Corrugated hose for use in semiconductor technology systems

Abstract

The invention relates to a corrugated hose (200) for use in semiconductor technology systems and to a semiconductor technology system comprising a corresponding corrugated hose (200). The corrugated hose (200) comprises a flexibly deformable bellows (210), which forms the exterior of the corrugated hose (200), is made of a rigid gas-tight material, and has a diameter which varies over the corrugated shape, and an inner hose (220), which forms the flow channel for a liquid and is made of a flexible material, the bellows (210) and the hose (220) being connected together at the two ends of the corrugated hose (200) such that a continuous gas volume (240) is formed between the bellows (210) and the hose (220), and the corrugated hose (200) is designed to reduce temperature differences between the bellows (210) and the hose (220). The semiconductor technology system comprises a temperature-control system (100) having at least one fluid line (101), a corrugated hose (200) according to the invention being provided in at least one fluid line (101).

Description

CZVS115PW0 06.08.2025 / BR Corrugated hose for use in systems for cable ladder technology

[0001] The present application claims priority from German patent application 10 2024 207 793.3, filed on August 15, 2024. The content of this German patent application is incorporated into the present application text by reference.

[0002] The invention relates to a corrugated hose for use in semiconductor technology systems, and to a semiconductor technology system comprising a corresponding corrugated hose.

[0003] In the prior art, semiconductor technology equipment refers to equipment used for the production or testing of microstructured devices or the components required for their manufacture. An example of such equipment is a projection exposure system for photolithography.

[0004] Photolithography is used to manufacture micro- and nanostructured components, such as integrated circuits. The projection exposure system used comprises an illumination system and a projection system. The image of a mask (also called a reticulum) illuminated by the illumination system is projected in a reduced size onto a substrate, such as a silicon wafer, coated with a photosensitive layer and positioned in the image plane of the projection system. This transfers the mask structure onto the photosensitive coating of the substrate.

[0005] In both illumination and projection systems, particularly in projection exposure systems designed for EUV applications (i.e., with exposure wavelengths from 10 nm to 30 nm), several optical elements, especially mirrors, are typically used to achieve the desired image of the mask onto the substrate. Due to the required accuracy, it is essential, especially in projection systems, to ensure that the position of the individual optical elements relative to each other, as well as to the mask and the substrate, changes only within extremely small tolerances, if at all, during operation of the projection exposure system. Furthermore, the shape of the optical elements, particularly the mirror surfaces, must not change, or only within a predefined range.Any change in the position and / or shape of one or more optical elements can lead to a decrease in the image quality of the projection system.

[0006] Corresponding changes in the position and / or shape of one or more optical elements can occur due to heat input into the optical elements or into the structure supporting them. Such heat input inevitably occurs, for example, due to absorption of the illumination radiation by the optical elements, absorption of interfering radiation, particularly in the infrared range, and the heat loss from electrical components in the projection system. To compensate for changes in the position of the optical elements to a certain extent, electrical actuators are known, which, however, themselves emit heat.

[0007] To avoid or at least minimize changes in the shape of the optical elements from a target shape and to dissipate heat gained into the It is known that a projection exposure system, in particular its projection system, is equipped with fluid channels for the passage of a temperature control fluid – in particular demineralized water – in at least some of the optical elements and / or other components of the projection exposure system, and in particular of the projection system. The fluid channels, especially in optical elements, are generally integrated directly into the structure of the optical elements, often in the form of channel-shaped openings that run internally within the structure of the optical element.

[0008] Even though the temperature of the individual components can be well regulated by means of the passage of a temperature control fluid through parts of the projection exposure system, so that changes in the position and / or shape of one or more optical elements due to heat input can be reduced or even completely avoided, it has been shown that the passage of temperature control fluid through the fluid channels provided for this purpose introduces vibrations into the components of the projection exposure system, which can lead to a decrease in image quality, especially if they occur in the projection system.

[0009] The causes of these vibrations introduced by the temperature control fluid include flow-induced vibrations (FIV), which result from the interaction of turbulent flow with the wall of the fluid channel. Undesirable vibrations also arise from waterline acoustics (WLA), where mechanical vibrations, such as those generated by a circulation pump, propagate along the pipe through the temperature control fluid, similar to sound in air.

[0010] To reduce pipe acoustics, it is known to design a section of the flow channel for the temperature control fluid from a viscoelastic material, with this section then being surrounded by a free gas space. Pressure fluctuations in the temperature control fluid can then be absorbed and dampened by elastic deformations of the pipe wall.

[0011] A common design of such a damping element in semiconductor technology equipment is a gas-tight corrugated hose with an inner elastic tube surrounded by a gas space. The corrugated hose serves to connect fluid channels in various components of a semiconductor technology system. Due to its deformability, manufacturing and assembly tolerances for the components to be connected by the corrugated hose can be compensated for. Since the corrugated hose is gas-tight to the environment, it can also be used in evacuated areas where a vacuum or very low pressure prevails during operation of the semiconductor technology system.

[0012] It has been shown that when using such a corrugated hose, for example in semiconductor technology equipment, liquid accumulates in the gas space. As the gas space becomes increasingly filled with liquid, the damping effect of the corrugated hose on line acoustics decreases. At the latest when the area intended as the gas space is completely filled with liquid, there is no longer any sound damping.

