the state in which the attachment portion 144 is inserted into the insertion hole 152, and FIGS. 13(a) and 13(b) schematically illustrate the state in which the attachment portion 144 is housed in the housing groove 154. When attaching the gripping member 140 to the base 110, the attachment portion 144 is inserted into the insertion hole 152, and the leaf springs 156a and 156b are pressed down. The lowering of the leaf springs 156a and 156b allows the attachment portion 144 to move from the insertion hole 152 into the housing groove 154.

[0081] With leaf springs 156a and 156b pressed down, mounting portion 144 is rotated to align with housing groove 154, whereby mounting portion 144 is housed in housing groove 154, as shown in Figures 13(a) and 13(b). At this time, leaf springs 156a and 156b each exert an upward force on mounting portion 144 due to their restoring forces. This attaches gripping member 140 to base 110.

[0082] When removing the gripping member 140 from the base 110, the gripping member 140 is also removed by pressing down the leaf springs 156a and 156b and rotating the attachment portion 144. The gripping member 140 may be attached to the base 110 by inserting the attachment portion 144 in a first state in which the gripping main body portion 142 extends toward one end of the insertion hole 152 in a plan view. In addition to the first state, the gripping member 140 may be attached to the base 110 by inserting the attachment portion 144 in a second state in which the gripping main body portion 142 extends toward the other end of the insertion hole 152 in a plan view. The attitude of the gripping member 140 with respect to the base 110 differs by 180° between the first state and the second state.

[0083] <Height Adjustment Procedure> Next, an example of a procedure for adjusting the height of the cup 60 using the tool 100 will be described. In the following, an example will be described in which six measurement positions are set around the center of rotation RC of the cup 60, and the height of the cup 60 is adjusted while measuring the height. As shown in FIG. 5A, the six measurement positions are referred to as "measurement position P1," "measurement position P2," "measurement position P3," "measurement position P4," "measurement position P5," and "measurement position P6."

[0084] Measurement positions P1 to P6 are set at equal intervals in the circumferential direction around the center of rotation RC. Measurement positions P1 to P6 are set to be lined up in this order when observed clockwise along the circumferential direction around the center of rotation RC. In the circumferential direction around the center of rotation RC, measurement position P1 is set at a position corresponding to adjustment member 70A, and measurement position P3 is set at a position corresponding to adjustment member 70B. In the circumferential direction around the center of rotation RC, measurement position P5 is set at a position corresponding to adjustment member 70C.

[0085] First, as shown in Fig. 14(a), with gripping member 140 attached to base 110, tool 100 is placed on holder 50 so that each work target portion 120 can be connected to the corresponding adjustment member 70. An operator grasps gripping member 140 and carries tool 100 from outside cup 60 to inside cup 60, thereby placing tool 100 on holder 50. In the placed state illustrated in Fig. 14(a), measuring unit 130A can measure height at measurement position P1, measuring unit 130B can measure height at measurement position P3, and measuring unit 130C can measure height at measurement position P5.

[0086] 14(b), the operator removes gripping member 140 from base 110. Then, while observing the height measurement value obtained by measuring unit 130 for each of measurement positions P1, P3, and P5, the operator operates the corresponding operation target portion of operation target unit 120 so that the height of cup 60 at that measurement position falls within the reference range.

[0087] In one example, for each measurement position included in measurement positions P1, P3, and P5, the worker performs the following operations in order (see also FIG. 10 ): (a) The worker uses a tool to operate the operation target portion of the second working unit 124 of the work target unit 120 to release the state in which the second adjustment unit 74 has fixed the first adjustment unit 72 so that the height of the cup 60 can be adjusted at that measurement position; (b) While checking the height measurement value of the corresponding measurement unit 130, the worker uses a tool to operate the operation target portion of the first working unit 122 of the work target unit 120 so that the height of the cup 60 at that measurement position falls within the reference range; (c) The worker uses a tool to operate the operation target portion of the second working unit 124 to fix the first adjustment unit 72 with the second adjustment unit 74 so that the height of the cup 60 at that measurement position is fixed.

[0088] Next, the operator reattaches the gripping member 140 to the base 110 and removes the tool 100 from within the cup 60. The operator then attaches the gripping member 140 to the base 110 in a state in which the base 110 and the gripping member 140 are rotated 180° relative to each other compared to the installation state shown in FIG. 14( a). Thereafter, as shown in FIG. 14( c), the tool 100 is installed in the holder 50 so that the three measuring units 130 can measure the height of the cup 60 at measurement positions P2, P4, and P6. At this time, the three work target units 120 may be removed from the base 110.

