Transfer transition apparatus for PVD equipment

Abstract

The present invention relates to a transfer transition apparatus for PVD equipment, comprising a transfer chamber, a rotating mechanism, a blocking member, and a pressing mechanism, wherein one side of the transfer chamber is provided with an opening; the rotating mechanism comprises a rotary drive assembly and a rotating shaft, the rotating shaft being located within the transfer chamber, and the rotary drive assembly being connected to the rotating shaft so as to drive the rotating shaft to rotate around an axis of the rotating shaft; the blocking member is connected to the rotating shaft; the apparatus has a blocking state, and when in the blocking state, the blocking member is positioned at the opening of the transfer chamber so as to block the opening, and the pressing mechanism presses against the blocking member. According to the transfer transition apparatus for PVD equipment provided by the present invention, a rotary drive assembly drives a rotating shaft to drive a blocking member to block a transfer chamber opening, and a pressing mechanism presses against the blocking member. This ensures sealing integrity and prevents venting caused by direct communication between different vacuum coating chambers and external environments, and thereby prevents vacuum leakage without affecting equipment operation.

Description

PVD equipment transmission transition device TECHNICAL FIELD

[0001] The present application relates to a PVD equipment transmission transition device. BACKGROUND

[0002] Among the existing multiple vacuum coating chambers, two adjacent vacuum coating chambers are directly connected with the outside, which causes pressure leakage and affects the operation of the equipment and the coating effect. SUMMARY

[0003] The purpose of the present application is to provide a PVD equipment transmission transition device to prevent the vacuum chamber from being directly connected with the outside.

[0004] To achieve the above purpose, one technical solution adopted by the present application is:

[0005] A PVD equipment transmission transition device, comprising a transmission chamber, a rotating mechanism, a blocking piece, and a pressing mechanism, wherein one side of the transmission chamber is provided with an opening; the rotating mechanism comprises a rotating drive assembly and a rotating shaft, the rotating shaft is located in the transmission chamber, the rotating drive assembly is connected with the rotating shaft for driving the rotating shaft to rotate around its own axis; the blocking piece is connected with the rotating shaft.

[0006] The device has a plugging state, when in the plugging state, the blocking piece is located at the opening of the transmission chamber to plug the opening, and the pressing mechanism presses the blocking piece.

[0007] According to some embodiments of the present application, the blocking piece comprises a blocking plate and a blocking rod, the extension direction of the blocking plate is consistent with the extension direction of the rotating shaft, the blocking rod is connected with the rotating shaft and the blocking plate, the blocking rod is perpendicular to the blocking plate, and the pressing mechanism is used to press the blocking rod.

[0008] According to some embodiments of the present application, a groove is formed in the lower part of the side surface of the blocking rod away from the blocking plate, the groove is recessed towards the blocking plate, and the pressing mechanism is used to press the groove.

[0009] According to some embodiments of the present application, the rotating drive assembly comprises a support, a rotating drive, and a hinge, the support and the rotating drive are located outside the transmission chamber, the main body of the rotating drive is rotationally connected with the support, the driving shaft of the rotating drive is hingedly connected with the rotating shaft through the hinge, and the driving shaft of the rotating drive extends in the vertical direction.

[0010] According to some embodiments of the present application, the pressing mechanism comprises a pressing driving element, a connecting element, and a pressing wheel, the extending direction of the connecting element is parallel to the extending direction of the rotating shaft, the pressing driving element is connected to the connecting element to drive the connecting element to move along its extending direction, and the pressing wheel is arranged on the connecting element, and the center line of the pressing wheel is perpendicular to the extending direction of the rotating shaft.

[0011] According to some embodiments of the present application, the rotating driving assembly comprises two rotating driving assemblies, and the pressing driving element comprises two pressing driving elements, each of which is connected to the opposite ends of the connecting element.

[0012] According to some embodiments of the present application, the connecting element comprises a first connecting plate and a second connecting plate, the first connecting plate is connected to the pressing driving element, and the second connecting plate is connected to the first connecting plate, and the pressing wheel is arranged on the second connecting plate.

[0013] According to some embodiments of the present application, the second connecting plate comprises a plate body and an extending plate, the extending plate is arranged on the side of the plate body away from the blocking element, and the extending plate is connected to the first connecting plate.

