Rubber roller amorphous carbon coating method

Abstract

The present invention provides a rubber roller carbon coating method in which DLC coating of the surface of a rubber roller is performed using an ion source, and in which the coating time and the aging time (also referred to as the cooling time) are distributed and a coating cycle is controlled using same as one coating cycle so that problems, such as surface cracks on a rubber roller, caused by heat, ultraviolet rays and the like generated during coating using plasma can be prevented.

Description

Amorphous carbon coating method for rubber rollers

[0001] The present invention relates to a surface treatment technology for a rubber roller, and more specifically, to a coating method for forming an amorphous carbon coating layer such as DLC on the surface of a rubber roller.

[0002] The film industry (PET, secondary batteries, etc.) uses various rubber-coated rollers to produce products. For example, rubber rollers are used for the application of active materials and electrolyte penetration during the manufacture of secondary battery electrodes. Furthermore, rubber rollers are used in various industries, including the manufacture of optical films, display films, insulating layers for electronic components, and precision parts. However, these rubber rollers lack durability and other characteristics, leading to wear and tear, surface roughness changes, and surface hardening under the influence of UV rays and temperature, which can cause deformation. This deformation can lead to product defects. For example, deformation of rubber rollers can cause scratches in the films produced using them.

[0003] Publication patent No. 10-2015-0008728 discloses a technology for coating a metal roll surface with a rubber that does not react to acid for use in a liner, and coating the rubber surface with DLC to improve the lifespan.

[0004] However, since rubber rollers are inherently vulnerable to heat, there are problems such as the rubber surface being deformed during the DLC coating process, cracks occurring in the DLC coating layer due to the nature of the soft material, or the coating layer breaking when tilted, which prevents the original purpose of the DLC coating from being achieved.

[0005] The purpose of the present invention is to provide a method for coating a rubber roller by applying DLC ​​coating using plasma to the surface of an industrial rubber roller, without causing cracks to occur on the coating surface during the coating process and without damaging the coating layer even when the rubber roller is tilted.

[0006] In accordance with the above purpose, the present invention provides a rubber roller carbon coating method that performs DLC coating on the surface of a rubber roller using an ion source, and prevents problems such as cracking of the rubber roller surface due to heat and ultraviolet rays generated in the coating process using plasma, by distributing the coating time and aging time (also called cooling time) and controlling the coating cycle by making this one coating cycle.

[0007] That is, the present invention,

[0008] A method for forming a DLC coating layer on the surface of a rubber roller,

[0009] A method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that a deposition process and a cooling process for forming a DLC coating layer are alternately repeated, a DLC coating layer is formed for a time period within a limit that does not deform the surface of the rubber roller, and then a cooling time is provided.

[0010] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the ratio of the deposition process time for forming a DLC coating layer and the cooling process time is 1: 1 / 3 to 1.

[0011] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the method for forming a DLC coating layer is any one of PECVD (plasma enhanced chemical vapor deposition), ion plating, laser ablation, and filtered vacuum arc plasma.

[0012] In the above, the formation of the DLC coating layer is carried out in a vacuum chamber, the rubber roller is loaded into the vacuum chamber and vacuumized, and then plasma cleaning is carried out before vacuum deposition for forming the DLC coating layer, and the plasma cleaning is carried out by flowing an inert gas into the vacuum chamber and generating plasma, selecting a cleaning time of 20 to 40 minutes, selecting a cooling time of 15 to 30 minutes, and providing a method for forming a DLC coating layer on the surface of a rubber roller, characterized in that there is a cooling time after the plasma cleaning.

[0013] In the above, after the cooling time has elapsed after the plasma cleaning, a buffer layer is formed before the formation of the DLC coating layer, and the buffer layer includes one of CrN and CrC, TiN and TiC, or WN and WC, and is formed using a PVD source equipped with one of Cr, Ti, or W as a sputter target.