[0013] The object of the present invention is to create a corrugated hose and a system for semiconductor technology comprising a corrugated hose in which the damping effect of the corrugated hose for line acoustics is permanent. or at least remains intact for as long as possible.

[0014] This problem is solved by a corrugated hose according to claim 1, and by a system for semiconductor technology according to claim 11. Advantageous further developments are the subject of the dependent claims.

[0015] Accordingly, the invention relates to a corrugated hose for use in semiconductor technology equipment, comprising a flexibly deformable bellows made of rigid, gas-tight material with a wave-like alternating diameter forming the outer surface of the corrugated hose, and an inner hose made of flexible material forming the flow channel for a liquid, wherein the bellows and hose are connected to each other at the two ends of the corrugated hose in such a way that a continuous gas volume is formed between the bellows and hose, and wherein the corrugated hose is designed to reduce temperature differences between the bellows and hose.

[0016] The invention further relates to a system for semiconductor technology comprising at least one temperature control system, wherein a corrugated hose according to the invention is arranged in at least one fluid line of the temperature control system.

[0017] First, some terms used in connection with the invention will be explained.

[0018] A gas volume formed between two elements is considered "continuous" if the two elements are in contact exclusively along continuous lines around the circumference of the gas volume. Apart from this contact, which forms the boundary of the gas space at the respective points, There is no structural contact between the two elements.

[0019] A "wave-like changing diameter" refers to a periodic change in the diameter of an element along its length. This periodic change can correspond to any waveform and is not limited to a sine wave or a shape composed of circular segments, but also includes, for example, a triangular waveform. The latter leads, for instance, to a bellows design resembling an accordion.

[0020] In connection with the present invention, "pervaporation" refers to a permeation followed by evaporation in which a liquid comes into contact with a solid, such as the hose wall, passes through the solid and exits on the other side in a gaseous or evaporated form.

[0021] The invention recognizes that the gas volume of a corrugated hose with an internal elastic tube fills, or can fill, with liquid due to pervaporation of a liquid conveyed through the hose wall and subsequent condensation of the initially gaseous permeate. This pervaporation is driven by the partial pressure difference for the liquid on both sides of the hose wall, or by the pressure difference between the temperature-dependent saturation vapor pressure of the liquid and the partial pressure on the permeate side. On the liquid-carrying side, the equilibrium vapor pressure of the liquid, which depends on the liquid's temperature, can be assumed as the partial pressure. The partial pressure for the liquid that ultimately establishes itself, at least after an initial start-up phase in the gas volume, is the Saturation vapor pressure at a given temperature of the gas volume. If the temperature of the gas volume is lower than the temperature of the liquid in the elastic hose, the saturation vapor pressure in the gas volume can be exceeded, resulting in condensation of the liquid in the gas volume. If the saturation vapor pressure is exceeded, the liquid condenses and collects in the gas volume. The saturation vapor pressure of the liquid in the gas volume also depends on the temperature, namely in the gas volume.

[0022] Based on this, the invention recognizes that by equalizing the temperature in the gas volume with the temperature of the liquid, pervaporation and also the condensation of liquid in the gas volume (apart from any initial pervaporation to reach the saturation vapor pressure in the gas volume) can be avoided. Consequently, the desired damping properties of the corrugated hose with regard to line acoustics are permanently maintained. In a corrugated hose, damping is achieved in particular by the elastic deformation of the hose. Provided the gas volume surrounding the hose is sufficient, the hose can absorb pressure fluctuations in the liquid flowing through it by elastic deformations of the hose wall and thus dampen them.

[0023] The invention further recognizes that in known corrugated hoses, the temperature in the gas volume deviates significantly from the temperature of the liquid because the bellows of the corrugated hose—unlike the inner hose—does not adapt to the temperature of the liquid, or only does so sluggishly. This applies particularly when the corrugated hose is used in an evacuated area of ​​a semiconductor technology plant. In the gas volume of corrugated hoses according to the prior art, this regularly results in a temperature gradient as well as an average temperature that differs from the temperature of the liquid.

[0024] As a technical solution, the invention proposes designing the corrugated hose in such a way that any temperature differences that may occur between the bellows and the hose during its use are reduced as completely and / or as quickly as possible. Given that the hose regularly assumes the temperature of the liquid flowing through it, the objective of equalizing the temperature of the gas volume with that of the liquid, thereby preventing pervaporation of the liquid through the hose wall and subsequent condensation, is achieved by providing one or more technical measures for the rapid equalization of the bellows temperature with the temperature of the hose or the liquid contained therein. The required design of the corrugated hose for reducing temperature differences between the bellows and the hose is achieved by...The liquid contained within thus provides the expert with a technical instruction that causally prevents the accumulation of liquid in the gas volume. Consequently, the desired damping effect of the corrugated hose with regard to line acoustics is also maintained.

[0025] For the design of the corrugated hose provided according to the invention, in such a way that temperature differences between the hose or the liquid contained therein and the bellows are reduced, various passive and active measures are possible.

[0026] This way at least one of the connections between The hose and bellows at the ends of the corrugated hose must be designed in such a way that the thermal resistance of the respective Connection smaller than 1.5 x 10 -5K / W is . These measures ensure that, in the event of a temperature difference, a heat flow occurs between the bellows and the hose, contributing to a rapid temperature adjustment of the colder component to the warmer component.