[0014] According to some embodiments of the present application, the pressing mechanism further comprises a fixing element and a rotating element, the fixing element is fixedly connected to the inner side wall of the transmission cavity, and the opposite ends of the rotating element are rotatably connected to the fixing element and the connecting element, respectively.

[0015] According to some embodiments of the present application, the transmission cavity is provided with a visual window.

[0016] According to some embodiments of the present application, the blocking element comprises a blocking plate and a blocking rod, the blocking plate is used to block the opening of the transmission cavity, the extending direction of the blocking plate is consistent with the extending direction of the rotating shaft, the blocking rod is connected to the rotating shaft and the blocking plate, and the blocking rod is arranged on the side of the blocking plate away from the transmission cavity having the opening, and the pressing mechanism is used to press the blocking rod.

[0017] According to some embodiments of the present application, the blocking rod is arranged perpendicularly to the blocking plate.

[0018] According to some embodiments of the present application, the pressing mechanism comprises a pressing driving element, a connecting element and a pressing wheel, the pressing driving element is located outside the transmission cavity, the connecting element and the pressing wheel are located inside the transmission cavity and on the side of the baffle away from the opening of the transmission cavity, the extending direction of the connecting element is parallel to the extending direction of the rotating shaft, the pressing driving element is connected with the connecting element for driving the connecting element to move along its extending direction, and the pressing wheel is arranged on the connecting element, the center line of the pressing wheel is perpendicular to the extending direction of the rotating shaft, and the pressing wheel abuts against the baffle in the blocking state.

[0019] According to some embodiments of the present application, the connecting element is rotationally connected with the transmission cavity, and the connecting element is rotationally connected with the transmission cavity through a rotating element, one end of the rotating element is rotationally connected with the inner side wall of the transmission cavity, and the other end of the rotating element is rotationally connected with the connecting element.

[0020] According to some embodiments of the present application, the device further comprises a fixing element, the fixing element is fixedly connected with the inner side wall of the transmission cavity, and one end of the rotating element is rotationally connected with the fixing element.

[0021] According to some embodiments of the present application, the connecting element comprises a first connecting plate and a second connecting plate, the opposite ends of the first connecting plate are connected with the pressing driving element and the second connecting plate respectively, and the pressing wheel is arranged on the second connecting plate.

[0022] According to some embodiments of the present application, the rotating element and the fixing element are provided in plurality, and the plurality of rotating elements and fixing elements are distributed along the extending direction of the connecting element.

[0023] According to some embodiments of the present application, the second connecting plate comprises a plate body and an extending plate, the extending plate is arranged on the side of the plate body away from the baffle, the extending plate is connected with the first connecting plate, and the pressing wheel is arranged on the plate body.

[0024] According to some embodiments of the present application, the surface area of the extending plate is smaller than the surface area of the plate body.

[0025] According to some embodiments of the present application, the rotating element comprises two rotating connecting plates, and the two rotating connecting plates are located on the upper side and the lower side of the plate body respectively.

[0026] According to some embodiments of the present application, the pressing wheel is provided in plurality, and the plurality of pressing wheels are arranged in sequence along the extending direction of the connecting element.

[0027] According to some embodiments of the present application, two rotating driving assemblies are provided, and two pressing driving members are provided, and the two pressing driving members are connected to opposite ends of the connecting member respectively.

[0028] Another technical solution adopted by the present application is:

[0029] A PVD equipment transmission transition device comprises a transmission cavity, a rotating mechanism, a blocking piece and a pressing mechanism.

[0030] The rotating mechanism comprises a rotating driving assembly and a rotating shaft, the rotating shaft is located in the transmission cavity, the rotating driving assembly is connected to the rotating shaft to drive the rotating shaft to rotate around its axis, the rotating driving assembly comprises a support, a rotating driving member and a hinge, the support and the rotating driving member are located outside the transmission cavity, the main body of the rotating driving member is rotationally connected to the support, and the driving shaft of the rotating driving member is hingedly connected to the rotating shaft through the hinge.

[0031] The blocking piece is connected to the rotating shaft, the blocking piece comprises a blocking plate and a blocking rod, the blocking plate is used to block the opening of the transmission cavity, the blocking rod connects the rotating shaft and the blocking plate, and the blocking rod is arranged on the side of the blocking plate away from the opening.