[0014] The formation of the CrN, TiN, or WN layer is performed by applying power to a PVD source equipped with a sputtering target and supplying inert gas and nitrogen (N2). In the initial stage of the formation of the CrN, TiN, or WN layer, only the inert gas is supplied, and then the supply of nitrogen (N2) is gradually increased to form a gradient layer.

[0015] The formation of CrC, TiC, or WC layers is formed by applying power to a PVD source equipped with a sputter target and supplying an inert gas and a hydrocarbon gas.

[0016] Give it a cooling time,

[0017] A method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the ratio of the buffer layer forming process time and the cooling time is 1: 1 / 3 to 1.

[0018] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that a buffer layer is formed, then a hydrocarbon is supplied to a linear ion source, and a bias is applied to a rubber roller to form DLC, and coating is performed by repeating three cycles with a coating time of 18 to 33 minutes and a cooling time of 8 to 33 minutes as one cycle, and then coating is performed for an additional 18 to 33 minutes, so that the coating is performed for four cycles.

[0019] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the cooling time is further increased from 8 minutes to 33 minutes after coating for 18 minutes to 33 minutes in the last cycle of forming the DLC coating layer.

[0020] In the above, the plasma cleaning is performed by supplying an inert gas such as Ar to a linear ion source at 50 to 300 sccm and applying 0.5 to 2.0 A and 1000 to 2000 V to generate plasma, and applying a bias current of 0.5 to 0.9 A and a bias voltage of 50 to 300 V to the rubber roller, thereby providing a method for forming a DLC coating layer on the surface of a rubber roller.

[0021] In the above, the formation of the buffer layer is performed using the first sputter source and the second sputter source,

[0022] An inert gas is supplied to the vacuum chamber at 100 to 300 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 7.5 to 8.5 minutes (step 1).

[0023] In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen at 6 to 8 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.25 to 0.35 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 2).

[0024] In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen is supplied at 9 to 11 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 3).

[0025] In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen at 12 to 14 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 4).

[0026] In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm, a hydrocarbon is supplied at 15 to 17 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 6.5 to 7.5 minutes (step 5).

[0027] A method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the cooling time is 18 to 22 minutes.

[0028] In the above, the DLC coating layer is formed using a linear ion source,

[0029] A method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that the method comprises applying 0.5 to 2.0 A and 1000 to 2000 V to a linear ion source, supplying hydrocarbon at 50 to 200 sccm, and forming DLC ​​with a rubber roller bias of 0.5 to 0.7 A and 50 to 300 V, repeating three cycles with a coating time of 18 to 33 minutes and a cooling time of 8 to 33 minutes as one cycle, and then applying an additional coating time of 18 to 33 minutes to perform the coating four times.

[0030] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that a cooling time of 8 to 33 minutes is additionally provided after the coating of 18 to 33 minutes in the last 4 cycles.

[0031] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that a gas containing F or a gas containing Si is further supplied to a linear ion source to coat DLC doped with F or Si.

[0032] A rubber roller manufactured by the above method is provided, wherein the surface roughness of the DLC coating layer coated on the rubber roller is Ra of 0.61 to 0.68 um.

[0033] A DLC coating material manufactured by the above method and present on the surface of a rubber roller is provided.

[0034] The above DLC coating material provides a DLC coating material present on the surface of a rubber roller, characterized in that the surface roughness Ra is 0.61 to 0.68 um.

[0035] In addition, the present invention,

[0036] A coating system that forms a DLC coating layer on the surface of a rubber roller,

[0037] vacuum chamber;

[0038] A linear ion source and a sputter source mounted in the above vacuum chamber;

[0039] An ion induction device including a magnet or electromagnet installed in the linear ion source to densify ions and plasma toward the rubber roller of the coating chain;

[0040] A raw material supply section for supplying raw materials to a linear ion source;

[0041] A jig that holds and rotates a rubber roller;

[0042] A power supply for supplying power to the linear ion source and sputter source and applying bias power to the rubber roller; and

[0043] Includes a process control unit for alternately performing the coating process and cooling process;

[0044] The above process control unit provides a coating system for forming a DLC coating layer on the surface of a rubber roller, characterized in that it controls a power supply to alternately repeat a deposition process and a cooling process for forming a DLC coating layer, thereby forming a DLC coating layer within a time limit that does not deform the surface of the rubber roller, and then provides a cooling time.

