Inspection table and inspection method

Abstract

Provided is an inspection table that makes it possible to reduce contamination of polycrystalline silicon. A mobile inspection table (1) having wheels (43), said inspection table (1) comprising: a basket receiving part (2) on which a cleaning basket (100) that is used for cleaning and drying polycrystalline silicon is placed with the polycrystalline silicon contained therein; and a support part (3) that rotatably supports the basket receiving part (2) and tilts the basket receiving part (2).

Description

Inspection Table and Inspection Method

[0001] The present disclosure relates to an inspection table and an inspection method for polycrystalline silicon.

[0002] Conventionally, in the manufacturing process of polycrystalline silicon, in order to prevent carbon contamination or the like of polycrystalline silicon, it is known to wash and dry polycrystalline silicon while it is housed in a washing cage. In relation to this type of technology, the applicant of the present application has developed a washing cage that can reduce the amount of washing liquid remaining in the washing cage and improve the drying efficiency of the polycrystalline silicon housed in the washing cage, and has filed a patent application (Patent Document 1).

[0003] International Publication No. 2023 / 013378 Pamphlet

[0004] Here, the polycrystalline silicon after washing and drying is transferred to an inspection table for quality inspection. However, when transferring from the washing cage to the inspection cage, impurities such as abrasion powder may be generated due to contact and friction between the cage and the polycrystalline silicon, and the polycrystalline silicon may be contaminated.

[0005] One aspect of the present disclosure aims to provide an inspection table and an inspection method capable of reducing contamination of polycrystalline silicon.

[0006] In order to solve the above problems, an inspection table according to one aspect of the present disclosure is a mobile inspection table having wheels, in which a plurality of through-holes are formed, and a cage receiving portion on which a washing cage used for at least one of washing and drying of the polycrystalline silicon in a state of housing the polycrystalline silicon is placed, and a support portion that rotatably supports the cage receiving portion and inclines the cage receiving portion.

[0007] In order to solve the above problems, an inspection method according to one aspect of the present disclosure is an inspection method for inspecting polycrystalline silicon using a mobile inspection table having wheels, including a step of performing at least one of washing and drying of polycrystalline silicon while housed in a washing cage in which a plurality of through-holes are formed, a step of placing the washing cage on a cage receiving portion of the inspection table after performing at least one of washing and drying, and a step of inclining the cage receiving portion with the washing cage placed thereon and inspecting the polycrystalline silicon.

[0008] According to one aspect of this disclosure, an inspection stand and inspection method capable of reducing contamination of polycrystalline silicon can be provided.

[0009] This is a front view showing the inspection table in use according to the embodiment. This is a schematic side view showing the washing basket shown in Figure 1. This is a schematic front view showing the washing basket shown in Figure 1. This is a front view showing the inspection table. This is a side view showing the inspection table shown in Figure 4. This is a front view showing each basket support part of the inspection table shown in Figure 4 in an inclined state. This is a front view showing the basket support part shown in Figure 4. This is a plan view showing the basket support part. This is a front view showing the support part shown in Figure 4. This is a plan view showing the main part of the mounting structure for the pivot shaft shown in Figure 4. This is a plan view showing the main part of the mounting structure for the angle adjustment pin shown in Figure 4. This is a schematic diagram showing the angle adjustment pin.

[0010] An embodiment of this disclosure will be described below. Note that the following description is an example of an inspection table relating to this disclosure, and the technical scope of this disclosure is not limited to the illustrated example.

[0011] [Overview of the Inspection Table] First, an overview of the inspection table 1 according to this embodiment will be described. Figure 1 is a front view showing the inspection table 1 in use according to this embodiment. As shown in Figure 1, the inspection table 1 is a mobile inspection table 1 having wheels 43. The inspection table 1 is used to move a washing basket 100 containing washed or dried polycrystalline silicon from the washing or drying area to the inspection area and to perform quality inspection of the polycrystalline silicon.

[0012] Here, polycrystalline silicon is generally a lump obtained by crushing polycrystalline silicon rods manufactured by the Siemens method or the like using a hammer. Quality inspection of such polycrystalline silicon includes, for example, visual inspection for foreign matter and visual inspection of the surface of the lump to check for unstable growth of popcorn-like parts, holes, grooves, discolored areas, etc. These are carried out by the inspector examining the polycrystalline silicon lump contained in the washing basket 100 through the upper opening of the washing basket, taking each lump out individually, and observing each one from all angles.

[0013] The inspection table 1 includes a basket support section 2 on which a washing basket 100, which is used for at least one of washing and drying polycrystalline silicon while containing polycrystalline silicon, is placed, and a support section 3 that rotatably supports the basket support section 2 and tilts the basket support section 2.