[0027] Particularly in this context, but possibly also independently thereof, it is preferred if the material for the bellows has a thermal conductivity of at least 5 W / (m·K), preferably at least 15 W / (m·K). The desired thermal conductivity can be ensured by selecting a suitable material. The heat capacity can be influenced, in particular, by choosing the wall thickness of the bellows. A corresponding thermal conductivity ensures that heat introduced into the bellows only locally—e.g., at the ends of the corrugated hose—is quickly distributed throughout the entire bellows, resulting in a homogeneous temperature distribution. With a sufficiently low heat capacity, the bellows temperature adjusts quickly even with small amounts of heat.

[0028] To ensure that the temperature of the bellows does not permanently deviate from the temperature of the hose due to heat exchange with the environment, it is preferred if the bellows is at least partially surrounded by at least one thermal insulation element. An insulation element prevents heat introduced into the bellows to equalize its temperature with the hose from being dissipated to the environment via thermal conduction at at least one connection between the hose and bellows and / or thermal radiation from the hose to the bellows, instead of serving to equalize the temperature of the bellows and hose. To also enable application in the evacuated area of ​​a semiconductor technology plant, it is preferred if the insulation element The environment is low in outgassing elements and particle input.

[0029] The insulating material can be arranged on the outside of the bellows, and can also be applied as a coating. To reduce the risk of mechanical damage to the insulating material and / or to prevent outgassing of the insulating material in vacuum environments, it is preferred that the insulating material be encapsulated from the environment, i.e., surrounded by a layer that is more rigid than the insulating material and / or impermeable to gas and / or particles. Part of this encapsulation layer can be formed by the bellows itself.

[0030] The insulating element can also include a vacuum thermal insulation element, in which a vacuum chamber is formed to prevent heat conduction by gas molecules. If, in particular, convection on the outside of the corrugated tube is to be prevented, it may be sufficient for the insulating element to include a shielding element spaced apart from the bellows. The latter can also reduce heat dissipation to the environment when the corrugated tube is used in an evacuated area, e.g., in a semiconductor technology plant, since a vacuum is also created between the bellows and the shielding element in this case, thus reducing heat transfer from the bellows to the shielding element and from there to the environment.

[0031] It is preferred if the outer surface of the bellows and / or the insulating element is provided with a layer to reduce the emission of heat radiation. This coating is also preferably outgassing-resistant, so that a The coated element can also be used in vacuum environments.

[0032] A substance soluble in the liquid for which the corrugated hose is intended, and which increases its thermal conductivity, may also be present in the gas volume. If liquid accumulates in the gas volume, the substance in question, e.g., a salt, can increase the liquid's thermal conductivity. This allows for increased heat flow through the liquid in the gas volume when the hose is partially immersed, thus enabling faster temperature equalization between the hose and the bellows. It should be noted that the hose's acoustic damping effect, which reduces line noise, is still present even when only partially immersed in the liquid. Solid particles or larger solid bodies may also be present in the gas volume, further increasing the thermal conductivity between the hose and the bellows.

[0033] The measures listed above for reducing temperature differences between the bellows and the hose are all passive measures, meaning they require neither active control nor an external energy supply. Alternatively or additionally, active measures can also be implemented.

[0034] Thus, it is possible for the bellows to be at least partially surrounded by a heating element and / or partially irradiated by a heating radiant. If a heating element is provided that heats itself and primarily dissipates heat via conduction, a thermally conductive contact with the bellows is necessary or at least advantageous. If a heating radiant is provided that primarily dissipates heat into the bellows as thermal radiation... The heating element can also be positioned away from the bellows. The essential point is simply that the heat radiation strikes the bellows and is absorbed there as completely as possible. For this purpose, the bellows can be provided with a suitable, low-reflective coating. This coating should preferably be low in outgassing elements and particle ingress.

[0035] If the bellows is made of an electrically conductive material and has a sufficiently high electrical resistance, it can be heated directly. This simply requires applying an electrical voltage across the corrugated tube, resulting in an electric current flowing through it. Due to the electrical resistance, the bellows then heats up. The electrical resistance can be influenced, among other things, by selecting a material with suitable properties and, in particular, by the wall thickness of the bellows. It is also possible to choose a bellows material that allows for self-regulation of the temperature based on the electric current. In this way, the electrical resistance of the material can change depending on the temperature, ensuring that the bellows heats up to a temperature predetermined by the choice of material, but not exceeding it.

[0036] Regardless of how the bellows is to be actively heated, the target temperature of a dedicated control loop can be assumed to be the temperature of the liquid in the tube of the corrugated hose. This temperature can be easily determined if it is not already known for other reasons. It can also be assumed that the hose is at this temperature and that the gas volume will quickly reach this temperature when the bellows is actively heated to the corresponding temperature. so that the pervaporation of the liquid through the hose wall, as explained at the beginning, can be prevented.

[0037] If active heating of the bellows is planned, it is also possible to induce pervaporation from the gas volume into the hose by at least temporarily increasing the temperature of the bellows to a level greater than the temperature of the liquid in the hose. In this way, any liquid that may have accumulated in the gas volume can be returned to hose 220.

[0038] If exclusively adjusting the temperature of the bellows to the temperature of the hose or the fluid flowing through it is not desired or possible, the corrugated hose can also include a heat exchanger arranged upstream of the hose in a predetermined flow direction to reduce or increase the temperature of the fluid flowing through the corrugated hose. To dissipate the heat extracted from the fluid by a heat exchanger and / or to ensure sufficient heat input, the corrugated hose can be provided with a further heat exchanger downstream of the hose in the predetermined flow direction for at least partial return of the reduced or increased temperature of the fluid, with both heat exchangers having suitable heat conduction parallel to the hose.By using appropriate heat exchangers, the temperature of the liquid and thus directly also that of the hose can be influenced, which directly also has an impact on any temperature difference between the bellows and the hose.

