Humidity control equipment using fan member of facility to be dehumidified

Abstract

The humidity control equipment using a fan member of a facility to be dehumidified, which is humidity control equipment for performing humidity control on a clean room or a facility in the clean room, comprises desiccant rotors for supplying dehumidified air to the inside of the clean room or the facility by adsorbing, by means of an adsorbent, moisture of air introduced by the fan member installed in the clean room or the facility.

Description

Humidity control equipment using a fan absence in the dehumidification target facility

[0001] The present invention relates to a humidity control device using a fan member of a dehumidification target facility, and more specifically, to a humidity control device using a fan member of a dehumidification target facility that introduces air into a desiccant rotor through a fan member installed in the dehumidification target facility.

[0002] Typically, cluster equipment in semiconductor processes uses various chemical gases during the process, and at this time, gases and vapors remain on the wafers after the process is completed inside the chamber.

[0003] Therefore, when unloading, if the gas or fume remaining in the FOUP (Front Opening Unified Pod: semiconductor process storage container) reacts with moisture, particles or defects may occur on the wafer.

[0004] The environmental conditions inside the existing EFEM (Equipment Front End Module) are such that the air inside the FAB is supplied through the FFU (Fan Filter Unit) without humidity control, so the humidity in the air and the residual gas on the wafer can easily react, easily creating particles or defects. In addition, since the process time usually takes about an hour in certain processes, the wafer waits in the FFU for a long time, so the residual gas on the wafer reacts with the non-humidified air inside the EFEM, creating problems such as particle generation and a decrease in yield.

[0005] Considering these points, recently, dehumidifying equipment equipped with a desiccant rotor has been used to dehumidify air and then supply the dehumidified air to the return room of the EFEM (see Korean Patent Application No. 10-2022-0040397).

[0006] However, since these dehumidifying equipments include a dehumidifying fan that introduces air into a desiccant rotor (dehumidifying area) and a regeneration fan that directs air to become regeneration air into the desiccant rotor (regeneration area), the size of the dehumidifying equipments increases, which limits the installation space.

[0007] Additionally, conventional dehumidification equipment has been difficult to install in facilities such as existing EFEMs.

[0008] To solve these problems, there is a growing need for humidity control equipment that utilizes the fan absence of the dehumidification target equipment, miniaturizing the dehumidification equipment by minimizing the number of fans that bring in air and making installation easier.

[0009] The problem to be solved by the present invention is to provide a humidity control device using a fan member of a dehumidification target device, which supplies air to a desiccant rotor by using the fan member of the dehumidification target device, thereby miniaturizing the dehumidification device and providing convenience of installation.

[0010] The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

[0011] According to one embodiment of the present invention for solving the above problem, a humidity control device using a fan member of a dehumidification target facility is a humidity control device that performs humidity control for a clean room or a facility within a clean room, and the humidity control device includes a desiccant rotor that adsorbs moisture in air introduced by a fan member installed in the clean room or facility with an adsorbent and supplies dehumidified air into the interior of the clean room or facility.

[0012] According to the present invention, a humidity control device using a fan member of a dehumidification target device can be provided, which supplies air to a desiccant rotor by using a fan member of a dehumidification target device, thereby miniaturizing the dehumidification device and providing convenience of installation.

[0013] FIG. 1 is a perspective view of a humidity control device according to one embodiment of the present invention.

[0014] Figure 2 is a cross-sectional view of Figure 1.

[0015] Figure 3 is a plan view of the humidity control equipment.

[0016] Figure 4 is a front view of the humidity control equipment.

[0017] FIG. 5 is a drawing of a filter member installed on the upper part of a humidity control device positioned on a plurality of fan filter units (FFUs).

[0018] Figure 6 is a drawing of a humidity control device installed on top of a fan filter unit (FFU) equipped in a clean room or facility without including a separate filter member.

[0019] Figure 7 is a drawing of a humidity control device installed so that a fan filter unit is positioned at the top of the humidity control device and a ULPA filter is positioned at the bottom of the humidity control device without including a separate filter member.

[0020] Figure 8 is a drawing of a humidity control device installed to be mounted in a supply hood without including a separate filter element.

[0021] Figure 9 is a perspective view of a humidity control device according to another embodiment of the present invention.

[0022] Figure 10 is a cross-sectional view of Figure 9.