[0014] This inspection table 1 allows for the inspection of polycrystalline silicon by placing the washing basket 100 directly on the basket support section 2. Therefore, there is no need to transfer the polycrystalline silicon from the washing basket 100 to the inspection basket, thus reducing contamination of the polycrystalline silicon. Furthermore, because the basket support section 2 of the inspection table 1 is tilted, the inspection efficiency of polycrystalline silicon can be improved by tilting the basket support section 2 to an angle that makes it easy for the operator to visually inspect the inside of the washing basket 100.

[0015] The inspection table 1 according to this embodiment is equipped with a pair of basket support sections 2 so that two washing baskets 100 can be placed on it simultaneously. In the following description, the direction in which the pair of basket support sections 2 are arranged side by side may be referred to as the left-right direction (first direction), the direction perpendicular to the left-right direction in a plan view may be referred to as the front-back direction (second direction), and the direction perpendicular to both the left-right direction and the front-back direction may be referred to as the up-down direction.

[0016] [Configuration of the Washing Basket] Next, an example of the configuration of the washing basket 100, which is used in the inspection table 1 and contains polycrystalline silicon, will be described. Figure 2 is a schematic side view of the washing basket 100 shown in Figure 1, and Figure 3 is a schematic front view of the washing basket 100 shown in Figure 1.

[0017] The washing basket 100 is a container used for at least one of washing and drying polycrystalline silicon while containing it. The internal depth of the washing basket 100 is not particularly limited. However, it is preferable that the internal depth of the washing basket 100 be 20 to 50 cm in order to efficiently and effectively wash the polycrystalline silicon lumps, prevent the polycrystalline silicon lumps from spilling out of the upper opening of the washing basket 100 when it is then placed on the basket support portion 2 of the inspection table 1 and tilted, and to facilitate the removal of the contained lumps during inspection of the polycrystalline silicon. The washing basket 100 is made of a resin such as PP (polypropylene).

[0018] As shown in Figures 2 and 3, the washing basket 100 comprises a bottom plate 102, a slanted plate 103, left and right side plates 104, and front and rear side plates 105. In Figures 2 and 3, there is one bottom plate 102, and two each of the slanted plate 103, left and right side plates 104, and front and rear side plates 105, but these numbers are just examples. The washing basket 100 may also be provided with substantially U-shaped reinforcing ribs 106 along the outer surfaces of each plate of the bottom plate 102, slanted plate 103, and left and right side plates 104. Multiple reinforcing ribs 106 may be provided at intervals in the front-to-back direction of the washing basket 100.

[0019] The base plate 102 has a front end 121 and a rear end 122. The base plate 102 is supported by the front and rear side plates 105 by connecting the front end 121 and the rear end 122 to the front and rear side plates 105. The base plate 102 has multiple through holes H102 that are elongated in the front-to-back direction, with the two front and rear side plates 105 side by side.

[0020] The slanted plate 103 has a front end 131 and a rear end 132. The slanted plate 103 is supported by the front and rear side plates 105 by connecting the front end 131 and the rear end 132 to the front and rear side plates 105. Multiple through holes H103 are formed in the slanted plate 103.

[0021] The left and right side plates 104 have a front end 141 and a rear end 142. The left and right side plates 104 are supported by the front and rear side plates 105 by connecting the front end 141 and the rear end 142 to the front and rear side plates 105. Multiple through holes H104 are formed in the left and right side plates 104.

[0022] Furthermore, one aspect of this disclosure is not limited to a cleaning basket 100 in which multiple through holes H104 are formed in the left and right side plates 104, but is also applicable to cleaning baskets in which no through holes H104 are formed in the left and right side plates 104. However, the formation of multiple through holes H104 in the left and right side plates 104 makes it easier for the fluid inside the cleaning basket 100 to diffuse in the left and right direction, and for the fluid inside the cleaning basket 100 to escape to the outside of the cleaning basket 100. As a result, the cleaning liquid inside the cleaning basket 100 can be removed to the outside of the cleaning basket 100 more quickly. In addition, the drying efficiency of the portion of the polycrystalline silicon contained in the cleaning basket 100 located near the left and right side plates 104 can be improved.

[0023] The front and rear side plates 105 are connected to the bottom plate 102, the inclined plate 103, and the left and right side plates 104, and extend vertically. As shown in Figure 3, the front and rear side plates 105 have multiple through holes H105 formed above the connection points between the bottom plate 102 and the front and rear side plates 105, and above the connection points between the inclined plate 103 and the front and rear side plates 105. The front and rear side plates 105 have lower ends 151 on the lower side, and these lower ends 151 are located below the connection points between the bottom plate 102 and the front and rear side plates 105. This makes it easier for fluid to escape from the multiple through holes H102 in the bottom plate 102 to the outside of the washing basket 100.

[0024] In the cleaning basket 100 with the above configuration, the fluid inside the cleaning basket 100 flows along the swash plate 103 toward the bottom plate 102, making it easier for the fluid to escape through the multiple through holes H102 formed in the bottom plate 102. Therefore, the amount of cleaning liquid remaining in the cleaning basket 100 can be reduced, and the drying efficiency of the polycrystalline silicon contained in the cleaning basket 100 can be improved.