[0039] As an alternative to the above design variant, in which the heat exchanger(s) are an integral part of the corrugated hose, the heat exchanger(s) can also be designed separately from the corrugated hose, which then results in a The arrangement of a corrugated hose and at least one heat exchanger results in...

[0040] Of course, it is possible to combine the above measures for reducing temperature differences between the bellows and the hose as desired.

[0041] For an explanation of the inventive system for semiconductor technology, reference is made to the preceding explanations. The system comprises a temperature control circuit in which a corrugated hose according to the invention is arranged at least at one point. Besides compensating for manufacturing and assembly tolerances, the corrugated hose serves in particular as a damper for line acoustics and retains this functionality permanently due to the inventive design of the corrugated hose, which has been explained in detail above.

[0042] Water, and more preferably demineralized water, is preferably used as the fluid for the temperature control circuit and thus for circulation through the at least one corrugated hose according to the invention. Water-glycol-based coolants are also conceivable as the fluid.

[0043] The invention will now be described by way of example with reference to advantageous embodiments and the accompanying drawings. These show: Figure 1: a schematic representation of a projection exposure system for photolithography; Figure 2: a detail of Figure 1; and Figures 3a-d: schematic representations of different design variants of the corrugated hose of the system according to Figures 1 and 2.

[0044] Figure 1 shows a schematic meridional section of a projection exposure system 1 for photolithography as an example of a system for semiconductor technology. The projection exposure system 1 comprises an illumination system 10 and a projection system 20.

[0045] The illumination system 10 illuminates an object field 11 in an object plane or reticulum plane 12. The illumination system 10 comprises an illumination radiation source 13, which, in the illustrated embodiment, emits illumination radiation comprising at least useful light in the EUV range, i.e., in particular with a wavelength between 5 nm and 30 nm. The illumination radiation source 13 can be a plasma source, for example, an LPP source (laser-produced plasma) or a DPP source (gas-discharge-produced plasma). It can also be a synchrotron-based radiation source. The illumination radiation source 13 can also be a free-electron laser (FEL).

[0046] The illumination radiation emanating from the light source 13 is first focused in a collector 14. The collector 14 can be a collector with one or more ellipsoidal and / or hyperboloid reflective surfaces. The at least one reflective surface of the collector 14 can be oriented at grazing incidence (Gl), i.e., with angles of incidence greater than 45°, or at normal incidence (NI), i.e., with angles of incidence less than 45°. The collector 14 can be structured and / or coated on the one hand to optimize its reflectivity for the useful radiation and on the other hand to suppress stray light.

[0047] After the collector 14, the illumination radiation propagates through an intermediate focus in an intermediate focal plane 15. If the illumination system 10 is to be constructed in a modular manner, the intermediate focal plane 15 can, in principle, be used for the separation – including structural separation – of the illumination system 10 into a radiation source module, comprising the exposure radiation source 13 and the collector 14, and the illumination optics 16 described below. With such a separation, the radiation source module and the illumination optics 16 then together form a modularly constructed illumination system 10.

[0048] The illumination optics 16 include a deflecting mirror 17. The deflecting mirror 17 can be a planar deflecting mirror or, alternatively, a mirror with an effect that influences the beam shape beyond the mere deflection effect. Alternatively or additionally, the deflecting mirror 17 can be designed as a spectral filter that separates a useful wavelength of the illumination radiation from stray light of a different wavelength.

[0049] The deflecting mirror 17 deflects the radiation from the illumination radiation source 13 onto a first faceted mirror 18. If the first faceted mirror 18 is arranged – as in the present case – in a plane of the illumination optics 16 that is optically conjugate to the reticular plane 12 as the field plane, it is also referred to as a field faceted mirror.

[0050] The first faceted mirror 18 comprises a plurality of micromirrors 18' that can be individually pivoted about two mutually perpendicular axes for the controllable formation of facets, each preferably equipped with an orientation sensor (not shown) for determining the orientation of the micromirror 18'. The first faceted mirror 18 is thus a microelectromechanical system (MEMS system), as described, for example, in DE 10 2008 009 600 A1.

[0051] In the beam path of the illumination optics 16, a second faceted mirror 19 is arranged downstream of the first faceted mirror 18, resulting in a double-faceted system, the basic principle of which is also known as a honeycomb condenser (Fly's Eye Integrator). If the second faceted mirror 19 is arranged in a pupil plane of the illumination optics 16 – as in the illustrated embodiment – ​​it is also referred to as a pupil faceted mirror. However, the second faceted mirror 19 can also be arranged at a distance from a pupil plane of the illumination optics 16, in which case the combination of the first and second faceted mirrors 18, 19 results in a specular reflector, as is the case, for example, with... described in US 2006 / 0132747 Al, EP 1 614 008 Bl and US 6,573,978.

[0052] The second faceted mirror 19 need not be constructed from pivotable micromirrors, but can instead comprise individual facets formed from one or a manageable number of mirrors that are significantly larger than micromirrors, and which are either fixed or tiltable only between two defined end positions. However, as shown, it is also possible to use a microelectromechanical system in the second faceted mirror 19 with a plurality of facets individually tilted by two perpendicular angles. to provide mutually converging axes of pivotable micromirrors 19 ' , each preferably comprising an orientation sensor .