[0045] In the above, a method for forming a DLC coating layer on the surface of a rubber roller is provided, characterized in that a gas containing F or a gas containing Si is further supplied to a linear ion source to coat DLC doped with F or Si.

[0046] A rubber roller manufactured by the above method is provided, wherein the surface roughness of the DLC coating layer coated on the rubber roller is Ra of 0.61 to 0.68 um.

[0047] A DLC coating material manufactured by the above method and present on the surface of a rubber roller is provided.

[0048] The above DLC coating material provides a DLC coating material present on the surface of a rubber roller, characterized in that the surface roughness Ra is 0.61 to 0.68 um.

[0049]

[0050] According to the present invention, the problem of rubber roller surface hardening or cracking, and damage to the coating layer when tilting, which occurs in conventional rubber roller DLC coating using an ion source, is solved.

[0051] That is, the present invention prevents deformation of the rubber surface, which is vulnerable to heat and ultraviolet rays generated by ions and plasma generated by an ion source, heat generation within a process chamber, etc., by setting the coating time to a predetermined unit time and introducing a coolant gas into the chamber for an aging time after the coating unit time, thereby preventing deformation of the surface of the rubber roller and forming a high-quality DLC coating layer.

[0052] By alternating coating and aging in this way, a high-quality DLC coating can be formed on rubber materials that are prone to thermal deformation.

[0053] According to the present invention, the surface roughness of the DLC coating layer on the surface of the rubber roller is excellent in surface quality, with Ra being 0.61 to 0.68 um, Rz being 3.74 to 3.84 um, and Ry being 4.46 to 4.73 um.

[0054] In addition, according to the present invention, the hardness of the DLC coating layer on the surface of the rubber roller is enhanced to 13.5 to 28 GPa and 1300 to 2700 Hv, resulting in a long-term service life.

[0055] Figure 1 is a photograph showing a problem with surface hardening of a rubber roller and cracking and breakage of a rubber roller coating layer according to a prior art.

[0056] Figure 2 is a schematic diagram illustrating the hybrid plasma coating system of the present invention.

[0057] Figure 3 is a photograph of the surface before and after carbon coating is performed on the surface of a rubber roller according to the present invention.

[0058] Fig. 4 is a microscopic photograph showing that a stain (scratch) originally present on the surface of a rubber roller is covered by the carbon coating of the present invention.

[0059] FIG. 5 is a photograph showing a test (pressure test) of coating adhesion after carbon coating was applied to the surface of a rubber roller according to the present invention.

[0060] Figure 6 is a photograph showing a tilting test performed after carbon coating was applied to the surface of a rubber roller according to the present invention.

[0061] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0062] The rubber roller having a DLC coating layer formed by the present invention is an industrial rubber roller applicable to various industries, including secondary battery electrode manufacturing.

[0063] Rubber materials can include various materials such as NBR, EPDM, silicone, and polyurethane (PU).

[0064] Figure 1 is a photograph showing the problem of surface hardening of a rubber roller and the phenomenon of cracking and breakage of the rubber roller coating layer by the prior art. It shows scratches in the film manufactured by surface hardening of the rubber roller, cracks in the coating layer applied with DLC coating by ion source, and breakage of the coating layer in a tilting test. These problems occur even when the coating process is performed at room temperature. This is because the ions and plasma supplied into the chamber by the ion source independently generate heat and ultraviolet rays, forming the actual process temperature at around 70-80℃. In other words, although it starts as a room temperature process, the rubber roller surface deforms due to heat generation during the coating process, and the ultraviolet rays emitted by the plasma also contribute to the deformation of the rubber roller surface.