[0032] The pressing mechanism comprises a pressing driving member, a connecting member and a pressing wheel, the pressing driving member is located outside the transmission cavity, the connecting member and the pressing wheel are located in the transmission cavity and on the side of the blocking plate away from the opening, the extension direction of the connecting member is parallel to the extension direction of the rotating shaft, the pressing driving member is connected to the connecting member to drive the connecting member to move along its extension direction, the pressing wheel is arranged on the connecting member, and the center line of the pressing wheel is perpendicular to the extension direction of the rotating shaft.

[0033] The device has a blocking state, when in the blocking state, the blocking plate is located at the opening of the transmission cavity to block the opening, and the pressing wheel is pressed against the blocking rod.

[0034] Compared with the prior art, the present application has the following advantages due to the use of the above technical solutions:

[0035] The PVD equipment transmission transition device provided by the present application drives the rotating shaft to drive the blocking piece to block the opening of the transmission cavity through the rotating driving assembly and the pressing mechanism, thereby ensuring the sealing property, preventing the different vacuum coating chambers from being directly connected to the outside to cause pressure relief, preventing vacuum leakage, and not affecting the operation of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0036] Fig. 1 is a structural view of the PVD equipment transfer transition device according to the present application from a first perspective;

[0037] Fig. 2 is a structural view of the PVD equipment transfer transition device according to the present application from a second perspective;

[0038] Fig. 3 is a structural view of the PVD equipment transfer transition device according to the present application from a third perspective (one side of the transfer cavity is retained);

[0039] Fig. 4 is an enlarged view of Fig. 2;

[0040] Fig. 5 is a structural view of the rotating mechanism, the blocking piece and the pressing mechanism of the PVD equipment transfer transition device according to the present application from a first perspective;

[0041] Fig. 6 is an enlarged view of the rotating mechanism and the pressing mechanism in Fig. 5;

[0042] Fig. 7 is a structural view of the rotating mechanism, the blocking piece and the pressing mechanism of the PVD equipment transfer transition device according to the present application from a second perspective;

[0043] Fig. 8 is a structural view of the rotating mechanism, the blocking piece and the pressing mechanism of the PVD equipment transfer transition device according to the present application from a second perspective;

[0044] Fig. 9 is an enlarged view of the rotating mechanism and the blocking piece in Fig. 8;

[0045] Fig. 10 is a structural view of the rotating mechanism of the PVD equipment transfer transition device according to the present application;

[0046] Fig. 11 is a structural view of the pressing mechanism of the PVD equipment transfer transition device according to the present application.

[0047] In the above figures:

[0048] 1 - transfer cavity, 11 - opening, 12 - visual window;

[0049] 2 - rotating mechanism, 21 - support piece, 22 - rotating driving piece, 23 - hinged piece, 24 - rotating shaft, 25 - shaft seal;

[0050] 3 - pressing mechanism, 31 - pressing driving piece, 32 - pressing wheel, 33 - plate body, 331 - convex part, 34 - extension plate, 35 - first connecting plate, 36 - fixing piece, 37 - rotating connecting plate;

[0051] 4 - blocking plate, 5 - blocking rod, 51 - groove. DETAILED DESCRIPTION

[0052] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0053] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0054] Referring to the PVD equipment transfer transition device of FIGS. 1-11, the device includes a transfer cavity 1, a rotating mechanism 2, a blocking piece, and a pressing mechanism 3, wherein:

[0055] In the production process, the PVD equipment transfer transition device is used in a PVD coating equipment, and is located between two adjacent vacuum coating chambers to play a transition role, preventing the vacuum coating chamber from being directly connected with the outside to cause pressure relief. The arrangement of the PVD equipment transfer transition device does not affect the normal operation of the PVD coating equipment.

[0056] The transfer cavity 1 is in the shape of a square, has a receiving cavity inside, and has an opening 11 on one side and an open mouth on the opposite side. When the opening 11 and the open mouth are connected, the carrier carrying the silicon wafer is sequentially transferred from one vacuum coating chamber to another vacuum coating chamber through the transfer cavity 1.