[0025] [Configuration of the inspection table] Next, an example of the configuration of the inspection table 1 according to this embodiment will be described. Figure 4 is a front view showing the inspection table 1. Figure 5 is a side view showing the inspection table 1 shown in Figure 4. Figure 6 is a front view showing the inspection table 1 shown in Figure 4 with each cage support part 2 tilted.

[0026] As shown in Figures 4 to 6, the inspection table 1 comprises a pair of basket support parts 2 on which the washing basket 100 is placed, a support part 3 that rotatably supports the basket support parts 2 and tilts the basket support parts 2, and a trolley 4 having wheels 43. The inspection table 1 also further comprises a collection tray 5 for receiving objects that fall from the washing basket 100, and a chute 6 provided between the basket support parts 2 and the collection tray 5, which is inclined to narrow in diameter toward the collection tray 5.

[0027] On the inspection table 1, the basket support 2 is pivotally supported by the support 3, and the basket support 2 is rotatable around the pivot axis 34. The basket support 2 can change the tilt angle θ1 of the washing basket 100 between a normal position (Figure 4) in which the washing basket 100 is held horizontally and an inclined position (Figure 6) in which the washing basket 100 is tilted. The basket support 2 is fixed in the normal position and the inclined position by an angle adjustment pin (tilting mechanism) 35.

[0028] In this embodiment, the pair of basket support sections 2 are inclined in a direction that separates them from each other. In other words, if the side adjacent to each other is considered the inward side and the side opposite the inward side is considered the outward side, then each of the pair of basket support sections 2 is inclined outward. This makes it easier to incline each of the washing baskets 100 placed on each pair of basket support sections 2 and simultaneously inspect the polycrystalline silicon contained in each washing basket 100, thereby improving the inspection efficiency of polycrystalline silicon. Furthermore, it becomes easier to ensure the stability of the inspection table 1 against the shift in the center of gravity caused by the operation of inclining each washing basket 100.

[0029] The tilt angle θ1 of the basket support portion 2 when it is in an inclined position is preferably set to 15 to 60 degrees, and in the example shown in Figure 6, it is set to 30 degrees. Furthermore, to prevent over-rotation of the basket support portion 2, if the tilt angle θ1 exceeds the above-mentioned set degree, the basket support portion 2 will come into contact with the upper end portion 321 of the support portion 3, thereby stopping the rotation of the basket support portion 2. This prevents the basket support portion 2 from over-rotating, which could cause the washing basket 100 to fall out of the basket support portion 2 or the polycrystalline silicon lumps contained within to spill out from the upper opening of the washing basket 100. The upper end portion 321 of the support portion 3 may be an inclined surface to easily support the over-rotated basket support portion 2.

[0030] The inclination angle θ1 is not particularly limited and can be changed as appropriate depending on the manner in which the inspection table 1 is used or various conditions such as the height of the worker. The configuration of each part of the inspection table 1 will be described below.

[0031] (Basket support section) Figure 7 is a front view showing the basket support section 2 shown in Figure 4. Figure 8 is a top view showing the basket support section 2 shown in Figure 7. Figures 7 and 8 show the basket support section 2 located on the right side of the pair of basket support sections 2 shown in Figure 4.

[0032] Note that the configuration of each cage support section 2 that makes up the pair of cage support sections 2 is identical, and each cage support section 2 is pivotally supported on the support section 3 with the other cage support section 2 rotated 180 degrees in the front-rear direction relative to the other cage support section 2. For this reason, in Figures 7 and 8, the left side of the figures shows the inside where the pair of cage support sections 2 are adjacent to each other, and the right side shows the outside where the pair of cage support sections 2 are separated from each other.

[0033] As shown in Figures 7 and 8, the basket support section 2 comprises a peripheral wall section 20 including front and rear side plates 21 and left and right side plates 22, reinforcing ribs 23 provided between the front and rear side plates 21, and first support sections 24 and second support sections 25 for receiving the washing basket 100. Each part of the basket support section 2 may be made of the same material as the washing basket 100, for example, a resin such as PP (polypropylene). This reduces contamination of polycrystalline silicon.

[0034] The peripheral wall portion 20 is made of, for example, a PP resin plate with a thickness of 10 mm. The peripheral wall portion 20 is a cylindrical member formed by connecting a pair of front and rear side plates 21 and a pair of left and right side plates 22 in a rectangular shape when viewed from above.

[0035] The front and rear side plates 21 include a first side plate 211 and a second side plate 212 connected to the inner surface of the right end of the first side plate 211 and extending to the right from the first side plate 211. A step S equal to the thickness of the first side plate 211 is formed at the connection point between the first side plate 211 and the second side plate 212.

