Granularity detection method and apparatus

Abstract

The present application relates to the technical field of defect detection. Provided are a granularity detection method and apparatus. In the granularity detection method, the same rotatable reflecting mirror is used to simultaneously participate in the detection of a first surface and a second surface of a member to be subjected to detection, and by means of switching the operating angle of the rotatable reflecting mirror, only one camera is required to complete the work of photographing the first surface and second surface of said member, thereby effectively simplifying a detection optical path and reducing the costs. Moreover, since said member has deceleration, stop and acceleration processes during loading and unloading, as long as the rotation timing of the rotatable reflecting mirror is set to be a time at which said member stops, the rotation of the rotatable reflecting mirror can be cleverly integrated into the motion process of said member, and thus the overall time of the detection process is not increased.

Description

Particle size detection method and device

[0001] Cross-reference to related applications

[0002] The present disclosure claims priority to the Chinese patent application No. 2024110337392, filed on July 30, 2024, and entitled "A particle size detection method", the entire content of which is incorporated herein by reference. TECHNICAL FIELD

[0003] The present application relates to the technical field of defect detection, in particular to a particle size detection method and device. BACKGROUND

[0004] With the development of integrated circuit technology, photolithography process, as a core and key process of integrated circuits, is one of the most advanced technologies in the semiconductor industry. As an indispensable important carrier in photolithography process, the mask plate carries the chip design circuit pattern on its surface, which is transferred to the silicon wafer through photolithography / etching process. Therefore, the surface quality of the mask plate will directly affect the quality of the pattern on the silicon wafer, and further affect the final chip function and performance, as well as the semiconductor production yield.

[0005] After being used for many times, the mask plate may be contaminated with particles or scratched due to design irregularities, non-compliance of personnel operation, etc. Therefore, it is particularly important to detect the particle size of the mask plate before the photolithography process. This detection can not only find the particles or scratches on the surface of the mask plate in time, but also effectively prevent the impact of these problems on the subsequent process. However, the existing particle size detection method needs to use two cameras to shoot the upper and lower surfaces of the mask plate respectively, and the detection light path is relatively complex and the cost is high. SUMMARY

[0006] The present application aims to solve the above problems in the prior art, and provides a particle size detection method and device which can simplify the detection light path, reduce the cost, and also will not increase the overall time consumption of the detection process.

[0007] To achieve the above-mentioned purpose, the technical solutions adopted by the embodiments of the present application are as follows:

[0008] The embodiments of the present application provide a particle size detection method, comprising:

[0009] Placing the to-be-detected piece on the stage, turning on the first light source and the camera, and adjusting the reflecting mirror to the first working angle;

[0010] Driving the stage to move from the initial position to the stop position, the first light source emits the first light beam to the first surface of the to-be-detected piece, and as the to-be-detected piece moves, the first light beam successively irradiates different regions on the first surface;

[0011] The first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror;

[0012] The camera is controlled to shoot the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position;

[0013] The reflecting mirror is adjusted to a second working angle, and the second light source is turned on;

[0014] The carrier is driven to move from the stop position to the initial position, the second light source emits a second light beam to the second surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the second light beam is sequentially irradiated on different regions of the second surface;

[0015] The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror;

[0016] The camera is controlled to shoot the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position;

[0017] The particle images on the first sub-images and the second sub-images are obtained, and algorithm analysis is performed on the particle images to determine whether the particles corresponding to the particle images are defects.

[0018] Optionally, driving the carrier to move from the initial position to the stop position comprises:

[0019] The carrier motor is controlled to act to drive the carrier connected with the carrier motor to move in a direction parallel to the first surface of the to-be-detected piece, so that the to-be-detected piece moves from the initial position to the stop position;

[0020] Adjusting the reflecting mirror to the second working angle comprises:

[0021] The reflecting mirror motor is controlled to act to drive the reflecting mirror connected with the reflecting mirror motor to be adjusted to the second working angle;

[0022] Driving the carrier to move from the stop position to the initial position comprises:

[0023] The carrier motor is controlled to act to drive the carrier to move in a direction parallel to the first surface of the to-be-detected piece, so that the to-be-detected piece moves from the stop position to the initial position.

[0024] Optionally, the to-be-detected piece is placed on the carrier, the first light source and the camera are turned on, and adjusting the reflecting mirror to the first working angle comprises:

[0025] The to-be-detected piece is placed on the carrier, the first light source and the camera are turned on, and the camera is electrically connected with the encoder of the carrier motor, so that the camera can obtain the encoder signal emitted by the encoder, and the reflecting mirror is adjusted to the first working angle;

[0026] controlling the camera to capture the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position, comprising:

[0027] controlling the camera to capture the first surface once when a first preset number of encoder signals are received, and repeating the above capturing process until the carrier reaches the stop position to obtain a plurality of first sub-images of the first surface.

[0028] controlling the camera to capture the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position, comprising:

[0029] controlling the camera to capture the second surface once when a second preset number of encoder signals are received, and repeating the above capturing process until the carrier reaches the initial position to obtain a plurality of second sub-images of the second surface.

[0030] Optionally, the granularity detection method comprises:

[0031] placing the to-be-detected piece on the carrier, turning on the first light source, the inboard sensor and the camera, and adjusting the reflecting moving mirror to a first working angle, wherein the inboard sensor is electrically connected to the camera, and the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position;

[0032] driving the carrier to move from the initial position to the stop position, controlling the inboard sensor to send a first inboard position signal to the camera, and controlling the first light source to emit a first light beam to the first surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the first light beam is sequentially irradiated in different regions of the first surface;

[0033] reflecting the first light beam reflected by the first surface to the reflecting moving mirror, and then reflecting the first light beam to the camera through the reflecting moving mirror;

[0034] controlling the camera to capture the first surface at a first preset frequency after receiving the first inboard position signal to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position;

[0035] after the carrier moves to the stop position, controlling the inboard sensor to send a second inboard position signal to the camera;

[0036] controlling the camera to stop capturing the first surface of the to-be-detected piece after receiving the second inboard position signal;

[0037] adjusting the reflecting moving mirror to a second working angle, and turning on the second light source and the outboard sensor, wherein the outboard sensor is electrically connected to the camera, and the outboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the stop position to the initial position;

[0038] The driving platform moves from the stop position to the initial position, the outboard sensor sends a first outboard position signal to the camera, the second light source emits a second light beam to the second surface of the to-be-detected piece, and the second light beam irradiates different regions of the second surface in sequence as the to-be-detected piece moves;

[0039] The second light beam reflected by the second surface is emitted to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror;

[0040] The camera photographs the second surface at a second preset frequency after receiving the first outboard position signal to obtain a plurality of second sub-images of the second surface until the platform reaches the initial position;

[0041] After the platform moves to the initial position, the outboard sensor sends a second outboard position signal to the camera;

[0042] The camera stops photographing the second surface of the to-be-detected piece after receiving the second outboard position signal;

[0043] The particle images on the first sub-image and the second sub-image are obtained, and algorithm analysis is performed on the particle images to determine whether the particles corresponding to the particle images are defects.

[0044] Optionally, the to-be-detected piece is placed on the platform, the first light source, the inboard sensor, and the camera are turned on, and the reflecting mirror is adjusted to a first working angle, wherein the inboard sensor is electrically connected with the camera, and the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, including:

[0045] The to-be-detected piece is placed on the platform, the first light source, the inboard sensor, the camera, and the control component are turned on, and the reflecting mirror is adjusted to a first working angle, wherein the inboard sensor is electrically connected with the camera through the control component, and the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, and the control component is also electrically connected with the reflecting mirror motor;

[0046] Adjusting the reflecting mirror to a second working angle includes:

[0047] After the control component receives the second inboard position signal, the reflecting mirror motor is controlled to act to drive the reflecting mirror to switch from the first working angle to the second working angle.

[0048] Optionally, the particle size detection method further includes:

[0049] The membrane detection sensor is turned on, wherein the membrane detection sensor is electrically connected with the platform motor, the membrane detection sensor is used to detect whether the second surface of the to-be-detected piece is covered with a dustproof film, and the platform motor is used to drive the platform to move in a direction perpendicular to the first surface;

[0050] Before the driving platform moves from the stop position to the initial position, the particle size detection method further comprises:

[0051] The film body detection sensor detects the second surface, and if the film body detection sensor detects that the second surface is covered by the dustproof film, the film body detection sensor sends a film body existing signal to the platform motor;

[0052] The platform motor drives the platform to move a preset distance in the direction of the first surface after receiving the film body existing signal.

