X-ray measuring arrangement, transport-lock module, and method for examining test objects using a x-ray measuring arrangement

Abstract

The invention relates to an X-ray measuring arrangement for examining a test object by means of X-ray radiation, comprising: a) a measurement cabin (27); b) an X-ray device which has at least one X-ray source (23) and is arranged in an internal volume (15) of the measurement cabin (27); c) at least one transport lock (1) which comprises at least one transport device having a movable transport element (3) for transporting at least one test object between an external volume (14) and the internal volume (15) of the measurement cabin (27), wherein the transport lock (1) comprises or forms a transport tunnel (13) which connects the external volume (14) to the internal volume (15), characterised in that at least one section of the transport tunnel (13) has a non-linear course. The invention also relates to a transport-lock module and to a method for examining test objects using an X-ray measuring arrangement.

Description

[0001] Applicant: Carl Zeiss Industrial Metrology GmbH

[0002] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0003] X-ray measuring arrangement, transport lock module and method for examining test objects with an X-ray measuring arrangement

[0004] The invention relates to an X-ray measuring arrangement, a transport lock module and a method for examining test objects using X-rays with such an X-ray measuring arrangement.

[0005] In industrial metrology, it is common practice to examine test objects, such as workpieces, during or after manufacturing using non-invasive methods, particularly for quality control or to plan further production steps. Such an examination can determine deviations between the actual and target properties of the test object. For this purpose, among other things, the following methods are used:

[0006] X-ray measurement setups are used that generate so-called transmission images of the test object using X-rays. A transmission image can then be evaluated to perform the described examination. If a test object is irradiated from different directions in a known manner and corresponding transmission images are generated, a three-dimensional reconstruction of the test object can be determined, which can also serve as the basis for the described examination.

[0007] WO 2024 / 083342 A1 describes such an X-ray measuring arrangement for examining test objects using X-rays. This arrangement comprises an X-ray examination device with at least one X-ray source and at least one X-ray detector, which are arranged on a rotatable receiving device. The document further discloses that the X-ray measuring arrangement has at least two independently operating positioning devices and, for each of the at least two positioning devices, corresponding feed and discharge devices for feeding and removing test objects. The positioning devices can, in particular, be used to arrange the test objects within a detection range of the X-ray examination device.

[0008] According to the teaching of WO 2024 / 083342 A1, a feeding and discharging device comprises conveyor belts that move a test object along a straight trajectory. The publication also discloses that this conveying arrangement is located in a transport tunnel of an applicant: Carl Zeiss Industrial Metrology GmbH

[0009] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0010] A radiation lock is arranged, with the transport tunnel also having a straight course.

[0011] US 7,358,733 B2 discloses a safety inspection system comprising a housing with a cavity that defines an inspection zone. A positioning device for positioning a test object within the inspection zone is also disclosed. The inspection system includes sealing mechanisms, such as a door, that cooperate with the positioning device and are coupled to the housing, wherein the sealing mechanisms are positionable between an open and a closed position.

[0012] During the operation of X-ray measurement systems, it should be ensured that no or as little radiation as possible is emitted outside a predetermined safety zone. This is typically achieved by mechanically operated doors that seal off a measurement chamber during operation of an X-ray source. However, if such an X-ray measurement system is integrated into a production line, the opening and closing of such a door becomes disruptive, as each opening and closing process takes time and moving a test object through a door opening is technically complex. Rapidly opening and closing a door can also generate undesirable vibrations within the system. Furthermore, such opening and closing is energy-intensive and generally requires a complex mechanical design.

[0013] The technical challenge therefore arises to create an X-ray measuring arrangement for examining a test object, a transport lock module, and a method for examining a test object using such an X-ray measuring arrangement. These elements must enable the rapid transport of a test object into and out of a safety zone within the X-ray measuring arrangement while simultaneously ensuring a high level of operational reliability. Furthermore, the technical challenge lies in providing this transport to and from the safety zone with minimal energy consumption and a simple mechanical design, as well as reducing or minimizing the generation of vibrations. Applicant: Carl Zeiss Industrial Metrology GmbH

[0014] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0015] The solution to the technical problem is provided by the articles with the features of the independent claims. Further advantageous embodiments of the invention are described in the dependent claims.

[0016] A proposed X-ray measuring setup is used to examine a test object using X-rays. The test object can be a battery or battery cell, with battery dimensions, for example, ranging up to 500 mm x 150 mm x 50 mm.

[0017] The proposed X-ray measurement setup comprises a measurement chamber. This chamber has an internal volume, within which at least one X-ray source of an X-ray device is arranged. The measurement chamber may further include a housing that surrounds / encloses the internal volume. The housing or housing elements may be made of a radiation-inhibiting or even radiation-blocking material to attenuate the X-rays emitted by the X-ray source, particularly the primary X-rays. Generally, materials with a high atomic number and high density are suitable for radiation inhibition. Lead, for example, can be such a material. Of course, other materials such as lead alloys, tungsten, alloys of heavy metals, or steel can also be used.

[0018] The internal volume, or at least a portion thereof, can form a safety zone of the X-ray measurement setup. It is desirable that no radiation intensity, or only a reduced intensity, occurs in an external volume, i.e., a volume outside the safety zone, particularly during operation of the X-ray source.

[0019] In addition to the X-ray source, the X-ray system typically includes an X-ray detector. These are arranged in such a way that a radiographic image of a test object (or a region of interest within a test object) can be generated, provided it is located within the detection range of the X-ray system.

[0020] The X-ray source and the X-ray detector can be stationary during the acquisition of a sequence of radiographic images of a test object (e.g., for three-dimensional reconstruction). The test object to be measured can be positioned on the applicant: Carl Zeiss Industrial Metrology GmbH

[0021] Our reference: P18.927WO / 2024P00779 WO 23.09.2025. The X-ray unit can be arranged on a rotary table and rotated by means of the rotary table (e.g., VoluMax series computed tomography scanners from Carl Zeiss AG, https: / / www.zeiss.de / messtechnik / produkte / systeme / computertomographie / volumax.html). Alternatively, the X-ray unit with X-ray source and detector can be arranged on a rotatable receiving device. This is explained in WO2024 / 083342 A1, which was discussed at the beginning. By rotating the receiving device, the X-ray unit can also be rotated about the axis of rotation, so that it is possible to capture a test object arranged on the axis of rotation, particularly at the center of rotation, within a detection area between the at least one X-ray source and the at least one X-ray detector, from different transmission directions.The rotatable mounting device can be arranged such that its axis of rotation is horizontal, in particular perpendicular to a vertical axis explained below. The mounting device can be attached to a side wall of the measuring cabin.

[0022] The X-ray device can be operated in various measurement modes, e.g. for generating radiographic images with half-beam scans, helix scans, with vertical and / or horizontal merging of individual scans and / or with different magnifications.