[0036] The first side plate 211 has a shaft insertion hole 21A formed through it in the thickness direction, into which the pivot shaft 34 is inserted. The second side plate 212 has a first pin insertion hole 21B into which the angle adjustment pin 35 is inserted when the cage support portion 2 is in the normal position, and a second pin insertion hole 21C into which the angle adjustment pin 35 is inserted when the cage support portion 2 is in the inclined position, both formed through it in the thickness direction. The first pin insertion hole 21B and the second pin insertion hole 21C are formed in the second side plate 212 at positions on the circumference centered on the shaft insertion hole 21A, that is, at positions at equal distances from the center of the shaft insertion hole 21A, and are aligned vertically. Note that the first pin insertion hole 21B and the second pin insertion hole 21C do not need to be aligned vertically, as long as they are formed in the second side plate 212 at equal distances from the center of the shaft insertion hole 21A.

[0037] A chute section 22A, which is inclined downward to the right, may be provided at the lower end 221 of the left side plate 22 (located inside the pair of basket support sections 2) of the pair of left and right side plates 22. By providing the chute section 22A, it becomes easier to guide the fallen objects from the washing basket 100 into the chute 6 when the basket support section 2 is inclined.

[0038] The reinforcing rib 23 is a plate-shaped reinforcing material that extends in the front-rear direction. The reinforcing rib 23 has a front end 231 on the front side and a rear end 232 on the rear side. In this embodiment, the front end 231 and rear end 232 of the pair of reinforcing ribs 23 are connected to the lower inner surface of the front and rear side plates 21, so that each reinforcing rib 23 is supported by the front and rear side plates 21 so that it is parallel to each other. By arranging the two plate-shaped reinforcing ribs 23 vertically in this way, the strength of the basket support section 2 is ensured, while a wide space (opening) is formed at the bottom of the basket support section 2, making it easier for objects that have fallen from the washing basket 100 to fall into the collection tray 5 or chute 6.

[0039] The first receiving portion 24 is a member that receives the slanted plate 103 of the washing basket 100. The first receiving portion 24 has a triangular cross-section when cut by a plane perpendicular to the front-rear direction and extends in the front-rear direction. The first receiving portion 24 has an inclined receiving surface 24A that receives the slanted plate 103 of the washing basket 100. In this embodiment, a pair of first receiving portions 24 are provided on the inner surfaces of the left and right side plates 22 facing each other, such that the receiving surface 24A of each of the pair of first receiving portions 24 is substantially parallel to the slanted plate 103 of the washing basket 100. As a result, when the first receiving portion 24 receives the slanted plate 103 of the washing basket 100 with its receiving surface 24A, the washing basket 100 is positioned (positioned) so that the washing basket 100 is placed in an appropriate position in the left-right direction.

[0040] The second receiving portion 25 is a member that receives the bottom plate 102 of the washing basket 100. The second receiving portion 25 is a plate material arranged in a direction perpendicular to the front-rear direction, and has a receiving surface 25A at its upper end that receives the bottom plate 102 of the washing basket 100. In this embodiment, a pair of second receiving portions are provided parallel to each other between the reinforcing ribs 23 such that the receiving surface 25A of each of the pair of second receiving portions is substantially parallel to the bottom plate 102 of the washing basket 100. When the second receiving portion 25 receives the bottom plate 102 of the washing basket 100 with its receiving surface 25A, the washing basket 100 is positioned (positioned) so that it is placed in an appropriate position in the front-rear direction. This positioning of the washing basket 100 is preferably performed by receiving the reinforcing ribs 106 of the washing basket 100 with the receiving surface 25A.

[0041] (Support section) Figure 9 is a front view showing the support section 3 shown in Figure 4. Figure 10 is a plan view showing the support section 3 shown in Figure 9. As shown in Figures 9 and 10, the support section 3 comprises a peripheral wall section 30 including front and rear side plates 31 and left and right side plates 32, and a third receiving section 33 provided between the pair of front and rear side plates 31 to receive the basket receiving section 2. Each part of the support section 3 may be made of the same material as the washing basket 100, for example, a resin such as PP (polypropylene). This makes it possible to reduce contamination of polycrystalline silicon.

[0042] The peripheral wall portion 30 is made of, for example, a resin plate made of PP with a plate thickness of 10 mm. The peripheral wall portion 30 is a cylindrical member formed by connecting a pair of front and rear side plates 31 and a pair of left and right side plates 32 in a rectangular (rectangular) shape in plan view. The chute 6 is connected to the inner surface of the peripheral wall portion 30. The upper end portion 311 of the upper side of the front and rear side plates 31 protrudes upward from the upper end portion 312 of the upper side of the left and right side plates 32.