[0053] Optionally, the particle size detection method further comprises:

[0054] The limit position detection sensor is turned on, wherein the limit position detection sensor is electrically connected with the platform motor, and the limit position detection sensor is used to detect the position of the to-be-detected piece;

[0055] The platform motor drives the platform to move a preset distance in the direction of the first surface after receiving the film body existing signal, and the method further comprises:

[0056] The platform motor drives the platform to move a preset distance in the direction of the first surface after receiving the film body existing signal, and during the movement, if the limit position detection sensor detects that the to-be-detected piece has reached the limit position, a stop signal is sent to the platform motor;

[0057] The platform motor stops driving the platform to continue moving after receiving the stop signal.

[0058] Optionally, the first light source emits the first light beam to the first surface of the to-be-detected piece, and the method further comprises:

[0059] The first light source emits the first light beam to the first surface of the to-be-detected piece, and the first light beam is reflected on the first surface of the to-be-detected piece after passing through the first half-transmission half-reflection mirror;

[0060] The first light beam reflected by the first surface is shot to the reflecting moving mirror, and the method further comprises:

[0061] The first light beam is reflected on the first surface, the first half-transmission half-reflection mirror and the first reflecting mirror in sequence, and then is shot to the reflecting moving mirror;

[0062] The second light source emits the second light beam to the second surface of the to-be-detected piece, and the method further comprises:

[0063] The second light source emits the second light beam to the second surface of the to-be-detected piece, and the second light beam is reflected on the second surface of the to-be-detected piece after passing through the second half-transmission half-reflection mirror;

[0064] The second light beam reflected by the second surface is shot to the reflecting moving mirror, and the method further comprises:

[0065] The second light beam is reflected on the second surface, the second half-transmission half-reflection mirror and the second reflecting mirror in sequence, and then is shot to the reflecting moving mirror.

[0066] Optionally, the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror again, comprising:

[0067] The first light beam reflected by the first surface is shot to the reflecting mirror, and then shot to the focusing lens group after being reflected by the reflecting mirror again, and enters the camera after being focused by the focusing lens group.

[0068] Optionally, the second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror again, comprising:

[0069] The second light beam reflected by the second surface is shot to the reflecting mirror, and then shot to the focusing lens group after being reflected by the reflecting mirror again, and enters the camera after being focused by the focusing lens group.

[0070] Optionally, the control assembly is turned on, wherein the entry plate sensor is electrically connected to the camera through the control assembly, and the control assembly is further electrically connected to the reflecting mirror motor.

[0071] The upper computer and the lower computer are turned on, wherein the upper computer is electrically connected to the lower computer, the entry plate sensor is electrically connected to the camera through the lower computer, and the lower computer is further electrically connected to the reflecting mirror motor.

[0072] Adjusting the reflecting mirror to the second working angle comprises:

[0073] After the lower computer receives the second entry plate position signal, the lower computer sends the second entry plate position signal to the upper computer, and the upper computer sends a rotating control instruction to the lower computer after receiving the second entry plate position signal.

[0074] After the lower computer receives the rotating control instruction, the lower computer controls the reflecting mirror motor to act, so as to drive the reflecting mirror to switch from the first working angle to the second working angle.

[0075] The application also provides a particle size detection device, comprising:

[0076] The adjusting module is configured to place the to-be-detected piece on the loading platform, turn on the first light source and the camera, and adjust the reflecting mirror to the first working angle.

[0077] The driving module is configured to drive the loading platform to move from the initial position to the stop position, and the first light source emits a first light beam to the first surface of the to-be-detected piece, and the first light beam irradiates different regions of the first surface in sequence with the movement of the to-be-detected piece; the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror again.

[0078] The shooting module is configured to control the camera to shoot the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the loading platform reaches the stop position.

[0079] The adjusting module is further configured to adjust the reflecting mirror to a second working angle and turn on a second light source;

[0080] The driving module is further configured to drive the carrier to move from the stop position to the initial position, drive the second light source to emit a second light beam toward a second surface of the object to be detected, and as the object to be detected moves, the second light beam sequentially irradiates different regions of the second surface; and direct the second light beam reflected by the second surface to the reflecting mirror and then to the camera after being reflected by the reflecting mirror.

[0081] The shooting module is further configured to control the camera to shoot the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position.

[0082] The obtaining module is configured to obtain a particle image on the first sub-image and the second sub-image, and perform algorithm analysis on the particle image to determine whether the particle corresponding to the particle image is a defect.

[0083] Optionally, the driving module is specifically configured to:

[0084] Control the carrier motor to act so as to drive the carrier connected with the carrier motor to move in a direction parallel to the first surface of the object to be detected, so that the object to be detected moves from the initial position to the stop position.

[0085] The adjusting the reflecting mirror to the second working angle comprises:

[0086] Control the reflecting mirror motor to act so as to drive the reflecting mirror connected with the reflecting mirror motor to adjust to the second working angle.

[0087] The driving the carrier to move from the stop position to the initial position comprises:

[0088] Control the carrier motor to act so as to drive the carrier to move in a direction parallel to the first surface of the object to be detected, so that the object to be detected moves from the stop position to the initial position.

[0089] Optionally, the adjusting module is specifically configured to:

[0090] Place the object to be detected on the carrier, turn on the first light source and the camera, and electrically connect the camera with an encoder of the carrier motor, so that the camera can obtain an encoder signal emitted by the encoder, and adjust the reflecting mirror to a first working angle.

[0091] The shooting module is specifically configured to:

[0092] control the camera to take a picture of the first surface when a first preset number of the encoder signals are received, and repeat the above picture-taking process until the carrier reaches the stop position, to obtain a plurality of first sub-images of the first surface;

[0093] control the camera to take a picture of the second surface when a second preset number of the encoder signals are received, and repeat the above picture-taking process until the carrier reaches the initial position, to obtain a plurality of second sub-images of the second surface.

[0094] Optionally, the control module is further configured to:

[0095] placing the to-be-detected piece on the carrier, turning on the first light source, the inboard sensor and the camera, and adjusting the reflecting mirror to a first working angle, wherein the inboard sensor is electrically connected to the camera, and the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position;

[0096] driving the carrier to move from the initial position to the stop position, controlling the inboard sensor to send a first inboard position signal to the camera, and controlling the first light source to emit a first light beam to the first surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the first light beam is sequentially irradiated on different regions of the first surface;

[0097] reflecting the first light beam reflected by the first surface to the reflecting mirror, and then reflecting the first light beam to the camera through the reflecting mirror;

[0098] controlling the camera to take a picture of the first surface at a first preset frequency after receiving the first inboard position signal, to obtain a plurality of first sub-images of the first surface, until the carrier reaches the stop position;

[0099] after the carrier moves to the stop position, controlling the inboard sensor to send a second inboard position signal to the camera;

[0100] controlling the camera to stop taking pictures of the first surface of the to-be-detected piece after receiving the second inboard position signal;

[0101] adjusting the reflecting mirror to a second working angle, and turning on the second light source and the outboard sensor, wherein the outboard sensor is electrically connected to the camera, and the outboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the stop position to the initial position;

[0102] The driving of the carrier from the stop position to the initial position drives the out-plate sensor to send a first out-plate position signal to the camera, and the second light source emits a second light beam to the second surface of the to-be-detected piece. With the movement of the to-be-detected piece, the second light beam is sequentially irradiated on different regions of the second surface;

[0103] The second light beam reflected by the second surface is irradiated to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror;

[0104] The camera is controlled to capture the second surface at a second preset frequency after receiving the first out-plate position signal, so as to obtain a plurality of second sub-images of the second surface, until the carrier reaches the initial position;

[0105] After the carrier moves to the initial position, the out-plate sensor is controlled to send a second out-plate position signal to the camera;

[0106] The camera is controlled to stop capturing the second surface of the to-be-detected piece after receiving the second out-plate position signal;

[0107] The particle images on the first sub-image and the second sub-image are obtained, and algorithm analysis is performed on the particle images to determine whether the particles corresponding to the particle images are defects.

