Robot, robot system, and semiconductor manufacturing device

Abstract

This robot 5 comprises: a body 10; a boom 20 that is supported by the body 10 so as to be rotatable around a vertical axis Ax1 and that extends so as to cross the vertical axis Ax1; first and second arms 30, 40 that are supported at a first end 21 of the boom 20; first and second hands 34, 44 that each support a substrate; third and fourth arms 50, 60 that are supported at a second end 22 of the boom 20; third and fourth hands 54, 64 that each support a substrate; first and second motors 70A, 70B that respectively drive the first and second arms 30, 40; and third and fourth motors 70C, 70D that respectively drive the third and fourth arms 50, 60, wherein the first and second motors 70A, 70B and the third and fourth motors 70C, 70D are each at least partially accommodated in an internal space of the boom 20.

Description

Robot, Robot System, and Semiconductor Manufacturing Apparatus

[0001] The present disclosure relates to a robot, a robot system, and a semiconductor manufacturing apparatus.

[0002] Patent Document 1 discloses a substrate transfer device that transfers a substrate from a take-out position to a transfer position. The substrate transfer device includes a first arm attached to the upper surface of a support shaft rotated by a motor, a pair of second arms provided at both ends of the first arm and driven by a motor different from the first motor, a pair of third arms respectively connected to the other ends of the pair of second arms, and a pair of substrate holding portions respectively provided at the other ends of the pair of third arms.

[0003] Japanese Patent Application Laid-Open No. 2000-72248

[0004] The present disclosure provides a robot, a robot system, and a semiconductor manufacturing apparatus that can drive many arms with a simple structure.

[0005] A robot according to one aspect of the present disclosure includes a body, a boom supported by the body so as to be rotatable about a vertical axis and extending so as to intersect the vertical axis, first and second arms supported at a first end of the boom, first and second hands respectively supported by the first and second arms and each supporting a substrate, third and fourth arms supported at a second end of the boom, third and fourth hands respectively supported by the third and fourth arms and each supporting a substrate, first and second motors that drive the first and second arms respectively so as to change the positions of the first and second hands with respect to the first end, and third and fourth motors that drive the third and fourth arms respectively so as to change the positions of the third and fourth hands with respect to the second end, wherein each of the first and second motors and the third and fourth motors is at least partially accommodated in an internal space of the boom.

[0006] A robot system relating to another aspect of this disclosure includes the robot and a control device that determines the destinations of the first and second hands based on the detection results of a substrate by a sensor, and controls the first and second arms to move the first and second hands to the determined destinations, respectively.

[0007] A semiconductor manufacturing apparatus relating to another aspect of this disclosure comprises the robot, a chamber housing the robot, and a plurality of peripheral chambers adjacent to the chamber, wherein the robot transports substrates to each of the plurality of peripheral chambers.

[0008] According to this disclosure, it is possible to provide a robot that can drive many arms with a simple structure.

[0009] This is a plan view illustrating the configuration of a semiconductor device. This is a side view illustrating the configuration of a robot. This is a cross-sectional view illustrating the configuration of the first and second motors. This is a cross-sectional view illustrating the configuration of the third and fourth motors. This is a cross-sectional view of the robot. This is a diagram illustrating the relationship between the robot's movement and the sensor.

[0010] The embodiments will be described in detail below with reference to the drawings. In the description, the same elements or elements having the same function will be denoted by the same reference numeral, and redundant descriptions will be omitted.

[0011] [Semiconductor Manufacturing Equipment] Figure 1 is a schematic plan view illustrating the configuration of semiconductor manufacturing equipment. The semiconductor manufacturing equipment 1 shown in Figure 1 is equipment that performs at least a part of the semiconductor manufacturing process. For example, the semiconductor manufacturing equipment 1 performs processes such as film deposition and etching on a substrate W (e.g., a semiconductor wafer). For example, the semiconductor manufacturing equipment 1 has a chamber 2, a plurality of peripheral chambers 3, and a robot system 4. As shown in Figure 1, the semiconductor manufacturing equipment 1 has a chamber 2, a plurality of peripheral chambers 3, and a robot system 4. The chamber 2 accommodates the substrate W to be transported for processing. Each of the plurality of peripheral chambers 3 is adjacent to the chamber 2. For example, the plurality of peripheral chambers 3 are arranged to surround the chamber 2 in the vertical direction (direction perpendicular to the horizontal plane).

[0012] For example, the chamber 2 has a rectangular planar shape, with a pair of peripheral chambers 3 adjacent to each side of the rectangle. The multiple peripheral chambers 3 may include one or more process chambers 7. Each of the one or more process chambers 7 houses a substrate W transported through the chamber 2 and performs processes such as film deposition and etching on the substrate W. Each of the one or more process chambers 7 may perform processing on the substrate W when its interior is under vacuum (for example, under a pressure lower than atmospheric pressure). In this case, the interior of the chamber 2 may also be under vacuum in accordance with the interior of the one or more process chambers 7.

[0013] When the interiors of one or more process chambers 7 and the interiors of chamber 2 are under vacuum, the multiple peripheral chambers 3 may further include one or more load lock chambers 8. Each of the one or more load lock chambers 8 houses a substrate W at the boundary between the external space of chamber 2 and the internal space of chamber 2, and after adjusting the air pressure in the space housing the substrate W to the air pressure of the opening, the space housing the substrate W is opened to the external space of chamber 2 or the internal space of chamber 2. As an example, in Figure 1, a pair of load lock chambers 8 are adjacent to one side of a rectangular chamber 2, and a pair of process chambers 7 are adjacent to each of the remaining three sides.

[0014] The robot system 4 transports the substrate W through the chamber 2 to each of the multiple peripheral chambers 3. For example, the robot system 4 unloads the substrate W from one of the multiple peripheral chambers 3, passes through the chamber 2, and loads it into another of the multiple peripheral chambers 3.

[0015] [Robot System] The robot system 4 comprises a robot 5 and a robot controller 6. The robot 5 is housed in a chamber 2. The robot controller 6 controls the robot 5 to transport the substrate W through the chamber 2 and between a plurality of peripheral chambers 3. The robot controller 6 has a circuit. The circuit includes a driver circuit and an arithmetic circuit. The driver circuit supplies drive power to the robot 5 (for example, to the motors 70A, 70B, motors 70C, 70D, boom motor 70E, and lifting device 70F, which will be described later). Supplying drive power includes supplying drive current or applying drive voltage. The arithmetic circuit controls the driver circuit to supply drive power to the robot 5 to cause the robot 5 to perform predetermined operations in order to transport the substrate W.

[0016] Figure 2 is a side view illustrating the configuration of robot 5. As shown in Figure 2, robot 5 comprises a body 10, a boom 20, arms 30, 40, hands 34, 44, arms 50, 60, hands 54, 64, motors 70A, 70B, and motors 70C, 70D.

[0017] The body 10 is fixed to the chamber 2. The body 10 may be housed in the internal space S1 of the chamber 2, or at least partially located in the external space S2 of the chamber 2. The boom 20 is supported by the body 10 so as to be rotatable about a vertical axis Ax1 perpendicular to the horizontal plane, and extends to intersect the vertical axis Ax1. For example, the boom 20 has a longitudinal direction D1 that intersects (e.g., perpendicular to) the vertical axis Ax1. The boom 20 extends away from the vertical axis Ax1 in both directions in the longitudinal direction D1, and has a first end 21 and a second end 22 in the longitudinal direction D1. “End” includes the end furthest from the reference position (e.g., vertical axis Ax1) and the portion near it. The same applies hereafter.

[0018] Arms 30 and 40 are supported at the first end 21 of the boom 20. For example, motors 70A and 70B are supported at the first end 21 of the boom 20, and arms 30 and 40 are supported by motors 70A and 70B, respectively. Hands 34 and 44 are supported by arms 30 and 40, respectively, and each supports a substrate W. For example, hand 34 is supported at the end of arm 30 which is supported at the first end 21 (for example, supported by motor 70A at the first end 21), and is capable of supporting a substrate W. Hand 44 is supported at the end of arm 40 which is supported at the first end 21 (for example, supported by motor 70B at the first end 21), and is capable of supporting a substrate W.

[0019] For example, arm 30 has links 31, 32, and 33. Link 31 is attached to the rotor 72A of motor 70A on a first end 21 so as to be rotatable around vertical axis Ax11 which is parallel to vertical axis Ax1, and extends away from vertical axis Ax11. Link 32 is attached to the end of link 31 so as to be rotatable around vertical axis Ax12 which is parallel to vertical axis Ax11, and extends away from vertical axis Ax12. Link 33 is attached to the end of link 32 so as to be rotatable around vertical axis Ax13 which is parallel to vertical axis Ax12, and extends away from vertical axis Ax13. Hand 34 is attached to the end of link 33 and extends further away from vertical axis Ax13. The hand 34 extends along a plane perpendicular to the vertical axis Ax13 and supports the substrate W from below.