[0023] The X-ray measurement arrangement further comprises at least one transport lock, which includes at least one transport device with a movable transport element. This transport lock serves to transport at least one test object between the outer and inner volumes of the measurement chamber, in particular the safety area, and is specifically designed as a doorless transport lock. For this purpose, the transport lock has or forms a transport tunnel, which can also be referred to as a transport channel, connecting the outer and inner volumes. Thus, the at least one test object can be transported through the transport tunnel from the inner volume to the outer volume and vice versa, with the test object(s) being supported or arranged on the movable transport element for this purpose. The transport element can have or form a corresponding holder, which, for example,designed for inserting and / or clamping a test object. The movable transport element with the test object(s) can then be moved along a transport trajectory through the transport tunnel in a single transport operation. Applicant: Carl Zeiss Industrial Metrology GmbH.

[0024] Our reference: P18.927WO / 2024P00779 WO 23.09.2025. In particular, the movable transport element can be moved between an inner and an outer end position to enable the transport of the test object from the inner volume to the outer volume or vice versa. In such an end position, the test object can be transferred to or received by a positioning device, which will be explained in more detail below. In the inner end position, a test object arranged on / at the movable transport element can be located in the inner volume; in the outer end position, it can be located in the outer volume. In the inner end position, the test object can also be located within a detection area of ​​the X-ray device.

[0025] In other words, the movable transport element is capable of transporting the test object from the inner volume to the outer volume along a transport trajectory through the transport tunnel between an inner and an outer end position, and of transporting the test object from the outer volume to the inner volume with a transport movement along the transport trajectory through the transport tunnel between the outer and the inner end position.

[0026] The transport device can include a drive unit, preferably designed as an electric motor, particularly a servo motor. Of course, other types of drive units can also be used. Furthermore, the transport device can include at least one coupling element and / or at least one gear element to transmit a drive force / torque generated by the drive unit to the movable transport element. According to the invention, at least one section of the transport tunnel has an odd path. This section moves the movable transport element between its inner and outer end positions. The path of the transport tunnel can be defined by a central center line.In particular, the transport tunnel can have a curved or kinked profile, including a multiply kinked profile or one with changing radii of curvature. In other words, the transport tunnel can be designed such that there is no straight connection between an inner tunnel entrance and an outer tunnel entrance, with such a straight connection existing exclusively within the transport tunnel. The inner tunnel entrance can be an end facing the interior volume, e.g., an end of the transport tunnel opening towards the interior volume of the measuring chamber. Applicant: Carl Zeiss Industrial Metrology GmbH.

[0027] Our reference: P18.927WO / 2024P00779 WO 23.09.2025 The outer tunnel entrance can denote an end facing the outer volume, e.g., an end open towards the outer volume. The outer end position can be assigned to the outer tunnel entrance and the inner end position to the inner tunnel entrance. This can mean that the transport element is located in the end position in the area of ​​the assigned tunnel entrance. A section with an odd path may be located along the transport tunnel between the entrances. It is possible that the entire transport tunnel between the entrances has an odd path, in particular a curved path, and furthermore, in particular a circular arc.

[0028] The transport tunnel can be designed such that, in any position (position and / or orientation) of the X-ray source within the internal volume, no emitted primary radiation can enter the transport tunnel through the inner tunnel entrance and exit into the external volume from the outer tunnel entrance without interacting with a wall section of the transport tunnel. The transport tunnel can be bounded or enclosed by wall elements of the transport lock. All or at least some of the wall elements of the transport tunnel are made at least partially or completely of a material that shields against X-rays or of a radiation-inhibiting material. Reference is made to the preceding explanations in this regard. The transport tunnel can be a tunnel closed except for the entrances. The movable transport element is also preferably made of a radiation-inhibiting material.

[0029] In addition to wall elements for limiting the transport tunnel, the transport lock can include at least one further wall element through which the inner volume is separated from the outer volume or through which the inner volume of the measuring cabin is divided into different sub-areas.

[0030] The transport trajectory described above can also have an odd path or at least include a section with an odd path. This odd path can also be curved or kinked. In particular, the transport trajectory can be semicircular or circular arcs. In this case, the transport movement can be an oscillating movement or be described as such. A section with an odd path can be found along the transport trajectory between the end positions. It is possible that the entire applicant: Carl Zeiss Industrial Metrology GmbH

[0031] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0032] The transport trajectory between the end positions is odd, in particular curved, and furthermore in a circular arc shape.

[0033] The transport movement along the transport trajectory can be a continuous movement between the end positions described, in particular a movement without setting down the test object and / or transferring the test object.

[0034] The X-ray measurement arrangement advantageously enables the rapid transport of a test object into the interior of the measurement chamber for radiography. Due to the irregular path of the transport tunnel, it is ensured that primary radiation emitted by the X-ray source to generate a radiographic image cannot escape from the interior to the exterior volume, or only to a very limited extent. Furthermore, the escape of secondary radiation caused by the primary radiation is advantageously prevented or reduced. In particular, with this design, there is no need to open or close a door or move the test object through a doorway. Thus, a high level of operational reliability is guaranteed, while at the same time enabling rapid transport into the interior volume.This is made possible from within the internal volume, which in turn allows for integration into a production line with short cycle times. Particularly when the X-ray measuring arrangement is integrated into a production line, short cycle times can be achieved, thus improving inline inspection and / or verification of workpieces within a production line. The proposed X-ray measuring arrangement can therefore transport a test object from the external volume to the internal volume in a transport time of less than or equal to 1 second, with the selection of suitable drive parameters ensuring a particularly smooth and vibration-free transport.

[0035] The X-ray measuring arrangement is, in particular, an X-ray measuring arrangement used in industrial metrology. A typical application of the X-ray measuring arrangement is, in particular, quality control of test objects at the end of a production line. The test objects examined are usually of the same type, with the same test task being performed on a large number of test objects. However, different test objects can also be examined using the X-ray measuring arrangement. The test objects are, in particular, workpieces. The X-ray measuring arrangement is, in particular, the applicant: Carl Zeiss Industrial Metrology GmbH

[0036] Our reference: P18.927WO / 2024P00779 WO 23.09.2025 This arrangement is designed to enable computed tomography (CT) scans. The X-ray measuring arrangement, in particular the X-ray unit, may also include a control unit for performing the CT scan. Specifically, the control unit is designed to reconstruct and provide an object volume from radiographic images acquired from different directions.

[0037] In a further embodiment, the transport device is designed such that at least one orientation of a transported test object remains unchanged during transport. This orientation can be defined with respect to a reference coordinate system fixed to the measuring chamber. Such a reference coordinate system can, for example, include a vertical axis oriented parallel to a direction of gravity. Furthermore, such a reference coordinate system can include a longitudinal and a transverse axis oriented perpendicular to each other and perpendicular to the vertical axis. The orientation can be defined as the orientation of a test object-fixed coordinate system relative to the measuring chamber-fixed coordinate system and, in particular, can be represented by at least one solid angle between corresponding or selected axes of the test object-fixed coordinate system and the measuring chamber-fixed coordinate system.Thus, the orientation, at least with respect to an angle between the selected spatial axes of the described coordinate systems, cannot be changed during a transport process. This advantageously results in the simplest possible design of the transport equipment as well as safe transport.