[0065] Therefore, in order to form a crack-free DLC coating layer on the surface of a rubber roller, the present invention performs coating and aging (cooling) as one unit cycle as a means of controlling heat generation during the coating process. That is, the ratio of the coating layer formation process time and the cooling time is 1: 1 / 3 to 1, so that deformation of the rubber roller is prevented and coating is performed. The method of alternately performing coating and aging can be applied to the PECVD (plasma enhanced chemical vapor deposition), ion plating, laser ablation, and filtered vacuum arc plasma coating processes known as methods for forming a DLC coating layer.

[0066] The present invention is based on plasma enhanced chemical vapor deposition (PECVD) using a linear ion source, and configures a hybrid plasma coating system that adds a PVD source (sputter source) to form a buffer layer, thereby performing DLC ​​coating using the above method. The buffer layer can be made of CrN / CrC, TiN / TiC, or WN / WC.

[0067] Figure 2 is a schematic diagram illustrating the hybrid plasma coating system of the present invention.

[0068] The hybrid plasma coating system combines a PVD source and a linear ion source. The linear ion source further includes a magnet-based (including electromagnet) ion induction device to densify the generated plasma around the rubber roller, which is the object to be coated. Two PVD sources and two linear ion sources can be arranged radially within the chamber.

[0069] The DLC coating process for a rubber roller using the above hybrid plasma coating system is as follows.

[0070] The rubber roller is loaded into the chamber and vacuumed (10 -4 ~10 -3torr), then, at room temperature, an inert gas such as Ar is supplied to a linear ion source at 50 to 300 sccm, and plasma is generated at 0.5 to 2.0 A and 1000 to 2000 V to perform plasma cleaning. The bias applied to the rubber roller can be approximately 0.5 to 0.9 A and 50 to 300 V. The shaft of the rubber roller can be biased with metal. The cleaning time is selected from 20 to 40 minutes, and the cooling time is selected from 15 to 30 minutes to provide a cooling time after plasma cleaning. In other words, the cleaning process time is selected and performed within the range where the surface of the rubber roller does not deform, and a cooling time is provided thereafter to protect the surface of the rubber roller. The cooling time can be created by stopping the process, or an inert gas at room temperature can be supplied at 80 to 100 sccm.

[0071] After cleaning, a buffer layer is formed using the PVD source of the plasma coating system.

[0072] The buffer layer is composed of a CrN layer and a CrC layer. That is, a CrN layer is formed on the base material, and a CrC layer is formed on top of that. Power is applied to the PVD source (equipped with Cr as a sputtering target), an inert gas such as Ar and nitrogen (N2) are supplied, and the process is performed while applying a bias to the rubber roller. After the buffer layer is formed, a cooling period is provided again.

[0073] In the formation of the CrN layer, only an inert gas (Ar) is initially supplied, and then the nitrogen supply is gradually increased to form a gradient layer. In the final stage of buffer layer formation, hydrocarbons are supplied to improve bonding strength.

[0074] That is, the inert gas is 100 to 300 sccm, the applied current is 5 to 20 A, the applied voltage is 300 to 1000 V to the first sputter source and the second sputter source (the voltage of the second sputter source can be slightly higher), the rubber roller bias is 0.3 to 0.5 A, and the applied voltage is 50 to 300 V, and the process is performed for 7.5 to 8.5 minutes (step 1).

[0075] Inert gas is 100 to 300 sccm, nitrogen is 6 to 8 sccm, applied current is 5 to 20 A, applied voltage is 300 to 1000 V to the first sputter source and the second sputter source (the voltage of the second sputter source can be slightly lowered), rubber roller bias is 0.25 to 0.35 A, 50 to 300 V, and performed for 3.5 to 4.5 minutes (step 2).

[0076] The inert gas is 100 to 300 sccm, nitrogen is 9 to 11 sccm, the applied current is 5 to 20 A, the applied voltage is 300 to 1000 V for the first sputter source and the second sputter source, the rubber roller bias is 0.3 to 0.5 A, and the applied voltage is 50 to 300 V for 3.5 to 4.5 minutes (step 3).