[0020] The arm 30 incorporates a mechanism that allows the position of the hand 34 to be changed between a home position, which is close to the first end 21, and an extended position, which is farther away from the first end 21, using a single motor. The home position is, for example, above the first end 21. For example, link 31 incorporates a mechanism (e.g., a belt and pulley) that rotates link 32 in the opposite direction around vertical axis Ax12 as link 31 rotates around vertical axis Ax11. Link 32 incorporates a mechanism (e.g., a belt and pulley) that rotates link 33 in the opposite direction around vertical axis Ax13 as link 32 rotates around vertical axis Ax12. As a result, by rotating link 31 around vertical axis Ax11, it is possible to move the hand 34 between the home position and the extended position while maintaining the hand 34 facing the extended position from the home position. The home position and the extended position may be aligned along a forward / backward direction D2 that is perpendicular to the vertical direction and the longitudinal direction D1.

[0021] The arm 40 has links 41, 42, and 43. Link 41 is mounted on the rotor 72B of the motor 70B on top of link 31 so as to be rotatable around vertical axis Ax11, similar to link 31, and extends away from vertical axis Ax11. Link 42 is mounted on the end of link 41 so as to be rotatable around vertical axis Ax22, which is parallel to vertical axis Ax11, and extends away from vertical axis Ax22. Link 43 is mounted on the end of link 42 so as to be rotatable around vertical axis Ax23, which is parallel to vertical axis Ax22, and extends away from vertical axis Ax23. The hand 44 is mounted on the end of link 43 and extends further away from vertical axis Ax23. The hand 44 spreads out along a plane perpendicular to vertical axis Ax23 and supports the substrate W from below.

[0022] In the vertical direction, link 41 is located between link 31 and link 32. Links 32 and 33 are located between link 41 and link 42. This allows arms 30 and 40 to operate without colliding with each other.

[0023] Similar to arm 30, arm 40 incorporates a mechanism that allows the position of hand 44 to be changed between a home position and an extended position relative to the first end 21 using a single motor. For example, link 41 incorporates a mechanism (e.g., a belt and pulley) that rotates link 42 in the opposite direction around vertical axis Ax22 as link 41 rotates around vertical axis Ax11. Link 42 incorporates a mechanism (e.g., a belt and pulley) that rotates link 43 in the opposite direction around vertical axis Ax23 as link 42 rotates around vertical axis Ax22. As a result, by rotating link 41 around vertical axis Ax11, it is possible to move hand 44 between the home position and the extended position while maintaining the hand 44 facing the extended position from the home position.

[0024] Arms 50 and 60 are supported at the second end 22 of the boom 20. For example, motors 70C and 70D are supported at the second end 22 of the boom 20, and arms 50 and 60 are supported by motors 70C and 70D, respectively. Hands 54 and 64 are supported by arms 50 and 60, respectively, and each supports a substrate W. For example, hand 54 is supported at the end of arm 50 which is supported at the second end 22 (for example, supported by motor 70C at the second end 22), and is capable of supporting a substrate W. Hand 64 is supported at the end of arm 60 which is supported at the second end 22 (for example, supported by motor 70D at the second end 22), and is capable of supporting a substrate W.

[0025] For example, the arm 50 has a link 51, a link 52, and a link 53. Link 51 is attached to the rotor 72C of the motor 70C on a second end 22 so as to be rotatable around a vertical axis Ax31 parallel to vertical axis Ax1, and extends away from vertical axis Ax31. Link 52 is attached to the end of link 51 so as to be rotatable around a vertical axis Ax32 parallel to vertical axis Ax31, and extends away from vertical axis Ax32. Link 53 is attached to the end of link 52 so as to be rotatable around a vertical axis Ax33 parallel to vertical axis Ax32, and extends away from vertical axis Ax33. The hand 54 is attached to the end of link 53 and extends further away from vertical axis Ax33. The hand 54 extends along a plane perpendicular to the vertical axis Ax33 and supports the substrate W from below.

[0026] Similar to arm 30, arm 50 incorporates a mechanism that allows the position of hand 54 to be changed between a home position close to the second end 22 and an extended position further away from the second end 22 using a single motor. The home position is, for example, above the second end 22. The home position and extended position relative to the second end 22 may be aligned along the forward / backward direction D2, similar to the home position and extended position relative to the first end 21.

[0027] The arm 60 has links 61, 62, and 63. Link 61 is mounted on the rotor 72D of the motor 70D on top of link 51 so as to be rotatable around vertical axis Ax31, similar to link 51, and extends away from vertical axis Ax31. Link 62 is mounted on the end of link 61 so as to be rotatable around vertical axis Ax42, which is parallel to vertical axis Ax31, and extends away from vertical axis Ax42. Link 63 is mounted on the end of link 62 so as to be rotatable around vertical axis Ax43, which is parallel to vertical axis Ax42, and extends away from vertical axis Ax43. The hand 64 is mounted on the end of link 63 and extends further away from vertical axis Ax43. The hand 64 spreads out along a plane perpendicular to vertical axis Ax43 and supports the substrate W from below.

[0028] In the vertical direction, link 61 is located between link 51 and link 52. Links 52 and 53 are located between link 61 and link 62. This allows arms 50 and 60 to operate without colliding with each other.

[0029] Similar to arm 40, arm 60 incorporates a mechanism that allows the position of hand 54 to be changed between a home position and an extended position relative to the second end 22 using a single motor. The configurations of motors 70A, 70B, and motors 70C, 70D described herein are examples and can be changed. For example, each of motors 70A, 70B, and motors 70C, 70D may have more links.

[0030] Motors 70A and 70B drive arms 30 and 40, respectively, to change the positions of hands 34 and 44 relative to the first end 21. For example, motor 70A rotates link 31 around vertical axis Ax11, and motor 70B rotates link 41 around vertical axis Ax11.

[0031] Motors 70C and 70D drive arms 50 and 60, respectively, to change the positions of hands 54 and 64 relative to the second end 22. For example, motor 70C rotates link 51 around vertical axis Ax31, and motor 70D rotates link 61 around vertical axis Ax31.

[0032] With the above configuration, the boom 20 can change the direction of the forward / backward direction D2, allowing the hand 34 or hand 44 and the hand 54 or hand 64 to be simultaneously extended and retracted into a pair of peripheral chambers 3. For example, by rotating the boom 20 so that the hands 34, 44 and 54, 64 face the left side of the chamber 2 in Figure 1, the hand 34 or hand 44 and the hand 54 or hand 64 can be simultaneously extended and retracted into a pair of load lock chambers 8. Similarly, by rotating the boom 20 so that the hands 34, 44 and 54, 64 face the upper side of the chamber 2 in Figure 1, the hand 34 or hand 44 and the hand 54 or hand 64 can be simultaneously extended and retracted into a pair of process chambers 7. Similarly, by rotating the boom 20 so that the hands 34, 44 and 54, 64 face the right side of the chamber 2 in Figure 1, the hand 34 or hand 44 and the hand 54 or hand 64 can be simultaneously extended and retracted into a pair of process chambers 7. Similarly, the boom 20 is rotated so that the hands 34, 44 and 54, 64 face the lower edge of the chamber 2 in Figure 1, allowing the hands 34 or 44 and 54 or 64 to be simultaneously moved in and out of the pair of process chambers 7.

[0033] Returning to Figure 2, motors 70A, 70B and motors 70C, 70D are each housed at least partially within the internal space S1 of the boom 20. By distributing motors 70A, 70B and motors 70C, 70D at both ends of the boom 20, the power transmission system to each arm can be simplified while driving many arms. For example, if motors 70A, 70B were placed on the body 10, a complex mechanism for transmitting power from the body 10 to motors 70A, 70B and motors 70C, 70D would need to be provided within the boom 20. However, such a mechanism becomes unnecessary by placing motors 70A, 70B within the boom 20, thus creating surplus space within the boom 20. This surplus space can be used for cable routing, sensor placement, etc.

[0034] As shown in Figures 2 to 4, the internal space S1 of the boom 20 may be airtightly separated from the external space S2 of the boom 20. For example, the boom 20 has a boom housing 23 that constitutes the internal space S1. The boom housing 23 has a base plate 24, a top plate 25, and a peripheral wall 26. The base plate 24 covers the bottom of the internal space S1, the top plate 25 covers the top of the internal space S1, and the peripheral wall 26 surrounds the internal space S1 between the base plate 24 and the top plate 25, connecting the base plate 24 and the top plate 25. The internal space S1 is sealed by the base plate 24, the top plate 25, and the peripheral wall 26. The base plate 24, the top plate 25, and the peripheral wall 26 may be formed integrally, or at least one of the base plate 24, the top plate 25, and the peripheral wall 26 may be formed as separate parts.

[0035] As shown in Figures 3 and 4, each of the motors 70A, 70B and 70C, 70D may have a stator 71 housed in the internal space S1 of the boom 20. Since the cables wired to the stator 71 can be housed in the internal space S1, when the motors 70A, 70B, motors 70C, 70D and the boom 20 are arranged in a vacuum chamber (e.g., chamber 2), gas emission from the cables into the vacuum chamber can be suppressed.