[0057] The rotating mechanism 2 includes a rotating drive assembly and a rotating shaft 24. The rotating shaft 24 is located inside the transfer cavity 1 and extends in the same direction as the opening 11 of the transfer cavity 1, such as extending along the X-axis direction. The rotating drive assembly is connected with the rotating shaft 24 for driving the rotating shaft 24 to rotate around its own axis. The blocking piece is connected with the rotating shaft 24.

[0058] The device has a blocking state and a non-blocking state. When in the blocking state, the blocking piece is located at the opening 11 of the transmission cavity 1 to block the opening 11, and the pressing mechanism 3 presses the blocking piece, so that the blocking piece better blocks the opening 11. At this time, the side of the vacuum coating chamber adjacent to the transmission cavity 1 is adjacent to the transmission cavity 1, which can prevent the vacuum coating chamber from being directly connected with the outside to cause pressure relief, prevent vacuum leakage, and ensure the vacuum degree. When in the non-blocking state, the blocking piece is away from the opening 11 of the transmission cavity 1, the opening 11 is connected with the opening, and the pressing mechanism 3 is away from the blocking piece. The carrier can be transmitted from one vacuum coating chamber to another vacuum coating chamber through the transmission cavity 1.

[0059] The blocking piece of the example includes a blocking plate 4 and a blocking rod 5. The extension direction of the blocking plate 4 is consistent with the extension direction of the rotating shaft 24. The surface area of the blocking plate 4 is greater than or equal to the surface area of the opening 11 of the transmission cavity 1. The blocking plate 4 can cover and block the opening 11. The blocking plate 4 is located below the rotating shaft 24. The blocking rod 5 is connected with the rotating shaft 24 and the blocking plate 4. The blocking rod 5 is arranged on the side of the blocking plate 4 away from the transmission cavity 1 having the opening 11. The pressing mechanism 3 is used to press the blocking rod 5. In some embodiments, the extension direction of the blocking rod 5 is perpendicular to the extension direction of the blocking plate 4. When the device is in the blocking state, the blocking plate 4 extends in the vertical direction.

[0060] The upper end of the blocking rod 5 of the example is connected with the rotating shaft 24. The middle part of the blocking rod 5 is connected with the blocking plate 4 through a fastener (such as a bolt and nut assembly). The lower end of the blocking rod 5 extends downward to a distance beyond the lower end of the blocking plate 4, which is convenient for the lower end of the blocking rod 5 to be pressed by the pressing mechanism 3. In some embodiments, a groove 51 is opened in the lower part of the side of the blocking rod 5 away from the blocking plate 4. The groove 51 is recessed towards the blocking plate 4. The pressing mechanism 3 is used to press the groove 51. The groove 51 is arranged to have a positioning effect and is beneficial to the pressing mechanism 3 to better press the blocking rod 5.

[0061] In the example, the rotary drive assembly includes a support 21, a rotary drive 22, and a hinge 23. The support 21 and the rotary drive 22 are both located outside the transmission cavity 1. The main body of the rotary drive 22 is rotationally connected with the support 21. The driving shaft of the rotary drive 22 is hingedly connected with the rotating shaft 24 through the hinge 23 (one end of the hinge 23 is fixedly connected with the rotating shaft 24, and the driving shaft of the rotary drive 22 is rotationally connected with the other end of the hinge 23). The driving shaft of the rotary drive 22 extends in the vertical direction (Z axis). Under the drive of the rotary drive 22, the rotating shaft 24 rotates around its own axis, drives the blocking plate 4 to rotate around the rotating shaft 24, and makes the blocking plate 4 block the opening 11 of the transmission cavity 1 or make the blocking plate 4 away from the opening 11 of the transmission cavity 1.

[0062] Referring to FIGS. 6-7, the device further includes a shaft seal 25 arranged at one end of the rotating shaft 24. The hinge 23 is connected with the shaft seal 25.

