Housing and flow rate control device comprising same

Abstract

[Problem] To provide: a housing comprising a hermetically sealed structure, the housing making it possible to reduce work for removing a panel that constitutes the housing during maintenance; and a flow rate control device comprising the housing. [Solution] A housing comprises: a main frame 2 provided with a lower frame 2a, a vertical frame 2b that is erected on the lower frame 2a, and an upper frame 2c that is cantilevered by the vertical frame 2b and extends parallel to the lower frame 2a, the lower frame 2a and the upper frame 2c having a channel shape provided with a web 2d and a pair of flanges 2e, 2f; a cover panel 3 provided with a pair of side panels 3a, 3b that face each other, and a back panel 3c that connects the pair of side panels 3a, 3b, the pair of side panels 3a, 3b being capable of sliding in contact with the inner surfaces of the pair of flanges 2c, 2f, and the cover panel 3 being detachably mounted to the main frame 2; and a fixing part 4 by which the cover panel 3 mounted to the main frame 2 is fixed to the main frame 2. The housing is configured such that when the cover panel 3 is fixed to the main frame 2 by the fixing part 4, the pair of side panels 3a, 3b are brought into pressure contact with the vertical frame 2b.

Description

Housing and Flow Control Device Comprising the Same

[0001] The present invention relates to a housing and a flow control device comprising the housing, and particularly to a housing having a sealed structure with enhanced internal airtightness and a flow control device comprising the same.

[0002] Flow control devices for controlling the gas flow rate of process gases for semiconductor manufacturing are widely known (such as Patent Document 1). When controlling the flow rate of a combustible gas with this type of flow control device, it is necessary to house flow control equipment such as control valves in a housing with a sealed structure and fill the inside of the housing with an inert gas to achieve an explosion-proof specification. To make the housing have a sealed structure, for example, as shown in FIG. 13, a panel 101 constituting the housing 100 is fixed using a number of screws 102.

[0003] Japanese Patent Application Laid-Open No. 11-353030

[0004] However, when performing maintenance on the flow control device comprising the above housing, many screws have to be removed in order to remove the panel of the housing, which is time-consuming. In addition, this type of flow control device often has limited installation space, and it may be difficult to secure a space for inserting a driver for removing the screws fixing the panel of the housing.

[0005] Therefore, a main object of the present invention is to provide a housing that can reduce the removal work of the panel constituting the housing during maintenance even for a housing having a sealed structure, and also to provide a housing and a flow control device comprising the same that are easy to remove the panel even when arranged in a narrow installation space.

[0006] To achieve the above objective, an enclosure according to one aspect of the present invention comprises a main frame having a channel shape with a web and a pair of flanges, comprising a lower frame, a vertical frame erected on the lower frame, and an upper frame cantilevered by the vertical frame and extending parallel to the lower frame, the lower frame and the upper frame comprising a main frame, a pair of opposing side panels and a back panel connecting the pair of side panels, the pair of side panels being slidable in contact with the inner surfaces of the pair of flanges, and a cover panel detachably mounted on the main frame, and a fixing part for fixing the cover panel mounted on the main frame to the main frame, wherein the pair of side panels are pressed against the vertical frame when the cover panel is fixed to the main frame by the fixing part.

[0007] In one embodiment, the vertical frame has a first inclined surface, the side panel has a second inclined surface, the first inclined surface and the second inclined surface are arranged to face each other, and when the cover panel is fixed to the main frame by the fixing part, the second inclined surface is pressed against the first inclined surface.

[0008] In one embodiment, the vertical frame has a channel shape comprising a web and a pair of flanges, and the vertical edge of the side panel is sandwiched and fixed between the first inclined surface and the flanges of the vertical frame.

[0009] In one embodiment, the vertical frame comprises an inclined plate extending from the web of the vertical frame and having the first inclined surface, and the side panel comprises a folded plate extending in a folded manner from the vertical edge of the side panel and having the second inclined surface.

[0010] In one embodiment, the cover panel is fixed to the main frame by fixing only the back panel to at least one of the lower frame and the upper frame.

[0011] In one embodiment, the fixing portion comprises a lower flange provided on the edge of the lower frame facing the back panel and having a first female screw hole formed therein, an upper flange provided on the edge of the upper frame facing the back panel and having a second female screw hole formed therein, through holes formed in the back panel at a lower position corresponding to the first female screw hole and an upper position corresponding to the second female screw hole, and fixing screws that are screwed into the first female screw hole and the second female screw hole through the through holes.