[0036] Since there is no need to wire cables in the internal spaces S3 of arms 30, 40 and arms 50, 60, the internal spaces S3 may be in communication with the external space S2 of the boom 20. Since there is no need to seal the internal spaces S3, the structures of arms 30, 40 and arms 50, 60 can be simplified. In addition, dust generation can be suppressed by eliminating the sliding of seals in arms 30, 40 and arms 50, 60.

[0037] Motors 70A and 70B may be two-axis direct drive motors capable of independently driving each other around the vertical axis Ax11. Similarly, motors 70C and 70D may be two-axis direct drive motors capable of independently driving each other around the vertical axis Ax31. A direct drive motor is a type of motor in which the motor directly drives the load without the use of intermediate transmission devices such as reducers, belts, or gears. Because there are no intermediate transmission devices, dust generation can be suppressed between motor 70A and link 31, between motor 70B and link 41, between motor 70C and link 51, and between motor 70D and link 61.

[0038] For example, motors 70A and 70B have rotors 72A and 72B and stators 71A and 71B. Rotors 72A and 72B are connected to arms 30 and 40, respectively, and rotate around a vertical axis Ax11. For example, rotor 72A is connected to link 31 and rotates around vertical axis Ax11. Link 31 rotates together with rotor 72A. Rotor 72B is connected to link 41 and rotates around vertical axis Ax11. Link 41 rotates together with rotor 72B. Since rotors 72A and 72B are concentric with each other (for example, their axes of rotation are both vertical axis Ax11), rotor 72B is connected to arm 40 by passing through rotor 72A.

[0039] Stators 71A and 71B are examples of the stator 71 described above. Stators 71A and 71B surround rotors 72A and 72B, respectively, and act on rotors 72A and 72B with rotating magnetic fields around the vertical axis Ax11.

[0040] The stator 71A is positioned above the stator 71B. The rotor 72B, surrounded by the stator 71B, is connected to the arm 40 by passing through the rotor 72A, which is surrounded by the stator 71A.

[0041] Similarly, motors 70C and 70D each have a rotor 72C, 72D and a stator 71C, 71D. Rotors 72C and 72D are respectively connected to arms 50 and 60, and rotate about the vertical axis Ax31. For example, rotor 72C is connected to link 51 and rotates about the vertical axis Ax31. Link 51 rotates together with rotor 72C. Rotor 72D is connected to link 61 and rotates about the vertical axis Ax31. Link 61 rotates together with rotor 72D. Since rotors 72C and 72D are concentric with each other (for example, both have the vertical axis Ax31 as their rotation axis), rotor 72D penetrates rotor 72C and is connected to arm 60.

[0042] Each of stators 71C and 71D is an example of the stator 71 described above. Stators 71C and 71D respectively surround rotors 72C and 72D, and apply a rotating magnetic field about the vertical axis Ax31 to rotors 72C and 72D respectively.

[0043] Stators 71A, 71B and stators 71C, 71D are housed in the internal space S1 of boom 20, and rotors 72A, 72B and rotors 72C, 72D may be at least partially arranged in the external space S2 of boom 20. It is possible to easily achieve both sealing the cables (for example, the cables wired to stators 71A, 71B and stators 71C, 71D) in the internal space S1 of boom 20 and driving arms 30, 40 and arms 50, 60 in the external space S2 of boom 20.

[0044] As described above, the internal space S1 is located between the base plate 24 and the top plate 25 of boom 20, but not necessarily all of the space between the base plate 24 and the top plate 25 corresponds to the internal space S1. Among the space between the base plate 24 and the top plate 25, the portion that is hermetically separated from the external space S2 is the internal space S1, and the portion that communicates with the external space S2 is not included in the internal space S1 but is included in the external space S2.

[0045] The robot 5 may further include partition walls 27 and 28. Partition wall 27 hermetically separates the internal space S1 of the boom 20 from the external space S2 of the boom 20 between the stators 71A and 71B and the rotors 72A and 72B. Partition wall 27 hermetically separates the internal space S1 of the boom 20 from the external space S2 of the boom 20 between the stators 71C and 71D and the rotors 72C and 72D. The internal space S1 of the boom 20 can be easily hermetically separated from the external space S2 of the boom 20 by utilizing the space between the stators 71A and 71B and the rotors 72A and 72B, and between the stators 71C and 71D and the rotors 72C and 72D. Each of the partition walls 27 and 28 is made of, for example, a non-magnetic metallic material.

[0046] For example, the partition wall 27 encloses space S11 at the first end 21, airtightly separating the internal space S1 of the boom 20 from space S11 and connecting space S11 to the external space S2 of the boom 20. For example, the partition wall 27 connects space S11 to the external space S2 through an opening 25a in the top plate 25 formed at the first end 21. As a result, space S11 is included in the external space S2. The partition wall 27 encloses space S12 at the second end 22, airtightly separating the internal space S1 of the boom 20 from space S12 and connecting space S12 to the external space S2 of the boom 20. For example, the partition wall 27 connects space S12 to the external space S2 through an opening 25b in the top plate 25 formed at the second end 22. As a result, space S12 is included in the external space S2.

[0047] Rotors 72A and 72B are positioned in space S11. Stators 71A and 71B in the internal space S1 surround space S11 via partition walls 27. Stators 71A and 71B exert rotating magnetic fields on rotors 72A and 72B, respectively, via partition walls 27. Rotors 72C and 72D are positioned in space S12. Stators 71C and 71D in the internal space S1 surround space S12 via partition walls 27. Stators 71C and 71D exert rotating magnetic fields on rotors 72C and 72D, respectively, via partition walls 27. The internal space S1 can be airtightly separated from the external space S2 without contact with rotors 72A and 72B and rotors 72C and 72D. This further reduces dust generation.

[0048] As shown in FIG. 3, the motor 70A has, for example, a motor end 110, a stator unit 120, a rotor 130, and a bearing 140. The motor end 110 supports the stator unit 120 and the rotor 130. The motor end 110 has an end plate 111 and a fixed shaft 112. The end plate 111 extends horizontally about the vertical axis Ax11. The fixed shaft 112 protrudes upward from the center of the end plate 111 and is hollow. The fixed shaft 112 has a protruding portion 113 that protrudes above the boom 20 through the opening 25a.

[0049] The stator unit 120 is supported by the motor end 110, constitutes the stator 71A, and further constitutes a part of the partition wall 27. The stator unit 120 has a frame 121, a plurality of coils 122, and a partition wall 123. The frame 121 is an annular body that surrounds the fixed shaft 112. A recess 124 that opens toward the fixed shaft 112 is formed over the entire circumference on the inner peripheral surface of the frame 121. The plurality of coils 122 are accommodated in the recess 124 so as to surround the fixed shaft 112 and constitute the stator 71A. Driving power for the motor 70A is supplied to the plurality of coils 122. The plurality of coils 122 receiving the supply of driving power generate a rotating magnetic field around the vertical axis Ax11. The generated rotating magnetic field acts on the rotor 130 to generate torque for rotating the rotor 130.

[0050] The partition wall 123 covers the inner peripheral surface of the frame 121 over the entire circumference and adheres to the inner peripheral surface of the frame 121 so as to seal the plurality of coils 122 within the recess 124. The partition wall 123 is a thin cylindrical body made of a non-magnetic metal material (for example, aluminum or an aluminum alloy) and constitutes a portion of the partition wall 27 that surrounds the stator 71A.

[0051] The rotor 130 is housed within the partition wall 123 and constitutes the rotor 72A. The rotor 130 has a rotor core 131, an output shaft 132, and a plurality of field magnets 133. The rotor core 131 is a cylindrical body that surrounds the fixed shaft 112 within the partition wall 123. The output shaft 132 protrudes upward from the rotor core 131 through the opening 25a and is connected to the link 31. The output shaft 132 is hollow. The protruding portion 113 penetrates the output shaft 132 and protrudes further upward and is connected to the aforementioned mechanism built into the link 31.

[0052] Multiple field magnets 133 are held in the rotor core 131 so as to surround the fixed shaft 112. Each of the multiple field magnets 133 is, for example, a permanent magnet. The rotating magnetic field generated by the multiple coils 122 acts on the multiple field magnets 133.

[0053] The bearing 140 is positioned between the outer circumferential surface of the fixed shaft 112 and the inner circumferential surface of the rotor core 131. The bearing 140 is mounted on the outer circumferential surface of the fixed shaft 112 and supports the rotor core 131 so that it can rotate around the vertical axis Ax11. The bearing 140 is a rolling bearing, such as a ball bearing.

[0054] The motor 70B includes a motor end 210, a stator unit 220, a rotor 230, and a bearing 240. The motor end 210 supports the stator unit 220 and the rotor 230. The motor end 210 includes an end plate 211 and a fixed shaft 212. The end plate 211 extends horizontally around a vertical axis Ax11. The fixed shaft 212 protrudes upward from the center of the end plate 211. The fixed shaft 212 has a projection 213 that protrudes upward from the boom 20 through an opening 25a.