[0023] FIG. 11 is a drawing showing a method of controlling the flow rate of regenerative air discharged to the outside by adjusting the degree to which a hole is opened by sliding at least one of the first plate and the second plate of the exhaust volume control member.

[0024] Figure 12 is a drawing showing one form of a rotational displacement control member.

[0025] Figure 13 is a drawing showing one form of a detachable exhaust volume control member.

[0026] Figure 14 is a drawing showing a humidity control device including two regenerative heaters and one regenerative fan.

[0027] Figure 15 is a drawing showing a humidity control device including two regenerative heaters and two regenerative fans.

[0028] Figure 16 is a drawing showing a dehumidification area, a regeneration area, and a purge area formed on a desiccant rotor.

[0029] Figure 17 is a drawing showing how outside air is introduced into the purge area of ​​a desiccant rotor and the regeneration air that has undergone regeneration is exhausted to the outside.

[0030] According to one embodiment of the present invention for solving the above problem, a humidity control device using a fan member of a dehumidification target facility is a humidity control device that performs humidity control for a clean room or a facility within a clean room, and the humidity control device includes a desiccant rotor that adsorbs moisture in air introduced by a fan member installed in the clean room or facility with an adsorbent and supplies dehumidified air into the interior of the clean room or facility.

[0031] The present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform a person having ordinary skill in the art to which the present invention pertains of the scope of the invention.

[0032] In this specification, the singular includes the plural unless the context specifically dictates otherwise. As used herein, the terms "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, or operations.

[0033] Referring to FIGS. 1 to 5, a humidity control device using a fan member of a dehumidification target facility according to one embodiment of the present invention is described.

[0034] FIG. 1 is a perspective view of a humidity control device according to one embodiment of the present invention. FIG. 2 is a cross-sectional view of FIG. 1. FIG. 3 is a plan view of the humidity control device. FIG. 4 is a front view of the humidity control device. FIG. 5 is a drawing of a filter member installed on the upper portion of the humidity control device located on a plurality of fan filter units (FFUs).

[0035] Referring to FIGS. 1 to 5, a humidity control device using a fan member of a dehumidification target facility according to one embodiment of the present invention is a humidity control device that performs humidity control for a clean room or a facility within a clean room.

[0036] Facilities within a cleanroom may include an Equipment Front End Module (EFEM) including a transfer room, which is a space where objects to be processed are returned to a process module. The humidity control device according to the present invention is detachable from the upper portion of the EFEM and can be mounted on the EFEM to control the humidity in the transfer room.

[0037] A humidity control device (10) according to one embodiment of the present invention includes a housing (20), a desiccant rotor (30, 40), a regenerative fan (50), a regenerative heater (60), a cooling low-humidity medium supply device (70), an airflow equalization plate (80), and a filter member (90, 95).

[0038] The housing (20) can form the outer shape of the humidity control device (10), and each component described later can be arranged inside. Meanwhile, each component arranged inside the housing (20) can be inserted and withdrawn from the housing (20) through a storage plate or a sliding rail, or a cover such as a car hood can be formed on the housing (20), and each component can be inserted and withdrawn after opening the cover.

[0039] In this way, each component can be freely inserted and removed, making maintenance, repair, and replacement of each component easy.

[0040] A desiccant rotor (30, 40) is a dehumidifying rotor that absorbs moisture in air (P) introduced by a fan member installed in a clean room or facility with an adsorbent and supplies dehumidified air to the interior of the clean room or facility.

[0041] In this regard, for example, during the semiconductor process, various chemical gases are used, and at this time, gases and vapors may remain on the wafers that have completed the process inside the return room of the EFEM.

[0042] That is, problems such as reduced yield may occur, such as the generation of particles by the reaction between residual gas on the wafer and the non-humidified air inside the EFEM.

[0043] To solve these problems, it is necessary to control the humidity in the return room, and in the case of the present invention, a desiccant rotor (30, 40) can be used to control the humidity.

[0044] For this purpose, the desiccant rotor (30, 40) may include an adsorbent, and as air (P) introduced by a fan member installed in a clean room or facility passes through the desiccant rotor (30, 40), moisture contained in the air (P) is adsorbed to the adsorbent, so that the air (P) can become dehumidified air (D).

[0045] This adsorption phenomenon is caused by a force greater than the attractive force that occurs between molecules during condensation, which acts on the surface of the adsorbent, generating heat greater than the heat of condensation. This is called the heat of adsorption, and is approximately 1.5 to 2 times the heat of condensation.