[0012] In one embodiment, the thermal expansion coefficient of the cover panel is greater than that of the main frame.

[0013] In one embodiment, the upper frame and the lower frame are made of the same material, and the thermal expansion coefficient of the cover panel is greater than that of the upper frame and the lower frame.

[0014] The flow control device of the present invention comprises the above-mentioned housing and a flow control device housed in the housing.

[0015] As the pair of side panels are inserted into the inner surfaces of the pair of flanges while sliding against them, the vertical edges of the side panels are pressed against the vertical frame of the main frame, and the horizontal edges of the side panels are pressed against the lower and upper frames of the main frame, thereby creating a sealed state within the enclosure, which is maintained by the fixing parts. Furthermore, by making the cover panel detachable by sliding it onto the main frame, the enclosure can be housed even in a narrow space, and maintenance can be easily performed.

[0016] This is an exploded perspective view showing a first embodiment of the housing according to the present invention. This is a perspective view of the housing of Figure 1. This is a partially omitted cross-sectional view of the housing of Figure 1 during assembly, corresponding to the A-A section in Figures 2 and 8. This is a partially omitted cross-sectional view of the housing of Figure 1 after assembly, corresponding to the A-A section in Figures 2 and 8. This is a partially omitted cross-sectional view of the housing of Figure 1 during assembly, corresponding to the B-B section in Figures 2 and 8. This is a partially omitted cross-sectional view of the housing of Figure 1 after assembly, corresponding to the B-B section in Figures 2 and 8. This is an end view showing a partially omitted longitudinal section C-C in Figure 2. This is a front view showing a flow control device in which a flow control device is housed inside the housing of Figure 1. This is an exploded perspective view showing a second embodiment of the housing according to the present invention. This is a perspective view showing the housing of Figure 9. This is a partially omitted cross-sectional view of the housing of Figure 10 during assembly, corresponding to the D-D section in Figure 10. This is a partially omitted cross-sectional view of the housing of Figure 10 after assembly, corresponding to the D-D section in Figure 10. This is a front view showing a conventional housing.

[0017] Embodiments of the housing and flow control device equipped therewith according to the present invention will be described below with reference to the drawings. Throughout the drawings, the same elements are denoted by the same reference numerals.

[0018] Figure 1 is an exploded perspective view showing a first embodiment of the housing according to the present invention, and Figure 2 is a perspective view of the housing of Figure 1 after assembly. Referring to Figures 1 and 2, the housing 1 comprises a main frame 2, a cover panel 3 that is detachably attached to the main frame 2, and a fixing part 4 that fixes the cover panel 3 to the main frame 2. The main frame 2 and the cover panel 3 can be formed from, for example, a metal plate with a thickness of 0.5 to 2 mm. The main frame 2 is equipped with ports for connecting pipes, connectors for connecting wiring, etc., as will be described later, but these are omitted from Figures 1 to 7 for the sake of ease of understanding.

[0019] The main frame 2 has a lower frame 2a, a vertical frame 2b erected on the lower frame 2a, and an upper frame 2c cantilevered to the vertical frame 2b. The lower frame 2a and the upper frame 2c are parallel and extend perpendicularly from both ends of the vertical frame 2b. In the illustrated example, the lower frame 2a and the upper frame 2c constitute the lower cover and upper cover of the housing 1, respectively. In this invention, the terms upper and lower and vertical are used for convenience, and for example, the vertical frame may be arranged horizontally. Also, although the lower frame 2a and the upper frame 2c are formed integrally with the vertical frame 2b, the lower frame 2a and the upper frame 2c may be separate components, and the lower frame 2a and the upper frame 2c may be attached to the vertical frame 2b.

[0020] The main frame 2 comprises a web 2d and a pair of flanges 2e and 2f, and has a channel shape. In the first embodiment, the lower frame 2a, vertical frame 2b, and upper frame 2c each have a channel shape. The web 2d and flanges 2e and 2f can be connected as separate parts, but they can also be formed by bending. The rigidity of the main frame 2 is increased by having a channel shape with flanges 2e and 2f.