[0055] The stator unit 220 is supported by the motor end 210 and constitutes the stator 71B, further forming part of the partition wall 27. The stator unit 220 has a frame 221, a plurality of coils 222, and a partition wall 223. The frame 221 is an annular body and surrounds the fixed shaft 212. On the inner circumferential surface of the frame 221, a recess 224 is formed around its entire circumference, opening toward the fixed shaft 212. The plurality of coils 222 are housed in the recess 224 so as to surround the fixed shaft 212, and constitute the stator 71B. The driving power for the motor 70B is supplied to the plurality of coils 222. The plurality of coils 222, having received the driving power, generate a rotating magnetic field around the vertical axis Ax11. The generated rotating magnetic field acts on the rotor 230, generating torque that rotates the rotor 230.

[0056] The partition wall 223 covers the entire inner surface of the frame 221 and adheres tightly to the inner surface of the frame 221 so as to seal the coil 222 within the recess 224. The partition wall 223 is a thin-walled cylindrical body made of a non-magnetic metallic material (e.g., aluminum or aluminum alloy) and constitutes the portion of the partition wall 27 that surrounds the stator 71B.

[0057] The rotor 230 is housed within the partition wall 223 and constitutes the rotor 72B. The rotor 230 has a rotor core 231, an output shaft 232, and a plurality of field magnets 233. The rotor core 231 is a cylindrical body that surrounds the fixed shaft 212 within the partition wall 223. The output shaft 232 protrudes upward from the rotor core 231 through the opening 25a and is connected to the link 41. The output shaft 232 is hollow. The protruding portion 213 penetrates the output shaft 232 and protrudes further upward and is connected to the aforementioned mechanism built into the link 41.

[0058] Multiple field magnets 233 are held in the rotor core 231 so as to surround the fixed shaft 212. Each of the multiple field magnets 233 is, for example, a permanent magnet. The rotating magnetic field generated by the multiple coils 222 acts on the multiple field magnets 233.

[0059] The bearing 240 is positioned between the outer circumferential surface of the fixed shaft 212 and the inner circumferential surface of the rotor core 231. The bearing 240 is mounted on the outer circumferential surface of the fixed shaft 212 and supports the rotor core 231 so that it can rotate around the vertical axis Ax11. The bearing 240 is a rolling bearing, such as a ball bearing.

[0060] The motor end 210 and the stator unit 220 are mounted on the base plate 24 at the first end 21. The motor end 110 and the stator unit 120 are mounted between the top plate 25 and the stator unit 220 at the first end 21. The output shaft 232 passes through the fixed shaft 112 and protrudes upward, connecting to the link 41. The protruding portion 213 passes through the output shaft 232, which has already passed through the fixed shaft 112, and connects to the aforementioned mechanism built into the link 41.

[0061] Each of the following spaces is sealed by a sealing member such as a packing: between the motor end 210 and the base plate 24 (between the end plate 211 and the base plate 24), between the stator unit 220 and the motor end 210 (between the frame 221 and the end plate 211), between the motor end 110 and the stator unit 220 (between the end plate 111 and the frame 221), between the stator unit 120 and the motor end 110 (between the frame 121 and the end plate 111), and between the stator unit 120 and the top plate 25 (between the frame 121 and the top plate 25). As a result, the stators 71A and 71B are sealed in the internal space S1 by the partition wall 27, which includes partition walls 123 and 223. The space S11 surrounded by the partition wall 27 communicates with the external space S2 through the opening 25a.

[0062] As shown in Figure 4, the motor 70C includes, for example, a motor end 310, a stator unit 320, a rotor 330, and a bearing 340. The motor end 310 supports the stator unit 320 and the rotor 330. The motor end 310 has an end plate 311 and a fixed shaft 312. The end plate 311 extends horizontally around a vertical axis Ax31. The fixed shaft 312 protrudes upward from the center of the end plate 311 and is hollow. The fixed shaft 312 has a projection 313 that protrudes upward from the boom 20 through an opening 25b.

[0063] The stator unit 320 is supported by the motor end 310 and constitutes the stator 71C, further forming a part of the partition wall 27. The stator unit 320 has a frame 321, a plurality of coils 322, and a partition wall 323. The frame 321 is an annular body and surrounds the fixed shaft 312. On the inner circumferential surface of the frame 321, a recess 324 is formed around its entire circumference, opening toward the fixed shaft 312. The plurality of coils 322 are housed in the recess 324 so as to surround the fixed shaft 312, and constitute the stator 71C. The driving power for the motor 70C is supplied to the plurality of coils 322. The plurality of coils 322, having received the driving power, generate a rotating magnetic field around the vertical axis Ax 31. The generated rotating magnetic field acts on the rotor 330, generating torque that rotates the rotor 330.

[0064] The partition wall 323 covers the entire inner surface of the frame 321 and adheres tightly to the inner surface of the frame 321 so as to seal the coil 322 within the recess 324. The partition wall 323 is a thin-walled cylindrical body made of a non-magnetic metallic material (e.g., aluminum or aluminum alloy) and constitutes the portion of the partition wall 27 that surrounds the stator 71C.

[0065] The rotor 330 is housed within the partition wall 323 and constitutes the rotor 72B. The rotor 330 has a rotor core 331, an output shaft 332, and a plurality of field magnets 333. The rotor core 331 is a cylindrical body that surrounds the fixed shaft 312 within the partition wall 323. The output shaft 332 protrudes upward from the rotor core 331 through the opening 25b and is connected to the link 51. The output shaft 332 is hollow. The protruding portion 313 penetrates the output shaft 332 and protrudes further upward and is connected to the aforementioned mechanism built into the link 51.

[0066] Multiple field magnets 333 are held in the rotor core 331 so as to surround the fixed shaft 312. Each of the multiple field magnets 333 is, for example, a permanent magnet. The rotating magnetic field generated by the multiple coils 322 acts on the multiple field magnets 333.

[0067] The bearing 340 is positioned between the outer circumferential surface of the fixed shaft 312 and the inner circumferential surface of the rotor core 331. The bearing 340 is mounted on the outer circumferential surface of the fixed shaft 312 and supports the rotor core 331 so that it can rotate around the vertical axis Ax31. The bearing 340 is a rolling bearing, such as a ball bearing.

[0068] The motor 70D includes a motor end 410, a stator unit 420, a rotor 430, and a bearing 440. The motor end 410 supports the stator unit 420 and the rotor 430. The motor end 410 includes an end plate 411 and a fixed shaft 412. The end plate 411 extends horizontally around a vertical axis Ax31. The fixed shaft 412 protrudes upward from the center of the end plate 411. The fixed shaft 412 has a projection 413 that protrudes upward from the boom 20 through an opening 25b.

[0069] The stator unit 420 is supported by the motor end 410 and constitutes the stator 71D, further forming a part of the partition wall 27. The stator unit 420 has a frame 421, a plurality of coils 422, and a partition wall 423. The frame 421 is an annular body and surrounds the fixed shaft 412. A recess 424 opening toward the fixed shaft 412 is formed on the inner circumferential surface of the frame 421 along its entire circumference. The plurality of coils 422 are housed in the recess 424 so as to surround the fixed shaft 412, and constitute the stator 71D. The driving power for the motor 70D is supplied to the plurality of coils 422. The plurality of coils 422 that receive the driving power generate a rotating magnetic field around the vertical axis Ax31. The generated rotating magnetic field acts on the rotor 430, generating torque that rotates the rotor 430.

[0070] The partition wall 423 covers the entire inner surface of the frame 421 and adheres tightly to the inner surface of the frame 421 so as to seal the coil 422 within the recess 424. The partition wall 423 is a thin-walled cylindrical body made of a non-magnetic metallic material (e.g., aluminum or aluminum alloy) and constitutes the portion of the partition wall 27 that surrounds the stator 71D.

[0071] The rotor 430 is housed within the partition wall 423 and constitutes the rotor 72D. The rotor 430 has a rotor core 431, an output shaft 432, and a plurality of field magnets 433. The rotor core 431 is a cylindrical body that surrounds the fixed shaft 412 within the partition wall 423. The output shaft 432 protrudes from the rotor core 431 above the boom 20 through the opening 25b and is connected to the link 61. The output shaft 432 is hollow. The protruding portion 413 penetrates the output shaft 432 and protrudes further upward and is connected to the aforementioned mechanism built into the link 61.

[0072] Multiple field magnets 433 are held in the rotor core 431 so as to surround the fixed shaft 412. Each of the multiple field magnets 433 is, for example, a permanent magnet. The rotating magnetic field generated by the multiple coils 422 acts on the multiple field magnets 433.

[0073] The bearing 440 is positioned between the outer circumferential surface of the fixed shaft 412 and the inner circumferential surface of the rotor core 431. The bearing 440 is mounted on the outer circumferential surface of the fixed shaft 412 and supports the rotor core 431 so that it can rotate around the vertical axis Ax31. The bearing 440 is a rolling bearing, such as a ball bearing.