[0038] In a further embodiment, the movable transport element of the transport device is designed as a transport plate. The transport plate can have a surface for arranging exactly one or more test objects. Furthermore, it is possible for the transport plate to have or form one or more holding devices for exactly one or more test objects. This advantageously results in a simple design of the movable transport element. Applicant: Carl Zeiss Industrial Metrology GmbH

[0039] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0040] In a further embodiment, the transport device is designed such that the orientation of a normal vector of a surface of the transport plate, in particular the surface for arranging at least one test object, does not change during a transport process, especially relative to the vertical axis of the measuring-cabin-fixed coordinate system. This advantageously results in a simple and safe transport of at least one test object.

[0041] In a further embodiment, the transport tunnel and / or transport trajectory has, at least in sections, a directional component that is oriented parallel to the direction of gravity. If gravity is oriented from top to bottom, the transport tunnel and / or transport trajectory can therefore be oriented, at least in sections, from top to bottom and / or from bottom to top. This advantageously allows the force of gravity to be used for transport, in particular to accelerate the movable transport element. This, in turn, can advantageously reduce the energy consumption for transport.This also results in a simple and space-saving integration of the transport lock into the measuring cabin, particularly into an outer wall of the cabin. With such integration, especially compared to an embodiment with a horizontally extending transport tunnel / trajectory, only a small footprint is required for the X-ray measuring arrangement. If the tunnel runs, at least partially, horizontally, the design with an irregular path may require additional installation space in a horizontal plane, which in turn can result in a larger footprint. Furthermore, this advantageously improves the integration of the transport tunnel into existing X-ray measuring arrangement designs that, due to other vertically extending components such as a control cabinet, offer installation space for such a vertically extending transport tunnel, particularly for batteries.The proposed embodiment is also advantageous for transporting test objects whose dimensions along one spatial direction are significantly larger than those in the remaining spatial directions, e.g., long battery cells. These are generally transported lying down rather than upright. Transporting such test objects in a horizontally running transport tunnel requires a large amount of installation space in a horizontal plane, which in turn can result in an undesirably large footprint. In the case of the proposed embodiment, the applicant is Carl Zeiss Industrial Metrology GmbH.

[0042] Our reference: P18.927WO / 2024P00779 WO 23.09.2025 The transport tunnel should not be dimensioned much larger in the horizontal direction than the largest dimension, which in turn minimizes the installation area.

[0043] In another embodiment, at least one section of the transport tunnel and / or a transport trajectory follows a circular arc. This can mean that a reference point of the transport element (and thus also of the test object arranged on / at the transport element) moves along a circular arc during transport. This advantageously results in a simple design for the transport device, since circular arc movements can be generated in a structurally simple manner using conventional drive devices, such as servo motors. However, it is also conceivable that the irregularly shaped transport tunnel is not circular arc-shaped, but the transport movement is carried out along a circular arc-shaped transport trajectory.

[0044] In a further embodiment, the transport device comprises an output shaft and a connecting element for mechanically connecting the output shaft to the movable transport element. The drive shaft can be the output shaft of a drive unit of the transport device. The connecting element can, in particular, be a rigid connecting element. A first end of the connecting element can be attached to or coupled with the output shaft. If the output shaft moves about an axis of rotation, the connecting element, in particular a second, free end of the connecting element, can also be moved along a circular arc trajectory. The movable transport element can be rigidly or movably, in particular rotatably, mounted on the connecting element, especially at the free end of the connecting element. The connecting element is preferably rod-shaped.

[0045] In this way, the movement of the movable transport element along a circular arc trajectory can be advantageously ensured with a mechanically simple design. In particular, the center point of the circular arc transport trajectory can lie on the axis of rotation of the output shaft. This axis of rotation can then form the central axis of an oscillating movement of the movable transport element. Applicant: Carl Zeiss Industrial Metrology GmbH

[0046] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0047] In a further embodiment, the transport device comprises a coupling element for driving the movable transport element, in particular to move the movable transport element relative to the connecting element. The coupling element can be designed as a coupling belt, coupling band, or toothed belt, wherein such a coupling element can connect a coupling section on the transport element side to a stationary coupling section of the transport gate. Such a coupling section can, for example, be designed as a roller or toothed belt pulley. The coupling section on the transport element side can, for example, be connected to a support shaft that is rotatably mounted on the connecting element and to which the movable transport element is attached. The stationary coupling section is not rotatable relative to the transport gate or in the reference coordinate system; in particular, this stationary coupling section does not rotate with the output shaft.

[0048] Such a coupling element allows a driving force to be transmitted to, or exerted on, the movable transport element to perform a relative movement between the connecting element and the movable transport element, particularly via the aforementioned carrier shaft. When the movement of the movable transport element is then carried out along the transport trajectory, the coupling element generates a torque that produces a rotational movement of the movable transport element, particularly relative to the connecting element.

[0049] The movable transport element can then perform both a movement along the transport trajectory and a movement, in particular a rotational movement, relative to the connecting element, whereby the two movements can be superimposed. This advantageously ensures that—as explained above—at least one orientation of a transported test object does not change during the transport process. The connecting element and / or coupling element described above can be a clutch element and / or a gear element of the transport device.

[0050] Naturally, the described relative movement between the movable transport element and the connecting element to ensure constant orientation can also be achieved in other ways, for example with a suitably arranged and designed drive unit and / or gearbox. Applicant: Carl Zeiss Industrial Metrology GmbH

[0051] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0052] In a further embodiment, the movable transport element of the transport device, in an inner end position, closes an inner tunnel entrance without a gap or with a maximum gap of 0.5 mm. Alternatively or cumulatively, in an outer end position, the movable transport element closes an outer tunnel entrance without a gap or with a maximum gap of 0.5 mm. This advantageously further increases operational safety, since the transport tunnel is completely or largely sealed against primary and secondary radiation in the inner and / or outer end position.

[0053] In a preferred embodiment, the movable transport element of the transport device overlaps a wall element of the transport lock in its end position. In particular, the transport element can completely close the corresponding tunnel entrance in its end position and thereby overlap a wall element. Preferably, at least one wall element of the transport tunnel overlaps the movable transport element, especially an outer edge region of the transport element. The transport element, especially its edge region, can also rest against the wall element in its end position, i.e., touch it. This advantageously results in increased operational reliability, as explained above. However, it is also conceivable that an edge of the transport element rests flush against an edge of a wall element.

[0054] In a further embodiment, the transport device comprises a drive unit located outside the transport tunnel. Preferably, the drive unit is located in a section of the interior volume of the measuring chamber, which is separated by radiation-shielding wall elements from another section of the interior volume in which the X-ray source is located. Alternatively, the drive unit can also be located outside the measuring chamber. In this embodiment, it is possible for an output shaft of the drive unit to extend into the transport tunnel through at least one opening in the tunnel wall or the measuring chamber. Preferably, a bearing assembly is arranged in such an opening to support the output shaft.It is also possible that the output shaft extends into the transport tunnel through a first opening in the tunnel wall and out of the transport tunnel through a further opening in the tunnel wall. Applicant: Carl Zeiss Industrial Metrology GmbH.