[0046] Therefore, the dehumidified air (D) exiting the desiccant rotor (30, 40) can be heated by the heat of adsorption and have a relatively high temperature.

[0047] Meanwhile, adsorbents include, but are not limited to, silica gel or zeolite.

[0048] In addition, the desiccant rotor (30, 40) can be rotated by a driving motor, and by this rotation, the adsorption portion of the desiccant rotor (30, 40) that has adsorbed moisture in the air (P) can move from the dehumidification zone to the regeneration zone (RZ) so that moisture can be removed by the regeneration air (R), and the adsorption portion that has been regenerated through the rotation can move to the dehumidification zone again.

[0049] Additionally, in the case of the present invention, a separate fan may not be provided to introduce air (P) into the desiccant rotor (30, 40), and instead, air may be supplied to the desiccant rotor (30, 40) through a fan member installed in a clean room or facility.

[0050] As such a fan absence, there may be a fan filter unit (100, 110) equipped in the EFEM, but is not limited thereto (see FIG. 6).

[0051] In this way, the present invention can miniaturize the desiccant dehumidifying device because there is no fan member for introducing air (P) into the desiccant rotor (30, 40), so that there may be no restrictions on installation space.

[0052] In particular, the space where semiconductor manufacturing processes are performed is cramped due to various process facilities, making it difficult to transport and install conventional dehumidifying equipment. However, the present invention can solve this problem by reducing the size of the dehumidifying device.

[0053] In addition, in one form, the desiccant rotor (30, 40) may take the form of a dual rotor, including a first desiccant rotor (30) and a second desiccant rotor (40) located at the side of the first desiccant rotor (30).

[0054] In this case, even if one desiccant rotor (30, 40) breaks down or requires inspection, dehumidification operation can be performed through the remaining desiccant rotor (30, 40).

[0055] The regeneration fan (50) is a fan that draws air to become regeneration air (R) into the housing (20) and supplies it to the regeneration heater (60).

[0056] In one form, such a regenerative fan (50) may be positioned between the first desiccant rotor (30) and the second desiccant rotor (40).

[0057] In addition, the regeneration fan (50) and the regeneration heater (60) are not limited to the aforementioned installation locations and may have various installation locations, and the number of installations may also vary.

[0058] As illustrated in FIG. 14, the desiccant rotor may include a first desiccant rotor (30) and a second desiccant rotor (40) positioned at the side of the first desiccant rotor (30), and the regenerative heater may include a first regenerative heater (65) that supplies regenerative air to the first desiccant rotor (30) and a second regenerative heater (63) that supplies regenerative air to the second desiccant rotor (40).

[0059] Additionally, the regeneration fan (55) can be positioned below the first regeneration heater (65) and the second regeneration heater (63) to supply air to the first regeneration heater (65) and the second regeneration heater (63).

[0060] In one form, there may be two regenerative heaters (63, 65) between the first desiccant rotor (30) and the second desiccant rotor (40), and accordingly, the first desiccant rotor (30) and the second desiccant rotor (40) may each have their own assigned regenerative heaters (63, 65).

[0061] At this time, one regeneration fan (55) can be positioned between the two regeneration heaters (63, 65) at the bottom of the two regeneration heaters (63, 65), and this regeneration fan (55) can supply air to the regeneration heaters (63, 65) on both sides to generate regeneration air (R).

[0062] Alternatively, as illustrated in FIG. 15, the desiccant rotor may include a first desiccant rotor (30) and a second desiccant rotor (40) positioned laterally of the first desiccant rotor (30), and the regenerative heater may include a first regenerative heater (65) supplying regenerative air to the first desiccant rotor (30) and a second regenerative heater (63) supplying regenerative air to the second desiccant rotor (40).

[0063] The regeneration fan may include a first regeneration fan (53) positioned below the first regeneration heater (65) and supplying air to the first regeneration heater (65), and a second regeneration fan (51) positioned below the second regeneration heater (63) and supplying air to the second regeneration heater (63).

[0064] In one form, there may be two regenerative heaters (63, 65) between the first desiccant rotor (30) and the second desiccant rotor (40), and accordingly, the first desiccant rotor (30) and the second desiccant rotor (40) may each have their own assigned regenerative heaters (63, 65).