[0063] In the example, the pressing mechanism 3 comprises a pressing driving member 31, a connecting member and a pressing wheel 32. The pressing driving member 31 is located outside the transmission cavity 1. The connecting member and the pressing wheel 32 are both located inside the transmission cavity 1 and on the side of the baffle 4 away from the side of the transmission cavity 1 having the opening 11. The extension direction of the connecting member (e.g. extending along the X-axis direction) is parallel to the extension direction of the rotating shaft 24. The pressing wheel 32 is rotatably arranged on the connecting member. The center line of the pressing wheel 32 is perpendicular to the extension direction of the rotating shaft 24. The pressing driving member 31 is connected to the connecting member for driving the connecting member to move along the length direction thereof. When in the blocking state, the connecting member moves along the length direction thereof until the pressing wheel 32 abuts against the stopper 5, so that the baffle 4 is better abutted against the inner wall of the side of the transmission cavity 1 having the opening 11, thereby more stably blocking the opening 11 of the transmission cavity 1 and ensuring the sealing property. When the connecting member moves away from the baffle 4, the pressing wheel 32 moves away from the stopper 5.

[0064] In a preferred embodiment, a plurality of pressing wheels 32 are arranged. The plurality of pressing wheels 32 are arranged in sequence along the extension direction of the connecting member. A plurality of stoppers 5 can be arranged. The plurality of stoppers 5 are arranged in sequence along the extension direction of the baffle 4. The stopper 5 corresponds to the pressing wheel 32 one by one. When the device is in the blocking state, each stopper 5 abuts against the corresponding pressing wheel 32, so that the baffle 4 better blocks the opening 11 of the transmission cavity 1 and ensures the sealing property.

[0065] Referring to FIG. 11, the connecting member comprises a first connecting plate 35 and a second connecting plate. One end of the first connecting plate 35 is connected to the pressing driving member 31 (the first connecting plate 35 can be connected to the pressing driving member 31 through a floating joint). The second connecting plate is connected to the other end of the first connecting plate 35. The pressing wheel 32 is rotatably arranged on the second connecting plate. Preferably, two first connecting plates 35 are arranged. The two first connecting plates 35 are arranged opposite to each other. The two first connecting plates 35 are arranged on the upper and lower sides of one end of the second connecting plate (the extension plate 34 of the second connecting plate). The arrangement of the two first connecting plates 35 makes the connection between the connecting member and the pressing driving member 31 more stable.

[0066] Referring to FIG. 11, the second connecting plate comprises a plate body 33 and an extension plate 34. The plate body 33 is closer to the stopper than the extension plate 34. The extension plate 34 is arranged on the side of the plate body 33 away from the stopper. The extension plate 34 is connected to the first connecting plate 35. The surface area of the extension plate 34 is smaller than that of the plate body 33. The arrangement of the extension plate 34 facilitates the connection between the first connecting plate 35 and the second connecting plate.

[0067] The connecting piece of the example is rotatably connected with the transmission cavity 1 through a rotating piece, the device further comprises a fixing piece 36, the fixing piece 36 is fixedly connected with an inner side wall of the transmission cavity 1, and opposite ends of the rotating piece are rotatably connected with the fixing piece 36 and the plate body 33 respectively. When the compression driving piece 31 drives the connecting piece to move towards the direction close to the baffle 4, the fixing piece 36 is stationary, and the rotating piece rotates relative to the fixing piece 36 until the compression wheel 32 abuts against the stop rod 5. The advantages of arranging the fixing piece 36 and the rotating piece are that the movement of the connecting piece is more stable, the connecting piece does not deviate during the movement, and the baffle 4 can better block the opening 11 of the transmission cavity 1.

[0068] Referring to FIG. 11, the upper surface of the plate body 33 is provided with a protrusion 331 protruding from the upper surface, the distance between the protrusion 331 and the plane where one end surface of the plate body 33 in the length direction is located is equal to 0, the protrusion 331 is close to the first connecting plate 35, and the compression wheel 32 is located on the upper surface of the plate body 33, which is lower than the protrusion 331. The advantage of the protrusion 331 is to support and limit the compression wheel 32. The transmission cavity 1 is provided with a viewing window 12, through which the inside of the transmission cavity 1 can be observed. In a preferred embodiment, the compression driving piece 31 is provided with two, and the two compression driving pieces 31 are connected with opposite ends of the connecting piece respectively. The rotating driving assembly is provided with two, and the two rotating driving assemblies are connected with opposite ends of the rotating shaft 24 respectively. The advantage of such an arrangement is that the rotation of the rotating shaft 24 is more stable, the movement of the connecting piece is more stable, the baffle 4 can better block the opening 11 of the transmission cavity 1, and the vacuum degree of the overall state is ensured.