[0055] Our reference: P18.927WO / 2024P00779 WO 23.09.2025. The output shaft can be supported by bearing devices in both through-holes. The bearing device(s) can be made, at least partially, of a radiation-shielding material.

[0056] Positioning the drive unit outside the transport tunnel advantageously increases operational safety, as this arrangement shields the drive unit from any radiation that might enter the transport tunnel or from secondary radiation generated within the tunnel. This prevents unwanted damage to the drive unit, extends its service life, and allows for the use of a wider range of drive units.

[0057] In a further embodiment, the transport lock comprises at least one movable closing element for closing a tunnel entrance. Such a closing element can be made of a radiation-shielding material and, for example, be designed as a closing plate. The closing plate can have the same width and length as the transport element. Such a closing element can be moved into an open state by leaving the respective tunnel entrance unclosing. Likewise, the closing element can be moved into a closed state by closing the corresponding tunnel entrance, preferably completely. Thus, it is possible to close the tunnel entrance with the movable closing element, particularly when the movable transport element is not in the end position associated with the corresponding tunnel entrance.In a closed state, the locking element can assume the same spatial position as the transport element in the end position, which is assigned to the corresponding tunnel entrance.

[0058] The transport lock may include an additional drive unit for driving such a locking element. This unit may be mechanically connected to the locking element via at least one suitable gear and / or coupling element.

[0059] It is possible that the movable closing element serves to close the inner tunnel entrance or the outer tunnel entrance. Preferably, however, the transport lock comprises a first movable closing element for closing the inner tunnel entrance and a further movable closing element for the applicant: Carl Zeiss Industrial Metrology GmbH

[0060] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0061] Closing the outer tunnel entrance. These closing elements can be designed, for example, as closing flaps. If the movable transport element is, for example, in an outer end position, the further closing element described above can be in an open state. Preferably, but not necessarily, the first closing element described above is then in a closed state. If the movable transport element is now moved from the outer end position to the inner end position, the further closing element can be moved into the closed state. Simultaneously, but preferably with a time delay, the first closing element can be moved into the open state, in particular so that the transport element can be moved into the inner end position. A corresponding reverse sequence can be carried out when moving from the inner to the outer end position.This advantageously results in a further improvement in operational safety, as in particular the escape of secondary radiation from the transport tunnel is reliably prevented or significantly reduced.

[0062] In a further embodiment, the movable transport element of the transport device is coupled to the closing element in such a way that the closing element is moved into an open state when the movable transport element is moved towards the tunnel entrance and / or into a closed state when the movable transport element is moved away from the tunnel entrance that the closing element can close. For this purpose, the transport gate can include a coupling system, particularly for mechanical coupling, which, for example, converts a movement of the transport element into a movement of the closing element. This advantageously eliminates the need for a separate drive device for moving the closing element.Operational reliability can also be increased, as the coupling of the transport element's movement with the movement of the closure element, particularly through appropriate mechanical design, can ensure that a tunnel entrance is always closed when the transport element is not in the corresponding end position or is positioned more than a predetermined distance from this end position along the transport trajectory, and / or that the tunnel entrance is open when the transport element reaches the corresponding end position. In particular, a collision between the transport element or test object and the closure element can thus be reliably avoided. Applicant: Carl Zeiss Industrial Metrology GmbH.

[0063] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0064] In a further embodiment, the transport lock comprises a first movable closure element for an inner tunnel entrance and a further movable closure element for an outer tunnel entrance, wherein the movement of the closure elements can be controlled such that both closure elements are never in an open state in any transport position of the movable transport element. This advantageously increases operational safety, since the escape of primary radiation, in particular through the first movable closure element in the closed state, and the escape of primary and / or secondary radiation through the further movable closure element in the closed state can be reduced.

[0065] In a further embodiment, a wall element of the transport lock has or forms a guide element for guiding the movement of the movable transport element. The guide element can, in particular, be designed as a guide groove. This guide groove can preferably have a circular arc shape. This advantageously increases the reliability of the transport.

[0066] In a further embodiment, the X-ray measuring arrangement comprises several transport locks and / or several transport devices. Preferably, in such an embodiment, the X-ray measuring arrangement comprises exactly one X-ray device, wherein the X-ray source and / or the X-ray detector of this X-ray device are further preferably arranged to be movable. However, it is also possible for the X-ray measuring arrangement to comprise several X-ray devices, in particular exactly one X-ray device per transport lock. Such X-ray devices can, in particular, be arranged in a stationary position.

[0067] The transport tunnels of the multiple transport locks can be structurally separated from one another, in particular by at least one wall element. This advantageously allows simultaneous transport movements to be carried out. In particular, a first test object can be transported from the inner volume to the outer volume through the transport tunnel of a first transport lock, while at least temporarily another test object is simultaneously being transported through the transport tunnel of a further transport lock. Applicant: Carl Zeiss Industrial Metrology GmbH

[0068] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0069] The outer volume is transported into the inner volume. This allows cycle times for examining test objects to be further reduced in a beneficial way.

[0070] In a further embodiment, the X-ray measuring arrangement comprises at least one loading device for positioning at least one test object on / at the movable transport element of the transport device. This loading device can be located in the outer volume. In particular, the at least one test object can be positioned on / at the movable transport element by the loading device in its outer end position. The loading device can be designed as a positioning device, in particular as an articulated robot arm. In particular, the loading device can include a gripper device for grasping a test object, whereby a gripped test object can then be positioned on / at the transport element. The X-ray measuring arrangement can also comprise several loading devices, e.g., exactly one loading device per transport tunnel.However, it is also conceivable that a loading device is assigned to several transport tunnels and can position test objects on the transport elements of several transport locks and / or remove them from these. This advantageously results in the reliable transport of a test object from the outer volume to the inner volume.

[0071] It is possible that the X-ray measurement setup includes at least one additional positioning device, which is located, in particular, within the interior of the measurement chamber. This device can be configured to position the test object, or at least a predefined region of interest within the X-ray unit's detection range and to hold it there during the examination. Such a positioning device can also be designed as an articulated robot arm.

[0072] In a further embodiment, the X-ray measuring arrangement comprises at least one feeding device for feeding the at least one test object into a working chamber of the loading device. The feeding device can also be a positioning device. Preferably, the feeding device is a conveyor belt, but differently designed feeding devices can also be used. This further improves the transport from the outer volume to the inner volume, particularly with short cycle times. Applicant: Carl Zeiss Industrial Metrology GmbH

[0073] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0074] In a further embodiment, a rotary table is arranged on the movable transport element of the transport device. The at least one test object can be arranged on the rotary table. The rotary table can include at least one drive unit for performing a rotary movement of the rotary table. This advantageously allows a test object to be moved into different rotational positions relative to an X-ray source and an X-ray detector, in particular to generate several radiographic images for the three-dimensional reconstruction described above.