[0065] At this time, the two regeneration fans (51, 53) can be positioned below the regeneration heaters (63, 65) assigned to them among the two regeneration heaters (63, 65), and each regeneration fan (51, 53) can supply air to the assigned regeneration heaters (63, 65) to generate regeneration air (R).

[0066] The regeneration heater (60) is a heater that heats the air introduced by the regeneration fan (50) to generate regeneration air (R), thereby removing moisture adsorbed by the adsorbent of the desiccant rotor (30, 40) from the regeneration air (R).

[0067] In one form, such a regenerative heater (60) may be positioned above a regenerative fan (50) located between the first desiccant rotor (30) and the second desiccant rotor (40).

[0068] In this case, the regeneration heater (60) can heat the air supplied by the regeneration fan (50) and provide it to the first desiccant rotor (30) and the second desiccant rotor (40) located on both sides.

[0069] Thereafter, the generated regeneration air (R) can pass through the desiccant rotor (30, 40) through the regeneration zone (RZ) of the desiccant rotor (30, 40), and at this time, the regeneration air (R) can rotate to remove moisture from the adsorbent that has come to the regeneration zone (RZ).

[0070] The cooling low-humidity medium supply equipment (70) is equipment that supplies the cooling low-humidity medium (C) with dehumidified air (D) flowing from the desiccant rotor (30, 40) into the interior of the clean room or facility.

[0071] As the dehumidified air (D) is supplied with a cooling low-humidity medium (C) before the dehumidified air (D) enters the interior of the clean room or facility, the dehumidified air (D) having a relatively high temperature can be cooled by mixing with the cooling low-humidity medium (C), thereby lowering its temperature.

[0072] Additionally, at the same time, the dehumidified air (D) can be dehumidified and its humidity can be lowered, making it a little drier.

[0073] Through this cooling and dehumidification process, the dehumidified air (D) can be supplied to the interior of the clean room or facility (return room in the case of EFEM) at an appropriate temperature and humidity.

[0074] A cooling low-humidity medium supply line can be used as the cooling low-humidity medium supply equipment (70), and a heat exchanger such as a sensible heat exchanger can also be applied.

[0075] Meanwhile, cooling low-humidity media (C) may include natural ventilation (or outside air), CDA (Clean Dry Air), nitrogen gas, mixed gas, cooling water, etc.

[0076] In particular, the cooling low-humidity medium (C) may include one or more of CDA, nitrogen gas, and a mixed gas.

[0077] Here, a mixed gas may refer to a gaseous form containing two or more gases. For example, there are a mixed gas of N2 and Ar, a mixed gas of N2 and He, a mixed gas of Ar and O2, a mixed gas of N2, Ar, and O2, a mixed gas of N2, Ar, and He, etc.

[0078] In addition, as shown in FIG. 3, the cooling low-humidity medium supply equipment (70) can supply the cooling dehumidifying medium (C) toward the desiccant rotor (30, 40).

[0079] Meanwhile, the desiccant rotor (30, 40) may have a dehumidifying zone for dehumidifying air, a regeneration zone (RZ) for removing moisture from the adsorbent, and a cooling zone (CZ) for cooling and dehumidifying the portion of the rotor that has passed through the regeneration zone (RZ).

[0080] The cooling low-humidity medium supply device (70) can supply the cooling low-humidity medium (C) to the cooling zone (CZ) of the desiccant rotor (30, 40), and accordingly, the cooling low-humidity medium (C) can cool and dehumidify a portion of the rotor that has passed through the regeneration zone (RZ).

[0081] Therefore, regeneration of the desiccant rotor (30, 40) can be more activated to increase the dehumidification amount.

[0082] Alternatively, as illustrated in FIGS. 16 and 17, the desiccant rotor (30, 40) may have a dehumidification zone for dehumidifying air, a regeneration zone (RZ) for removing moisture from the adsorbent, and a purge zone (PZ) for cooling the portion of the rotor that has passed through the regeneration zone (RZ).

[0083] As outside air is supplied to the purge zone (PZ) for cooling, the outside air can cool the portion of the rotor that has passed through the regeneration zone (RZ).

[0084] The airflow equalization plate (80) is a plate having a plurality of holes formed therein, and allowing dehumidified air with an airflow equalized through the holes to flow into the interior of a clean room or facility.

[0085] That is, the airflow equalization plate (80) may be a perforated plate having multiple holes formed therein.