[0074] The motor end 410 and the stator unit 420 are mounted on the base plate 24 at the second end 22. The motor end 310 and the stator unit 320 are mounted between the top plate 25 and the stator unit 420 at the second end 22. The output shaft 432 protrudes upward through the fixed shaft 312 and is connected to the link 61. The protruding portion 413 further protrudes through the output shaft 432, which has already passed through the fixed shaft 312, and is connected to the aforementioned mechanism built into the link 61.

[0075] Each of the following spaces is sealed by a sealing member such as a packing: between the motor end 410 and the base plate 24 (between the end plate 411 and the base plate 24), between the stator unit 420 and the motor end 310 (between the frame 421 and the end plate 311), between the motor end 310 and the stator unit 420 (between the end plate 311 and the frame 421), between the stator unit 320 and the motor end 310 (between the frame 321 and the end plate 311), and between the stator unit 320 and the top plate 25 (between the frame 321 and the top plate 25). As a result, the stators 71C and 71D are sealed in the internal space S1 by the partition wall 27, which includes partition wall 323 and partition wall 423. The space S12 surrounded by the partition wall 27 communicates with the external space S2 through the opening 25b.

[0076] As shown in Figure 5, the robot 5 may further be equipped with a boom motor 70E. The boom motor 70E is built into the body 10 and rotates the boom 20 around the vertical axis Ax1. The boom motor 70E may also be a direct drive motor. By using a direct drive motor for the boom motor 70E, dust generation from the boom motor 70E can be further suppressed.

[0077] The boom motor 70E comprises a stator 71 built into the body 10 and a rotor 72 connected to the boom 20. Hereinafter, the stator 71 of the boom motor 70E will be referred to as stator 71E, and the rotor 72 of the boom motor 70E will be referred to as rotor 72E. The stator 71E surrounds the rotor 72E and applies a rotating magnetic field around the vertical axis Ax1 to the rotor 72E. The rotor 72E may have a communication hole 73 that connects the internal space S1 of the boom 20 to the internal space S4 of the body 10. By making the internal space S4 of the body 10 and the internal space S1 of the boom 20 a continuous space, cables and the like can be easily routed.

[0078] The internal space S4 of the body 10 is airtightly separated from the external space S2 of the boom 20. For example, the body 10 has a body housing 11 that constitutes the internal space S4. The body housing 11 has a base plate 12, a top plate 13, and a peripheral wall 14. The base plate 12 covers the bottom of the internal space S4, the top plate 13 covers the top of the internal space S4, and the peripheral wall 14 surrounds the internal space S4 between the base plate 12 and the top plate 13, connecting the base plate 12 and the top plate 13. The internal space S4 is sealed by the base plate 12, the top plate 13, and the peripheral wall 14. The body 10 further has an opening 15 in the center of the top plate 13 for connecting the rotor 72E to the boom 20. To seal the internal space S4, the space between the opening 15 and the rotor 72E is sealed by a sealing member 560, which will be described later.

[0079] The boom motor 70E includes a motor housing 510, a stator unit 530, a rotor 540, and a bearing 550. The motor housing 510 houses the stator unit 530 and a part of the rotor 540. For example, the motor housing 510 includes a frame 511, a motor end 520, and a front cap 512. The frame 511 is a cylindrical body that surrounds the stator unit 530 around a vertical axis Ax1.

[0080] The motor end 520 at least partially covers the lower end of the frame 511. For example, the motor end 520 has an end plate 521 and a fixed shaft 522. The end plate 521 extends horizontally around a vertical axis Ax1 and at least partially covers the lower end of the frame 511. The fixed shaft 522 protrudes upward from the center of the end plate 521 and is hollow.

[0081] The front cap 512 covers at least partially the upper end of the frame 511. The front cap 512 extends horizontally around a vertical axis Ax1, covering at least partially the upper end of the frame 511. The motor housing 510 has an output hole 513 in the center of the front cap 512. The output shaft 542 (described later) of the rotor 540 protrudes upward from the output hole 513.

[0082] The stator unit 530 is housed in the motor housing 510 and constitutes the stator 71E. The stator unit 530 has a plurality of coils 531. The plurality of coils 531 are fixed to the inner surface of the frame 511 so as to surround the fixed shaft 522. The drive power for the boom motor 70E is supplied to the plurality of coils 531. The plurality of coils 531 that receive the drive power generate a rotating magnetic field around the vertical axis Ax1. The generated rotating magnetic field acts on the rotor 540, generating torque that rotates the rotor 540.

[0083] The rotor 540 is at least partially housed in the motor housing 510 and constitutes the rotor 72E. The rotor 540 has a rotor core 541, an output shaft 542, and a plurality of field magnets 543. The rotor core 541 is a cylindrical body that surrounds the fixed shaft 522 within the stator unit 530. The output shaft 542 protrudes upward from the coil 531 to the body 10 through the output hole 513 and the opening 15 of the body 10, and is connected to the base plate 24. The output shaft 542 is hollow. For example, the rotor 540 further has a through hole 544 that passes through the output shaft 542 in the vertical direction. The output shaft 542 constitutes the communication hole 73 described above.

[0084] Multiple field magnets 543 are held in the rotor core 541 so as to surround the fixed shaft 522. Each of the multiple field magnets 543 is, for example, a permanent magnet. The rotating magnetic field generated by the multiple coils 531 acts on the multiple field magnets 543.

[0085] The bearing 550 is positioned between the outer circumferential surface of the fixed shaft 522 and the inner circumferential surface of the rotor core 541. The bearing 550 is mounted on the outer circumferential surface of the fixed shaft 522 and supports the rotor core 541 so that it can rotate around the vertical axis Ax1. The bearing 550 is a rolling bearing, such as a ball bearing.

[0086] The robot 5 may further include a sealing member 560. The sealing member 560 contacts the body 10 and the rotor 540 (output shaft 542), and airtightly separates the internal space S4 of the body 10 from the external space S2 of the boom 20. For example, the sealing member 560 seals the space between the top plate 13 and the output shaft 542. For example, the sealing member 560 seals the space between the inner circumferential surface of the opening 15 and the outer circumferential surface of the output shaft 542.

[0087] The robot 5 may further include a lifting device 70F. The lifting device 70F raises and lowers the boom motor 70E within the body 10. For example, the lifting device 70F is an electrically operated linear actuator that raises and lowers the motor housing 510 within the body 10.

[0088] If the robot 5 is equipped with a lifting device 70F, the sealing member 560 is configured to seal the space between the top plate 13 and the output shaft 542 while allowing the boom motor 70E to move up and down and the output shaft 542 to rotate. For example, the sealing member 560 has an expandable sealing unit 561 and a sliding seal 562. The expandable sealing unit 561 has an upper plate 563, a lower plate 564 and a bellows 565.

[0089] The upper plate 563 and the lower plate 564 are each annular discs that surround the output shaft 542. The upper plate 563 is attached to the top plate 13 such that it at least partially closes the space between the inner surface of the opening 15 and the outer surface of the output shaft 542. The upper plate 563 is fixed to the top plate 13 in airtight contact with the upper surface of the top plate 13. The lower plate 564 is located below the upper plate 563. The lower plate 564 is attached to the front cap 512 of the motor housing 510. For example, the lower plate 564 is fixed to the base plate 12 in airtight contact with the upper surface of the front cap 512. The bellows 565 is a cylindrical member that is expandable and contractible vertically and does not allow air to pass through. The upper end of the bellows 565 is airtightly joined to the lower surface of the upper plate 563 around its entire circumference. The lower end of the bellows 565 is airtightly sealed to the upper surface of the lower plate 564 around its entire circumference. This seals the space between the top plate 13 and the front cap 512. The expansion and contraction of the bellows 565 allows the boom motor 70E to be raised and lowered.

[0090] The sliding seal 562 contacts the inner circumferential surface of the output hole 513 and the outer circumferential surface of the output shaft 542, sealing the space between the inner circumferential surface of the output hole 513 and the outer circumferential surface of the output shaft 542. The sliding properties between the sliding seal 562 and the output shaft 542, and between the front cap 512 and the sliding seal 562, allow the rotation of the output shaft 542. The telescopic seal unit 561 and the sliding seal 562 exemplified above seal the space between the top plate 13 and the output shaft 542 while allowing the boom motor 70E to be raised and lowered and the output shaft 542 to rotate.

[0091] The sliding seal 562 may be, for example, a magnetic fluid seal or a mechanical seal. Since sliding occurs between the sliding seal 562 and the output shaft 542, and between the front cap 512 and the sliding seal 562, dust generation due to sliding may occur. Since the sliding seal 562 is located at the bottom of the expandable seal unit 561, the generated dust is less likely to diffuse into the external space S2. The sliding seal 562 may be a magnetic fluid seal. Dust generation can be further suppressed.