[0043] A shaft insertion hole 31A into which a rotation shaft 34 is inserted is formed through the front and rear side plates 31 in the plate thickness direction. In the present embodiment, two shaft insertion holes 31A are formed in each of the front and rear side plates 31 at positions corresponding to the shaft insertion holes 21A of the pair of cage receiving portions 2. Further, a pin insertion hole 31B into which an angle adjustment pin 35 is inserted is formed through the front and rear side plates 31 in the plate thickness direction outside each shaft insertion hole 31A. The angle adjustment pin 35 is provided in the pin insertion hole 31B so as to be able to advance and retreat in the axial direction (front and rear direction) within the pin insertion hole 31B. Furthermore, an electronic paper P for displaying various information is attached to the front and rear side plates 31. An overhanging portion 36 protruding in a roof shape is provided above the attachment position of the electronic paper P to protect the electronic paper P. The protruding amount of the overhanging portion 36 is larger than the thickness of the electronic paper P.

[0044] The third receiving portion 33 is a member that receives the lower end portion 221 of each cage receiving portion 2 when the pair of cage receiving portions 2 are in the normal position. The third receiving portion 33 has a substantially T-shaped cross section when cut by a plane perpendicular to the front and rear direction and extends in the front and rear direction. The third receiving portion 33 has a front end portion 331 on the front side and a rear end portion 332 on the rear side. In the present embodiment, the third receiving portion 33 is supported by the front and rear side plates 31 so as to be positioned substantially at the center in the left-right direction of the peripheral wall portion 30 in plan view by connecting the front end portion 331 and the rear end portion 332 to the central portion of the inner surface of the front and rear side plates 31.

[0045] The third receiving portion 33 has a plate-shaped receiving surface portion 333 having a receiving surface 33A for receiving the lower end portion 221 of the cage receiving portion 2, and a plate-shaped rib portion 334 vertically arranged to support the receiving surface portion 333 from below. Thereby, the third receiving portion 33 can receive the lower end portion 221 of each of the pair of cage receiving portions 2 with the receiving surface 33A and ensure the strength of the support portion 3 with the rib portion 334.

[0046] Fig. 11 is a plan view showing the main part of the attachment structure of the rotating shaft 34. As shown in Fig. 11, the rotating shaft 34 has a flange portion 341 and a shaft portion 342. The flange portion 341 is fastened to the inner surface of the cage receiving portion 2 with screws or the like. The shaft portion 342 is penetrated through the shaft insertion hole 21A of the cage receiving portion 2 and the shaft insertion hole 31A of the support portion 3. In the present embodiment, the shaft diameter of the shaft portion 342 is, for example, 45 mm. However, the shaft diameter of the shaft portion 342 can be appropriately changed according to the plate thickness of the peripheral wall portion 20 of the cage receiving portion 2, the plate thickness of the peripheral wall portion 30 of the support portion 3, and the like.

[0047] The rotating shaft 34 is preferably arranged to be displaced outward from the left - right center of the cage receiving portion 2. Thereby, it is possible to avoid interference between the pair of cage receiving portions 2 when the cage receiving portion 2 is inclined. Also, the third receiving portion 33 and the rotating shaft 34 can receive the load of the cleaning cage 100 and the cage receiving portion 2, and the cage receiving portion 2 can be stably supported at the normal position where it is not inclined during the movement of the inspection table 1.

[0048] A sliding bearing 3 with a flange portion 371 may be further provided in the shaft insertion hole 31A. This sliding bearing 3 is arranged such that the flange portion 371 is positioned between the cage receiving portion 2 and the support portion 3. Thereby, the friction between the cage receiving portion 2 and the support portion 3 during the rotation of the cage receiving portion 2 can be prevented.

[0049] Note that the rotating shaft 34 and the sliding bearing 3 are preferably made of a resin such as PP (polypropylene) in order to prevent contamination of polycrystalline silicon.

[0050] Fig. 12 is a plan view showing the main part of the attachment structure of the angle - adjusting pin 35 shown in Fig. 4. Fig. 13 is a schematic view showing the angle - adjusting pin 35 shown in Fig. 12. The reference numeral 1301 in Fig. 13 indicates the base end side of the angle - adjusting pin 35, the reference numeral 1302 indicates the side - side of the angle - adjusting pin 35, and the reference numeral 1303 indicates the tip end side of the angle - adjusting pin 35.

[0051] As shown in Figs. 12 and 13, the angle - adjusting pin 35 has a knob portion 351 provided on the base end side, a shaft portion 352 having a smaller diameter than the knob portion 351, and a retaining portion 353 provided on the tip end side.

[0052] The knob portion 351 has a pair of flat surfaces 351A formed on its circumferential surface to facilitate rotation of the angle adjustment pin 35. The shaft portion 352 is insertable into the first pin insertion hole 21B or the second pin insertion hole 21C of the cage receiving portion 2 and the pin insertion hole 31B of the support portion 3. The retaining portion 353 is provided with a key (projection) corresponding to the key groove 213 formed in the first pin insertion hole 21B and the second pin insertion hole 21C of the cage receiving portion 2. This structure prevents the tip of the angle adjustment pin 35 from coming out of the first pin insertion hole 21B and the second pin insertion hole 21C unless the angle (rotation angle) of the angle adjustment pin 35 is adjusted. On the other hand, since no key groove is formed in the pin insertion hole 31B of the support portion 3, the angle adjustment pin 35 will not fall out of the pin insertion hole 31B. The angle adjustment pin 35 may also have a structure in which the shaft portion 352 and the retaining portion 353 can be disassembled.