[0021] The cover panel 3 comprises a pair of parallel, opposing side panels 3a and 3b, and a back panel 3c connecting the pair of side panels 3a and 3b. The side panels 3a and 3b cover both sides of the housing 1, and the back panel 3c covers the rear of the housing 1. Although the back panel 3c is described here as covering the rear, depending on how the housing 1 is installed, it may be installed so that the rear becomes the front. The side panels 3a and 3b and the back panel 3c can be integrally formed by bending. The side panels 3a and 3b can be slid into the inner surfaces of the flanges 2e and 2f of the lower frame 2a and upper frame 2c of the main frame 2.

[0022] Figures 3 and 4 are partially abbreviated cross-sectional views at the A-A cross-sectional position in Figures 2 and 8, Figure 7 is a partially abbreviated cross-sectional view at the C-C cross-sectional position in Figure 2, and Figure 8 is a front view showing a flow control device in which the flow control equipment is housed within the casing. Referring to Figures 3, 4, and 7, when the cover panel 3 is inserted into the main frame 2, the side panels 3a and 3b slide while in contact with the inner surfaces 2e1 and 2f1 of the flanges 2e and 2f and the inner surface of the web 2d. Specifically, referring to Figure 7, the upper and lower edges 3a3, 3b3, 3a4, and 3b4 of the side panels 3a and 3b slide while in contact with the inner surfaces 2e1 and 2f1 of the flanges 2e and 2f of the lower frame 2a and the upper frame 2c, respectively, and the inner surface 2d1 of the web 2d.

[0023] Figures 5 and 6 are partially abbreviated end views taken at the B-B cross-section in Figures 2 and 8. Referring to Figures 5 and 6, the vertical frame 2b includes an inclined plate 5 having a first inclined surface 5a. The inclined plate 5 extends diagonally from the web 2d of the vertical frame 2b to the inside of the housing 1. The inclined plate 5 can be a flat plate. In the illustrated example, the inclined plate 5 is formed by bending a strip 6 on both sides, and the strip 6 is fixed to the inner surface of the web 2d of the vertical frame 2b by welding or the like. The inclined plate 5 formed in this way has leaf spring elasticity.

[0024] The side panels 3a and 3b are provided with folded plates 7 at their vertical edges 3a2 and 3b2, i.e., at the free ends facing the vertical frame 2b. The folded plates 7 extend diagonally from the edges 3a2 and 3b2 inward into the housing 1. The folded plates 7 have a second inclined surface 7a that is positioned opposite the first inclined surface 5a. The folded plates 7 extend in a folded manner from the vertical edges 3a2 and 3b2 of the side panels 3a and 3b inward into the housing 1. The folded plates 7 can be in the shape of a flat plate. The folded plates 7 can be provided at the edges 3a2 and 3b2 by bending, or by welding or the like. The folded plates 7 formed in this way can have leaf spring elasticity.

[0025] The fixing part 4 can be configured to screw the back panel 3c to the lower frame 2a and the upper frame 2c, thereby fixing the cover panel 3 attached to the main frame 2 to the main frame 2.

[0026] Referring to Figure 1, the lower frame 2a is provided with a lower flange 2a1 at the edge facing the back panel 3c, and a first female screw hole 2a2 is formed in the lower flange 2a1. The lower flange 2a1 is provided so as to be parallel to and facing the back panel 3c of the cover panel 3 mounted on the main frame 2. The upper frame 2c is provided with an upper flange 2c1 at the edge facing the back panel 3c, and a second female screw hole 2c2 is formed in the upper flange 2c1. The upper flange 2c1 is provided so as to be parallel to and facing the back panel 3c of the cover panel 3 mounted on the main frame 2. Through holes 4a are formed in the back panel 3c at a lower position corresponding to the first female screw hole 2a2 and at an upper position corresponding to the second female screw hole 2c2. The cover panel 3 is fixed to the main frame 2 by inserting the fixing screw 4b through the through hole 4a and screwing it into the first female screw hole 2a2 and the second female screw hole 2c2 (see Figure 4). A gap X (Figures 1 and 3) is formed between the upper flange 2c1 and the flanges 2e and 2f of the upper frame 2c, and a gap Y (Figure 1) is formed between the lower flange 2a1 and the flanges 2e and 2f of the lower frame 2a. The side panels 3a and 3b can be inserted into the main frame 2 through these gaps X and Y. The back panel 3c is fixed to the upper frame 2c and the lower frame 2a by the fixing screw 4b, so that no gap is formed between the upper frame 2c and the lower frame 2a.