[0092] The robot 5 may further include a cable 80. The cable 80 is routed from the internal space S4 of the body 10 to the stator 71 of at least one of the motors 70A, 70B and motors 70C, 70D, via the internal space S1 of the boom 20 and the communication hole 73, supplying drive power to the destination. The series of spaces from internal space S4 to internal space S1 can be effectively utilized for routing the cable 80.

[0093] The boom 20 may be detachable from the rotor 72E. For example, the boom 20 is attached to the output shaft 542 from above by a detachable fastening member such as a bolt. By removing the fastening member, the boom 20 can be detached from the output shaft 542. The cable 80 may have a cable 81 wired in the internal space S4 of the body 10, a cable 82 wired in the internal space S1 of the boom 20, and a connector 84 that detachably connects the cable 81 and the cable 82.

[0094] Cable 82 is wired in the external space S2 to at least one of motors 70A, 70B and motors 70C, 70D. For example, cable 82 includes cables 83A, 83B, 83C, and 83D. Cable 83A is wired to motor 70A and supplies drive power to motor 70A. One end of cable 83A is connected to cable 81 via connector 84, and the other end of cable 83A is connected to stator 71A. Cable 83B is wired to motor 70B and supplies drive power to motor 70B. One end of cable 83B is connected to cable 81 via connector 84, and the other end of cable 83B is connected to stator 71B. Cable 83C is wired to motor 70C and supplies drive power to motor 70C. One end of cable 83C is connected to cable 81 via connector 84, and the other end of cable 83C is connected to stator 71C. Cable 83D is wired to motor 70D and supplies drive power to motor 70D. One end of cable 83D is connected to cable 81 via connector 84, and the other end of cable 83D is connected to stator 71D.

[0095] Connector 84 has connector 85 and connector 86. Connector 85 is connected to cable 81. Connector 86 is connected to cable 82 and is connected to connector 85 in a detachable manner. By connecting connector 86 to connector 85, cable 82 is connected to cable 81, and by disconnecting connector 86 from connector 85, cable 82 is disconnected from cable 81.

[0096] By removing the boom 20 from the body 10 and the connector 86 from the connector 85, the body 10 and cable 81 and the boom 20 and cable 82 can be transported into the chamber 2 separately. This reduces the burden of installing the robot 5 inside the chamber 2. It is also possible to replace the boom 20, arms 30, 40, and arms 50, 60 while leaving the body 10 in the chamber 2.

[0097] The robot 5 may also be equipped with a sensor 90. The sensor 90 is housed in the internal space S1 of the boom 20 and acquires surrounding information. By utilizing the internal space S1 of the boom 20 for the placement of the sensor 90, it becomes possible to obtain new information. The surrounding information acquired by the sensor 90 is used, for example, for controlling the robot 5 by the robot controller 6. For example, the surrounding information acquired by the sensor 90 can be used to determine the actions to be performed by the robot 5.

[0098] The sensor 90 may be an object sensor that detects objects in the external space S2 of the boom 20 from the internal space S1 of the boom 20. Examples of object sensors include ultrasonic, optical, or capacitive sensors. The sensor 90 shown in Figure 5 is an example of an optical object sensor. In order for an optical object sensor placed in the internal space S1 to detect objects in the external space S2, light transmission from the external space S2 to the sensor 90 in the internal space S1 is necessary. For this reason, in the example in Figure 5, the top plate 25 has a window 25c and a light-transmitting plate 29. The window 25c is an opening, and the light-transmitting plate 29 is a glass plate or the like that closes the opening. The sensor 90 detects objects in the external space S2 through the light-transmitting plate 29. When the sensor 90 detects an object, it can be recognized that there is an object at the detection range of the sensor 90. When the sensor 90 does not detect an object, it can be recognized that there is no object at the detection range of the sensor 90. The cable wired to the sensor 90 may be separable by connectors (for example, connectors 86 and 85) between the portion wired inside the body 10 and the portion wired inside the boom 20.

[0099] In this way, by utilizing the internal space S1 of the boom 20 as the placement space for the sensor 90, it is possible to acquire information from within the chamber 2 from a new perspective that differs from that of sensors placed in the external space S2.

[0100] For example, the top plate 25 has a pair of windows 25c near the first end 21 and a pair of windows 25c, and each of the windows 25c has a pair of translucent plates 29. The robot 5 is equipped with a pair of sensors 90 corresponding to each of the translucent plates 29. Each of the pair of sensors 90 detects an object in the external space S2 via the corresponding translucent plate 29.

[0101] For example, a sensor 90 near the first end 21 detects the substrate W supported by either hand 34 or 44. A sensor 90 near the second end 22 detects the substrate W supported by either hand 54 or 64. The sensor 90 near the first end 21 makes it easy to determine whether hand 34 is supporting the substrate W or whether hand 44 is supporting the substrate W. The sensor 90 near the second end 22 makes it easy to determine whether hand 54 is supporting the substrate W or whether hand 64 is supporting the substrate W.

[0102] For example, as shown in Figure 6, the sensor 90 near the first end 21 is positioned to detect the substrate W supported by the hand in the home position among the hands 34 and 44. The sensor 90 near the first end 21 is positioned to detect the substrate W supported by the hand in the home position among the hands 54 and 64.

[0103] For example, the robot controller 6 drives arms 30 and 40 by controlling motors 70A and 70B so that when hand 34 is placed in the home position, hand 44 is placed in the extended position, and when hand 44 is placed in the home position, hand 34 is placed in the extended position. The robot controller 6 also drives arms 50 and 60 by controlling motors 70C and 70D so that when hand 54 is placed in the home position, hand 64 is placed in the extended position, and when hand 64 is placed in the home position, hand 54 is placed in the extended position.

[0104] The robot controller 6 causes the sensor 90 to detect the substrate W supported by the hand 34 when the hand 34 is in the home position and the hand 44 is in the extended position. If the sensor 90 detects the substrate W, the robot controller 6 recognizes that the hand 34 is supporting the substrate W. If the sensor 90 does not detect the substrate W, the robot controller 6 recognizes that the hand 34 is not supporting the substrate W. Similarly, the robot controller 6 causes the sensor 90 to detect the substrate W supported by the hand 44 when the hand 44 is in the home position and the hand 34 is in the extended position. Based on the detection result, the robot controller 6 recognizes whether the hand 44 is supporting the substrate W. It is easy to determine whether the substrate W detected by the sensor 90 is supported by the hand 34 or by the hand 44 based on whether the hand 34 or the hand 44 is positioned in the home position.

[0105] Similarly, the robot controller 6 causes the sensor 90 to detect the substrate W supported by the hand 54 when the hand 54 is in the home position and the hand 64 is in the extended position. Based on the detection result, the robot controller 6 recognizes whether the hand 54 is supporting the substrate W. Similarly, the robot controller 6 causes the sensor 90 to detect the substrate W supported by the hand 64 when the hand 64 is in the home position and the hand 54 is in the extended position. Based on the detection result, the robot controller 6 recognizes whether the hand 64 is supporting the substrate W. It is easy to determine whether the substrate W detected by the sensor 90 is supported by the hand 54 or by the hand 64, based on whether the hand 54 or the hand 64 is positioned in the home position.

[0106] The robot controller 6 may determine the destination of each hand 34 and 44 based on the detection result of the substrate W by the sensor 90, and control the arms 30 and 40 to move the hands 34 and 44 to the determined destinations. For example, if the robot controller 6 recognizes that the hand 34 is supporting the substrate W based on the detection result of the substrate W by the sensor 90, it will determine the peripheral chamber 3 to which the substrate W supported by the hand 34 should be transported next as the destination of the hand 34, based on the processing history for that substrate W. If the robot controller 6 recognizes that the hand 34 is not supporting the substrate W based on the detection result of the substrate W by the sensor 90, it will determine the peripheral chamber 3 containing a substrate W that can be received by the hand 34 as the destination of the hand 34. If the robot controller 6 recognizes that the hand 44 is supporting the substrate W based on the detection result of the substrate W by the sensor 90, it will determine the peripheral chamber 3 to which the substrate W supported by the hand 44 should be transported next as the destination of the hand 44, based on the processing history for that substrate W. If the robot controller 6 recognizes, based on the detection result of the substrate W by the sensor 90, that the hand 44 is not supporting the substrate W, it determines the peripheral chamber 3 containing a substrate W that can be received by the hand 44 as the destination for the hand 44. Similarly, the robot controller 6 may determine the destinations for the hands 54 and 64 based on the detection result of the substrate W by the sensor 90, and control the arms 50 and 60 to move the hands 54 and 64 to the determined destinations, respectively.