[0069] In the example, when the compression driving piece 31 is provided with two, the first connecting plate 35 is provided with four, one end of two first connecting plates 35 is connected with one end of the second connecting plate, the other end of the two first connecting plates 35 is connected with one compression driving piece 31, one end of the other two first connecting plates 35 is connected with the other end of the second connecting plate, and the other end of the two first connecting plates 35 is connected with the other compression driving piece 31. The structure is stable. If the compression driving piece 31 is a motor, during operation, one compression driving piece 31 rotates forward, and the other compression driving piece 31 rotates reversely.

[0070] The rotating driving piece and the compression driving piece of the example can be a motor or an air cylinder.

[0071] The specific implementation of the PVD equipment transmission transition device in the example is that when in the unblocking state, the pressing mechanism 3 does not press the blocking piece, the blocking piece is away from the opening 11 of the transmission cavity 1, after the carrier passes through, the rotary drive assembly drives the rotating shaft 24 to move the blocking piece to block the opening 11 of the transmission cavity 1, and the pressing mechanism 3 presses the blocking piece to prevent vacuum leakage.

[0072] The advantage of the PVD equipment transmission transition device in the example is that the pressing mechanism 3 presses the blocking piece, the rotary drive assembly drives the rotating shaft 24 to move the blocking piece to block the opening 11 of the transmission cavity 1, direct communication between different vacuum coating chambers and the outside is prevented, pressure relief is prevented, vacuum leakage is prevented, and the equipment operation is not affected.

[0073] The above examples are only for illustrating the technical concept and characteristics of the present application, the purpose is to enable the person skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A PVD apparatus transfer transition device, characterized by, The utility model provides a kind of device for the transmission of liquid medicine, including transmission cavity, rotating mechanism, stop piece, compression mechanism, the transmission cavity is opened with opening in one side;The rotating mechanism includes rotating drive component, pivot, the pivot is located in the transmission cavity, the rotating drive component is connected with the pivot for driving the pivot rotation around its axis of rotation;The stop piece is connected with the pivot; The device has a plugging state, when in plugging state, the stop piece is located in the opening of the transmission cavity to block the opening, and the compression mechanism presses the stop piece.

2. The PVD apparatus transfer transition device of claim 1, wherein, The stop piece includes a baffle and a stop rod, the baffle extends in the same direction as the pivot, the stop rod is connected with the pivot and the baffle, the stop rod is perpendicular to the baffle, and the compression mechanism is used to press the stop rod.

3. The PVD apparatus transfer transition device of claim 2, wherein, The lower part of the side of the stop rod away from the baffle is provided with a groove, the groove is recessed towards the baffle, and the compression mechanism is used to press the groove.

4. The PVD apparatus transfer transition apparatus according to claim 1, wherein, The rotating drive component includes a support, a rotating drive, and a hinge, the support and the rotating drive are located outside the transmission cavity, the main body of the rotating drive is rotationally connected with the support, the drive shaft of the rotating drive is hingedly connected with the pivot through the hinge, and the drive shaft of the rotating drive extends vertically.

5. The PVD apparatus transfer transition apparatus according to claim 1, wherein, The compression mechanism includes a compression drive, a connecting piece, and a compression wheel, the connecting piece extends in the same direction as the pivot, the compression drive is connected with the connecting piece to drive the connecting piece to move in its extension direction, and the compression wheel is arranged on the connecting piece, with the center line of the compression wheel being perpendicular to the extension direction of the pivot.

6. The PVD apparatus transfer transition device of claim 5, wherein, The rotating drive component is provided with two, the compression drive is provided with two, and the two compression drives are respectively connected with the opposite ends of the connecting piece.

7. The PVD apparatus transfer transition device of claim 5, wherein, The connecting piece includes a first connecting plate and a second connecting plate, the first connecting plate is connected with the compression drive, the second connecting plate is connected with the first connecting plate, and the compression wheel is arranged on the second connecting plate.

8. The PVD apparatus transfer transition device of claim 7, wherein, The second connecting plate includes a plate body and an extension plate, the extension plate is arranged on the side of the plate body away from the stop piece, and the extension plate is connected with the first connecting plate.