[0108] Optionally, the control module is specifically configured to:

[0109] The to-be-detected piece is placed on the carrier, the first light source, the in-plate sensor, the camera and the control component are turned on, and the reflecting mirror is adjusted to a first working angle, wherein the in-plate sensor is electrically connected to the camera through the control component, the in-plate sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, and the control component is also electrically connected to the reflecting mirror motor;

[0110] The adjusting of the reflecting mirror to a second working angle comprises:

[0111] After the control component receives the second in-plate position signal, the reflecting mirror motor is controlled to act, so as to drive the reflecting mirror to switch from the first working angle to the second working angle.

[0112] The beneficial effects of the present application include:

[0113] The application provides a particle size detection method and device, which comprises the following steps: placing a to-be-detected piece on a loading platform, turning on a first light source and a camera, and adjusting a reflecting mirror to a first working angle; driving the loading platform to move from an initial position to a stop position, and the first light source emits a first light beam to a first surface of the to-be-detected piece; with the movement of the to-be-detected piece, the first light beam is sequentially irradiated on different regions of the first surface; the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; the camera is controlled to shoot the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the loading platform reaches the stop position; the reflecting mirror is adjusted to a second working angle, and a second light source is turned on; the loading platform is driven to move from the stop position to the initial position, and the second light source emits a second light beam to a second surface of the to-be-detected piece; with the movement of the to-be-detected piece, the second light beam is sequentially irradiated on different regions of the second surface; the second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; the camera is controlled to shoot the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the loading platform reaches the initial position; particle images on the first sub-images and the second sub-images are obtained, and algorithm analysis is performed on the particle images to determine whether the particles corresponding to the particle images are defects. The particle size detection method uses the same reflecting mirror to participate in the detection of the first surface and the second surface of the to-be-detected piece, and through the switching of the working angle of the reflecting mirror, only one camera can complete the shooting of the first surface and the second surface of the to-be-detected piece, which effectively simplifies the detection light path and reduces the cost. Moreover, the to-be-detected piece will have a deceleration, stop and acceleration process when entering and leaving the plate, as long as the rotating time of the reflecting mirror is set when the to-be-detected piece stops, the rotation of the reflecting mirror can be ingeniously integrated into the movement process of the to-be-detected piece, so that the overall time consumption of the detection process is not increased. BRIEF DESCRIPTION OF DRAWINGS

[0114] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0115] Fig. 1 is a flowchart of the particle size detection method provided by the embodiments of the application;

[0116] Fig. 2 is a structural schematic diagram of the particle size detection system used in the particle size detection method provided by the embodiments of the application;

[0117] Fig. 3 is a structural schematic diagram of the particle size detection system used in the particle size detection method provided by the embodiments of the application;

[0118] Figure 4 is a control logic diagram of the particle size detection method according to an embodiment of the present application;

[0119] Figure 5 is a flowchart of the particle size detection method according to an embodiment of the present application;

[0120] Figure 6 is a flowchart of the particle size detection method according to an embodiment of the present application;

[0121] Figure 7 is a comparison diagram of images taken by the camera in the particle size detection method according to an embodiment of the present application with and without the stage motor encoder signal;

[0122] Figure 8a and Figure 8b are flowcharts of the particle size detection method according to an embodiment of the present application;

[0123] Figure 9a and Figure 9b are flowcharts of the particle size detection method according to an embodiment of the present application;

[0124] Figure 10a and Figure 10b are flowcharts of the particle size detection method according to an embodiment of the present application;

[0125] Figure 11 is a flowchart of the particle size detection method according to an embodiment of the present application;

[0126] Figure 12a and Figure 12b are flowcharts of the particle size detection method according to an embodiment of the present application;

[0127] Figure 13 is a flowchart of the particle size detection method according to an embodiment of the present application;

[0128] Figure 14 is a schematic diagram of detecting the first surface of the object to be detected in the particle size detection method according to an embodiment of the present application;

[0129] Figure 15 is a schematic diagram of detecting the second surface of the object to be detected in the particle size detection method according to an embodiment of the present application;

[0130] Figure 16 is a flowchart of the particle size detection method according to an embodiment of the present application;

[0131] Figure 17 is a structural block diagram of the particle size detection device according to an embodiment of the present application.

[0132] Icon: 12-Stage; 13-First light source; 131-First light beam; 141-First half-transmission half-reflection mirror; 142-First reflection mirror; 15-Reflection mirror; 151-First working angle; 152-Second working angle; 16-Second light source; 161-Second light beam; 171-Second half-transmission half-reflection mirror; 172-Second reflection mirror; 18-Camera; 19-Reflection mirror motor; 20-Plate in sensor; 21-Plate out sensor; 22-Film body detection sensor; 23-Limit position detection sensor; 24-Focusing lens group; 100-Piece to be detected; V1-Plate in; V2-Plate out, 111-Adjustment module, 112-Drive module, 113-Shooting module, 114-Obtaining module. DETAILED DESCRIPTION

[0133] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0134] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the present application. It should be noted that the various features in the embodiments of the present application can be combined with each other without conflict, and the combined embodiments are still within the protection scope of the present application.

[0135] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0136] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0137] In the description of the present application, it also needs to be explained that, unless explicitly defined and limited, the terms "set", "install", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0138] Please refer to FIG. 1 to FIG. 3, the present application provides a kind of granularity detection method, comprising:

[0139] S100: the piece to be detected is placed on the stage, the first light source and the camera are opened, and the reflecting mirror is adjusted to the first working angle.

[0140] The piece to be detected 100 is placed on the stage 12, and the stage 12 can drive the piece to be detected 100 to move along a preset path. Preferably, the piece to be detected 100 is fixed on the stage 12. The piece to be detected 100 can be a mask, a silicon wafer, a substrate or the like. The piece to be detected 100 has opposite first and second surfaces. Generally, one of the first and second surfaces is the upper surface, and the other is the lower surface. After the piece to be detected 100 is fixed on the stage 12, the stage 12 should be able to expose the first and second surfaces of the piece to be detected 100.

[0141] The first light source 13 is used to emit a first light beam 131 to the first surface of the piece to be detected 100, and the camera 18 is used to capture the image formed by the first light beam 131 reflected by the first surface and the reflecting mirror 15.

[0142] The reflecting mirror 15 has a first working angle 151 and a second working angle 152. When the first surface of the piece to be detected 100 is photographed, the reflecting mirror 15 is adjusted to the first working angle 151. When the second surface of the piece to be detected 100 is photographed, the reflecting mirror 15 needs to be adjusted to the second working angle 152.

[0143] For example, the included angle between the first working angle 151 and the second working angle 152 is 90°. When the reflecting mirror 15 is at the first working angle 151, the reflecting surface of the reflecting mirror 15 is inclined upward by 45°. When the reflecting mirror 15 is at the second working angle 152, the reflecting surface of the reflecting mirror 15 is inclined downward by 45°.

[0144] The camera 18 can be a time delay integration camera (TDI camera). The time delay integration camera is a new type of line scan camera, which has a plurality of photosensitive units arranged in parallel on the image sensor and perpendicular to the direction of target movement. During image acquisition, the image sensor reads and integrates image data from each photosensitive unit, which enhances the effective information. Therefore, even if the light intensity is small, it can be enhanced in each integration process. Moreover, the time delay integration camera is suitable for imaging of high-speed moving objects and can reduce the time consumption of the particle size detection system. Compared with ordinary cameras, the time delay integration camera has the advantages of high sensitivity and wide dynamic range, and can output signals with high signal-to-noise ratio in low light intensity environment.

[0145] S110: The driving platform moves from the initial position to the stop position, and the first light source emits a first light beam to the first surface of the to-be-detected piece. With the movement of the to-be-detected piece, the first light beam is sequentially irradiated on different regions of the first surface.

[0146] During the movement of the to-be-detected piece 100 from the initial position to the stop position (plate feeding V1), the light beam emitted by the first light source 13 can irradiate on the first surface of the to-be-detected piece 100. The first surface can be divided into a plurality of first regions connected in sequence in the direction opposite to the moving direction of the to-be-detected piece 100. Since the illumination range of the first light source 13 is limited, the first light source 13 can only illuminate part of the first regions. However, with the continuous movement of the to-be-detected piece 100, the first light source 13 can sequentially illuminate all the first regions.

[0147] S120: The first light beam reflected by the first surface is shot to the reflecting dynamic mirror, and then enters the camera after being reflected by the reflecting dynamic mirror.

[0148] S130: The camera is controlled to shoot the first surface according to a first preset frequency to obtain a plurality of first sub-images of the first surface until the driving platform reaches the stop position.