[0053] With the aid of the second faceted mirror 19, the individual facets of the first faceted mirror 18 are projected onto the object field 11, although this is regularly only an approximate projection. The second faceted mirror 19 can be the last beam-forming or even the last mirror for the illumination radiation in the beam path before the object field 11.

[0054] Each of the facets of the second faceted mirror 19 is assigned to exactly one of the facets of the first faceted mirror 18 to form an illumination channel for illuminating the object field 11. This can result in illumination according to Köhler's principle.

[0055] The facets of the first faceted mirror 18 are each imaged superimposed on a corresponding facet of the second faceted mirror 19 to illuminate the object field 11. The illumination of the object field 11 is as homogeneous as possible. It preferably exhibits a uniformity error of less than 2%. Field uniformity can be achieved by superimposing different illumination channels.

[0056] By selecting the illumination channels ultimately used, which is easily achieved by appropriately adjusting the micromirrors 18' of the first faceted mirror 18, the intensity distribution in the entrance pupil of the projection system 20 described below can also be adjusted. This intensity distribution is also referred to as the illumination setting. Furthermore, it is possible to It may be advantageous not to arrange the second faceted mirror 19 exactly in a plane that is optically conjugate to a pupil plane of the projection system 20. In particular, the pupil faceted mirror 19 can be arranged tilted relative to a pupil plane of the projection system 20, as described, for example, in DE 10 2017 220 586 A1.

[0057] In the arrangement of the components of the illumination optics 16 shown in Figure 1, the second faceted mirror 19 is arranged in a surface conjugated to the entrance pupil of the projection system 20. Deflection mirror 17 and the two faceted mirrors 18, 19 are each tilted relative to both the object plane 12 and to each other.

[0058] In an alternative embodiment of the illumination optics 16, not shown, a transmission optic comprising one or more mirrors can be provided in the beam path between the second faceted mirror 19 and the object field 11. The transmission optic can, in particular, comprise one or two mirrors for normal incidence (NI mirrors, normal incidence mirrors) and / or one or two mirrors for grazing incidence (Gl mirrors, grazing incidence mirrors). With an additional transmission optic, different positions of the entrance pupil for the tangential and sagittal beam paths of the projection system 20 described below can be taken into account.

[0059] Alternatively, it is possible to dispense with the deflecting mirror 17 shown in Figure 1, for which the faceted mirrors 18 , 19 must then be arranged appropriately opposite the radiation source 13 and the collector 14.

[0060] Using the projection system 20, the object field 11 in the reticulum plane 12 is transferred to the image field 21 in the image plane 22.

[0061] The projection system 20 comprises a plurality of mirrors Mi, which are numbered according to their arrangement in the beam path of the projection exposure system 1. The mirrors Mi are optical elements 25.

[0062] In the example shown in Figure 1, the projection system 20 comprises six mirrors Mx to M6 as optical elements 25. Alternatives with four, eight, ten, twelve, or any other number of mirrors Mi are also possible. The penultimate mirror M5 and the last mirror M6 each have an aperture for the illumination radiation, making the projection system 20 a doubly obscured optical system. The projection system 20 has an image-side numerical aperture greater than 0.3, and which can also be greater than 0.6, for example, 0.7 or 0.75.

[0063] The reflective surfaces of the mirrors Mi can be designed as freeform surfaces without an axis of rotational symmetry. Alternatively, the reflective surfaces of the mirrors Mi can also be designed as aspherical surfaces with exactly one axis of rotational symmetry of the reflective surface shape. The mirrors Mi, like the mirrors of the illumination optics 16, can have highly reflective coatings for the illumination radiation. These reflective coatings can be designed as multilayer coatings, in particular with alternating layers of molybdenum and silicon.

[0064] Projection system 20 has a large object-image offset in the y-direction between a y-coordinate of a Center of object field 11 and a y-coordinate of the center of image field 21. This object-image offset in the y-direction can be approximately as large as a z-distance between the object plane 12 and the image plane 22.

[0065] The projection system 20 can in particular be anamorphic, i.e. it has in particular different image scales β. x , ß y in the x and y directions. The two image scales ß x , ß y of the projection system 20 are preferably located at (ß x , ß y ) = ( + 0.25, / + - 0.125) . A magnification β of 0.25 corresponds to a reduction in the ratio of 4:1, while a magnification β of 0.125 results in a reduction in the ratio of 8:1. A positive sign for the magnification β indicates a magnification without image inversion, a negative sign indicates a magnification with image inversion.

[0066] Other magnification ratios are also possible. Magnification ratios with the same sign and those with the same absolute value are also possible. x , ß y In the x and y directions, adjustments are possible.

[0067] The number of intermediate image planes in the x- and y-directions in the beam path between the object field 11 and the image field 21 can be the same or different, depending on the design of the projection system 20. Examples of projection systems 20 with different numbers of such intermediate images in the x- and y-directions are known from US 2018 / 0074303 Al.

[0068] Projection system 20 can, in particular, have a homocentric entrance pupil. This may be accessible. However, it may also be inaccessible.