[0086] That is, the dehumidified air (D) coming out of the desiccant rotor (30, 40) can be directed into the interior of a clean room or equipment, and before being introduced into the interior of the clean room or equipment, the air flow can be uniformized by passing through the holes of the air flow uniformization plate (80) and then directed into the interior of the clean room or equipment.

[0087] The filter member (90, 95) is a member that filters the air flowing into the desiccant rotor (30, 40) and supplies it to the desiccant rotor (30, 40), or filters the dehumidified air (D) provided by the desiccant rotor (30, 40) and supplies the dehumidified air (D) to the inside of a clean room or facility.

[0088] As shown in FIG. 5, a filter member (90, 95) is installed on the upper portion of the desiccant rotor (30, 40) to purify the air flowing into the desiccant rotor (30, 40) and supply it to the desiccant rotor (30, 40).

[0089] Alternatively, the filter element may be positioned at the bottom of the desiccant rotor (30, 40) and filter the dehumidified air (D) provided by the desiccant rotor (30, 40) and then supply the dehumidified air (D) to the inside of the clean room or facility.

[0090] That is, the filter member (90, 95) can supply filtered clean air to the desiccant rotor (30, 40) or the interior of the clean room / facility.

[0091] These filter elements (90, 95) may be particle filters, chemical filters or ULPA (Ultra Low Particulate Air) filters.

[0092] Above, each configuration of the humidity control device according to one embodiment of the present invention has been described. Hereinafter, various installation configurations of the humidity control device will be examined with reference to FIGS. 6 to 8.

[0093] Referring to FIG. 6, FIG. 6 is a drawing showing a humidity control device installed on top of a fan filter unit (FFU) equipped in a clean room or facility without including a separate filter member.

[0094] A humidity control device (10) according to one embodiment of the present invention may be installed on top of a filter unit provided in a clean room or facility without including a separate filter member. Such a filter unit may include a fan filter unit (FFU) (100, 110).

[0095] That is, in order to install the humidity control equipment (10), the humidity control equipment (10) can be positioned at the top of a clean room or facility, so the humidity control equipment (10) of the present invention is easy to install.

[0096] Alternatively, referring to FIG. 7, FIG. 7 is a drawing showing a humidity control device installed with a fan filter unit positioned at the top of the humidity control device and a ULPA filter positioned at the bottom of the humidity control device without including a separate filter member.

[0097] A humidity control device (10) according to one embodiment of the present invention can be installed in an EFEM having a fan filter unit (100, 110) and a filter unit.

[0098] At this time, the humidity control device (10) may be installed so that the fan filter unit (100, 110) is positioned at the top of the humidity control device (10) and the filter unit is positioned at the bottom of the humidity control device, without including a separate filter member. At this time, the filter unit may include a ULPA filter (120, 130).

[0099] Alternatively, referring to FIG. 8, FIG. 8 is a drawing of a humidity control device installed to be mounted in a supply hood without including a separate filter element.

[0100] In this case, the humidity control equipment (10) can be installed in an EFEM equipped with a return room.

[0101] The humidity control device (10) can be installed so as to be mounted on the supply hood (140, 150) located on the upper part of the filter unit provided in the EFEM without including a separate filter member.

[0102] Here, the filter unit equipped in the EFEM may be a fan filter unit (100, 110), a chemical filter, or a ULPA filter (120, 130).

[0103] At this time, the supply hood (140, 150) may include an outside air intake unit that, depending on the operating conditions of the EFEM, introduces outside air and supplies it to the return room, thereby forming positive pressure in the return room.

[0104] The outside air intake unit is a bypass structure that introduces outside air and supplies it to the return room, depending on the operating conditions of the EFEM, thereby creating positive pressure in the return room.

[0105] If the aforementioned humidity control device (10) operates normally, the dehumidified air (D) provided by the humidity control device (10) is supplied to the return room, so that the return room can maintain positive pressure.

[0106] However, depending on the operating conditions of the EFEM, the dehumidified air (D) is not supplied to the return room or is supplied insufficiently to the standard value, so the return room cannot maintain positive pressure, and as a result, various processes cannot be performed.

[0107] In this case, in order to maintain positive pressure in the return room, it is necessary to introduce outside air instead of dehumidified air (D) into the return room to maintain positive pressure.