[0075] A transport lock module for an X-ray measuring arrangement according to one of the embodiments described in this disclosure is further proposed. The transport lock module includes or forms the transport tunnel. The module further comprises at least one transport device with the movable transport element for transporting at least one test object through the transport tunnel, wherein at least one section of the transport tunnel has an odd path. The transport lock module can be a module of a measuring cabin or X-ray measuring arrangement consisting of modules. The transport lock module can also include the loading device and / or feeding device described. This advantageously results in a simple retrofit of existing measuring cabins / X-ray measuring arrangements or a simple mechanical manufacture of such systems.

[0076] A further proposed method is for examining test objects using X-rays with an X-ray measuring arrangement according to one of the embodiments described in this disclosure. The method comprises the steps of: transporting at least one test object through the transport tunnel from the outer volume to the inner volume of the measuring chamber, and generating at least one radiographic image of the X-ray device.

[0077] In this process, the movable transport element can be moved to transport the test object from the outer volume to the inner volume by means of a transport movement along a transport trajectory through the transport tunnel between an outer and an inner end position.

[0078] The procedure may further include the following steps: Applicant: Carl Zeiss Industrial Metrology GmbH

[0079] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0080] Examining the test object by evaluating at least one radiographic image,

[0081] Moving a transport element to adjust the orientation of a transported test object,

[0082] Moving at least one locking element into an open or closed state,

[0083] Transport of at least one test object through the transport tunnel from the inner volume to the outer volume of the measuring chamber,

[0084] - Arranging the at least one test object on / at the movable transport element of the transport device with a loading device; feeding the test object into a working area of ​​a loading device of the X-ray measuring device.

[0085] In this process, the movable transport element can be moved along the transport trajectory through the transport tunnel between the inner and outer end positions to transport the test object from the inner volume to the outer volume.

[0086] The execution of the steps, particularly the timing, can be controlled by a control unit of the X-ray measuring arrangement. For this purpose, the at least one transport unit, as well as any loading and feeding units, can be controlled, particularly in a time-coordinated manner, especially with a coordinated cycle time. The movement of the transport element for setting the orientation and the movement of the at least one closure element can also be controlled, particularly as previously explained. These movements can preferably be synchronized with a transport movement, especially to ensure short cycle times. It is also possible to execute transport processes for different test objects simultaneously, at least temporarily, particularly transport processes through transport tunnels of different transport locks.

[0087] The examination of the test object can be carried out using an evaluation unit of the X-ray measuring arrangement. A control unit and an evaluation unit can be configured as a single, shared computing unit, wherein a computing unit can include at least one microcontroller or integrated circuit. Applicant: Carl Zeiss Industrial Metrology GmbH

[0088] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0089] The invention is explained in more detail using exemplary embodiments. The figures show:

[0090] Fig. 1 shows a perspective view of a transport lock according to a first embodiment,

[0091] Fig. 2 shows a perspective view of a transport lock according to a further embodiment,

[0092] Fig. 3 shows a perspective view of part of an X-ray measuring arrangement according to the invention with several transport locks,

[0093] Fig. 4 shows a perspective view of a measuring cabin with several transport locks,

[0094] Fig. 5 shows a perspective view of parts of an X-ray measuring arrangement according to the invention,

[0095] Fig. 6 shows a perspective view of an X-ray measuring arrangement with a loading device, and

[0096] Fig. 7 shows a schematic flowchart of a method according to the invention.

[0097] In the following, identical reference symbols denote elements with the same or similar technical characteristics.

[0098] Fig. 1 shows a perspective view of a transport lock 1, which forms part of an X-ray measuring arrangement 2 (see Fig. 5). The transport lock 1 comprises a transport device with a movable transport element 3 and a drive unit 4. An output shaft 5 of the drive unit 4 is connected to the transport element 3 via a connecting element (lever element) designed as a connecting arm 6. In the illustrated embodiment, the transport element 3 is designed as a transport plate and is made of a radiation-shielding material. Holding devices 8 for test objects are located on a surface 7 of the transport plate (not applicant: Carl Zeiss Industrial Metrology GmbH).

[0099] Our reference: P18.927WO / 2024P00779 WO 23.09.2025 (shown). The movable transport element 3 is rigidly mechanically attached to a support shaft 9, with a first end of this support shaft 9 rotatably mounted on a free end of the connecting arm 6. A second end of the support shaft 9, which projects from the free end of the connecting arm 6, extends into a guide groove 10, which forms a guide element for guiding the movement of the transport element 3. This arc-shaped guide groove 10 is formed by a side wall element 11a of the transport lock 1. This and further side wall elements 11a of the transport lock 1, as well as a bottom wall element 11b, enclose and define an internal volume that is essentially cuboid in shape. The transport lock 1 also includes ceiling wall elements 11c, which likewise define the internal volume.The wall elements 11a, 11b, 11c form, in particular, a tunnel floor, tunnel side walls, and a tunnel ceiling. These wall elements 11a, 11b, 11c are made of a radiation-shielding material. The wall elements 11a, 11b, 11c of the transport lock 1 are arranged and / or designed such that the transport lock forms a transport tunnel 13, which connects an inner tunnel entrance 18 with an outer tunnel entrance 19. Thus, an area between the tunnel entrances 18, 19, in particular a central area of ​​the transport lock 1, is designed such that a direct radiation connection between an inner and outer volume 15, 14, which will be explained below, is blocked.

[0100] The X-ray measuring arrangement 2 further comprises a measuring cabin 27 (see, for example, Fig. 4), wherein this measuring cabin 27 has or comprises an internal volume 15 (see Fig. 5). An X-ray source 23 of an X-ray device is arranged in a portion of this internal volume 15. This portion can form a safety zone of the X-ray measuring arrangement 2. The transport lock 1 shown in Fig. 1 serves to transport at least one test object between an external volume 14 (see also Fig. 5) and the internal volume 15 of the measuring cabin 27. For this purpose, the transport tunnel 13 is connected to the internal volume 15 via the inner tunnel entrance 18 and to the external volume 14 via the outer tunnel entrance 19. The transport of the transport element 13 through the transport tunnel 13 takes place along a transport trajectory 28, which is schematically symbolized by an arrow in Fig. 1.Along the transport trajectory 28, the transport element 3 can be moved between an outer end position, located in the area of ​​the outer tunnel entrance 19, and an inner end position, located in the area of ​​the inner tunnel entrance 18. The end positions are defined by the guide groove 10, which also serves as a stop element for the transport movement. Applicant: Carl Zeiss Industrial Metrology GmbH.

[0101] Our reference: P18.927WO / 2024P00779 WO 23.09.2025. Thus, a test object arranged on / at the transport element 3 can be transported between the outer and inner volumes 14, 15. Fig. 1 shows the movable transport element 3 in an intermediate position, which is located between the inner and outer end positions of the transport element 3 along a transport direction.

[0102] In its inner and outer end positions, the transport element 3 preferably closes the inner tunnel entrance 18 and the outer tunnel entrance 19 without gaps. In particular, sections of the side wall elements 11a of the transport lock 1 overlap and touch an edge region of the transport element 3 when it is in the respective end position.