[0069] Illuminated by lighting system 10 and by the The projection system 20 is transferred to the image plane 21. A reticle 30 (also called a mask) is arranged in object field 11. The reticle 30 is held by a reticle holder 31. The reticle holder 31 can be moved, particularly in a scanning direction, via a reticle displacement drive 32. In the illustrated embodiment, the scanning direction is in the y-direction.

[0070] The reticule 30 can have an aspect ratio between 1:1 and 1:3, preferably between 1:1 and 1:2, and particularly preferably 1:1 or 1:2. The reticule 30 can be substantially rectangular and is preferably 5 to 7 inches (12.70 to 17.78 cm) long and wide, more preferably 6 inches (15.24 cm) long and wide. Alternatively, the reticule 30 can be 5 to 7 inches (12.70 to 17.78 cm) long and It should be 10 to 14 inches (25.40 to 35.56 cm) wide, and preferably 6 inches (15.24 cm) long and 12 inches (30.48 cm) wide.

[0071] A structure on the reticulum 30 is imaged onto a photosensitive layer of a wafer 35 located in the image plane 22 within the image field 21. The wafer 35 is held by a wafer holder 36. The wafer holder 36 can be displaced, particularly along the y-direction, via a wafer transfer drive 37. The displacement of the reticulum 30 via the reticulum transfer drive 32 and of the wafer 35 via the wafer transfer drive 37 can be synchronized.

[0072] The projection exposure system 1 shown in Figure 1, or its projection system 20, the above description of which essentially reflects known prior art, further comprises a temperature control system 100 with which various components of the projection system 20 can be kept at a set temperature, whether changes in To avoid or at least minimize the position and / or shape of the mirrors M2 to M6.

[0073] In Figure 1 and Figure 2, which is merely an enlargement of part of Figure 1, the temperature control system 100 is limited to mirror M4 for the sake of clarity and is shown only very schematically. As indicated, among other things, by the additional inlets and outlets shown with dotted lines, the temperature control system 100 can also extend to further mirrors M2, M3, M5, and / or M6, as well as other components not shown, such as, in particular, the support structure to which mirrors M2 to M6 are attached. It is also possible that the temperature control system 10 controls components of the exposure system 10. However, the exposure system 10 can also have its own temperature control system.

[0074] The temperature control system 100 comprises fluid lines 101 for conveying a temperature control medium, a circulation pump 102 for pumping the temperature control medium through the fluid lines 101, and a controllable heat / cold source as element 103 for actively temperature control of the temperature control medium. The fluid lines 101 are connected to a fluid channel 26 passing through the mirror M4 to be temperature controlled, such that a closed temperature control circuit 105 is formed for the temperature control medium.

[0075] The circulation pump 102 circulates the temperature control medium, which can be actively controlled to a desired temperature by means of element 103, along or through various components, such as the mirror M4, where heat exchange takes place, so that the corresponding components gradually adapt to the actively controlled temperature of the temperature control medium. approximate. This is widely known in the prior art.

[0076] Element 103 for active temperature control of the temperature control medium can be provided as a heat pump with an electrically operated heating element, which is designed to supply or remove heat from the temperature control medium flowing through a heat exchanger.

[0077] To prevent vibrations from the circulation pump 102 and / or the active temperature control element 103 from being transmitted through the structure, the circulation pump 102 and / or the active temperature control element 103 are generally mechanically decoupled from the projection system 10 as much as possible and arranged at a distance from it. For this reason, the circulation pump 102 and / or the active temperature control element 103 are also regularly arranged outside the evacuable space provided for the optical elements of the projection exposure system 1. The system boundary between the evacuable space and the area with ambient conditions is indicated in Figures 1 and 2 by the dashed line 90.

[0078] In addition to the elements 101, 102, and 103 shown, the temperature control system 100 can include further elements, such as controllable valves. If several components of the projection exposure system 1 are supplied with temperature control medium in different parallel temperature control circuits 105 using the temperature control system 100, valves can be used to individually adjust the flow rate in the individual temperature control circuits 105.

[0079] All elements 101, 102, 103 of the temperature control system 100, as well as the fluid channels 26 through components of the projection exposure system 1, are designed to be as efficient as possible. The aim is to generate few flow-induced vibrations and to exhibit advantageously developed line acoustics for damping acoustic vibrations in the temperature control medium that arise from these or other causes. However, the generation of flow-induced vibrations and line acoustics cannot be completely avoided.

[0080] To reduce the effects of the acoustics of the pipework on the mirror M4ZU, corrugated hoses 200 are provided. These hoses are located in the evacuated space and initially serve to connect the assembly around the mirror M4 to the parts of the temperature control system 100 located outside the evacuated space. As with corrugated hoses known from the prior art, the corrugated hoses 200 can also compensate for assembly and manufacturing tolerances due to their deformability.

[0081] Furthermore, the corrugated hoses 200 also serve to dampen the acoustics of the lines. To explain this, please refer to Figures 3a-d, which show various designs for the corrugated hoses 200 from Figure 2.

[0082] A corrugated hose 200 comprises a bellows 210, which forms the outer surface of the corrugated hose 200. The bellows 210 is made of a rigid, gas-tight material, particularly metal, such as aluminum or stainless steel. Due to its corrugated, varying diameter, the bellows 210 is nevertheless deformable in order to compensate for, for example, assembly and manufacturing tolerances when connecting two fluid lines 101, as already mentioned above.