[0027] When the cover panel 3 is fixed to the main frame 2 by the fixing part 4, the side panels 3a and 3b are configured to be pressed against the vertical frame 2b. In the illustrated example, the second inclined surface 7a is pressed against the first inclined surface 5a. By pressing the second inclined surface 7a against the first inclined surface 5a, airtightness is achieved between the vertical frame 2b and the side panels 3a and 3b.

[0028] At this time, the edge portion 3a2 (3b2) equipped with the folded plate 7 is fixed by being sandwiched between the inclined plate 5 and the flange 2e (2f) of the vertical frame 2b. When the second inclined surface 7a is pressed against the first inclined surface 5a, the second inclined surface 7a receives a resistive force from the first inclined surface 5a outward from the housing 1, and as a result, the outer surfaces of the side panels 3a and 3b are pressed against the inner surfaces of the flanges 2e and 2f of the vertical frame 2b, and airtightness is achieved here as well.

[0029] Figure 8 shows a flow control device 9 comprising a flow control device 8 for controlling process gases used in semiconductor manufacturing, and a housing 1 for housing the flow control device 8. The flow control device 8 may include known mass flow controllers, vaporizers, etc. The flow control device 8 includes, for example, a pressure sensor for measuring the pressure of the controlled gas, a control valve for opening and closing the gas flow path, and a controller for controlling the control valve based on the value detected by the pressure sensor. A vaporizer generally includes a tank for storing liquid raw materials and a heater for heating and vaporizing the liquid raw materials in the tank.

[0030] Referring to Figure 8, a gas inlet port 10 controlled by a flow control device 8 housed inside the housing 1 is provided on the lower frame 2a, and a gas outlet port 11 is provided on the upper frame 2c. When the flow control device 8 installed inside the housing 1 controls a flammable gas, a port 12 for injecting purge gas into the housing 1 and a port 13 for exhausting the gas inside the housing 1 are provided on the upper frame 2c. The air inside the housing 1 is replaced by purge gas (nitrogen gas), and the inside of the housing 1 is maintained at positive pressure by the purge gas, keeping the pressure inside the housing 1 higher than the pressure outside the housing 1 (this is called Z-purging). Note that the arrangement of each port is not limited to the arrangement described above, and other arrangement configurations are also possible.

[0031] When attaching the cover panel 3 to the main frame 2, the upper and lower edges of the side panels 3a and 3b are inserted into the inside of the flanges 2e and 2f, and the upper and lower edges 3a3, 3b3, 3a4, and 3b4 (Figure 7) of the side panels 3a and 3b are slid along the inner surfaces 2e1 and 2f1 (Figure 3) of the flanges 2e and 2f of the upper frame 2c and lower frame 2a, respectively, thereby sliding and inserting the cover panel 3 into the main frame 2.

[0032] When the cover panel 3 is slid into the main frame 2, the vertical edges 3a2 and 3b2 of the side panels 3a and 3b (Figure 5) fit between the vertical flanges 2e and 2f of the vertical frame 2b and the inclined plate 5 (Figure 6). Then, when the fixing screw 4b is inserted through the through hole 4a and screwed into the first female screw hole 2a2 and the second female screw hole 2c2, the fixing screw 4b is tightened in the direction that the cover panel 3 pushes against the vertical frame 2b, causing the folded plate 7 to be pressed against the inclined plate 5, and in this state the cover panel 3 is fixed to the main frame 2. This provides airtightness between the cover panel 3 and the vertical frame 2b.

[0033] Furthermore, at this time, the folded-over plate 7 is pressed against the inclined plate 5, causing the folded-over plate 7 to receive a reaction force from the inclined plate 5, and the outer surfaces of the vertical edges 3a2 and 3b2 of the side panels 3a and 3b to be pressed against the inner surfaces 2e1 and 2f1 of the flanges 2e and 2f of the vertical frame 2b, thereby achieving airtightness.