[0053] Between the basket support portion 2 and the support portion 3, a clearance S is provided by a step that allows the retaining portion 353 of the angle adjustment pin 35 to temporarily retract when the basket support portion 2 rotates. In addition, clearance is provided between the retaining portion 353 of the angle adjustment pin 35 and the washing basket 100 so that the angle adjustment pin 35 and the washing basket 100 do not interfere with each other.

[0054] (Cart) The cart 4 has a base 41, a support column 42 protruding from the upper surface 41A of the base 41, and wheels 43 provided on the lower surface 41B of the base 41.

[0055] The base 41 is constructed by combining multiple frames in a rectangular shape when viewed from above. Support columns 42 are provided projecting vertically from each corner or near each corner of the upper surface 41A of the base 41. The upper ends of each support column 42 are connected to the lower part of the support section 3. As a result, the support section 3 is supported from below by the trolley 4, with a space formed between the support section 3 and the base 41.

[0056] Furthermore, wheels (casters) 43 are rotatably attached to each corner or near each corner of the lower surface 41B of the base 41. This allows the inspection table 1 to move along the floor surface F.

[0057] The base 41 and the support column 42 may be made of, for example, stainless steel (SUS). This ensures the strength of the trolley 4.

[0058] (Collection Tray) The collection tray 5 is positioned below the basket support section 2 and is a container that receives the fallen objects from the washing basket 100. In this embodiment, the collection tray 5 is a rectangular container in plan view with an open top. The collection tray 5 is placed on the upper surface 41A of the trolley 4. This allows impurities (fallen objects) such as wear particles that fall from the washing basket 100 to be received by the collection tray 5 and easily collected.

[0059] (Chute) The chute 6 is provided between the basket receiving section 2 and the collection tray 5 and is a cylindrical member that is inclined to decrease in diameter toward the collection tray 5. In this embodiment, the chute 6 is a cylindrical member that is rectangular in plan view with openings at the top and bottom and has an inclined surface 61 that is inclined to decrease in diameter toward the bottom.

[0060] The chute 6 is supported by the support portion 3 by its upper end portion 62 being connected to the inner surface of the peripheral wall portion 30 of the support portion 3. At this time, the chute 6 is positioned such that the opening 6A formed in the lower end portion 63 is located above the center of the collection tray 5. This allows impurities (fallen objects) such as wear particles that have fallen from the washing basket 100 to move along the inclined surface 61 and fall onto the collection tray 5.

[0061] The inclination angle θ2 of the inclined surface 61 of the chute 6 with respect to the horizontal direction is preferably 37 degrees or more. By setting the inclination angle θ2 of the inclined surface 61 to 37 degrees or more, which is the resting angle of polycrystalline silicon wear particles, falling objects such as polycrystalline silicon wear particles can move more easily along the inclined surface 61. Also, if the inclination angle θ2 of the inclined surface 61 is too large, the distance required to reduce the diameter to the desired size will be longer, and the height of the inspection table 1 may increase. For this reason, the inclination angle θ2 is preferably 75 degrees or less. In this embodiment, the inclination angle θ2 of the inclined surface 61 is set to 45 degrees.

[0062] [Inspection Method] Next, an example of an inspection method for polycrystalline silicon using inspection table 1 will be described. Polycrystalline silicon is produced, for example, by reacting a chlorosilane compound with hydrogen in a reactor to precipitate polycrystalline silicon. After washing and drying, the produced polycrystalline silicon is subjected to quality inspection.

[0063] In the inspection method according to this embodiment, first, at least one of the following is performed: cleaning and drying of polycrystalline silicon while it is contained in a cleaning basket 100 having multiple through holes H102, H103, H104, and H105 (cleaning / drying step). Specifically, the cleaning basket 100 containing the polycrystalline silicon is introduced into a cleaning device, and the polycrystalline silicon is cleaned by bringing nitrate hydrofluoric acid, which is used as a cleaning solution, into contact with the polycrystalline silicon. After cleaning, the cleaning basket 100 containing the polycrystalline silicon is introduced into a drying device, and the polycrystalline silicon is dried with hot air.

[0064] Next, after cleaning and drying the polycrystalline silicon, the cleaning basket 100 is placed on the basket support section 2 of the inspection table 1 (placement step). At this time, the angle adjustment pin 35 is inserted into the first pin insertion hole 21B of the basket support section 2, and the basket support section 2 is fixed in its normal position. Therefore, the cleaning basket 100 is held horizontally by the basket support section 2. In the inspection method according to this embodiment, there is no need to transfer the polycrystalline silicon from the cleaning basket 100 to the inspection basket, so contamination of the polycrystalline silicon can be reduced.