[0149] The first light beam 131 is imaged in front of the lens of the camera 18, and the camera 18 shoots the image formed by the first light beam 131 reflected by the first surface according to the first preset frequency. During the movement of the to-be-detected piece 100 from the initial position to the stop position, the camera 18 continuously scans and shoots the image formed by the first light beam 131. Each shooting obtains a first sub-image of the first surface, and the camera 18 stops shooting after the driving platform 12 reaches the stop position.

[0150] S140: Adjust the reflecting dynamic mirror to a second working angle, and turn on the second light source.

[0151] When the to-be-detected piece 100 is static at the stop position, the reflecting mirror 15 is adjusted to the second working angle 152, and the detection of the second surface of the to-be-detected piece 100 is prepared to start. The second light source 16 is turned on, and at this time, the first light source 13 can be turned off. The second light source 16 is used to emit the second light beam 161 to the second surface of the to-be-detected piece 100, and the camera 18 is used to capture the image formed by the second light beam 161 reflected by the second surface and the reflecting mirror 15.

[0152] S150: The driving platform is driven to move from the stop position to the initial position, and the second light source emits the second light beam to the second surface of the to-be-detected piece. With the movement of the to-be-detected piece, the second light beam sequentially irradiates different regions of the second surface.

[0153] During the movement of the to-be-detected piece 100 from the stop position to the initial position (out of the plate V2), the light beam emitted by the second light source 16 can irradiate the second surface of the to-be-detected piece 100. The second surface can be divided into a plurality of second regions connected in sequence in the direction opposite to the moving direction of the to-be-detected piece 100. Since the illumination range of the second light source 16 is limited, the second light source 16 can only illuminate part of the second regions. However, with the continuous movement of the to-be-detected piece 100, the second light source 16 can sequentially illuminate all the second regions.

[0154] S160: The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

[0155] S170: The camera is controlled to capture the second surface according to the second preset frequency to obtain a plurality of second sub-images of the second surface, until the driving platform reaches the initial position.

[0156] The second light beam 161 is imaged in front of the lens of the camera 18, and the camera 18 captures the image formed by the second light beam 161 reflected by the second surface according to the second preset frequency. During the movement of the to-be-detected piece 100 from the initial position to the stop position, the camera 18 continuously scans and captures the image formed by the second light beam 161. Each capture obtains two second sub-images of the second surface, and the camera 18 stops capturing when the driving platform 12 reaches the stop position.

[0157] S180: The particle image on the first sub-image and the second sub-image is obtained, and the particle image is analyzed by algorithm to determine whether the particle image is a defect.

[0158] The first sub-image and the second sub-image contain information of the particle image. By algorithmically analyzing the position, shape, size and other parameters of the particle image, it is determined whether the particle corresponding to the particle image is a defect.

[0159] For example, after the algorithm analysis of the particles, the size of the particle image is obtained, and according to the size of the particle image, it is determined whether the particle corresponding to the particle image is a defect. For example, a critical size is set in advance, and the particle corresponding to the particle image with a size less than or equal to the critical size is not determined as a defect, and the particle corresponding to the particle image with a size greater than the critical size is determined as a defect. At this point, the particle detection of the first surface and the second surface of the detection piece 100 can be realized.

[0160] It should be noted that after obtaining the plurality of first sub-images and the plurality of second sub-images, the particle images can be directly obtained from the first sub-images and the second sub-images for algorithm analysis. Alternatively, the plurality of first sub-images can be spliced to obtain a first surface image, and the plurality of second sub-images can be spliced to obtain a second surface image, and then the particle images can be obtained from the first surface image and the second surface image for algorithm analysis.

[0161] The particle detection method described above uses the same reflecting mirror 15 to participate in the detection of the first surface and the second surface of the detection piece 100, and through the switching of the working angle of the reflecting mirror 15, only one camera 18 is needed to complete the shooting of the first surface and the second surface of the detection piece 100, which effectively simplifies the detection light path and reduces the cost. Moreover, the detection piece 100 has a deceleration, stop and acceleration process when it enters the plate V1 and exits the plate V2. As long as the rotation time of the reflecting mirror 15 is set when the detection piece 100 stops, the rotation of the reflecting mirror 15 can be cleverly integrated into the movement process of the detection piece 100, thereby not increasing the overall time consumption of the detection process.

[0162] For example, referring to FIG. 4, the host computer and the slave computer are also turned on before detection, and the image acquisition card signal of the slave computer is set high. The slave computer is electrically connected to the host computer, and the image acquisition card of the slave computer is electrically connected to the camera 18.

[0163] When the carrier 12 moves from the initial position to the stop position, the inboard sensor 20 sends a first movement signal to the image acquisition card, and the image acquisition card adjusts the frame trigger signal to high after receiving the first movement signal. The camera 18 starts shooting the upper surface. After the carrier 12 moves to the stop position, the inboard sensor 20 sends a first stop signal to the image acquisition card, and the image acquisition card adjusts the frame trigger signal to low after receiving the first stop signal. The camera 18 stops shooting the upper surface.

[0164] Similarly, when the carrier 12 moves from the initial position to the stop position, the outboard sensor 21 sends a second movement signal to the image acquisition card, and the image acquisition card adjusts the frame trigger signal to high level after receiving the second movement signal, and the camera 18 starts to shoot the lower surface. After the carrier 12 moves to the initial position, the outboard sensor 21 sends a second stop signal to the image acquisition card, and the image acquisition card adjusts the frame trigger signal to low level after receiving the second stop signal, and the camera 18 stops shooting the lower surface.

[0165] Optionally, referring to FIGS. 2, 3 and 5, the driving of the carrier to move from the initial position to the stop position comprises:

[0166] S111: controlling the carrier motor to act to drive the carrier connected with the carrier motor to move in a direction parallel to the first surface of the piece to be detected, so that the piece to be detected moves from the initial position to the stop position.

[0167] The adjusting of the reflecting mirror to the second working angle comprises:

[0168] S141: controlling the reflecting mirror motor to act to drive the reflecting mirror connected with the reflecting mirror motor to adjust to the second working angle;

[0169] The driving of the carrier to move from the stop position to the initial position comprises:

[0170] S151: controlling the carrier motor to act to drive the carrier to move in a direction parallel to the first surface of the piece to be detected, so that the piece to be detected moves from the stop position to the initial position.

[0171] The carrier 12 is connected with the carrier motor, and the reflecting mirror 15 is connected with the reflecting mirror motor 19. Controlling the carrier motor to act can drive the carrier 12 to move. Controlling the reflecting mirror motor 19 to act can drive the reflecting mirror 15 to adjust the working angle.

[0172] For example, the carrier motor and the reflecting mirror motor 19 are also electrically connected with the lower computer. The upper computer issues an instruction to the lower computer, and the lower computer controls the carrier motor and the reflecting mirror motor 19 to act according to the instruction issued by the upper computer.

[0173] Optionally, referring to FIGS. 2, 3 and 6, the placing of the piece to be detected on the carrier, the turning on of the first light source and the camera, and the adjusting of the reflecting mirror to the first working angle comprise:

[0174] S101: placing the piece to be detected on the carrier, turning on the first light source and the camera, and electrically connecting the camera with the encoder of the carrier motor, so that the camera can acquire the encoder signal emitted by the encoder, and adjusting the reflecting mirror to the first working angle.

[0175] The controlling of the camera to shoot the first surface at a first preset frequency to acquire a plurality of first sub-images of the first surface until the carrier reaches the stop position comprises:

[0176] S131: control the camera to take a picture of the first surface once upon receiving a first preset number of encoder signals, repeat the above photographing process until the carrier reaches the stop position, to obtain a plurality of first sub-images of the first surface.

[0177] controlling the camera to take pictures of the second surface at a second preset frequency until the carrier reaches the initial position, comprising:

[0178] S171: control the camera to take a picture of the second surface once upon receiving a second preset number of encoder signals, repeat the above photographing process until the carrier reaches the initial position, to obtain a plurality of second sub-images of the second surface.