[0083] Inside the bellows 210 is a hose 220 made of flexible material, in particular viscoelastic material, arranged in such a way that the actual passage of liquid through the corrugated hose 200 alone through the hose 220. Due to the viscoelastic properties of the hose 220, the corrugated hose 200 acts as a damper for the pipe acoustics - at least as long as the hose 220 is free on its outside in such a way that it can react to "acoustic" pressure fluctuations in the fluid flowing through it by elastic deformation of the hose wall.

[0084] Bellows 210 and hose 220 are connected to each other in a ring-like fashion at both ends of the corrugated hose 200 via the connecting elements 230, so that a continuous gas volume 240 is formed between bellows 210 and hose 220, which completely surrounds hose 220. The gas volume 240 is gas-tight from the surroundings.

[0085] When a liquid, such as water, especially demineralized water, is passed through the corrugated hose 200 and thus through the inner hose 220, the hose 220 generally assumes the temperature of the liquid. If this temperature deviates from the temperature of the bellows 210, pervaporization of the liquid occurs through the wall of the hose 220 and the gas volume 240 fills with liquid.

[0086] In order to avoid or at least reduce the accumulation of liquid in the gas volume 240 so that the hose 220 can permanently serve to dampen the line acoustics, the corrugated hose 200 is designed to reduce temperature differences between bellows 210 and hose 200.

[0087] In the embodiment shown in Figure 3a, the connecting elements 230 on both sides of the corrugated hose 200 are designed such that the thermal resistance of the connection is less than 1.5 x 10 -5K / W is . Additionally, a The temperature difference between bellows 210 and hose 220 regularly also results in a heat flow from the liquid in hose 220 and subsequently also through the connecting elements 230 to bellows 210, which contributes to the goal of adapting the temperature of bellows 210 to the temperature of hose 220 or the liquid contained therein as quickly as possible.

[0088] To ensure that the heat introduced at both ends of the bellows 210 via the connecting elements 230 is distributed across the bellows as quickly as possible, the bellows 210 is made of an aluminum alloy with a thermal conductivity of approximately 160 W / fn-K. The heat introduced into the bellows 210 then quickly leads to a nearly homogeneous temperature equalization of the bellows 210 with the temperature of the hose 220 or the liquid conveyed therein, thereby halting or at least minimizing pervaporation through the hose 220.

[0089] Particularly during rapid temperature changes of the liquid, liquid can accumulate in the gas volume 240 due to pervaporation through the hose 220 during the phases in which the temperature equalization of the bellows 210 and the hose 220 is not yet complete. For this case, a substance 245 is provided in the gas volume 240, which is soluble in the liquid and, when sufficiently dissolved, increases the thermal conductivity of the liquid. In particular, the substance 245 can be a salt. By increasing the thermal conductivity of the liquid in the gas volume 240, the homogenization of the temperature along the bellows 210 can be aided. By filling the otherwise gas-filled (especially air) ribs of the bellows 210 with a liquid that is highly thermally conductive due to the dissolved substance 245, the homogenization of the temperature of the bellows 210 along its longitudinal direction can be accelerated. If the liquid level in the gas volume 240 is so high that the hose 220 also comes into contact with the liquid, heat exchange can occur directly between the hose 220 and the bellows 210 via the liquid. The heat flow between the hose 220 and the bellows 210 is then no longer limited to the two connecting elements 230.

[0090] To prevent heat entering the bellows 210 due to a temperature difference with the hose 220 from being released to the environment instead of serving to equalize the temperature of the bellows 210 and hose 220, the bellows 210 is provided on its outer surface with an outgassing-resistant coating 215, which reduces the emission of thermal radiation to the environment. In particular, if the corrugated hose 200 is arranged in an evacuated area, as in the system shown in Figures 1 and 2, the emission of heat to the environment by radiation can be the decisive factor for heat loss. This heat loss can be reduced by a suitable coating 215.

[0091] Similarly, in the embodiment of a corrugated hose 200 according to Figure 3b, the bellows 210 is completely surrounded by a thermal insulation element 250. This insulation element 250 ensures that as little heat as possible is transferred to the surroundings, thus ensuring that as much heat as possible transferred from the hose 220 or the liquid flowing therein to the other components of the corrugated hose 200 remains there, which in particular also promotes the temperature equalization of the bellows 210 to the hose 220.

[0092] The insulating element 250 is made from any suitable insulating material. Since these insulating materials are often not resistant to outgassing, the The insulating material is surrounded by a gas-tight layer, e.g., a metal foil 255, so that the insulating material is completely encapsulated by the metal foil 255 on one side and the bellows 210 on the other. This encapsulation completely prevents gas exchange with the gas volume 240 and the environment, thus preventing the insulating material from outgassing into the environment or releasing particles into the environment and potentially causing contamination. The metal foil 255 can be appropriately coated on the outside to reduce heat loss through radiation.

[0093] The insulating element 250 and the metal foil 255 are deformable, so that the corrugated hose 200 is still suitable for compensating for manufacturing and / or assembly tolerances.

[0094] Furthermore, the corrugated hose 200 according to Figure 3b is constructed similarly to the one in Figure 3a, which is why reference is made to the preceding explanations. In particular, all measures described therein for more quickly equalizing the temperature of the bellows 210 with that of the hose 220 can also be applied to the corrugated hose 200 according to Figure 3b.