[0065] Next, the inspection table 1 is moved to, for example, the inspection area (moving process). At this time, since the inspection table 1 has wheels 43, it can be easily moved by pushing it.

[0066] Next, the inspection table 1 is moved to the inspection area, and the polycrystalline silicon is inspected (inspection process). In this process, the operator operates the angle adjustment pin 35 and rotates the basket support unit 2 around the pivot axis 34 with the angle adjustment pin 35 pulled out from the first pin insertion hole 21B of the basket support unit 2. Then, the operator inserts the angle adjustment pin 35 into the second pin insertion hole 21C of the basket support unit 2, thereby fixing the basket support unit 2 in an inclined position. As a result, the basket support unit 2 is fixed at an inclination angle θ1 that makes it easy for the operator to visually inspect the inside of the washing basket 100, thus improving the inspection efficiency of polycrystalline silicon.

[0067] Thus, in the inspection method according to this embodiment, the washing basket 100 is placed directly on the basket support portion 2 of the inspection table 1 during the placement step, and the polycrystalline silicon is inspected during the inspection step. Therefore, since there is no need to transfer the polycrystalline silicon from the washing basket to the inspection basket as in the conventional method, contamination of the polycrystalline silicon can be reduced.

[0068] Furthermore, since the inspection table 1 has wheels 43, during the moving process, the inspection table 1 with the washing basket 100 on it can be easily moved to the waiting (stock) area or the inspection area by pushing it.

[0069] Furthermore, in the inspection process, the basket support section 2 can be tilted with the washing basket 100 placed on it. For example, by tilting the basket support section 2 at an angle θ1 that makes it easy for the worker to visually inspect the inside of the washing basket 100, the inspection efficiency of polycrystalline silicon can be improved.

[0070] [Effects of the Inspection Table] As described above, the inspection table 1 according to this embodiment is a movable inspection table 1 having wheels 43, and comprises a basket support section 2 on which a washing basket 100 is placed, which has a plurality of through holes H102, H103, H104, H105 and is used for at least one of washing and drying of polycrystalline silicon while containing polycrystalline silicon, and a support section 3 that rotatably supports the basket support section 2 and tilts the basket support section 2.

[0071] On the inspection table 1, the washing basket 100 can be placed directly on the basket support section 2 to inspect polycrystalline silicon. Therefore, there is no need to transfer the polycrystalline silicon from the washing basket 100 to the inspection basket as in the conventional method, thus reducing contamination of the polycrystalline silicon.

[0072] Furthermore, since the inspection table 1 has wheels 43, the washing basket 100, after washing and drying, can be placed on the basket support 2 and the inspection table 1 can be pushed to move to the waiting (stock) area or the inspection area.

[0073] Furthermore, with the above configuration, the support portion 3 tilts the basket receiving portion 2. For example, by tilting the basket receiving portion 2 at an angle θ1 that makes it easy for the worker to visually inspect the inside of the washing basket 100, the inspection efficiency of polycrystalline silicon can be improved.

[0074] [Modification] In the above-described embodiment, the inspection table 1 was described in which a pair of basket support parts 2 are arranged in the left-right direction. However, the number of basket support parts 2 is not limited to two. The inspection table 1 may include, for example, a plurality of pairs of basket support parts 2, and these pairs of basket support parts 2 may be arranged in a plurality in the front-back direction.

[0075] This allows for simultaneous inspection of polycrystalline silicon contained in two or more washing baskets 100, thereby further improving the inspection efficiency of polycrystalline silicon.

[0076] [Summary] An inspection table according to Embodiment 1 of the present disclosure is a mobile inspection table having wheels, comprising: a basket support portion having a plurality of through holes and on which a washing basket used for at least one of washing and drying of polycrystalline silicon while containing the polycrystalline silicon is placed; and a support portion that rotatably supports the basket support portion and tilts the basket support portion.

[0077] In the above configuration, the washing basket can be placed directly on the basket support section of the inspection table, allowing for the inspection of polycrystalline silicon. Therefore, with this configuration, there is no need to transfer the polycrystalline silicon from the washing basket to the inspection basket as in the conventional method, thus reducing contamination of the polycrystalline silicon.

[0078] Furthermore, with the above configuration, since the inspection table has wheels, the washing basket, after at least one of washing and drying has been performed, can be placed on the basket support and the inspection table 1 can be pushed to move to the waiting (stock) area or the inspection area.

[0079] Furthermore, according to the above configuration, the support part tilts the basket support part, so by tilting the basket support part at an angle that makes it easy for the worker to visually inspect the inside of the washing basket, for example, the inspection efficiency of polycrystalline silicon can be improved.