[0179] The encoder signal of the carrier motor is introduced into the camera 18, so that the camera 18 can obtain the encoder signal and then take pictures at a preset frequency, ensuring that the camera 18 can take pictures at each stage of acceleration, constant speed and deceleration of the carrier 12, and automatically adjusting the shooting frequency according to the motion state of the carrier 12. Even if there is slight jitter or speed instability when the carrier 12 is moving, the images taken will not have the phenomenon of stretching or shrinking. As shown in FIG. 7, the left side of FIG. 7 shows a picture taken by the camera 18 without synchronizing the carrier motor encoder, and the right side of FIG. 7 shows a picture taken by the camera 18 in the embodiment. As shown in FIG. 7, introducing the encoder signal of the carrier motor into the camera 18 enables the camera 18 to take pictures at a preset frequency according to the encoder signal, and can obtain uniform and high-quality images. At the same time, if a time delay integration camera (which is suitable for high-speed moving objects) is used, the motion speed of the carrier 12 can be greatly increased, thereby reducing the time consumption of shooting.

[0180] For example, the camera 18 takes a picture every 8 encoder signals. When configuring the parameters of the camera 18, the "encoder signal 8:1 ratio" and the "external trigger signal" are selected to ensure the synchronization of the camera 18 shooting and the motion speed of the carrier 12, i.e. the camera 18 takes a picture once for every eight pulses generated by the encoder of the carrier motor. In other embodiments, according to different encoders or different cameras 18, other numbers of pulse signals can be set to set the acquisition frequency of the camera 18.

[0181] Optionally, referring to FIGS. 2, 3, 8a and 8b, the particle size detection method comprises:

[0182] S102: Place the to-be-detected piece on the stage, turn on the first light source, the plate-in sensor and the camera, and adjust the reflecting mirror to the first working angle, wherein the plate-in sensor is electrically connected with the camera, and the plate-in sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position.

[0183] S112: Drive the stage to move from the initial position to the stop position, control the plate-in sensor to send a first plate-in position signal to the camera, the first light source emits a first light beam to the first surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the first light beam is sequentially irradiated in different regions of the first surface.

[0184] S120: The first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

[0185] S132: Control the camera to shoot the first surface at a first preset frequency after receiving the first plate-in position signal, so as to obtain a plurality of first sub-images of the first surface, until the stage reaches the stop position.

[0186] S133: After the stage moves to the stop position, control the plate-in sensor to send a second plate-in position signal to the camera.

[0187] S134: Control the camera to stop shooting the first surface of the to-be-detected piece after receiving the second plate-in position signal.

[0188] S142: Adjust the reflecting mirror to the second working angle, and turn on the second light source and the plate-out sensor, wherein the plate-out sensor is electrically connected with the camera, and the plate-out sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the stop position to the initial position.

[0189] S152: Drive the stage to move from the stop position to the initial position, control the plate-out sensor to send a first plate-out position signal to the camera, the second light source emits a second light beam to the second surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the second light beam is sequentially irradiated in different regions of the second surface.

[0190] S160: The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

[0191] S172: Control the camera to shoot the second surface at a second preset frequency after receiving the first plate-out position signal, so as to obtain a plurality of second sub-images of the second surface, until the stage reaches the initial position.

[0192] S173: After the stage moves to the initial position, control the plate-out sensor to send a second plate-out position signal to the camera.

[0193] S174: controlling the camera to stop photographing the second surface of the piece to be detected after receiving the second ejection position signal.

[0194] S180: acquiring a particle image on the first sub-image and the second sub-image, and performing algorithm analysis on the particle image to determine whether the particle corresponding to the particle image is a defect.

[0195] The inboard sensor 20 is used when detecting the first surface of the piece to be detected 100, and the outboard sensor 21 is used when detecting the second surface. At the stop position, the control system (such as a positioner) needs to switch the on-off input of the inboard sensor 20 and the outboard sensor 21 to avoid triggering both sensors at the same time. That is to say, only the signal of the inboard sensor 20 is effective when the inboard is in, and after reaching the stop position, the signal of the inboard sensor 20 is stopped reading, and the signal of the outboard sensor 21 is started reading, that is, only the signal of the outboard sensor 21 is effective when the outboard is in.

[0196] When the carrier 12 carries the piece to be detected 100 from the outside to the initial position, the inboard sensor 20 detects the inboard V1 and sends a signal to the camera 18 to start photographing the first surface (i.e. the first inboard position signal). Thereafter, when the carrier 12 carries the piece to be detected 100 from the initial position to the stop position, the inboard sensor 20 can always detect the piece to be detected 100, and continuously sends a signal to the camera 18 to photograph the first surface (i.e. the first inboard position signal). When the carrier 12 carries the piece to be detected 100 to the stop position, the inboard sensor 20 can no longer detect the piece to be detected 100, and sends a signal to the camera 18 to stop photographing the first surface (i.e. the second inboard position signal). For example, the first inboard position signal is a high trigger signal, and the second inboard position signal is a low trigger signal.

[0197] When the carrier 12 carries the piece to be detected 100 to the stop position, the outboard sensor 21 detects the outboard V2 and sends a signal to the camera 18 to start photographing the second surface (i.e. the first outboard position signal). Thereafter, when the carrier 12 carries the piece to be detected 100 from the stop position to the initial position, the outboard sensor 21 can always detect the piece to be detected 100, and continuously sends a signal to the camera 18 to photograph the second surface (i.e. the first outboard position signal). When the carrier 12 carries the piece to be detected 100 to the initial position, the outboard sensor 21 can no longer detect the piece to be detected 100, and sends a signal to the camera 18 to stop photographing the second surface (i.e. the second outboard position signal). For example, the first outboard position signal is a high trigger signal, and the second outboard position signal is a low trigger signal.

[0198] For example, the inboard sensor 20 and the outboard sensor 21 are respectively electrically connected to the camera 18 through the lower computer. The inboard sensor 20 can send the position signal (first inboard position signal and second inboard position signal) of the to-be-detected piece 100 to the image acquisition card of the lower computer, and the image acquisition card controls the camera 18 to shoot the first surface according to the received position signal. The outboard sensor 21 can send the position signal (first outboard position signal and second outboard position signal) of the to-be-detected piece 100 to the image acquisition card of the lower computer, and the image acquisition card controls the camera 18 to shoot the second surface according to the received position signal.

[0199] The inboard sensor 20 and the outboard sensor 21 are used to detect the position of the to-be-detected piece 100, and the camera 18 is controlled according to the position detection signal, so that the granularity detection system has better process adaptability. During installation and adjustment, the images of different regions of the first surface and the second surface of the to-be-detected piece 100 can be obtained by adjusting the positions of the inboard sensor 20 and the outboard sensor 21. Compared with cropping the required region of the image after shooting the whole image, the calculation amount and complexity of the algorithm for cropping the image can be reduced.

[0200] Optionally, referring to FIGS. 2, 3, 9a and 9b, the to-be-detected piece is placed on the stage, the first light source, the inboard sensor and the camera are turned on, and the reflecting mirror is adjusted to the first working angle, wherein the inboard sensor is electrically connected to the camera, and the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, including:

[0201] S103: The to-be-detected piece is placed on the stage, the first light source, the inboard sensor, the camera and the control component are turned on, and the reflecting mirror is adjusted to the first working angle, wherein the inboard sensor is electrically connected to the camera through the control component, the inboard sensor is used to detect the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, and the control component is also electrically connected to the reflecting mirror motor.

[0202] Adjusting the reflecting mirror to the second working angle includes:

[0203] S143: After the control component receives the second inboard position signal, the control component controls the reflecting mirror motor to act, so as to drive the reflecting mirror to switch from the first working angle to the second working angle.

[0204] When the to-be-detected piece 100 moves to the stop position, the plate-feeding sensor 20 sends a second plate-feeding position signal to the control assembly, and the control assembly controls the reflecting movable mirror motor 19 to act after receiving the second plate-feeding position signal, so as to drive the reflecting movable mirror 15 to switch from the first working angle 151 to the second working angle 152. In this embodiment, the information that the to-be-detected piece 100 is in the stop position is acquired by the plate-feeding sensor 20, and the position information is transmitted to the control assembly, so that the control assembly controls the reflecting movable mirror motor 19 to act, and adjusts the angle of the reflecting movable mirror 15.

[0205] Optionally, referring to FIGS. 2, 3, 10a and 10b, the control assembly is turned on, wherein the plate-feeding sensor is electrically connected to the camera through the control assembly, and the control assembly is also electrically connected to the reflecting movable mirror motor, and the control assembly comprises:

[0206] S105: Turn on the upper computer and the lower computer, wherein the upper computer is electrically connected to the lower computer, the plate-feeding sensor is electrically connected to the camera through the lower computer, and the lower computer is also electrically connected to the reflecting movable mirror motor.