[0077] Inert gas is 100 to 300 sccm, nitrogen is 12 to 14 sccm, applied current is 5 to 20 A, applied voltage is 300 to 1000 V to the first sputter source and the second sputter source (the applied voltage of the second sputter source can be slightly higher), rubber roller bias is 0.3 to 0.5 A, 50 to 300 V, and performed for 3.5 to 4.5 minutes (step 4).

[0078] The process is performed for 6.5 to 7.5 minutes (step 5) with an inert gas of 100 to 300 sccm, a hydrocarbon (C2H2) of 15 to 17 sccm, an applied current of 5 to 20 A, an applied voltage of 300 to 1000 V for the first sputter source and the second sputter source, and a rubber roller bias of 0.3 to 0.5 A and 50 to 300 V.

[0079] The cooling time is 18 to 22 minutes. During this time, an inert gas at room temperature may be supplied or the mixture may be left to rest without gas supply.

[0080] In the above case, when the buffer layer is made of TiN / TiC, the same process is performed with Ti as the target for the sputter source. In addition, when the buffer layer is made of WN / WC, the same process is performed with W as the target for the sputter source.

[0081] Next, DLC is coated on the buffer layer.

[0082] Each linear ion source (this embodiment has two linear ion sources) is supplied with 0.5 to 2.0 A and 1000 to 2000 V, a hydrocarbon (C2H2, etc.) of 50 to 200 sccm is supplied, and the rubber roller bias is set to 0.5 to 0.7 A and 50 to 300 V to form DLC, and the coating is repeated four times with a coating time of 18 to 33 minutes and a cooling time of 8 to 33 minutes as one cycle. In the last cycle, a cooling time after coating of 18 to 33 minutes may be omitted.

[0083] By alternating coating and aging in this way, a high-quality DLC coating can be formed on rubber materials that are prone to thermal deformation.

[0084] Meanwhile, by supplying hydrocarbon gas, CF4 gas, and at least one of TMS (Tetramethylsilane), SiH4, Si2H6, or SiH2Cl2 to the raw material supply section of the linear ion source, and additionally supplying hydrogen (H2) to form a reducing atmosphere, a ternary nanocomposite coating layer can be formed on the surface of the rubber roller by repeating coating and cooling.

[0085] The above process is performed with the following coating system.

[0086] vacuum chamber;

[0087] A linear ion source and a sputter source mounted in the above vacuum chamber;

[0088] An ion induction device including a magnet or electromagnet installed in the linear ion source to densify ions and plasma toward the rubber roller of the coating chain;

[0089] A raw material supply section for supplying raw materials to a linear ion source;

[0090] A jig that holds and rotates a rubber roller;

[0091] A power supply for supplying power to a linear ion source and a sputter source or an ion induction device, and applying bias power to a rubber roller; and

[0092] Includes a process control unit for alternately performing the coating process and cooling process;

[0093] The above process control unit controls a power supply to alternately repeat a deposition process and a cooling process for forming a DLC coating layer, thereby forming a DLC coating layer within a time limit that does not deform the surface of the rubber roller, and then providing a cooling time, thereby forming a DLC coating layer on the surface of a rubber roller, characterized in that the coating system is characterized by:

[0094] As described above, the above process control unit controls the process time and aging time (cooling time) to be alternately applied in the plasma cleaning and buffer layer formation processes.

[0095] The surface roughness of the DLC coating layer manufactured according to the present invention is Ra of 0.61 to 0.68 um, Rz of 3.74 to 3.84 um, and Ry of 4.46 to 4.73 um.

[0096] The DLC thickness can be 0.3 to 5.0 um. The buffer layer thickness can be 0.2 to 1.0 um.

[0097] In addition, according to the present invention, the hardness of the DLC coating layer on the surface of the rubber roller is enhanced to 13.5 to 28 GPa and 1300 to 2700 Hv, resulting in a long-term service life.

[0098] In the above, when forming a DLC coating layer, F-DLC, Si-DLC, or DLC doped with F and Si can be formed by further supplying F-containing gas and / or Si-containing gas to the linear ion source.