[0089] 14(d), the operator removes gripping member 140 from base 110. Then, the operator checks whether the height measurements taken by measurement unit 130 for each of measurement positions P2, P4, and P6 are within the reference range. Thereafter, the operator reattaches gripping member 140 to base 110 and removes tool 100 from cup 60. This completes the series of height adjustment procedures for one cup 60.

[0090] [Modification] The number of locations where the height is measured using the tool 100 may be three, instead of six. The height of the cup 60 may be adjusted by operating each operation target unit 120 while measuring the height of the cup 60 at measurement positions P1, P3, and P5 using the tool 100. In this case, the measurement and operation may be performed in the states exemplified in FIGS. 14( a) and 14(b). The height of the cup 60 may not be measured at measurement positions P2, P4, and P6. In this case, the operation of attaching the gripping member 140 to the base 110 after rotating it 180° may not be performed.

[0091] Unlike tool 100, the height adjustment tool may be configured to measure the height of six locations on the measurement target at the same time. Tool 200 (height adjustment tool) shown in FIG. 15 is a tool for adjusting the height of cup 60, similar to tool 100. Tool 200 differs from tool 100 in that it includes six measuring units 130. Tool 200 includes three measuring units 130 (measuring unit 130A, measuring unit 130B, and measuring unit 130C) arranged to correspond to the three work target portions 120 in the circumferential direction around central axis Ax1, as well as three other measuring units 130.

[0092] Each of the other three measuring units 130 is arranged so as to be sandwiched between a set of three measuring units 130 arranged to correspond to the three work target units 120. The other three measuring units 130 are referred to as "measuring unit 130D," "measuring unit 130E," and "measuring unit 130F." In the circumferential direction around the central axis Ax1, measuring unit 130D is sandwiched between measuring unit 130A and measuring unit 130B, measuring unit 130E is sandwiched between measuring unit 130B and measuring unit 130C, and measuring unit 130F is sandwiched between measuring unit 130C and measuring unit 130A. Each of the six measuring units 130 is fixed to the base 110 via a bracket 138.

[0093] When adjusting the height of cup 60 using tool 200, cup 60 is placed on holder 50 with gripping member 140 attached, and then gripping member 140 is removed from base 110. Then, while observing the measured height values ​​at each of measurement positions P1 to P6, the operator adjusts the height position of cup 60 using three work target units 120 so that each measured value falls within a reference range.

[0094] Instead of an operator using a tool, a drive unit may operate the operation target portion of each work target portion 120. Tool 200A shown in Figures 16(a) and 16(b) differs from tool 200 in that it includes a drive unit 190 and a control unit 180. Drive unit 190 applies torque to each of the three work target portions 120 to raise or lower the height of cup 60.

[0095] The drive unit 190 includes, for example, a motor 191A, a motor 191B, a motor 191C, a motor 192D, three torque limiting members 198, a timing belt 196, and a tensioner 194.

[0096] Motor 191A applies torque to the first working unit 122 of work target unit 120A to rotate it about the work axis Ax3 (see also FIG. 17A). Motor 191B applies torque to the first working unit 122 of work target unit 120B to rotate it about the work axis Ax3. Motor 191C applies torque to the first working unit 122 of work target unit 120C to rotate it about the work axis Ax3.

[0097] The motor 192D applies torque to the second working unit 124 of each of the three work target units 120. A corresponding torque limiting member 198 is connected to the second working unit 124 of each work target unit 120 (see also FIG. 17A). A timing belt 196 is connected to the motor 192D and is stretched across the three torque limiting members 198. A tensioner 194 applies tension to the timing belt 196. The motor 192D applies torque to the second working unit 124 via the timing belt 196 and the torque limiting member 198. The second working units 124 of the three work target units 120 are driven together by a single motor, motor 192D.

[0098] The torque limiting member 198 is a member that limits the application of an overload to the second working unit 124 when the height of the cup 60 is fixed (when the first adjustment unit 72 is fixed by the second adjustment unit 74). As shown in FIG. 17( b), the torque limiting member 198 may have a ratchet ring structure. The torque limiting member 198 includes, for example, an outer ring 198a formed with a protrusion that protrudes inward, and an inner ring 198b formed with a protrusion that protrudes outward.