[0108] Here, outside air can refer to the air inside a clean room where various semiconductor process-related equipment, such as EFEM, are installed.

[0109] The present invention can make the return room positively pressurized by introducing outside air through an outside air introduction unit and supplying it to the return room according to the operating conditions of the EFEM.

[0110] That is, the process can continue by ensuring that the return room is under positive pressure even if some degree of humidity control is sacrificed.

[0111] The operating situation of this EFEM may be a situation where the operation of the humidity control equipment (10) is stopped due to a power outage or breakdown.

[0112] In this case, the dehumidified air (D) cannot flow into the return room, and accordingly, the return room cannot maintain positive pressure.

[0113] Alternatively, it may be a situation where the speed of the inflowing air measured by a wind speed sensor installed within the humidity control device (10) or within the facility to which the humidity control device (10) is applied is less than a reference value (e.g., less than 1 m / s).

[0114] In this case, even if dehumidified air (D) is supplied to the return room, a small amount is supplied to the return room, making it difficult for the return room to maintain positive pressure.

[0115] Looking at the form of this external air intake unit, the external air intake unit may be plate-shaped, and one side of the external air intake unit may be hinge-connected to the supply hood (140, 150).

[0116] Under this combined structure, when the operating situation of the aforementioned EFEM occurs, the outside air intake unit can open the inside of the supply hood (140, 150) by rotating outward around one hinged side, thereby allowing outside air to be introduced into the inside of the supply hood (140, 150).

[0117] Alternatively, looking at another form of the external air intake unit, the external air intake unit may be plate-shaped, and the external air intake unit may close or open the interior of the supply hood (140, 150) by sliding up and down or left and right.

[0118] Under this combined structure, when the operating situation of the aforementioned EFEM occurs, the outside air intake unit can slide to open the inside of the supply hood (140, 150) so that outside air can be introduced into the inside of the supply hood (140, 150).

[0119] Alternatively, looking at another form of the outdoor air intake unit, the outdoor air intake unit may include an outdoor air intake window, a plurality of openings formed in the outdoor air intake window to introduce outdoor air, and an opening ratio adjustment plate positioned in front or behind the outdoor air intake window to adjust the number of openings to be opened among the plurality of openings or the opening area of ​​the openings to be opened.

[0120] At this time, the opening ratio adjustment plate can adjust the number of openings to be opened among a plurality of openings or the opening area of ​​the openings to be opened through any one of a sliding method, a detachable method, or a rotating method.

[0121] In addition to the form of the above-mentioned external air intake unit, various forms of external air intake units can be applied.

[0122] Above, a humidity control device using a fan member of a dehumidification target facility according to one embodiment of the present invention has been described. Hereinafter, a humidity control device using a fan member of a dehumidification target facility according to another embodiment of the present invention will be described with reference to FIGS. 9 to 11.

[0123] Fig. 9 is a perspective view of a humidity control device according to another embodiment of the present invention. Fig. 10 is a cross-sectional view of Fig. 9. Fig. 11 is a drawing showing a state in which the flow rate of regenerative air discharged to the outside is controlled by adjusting the degree to which a hole is opened by sliding at least one of the first plate and the second plate of the exhaust volume control member.

[0124] Referring to FIGS. 9 to 11, a humidity control device (160) using a fan member of a dehumidification target facility according to another embodiment of the present invention may further include an exhaust volume control member (170, 175) in addition to the configuration of the humidity control device (10) according to one embodiment of the present invention described above.

[0125] The exhaust volume control member (170, 175) may be a member that controls the flow rate of regeneration air (R) discharged to the outside through an exhaust port formed in the housing (20).

[0126] This exhaust volume control member (170) may include a first plate (180) having a plurality of holes (185) formed therein, and a second plate (190) positioned in front or behind the first plate (180) with respect to the discharge direction of the regeneration air (R) and having a plurality of holes (195) formed therein.

[0127] By sliding one or more of the first plate (180) and the second plate (190), the degree to which the holes (185, 195) of each plate are opened can be adjusted, and accordingly, the flow rate of regeneration air (R) discharged to the outside can be adjusted.

[0128] Referring to FIG. 11, in FIG. 11(a), the first plate (180) and the second plate (190) can be positioned to overlap with respect to the discharge direction of the regeneration air (R), and the hole (815) of the first plate (180) and the hole (195) of the second plate (190) can be aligned.