[0107] [Summary] The above disclosure includes the following configuration: (1) a body 10, a boom 20 supported on the body 10 so as to be rotatable about a vertical axis Ax1 and extending to intersect the vertical axis Ax1, first and second arms 30, 40 supported on the first end 21 of the boom 20, first and second hands 34, 44 supported on the first and second arms 30, 40 respectively and each supporting a substrate, third and fourth arms 50, 60 supported on the second end 22 of the boom 20, third and fourth hands 54, 64 supported on the third and fourth arms 50, 60 respectively and each supporting a substrate, and the first end 2 Robot 5 comprises first and second motors 70A, 70B that drive first and second arms 30, 40, respectively, to change the positions of first and second hands 34, 44 relative to 1, and third and fourth motors 70C, 70D that drive third and fourth arms 50, 60, respectively, to change the positions of third and fourth hands 54, 64 relative to a second end 22, with each of the first and second motors 70A, 70B and the third and fourth motors 70C, 70D at least partially housed in the internal space of the boom 20. By distributing the first and second motors 70A, 70B and the third and fourth motors 70C, 70D at both ends of the boom 20, the power transmission system to each arm can be simplified while driving many arms. Since no complex mechanism is required inside the boom 20, surplus space is easily created inside the boom 20. This surplus space can also be used for wiring cables 80, arranging sensors 90, etc.

[0108] (2) The robot 5 according to (1), wherein the internal space of the boom 20 is airtightly separated from the external space of the boom 20, and each of the first and second motors 70A, 70B and the third and fourth motors 70C, 70D has a stator 71 housed in the internal space of the boom 20. When the first and second arms 30, 40, the third and fourth arms 50, 60 and the boom 20 are arranged in a vacuum chamber 2, gas emission from objects in the internal space (e.g., cable 80) into the vacuum chamber 2 can be suppressed.

[0109] (3) The robot 5 as described in (2), wherein the internal spaces of the first and second arms 30, 40 and the third and fourth arms 50, 60 are in communication with the external space of the boom 20. The structures of the first and second arms 30, 40 and the third and fourth arms 50, 60 can be simplified. Dust generation can also be suppressed by eliminating the sliding of seals in the first and second arms 30, 40 and the third and fourth arms 50, 60.

[0110] (4) The robot 5 according to any one of (1) to (3), wherein the first and second motors 70A and 70B are two-axis direct drive motors capable of independently driving the first and second arms 30 and 40 around a first axis parallel to the vertical axis Ax1, and the third and fourth motors 70C and 70D are two-axis direct drive motors capable of independently driving the first and second arms 30 and 40 around a second axis parallel to the vertical axis Ax1. Dust generation from the drive systems of the first and second arms 30 and 40 and the third and fourth arms 50 and 60 can be suppressed.

[0111] (5) The robot 5 according to (4), wherein the first and second motors 70A and 70B are connected to the first and second arms 30 and 40, respectively, and have first and second rotors 72A and 72B that rotate around a first axis, and first and second stators 71A and 71B that surround the first and second rotors 72A and 72B, respectively, and apply a rotating magnetic field around the first axis to the first and second rotors 72A and 72B, respectively; and the third and fourth motors 70C and 70D are connected to the third and fourth arms 50 and 60, respectively, and have third and fourth rotors 72C and 72D that rotate around a second axis, and third and fourth stators 71C and 71D that surround the third and fourth rotors 72C and 72D, respectively, and apply a rotating magnetic field around a second axis to the third and fourth rotors 72C and 72D, respectively. This makes it possible to suppress dust generation from the drive systems of the first and second arms 30 and 40, and the third and fourth arms 50 and 60.

[0112] (6) The robot 5 according to (5), wherein the internal space of the boom 20 is airtightly separated from the external space of the boom 20, the first and second stators 71A, 71B and the third and fourth stators 71C, 71D are housed in the internal space of the boom 20, and the first and second rotors 72A, 72B and the third and fourth rotors 72C, 72D are at least partially located in the external space of the boom 20. It is easy to achieve both sealing the cables 80 wired to the first and second motors 70A, 70B and the third and fourth motors 70C, 70D in the internal space of the boom 20 and driving the first and second arms 30, 40 and the third and fourth arms 50, 60 in the external space of the boom 20.

[0113] (7) The robot 5 according to (6), further comprising: a first partition wall 27 between the first and second stators 71A, 71B and the first and second rotors 72A, 72B, which airtightly separates the internal space of the boom 20 from the external space of the boom 20; and a second partition wall 28 between the third and fourth stators 71C, 71D and the third and fourth rotors 72C, 72D, which airtightly separates the internal space of the boom 20 from the external space of the boom 20. The space between the stator 71 and the rotor 72 can be used to easily airtightly separate the internal space of the boom 20 from the external space of the boom 20.

[0114] (8) The first partition wall 27 encloses the first space S11 at the first end 21, airtightly separating the internal space of the boom 20 from the first space S11 and connecting the first space S11 to the external space of the boom 20, and the second partition wall 28 encloses the second space S12 at the second end 22, airtightly separating the internal space of the boom 20 from the second space S12 and connecting the second space S12 to the external space of the boom 20, and the first and second rotors 72A, 72 Robot 5 as described in (7), wherein B is located in the first space S11, the first and second stators 71A and 71B act on the first and second rotors 72A and 72B via the first partition wall 27, and the third and fourth rotors 72C and 72D are located in the second space S12, the third and fourth stators 71C and 71D act on the third and fourth rotors 72C and 72D via the second partition wall 28. The internal space of the boom 20 can be airtightly separated from the external space of the boom 20 without contact with the first and second rotors 72A and 72B and the third and fourth rotors 72C and 72D. As a result, dust generation can be further suppressed.

[0115] (9) The robot 5 according to any one of items (1) to (8), further comprising a boom motor 70E built into the body 10 and rotating the boom 20 around a vertical axis Ax1, wherein the boom motor 70E is a direct drive motor. Dust generation from the boom motor 70E can be suppressed.

[0116] (10) The boom motor 70E comprises a stator 71 built into the body 10 and a rotor 72 connected to the boom 20, wherein the rotor 72 has a communication hole 73 that connects the internal space of the boom 20 to the internal space of the body 10, as described in (9). By making the internal space of the body 10 and the internal space of the boom 20 a continuous space, cables 80 and the like can be easily routed.

[0117] (11) The robot 5 according to (10), further comprising a sealing member 560 that contacts the body 10 and the rotor 72 and hermetically separates the internal space of the body 10 from the external space of the boom 20. Dust generation from the boom motor 70E can be suppressed. The internal space of the body 10 and the internal space of the boom 20 can be connected, while the internal space of the body 10 and the internal space of the boom 20 can be easily hermetically separated from the external space of the boom 20.

[0118] (12) The robot 5 according to (10) or (11), further comprising a cable 80 that is wired from the internal space of the body 10 to the stator 71 of at least one of the first and second motors 70A, 70B and the third and fourth motors 70C, 70D, via the internal space of the boom 20 and the communication hole 73. A series of spaces can be effectively utilized for wiring the cable 80.

[0119] (13) The robot 5 according to (12), wherein the boom 20 is detachable from the rotor 72, and the cable 80 comprises a first cable 81 routed into the internal space of the body 10, a second cable 82 routed to at least one of the first and second motors 70A, 70B and the third and fourth motors 70C, 70D, and a connector connecting the first cable 81 and the second cable 82. The body 10 and the boom 20 can be transported into the chamber 2 separately, thus reducing the burden of installation work.

[0120] (14) A robot 5 according to any one of items (1) to (13), further comprising a sensor 90 housed in the internal space of the boom 20 for acquiring surrounding information. By utilizing the internal space of the boom 20 for the placement of the sensor 90, it becomes possible to obtain new information.

[0121] (15) The robot 5 described in (14) is an object sensor, the sensor 90, which detects objects in the space outside the boom 20 from the internal space of the boom 20. Information inside the chamber 2 can be acquired from a new perspective.

[0122] (16) The robot 5 according to (15), wherein the sensor 90 detects a substrate supported by either the first or second hand 34, 44. The sensor 90 can be used to detect whether or not a hand is supporting a substrate.

[0123] (17) The robot 5 according to (16), wherein the first and second motors 70A and 70B drive the first and second arms 30 and 40, respectively, to change the positions of the first and second hands 34 and 44 between a home position close to the first end 21 and an extended position away from the first end 21, and the sensor 90 detects the substrate supported by the hand of the first and second hands 34 and 44 that is in the home position. It is possible to easily detect whether the hand in the home position is supporting the substrate.

[0124] (18) The robot 5 according to (17), wherein the first and second motors 70A and 70B drive the first and second arms 30 and 40, respectively, so that when the first hand 34 is placed in the home position the second hand 44 is placed in the extended position, and when the second hand 44 is placed in the home position the first hand 34 is placed in the extended position, and the sensor 90 detects the substrate supported by the first hand 34 when the first hand 34 is placed in the home position and the second hand 44 is placed in the extended position, and detects the substrate supported by the second hand 44 when the second hand 44 is placed in the home position and the first hand 34 is placed in the extended position.

[0125] (19) A robot system 4 comprising a robot 5 as described in any one of items (16) to (18), and a control device that determines the destinations of the first and second hands 34 and 44 based on the detection results of the substrate by the sensor 90, and controls the first and second arms 30 and 40 to move the first and second hands 34 and 44 to the determined destinations.