[0103] The transport tunnel 13 and the transport trajectory 28 have an irregular path. In particular, the transport trajectory 28 is shaped like a circular arc. In the illustrated embodiment, this is achieved by the ceiling wall elements 11c forming a ceiling profile 29 that projects into the side wall elements 11a and the bottom wall element 11b, thus defining the boundaries of the transport tunnel 13. Transport can therefore be facilitated by a back-and-forth movement of the transport element 3.

[0104] A reference coordinate system fixed to the measuring booth is also shown, which has a vertical axis z, a longitudinal axis x, and a transverse axis y. The vertical axis z is parallel to the direction of gravity and oriented from the bottom wall element 11b to the ceiling wall elements 11c, i.e., from bottom to top. The longitudinal and transverse axes x and y are orthogonal to each other and each is orthogonal to the vertical axis z. Thus, the transport tunnel 13 opens vertically upwards via the tunnel entrances 18 and 19.

[0105] In the illustrated embodiment, the transport trajectory 28 comprises sections with a directional component that is oriented parallel to the vertical axis z. The transport trajectory 28 also comprises sections with directional components parallel to the longitudinal axis x.

[0106] A drive torque for movement along the transport trajectory 28 is transmitted from the drive unit 4 via a gearbox 30 to the output shaft 5. Applicant: Carl Zeiss Industrial Metrology GmbH

[0107] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0108] The rotary movement of the output shaft 5 causes a movement of the carrier shaft 9 and the transport element 3 attached to it along the transport trajectory 28.

[0109] The drive unit further comprises a coupling element 12, which generates a drive torque for a relative movement between the movable transport element 3 and the connecting arm 6, which acts on the carrier shaft 9. In the illustrated embodiment, this coupling element 12 is designed as a drive belt. The carrier shaft 9, in particular a coupling section of this carrier shaft 9 designed as a roller or toothed belt pulley, can be connected via this coupling element 12 to a stationary coupling section (not shown) of the transport gate 1, which can also be designed as a roller or toothed belt pulley. This stationary coupling section can be arranged in a fixed position relative to the reference coordinate system shown; in particular, this stationary coupling section does not rotate with the output shaft 5. The coupling element 12 can bear against these coupling sections.The coupling section of the carrier shaft 9 can be arranged in the region of the first end of the carrier shaft 9. Thus, when the movable transport element 3 (and therefore also the carrier shaft 9) moves along the transport trajectory 28, which is driven by the drive unit 4, a rotational movement of the carrier shaft 9 can be generated by the coupling element 12. This coupling can be configured such that the orientation of a normal vector of the surface 7 of the transport element 3, which can be oriented parallel to the vertical axis z, and thus also the corresponding orientation of a test object arranged on it, does not change during the transport process.

[0110] The illustrated transport lock 13 allows a test object to be transported from the outer volume 14 to the inner volume 15 of the measuring chamber 27 and vice versa. The irregularly shaped transport tunnel 13 prevents primary radiation emitted by the X-ray source 23 (see Fig. 5) for generating transmission images from escaping from the inner volume 15 into the outer volume 14 without interacting with a wall element 11a, 11b, 11c. The irregular shape of the transport tunnel 13 also reduces or prevents the escape of secondary radiation into the outer volume 14.

[0111] It is further shown that the ceiling profile 29, which extends into the area defined by the

[0112] Internal volume encompassing side wall elements 11a and the bottom wall element 11b. Applicant: Carl Zeiss Industrial Metrology GmbH

[0113] Our reference: P18.927WO / 2024P00779 WO 23.09.2025 extends into a housing for which at least one section of the output shaft 5 forms, which separates the output shaft from the transport tunnel 13. This allows the output shaft to be protected from radiation.

[0114] Further webs are arranged on the floor wall element 11b.

[0115] The transport lock 1 also comprises a first partition element 34, which separates the inner volume 15 and the outer volume 14, and a further partition element 35 (see Fig. 3), which separates different sections of the inner volume 15. These are also made of a radiation-shielding material. In the embodiment shown in Fig. 1, the first partition element 34 is designed as an angle profile element and is attached to ceiling wall elements 11c of the transport lock 1. One leg of the first partition element 34 extends upwards away from the ceiling wall elements 11c and thus separates the inner volume 15 from the outer volume.

[0116] The transport lock 1 shown in Fig. 1 can be modular and form a module of an X-ray measuring arrangement 2 (see Fig. 2). Such a module can, in particular, be integrated into a cabin side wall 32 of the measuring cabin 27 to enable the described transport between the inner and outer volumes 15, 14.

[0117] Fig. 2 shows a perspective view of a transport lock 1 according to the invention in a further embodiment. In contrast to the embodiment shown in Fig. 1, the transport lock 1 comprises a first movable closing element for closing the inner tunnel entrance 18 and a further movable closing element 21 for closing the outer tunnel entrance 19. The closing elements 20, 21 are each designed as closing flaps and consist of a radiation-shielding material. Again, the movable transport element 3 is shown in an intermediate position, with the two closing elements 20, 21 in a closed state in which they completely or at least partially cover the respective tunnel entrance 18, 19. The closing elements 20, 21 can be rotatably mounted on ceiling wall elements 11c or side wall elements 11a of the transport lock 1.

[0118] If the transport element 3 is moved into the inner end position, i.e. towards the inner tunnel entrance, applicant: Carl Zeiss Industrial Metrology GmbH

[0119] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0120] 18, the first closure element 20 can be moved into an open position so that the transport element 3 or a test object mounted on / at the transport element 3 can be transported into the inner volume. Similarly, the second closure element 21 can be moved into an open position when the transport element 3 is moved to its outer end position or towards the outer tunnel entrance 19. The respective movement between the open and closed positions is indicated by arrows 31 and can be effected by a drive unit of the X-ray measuring arrangement 2, which is not shown in Fig. 2.Preferably, however, the transport element 3 is coupled to the closure elements 20, 21 via a mechanical coupling mechanism such that the closure elements are moved into an open state when the movable transport element 3 is moved towards the corresponding tunnel entrance 18, 19, and into a closed state when the movable transport element is moved away from the corresponding tunnel entrance 18, 19. In particular, this ensures that there is no state of the transport lock 1 in which both closure elements 20, 21 are simultaneously in an open state. Rather, it ensures that the second closure element 21 is in a closed state when the first closure element 20 is open, and vice versa.

[0121] Fig. 3 shows a perspective view of part of an X-ray measuring arrangement 2 according to the invention (see Fig. 5) with several transport locks 1. A first and a further transport lock 1a, 1b each have or form a transport tunnel 13. The two transport locks 1a, 1b can each be configured like the transport lock 1 shown in Fig. 1 or like the transport lock 1 shown in Fig. 2. It is possible, but not mandatory, that a wall element 11a, 11b, 11c, 34 of the first transport lock 1a also forms a wall element 11a, 11b, 11c, 34 of the further transport lock. The transport trajectories 28 (see Fig. 1) defined by the transport locks 1a, 1b can run parallel to each other and, in particular, spaced apart from each other along a transverse axis y.