[0129] In this case, the holes (185, 195) of each plate are not covered, so the largest amount of regeneration air (R) can be discharged to the outside through the exhaust port.

[0130] In Fig. 11(b), the first plate (180) can slide so that part or all of the hole (185) of the first plate (180) and the hole (195) of the second plate (190) can be covered.

[0131] In this case, part of the holes (185, 195) of each plate are covered, so that a relatively small amount of regeneration air (R) can be discharged to the outside through the exhaust port.

[0132] Meanwhile, in addition to the sliding type, which is a horizontal movement method between plates as described above, the form of the exhaust volume control member also includes a rotating type or a detachable type.

[0133] First, referring to Fig. 12, looking at the rotation method, as a form, a plurality of holes (200) can be formed radially as an exhaust port, and an opening ratio adjustment plate (210) can be installed at the rear of the plurality of holes (200).

[0134] The installed aperture ratio control plate may include a plurality of wings (210) having an area large enough to cover the holes (200), and as the aperture ratio control plate rotates, the plurality of wings (210) close the plurality of holes (200), thereby controlling the number of holes to be opened among the plurality of holes (200) or the open area of ​​the holes to be opened.

[0135] Under this combined structure, the amount of regenerative air (R) discharged to the outside through the exhaust port can be controlled, and the dehumidification amount can be controlled accordingly.

[0136] Next, referring to Fig. 13, the detachment method can be seen that, in one form, a solenoid valve (240) can be installed at the top of the discharge port.

[0137] In addition, the exhaust volume control member may further include an opening / closing plate (220) for opening / closing the exhaust port, the opening / closing plate (220) may be connected to a plunger of a solenoid valve (240), and a spring hinge (230) may be installed at the bottom of the opening / closing plate (220).

[0138] When current is applied to the solenoid valve (240), the plunger can pull the opening / closing plate (220), and accordingly, the opening / closing plate (220) can close the outlet.

[0139] Conversely, when no current is applied to the solenoid valve (240), the plunger no longer pulls the opening / closing plate (220), and instead, the opening / closing plate (220) can be lowered while rotating outward by the elastic force of the spring hinge (230).

[0140] As the opening / closing plate (220) is lowered in this way, the exhaust port is opened and the regeneration air (R) can be discharged to the regeneration air discharge zone (130).

[0141] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

[0142] The present invention has industrial applicability as a humidity control device using a fan member of a dehumidification target facility.

Claims

1. Humidity control equipment that performs humidity control for a clean room or equipment within the clean room. The above humidity control equipment, Humidity control equipment using a fan member of a dehumidification target facility including a desiccant rotor that absorbs moisture in air introduced by a fan member installed in the clean room or the facility with an adsorbent and supplies dehumidified air into the interior of the clean room or the facility.

2. In paragraph 1, a regenerative fan that draws in air; and Humidity control equipment using a fan member of a dehumidification target facility including a regeneration heater that heats the air introduced by the regeneration fan to generate regeneration air and causes the regeneration air to remove the moisture from the adsorbent.

3. In paragraph 2, It further includes an exhaust volume control member that controls the flow rate of the regenerative air discharged to the outside through the exhaust port, The above displacement control member is, a first plate having a plurality of holes formed therein; and A second plate is positioned in front or behind the first plate based on the discharge direction of the regenerative air, and includes a plurality of holes formed therein. A humidity control device using a fan member of a dehumidification target facility, wherein the amount of the regenerative air discharged to the outside is controlled by adjusting the degree to which a hole is opened by sliding at least one of the first plate and the second plate.

4. In paragraph 2, It further includes an exhaust volume control member that controls the flow rate of the regenerative air discharged to the outside through the exhaust port, The above displacement control member is, A solenoid valve installed at the top of the above outlet; An opening / closing plate for opening and closing the above outlet; and Includes a spring hinge installed at the bottom of the above opening / closing plate, When current is applied to the solenoid valve, the plunger of the solenoid valve can pull the opening / closing plate, thereby closing the outlet. A humidity control device using a fan member of a dehumidification target facility, wherein when no current is applied to the solenoid valve, the plunger does not pull the opening / closing plate, but instead, the opening / closing plate rotates outward and descends due to the elastic force of the spring hinge, thereby allowing the regenerative air to be discharged to the outside.