[0099] A timing belt 196 is connected to the outer ring 198a, and a second working unit 124 is connected to the inner ring 198b. When torque is applied to the outer ring 198a in the rotational direction R1, if a load greater than a certain level is applied from the outer ring 198a to the inner ring 198b, the inner ring 198b will slip, limiting the torque applied to the second working unit 124. When torque is applied to the outer ring 198a in a rotational direction R2 opposite to the rotational direction R1, the torque is transmitted from the outer ring 198a to the inner ring 198b regardless of the load applied to the inner ring 198b. In the rotational direction R1, the gently inclined surfaces (the degree of radial position change as the rotational direction progresses) of the protrusions of the outer ring 198a and the inner ring 198b come into contact with each other. On the other hand, in the rotation direction R2, the protrusions of the outer ring 198a and the inner ring 198b come into contact with each other at their steeply inclined surfaces (the degree of radial position change is large as the rotation direction progresses).

[0100] The control unit 180 is a computer that controls various motors. Information indicating height measurement values ​​from the six measurement units 130 is input to the control unit 180. At least a part of the height adjustment procedure may be automatically performed by the control unit 180. FIG. 18 illustrates a series of processes performed by the control unit 180. For example, the control unit 180 performs step S01 with the base 110 of the tool 200A placed on the holder 50. In step S01, for example, the control unit 180 controls the motor 192D so that torque is applied in a direction that loosens the second adjustment unit 74 of each of the three adjustment members 70.

[0101] Next, control unit 180 executes steps S02, S03, and S04. In step S02, for example, control unit 180 controls motor 191A so that the measurement value by measurement unit 130A becomes the set value. In step S03, for example, control unit 180 controls motor 191B so that the measurement value by measurement unit 130B becomes the set value. In step S04, for example, control unit 180 controls motor 191C so that the measurement value by measurement unit 130C becomes the set value.

[0102] Next, the control unit 180 executes steps S05 and S06. In step S05, for example, the control unit 180 sets the parameter x to 2. In step S06, for example, the control unit 180 determines whether the measured height value at the measurement position Px (the "x" in Px represents the parameter x) is within an allowable range defined by adding or subtracting a predetermined value to or from the set value.

[0103] If it is determined in step S06 that the measured height value at measurement position Px is not within the allowable range (step S06: NO), the process executed by control unit 180 proceeds to step S07. In step S07, control unit 180 controls a pair of motors, one of motors 191A, 191B, and 191C, located on either side of measurement position Px to adjust the height of cup 60 at measurement position Px. Control unit 180 controls the target motors so that the height of cup 60 at measurement positions adjacent to measurement position Px also falls within the allowable range. After executing step S07, the process executed by control unit 180 returns to step S06.

[0104] On the other hand, if it is determined in step S06 that the measured height value at measurement position Px is within the allowable range (step S06: YES), the process executed by control unit 180 proceeds to steps S08 and S09. In step S08, for example, control unit 180 executes a calculation for adding 2 to the current value of parameter x. In step S09, control unit 180 determines whether the current value of parameter x is greater than 6.

[0105] If it is determined in step S09 that the current value of parameter x is equal to or less than 6 (step S09: NO), the process executed by control unit 180 returns to step S06. If it is determined in step S09 that the current value of parameter x is greater than 6 (step S09: YES), the process executed by control unit 180 proceeds to step S10. In step S10, for example, control unit 180 controls motor 192D so that torque is applied in a direction that tightens second adjustment portions 74 of each of the three adjustment members 70. After execution of step S10, for example, the operator removes tool 200A from within cup 60, thereby completing the height adjustment of cup 60.

[0106] Various examples have been described above regarding height adjustment tools and adjustment procedures using those tools, but in one of the various examples, at least some of the matters described in the other examples may be combined.

[0107] <Summary of the present disclosure> The present disclosure includes the following configurations [1] to [8].

[0108] [1] A tool for adjusting the height of a cup (60) arranged to surround a holder (50) that holds a substrate (W) in a liquid processing apparatus (U1) that performs liquid processing on a substrate (W), the tool comprising: a base (110) formed so as to be mountable on the holder (50); three work target portions (120A, 120B, 120C) arranged around a central axis (Ax1) that intersects with the base (110) so that at least a portion of the work target portions is located above the base (110); three or more measuring portions (130) arranged around the central axis (Ax1) and for measuring the height of the cup (60); and a measuring portion (130) provided on the base (110) that can be adjusted by an operator. and a detachable attachment portion (150) to which a gripping member (140) gripped by the gripping member is detachably attached, wherein each of the three work targets (120A, 120B, 120C) is connectable to an adjustment member (70) that is provided below the holding portion (50) in the liquid processing apparatus (U1) and that adjusts the height of the cup (60), and three measurement units (130A, 130B, 130C) included in the three or more measurement units (130) are arranged to correspond to the three work targets (120A, 120B, 120C) in the circumferential direction around the central axis (Ax1). Consider a case where an operator adjusts the height of the cup (60) without using the height adjustment tool (100, 200, 200A). In this case, to raise or lower the height of the cup (60), the operator must directly touch and operate the adjustment member (70) provided below the holder (50) with his or her hand or a tool, etc. In contrast, when using the height adjustment tool (100), the provision of the work target portion (120) allows the operator to move the target portion that the operator touches and operates with his or her hand or a tool, etc., above the holder (50). Alternatively, the adjustment member (70) can be operated via the work target portion (120) by a drive unit including a motor, etc. Therefore, the height adjustment tool (100, 200, 200A) makes it possible to easily adjust the height of the cup (60) of the liquid processing device.For example, as in the above-described wafer processing system 1, if the layers 31 on which the liquid processing devices are provided are stacked one above the other, it may be difficult for the operator to visually recognize the adjustment member (70) located below the holder (50), making it difficult to adjust the height of the cup (60). On the other hand, even if the liquid processing device (U1) is located on one of the multiple layers 31 arranged one above the other, the difficulty of the adjustment work can be alleviated by using the height adjustment tool (100, 200, 200A).