[0126] (20) A semiconductor manufacturing apparatus 1 comprising a robot 5 as described in any one of items (1) to (18), a chamber 2 housing the robot 5, and a plurality of peripheral chambers 3 adjacent to the chamber 2, wherein the robot 5 transports substrates to each of the plurality of peripheral chambers 3.

[0127] (21) The apparatus comprises a body 10, a boom 20 supported by the body 10 so as to be rotatable around a vertical axis Ax1 and extending to intersect the vertical axis Ax1, a first arm 30 supported at the first end 21 of the boom 20, a first hand 34 supported by the first arm 30 and supporting a substrate, a second arm 50 supported at the second end 22 of the boom 20, a second hand 54 supported by the second arm 50 and supporting a substrate, a first motor 70A that drives the first arm 30 to change the position of the first hand 34 relative to the first end 21, and a second motor 70B that drives the second arm 50 to change the position of the second hand 54 relative to the second end 22, wherein the first motor 70A is connected to the first arm 30 and includes a first rotor 72 that rotates around a first axis, and surrounds the first rotor 72 and applies a rotating magnetic field around the first axis to the first rotor 72. Robot 5 further comprises a first stator 71, a second motor 70B connected to a second arm 50 and having a second rotor 72 that rotates about a second axis, and a second stator 71 surrounding the second rotor 72 and acting a rotating magnetic field on the second rotor 72 about the second axis, the internal space of the boom 20 being airtightly separated from the external space of the boom 20, the first stator 71 and the second stator 71 housed in the internal space of the boom 20, the first rotor 72 and the second rotor 72 being at least partially located in the external space of the boom 20, a first partition wall 27 between the first stator 71 and the first rotor 72 airtightly separating the internal space of the boom 20 from the external space of the boom 20, and a second partition wall 28 between the second stator 71 and the second rotor 72 airtightly separating the internal space of the boom 20 from the external space of the boom 20.

[0128] (22) The robot 5 as described in (21), wherein the first partition wall 27 surrounds the first space S11 at the first end 21, hermetically separating the internal space of the boom 20 from the first space S11 and connecting the first space S11 to the external space of the boom 20, the second partition wall 28 surrounds the second space S12 at the second end 22, hermetically separating the internal space of the boom 20 from the second space S12 and connecting the second space S12 to the external space of the boom 20, the first rotor 72 is located in the first space S11, the first stator 71 applies a rotating magnetic field to the first rotor 72 via the first partition wall 27, the second rotor 72 is located in the second space S12, and the second stator 71 applies a rotating magnetic field to the second rotor 72 via the second partition wall 28.

[0129] Although embodiments have been described above, this disclosure is not necessarily limited to the embodiments described above, and various modifications are possible without departing from its essence.

[0130] 1...Semiconductor manufacturing equipment, 2...Chamber, 3...Peripheral chamber, 4...Robot system, 5...Robot, 10...Body, 20...Boom, 21...First end, 22...Second end, Ax1...Vertical axis, 30...First arm, 40...Second arm, 50...Third arm, 60...Fourth arm, 30, 40...First and second arms, 50, 60...Third and fourth arms, 34...First hand, 44...Second hand, 54...Third hand, 64...Fourth hand, 34, 44...First and second hands, 54, 64...Third and fourth hands, 70A...First motor, 70B...Second motor, 70C ...third motor, 70D...fourth motor, 70A, 70B...first and second motors, 70C, 70D...third and fourth motors, 71...stator, 72...rotor, 72A, 72B...first and second rotors, 71A, 71B...first and second stators, 72C, 72D...third and fourth rotors, 71C, 71D...third and fourth stators, 27...first partition wall, 28...second partition wall, S11...first space, S12...second space, 70E...boom motor, 73...communication hole, 560...seal member, 80...cable, 81...first cable, 82...second cable, 90...sensor.

Claims

1. A robot comprising: a body; a boom supported by the body so as to be rotatable about a vertical axis and extending intersecting the vertical axis; first and second arms supported at the first end of the boom; first and second hands supported by the first and second arms, respectively, and each supporting a circuit board; third and fourth arms supported at the second end of the boom; third and fourth hands supported by the third and fourth arms, respectively, and each supporting a circuit board; first and second motors for driving the first and second arms, respectively, to change the position of the first and second hands relative to the first end; and third and fourth motors for driving the third and fourth arms, respectively, to change the position of the third and fourth hands relative to the second end, respectively, wherein the first and second motors and the third and fourth motors are each at least partially housed in the internal space of the boom.

2. The robot according to claim 1, wherein the internal space of the boom is airtightly separated from the external space of the boom, and each of the first and second motors and the third and fourth motors has a stator housed in the internal space of the boom.

3. The robot according to claim 2, wherein the internal spaces of the first and second arms and the third and fourth arms are in communication with the external space of the boom.

4. The robot according to claim 1, wherein the first and second motors are two-axis direct drive motors capable of independently driving the first and second arms around a first axis parallel to the vertical axis, and the third and fourth motors are two-axis direct drive motors capable of independently driving the first and second arms around a second axis parallel to the vertical axis.

5. The robot according to claim 4, wherein the first and second motors each have first and second rotors connected to the first and second arms and rotating about the first axis, and first and second stators each surround the first and second rotors and apply a rotating magnetic field to the first and second rotors about the first axis, respectively, and the third and fourth motors each have third and fourth rotors connected to the third and fourth arms and rotating about the second axis, and third and fourth stators each surround the third and fourth rotors and apply a rotating magnetic field to the third and fourth rotors about the second axis, respectively.

6. The robot according to claim 5, wherein the internal space of the boom is airtightly separated from the external space of the boom, the first and second stators and the third and fourth stators are housed in the internal space of the boom, and the first and second rotors and the third and fourth rotors are at least partially located in the external space of the boom.

7. The robot according to claim 6, further comprising: a first partition wall between the first and second stators and the first and second rotors, which airtightly separates the internal space of the boom from the external space of the boom; and a second partition wall between the third and fourth stators and the third and fourth rotors, which airtightly separates the internal space of the boom from the external space of the boom.

8. The robot according to claim 7, wherein the first partition wall encloses the first space at the first end, airtightly separating the internal space of the boom from the first space and connecting the first space to the external space of the boom; the second partition wall encloses the second space at the second end, airtightly separating the internal space of the boom from the second space and connecting the second space to the external space of the boom; the first and second rotors are arranged in the first space, and the first and second stators act on the first and second rotors, respectively, via the first partition wall; and the third and fourth rotors are arranged in the second space, and the third and fourth stators act on the third and fourth rotors, respectively, via the second partition wall.

9. The robot according to any one of claims 1 to 8, further comprising a boom motor built into the body for rotating the boom about the vertical axis, wherein the boom motor is a direct drive motor.

10. The robot according to claim 9, wherein the boom motor comprises a stator built into the body and a rotor connected to the boom, and the rotor has a communication hole that connects the internal space of the boom to the internal space of the body.

11. The robot according to claim 10, further comprising a sealing member that contacts the body and the rotor and hermetically separates the internal space of the body from the external space of the boom.

12. The robot according to claim 10, further comprising cables wired from the internal space of the body to the stators of at least one of the first and second motors and the third and fourth motors, via the internal space of the boom and the communication holes.

13. The robot according to claim 12, wherein the boom is detachable from the rotor, and the cable comprises: a first cable wired into the internal space of the body; a second cable wired to at least one of the first and second motors and the third and fourth motors; and a connector connecting the first cable and the second cable.

14. The robot according to any one of claims 1 to 8, further comprising a sensor housed in the internal space of the boom for acquiring surrounding information.

15. The robot according to claim 14, wherein the sensor is an object sensor that detects an object in the space outside the boom from the internal space of the boom.

16. The robot according to claim 15, wherein the sensor detects a substrate supported by either the first or second hand.

17. The robot according to claim 16, wherein the first and second motors drive the first and second arms, respectively, to change the positions of the first and second hands between a home position near the first end and an extended position away from the first end, and the sensor detects a substrate supported by the hand in the home position of the first and second hands.

18. The robot according to claim 17, wherein the first and second motors drive the first and second arms, respectively, so that when the first hand is positioned in the home position, the second hand is positioned in the extended position, and when the second hand is positioned in the home position, the first hand is positioned in the extended position; and the sensor detects a substrate supported by the first hand when the first hand is positioned in the home position and the second hand is positioned in the extended position, and detects a substrate supported by the second hand when the second hand is positioned in the home position and the first hand is positioned in the extended position.

19. A robot system comprising: the robot according to claim 16; a control device that determines the destinations of the first and second hands based on the detection results of the substrate by the sensor, and controls the first and second arms to move the first and second hands to the determined destinations, respectively.

20. A semiconductor manufacturing apparatus comprising: a robot according to any one of claims 1 to 8; a chamber housing the robot; and a plurality of peripheral chambers adjacent to the chamber, wherein the robot transports substrates to each of the plurality of peripheral chambers.

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