[0099] Figure 3 is a photograph of the surface of a rubber roller before and after carbon coating according to the present invention. It can be visually confirmed that the coating surface is uniform and of excellent quality.

[0100] Fig. 4 is a microscopic photograph showing that a stain (scratch) originally present on the surface of a rubber roller is covered by the carbon coating of the present invention.

[0101] Figure 5 is a photograph showing the results of a test (indentation test) of coating adhesion after carbon coating was applied to the surface of a rubber roller according to the present invention. Results for HF1 and HF3 were shown.

[0102] Figure 6 is a photograph showing a tilting test performed on a rubber roller surface after carbon coating according to the present invention. Even when observed under an optical microscope, no cracking of the coating occurs during tilting.

[0103]

[0104] In this way, a DLC coating layer with high hardness, low friction, and chemical resistance can be implemented with excellent quality on the surface of a rubber roller that is vulnerable to heat generation.

[0105]

[0106] Unless otherwise defined in the foregoing, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention pertains. Furthermore, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise. Throughout the specification, when a part is said to "include" a certain component, this does not exclude other components, but rather means that other components may be included, unless otherwise specifically stated. Furthermore, the singular may include the plural, depending on the context.

[0107] Additionally, in this specification, “above, above, or above,” “below,” or “below” means located above or below the target part, and does not necessarily mean located above or below with respect to the direction of gravity.

[0108]

[0109] The rights of the present invention are not limited to the embodiments described above, but are defined by the claims, and it is obvious that a person skilled in the art can make various modifications and productions within the scope of the rights described in the claims.

[0110]

[0111] The present invention can be applied to industrial rubber-coated rolls, i.e., rubber-coated rolls for secondary battery manufacturing processes, various rubber-coated rolls used in various film manufacturing industries, ringer rolls for pickling lines for metal surface treatment, etc.

Claims

1. A method for forming a DLC coating layer on the surface of a rubber roller, A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that a deposition process and a cooling process for forming a DLC coating layer are alternately repeated, a DLC coating layer is formed for a time period within a limit that does not deform the surface of the rubber roller, and then a cooling time is provided.

2. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that in paragraph 1, the ratio of the deposition process time for forming the DLC coating layer and the cooling process time is 1: 1 / 3 to 1.

3. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that the method for forming a DLC coating layer in the first paragraph is any one of PECVD (plasma enhanced chemical vapor deposition), ion plating, laser ablation, and filtered vacuum arc plasma.

4. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that in the first paragraph, the formation of the DLC coating layer is performed in a vacuum chamber, the rubber roller is loaded into the vacuum chamber and vacuumized, and then plasma cleaning is performed before vacuum deposition for forming the DLC coating layer, and the plasma cleaning is performed by flowing an inert gas into the vacuum chamber and generating plasma, selecting a cleaning time of 20 to 40 minutes, and selecting a cooling time of 15 to 30 minutes, thereby having a cooling time after the plasma cleaning.

5. In the fourth paragraph, after a cooling time has elapsed after plasma cleaning, a buffer layer is formed before the formation of the DLC coating layer, and the buffer layer includes any one of CrN and CrC, TiN and TiC, or WN and WC, and is formed using a PVD source equipped with any one of Cr, Ti, or W as a sputter target. The formation of the CrN, TiN, or WN layer is performed by applying power to a PVD source equipped with a sputtering target and supplying inert gas and nitrogen (N2). In the initial stage of the formation of the CrN, TiN, or WN layer, only the inert gas is supplied, and then the supply of nitrogen (N2) is gradually increased to form a gradient layer. The formation of CrC, TiC, or WC layers is formed by applying power to a PVD source equipped with a sputter target and supplying an inert gas and a hydrocarbon gas. Give it a cooling time, A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that the ratio of the buffer layer forming process time and the cooling time is 1: 1 / 3 to 1.

6. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that in paragraph 5, a buffer layer is formed, then a hydrocarbon is supplied to a linear ion source, and a bias is applied to a rubber roller to form DLC, and coating is performed by repeating three cycles with a coating time of 18 to 33 minutes and a cooling time of 8 to 33 minutes as one cycle, and then coating is performed for an additional 18 to 33 minutes, so that the coating is performed in four cycles.

7. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that in the last cycle of forming a DLC coating layer, a cooling time of 8 to 33 minutes is further provided after coating for 18 to 33 minutes.

8. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that in the fourth paragraph, plasma cleaning is performed by supplying an inert gas such as Ar to a linear ion source at 50 to 300 sccm and applying 0.5 to 2.0 A and 1000 to 2000 V to generate plasma, and applying a bias current of 0.5 to 0.9 A and a bias voltage of 50 to 300 V to the rubber roller.

9. [Correction pursuant to Article 91 of the Rules, May 8, 2025] In the fifth paragraph, the formation of the buffer layer is performed using a first sputter source and a second sputter source, An inert gas is supplied to the vacuum chamber at 100 to 300 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 7.5 to 8.5 minutes (step 1). In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen at 6 to 8 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.25 to 0.35 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 2). In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen is supplied at 9 to 11 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 3). In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm and nitrogen at 12 to 14 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 3.5 to 4.5 minutes (step 4). In the vacuum chamber, an inert gas is supplied at 100 to 300 sccm, a hydrocarbon is supplied at 15 to 17 sccm, a current of 5 to 20 A and a voltage of 300 to 1000 V are applied to the first sputter source and the second sputter source, and a bias current of 0.3 to 0.5 A and a bias voltage of 50 to 300 V are applied to the rubber roller, and the process is performed for 6.5 to 7.5 minutes (step 5). A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that the cooling time is 18 to 22 minutes.

10. In the third paragraph, the DLC coating layer is formed using a linear ion source, A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that the method comprises applying 0.5 to 2.0 A and 1000 to 2000 V to a linear ion source, supplying hydrocarbon at 50 to 200 sccm, and forming DLC ​​with a rubber roller bias of 0.5 to 0.7 A and 50 to 300 V, repeating three cycles with a coating time of 18 to 33 minutes and a cooling time of 8 to 33 minutes as one cycle, and then applying an additional coating time of 18 to 33 minutes to perform the coating four times.

11. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that, in the 10th paragraph, a cooling time of 8 to 33 minutes is additionally provided after the coating of 18 to 33 minutes in the last 4 cycles.

12. A method for forming a DLC coating layer on the surface of a rubber roller, characterized in that, in paragraph 6, a gas containing F or a gas containing Si is further supplied to a linear ion source to coat DLC doped with F or Si.

13. A rubber roller manufactured by the method of any one of claims 1 to 12, wherein the surface roughness of the DLC coating layer coated on the rubber roller is Ra of 0.61 to 0.68 um.

14. A DLC coating material produced by the method of any one of claims 1 to 12 and present on the surface of a rubber roller.

15. The DLC coating material of Article 14 is a DLC coating material present on the surface of a rubber roller, characterized in that the surface roughness Ra is 0.61 to 0.68 um.

16. A coating system that forms a DLC coating layer on the surface of a rubber roller, vacuum chamber; A linear ion source and a sputter source mounted in the above vacuum chamber; An ion induction device including a magnet or electromagnet installed in the linear ion source to densify ions and plasma toward the rubber roller of the coating chain; A raw material supply section for supplying raw materials to a linear ion source; A jig that holds and rotates a rubber roller; A power supply for supplying power to the linear ion source and sputter source and applying bias power to the rubber roller; and Includes a process control unit for alternately performing the coating process and cooling process; A coating system for forming a DLC coating layer on the surface of a rubber roller, characterized in that the above process control unit controls a power supply to alternately repeat a deposition process and a cooling process for forming a DLC coating layer, thereby forming a DLC coating layer within a time limit that does not deform the surface of the rubber roller, and then providing a cooling time.

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