9. The PVD apparatus transfer transition device of claim 5, wherein, The compression mechanism further includes a fixing piece and a rotating piece, the fixing piece is fixedly connected with the inner side wall of the transmission cavity, and the opposite ends of the rotating piece are rotationally connected with the fixing piece and the connecting piece.

10. The PVD apparatus transfer transition apparatus according to claim 1, wherein, A visible window is arranged on the transmission cavity.

11. The PVD apparatus transfer transition apparatus according to claim 1, wherein, The stop piece includes a baffle and a stop rod, the baffle is used to block the opening of the transmission cavity, the baffle extends in the same direction as the pivot, the stop rod is connected with the pivot and the baffle, the stop rod is arranged on the side of the baffle away from the transmission cavity with the opening, and the compression mechanism is used to press the stop rod.

12. The PVD apparatus transfer transition device of claim 11, wherein, The stop rod is perpendicular to the baffle.

13. The PVD apparatus transfer transition device of claim 11, wherein, The compression mechanism comprises a compression driving element, a connecting element and a compression wheel, the compression driving element is located outside the transmission cavity, the connecting element and the compression wheel are located inside the transmission cavity and on the side of the baffle away from the opening of the transmission cavity, the extension direction of the connecting element is parallel to the extension direction of the rotating shaft, the compression driving element is connected with the connecting element for driving the connecting element to move along its extension direction, the compression wheel is arranged on the connecting element, the center line of the compression wheel is perpendicular to the extension direction of the rotating shaft, and the compression wheel abuts against the stop lever when in the blocking state.

14. The PVD apparatus transfer transition device of claim 13, wherein, The connecting element is rotationally connected with the transmission cavity, the connecting element is rotationally connected with the transmission cavity through a rotating element, one end of the rotating element is rotationally connected with the inner side wall of the transmission cavity, and the other end of the rotating element is rotationally connected with the connecting element.

15. The PVD apparatus transfer transition device of claim 14, wherein, The device further comprises a fixing element, the fixing element is fixedly connected with the inner side wall of the transmission cavity, and one end of the rotating element is rotationally connected with the fixing element.

16. The PVD apparatus transfer transition apparatus according to claim 13, wherein, The connecting element comprises a first connecting plate and a second connecting plate, the opposite ends of the first connecting plate are connected with the compression driving element and the second connecting plate respectively, and the compression wheel is arranged on the second connecting plate.

17. The PVD apparatus transfer transition device of claim 16, wherein, The second connecting plate comprises a plate body and an extension plate, the extension plate is arranged on the side of the plate body away from the stop element, and the extension plate is connected with the first connecting plate; and the compression wheel is arranged on the plate body.

18. The PVD apparatus transfer transition device of claim 17, wherein, The surface area of the extension plate is smaller than the surface area of the plate body.

19. A PVD apparatus transfer transition device, characterized by It comprises: a transmission cavity, a rotating mechanism, a stop element and a compression mechanism, one side of the transmission cavity is provided with an opening; the rotating mechanism comprises a rotating driving assembly and a rotating shaft, the rotating shaft is located inside the transmission cavity, the rotating driving assembly is connected with the rotating shaft for driving the rotating shaft to rotate around its axis, the rotating driving assembly comprises a support element, a rotating driving element and a hinged element, the support element and the rotating driving element are located outside the transmission cavity, the main body of the rotating driving element is rotationally connected with the support element, and the driving shaft of the rotating driving element is hinged with the rotating shaft through the hinged element; the stop element is connected with the rotating shaft, the stop element comprises a baffle and a stop lever, the baffle is used for blocking the opening of the transmission cavity, the stop lever connects the rotating shaft with the baffle, and the stop lever is arranged on the side of the baffle away from the opening of the transmission cavity; the compression mechanism comprises a compression driving element, a connecting element and a compression wheel, the compression driving element is located outside the transmission cavity, the connecting element and the compression wheel are located inside the transmission cavity and on the side of the baffle away from the opening, the extension direction of the connecting element is parallel to the extension direction of the rotating shaft, the compression driving element is connected with the connecting element for driving the connecting element to move along its extension direction, the compression wheel is arranged on the connecting element, and the center line of the compression wheel is perpendicular to the extension direction of the rotating shaft. The device has a blocking state, when in the blocking state, the baffle is located at the opening of the transmission cavity to block the opening, and the compression wheel is pressed against the stop rod.

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