[0109] [2] The height adjustment tool (100, 200, 200A) described in [1] above, wherein the bottom of the base (110) is formed so as to be able to be placed on the upper surface (50a) of the holder (50), and the bottom of the base (110) is provided with a recess (110b) that accommodates the protrusion (50b) formed on the upper surface (50a) of the holder (50). In this case, the recess (110b) forms a space that can generate negative pressure to attract the base (110) without causing the base (110) to come into contact with the protrusion (50b) that supports the substrate (W) during liquid processing. Therefore, the height of the cup (60) can be adjusted while the height adjustment tool (100, 200, 200A) is stabilized.

[0110] [3] The height adjustment tool (100, 200, 200A) described in [1] or [2] above, wherein the adjustment member (70) is rotatable around the adjustment axis (Ax2) and has a first adjustment part (72) that increases or decreases the height of the cup (60), and a second adjustment part (74) that is rotatable around the adjustment axis (Ax2) and fixes the height of the cup (60), and each of the three work target parts (120A, 120B, 120C) has a first working part (122) that is rotatable around the work axis (Ax3) and can be engaged with the first adjustment part (72), and a second working part (124) that is rotatable around the work axis (Ax3) and can be engaged with the second adjustment part (74). In the liquid treatment device (U1), the space required to provide a portion for adjusting the height of the cup (60) and a portion for fixing the position of the cup (60) after adjustment is small. With the above configuration, the height of the cup (60) can be adjusted even if the member for adjusting the height is compact.

[0111] [4] The height adjustment tool (100, 200, 200A) according to any one of [1] to [3] above, wherein the detachable attachment portion (150) has an insertion hole (152) that opens to the upper surface of the base (110) and into which the rod-shaped attachment portion (144) of the gripping member (140) can be inserted, and a storage groove (154) that is connected to the insertion hole (152) inside the base (110) and that stores the attachment portion (144), the storage groove (154) being formed to extend in a direction different from the direction in which the insertion hole (152) extends. When measuring the height of the cup (60), it is desirable that the center of gravity of the height adjustment tool (100, 200, 200A) is not offset from the viewpoint of high-precision measurement, and from the viewpoint of workability, the center of gravity tends to be offset when the gripping member (140) is attached. In the above configuration, the gripping member (140) can be attached and detached, while the accommodating groove (154) that intersects with the insertion hole (152) can more securely attach the gripping member (140) to the base (110).

[0112] [5] The height adjustment tool (200A) according to any one of [1] to [4] above further includes a drive unit (190) that applies torque to each of the three work targets (120A, 120B, 120C) to raise or lower the height of the cup (60). In this case, the operator can adjust the adjustment member (70) without touching the work targets with their hands or tools. This is therefore useful for simplifying the work of adjusting the height of the cup (60).

[0113] [6] The height adjustment tool (100, 200, 200A) according to any one of [1] to [5] above, further comprising a guide portion (164) that guides the base portion (110) so that the central axis (Ax1) approaches the center of the holding portion (50), and the guide portion (164) has an inclined surface (164a) against which the holding portion (50) can abut. In this case, even if the center of rotation (RC) and the central axis (Ax1) of the base portion (110) are misaligned when attempting to place the base portion (110) on the holding portion (50), the base portion (110) can be smoothly placed on the holding portion (50).