[0034] The upper and lower lateral extending edges 3a3, 3b3, 3a4, 3b4 (Figure 7) of the side panels 3a, 3b are in slidable contact with the inner surfaces 2e1, 2f1 of the flanges 2e, 2f of the lower frame 2a and the upper frame 2c, respectively, thereby providing airtightness. In addition, when the vertical edges 3a2, 3b2 of the side panels 3a, 3b are pressed against the inner surfaces 2e1, 2f1 of the vertical flanges 2e, 2f of the vertical frame 2b, the upper and lower lateral extending edges 3a3, 3b3, 3a4, 3b4 of the side panels 3a, 3b are also pressed against the inner surfaces 2e1, 2f1 of the flanges 2e, 2f of the lower frame 2a and the upper frame 2c, respectively, thereby further enhancing airtightness. Furthermore, the internal pressure from the purge gas inside the housing 1 also increases airtightness, as the vertical and horizontal edges 3a2, 3a3, 3a4, 3b2, 3b3, and 3b4 of the side panels 3a and 3b are pressed against the flanges 2e and 2f of the main frame 2.

[0035] In the housing 1 having the above configuration, the cover panel 3 is slid and inserted along the inner surfaces 2e1 and 2f1 of the flanges 2e and 2f of the upper frame 2c and lower frame 2a, and the cover panel 3 is fixed to the main frame 2 by the fixing part 4, so that the side panels 3a and 3b are pressed against the vertical frame 2b of the main frame 2, thereby achieving airtightness. The upper and lower lateral edges of the side panels 3a and 3b are in surface contact with the flanges 2e and 2f of the lower frame 2a and upper frame 2c, respectively, and the internal pressure of the purge gas is applied to the surface contact, thereby achieving airtightness. In this way, airtightness is achieved inside the housing 1.

[0036] The cover panel 3 can be detachably fixed to the main frame 2 by fixing screws 4b that pass through holes 4a in the back panel 3c. Even when the housing 1 is installed in a narrow installation location with little space on either side of the cover panel 3, the cover panel 3 can be easily removed from the main frame 2 by unscrewing the fixing screws 4b that are screwed into the back panel 3c, thus facilitating maintenance.

[0037] Next, a second embodiment of the housing of the present invention will be described with reference to Figures 9 to 12. Note that for the second embodiment, the same configuration as in the first embodiment will not be described. Also, in Figures 9 to 12, as with the first embodiment, the main frame's piping connection ports and wiring connection connectors are omitted from the illustration.

[0038] The housing 1 of the second embodiment differs from the first embodiment in that the vertical frame 2b does not have a flange, the vertical frame 2b does not have an inclined plate and a first inclined surface 5a is formed on the side surface of the vertical frame 2b, and the side panels 3a and 3b do not have a folded plate and a second inclined surface 7a is formed on the end surface of the side panels 3a and 3b.

[0039] In the second embodiment, the widthwise side surface of the vertical frame 2b is the first inclined surface 5a, and the vertical end surfaces of the free ends of the side panels 3a and 3b are the second inclined surfaces 7a. When the cover panel 3 is attached to the main frame 2 and fixed to the main frame 2 by the fixing part 4, the second inclined surface 7a is pressed against the first inclined surface 5a, and airtightness is achieved between them. By pressing the inclined surfaces of the side panels 3a and 3b against the vertical frame 2b, a wider contact area is obtained than when flat surfaces are pressed against each other, and airtightness is improved.

[0040] In the first and second embodiments described above, the cover panel 3 can be made of a material with a larger coefficient of thermal expansion than the main frame 2. For example, the cover panel 3 may be made of aluminum and the main frame 2 may be made of stainless steel. When the flow control device 8 (Figure 8) housed in the housing 1 controls a high-temperature fluid of, for example, about 200°C, the housing 1 is also heated by heat transfer and heat dissipation from the flow control device 8. Since aluminum has a larger coefficient of thermal expansion than stainless steel, when the housing 1 is heated, the expansion due to thermal expansion of the aluminum side panels 3a and 3b is greater than the expansion due to thermal expansion of the upper frame 2c and lower frame 2a. As a result, the pressing force when the second inclined surface 7a presses against the first inclined surface 5a increases, improving airtightness. Similarly, since the widthwise expansion of the back panel 3c due to thermal expansion is greater than the widthwise expansion of the vertical frame 2b, contact pressure is applied when the side panels 3a and 3b abut against the flanges 2e and 2f, improving airtightness.

[0041] When the main frame 2 is constructed by connecting the upper frame 2c, vertical frame 2b, and lower frame 2a with bolts or other screws, the upper frame 2c and lower frame 2a may be made of the same material with a lower coefficient of thermal expansion than the cover panel 3, and the vertical frame 2b may be made of the same material as the cover panel 3. For example, the upper frame 2c and lower frame 2a may be made of stainless steel, and the vertical frame 2b and cover panel 3 may be made of aluminum.