[0080] The inspection table according to embodiment 2 of the present disclosure may further include a collection tray positioned below the basket receiving portion to receive fallen objects from the washing basket, as described in embodiment 1.

[0081] According to the above configuration, impurities such as wear particles that fall from the washing basket can be easily collected by receiving them in the collection tray.

[0082] The inspection table according to embodiment 3 of the present disclosure may further include a chute provided between the basket receiving portion and the collection tray, and inclined to decrease in diameter toward the collection tray, in embodiment 2.

[0083] According to the above configuration, impurities such as wear particles that fall from the washing basket (fallen objects) are more easily dropped onto the collection tray.

[0084] In the inspection table according to embodiment 4 of this disclosure, the inclination angle of the chute may be 37 degrees or more in embodiment 3.

[0085] According to the above configuration, by setting the inclination angle of the chute to 37 degrees (angle of repose) or more, falling materials such as wear particles of polycrystalline silicon can move more easily along the chute.

[0086] In the inspection table according to aspect 5 of the present disclosure, in any of aspects 1 to 4, the cage support portion includes a pair of cage support portions arranged side by side in a first direction in a plan view, and the pair of cage support portions may be inclined in a direction that separates them from each other.

[0087] According to the above configuration, each washing basket placed on each pair of basket supports can be tilted, making it easier to inspect the polycrystalline silicon contained in each washing basket simultaneously, thus improving the inspection efficiency of polycrystalline silicon. In addition, it becomes easier to ensure the stability of the inspection table against the shift in the center of gravity caused by tilting each washing basket.

[0088] In the inspection table according to aspect 6 of the present disclosure, in aspect 5, the cage support portion includes a plurality of pairs of cage support portions, and the plurality of pairs of cage support portions may be arranged in a second direction perpendicular to the first direction in a plan view.

[0089] According to the above configuration, polycrystalline silicon contained in two or more washing baskets can be inspected simultaneously, further improving the inspection efficiency of polycrystalline silicon.

[0090] An inspection method according to aspect 7 of the present disclosure is an inspection method for inspecting polycrystalline silicon using a mobile inspection table having wheels, comprising the steps of: washing and drying the polycrystalline silicon while it is housed in a washing basket having a plurality of through holes; placing the washing basket on a basket support portion of the inspection table after washing and drying; and inclining the basket support portion with the washing basket on it and inspecting the polycrystalline silicon.

[0091] In the above method, the washing basket is placed directly on the basket support section of the inspection table to inspect the polycrystalline silicon. Therefore, with this method, there is no need to transfer the polycrystalline silicon from the washing basket to the inspection basket as in the conventional method, and thus contamination of the polycrystalline silicon can be reduced.

[0092] Furthermore, according to the above method, since a mobile inspection table with wheels is used, the washing basket, after at least one of washing and drying has been performed, can be placed on the inspection table and the inspection table can be easily moved to the waiting (stock) area or the inspection area.

[0093] Furthermore, according to the above method, since the basket support is tilted with the washing basket placed on it, the inspection efficiency of polycrystalline silicon is improved by tilting the basket support at an angle that makes it easy for the worker to visually inspect the inside of the washing basket.

[0094] The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in the embodiments are also included within the technical scope of the present invention.

[0095] 1: Inspection table 2: Basket support section 3: Support section 5: Collection tray 6: Chute 34: Rotating shaft 35: Angle adjustment pin 43: Wheel 100: Washing basket H102, H103, H104, H105: Through hole θ1: Inclination angle of basket support section θ2: Inclination angle of chute

Claims

1. A mobile inspection table having wheels, comprising: a basket support section having a plurality of through holes and on which a washing basket used for at least one of washing and drying of polycrystalline silicon while containing the polycrystalline silicon is placed; and a support section that rotatably supports the basket support section and tilts the basket support section.

2. The inspection stand according to claim 1, further comprising a collection tray positioned below the basket support portion to receive objects that have fallen from the washing basket.

3. The inspection table according to claim 2, further comprising a chute provided between the basket receiving portion and the collection tray, and inclined to decrease in diameter toward the collection tray.

4. The inspection table according to claim 3, wherein the inclination angle of the chute is 37 degrees or more.

5. The inspection table according to any one of claims 1 to 4, wherein the cage support portion includes a pair of cage support portions arranged side by side in a first direction in a plan view, and the pair of cage support portions are inclined in a direction that separates them from each other.

6. The inspection table according to claim 5, wherein the cage support portion includes a plurality of pairs of cage support portions, and the plurality of pairs of cage support portions are arranged in a second direction perpendicular to the first direction in a plan view.

7. An inspection method for inspecting polycrystalline silicon using a mobile inspection table having wheels, comprising the steps of: washing and drying the polycrystalline silicon while it is housed in a washing basket having a plurality of through holes formed therein; placing the washing basket on the basket support portion of the inspection table after washing and drying; and inclining the basket support portion with the washing basket on it and inspecting the polycrystalline silicon.

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