[0207] The upper computer issues an instruction to the lower computer, and the lower computer controls the camera 18 and the reflecting movable mirror motor 19 according to the instruction issued by the upper computer.

[0208] Adjusting the reflecting movable mirror to the second working angle comprises:

[0209] S144: After receiving the second plate-feeding position signal, the lower computer sends the second plate-feeding position signal to the upper computer, and the upper computer issues a rotating control instruction to the lower computer after receiving the second plate-feeding position signal.

[0210] S145: After receiving the rotating control instruction, the lower computer controls the reflecting movable mirror motor to act, so as to drive the reflecting movable mirror to switch from the first working angle to the second working angle.

[0211] Optionally, referring to FIGS. 2, 3 and 11, the particle size detection method further comprises:

[0212] S106: Turn on the film body detection sensor, wherein the film body detection sensor is electrically connected to the stage motor, and the film body detection sensor is used to detect whether the second surface of the to-be-detected piece is covered with a dustproof film, and the stage motor is used to drive the stage to move in a direction perpendicular to the first surface.

[0213] It can be understood that this step of turning on the film body detection sensor 22 can be performed before the stage 12 reaches the stop position or when the stage 12 reaches the stop position.

[0214] Before driving the stage to move from the stop position to the initial position, the particle size detection method further comprises:

[0215] S190: controlling the film body detection sensor to detect the second surface, and if the film body detection sensor detects that the second surface is covered by the dustproof film, controlling the film body detection sensor to send a film body existing signal to the stage motor.

[0216] S200: after receiving the film body existing signal, driving the stage motor to move the stage by a preset distance in the direction of the first surface.

[0217] Before shooting the second surface of the detected piece 100, the detection of the dustproof film of the detected piece 100 is realized by the film body detection sensor 22, and the signal of the film body detection sensor 22 is directly given to the driver of the stage motor to control the action of the stage motor. Such a setting can simplify the process, realize process automation, reduce loops, increase reliability, reduce time, and increase output. If it is detected that the detected piece 100 has no dustproof film, the height of the stage 12 does not change, and the plate movement is directly performed (i.e., the detected piece 100 moves with the stage 12 from the stop position to the initial position), and the second surface of the detected piece 100 is shot. If it is detected that the detected piece 100 has a dustproof film, the stage motor drives the stage 12 to ascend by a preset distance in the direction perpendicular to the first surface of the detected piece 100 to the first light source 13, and then the plate movement is performed to shoot the second surface of the detected piece 100. Therefore, the granularity detection method of the embodiment can detect two kinds of detected pieces 100 (i.e., the detected piece 100 with a dustproof film and the detected piece 100 without a dustproof film).

[0218] It should be noted that the above-mentioned preset distance is determined by the thickness of the dustproof film. For the detected piece 100 with a dustproof film of different thickness, the ascending height of the stage 12 can be calculated according to the thickness of the dustproof film and pre-set in the control system (such as the upper computer), so as to ensure quick displacement and accurate focusing. In addition, different light source intensities need to be set for the detected piece 100 with dustproof films of different thicknesses, which can be controlled by the upper computer or the local mode.

[0219] Optionally, referring to FIGS. 2, 3, 12a and 12b, the granularity detection method further comprises:

[0220] S107: turning on the limit position detection sensor, wherein the limit position detection sensor is electrically connected with the stage motor, and the limit position detection sensor is used to detect the position of the detected piece.

[0221] It can be understood that the step of turning on the limit position detection sensor 23 can be performed before the stage 12 reaches the stop position or when the stage 12 reaches the stop position.

[0222] After receiving the film body existing signal, driving the stage motor to move the stage by a preset distance in the direction of the first surface includes:

[0223] S201: The carrier motor drives the carrier to move a preset distance in the direction of the first surface after receiving the film body presence signal. During the movement, if the limit position detection sensor detects that the to-be-detected piece has reached the limit position, a stop signal is sent to the carrier motor.

[0224] S202: The carrier motor stops driving the carrier to continue moving after receiving the stop signal.

[0225] The signal detected by the limit position detection sensor 23 is directly introduced into the carrier motor, and the carrier motor is directly executed. That is, when the limit position detection sensor 23 detects that the to-be-detected piece 100 has reached the limit position, the to-be-detected piece 100 is limited to continue to move in the direction of the first surface, so as to realize the protection of the device and the to-be-detected piece 100. The limit position detection sensor 23 can be an optical sensor, which confirms the position of the to-be-detected piece 100 by detecting the vertical distance between the to-be-detected piece 100.

[0226] Optionally, referring to FIGS. 13-15, the first light source emits a first light beam toward the first surface of the to-be-detected piece includes:

[0227] S113: The first light source emits a first light beam toward the first surface of the to-be-detected piece, and the first light beam is reflected on the first surface of the to-be-detected piece after passing through the first half-mirror.

[0228] The first light beam reflected by the first surface is shot toward the reflecting mirror includes:

[0229] S121: The first light beam is reflected on the first surface, the first half-mirror and the first reflecting mirror in turn, and then is shot toward the reflecting mirror.

[0230] The second light source emits a second light beam toward the second surface of the to-be-detected piece includes:

[0231] S153: The second light source emits a second light beam toward the second surface of the to-be-detected piece, and the second light beam is reflected on the second surface of the to-be-detected piece after passing through the second half-mirror.

[0232] The second light beam reflected by the second surface is shot toward the reflecting mirror includes:

[0233] S161: The second light beam is reflected on the second surface, the second half-mirror and the second reflecting mirror in turn, and then is shot toward the reflecting mirror.

[0234] The particle size detection method in the prior art adopts dark field detection, and the detection of the small particles on the surface of the detected piece is realized by collecting stray light. Since the light intensity of the stray light is weak, the light source intensity and the detection time requirement are large. The particle size detection method of the embodiment adopts the first half-transmission half-reflection mirror 141 and the first light source 13, the second half-transmission half-reflection mirror 142 and the second light source 16 which are perpendicular to the surface of the detected piece 100 to directly use the detected piece 100 as an imaging object plane, thereby realizing bright field detection, and greatly shortening the detection time while ensuring the particle size detection performance.

[0235] The first mirror 142 is used to reflect the first light beam 131, so that the first light beam 131 can smoothly reach the reflecting dynamic mirror 15. The second mirror 172 is used to reflect the second light beam 161, so that the second light beam 161 can smoothly reach the reflecting dynamic mirror 15.

[0236] Optionally, referring to FIGS. 14 to 16, the first light beam reflected by the first surface is shot to the reflecting dynamic mirror, and then enters the camera after being reflected by the reflecting dynamic mirror, including:

[0237] S122: The first light beam reflected by the first surface is shot to the reflecting dynamic mirror, and then shot to the focusing lens group after being reflected by the reflecting dynamic mirror, and enters the camera after being focused by the focusing lens group;

[0238] The second light beam reflected by the second surface is shot to the reflecting dynamic mirror, and then enters the camera after being reflected by the reflecting dynamic mirror, including:

[0239] S162: The second light beam reflected by the second surface is shot to the reflecting dynamic mirror, and then shot to the focusing lens group after being reflected by the reflecting dynamic mirror, and enters the camera after being focused by the focusing lens group.

[0240] The particle size detection method of the embodiment adopts the focusing lens group 24 to converge the first light beam 131 or the second light beam 161 reflected by the reflecting dynamic mirror 15, so that the imaging plane of the first light beam 131 and the second light beam 161 in front of the camera 18 is reduced to the lens range of the camera 18, thereby ensuring that the camera 18 can completely shoot the first surface and the second surface.

[0241] As shown in FIG. 17, the embodiment of the application further provides a particle size detection device, which comprises:

[0242] The adjusting module 111 is configured to place the detected piece on the stage, turn on the first light source and the camera, and adjust the reflecting dynamic mirror to the first working angle.

[0243] The driving module 112 is configured to drive the carrier to move from an initial position to a stop position, and drive the first light source to emit a first light beam to a first surface of the to-be-detected piece, and the first light beam is sequentially irradiated on different regions of the first surface with the movement of the to-be-detected piece; and the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

[0244] The shooting module 113 is configured to control the camera to shoot the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position.

[0245] The adjusting module 111 is further configured to adjust the reflecting mirror to a second working angle, and turn on a second light source.