[0042] The present invention is not limited to the embodiments described above, and various modifications are possible without departing from the spirit of the invention.

[0043] In the above-described embodiment, an example in which the side panels 3a and 3b and the vertical frame 2b are in pressure contact with each other through inclined surfaces has been shown. However, the configuration is not limited to the inclined surfaces, and it is also possible to adopt a configuration in which pressure contact is made in other forms.

[0044] Further, instead of the above-described embodiment, for example, the fixing portion may be configured such that flanges extending horizontally are provided at the upper and lower ends of the back panel 3c, and the flanges are screwed to the upper frame 2c and the lower frame 2a, respectively. Further, in the above-described embodiment, the back panel 3c is fixed to both the lower frame 2a and the upper frame 2c using the fixing screws 4b. However, the cover panel 3 can also be fixed to the main frame 2 by fixing only one of the lower frame 2a or the upper frame 2c to the back panel 3c. Also, the shape of the vertical frame may be, for example, a shape having a recess that is recessed in the horizontal direction at the middle portion between the upper and lower portions.

[0045] Further, in the above-described second embodiment, the vertical frame 2b is configured only by a member corresponding to the web. However, by installing members corresponding to the flanges 2e and 2f thereto, a member for guiding the second inclined surface 7a to the first inclined surface 5a may be installed. Also, regarding the metal plate used for the main frame 2 and the cover panel 3, not only the plate but also a reinforcing frame for holding the plate may be provided.

[0046] 1 Housing 2 Main frame 2a Lower frame 2b Vertical frame 2c Upper frame 2d Web 2e, 2f Flange 3 Cover panel 3a, 3b Side panel 3c Back panel 4 Fixing portion 5 Inclined plate 5a First inclined surface 7 Folded plate 7a Second inclined surface 8 Flow control device 9 Flow control apparatus

Claims

1. A housing comprising: a main frame having a lower frame, a vertical frame erected on the lower frame, and an upper frame cantilevered by the vertical frame and extending parallel to the lower frame, wherein the lower frame and the upper frame have a channel shape comprising a web and a pair of flanges; a cover panel having a pair of opposing side panels and a back panel connecting the pair of side panels, wherein the pair of side panels are slidable in contact with the inner surfaces of the pair of flanges, and the cover panel is detachably mounted on the main frame; and a fixing part for fixing the cover panel mounted on the main frame to the main frame, wherein the pair of side panels are pressed against the vertical frame when the cover panel is fixed to the main frame by the fixing part.

2. The housing according to claim 1, wherein the vertical frame has a first inclined surface, the side panel has a second inclined surface, the first inclined surface and the second inclined surface are arranged to face each other, and the second inclined surface is pressed against the first inclined surface when the cover panel is fixed to the main frame by the fixing part.

3. The housing according to claim 2, wherein the vertical frame has a channel shape comprising a web and a pair of flanges, and the vertical edge of the side panel is sandwiched and fixed between the first inclined surface and the flanges of the vertical frame.

4. The housing according to claim 2, wherein the vertical frame comprises an inclined plate extending from the web of the vertical frame and having the first inclined surface, and the side panel comprises a folded plate extending in a folded manner from the vertical edge of the side panel and having the second inclined surface.

5. The housing according to claim 1, wherein the fixing part fixes the cover panel to the main frame by fixing only the back panel to at least one of the lower frame and the upper frame.

6. The housing according to claim 1, wherein the fixing portion comprises: a lower flange provided on the edge of the lower frame facing the back panel and having a first female screw hole formed therein; an upper flange provided on the edge of the upper frame facing the back panel and having a second female screw hole formed therein; through holes formed in the back panel at a lower position corresponding to the first female screw hole and at an upper position corresponding to the second female screw hole; and fixing screws screwed into the first female screw hole and the second female screw hole through the through holes.

7. The housing according to claim 1, wherein the thermal expansion coefficient of the cover panel is greater than that of the main frame.

8. The housing according to claim 1, wherein the upper frame and the lower frame are formed of the same material, and the coefficient of thermal expansion of the cover panel is greater than the coefficient of thermal expansion of the upper frame and the lower frame.

9. A flow control device comprising: a housing according to any one of claims 1 to 8; and a flow control device housed in the housing.

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