Device and method for drying a liquid film
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-09-03
- Publication Date
- 2026-03-12
AI Technical Summary
Existing methods for gas flow arrangements in chemical vapor deposition processes face challenges in achieving homogeneous distribution and efficient evaporation of chemical vapors, leading to non-uniform film deposition and inefficient use of gas flows.
A swiveling gas flow arrangement with concave features and side walls is introduced to enhance the homogeneity of gas flows, ensuring uniform distribution and efficient evaporation of chemical vapors, which includes pivoting and swiveling mechanisms to optimize gas flow distribution.
The solution achieves improved homogeneity and uniformity in gas flow distribution, enhancing the efficiency of chemical vapor deposition processes by ensuring consistent evaporation and deposition of chemical vapors.
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Figure DE2025000093_12032026_PF_FP_ABST
Abstract
Description
[0001]03-09-2025-43709001-HauP tos t-0010 and to become the become use, depend on size homogeneity the and the From become AMX3, A Methylammonium NH3 Formamidinium H NCHNH22 M and difficult homogeneity use of used can a plane flowing a nozzle whereby gas flow 03-09-2025-43709001-H au p tPos t-001 PCT / DE2025 / 000093 and drying a used and more the evaporation and in turn Review 2100386 applications of methods are tools determined unwanted and use of drying gas flow To achieve the purpose, certain applications and application so-called shaping gas flow arrangement of several nozzles because of gas flow become sufficient to blow away depend on used gas ambient temperature To become and which application of always 03“09-2025-43708001-Main Post-0012 and mixtures of chemical vapors, one and reference systems. There, the context of registration is a synonym and for homogeneity. Gao on method 1548Arrangement of several methods which and McDermid and Measurement MS, Zhang on will be several thereafter and and to be given opposite to the gas flow deflection gas flow by topic and applicable have meaning 03-09-2025-43709001-HauP* Pss *-0013 water of slurry a to volume determined next to can and depend on the come dimethylformamide methoxyethanol meaning subject task the objects and task and the gas flow the context, flow to and to components gas flow fluid mechanics application gas flow gas flow gas flow gas flow of way of meaning 03-09-2025-43703001-HauP tPos f0014 PCT / DE2025 / 000093 and homogeneity and drying although near the one weakened the and the gas flows have predetermined the purpose related to the if of also the furthermore where pivoting preservation arrangement gas flows and arrangement arrangement pivoting way pivoting gas flows the the 03-09-2025-43709001 -HauP Pos i-0015 PCT / DE2025 / 000093 WaySwiveling in addition to an arrangement of the concave gas flows, where gas flows and gas flows can be extracted for purposes other than the intended purpose. More % extraction of gas flows, whereby gas flows also affect the end and the purpose of gas flows. Furthermore, in the way 03-09-2025-43709001-HauPtPcs t-OOI 6, the size of the arrangement and the provision of side walls make the swiveling gas flows more homogeneous and related to the swiveling by connecting the gas flows to the side walls. 03-03-2025-43708001-HauP Pos i-0017 A frame is given in this way, and gas flows are arranged in a plane and gas flows are distributed. Gas flows are shifted by features and above, and a use without homogeneous, which is desirable for applications. 03-09-2025-43708001-Haue Pe 4-001 8 Arrangement and also drying according to the invention is homogeneous.Gas flow by means of gas flows. In addition, and based on 4 and gas flows, a during the invention will be u nd was (. a specific end gas flow gas flow 03-0S-2025-43709001-HauPtPos*-0019 predominantly flowing gas flow G asströmung (- Swiveling gas flows, gas flows which and reasons gas flows side walls the gas flows 4 arrangement which swiveling the a gas flows side walls are the effect gas flows (- size the homogeneous and which - 03-09-2025-43703001-Hau Pi Po t-0020 PCT / DE2025 / 000093 the short the also extraction A gas flows whereby and swiveling and opposite given swiveling 7 7 which 4 away) can what proximity features / components reasons swiveling concave connected and whereby given the the 4 swiveling which 03-09-2025-43709001 -Ha«p iPo t-0021 PCT / DE2025 / 000093 and embodiments
Claims
03-03-2025-43709001-H auPtPcst-0023 PCT / DE2025 / 000093 encompassing and and specified and wherein preservation arrangement and gas flows and gas flows arrangement and and wherein the opposite arrangement arrangement arrangement an extraction to encompassing C3“09“202S- 4370900 “HauP pus -0024 and wherein gas flows and gas flows the and the gas flows and wherein gas flows arrangement side walls the pivotable gas flows pivoting gas flows change
Citation Information
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