[0246] The driving module 112 is further configured to drive the carrier to move from the stop position to the initial position, and drive the second light source to emit a second light beam to a second surface of the to-be-detected piece, and the second light beam is sequentially irradiated on different regions of the second surface with the movement of the to-be-detected piece; and the second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

[0247] The shooting module 113 is further configured to control the camera to shoot the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position.

[0248] The acquisition module 114 is configured to acquire a particle image on the first sub-image and the second sub-image, and perform algorithm analysis on the particle image to determine whether the particle corresponding to the particle image is a defect.

[0249] The above only describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application. Industrial applicability

[0250] By the above particle size detection method and device, by placing the to-be-detected piece on the stage, turning on the first light source and the camera, and adjusting the reflecting mirror to the first working angle; driving the stage to move from the initial position to the stop position, the first light source emits the first light beam to the first surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the first light beam is sequentially irradiated in different regions of the first surface; the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; the camera is controlled to shoot the first surface according to the first preset frequency, so as to obtain multiple first sub-images of the first surface, until the stage reaches the stop position; the reflecting mirror is adjusted to the second working angle, and the second light source is turned on; the stage is driven to move from the stop position to the initial position, the second light source emits the second light beam to the second surface of the to-be-detected piece, and with the movement of the to-be-detected piece, the second light beam is sequentially irradiated in different regions of the second surface; the second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; the camera is controlled to shoot the second surface according to the second preset frequency, so as to obtain multiple second sub-images of the second surface, until the stage reaches the initial position; the particle images on the first sub-images and the second sub-images are obtained, and the particle images are analyzed by algorithm, so as to determine whether the particles corresponding to the particle images are defects. The particle size detection method uses the same reflecting mirror to participate in the detection of the first surface and the second surface of the to-be-detected piece, and through the switching of the working angle of the reflecting mirror, only one camera can complete the shooting of the first surface and the second surface of the to-be-detected piece, effectively simplifying the detection light path and reducing the cost. Moreover, when the to-be-detected piece enters and exits the plate, it will have a process of deceleration, stop and acceleration, as long as the rotation time of the reflecting mirror is set when the to-be-detected piece stops, the rotation of the reflecting mirror can be ingeniously integrated into the movement process of the to-be-detected piece, so as to not increase the overall time consumption of the detection process.

Claims

1. A particle size detection method characterized by, The method comprises the following steps: placing a to-be-detected piece on a stage, turning on a first light source and a camera, and adjusting a reflecting mirror to a first working angle; driving the stage to move from an initial position to a stop position, the first light source emitting a first light beam to a first surface of the to-be-detected piece, and the first light beam sequentially irradiating different regions of the first surface as the to-be-detected piece moves; reflecting the first light beam reflected by the first surface to the reflecting mirror, and then reflecting the first light beam to the camera through the reflecting mirror; controlling the camera to capture the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the stage reaches the stop position; adjusting the reflecting mirror to a second working angle and turning on a second light source; driving the stage to move from the stop position to the initial position, the second light source emitting a second light beam to a second surface of the to-be-detected piece, and the second light beam sequentially irradiating different regions of the second surface as the to-be-detected piece moves; reflecting the second light beam reflected by the second surface to the reflecting mirror, and then reflecting the second light beam to the camera through the reflecting mirror; controlling the camera to capture the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the stage reaches the initial position; obtaining particle images on the first sub-images and the second sub-images, and performing algorithm analysis on the particle images to determine whether the particles corresponding to the particle images are defects.

2. The particle size detection method according to claim 1, wherein The driving the stage to move from the initial position to the stop position comprises: controlling a stage motor to drive a stage connected with the stage motor to move in a direction parallel to the first surface of the to-be-detected piece, so that the to-be-detected piece moves from the initial position to the stop position. The adjusting the reflecting mirror to the second working angle comprises: controlling a reflecting mirror motor to drive the reflecting mirror connected with the reflecting mirror motor to adjust to the second working angle. The driving the stage to move from the stop position to the initial position comprises: controlling the stage motor to drive the stage to move in a direction parallel to the first surface of the to-be-detected piece, so that the to-be-detected piece moves from the stop position to the initial position.

3. The particle size detection method according to claim 2, wherein The placing the to-be-detected piece on the stage, turning on the first light source and the camera, and adjusting the reflecting mirror to the first working angle comprises: placing the to-be-detected piece on the stage, turning on the first light source and the camera, and electrically connecting the camera with an encoder of the stage motor, so that the camera can obtain encoder signals emitted by the encoder, and adjusting the reflecting mirror to the first working angle. The controlling the camera to capture the first surface at the first preset frequency to obtain a plurality of first sub-images of the first surface until the stage reaches the stop position comprises: controlling the camera to capture the first surface once when a first preset number of the encoder signals are received, and repeating the above capturing process until the stage reaches the stop position to obtain a plurality of first sub-images of the first surface. The control the camera according to the second preset frequency to the second surface is shot, to obtain the second surface multiple second sub image, until the carrier to reach the initial position includes: Control the camera when receiving the second preset number of the encoder signal, the second surface is shot once, repeat the above-mentioned shooting process, until the carrier reaches the initial position, to obtain the second surface multiple second sub image.

4. The particle size detection method according to claim 2, characterized by, Include: Place the to-be-detected piece on the carrier, turn on the first light source, the plate entering sensor and the camera, adjust the reflecting mirror to the first working angle, wherein the plate entering sensor is electrically connected with the camera, and the plate entering sensor is used for detecting the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position; Drive the carrier to move from the initial position to the stop position, control the plate entering sensor to send a first plate entering position signal to the camera, the first light source emits a first light beam to the first surface of the to-be-detected piece, and as the to-be-detected piece moves, the first light beam irradiates different regions of the first surface in turn; The first light beam reflected by the first surface is shot at the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; Control the camera to shoot the first surface according to a first preset frequency after receiving the first plate entering position signal, to obtain multiple first sub images of the first surface, until the carrier reaches the stop position; After the carrier moves to the stop position, control the plate entering sensor to send a second plate entering position signal to the camera; Control the camera to stop shooting the first surface of the to-be-detected piece after receiving the second plate entering position signal; Adjust the reflecting mirror to the second working angle, and turn on the second light source and the plate exiting sensor, wherein the plate exiting sensor is electrically connected with the camera, and the plate exiting sensor is used for detecting the position of the to-be-detected piece when the to-be-detected piece moves from the stop position to the initial position; Drive the carrier to move from the stop position to the initial position, control the plate exiting sensor to send a first plate exiting position signal to the camera, the second light source emits a second light beam to the second surface of the to-be-detected piece, and as the to-be-detected piece moves, the second light beam irradiates different regions of the second surface in turn; The second light beam reflected by the second surface is shot at the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror; Control the camera to shoot the second surface according to a second preset frequency after receiving the first plate exiting position signal, to obtain multiple second sub images of the second surface, until the carrier reaches the initial position; After the carrier moves to the initial position, control the plate exiting sensor to send a second plate exiting position signal to the camera; Control the camera to stop shooting the second surface of the to-be-detected piece after receiving the second plate exiting position signal; Obtain the particle images on the first sub image and the second sub image, and perform algorithm analysis on the particle images to determine whether the particles corresponding to the particle images are defects.

5. The particle size detection method according to claim 4, wherein The method comprises the following steps: Placing the to-be-detected piece on the stage, turning on the first light source, the plate entering sensor and the camera, and adjusting the reflecting mirror to the first working angle, wherein the plate entering sensor is electrically connected with the camera, and the plate entering sensor is used for detecting the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, and the plate entering sensor comprises: Placing the to-be-detected piece on the stage, turning on the first light source, the plate entering sensor, the camera and the control assembly, and adjusting the reflecting mirror to the first working angle, wherein the plate entering sensor is electrically connected with the camera through the control assembly, the plate entering sensor is used for detecting the position of the to-be-detected piece when the to-be-detected piece moves from the initial position to the stop position, and the control assembly is also electrically connected with the reflecting mirror motor; The adjusting the reflecting mirror to the second working angle comprises:

6. The particle size detection method according to claim 2, wherein After the control assembly receives the second plate entering position signal, the reflecting mirror motor is controlled to act to drive the reflecting mirror to switch from the first working angle to the second working angle. Further comprising: Turning on the film body detection sensor, wherein the film body detection sensor is electrically connected with the stage motor, the film body detection sensor is used for detecting whether the second surface of the to-be-detected piece is covered with the dustproof film, and the stage motor is used for driving the stage to move in the direction perpendicular to the first surface; Before the driving the stage to move from the stop position to the initial position, the granularity detection method further comprises: Controlling the film body detection sensor to detect the second surface, and if the film body detection sensor detects that the second surface is covered with the dustproof film, controlling the film body detection sensor to send a film body existing signal to the stage motor; 7. The particle size detection method according to claim 6, wherein After the stage motor receives the film body existing signal, the stage is driven to move a preset distance in the direction where the first surface is located. Further comprising: Turning on the limit position detection sensor, wherein the limit position detection sensor is electrically connected with the stage motor, and the limit position detection sensor is used for detecting the position of the to-be-detected piece; After the stage motor receives the film body existing signal, the stage is driven to move a preset distance in the direction where the first surface is located, comprising: After the stage motor receives the film body existing signal, the stage is driven to move a preset distance in the direction where the first surface is located, and during the movement, if the limit position detection sensor detects that the to-be-detected piece has reached the limit position, a stop signal is sent to the stage motor; 8. The particle size detection method according to claim 1, wherein, After the stage motor receives the stop signal, the stage is stopped from continuing to move. The first light source emits a first light beam to the first surface of the to-be-detected piece, and the first light beam transmits through the first half-transmission half-reflection mirror and then irradiates on the first surface of the to-be-detected piece; The first light beam is reflected by the first surface, the first half-transmission half-reflection mirror and the first reflecting mirror in turn and then is shot to the reflecting mirror; The second light source emits a second light beam to the second surface of the to-be-detected piece, and the second light beam transmits through the second half-transmission half-reflection mirror and then irradiates on the second surface of the to-be-detected piece; ​ The second light source emits a second light beam to a second surface of the object to be detected, and the second light beam is transmitted through the second half-transmission half-reflection mirror and then irradiated on the second surface of the object to be detected; The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror. The second light beam is reflected by the second surface, the second half-transmission half-reflection mirror and the second reflecting mirror in sequence, and then is shot to the reflecting mirror.

9. The particle size detection method according to claim 1, wherein The first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror. The first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror. The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror. The second light beam reflected by the second surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror.

10. The particle size detection method according to claim 5, wherein The control assembly is opened, wherein the inboard sensor is electrically connected to the camera through the control assembly, and the control assembly is further electrically connected to the reflecting mirror motor. The upper computer and the lower computer are opened, wherein the upper computer is electrically connected to the lower computer, the inboard sensor is electrically connected to the camera through the lower computer, and the lower computer is further electrically connected to the reflecting mirror motor. The adjusting the reflecting mirror to the second working angle comprises: After the lower computer receives the second inboard position signal, the lower computer sends the second inboard position signal to the upper computer, and the upper computer sends a rotating control instruction to the lower computer after receiving the second inboard position signal. After the lower computer receives the rotating control instruction, the lower computer controls the reflecting mirror motor to act, so as to drive the reflecting mirror to switch from the first working angle to the second working angle.

11. A particle size detection apparatus characterized by comprising: The device comprises: An adjusting module is configured to place an object to be detected on a carrier, open a first light source and a camera, and adjust a reflecting mirror to a first working angle; A driving module is configured to drive the carrier to move from an initial position to a stop position, the first light source emits a first light beam to a first surface of the object to be detected, and the first light beam is irradiated on different regions of the first surface in sequence with the movement of the object to be detected; the first light beam reflected by the first surface is shot to the reflecting mirror, and then enters the camera after being reflected by the reflecting mirror. A shooting module is configured to control the camera to shoot the first surface at a first preset frequency to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position. The adjusting module is further configured to adjust the reflecting mirror to a second working angle and open a second light source. The driving module is further configured to drive the carrier to move from the stop position to the initial position, drive the second light source to emit a second light beam toward a second surface of the piece to be detected, and as the piece to be detected moves, the second light beam sequentially irradiates different regions on the second surface; and reflect the second light beam reflected by the second surface toward the reflecting mirror, and then reflect the second light beam toward the camera again. The shooting module is further configured to control the camera to shoot the second surface at a second preset frequency to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position. The acquisition module is configured to acquire particle images on the first sub-images and the second sub-images, and perform algorithm analysis on the particle images to determine whether the particle images correspond to defective particles.

12. The apparatus of claim 11, wherein, The driving module is specifically configured to: control the carrier motor to act to drive a carrier connected with the carrier motor to move in a direction parallel to the first surface of the piece to be detected, so that the piece to be detected moves from the initial position to the stop position; the adjusting the reflecting mirror to the second working angle includes: controlling the reflecting mirror motor to act to drive the reflecting mirror connected with the reflecting mirror motor to adjust to the second working angle; the driving the carrier to move from the stop position to the initial position includes: controlling the carrier motor to act to drive the carrier to move in a direction parallel to the first surface of the piece to be detected, so that the piece to be detected moves from the stop position to the initial position.

13. The apparatus of claim 12, wherein, The adjusting module is specifically configured to: place the piece to be detected on the carrier, turn on the first light source and the camera, and electrically connect the camera with an encoder of the carrier motor, so that the camera can acquire the encoder signals emitted by the encoder, and adjust the reflecting mirror to the first working angle; The shooting module is specifically configured to: control the camera to shoot the first surface once when a first preset number of the encoder signals are received, repeat the above shooting process until the carrier reaches the stop position, and obtain a plurality of first sub-images of the first surface; control the camera to shoot the second surface once when a second preset number of the encoder signals are received, repeat the above shooting process until the carrier reaches the initial position, and obtain a plurality of second sub-images of the second surface.

14. The apparatus of claim 12, wherein, The control module is further configured to: place the piece to be detected on the carrier, turn on the first light source, a plate entering sensor, and the camera, and adjust the reflecting mirror to the first working angle, wherein the plate entering sensor is electrically connected with the camera, and the plate entering sensor is used to detect the position of the piece to be detected when the piece to be detected moves from the initial position to the stop position; drive the carrier to move from the initial position to the stop position, control the plate entering sensor to send a first plate entering position signal to the camera, drive the first light source to emit a first light beam toward a first surface of the piece to be detected, and as the piece to be detected moves, the first light beam sequentially irradiates different regions on the first surface; and Reflect the first light beam reflected by the first surface to the reflecting mirror, and then reflect the first light beam to the camera again after the reflecting mirror; Control the camera to shoot the first surface according to a first preset frequency after receiving the first plate-in position signal, so as to obtain a plurality of first sub-images of the first surface until the carrier reaches the stop position; After the carrier moves to the stop position, control the plate-in sensor to send a second plate-in position signal to the camera; Control the camera to stop shooting the first surface of the detection object after receiving the second plate-in position signal; Adjust the reflecting mirror to a second working angle, and turn on a second light source and a plate-out sensor, wherein the plate-out sensor is electrically connected with the camera, and the plate-out sensor is used to detect the position of the detection object when the detection object moves from the stop position to the initial position; Drive the carrier to move from the stop position to the initial position, control the plate-out sensor to send a first plate-out position signal to the camera, and the second light source emits a second light beam to the second surface of the detection object, and the second light beam irradiates different regions of the second surface in sequence with the movement of the detection object; Reflect the second light beam reflected by the second surface to the reflecting mirror, and then reflect the second light beam to the camera again after the reflecting mirror; Control the camera to shoot the second surface according to a second preset frequency after receiving the first plate-out position signal, so as to obtain a plurality of second sub-images of the second surface until the carrier reaches the initial position; After the carrier moves to the initial position, control the plate-out sensor to send a second plate-out position signal to the camera; Control the camera to stop shooting the second surface of the detection object after receiving the second plate-out position signal; Obtain the particle images on the first sub-images and the second sub-images, and perform algorithm analysis on the particle images to determine whether the particles corresponding to the particle images are defects.

15. The apparatus of claim 14, wherein, The control module is specifically configured to: Place the detection object on the carrier, turn on the first light source, the plate-in sensor, the camera and the control component, and adjust the reflecting mirror to a first working angle, wherein the plate-in sensor is electrically connected with the camera through the control component, the plate-in sensor is used to detect the position of the detection object when the detection object moves from the initial position to the stop position, and the control component is also electrically connected with the reflecting mirror motor; The adjusting the reflecting mirror to a second working angle comprises: After the control component receives the second plate-in position signal, control the reflecting mirror motor to act, so as to drive the reflecting mirror to switch from the first working angle to the second working angle.

Images