[0095] In the embodiment shown in Figure 3c, the bellows 210 of the corrugated hose 200, which is otherwise designed analogously to the embodiment shown in Figure 3a, is surrounded by two heating elements 260. The heating elements 260, which are largely rigid, are in direct contact with the bellows 210. However, the bellows is free in the spaces between the two heating elements 260 and between the heating elements 260 and the connecting elements 230, so that the corrugated hose 200 retains sufficient deformability to compensate for manufacturing and / or assembly tolerances.

[0096] The heating elements 260 are electrically operated and their temperature is regulated by a control unit (not shown) to match the temperature of the liquid flowing through the corrugated hose 200. While the hose 220 assumes the temperature of the liquid, the bellows 210 is primarily heated to the same temperature by the heating elements 260, thus effectively reducing any liquid accumulation in the gas volume 240. It is even possible to induce pervaporation from the gas volume 240 into the hose 220 by at least temporarily increasing the temperature of the bellows 210 to a level higher than the temperature of the liquid in the hose 220, thereby returning any liquid that may have accumulated in the gas volume 240 back into the hose 220.

[0097] Instead of heating elements 260 directly adjacent to the bellows 210, spaced heating elements can also be provided, which transfer heat into the bellows 210 by radiation. Alternatively, if a suitable material is chosen for the bellows 210, a voltage can be applied to it, whereupon the bellows 210 will heat up due to its electrical resistance.

[0098] Figure 3d shows another embodiment of a corrugated hose 200. This embodiment of the corrugated hose 200 can also be designed analogously to the corrugated hose 200 shown in Figure 3a. However, in addition, a heat exchanger 270 is provided upstream of the hose 220 in the flow direction indicated by arrow 290. This heat exchanger brings the temperature of the liquid subsequently flowing through the hose 220 to the temperature of the bellows 210, or at least to a temperature at which the temperature difference to the bellows 210 is reduced. For this purpose, the heat exchanger 270 is connected to a suitable heat pump (not shown). connected. By equalizing the temperature of the liquid and thus of the hose 220 to the temperature of the bellows 210 via the heat exchanger 270, pervaporation of the liquid through the hose 220 into the gas volume 240 is at least reduced.

[0099] The heat extracted from the fluid by heat exchanger 270 can be added back to the fluid, if required, by a further optional heat exchanger 275, which is arranged downstream of hose 220 in the flow direction 290. Heat exchanger 275 can be connected to the same heat pump or heat transfer fluid circuit as heat exchanger 270.

Claims

32 Patent claims 1. Corrugated hose (200) for use in semiconductor technology equipment comprising a flexibly deformable bellows (210) made of rigid, gas-tight material with a wave-like alternating diameter forming the outer surface of the corrugated hose (200) and an inner hose (220) made of flexible material forming the flow channel for a liquid, wherein the bellows (210) and the hose (220) are connected to each other at the two ends of the corrugated hose (200) in such a way that a continuous gas volume (240) is formed between the bellows (210) and the hose (220), characterized in that the corrugated hose (200) is designed to reduce temperature differences between the bellows (210) and the hose (220).

2. Corrugated hose according to claim 1, characterized in that, in order to reduce temperature differences between bellows (210) and hose (220), at least one of the connections between hose (220) and bellows (210) at the ends of the corrugated hose (200) is designed such that the thermal resistance of the respective connection is less than 1.5 x 10 -5 K / W is .

3. Corrugated hose according to one of the preceding claims, characterized in that the material for the bellows (210) has a thermal conductivity of at least 5 W / (mK), preferably at least 15 W / (mK).

4. Corrugated hose according to one of the preceding claims, characterized in that 33 the bellows (210) is at least partially surrounded by at least one thermal insulation element (250) which is preferably resistant to outgassing towards the environment.

5. Corrugated hose according to claim 4, characterized in that the at least one insulating element (250) comprises an insulating element (250) made of insulating material, preferably encapsulated from the environment, a vacuum thermal insulation element and / or a shielding element spaced apart from the bellows.

6. Corrugated hose according to one of the preceding claims, characterized in that the bellows (210) and / or the insulating element (250) is coated on at least one side to reduce the emission of heat radiation.

7. Corrugated hose according to one of the preceding claims, characterized in that a substance soluble in the liquid for which the corrugated hose (200) is provided and which increases its thermal conductivity is arranged in the gas volume (240).

8. Corrugated hose according to one of the preceding claims, characterized in that the bellows (210) is at least partially surrounded by a heating element (260) or is partially irradiated by it.

9. Corrugated hose according to one of the preceding claims, characterized in that the bellows (210) is made of an electrically conductive material and has a sufficiently high electrical resistance, so that the bellows (210) heats up when a predetermined voltage is applied.

10. Corrugated hose according to one of the preceding claims, characterized in that a heat exchanger (270) for reducing or increasing the temperature of the liquid flowing through the corrugated hose (200) is arranged upstream of the hose (220) in a predetermined flow direction (290), wherein preferably a further heat exchanger (275) for at least partially returning the reduction or increase in the temperature of the liquid is arranged downstream of the corrugated hose (200) in the flow direction (290).

11. Semiconductor technology system comprising at least one temperature control system (100) , characterized in that a corrugated hose (200) according to one of claims 1 to 10 is arranged in at least one fluid line (101) of the temperature control system (100).

12. System according to claim 11, characterized in that the corrugated hose (200) is arranged in the vacuum area of ​​the system for semiconductor technology.

13. System according to claim 11 or 12, characterized in that the system for semiconductor technology is a projection exposure system (1) for photolithography.

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