[0122] Figure 3 also shows that a drive unit 4 and a gearbox 30 of a transport device of the first transport lock 1a are arranged outside the transport tunnel 13 of the first transport lock 1a. Thus, a side wall element 11a of the first transport lock 1a is located between the drive unit-gearbox unit and the transport tunnel 13 of the first transport lock 1a. Applicant: Carl Zeiss Industrial Metrology GmbH

[0123] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0124] Transport lock 1a is arranged and the output shaft 5 of the transport device of the first transport lock 1a extends through a through-opening in this side wall element 11a.

[0125] Further shown is another partition element 35 of the first transport lock 1a, which is arranged such that it is located between the drive unit-gearbox of the first transport lock 1a and a safety area of ​​the measuring chamber 27. It thus separates the interior volume 15 of the measuring chamber 27 into the safety area, in which the X-ray source 23 is located, and another area, in which the drive unit-gearbox is located, thereby protecting this unit from radiation. Figure 3 shows that the further partition element 35 projects from a surface of a side wall element 11a of the first transport lock 1a facing away from the transport tunnel 13 and extends from bottom to top. The first partition element 34, already explained with regard to the embodiment in Figure 1, and the further partition element 35 can be designed as a common profile element.

[0126] In conjunction with the embodiment shown in Fig. 4, the drive unit-gearbox unit can thus be arranged in a partial volume of the internal volume 15 of the measuring cabin 27, which is located between a side wall element 11a of the transport lock 1a and a cabin side wall 32.

[0127] As can be seen in Fig. 3, the movable transport element 3 of the first transport lock 1a is in an outer end position and, in this position, closes an outer tunnel entrance 19 of the transport tunnel 13 of the first transport lock 1a without a gap. Also shown is a transport element 3 of the further transport lock 1b, which is in an intermediate position, for example, for transporting a test object (not shown) from an outer volume 14 to an inner volume 15.

[0128] Fig. 4 shows a perspective view of a measuring cabin 27 with several transport locks 1a, 1b. The transport locks 1a, 1b are integrated into a cabin side wall 32 of the measuring cabin 27, with the transport locks 1a, 1b being arranged in the lower vertical half of this cabin side wall 32. Applicant: Carl Zeiss Industrial Metrology GmbH

[0129] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0130] Fig. 5 shows a perspective view of parts of an X-ray measuring arrangement 2 according to the invention. In contrast to the embodiment shown in Fig. 1, a rotary table 22 is arranged on the movable transport element 3 of the transport device of the X-ray measuring arrangement 2. Also shown are an X-ray source 23 and an X-ray detector 24. Arrows 25 indicate that both the X-ray source 23 and the X-ray detector 24 can be moved along three mutually orthogonal spatial axes, which can be oriented parallel to the x, y, z axes of the reference coordinate system. By rotating the rotary table 22 and a test object arranged on the rotary table 22, radiographic images can thus be generated from different angles, which are necessary for a three-dimensional reconstruction of the test object.By moving the X-ray source 23 and / or the X-ray detector 24, these can be positioned appropriately relative to different test objects, in particular test objects of different sizes. If an X-ray measuring arrangement 2 comprises several transport locks 1a, 1b (see, for example, Fig. 3), the movement can also enable the X-ray source 23 and the X-ray detector 24 to generate radiographic images of test objects that have been transported through transport tunnels 13 of different transport locks 1a, 1b into the inner volume 15.

[0131] Not shown is that the X-ray measuring arrangement 2 includes a control unit that can be used to control the transport device, the loading device, and / or the feeding device. The control unit can also be used to control the movement of the closure elements 20, 21 (see Fig. 2). The X-ray measuring arrangement 2 can also include an evaluation unit, which can be used, in particular, to evaluate the generated radiographic images. The control unit and the evaluation unit can be designed as a single control and evaluation unit.

[0132] Fig. 6 shows a perspective view of an X-ray measuring arrangement 2 (see Fig. 5) with a measuring cabin 27 and two transport locks 1a, 1b, each comprising a transport device with a movable transport element 3, wherein a rotary table 22 is arranged on the movable transport element 3. It is shown that the transport elements 3 of the two transport locks 1a, 1b are each in an outer end position and the outer tunnel entrances 19 (see Fig. 1) of the applicant: Carl Zeiss Industrial Metrology GmbH

[0133] Our reference: P18.927WO / 2024P00779 WO 23.09.2025. The respective transport tunnel 13 is closed. Also shown is a loading device designed as an articulated robot 33 with a gripper that forms an end effector of the articulated robot 33. This articulated robot 33 is attached to a ceiling element of the measuring chamber 27 and is located in an outer volume 14. The gripper can grasp a test object and place it on / at a transport element 3, in particular on a rotary table 22. It is conceivable that the X-ray measuring arrangement 2 includes a feeding device (not shown), for example in the form of a conveyor belt, with which a test object is transported into a working area of ​​the articulated robot 33.

[0134] Naturally, the gripper can also be used to remove a test object that has already been irradiated from the transport element 3. Depending on the test result, the removed test object can then be transported, for example, to a reject area or a good area.

[0135] Fig. 7 shows a schematic flowchart of a method according to the invention for examining test objects using X-rays with an X-ray measuring arrangement 2 (see Fig. 5). In a first step S1, a test object is transported through a transport tunnel 13 from an outer volume 14 to an inner volume 15 of a measuring chamber 27 of the X-ray measuring arrangement 2 (see Fig. 1). For this purpose, the test object can be positioned in a working chamber of a loading device using a feeding device and then moved by the loading device from the feeding device onto a transport element 3 of a transport lock 1. The transport element 3 can be in an outer end position for this purpose. After the test object has been positioned on the transport element 3, it can be moved from the outer end position to an inner end position, which has already been explained.

[0136] It is possible that the test object is removed from the transport element 3 in its inner end position by means of a further positioning device of the X-ray measuring arrangement 2, which is also designed as an articulated robot arm and can be arranged in the safety area of ​​the measuring cabin 27, and positioned in a detection area of ​​an X-ray unit of the X-ray measuring arrangement 2. However, this is not mandatory. It is also conceivable that a test object arranged on / at a transport element 3 in its inner end position is already within the detection area. Applicant: Carl Zeiss Industrial Metrology GmbH

[0137] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0138] After transport, in a second step (S2), at least one radiographic image of the test object will be generated. Multiple radiographic images can also be generated, particularly from different angles. For this purpose, the relative position between the X-ray unit and the test object can be changed.

[0139] After the radiographic image(s) have been generated, the test object can be transported from the inner end position to the outer end position using transport element 3. For this purpose, it can be positioned on / at transport element 3 in the inner end position. Simultaneously, and especially at the same time, the generated radiographic images can be evaluated and a test result determined. Once the outer end position is reached, the test object can be removed from transport element 3, for example, using the loading device described. Depending on the test result, further transport of the test object can then be controlled.