5. In paragraph 2, It further includes an exhaust volume control member that controls the flow rate of the regenerative air discharged to the outside through the exhaust port, The above outlet comprises a plurality of radially formed holes, The above displacement control member is, Including an aperture ratio adjustment plate installed at the rear of the above plurality of holes, A humidity control device using a fan member of a dehumidification target facility, wherein the above aperture ratio control plate rotates to control the number of holes to be opened among the plurality of holes or the open area of ​​the holes to be opened.

6. In paragraph 1, Humidity control equipment using a fan member of a dehumidification target facility further including a filter member positioned above the desiccant rotor and filtering air flowing into the desiccant rotor.

7. In paragraph 1, The above humidity control equipment is a humidity control equipment using a fan member of a dehumidification target equipment, which is installed on top of a filter unit provided in the clean room or the equipment without including a separate filter member.

8. In paragraph 1, The above clean room or facility is equipped with a fan filter unit (FFU). A humidity control device using a fan member of a dehumidification target facility, wherein the fan filter unit is installed on the upper part of the humidity control unit without including a separate filter member.

9. In paragraph 1, The above desiccant rotor has a dehumidifying zone for dehumidifying air, a regeneration zone for removing moisture from the adsorbent, and a cooling zone for cooling and dehumidifying a portion of the rotor that has passed through the regeneration zone. Further comprising a cooling low-humidity medium supply device for supplying a cooling low-humidity medium to the above cooling area, Humidity control equipment using a fan member of a dehumidification target facility, wherein the above cooling low-humidity medium includes at least one of CDA (Clean Dry Air), nitrogen gas, and a mixed gas.

10. In paragraph 1, The above desiccant rotor has a dehumidification zone for dehumidifying air, a regeneration zone for removing moisture from the adsorbent, and a purge zone for cooling a portion of the rotor that has passed through the regeneration zone. Humidity control equipment using a fan member of a dehumidification target facility in which outside air used for cooling is supplied to the above-mentioned purge area.

11. In paragraph 1, The above humidity control equipment is installed in an EFEM (Equipment Front End Module) equipped with a return room, The above humidity control equipment is installed to be mounted on the supply hood located on the upper part of the filter unit without including a separate filter member, The above supply hood is a humidity control device using a fan member of a dehumidification target facility, which includes an outside air intake unit that introduces outside air and supplies it to the return room, thereby forming a positive pressure in the return room, depending on the operating conditions of the EFEM.

12. In paragraph 1, The above humidity control equipment is installed in an EFEM equipped with a fan filter unit and a filter unit, A humidity control device using a fan member of a dehumidification target facility, wherein the above humidity control device is installed so that the fan filter unit is located at the top of the humidity control unit and the filter unit is located at the bottom of the humidity control device, without including a separate filter member.

13. In paragraph 1, Humidity control equipment using a fan member of a dehumidification target facility further comprising an airflow equalization plate having a plurality of holes formed therein and allowing the dehumidified air, with the airflow equalized through the holes, to flow into the clean room or the interior of the facility.

14. In paragraph 2, The desiccant rotor comprises a first desiccant rotor and a second desiccant rotor positioned laterally of the first desiccant rotor, The above regeneration fan is located between the first desiccant rotor and the second desiccant rotor, A humidity control device using a fan member of a dehumidification target facility, wherein the above-mentioned regeneration heater is located above the above-mentioned regeneration fan.

15. In paragraph 2, The desiccant rotor comprises a first desiccant rotor and a second desiccant rotor positioned laterally of the first desiccant rotor, The regenerative heater comprises a first regenerative heater for supplying regenerative air to the first desiccant rotor and a second regenerative heater for supplying regenerative air to the second desiccant rotor, Humidity control equipment using a fan member of a dehumidification target facility, wherein the regenerative fan is located below the first regenerative heater and the second regenerative heater and supplies air to the first regenerative heater and the second regenerative heater.

16. In paragraph 2, The desiccant rotor comprises a first desiccant rotor and a second desiccant rotor positioned laterally of the first desiccant rotor, The regenerative heater comprises a first regenerative heater for supplying regenerative air to the first desiccant rotor and a second regenerative heater for supplying regenerative air to the second desiccant rotor, A humidity control device using a fan member of a dehumidification target facility, wherein the regeneration fan includes a first regeneration fan positioned below the first regeneration heater and supplying air to the first regeneration heater, and a second regeneration fan positioned below the second regeneration heater and supplying air to the second regeneration heater.

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