[0114] [7] The height adjustment tool (100) according to any one of [1] to [6] above, wherein the three or more measuring units (130) are three measuring units (130A, 130B, 130C) arranged to correspond to the three work targets (120A, 120B, 120C) in the circumferential direction around the central axis (Ax1), and each of the three measuring units (130A, 130B, 130C) is fixed to the base (110) via a bracket (138) extending outward from the base (110). In this case, the height adjustment tool (100) is provided with the same number of measuring units (130) as the number of work targets (120). This is therefore useful for simplifying the height adjustment tool (100).

[0115] [8] The three or more measuring parts (130) are six measuring parts (130A, 130B, 130C, 130D, 130E, 130F), and the six measuring parts include three measuring parts (130A, 130B, 130C) arranged to correspond to the three work target parts (120A, 120B, 120C) in the circumferential direction around the central axis (Ax1), and three other measuring parts (130D, 130E, 130F), each of which is arranged to be sandwiched between a set of measuring parts of the three measuring parts (130A, 130B, 130C), and each of the six measuring parts is fixed to the base (110) via a bracket (138) extending outward from the base (110). The height adjustment tool (200, 200A) described in any one of [1] to [6] above. In this case, when the base (110) is placed on the holder (50), the height can be measured at six points at the same time, which is useful for simplifying the work of adjusting the height of the cup (60).

[0116] W...wafer, U1...liquid processing apparatus, 50...holding portion, 50a...upper surface, 50b...convex portion, 60...cup, 70, 70A, 70B, 70C...adjusting member, 72...first adjusting portion, 74...second adjusting portion, Ax2...adjustment axis, 100, 200, 200A...tool, Ax1...central axis, 110...base portion, 110b...concave portion, 120, 120A, 120B, 120 C...work target portion, 122...first working portion, 124...second working portion, Ax3...work axis, 130, 130A, 130B, 130C, 130D, 130E, 130F...measuring portion, 138...bracket, 140...gripping member, 144...mounting portion, 150...detachable mounting portion, 152...insertion hole, 154...accommodating groove, 164...guide portion, 164a...inclined surface.

Claims

1. A tool for adjusting the height of a cup arranged to surround a holder that holds a substrate in a liquid processing apparatus that performs liquid processing on the substrate, comprising: a base formed to be able to be placed on the holder; three work targets arranged around a central axis that intersects with the base so that at least a portion of the work targets is located above the base; three or more measuring units arranged around the central axis and measuring the height of the cup; and a detachable attachment unit provided on the base to which a gripping member held by an operator is detachably attached, wherein each of the three work targets is connectable to an adjustment member provided below the holder in the liquid processing apparatus that raises and lowers the height of the cup, and three measuring units included in the three or more measuring units are arranged to correspond to the three work targets in the circumferential direction around the central axis.

2. A height adjustment tool as described in claim 1, wherein the bottom of the base is formed so that it can be placed on the upper surface of the holding part, and the bottom of the base is provided with a recess that can accommodate a protrusion formed on the upper surface of the holding part.

3. A height adjustment tool as described in claim 1, wherein the adjustment member has a first adjustment part that is rotatable around an adjustment axis and that increases or decreases the height of the cup, and a second adjustment part that is rotatable around the adjustment axis and that fixes the height of the cup, and each of the three work target parts has a first working part that is rotatable around a working axis and that can be fitted to the first adjustment part, and a second working part that is rotatable around the working axis and that can be fitted to the second adjustment part.

4. A height adjustment tool as described in claim 1, wherein the detachable attachment portion has an insertion hole that opens on the upper surface of the base and into which the rod-shaped attachment portion of the gripping member can be inserted, and an accommodation groove that is connected to the insertion hole inside the base and accommodates the attachment portion, and the accommodation groove is formed to extend in a direction different from the direction in which the insertion hole extends.

5. A height adjustment tool according to any one of claims 1 to 4, further comprising a drive unit that applies torque to each of the three work targets to raise or lower the height of the cup.

6. A height adjustment tool according to any one of claims 1 to 4, further comprising a guide part that guides the base part so that the central axis approaches the center of the holding part, the guide part having an inclined surface against which the holding part can abut.

7. A height adjustment tool as claimed in any one of claims 1 to 4, wherein the three or more measuring parts are arranged to correspond to the three work target parts in the circumferential direction around the central axis, and each of the three measuring parts is fixed to the base via a bracket extending outward from the base.

8. A height adjustment tool as claimed in any one of claims 1 to 4, wherein the three or more measuring parts are six measuring parts, the six measuring parts having three measuring parts arranged to correspond to the three work target parts in the circumferential direction around the central axis, and three other measuring parts each arranged to be sandwiched between a set of measuring parts of the three measuring parts, and each of the six measuring parts is fixed to the base via a bracket extending outward from the base.

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