[0140] Applicant: Carl Zeiss Industrial Metrology GmbH

[0141] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0142] Reference symbol list

[0143] 1 Transport lock

[0144] 1a first transport lock

[0145] 1b further transport lock

[0146] 2 X-ray measuring setup

[0147] 3 Transport element

[0148] 4 Drive unit

[0149] 5 Output shaft

[0150] 6 connecting arm

[0151] 7 Surface

[0152] 8 Holding device

[0153] 9 Carrier shaft

[0154] 10 guide groove

[0155] 11 wall elements

[0156] 11a, 11b, 11c Wall elements

[0157] 12 coupling element

[0158] 13 transport tunnels

[0159] 14 External volume

[0160] 15 internal volume

[0161] 18 inner tunnel entrance

[0162] 19 outer tunnel entrance

[0163] 20, 21 Locking element

[0164] 22 Rotary table

[0165] 23 X-ray source

[0166] 24 X-ray detector

[0167] 25 Arrow

[0168] 27 Measuring booth

[0169] 28 T transport trajectory

[0170] 29 Ceiling profile

[0171] 30 gearboxes

[0172] 31 Arrow

[0173] 32 Cabin side wall

[0174] 33 articulated arm robots

[0175] 34 First partition wall element Applicant: Carl Zeiss Industrial Metrology GmbH

[0176] Our reference: P18.927WO / 2024P00779 WO 23.09.2025

[0177] 35 additional partition wall elements

[0178] S1 first step

[0179] S2 second step

Claims

1. Applicant: Carl Zeiss Industrial Metrology GmbH Our reference: P18.927WO / 2024P00779 WO 23.09.2025 Patent claims 1. X-ray measuring arrangement for examining a test object using X-rays, comprising a) a measuring chamber (27), b) an X-ray device with at least one X-ray source (23) arranged in an inner volume (15) of the measuring chamber (27), c) at least one transport lock (1) comprising at least one transport device with a movable transport element (3) for transporting at least one test object between an outer volume (14) and the inner volume (15) of the measuring chamber (27), wherein the transport lock (1) has or forms a transport tunnel (13) connecting the outer volume (14) with the inner volume (15), characterized in that at least one section of the transport tunnel (13) has an odd path,wherein the movable transport element (3) is movable for transporting the test object from the inner volume (15) to the outer volume (14) along a transport trajectory (28) through the transport tunnel (13) between an inner and an outer end position and for transporting the test object from the outer volume (14) to the inner volume (15) with a transport movement along the transport trajectory (28) through the transport tunnel (13) between the outer and the inner end position.

2. X-ray measuring arrangement according to claim 1, characterized in that the transport device is designed such that at least one orientation of a transported test object does not change during a transport process.

3. X-ray measuring arrangement according to one of the preceding claims, characterized in that the movable transport element (3) of the transport device is designed as a transport plate.

4. X-ray measuring arrangement according to claim 3, characterized in that the transport device is designed such that an orientation of a Applicant: Carl Zeiss Industrial Metrology GmbH Our reference: P18.927WO / 2024P00779 WO 23.09.2025 The normal vector of a surface of the transport plate does not change during a transport process.

5. X-ray measuring arrangement according to one of the preceding claims, characterized in that a course of the transport tunnel (13) and / or a transport trajectory (28) has at least sectionally a directional component that is oriented parallel to the direction of gravity.

6. X-ray measuring arrangement according to one of the preceding claims, characterized in that at least one section of the transport tunnel (13) and / or a transport trajectory (28) is arc-shaped.

7. X-ray measuring arrangement according to one of the preceding claims, characterized in that the transport device comprises an output shaft (5) and a connecting element (6) for mechanically connecting the output shaft (5) with the movable transport element (3).

8. X-ray measuring arrangement according to one of the preceding claims, characterized in that the transport device comprises a coupling element (12) for driving the transport element (3).

9. X-ray measuring arrangement according to one of the preceding claims, characterized in that the movable transport element (3) of the transport device closes an inner tunnel entrance (18) and / or an outer tunnel entrance (19) without a gap or with a maximum gap dimension of 0.5 mm in an inner end position.

10. X-ray measuring arrangement according to one of the preceding claims, characterized in that the movable transport element (3) of the Transport equipment in a final position overlaps with a wall element (11a, 11c) of the transport tunnel (13).

11. X-ray measuring arrangement according to one of the preceding claims, characterized in that the transport device includes a drive device (4) Applicant: Carl Zeiss Industrial Metrology GmbH Our reference: P18.927WO / 2024P00779 WO 23.09.2025 includes, which is located outside the transport tunnel (13).

12. X-ray measuring arrangement according to one of the preceding claims, characterized in that the transport lock (1) comprises at least one movable closing element (20, 21) for closing a tunnel entrance (18, 19).

13. X-ray measuring arrangement according to claim 12, characterized in that the transport lock (1) comprises a first movable closing element (20) for an inner tunnel entrance (18) and a further movable closing element (21) for an outer tunnel entrance (19), wherein a movement of the closing elements (20, 21) is controllable such that in no transport position of the movable transport element (3) are both closing elements (20, 21) in an open state.

14. X-ray measuring arrangement according to claim 12 or 13, characterized in that the movable transport element (3) of the transport device is coupled to the closure element (20, 21) in such a way that the closure element (20, 21) is moved into an open state when the movable transport element (3) is moved towards the tunnel entrance (18, 19) and / or is moved into a closed state when the movable transport element (3) is moved away from the tunnel entrance (18, 19).

15. X-ray measuring arrangement according to one of the preceding claims, characterized in that a wall element (11a) of the transport lock (1) has or forms a guide element for guiding the movement of the movable transport element (3) of the transport device.

16. X-ray measuring arrangement according to one of the preceding claims, characterized in that the X-ray measuring arrangement (2) comprises several transport locks (1a, 1b) and / or several transport devices.

17. X-ray measuring arrangement according to one of the preceding claims, characterized in that the X-ray measuring arrangement (2) comprises at least one loading device for arranging at least one test object on / at the Applicant: Carl Zeiss Industrial Metrology GmbH Our reference: P18.927WO / 2024P00779 WO 23.09.2025 includes the movable transport element (3) of the transport device.

18. X-ray measuring arrangement according to claim 17, characterized in that the X-ray measuring arrangement (2) comprises at least one feeding device for feeding the at least one test object into a working chamber of the loading device.

19. X-ray measuring arrangement according to one of the preceding claims, characterized in that a rotary table (22) is arranged on the movable transport element (3) of the transport device.

20. Transport lock module for an X-ray measuring arrangement (2) according to one of claims 1 to 19, wherein the transport lock module has or forms the transport tunnel (13) and comprises at least one transport device with the movable transport element (3) to transport at least one test object through the transport tunnel (13), wherein at least one section of the transport tunnel (13) has an odd path.

21. Method for examining test objects using X-rays with an X-ray measuring arrangement (2) according to one of claims 1 to 19, comprising the steps: a) transporting at least one test object through the transport tunnel (13) from the outer volume (14) to the inner volume (15) of the measuring cabin (27), b) generating at least one radiographic image with the X-ray device.

Images